Transparent sample unidirectional degree measuring system and method based on angle resolution spectrometer

Abstract

The invention discloses a transparent sample unidirectional degree measurement system and method based on an angle resolution spectrometer. The system comprises a reflection end module, a transmission end module, a detection end module and an objective table, the reflection end module is used for generating a reflection signal; the transmission end module is used for generating a transmission signal; the detection end module is arranged on one side of the reflection end module and is used for extracting an orthogonal polarization signal and generating an angular spectrum; the objective table is arranged between the reflection end module and the transmission end module and is used for fixing a transparent sample to be detected. Compared with the prior art, the orthogonal measurement technology is introduced, the influence of the background spectrum on the intrinsic spectrum of the sample can be filtered out, a halogen lamp which is a wide-spectrum light source instead of monochromatic laser is used as a light source, the unidirectional angular spectrum of the to-be-measured sample can be rapidly obtained, and the practicability of the unidirectional measurement method is further expanded.

Description

Technical Field

[0001] The present invention relates to the technical field of optical measurement, and more specifically, to a unidirectional measurement system and method for a transparent sample based on an angle-resolved spectrometer. Background Art

[0002] Asymmetric radiation is a common optical property of micro-nano sub-wavelength structures (such as metagrating, photonic crystal), which is manifested as the difference in the amplitude and phase of the upward / downward radiation field. Among them, the difference in the up and down radiation amplitudes (radiation unidirectionality) is the key to affecting the light efficiency utilization rate, and has received extensive attention in the research of micro-nano sub-wavelength photonic components such as grating couplers, on-chip lasers, and optical antennas. Therefore, measuring the unidirectionality of the system is the key to designing spectral control optical components using asymmetric radiation.

[0003] At present, there are few measurement methods for unidirectionality. A typical measurement method is to use a laser and a rotary table to fixedly measure the unidirectionality of a transparent sample at certain wavelengths and angles, and it is difficult to obtain a complete unidirectional angular spectrum. At the same time, the adjustment steps of this measurement method are relatively complex, and the requirements for experimental conditions and experimental equipment are relatively high.

[0004] At the same time, although a conventional angle-resolved spectrometer can quickly obtain the transmission and reflection angular spectra of a sample, due to the influence of background information, the measured transmission and reflection signals cannot obtain the intrinsic information submerged in the background information, and thus the required unidirectional angular spectrum cannot be obtained.

[0005] It can be seen that the existing experimental methods face many challenges when measuring the unidirectionality of a transparent sample, such as long measurement time, complex system, and limited measurement accuracy; while the angle-resolved spectrometer that can quickly obtain the angular spectrum of the sample cannot obtain the intrinsic information of the sample and cannot measure the unidirectional angular spectrum. Therefore, how to eliminate the background information in the angle-resolved spectrometer and realize the rapid measurement of the unidirectionality in the transparent sample using the angle-resolved spectrometer is an important issue for realizing rapid unidirectional measurement.

[0006] Therefore, in combination with the above requirements and the defects of the existing technology, the present application proposes a unidirectional measurement system and method for a transparent sample based on an angle-resolved spectrometer. Summary of the Invention

[0007] The present invention provides a unidirectional measurement system and method for a transparent sample based on an angle-resolved spectrometer, which introduces an orthogonal measurement technology to filter the influence of the background spectrum on the intrinsic spectrum of the sample. A halogen lamp, a broadband light source rather than a monochromatic laser, is used as the light source, and the unidirectional angular spectrum of the sample to be measured can be quickly obtained, further expanding the practicality of the unidirectional measurement method.

[0008] The primary object of the present invention is to solve the above technical problems, and the technical solution of the present invention is as follows:

[0009] In the first aspect of the present invention, a unidirectional measurement system for a transparent sample based on an optical angular resolution spectrometer is provided, including: a reflection end module, a transmission end module, a detection end module, and a stage; the reflection end module is used to generate a reflection signal; the transmission end module is used to generate a transmission signal; the detection end module is arranged on one side of the reflection end module and is used to extract orthogonally polarized signals and generate an angular spectrum; the stage is arranged between the reflection end module and the transmission end module and is used to fix the transparent sample to be measured.

[0010] Further, the reflection end module includes a reflection end halogen lamp, a first s-polarizing plate, a first semi-transparent semi-reflecting mirror, and a first objective lens assembled in sequence; the transmission end module includes a first condenser lens, a second s-polarizing plate, and a transmission end halogen lamp arranged in sequence; the stage is arranged between the first objective lens and the first condenser lens; the detection end module includes a second semi-transparent semi-reflecting mirror, a charge-coupled device and a first lens arranged in the reflection light path direction of the second semi-transparent semi-reflecting mirror, and a 4F filtering system, a slit, and a near-infrared spectrometer arranged in the transmission light path direction of the second semi-transparent semi-reflecting mirror; the second semi-transparent semi-reflecting mirror is arranged on the reflection light path of the first semi-transparent semi-reflecting mirror.

[0011] Further, the 4F filtering system includes: a second lens, a p-polarizing plate, and a third lens; the p-polarizing plate is arranged at the common focal point between the second lens and the third lens; the second semi-transparent semi-reflecting mirror is arranged at the other focal point of the second lens; the slit is arranged at the other focal point of the third lens.

[0012] Further, the collimated light beam emitted by the reflection end halogen lamp passes through the first s-polarizing plate and the first semi-transparent semi-reflecting mirror and is focused by the first objective lens onto the transparent sample to be measured, and after reflection, it is projected onto the k-plane; the collimated light beam emitted by the transmission end halogen lamp passes through the second s-polarizing plate and the first condenser lens and directly transmits through the transparent sample to be measured and is projected onto the k-plane; the frequency domain information on the k-plane is reflected by the first semi-transparent semi-reflecting mirror to the second semi-transparent semi-reflecting mirror, and is divided into two beams of light through reflection and transmission. One beam of light is focused by the first lens onto the charge-coupled device to confirm the sample position, and the other beam of light is orthogonally filtered by the 4F filtering system and enters the near-infrared spectrometer through the slit to obtain the orthogonal measurement signal of the sample.

[0013] Further, the polarization directions of the first s-polarizing plate and the second s-polarizing plate are perpendicular to the plane of the paper, and the polarization direction of the p-polarizing plate is parallel to the plane of the paper.

[0014] Further, the emitted light of both the reflection-end halogen lamp and the transmission-end halogen lamp is polychromatic light, and its effective wavelength is between 350 nm and 1700 nm; the measurement wavelength of the near-infrared spectrometer is between 1100 nm and 1600 nm.

[0015] In a second aspect of the present invention, a method for unidirectional measurement of a transparent sample based on an angular resolution spectrometer is provided. This method is used for the unidirectional measurement system of a transparent sample based on an angular resolution spectrometer. The transparent sample is placed on a stage, a reflection signal is provided by a reflection-end module, a transmission signal is provided by a transmission-end module, and an orthogonal polarization signal is acquired by a detection-end module and an angular spectrum is generated, including the following steps:

[0016] S1. Measure the angular spectrum of the reflected orthogonal signal when the front side of the transparent sample faces upward.

[0017] S2. Measure the angular spectrum of the transmitted orthogonal signal when the front side of the transparent sample faces downward.

[0018] S3. Extract the eigenmode signal intensities at each angle in the reflection and transmission angular spectra.

[0019] S4. Calculate the unidirectional angular spectrum of the transparent sample according to the eigenmode signal intensities at each angle.

[0020] Further, the specific process of step S1 is as follows: Place the transparent sample face-up on the stage, adjust the first objective lens and focus the collimated s-polarized polychromatic light on the transparent sample, and measure the angular spectrum of the reflected orthogonal signal through the transmission-end module; the specific process of step S2 is as follows: Place the sample face-down on the stage, focus the collimated light beam on the sample with the objective lens on the sample, and measure the angular spectrum of the transmitted orthogonal signal.

[0021] Further, the specific process of step S3 is as follows: Select the position with the strongest resonance signal in the reflected orthogonal signal angular spectrum at each angle, and this position is the upward eigen-orthogonal signal I up (θ,λ); select the position with the strongest resonance signal in the transmitted orthogonal signal angular spectrum at each angle, and this position is the downward eigen-orthogonal signal I down (θ,λ).

[0022] Further, the specific calculation process of step S4 is as follows:

[0023]

[0024] where η(θ,λ) represents the unidirectional angular spectrum of the transparent sample (205), and I up (θ,λ) represents the eigen-orthogonal signal intensity of the reflected orthogonal signal angular spectrum, and I down (θ,λ) represents the eigen-orthogonal signal intensity of the transmitted orthogonal signal angular spectrum.

[0025] Compared with the prior art, the beneficial effects of the technical solution of the present invention are as follows:

[0026] The present invention provides a unidirectional measurement system and method for a transparent sample based on an angular resolution spectrometer, which can eliminate the influence of background signals on the intrinsic signals of the sample, solve the biggest problem of measuring the unidirectionality of the sample, and realize the measurement of the unidirectionality of the sample. A halogen lamp is used as the light source. Compared with a laser light source, the requirements for the measuring instrument are greatly reduced, and the adjustment steps of the experimental system are also greatly reduced. The angular resolution spectrometer used can quickly obtain the required signal angular spectrum, and the unidirectional angular spectrum of the sample can be obtained only by two measurements, greatly improving the measurement speed. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a structural diagram of a unidirectional measurement system for a transparent sample based on an angular resolution spectrometer according to the present invention.

[0028] Figure 2 It is an orthogonal signal angular spectrum diagram obtained by the measurement system in an embodiment of the present invention.

[0029] Figure 3 It is a unidirectional angular spectrum diagram obtained by the measurement system and method in an embodiment of the present invention.

[0030] Figure 4 It is a flowchart of a unidirectional measurement method for a transparent sample based on an angular resolution spectrometer according to the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0031] In order to more clearly understand the above objects, features and advantages of the present invention, the present invention will be further described in detail below with reference to the drawings and specific embodiments. It should be noted that, without conflict, the embodiments of the present application and the features in the embodiments can be combined with each other.

[0032] In the following description, many specific details are set forth in order to fully understand the present invention. However, the present invention can also be implemented in other ways different from those described herein. Therefore, the protection scope of the present invention is not limited by the specific embodiments disclosed below.

[0033] Embodiment 1

[0034] As Figure 1As shown in the figure, the present invention provides a unidirectional measurement system for transparent samples based on an angle-resolved spectrometer, comprising: a reflection end module, a transmission end module, a detection end module, and a stage; the reflection end module is used to generate a reflection signal; the transmission end module is used to generate a transmission signal; the detection end module is arranged on one side of the reflection end module and is used to extract orthogonally polarized signals and generate an angular spectrum; the stage is arranged between the reflection end module and the transmission end module and is used to fix the transparent sample 205 to be measured.

[0035] The reflection end module includes a reflection end halogen lamp 201, a first s-polarizing plate 202, a first half-transmissive and half-reflective mirror 203, and a first objective lens 204 assembled in sequence; the transmission end module includes a first condenser lens 206, a second s-polarizing plate 207, and a transmission end halogen lamp 208 arranged in sequence; the stage is arranged between the first objective lens 204 and the first condenser lens 206; the detection end module includes a second half-transmissive and half-reflective mirror 211, a charge-coupled device 209 and a first lens 210 arranged in the reflection light path direction of the second half-transmissive and half-reflective mirror 211, a 4F filtering system, a slit 215, and a near-infrared spectrometer 216 arranged in the transmission light path direction of the second half-transmissive and half-reflective mirror 211; the second half-transmissive and half-reflective mirror 211 is arranged on the reflection light path of the first half-transmissive and half-reflective mirror 203. The 4F filtering system includes: a second lens 212, a p-polarizing plate 213, and a third lens 214; the p-polarizing plate 213 is arranged at the common focal point between the second lens 212 and the third lens 214; the second half-transmissive and half-reflective mirror 211 is arranged at the other focal point of the second lens 212; the slit 215 is arranged at the other focal point of the third lens 214.

[0036] The collimated light beam emitted by the reflection end halogen lamp 201 passes through the first s-polarizing plate 202 and the first half-transmissive and half-reflective mirror 203 and is then focused by the first objective lens 204 onto the transparent sample 205 to be measured, and after reflection, it is projected onto the k-plane; the collimated light beam emitted by the transmission end halogen lamp 208 passes through the second s-polarizing plate 207 and the first condenser lens 206 and directly passes through the transparent sample 205 to be measured and is projected onto the k-plane; the frequency-domain information on the k-plane is reflected by the first half-transmissive and half-reflective mirror 203 to the second half-transmissive and half-reflective mirror 211, and is split into two beams of light through reflection and transmission. One beam of light is focused by the first lens 210 onto the charge-coupled device 209 to confirm the sample position, and the other beam of light is orthogonally filtered by the 4F filtering system and then enters the near-infrared spectrometer 216 through the slit 215 to obtain the orthogonal measurement signal of the sample.

[0037] In a specific embodiment, the polarization directions of the first s-polarizing sheet 202 and the second s-polarizing sheet 207 are perpendicular to the plane of the paper, and the polarization direction of the p-polarizing sheet 213 is parallel to the plane of the paper. The emitted lights of the reflection-end halogen lamp 201 and the transmission-end halogen lamp 208 are both polychromatic lights, and their effective wavelengths are between 350 nm and 1700 nm; the measurement wavelength of the near-infrared spectrometer 216 is between 1100 nm and 1600 nm.

[0038] According to the above content, the present invention can eliminate the influence of background signals on the intrinsic signals of samples, solve the biggest problem of measuring the one-dimensionality of samples, and realize the measurement of the one-dimensionality of samples. A halogen lamp is used as the light source. Compared with a laser light source, the requirements for the measuring instrument are greatly reduced, and the adjustment steps of the experimental system are also greatly reduced. The angle-resolved spectrometer used can quickly obtain the required signal angular spectrum, and the one-dimensional angular spectrum of the sample can be obtained only by two measurements, greatly improving the measurement speed.

[0039] Embodiment 2

[0040] As Figure 4 shown, the second aspect of the present invention provides a method for measuring the one-dimensionality of a transparent sample based on an angle-resolved spectrometer. This method is used for the above-mentioned measurement system for the one-dimensionality of a transparent sample based on an angle-resolved spectrometer. The transparent sample 205 is placed on the stage. The reflection signal is provided by the reflection-end module, the transmission signal is provided by the transmission-end module, and the orthogonal polarization signal is acquired by the detection-end module and an angular spectrum is generated, including the following steps:

[0041] S1. Measure the reflection orthogonal signal angular spectrum when the transparent sample 205 is facing upward.

[0042] S2. Measure the transmission orthogonal signal angular spectrum when the transparent sample 205 is facing downward.

[0043] S3. Extract the intrinsic mode signal intensities at each angle in the reflection and transmission angular spectra.

[0044] S4. Calculate the one-dimensional angular spectrum of the transparent sample 205 according to the intrinsic mode signal intensities at each angle.

[0045] The specific process of the step S1 is as follows: Place the transparent sample 205 facing upward on the stage, adjust the first objective lens 204 and focus the collimated s-polarized polychromatic light on the transparent sample 205, and measure the reflection orthogonal signal angular spectrum through the transmission-end module; the specific process of the step S2 is as follows: Place the sample facing downward on the stage, focus the collimated light beam on the sample with the objective lens on the sample, and measure the transmission orthogonal signal angular spectrum.

[0046] The specific process of step S3 is as follows: Select the position with the strongest resonant signal in the angular spectrum of the reflected orthogonal signal for each angle, and this position is the upward eigen-orthogonal signal I of the eigenmode up (θ,λ); Select the position with the strongest resonant signal in the angular spectrum of the transmitted orthogonal signal for each angle, and this position is the downward eigen-orthogonal signal I of the eigenmode down (θ,λ).

[0047] In a specific embodiment, the wavelength positions of the resonant responses of each angle of the obtained angular spectrum of the reflected orthogonal signal and the corresponding eigen-orthogonal signal intensities, as well as the wavelength positions of the resonant responses of each angle of the angular spectrum of the transmitted orthogonal signal and the corresponding eigen-orthogonal signal intensities are as Figure 2 shown.

[0048] The specific calculation process of step S4 is as follows:

[0049]

[0050] where η(θ,λ) represents the one-dimensional angular spectrum of the transparent sample 205, and I up (θ,λ) represents the eigen-orthogonal signal intensity of the angular spectrum of the reflected orthogonal signal, and I down (θ,λ) represents the eigen-orthogonal signal intensity of the angular spectrum of the transmitted orthogonal signal.

[0051] Embodiment 3

[0052] Based on the above Embodiment 1 and Embodiment 2, this embodiment elaborates in detail the specific process of performing one-dimensional measurement on a certain transparent sample.

[0053] In a specific embodiment, it includes the following steps:

[0054] Step 1: Turn on the light source of the halogen lamp 201 at the reflection end, place the transparent sample 205 face up on the stage, and using the calibration direction of the microscope stage, make the direction perpendicular to the paper plane of the transparent sample 205 the same as the polarization direction (s direction) of the first s-polarizer 202. Use the first objective lens 204 on the transparent sample 205 to focus the collimated light beam on the sample, and measure the angular spectrum of the reflected orthogonal signal;

[0055] Using the low-power objective lens of the microscope, move the center of the light spot to the center of the sample, and then switch to the high-power objective lens to ensure that the focused light spot is not larger than the size of the sample.

[0056] Looking down from top to bottom around the normal line of the plane of the transparent sample 205, rotate the sample counterclockwise by 1°, so that when the polarized light in the s direction is incident on the sample, due to the eigen-response of the transparent sample 205, polarized light in the p direction (parallel to the paper plane direction) can be excited.

[0057] The excitation light passes through a 4F filtering system and a p-polarizer 213 orthogonal to the first s-polarizer 202 to filter out the s-polarized light and is then received by a near-infrared spectrometer 216 to obtain the reflected orthogonal signal angular spectrum.

[0058] Step 2: Turn on the light source of the transmission-side halogen lamp 208, place the transparent sample 205 face down on the stage, and use the calibration direction of the microscope stage to make the direction perpendicular to the paper plane of the transparent sample 205 the same as the polarization direction (s direction) of the second s-polarizer 207. Focus the collimated light beam on the sample with the objective lens on the transparent sample 205 and measure the transmitted orthogonal signal angular spectrum.

[0059] Using the low-power objective lens of the microscope, move the center of the light spot to the center of the sample, and then switch to the high-power objective lens to ensure that the focused light spot is not larger than the size of the sample.

[0060] Looking down from top to bottom around the normal of the sample plane, rotate the sample clockwise by 1° so that when the s-direction polarized light is incident on the transparent sample 205, the p-direction (parallel to the paper plane) polarized light can be excited due to the intrinsic response of the transparent sample 205.

[0061] The excitation light passes through a 4F filtering system and a p-polarizer 213 orthogonal to the second s-polarizer 207 to filter out the s-polarized light and is then received by the spectrometer to obtain the transmitted orthogonal signal angular spectrum.

[0062] Step 3: Divide the obtained reflected orthogonal signal angular spectrum by each angle, and select the position with the maximum resonance response intensity for the spectrum at each angle, then the wavelength position of the resonance response at each angle and the corresponding intrinsic orthogonal signal intensity I up (θ,λ) can be obtained, as Figure 2 shown.

[0063] Divide the obtained transmitted orthogonal signal angular spectrum by each angle, and select the position with the maximum resonance response intensity for the spectrum at each angle, then the wavelength position of the resonance response at each angle and the corresponding intrinsic orthogonal signal intensity I down (θ,λ) can be obtained, as Figure 2 shown.

[0064] Step 4: Using the intrinsic orthogonal signal intensity obtained in Step 3, the one-dimensional angular spectrum of the transparent sample 205 can be calculated, and the obtained result is as Figure 3 shown.

[0065] In the embodiments provided in this application, it should be understood that the disclosed systems and methods can be implemented in other ways. Those of ordinary skill in the art can understand that all or part of the steps of implementing the above method embodiments can be completed by hardware related to program instructions. The aforementioned program can be stored in a computer-readable storage medium. When the program is executed, it performs the steps including the above method embodiments; and the aforementioned storage medium includes: removable storage devices, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks and other various media capable of storing program codes.

[0066] Alternatively, if the above embodiments of the present invention are implemented in the form of software function modules and sold or used as independent products, they can also be stored in a computer-readable storage medium. Based on such an understanding, the technical solutions of the embodiments of the present invention essentially or the part that contributes to the prior art can be embodied in the form of a software product. The computer software product is stored in a storage medium and includes several instructions for causing a computer device to execute all or part of the methods described in the various embodiments of the present invention. And the aforementioned storage medium includes: removable storage devices, ROM, RAM, magnetic disks, or optical disks and other various media capable of storing program codes.

[0067] Obviously, the above embodiments of the present invention are merely examples for clearly explaining the present invention, rather than limitations on the implementation manners of the present invention. The icons describing the structural and positional relationships in the drawings are only for illustrative purposes and cannot be construed as limitations on the present invention. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the claims of the present invention.

Claims

1. A transparent sample unidirectional measurement system based on an angle-resolved spectrometer, characterized in that: include: A reflection end module, a transmission end module, a detection end module and a stage; the reflection end module is used to generate a reflection signal; the transmission end module is used to generate a transmission signal; the detection end module is arranged on one side of the reflection end module, and is used to extract orthogonal polarization signals and generate an angular spectrum; the stage is arranged between the reflection end module and the transmission end module, and is used to fix a transparent sample to be tested (205).

2. The transparent sample unidirectional measurement system based on angle-resolved spectrometer according to claim 1, characterized in that: The reflection end module comprises a reflection end halogen lamp (201), a first s-polarizer (202), a first semi-transparent mirror (203) and a first objective lens (204) which are assembled in sequence; the transmission end module comprises a first condenser (206), a second s-polarizer (207) and a transmission end halogen lamp (208) which are arranged in sequence; the object stage is arranged between the first objective lens (204) and the first condenser (206); the detection end module comprises a second semi-transparent mirror (211), a charge coupled device (209) and a first lens (210) which are arranged in the direction of the reflection light path of the second semi-transparent mirror (211); a 4F filter system, a slit (215) and a near-infrared spectrometer (216) which are arranged in the direction of the transmission light path of the second semi-transparent mirror (211); and the second semi-transparent mirror (211) is arranged on the reflection light path of the first semi-transparent mirror (203).

3. The transparent sample unidirectional measurement system based on angle-resolved spectrometer according to claim 2, characterized in that: The 4F filtering system comprises: a second lens (212), a p-polarizer (213) and a third lens (214), wherein the p-polarizer (213) is arranged at a common focus between the second lens (212) and the third lens (214), the second semi-transparent mirror (211) is arranged at another focus of the second lens (212), and the slit (215) is arranged at another focus of the third lens (214).

4. The transparent sample unidirectional measurement system based on angle-resolved spectrometer according to claim 3, characterized in that: The collimated light beam emitted by the halogen lamp (201) at the reflection end passes through the first s-polarizer (202) and the first semi-transparent and semi-reflective mirror (203), and then is focused by the first objective lens (204) to the transparent sample (205) to be measured, and then is projected to the k plane after reflection; the collimated light beam emitted by the halogen lamp (208) at the transmission end passes through the second s-polarizer (207) and the first condenser (206), and then is directly transmitted through the transparent sample (205) to be measured, and then is projected to the k plane; the frequency domain information on the k plane is reflected by the first semi-transparent and semi-reflective mirror (203) to the second semi-transparent and semi-reflective mirror (211), and is divided into two beams of light through reflection and transmission, one of which is focused by the first lens (210) to the charge coupled device (209) to confirm the position of the sample, and the other is orthogonally filtered by the 4F filter system, and then enters the near-infrared spectrometer (216) through the slit (215) to obtain the orthogonal measurement signal of the sample.

5. The transparent sample unidirectional measurement system based on angle-resolved spectrometer according to claim 4, characterized in that: The polarization directions of the first s-polarizer (202) and the second s-polarizer (207) are perpendicular to the paper surface, and the polarization direction of the p-polarizer (213) is parallel to the paper surface.

6. The method for measuring one-dimensionality of a transparent sample based on an angle-resolved spectrometer according to claim 4, characterized in that: The emitted light of the reflection end halogen lamp (201) and the transmission end halogen lamp (208) are both polychromatic light, and their effective wavelengths are between 350nm and 1700nm; and the measurement wavelength of the near-infrared spectrometer (216) is between 1100nm and 1600nm.

7. A method for measuring one-dimensionality of a transparent sample based on an angle-resolved spectrometer, the method being used in a system for measuring one-dimensionality of a transparent sample based on an angle-resolved spectrometer as claimed in any one of claims 1 to 6, characterized in that: A transparent sample (205) is placed on a stage, a reflection signal is provided through a reflection end module, a transmission signal is provided through a transmission end module, and an orthogonal polarization signal is acquired by a detection end module to generate an angular spectrum, comprising the following steps: S1, measuring the angular spectrum of the reflected orthogonal signal when the transparent sample (205) faces upward; S2, measuring the transmission orthogonal signal angular spectrum when the transparent sample (205) faces downward; S3, extracting the intrinsic mode signal intensity at each angle in the reflection and transmission angular spectra; S4. Calculate the unidirectional angular spectrum of the transparent sample (205) according to the intrinsic mode signal intensity at each angle.

8. The method for measuring one-dimensionality of a transparent sample based on an angle-resolved spectrometer according to claim 7, characterized in that: The specific process of step S1 is: placing the transparent sample (205) on the stage with its front side facing upward, adjusting the first objective lens (204) and focusing the collimated s-polarized polychromatic light on the transparent sample (205), and measuring the reflected orthogonal signal angular spectrum through the transmission end module; the specific process of step S2 is: placing the sample on the stage with its front side facing downward, focusing the collimated light beam on the sample with the objective lens on the sample, and measuring the transmitted orthogonal signal angular spectrum.

9. The method for measuring one-dimensionality of a transparent sample based on an angle-resolved spectrometer according to claim 8, characterized in that: The specific process of step S3 is: select the position where the resonance signal is the strongest in the angular spectrum of the reflected orthogonal signal at each angle, and this position is the upward intrinsic orthogonal signal I of the eigenmode. up (θ,λ); select the position where the resonance signal is the strongest in the angular spectrum of the transmitted orthogonal signal at each angle, which is the downward eigenmode orthogonal signal I down (θ,λ).

10. The method for measuring one-dimensionality of a transparent sample based on an angle-resolved spectrometer according to claim 9, characterized in that: The specific calculation process of step S4 is: Where, η(θ,λ) represents the unidirectional angular spectrum of the transparent sample (205), I up (θ,λ) represents the intrinsic orthogonal signal strength of the reflected orthogonal signal angular spectrum, I down (θ,λ) represents the intrinsic orthogonal signal intensity of the transmitted orthogonal signal angular spectrum.

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