Perovskite laser scribing apparatus

Abstract

The application discloses a perovskite laser scribing device, which comprises a base (1), wherein the base (1) is provided with a Y-axis driving part (2) and a mounting rack (3), and the moving end of the Y-axis driving part (2) is provided with a workbench (4); the mounting rack (3) is provided with an X-axis driving part (5), the moving end of the X-axis driving part (5) is provided with a Z-axis driving part (6), and the moving end of the Z-axis driving part (6) is provided with an infrared laser scribing module (7) and a green laser scribing module (8); the infrared laser scribing module (7) is used for emitting infrared laser to perform scribing processing on a workpiece on the workbench (4); the infrared laser scribing module and the green laser scribing module are used for double-light-path processing, the processing efficiency is improved, and meanwhile, the optical path positioning mechanism is used to drive a collection camera to move, so that the collection camera is accurately corresponded with a scribing point, and the processing accuracy is ensured.

Description

Technical Field

[0001] This invention relates to the field of laser processing, and more specifically to a perovskite laser scribing device. Background Technology

[0002] Perovskite solar cells are solar cells that use perovskite-type organometal halide semiconductors as light-absorbing materials. They consist of a middle perovskite light-absorbing layer, electron and hole transport layers on both sides of the light-absorbing layer, and an outermost electrode layer. During processing, each layer needs to be laser-processed to form an electrical connection structure, including four laser processes, P1-P4, which are applied to the electrode layer, perovskite light-absorbing layer, electron transport layer, and hole transport layer, respectively. Finally, edge shaping (i.e., edge clearing) is performed. The laser sources used in different processes also differ. Therefore, at present, it is necessary to transfer the lasers between different laser processing equipment to complete the entire processing procedure, which is cumbersome. Summary of the Invention

[0003] The purpose of this invention is to provide a perovskite laser scribing device. This invention utilizes a dual-optical-path processing system, employing both an infrared laser scribing module and a green laser scribing module, to improve processing efficiency. Simultaneously, an optical path positioning mechanism moves the acquisition camera to accurately align it with the scribing points, ensuring processing precision.

[0004] The technical solution provided by this invention is as follows: A perovskite laser scribing device includes a base, a Y-axis drive and a mounting frame on the base, and a worktable at the moving end of the Y-axis drive; an X-axis drive is provided on the mounting frame, and a Z-axis drive is provided at the moving end of the X-axis drive; an infrared laser scribing module and a green laser scribing module are provided at the moving end of the Z-axis drive, the infrared laser scribing module is used to emit infrared laser to scribing the workpiece on the worktable, and the green laser scribing module is used to emit green laser to scribing the component on the worktable; an optical path positioning mechanism is provided at the moving end of the Z-axis drive, and a camera is provided at the output end of the optical path positioning mechanism; the optical path positioning mechanism drives the camera to move, so that the receiving end of the camera corresponds to the infrared laser scribing point of the infrared laser scribing module or the green laser scribing point of the green laser scribing module.

[0005] In the aforementioned perovskite laser scribing equipment, the worktable includes a rectangular fixed base, a right-angle support frame fixed on one side of the fixed base, and an adjustable straight edge with quick-release connection on the fixed base. The top surfaces of the adjustable straight edge and the right-angle support frame are connected together to form a workpiece support surface. Both the right-angle support frame and the adjustable straight edge are provided with rotatably connected pressure members, and there is a gap between the pressure members and the workpiece support surface.

[0006] In the aforementioned perovskite laser scribing equipment, the top surface of the fixed base is provided with a dust collection groove, and the side of the fixed base is provided with a dust collection port that communicates with the dust collection groove.

[0007] In the aforementioned perovskite laser scribing device, the infrared laser scribing module includes a first reflector mount and a galvanometer mount disposed at the moving end of the Z-axis drive component. The incident end of the first reflector mount is provided with an infrared laser head, and the exit end of the first reflector mount is connected to the incident end of the galvanometer mount. The exit end of the galvanometer mount is vertically downward.

[0008] In the aforementioned perovskite laser scribing equipment, the green laser scribing module includes a green laser mounted on a base, with a second reflector mount at the emitting end of the green laser and a third reflector mount connected to the second reflector mount on the mounting bracket; a fourth reflector mount is mounted on the moving end of the X-axis drive, with the incident end of the fourth reflector mount corresponding to the emitting end of the third reflector mount; a fifth reflector mount and a focusing cutting head are mounted on the moving end of the Z-axis drive, with the incident end of the fifth reflector mount corresponding to the emitting end of the fourth reflector mount, and the emitting end of the fifth reflector mount connected to the focusing cutting head, the emitting end of the focusing cutting head facing vertically downwards.

[0009] In the aforementioned perovskite laser scribing equipment, the moving end of the X-axis drive component is provided with a dust collection cover that encloses the emitting end of the infrared laser scribing module and the emitting end of the green laser scribing module.

[0010] In the aforementioned perovskite laser scribing equipment, the optical path positioning mechanism includes a rotating disk disposed at the moving end of the Z-axis drive component and connected to the drive component. A lateral adjustment block is provided on the side of the front of the rotating disk, and a longitudinal adjustment block is provided on the line connecting the lateral adjustment block and the center of the rotating disk. A lateral adjustment plate is provided on the front side of the rotating disk, which is laterally elastically connected to the moving end of the Z-axis drive component. The lateral adjustment plate has a lateral positioning port for accommodating the lateral and longitudinal adjustment blocks. Symmetrical arc-shaped positioning surfaces are located on both sides of the lateral positioning port. The radius of the arc-shaped positioning surface is equal to the distance from the lateral adjustment block to the center of the rotating disk, and the center of the arc-shaped positioning surface is on the same horizontal line as the center of the rotating disk. Vertically positioned lateral drive ports are provided at the upper and lower ends of the lateral positioning port, and these lateral drive ports are adapted to the lateral adjustment blocks. A vertically movably connected vertical adjustment plate is provided on the front of the lateral adjustment plate, and a horizontally positioned strip drive groove is provided on the back of the vertical adjustment plate. The longitudinal adjustment block passes through the lateral positioning port and engages with the strip drive groove. The acquisition camera is connected to the vertical adjustment plate.

[0011] In the aforementioned perovskite laser scribing equipment, the moving end of the Z-axis drive component is provided with symmetrically arranged positioning components, the side of the transverse adjustment plate is provided with a movable plate that is movably connected to the corresponding side positioning component, the end of the movable plate is provided with a baffle, and a spring is provided between the baffle and the corresponding side positioning component.

[0012] In the aforementioned perovskite laser scribing equipment, the arc of the arc-shaped positioning surface is less than 180°.

[0013] Compared with existing technologies, this invention places the workpiece on a worktable during processing. The X-axis and Z-axis drives move the infrared laser scribing module and the green laser scribing module in the X and Z axes, respectively, while the Y-axis drive moves the worktable in the Y-axis direction. The cooperation of these three components allows the infrared laser scribing module and the green laser scribing module to process any position on each layer of the workpiece. Furthermore, the simultaneous use of both infrared and green lasers meets the needs of different processes, enabling multiple processes to be performed on a single device with high efficiency. When switching between the infrared laser scribing module and the green laser scribing module, the optical path positioning mechanism moves the acquisition camera, ensuring that its receiving end aligns with the laser path in the working state. This avoids imaging distortion caused by lens edge distortion, which can lead to errors in optical path capture and effectively improves processing accuracy. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of the present invention;

[0015] Figure 2 This is a schematic diagram of the structure on the back of the present invention;

[0016] Figure 3 This is a schematic diagram of the structure of the workbench of the present invention;

[0017] Figure 4 This is a schematic diagram of the optical path positioning mechanism of the present invention;

[0018] Figure 5 This is a schematic diagram of the rotating disk and the horizontal adjustment plate of the present invention;

[0019] Figure 6 This is a schematic diagram of the lateral positioning port of the present invention;

[0020] Figure 7 This is a schematic diagram of the structure on the back of the vertical adjustment plate of the present invention.

[0021] The labels in the attached diagram are as follows: 1. Base; 2. Y-axis drive; 3. Mounting bracket; 4. Worktable; 5. X-axis drive; 6. Z-axis drive; 7. Infrared laser scribing module; 8. Green laser scribing module; 9. Optical path positioning mechanism; 10. Acquisition camera; 11. Fixing base; 12. Right-angle support frame; 13. Adjustable straight edge; 14. Workpiece support surface; 15. Pressing part; 16. Dust collection groove; 17. Dust collection port; 18. First reflector mount; 19. Galvanometer mount; 20. Infrared laser head; 21. Second reflector mount; 22. Third reflector mount; 23. Fourth reflector mount; 24. Fifth reflector mount; 25. Focusing cutting head; 26. Dust collection hood; 27. Rotary disk; 28. Horizontal adjustment block; 29. ​​Vertical adjustment block; 30. Horizontal adjustment plate; 31. Horizontal positioning port; 32. Arc-shaped positioning surface; 33. Horizontal drive port; 34. Strip drive groove; 35. Vertical adjustment plate; 36. Positioning component; 37. Movable plate; 38. Baffle; 39. Spring; 40. Green laser. Detailed Implementation

[0022] The present invention will be further described below with reference to the embodiments and accompanying drawings, but this should not be construed as limiting the present invention.

[0023] Example: A perovskite laser scribing device, as shown in the attached document. Figure 1 and attached Figure 2 As shown, the system includes a base 1, on which a Y-axis drive unit 2 and an arched mounting bracket 3 are mounted. A worktable 4 is mounted on the moving end of the Y-axis drive unit 2. An X-axis drive unit 5 is mounted on the mounting bracket 3, and a Z-axis drive unit 6 is mounted on the moving end of the X-axis drive unit 5. An infrared laser scribing module 7 and a green laser scribing module 8 are mounted on the moving end of the Z-axis drive unit 6. The infrared laser scribing module 7 emits an infrared laser to scribble on the workpiece on the worktable 4, and the green laser scribing module 8 emits a green laser to scribble on the components on the worktable 4. The Y-axis, X-axis, and Z-axis drive units are driven by linear motors or lead screws. The method achieves linear movement on the guide rail, with a maximum movement speed of 1000 mm / s. This is a well-known and mastered technique, and will not be elaborated further here. An optical path positioning mechanism 9 is mounted on the moving end of the Z-axis drive component 6. A camera 10 is mounted on the output end of the optical path positioning mechanism 9. The camera is a CCD camera with at least 5 million pixels, featuring high sensitivity, low noise, wide dynamic range, and high color fidelity. The optical path positioning mechanism 9 drives the camera 10 to move, aligning the receiving end of the camera 10 with the infrared laser marking point of the infrared laser marking module 7 or the green laser marking point of the green laser marking module 8. (See attached...) Figure 3As shown, the worktable 4 includes a rectangular fixed base 11. A right-angle support frame 12 is fixed to one side of the fixed base 11. An adjustable straight edge 13 is quickly connected to the fixed base 11 via holes and bolts. The top surfaces of the adjustable straight edge 13 and the right-angle support frame 12 are connected to form a workpiece support surface 14. The adjustable straight edge can move according to the distribution of holes, thereby adjusting the size of the workpiece support surface. The maximum workpiece support surface is 300mm × 300mm, suitable for workpieces of various sizes. Both the right-angle support frame 12 and the adjustable straight edge 13 are equipped with rotatably connected pressure members 15. The pressure members 15 are connected to the workpiece support surface. The 14-section has a gap for positioning the workpiece, and the bottom surface of the pressure piece has friction texture to improve the reliability of positioning; the top surface of the fixed base 11 has a dust collection groove 16, and the side of the fixed base 11 is integrally formed with a dust collection port 17 communicating with the dust collection groove 16. A vacuum cleaner is connected to the dust collection port for timely removal of waste materials; the infrared laser scribing module 7 includes a first reflector base 18 and a galvanometer base 19 assembled on the moving end of the Z-axis drive component 6. The incident end of the first reflector base 18 is fixed with an infrared laser head 20 with a frequency of 1k-4000khz and a pulse width of 2-500ns via an optical fiber head seat, and the emitting end of the first reflector base 18 is connected with a dense The incident end of the galvanometer mount 19 is connected to the sealed tube, and the emitting end of the galvanometer mount 19 is vertically downward, bending the optical propagation path to improve space utilization. The green laser scribing module 8 includes a green laser 40 with a frequency of 200k-800khz and a pulse width of <15ps, mounted on the base 1. The emitting end of the green laser 40 is connected to a second reflector mount 21 via a sealed tube. A third reflector mount 22, which is connected to the second reflector mount 21 via a sealed tube, is mounted on the mounting bracket 3. A fourth reflector mount 23 is provided on the moving end of the X-axis drive 5. The incident end of the fourth reflector mount 23 is connected to the third reflector mount 22. The output ends correspond to each other, and a bellows-like protective cover (not shown in the figure) is installed between them to enclose the optical path; the moving end of the Z-axis drive 6 is equipped with a fifth reflector mount 24 and a focusing cutter head 25. The incident end of the fifth reflector mount 24 corresponds to the output end of the fourth reflector mount 23, and a bellows-like protective cover is installed between them to enclose the optical path. The output end of the fifth reflector mount 24 is connected to the focusing cutter head 25 via a sealing tube, and the output end of the focusing cutter head 25 is vertically downward; the moving end of the X-axis drive 5 is equipped with a dust collection cover 26 that surrounds the emitting end of the infrared laser scribing module 7 and the emitting end of the green laser scribing module 8; as shown in the attached figure. Figure 4 - Appendix Figure 7As shown, the optical path positioning mechanism 9 includes a rotating disk 27 mounted on the moving end of the Z-axis drive 6 and connected to a micro rotary motor. A transverse adjustment block 28 is integrally formed on the front side of the rotating disk 27, and a longitudinal adjustment block 29 is integrally formed on the line connecting the transverse adjustment block 28 and the center of the rotating disk 27. A transverse adjustment plate 30 is mounted on the front side of the rotating disk 27 and is laterally elastically connected to the moving end of the Z-axis drive 6. The transverse adjustment plate 30 has a transverse positioning opening 31 for accommodating the transverse adjustment block 28 and the longitudinal adjustment block 29. The two sides of the transverse positioning opening 31 have symmetrical 90° outwardly convex arc-shaped positioning surfaces 32. The radius of the arc-shaped positioning surface 32 is equal to the radius of the circle from the transverse adjustment block 28 to the rotating disk 27. The centers are equidistant, and the center of the arc-shaped positioning surface 32 and the center of the rotating disk 27 are on the same horizontal line; the upper and lower ends of the horizontal positioning port 31 are both provided with vertically arranged horizontal driving ports 33, which are adapted to the horizontal adjusting block 28; the front of the horizontal adjusting plate 30 is equipped with a vertically movable vertical adjusting plate 35, and the back of the vertical adjusting plate 35 is provided with a horizontally arranged strip driving groove 34, and the vertical adjusting block 29 passes through the horizontal positioning port 31 and cooperates with the strip driving groove 34; the acquisition camera 10 is connected to the vertical adjusting plate 35; when the horizontal adjusting block is in contact with the arc-shaped positioning surface, due to the radius correspondence of the arc-shaped positioning surface, the horizontal adjusting block is positioned on the arc-shaped positioning surface. The horizontal adjustment plate will not move at any position. Furthermore, the elasticity of the horizontal adjustment plate keeps it fixed in its current position. At this time, the turntable rotates, and the vertical adjustment block pushes the strip drive groove, thereby moving the vertical adjustment plate up and down, thus adjusting the focus position of the acquisition camera. When the horizontal adjustment block leaves the arc-shaped positioning surface and enters the horizontal drive port, it pushes the side surface of the horizontal drive port to move the horizontal adjustment plate laterally until the horizontal adjustment block leaves the horizontal drive port again and enters the horizontal positioning port, fitting against the arc-shaped positioning surface on the other side, thus achieving the lateral movement of the acquisition camera. By adjusting the distance between the horizontal adjustment block and the center of the turntable, as well as the curvature and radius of the arc-shaped positioning surface, the focus position of the acquisition camera can be accurately adjusted. The lateral movement distance of the horizontal adjustment plate is precisely controlled to correspond to the lateral spacing between the emitting ends of the infrared laser scribing module and the green laser scribing module. When the laser is switched for processing, the rotating disk can drive the acquisition camera to collect the laser light path being processed. At the same time, its focus can be flexibly controlled to accurately capture and improve the processing accuracy. The moving end of the Z-axis drive component 6 is equipped with symmetrically arranged C-shaped positioning components 36. The side of the horizontal adjustment plate 30 is integrally formed with a movable plate 37 that fits into the corresponding side positioning component 36. The end of the movable plate 37 is integrally formed with a baffle 38. A spring 39 is provided between the baffle 38 and the corresponding side positioning component 36. When moving, the spring is compressed and stretched to provide elastic force.The base integrates a controller electrically connected to each component, which receives signals and adjusts parameters including laser frequency and power, drive component direction and speed, galvanometer mount speed, and camera mark / line capture, etc. These are techniques well-known and mastered by those skilled in the art, and will not be elaborated upon here.

[0024] Working principle: The workpiece is placed on the workpiece support surface 14 of the worktable 4. The size of the support surface can be flexibly adjusted by adjusting the straight edge 13 to adapt to workpieces of various sizes. The right-angle support frame 12 and the pressure piece 15 rotatably connected to the adjusting straight edge 13 use the gap between the pressure piece and the workpiece support surface 14 to position the workpiece. The friction texture on the bottom surface of the pressure piece increases the stability of the positioning and prevents the workpiece from shifting during the processing.

[0025] The X-axis drive unit 5, Z-axis drive unit 6, and Y-axis drive unit 2 of the equipment work together. The X-axis drive unit 5 and Z-axis drive unit 6 drive the infrared laser scribing module 7 and the green laser scribing module 8 to move in the X and Z axes, respectively, while the Y-axis drive unit 2 drives the worktable 4 to move in the Y axis. This allows the infrared laser scribing module 7 and the green laser scribing module 8 to process any position on each layer of the workpiece. The infrared laser head 20 in the infrared laser scribing module 7 emits infrared laser light, which is then used to scribble on the workpiece after the optical path is adjusted by the first reflector mount 18 and the galvanometer mount 19. The green laser 40 in the green laser scribing module 8 emits green laser light, which is transmitted and focused by multiple reflector mounts and the focusing cutting head 25 to achieve scribing on the workpiece. The two lasers have different frequencies, pulse widths, and other parameters to meet the processing requirements of different process layers of perovskite solar cells, enabling multiple processes to be completed on a single device and improving processing efficiency.

[0026] When switching between the infrared laser scribing module 7 and the green laser scribing module 8, the rotating disk 27 in the optical path positioning mechanism 9 rotates under the drive of a micro rotating motor, driving the horizontal adjustment block 28 and the vertical adjustment block 29 to move. The horizontal adjustment block 28 cooperates with the arc-shaped positioning surface 32 and the horizontal drive port 33 of the horizontal positioning port 31, and the vertical adjustment block 29 cooperates with the strip drive groove 34 on the back of the vertical adjustment plate 35, realizing the horizontal and vertical movement of the acquisition camera 10. This enables the receiving end of the acquisition camera 10 to accurately correspond to the laser optical path in the current working state, avoiding image distortion caused by lens edge distortion, thereby generating optical path capture error and effectively improving processing accuracy.

Claims

1. A perovskite laser scribe apparatus, characterized by: The system includes a base (1), on which a Y-axis drive (2) and a mounting bracket (3) are mounted. The moving end of the Y-axis drive (2) is provided with a worktable (4). The mounting bracket (3) is provided with an X-axis drive (5), on which a Z-axis drive (6) is mounted. The moving end of the Z-axis drive (6) is provided with an infrared laser scribing module (7) and a green laser scribing module (8). The infrared laser scribing module (7) is used to emit infrared laser to scribing the workpiece on the worktable (4), and the green laser scribing module (8) is used to emit green laser to scribing the workpiece on the worktable (4). The component is subjected to scribing processing; the moving end of the Z-axis drive (6) is provided with an optical path positioning mechanism (9), and the output end of the optical path positioning mechanism (9) is provided with a collection camera (10). The optical path positioning mechanism (9) drives the collection camera (10) to move, so that the receiving end of the collection camera (10) corresponds to the infrared laser scribing point of the infrared laser scribing module (7) or the green laser scribing point of the green laser scribing module (8); the optical path positioning mechanism (9) includes a rotating disk (27) set on the moving end of the Z-axis drive (6) and connected to the drive component. The side of the front of the rotating disk (27) is provided with a lateral adjustment. Block (28), a longitudinal adjustment block (29) is provided on the line connecting the center of the transverse adjustment block (28) and the center of the rotating disk (27); the front side of the rotating disk (27) is provided with a transverse adjustment plate (30) that is laterally elastically connected to the moving end of the Z-axis drive (6), and the transverse adjustment plate (30) is provided with a transverse positioning port (31) for accommodating the transverse adjustment block (28) and the longitudinal adjustment block (29). The two sides of the transverse positioning port (31) have relatively symmetrical arc-shaped positioning surfaces (32). The radius of the arc-shaped positioning surface (32) is equal to the distance from the transverse adjustment block (28) to the center of the rotating disk (27), and the arc-shaped positioning surface (32) is symmetrical. The center of the surface (32) and the center of the rotating disk (27) are on the same horizontal line; the upper and lower ends of the horizontal positioning port (31) are provided with vertically arranged horizontal driving ports (33), and the horizontal driving ports (33) are adapted to the horizontal adjustment block (28); the front of the horizontal adjustment plate (30) is provided with a vertically movable vertical adjustment plate (35), and the back of the vertical adjustment plate (35) is provided with a horizontally arranged strip drive groove (34); the vertical adjustment block (29) passes through the horizontal positioning port (31) and cooperates with the strip drive groove (34); the acquisition camera (10) is connected to the vertical adjustment plate (35).

2. The perovskite laser scribing device according to claim 1, characterized in that: The workbench (4) includes a rectangular fixed base (11), a right-angle support frame (12) is fixed on one side of the fixed base (11), and a quick-release adjustable straight edge (13) is provided on the fixed base (11). The top surfaces of the adjustable straight edge (13) and the right-angle support frame (12) are connected together to form a workpiece support surface (14). Both the right-angle support frame (12) and the adjustable straight edge (13) are provided with rotating pressure pieces (15), and there is a gap between the pressure pieces (15) and the workpiece support surface (14).

3. The perovskite laser scribing device according to claim 2, characterized in that: The top surface of the fixed base (11) is provided with a dust suction groove (16), and the side surface of the fixed base (11) is provided with a dust suction port (17) that communicates with the dust suction groove (16).

4. The perovskite laser scribing device according to claim 1, characterized in that: The infrared laser scribing module (7) includes a first reflector mount (18) and a galvanometer mount (19) located at the moving end of the Z-axis drive (6). The incident end of the first reflector mount (18) is provided with an infrared laser head (20), and the exit end of the first reflector mount (18) is connected to the incident end of the galvanometer mount (19). The exit end of the galvanometer mount (19) is vertically downward.

5. The perovskite laser scribing device according to claim 1, characterized in that: The green laser scribing module (8) includes a green laser (40) mounted on a base (1). The emitting end of the green laser (40) is provided with a second reflector mount (21). The mounting bracket (3) is provided with a third reflector mount (22) connected to the second reflector mount (21). The moving end of the X-axis drive (5) is provided with a fourth reflector mount (23). The incident end of the fourth reflector mount (23) corresponds to the emitting end of the third reflector mount (22). The moving end of the Z-axis drive (6) is provided with a fifth reflector mount (24) and a focusing cutting head (25). The incident end of the fifth reflector mount (24) corresponds to the emitting end of the fourth reflector mount (23). The emitting end of the fifth reflector mount (24) is connected to the focusing cutting head (25). The emitting end of the focusing cutting head (25) is vertically downward.

6. The perovskite laser scribing device according to claim 1, characterized in that: The moving end of the X-axis drive (5) is provided with a dust collection cover (26) that surrounds the emitting end of the infrared laser scribing module (7) and the emitting end of the green laser scribing module (8).

7. The perovskite laser scribing device according to claim 1, characterized in that: The Z-axis drive (6) has symmetrically arranged positioning components (36) on its moving end. The side of the transverse adjustment plate (30) has a movable plate (37) that is movably connected to the corresponding side positioning component (36). The end of the movable plate (37) has a baffle (38). A spring (39) is provided between the baffle (38) and the corresponding side positioning component (36).

8. The perovskite laser scribing device according to claim 1, characterized in that: The arc of the arc-shaped positioning surface (32) is less than 180°.

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