Error self-compensation method, device and equipment for rotary filtering and medium

Abstract

The invention relates to an error self-compensation method, device and equipment for rotary filtering and a medium, and belongs to the field of optical instruments. The method comprises the steps that rotary filtering is carried out by regulating and controlling angular displacement of a monochromator, a single-dispersion light beam is obtained, and the single-dispersion light beam covers a single-dispersion wavelength light beam and a multi-dispersion wavelength light beam; the detection wavelength of the single-dispersion light beam is captured, an error self-compensation model is constructed through disturbance wavelengths to carry out error self-compensation, and the disturbance wavelengths cover the thermodynamic disturbance wavelength, the illumination disturbance wavelength, the current disturbance wavelength, the power disturbance wavelength and the mechanical vibration disturbance wavelength. According to the invention, monochromatic light with different wavelengths can be simply, conveniently and efficiently acquired, discontinuous monochromatic light with multiple wavelengths can be acquired, error self-calibration is realized according to multiple factors, and monochromatic light acquisition is more accurate.

Description

Technical Field

[0001] The present invention belongs to the technical field of optical instruments, and particularly relates to a method, device, equipment and medium for self-compensating errors of rotational filtering. Background Art

[0002] A monochromator is an optical instrument that generates monochromatic light and is also commonly found in a spectroscopic component of an optical instrument to complete the spectroscopic function, realizing the splitting of a beam of light with a continuous spectrum into multiple monochromatic (narrow spectral band) light beams and enabling spectral scanning. Currently, the main methods for a monochromator to generate monochromatic light are: prism spectroscopy, grating spectroscopy, and Fourier transform spectroscopy.

[0003] At present, various monochromators are difficult to simply and efficiently obtain monochromatic light of different wavelengths, and the monochromator is greatly affected by environmental parameters such as temperature and working parameters such as current, which will cause a large deviation in the wavelength of the captured monochromatic light, and this deviation cannot be adaptively adjusted, resulting in a decrease in the accuracy of the monochromatic light capture process. Summary of the Invention

[0004] To solve the above problems existing in the prior art, the present invention provides a method, device, equipment and medium for self-compensating errors of rotational filtering.

[0005] The object of the present invention can be achieved by the following technical solutions: A method for self-compensating errors of rotational filtering, the implementation of the error self-compensation method includes the following steps: Perform rotational filtering by regulating the angular displacement of the monochromator to obtain a monochromatic dispersion beam, and the monochromatic dispersion beam covers a monochromatic dispersion wavelength beam and a multi-dispersion wavelength beam; Capture the detection wavelength of the monochromatic dispersion beam, and perform error self-compensation by constructing an error self-compensation model through perturbation wavelengths, and the perturbation wavelengths cover thermodynamic perturbation wavelengths, illuminance perturbation wavelengths, current perturbation wavelengths, power perturbation wavelengths and mechanical vibration perturbation wavelengths.

[0006] Preferably, the acquisition of the monochromatic dispersion wavelength beam includes: Perform wavefront compression and collimation processing on the light source light to obtain a parallel beam; Continuously split the parallel beam through a beam splitter to obtain a transmission spectral segment and a reflection spectral segment, the transmission spectral segment is obtained through a transmission mechanism, and the reflection spectral segment is obtained through a reflection mechanism; Perform spectral scanning on the transmission spectral segment and the reflection spectral segment through a rotating filter to obtain a filtered spectrum; The filtered spectrum is subjected to polarization splitting to obtain the monochromatic dispersion wavelength beam; Couple the beam of the monochromatic dispersion wavelength beam to a photoelectric conversion target surface.

[0007] Preferably, the acquisition of the multi-dispersion wavelength beam includes: Performing wavefront compression and collimation on the light source light to obtain a parallel beam; Continuously splitting the parallel beam through a beam splitter to obtain the transmission spectral band and the reflection spectral band; Performing spectral scanning by respectively modulating the incident phase angles of the transmission spectral band and the reflection spectral band through rotating the rotary filter to obtain a filtered spectrum, where the incident phase angle θ ∈ [0, π / 2), and when θ = 0, the wavelength of the filtered spectrum reaches the peak value λ max , and when θ → π / 2, the wavelength of the filtered spectrum reaches the valley value λ min ; The filtered spectrum is subjected to polarization splitting to obtain the multi-dispersion wavelength beam; Coupling the multi-dispersion wavelength beam to the photoelectric conversion target surface.

[0008] Preferably, the perturbation wavelengths include: Capturing error self-compensation parameters through a multi-parameter sensing array; Calculating the thermodynamic perturbation wavelength based on the room temperature and the working temperature of the monochromator, and the calculation formula is , where is the thermodynamic perturbation wavelength, is the detection wavelength, is the thermal expansion coefficient of the beam splitter, T is the working temperature of the monochromator, and T0 is the room temperature; Calculating the illumination perturbation wavelength based on the illumination distribution matrix, and the calculation formula is , where is the illumination perturbation wavelength, r is the light transmittance of the beam splitter, and the value range is [0, 100%], and a is the rank of the illumination distribution matrix.

[0009] Obtaining the working current of the stepping motor, and calculating the current perturbation wavelength based on the working current of the stepping motor, and the calculation formula is , where is the current perturbation wavelength, I0 is the rated current of the stepping motor, and I is the working current of the stepping motor; Obtaining the working power of the stepping motor, and calculating the power perturbation wavelength based on the working power of the stepping motor, and the calculation formula is , where is the power perturbation wavelength, P0 is the rated power of the stepping motor, and P is the working power of the stepping motor; Obtaining the rotation angle of the rotary filter and the included angle between the monochromatic dispersion beam, where the included angle between the monochromatic dispersion beam is the included angle between the monochromatic dispersion beam and the polarization splitting prism, and calculating the mechanical vibration perturbation wavelength based on the rotation angle, the included angle between the monochromatic dispersion beam and the incident phase angle, and the calculation formula is , where λ is the mechanical vibration disturbance wavelength, α is the rotation angle, and β is the monochromatic dispersion beam angle; Preferably, the obtaining of the illuminance distribution matrix includes: Establish an eight-quadrant illuminance detection grid with the optoelectronic conversion target surface as the origin, obtain the illuminance of the optoelectronic conversion target surface and construct the illuminance distribution matrix. The mathematical description of the illuminance distribution matrix is , where E n is the illuminance of the nth quadrant, n = 1, 2, …, 8, and E g is the illuminance of the optoelectronic conversion target surface.

[0010] Preferably, the constructing of the error self-compensation model through the disturbance wavelength includes: Calculate the actual wavelength based on the disturbance wavelength and construct the error self-compensation model. The calculation formula is , where λ real is the actual wavelength. When |λ real - λ| > λ threshold , the self-compensation mechanism is triggered.

[0011] Preferably, the self-compensation mechanism includes: Obtain the transfer function of the incident phase angle and the disturbance deviation by constructing a regression curve, and adjust the incident phase angle through feedback control to make the disturbance deviation converge to a preset tolerance range.

[0012] A rotation filter error self-compensation device for performing the above-mentioned error self-compensation method, including a monochromatic light capture module and an error self-compensation module; The monochromatic light capture module is used to perform rotation filtering by regulating the angular displacement of the monochromator and obtain monochromatic dispersion beams, and the monochromatic dispersion beams cover monochromatic dispersion wavelength beams and multi-dispersion wavelength beams; The error self-compensation module is used to capture the detection wavelength of the monochromatic dispersion beam and perform error self-compensation by constructing an error self-compensation model through the disturbance wavelength. The disturbance wavelength covers thermodynamic disturbance wavelength, illuminance disturbance wavelength, current disturbance wavelength, power disturbance wavelength, and mechanical vibration disturbance wavelength.

[0013] An electronic device includes a memory, a processor, and a computer program stored on the memory and executable on the processor. When the processor executes the program, the above-mentioned error self-compensation method is implemented.

[0014] A storage medium containing computer-executable instructions, and the computer-executable instructions are used to execute the above-mentioned error self-compensation method when executed by a computer processor.

[0015] The beneficial effects of the present invention are: (1)Comprehensively consider the influence of environmental factors (temperature and illuminance) and equipment operating conditions (current, power, and inevitable vibration phenomena during operation) on the monochromatic light capture process through the thermodynamic perturbation wavelength, illuminance perturbation wavelength, current perturbation wavelength, power perturbation wavelength, and mechanical vibration perturbation wavelength, and perform error self-compensation to make the obtained light wavelength more accurate; (2)By rotating the filter, monochromatic dispersion wavelength beams or multi-dispersion wavelength beams can be obtained as needed. The acquisition of monochromatic light is more flexible, and the rotating filter monochromator can be freely adjusted according to actual needs, with higher working efficiency; (3)By establishing an eight-quadrant illuminance detection grid with the photoelectric conversion target surface as the origin, obtain the illuminance of the photoelectric conversion target surface and construct an illuminance distribution matrix to explore the influence of illuminance on the monochromatic light wavelength, rather than only considering the influence of the illuminance at a single point, making the acquisition of the illuminance perturbation wavelength more accurate. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] For the convenience of those skilled in the art to understand, the present invention will be further described below in conjunction with the accompanying drawings.

[0017] Figure 1 It is a flowchart of the steps of an error self-compensation method for rotating filter of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0018] To further elaborate on the technical means and effects adopted by the present invention to achieve the predetermined invention purpose, the following describes in detail the specific implementation manners, structures, features, and effects of the present invention in conjunction with the accompanying drawings and preferred embodiments.

[0019] The working principle and usage process of the present invention: Please refer to Figure 1 , an error self-compensation method for rotating filter, including: S1: Rotate the filter by adjusting the angular displacement of the monochromator to obtain monochromatic dispersion beams, and the monochromatic dispersion beams include monochromatic dispersion wavelength beams and multi-dispersion wavelength beams; S2: Capture the detection wavelength of the monochromatic dispersion beam, and perform error self-compensation by constructing an error self-compensation model with the perturbation wavelength, where the perturbation wavelength includes thermodynamic perturbation wavelength, illuminance perturbation wavelength, current perturbation wavelength, power perturbation wavelength, and mechanical vibration perturbation wavelength.

[0020] In this embodiment, the acquisition of the monochromatic dispersion wavelength beam can be specifically implemented through the following steps: Perform wavefront compression and collimation processing on the light rays of the light source to obtain parallel beams; The parallel beam is continuously spectroscopically processed by a spectroscope to obtain a transmission spectral band and a reflection spectral band. The transmission spectral band is obtained through a transmission mechanism, and the reflection spectral band is obtained through a reflection mechanism. For example, a parallel beam is selected to be incident on the spectroscope, and the transmission spectral band and the reflection spectral band are obtained through transmission and reflection. The transmission spectral band and the reflection spectral band are respectively spectroscopically processed by the spectroscope again to obtain two transmission spectral bands and two reflection spectral bands, and so on. By iterating the number of spectroscopes, multiple transmission spectral bands and multiple reflection spectral bands can be obtained and expanded; The transmission spectral band and the reflection spectral band perform spectral scanning through a rotating filter to obtain a filtered spectrum; The filtered spectrum is subjected to polarization spectroscopy to obtain the monochromatic dispersion wavelength beam; The beam of the monochromatic dispersion wavelength is coupled to a photoelectric conversion target surface.

[0021] In this embodiment, the acquisition of the multi-dispersion wavelength beam can be specifically implemented through the following steps: Perform wavefront compression and collimation processing on the light source light to obtain a parallel beam; Continuously spectroscopically process the parallel beam through a spectroscope to obtain the transmission spectral band and the reflection spectral band; Spectral scanning is realized by respectively modulating the incident phase angles of the transmission spectral band and the reflection spectral band by rotating the rotating filter to obtain a filtered spectrum. The incident phase angle θ ∈ [0, π / 2). When θ = 0, the wavelength of the filtered spectrum reaches the peak value λ max , when θ → π / 2, the wavelength of the filtered spectrum reaches the valley value λ min ; The filtered spectrum is subjected to polarization spectroscopy to obtain the multi-dispersion wavelength beam; The beam of the multi-dispersion wavelength is coupled to a photoelectric conversion target surface.

[0022] In this embodiment, an error self-compensation model is constructed through disturbing wavelengths for error self-compensation, which can be specifically implemented through the following steps: S201: Capture error self-compensation parameters through a multi-parameter sensing array. The error self-compensation parameters include room temperature, monochromator operating temperature, ambient illuminance, stepping motor operating current, and stepping motor operating power; S202: Calculate the thermodynamic disturbance wavelength based on the room temperature and the monochromator operating temperature. The calculation formula is , where is the thermodynamic disturbance wavelength, is the detection wavelength, is the thermal expansion coefficient of the spectroscope, T is the monochromator operating temperature, and T0 is the room temperature; S203: Establish an eight - quadrant illuminance detection grid with the optoelectronic conversion target surface as the origin, obtain the illuminance of the optoelectronic conversion target surface and construct an illuminance distribution matrix. The mathematical description of the illuminance distribution matrix is , where, E n is the illuminance of the n - th quadrant, n = 1, 2, …, 8, and E g is the illuminance of the optoelectronic conversion target surface; Calculate the illuminance perturbation wavelength based on the illuminance distribution matrix. The calculation formula is , where, is the illuminance perturbation wavelength, r is the light transmittance of the beam splitter, and its value range is [0, 100%], and a is the rank of the illuminance distribution matrix.

[0023] S204: Obtain the operating current of the stepper motor, and calculate the current perturbation wavelength based on the operating current of the stepper motor. The calculation formula is , where, is the current perturbation wavelength, I0 is the rated current of the stepper motor, and I is the operating current of the stepper motor; S205: Obtain the operating power of the stepper motor, and calculate the power perturbation wavelength based on the operating power of the stepper motor. The calculation formula is , where, is the power perturbation wavelength, P0 is the rated power of the stepper motor, and P is the operating power of the stepper motor; S206: Obtain the rotation angle of the rotating filter and the included angle between the monochromatic dispersed beam. The included angle between the monochromatic dispersed beam is the included angle between the monochromatic dispersed beam and the polarization beam splitter prism. Calculate the mechanical vibration perturbation wavelength based on the rotation angle, the included angle between the monochromatic dispersed beam and the incident phase angle. The calculation formula is , where, is the mechanical vibration perturbation wavelength, α is the rotation angle, and β is the included angle between the monochromatic dispersed beam; S207: Calculate the actual wavelength based on the perturbation wavelength and construct an error self - compensation model. The calculation formula is , where, λ real is the actual wavelength. When |λ real - λ| > λ threshold , the self - compensation mechanism is triggered.

[0024] In this embodiment, the self - compensation mechanism can be specifically implemented through the following steps: Obtain the transfer function of the incident phase angle and the perturbation deviation by constructing a regression curve, and adjust the incident phase angle through feedback control to make the perturbation deviation converge to a preset tolerance range. Example: The target wavelength is 380 nm, that is, the detection wavelength of the monochromatic dispersed beam obtained by the monochromator is 380 nm. However, due to interference of factors such as temperature, the actual wavelength at this time is 378 nm. Then the perturbation deviation |λ real-λ is 2 nm. By iteratively optimizing the incident phase angle, |λ real -λ → 0 to achieve wavelength stability control.

[0025] An error self-compensation device for rotational filtering, comprising a monochromatic light capture module and an error self-compensation module; The monochromatic light capture module is used to perform rotational filtering by regulating the angular displacement of a monochromator and obtain a monochromatic dispersed light beam, which covers a monochromatic dispersed wavelength light beam and a multi-dispersed wavelength light beam; The error self-compensation module is used to capture the detection wavelength of the monochromatic dispersed light beam and perform error self-compensation by constructing an error self-compensation model with perturbation wavelengths, where the perturbation wavelengths cover thermodynamic perturbation wavelengths, illuminance perturbation wavelengths, current perturbation wavelengths, power perturbation wavelengths, and mechanical vibration perturbation wavelengths.

[0026] The computer storage medium of the embodiments of the present invention may adopt any combination of one or more computer-readable media. The computer-readable medium may be a computer-readable signal medium or a computer-readable storage medium. The computer-readable storage medium may, for example, but not be limited to, an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or any combination of the above. More specific examples (non-exhaustive list) of the computer-readable storage medium include: an electrical connection having one or more wires, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above. In this document, the computer-readable storage medium may be any tangible medium that contains or stores a program, which can be used by or in combination with an instruction execution system, apparatus, or device.

[0027] The computer-readable signal medium may include a data signal propagated in a baseband or as part of a carrier wave, which carries the computer-readable program code. Such a propagated data signal may take various forms, including but not limited to an electromagnetic signal, an optical signal, or any suitable combination of the above. The computer-readable signal medium may also be any computer-readable medium other than the computer-readable storage medium, which can send, propagate, or transmit a program for use by or in combination with an instruction execution system, apparatus, or device.

[0028] The program code contained on a computer-readable medium can be transmitted with any appropriate medium, including but not limited to wireless, wire, optical fiber cable, RF, etc., or any suitable combination of the above. The computer program code for performing the operations of the present invention can be written in one or more programming languages or combinations thereof. The programming languages include object-oriented programming languages such as Java, Smalltalk, C++, and also include conventional procedural programming languages such as the "C" language or similar programming languages. The program code can be executed entirely on the user's computer, partially on the user's computer, executed as an independent software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In the case of a remote computer, the remote computer can be connected to the user's computer through any kind of network, including a local area network (LAN) or a wide area network (WAN), or can be connected to an external computer (for example, by using an Internet service provider to connect through the Internet).

[0029] As described above, it is only the preferred embodiment of the present invention, and it is not a limitation to the present invention in any form. Although the present invention has been disclosed as above with the preferred embodiment, it is not intended to limit the present invention. Any person skilled in the art can make some changes or modifications to the equivalent embodiments with equivalent changes within the scope of the technical solution of the present invention. However, as long as it does not depart from the content of the technical solution of the present invention, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. A method for self-compensation of rotational filtering error, characterized in that: The implementation of the error self-compensation method comprises the following steps: By adjusting the angular displacement of the monochromator, rotation filtering is performed to obtain a monochromatic dispersion light beam, wherein the monochromatic dispersion light beam includes a monochromatic dispersion wavelength light beam and a polychromatic dispersion wavelength light beam; The detection wavelength of the monochromatic dispersion light beam is captured, and an error self-compensation model is constructed by perturbation wavelength to perform error self-compensation, wherein the perturbation wavelength includes thermodynamic perturbation wavelength, illumination perturbation wavelength, current perturbation wavelength, power perturbation wavelength and mechanical vibration perturbation wavelength.

2. The error self-compensation method according to claim 1, characterized in that: The acquisition of the monochromatic dispersion wavelength light beam comprises: Perform wavefront compression and collimation processing on the light source to obtain a parallel light beam; The parallel light beam is continuously split by a beam splitter to obtain a transmission spectrum segment and a reflection spectrum segment, wherein the transmission spectrum segment is obtained by a transmission mechanism, and the reflection spectrum segment is obtained by a reflection mechanism; The transmission spectrum and the reflection spectrum are spectrally scanned by rotating the filter to obtain a filtered spectrum; The monochromatic dispersion wavelength light beam is obtained after the filtered spectrum is polarized and split; The monochromatic dispersion wavelength light beam is coupled to the photoelectric conversion target surface.

3. The error self-compensation method according to claim 2, characterized in that: The acquisition of the multi-dispersion wavelength light beam comprises: Perform wavefront compression and collimation processing on the light source to obtain a parallel light beam; Continuously splitting the parallel light beam by a spectroscope to obtain the transmission spectrum and the reflection spectrum; The spectral scanning is realized by rotating the rotating filter to modulate the incident phase angles of the transmission spectrum and the reflection spectrum respectively, and the filtering spectrum is obtained. The incident phase angle θ∈[0,π / 2), when θ=0, the wavelength of the filtering spectrum reaches the peak value λ max , when θ→π / 2, the wavelength of the filtered spectrum reaches the valley value λ m i n ; The multi-dispersion wavelength light beam is obtained after the filtered spectrum is polarized and split; The multi-dispersion wavelength light beam is coupled to a photoelectric conversion target surface.

4. The error self-compensation method according to claim 1, characterized in that: The disturbance wavelengths include: Capturing error self-compensation parameters through multi-parameter sensor array; The thermodynamic perturbation wavelength is calculated based on the room temperature and the monochromator operating temperature, and the calculation formula is λ T =Γ(TT o )λ, where λ T is the thermodynamic perturbation wavelength, λ is the detection wavelength, Γ is the thermal expansion coefficient of the spectroscope, T is the monochromator operating temperature, and T0 is the room temperature; The wavelength of illumination disturbance is calculated based on the illumination distribution matrix. The calculation formula is: Among them, λ L is the illumination disturbance wavelength, r is the transmittance of the spectroscope, ranging from [0,100%], and a is the rank of the illumination distribution matrix; Obtain the working current of the stepper motor, and calculate the current disturbance wavelength based on the working current of the stepper motor. The calculation formula is: Among them, λ I is the current disturbance wavelength, I0 is the rated current of the stepper motor, and I is the working current of the stepper motor; Obtain the working power of the stepper motor, and calculate the power disturbance wavelength based on the working power of the stepper motor. The calculation formula is: Among them, λ P is the power disturbance wavelength, P0 is the rated power of the stepper motor, and P is the working power of the stepper motor; Obtain the rotation angle of the rotating filter and the monochromatic dispersion beam angle, wherein the monochromatic dispersion beam angle is the angle between the monochromatic dispersion beam and the polarization beam splitter prism, and calculate the mechanical vibration disturbance wavelength based on the rotation angle, the monochromatic dispersion beam angle and the incident phase angle. The calculation formula is: Among them, λ Z is the wavelength of mechanical vibration disturbance, α is the rotation angle, and β is the angle of the monochromatic dispersion beam.

5. The error self-compensation method according to claim 4, characterized in that: The acquisition of the illumination distribution matrix includes: An eight-quadrant illumination detection grid is established with the photoelectric conversion target surface as the origin, the illumination of the photoelectric conversion target surface is obtained and the illumination distribution matrix is ​​constructed. The mathematical description of the illumination distribution matrix is Among them, E n is the illumination of the nth quadrant, n=1,2,…,8, E g is the illumination of the photoelectric conversion target surface.

6. The error self-compensation method according to claim 5, characterized in that: The error self-compensation model constructed by perturbing the wavelength comprises: The actual wavelength is calculated based on the disturbance wavelength and the error self-compensation model is constructed. The calculation formula is λ real =λ-(λ T +λ L +λ I +λ P +λ Z ), where λ real is the actual wavelength, when |λ real -λ|>λ threshold The self-compensation mechanism is triggered.

7. The error self-compensation method according to claim 6, characterized in that: The self-compensation mechanism includes: The transfer function between the incident phase angle and the disturbance deviation is obtained by constructing a regression curve, and the incident phase angle is adjusted through feedback control so that the disturbance deviation converges to a preset tolerance range.

8. A self-compensating device for rotating filtering, characterized in that: The device is applied to the error self-compensation method as described in any one of claims 1 to 7, comprising a monochromatic light capture module and an error self-compensation module; The monochromatic light capture module is used to perform rotational filtering and obtain a monochromatic dispersion light beam by regulating the angular displacement of the monochromator, and the monochromatic dispersion light beam includes a monochromatic dispersion wavelength light beam and a multi-dispersion wavelength light beam; The error self-compensation module is used to capture the detection wavelength of the monochromatic dispersion light beam, and construct an error self-compensation model through the perturbation wavelength to perform error self-compensation. The perturbation wavelength includes thermodynamic perturbation wavelength, illumination perturbation wavelength, current perturbation wavelength, power perturbation wavelength and mechanical vibration perturbation wavelength.

9. An electronic device comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that: When the processor executes the program, the error self-compensation method as described in any one of claims 1-7 is implemented.

10. A storage medium containing computer executable instructions, characterized in that: The computer executable instructions are used to perform the error self-compensation method as claimed in any one of claims 1 to 7 when executed by a computer processor.

Images