Filtering device and filtering method

Abstract

The invention discloses a light filtering device and a light filtering method, which are used for realizing high-efficiency and wide-wavelength-range light filtering and reducing the loss of target wavelength light energy as much as possible. The light filtering device comprises a deflectable first reflection unit, a deflectable second reflection unit, at least one third reflection unit and a plurality of wavelength selectors with different wave bands. The first reflection unit is used for reflecting a light beam from a light source to the plurality of wavelength selectors through deflection; each wavelength selector is used for separating a wave beam of a corresponding wave band from the light beam from the first reflection unit; the at least one third reflection unit is used for reflecting the wave beam from each wavelength selector to the second reflection unit; and the second reflection unit is used for reflecting the received light beam to a specified direction through deflection.

Description

Technical Field

[0001] This application relates to the field of optical devices, and in particular, to a filter device and a filtering method. Background Art

[0002] In many advanced optical research and application scenarios, it is usually necessary to filter a light beam, that is, to efficiently extract a light beam with a specific wavelength from a multi-wavelength light beam. For example, a light beam with a specific wavelength is selected from a supercontinuum laser (or white light laser), while minimizing the energy loss of this wavelength as much as possible, so as to provide key data support for fields such as materials science and biomedical imaging. Summary of the Invention

[0003] The purpose of the embodiments of this application is to provide a filter device and a filtering method, which can not only achieve efficient and wide-wavelength-range filtering, but also minimize the energy loss of the light of the target wavelength as much as possible.

[0004] To achieve the above purpose, the embodiments of this application adopt the following technical solutions: In a first aspect, the embodiments of this application provide a filter device, including a deflectable first reflection unit, a deflectable second reflection unit, at least one third reflection unit, and multiple wavelength selectors of different bands; The first reflection unit is used to reflect the light beam from the light source to the multiple wavelength selectors by deflection; Each wavelength selector is used to separate the beam of the corresponding band from the light beam from the first reflection unit; The at least one third reflection unit is used to reflect the beam from each wavelength selector to the second reflection unit; The second reflection unit is used to reflect the received light beam to a specified direction by deflection.

[0005] In a second aspect, the embodiments of this application provide a filtering method, including: Receiving and reflecting the light beam from the light source through the first reflection unit, and controlling the deflection of the first reflection unit to reflect the light beam to multiple wavelength selectors of different bands; Separating the beam of the corresponding band from the received light beam through each wavelength selector; Reflecting the beam from each wavelength selector to the second reflection unit through at least one third reflection unit; Controlling the deflection of the second reflection unit to reflect the received light beam to a specified direction.

[0006] The above at least one technical solution adopted by the embodiments of this application can achieve the following beneficial effects: A deflectable first reflection unit is used to replace the semi-transmissive and semi-reflective mirror, guiding the incident light beam containing different wavelengths (such as white light laser) to multiple wavelength selectors of different bands to achieve beam selection for different bands; then, a deflectable second reflection unit is used to keep the light beams of different bands in the same outgoing direction, thereby realizing the combination of wavelength selectors of different bands, achieving a filtering effect in a wide wavelength range, and no longer being limited by the manufacturing process and cost of the wavelength selector, with lower cost. Since the first reflection unit has the characteristic of fast speed, its response speed is much higher than that of grating / slit scanning. In addition, since a semi-transmissive and semi-reflective mirror is not used in the whole solution, but the propagation path of the light beam is changed by reflection, the light energy loss can be effectively avoided, and it is not limited by the wavelength and can adapt to wide-band applications. BRIEF DESCRIPTION OF THE DRAWINGS

[0007] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The schematic embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation to the present application. In the drawings: Figure 1 is a schematic structural diagram of a filtering device in the related art; Figure 2 is a schematic structural diagram of a filtering device provided by an embodiment of the present application; Figure 3 is a schematic flowchart of a filtering method provided by an embodiment of the present application. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0008] To make the objectives, technical solutions and advantages of the present application clearer, the technical solutions of the present application will be clearly and completely described below in conjunction with the specific embodiments of the present application and the corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0009] The terms "first", "second", etc. in the specification and claims of the present application and the above drawings are used to distinguish similar objects and do not necessarily describe a specific order or sequence. It should be understood that such terms can be interchanged under appropriate circumstances, which is only a way of distinguishing objects with the same attributes when describing the embodiments of the present application. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion, so that a process, method, system, product or device including a series of units does not necessarily limit to those units, but may include other units not clearly listed or inherent to these processes, methods, products or devices.

[0010] As described above, in many cutting-edge optical research and application scenarios, it is usually necessary to filter light beams, that is, to efficiently extract light beams of specific wavelengths from multi-wavelength light beams. For example, in the field of materials science, when studying the absorption and reflection characteristics of specific materials to light of specific wavelengths, accurately obtaining light beams of the target wavelength helps to deeply explore the relationship between the microscopic structure of the material and its optical properties. Another example is in biomedical imaging, where light beams of specific wavelengths are used to excite fluorescent markers in biological samples, thereby obtaining clear cell and tissue images, providing key evidence for assisting disease diagnosis, health monitoring, etc.

[0011] In related technologies, two filtering schemes are usually adopted. The first filtering scheme is to irradiate multi-wavelength light beams onto a grating or a slit, and then separate the light beams of specific wavelengths by mechanically moving the grating or the slit. Although this scheme can maintain the energy of the light beams of the target wavelength as much as possible and has a high energy efficiency, due to the large mass of the grating or the slit, it is difficult to move at high speed, so the wavelength switching speed is slow; at the same time, due to its dispersion mechanism, the outgoing light has a certain degree of divergence and poor collimation.

[0012] The second filtering scheme is to perform wavelength selection through a wavelength selector. The advantages of this method are fast wavelength switching speed and good collimation of the output wavelength. However, the disadvantages are that it is limited by the manufacturing process and cost of the wavelength selector, and the filtering range of a single wavelength selector is limited and difficult to cover a large wavelength range. For example, a single wavelength selector only acts on a single band such as 400~700nm / 650~1000nm / 900~1700nm, etc., and cannot cover a wide band of 400~1700nm. If a large wavelength range needs to be covered, the multi-wavelength light beam needs to be split into two (or even four) by a semi-transparent and semi-reflective mirror, respectively introduced into different wavelength selectors, and then combined by a semi-transparent and semi-reflective mirror, resulting in a large loss of light energy (such as more than half of the loss). In addition, since the semi-transparent and semi-reflective mirror usually has a certain wavelength range, it is difficult to adapt to wide-band applications.

[0013] Specifically, as Figure 1 shown, after the multi-wavelength incident light beam reaches the semi-transparent and semi-reflective mirror, a part of the light beam continues to propagate in a straight line, and after being processed by the first wavelength selector, a light beam of a specified band is separated. Another part of the light beam is reflected and changes its propagation direction. After being processed by the second wavelength selector, a light beam of another band is separated, and finally two parallel outgoing light beams are formed. These two parallel outgoing light beams also need to be combined by an additional semi-transparent and semi-reflective mirror ( Figure 1 not shown in the figure) to obtain the final required wide-band outgoing light beam.

[0014] In view of this, an embodiment of the present application provides a filtering device and a filtering method, which can not only achieve efficient filtering in a wide wavelength range, but also minimize the loss of the light energy of the target wavelength, so as to solve the problems existing in the filtering solutions in the above related technologies.

[0015] The technical solutions provided by the embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0016] Please refer to Figure 2 , which is a schematic structural diagram of a filtering device provided by an embodiment of the present application. The device includes: a deflectable first reflection unit 1, a deflectable second reflection unit 2, at least one third reflection unit 3, and a plurality of wavelength selectors 4 of different bands.

[0017] The first reflection unit 1 is used to reflect the light beam from the light source to a plurality of wavelength selectors by deflection. Each wavelength selector is used to separate the beam of the corresponding band from the light beam from the first reflection unit. At least one third reflection unit is used to reflect the beam from each wavelength selector to the second reflection unit. The second reflection unit is used to reflect the received light beam to a specified direction by deflection.

[0018] Wherein, the specified direction here can be either the same as the direction of the incident light beam or changed arbitrarily according to the actual application needs, and the embodiments of the present application do not make any limitations in this regard.

[0019] It can be seen that in the above filtering device, a deflectable first reflection unit is used to replace the semi-transparent and semi-reflective mirror, and the incident light beam containing different wavelengths (such as white light laser) is guided to a plurality of wavelength selectors of different bands to realize the selection of light beams in different bands; then, a deflectable second reflection unit is used to keep the light beams in different bands in the same outgoing direction, thereby realizing the combination of wavelength selectors in different bands and achieving a filtering effect in a wide wavelength range, without being limited by the manufacturing process and cost of the wavelength selector, and the cost is lower. Since the first reflection unit has the characteristic of fast speed, its response speed is much higher than that of grating / slit scanning. In addition, since a semi-transparent and semi-reflective mirror is not used in the whole solution, but the propagation path of the light beam is changed by reflection, the light energy loss can be effectively avoided, and it is not limited by the wavelength and can adapt to wide-band applications.

[0020] In one implementation, the wavelength selector 4 may include an AOTF (Acousto-Optic Tunable Filter). Since the AOTF has the advantages of fast wavelength switching speed and good output wavelength collimation, using the AOTF as the wavelength selector helps to extract the required wide-band beam from the received light beam faster and more accurately.

[0021] In the application, the number of the wavelength selectors 4 can be reduced or increased, which can be specifically selected according to the application scenario, and the embodiments of the present application do not limit this.

[0022] Exemplarily, if it is necessary to separate the light beam in the wavelength band of 400-1700 nm from the light beam from the light source, 3 wavelength selectors 4 can be adopted. The first wavelength selector is used to separate the light beam in the wavelength band of 400-700 nm, the second wavelength selector is used to separate the light beam in the wavelength band of 650-1000 nm, and the third wavelength selector is used to separate the light beam in the wavelength band of 900-1700 nm.

[0023] In the filter device according to the embodiment of the present application, the first reflection unit 1 can adopt any deflectable device with a reflection function, and the embodiments of the present application do not limit this.

[0024] In one implementation, the first reflection unit 1 includes but is not limited to at least one of the following devices: a scanning galvanometer, an acousto-optic deflector.

[0025] The scanning galvanometer is essentially a special swing motor. Its basic principle is that a current-carrying coil generates a torque in a magnetic field. However, different from an ordinary rotating motor, a restoring torque is applied to its rotor by means of a mechanical torsion spring or electronics, and the magnitude is proportional to the angle of the rotor deviating from the equilibrium position. When a certain current is applied to the coil to deflect the rotor to a certain angle, the electromagnetic torque is equal to the restoring torque, and the rotor can only deflect and cannot rotate like an ordinary motor, and the deflection angle is proportional to the current. Since the scanning galvanometer utilizes the electromagnetic drive principle and can complete the change of the angle in an extremely short time, it has an extremely high response speed, which enables the change of the light beam reflection direction to be completed quickly, helping to improve the filtering speed. Secondly, the scanning galvanometer has the advantage of high precision. With a high-precision position feedback system, it can accurately control the deflection angle, ensuring the accuracy of the change of the light beam reflection direction. Moreover, the scanning galvanometer also has the advantages of strong stability and reliability. Since its structure is relatively simple and there are no complex mechanical transmission components, the failures caused by factors such as mechanical wear and looseness are reduced. In the case of long-term continuous operation, it can still maintain stable performance, reducing the maintenance cost and downtime, and is suitable for application scenarios with high requirements for stability.

[0026] The acousto-optic deflector is a device that realizes the deflection of the light beam by utilizing the acousto-optic effect. Its working principle is as follows: When ultrasonic waves propagate in a medium, they will cause periodic density changes in the medium, resulting in periodic changes in the refractive index of the medium, forming a structure similar to a corresponding grating. When a light beam passes through this medium, a diffraction phenomenon will occur. By controlling parameters such as the frequency of the ultrasonic waves, the direction of the diffracted light can be controlled, thereby realizing the deflection of the light beam. Compared with the scanning galvanometer, the acousto-optic deflector has a higher scanning speed and more precise control.

[0027] In another implementation, the first reflection unit 1 includes a first reflector and a first driving mechanism. The first driving mechanism is used to drive the first reflector to deflect. Among them, the reflecting surface of the first reflector faces the light-emitting direction of the light source and the incident directions of a plurality of wavelength selectors. Since the reflecting surface of the first reflector is precisely processed and has high reflectivity and optical flatness, it can ensure that the incident light beam is reflected at a specific angle, meeting the requirements of the optical system for the light beam propagation path.

[0028] The first driving mechanism can adopt various technologies, such as motor driving, etc. Exemplarily, the motor is connected to the first reflector through a precise transmission mechanism. When the motor operates, the rotational motion is converted into the deflection motion of the first reflector through transmission components. For another example, the first driving mechanism adopts piezoelectric driving technology, and uses the tiny deformation generated by the piezoelectric material under the action of an electric field to push the first reflector to achieve precise angle control. By driving the first reflector to deflect, the first driving mechanism can flexibly and precisely change the angle of the first reflector, and then change the reflection direction of the light beam, so that the light beam from the light source is guided to a plurality of wavelength selectors 4 of different wavelength bands.

[0029] In applications, the first reflection unit can deflect around its center point; or, it can also rotate around its rotation axis, thereby enabling two-dimensional scanning, such as scanning in the xy plane; or, it can also deflect around a non-center axis.

[0030] To achieve two-dimensional scanning, the first reflection unit can include two one-dimensional scanning mirrors.

[0031] In the filter device according to the embodiment of the present application, the second reflection unit 2 can adopt any deflectable device with a reflection function, and the embodiment of the present application does not limit this.

[0032] In one implementation, the second reflection unit 2 includes at least one of the following devices: a galvanometer scanner, an acousto-optic deflector. Thus, high-speed and high-precision control of the light beam reflection direction can be achieved.

[0033] In another implementation, the second reflection unit 2 includes a second reflector and a second driving mechanism. The second driving mechanism is used to drive the second reflector to deflect. Among them, the reflecting surface of the second reflector faces the light-emitting directions of a plurality of wavelength selectors. Since the reflecting surface of the second reflector is precisely processed and has high reflectivity and optical flatness, it can ensure that the incident light beam is reflected at a specific angle, meeting the requirements of the optical system for the light beam propagation path.

[0034] The second driving mechanism can adopt various technologies, such as motor driving, etc. Exemplarily, the motor is connected to the second mirror through a precise transmission mechanism. When the motor operates, the rotational motion is converted into the deflection motion of the second mirror through transmission components. For another example, the second driving mechanism adopts piezoelectric driving technology, and uses the tiny deformation generated by piezoelectric materials under the action of an electric field to push the second mirror to achieve precise angle control. By driving the second mirror to deflect, the second driving mechanism can flexibly and precisely change the angle of the second mirror, and then change the reflection direction of the light beam, so that the light beam from the light source is guided to multiple wavelength selectors 4 of different bands.

[0035] In the application, the second reflection unit can deflect around its center point; or, it can also rotate around its rotation axis, thereby realizing two-dimensional scanning, such as scanning in the xy plane; or, it can also deflect around a non-center axis.

[0036] To achieve two-dimensional scanning, the second reflection unit can include two one-dimensional scanning mirrors.

[0037] The third reflection unit 3 can adopt any device with a reflection function, and the embodiments of the present application do not limit this. In one implementation, the third reflection unit 3 includes a third mirror, and the reflection surface of the third mirror faces the outgoing direction of the wavelength selector, so as to receive the light beam from the wavelength selector and guide the light beam to the second reflection unit 2.

[0038] In the application, the number of the third reflection units 3 can be one or more, and can be specifically determined according to the number of the wavelength selectors 4. The embodiments of the present application do not limit this. In one implementation, the number of the third reflection units 3 is the same as the number of the wavelength selectors, that is, each wavelength selector 4 has a corresponding third reflection unit 3. For each third reflection unit 3, its position can be set according to the outgoing direction of the wavelength selector 4, and is used to reflect the light beam from the corresponding wavelength selector 4 to the second reflection unit 2.

[0039] In another implementation, the number of the third reflection units 3 can be less than the number of the wavelength selectors 4. In this case, the above-mentioned multiple wavelength selectors 4 include a first wavelength selector and a second wavelength selector. The second reflection unit 2 is used to reflect the light beam separated by the first wavelength selector to the first direction, and through deflection, reflect the light beams from each third reflection unit 3 to the first direction.

[0040] Such as Figure 2As shown, the number of wavelength selectors 4 is three. The wavelength selector 3 in the middle is the first wavelength selector, and the wavelength selectors on both sides are the second wavelength selectors. The number of the third reflection units 3 is equal to the number of the second wavelength selectors. In this case, the light beam separated from the first wavelength selector is directly reflected by the second reflection unit 2 and then emitted in the horizontal direction (i.e., the first direction). The light beam separated from the second wavelength selector on the left is reflected by the third reflection unit 3 on the left to the second reflection unit 2, and then reflected by the second reflection unit 2 and emitted in the horizontal direction. The light beam separated from the second wavelength selector on the right is reflected by the third reflection unit 3 on the right to the second reflection unit 2, and then reflected by the second reflection unit 2 and emitted in the horizontal direction.

[0041] In this case, only a small number of the third reflection units 3 are needed to achieve the same light filtering effect, which helps to simplify the light filtering device, reduce the cost, reduce the space occupied by the light filtering device, and thus expand the application range of the light filtering device.

[0042] Optionally, the first reflection unit 1 has a first initial position. The first initial position here is for distinguishing from the initial position of the second reflection unit 2. When the first reflection unit 1 is at the first initial position, there is a first angle (denoted as α) between the center line of the reflection surface of the first reflection unit 1 and the light emitting direction of the light source, and there is a second angle (denoted as β) between the center line of the reflection surface of the first reflection unit 1 and the incident direction of the first wavelength selector, and the first angle is equal to the second angle.

[0043] In this way, when the first reflection unit 1 is at the first initial position, the light beam from the light source can be directly reflected to the first wavelength selector. At this time, by appropriately adjusting the deflection angle of the first reflection unit 1 clockwise or counterclockwise, the light beam from the light source can be quickly and accurately reflected to each second wavelength selector, further improving the light filtering speed and convenience.

[0044] Optionally, the second reflection unit 2 has a second initial position. The second initial position here is for distinguishing from the initial position of the first reflection unit 1. When the second reflection unit 2 is at the second initial position, the reflection surface of the second reflection unit 2 is opposite and parallel to the reflection surface of the first reflection unit 1. The deflection direction of the second reflection unit 2 is opposite to the deflection direction of the first reflection unit 1.

[0045] Exemplarily, as Figure 2As shown, the light source emits a light beam in the horizontal direction, that is, the emission direction of the light source is horizontal. When the first reflection unit 1 is in the first initial position, α = 45 degrees and β = 45 degrees. When the second reflection unit 2 is in the second initial position, it is deflected by 45 degrees compared to the horizontal direction. The light beam is reflected by the first reflection unit 1 to form a vertically directed reflected light beam. After the reflected light beam passes through the wavelength selector (i.e., the first wavelength selector) in the middle for wavelength selection, a vertically directed beam corresponding to the corresponding wavelength band is formed. This beam can be directly reflected by the second reflection unit 2 to the first direction.

[0046] In this way, when the second reflection unit 2 is in the first initial position, it can directly reflect the light beam separated by the first wavelength selector to the first direction without adding a third reflection unit. At this time, by adjusting the second reflection unit 2 through a deflection adjustment opposite to the deflection angle of the first reflection unit 1, the light beams from each of the third reflection units 3 can be quickly and accurately reflected to the first direction, further improving the filtering speed and convenience.

[0047] Optionally, there is a third angle (denoted as γ) between the incident direction of the first wavelength selector and the incident direction of the second wavelength selector. In this way, the first reflection unit 1 can be quickly adjusted to an appropriate deflection angle to reflect the light beam from the light source to the third reflection unit 3.

[0048] The third angle can be set according to actual needs, and the embodiments of the present application do not limit this. Considering that the first reflection unit has a maximum deflection angle, which refers to the maximum angle that the first reflection unit 1 can deflect while ensuring that the scanning speed of the light beam from the light source meets the requirements. In the filtering device provided by the embodiments of the present application, the deflection angle of the first reflection unit 1 is related to the third angle. The larger the third angle, the larger the deflection angle the first reflection unit 1 needs to deflect to reflect the light beam from the light source to the second wavelength selector 4. In addition, too large a third angle will also increase the space occupied by the filtering device, which is not conducive to the application of the filtering device.

[0049] Based on this, in one implementation, the third angle is less than or equal to the maximum deflection angle of the first reflection unit. In this way, it can effectively avoid the deflection angle of the first reflection unit 1 being too large during the filtering process, resulting in a decrease in the scanning speed of the incident light beam, improve the filtering speed, and reduce the space occupied by the filtering device, expanding the application scenario of the filtering device.

[0050] Of course, the third angle cannot be too small either. This is because, although too small a third angle can significantly increase the compactness of the filtering device, it will cause the light spot formed on the third reflection unit 3 to be too large, resulting in a poor final filtering effect.

[0051] Optionally, the reflecting surface of at least one of the above-mentioned third reflecting units 3 faces the outgoing direction of the second wavelength selector, and the reflecting surface of each third reflecting unit 3 is parallel to the incident direction of the first wavelength selector.

[0052] Exemplarily, as Figure 2 shown, the incident direction of the first wavelength selector is the vertical direction. The reflecting surface of the third reflecting unit 3 on the left faces the outgoing direction of the second wavelength selector on the left, and the reflecting surface of this third reflecting unit 3 is in the vertical direction, that is, its center line is in the horizontal direction. Similarly, the reflecting surface of the third reflecting unit 3 on the right faces the outgoing direction of the second wavelength selector on the right, and the reflecting surface of this third reflecting unit 3 is also in the vertical direction, that is, its center line is in the horizontal direction. In this way, the third reflecting unit 3 can more accurately reflect the light beam separated by the second wavelength selector to the first direction.

[0053] In the filter device according to the embodiment of the present application, the wavelength selector 4 can adopt any device with a wavelength selection function, and the embodiment of the present application does not limit this.

[0054] Based on the same inventive concept, the embodiment of the present application also proposes a filtering method. As Figure 3 shown, it is a schematic flowchart of a filtering method proposed by an embodiment of the present application. This method is applied to the filter device proposed by the embodiment of the present application, and this method includes the following steps: S302, receive and reflect the light beam from the light source through the first reflecting unit, and control the deflection of the first reflecting unit to reflect the light beam to a plurality of wavelength selectors in different bands.

[0055] S304, separate the beam corresponding to the corresponding band from the received light beam through each wavelength selector.

[0056] S306, reflect the beam from each wavelength selector to the second reflecting unit through at least one third reflecting unit.

[0057] S308, control the deflection of the second reflecting unit to reflect the received light beam to the specified direction.

[0058] The above describes specific embodiments of this specification. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recited in the claims can be performed in a different order than in the embodiments and still achieve the desired result. Additionally, the processes depicted in the figures do not necessarily require the specific order or sequential order shown to achieve the desired result. In certain embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0059] In summary, the above description is only a preferred embodiment of the present application and is not intended to limit the protection scope of the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

[0060] It should also be noted that the term "including", "comprising" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, commodity or device including a series of elements not only includes those elements but also other elements not explicitly listed, or further includes elements inherent to such process, method, commodity or device. Without further limitation, an element defined by the statement "including one..." does not exclude the existence of another identical element in the process, method, commodity or device including the said element.

[0061] Each embodiment in this specification is described in a progressive manner. For the same or similar parts among the embodiments, reference can be made to each other. Each embodiment focuses on the differences from other embodiments. In particular, for the system embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and for the relevant parts, reference can be made to the partial description of the method embodiment.

Claims

1. A filter device, characterized in that: It includes a deflectable first reflecting unit, a deflectable second reflecting unit, at least one third reflecting unit, and a plurality of wavelength selectors of different wavelength bands; The first reflecting unit is used to reflect the light beam from the light source to the plurality of wavelength selectors by deflection; Each wavelength selector is used to separate a beam of a corresponding wavelength band from the light beam from the first reflecting unit; The at least one third reflecting unit is used to reflect the beam from each wavelength selector to the second reflecting unit; The second reflecting unit is used to reflect the received light beam to a specified direction by deflection.

2. The optical filter device according to claim 1, characterized in that The plurality of wavelength selectors include a first wavelength selector and a second wavelength selector; The second reflecting unit is used to reflect the light beam separated by the first wavelength selector to a first direction, and to reflect the light beam from the at least one third reflecting unit to the first direction by deflection.

3. The filter device according to claim 2, characterized in that The first reflecting unit has a first initial position; when the first reflecting unit is at the first initial position, there is a first angle between the center line of the reflecting surface of the first reflecting unit and the emission direction of the light source, and there is a second angle between the center line and the incident direction of the first wavelength selector, and the first angle is equal to the second angle.

4. The optical filter device according to claim 3, characterized in that: The second reflecting unit has a second initial position; when the second reflecting unit is at the second initial position, the reflecting surface of the second reflecting unit is opposite to and parallel to the reflecting surface of the first reflecting unit; the deflection direction of the second reflecting unit is opposite to the deflection direction of the first reflecting unit.

5. The optical filter device according to claim 2, characterized in that: An incident direction of the first wavelength selector and an incident direction of the second wavelength selector have a third angle therebetween.

6. The optical filter device according to claim 5, characterized in that The third angle is less than or equal to a maximum deflection angle of the first reflection unit.

7. The optical filter device according to claim 5, characterized in that A reflection surface of the at least one third reflection unit faces the emission direction of the second wavelength selector, and a reflection surface of each of the third reflection units is parallel to the incident direction of the first wavelength selector.

8. The optical filter device according to any one of claims 1 to 7, characterized in that The first reflection unit includes at least one of the following devices: a scanning galvanometer, an acousto-optic deflector; and / or, The second reflecting unit includes at least one of the following devices: a scanning galvanometer, and an acousto-optic deflector.

9. The optical filter device according to any one of claims 1 to 7, characterized in that: The first reflecting unit comprises a first reflecting mirror and a first driving mechanism, wherein the first driving mechanism is used to drive the first reflecting mirror to deflect; and / or, The second reflecting unit includes a second reflecting mirror and a second driving mechanism, and the second driving mechanism is used for driving the second reflecting mirror to deflect.

10. A filtering method, characterized in that: include: Receiving and reflecting a light beam from a light source through a first reflecting unit, and controlling the first reflecting unit to deflect so as to reflect the light beam to a plurality of wavelength selectors of different wavelength bands; Separating a beam of a corresponding wavelength band from the received light beam through each wavelength selector; reflecting the beam from each wavelength selector to the second reflecting unit through at least one third reflecting unit; The second reflecting unit is controlled to deflect so as to reflect the received light beam to a specified direction.

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