High-purity diaphragm valve for electronic special gas

Abstract

The invention belongs to the technical field of diaphragm valves, and particularly relates to a high-purity diaphragm valve for electronic special gas. Comprising a valve body, an air inlet channel and an air outlet channel are formed in the valve body and communicate with an air inlet and an air outlet from a bottom valve port correspondingly, a top valve port communicating with the top of the valve body is formed in the air outlet channel, and an air outlet operation assembly is arranged in the top valve port and used for controlling opening and closing of the air outlet channel. A lateral valve port communicated to the side face of the valve body is formed in the air inlet channel, the lateral valve port is provided with an air inlet operation assembly used for controlling the air inlet channel to be opened and closed, the air inlet operation assembly and the air exhaust operation assembly are both opened, inert gas is filled from the air inlet channel to purge residual gas in an air bottle and the valve body, and the residual gas is exhausted from the air exhaust channel. An adjusting assembly is further arranged in the valve body and connected between the gas inlet operation assembly and the gas exhaust operation assembly, and the adjusting assembly automatically adjusts connection and disconnection of the gas inlet channel according to the gas pressure of a bottom valve port in the gas cylinder. Gas leakage can be avoided, and the use safety can be improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of diaphragm valves, and particularly relates to a high-purity diaphragm valve for electronic special gases. Background Art

[0002] A diaphragm valve is a valve that uses a flexible diaphragm to isolate the flow path inside the valve from the driving component. Its unique structural design enables it to be widely used in multiple industrial fields. A diaphragm valve mainly consists of a valve body, a valve cover, a diaphragm, a valve stem, and a driving device. Its core component is the diaphragm, which divides the valve cavity into upper and lower parts. The upper part is the driving component, and the lower part is the flow path. When the driving device drives the valve stem to move up and down, the diaphragm deforms accordingly, realizing the opening and closing of the valve. According to the structural form, diaphragm valves can be divided into weir type, straight-through type, angle type, and direct-flow type, etc. The diaphragm completely isolates the flow path inside the valve from the driving component, avoiding the possibility of the medium leaking to the outside, and is especially suitable for working conditions of toxic, harmful, flammable, and explosive dangerous media.

[0003] When a diaphragm valve is used in the field of electronic special gases, since electronic special gases are high-purity gases used in the production of electronic industries such as semiconductors, display panels, and photovoltaics, and are mainly used in processes such as thin film deposition, etching, cleaning, and doping. These gases have extremely high requirements for purity, precision, and stability, directly affecting the performance of electronic products. And many electronic special gases are toxic, corrosive, or flammable, and strict safety measures are required. When taking and placing electronic special gases through cylinders storing electronic special gases, it is necessary to ensure safety during use and avoid leakage of the internal electronic special gases. Especially when the pressure of the electronic special gases in the cylinder is too low to continue releasing, there is still some electronic special gas inside that has not been discharged. In order to ensure safety during the next filling of the cylinder and prevent corrosion of the inside of the cylinder due to the reaction between the residual electronic special gas in the cylinder and air, it is necessary to purge the gas inside the cylinder thoroughly. In the prior art, generally, the valve is disassembled and directly cleaned. However, this method is not only cumbersome to operate but also causes leakage of the residual electronic special gas in the cylinder. To avoid this problem, it is necessary to design a high-purity diaphragm valve for electronic special gases, which can meet the requirements for filling cylinders and can also be used to avoid leakage of electronic special gases when purging and cleaning cylinders. Summary of the Invention

[0004] To solve the above problems existing in the prior art, the present invention provides a high-purity diaphragm valve for electronic special gases.

[0005] The object of the present invention can be achieved by the following technical solutions:

[0006] A high-purity diaphragm valve for electronic special gases according to the present invention includes a valve body. An air inlet channel and an exhaust channel are provided on the valve body and communicate with an air inlet and an air outlet respectively from a bottom valve port. A top valve port communicating with the top of the valve body is provided in the exhaust channel. An exhaust operation assembly is arranged in the top valve port for controlling the opening and closing of the exhaust channel. A lateral valve port communicating with the side of the valve body is provided in the air inlet channel. An air inlet operation assembly is arranged at the lateral valve port for controlling the opening and closing of the air inlet channel. Both the air inlet operation assembly and the exhaust operation assembly are opened, and inert gas is filled into the air inlet channel to purge the residual gas in the gas cylinder and the valve body and discharged from the exhaust channel.

[0007] Further, the exhaust operation assembly includes a valve seat, a diaphragm, a pressing ring, a valve core, a first spring and a first valve rod. The pressing ring squeezes the edge of the diaphragm on a step in the exhaust channel. The top of the valve seat penetrates through the diaphragm and is connected to the bottom of the valve core. The first spring is arranged between the pressing ring and the valve core for pushing the valve core and the valve seat to reset. The first valve rod is in threaded engagement with the top valve port. The first valve rod abuts against the top of the valve core for pushing the valve seat to move up and down and controlling the on-off of the exhaust channel.

[0008] Further, the air inlet operation assembly includes a second valve rod, a second handwheel and a sealing ring. The second valve rod is in threaded engagement in the lateral valve port. The sealing ring is arranged between the second valve rod and the lateral valve port. The second handwheel is connected to the end of the second valve rod. The second valve rod moves horizontally in the lateral valve port and controls the on-off of the air inlet channel.

[0009] Further, an adjusting assembly is also arranged in the valve body. The adjusting assembly is connected between the air inlet operation assembly and the exhaust operation assembly. The adjusting assembly automatically adjusts the on-off of the air inlet channel according to the air pressure of the bottom valve port in the gas cylinder.

[0010] Further, the adjusting assembly includes a check valve and a transmission mechanism. The check valve is connected to the transmission mechanism. The check valve is spherical and rotatably arranged in the air inlet channel. The transmission mechanism is arranged in a transmission channel communicating between the air inlet channel and the exhaust channel. The transmission mechanism adjusts the on-off of the air inlet channel according to the air pressure of the bottom valve port in two states of the on-off of the exhaust channel.

[0011] Further, the transmission channel includes a horizontal channel and a vertical channel. The transmission mechanism includes a driving rod. The driving rod is slidably arranged in the vertical channel. The driving rod drives the check valve to rotate according to the air pressure for controlling the on-off of the air inlet channel.

[0012] Further, the driving rod includes a sliding sleeve, a sliding rod, and a second spring. The sliding sleeve is slidably disposed in the vertical channel. The second spring is disposed in the sliding sleeve. The sliding rod is slidably disposed in the sliding sleeve and abuts against the end of the second spring. A thread is provided in the sliding sleeve and meshes with the sliding rod. The end of the sliding rod is connected to the one-way valve, and the sliding rod rotates as the sliding sleeve moves up and down.

[0013] Further, the adjusting assembly further includes a pushing mechanism. The pushing mechanism is disposed in the valve seat. A horizontal sliding plate is provided in the horizontal channel. The pushing mechanism pushes the horizontal sliding plate to slide horizontally according to the air pressure in the exhaust passage, and the horizontal sliding plate slides horizontally according to the thrust of the pushing assembly and the air pressure in the exhaust passage.

[0014] Further, the pushing mechanism includes a vertical sliding plate, a third spring, and a push rod. The third spring is connected to the bottom of the valve seat. The vertical sliding plate is slidably disposed at the bottom of the valve seat and connected to the third spring. The side surface of the vertical sliding plate is an inclined surface. The push rod is slidably disposed on the side of the valve seat and abuts against the side surface of the vertical sliding plate. The push rod horizontally expands and contracts as the vertical sliding plate moves up and down to push the horizontal sliding plate.

[0015] Further, the diameter of the horizontal channel is larger than the diameter of the vertical channel.

[0016] The beneficial effects of the present invention are as follows:

[0017] (1) By simultaneously providing an air inlet passage and an exhaust passage on the valve and connecting them to the bottom valve port, the air inlet passage can be filled with inert gas to purge the gas cylinder and the valve, which can avoid partial electronic special gas remaining in the gas cylinder and the valve, and can also complete the cleaning of the gas cylinder and the valve without removing the valve, which can prevent the leakage of electronic special gas and improve the use safety.

[0018] (2) By providing an adjusting assembly, when the air pressure inside the gas cylinder is low, the one-way valve will be in a state of being in communication with the air inlet passage. At this time, the air inlet operation assembly is opened to open the air inlet passage, which can be used to fill the electronic special gas into the gas cylinder or fill the inert gas into the gas cylinder for purging the gas cylinder. When the air pressure inside the gas cylinder is high, the one-way valve will be in a state of blocking the air inlet passage. At this time, even if the air inlet operation assembly is opened, the air inlet passage cannot be communicated, so it cannot play a role in inflating, which can improve the use safety of the valve and can also prevent the valve from leaking gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] For the convenience of those skilled in the art to understand, the present invention will be further described below with reference to the accompanying drawings.

[0020] Figure 1 It is a schematic internal structure diagram of the present invention;

[0021] Figure 2 For the present invention Figure 1 An enlarged schematic view of part A in the present invention;

[0022] Figure 3 A schematic view of the main structure of the present invention;

[0023] Figure 4 A partial sectional view of the present invention.

[0024] Legend: 1. Valve body; 2. Pressure ring; 3. Diaphragm; 4. First spring; 5. Valve seat; 6. Valve core; 7. First valve rod; 8. Exhaust passage; 9. Intake passage; 10. Second valve rod; 11. Third spring; 12. Vertical slider; 13. Push rod; 14. Horizontal slider; 15. Driving rod; 16. Check valve. Specific embodiments

[0025] To further elaborate on the technical means and effects adopted by the present invention to achieve the predetermined invention purpose, the following will, in conjunction with the accompanying drawings and preferred embodiments, describe in detail the specific embodiments, structures, features and their effects of the present invention as follows.

[0026] As Figures 1 - 4 shown, a high-purity diaphragm valve for electronic special gases of the present invention includes a valve body 1. An intake passage 9 and an exhaust passage 8 are opened on the valve body 1 and communicate with the intake port and the exhaust port respectively from the bottom valve port. A top valve port communicating with the top of the valve body 1 is opened in the exhaust passage 8, and an exhaust operation assembly is arranged in the top valve port to control the opening and closing of the exhaust passage 8. A side valve port communicating with the side of the valve body 1 is opened in the intake passage 9, and an intake operation assembly is arranged at the side valve port to control the opening and closing of the intake passage 9. When both the intake operation assembly and the exhaust operation assembly are opened and inert gas is filled into the intake passage 9 to purge the residual gas in the gas cylinder and the valve body 1 and discharge it from the exhaust passage 8;

[0027] When the electronic special gas in the gas cylinder is released until the pressure is too low to continue the release, there is still some electronic special gas remaining inside. To ensure safety during the next filling of the gas cylinder, it is necessary to purge the gas inside the gas cylinder. In the prior art, generally, the valve is disassembled and directly cleaned. However, this method will cause the residual electronic special gas in the gas cylinder to leak. In order to ensure that the residual electronic special gas in the gas cylinder can be purged cleanly and will not cause the leakage of the electronic special gas, through the valve structure in this embodiment, after the bottom valve port of the valve is connected to the gas cylinder and the gas in the gas cylinder is released to a low pressure, the intake channel 9 and the exhaust channel 8 are respectively opened through the intake operation assembly and the exhaust operation assembly. Then, a large amount of inert gas is input into the gas cylinder through the intake channel 9. Due to the action of density and pressure, the inert gas fills the gas cylinder and then gradually discharges from the exhaust channel 8. And by using a gas monitor to monitor the gas composition of the exhaust channel 8, it is confirmed whether the original gas in the gas cylinder has been completely replaced. When the gas cylinder is filled with inert gas and the original gas has been completely discharged, the intake channel 9 and the exhaust channel 8 are closed to complete the purging process. By purging the gas cylinder and the valve with inert gas, it is possible to avoid some electronic special gas remaining in the gas cylinder and the valve. At the same time, the surface finish of the flow channel is processed to Ra0.2 or below to avoid medium residue. At the same time, it is not necessary to remove the valve to complete the cleaning of the gas cylinder and the valve, which can prevent the leakage of electronic special gas and improve the use safety.

[0028] It is worth mentioning that since the intake operation assembly is arranged in the lateral valve port of the intake channel 9, the general switch for opening and closing the intake channel 9 forms a 90° angle with the intake channel 9. In this embodiment, the angle formed between the opening of the intake channel 9 and the intake operation assembly is less than 90°, so that the angle between the front section and the rear section of the intake channel 9 is greater than 90°. This can reduce the impact force when external gas enters the intake channel 9, avoid the local stress increase at the position of the intake operation assembly, and improve the service life.

[0029] Specifically, the exhaust operation assembly includes a valve seat 5, a diaphragm 3, a pressure ring 2, a valve core 6, a first spring 4 and a first valve rod 7. The pressure ring 2 squeezes the edge of the diaphragm 3 on the step in the exhaust channel 8, so that the diaphragm 3 is firmly clamped by the pressure ring 2. The gas in the intake operation assembly and the exhaust channel 8 is isolated by the diaphragm 3. The top of the valve seat 5 penetrates the diaphragm 3 and is connected to the bottom of the valve core 6, so that the diaphragm 3 is clamped between the valve seat 5 and the valve core 6. The first spring 4 is arranged between the pressure ring 2 and the valve core 6 to push the valve core 6 and the valve seat 5 to reset. The first valve rod 7 is threadedly engaged with the top valve port. The first valve rod 7 abuts against the top of the valve core 6 to push the valve seat 5 to move up and down and control the on-off of the exhaust channel 8; A first handwheel is also connected to the first valve rod 7. By rotating the first handwheel, the up and down movement of the valve rod and the valve core 6 is driven, and the valve seat 5 fits and separates from the exhaust channel 8 according to the up and down movement of the valve core 6, such as Figure 1As shown, the exhaust passage 8 forms a 90° angle, and the exhaust operation assembly is at the corner position of the exhaust passage 8. After the bottom surface of the valve seat 5 fits with the exhaust passage 8, the exhaust passage 8 is disconnected, and after the bottom surface of the valve seat 5 separates from the exhaust passage 8, the exhaust passage 8 is opened. Sealing rings are provided between the pressing ring 2 and the inner wall of the valve body 1 and between the pressing ring 2 and the valve stem, which can improve the sealing performance of the exhaust operation assembly.

[0030] The intake operation assembly includes a second valve stem 10, a second handwheel and a sealing ring. The second valve stem 10 is threadedly engaged in the lateral valve port. The sealing ring is provided between the second valve stem 10 and the lateral valve port. The second handwheel is connected to the end of the second valve stem 10. The second valve stem 10 moves horizontally in the lateral valve port to control the opening and closing of the intake passage 9; As Figure 3 and Figure 4 shown, an angle is also formed between the intake operation assembly and the intake passage 9. The opening and closing of the intake passage 9 are controlled by the fitting and separation between the second valve stem 10 and the intake passage 9.

[0031] Although the valve in the above embodiments is provided with an air inlet passage 9 and an exhaust passage 8 at the same time, and the air inlet operation assembly and the exhaust operation assembly are used to control the on-off of the air inlet passage 9 and the exhaust passage 8, so as to realize filling the inert gas into the gas cylinder and purging the gas cylinder and the valve, however, in the actual use process, there are a large number of manual operations and illegal operations, or when the device for filling the gas cylinder has a power failure, pipeline breakage or failure, at this time, when there is still a large amount of electronic special gas in the gas cylinder, the purging operation of the gas cylinder is carried out, which is likely to cause a large amount of high-pressure electronic special gas in the gas cylinder to be reversely output from the air inlet passage 9 after connecting the external pipeline to the air inlet passage 9 and then opening the air inlet operation assembly and the exhaust operation assembly, resulting in the pollution of the original inert gas container and the accident of electronic special gas leakage caused thereby. In order to avoid accidents caused by illegal operations and human misoperations during use, therefore, in one embodiment, an adjustment assembly is further provided in the valve body 1. The adjustment assembly is connected between the air inlet operation assembly and the exhaust operation assembly, and the adjustment assembly automatically adjusts the on-off of the air inlet passage 9 according to the air pressure at the bottom valve port in the gas cylinder; Since the bottom valve port is communicated with the inside of the gas cylinder, the air inlet passage 9 and the exhaust passage 8 are also communicated with the inside of the gas cylinder through the bottom valve port. After the adjustment assembly is arranged between the air inlet operation assembly and the exhaust operation assembly, when the exhaust operation assembly is in two states of open or closed, if the air pressure in the gas cylinder is in a high state, the adjustment assembly will block the ventilation of the air inlet passage 9 under the action of the air pressure, which can avoid that whether filling the gas into the gas cylinder through the air inlet passage 9 or purging by filling the inert gas into the gas cylinder through the air inlet passage 9, the gas can only be filled into the inside when the gas pressure in the gas cylinder is within the safe range, and when the gas pressure in the gas cylinder is in a high state, the gas cannot be filled into the gas cylinder through the air inlet passage 9. It can ensure the safety of use, prevent the leakage of electronic special gas and prevent human misoperation or illegal operation.

[0032] Specifically, the adjustment assembly includes a check valve 16 and a transmission mechanism. The check valve 16 is connected to the transmission mechanism. The check valve 16 is spherical and rotatably arranged in the air inlet passage 9. The transmission mechanism is arranged in the transmission passage connecting the air inlet passage 9 and the exhaust passage 8. The transmission mechanism adjusts the on-off of the air inlet passage 9 according to the air pressure at the bottom valve port in two states of on and off of the exhaust passage 8; The transmission passage includes a horizontal passage and a vertical passage. The transmission mechanism includes a driving rod 15. The driving rod 15 is slidably arranged in the vertical passage. The driving rod 15 drives the check valve 16 to rotate according to the air pressure to control the on-off of the air inlet passage 9.

[0033] To prevent the gas inside the gas cylinder from flowing back into the intake passage 9, a check valve 16 is provided in the intake passage 9, allowing gas to only be filled into the gas cylinder from the outside of the intake passage 9 and preventing it from flowing back from the inside of the gas cylinder towards the intake passage 9. To avoid the check valve 16 being corroded by the electronic special gas inside the gas cylinder, the check valve 16 can be a diaphragm check valve 16. To prevent inflation into the interior from the intake passage 9 when the gas pressure inside the gas cylinder is still relatively high, a drive rod 15 is connected to the check valve 16. The check valve 16 is spherical in shape and is horizontally rotatably arranged in the intake passage 9. The intake passage 9 is connected to a vertical passage, and the drive rod 15 is located in the vertical passage, enabling the check valve 16 to rotate around the vertical passage as the axis. When the gas pressure inside the gas cylinder is high, the pressure will push the drive rod 15 to rotate, causing the drive rod 15 to drive the check valve 16 to rotate. Since two opposite sides of the check valve 16 can communicate with each other, while the other two mutually perpendicular sides cannot communicate, when the gas pressure inside the gas cylinder is high, the drive rod 15 drives the check valve 16 to rotate to the non - communicating side, and when the gas pressure inside the gas cylinder is low, the drive rod 15 drives the check valve 16 to rotate to the communicating side. Through the structure of the drive rod 15 and the check valve 16, it can not only prevent the gas inside the gas cylinder from leaking from the intake passage 9 but also control the rotation angle of the check valve 16 according to the gas pressure inside the gas cylinder, thereby achieving double insurance for the check valve 16 and the second valve stem 10. Therefore, this structure is suitable for the use of toxic and corrosive gases such as electronic special gases.

[0034] Furthermore, the drive rod 15 includes a sliding sleeve, a sliding rod, and a second spring. The sliding sleeve is slidably arranged in the vertical passage, and a guiding strip is provided on the outer sidewall of the sliding sleeve. A guiding groove is provided in the vertical passage, and the guiding strip on the sliding sleeve is slidably arranged in the guiding groove, enabling the sliding sleeve to only move vertically. The second spring is arranged inside the sliding sleeve, and the sliding rod is slidably arranged inside the sliding sleeve and abuts against the end of the second spring. A support plate is provided at the bottom of the second spring for separating and abutting against the sliding rod. Threads are provided inside the sliding sleeve to mesh with the sliding rod, and a convex rod is provided at the top of the side of the sliding rod, enabling the convex rod to mesh with the threads inside the sliding sleeve. When the sliding sleeve moves up and down, the sliding rod rotates inside the sliding sleeve along with the threads. The end of the sliding rod is connected to the check valve 16, and the sliding rod rotates as the sliding sleeve moves up and down; a limiting strip is provided at the top of the sliding sleeve in the vertical passage;

[0035] Based on the above structure, since the vertical channel and the horizontal channel communicate with the intake channel 9 and the exhaust channel 8, the driving rod 15 can isolate the gas exchange between the intake channel 9 and the exhaust channel 8. Therefore, when the air pressure in the exhaust channel 8 is relatively high, the air pressure will push the driving rod 15 to move downward through the horizontal channel and the vertical channel. Then the sliding sleeve slides vertically downward, and the sliding rod starts to rotate under the action of the sliding sleeve sliding downward. The one-way valve 16 also rotates under the driving action of the sliding rod to a state where the intake channel 9 cannot be penetrated. After the gas in the gas cylinder decreases, since a second spring is provided in the sliding sleeve, the spring will push the sliding sleeve to reset and move upward after losing the external pressure, causing the one-way valve 16 to rotate again to a state where the intake channel 9 is penetrated.

[0036] Further, the adjusting assembly further includes a pushing mechanism. The pushing mechanism is arranged in the valve seat 5. A horizontal sliding plate is arranged in the horizontal channel. The pushing mechanism pushes the horizontal sliding plate to slide horizontally according to the air pressure in the exhaust channel 8. The horizontal sliding plate slides horizontally according to the thrust of the pushing assembly and the air pressure in the exhaust channel 8.

[0037] In the above embodiment, the driving rod 15 rotates only according to the pressure in the exhaust channel 8, and the pressure difference between the gas cylinder and the exhaust channel 8 is relatively large, which easily causes the sliding sleeve to move up and down in the vertical channel with a large amplitude, and then causes the rotation angle of the one-way valve 16 to be too large, unable to achieve the effect of closing the intake channel 9 when the air pressure is high and opening the intake channel 9 when the air pressure is low. After the horizontal sliding block 14 is arranged in the horizontal channel, limit strips are arranged at both the front and rear ends of the horizontal channel, so that the horizontal sliding block 14 is located between the two limit strips at both ends. The horizontal sliding block 14 starts to act after reaching the upper limit air pressure value or the lower limit air pressure value of the action, and the action amplitude is limited by the front and rear limit strips, so that the amplitude of the horizontal sliding block 14 pushing the driving rod 15 to rotate is just enough to make the intake channel 9 in a completely open or completely closed state. After the air pressure inside the gas cylinder gradually decreases, since the second spring will push the sliding sleeve to reset, the gas in the vertical channel and the horizontal channel will push the horizontal sliding plate to reset. To ensure the pushing effect of the horizontal sliding plate, the horizontal sliding plate is made of a material that can be sealed.

[0038] Since the exhaust operation assembly cuts off the connection between the exhaust channel 8 and the horizontal channel after closing the exhaust channel 8, and if the air pressure in the gas cylinder is relatively high at this time, but the horizontal sliding block 14 cannot act according to the air pressure, to avoid this problem, in one embodiment, the pushing mechanism includes a vertical sliding plate, a third spring 11 and a push rod 13. The third spring 11 is connected to the bottom of the valve seat 5. The vertical sliding plate is slidably arranged at the bottom of the valve seat 5 and is connected to the third spring 11. The side surface of the vertical sliding plate is an inclined surface. The push rod 13 is slidably arranged on the side surface of the valve seat 5 and abuts against the side surface of the vertical sliding plate. The push rod 13 horizontally expands and contracts as the vertical sliding plate moves up and down to push the horizontal sliding plate.

[0039] A hollow structure is formed at the bottom of the valve seat 5, and the bottom of the valve seat 5 communicates with the exhaust passage 8 of the vertical part and is separated from the exhaust passage 8 of the horizontal part. The vertical slide plate is located within the hollow structure at the bottom of the valve seat 5, and the top of the vertical slide plate is connected to the top within the hollow structure by a third spring 11. When the air pressure in the exhaust passage 8 of the vertical part is relatively high, the air pressure will push the vertical slider 12 upward, and the inclined side wall of the vertical slider 12 will push the push rod 13 outward. The push rod 13 will then exert a force on the horizontal slide plate to push the horizontal slide plate to move. After the air pressure inside the gas cylinder decreases, the vertical slide plate will reset downward. After losing the thrust, the second spring will push the sliding sleeve to reset, and the air pressure in the vertical passage and the horizontal passage will push the horizontal slide plate to reset, and the horizontal slide plate will push the push rod 13 to reset. Through the above structure, when the air pressure inside the gas cylinder is relatively low, the one-way valve 16 will be in a state of being in communication with the intake passage 9. At this time, the intake operation assembly is opened to open the intake passage 9, which can be used to fill the electronic special gas into the gas cylinder or fill the inert gas into the gas cylinder to purge the gas cylinder. When the air pressure inside the gas cylinder is relatively high, the one-way valve 16 will be in a state of blocking the intake passage 9. At this time, even if the intake operation assembly is opened, the intake passage 9 cannot be communicated, so it cannot play the role of inflation, which can improve the safety of valve use and prevent the valve from leaking gas.

[0040] Since in the above embodiment, the horizontal movement of the horizontal slide plate is required to push the drive rod 15 to move, and the horizontal space in a general valve is much smaller than the vertical space. In order to have sufficient air pressure for the movement of the horizontal slide plate to push the vertical movement of the drive rod 15, in an embodiment, the diameter of the horizontal passage is larger than the diameter of the vertical passage; the larger diameter of the horizontal passage can push more gas into the vertical passage within the same moving distance, and can form a greater air pressure to push the drive rod 15 to move, so as to ensure that the drive rod 15 drives the one-way valve 16 to rotate by a sufficient angle to switch between the two states of opening and closing the intake passage 9.

[0041] The above is only a preferred embodiment of the present invention and does not impose any form of limitation on the present invention. Although the present invention has been disclosed above with a preferred embodiment, it is not intended to limit the present invention. Any person skilled in the art can make some changes or modifications to the above-disclosed technical content to make equivalent embodiments with equivalent changes within the scope of the technical solution of the present invention. However, as long as it does not depart from the content of the technical solution of the present invention, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. A high-purity diaphragm valve for electronic special gases, characterized by: The valve body comprises a valve body, on which an air inlet duct and an exhaust duct are respectively connected from the bottom valve port to the air inlet port and the exhaust port, a top valve port connected to the top of the valve body is formed in the exhaust duct, an exhaust operating component is arranged in the top valve port for controlling the opening and closing of the exhaust duct, a lateral valve port connected to the side of the valve body is formed in the air inlet duct, an air inlet operating component is arranged in the lateral valve port for controlling the opening and closing of the air inlet duct, the air inlet operating component and the exhaust operating component are both opened and inert gas is filled into the air inlet duct to purge residual gas in the gas cylinder and the valve body and discharge it from the exhaust duct.

2. A high-purity diaphragm valve for electronic special gases according to claim 1, characterized in that: The exhaust operating assembly includes a valve seat, a diaphragm, a pressure ring, a valve core, a first spring and a first valve stem. The pressure ring squeezes the edge of the diaphragm on the step in the exhaust passage. The top of the valve seat penetrates the diaphragm and is connected to the bottom of the valve core. The first spring is arranged between the pressure ring and the valve core to push the valve core and the valve seat to reset. The first valve stem is threadedly engaged with the top valve port. The first valve stem abuts against the top of the valve core to push the valve seat to move up and down and control the opening and closing of the exhaust passage.

3. A high-purity diaphragm valve for electronic special gases according to claim 1, characterized in that: The air intake operating assembly includes a second valve stem, a second hand wheel and a sealing ring. The second valve stem is threadedly engaged in the lateral valve port. The sealing ring is arranged between the second valve stem and the lateral valve port. The second hand wheel is connected to the end of the second valve stem. The second valve stem moves horizontally in the lateral valve port and controls the opening and closing of the air intake duct.

4. A high-purity diaphragm valve for electronic special gases according to claim 2, characterized in that: The valve body is also provided with an adjusting component, which is connected between the air intake operating component and the exhaust operating component. The adjusting component automatically adjusts the on-off of the air intake passage according to the air pressure at the bottom valve port in the gas cylinder.

5. A high-purity diaphragm valve for electronic special gases according to claim 4, characterized in that: The regulating component includes a one-way valve and a transmission mechanism, the one-way valve and the transmission mechanism are connected, the one-way valve is spherical and is rotatably arranged in the intake duct, the transmission mechanism is arranged in a transmission channel connecting the intake duct and the exhaust duct, and the transmission mechanism adjusts the opening and closing of the intake duct according to the air pressure at the bottom valve port when the exhaust duct is in the on and off states.

6. A high-purity diaphragm valve for electronic special gases according to claim 5, characterized in that: The transmission channel includes a horizontal channel and a vertical channel, and the transmission mechanism includes a driving rod, which is slidably arranged in the vertical channel. The driving rod drives the one-way valve to rotate according to the air pressure to control the opening and closing of the air intake duct.

7. A high-purity diaphragm valve for electronic special gases according to claim 6, characterized in that: The driving rod includes a sliding sleeve, a sliding rod and a second spring. The sliding sleeve is slidably arranged in the vertical channel, the second spring is arranged in the sliding sleeve, the sliding rod is slidably arranged in the sliding sleeve and abuts against the end of the second spring, a thread is arranged in the sliding sleeve to engage with the sliding rod, the end of the sliding rod is connected to the one-way valve, and the sliding rod rotates as the sliding sleeve moves up and down.

8. The high-purity diaphragm valve for electronic special gases according to claim 7, characterized in that: The regulating assembly also includes a pushing mechanism, which is arranged in the valve seat. A horizontal slide is arranged in the horizontal channel. The pushing mechanism pushes the horizontal slide to slide horizontally according to the air pressure in the exhaust duct. The horizontal slide slides horizontally according to the thrust of the pushing assembly and the air pressure in the exhaust duct.

9. A high-purity diaphragm valve for electronic special gases according to claim 8, characterized in that: The pushing mechanism includes a vertical slide, a third spring and a push rod, the third spring is connected to the bottom of the valve seat, the vertical slide is slidably arranged at the bottom of the valve seat and is connected to the third spring, the side surface of the vertical slide is an inclined surface, the push rod is slidably arranged on the side surface of the valve seat and abuts against the side surface of the vertical slide, and the push rod is horizontally extended and retracted as the vertical slide moves up and down to push the horizontal slide.

10. A high-purity diaphragm valve for electronic special gases according to claim 9, characterized in that: The diameter of the horizontal channel is greater than the diameter of the vertical channel.

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