Optical fiber adjusting mechanism and direct type film thickness monitoring system

Abstract

The invention discloses an optical fiber adjusting mechanism and a direct type film thickness monitoring system. The optical fiber adjusting mechanism comprises a base, an annular plate, a mounting plate, a first adjusting structure and a second adjusting structure. Wherein the base is of an annular structure, and a collimating lens is arranged on the base; the annular plate is arranged above the base; one end of the mounting plate is located on the surface, away from the base, of the annular plate, the other end of the mounting plate extends to the position above the annular hole of the annular plate, a telescopic optical fiber connector is mounted at the other end of the mounting plate, and the telescopic optical fiber connector vertically corresponds to the collimating lens; the first adjusting structure is arranged on the base and the annular plate and used for enabling the annular plate to move on the base in the first direction; and the second adjusting structure is arranged on the mounting plate and the annular plate. According to the invention, under the condition of ensuring the normal work of a collimation optical path system, the alignment error is reduced, the coupling efficiency is improved, and the requirements of different wavebands can be met under the condition of not replacing optical fibers.

Description

Technical Field

[0001] The present invention relates to the technical field of optical thin film preparation instruments, and particularly relates to an optical fiber adjustment mechanism and a direct film thickness monitoring system. Background Art

[0002] The direct film thickness monitoring system is one of the core tools to ensure the deposition quality of optical thin films, and its accuracy directly affects the final film formation quality of the thin film. Therefore, it is crucial to improve the performance of the direct film thickness monitoring system. This system needs to ensure the intensity and stability of the signal first, and the design of the optical fiber and the coupling light source and the optical path system between the two are key factors. Reducing light energy loss and improving the optical fiber coupling efficiency have become important topics for improving the overall performance of the system.

[0003] The existing three-axis optical fiber collimator is widely used in optical fiber collimation and laser coupling scenarios, and can achieve three-axis adjustment of the Z-axis and pitch and yaw in a limited space. The adjustment range of the pitch and deflection angles is ±5°, and the adjustment range in the Z direction is ±1 mm. Although this design improves the adjustment efficiency to a certain extent, it is extremely sensitive to angular deviation, off-axis deviation, and axial deviation, which may lead to optical field overlap error and energy loss, thus reducing the coupling efficiency.

[0004] Based on this, a new technical solution is needed. Summary of the Invention

[0005] In view of this, embodiments of the present invention provide an optical fiber adjustment mechanism and a direct film thickness monitoring system to at least solve the problem of low coupling efficiency of the existing three-axis optical fiber collimator.

[0006] Embodiments of the present invention provide the following technical solutions:

[0007] Embodiments of the present invention provide an optical fiber adjustment mechanism, including:

[0008] A base, the base is of a ring structure, and a collimating lens is provided on the base;

[0009] A ring plate, the ring plate is arranged above the base;

[0010] A mounting plate, one end of the mounting plate is located on the side of the ring plate away from the base, and the other end extends above the circular hole of the ring plate. A telescopic optical fiber connector is installed at the other end of the mounting plate, and the telescopic optical fiber connector and the collimating lens are vertically corresponding;

[0011] A first adjustment structure, the first adjustment structure is arranged on the base and the ring plate, and is used to enable the ring plate to move on the base along a first direction;

[0012] The second adjustment structure is disposed on the mounting plate and the annular plate and is used to enable the mounting plate to move along a second direction on the annular plate, where the first direction and the second direction are perpendicularly arranged.

[0013] Further, the collimating lens is embedded in the base through a groove.

[0014] Further, the mounting plate includes a longitudinal plate and transverse plates connected to both ends of the longitudinal plate. One of the transverse plates is located on a side of the annular plate away from the base, and the other transverse plate extends from the longitudinal plate to the annular hole of the annular plate and is provided with the telescopic fiber optic connector.

[0015] Further, the telescopic fiber optic connector is mounted in a threaded hole formed in the other transverse plate through a threaded post, and the telescopic fiber optic connector can move up and down on the other transverse plate through the threaded post and the threaded hole.

[0016] Further, the first adjustment unit includes a first adjustment screw and a first nut;

[0017] The first nut is mounted in a slot formed in the base, and the first adjustment screw passes through a slot formed in the annular plate and is connected to the first nut. Wherein, rotating the first adjustment screw can adjust the displacement of the annular plate relative to the base in the first direction.

[0018] Further, the second adjustment unit includes a second adjustment screw and a second nut;

[0019] The second nut is mounted in a slot formed in the annular plate, and the second adjustment screw passes through a slot formed in the mounting plate and is connected to the second nut. Wherein, rotating the second adjustment screw can adjust the displacement of the mounting plate relative to the annular plate in the second direction.

[0020] Further, the annular plate can pitch relative to the base;

[0021] The fiber optic adjustment structure further includes:

[0022] A third adjustment structure is disposed on the base and the annular plate. The third adjustment structure can displace along the first direction on the base, and the third adjustment structure is used to enable the annular plate to pitch.

[0023] Further, the third adjustment unit includes an adjustment screw rod, and the adjustment screw rod passes through a slot in the annular plate and is in threaded connection with a threaded hole formed in the base to adjust the deflection of the annular plate relative to the base.

[0024] A direct film thickness monitoring system provided by the present invention includes the optical fiber adjusting mechanism described in any one of the above.

[0025] Compared with the prior art, the beneficial effects that can be achieved by at least one of the above technical solutions adopted in the embodiments of the present invention at least include:

[0026] An optical fiber adjusting structure of the present invention can realize multi-axis adjustment through a parallel circular frame lens and combine the rotation of screws for positioning, so as to realize the acquisition of the maximum energy signal, and improve the optical fiber coupling efficiency and the signal intensity stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required to be used in the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0028] Figure 1 A perspective view of an optical fiber adjusting structure according to an embodiment of the present invention;

[0029] Figure 2 A top view of an optical fiber adjusting structure according to an embodiment of the present invention;

[0030] Figure 3 A side view of an optical fiber adjusting mechanism according to an embodiment of the present invention.

[0031] The reference numerals of the present invention are as follows:

[0032] 10. Base; 11. Collimating lens;

[0033] 20. Annular plate;

[0034] 30. Mounting plate; 31. Telescopic fiber optic connector;

[0035] 40. First adjusting structure; 41. First adjusting screw;

[0036] 50. Second adjusting structure; 51. Second adjusting screw;

[0037] 60. Third adjusting structure; 61. Adjusting screw. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0038] The embodiments of the present application will be described in detail below with reference to the drawings.

[0039] The following describes the implementation manners of the present application through specific specific examples. Those skilled in the art can easily understand other advantages and effects of the present application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific implementation manners. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, without conflict, the following embodiments and the features in the embodiments can be combined with each other. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without making creative efforts belong to the scope protected by the present application.

[0040] It should be noted that the following describes various aspects of the embodiments within the scope of the appended claims. It should be obvious that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is illustrative only. Based on the present application, those skilled in the art should understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects described herein can be used to implement the device and / or practice the method. Additionally, this device can be implemented and this method can be practiced using other structures and / or functionality in addition to one or more of the aspects described herein.

[0041] It also needs to be noted that the drawings provided in the following embodiments only illustrate the basic concept of the present application schematically. The drawings only show the components related to the present application rather than being drawn according to the number, shape, and size of the components in actual implementation. The type, quantity, and proportion of each component in its actual implementation can be arbitrarily changed, and the component layout type may also be more complex.

[0042] In addition, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that the examples can be practiced without these specific details.

[0043] Optical thin films are increasingly widely used, covering multiple fields such as optical fiber communication, autonomous driving, military equipment, and infrared temperature measurement. High-end vacuum evaporation coating machines are one of the problems in our country. Among them, the more sophisticated technology is the direct film thickness monitoring system. Its accuracy directly affects the film formation quality of thin films. The direct film thickness monitoring system is one of the key tools indispensable for ensuring the quality of thin film deposition, and its importance is becoming increasingly prominent in today's precision manufacturing industry. The direct film thickness monitoring system must first ensure the intensity and stability of the signal. In this process, optical fibers, coupled light sources, and the optical path system directly built between them are used. Reducing light energy loss and improving the optical fiber coupling efficiency are particularly important. Therefore, it is very crucial to select a suitable adjustment mechanism to improve the optical fiber transmission efficiency.

[0044] The existing three-axis optical fiber collimator can achieve three-axis adjustment of Z-axis + pitch and yaw in a very small space. The pitch and deflection angle travel ranges are ±5°, and the Z-direction travel range is ±1 mm. It can be applied to optical fiber collimation or laser coupling scenarios and effectively improve the adjustment efficiency. It is very sensitive to angular deviation, off-axis deviation, and axial deviation. These deviations will cause light field overlap errors and losses, thereby reducing the coupling efficiency.

[0045] Based on this, the embodiments of this specification propose a processing solution: as Figure 1 shown, an optical fiber adjustment mechanism of the present invention can achieve multi-axis adjustment (XYZ + pitch and yaw) of the optical fiber through the first adjustment structure 40, the second adjustment structure 50, the third adjustment structure 60, and the telescopic optical fiber connector 31. Moreover, adjusting the focal length through the telescopic optical fiber connector 31 can be used in a wide wavelength range.

[0046] The following will describe the technical solutions provided by the embodiments of this application with reference to the accompanying drawings.

[0047] As Figures 1 to 3 shown, an optical fiber adjustment mechanism of the present invention includes a base 10, an annular plate 20, a mounting plate 30, a first adjustment structure 40, and a second adjustment structure 50. Among them, the base 10 is of an annular structure, and a collimating lens 11 is provided on the base 10; the annular plate 20 is arranged above the base 10; one end of the mounting plate 30 is located on the side of the annular plate 20 away from the base 10, and the other end extends above the annular hole of the annular plate 20. A telescopic optical fiber connector 31 is installed at the other end of the mounting plate 30, and the telescopic optical fiber connector 31 and the collimating lens 11 are vertically corresponding; the first adjustment structure 40 is arranged on the base 10 and the annular plate 20 for enabling the annular plate 20 to move on the base 10 along a first direction; the second adjustment structure 50 is arranged on the mounting plate 30 and the annular plate 20 for enabling the mounting plate 30 to move on the annular plate 20 along a second direction, and the first direction and the second direction are perpendicularly arranged.

[0048] Among them, the collimating lens 11 is a 100 mm circular lens, and it is fixedly installed on the base 10 through a precisely machined groove.

[0049] For example, the collimating lens 11 is embedded in the base 10 through the groove.

[0050] Among them, the annular plate 20 and the base 10 are arranged in parallel, and relative displacement can occur between the annular plate 20 and the base 10.

[0051] Among them, the first adjustment structure uses a precision nut for positioning Kyoto, and the adjustment range is ±2 cm; the adjustment range of the second adjustment structure is 3 cm.

[0052] Furthermore, the mounting plate 30 is of a Z-shaped structure.

[0053] Specifically, the mounting plate 30 includes a longitudinal plate and transverse plates connected to both ends of the longitudinal plate. One transverse plate is located on the side of the annular plate 20 away from the base 10, and the other transverse plate extends from the longitudinal plate to the annular hole of the annular plate 20, and a telescopic fiber optic connector 31 is installed.

[0054] Among them, the longitudinal plate is used to adjust the height of the telescopic fiber optic connector 31, so that the telescopic fiber optic connector 31 can be telescoped or moved up and down on the mounting plate 30.

[0055] Furthermore, the telescopic fiber optic connector 31 is installed in a threaded hole opened on the other transverse plate through a threaded post, and the telescopic fiber optic connector 31 can move up and down on the other transverse plate through the threaded post and the threaded hole.

[0056] Among them, the telescopic fiber optic connector 31 is fixed to the other transverse plate through a copper alloy with ultra-high wear resistance by threading.

[0057] In some of the embodiments, the telescopic fiber optic connector 31 is provided with a positioning hole, and the positioning hole cooperates with a screw to fix the telescopic fiber optic connector 31 to the mounting plate 30.

[0058] Among them, by adjusting the distance between the telescopic fiber optic connector 31 and the base 10, the focal length of the optical fiber and the lens can be adjusted.

[0059] Among them, the focal length adjustment range of the zoom fiber optic collimator is 6 mm to 18 mm, and the collimation of the light beam can be maintained during the focal length adjustment process.

[0060] Among them, the first direction and the second direction are two directions on the same plane and are perpendicular to each other. For example, the first direction can be the X-axis direction and the second direction is the Y-axis direction.

[0061] In some of these embodiments, the first adjustment unit includes a first adjustment screw 41 and a first nut; the first nut is installed in a slot formed in the base 10, and the first adjustment screw 41 sequentially passes through a slot formed in the annular plate 20 and the first nut. Here, by rotating the first adjustment screw 41, the annular plate 20 can be adjusted to displace relative to the base 10 in the first direction.

[0062] Here, the diameter of the slot formed in the annular plate 20 is slightly larger than the outer diameter of the screw rod of the first adjustment screw 41 and smaller than the outer diameter of the nut of the first adjustment screw 41, such that the annular plate 20 can deflect in the horizontal direction.

[0063] Here, the slot formed in the annular plate 20 is a long strip structure.

[0064] Here, when the nut of the first adjustment screw 41 is separated from the side wall of the slot formed in the annular plate 20, the annular plate 20 can move up and down along the first adjustment screw 41, so that the annular plate 20 can perform a pitching motion.

[0065] For example, when the nut of the first adjustment screw 41 rotates to abut against the edge of the slot, at this time the annular plate 20 is fixed and cannot be adjusted; when the nut of the first adjustment screw 41 rotates to be separated from the edge of the slot, the annular plate 20 is released, and the annular plate 20 can displace in the first direction, or one end of the annular plate 20 can be lifted.

[0066] Here, there can be multiple first adjustment units, and they are all arranged at intervals along the first direction of the annular plate 20. When adjusting the relative position between the annular plate 20 and the base 10, it is necessary to simultaneously rotate the first adjustment screws 41 of multiple first adjustment units.

[0067] For example, there are four first adjustment units, and they are arranged on both sides of the annular plate 20 in the first direction.

[0068] In some of these embodiments, a second nut is installed in a slot formed in the annular plate 20, and a second adjustment screw 51 passes through a slot formed in the mounting plate 30 and is connected to the second nut. Here, by rotating the second adjustment screw 51, the annular plate 20 can be adjusted to displace relative to the base 10 in the second direction.

[0069] Here, the inner diameter of the slot formed in the mounting plate 30 is larger than the outer diameter of the screw rod of the second adjustment screw 51, so that the mounting plate 30 can deflect in the horizontal direction.

[0070] Here, the slot in the mounting plate 30 is a long strip hole arranged along the second direction.

[0071] Among them, by rotating the second adjustment screw 51, the mounting plate 30 can be fixed to the annular plate 20 or unlocked from the annular plate 20 to move the position of the mounting plate 30.

[0072] For example, when rotating the second adjustment screw 51 so that the nut of the second adjustment screw 51 no longer locks the mounting plate 30, the position of the mounting plate 30 can be adjusted in the second direction, so that a relative displacement occurs between the mounting plate 30 and the annular plate 20, thereby adjusting the position of the telescopic fiber optic connector 31 relative to the collimating lens 11.

[0073] In some of these embodiments, the annular plate 20 can pitch relative to the base 10.

[0074] Among them, fulcrums are provided on both sides of the annular plate 20, and the annular plate 20 can rotate / pitch around the fulcrum.

[0075] The optical fiber adjustment structure further includes a third adjustment structure 60. The third adjustment structure 60 is arranged on the base 10 and the annular plate 20. The third adjustment structure 60 can displace along the first direction on the base 10, and the third adjustment structure 60 is used to control the pitching angle of the annular plate 20.

[0076] Among them, the pitching angle range is 0 to 72°.

[0077] In some of these embodiments, the third adjustment unit includes an adjustment screw 61. The adjustment screw 61 passes through the slot hole on the annular plate 20 and is threadedly connected to the nut on the base 10 to adjust the pitching motion of the annular plate 20 relative to the base 10.

[0078] Among them, by adjusting the rotation direction of the adjustment screw 61, the pitching angle and direction of the annular plate 20 can be determined.

[0079] Among them, the nut connected to the adjustment screw 61 can slide on the base 10, such as sliding in the first direction, so that when the relative position between the annular plate 20 and the base 10 changes, the adjustment screw 61 can be used normally.

[0080] For example, the nut connected to the adjustment screw 61 slides on the base 10 through a chute.

[0081] Among them, after rotating the adjustment screw 61, one side of the annular plate 20 moves towards or away from the base 10, and the annular plate 20 undergoes a pitching motion under the action of the fulcrum.

[0082] Among them, the fulcrum is located between the adjustment screw 61 and the first adjustment unit and on the side surface of the annular plate 20 close to the base 10.

[0083] Among them, the fulcrum can be fixed to the outside of the optical fiber adjusting mechanism.

[0084] In some of these embodiments, the adjusting screw 61 is connected to the threaded hole on the annular hole, so that the adjusting screw 61 can limit the annular plate 20 above the base 10.

[0085] For example, when the adjusting screw 61 is rotated, since the adjusting screw 61 is threadedly connected to the threaded hole on the annular hole, the annular plate 20 and the base 10 can be brought closer to each other, so that the annular plate 20 can pitch up and down.

[0086] By improving the optical fiber adjusting mechanism, the present invention improves the optical fiber coupling efficiency, improves the signal intensity stability, thereby improving the monitoring accuracy, and can also be applicable to wavelengths in more bands.

[0087] An optical fiber adjusting mechanism of the present invention adopts a parallel circular architecture lens, and a telescopic optical fiber connector is installed at the top, realizing the application of the optical fiber in a wider band, improving the real-time received signal intensity and stability, improving the monitoring accuracy of the direct film thickness monitor, and reducing the stop error caused by signal instability.

[0088] The optical fiber adjusting mechanism of the present invention can be applied to a direct optical film thickness monitoring system, which can realize adjusting the focal lengths of the lens and the optical fiber without replacing the optical fiber, increasing the utilization rate of the optical fiber, and enabling it to be used for a wider band.

[0089] The working process of the present invention is as follows:

[0090] 1. When the light source is installed, the collimation optical path is set up, and the halogen lamp in the cavity is turned on. The light beam passing through the collimation lens will obtain a small divergence angle and a long Rayleigh length, improving the collimation of the light beam and the energy utilization rate;

[0091] 2. Check whether a signal can be received after the light beam passes through the lens, and find a stronger signal intensity by adjusting the pitch and focal length of the lens barrel;

[0092] 3. On the premise of being able to receive a signal, fix the base, select to adjust the X-axis direction knob, temporarily fix the Y-axis direction, and observe the signal intensity while adjusting the X-axis direction knob. Find the place with a stronger signal and fix it, and then find the place with a stronger signal in the Y-axis direction;

[0093] 4. The motion of the multi-degree-of-freedom system follows Newton's second law, that is, force equals mass times acceleration (F = ma). In the case of multiple degrees of freedom, this formula will be extended to a system containing multiple equations, each equation corresponding to one degree of freedom. For each degree of freedom of a linear system, Newton's equation can be expressed as:

[0094] m i xi +c i x i +k i x i = F i (t)

[0095] For a non - linear system or in the case of coupling, the above - mentioned equation may become more complex because the motions between different degrees of freedom may not be completely independent but may influence each other. At this time, Newton's equation will involve cross - terms between multiple degrees of freedom:

[0096] ∑ j m ij x j +c ij x j +k ij x j = F i (t)

[0097] The design of the five - degree - of - freedom optical fiber adjustment mechanism for the optical control system can achieve any required precision, thus avoiding the solution of the distributed - parameter system.

[0098] 5. This device can convert the light beam into a parallel light beam, improve the energy density and transmission distance of the light beam, and ensure that the light beam maintains a certain stability and directivity during the propagation process.

[0099] A direct - type film - thickness monitoring system of the present invention includes the optical fiber adjustment mechanism described in any one of the above.

[0100] In this specification, for the same or similar parts between various embodiments, reference can be made to each other. Each embodiment focuses on the differences from other embodiments. In particular, for the product embodiments described later, since they correspond to the methods, the description is relatively simple, and the relevant parts can refer to the partial description of the system embodiments.

[0101] The above - mentioned is only the specific implementation manner of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed in the present application should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. An optical fiber adjustment mechanism, characterized in that: include: A base, the base is an annular structure, and a collimating lens is provided on the base; an annular plate, the annular plate being arranged above the base; A mounting plate, one end of which is located on a surface of the annular plate away from the base, and the other end of which extends above the annular hole of the annular plate, a telescopic optical fiber connector being mounted on the other end of the mounting plate, the telescopic optical fiber connector corresponding to the collimating lens in the upper and lower parts; a first adjustment structure, the first adjustment structure being arranged on the base and the annular plate and being used for enabling the annular plate to move on the base along a first direction; A second adjustment structure is provided on the mounting plate and the annular plate, and is used to enable the mounting plate to move on the annular plate along a second direction, wherein the first direction and the second direction are vertically provided.

2. The optical fiber adjustment mechanism according to claim 1, characterized in that: The collimating lens is embedded in the base through a groove.

3. The optical fiber adjustment mechanism according to claim 1, characterized in that: The mounting plate includes a longitudinal plate and transverse plates connected to both ends of the longitudinal plate, one of the transverse plates is located on a surface of the annular plate away from the base, and the other transverse plate extends from the longitudinal plate to the annular hole of the annular plate and is installed with the telescopic optical fiber connector.

4. The optical fiber adjustment mechanism according to claim 3, characterized in that: The telescopic optical fiber connector is installed in a threaded hole provided on the other transverse plate through a threaded column, and the telescopic optical fiber connector can move up and down on the other transverse plate through the threaded column and the threaded hole.

5. The optical fiber adjustment mechanism according to claim 1, characterized in that: The first adjustment unit includes a first adjustment screw and a first nut; The first nut is installed in a slot hole opened on the base, and the first adjusting screw passes through the slot hole opened on the annular plate and is connected to the first nut, wherein rotating the first adjusting screw can adjust the displacement of the annular plate relative to the base in the first direction.

6. The optical fiber adjustment mechanism according to claim 1, characterized in that: The second adjustment unit includes a second adjustment screw and a second nut; The second nut is installed in a slot hole opened on the annular plate, and the second adjusting screw passes through the slot hole opened on the mounting plate and is connected to the second nut, wherein rotating the second adjusting screw can adjust the mounting plate to be displaced in a second direction relative to the annular plate.

7. The optical fiber adjustment mechanism according to claim 1, characterized in that: The annular plate can pitch relative to the base via a fulcrum; The optical fiber adjustment structure also includes: A third adjustment structure is provided on the base and the annular plate, the third adjustment structure can be displaced along the first direction on the base, and the third adjustment structure is used to enable the annular plate to pitch.

8. The optical fiber adjustment mechanism according to claim 7, characterized in that: The third adjusting unit comprises an adjusting screw, which passes through a slot on the annular plate and is threadedly connected to a threaded hole on the base, so as to adjust the deflection of the annular plate relative to the base.

9. A direct film thickness monitoring system, characterized in that: It comprises the optical fiber adjustment mechanism as described in any one of claims 1 to 8.

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