Double-sided flat electrode processing method, tooling, system and flat electrode gyroscope

Abstract

The present invention provides a double-sided flat electrode processing method, tooling, system, and flat electrode gyroscope. The double-sided flat electrode line marking processing tool is used to fix the workpiece to be coated, and during the coating process of the workpiece to be coated, a front film layer and a connecting film layer are formed to obtain the workpiece to be scribed, and the side edge of the connecting film layer is used as the characteristic line. After the workpiece to be scribed is transferred to a laser marking machine, the characteristic line is identified by a CCD camera system, and a coordinate system is established based on the characteristic line, so that the laser marking machine can scribe the workpiece to be scribed based on the coordinate system, thereby obtaining a double-sided flat electrode. The present invention solves the technical problem that in the prior art, a photolithography machine is generally used to perform the etching operation of the double-sided flat electrode. When the electrode line pattern needs to be changed, the corresponding photolithography machine mask needs to be replaced or remade, which brings inconvenience to the production of the double-sided flat electrode.

Description

Technical Field

[0001] The present invention belongs to the technical field of electrode line engraving of a flat electrode gyroscope, and in particular relates to a double-sided flat electrode processing method, tooling, system and a flat electrode gyroscope. Background Art

[0002] Flat electrode gyroscopes, especially flat electrode hemispherical resonator gyroscopes, are mainly composed of a hemispherical resonator and a flat electrode. As the core component, the hemispherical resonator realizes the function of the gyroscope through the interaction of the flat electrodes; flat electrode gyroscopes are widely used in many fields due to their advantages of high precision, long life and high reliability. In the application of flat electrode gyroscopes, double-sided flat electrodes have been widely welcomed due to their uniform electric field distribution, high efficiency, strong adaptability and easy integration. In the production and manufacturing of double-sided flat electrodes, it is generally necessary to coat the front, back and side surfaces of the double-sided flat electrodes to form a film layer, and then etch the film layer to form multiple independent sub-electrodes.

[0003] In the prior art, during the manufacturing process of double-sided flat electrodes, a photolithography machine is generally used to etch the film layer of the double-sided flat electrode to form a sub-electrode. During use, the photolithography machine needs to be equipped with a specific photolithography machine mask to allow the etching light to pass through the preset pattern on the photolithography machine mask, thereby performing a film etching operation on the double-sided flat electrode to be processed to form the required sub-electrode.

[0004] However, in the actual large-scale production process, when using a photolithography machine to process double-sided flat electrodes, it is necessary to perform multiple cycles of cleaning, double-sided gluing, double-sided exposure, development, etching, and degumming on the double-sided flat electrodes to be processed. In particular, when etching the sides and backs, each step must be precisely controlled, otherwise defects will easily occur, making the product a defective product. In production, when the graphic design of the sub-electrode needs to be adjusted or replaced, the corresponding photolithography machine mask needs to be replaced in the photolithography machine. In particular, when customized or newly designed sub-electrodes need to be made, the corresponding photolithography machine mask needs to be remade, which brings great inconvenience and high production costs to the production of double-sided flat electrodes, and thus brings resistance to the production and promotion of double-sided flat electrodes and flat electrode gyroscopes. Summary of the Invention

[0005] In order to solve the technical problem in the background technology that when using a photolithography machine to process double-sided flat electrodes, the process is cumbersome and defective products are easily produced, especially when it is necessary to replace the line pattern of the sub-electrode, the corresponding photolithography machine mask needs to be replaced or even remade, which brings inconvenience to the production of double-sided flat electrodes, the present invention provides a double-sided flat electrode processing method, tooling, system and flat electrode gyroscope.

[0006] In order to achieve the above object, the present invention adopts the following technical solutions:

[0007] In a first aspect, the present invention provides a method for processing a double-sided flat electrode, comprising the steps of:

[0008] S1: Fix the workpiece to be coated by double-sided flat electrode marking tooling;

[0009] S2: Coating the workpiece to be coated to form a front film layer on the front surface of the workpiece to be coated, and forming a plurality of connected film layers having characteristic lines on the side surfaces of the workpiece to be coated, to obtain a workpiece to be scribed; wherein the top end of each connected film layer extends to the front surface of the workpiece to be scribed and is connected to the front film layer, and the bottom end of each connected film layer extends to the back surface of the workpiece to be scribed; the characteristic lines are side edges of the connected film layers, which connect from the front surface to the back surface of the workpiece to be scribed;

[0010] S3: transferring the workpiece to be scribed to a laser marking machine;

[0011] S4: Identify the characteristic line; establish a coordinate system based on the characteristic line, and use the laser marking machine to mark the front film layer and the connecting film layer to form a double-sided flat electrode.

[0012] Optionally, step S1 includes:

[0013] S1.1: Place the workpiece to be coated in the mounting position on the base of the double-sided flat electrode marking tool;

[0014] S1.2: Covering the tooling mask of the double-sided flat electrode marking tooling on the workpiece to be coated;

[0015] S1.3: The tooling mask is fixedly mounted on the base of the double-sided flat electrode marking tooling to fix the workpiece to be coated in the mounting position.

[0016] Optionally, step S4 includes:

[0017] S4.1: Identifying the center of the front surface of the workpiece to be scribed and the characteristic line on the front surface of the workpiece to be scribed, and establishing a coordinate system based on the center of the front surface and the characteristic line;

[0018] S4.2: Using the laser marking machine, based on the coordinate system, laser marking is performed on the front film layer and the connecting film layer respectively to form the double-sided flat electrode.

[0019] Optionally, step S4.1 includes:

[0020] S4.1.1: Identify the center of the front face of the workpiece to be scribed, and use the center of the front face as the origin;

[0021] S4.1.2: Identify a portion of any of the characteristic lines on the front surface of the workpiece to be scribed as a first characteristic line, and take a straight line passing through the origin and parallel to the first characteristic line as the X-axis;

[0022] Identify a portion of any of the characteristic lines on the side of the workpiece to be scribed as a second characteristic line, and take a straight line passing through the origin and parallel to the second characteristic line as the Y axis;

[0023] S4.1.3: Take a straight line passing through the origin and perpendicular to the X-axis and the Y-axis as the Z-axis to obtain the coordinate system.

[0024] Optionally, step S4.2 includes:

[0025] S4.2.1: Using the laser marking machine, laser marking the front film layer and the connecting film layer on the front surface of the workpiece to be marked based on the coordinate system;

[0026] S4.2.2: Adjust the posture of the workpiece to be engraved;

[0027] S4.2.3: Laser scribing the connecting film layer on the side surface of the workpiece to be scribed;

[0028] S4.2.4: Adjust the posture of the workpiece to be engraved;

[0029] S4.2.5: Laser scribe the connecting film layer on the back side of the workpiece to be scribed to form the double-sided flat electrode.

[0030] Optionally, in step S4.2.2 and step S4.2.4, adjusting the posture of the workpiece to be engraved includes: performing any one or more operations of flipping, translating or rotating the workpiece to be engraved based on the coordinate system.

[0031] In a second aspect, the present invention further provides a double-sided flat electrode processing tool, which is applied to any of the above double-sided flat electrode processing methods, comprising: a base and a tool mask;

[0032] The base is provided with a mounting position;

[0033] The tooling mask is detachably connected to the base, and a receiving space is formed between the tooling mask and the mounting position, and the receiving space is used to receive a workpiece to be coated;

[0034] The base is detachably mounted on the coating device and is used to drive the workpiece to be coated to rotate during the coating process so as to coat the workpiece to be coated;

[0035] The tooling mask is used to fix the workpiece to be coated in the installation position, and during the coating process, form a front film layer and multiple connected film layers on the workpiece to be coated.

[0036] Optionally, the tooling mask is provided with a first coating tank and a plurality of second coating tanks;

[0037] The first coating tank is arranged at the center of the tooling mask and is connected to the accommodating space, and is used to form the front film layer on the front surface of the workpiece to be coated during the coating process;

[0038] A plurality of second coating tanks are sequentially arranged around the periphery of the first coating tank, and a connecting port is provided on the second coating tank, which connects the accommodating space with the second coating tank. The connecting port is used to form the connecting film layer on the workpiece to be coated during the coating process.

[0039] In a third aspect, the present invention further provides a double-sided flat electrode processing system, the double-sided flat electrode processing system comprising a coating device, a CCD camera system, a laser marking machine, and any of the above double-sided flat electrode processing tooling;

[0040] The double-sided flat electrode processing tooling is installed on the coating equipment to fix the workpiece to be coated and to form a front film layer and a connecting film layer during the coating process of the workpiece to be coated;

[0041] The coating equipment is used to drive the double-sided flat electrode processing tooling to rotate and coat the workpiece to be coated to obtain a workpiece to be engraved;

[0042] The CCD camera system is electrically connected to the laser marking machine and is used to identify the characteristic lines and the center of the front surface of the workpiece to be marked;

[0043] The laser marking machine is used to establish a coordinate system based on the characteristic line and the center of the front circle, and to laser mark the workpiece to be marked based on the coordinate system to obtain a double-sided flat electrode.

[0044] In a fourth aspect, the present invention also provides a flat electrode gyroscope, which includes a double-sided flat electrode and a gyroscope body, wherein the double-sided flat electrode is obtained by processing based on any of the double-sided flat electrode processing methods described above; the double-sided flat electrode is arranged in the gyroscope body.

[0045] The beneficial effects of the present invention are:

[0046] (1) The present invention coats the workpiece to be coated by a double-sided flat electrode processing tool, thereby forming a front film layer and a connected film layer with characteristic lines on the workpiece to be coated, and establishing a coordinate system based on the characteristic lines. The front film layer and the connected film layer are scribed by a laser engraving machine based on the coordinate system to form sub-electrodes, thereby obtaining a double-sided flat electrode, which is simple to operate and has reliable accuracy. During use, when it is necessary to modify, adjust or replace the pattern of the electrode engraving, it is only necessary to operate and modify the engraving graphic parameters of the laser engraving machine without replacing or remaking the photomask of the photolithography machine, which greatly improves the work efficiency and applicability, and has positive significance for the application and promotion of double-sided flat electrodes and flat electrode gyroscopes.

[0047] (2) In the prior art, double-sided flat electrodes are generally obtained by etching the film layer using a photolithography machine. However, the photolithography machine has the problem of high cost and high maintenance cost, and thus has an extremely high threshold, which has brought great resistance to the large-scale production and use of double-sided flat electrodes. The double-sided flat electrode processing method and system provided by the present invention uses a CCD camera system to identify the characteristic lines on the workpiece to be etched and establish a coordinate system, and uses a laser etcher to perform electrode etch production, thereby eliminating the need for a photolithography machine and greatly reducing the production cost and threshold of the double-sided flat electrode.

[0048] (3) In the present invention, in the same coordinate system, the laser marking machine performs linked laser marking processing on the side and front of the workpiece to be marked, thereby ensuring the overall marking accuracy of the formed double-sided flat electrode. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] Figure 1 It is a schematic flow chart of the double-sided flat electrode processing method of the present invention;

[0050] Figure 2 is a schematic diagram of the first characteristic line of the present invention;

[0051] Figure 3 is a schematic diagram of the second characteristic line of the present invention;

[0052] Figure 4 is a cross-sectional view of a double-sided flat electrode processing tool in the present invention;

[0053] Figure 5 It is a schematic diagram of the double-sided flat electrode processing tooling in the present invention.

[0054] Among them: 1. Base; 2. Tooling mask; 21. First coating tank; 22. Second coating tank; 23. Connecting port; 3. Workpiece to be coated. DETAILED DESCRIPTION

[0055] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. The following description of at least one exemplary embodiment is actually only illustrative and is in no way intended to limit the present invention and its application or use. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0056] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, operations, devices, components and / or combinations thereof.

[0057] Unless otherwise specifically stated, the relative arrangement of the parts and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention. At the same time, it should be clear that, for ease of description, the sizes of the various parts shown in the drawings are not drawn according to actual proportional relationships. The technology, methods and equipment known to those of ordinary skill in the relevant art may not be discussed in detail, but in appropriate cases, the technology, methods and equipment should be considered as part of the specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that similar numbers and letters represent similar items in the following drawings, and therefore, once an item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings.

[0058] In the description of the present invention, it should be understood that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "horizontal, vertical, vertical, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the device or element referred to must have a specific direction or be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the scope of protection of the present invention: the directional words "inside and outside" refer to the inside and outside relative to the outline of each component itself.

[0059] For ease of description, spatially relative terms such as "above," "above," "on the upper surface of," and "upper" may be used herein to describe the spatial positional relationship of a device or feature to other devices or features as shown in the figures. It should be understood that spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in a drawing is inverted, a device described as "above" or "on top of" another device or structure would then be positioned as "below" or "below" the other device or structure. Thus, the exemplary term "above" can include both the "above" and "below" orientations. The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used herein should be interpreted accordingly.

[0060] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of the present invention.

[0061] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments of the present invention can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0062] Double-sided flat electrodes have been widely used in flat-electrode gyros, particularly hemispherical resonator gyros, due to their uniform electric field distribution, high efficiency, strong adaptability, and ease of integration. However, in the prior art, during the manufacturing process of double-sided flat electrodes, a photolithography machine is typically used to etch the film layer of the double-sided flat electrode to form the sub-electrodes.

[0063] However, since the etching operation of the lithography machine requires a precise and specific lithography mask to carry out, and the double-sided flat electrode is patterned on the front, side and even back of the electrode, in the process of using the lithography machine to process the double-sided flat electrode, it is necessary to perform multiple cycles of cleaning, double-sided gluing, double-sided exposure, development, etching, and degumming on the double-sided flat electrode to be processed. Especially when etching the side and back, each step requires precise control, otherwise defects are likely to occur, making the product a defective product; whenever the design pattern of the double-sided flat electrode needs to be replaced, the corresponding lithography mask needs to be remade or replaced, which brings great inconvenience to the production of double-sided flat electrodes; at the same time, since the lithography machine has the characteristics of high technical complexity and specific application fields, the equipment price generally ranges from hundreds of thousands to hundreds of millions of yuan, and the maintenance cost is high, which brings extremely high barriers and resistance to the production of double-sided flat electrodes and flat electrode gyroscopes.

[0064] Example 1

[0065] First, see Figure 1 , shows a schematic diagram of a general process of a double-sided flat electrode processing method provided in the present invention, the processing method basically includes the following steps:

[0066] S1: Fixing the workpiece 3 to be coated;

[0067] S2: Coating the workpiece 3 to be coated to form a front film layer and a connected film layer with characteristic lines, and obtaining a workpiece to be scribed;

[0068] S3: Transfer the workpiece to be scribed to the laser marking machine;

[0069] S4: Identify the characteristic lines, establish a coordinate system based on the characteristic lines, and scribe lines on the front film layer and the connecting film layer to form a double-sided flat electrode.

[0070] Specifically, the processing method provided by the present invention includes the following steps:

[0071] S1: Fix the workpiece 3 to be coated by a double-sided flat electrode marking tool;

[0072] S2: Coating the workpiece 3 to be coated to form a front film layer on the front surface of the workpiece 3 to be coated, and forming a plurality of connected film layers having characteristic lines on the side surfaces of the workpiece 3 to be coated, thereby obtaining a workpiece to be scribed; wherein the top of each connected film layer extends to the front surface of the workpiece to be scribed and is connected to the front film layer, and the bottom of each connected film layer extends to the back surface of the workpiece to be scribed; the characteristic lines are side edges of the connected film layers, which connect from the front surface to the back surface of the workpiece to be scribed;

[0073] S3: transferring the workpiece to be scribed to a laser marking machine;

[0074] S4: Identify the characteristic line; establish a coordinate system based on the characteristic line, and use the laser marking machine to mark the front film layer and the connecting film layer to form a double-sided flat electrode.

[0075] In this embodiment, a double-sided flat electrode processing method is provided, in which the workpiece to be coated 3 is fixed by a double-sided flat electrode engraving processing tool, and in the process of coating the workpiece to be coated 3, a front film layer and a connecting film layer are formed to obtain a workpiece to be engraved, and the side of the connecting film layer is used as a characteristic line; the workpiece to be engraved is transferred to a laser engraving machine, the characteristic line is identified by a CCD camera system, and a coordinate system is established based on the characteristic line, so that the laser engraving machine engraves the workpiece to be engraved based on the coordinate system, thereby obtaining a double-sided flat electrode.

[0076] The double-sided flat electrode processing method provided by the present invention does not require a photolithography machine to perform film etching on the double-sided flat electrode. When the design pattern of the sub-electrode needs to be replaced during use, it is only necessary to operate and modify the engraving graphic parameters of the laser engraving machine without replacing or remaking the photolithography machine mask, thereby greatly improving work efficiency. At the same time, the present invention uses a relatively low-priced laser engraving machine to etch the workpiece to be engraved, thereby obtaining a double-sided flat electrode, which greatly reduces the production cost and threshold of the double-sided flat electrode and the flat electrode gyroscope.

[0077] Optionally, step S1 in the present invention includes:

[0078] S1.1: Place the workpiece 3 to be coated in the mounting position on the double-sided flat electrode marking tool base 1;

[0079] S1.2: Cover the tooling mask 2 of the double-sided flat electrode marking tooling on the workpiece 3 to be coated;

[0080] S1.3: Fix the tooling mask 2 on the base 1 of the double-sided flat electrode marking tooling to fix the workpiece 3 to be coated in the mounting position.

[0081] Optionally, step S4 in the present invention includes:

[0082] S4.1: Identifying the center of the front surface of the workpiece to be scribed and the characteristic line on the front surface of the workpiece to be scribed, and establishing a coordinate system based on the center of the front surface and the characteristic line;

[0083] S4.2: Using the laser marking machine, based on the coordinate system, laser marking is performed on the front film layer and the connecting film layer respectively to form the double-sided flat electrode.

[0084] Furthermore, step S4.1 may include:

[0085] S4.1.1: Identify the center of the front face of the workpiece to be scribed and use the center of the front face as the origin;

[0086] S4.1.2: Identify the portion of any characteristic line on the front face of the workpiece to be marked as the first characteristic line, refer to Figure 2 , take a straight line passing through the origin and parallel to the first characteristic line as the X-axis;

[0087] Identify the part of any characteristic line on the side of the workpiece to be engraved as the second characteristic line, refer to Figure 3 , take a straight line passing through the origin and parallel to the second characteristic line as the Y axis;

[0088] S4.1.3: Obtain a coordinate system by taking a line through the origin and perpendicular to the X and Y axes as the Z axis.

[0089] In this embodiment, the CCD camera system can be used to capture the center of the front circle of the workpiece to be engraved, and the center of the front circle is used as the origin; and the characteristic lines of the connected film layers are captured and identified, and the first characteristic line and the second characteristic line are set respectively. A straight line passing through the origin and parallel to the first characteristic line is taken as the X-axis, and a straight line passing through the origin and parallel to the second characteristic line is taken as the Y-axis; then based on the X-axis, Y-axis and origin, the Z-axis is obtained, thereby establishing a coordinate system based on the workpiece to be engraved in the laser engraving machine; in subsequent processes, the laser engraving machine can perform laser engraving operations on the workpiece to be engraved based on the coordinate system, thereby forming a double-sided flat plate electrode.

[0090] Furthermore, step S4.2 includes:

[0091] S4.2.1: Using a laser marking machine, laser mark the front film layer and the connecting film layer on the front surface of the workpiece to be marked based on the coordinate system;

[0092] S4.2.2: Adjust the posture of the workpiece to be engraved;

[0093] S4.2.3: Laser scribing the connected film layer on the side of the workpiece to be scribed;

[0094] S4.2.4: Adjust the posture of the workpiece to be engraved;

[0095] S4.2.5: Laser scribe the connecting film layer on the back side of the workpiece to be scribed to form the double-sided flat electrode.

[0096] In this embodiment, a laser marking machine can first be used to laser mark the front and connecting film layers on the front face of the workpiece to be marked, based on a coordinate system. Then, based on the same coordinate system, after adjusting the workpiece's posture, the connecting film layers on the side and back faces are laser marked sequentially, thereby forming a double-sided flat electrode. Laser marking the front, side, and back faces of the workpiece to be marked sequentially within the same coordinate system, achieving coordinated marking operations on the front, side, and back faces of the workpiece to be marked, ensuring the overall marking accuracy of the double-sided flat electrode.

[0097] Specifically, after laser marking the front film layer of the workpiece to be marked, the workpiece to be marked is rotated 90° around the X axis, and then the side and back sides of the workpiece to be marked are marked by a laser marking machine to obtain a double-sided flat electrode.

[0098] Furthermore, in some specific process steps, it is not necessary to scribe the connecting film layer on the back of the workpiece to be scribed. Those skilled in the art may choose whether to perform steps S4.2.4 and S4.2.5 according to actual design requirements.

[0099] Optionally, in step S4.2.2 and step S4.2.4 of the present invention, adjusting the posture of the workpiece to be engraved includes: performing any one or more operations of flipping, translating or rotating the workpiece to be engraved based on the coordinate system.

[0100] In this embodiment, the posture adjustment of the workpiece to be engraved includes: performing any one or more operations of flipping, translating or rotating the workpiece to be engraved based on the coordinate system, so that the front, side and back of the workpiece to be engraved by the laser engraving machine can be linked to ensure the overall engraving accuracy of the double-sided flat electrode formed.

[0101] Furthermore, the double-sided flat electrode formed in the present invention includes a plurality of independent sub-electrodes formed by laser scribing the front film layer and the connecting film layer.

[0102] Example 2

[0103] Secondly, refer to Figure 4 and Figure 5 The present invention also provides a double-sided flat electrode processing tool, which is applied to any double-sided flat electrode processing method in Example 1, including: a base 1 and a tool mask 2; a mounting position is provided on the base 1; the tool mask 2 is detachably connected to the base 1, and a receiving space is formed between the tool mask 2 and the mounting position, and the receiving space is used to receive a workpiece 3 to be coated; the base 1 is detachably mounted on the coating equipment, and is used to drive the workpiece 3 to be coated to rotate during the coating process so as to coat the workpiece 3 to be coated; the tool mask 2 is detachably mounted on the base 1, and is used to fix the workpiece 3 to be coated in the mounting position, and to form a front film layer and multiple connected film layers on the workpiece 3 to be coated during the coating process.

[0104] In this embodiment, a double-sided flat electrode processing tool is provided. When applied to any of the double-sided flat electrode processing methods described in Example 1, the workpiece 3 to be coated is first placed on the mounting position, and then the tool mask 2 is connected to the base 1 to fix the workpiece 3 to be coated; during the coating process, a front film layer and a connecting film layer are formed on the workpiece 3 to be coated through the tool mask 2 to obtain a workpiece to be engraved.

[0105] Furthermore, the tooling mask 2 can be connected to the base 1 by screws, buckles or other detachable methods known to those skilled in the art, which is not specifically limited in this embodiment.

[0106] Optionally, refer to Figure 4 and Figure 5The tooling mask 2 described in the present invention is provided with a first coating tank 21 and a plurality of second coating tanks 22; the first coating tank 21 is arranged at the center position of the tooling mask 2 and is connected to the accommodating space, and is used to form a front film layer on the front face of the workpiece 3 to be coated during the coating process; a plurality of second coating tanks 22 are sequentially arranged around the first coating tank 21, and a connecting port 23 is provided on the second coating tank 22, which connects the accommodating space with the second coating tank 22, and the connecting port 23 is used to form a connecting film layer on the side face of the workpiece 3 to be coated during the coating process.

[0107] In this embodiment, the tooling mask 2 is provided with a first coating tank 21, located at the center of the tooling mask 2 and connected to the storage space; and a plurality of second coating tanks 22, sequentially arranged around the first coating tank 21. The second coating tanks 22 are provided with communication ports 23, which connect the storage space with the second coating tanks 22. Specifically, the coating apparatus first coats the front surface of the workpiece 3 to be coated using the first coating tank 21 to form a front coating layer; then, coating is sequentially performed using the second coating tanks 22 and communication ports 23, forming a connected film layer on the side surface of the workpiece 3 to be coated.

[0108] Furthermore, the tooling mask 2 in the present invention is made of polytetrafluoroethylene.

[0109] In this embodiment, the tooling mask 2 may be made of polytetrafluoroethylene to reduce the risk of scratching the film layer formed by the coating and the workpiece surface.

[0110] Example 3

[0111] In a third aspect, the present invention further provides a double-sided flat electrode processing system, which is used for any of the double-sided flat electrode processing methods in Example 1. The double-sided flat electrode processing system includes a coating device, a CCD camera system, a laser marking machine, and any of the double-sided flat electrode processing tooling provided in Example 2 above.

[0112] Among them, the double-sided flat electrode processing tooling is installed on the coating equipment to fix the workpiece 3 to be coated and form the front film layer and the connecting film layer during the coating process of the workpiece 3 to be coated;

[0113] The coating equipment is used to drive the double-sided flat electrode processing tooling to rotate and coat the workpiece to be coated 3 to obtain a workpiece to be engraved;

[0114] The CCD camera system is electrically connected to the laser marking machine to identify the characteristic lines and the center of the front circle on the workpiece to be marked;

[0115] The laser marking machine is used to establish a coordinate system based on the characteristic line and the center of the front circle, and based on the coordinate system, laser mark the workpiece to be marked to obtain a double-sided flat electrode.

[0116] In this embodiment, a double-sided flat electrode processing system is provided, which is used based on any double-sided flat electrode processing method in Example 1. It should be noted that the double-sided flat electrode processing system provided in this embodiment is completely corresponding to the double-sided flat electrode processing method in Example 1, and its beneficial effects are also similar, so they will not be repeated here.

[0117] Furthermore, in this embodiment, the laser marking machine should include a laser module, a mechanical motion module, a control module and an auxiliary module to achieve the establishment of a coordinate system and accurate marking.

[0118] Example 4

[0119] The present invention also provides a flat electrode gyroscope, which includes a double-sided flat electrode and a gyroscope body. The double-sided flat electrode is obtained by processing the double-sided flat electrode processing method based on Example 1, and the double-sided flat electrode is arranged in the gyroscope body.

[0120] In this embodiment, a flat electrode gyroscope is provided. It should be noted that the double-sided flat electrode processing method provided in this embodiment is completely corresponding to the double-sided flat electrode processing method in Example 1, and the beneficial effects are also similar, which will not be repeated here.

Claims

1. A method for processing a double-sided flat electrode, characterized in that: Including steps: S1: Fixing the workpiece (3) to be coated by a double-sided flat electrode processing tool; wherein the double-sided flat electrode processing tool comprises: a base (1) and a tool mask (2); The base (1) is provided with a mounting position; The tooling mask (2) is detachably connected to the base (1), and a receiving space is formed between the tooling mask (2) and the mounting position, wherein the receiving space is used to receive a workpiece (3) to be coated; The base (1) is detachably mounted on the coating device and is used to drive the workpiece (3) to be coated to rotate during the coating process, so as to coat the workpiece (3) to be coated; S2: coating the workpiece (3) to be coated to form a front film layer on the front surface of the workpiece (3) to be coated, and forming a plurality of connected film layers with characteristic lines on the side surface of the workpiece (3) to be coated, thereby obtaining a workpiece to be scribed; wherein the tooling mask (2) is used to fix the workpiece (3) to be coated in the mounting position, and during the coating process, a front film layer and a plurality of connected film layers are formed on the workpiece (3) to be coated; the top end of each connected film layer extends to the front surface of the workpiece to be scribed and is connected to the front film layer, and the bottom end of each connected film layer extends to the back surface of the workpiece to be scribed; the characteristic line is a side edge of the connected film layer, which is connected from the front surface to the back surface of the workpiece to be scribed; S3: transferring the workpiece to be scribed to a laser marking machine; S4: Identify the characteristic line; establish a coordinate system based on the characteristic line, and use the laser marking machine to mark the front film layer and the connecting film layer to form a double-sided flat electrode; wherein, step S4 specifically includes: S4.1: Using a CCD camera system, identifying the center of the front surface of the workpiece to be scribed and the characteristic line, and establishing a coordinate system based on the center of the front surface and the characteristic line; S4.2: Using the laser marking machine, based on the coordinate system, laser marking is performed on the front film layer and the connecting film layer respectively to form the double-sided flat electrode.

2. The double-sided flat electrode processing method according to claim 1, characterized in that: The step S1 comprises: S1.1: placing the workpiece to be coated (3) in a mounting position on the base (1) of the double-sided flat electrode processing tool; S1.2: Covering the tool mask (2) of the double-sided flat electrode processing tool on the workpiece to be coated (3); S1.3: The tooling mask (2) is fixedly mounted on the base (1) of the double-sided flat electrode processing tooling to fix the workpiece (3) to be coated in the mounting position.

3. The double-sided flat electrode processing method according to claim 2, characterized in that: The step S4.1 includes: S4.1.1: Identify the center of the front face of the workpiece to be scribed, and use the center of the front face as the origin; S4.1.2: Identify a portion of any of the characteristic lines on the front surface of the workpiece to be scribed as a first characteristic line, and take a straight line passing through the origin and parallel to the first characteristic line as the X-axis; Identify a portion of any characteristic line on the side of the workpiece to be scribed as a second characteristic line, and take a straight line passing through the origin and parallel to the second characteristic line as the Y axis; S4.1.3: Take a straight line passing through the origin and perpendicular to the X-axis and the Y-axis as the Z-axis to obtain the coordinate system.

4. The method for processing a double-sided flat electrode according to claim 3, wherein: The step S4.2 includes: S4.2.1: Using the laser marking machine, laser marking the front film layer and the connecting film layer on the front surface of the workpiece to be marked based on the coordinate system; S4.2.2: Adjust the posture of the workpiece to be engraved; S4.2.3: Laser scribing the connecting film layer on the side surface of the workpiece to be scribed; S4.2.4: Adjust the posture of the workpiece to be engraved; S4.2.5: Laser scribe the connecting film layer on the back side of the workpiece to be scribed to form the double-sided flat electrode.

5. The method for processing a double-sided flat electrode according to claim 4, wherein: In the step S4.2.2 and the step S4.2.4, the posture adjustment of the workpiece to be engraved includes: performing any one or more operations of flipping, translating or rotating the workpiece to be engraved based on the coordinate system.

6. The method for processing a double-sided flat electrode according to claim 1, wherein: A first coating tank (21) and a plurality of second coating tanks (22) are provided on the tool mask (2) of the double-sided flat electrode processing tool; The first coating tank (21) is arranged at the center of the tooling mask (2) and is connected to the accommodating space, and is used to form the front film layer on the front surface of the workpiece (3) to be coated during the coating process; A plurality of second coating tanks (22) are sequentially arranged around the periphery of the first coating tank (21), and a connecting port (23) is provided on the second coating tank (22). The connecting port (23) connects the accommodating space with the second coating tank (22), and the connecting port (23) is used to form the connecting film layer on the workpiece to be coated (3) during the coating process.

7. A double-sided flat electrode processing system, used to implement the double-sided flat electrode processing method according to any one of claims 1 to 6, characterized in that: The double-sided flat electrode processing system includes a coating device, a CCD camera system, a laser marking machine, and a double-sided flat electrode processing tooling; The double-sided flat electrode processing tooling is installed on the coating equipment, and is used to fix the workpiece (3) to be coated, and to form a front film layer and a connecting film layer during the coating process of the workpiece (3) to be coated; The coating equipment is used to drive the double-sided flat electrode processing tooling to rotate, and to coat the workpiece (3) to be coated, thereby obtaining a workpiece to be engraved; The CCD camera system is electrically connected to the laser marking machine and is used to identify the characteristic lines and the center of the front surface of the workpiece to be marked; The laser marking machine is used to establish a coordinate system based on the characteristic line and the center of the front circle, and to laser mark the workpiece to be marked based on the coordinate system to obtain a double-sided flat electrode.

8. A flat electrode gyroscope, characterized in that: The flat electrode gyroscope includes a double-sided flat electrode and a gyroscope body. The double-sided flat electrode is obtained by processing based on the double-sided flat electrode processing method according to any one of claims 1 to 6; the double-sided flat electrode is arranged in the gyroscope body.

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