Optical coating process chamber and multi-chamber continuous vacuum coating machine thereof

Abstract

The application discloses an optical coating process cavity and a multi-cavity continuous vacuum coating machine thereof. The optical coating process cavity comprises a cavity, the cavity is provided with an outlet and an inlet, the outlet and the inlet of the cavity are arranged on two adjacent surfaces of the cavity, an arc-shaped cavity wall is arranged at a position opposite to the intersection of the surfaces where the outlet and the inlet of the cavity are located, the center of the circumference where the arc-shaped cavity wall is located coincides with the rotation center of a rotating frame in the cavity, a coating assembly is arranged on the arc-shaped cavity wall, the arc-shaped cavity wall is deviated to one side of the cavity, and space is reserved on the other side as a mounting wall of a matched device. The multi-cavity continuous vacuum coating machine comprises a pretreatment cavity, at least one optical coating process cavity and a post-treatment cavity which are connected in sequence, and the inlet of the pretreatment cavity and the outlet of the post-treatment cavity are connected through a connecting platform. The coating efficiency is high.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of multi-chamber vacuum coating, in particular to an optical coating process chamber and a multi-chamber continuous vacuum coating machine. BACKGROUND

[0002] A multi-chamber vacuum coating machine refers to a coating machine composed of two or more vacuum chambers connected in series. The types of vacuum chambers include pre-treatment chambers, optical coating process chambers, post-treatment chambers, etc. A plug valve is arranged between the vacuum chambers to seal or open the vacuum chambers. The workpiece is installed on a rotating frame, which needs to automatically flow between different chambers. When it flows into the optical coating process chamber, a rotating head arranged on the lifting assembly is placed under the rotating frame to lift the rotating frame, so that the top of the rotating frame is connected with the rotating assembly at the top of the chamber, and then the rotating assembly drives the rotating frame to rotate to achieve uniform coating.

[0003] The existing multi-chamber vacuum coating machine has multiple vacuum chambers arranged in a straight line. The inlet and outlet of the multi-chamber vacuum coating machine are located at both ends, and the inlet and outlet of the optical coating process chamber are also located at both ends. The operation of the rotating frame in the optical coating process chamber is also in a straight line. For example, a multi-chamber vacuum magnetron sputtering coating device disclosed in Chinese Patent No. 202122000052.7 includes multiple vacuum chambers arranged in series, and the multiple vacuum chambers are located in a straight line. The coating chamber is the optical coating process chamber described above, and the inlet and outlet of the coating chamber are located at both ends.

[0004] However, the existing optical coating process chamber and the multi-chamber vacuum coating machine using the existing optical coating process chamber have the problem of low coating efficiency due to a large coating distance. As shown in FIG. Figure 3 Since the inlet and outlet of the existing optical coating process chamber are located at both ends, and the rotating frame passes through the existing optical coating process chamber in a straight line, the positions of the multiple sets of coating assemblies can only be arranged on one of the upper and lower chamber walls, and other devices are arranged on the opposite chamber wall. In order to ensure uniform coating, the multiple sets of coating assemblies need to be arranged on a circumference that coincides with the center of rotation of the rotating frame. In order to prevent the coating assemblies at both ends from affecting the movement of the rotating frame, the diameter of the circumference where the coating assemblies are arranged must be large enough, which results in a large distance between the coating assemblies and the rotating frame. The closer the distance between the coating assemblies and the workpiece on the rotating frame, the higher the coating efficiency. For example, a coating process can be completed in about 20 minutes when the distance is 100 mm, but it takes about 25 minutes to complete the coating process when the distance is 170 mm. Therefore, a larger distance will affect the overall coating efficiency. SUMMARY

[0005] The first object of the present application is to provide an optical coating process cavity.

[0006] The second object of the present application is to provide a multi-chamber continuous vacuum coating machine using the optical coating process cavity.

[0007] The first object of the present application is achieved by the following technical solutions:

[0008] An optical coating process cavity, characterized in that it comprises a cavity body, the cavity body is provided with an outlet and an inlet, the outlet and the inlet of the cavity body are arranged on two adjacent faces of the cavity body, an arc-shaped cavity wall is arranged at a position opposite to the intersection of the faces where the outlet and the inlet of the cavity body are located, the center of the circle where the arc-shaped cavity wall is located coincides with the rotation center of a rotating frame in the cavity body, a coating assembly is arranged on the arc-shaped cavity wall, and the arc-shaped cavity wall is deviated to one side of the cavity body, and a space is reserved on the other side as a mounting wall for a matching device.

[0009] The further technical solution of the present application is that the two faces where the outlet and the inlet of the cavity body are located are perpendicular.

[0010] The further technical solution of the present application is that the mounting wall for the matching device is a straight-line cavity wall.

[0011] The further technical solution of the present application is that the coating assembly is a sputtering source or an evaporation source.

[0012] The further technical solution of the present application is that the bottom of the cavity body is provided with a lifting assembly and a rotating frame transmission and reversing mechanism capable of conveying the rotating frame and reversing the conveying direction, and the top of the cavity body is provided with a rotating assembly.

[0013] The second object of the present application is achieved by the following technical solutions:

[0014] A multi-chamber continuous vacuum coating machine, characterized in that it comprises a pretreatment cavity, at least one optical coating process cavity and a post-treatment cavity connected in sequence, and the inlet of the pretreatment cavity and the outlet of the post-treatment cavity are connected through a connecting platform.

[0015] The further technical solution of the present application is that the number of optical coating process cavities of the multi-chamber continuous vacuum coating machine is two, which are a first optical coating process cavity and a second optical coating process cavity, the pretreatment cavity is connected with the first optical coating process cavity, the post-treatment cavity is connected with the second optical coating process cavity, and the pretreatment cavity and the post-treatment cavity are located on the same side.

[0016] The further technical scheme of the present application is that the number of optical coating process cavities of the multi-cavity continuous vacuum coating machine is two, which are a first optical coating process cavity and a second optical coating process cavity, the pre-treatment cavity is connected with the first optical coating process cavity, the post-treatment cavity is connected with the second optical coating process cavity, and the pre-treatment cavity and the post-treatment cavity are located on opposite sides.

[0017] The further technical scheme of the present application is that the cavities of the multi-cavity continuous vacuum coating machine are arranged in a stepped shape.

[0018] The further technical scheme of the present application is that the cavities of the multi-cavity continuous vacuum coating machine are arranged in an S shape.

[0019] Compared with the prior art, the present application has the following beneficial effects:

[0020] 1. The optical coating process cavity of the present application sets the outlet and the inlet of the cavity on two adjacent surfaces of the cavity, sets the coating assembly on the arc-shaped cavity wall opposite the intersection of the surfaces where the outlet and the inlet are located, and the path of the rotating frame through the optical coating process cavity is no longer a straight line but has an angle, so that the coating assembly can be arranged closer to the rotating frame without affecting the movement of the rotating frame, thereby improving the coating efficiency.

[0021] 2. The multi-cavity continuous vacuum coating machine of the present application uses the optical coating process cavity described above, which has higher coating efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 is a schematic diagram of the internal arrangement structure of the optical coating process cavity of the first embodiment of the present application;

[0023] Figure 2 is a schematic diagram of the internal arrangement structure of the cavity of the multi-cavity continuous vacuum coating machine of the first embodiment of the present application;

[0024] Figure 3 is a simplified schematic diagram of the movement of the rotating frame in the existing optical coating process cavity;

[0025] Figure 4 is a simplified schematic diagram of the movement of the rotating frame in the optical coating process cavity of the first embodiment of the present application;

[0026] Figure 5 is a top view schematic diagram of the multi-cavity continuous vacuum coating machine of the first embodiment of the present application;

[0027] Figure 6 is a top view schematic diagram of the connecting platform of the first embodiment of the present application;

[0028] Figure 7 is a front view schematic diagram of the multi-cavity continuous vacuum coating machine of the first embodiment of the present application;

[0029] Figure 8 is a top view of a rotating frame transmission and reversing mechanism of an embodiment of the present application;

[0030] Figure 9 is a side view of a rotating frame transmission and reversing mechanism of an embodiment of the present application;

[0031] Figure 10 is a bottom view of a rotating frame transmission and reversing mechanism of an embodiment of the present application;

[0032] Figure 11 is a structural view of a transmission wheel cooperating with a rotating frame of an embodiment of the present application;

[0033] Figure 12 is a top view of a linear conveying mechanism of an embodiment of the present application;

[0034] Figure 13 is a side view of a linear conveying mechanism of an embodiment of the present application;

[0035] Figure 14 is a side view of an intermediate conveying mechanism of an embodiment of the present application;

[0036] Figure 15 is a top view of an intermediate conveying mechanism of an embodiment of the present application;

[0037] Figure 16 is a side view of a supporting mechanism of an embodiment of the present application;

[0038] Figure 17 is a top view of a supporting mechanism of an embodiment of the present application;

[0039] Figure 18 is a structural view of a rotating frame in the process of entering a front processing cavity of an embodiment of the present application;

[0040] Figure 19 is a structural view of a rotating frame when completely entering a front processing cavity of an embodiment of the present application;

[0041] Figure 20 is a structural view of a rotating frame in the process of entering a first optical coating process cavity of an embodiment of the present application;

[0042] Figure 21 is a structural view of a rotating frame when completely entering a first optical coating process cavity of an embodiment of the present application;

[0043] Figure 22 is a structural view of a rotating frame in the process of entering a second optical coating process cavity of an embodiment of the present application;

[0044] Figure 23 is a structural schematic diagram of the turntable fully entering the second optical coating process cavity in the embodiment one of the present application;

[0045] Figure 24 is a structural schematic diagram of the turntable in the process of entering the post-processing cavity in the embodiment one of the present application;

[0046] Figure 25 is a structural schematic diagram of the turntable fully entering the post-processing cavity in the embodiment one of the present application.

[0047] Figure 26 is a top view schematic diagram of the multi-cavity continuous vacuum coating machine in the embodiment two of the present application;

[0048] Figure 27 is a top view schematic diagram of the multi-cavity continuous vacuum coating machine in the embodiment three of the present application;

[0049] Figure 28 is a top view schematic diagram of the multi-cavity continuous vacuum coating machine in the embodiment four of the present application.

[0050] Meaning of reference signs in the drawings:

[0051] 1-rotating plate; 1.1-reserved hole; 2-transport wheel; 2.1-guide groove; 3-chain; 4-driven rotating shaft; 5-wheel seat; 6-position sensor; 7-driven gear; 8-sealing box; 9-turntable transmission and reversing mechanism; 10-driving rotating shaft; 11-sprocket; 12-conveying motor; 13-fixed seat; 14-rotating motor; 15-motor mounting rack; 16-shaft connector; 17-magnetic fluid sealing device; 18-bottom of the cavity; 19-driving gear; 20-bearing outer hub; 21-turntable; 22-guide rail; 23-pre-processing cavity; 24-first optical coating process cavity; 25-second optical coating process cavity; 26-post-processing cavity; 27-lifting assembly; 28-connection platform; 29-linear conveying mechanism; 30-hatch; 31-insertion valve; 32-vacuumizing device; 33-coating assembly; 34-mounting space of the coating assembly; 35-supporting mechanism; 36-intermediate conveying mechanism; 37-cryogenic device and molecular pump; 38-heating device; 39-second fixed plate; 40-second reserved hole; 41-second conveying motor; 42-elevating seat; 43-third fixed plate; 44-third conveying motor; 45-second motor mounting rack; 46-driving bevel gear; 47-driven bevel gear; 48-first fixed plate; 49-arc-shaped cavity wall; 50-matching device mounting wall; 51-inlet of the cavity; 52-outlet of the cavity; 53-inlet of the four-cavity vacuum coating machine; 54-outlet of the four-cavity vacuum coating machine; 55-circumference where the coating assembly is located; 56-moving path of the turntable. DETAILED DESCRIPTION

[0052] The present invention will be further described below with reference to embodiments.

[0053] Example 1:

[0054] like Figure 1 As shown, the optical coating process cavity of this embodiment includes a cavity body with an outlet and an inlet. The outlet 52 and the inlet 51 of the cavity body are disposed on two adjacent perpendicular surfaces of the cavity body. An arc-shaped cavity wall 49 is disposed at the intersection of the surfaces where the outlet 52 and the inlet 51 of the cavity body are located. The center of the circumference of the arc-shaped cavity wall 49 coincides with the rotation center of the rotating frame in the cavity body. The coating assembly 33 is disposed on the arc-shaped cavity wall. Figure 1 The coating assembly 33 is not shown; only the mounting space 34 is shown. Multiple coating assemblies 33 are arranged sequentially on the circumference of the arc-shaped cavity wall 33. During coating, the distance between the coating assembly 33 on the arc-shaped cavity wall 49 and the rotating frame is equal. The coating assembly 33 can be a sputtering source or an evaporation source.

[0055] Furthermore, the arc-shaped cavity wall 49 is biased towards one side of the cavity, specifically towards the side where the cavity outlet 52 or the cavity inlet 51 is located, while a space is reserved on the other side as a mounting wall 50 for supporting devices. In this embodiment, the mounting wall 50 for supporting devices is a straight cavity wall. Other devices required for the coating process, such as cryogenic devices and molecular pumps 37, can be installed on the mounting wall 50 for supporting devices.

[0056] In this embodiment, a lifting assembly 27 and a rotating frame transfer and reversing mechanism 9 are provided at the bottom of the cavity to transport the rotating frame and change its transport direction. A rotating assembly is provided at the top of the cavity. During use, the rotating frame and the workpiece on it are transported together from the cavity inlet 51 to the rotating frame transfer and reversing mechanism 9. Then, the lifting assembly 27 lifts the rotating frame 21 and the workpiece on it together, so that the upper end of the rotating frame 21 is connected to the rotating assembly. Then, the rotating assembly drives the rotating frame to rotate to coat the workpiece on the rotating frame 21. After the coating process is completed, the lifting assembly 27 descends, and the rotating frame 21 falls back to the transfer and reversing mechanism. Then, the transfer and reversing mechanism 9 drives the rotating frame 21 to rotate and change its direction, so that the transport direction is towards the cavity outlet 52. Finally, the rotating frame 21 and the workpiece on it are output from the outlet.

[0057] During use, the path of the rotating frame 21 through the optical coating process cavity will no longer be a straight line, but will have an angle; in this embodiment, the path has a right-angle turn. This allows the coating assembly 33 to be positioned closer to the rotating frame 21 without affecting the movement of the rotating frame 21, thereby improving coating efficiency. To better understand why the distance can be closer, we have drawn... Figure 3 and Figure 4The simplified diagram shown is explained as follows: Taking a coating assembly 33 with two cylindrical targets 33.1 as an example, three sets of coating assemblies 33 are arranged circumferentially on the cavity wall according to process requirements. Figure 3 and Figure 4 The diameter of the transfer frame 21 is 2000mm. Figure 3 This is a schematic diagram of the rotating frame 21 in an existing optical coating process cavity. Figure 3 The moving path 56 of the transfer frame is a straight horizontal line. Three coating assemblies 33 are arranged on one side of the cavity wall. To ensure that the coating assemblies located on the left and right sides do not affect the movement of the transfer frame 21, the distance between the circumference 55 of the coating assembly and the transfer frame 21 should be sufficiently large. For example... Figure 3 In schematic diagram a, when the distance between the circumference 55 of the coating assembly and the rotating frame 21 is only 100mm, the coating assemblies on the left and right sides will be on the moving path 56 of the rotating frame, affecting the movement of the rotating frame 21; as shown in the diagram. Figure 3 As shown in schematic diagram b, the coating component will not affect the movement of the rotating frame only when the distance between the circumference 55 where the coating component is located and the rotating frame 21 increases to 170mm. Figure 4 This is a schematic diagram of the rotating frame 21 in the optical coating process cavity of this embodiment. Figure 4 The moving path 56 of the transfer frame 21 is a right-angle turn. The three coating assemblies 33 are arranged on the arc-shaped cavity wall biased to one side of the cavity. This allows the coating assemblies 33 to be arranged on the circumference closer to the transfer frame 21 without affecting the movement of the transfer frame 21. Figure 4 As shown, the movement of the rotating frame is not affected when the distance between the coating component 55 and the rotating frame 21 is only 100mm. There is a distance requirement between the coating component 33 and the surface of the workpiece to be coated; generally, the closer the distance, the higher the coating efficiency. Therefore, the coating efficiency of the optical coating process cavity in this embodiment is higher. In actual coating, the coating time is generally around 25 minutes when the distance from the rotating frame 21 is 170mm, while the coating time can be shortened to around 20 minutes when the distance is 100mm.

[0058] like Figure 2 and Figure 5 The image shows a multi-chamber continuous vacuum coating machine employing the aforementioned optical coating process chambers. It has four chambers, including a pre-treatment chamber 23, two optical coating process chambers, and a post-treatment chamber 26 connected sequentially. The two optical coating process chambers are a first optical coating process chamber 24 and a second optical coating process chamber 25, which are connected to each other. The inlet of the pre-treatment chamber and the outlet of the post-treatment chamber are connected via a connecting platform. This multi-chamber continuous vacuum coating machine is a four-chamber vacuum coating machine with a U-shaped arrangement, and its specific structure is as follows:

[0059] The outlet of the pre-treatment chamber 23 is connected with the inlet of the first optical coating process chamber 24, the outlet of the first optical coating process chamber 24 is connected with the inlet of the second optical coating process chamber 25, the outlet of the second optical coating process chamber 25 is connected with the inlet of the post-treatment chamber 26, and the inlet of the pre-treatment chamber 23 and the outlet of the post-treatment chamber 26 are the inlet and outlet of the four-chamber vacuum coating machine. The pre-treatment chamber 23 and the post-treatment chamber 26 are located on the same side, so that the inlet and outlet of the four-chamber vacuum coating machine are located on the same side. Preferably, the inlet 53 of the four-chamber vacuum coating machine is located on the left side, and the outlet 54 of the four-chamber vacuum coating machine is located on the right side.

[0060] The specific processes of the pre-treatment chamber 23, the first optical coating process chamber 24, the second optical coating process chamber 25 and the post-treatment chamber 26 are not necessarily definite, and different processing processes can be realized by installing corresponding devices in the pre-treatment chamber 23, the first optical coating process chamber 24, the second optical coating process chamber 25 and the post-treatment chamber 26 according to needs. For example, a heating device 38, a cryogenic device and a molecular pump 37 can be installed on the chamber wall of the pre-treatment chamber 23 to pre-treat the workpiece on the rotating frame 21 in the pre-treatment chamber 23; different coating assemblies 33, cryogenic devices and molecular pumps 37 can be installed in the first optical coating process chamber 24 and the second optical coating process chamber 25 to perform coating of different film layers; and cryogenic devices and molecular pumps 37 can be installed in the post-treatment chamber 26 to perform subsequent process treatment.

[0061] The first optical coating process chamber 24 and the second optical coating process chamber 25 of the embodiment are both provided with arc-shaped chamber walls 49 at positions opposite to the intersection of the faces where the inlets and outlets are located, and the coating assemblies 33 of the first optical coating process chamber 24 and the second optical coating process chamber 25 are installed on the arc-shaped chamber walls 49. The coating assemblies 33 are not shown in the embodiment, and only the installation positions 34 of the coating assemblies are shown. Figure 2 The arc-shaped chamber wall 49 of the first optical coating process chamber 24 is deviated to the side where the inlet is located, and the arc-shaped chamber wall 49 of the second optical coating process chamber 25 is deviated to the side where the outlet is located.

[0062] Of course, the plug valve 31 is arranged between the connected chambers, and the chamber is sealed from other chambers by the plug valve 31 when the chamber needs to be vacuumized for operation. The conventional sealable hatch 30 is arranged at the inlet of the pre-treatment chamber 23 and the outlet of the post-treatment chamber 26 to realize the closing and opening of the inlet and outlet. The conventional lifting assembly 27 is arranged at the bottom of the pre-treatment chamber 23, the first optical coating process chamber 24, the second optical coating process chamber 25 and the post-treatment chamber 26 respectively, and the conventional rotating assembly is arranged at the top to lift and rotate the rotating frame 21. The conventional vacuumizing device 32 is arranged in the four-chamber vacuum coating machine to vacuumize the chambers.

[0063] The inlet and outlet of the four-chamber vacuum coating machine are directly connected by a straight connecting platform 28, the connecting length of the connecting platform 28 of the embodiment is small, the conveying distance is short, and the occupied area is small.

[0064] The rotating frame transmission and reversing mechanism 9 capable of conveying the rotating frame and reversing the conveying direction is arranged in the first optical coating process chamber 24 and the second optical coating process chamber 25, the linear conveying mechanism 29 capable of conveying the rotating frame in one direction is arranged in the pre-treatment chamber 23 and the post-treatment chamber 29, the intermediate conveying mechanism 36 for supporting and conveying the rotating frame 21 forward is arranged at the outlet of the pre-treatment chamber 23, the inlet of the first optical coating process chamber 24, the outlet of the first optical coating process chamber 24, the inlet of the second optical coating process chamber 25, the outlet of the second optical coating process chamber 25 and the inlet of the post-treatment chamber 26, and the supporting mechanism 35 is arranged at the inlet of the pre-treatment chamber 23, the inlet of the second optical coating process chamber 25 and the outlet of the post-treatment chamber 26.

[0065] As shown in Figure 8 to Figure 10 The specific structure of the rotating frame transmission and reversing mechanism 9 of the embodiment is that it includes the fixed seat 13, the rotating plate 1, the rotating motor 14, the first conveying motor 12 and the first transmission wheel set.

[0066] The fixed seat 13 is used for fixedly installing at the bottom 18 of the chamber, the rotating plate 1 is in the shape of a disc, and it is rotatably arranged on the upper surface of the fixed seat 13 through a conventional bearing. The specific structure is that the bearing outer hub 20 is fixedly connected with the lower surface of the rotating plate 1, and the bearing inner hub is fixedly connected with the upper surface of the fixed seat 13.

[0067] The first reserved hole 1.1 for installing the lifting assembly 27 is arranged in the middle of the fixed seat 13 and the rotating plate 1, so that the rotating frame transmission and reversing mechanism can be installed in the optical coating process chamber, and the lifting movement of the lifting assembly 27 in the chamber is not affected.

[0068] The rotary motor 14 is installed outside the bottom 18 of the chamber through the first motor mounting frame 15, below the rotary plate, that is, the rotary motor 14 is located outside the optical coating process chamber and is not in the vacuum environment of the optical coating process chamber during use. The upper end of the first motor mounting frame 15 is fixedly connected to the bottom 18 of the chamber by bolts, and the rotary motor 14 is in a vertical installation state. The bottom 18 of the chamber is connected to a conventional magnetic fluid sealing device 17. The output shaft of the rotary motor 14 is connected to the lower end of the intermediate shaft of the magnetic fluid sealing device 17 through a shaft connector 16. The upper end of the intermediate shaft of the magnetic fluid sealing device 17 is connected to the driving gear 19, so that the driving gear 19 is connected to the output shaft of the rotary motor 14. The rotary motor 14 drives the driving gear 19 to rotate while achieving sealing.

[0069] The driven gear 7 is fixedly connected to the bearing outer hub 20. The driven gear 7 is a one-quarter circle gear. The center of the driven gear 7 coincides with the center of the rotary plate 1. The driving gear 7 is engaged with the driven gear 7, so that the rotary plate 1 can be driven to rotate by the rotary motor 14.

[0070] Each first transmission wheel set includes three transmission wheels 2 located on the same conveying path. The conveying paths of the two first transmission wheel sets are parallel. The transmission wheels 2 of each first transmission wheel set are connected through a first sprocket assembly. Specifically, each first transmission wheel set is provided with a wheel seat 5 corresponding to each transmission wheel 2. The wheel seat 5 is fixedly installed on the upper surface of the rotary plate 1. The transmission wheel 2 is rotatably installed on the wheel seat 5 through a driven shaft 4. The first sprocket assembly includes a chain 3 and a sprocket 11 provided on the driven shaft 4. The two ends of the middle driven shaft 4 are each provided with a sprocket 11. The chain 3 connects the sprockets 11 on the adjacent driven shafts 4.

[0071] The first conveying motor 12 is provided in the sealing box 8, so as to isolate the first conveying motor 12 from the vacuum environment in the chamber, thereby solving the problem that the motor is easy to cause sparks when operating in a vacuum environment.

[0072] One end of the driven shaft 4 of one of the two first transmission wheel sets is connected through a driving shaft 10. The first conveying motor 12 and the driving shaft 10 are located at the same end of the rotary plate 1. The first conveying motor 12 is connected to the driven shaft 4 at one end of the driving shaft 10, so as to drive the transmission wheel 2 to rotate through the first conveying motor 12. The rotary sealing connection between the shaft and the sealing box 8 can be achieved through a conventional magnetic fluid sealing device or other conventional sealing structure.

[0073] The periphery of the transmission wheel 2 is provided with a guide groove 2.1 for cooperating with the guide rail 22 at the bottom of the rotating frame 21. Figure 11As shown in the figure, the bottom of the guide rail 22 will be embedded in the guide groove 2.1 when the conveying trolley 21 is in motion.

[0074] As shown in the figure, Figure 12 and Figure 13 The linear conveying mechanism 29 of the embodiment comprises a second fixed plate 39, a second conveying motor 41 and a second transmission wheel set. The second fixed plate 39 is in the shape of a rectangle. The second fixed plate 39 is fixed on the bottom of the chamber through a cushion seat 42, which is used to lift the height of the second fixed plate 39. The bottom of the cushion seat 42 is fixedly connected with the bottom of the chamber, and the top is fixedly connected with the second fixed plate 39. The middle of the second fixed plate 39 is provided with a second reserved hole 40 for installing a lifting assembly. The second conveying motor 41 and the second transmission wheel set are both arranged on the upper surface of the second fixed plate 39. The second transmission wheel set is driven by the second conveying motor 41.

[0075] The second transmission wheel set has two sets, which are arranged on the two sides of the upper surface of the second fixed plate 39 respectively. The structure of the second transmission wheel set is the same as that of the first transmission wheel set. Both of them comprise a transmission wheel 2 which is rotatably installed on a wheel seat 5 through a driven shaft 4. The transmission wheels 2 of the two second transmission wheel sets are connected by a second sprocket assembly. The structure of the second sprocket assembly is the same as that of the first sprocket assembly. Both of them comprise a chain 3 and a sprocket 11 arranged on the driven shaft 4.

[0076] A sealed box 8 is also arranged on the second fixed plate 39. The second conveying motor 41 is installed in the sealed box 8 on the second fixed plate 39.

[0077] The second conveying motor 41 is connected with the driven shaft 4 at one end of the second transmission wheel set, so that the transmission wheel 2 can be driven to rotate by the second conveying motor 41. The rotatable sealing connection between the shaft and the sealed box 8 can be realized by a conventional magnetic fluid sealing device or other conventional sealing structure.

[0078] As shown in the figure, Figure 14 and Figure 15 The intermediate conveying mechanism 36 of the embodiment comprises a third fixed plate 43, two transmission wheels 2 and a third conveying motor 44. The third fixed plate 43 is in the shape of a long strip. The two transmission wheels 2 are rotatably installed on the wheel seats 5 at the two ends of the third fixed plate 43 through the driven shafts 4. The driven shafts 4 at the two ends are connected through a drive shaft 10. The outer end of the driven shaft 4 at one end is connected with a driven bevel gear 47.

[0079] The third conveying motor 44 is installed outside the bottom 18 of the chamber through the second motor mounting frame 45, i.e. the third conveying motor 44 is located outside the chamber and is not in the vacuum environment of the chamber during use. The upper end of the second motor mounting frame 45 is fixedly connected with the bottom 18 of the chamber through bolts, and the third conveying motor 44 is in a vertical installation state. The bottom 18 of the chamber is connected with a conventional magnetic fluid sealing device 17. The output shaft of the third conveying motor 44 is connected with the lower end of the intermediate shaft of the magnetic fluid sealing device 17 through a shaft connector 16, and the driving helical gear 46 is connected with the output shaft of the third conveying motor 44 by being connected with the upper end of the intermediate shaft of the magnetic fluid sealing device 17, so that the driving helical gear 46 is driven to rotate by the third conveying motor 44 while realizing sealing. The driving helical gear 46 is engaged with the driven helical gear 47, so that the transmission wheel 2 of the intermediate conveying mechanism 36 can be driven to rotate by the third conveying motor 44.

[0080] As shown in Figure 16 and Figure 17 , the support mechanism 35 of the embodiment includes a first fixed plate 48 and two transmission wheels 2. The first fixed plate 48 is in a long strip shape, and the two transmission wheels 2 are rotatably installed on the wheel seats 5 at both ends of the first fixed plate 48 through driven rotating shafts 4. The driven rotating shafts 4 at both ends are connected through a driving rotating shaft 10. The transmission wheels 2 of the support mechanism 35 play a transitional supporting role for the rotating frame 21 and do not have power.

[0081] The embodiment is also provided with corresponding position sensors 6. The specific distribution of the position sensors 6 is as follows: a first position sensor 6.1 is arranged at the front edge of the support mechanism 35 at the entrance of the pre-processing chamber 23, a second position sensor 6.2 is arranged at the rear edge of the intermediate conveying mechanism 36 at the exit of the pre-processing chamber 23, a third position sensor 6.3 and a fourth position sensor 6.4 are arranged at both ends of the conveying path of the rotating frame transmission and reversing mechanism 9 of the first optical coating process chamber 24, a fifth position sensor 6.5 and a sixth position sensor 6.6 are arranged at both ends of the conveying path of the rotating frame transmission and reversing mechanism 9 of the second optical coating process chamber 25, and a seventh position sensor 6.7 is arranged at the front edge of the intermediate conveying mechanism 36 at the entrance of the post-processing chamber 26, and an eighth position sensor 6.8 is arranged at the rear edge of the support mechanism 35 at the exit of the post-processing chamber 26. The above-mentioned position sensors 6 are all located on the movement path of the guide rail 22 at the bottom of the rotating frame, and the position sensors 6 are triggered by the contact between the guide rail 22 and the position sensors 6.

[0082] In this embodiment, the two ends of the connecting platform 28 are located near the inlet 53 and outlet 54 of the four-chamber vacuum coating machine, respectively. A rotating frame transmission and reversing mechanism 9 is correspondingly installed at the bottom of each end of the connecting platform 28, and a linear conveying mechanism 29 is installed in the middle of the connecting platform 28 to achieve the transfer of components. In the figure, the linear conveying mechanism 29 in the middle of the connecting platform 28 is covered by a panel, with only the transmission wheel 2 exposed.

[0083] The operation process of the four-chamber vacuum coating machine in this embodiment is as follows:

[0084] P1, load the workpiece that needs to be coated onto the rotating frame 21 located on the connecting platform 28 near the inlet 53 of the four-chamber vacuum coating machine;

[0085] P2, after loading is completed, the rotating frame transfer and reversing mechanism 9 connecting platform 28 sends the rotating frame 21 along with the workpiece on it into the pre-processing chamber 23, such as... Figure 18 As shown, during the feeding process, the guide rail 22 of the rotating frame 21 first triggers the first position sensor 6.1. After the first position sensor 6.1 is triggered, the second conveyor motor 41 of the linear conveyor mechanism 29 of the pre-processing cavity 23 will be started. As the rotating frame 21 continues to enter, the guide rail 22 will be engaged with the transmission wheel 2 of the linear conveyor mechanism 29 of the pre-processing cavity 23. The rotating frame 21 will eventually move completely onto the linear conveyor mechanism 29 of the pre-processing cavity 23. At this time, the guide rail 22 will disengage from the first position sensor 6.1, and the second conveyor motor 41 of the linear conveyor mechanism 29 will stop. Figure 19 As shown, the hatch 30 and the corresponding slide valve 31 are closed, a vacuum is drawn, and the rotating frame 21 will remain in the pre-processing chamber 23 for pre-processing.

[0086] P3, after the pretreatment is completed, the corresponding slide valve 31 opens, and the linear conveying mechanism 29 of the pretreatment chamber 23 is activated, conveying the rotating frame 21 to the first optical coating process chamber 24, such as... Figure 20 As shown, during the conveying process, the guide rail 22 first triggers the second position sensor 6.2, starting the intermediate conveying mechanism 36 at the outlet of the pre-processing cavity 23. Then, after entering the first optical coating process cavity 24, it triggers the third position sensor 6.3, starting the intermediate conveying mechanism 36 at the entrance of the first optical coating process cavity 24 and the first conveying motor of the rotating frame transmission and reversing mechanism 9 of the first optical coating process cavity 24. Finally, the rotating frame 21 moves completely onto the rotating frame transmission and reversing mechanism 9 of the first optical coating process cavity 24. At this time, the fourth position sensor 6.4 is triggered, and the motor stops. Figure 21 As shown, the corresponding gate valve 31 is then closed, a vacuum is drawn, and the first coating process is carried out in the first optical coating process chamber 24.

[0087] P4, after the first coating process is completed, the corresponding plug valve 31 is opened, the rotating motor of the rotating and reversing mechanism 9 of the first optical coating process chamber 24 is started, so that the rotating shaft 21 rotates 90°, then the first conveying motor of the rotating and reversing mechanism 9 of the first optical coating process chamber 24 and the intermediate conveying mechanism 36 at the outlet of the first optical coating process chamber 24 are started, and the workpiece is conveyed to the second optical coating process chamber 25, as shown in Figure 22 the figure, during the conveying process, when the guide rail 22 triggers the fifth position sensor 6.5, the intermediate conveying mechanism 36 at the inlet of the second optical coating process chamber 25 and the first conveying motor of the rotating and reversing mechanism 9 of the second optical coating process chamber 25 are started, and finally the rotating shaft 21 is completely moved to the rotating and reversing mechanism 9 of the second optical coating process chamber 25, at this time the sixth position sensor 6.6 will be triggered, and the motor stops, at this time, as shown in Figure 23 the figure, then the corresponding plug valve 31 is closed, vacuumizing is performed, and the second coating process is performed in the second optical coating process chamber 25;

[0088] P5, after the second coating process is completed, the corresponding plug valve 31 is opened, the rotating motor of the rotating and reversing mechanism 9 of the second optical coating process chamber 25 is started, so that the rotating shaft 21 rotates 90°, then the first conveying motor of the rotating and reversing mechanism 9 of the second optical coating process chamber 25 and the intermediate conveying mechanism 36 at the outlet of the second optical coating process chamber 25 are started, and the workpiece is conveyed to the post-processing chamber 26, as shown in Figure 24 the figure, during the conveying process, when the guide rail 22 triggers the seventh position sensor 6.7, the intermediate conveying mechanism 36 and the linear conveying mechanism 29 of the post-processing chamber 26 are started, and finally the rotating shaft 21 is conveyed to the linear conveying mechanism 29 of the post-processing chamber 26, at this time the guide rail is separated from the seventh position sensor 6.7, and the motor stops, at this time, as shown in Figure 25 the figure, the corresponding plug valve 31 is closed, and post-processing is performed in the post-processing chamber 26;

[0089] P6, after the post-processing is completed, the door 30 and the corresponding plug valve 31 are opened, and the workpiece is discharged, the linear conveying mechanism 29 of the post-processing chamber 26 is started, the rotating shaft 21 is conveyed to the rotating and reversing mechanism 9 of the connecting platform 28 close to the outlet of the four-chamber vacuum coating machine, when the sensor on the connecting platform 28 is triggered, the first conveying motor of the rotating and reversing mechanism 9 of the connecting platform 28 is started, and finally the rotating shaft 21 is discharged and stays on the rotating and reversing mechanism 9 of the connecting platform 28, the rotating motor of the rotating and reversing mechanism 9 of the connecting platform 28 is started, and rotates 90°, and then the linear conveying mechanism 29 of the connecting platform 28 is used for conveying. Finally, the rotating shaft 21 reaches the rotating and reversing mechanism 9 on the left side of the connecting platform 28, and the workpiece is unloaded and loaded here, and then the above steps are repeated to process the workpiece, and the cycle is repeated.

[0090] Of course, the rotating frame transmission and reversing mechanism 9 in the above process will rotate back after completing the rotation reversing and conveying the rotating frame 21 out.

[0091] Embodiment two:

[0092] The multi-chamber continuous vacuum coating machine of embodiment two has multiple chambers, including a pretreatment chamber 23, multiple optical coating process chambers and a post-treatment chamber 26 connected in sequence, and the whole is arranged in a stepped shape after the chambers are connected, as shown in Figure 26 .

[0093] Embodiment three:

[0094] The multi-chamber continuous vacuum coating machine of embodiment three also has four chambers, which are a pretreatment chamber 23, a first optical coating process chamber 24 and a second optical coating process chamber 25 and a post-treatment chamber 26 connected in sequence, but the pretreatment chamber and the post-treatment chamber are located on opposite sides, so that the whole is in a Z shape, as shown in Figure 27 .

[0095] Embodiment four:

[0096] The multi-chamber continuous vacuum coating machine of embodiment four has multiple chambers, including a pretreatment chamber 23, multiple optical coating process chambers and a post-treatment chamber 26 connected in sequence, and the whole is arranged in an S shape after the chambers are connected, as shown in Figure 28 .

[0097] The above embodiments of the present application are not a limitation on the protection scope of the present application, and the embodiments of the present application are not limited thereto, and any other modifications, replacements or changes to the above structure of the present application according to the above content of the present application, according to the ordinary technical knowledge and common means in the art, without departing from the above basic technical idea of the present application, shall fall within the protection scope of the present application.

Claims

1. A multi-chamber continuous vacuum coating machine, characterized in that: The system includes a pre-processing cavity, an optical coating process cavity, and a post-processing cavity connected in sequence. The inlet of the pre-processing cavity and the outlet of the post-processing cavity are connected by a connecting platform. The optical coating process cavity includes a cavity body with an outlet and an inlet. The outlet and inlet of the cavity body are located on two adjacent surfaces of the cavity body. An arc-shaped cavity wall is provided at the intersection of the outlet and inlet surfaces of the cavity body. The center of the circumference of the arc-shaped cavity wall coincides with the rotation center of the rotating frame in the cavity body. Coating components are provided on the arc-shaped cavity wall, and the arc-shaped cavity wall is biased to one side of the cavity body, while a space is reserved on the other side as a mounting wall for supporting devices. Multiple coating components are arranged sequentially on the circumference of the arc-shaped cavity wall. The optical coating process cavity is divided into two, namely a first optical coating process cavity and a second optical coating process cavity. The pre-processing cavity is connected to the first optical coating process cavity, and the post-processing cavity is connected to the second optical coating process cavity. The pre-processing cavity and the post-processing cavity are located on the same side.

2. The multi-chamber continuous vacuum coating machine according to claim 1, characterized in that: The outlet and inlet of the cavity are perpendicular to each other on their two surfaces.

3. The multi-chamber continuous vacuum coating machine according to claim 1, characterized in that: The mounting wall of the supporting device is a straight cavity wall.

4. The multi-chamber continuous vacuum coating machine according to claim 1, characterized in that: The coating component is either a sputtering source or an evaporation source.

5. The multi-chamber continuous vacuum coating machine according to claim 1, characterized in that: The bottom of the cavity is provided with a lifting assembly and a rotating frame transmission and reversing mechanism that can transport the rotating frame and change the transport direction, and the top of the cavity is provided with a rotating assembly.

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