A device and method for detecting laser output power

Abstract

The application belongs to the technical field of laser equipment, and particularly relates to a detection device and method for laser output power, the detection device is arranged on the light output side of a laser, and comprises at least two optical elements, each optical element is provided with a photoelectric probe matched therewith; the range zero value and the range full value of the photoelectric probe are measured and calculated, according to the actual measurement value of the photoelectric probe, the optical element is driven to switch between a first preset angle and a second preset angle, so as to guide at least part of the laser to the next optical element or the photoelectric probe matched therewith. The application converts the optical signal into an electrical signal through the photoelectric probe, converts the electrical signal into power data output after processing, and performs gradient measurement, so that the detection process of the laser output power is fast, stable and quick.

Description

Technical Field

[0001] This invention belongs to the field of laser equipment technology, and particularly relates to a device and method for detecting laser output power. Background Technology

[0002] During the laser manufacturing process, the laser output power needs to be tested and calibrated. The traditional method involves using a power meter to measure the laser output power and then using the test data to calibrate the laser.

[0003] Current laser power meters consist of a laser probe, which is an absorber coated with thermoelectric material. This thermoelectric material absorbs most of the light energy and converts it into heat. The laser probe generates a current due to temperature changes, which is then converted into a voltage signal through a thin-film ring resistor and transmitted, thus completing the detection of laser power. However, because the laser energy is converted into heat during the detection process, the power meter needs to be cooled by a water-cooling system. In practice, it has been found that the operation of the water-cooling system causes fluctuations in the power meter data, affecting the power detection results. Therefore, the power meter's detection data only stabilizes after the water-cooling system has finished cooling and stopped operating.

[0004] It is evident that the current process for detecting laser output power is complex, unstable, and time-consuming. Summary of the Invention

[0005] To address the aforementioned technical problems, this invention discloses a laser output power detection device. This device converts optical signals into electrical signals using a photoelectric probe, processes the electrical signals to output power data, and performs gradient measurement, making the laser output power detection process fast, stable, and efficient. This invention also discloses a laser output power detection method.

[0006] The specific technical solution of the present invention is as follows:

[0007] A laser output power detection device is disposed on the light-emitting side of a laser and includes at least two optical elements, each of which has a photoelectric probe that cooperates with it.

[0008] The process involves calculating the zero and full range values ​​of the photoelectric probe, and then driving the optical element to switch between a first preset angle and a second preset angle based on the actual measured values ​​of the photoelectric probe, so as to guide at least a portion of the laser to the next optical element or the photoelectric probe that works with it.

[0009] Preferably, when the optical element is at the second preset angle, the optical element guides the laser to the photoelectric probe that it is paired with. If the measurement value of the photoelectric probe is between the zero value and the full value of the range, the laser output power detection is completed. If the measurement value of the photoelectric probe is greater than the full value of the range of the photoelectric probe that it is paired with, the optical element switches to the first preset angle and guides the laser to the next optical element.

[0010] Preferably, when calculating the range of the photoelectric probe, the optical element is driven to rotate between a first measurement angle and a second measurement angle, and the maximum value obtained by the photoelectric probe between the first measurement angle and the second measurement angle is the range of the probe.

[0011] Preferably, the optical element is rotated between the first measurement angle and the second measurement angle, so that the rotation angle corresponding to the position where the photoelectric probe acquires the full range value is configured as the second preset angle; the angle corresponding to the first measurement angle is configured as the zero angle.

[0012] Preferably, the optical element is driven to rotate by a stepper motor, and the number of pulse outputs of the stepper motor when the optical element rotates from a zero angle to a second preset angle, as well as the microstepping and signal direction of the stepper motor are obtained;

[0013] Based on the current angle of the optical element, calculate the number of zeroing pulses required to bring the optical element to zero, and rotate the optical element according to the number of zeroing pulses so that the optical element is brought to zero before the laser output power is detected.

[0014] Preferably, after rotating the optical element according to the zero-reset pulse count, the magnitude between the adjusted angle and the zero-value angle after rotation is determined;

[0015] If the adjustment angle is greater than the zero angle, the optical element is driven to rotate in a direction away from the second preset angle according to the subdivision number;

[0016] If the adjusted angle equals the zero angle, the rotation will stop when the position is reached.

[0017] If the adjusted angle is less than the zero angle, the optical element is driven to rotate in a direction close to the second preset angle according to the subdivision number.

[0018] Preferably, in any adjacent optical elements, when one optical element guides the laser to the next optical element, there is an angular difference between the adjacent optical elements;

[0019] Based on the angle difference, as well as the step angle and microstepping of the stepper motor, the number of pulses required for the optical element to switch from the second preset angle to the first preset angle is obtained, so as to guide the laser to the next optical element.

[0020] Preferably, the optical element is a reflector or a beam splitter;

[0021] When the optical element is a beam splitter, the photodetector obtains the actual power of the laser output based on the measured values ​​and the loss coefficient.

[0022] Preferably, the optical elements include paired elements one and probe one, element two and probe two, element three and probe three, ... element N and probe N, where N is a positive integer;

[0023] The components one, two, ..., N guide the laser to form a detection optical path, and at the end of the detection optical path, the probe N is used to detect the laser output power.

[0024] A method for detecting laser output power, comprising:

[0025] Multiple optical elements are configured, and the relative rotation of the optical elements is used to make the laser have multiple emission paths to form a multi-level detection optical path. Each level of detection optical path has a corresponding photoelectric probe, and the measurement range of the photoelectric probe increases step by step.

[0026] Obtain the laser output power of the previous detection optical path. If the measured value of the photodetector of the previous detection optical path is greater than its full range value, switch to the next detection optical path until the measured value of the photodetector of the Nth detection optical path is between its zero range value and its full range value.

[0027] Compared with existing technologies, this invention utilizes a different approach to achieve data detection of laser output power. The device is simple, reliable, and can quickly obtain detection results. Since the measurement range of each detection optical path has a corresponding photoelectric probe that increases progressively, it achieves graded measurement to correspond to the detection of lasers with different powers, thereby obtaining higher precision detection results. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the first-stage detection optical path in an embodiment of the present invention;

[0029] Figure 2 This is a schematic diagram of the second-stage detection optical path in an embodiment of the present invention;

[0030] Figure 3 This is a schematic diagram of the three-stage detection optical path in an embodiment of the present invention;

[0031] Figure 4 This is a hardware block diagram of the detection device according to an embodiment of the present invention;

[0032] Figure 5 This is a schematic diagram of the calibration process for the zero value and the full value of the range of component one in an embodiment of the present invention;

[0033] Figure 6 This is a schematic diagram of the zeroing process for component one in an embodiment of the present invention;

[0034] Figure 7 This is a flowchart of the automatic calibration process for the first-level detection optical path in an embodiment of the present invention;

[0035] Figure 8 This is a flowchart of the automatic calibration process for the second-level detection optical path in an embodiment of the present invention;

[0036] Figure 9 This is a flowchart of the detection process for the first-stage detection optical path in an embodiment of the present invention;

[0037] Figure 10 This is a flowchart of the detection process for the second-stage detection optical path in an embodiment of the present invention;

[0038] Figure 11 This is a schematic diagram of the detection process using a three-stage detection optical path according to an embodiment of the present invention. Detailed Implementation

[0039] To enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below with reference to specific embodiments.

[0040] like Figures 1-3 As shown, a laser output power detection device is installed on the light-emitting side of a laser, including at least two optical elements, each with a corresponding photodetector. The device measures the zero and full range values ​​of the photodetector's range. Based on the actual measured values ​​of the photodetector, the optical elements are driven to switch between a first preset angle and a second preset angle to guide at least a portion of the laser light to the next optical element or its corresponding photodetector. Specifically, the optical elements include paired elements one and probe one, element two and probe two, element three and probe three... element N and probe N, where N is a positive integer. Elements one, element two... element N guide the laser light to form a detection optical path, and at the end of the detection optical path, probe N is used to detect the laser output power.

[0041] Furthermore, in this embodiment, when the optical element is at the second preset angle, the optical element guides the laser to the photoelectric probe that it cooperates with. Therefore, it can be known that when the optical element is at the first preset angle, the optical element guides the laser to the next optical element.

[0042] Specifically, when the laser emits laser light, the laser is guided by element one to probe one, allowing probe one to detect the actual measured value. Since the photoelectric probe is suitable for power measurement within a specific range, if the actual measured value obtained by probe one exceeds the maximum value of the range, it indicates that probe one cannot complete the laser detection. In this case, element one switches from a second preset angle to a first preset angle, guiding the laser through elements one and two into the detection port of probe two, thus performing laser power detection through probe two. Generally, the range increases sequentially for probe one, probe two… probe N to improve detection efficiency. Therefore, when a corresponding photoelectric probe cannot meet the detection requirements, the corresponding optical element is driven to further guide the laser to the next photoelectric probe for detection until the measured value is within the range. In other words, if the measured value of the photoelectric probe is between the zero value and the full value of the range, the laser output power detection is completed. If the measured value of the photoelectric probe exceeds the full value of the range of its matching photoelectric probe, the optical element switches to the first preset angle to guide the laser to the next optical element.

[0043] Because laser light is high-energy-density light and possesses a certain degree of destructiveness, and the photodetector's light-sensing intensity is limited, the laser beam must be split to ensure that the laser entering the photodetector is within its measurement range. Therefore, in this embodiment, the optical element is a beam splitter. Consequently, for the final result, the photodetector needs to obtain the actual laser output power based on the measured values ​​and the loss coefficient of the beam splitter. Of course, in some embodiments, the optical element can also be a reflector.

[0044] Before determining the laser output power, the measurement range of the photoelectric probe needs to be calibrated to improve detection efficiency. Figure 5As shown, specifically, when calculating the range of the photodetector, the optical element is driven to rotate between a first measurement angle and a second measurement angle. The maximum value obtained by the photodetector between the first and second measurement angles is the range of the required value. In this embodiment, in order to cover the entire rotation of the optical element, the laser emits laser light horizontally. Taking element one and probe one as an example, element one is initially in a vertical position, or a position approaching vertical, and the angle corresponding to this position is recorded as the first measurement angle. Then, element one is rotated until it is horizontal, or a position approaching horizontal, and the angle corresponding to this position is recorded as the second measurement angle. Since the range of the first and second measurement angles covers the range of probe one, probe one can definitely detect the maximum value of the laser light during the rotation of element one, and thus determine the maximum measurement value of probe one, thereby obtaining the range of the required value. During the process of probe one acquiring the full range value, since component one rotates continuously, probe one must have a zero range reading before acquiring the full range value. Therefore, during the rotation of component one, the zero range value and the full range value can be acquired, and the angles corresponding to these two values ​​can be located, thereby determining the preferred rotation scheme. In other words, the optical component is rotated between the first measurement angle and the second measurement angle, so that the rotation angle corresponding to the position where the photoelectric probe acquires the full range value is configured as the second preset angle; the angle corresponding to the first measurement angle is configured as the zero value angle. Further, the optical component is driven to rotate by a stepper motor, acquiring the number of pulse outputs from the stepper motor when the optical component rotates from the zero value angle to the second preset angle, as well as the stepper motor's microstepping and signal direction. When probe one acquires the zero value reading, if the stepper motor outputs another pulse, causing probe one to acquire a non-zero reading, then the rotation angle corresponding to the previous pulse is the angle corresponding to the zero range value, i.e., the first measurement angle.

[0045] like Figure 6 As shown, in this embodiment, when detecting laser output power, the position of the optical element needs to be zeroed. This involves calculating the number of zeroing pulses required to zero the optical element based on its current angle, and rotating the optical element according to the number of zeroing pulses to ensure it is zeroed before laser output power detection. Since the zero and full range positions have been determined before detection, after element one is zeroed, the stepper motor can be directly driven to switch element one to the second preset angle during laser output power detection. At this point, the laser has a maximum value in the probe's detection range. The laser value is read and compared with the maximum value of the probe's range. If the actual reading is less than the maximum value, the measurement is complete. During the zeroing process, it is also necessary to rotate the optical element according to the number of zeroing pulses and determine the difference between the adjusted angle after rotation and the zero angle (first measurement angle) to ensure accurate zeroing.

[0046] (1) If the adjustment angle is greater than the zero angle, the optical element is driven to rotate in a direction away from the second preset angle according to the subdivision number;

[0047] (2) If the adjustment angle equals the zero angle, the rotation will stop when the position is reached;

[0048] (3) If the adjustment angle is less than the zero angle, the optical element is driven to rotate in a direction close to the second preset angle according to the subdivision number.

[0049] In this embodiment, the angular position of component one is determined based on the position of the absolute encoder of the stepper motor. During the determination of the full-range position before detection, by corresponding the position of the absolute encoder to the position of component one, the zero-value angle position A1 of component one and the second preset angle position A2 of component one can be obtained. At this time, the direction control signal A3 of the stepper motor is also known. Simultaneously, the number of pulses A4 output by the stepper motor during the process of component one rotating from the zero-range position to the full-range position can also be known. Of course, its microstepping factor A5 is also directly obtained based on the parameters of the stepper motor. Therefore, before zeroing, the current absolute encoder position X1 can be obtained, thereby obtaining the number of pulses Y1 required for component one to zero.

[0050] (Formula 1)

[0051] According to Formula 1, when the stepper motor outputs Y1 pulses and the direction signal A3 is inverted, the zeroing operation of component one can be achieved. At this time, the position X2 of the absolute encoder after the zeroing operation can be obtained. By comparing the position X2 of the absolute encoder at this time with the position A1 of the zero angle, it can be determined whether the zeroing is completed.

[0052] According to (1), if X2 > A1, the stepper motor outputs A5 pulses, the direction signal A3 is reversed, the position X21 of the absolute encoder is obtained, and X21 and A1 are compared again. If X21 > A1, the above operation is repeated until X2N = A1.

[0053] According to (3), if X2 < A1, the stepper motor outputs A5 pulses, and the direction signal A3 is positive. At this time, the position X21 of the absolute encoder is obtained, and X21 and A1 are compared again. If X21 < A1, the above operation is repeated until X2N = A1.

[0054] It is known that in optical components, each component is zeroed out in this way.

[0055] like Figure 7 As shown, when the range of probe one meets the actual measurement value range, component one needs to be automatically calibrated. This process includes the following steps:

[0056] S101, Component 1 is reset to zero, and the number of stepper motor pulses corresponding to Component 1 is cleared to zero;

[0057] S102. Turn on the laser and output at a fixed power;

[0058] S103. The stepper motor outputs A5 pulses in stages with a positive direction signal A3 each time, and adds A5 pulses each time until the number of pulses output by the stepper motor is A4, that is, the component one rotates from the position of zero value of the range to the position of full value of the range. At this time, the position of its corresponding absolute encoder is L1.

[0059] S104. Read the value of probe one, which is the actual measured value of the current laser.

[0060] Therefore, it can be concluded that, Figure 9 As shown, based on the intensity of the laser, when the synergistic effect of component one and probe one is satisfied, it has an automatic control process. That is, after component one is zeroed, the stepper motor outputs A5 pulses in stages with a positive direction signal A3 each time, and adds A5 pulses each time until the absolute encoder is at position L1, thus completing the laser emission path control, so that probe one can receive the laser.

[0061] If the actual measured value detected by probe one during the actual measurement process is greater than or equal to the maximum value of its measurement range, further detection is required using component two. Therefore, it is necessary to drive component two to achieve automatic calibration at this time.

[0062] like Figure 8 As shown, further, when guiding the laser to element two, element one needs to be switched from its second preset angle to its first preset angle. In any adjacent optical elements, when one optical element guides the laser to the next optical element, there is an angle difference between the adjacent optical elements. Based on the angle difference, as well as the step angle and microstepping of the stepper motor, the number of pulses required for the optical element to switch from the second preset angle to the first preset angle is obtained in order to guide the laser to the next optical element.

[0063] Specifically, when the laser is guided from component one to component two, there is an angular difference α between component one and component two. Based on the parameters of the stepper motor, its step angle β can be obtained. Therefore, the number of pulses N1 required for the stepper motor to drive component one to compensate for this angular difference can be calculated.

[0064] (Formula 2)

[0065] Let the position of the zero angle obtained by component two be B1, and the position of its second preset angle be B2, and the direction control signal of its stepper motor be B3; during the process of component two rotating from the position of its range zero value to the range full value, the number of pulses output by its stepper motor is B4, and the microstepping of the stepper motor is B5.

[0066] Therefore, the process includes the following steps:

[0067] S201, Component 1 and Component 2 are reset to zero, and the stepper motor pulse count is cleared to zero;

[0068] S202. Based on Formula 2, the stepper motor of control element 1 outputs M3 pulses with direction signal A3, causing element 1 to switch from the second preset angle to the first preset angle. At this time, the position L2 of the absolute encoder of the stepper motor corresponding to element 1 can be known.

[0069] S203. Turn on the laser and output at a fixed power;

[0070] S204. The stepper motor of component two outputs B5 pulses for the positive direction signal B3 in stages, and adds B5 pulses each time until the number of pulses output by the stepper motor is B4, that is, component two rotates from the position of zero value of the range to the position of full value of the range. At this time, the position of its corresponding absolute encoder is L3.

[0071] S205. Read the value of probe two, which is the actual measured value of the current laser.

[0072] In the process of rotating component one from the position of zero range to the position of full range, the number of pulses output by the stepper motor, A4, is denoted as M1. Then, the number of pulses M3 required for control component one to switch from the second preset angle to the first preset angle is:

[0073] (Formula 3)

[0074] Based on Formula 3 and the direction signal A3 of the stepper motor of Component 1, Component 1 can be switched from the second preset angle to the first preset angle to guide the laser to Component 2.

[0075] Therefore, it can be concluded that, Figure 10 As shown, based on the laser intensity, when the synergistic effect of Component 1, Component 2, and Probe 2 is satisfied, there is an automatic control process. That is, after Component 1 and Component 2 are zeroed, the stepper motor of Component 1 outputs A5 pulses for the positive direction signal A3 in stages, and adds A5 pulses each time, until the absolute encoder of the stepper motor corresponding to Component 1 is at position L2, thus completing the laser emission path control at Component 1; then the stepper motor of Component 2 outputs B5 pulses for the positive direction signal B3 in stages, and adds B5 pulses each time, until the absolute encoder of the stepper motor of Component 2 is at position L3, thus completing the laser emission path control at Component 2, so that Probe 2 can receive the laser.

[0076] Similarly, when using probe three... probe N, automatic calibration can be achieved through the above method to complete the laser output power test.

[0077] Based on the above embodiments, this embodiment also discloses a method for detecting laser output power, including:

[0078] Multiple optical elements are configured, and the relative rotation of the optical elements is used to make the laser have multiple emission paths to form a multi-level detection optical path. Each level of detection optical path has a corresponding photoelectric probe, and the measurement range of the photoelectric probe increases step by step.

[0079] Obtain the laser output power of the previous detection optical path. If the measured value of the photodetector of the previous detection optical path is greater than its full range value, switch to the next detection optical path until the measured value of the photodetector of the Nth detection optical path is between its zero range value and its full range value.

[0080] Specifically, such as Figure 4 As shown, the detection device in this embodiment includes a power laser control unit, an MCU, a stepper motor drive unit, an encoder data reading unit, and a photoelectric conversion and acquisition unit. The power laser control unit controls the laser's start and stop, and outputs a 0-10V analog signal to control the laser output power. The MCU processes data and outputs control signals. The stepper motor drive unit, matched with corresponding components, controls the rotation direction and feed amount according to the control signals output by the MCU. The encoder data reading unit reads the stepper motor position data. The photoelectric conversion and acquisition unit converts and amplifies the current signal from the photoelectric probe into a voltage signal for the MCU to acquire.

[0081] Therefore, as Figure 11 As shown, a method for detecting laser output power specifically includes the following steps:

[0082] S1, control the formation of a Level 1 detection optical path;

[0083] S2, Control the laser output;

[0084] S3, Read the data from probe one (F1);

[0085] S4. If F1 is less than the maximum range of probe one, the actual measurement value is obtained; if F1 is greater than or equal to the maximum range of probe one, the laser is turned off and the second-level detection optical path is switched.

[0086] S5. Control the formation of a two-stage detection optical path;

[0087] S6, Control laser beam output;

[0088] S7. Read the data from probe two, F2;

[0089] S8. If F2 is less than the maximum range of probe 2, the actual measurement value is obtained; if F2 is greater than or equal to the maximum range of probe 2, the laser is turned off and the 3-level detection optical path is switched.

[0090] ...

[0091] If Sm and Fn are less than the maximum value of the probe N's range, the actual measured value is obtained; if Fn is greater than or equal to the maximum value of the probe N's range, the laser is turned off, indicating that the laser power exceeds the maximum range of this detection device.

[0092] Therefore, assuming the detection device in this embodiment can form a three-level detection optical path, the detection device includes component one, component two, component three, probe one, probe two, and probe three. Component one, component two, and component three are controlled by corresponding stepper motors to rotate at their respective angles. When component one, component two, and component three are at different angles, they can respectively form a level 1 detection optical path, a level 2 detection optical path, and a level 3 detection optical path. Finally, the laser enters the corresponding probe one, probe two, or probe three through these three paths, thereby realizing the detection of the laser's output power. In general operation, the level 1 detection optical path can be used for laser power measurement up to 1KW, the level 2 detection optical path for laser power measurement up to 5KW, and the level 3 detection optical path for laser power measurement up to 10KW. If the actual power of the laser whose output power needs to be detected exceeds 10KW, the system will issue an alarm.

[0093] The above are merely preferred embodiments of the present invention. It should be noted that the above preferred embodiments should not be considered as limitations on the present invention, and the scope of protection of the present invention should be determined by the scope defined in the claims. For those skilled in the art, several improvements and modifications can be made without departing from the spirit and scope of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A device for detecting the output power of a laser, characterized in that The optical elements are arranged on the light output side of the laser, and each optical element is provided with a photoelectric probe matched therewith; The range zero value and the range full value of the photoelectric probe are measured, and the optical element is switched between the first preset angle and the second preset angle according to the actual measurement value of the photoelectric probe, so as to guide at least part of the laser to the next optical element or the photoelectric probe matched therewith; When the range full value of the photoelectric probe is measured, the optical element is driven to rotate between the first measurement angle and the second measurement angle, and the maximum value obtained by the photoelectric probe between the first measurement angle and the second measurement angle is the range full value; The optical element is rotated between the first measurement angle and the second measurement angle, and the rotation angle corresponding to the position where the photoelectric probe obtains the range full value is configured as the second preset angle; the angle corresponding to the first measurement angle is configured as the zero value angle; The optical element is driven to rotate by a stepping motor, and the pulse output times of the stepping motor when the optical element rotates from the zero value angle to the second preset angle, the subdivision number and the signal direction of the stepping motor are obtained; According to the current angle of the optical element, the zero reset pulse number required for the optical element to be reset is calculated, and the optical element is rotated according to the zero reset pulse number, so as to reset the optical element before detecting the laser output power; In any adjacent optical elements, there is an angle difference between the adjacent optical elements when one of the optical elements guides the laser to the next optical element; According to the angle difference, the step angle and the subdivision number of the stepping motor, the pulse number required for the optical element to switch from the second preset angle to the first preset angle is obtained, so as to guide the laser to the next optical element.

2. A laser output power detection device as claimed in claim 1, characterized in that When the optical element is at the second preset angle, the optical element guides the laser to the photoelectric probe matched therewith, and if the measurement value of the photoelectric probe is between the range zero value and the range full value, the detection of the laser output power is completed, and if the measurement value of the photoelectric probe is greater than the range full value of the photoelectric probe matched therewith, the optical element switches to the first preset angle to guide the laser to the next optical element.

3. The apparatus of claim 1, wherein the laser output power is detected by the laser output power detecting means. After the optical element is rotated according to the zero reset pulse number, the size between the adjusted angle after rotation and the zero value angle is judged; If the adjusted angle > the zero value angle, the optical element is driven to rotate in the direction away from the second preset angle according to the subdivision number; If the adjusted angle = the zero value angle, the rotation stops at the position; If the adjusted angle < the zero value angle, the optical element is driven to rotate in the direction close to the second preset angle according to the subdivision number.

4. The apparatus of claim 1, wherein the laser output power is detected by the laser output power detecting means. The optical element is a mirror or a beam splitter; When the optical element is a beam splitter, the photoelectric probe obtains the actual power of the laser output based on the measurement value and the loss coefficient.

5. The apparatus of claim 1, wherein the laser output power is detected by the laser output power detecting means. The optical element includes element one and probe one, element two and probe two, element three and probe three, …, element N and probe N, N being a positive integer; The element one, the element two, …, the element N guide the laser to form a detection light path, and the probe N is used at the end of the detection light path to detect the laser output power.

6. A method of detecting laser output power, characterized by, The detection method based on the laser output power detection device according to any one of claims 1-5 comprises: The multiple optical elements are configured to have multiple laser output paths by rotating the optical elements, so as to form multiple detection light paths, each of which has a corresponding photoelectric probe with an increased measurement range; The laser output power is detected by the previous detection light path, and if the measurement value of the photoelectric probe of the detection light path is greater than the full-scale value of the measurement range, the next detection light path is switched to until the measurement value of the photoelectric probe of the Nth detection light path is between the zero value and the full-scale value of the measurement range.

Images