A device for dehydroxylation and polishing of the inner wall of a quartz tube

Abstract

The present invention discloses a quartz tube inner wall dehydroxylation polishing device, comprising a workbench, on the upper end surface of which two parallel distributed tube clamp assemblies are symmetrically arranged; an organic board is vertically fixed on one side of the upper end surface of the workbench, a plurality of guide bars are horizontally fixed on the machine board, a positioning seat is installed on the guide bar, and a polishing unit is arranged on the axial end surface of the positioning seat close to the machine board; a tube pushing device for axially propelling the quartz tube is arranged on the outer sides of the two tube clamp assemblies on the workbench; the plurality of side polishing devices and the center polishing disk in the polishing unit of the present invention can perform overall polishing on the inner wall of the quartz tube in synchronous rotation, and the polishing efficiency is high; the tube pushing device can provide axial reciprocating propulsion to the quartz tube, so that the side polishing device and the center polishing disk can perform fine polishing and rough polishing operations on various parts of the inner wall of the quartz tube, thereby ensuring the consistency and uniformity of the polishing.

Description

Technical Field

[0001] The present invention belongs to the technical field of polishing equipment, and specifically relates to a hydroxyl-removing polishing device for the inner wall of a quartz tube. Background Art

[0002] Quartz tubes are widely used in fields such as semiconductors, optical fibers, and photovoltaics due to their high purity, high temperature resistance, and excellent optical properties. However, the residual hydroxyl groups on their inner walls will significantly reduce the light transmittance, heat resistance, and chemical stability. Therefore, it is necessary to improve the inner wall smoothness and reduce light scattering through a polishing process;

[0003] In the prior art, such as the invention patent with the publication number CN115648049B, the polishing assembly it adopts can be aligned with the quartz tube body during polishing and perform horizontal polishing operations, ensuring the stability of the quartz tube body and facilitating loading and unloading; however, during its use, the polishing assembly needs to continuously slide into the quartz tube, resulting in low efficiency and a long cycle time. Moreover, during continuous operation, the surface temperature of the polishing assembly is as high as 120 - 150 °C, leading to a decrease in the hydroxyl desorption efficiency (the efficiency decreases by 40% when the temperature > 100 °C); secondly, a single polishing assembly cannot achieve the combination of rough polishing and fine polishing, and different polishing assemblies need to be replaced additionally to complete rough polishing and fine polishing operations respectively, increasing the operation steps and possibly resulting in inconsistent connection between the two operations, affecting the surface quality of the final product.

[0004] Therefore, it is necessary to provide a hydroxyl-removing polishing device for the inner wall of a quartz tube to solve the problems raised in the above background art. Summary of the Invention

[0005] To achieve the above object, the present invention provides the following technical solution: A hydroxyl-removing polishing device for the inner wall of a quartz tube, including a workbench, on the upper end surface of which two parallel distributed tube clamping assemblies are symmetrically arranged. The tube clamping assembly is provided with a coaxial positioning hole for horizontally clamping the quartz tube to be processed;

[0006] On one side of the upper end surface of the workbench, a machine plate is vertically fixed. A plurality of guide rods are horizontally fixed on the machine plate, and a positioning seat is installed on the guide rods. On the axial end surface of the positioning seat close to the machine plate, a polishing unit is arranged, and one end of the polishing unit coaxially extends into the inner cavity of the quartz tube;

[0007] On the workbench, on the outer sides of the two tube clamping assemblies, a tube pushing device for axially advancing the quartz tube is arranged.

[0008] Further, as a preference, the tube clamping assembly includes a clamping base, which is fixed on the workbench by bolts. On the upper end surface of the clamping base, a movable clamp seat is vertically slidably connected. Arc-shaped positioning grooves are provided in both the movable clamp seat and the clamping base, and a lining plate is fixed in the arc-shaped positioning groove;

[0009] A locking cylinder is fixed on one side of the clamping base, and an output end of the locking cylinder is connected to the movable clamping seat.

[0010] Furthermore, preferably, a plurality of roller units are evenly distributed on the arc-shaped inner wall of each of the inner lining plates; and a carrier is fixed on one side of one of the pipe clamp assemblies on the workbench, and a slidably adjustable wheel mechanism is tiltedly installed on the carrier, and the wheel mechanism is in contact with the outer wall of the quartz tube.

[0011] Furthermore, as a preference, the polishing unit comprises a fixed shaft, which is transversely fixed on the positioning seat and is arranged through the machine plate, and a plurality of central polishing discs are evenly distributed on the fixed shaft;

[0012] The fixed shaft is also equipped with a plurality of side-throwing devices, and the side-throwing devices and the central throwing disc are alternately distributed along the axial direction of the fixed shaft.

[0013] Furthermore, preferably, a shaft plate is coaxially fixed on one side of each center throwing disc on the fixed shaft, and a connecting shaft is eccentrically rotated on each shaft plate through a bearing, and a transmission tooth is fixed on one end of the connecting shaft; a gear ring is coaxially fixed on one end of the center throwing disc close to the shaft plate, and the transmission tooth is meshed with the gear ring;

[0014] A rotating shaft is rotatably arranged in the fixed shaft, and an inner tooth 1 is sleeved on each shaft plate of the rotating shaft, and the inner tooth 1 is meshed with the transmission tooth for transmission.

[0015] Furthermore, preferably, a plurality of radially slidable polishing plates are evenly distributed along the circumference of the circumferential side wall of the central polishing disc, each polishing plate being radially slidably connected to the central polishing disc via a sliding pair, a sealing cavity corresponding to each polishing plate is defined in the central polishing disc, and a sealing plug fixedly connected to the corresponding polishing plate is slidably mounted in each sealing cavity;

[0016] A sealing ring is coaxially fixed in the central throwing disc, and the sealing ring is sealingly rotatably sleeved on the outside of the fixed shaft, and the two seal together to form an annular structure cavity. The sealing ring is circumferentially provided with a plurality of through holes, and each of the through holes is correspondingly connected to the sealing cavity;

[0017] An oil channel is provided in the fixed shaft, and the oil channel is communicated with each annular structure cavity.

[0018] Furthermore, as a preference, the side-throwing device includes two shaft sleeve seats, which are symmetrically arranged, and both shaft sleeve seats are sleeved on the fixed shaft; a roller frame parallel to the fixed shaft is installed on one side of the shaft sleeve seat, and a side-throwing roller is rotatably connected to the roller frame;

[0019] The rotating shaft is provided with two inner teeth, and the fixed shaft is provided with a driven tooth for rotation outside, and the two inner teeth are engaged with the driven tooth, and one side of the roller frame is provided with an outer tooth fixed to the side throwing roller for rotation, and the outer tooth is engaged with the driven tooth.

[0020] Furthermore, as a preference, the shaft sleeve seat is rotatably connected to the fixed shaft, and a guide shaft is slidably connected to the shaft sleeve seat, and the other end of the guide shaft is fixed to the roller frame;

[0021] One side of the driven tooth is rotatably connected to a fixing rod, and the other end of the fixing rod is rotatably connected to the external tooth.

[0022] Furthermore, as a preference, a telescopic propeller is provided outside the fixed shaft, and a power output end of the telescopic propeller is connected to the fixed rod.

[0023] Further, as a preference, the tube pushing device includes a side plate, which is slidably positioned and adjustable on the workbench, the side plate being laterally fixed with a pulse pneumatic actuator, the output end of the pulse pneumatic actuator being fixed with a vertically arranged dial plate, the upper end of the dial plate being in contact with the outer wall of the quartz tube orifice;

[0024] The pulsed pneumatic actuators in the two tube pushing devices cooperate with each other and realize alternating axial propulsion and reset cycles through the main control system.

[0025] Compared with the prior art, the present invention has the following beneficial effects:

[0026] In the present invention, the quartz tube can be horizontally mounted on a workbench through a tube clamp assembly, and the multiple side polishing devices and the center polishing disk in the polishing unit can perform overall polishing on the inner wall of the quartz tube during synchronous rotation, with high polishing efficiency. The tube pushing device also used therein can provide axial reciprocating propulsion to the quartz tube, thereby prompting the side polishing devices and the center polishing disk in the polishing unit to perform fine polishing and coarse polishing operations on various parts of the inner wall of the quartz tube, thereby ensuring the consistency and uniformity of the polishing; especially during the polishing operation, the center polishing disk is centrally arranged with the quartz tube, and the polishing plate on its outer circumference can achieve uniform polishing of the entire circumference during rotation, avoiding the problem of over-polishing or under-polishing of local parts; and the side polishing device adopts eccentric contact with the quartz tube, which can concentrate the pressure in the contact area during high-speed rotation operation, thereby improving the local cutting force, and the material removal efficiency is 20% to 30% higher than that of the coaxial method, while enhancing the consistency of the surface texture. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0028] Figure 2 Schematic diagram of the structure of the pipe clamp assembly of the present invention;

[0029] Figure 3 Schematic structural diagram of the push tube device in the present invention;

[0030] Figure 4 Overall structural diagram of the polishing unit in the present invention;

[0031] Figure 5 Internal structural diagram of the polishing unit in the present invention;

[0032] Figure 6 is Figure 5 Enlarged schematic diagram of the structure at position A in;

[0033] Figure 7 Schematic structural diagram of the connection structure of the fixed rod, external teeth and driven teeth in the present invention;

[0034] In the figure: 1, workbench; 11, machine plate; 12, guide rod; 13, positioning seat; 2, tube clamp assembly; 21, clamping base; 22, movable clamp seat; 23, inner lining plate; 24, locking cylinder; 25, roller unit; 26, carrier seat; 27, runner mechanism; 3, polishing unit; 31, fixed shaft; 32, central polishing disc; 33, shaft plate; 34, transmission tooth; 35, tooth ring; 36, rotating shaft; 37, internal tooth one; 4, push tube device; 41, side plate; 42, pulse pneumatic actuator; 43, dial plate; 5, side polishing device; 51, bushing seat; 52, roller frame; 53, side polishing roller; 54, internal tooth two; 55, driven tooth; 56, external tooth; 57, guide shaft; 58, fixed rod; 6, polishing plate; 61, sealing cavity; 62, sealing ring; 63, annular structure cavity; 64, through hole; 65, oil passage. Specific embodiments

[0035] Please refer to Figures 1-7 , in the embodiment of the present invention, a hydroxyl-removing polishing device for the inner wall of a quartz tube includes a workbench 1, on the upper end surface of which two tube clamp assemblies 2 are symmetrically arranged in parallel. The tube clamp assembly 2 is provided with a coaxial positioning hole for horizontally clamping the quartz tube to be processed; thus, during use, the staff can horizontally place the quartz tube to be processed in the positioning holes of the two tube clamp assemblies 2;

[0036] On one side of the upper end surface of the workbench 1, a machine plate 11 is vertically fixed. A plurality of guide rods 12 are horizontally fixed on the machine plate 11. A positioning seat 13 is installed on the guide rods 12. On one side of the axial end surface of the positioning seat 13 close to the machine plate 11, a polishing unit 3 is arranged. One end of the polishing unit 3 coaxially extends into the inner cavity of the quartz tube; the overall length of the polishing unit 3 is slightly less than the length of the quartz tube to be processed, but greater than three-quarters of the length of the quartz tube, ensuring the integrity during the polishing operation and avoiding missed polishing;

[0037] On the workbench 1, push tube devices 4 for axially advancing the quartz tube are provided on the outer sides of the two tube clamp assemblies 2. The push tube devices 4 can provide axial reciprocating advancement to the quartz tube, ensuring that every part of its inner wall can be fully polished, thereby achieving a better overall polishing effect. Moreover, during the polishing operation, there is no need to adjust the position of the polishing unit 3, ensuring polishing consistency, improving the uniformity of the polished surface, and significantly improving work efficiency.

[0038] In this embodiment, the tube clamp assembly 2 includes a clamping base 21, which is fixed to the workbench 1 by bolts. A movable clamp seat 22 is vertically slidably connected to the upper end surface of the clamping base 21. Arc-shaped positioning grooves are provided in both the movable clamp seat 22 and the clamping base 21, and an inner lining plate 23 is fixed in the arc-shaped positioning grooves.

[0039] One side of the clamping base 21 is fixed with a locking cylinder 24, and the output end of the locking cylinder 24 is connected to the movable clamp seat 22. The locking cylinder 24 can achieve positioning and clamping of the quartz tube under telescopic control.

[0040] As a preferred embodiment, a plurality of roller units 25 are evenly distributed on the arc-shaped inner walls of the inner lining plates 23. And a carrier 26 is fixed to one side of the workbench 1 where one of the tube clamp assemblies 2 is located. A rotatable wheel mechanism 27 that can be slidably adjusted is inclinedly installed on the carrier 26, and the rotatable wheel mechanism 27 abuts against the outer wall of the quartz tube. Therefore, during the quartz tube polishing operation, the rotatable wheel mechanism 27 can keep the quartz tube rotating at a low speed while continuously rotating. It should be noted that its rotation direction is opposite to the fine polishing rotation direction of the polishing unit 3.

[0041] In this embodiment, the polishing unit 3 includes a fixed shaft 31, which is horizontally fixed on the positioning seat 13 and penetrates through the machine plate 11. A plurality of central polishing discs 32 are equidistantly distributed on the fixed shaft 31.

[0042] Moreover, a plurality of side polishing devices 5 are also assembled on the fixed shaft 31, and the side polishing devices 5 and the central polishing disc 32 are alternately distributed along the axial direction of the fixed shaft 31. Among them, the central polishing disc 32 can perform rough polishing on the inner wall of the quartz tube during rotational motion, while the side polishing device 5 can perform fine polishing on the inner wall of the quartz tube. Therefore, during specific polishing, the push tube device 4 intermittently pushes the quartz tube to perform axial reciprocating motion, so as to ensure that different regions of the inner wall of the quartz tube can sequentially pass through the rough polishing and fine polishing regions, thereby achieving an overall uniform polishing effect and ensuring the consistency and stability of the inner wall polishing; it should be noted that the plurality of side polishing devices 5 are in eccentric contact with the quartz tube. With such a setting, the contact area pressure can be concentrated during high-speed rotational operation, and the contact stress distribution shows a gradient characteristic (the peak pressure can reach 1.5 - 2.5 MPa), which is 3 - 4 times that of coaxial contact. The local cutting force is increased, and the material removal efficiency is 20% - 30% higher than that of the coaxial method, improving the crushing efficiency of the hydroxyl layer (the crushing rate > 90%), and at the same time enhancing the surface texture consistency; in particular, in combination with the pushing action of the push tube device 4, eccentric rotation is superimposed on axial feed to form a composite trajectory of a helix + cycloid (the trajectory density is increased by 50%), avoiding the repeated patterns generated by coaxial polishing; moreover, the high pressure in the eccentric contact area causes a temperature rise in the micro-region (80 - 100 °C), promoting the thermal dissociation of hydroxyl groups (the activation energy is reduced by 30%); while the non-contact area can be quickly cooled by the coolant (the temperature difference gradient < 10 °C / mm), and intermittent high-pressure contact reduces the overall heat accumulation, and the thermal expansion amount of the tube body is controlled within ±2 μm / m (coaxial continuous contact results in > 10 μm / m).

[0043] In this embodiment, a shaft plate 33 is coaxially fixed on one side of each central polishing disc 32 on the fixed shaft 31. A connecting shaft is eccentrically rotatably arranged on each shaft plate 33 through a bearing, and a transmission gear 34 is fixed at one end of the connecting shaft; a tooth ring 35 is coaxially fixed at one end of the central polishing disc 32 close to the shaft plate 33, and the transmission gear 34 meshes with the tooth ring 35;

[0044] A rotating shaft 36 is rotatably arranged in the fixed shaft 31. An internal gear 37 is sleeved on the rotating shaft 36 at each shaft plate 33, and the internal gear 37 is correspondingly meshed and driven with the transmission gear 34. That is to say, during specific polishing operations, the rotating shaft 36 continuously rotates in a circle through an external driving part, while the fixed shaft 31 is in a static state. At this time, each central polishing disc 32 can be driven to rotate by the conduction of the internal gear 37. The rotation direction is opposite to that of the rotating shaft 36, and the rotation direction of the central polishing disc 32 is the same as that of the quartz tube. It can rotate relative to the quartz tube at a high speed, thereby realizing the rough polishing operation on the inner wall of the quartz tube.

[0045] In this embodiment, a plurality of polishing plates 6 that can slide radially are evenly distributed along the circumferential side wall of the central polishing disc 32 in a circumferential manner. Each polishing plate 6 is radially slidably connected to the central polishing disc 32 through a sliding pair. A sealing cavity 61 corresponding to each polishing plate 6 is formed in the central polishing disc 32. A sealing plug fixedly connected to the corresponding polishing plate 6 is slidably assembled in each sealing cavity 61; the polishing plates 6 can be disassembled and replaced, which is convenient for adapting to different polishing industries. It should be noted that a spring is installed in the sealing cavity 61, and it can cause the polishing plates 6 to contract towards the center of the central polishing disc 32 under the action of elastic force;

[0046] A sealing ring 62 is coaxially fixed in the central polishing disc 32. The sealing ring 62 is rotatably sleeved outside the fixed shaft 31 in a sealed manner, and the two are in sealed cooperation to form an annular structure cavity 63. A plurality of through holes 64 are formed in the circumferential direction of the sealing ring 62, and each through hole 64 is correspondingly communicated with the sealing cavity 61;

[0047] An oil passage 65 is formed in the fixed shaft 31. The oil passage 65 is communicated with each annular structure cavity 63. Hydraulic oil is conveyed in the oil passage 65, and it can enter each annular structure cavity 63 under the high-pressure conveyance of a hydraulic pump, and then can enter the sealing cavity 61 through the through holes 64, so as to radially push each polishing plate 6 on the circumference of the central polishing disc 32, enabling the polishing plates 6 to better fit the inner wall of the quartz tube during rotation, thereby enhancing the polishing effect.

[0048] As a preferred embodiment, the side polishing device 5 includes two sleeve seats 51 that are symmetrically arranged. Both sleeve seats 51 are sleeved on the fixed shaft 31; a roller frame 52 parallel to the fixed shaft 31 is installed on one side of the sleeve seat 51, and a side polishing roller 53 is rotatably connected to the roller frame 52;

[0049] An internal gear two 54 is sleeved on the rotating shaft 36, and a driven gear 55 is rotatably arranged outside the fixed shaft 31. The internal gear two 54 meshes with the driven gear 55, and an external gear 56 fixed to the side polishing roller 53 is rotatably arranged on one side of the roller frame 52. The external gear 56 meshes with the driven gear 55. Among them, the side polishing roller 53 can rotate in the same direction as the rotating shaft 36 under the conduction of the driven gear 55, and rotate in the opposite direction to the rotation direction of the quartz tube, further enhancing the polishing effect.

[0050] In this embodiment, the sleeve seat 51 is rotatably connected to the fixed shaft 31, and a guide shaft 57 is slidably connected to the sleeve seat 51. The other end of the guide shaft 57 is fixed to the roller frame 52;

[0051] A fixed rod 58 is rotatably connected to one side of the driven gear 55, and the other end of the fixed rod 58 is rotatably connected to the external gear 56.

[0052] In this embodiment, a telescopic thruster (not shown in the figure) is provided outside the fixed shaft 31. The power output end of the telescopic thruster is connected to the fixed rod 58. That is to say, under the telescopic push of the telescopic thruster, the bushing seat 51 can be deflected around the axis of the fixed shaft 31. At this time, since the outer tooth 56 and the driven tooth 55 are connected by the fixed rod 58, the outer tooth 56 and the driven tooth 55 are always in mesh. Therefore, when the bushing seat 51 deflects, a relative sliding occurs between the middle roller frame 52 and the bushing seat 51 through the guide shaft 57, thereby changing the center distance between the outer tooth 56 and the fixed shaft 31, effectively adjusting the polishing intensity of the side polishing roller 53 (when the extension line of the fixed rod 58 and the center of the fixed shaft 31 are on the same straight line, this is the maximum polishing distance of the side polishing roller 53).

[0053] In this embodiment, the push tube device 4 includes a side plate 41 which is slidably and positionally adjusted and installed on the workbench 1. A pulse pneumatic actuator 42 is horizontally fixed on the side plate 41. The output ends of the pulse pneumatic actuator 42 are both fixed with vertically arranged dial plates 43, and the upper ends of the dial plates 43 are in abutting contact with the outer wall of the quartz tube nozzle;

[0054] The pulse pneumatic actuators 42 in the two push tube devices 4 cooperate with each other and realize an alternating axial propulsion and reset cycle through the main control system.

[0055] The above is only the preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution of the present invention and its inventive concept, makes equivalent substitutions or changes, and should be covered by the protection scope of the present invention.

Claims

1. A hydroxyl-removing and polishing device for the inner wall of a quartz tube, characterized in that: It includes a workbench (1), on the upper end face of which there are symmetrically arranged two tube clamp assemblies (2) distributed in parallel. The tube clamp assemblies (2) are provided with coaxial positioning holes for horizontally clamping the quartz tube to be processed; on one side of the upper end face of the workbench (1), a machine plate (11) is vertically fixed. On the machine plate (11), a plurality of guide rods (12) are horizontally fixed. A positioning seat (13) is installed on the guide rods (12). On one side of the axial end face of the positioning seat (13) close to the machine plate (11), a polishing unit (3) is provided. One end of the polishing unit (3) coaxially extends into the inner cavity of the quartz tube; on the workbench (1), on the outer sides of the two tube clamp assemblies (2), there are push tube devices (4) for axially advancing the quartz tube; the polishing unit (3) includes a fixed shaft (31), which is horizontally fixed on the positioning seat (13) and penetrates through the machine plate (11). A plurality of central polishing discs (32) are equidistantly distributed on the fixed shaft (31); and a plurality of side polishing devices (5) are also assembled on the fixed shaft (31). The side polishing devices (5) and the central polishing discs (32) are alternately distributed along the axial direction of the fixed shaft (31); the side polishing device (5) includes two symmetrically arranged sleeve seats (51). Both sleeve seats (51) are sleeved on the fixed shaft (31); on one side of the sleeve seat (51), a roller frame (52) parallel to the fixed shaft (31) is installed. A side polishing roller (53) is rotatably connected to the roller frame (52); The tube clamp assembly (2) includes a clamping base (21), which is fixed on the workbench (1) by bolts. On the upper end face of the clamping base (21), a movable clamp seat (22) is vertically slidably connected. Arc-shaped positioning grooves are provided in both the movable clamp seat (22) and the clamping base (21). Inner lining plates (23) are fixed in the arc-shaped positioning grooves; On one side of the clamping base (21), a locking cylinder (24) is fixed. The output end of the locking cylinder (24) is connected to the movable clamp seat (22); A plurality of roller units (25) are evenly distributed on the arc-shaped inner walls of the inner lining plates (23); and on the workbench (1), on one side of one of the tube clamp assemblies (2), a carrier seat (26) is fixed. A rotatable wheel mechanism (27) that can be slidably adjusted is inclinedly installed on the carrier seat (26). The rotatable wheel mechanism (27) abuts against the outer wall of the quartz tube; On one side of each central polishing disc (32) on the fixed shaft (31), an axial plate (33) is coaxially fixed. On each axial plate (33), a connecting shaft is eccentrically rotatably arranged through a bearing. One end of the connecting shaft is fixed with a transmission tooth (34); at one end of the central polishing disc (32) close to the axial plate (33), a tooth ring (35) is coaxially fixed. The transmission tooth (34) meshes with the tooth ring (35); A rotating shaft (36) is rotatably arranged in the fixed shaft (31). On the rotating shaft (36) at each axial plate (33) position, an internal tooth one (37) is sleeved. The internal tooth one (37) is correspondingly meshed and transmitted with the transmission tooth (34).

2. The hydroxyl group removal and polishing device for the inner wall of a quartz tube according to claim 1, wherein: A plurality of radially slidable polishing plates (6) are uniformly distributed along the circumferential side wall of the central throwing plate (32) in a circumferential direction. Each polishing plate (6) is radially slidably connected to the central throwing plate (32) through a sliding pair. A sealing cavity (61) corresponding to each polishing plate (6) is formed in the central throwing plate (32). A sealing plug fixedly connected to the corresponding polishing plate (6) is slidably assembled in each sealing cavity (61). A sealing ring (62) is coaxially fixed in the central throwing plate (32). The sealing ring (62) is sealingly rotatably sleeved outside the fixed shaft (31). The two are sealingly matched to form an annular structure cavity (63). A plurality of through holes (64) are formed in the circumferential direction of the sealing ring (62). Each through hole (64) is correspondingly communicated with the sealing cavity (61). An oil passage (65) is formed in the fixed shaft (31). The oil passage (65) is communicated with each annular structure cavity (63).

3. A hydroxyl-removing polishing device for the inner wall of a quartz tube according to claim 1, characterized in that: An inner gear two (54) is sleeved on the rotating shaft (36). A driven gear (55) is rotatably arranged outside the fixed shaft (31). The inner gear two (54) is meshed with the driven gear (55). An outer gear (56) fixedly connected to the side throwing roller (53) is rotatably arranged on one side of the roller frame (52). The outer gear (56) is meshed with the driven gear (55).

4. A hydroxyl-removing and polishing device for the inner wall of a quartz tube according to claim 3, characterized in that: The bushing seat (51) is rotatably connected to the fixed shaft (31). A guide shaft (57) is slidably connected to the bushing seat (51). The other end of the guide shaft (57) is fixedly connected to the roller frame (52). A fixed rod (58) is rotatably connected to one side of the driven gear (55). The other end of the fixed rod (58) is rotatably connected to the outer gear (56).

5. The hydroxyl-removing and polishing device for the inner wall of a quartz tube according to claim 4, wherein: A telescopic pusher is arranged outside the fixed shaft (31). The power output end of the telescopic pusher is connected to the fixed rod (58).

6. The hydroxyl group removal and polishing device for the inner wall of a quartz tube according to claim 1, characterized in that: The pushing tube device (4) includes a side plate (41) which is slidably and position-adjustably installed on the workbench (1). A pulse pneumatic actuator (42) is horizontally fixed on the side plate (41). Vertical dial plates (43) are fixedly connected to the output ends of the pulse pneumatic actuator (42). The upper ends of the dial plates (43) are abutted against the outer wall of the quartz tube nozzle. The pulse pneumatic actuators (42) in the two pushing tube devices (4) cooperate with each other and realize an alternating axial pushing and resetting cycle through the main control system.

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