Detection method of heat dissipation plate

Abstract

The invention belongs to the technical field of size detection of heat dissipation plates, and particularly relates to a heat dissipation plate detection method, which comprises the following steps: S1, starting a heat dissipation plate detection device which comprises a linear array camera, a first line scanning laser sensor and a second line scanning laser sensor, the first linear scanning laser sensor and the second linear scanning laser sensor are arranged in the vertical direction; and S2, inputting a reference part, and carrying out detection twice so as to sequentially carry out initialization and verification on the first linear scanning laser sensor and the second linear scanning laser sensor. According to the detection method of the heat dissipation plate, the linear array camera is used for carrying out position degree and aperture detection on the heat dissipation plate; the first line scanning laser sensor and the second line scanning laser sensor are used for detecting the flatness, the thickness and the depth of the heat dissipation plate, the number of used detection devices is small, compared with traditional single-point detection, the efficiency is improved, and single-station full-dimension quality judgment is achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of size detection of heat sinks, and in particular to a detection method for heat sinks. Background Art

[0002] As the core component of the vehicle thermal management system, the dimensional accuracy of the automotive heat sink directly affects the heat dissipation efficiency and assembly reliability. During the production process, key parameters such as position, aperture, flatness, thickness and depth need to be fully tested to eliminate hidden dangers such as heat exchange failure or poor sealing due to dimensional tolerance. In the existing technology, the position, aperture, flatness, thickness and depth of the heat sink can be tested by a combination of three-coordinate measuring machine, image measuring instrument, two-dimensional image measuring instrument, contact probe, etc. There are many detection devices and the detection efficiency is low. How to quickly perform the above parameter detection is an urgent problem to be solved. Summary of the invention

[0003] The purpose of the present invention is to provide a method for detecting a heat sink to solve the problems in the prior art of detecting the position, aperture, flatness, thickness and depth of the heat sink, the large number of detection devices and the low detection efficiency.

[0004] The technical solution of the present invention is: a method for detecting a heat sink, characterized in that: S1. Start the heat sink detection device, which includes a line array camera, a first line scan laser sensor, and a second line scan laser sensor, wherein the heat sink is photographed directly below the line array camera, the first line scan laser sensor and the second line scan laser sensor are arranged in the up and down directions, and the heat sink is located between the first line scan laser sensor and the second line scan laser sensor and is scanned; S2. Put the reference piece into two tests to initialize and calibrate the first line scan laser sensor and the second line scan laser sensor in turn, and store the calibration data; S3. Put the heat sink into the test, the linear array camera takes a backlight picture of the heat sink, and the program calculates the position and aperture of the heat sink; the first line scan laser sensor scans the front of the heat sink, and the second line scan laser sensor scans the back of the heat sink. After the scanning is completed, the data of the measured points are recorded, and the program calculates the flatness, thickness, and depth of the heat sink to screen out NG products.

[0005] Preferably, when initializing the first line-scanning laser sensor and the second line-scanning laser sensor in step S2, the measured value of the Z-axis in the measurement value of the first measurement point on the front surface of the heat dissipation plate by the first line-scanning laser sensor is A, and the measured value of the Z-axis in the measurement value of the second measurement point on the back surface of the heat dissipation plate by the second line-scanning laser sensor is B. The first measurement point and the second measurement point are directly opposite in the up and down direction; Given that the standard value of the vertical distance between the first measurement point and the second measurement point is C, then B - C = D; Record the measured value A of the first line-scanning laser sensor and the calculated value D as the calibration values of the first measurement point and the second measurement point in the configuration file; The calculation method of the thickness in the heat dissipation plate in step S3 is as follows: The first line-scanning laser sensor and the second line-scanning laser sensor scan the heat dissipation plate, read the corresponding calibration values in the configuration file. The measured value of the Z-axis in the measurement value of the first measurement point measured by the first line-scanning laser sensor is A1, and the measured value of the Z-axis in the measurement value of the second measurement point measured by the second line-scanning laser sensor is B1. Let A1 - A = E and B1 - D = F, then the vertical distance between the first measurement point and the second measurement point is E + F = G; Given that the thickness correction value of the first measurement point is H, then the final vertical distance between the first measurement point and the second measurement point calculated by the final program, that is, the final thickness value, is I, and I = G + H.

[0006] Preferably, the heat dissipation plate includes a substrate, a plurality of blocks, and copper tubes. The plurality of blocks are respectively fixedly connected to the substrate through copper tubes; A notch for accommodating the plurality of blocks is provided on the substrate, and each block does not contact the substrate; On both sides of the length direction of each block are a first step and a second step respectively, and the connection arc surface is between the top surface of the first step and the top surface of the block; A plurality of first grooves are concavely arranged on the back surface of each block, and a plurality of second grooves are concavely arranged on the back surface of the substrate corresponding to the plurality of blocks respectively; A P1 reference round hole and a P2 reference long hole are penetrated through the substrate. In the front view of the heat dissipation plate, the center point of the P1 reference round hole and the center point of the P2 reference long hole are on the same straight line, and this straight line is parallel to the length direction of the block; The method for obtaining the thickness correction value H of the first measurement point is as follows: Measure the actual thickness value between the first measurement point and the second measurement point of a plurality of heat dissipation plates with a mechanical measuring instrument, then put the plurality of heat dissipation plates into the heat dissipation plate detection device for detection respectively. Subtract the detected thickness value detected by the heat dissipation plate detection device from the actual thickness value of each heat dissipation plate to obtain the thickness difference. Take the average value H of the thickness differences of the plurality of heat dissipation plates, then the thickness correction value is H.

[0007] Preferably, the method for detecting the flatness SC-10 of the top surface of each block is as follows: Obtain the measurement values of multiple third measurement points on the top surface of each block through a first line-scanning laser sensor, fit the measurement values of the Z-axis of the multiple third measurement points into a first reference plane by the least squares method, calculate the vertical distance from each third measurement point to the first reference plane through the program, calculate the absolute value of the difference between the maximum vertical distance and the minimum vertical distance, then add the corresponding correction value to this absolute value. If the corrected difference is within 0.05 mm, the flatness is qualified; The method for detecting the vertical distance SC-13 between the top surface of the second step and the top surface of the block in each block is as follows: Obtain the measurement values of the fourth measurement points on the top surface of the second step in the block through a first line-scanning laser sensor, calculate the vertical distance from the fourth measurement point to the first reference plane through the program, then add the corresponding correction value to this vertical distance, and determine whether it is qualified according to the calculated result after correction.

[0008] Preferably, the method for detecting the depth SC-12 of each second groove relative to the reverse side of the substrate is as follows: Obtain the measurement values of the fifth measurement points on the bottom of the second groove through a second line-scanning laser sensor, obtain the measurement values of the sixth measurement points on the reverse side of the substrate close to the fifth measurement points, calculate the absolute value of the difference between the measurement values of the fifth measurement points and the Z-axis of the measurement values of the sixth measurement points through the program, then add the corresponding correction value to this absolute value, and determine whether it is qualified according to the calculated result after correction.

[0009] Preferably, the method for detecting the flatness SC-15 of the substrate is as follows: Obtain the measurement values of multiple seventh measurement points on the front surface of the substrate through a first line-scanning laser sensor, obtain the measurement values of multiple eighth measurement points on the reverse side of the substrate corresponding to the multiple seventh measurement points respectively through a second line-scanning laser sensor, calculate the vertical distances, that is, the thickness values, of the corresponding multiple seventh measurement points and multiple eighth measurement points respectively through the calculation method of S31, calculate the difference between the maximum thickness value and the minimum thickness value, then add the corresponding correction value to this difference. When the corrected difference is within 0.1 mm, the flatness of the substrate is qualified.

[0010] Preferably, the method for detecting the depth SC-16 of the first groove in each block relative to the reverse side of the block is as follows: Obtain the measurement values of the ninth measurement points on the bottom of the first groove of the block through a second line-scanning laser sensor, obtain the measurement values of multiple tenth measurement points on the reverse side of the block, fit the measurement values of the Z-axis of the multiple tenth measurement points into a second reference plane by the least squares method; calculate the vertical distance from the ninth measurement point to the second reference plane through the program, then add the corresponding correction value to this vertical distance, and determine whether it is qualified according to the calculated result after correction.

[0011] Preferably, the detection method for the thickness SC-11 of each block is as follows: obtain the measured values of the eleventh measurement point and the twelfth measurement point on the left and right sides of the front surface of the block through the first line-scanning laser sensor, obtain the measured values of the thirteenth measurement point and the fourteenth measurement point on the back surface of the block that are directly opposite to the eleventh measurement point and the twelfth measurement point respectively through the second line-scanning laser sensor. Through the calculation method of S31, the program calculates the vertical distances between the eleventh measurement point and the thirteenth measurement point, and between the twelfth measurement point and the fourteenth measurement point respectively. Take the average value of the two groups of vertical distances, and then add the corresponding correction value to this average value. Determine whether it is qualified according to the corrected calculation result; The detection method for the thickness SC-14 of the substrate is as follows: obtain the measured value of the fifteenth measurement point on the front surface of the substrate through the first line-scanning laser sensor, obtain the measured value of the sixteenth measurement point on the back surface of the substrate that is directly opposite to the fifteenth measurement point through the second line-scanning laser sensor. Through the calculation method of S31, the program calculates the vertical distance between the directly opposite fifteenth measurement point and sixteenth measurement point, which is the thickness value of the substrate. Then add the corresponding correction value to this thickness value. Determine whether it is qualified according to the corrected calculation result.

[0012] Preferably, the number of the blocks is four, namely the R1 block arranged at the upper left of the substrate, the R6 block arranged at the upper right of the substrate, the R11 block arranged at the lower left of the substrate, and the R16 block arranged at the lower right of the substrate; the line connecting the center point of the P1 reference round hole to the center point of the P2 reference long hole is used as the X-direction reference line, and on the X-direction reference line, the vertical line with the center point of the P1 reference round hole as the vertical point is used as the Y-direction reference line; In the picture taken by the line array camera, find the center points of the P1 reference round hole, the P2 reference long hole, the R1 block, the R6 block, the R11 block, and the R16 block within the specified range; the two sides of the top surface of the R11 block parallel to the X-direction reference line are the first side and the second side respectively, and the two sides of the top surface of the R11 block parallel to the Y-direction reference line are the third side and the fourth side respectively; the two sides of the top surface of the R16 block parallel to the X-direction reference line are the fifth side and the sixth side respectively, and the two sides of the top surface of the R16 block parallel to the Y-direction reference line are the seventh side and the eighth side respectively; there are chamfers at the first side, the second side, the third side, the fourth side, the fifth side, the sixth side, the seventh side, and the eighth side; when the line array camera takes a photo, the first side and the chamfer at its position form a first rectangular black frame, the second side and the chamfer at its position form a second rectangular black frame, the fifth side and the chamfer at its position form a third rectangular black frame, and the sixth side and the chamfer at its position form a fourth rectangular black frame.

[0013] Preferably, the method for detecting the position degree SC-1 of the R1 block is as follows: Program calculation: Multiply the vertical distance from the center point of the R1 block to the reference line in the Y direction by the value of single-pixel accuracy, then add the corresponding correction value to this value, and determine whether it is qualified according to the calculated result after correction; The method for detecting the position degree SC-2 of the R6 block is as follows: Program calculation: Multiply the vertical distance from the center point of the R6 block to the reference line in the Y direction by the value of single-pixel accuracy, then add the corresponding correction value to this value, and determine whether it is qualified according to the calculated result after correction; The method for detecting the position degree SC-3 of the R6 block is as follows: Program calculation: Multiply the vertical distance from the center point of the R6 block to the reference line in the X direction by the value of single-pixel accuracy, then add the corresponding correction value to this value, and determine whether it is qualified according to the calculated result after correction; The measurement method for detecting the hole width SC-4 of the P2 reference long hole is as follows: Program calculation: Multiply the hole width of the P2 reference long hole by the value of single-pixel accuracy, then add the corresponding correction value to this value, and determine whether it is qualified according to the calculated result after correction; The method for detecting the position degree SC-5 of the R11 block and the R16 is as follows: Program calculation: Multiply the vertical distance from the center point of the R11 block to the reference line in the X direction by the value of single-pixel accuracy, then add the corresponding correction value to this value, and determine whether it is qualified according to the calculated result after correction; Program calculation: Multiply the vertical distance from the center point of the R16 block to the reference line in the X direction by the value of single-pixel accuracy, then add the corresponding correction value to this value, and determine whether it is qualified according to the calculated result after correction; The method for detecting the width value SC-6 of the top surface of the R11 block and the R16 along the reference line in the Y direction is as follows: Program calculation: Divide the vertical distance between the outer edges of the first rectangular black frame and the second rectangular black frame by 2 and then multiply by the value of single-pixel accuracy, then add the corresponding correction value to this value, and determine whether it is qualified according to the calculated result after correction; Program calculation: Divide the vertical distance between the outer edges of the third rectangular black frame and the fourth rectangular black frame by 2 and then multiply by the value of single-pixel accuracy, then add the corresponding correction value to this value, and determine whether it is qualified according to the calculated result after correction; The method for detecting the width value SC-7 of the top surfaces of the R11 block and the R16 along the X-direction reference line is as follows: The program calculates the vertical distance between the third side and the fourth side, adds the sum of the widths of the projections of the chamfers at the third side and the fourth side on the X-direction reference line, divides the obtained value by 2 and then multiplies it by the value of single-pixel precision, and then adds the corresponding correction value to this value. It is determined whether it is qualified according to the corrected calculation result; among them, the method for calculating the sum of the widths of the projections of the chamfers at the third side and the fourth side on the X-direction reference line is: the vertical distance between the outer edges of the first rectangular black frame and the second rectangular black frame minus the vertical distance between the first side and the second side; The program calculates the vertical distance between the seventh side and the eighth side, adds the sum of the widths of the projections of the chamfers at the seventh side and the eighth side on the X-direction reference line, divides the obtained value by 2 and then multiplies it by the value of single-pixel precision, and then adds the corresponding correction value to this value. It is determined whether it is qualified according to the corrected calculation result; among them, the method for calculating the sum of the widths of the projections of the chamfers at the seventh side and the eighth side on the X-direction reference line is: the vertical distance between the outer edges of the third rectangular black frame and the fourth rectangular black frame minus the vertical distance between the fifth side and the sixth side; The method for detecting the positional tolerance SC-8 of the R11 block is as follows: The program calculates: the vertical distance from the center point of the R11 block to the Y-direction reference line is multiplied by the value of single-pixel precision, and then the corresponding correction value is added to this value. It is determined whether it is qualified according to the corrected calculation result; The method for detecting the positional tolerance SC-9 of the R16 block is as follows: The program calculates: the vertical distance from the center point of the R16 block to the Y-direction reference line is multiplied by the value of single-pixel precision, and then the corresponding correction value is added to this value. It is determined whether it is qualified according to the corrected calculation result.

[0014] Compared with the prior art, the advantages of the present invention are: A detection method for a heat dissipation plate in the present invention uses a line array camera to detect the position and aperture of the heat dissipation plate, and uses a first line scan laser sensor and a second line scan laser sensor to detect the flatness, thickness, and depth of the heat dissipation plate. Only 1 line array camera and 2 line scan laser sensors are required to complete the parameter detection of position, aperture, flatness, thickness, and depth. Compared with traditional single-point detection (requiring 5 - 8 independent sensors), fewer detection devices are used, and a large number of parameter detections can be completed in a short time, improving the detection efficiency. When in use, the reference part is detected twice to initialize and calibrate the first line scan laser sensor and the second line scan laser sensor in sequence. During initialization, the Z-axis measurement value measured by the first line scan laser sensor at the first measurement point is associated with the Z-axis measurement value measured by the second line scan laser sensor at the second measurement point through the reference plate. Moreover, correction values are calculated for the position, aperture, flatness, thickness, and depth to avoid measurement errors caused by machining errors during the machining and manufacturing of the reference plate, greatly improving the detection accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The present invention will be further described below in conjunction with the drawings and embodiments: Figure 1 It is a front structural schematic diagram of the heat dissipation plate described in the present invention; Figure 2 It is a reverse structural schematic diagram of the heat dissipation plate described in the present invention; Figure 3 It is a measurement schematic diagram of measurement points A1 and I1 of the heat dissipation plate during the initialization process of the first line scan laser sensor and the second line scan laser sensor described in the present invention; Figure 4 It is a measurement schematic diagram of measurement points A1 and I1 of the heat dissipation plate in the calculation method for calculating the thickness in the heat dissipation plate described in the present invention; Figure 5 It is a front view of the heat dissipation plate described in the present invention; Figure 6 It is a backlight picture of the heat dissipation plate taken by the line array camera described in the present invention; Figure 7 It is a top view of the block R11 described in the present invention; Figure 8 It is a structural schematic diagram of the first rectangular black frame, the second rectangular black frame, the fifth rectangular black frame, and the sixth rectangular black frame formed by the block R11 in the backlight picture of the heat dissipation plate described in the present invention; Figure 9 It is a position schematic diagram of the measurement points in the detection method for the flatness SC - 10 of the top surface of each block described in the present invention; Figure 10 It is a position schematic diagram of the measurement points on the front surface of the block in the detection method for the thickness SC - 11 of each block described in the present invention; Figure 11 Schematic diagram of the positions of the measurement points on the reverse side of the block in the method for detecting the thickness SC-11 of each block according to the present invention; Figure 12 Schematic diagram of the positions of the measurement points in the method for detecting the depth SC-12 of each second groove relative to the reverse side of the substrate according to the present invention; Figure 13 Schematic diagram of the positions of the measurement points in the method for detecting the vertical distance SC-13 between the top surface of the second step and the top surface of the block in each block according to the present invention; Figure 14 Schematic diagram of the positions of the measurement points A1 - A28 on the front surface of the substrate 1 in the method for detecting the flatness SC-15 of the substrate according to the present invention; Figure 15 Schematic diagram of the positions of the measurement points I1 - I28 on the reverse side of the substrate 1 in the method for detecting the flatness SC-15 of the substrate according to the present invention; Figure 16 Schematic diagram of the positions of the measurement points in the method for detecting the depth SC-16 of the first groove relative to the reverse side of the block in each block according to the present invention.

[0016] Wherein: 1. Substrate, 2. R1 block, 3. R6 block, 4. R11 block, 5. R16 block, 6. Copper tube, 7. First step, 8. Second step, 9. Connecting arc surface, 10. First groove, 11. Second groove, 12. X-direction reference line, 13. Y-direction reference line, 14. First side, 15. Second side, 16. Third side, 17. Fourth side, 18. Chamfer, 19. First rectangular black frame, 20. Second rectangular black frame, 21. Fifth rectangular black frame, 22. Sixth rectangular black frame, 23. P1 reference round hole, 24. P2 reference long hole. Detailed implementation manners

[0017] The following further elaborates on the content of the present invention in conjunction with specific embodiments: In the description of the invention, it should be understood that the orientation or positional relationships indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. are based on the orientation or positional relationships shown in the drawings. These are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the invention.

[0018] This embodiment provides a method for detecting a heat dissipation plate, including: S1. Start the heat dissipation plate detection device, which includes a line array camera, a first line-scanning laser sensor, and a second line-scanning laser sensor. The heat dissipation plate is photographed directly below the line array camera, and the first line-scanning laser sensor and the second line-scanning laser sensor are arranged in the up-down direction, and the heat dissipation plate is scanned in the middle of the first line-scanning laser sensor and the second line-scanning laser sensor. In this embodiment, when it comes to the measurement values of the first line-scanning laser sensor and the second line-scanning laser sensor for the measurement points, the Z-axis measurement values are used in the program calculation, and the X-axis and Y-axis measurement values are not used. In this embodiment, the Z-axis detection range of the first line-scanning laser sensor is from 20.5 mm to 0 to -20.5 mm from top to bottom, and the Z-axis detection range of the second line-scanning laser sensor is from -20.5 mm to 0 to 20.5 mm from top to bottom; S2. Insert the reference part for two detections (specifically, insert the reference part once and detect it twice) to initialize and calibrate the first line-scanning laser sensor and the second line-scanning laser sensor in sequence, and store the calibration data. When initializing the first line-scanning laser sensor and the second line-scanning laser sensor in step S2, the Z-axis measurement value in the measurement value of the first line-scanning laser sensor for the first measurement point on the front of the heat dissipation plate is A, and the Z-axis measurement value in the measurement value of the second line-scanning laser sensor for the second measurement point on the back of the heat dissipation plate is B. The first measurement point and the second measurement point are directly opposite in the up-down direction. Given that the standard value of the vertical distance between the first measurement point and the second measurement point is C, and the standard value C is the vertical distance that should exist between the first measurement point and the second measurement point of a qualified heat dissipation plate, that is, the plate thickness between the first measurement point and the second measurement point, then B - C = D; Record the measurement value A of the first line-scanning laser sensor and the calculated value D as the calibration values of the first measurement point and the second measurement point into the configuration file. For example, Figure 3As shown in the figure, when initializing the first line-scanning laser sensor and the second line-scanning laser sensor, the measured value of the Z-axis in the measurement value of point A1 on the front of the heat dissipation plate by the first line-scanning laser sensor is A = -5.1072 mm, and the measured value of the Z-axis in the measurement value of point I1 on the back of the heat dissipation plate opposite to point A1 by the second line-scanning laser sensor is B = -10.3104 mm. Given that the standard value C between point A1 and point I1 is 10.14 mm, then -10.3104 - 10.14 = -20.4504 mm. Record -5.1072 mm and -20.4504 mm as the calibration values of point A1 and point I1 in the configuration file. Since there is no correlation between the measured Z-axis values of different measurement points by the first line-scanning laser sensor and the second line-scanning laser sensor respectively, the purpose of initialization is to associate the measured Z-axis value of the first measurement point by the first line-scanning laser sensor with the measured Z-axis value of the second measurement point by the second line-scanning laser sensor through the reference plate. Otherwise, the Z-axis measurement values of the first line-scanning laser sensor and the second line-scanning laser sensor cannot be added or subtracted, and the measured data is meaningless and unusable. How to associate the measured Z-axis values of different measurement points by the first line-scanning laser sensor and the second line-scanning laser sensor respectively is a technical problem to be solved by the present invention.

[0019] S3. Insert the heat dissipation plate for detection. The line array camera takes a backlight picture of the heat dissipation plate (i.e., the light source of the line array camera is directly below the heat dissipation plate), and the program calculates the position degree and aperture of the heat dissipation plate. Since the picture taken by the line array camera is a picture, the line array camera detects the measured values of the X-axis and Y-axis. The first line-scanning laser sensor scans the front of the heat dissipation plate, and the second line-scanning laser sensor scans the back of the heat dissipation plate. After the scanning is completed, the measured point data is recorded, and the program calculates the flatness, thickness, and depth of the heat dissipation plate, and screens out the NG products. The calculation method of the thickness in the heat dissipation plate in step S3 is as follows: The first line-scanning laser sensor and the second line-scanning laser sensor scan the heat dissipation plate, read the corresponding calibration values in the configuration file. The measured value of the Z-axis in the measurement value of the first measurement point measured by the first line-scanning laser sensor is A1, and the measured value of the Z-axis in the measurement value of the second measurement point measured by the second line-scanning laser sensor is B1. Let A1 - A = E, B1 - D = F, then the vertical distance between the first measurement point and the second measurement point is E + F = G. E + F is because the Z-axis detection value of the first line-scanning laser sensor decreases from top to bottom, and the Z-axis detection value of the second line-scanning laser sensor increases from top to bottom. Since the Z-axis detection value changes of the first line-scanning laser sensor and the second line-scanning laser sensor are opposite, the vertical distance (i.e., the plate thickness) between the first measurement point and the second measurement point needs to be added. Given that the thickness correction value of the first measurement point is H, then the final vertical distance between the first measurement point and the second measurement point calculated by the program, that is, the final thickness value, is I, I = G + H. For example, Figure 4As shown, when the program calculates the thickness between point A1 and point I1, the first line-scanning laser sensor and the second line-scanning laser sensor scan the heat dissipation plate and read the corresponding calibration values in the configuration file. The measured value of the Z-axis at point A1 measured by the first line-scanning laser sensor is A1 = -9.3456 mm, and the measured value of the Z-axis at point I1 measured by the second line-scanning laser sensor is B1 = -10.1616 mm. Then, -9.3456 - (-5.1072) = -4.2384 mm, -10.1616 - (-20.4504) = 10.2888 mm. So, the vertical distance between point A1 and point I1 is 10.2888 + (-4.2384) = 6.0504 mm. Given that the thickness correction value H of point A1 is -0.008 mm, the final thickness value between the corrected first measurement point and the second measurement point calculated by the program is 6.0424 mm, that is, 6.0504 + (-0.008) = 6.0424 mm.

[0020] The method for obtaining the thickness correction value H of the first measurement point is as follows: Measure the actual thickness value between the first measurement point and the second measurement point of multiple heat dissipation plates with mechanical measuring instruments, then put each of these heat dissipation plates into the heat dissipation plate detection device for detection, subtract the detected thickness value detected by the heat dissipation plate detection device from the actual thickness value of each heat dissipation plate to obtain the thickness difference, and take the average value H of the thickness differences of multiple heat dissipation plates. Then the thickness correction value is H. Adding the correction value H to the value calculated by the program is to avoid measurement errors caused by machining errors during the machining and manufacturing of the reference plate. It should be noted that the method for obtaining all correction values in this embodiment is the same as the method for obtaining the thickness correction value H of the first measurement point, and will not be elaborated one by one.

[0021] For example, three heat dissipation plates are used to calculate the thickness correction value H: The actual thickness value between point A1 and point I1 of the first heat dissipation plate measured by a mechanical measuring instrument is 6.1547 mm, and the detected thickness value between point A1 and point I1 of the first heat dissipation plate measured by a heat dissipation plate detection device is 6.1767 mm. Then the thickness difference is 6.1547 - 6.1767 = -0.022 mm; The actual thickness value between point A1 and point I1 of the second heat dissipation plate measured by a mechanical measuring instrument is 6.1544 mm, and the detected thickness value between point A1 and point I1 of the second heat dissipation plate measured by a heat dissipation plate detection device is 6.1544 mm. Then the thickness difference is 6.1544 - 6.1544 = 0 mm; The actual thickness value between point A1 and point I1 of the third heat dissipation plate measured by a mechanical measuring instrument is 6.1325 mm, and the detected thickness value between point A1 and point I1 of the third heat dissipation plate measured by a heat dissipation plate detection device is 6.1025 mm. Then the thickness difference is 6.1325 - 6.1025 = 0.03 mm; Take the average value of the thickness differences of the three heat dissipation plates, (-0.022 + 0 + 0.03) / 3 = 0.003 mm. Round the average value to three decimal places, and the thickness correction value H is 0.003 mm. 0.003 mm indicates that the detected thickness value is smaller than the actual thickness value. Therefore, 0.003 mm needs to be added to the vertical distance G between point A1 and point I1 calculated by the program; It should be noted that the thickness correction value H may also be 0 or a negative number. For example, when the thickness correction value H is -0.027 mm, it means that the detected thickness value is larger than the actual thickness value. Therefore, 0.027 mm needs to be subtracted from the vertical distance G between the first measurement point and the second measurement point calculated by the program, that is, the value of I = G + H.

[0022] As Figure 1 、 Figure 2 shown, the heat dissipation plate includes a substrate 1, multiple blocks, and a copper tube 6. The multiple blocks are respectively fixedly connected to the substrate 1 through the copper tube 6; A notch for accommodating multiple blocks is provided on the substrate 1, and each block does not contact the substrate 1; On both sides of the length direction of each block are a first step 7 and a second step 8 respectively, and between the top surface of the first step 7 and the top surface of the block is a connecting arc surface 9; Multiple first grooves 10 are concavely arranged on the reverse side of each block, and multiple second grooves 11 are concavely arranged on the reverse side of the substrate 1 corresponding to the multiple blocks respectively; A P1 reference circular hole 23 and a P2 reference long hole 24 are penetrated through the substrate 1. As Figure 5 shown, in the front view of the heat dissipation plate, the center point of the P1 reference circular hole 23 and the center point of the P2 reference long hole 24 are on the same straight line, and this straight line is parallel to the length direction of the block. In this embodiment, the length direction of the block is parallel to the X-direction reference line 12; As Figure 1 、 Figure 5As shown, the number of blocks is four, namely, R1 block 2 located at the upper left of the substrate 1, R6 block 3 located at the upper right of the substrate 1, R11 block 4 located at the lower left of the substrate 1, and R16 block 5 located at the lower right of the substrate 1; in the picture taken by the line array camera, find the center points of the P1 reference round hole 23, P2 reference long hole 24, the center point of R1 block 2, the center point of R6 block 3, the center point of R11 block 4, and the center of R16 block 5 within the specified range; as Figure 7 shown, the two sides of the top surface of R11 block 4 parallel to the X-direction reference line 12 are the first side 14 and the second side 15 respectively, and the two sides of the top surface of R11 block 4 parallel to the Y-direction reference line 13 are the third side 16 and the fourth side 17 respectively; the two sides of the top surface of R16 block 5 parallel to the X-direction reference line 12 are the fifth side and the sixth side respectively, and the two sides of the top surface of R16 block 5 parallel to the Y-direction reference line 13 are the seventh side and the eighth side respectively; chamfers 18 are provided at the first side 14, the second side 15, the third side 16, the fourth side 17, the fifth side, the sixth side, the seventh side, and the eighth side; in the photo taken by the line array camera (as Figure 6 shown), as Figure 8 shown, the first side 14 and the chamfer 18 at its position form the first rectangular black frame 19, the second side 15 and the chamfer 18 at its position form the second rectangular black frame 20, the fifth side and the chamfer 18 at its position form the third rectangular black frame, and the sixth side and the chamfer 18 at its position form the fourth rectangular black frame; in this embodiment, it should be noted that, as Figure 7 , Figure 8 shown, chamfer 18 is provided at the first side 14 of R11 block 4, so the first rectangular black frame 19 is formed when the line array camera shoots the chamfer 18 and the first side 14, and the formation of the second rectangular black frame 20, the third rectangular black frame, and the fourth rectangular black frame is the same; after chamfering at the third side 16 of R11 block 4, it is connected to the connecting arc surface 9, so the third side 16, the chamfer 18, and the connecting arc surface 9 form the wider fifth rectangular black frame 21 at the third side 16, the wider sixth rectangular black frame 22 at the fourth side 17, and the wider rectangular black frames formed by the seventh side and the eighth side are the same. The connection line between the center point of the P1 reference round hole 23 and the center point of the P2 reference long hole 24 is used as the X-direction reference line 12, and on the X-direction reference line 12, the vertical line with the vertical point being the center point of the P1 reference round hole 23 is used as the Y-direction reference line 13.

[0023] As Figure 5 shown, the method for detecting the position degree SC-1 of R1 block 2 is: program calculation: the vertical distance from the center point of R1 block 2 to the Y-direction reference line 13 (the vertical distance from the center point of R1 block 2 to the Y-direction reference line 13 as Figure 5Multiply the shown line segment M by a value with single-pixel precision, and then add the corresponding correction value to this value. Determine whether it is qualified according to the corrected calculation result; the single-pixel precision of the line array camera refers to the smallest physical size that can be distinguished by a single pixel of the camera. Specifically, the single-pixel precision represents the actual physical distance corresponding to a pixel in the image, and thus the pixels are converted to the measured values.

[0024] The method for detecting the positional tolerance SC-2 of the R6 block sub-3 is as follows: Program calculation: Multiply the vertical distance from the center point of the R6 block sub-3 to the Y-direction reference line 13 by a value with single-pixel precision, and then add the corresponding correction value to this value. Determine whether it is qualified according to the corrected calculation result; The method for detecting the positional tolerance SC-3 of the R6 block sub-3 is as follows: Program calculation: Multiply the vertical distance from the center point of the R6 block sub-3 to the X-direction reference line 12 by a value with single-pixel precision, and then add the corresponding correction value to this value. Determine whether it is qualified according to the corrected calculation result; The measuring method for detecting the hole width SC-4 of the P2 reference long hole 24 is as follows: Program calculation: Multiply the hole width of the P2 reference long hole 24 by a value with single-pixel precision, and then add the corresponding correction value to this value. Determine whether it is qualified according to the corrected calculation result; The method for detecting the positional tolerance SC-5 of the R11 block sub-4 and R16 is as follows: Program calculation: Multiply the vertical distance from the center point of the R11 block sub-4 to the X-direction reference line 12 by a value with single-pixel precision, and then add the corresponding correction value to this value. Determine whether it is qualified according to the corrected calculation result; Program calculation: Multiply the vertical distance from the center point of the R16 block sub-5 to the X-direction reference line 12 by a value with single-pixel precision, and then add the corresponding correction value to this value. Determine whether it is qualified according to the corrected calculation result; The method for detecting the width value SC-6 of the top surface of the R11 block sub-4 and R16 along the Y-direction reference line 13 is as follows: Program calculation: The vertical distance L1 between the outer edges between the first rectangular black frame 19 and the second rectangular black frame 20 (as Figure 7 、 Figure 8As shown in the figure, the vertical spacing L1 is equal to the width L2 of the top surface of the R11 block 4 along the Y-direction reference line 13 plus the width of the positive projection of the chamfer 18 at the first side 14 on the Y-direction reference line 13 plus the width of the positive projection of the chamfer 18 at the second side 15 on the Y-direction reference line 13), divided by 2 (that is, the inspection target is whether the size of half of the vertical spacing L1 is qualified, so it needs to be divided by 2), then multiplied by the value of single-pixel precision, and then this value is added with the corresponding correction value, and it is determined whether it is qualified according to the corrected calculation result; Program calculation: The vertical spacing between the outer edges of the third rectangular black frame and the fourth rectangular black frame (for the understanding of this vertical spacing, please refer to the vertical spacing L1) is divided by 2 (the purpose of this division by 2 is the same as the above division by 2), then multiplied by the value of single-pixel precision, and then this value is added with the corresponding correction value, and it is determined whether it is qualified according to the corrected calculation result; As Figure 7 , Figure 8 shown, the method for detecting the width value SC-7 of the top surfaces of the R11 block 4 and the R16 along the X-direction reference line 12 is: Program calculation of the vertical spacing L3 between the third side 16 and the fourth side 17 (as Figure 7As shown, add the sum of the widths of the orthographic projections of the chamfers 18 at the third side 16 on the X-direction reference line 12 and the widths of the orthographic projections of the chamfers 18 at the fourth side 17 on the X-direction reference line 12 (the sum of this vertical spacing L3 and the widths is the vertical spacing L4 in the figure). Divide the calculated value by 2 (that is, the inspection target is whether the size of half of the vertical spacing L4 is qualified, so it needs to be divided by 2), then multiply by the value of single-pixel accuracy, and then add the corresponding correction value. Determine whether it is qualified according to the corrected calculation result. Among them, the method for calculating the sum of the widths of the orthographic projections of the chamfers 18 at the third side 16 on the X-direction reference line 12 and the widths of the orthographic projections of the chamfers 18 at the fourth side 17 on the X-direction reference line 12 is: subtract the vertical spacing L2 between the first side 14 and the second side 15 from the vertical spacing L1 between the outer edges of the first rectangular black frame 19 and the second rectangular black frame 20 (in this embodiment, because the structures and sizes of the chamfers 18 at the first side 14, the second side 15, the third side 16, and the fourth side 17 of the R11 block 4 are the same, so the sum of the widths of the orthographic projections of the chamfers 18 at the third side 16 on the X-direction reference line 12 and the widths of the orthographic projections of the chamfers 18 at the fourth side 17 on the X-direction reference line 12 is equal to the sum of the widths of the orthographic projections of the chamfers 18 at the first side 14 on the Y-direction reference line 13 and the widths of the orthographic projections of the chamfers 18 at the second side 15 on the Y-direction reference line 13. Moreover, in the picture, the third side 16 and the chamfer 18 at the third side 16 of the R1 block 2 are both located in the fifth rectangular black frame 21, and the fourth side 17 and the chamfer 18 at the fourth side 17 of the R1 block 2 are located in the sixth rectangular black frame 22. Therefore, it is impossible to directly measure the vertical spacing L4 like measuring the vertical spacing L1. It can only indirectly measure the sum of the widths of the orthographic projections of the chamfers 18 at the first side 14 on the Y-direction reference line 13 and the widths of the orthographic projections of the chamfers 18 at the second side 15 on the Y-direction reference line 13 to measure the sum of the widths of the orthographic projections of the chamfers 18 at the third side 16 on the X-direction reference line 12 and the widths of the orthographic projections of the chamfers 18 at the fourth side 17 on the X-direction reference line 12, and finally measure the vertical spacing L4); The program calculates the vertical spacing between the seventh side and the eighth side (for the understanding of this vertical spacing, please refer to the vertical spacing L3), add the sum of the widths of the orthographic projections of the chamfers 18 at the seventh side on the X-direction reference line and the widths of the orthographic projections of the chamfers 18 at the eighth side on the X-direction reference line (for the understanding of the sum of this vertical spacing and the widths, please refer to the vertical spacing L4). Divide the calculated value by 2 (the purpose of this division by 2 is the same as the above division by 2), then multiply by the value of single-pixel accuracy, and then add the corresponding correction value. Determine whether it is qualified according to the corrected calculation result.Among them, the calculation method for the sum of the widths of the positive projections of the chamfers 18 at the seventh side on the X-direction reference line and the widths of the positive projections of the chamfers 18 at the eighth side on the X-direction reference line (for the calculation method here, please refer to the calculation method for the sum of the widths of the positive projections of the chamfers 18 at the third side 16 on the X-direction reference line 12 and the widths of the positive projections of the chamfers 18 at the fourth side 17 on the X-direction reference line 12) is: the vertical distance between the outer edges between the third rectangular black frame and the fourth rectangular black frame minus the vertical distance between the fifth side and the sixth side.;

[0025] The method for detecting the position degree SC-8 of the R11 block 4 is: Program calculation: Multiply the vertical distance from the center point of the R11 block 4 to the Y-direction reference line 13 by the value of single-pixel accuracy, then add the corresponding correction value to this value, and determine whether it is qualified according to the corrected calculation result.

[0026] The method for detecting the position degree SC-9 of the R16 block 5 is: Program calculation: Multiply the vertical distance from the center point of the R16 block 5 to the Y-direction reference line 13 by the value of single-pixel accuracy, then add the corresponding correction value to this value, and determine whether it is qualified according to the corrected calculation result.

[0027] The method for detecting the flatness SC-10 of the top surface of each block is: Obtain the measurement values of multiple third measurement points on the top surface of each block through the first line-scanning laser sensor, fit the measurement values of the Z-axis of the multiple third measurement points into the first reference plane by the least squares method, program to calculate the vertical distance from each third measurement point to the first reference plane respectively, program to calculate the absolute value of the difference between the maximum vertical distance and the minimum vertical distance, then add the corresponding correction value to this absolute value, and if the corrected difference is within 0.05 mm, the flatness is qualified.

[0028] Specifically, as Figure 9 shown, obtain the measurement values of the measurement points C9, C10, C11, C12, C13, C14, C15 on the top surface of the R1 block 2 through the first line-scanning laser sensor, fit the measurement values of the Z-axis of C9, C10, C11, C12, C13, C14, C15 into the first reference plane by the least squares method, program to calculate the vertical distances from the seven measurement points C9, C10, C11, C12, C13, C14, C15 to the first reference plane respectively, program to calculate the absolute value of the difference between the maximum vertical distance and the minimum vertical distance, then add the corresponding correction value to this absolute value, and if the corrected difference is within 0.05 mm, the flatness of the top surface of the R1 block 2 is qualified.

[0029] As Figure 9As shown, the measurement values of measurement points C16, C17, C18, C19, C20, C21, and C22 are obtained on the top surface of R6 block 3 by the first line-scanning laser sensor. The measurement values of the Z-axis of C16, C17, C18, C19, C20, C21, and C22 are fitted into the first reference plane by the least squares method. The program calculates the vertical distances from the seven measurement points C16, C17, C18, C19, C20, C21, and C22 to the first reference plane respectively. The program calculates the absolute value of the difference between the maximum vertical distance and the minimum vertical distance. Then, the corresponding correction value is added to this absolute value. If the corrected difference is within 0.05 mm, the flatness of the top surface of R6 block 3 is qualified.

[0030] As Figure 9 shown, the measurement values of measurement points C23, C24, C25, C26, C27, C28, and C29 are obtained on the top surface of R11 block 4 by the first line-scanning laser sensor. The measurement values of the Z-axis of C23, C24, C25, C26, C27, C28, and C29 are fitted into the first reference plane by the least squares method. The program calculates the vertical distances from the seven measurement points C23, C24, C25, C26, C27, C28, and C29 to the first reference plane respectively. The program calculates the absolute value of the difference between the maximum vertical distance and the minimum vertical distance. Then, the corresponding correction value is added to this absolute value. If the corrected difference is within 0.05 mm, the flatness of the top surface of R11 block 4 is qualified.

[0031] As Figure 9 shown, the measurement values of measurement points C30, C31, C32, C33, C34, C35, and C36 are obtained on the top surface of R16 block 5 by the first line-scanning laser sensor. The measurement values of the Z-axis of C30, C31, C32, C33, C34, C35, and C36 are fitted into the first reference plane by the least squares method. The program calculates the vertical distances from the seven measurement points C30, C31, C32, C33, C34, C35, and C36 to the first reference plane respectively. The program calculates the absolute value of the difference between the maximum vertical distance and the minimum vertical distance. Then, the corresponding correction value is added to this absolute value. If the corrected difference is within 0.05 mm, the flatness of the top surface of R16 block 5 is qualified.

[0032] The detection method for the thickness SC-11 of each block is as follows: Obtain the measurement values of the eleventh measurement point and the twelfth measurement point on the left and right sides of the front of the block through the first line-scanning laser sensor, obtain the measurement values of the thirteenth measurement point and the fourteenth measurement point on the back of the block that are directly opposite to the eleventh measurement point and the twelfth measurement point respectively through the second line-scanning laser sensor. Through the calculation method of S31, the program calculates the vertical distances between the eleventh measurement point and the thirteenth measurement point, and between the twelfth measurement point and the fourteenth measurement point respectively. Take the average of the two groups of vertical distances, then add the corresponding correction value to this average value, and determine whether it is qualified according to the calculation result after correction.

[0033] Specifically, as Figure 10 、 Figure 11 shown, obtain the measurement values of C1 and C2 on the left and right sides of the front of the R1 block 2 through the first line-scanning laser sensor, obtain the measurement values of F1 and F2 on the back of the R1 block 2 that are directly opposite to C1 and C2 respectively through the second line-scanning laser sensor. Through the calculation method of S31, the program calculates the vertical distances between C1 and F1, and between C2 and F2 respectively. Take the average of the two groups of vertical distances, then add the corresponding correction value to this average value, and determine whether it is qualified according to the calculation result after correction.

[0034] As Figure 10 、 Figure 11 shown, obtain the measurement values of C3 and C4 on the left and right sides of the front of the R6 block 3 through the first line-scanning laser sensor, obtain the measurement values of F3 and F4 on the back of the R6 block 3 that are directly opposite to C3 and C4 respectively through the second line-scanning laser sensor. Through the calculation method of S31, the program calculates the vertical distances between C3 and F3, and between C4 and F4 respectively. Take the average of the two groups of vertical distances, then add the corresponding correction value to this average value, and determine whether it is qualified according to the calculation result after correction.

[0035] As Figure 10 、 Figure 11 shown, obtain the measurement values of C5 and C6 on the left and right sides of the front of the R11 block 4 through the first line-scanning laser sensor, obtain the measurement values of F5 and F6 on the back of the R11 block 4 that are directly opposite to C5 and C6 respectively through the second line-scanning laser sensor. Through the calculation method of S31, the program calculates the vertical distances between C5 and F5, and between C6 and F6 respectively. Take the average of the two groups of vertical distances, then add the corresponding correction value to this average value, and determine whether it is qualified according to the calculation result after correction.

[0036] As Figure 10 、 Figure 11As shown, the measurement values of C7 and C8 on the left and right sides of the front of the R16 block 5 are obtained through the first line-scanning laser sensor, and the measurement values of F7 and F8 on the back of the R16 block 5 opposite to C7 and C8 are obtained through the second line-scanning laser sensor. Through the calculation method of S31, the program calculates the vertical distances between C7 and F7, and between C8 and F8 respectively. The average value of the two groups of vertical distances is taken, and then the corresponding correction value is added to this average value. Whether it is qualified is determined according to the calculation result after correction.

[0037] The detection method for the depth SC-12 of each second groove 11 relative to the back surface of the substrate 1 is as follows: The measurement value of the fifth measurement point on the bottom of the second groove 11 and the measurement value of the sixth measurement point on the back surface of the substrate 1 close to the fifth measurement point are obtained through the second line-scanning laser sensor. The program calculates the absolute value of the difference between the measurement values of the fifth measurement point and the sixth measurement point on the Z-axis, and then the corresponding correction value is added to this absolute value. Whether it is qualified is determined according to the calculation result after correction.

[0038] Specifically, as Figure 12 shown, the measurement value of H1 on the bottom of the second groove 11 and the measurement value of E1 on the back surface of the substrate 1 close to H1 are obtained through the second line-scanning laser sensor. The program calculates the absolute value of the difference between the measurement values of H1 and E1 on the Z-axis, and then the corresponding correction value is added to this absolute value. Whether it is qualified is determined according to the calculation result after correction.

[0039] As Figure 12 shown, the measurement value of H2 on the bottom of the second groove 11 and the measurement value of E2 on the back surface of the substrate 1 close to H2 are obtained through the second line-scanning laser sensor. The program calculates the absolute value of the difference between the measurement values of H2 and E2 on the Z-axis, and then the corresponding correction value is added to this absolute value. Whether it is qualified is determined according to the calculation result after correction.

[0040] As Figure 12 shown, the measurement value of H3 on the bottom of the second groove 11 and the measurement value of E3 on the back surface of the substrate 1 close to H3 are obtained through the second line-scanning laser sensor. The program calculates the absolute value of the difference between the measurement values of H3 and E3 on the Z-axis, and then the corresponding correction value is added to this absolute value. Whether it is qualified is determined according to the calculation result after correction.

[0041] As Figure 12 shown, the measurement value of H4 on the bottom of the second groove 11 and the measurement value of E4 on the back surface of the substrate 1 close to H4 are obtained through the second line-scanning laser sensor. The program calculates the absolute value of the difference between the measurement values of H4 and E4 on the Z-axis, and then the corresponding correction value is added to this absolute value. Whether it is qualified is determined according to the calculation result after correction.

[0042] The detection method for the vertical distance SC-13 between the top surface of the second step 8 and the top surface of the block in each block is as follows: Obtain the measurement value of the fourth measurement point on the top surface of the second step 8 in the block through the first line-scanning laser sensor. The program calculates the vertical distance from the fourth measurement point to the first reference plane, and then adds the corresponding correction value to this vertical distance. Determine whether it is qualified according to the corrected calculation result.

[0043] Specifically, as Figure 13 shown, obtain the measurement value of D1 on the top surface of the second step 8 in the R1 block 2 through the first line-scanning laser sensor. The program calculates the measurement values of the Z-axis of D1 to C9, C10, C11, C12, C13, C14, C15 and fits them into the vertical distance of the first reference plane by the least squares method. Then add the corresponding correction value to this vertical distance. Determine whether it is qualified according to the corrected calculation result.

[0044] As Figure 13 shown, obtain the measurement value of D3 on the top surface of the second step 8 in the R6 block 3 through the first line-scanning laser sensor. The program calculates the measurement values of the Z-axis of D3 to C16, C17, C18, C19, C20, C21, C22 and fits them into the vertical distance of the first reference plane by the least squares method. Then add the corresponding correction value to this vertical distance. Determine whether it is qualified according to the corrected calculation result.

[0045] As Figure 13 shown, obtain the measurement value of D5 on the top surface of the second step 8 in the R11 block 4 through the first line-scanning laser sensor. The program calculates the measurement values of the Z-axis of D5 to C23, C24, C25, C26, C27, C28, C29 and fits them into the vertical distance of the first reference plane by the least squares method. Then add the corresponding correction value to this vertical distance. Determine whether it is qualified according to the corrected calculation result.

[0046] As Figure 13 shown, obtain the measurement value of D7 on the top surface of the second step 8 in the R16 block 5 through the first line-scanning laser sensor. The program calculates the measurement values of the Z-axis of D7 to C30, C31, C32, C33, C34, C35, C36 and fits them into the vertical distance of the first reference plane by the least squares method. Then add the corresponding correction value to this vertical distance. Determine whether it is qualified according to the corrected calculation result.

[0047] The detection method for the thickness SC-14 of the substrate 1 is as follows: Obtain the measurement value of A1 on the front side of the substrate 1 through the first line-scanning laser sensor, obtain the measurement value of I1 on the back side of the substrate 1 opposite to A1 through the second line-scanning laser sensor. Through the calculation method of S31, the program calculates the vertical distance between the opposite A1 and I1, that is, the thickness value of the substrate 1. Then add the corresponding correction value to this thickness value, and determine whether it is qualified according to the corrected calculation result. Please refer to the detection method for the flatness SC-15 of the substrate 1.

[0048] The detection method for the flatness SC-15 of the substrate 1 is as follows: Obtain the measurement values of multiple seventh measurement points on the front side of the substrate 1 through the first line-scanning laser sensor, and obtain the measurement values of multiple eighth measurement points on the back side of the substrate 1 respectively opposite to the multiple seventh measurement points through the second line-scanning laser sensor. Through the calculation method of S31, the program calculates the vertical distances between the multiple pairs of opposite seventh measurement points and eighth measurement points respectively, that is, the thickness values. The program calculates the difference between the maximum thickness value and the minimum thickness value. Then add the corresponding correction value to this difference. When the corrected difference is within 0.1 mm, the flatness of the substrate 1 is qualified.

[0049] Specifically, obtain the measurement values of 28 measurement points A1 - A28 on the front side of the substrate 1 (as Figure 14 shown) through the first line-scanning laser sensor, and obtain the measurement values of 28 measurement points I1 - I28 on the back side of the substrate 1 respectively opposite to A1 - A28 (as Figure 15 shown) through the second line-scanning laser sensor. Through the calculation method of S31, the program calculates 28 groups of vertical distances from A1 to I1, A2 to I2, A3 to I3... A27 to I27, A28 to I28 respectively, that is, the thickness values. The program calculates the difference between the maximum thickness value and the minimum thickness value. Then add the corresponding correction value to this difference. When the corrected difference is within 0.1 mm, the flatness of the substrate 1 is qualified.

[0050] The detection method for the depth SC-16 of the first groove 10 in each block relative to the back side of the block is as follows: Obtain the measurement value of the ninth measurement point on the bottom of the first groove 10 of the block and the measurement values of multiple tenth measurement points on the back side of the block through the second scanning laser sensor. Fit the measurement values of the Z-axis of the multiple tenth measurement points into the second reference plane by the least squares method; the program calculates the vertical distance from the ninth measurement point to the second reference plane. Then add the corresponding correction value to this vertical distance, and determine whether it is qualified according to the corrected calculation result.

[0051] Specifically, as Figure 16As shown, the measurement value of G1 on the bottom of the first groove 10 of the R1 block sub - 2 is obtained through the second - scan laser sensor, and the measurement values of F9, F10, F11, and F12 on the reverse side of the R1 block sub - 2 are obtained. The measurement values of the Z - axes of multiple F9, F10, F11, and F12 are fitted into a second reference plane by the least - squares method. The program calculates the vertical distance from G1 to the second reference plane, then adds the corresponding correction value to this vertical distance, and determines whether it is qualified according to the corrected calculation result.

[0052] As Figure 16 shown, the measurement value of G2 on the bottom of the first groove 10 of the R1 block sub - 2 is obtained through the second - scan laser sensor, and the measurement values of F9, F10, F11, and F12 on the reverse side of the R1 block sub - 2 are obtained. The measurement values of the Z - axes of multiple F9, F10, F11, and F12 are fitted into a second reference plane by the least - squares method. The program calculates the vertical distance from G2 to the second reference plane, then adds the corresponding correction value to this vertical distance, and determines whether it is qualified according to the corrected calculation result.

[0053] As Figure 16 shown, the measurement value of G3 on the bottom of the first groove 10 of the R1 block sub - 2 is obtained through the second - scan laser sensor, and the measurement values of F9, F10, F11, and F12 on the reverse side of the R1 block sub - 2 are obtained. The measurement values of the Z - axes of multiple F9, F10, F11, and F12 are fitted into a second reference plane by the least - squares method. The program calculates the vertical distance from G3 to the second reference plane, then adds the corresponding correction value to this vertical distance, and determines whether it is qualified according to the corrected calculation result.

[0054] As Figure 16 shown, the measurement value of G4 on the bottom of the first groove 10 of the R1 block sub - 2 is obtained through the second - scan laser sensor, and the measurement values of F9, F10, F11, and F12 on the reverse side of the R1 block sub - 2 are obtained. The measurement values of the Z - axes of multiple F9, F10, F11, and F12 are fitted into a second reference plane by the least - squares method. The program calculates the vertical distance from G4 to the second reference plane, then adds the corresponding correction value to this vertical distance, and determines whether it is qualified according to the corrected calculation result.

[0055] As Figure 16 shown, the measurement value of G5 on the bottom of the first groove 10 of the R6 block sub - 3 is obtained through the second - scan laser sensor, and the measurement values of F13, F14, F15, and F16 on the reverse side of the R6 block sub - 3 are obtained. The measurement values of the Z - axes of multiple F13, F14, F15, and F16 are fitted into a second reference plane by the least - squares method. The program calculates the vertical distance from G5 to the second reference plane, then adds the corresponding correction value to this vertical distance, and determines whether it is qualified according to the corrected calculation result.

[0056] AsFigure 16 As shown, the second sweep laser sensor is used to obtain the measurement value of G6 on the bottom of the first groove 10 of the R6 block sub 3, and obtain the measurement values of F13, F14, F15, and F16 on the reverse side of the R6 block sub 3. The measurement values of the Z axes of multiple F13, F14, F15, and F16 are fitted into a second reference plane by the least squares method. The program calculates the vertical distance from G6 to the second reference plane, and then adds the corresponding correction value to this vertical distance. It is determined whether it is qualified according to the corrected calculation result.

[0057] As Figure 16 shown, the second sweep laser sensor is used to obtain the measurement value of G7 on the bottom of the first groove 10 of the R6 block sub 3, and obtain the measurement values of F13, F14, F15, and F16 on the reverse side of the R6 block sub 3. The measurement values of the Z axes of multiple F13, F14, F15, and F16 are fitted into a second reference plane by the least squares method. The program calculates the vertical distance from G7 to the second reference plane, and then adds the corresponding correction value to this vertical distance. It is determined whether it is qualified according to the corrected calculation result.

[0058] As Figure 16 shown, the second sweep laser sensor is used to obtain the measurement value of G8 on the bottom of the first groove 10 of the R6 block sub 3, and obtain the measurement values of F13, F14, F15, and F16 on the reverse side of the R6 block sub 3. The measurement values of the Z axes of multiple F13, F14, F15, and F16 are fitted into a second reference plane by the least squares method. The program calculates the vertical distance from G8 to the second reference plane, and then adds the corresponding correction value to this vertical distance. It is determined whether it is qualified according to the corrected calculation result.

[0059] As Figure 16 shown, the second sweep laser sensor is used to obtain the measurement value of G9 on the bottom of the first groove 10 of the R11 block sub 4, and obtain the measurement values of F17, F18, F19, and F20 on the reverse side of the R11 block sub 4. The measurement values of the Z axes of multiple F17, F18, F19, and F20 are fitted into a second reference plane by the least squares method. The program calculates the vertical distance from G9 to the second reference plane, and then adds the corresponding correction value to this vertical distance. It is determined whether it is qualified according to the corrected calculation result.

[0060] As Figure 16 shown, the second sweep laser sensor is used to obtain the measurement value of G10 on the bottom of the first groove 10 of the R11 block sub 4, and obtain the measurement values of F17, F18, F19, and F20 on the reverse side of the R11 block sub 4. The measurement values of the Z axes of multiple F17, F18, F19, and F20 are fitted into a second reference plane by the least squares method. The program calculates the vertical distance from G10 to the second reference plane, and then adds the corresponding correction value to this vertical distance. It is determined whether it is qualified according to the corrected calculation result.

[0061] As Figure 16 shown, the second sweep laser sensor is used to obtain the measured value of G11 on the bottom of the first groove 10 of the R11 block 4, and obtain the measured values of F17, F18, F19, and F20 on the reverse side of the R11 block 4. The measured values of the Z-axis of multiple F17, F18, F19, and F20 are fitted into a second reference plane by the least squares method. The program calculates the vertical distance from G11 to the second reference plane, and then adds the corresponding correction value to this vertical distance. Whether it is qualified is determined according to the corrected calculation result.

[0062] As Figure 16 shown, the second sweep laser sensor is used to obtain the measured value of G12 on the bottom of the first groove 10 of the R11 block 4, and obtain the measured values of F17, F18, F19, and F20 on the reverse side of the R11 block 4. The measured values of the Z-axis of multiple F17, F18, F19, and F20 are fitted into a second reference plane by the least squares method. The program calculates the vertical distance from G12 to the second reference plane, and then adds the corresponding correction value to this vertical distance. Whether it is qualified is determined according to the corrected calculation result.

[0063] As Figure 16 shown, the second sweep laser sensor is used to obtain the measured value of G13 on the bottom of the first groove 10 of the R16 block 5, and obtain the measured values of F21, F22, F23, and F24 on the reverse side of the R16 block 5. The measured values of the Z-axis of multiple F21, F22, F23, and F24 are fitted into a second reference plane by the least squares method. The program calculates the vertical distance from G13 to the second reference plane, and then adds the corresponding correction value to this vertical distance. Whether it is qualified is determined according to the corrected calculation result.

[0064] As Figure 16 shown, the second sweep laser sensor is used to obtain the measured value of G14 on the bottom of the first groove 10 of the R16 block 5, and obtain the measured values of F21, F22, F23, and F24 on the reverse side of the R16 block 5. The measured values of the Z-axis of multiple F21, F22, F23, and F24 are fitted into a second reference plane by the least squares method. The program calculates the vertical distance from G14 to the second reference plane, and then adds the corresponding correction value to this vertical distance. Whether it is qualified is determined according to the corrected calculation result.

[0065] As Figure 16As shown in the figure, the second scanning laser sensor is used to obtain the measured value of G15 on the bottom of the first groove 10 of the R16 block 5, and the measured values of F21, F22, F23, and F24 on the back surface of the R16 block 5. The measured values of the Z-axis of multiple F21, F22, F23, and F24 are fitted into a second reference plane by the least squares method. The program calculates the vertical distance from G15 to the second reference plane, and then adds the corresponding correction value to this vertical distance. Whether it is qualified is determined according to the corrected calculation result.

[0066] As Figure 16 shown in the figure, the second scanning laser sensor is used to obtain the measured value of G16 on the bottom of the first groove 10 of the R16 block 5, and the measured values of F21, F22, F23, and F24 on the back surface of the R16 block 5. The measured values of the Z-axis of multiple F21, F22, F23, and F24 are fitted into a second reference plane by the least squares method. The program calculates the vertical distance from G16 to the second reference plane, and then adds the corresponding correction value to this vertical distance. Whether it is qualified is determined according to the corrected calculation result.

[0067] The above embodiments are only for illustrating the technical concept and features of the present invention, and their purpose is to enable those who are familiar with this technology to understand the content of the present invention and implement it accordingly, and it cannot be used to limit the protection scope of the present invention. For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or basic characteristics of the present invention. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, it is intended to include all changes that fall within the meaning and scope of the equivalent elements of the claims in the present invention.

Claims

1. A method for detecting a heat sink, characterized in that: S1. Start the heat sink detection device, which includes a line array camera, a first line scan laser sensor, and a second line scan laser sensor, wherein the heat sink is photographed directly below the line array camera, the first line scan laser sensor and the second line scan laser sensor are arranged in the up and down directions, and the heat sink is located between the first line scan laser sensor and the second line scan laser sensor and is scanned; S2. Put the reference piece into two tests to initialize and calibrate the first line scan laser sensor and the second line scan laser sensor in turn, and store the calibration data; S3. Put the heat sink into the test, the linear array camera takes a backlight picture of the heat sink, and the program calculates the position and aperture of the heat sink; the first line scan laser sensor scans the front of the heat sink, and the second line scan laser sensor scans the back of the heat sink. After the scanning is completed, the data of the measured points are recorded, and the program calculates the flatness, thickness, and depth of the heat sink to screen out NG products.

2. A method for detecting a heat sink according to claim 1, characterized in that: When the first line scan laser sensor and the second line scan laser sensor are initialized in step S2, the measured value of the Z axis in the measured value of the first measuring point on the front side of the heat sink by the first line scan laser sensor is A, and the measured value of the Z axis in the measured value of the second measuring point on the back side of the heat sink by the second line scan laser sensor is B, and the first measuring point and the second measuring point are directly opposite in the vertical direction; it is known that the standard value of the vertical spacing between the first measuring point and the second measuring point is C, then BC=D; the measured value A of the first line scan laser sensor and the calculated value D are recorded in the configuration file as the calibration values ​​of the first measuring point and the second measuring point; The calculation method of the thickness of the heat sink in step S3 is: the first line scan laser sensor and the second line scan laser sensor scan the heat sink, read the corresponding calibration value in the configuration file, the measurement value of the Z axis in the measurement value of the first measurement point measured by the first line scan laser sensor is A1, and the measurement value of the Z axis in the measurement value of the second measurement point measured by the second line scan laser sensor is B1, A1-A=E, B1-D=F, then the vertical distance between the first measurement point and the second measurement point is E+F=G; the thickness correction value of the first measurement point is known to be H, then the vertical distance between the first measurement point and the second measurement point calculated by the final program, that is, the final thickness value is I, I=G+H.

3. A method for detecting a heat sink according to claim 2, characterized in that: The heat sink comprises a substrate, a plurality of blocks, and a copper tube, wherein the plurality of blocks are fixedly connected to the substrate by the copper tubes respectively; a notch for accommodating the plurality of blocks is provided on the substrate, and each block is not in contact with the substrate; the two sides of the length direction of each block are respectively a first step and a second step, and a connecting arc surface is provided between the top surface of the first step and the top surface of the block; a plurality of first grooves are provided inwardly on the reverse side of each block, and a plurality of second grooves are provided inwardly on the reverse side of the substrate corresponding to the plurality of blocks; a P1 reference circular hole and a P2 reference long strip hole are provided through the substrate, and in the front view of the heat sink, the center point of the P1 reference circular hole and the center point of the P2 reference long strip hole are on the same straight line, and the straight line is parallel to the length direction of the block; The method for obtaining the thickness correction value H of the first measuring point is: measuring the actual thickness values ​​between the first measuring point and the second measuring point of multiple heat sinks by a mechanical measuring instrument, and then respectively putting the multiple heat sinks into the heat sink detection equipment for detection, subtracting the actual thickness value of each heat sink from the detected thickness value detected by the heat sink detection equipment to obtain the thickness difference, and taking the average value H of the thickness difference values ​​of the multiple heat sinks, then the thickness correction value is H.

4. A method for detecting a heat sink according to claim 3, characterized in that: The detection method of the flatness SC-10 of the top surface of each block is as follows: the measurement values ​​of multiple third measurement points on the top surface of each block are obtained by the first line scanning laser sensor, the Z-axis measurement values ​​of the multiple third measurement points are fitted into the first reference plane by the least square method, the program calculates the vertical distance from each third measurement point to the first reference plane, the program calculates the absolute value of the difference between the maximum vertical distance and the minimum vertical distance, and then the absolute value is added with the corresponding correction value. If the difference after correction is within 0.05 mm, the flatness is qualified; The detection method of the vertical distance SC-13 between the top surface of the second step in each block and the top surface of the block is: obtain the measurement value of the fourth measuring point on the top surface of the second step in the block through the first line scanning laser sensor, the program calculates the vertical distance from the fourth measuring point to the first reference plane, and then the vertical distance is added with the corresponding correction value, and the qualification is determined according to the corrected calculation result.

5. The method for detecting a heat sink according to claim 3, characterized in that: The detection method of the depth SC-12 of each second groove relative to the back side of the substrate is: obtain the measurement value of the fifth measurement point on the bottom of the second groove by the second line scanning laser sensor, obtain the measurement value of the sixth measurement point on the back side of the substrate close to the fifth measurement point, the program calculates the absolute value of the difference between the measurement value of the fifth measurement point and the measurement value of the sixth measurement point on the Z axis, and then adds the corresponding correction value to the absolute value, and determines whether it is qualified according to the corrected calculation result.

6. A method for detecting a heat sink according to claim 3, characterized in that: The detection method of the flatness SC-15 of the substrate is: obtaining the measurement values ​​of multiple seventh measurement points on the front side of the substrate through the first line scanning laser sensor, obtaining the measurement values ​​of multiple eighth measurement points on the back side of the substrate respectively opposite to the multiple seventh measurement points through the second line scanning laser sensor, and through the calculation method of S31, the program respectively calculates the vertical distances, that is, the thickness values, of the multiple seventh measurement points and the multiple eighth measurement points opposite to each other. The program calculates the difference between the maximum thickness value and the minimum thickness value, and then adds the corresponding correction value to the difference. When the corrected difference is within 0.1 mm, the flatness of the substrate is qualified.

7. A method for detecting a heat sink according to claim 3, characterized in that: The detection method of the depth SC-16 of the first groove in each block relative to the back surface of the block is: obtain the measurement value of the ninth measuring point on the bottom of the first groove of the block through the second scanning laser sensor, obtain the measurement values ​​of multiple tenth measuring points on the back surface of the block, and fit the Z-axis measurement values ​​of the multiple tenth measuring points into a second reference plane through the least squares method; the program calculates the vertical distance from the ninth measuring point to the second reference plane, and then adds the corresponding correction value to the vertical distance, and determines whether it is qualified according to the corrected calculation result.

8. The method for detecting a heat sink according to claim 3, characterized in that: The detection method of the thickness SC-11 of each block is as follows: the measurement values ​​of the eleventh and twelfth measurement points on the left and right sides of the front side of the block are obtained by the first line scanning laser sensor, and the measurement values ​​of the thirteenth and fourteenth measurement points on the back side of the block which are respectively opposite to the eleventh and twelfth measurement points are obtained by the second line scanning laser sensor. Through the calculation method of S31, the program calculates the vertical distances between the eleventh and thirteenth measurement points, and between the twelfth and fourteenth measurement points, respectively, and the two groups of vertical distances are averaged, and then the average is added with the corresponding correction value, and whether it is qualified is determined according to the calculation result after correction; The detection method of the thickness SC-14 of the substrate is: obtain the measurement value of the fifteenth measuring point on the front side of the substrate through the first line scanning laser sensor, obtain the measurement value of the sixteenth measuring point on the back side of the substrate opposite to the fifteenth measuring point through the second line scanning laser sensor, and through the calculation method of S31, the program calculates the vertical distance between the fifteenth measuring point and the sixteenth measuring point, that is, the thickness value of the substrate, and then the thickness value is added with the corresponding correction value, and the qualification is determined according to the corrected calculation result.

9. The method for detecting a heat sink according to claim 3, characterized in that: The number of the blocks is four, namely, R1 block arranged at the upper left of the substrate, R6 block arranged at the upper right of the substrate, R11 block arranged at the lower left of the substrate, and R16 block arranged at the lower right of the substrate; the line connecting the center point of the P1 reference circular hole to the center point of the P2 reference long strip hole is used as the X-direction reference line, and on the X-direction reference line, the vertical line whose vertical point is the center point of the P1 reference circular hole is used as the Y-direction reference line; From the picture taken by the linear array camera, the center point of the P1 reference circular hole, the center point of the P2 reference strip hole, the center point of the R1 block, the center point of the R6 block, the center point of the R11 block, and the center of the R16 block are found within a specified range; the two sides of the top surface of the R11 block parallel to the X-direction reference line are respectively the first side and the second side, and the two sides of the top surface of the R11 block parallel to the Y-direction reference line are respectively the third side and the fourth side; the two sides of the top surface of the R16 block parallel to the X-direction reference line are respectively the fifth side and the sixth side, and the two sides of the top surface of the R16 block parallel to the Y-direction reference line are respectively the seventh side and the eighth side; the first side, the second side, the third side, the fourth side, the fifth side, the sixth side, the seventh side, and the eighth side are all chamfered; when the linear array camera takes a picture, the first side and the chamfer thereat form a first rectangular black frame, the second side and the chamfer thereat form a second rectangular black frame, the fifth side and the chamfer thereat form a third rectangular black frame, and the sixth side and the chamfer thereat form a fourth rectangular black frame.

10. A method for detecting a heat sink according to claim 9, characterized in that: The method for detecting the position degree SC-1 of the R1 block is as follows: the program calculates: the vertical distance from the center point of the R1 block to the Y-direction reference line multiplied by the value of single pixel accuracy, and then the value is added with the corresponding correction value, and the qualification is determined according to the calculation result after correction; The method for detecting the position degree SC-2 of the R6 block is as follows: the program calculates: the vertical distance from the center point of the R6 block to the Y-direction reference line multiplied by the value of single pixel accuracy, and then the value is added with the corresponding correction value, and the qualification is determined according to the calculation result after correction; The method for detecting the position degree SC-3 of the R6 block is as follows: the program calculates: the vertical distance from the center point of the R6 block to the X-direction reference line multiplied by the value of single pixel accuracy, and then the value is added with the corresponding correction value, and the qualification is determined according to the calculation result after correction; The measuring method for detecting the hole width SC-4 of the P2 reference long hole is as follows: the program calculates: the hole width of the P2 reference long hole is multiplied by the value of single pixel accuracy, and then the value is added with the corresponding correction value, and the qualified is determined according to the calculation result after correction; The method for detecting the position degree SC-5 of the R11 block and the R16 block is as follows: the program calculates: the vertical distance from the center point of the R11 block to the X-direction reference line multiplied by the value of single pixel precision, and then the value is added with the corresponding correction value, and the qualified is determined according to the calculation result after correction; the program calculates: the vertical distance from the center point of the R16 block to the X-direction reference line multiplied by the value of single pixel precision, and then the value is added with the corresponding correction value, and the qualified is determined according to the calculation result after correction; The method for detecting the width value SC-6 of the top surface of the R11 block and the R16 along the Y direction reference line is as follows: the program calculates: the vertical distance between the outer edges of the first rectangular black frame and the second rectangular black frame is divided by 2 and then multiplied by the value of single pixel precision, and then the value is added with the corresponding correction value, and whether it is qualified is determined according to the calculation result after correction; the program calculates: the vertical distance between the outer edges of the third rectangular black frame and the fourth rectangular black frame is divided by 2 and then multiplied by the value of single pixel precision, and then the value is added with the corresponding correction value, and whether it is qualified is determined according to the calculation result after correction; The method for detecting the width value SC-7 of the top surface of the R11 block and R16 along the X-direction reference line is as follows: the program calculates the vertical spacing between the third side and the fourth side, and adds the width of the orthographic projection of the chamfer at the third side on the X-direction reference line and the width of the orthographic projection of the chamfer at the fourth side on the X-direction reference line, divides the calculated value by 2 and then multiplies it by the value of single pixel precision, and then adds the corresponding correction value to the value, and determines whether it is qualified according to the calculation result after correction; wherein, the calculation method for the width of the orthographic projection of the chamfer at the third side on the X-direction reference line and the width of the orthographic projection of the chamfer at the fourth side on the X-direction reference line is: the width of the outer edge between the first rectangular black frame and the second rectangular black frame The program calculates the vertical spacing between the seventh side and the eighth side, and adds the width of the orthographic projection of the chamfer at the seventh side on the X-direction reference line and the width of the orthographic projection of the chamfer at the eighth side on the X-direction reference line. The calculated value is divided by 2 and then multiplied by the value of single pixel precision. The value is then added with the corresponding correction value, and the qualification is determined according to the calculation result after correction. Among them, the calculation method of the sum of the width of the orthographic projection of the chamfer at the seventh side on the X-direction reference line and the width of the orthographic projection of the chamfer at the eighth side on the X-direction reference line is: the vertical spacing between the outer edges of the third rectangular black frame and the fourth rectangular black frame minus the vertical spacing between the fifth side and the sixth side; The method for detecting the position degree SC-8 of the R11 block is as follows: the program calculates: the vertical distance from the center point of the R11 block to the Y-direction reference line multiplied by the value of single pixel accuracy, and then the value is added with the corresponding correction value, and the qualified is determined according to the calculation result after correction; The method for detecting the position degree SC-9 of the R16 block is as follows: the program calculates: the vertical distance from the center point of the R16 block to the Y direction baseline multiplied by the value of single pixel accuracy, and then the value is added with the corresponding correction value, and the qualification is determined based on the corrected calculation result.

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