Light-emitting carrier optical module for carrier plate yield detection

Abstract

The invention discloses a light-emitting platform deck optical module for carrier plate yield detection, which comprises a base, a light-emitting platform deck, a driving mechanism, a backlight source assembly, two side light sources and an adsorption assembly, and is characterized in that the light-emitting platform deck is configured to bear, adsorb and fix a carrier plate, and the bearing surface of the light-emitting platform deck is provided with a plurality of adsorption holes; the base is provided with a detection station, and the driving mechanism drives the light-emitting carrying table to move to or leave the detection station. The backlight source assembly is arranged at the detection station, and the backlight source assembly is configured to emit light upwards towards the light-emitting carrying table; the two side light sources are arranged on the two sides of the detection station respectively, and the two side light sources are configured to emit light towards the light-emitting carrying table on the two sides of the detection station so as to brighten the multiple adsorption holes; according to the light-emitting carrier optical module, the side light sources are additionally arranged on the two sides of the detection station, the light-emitting carrier is illuminated on the two sides through the two side light sources, then the brightness of the multiple adsorption holes is increased, the shadow of the holes is reduced, and the detection precision of the carrier plate is improved.

Description

Technical Field

[0001] This application belongs to the technical field of vision detection, and particularly relates to a light-emitting stage optical module for carrier board yield detection. Background Art

[0002] In the field of modern electronic manufacturing, the carrier board serves as a key support and connection carrier for various electronic components, and its quality yield directly determines the performance and reliability of electronic products. With the development of electronic products towards miniaturization and high performance, stringent requirements are imposed on the manufacturing precision and quality control of carrier boards. During the manufacturing process of carrier boards, defects such as tiny flaws, short circuits, and open circuits are likely to affect the performance of carrier boards.

[0003] With the development of machine vision detection technology, some detection systems based on machine vision are applied to carrier board detection. Due to the thin thickness of the carrier board, a detection scheme with a backlight source (i.e., a light-emitting stage with a light source arranged below the glass stage) has been derived on the basis of the traditional machine vision detection system. However, in the backlight detection scheme, since adsorption holes are provided on the bearing surface of the stage, when the backlight shines upward, the light will form shadows after passing through the adsorption holes, affecting the detection accuracy of the carrier board and unable to meet the high-precision requirements for carrier board yield detection. Summary of the Invention

[0004] The purpose of this application is to provide a light-emitting stage optical module for carrier board yield detection to solve the problem that the existing optical module for carrier board yield detection cannot meet the high-precision detection requirements.

[0005] To achieve this purpose, this application adopts the following technical solutions:

[0006] This application proposes a light-emitting stage optical module for carrier board yield detection, which includes a base, a light-emitting stage, a driving mechanism, a backlight source assembly, two side light sources, and an adsorption assembly, where:

[0007] The light-emitting stage is configured to carry and adsorb and fix the carrier board to be detected. An air extraction cavity is provided on the light-emitting stage, and a plurality of adsorption holes are provided on the bearing surface of the light-emitting stage. The adsorption assembly is configured to extract the air in the air extraction cavity to adsorb and fix the carrier board on the bearing surface of the light-emitting stage through the plurality of adsorption holes;

[0008] A detection station is provided on the base. The light-emitting stage is slidably mounted on the base along a first horizontal direction. The driving mechanism is mounted on the base, and the driving end of the driving mechanism is connected to the light-emitting stage. The driving mechanism is configured to drive the light-emitting stage to slide along the first horizontal direction so that the light-emitting stage moves to or away from the detection station;

[0009] The backlight assembly is disposed at the detection station, and the backlight assembly is configured to project light upward toward the light-emitting stage at the detection station.

[0010] The two side light sources are respectively disposed on both sides of the detection station along the first horizontal direction, and the two side light sources are configured to project light toward the light-emitting stage at the detection station on both sides of the detection station, so as to brighten the plurality of adsorption holes.

[0011] Optionally, the adsorption assembly is disposed on at least one side of the light-emitting stage along the first horizontal direction, and the adsorption assembly includes at least one air guide channel and an air guide component, wherein:

[0012] The air guide channel is disposed on the light-emitting stage, and the first end of the air guide channel is communicated with the air extraction cavity.

[0013] The air guide component includes an air guide block and an air extraction pipeline. The air guide block is mounted on one side surface of the light-emitting stage along the first horizontal direction and is located below the side light source on this side in the height direction. The air inlet end of the air guide block is communicated with the second end of the air guide channel. The first end of the air extraction pipeline is connected to the air outlet end of the air guide block, and the second end of the air extraction pipeline is connected to an air extraction device.

[0014] Optionally, the light-emitting stage includes a glass stage and two support members, wherein:

[0015] The glass stage is configured to carry and adsorb the carrier plate to be detected. The air extraction cavity is disposed on the glass stage, and the plurality of adsorption holes are opened on the bearing surface of the glass stage.

[0016] The two support members are spaced apart along the second horizontal direction. The bottom ends of the two support members are slidably mounted on the base along the first horizontal direction. The driving end of the driving mechanism is connected to at least one of the support members. The top ends of the two support members are respectively fixed at both ends of the glass stage along the second horizontal direction, and the first horizontal direction is perpendicular to the second horizontal direction.

[0017] Optionally, the air guide channel includes a first channel and a second channel, wherein:

[0018] The first channel is opened on the glass stage, and the first end of the first channel is communicated with the air extraction cavity.

[0019] The second channel is opened on the support member. The air guide block is horizontally mounted on the outer side surface of the support member. The first end of the second channel is communicated with the second end of the first channel, and the second end of the second channel is communicated with the air guide block.

[0020] Optionally, the glass stage is integrally square in structure. The glass stage includes a frame, an upper glass plate, and a lower glass plate, where:

[0021] The upper glass plate is detachably fixed to the top surface of the frame through a first fixing component, and the lower glass plate is detachably and sealingly fixed to the bottom surface of the frame through a second fixing component. The upper glass plate, the frame, and the lower glass plate enclose the air extraction cavity, and the plurality of adsorption holes are opened on the upper glass plate;

[0022] The first channel is opened on the frame. The air inlet of the first channel is located on the inner side surface of the frame, and the air outlet of the first channel is located on the bottom surface of the frame. The air inlet of the second channel is located on the top surface of the support member. The air outlet of the first channel is sealingly docked with the air inlet of the second channel. The air outlet of the second channel is located on the outer side surface of the support member, and the air inlet end of the air guide block covers all the air outlets of the second channel.

[0023] Optionally, the first fixing component includes four pressing members. The four pressing members are respectively detachably fixed to the four corners of the frame through fixing screws. The bottom surface of each pressing member presses against a corresponding corner of the upper glass plate to fix the upper glass plate to the frame.

[0024] Optionally, a square installation groove is opened on the bottom surface of the frame. The second fixing component includes a plurality of pressing plates. The side of the lower glass plate is fixedly installed in the installation groove through the plurality of pressing plates, and a sealing ring is provided between the lower glass plate and the installation groove.

[0025] Optionally, a plurality of installation holes are opened on the frame, and a plurality of first threaded holes are opened on the top surface of the support member. Each installation hole corresponds to one of the installation holes, and a locking screw passes through the installation hole and is locked in the corresponding first threaded hole to fixedly install the frame on the top surface of the support member;

[0026] A plurality of second threaded holes are further opened on the frame, and a leveling screw is installed in each second threaded hole. The bottom end of the leveling screw abuts against the end surface of the support member.

[0027] Optionally, the backlight assembly includes a lifting driving member and a backlight source, where:

[0028] The fixed end of the lifting driving member is installed on the base, the driving end of the lifting driving member is connected to the backlight source, and the lifting driving member is configured to drive the backlight source to lift.

[0029] Optionally, the backlight source is a parallel light source, and the incident angle of the backlight source is -4° to +4°.

[0030] The beneficial effects of the adsorption structure of the light-emitting stage proposed in this application are as follows:

[0031] 1) Side light sources are added on both sides of the detection station. The two side light sources illuminate the light-emitting stage from both sides, thereby increasing the brightness of multiple adsorption holes, reducing the shadows of the holes, and improving the detection accuracy of the carrier board;

[0032] 2) The backlight source adopts a parallel light source, making the backlight illumination more uniform, further reducing the shadows of the holes, facilitating illuminating the adsorption holes, and further improving the detection accuracy of the carrier board;

[0033] 3) By setting the incident angle of the backlight source, the field of view of the backlight source is increased;

[0034] 4) The air extraction path is optimized, so that when the light-emitting stage moves in the first horizontal direction, it will not interfere with the two side light sources, and it can meet the application scenario where side light sources are arranged on the side of the light-emitting stage;

[0035] 5) The four corners of the upper glass plate are tightly pressed and fixed by four pressing members, realizing the fixed installation of the upper glass plate on the frame. There is no need to open installation holes on the upper glass plate, avoiding damage to the upper glass plate during assembly. It not only has a simple structure and is convenient for disassembly and assembly, but also ensures the light transmission performance of the upper glass plate;

[0036] 6) The upper glass plate is in hard contact with the frame, avoiding the influence on the flatness of the upper glass plate due to soft contact between the two, ensuring the flatness of the upper glass plate, and being beneficial to improving the detection accuracy of the carrier board;

[0037] 7) A leveling screw is arranged between the upper glass plate and the support member, realizing the adjustment of the flatness of the upper glass plate;

[0038] 8) The backlight source can be lifted, thereby adjusting the distance between the backlight source and the glass stage, so that the backlight source is at an appropriate illumination height. Description of the Drawings

[0039] Figure 1 is a three-dimensional structural schematic diagram of the light-emitting stage optical module for carrier board yield detection provided by an embodiment of the present application;

[0040] Figure 2 is a three-dimensional structural schematic diagram of the light-emitting stage of the light-emitting stage optical module for carrier board yield detection provided by an embodiment of the present application;

[0041] Figure 3 is a side view schematic diagram of the light-emitting stage of the light-emitting stage optical module for carrier board yield detection provided by an embodiment of the present application;

[0042] Figure 4 is Figure 3 the schematic cross-sectional view of A-A in

[0043] Figure 5 the three-dimensional structure diagram of the frame of the light-emitting stage optical module for carrier board yield detection provided by the embodiment of the present application;

[0044] Figure 6 the top view of the frame of the light-emitting stage optical module for carrier board yield detection provided by the embodiment of the present application;

[0045] Figure 7 the three-dimensional structure diagram of the support member of the light-emitting stage optical module for carrier board yield detection provided by the embodiment of the present application;

[0046] Figure 8 the three-dimensional structure diagram of the upper glass plate of the light-emitting stage optical module for carrier board yield detection provided by the embodiment of the present application;

[0047] Figure 9 the three-dimensional structure diagram of the pressing member of the light-emitting stage optical module for carrier board yield detection provided by the embodiment of the present application;

[0048] Figure 10 the bottom view of the light-emitting stage of the light-emitting stage optical module for carrier board yield detection provided by the embodiment of the present application.

[0049] Figures 1 to 10 includes the following reference numerals:

[0050] Base 10: Detection station 11;

[0051] Light-emitting stage 20: Air extraction cavity 21, Adsorption hole 22, Glass stage 23, Frame 230, Upper glass plate 231, Lower glass plate 232, Notch 233, Third threaded hole 234, Installation groove 235, Fourth threaded hole 236, Second sealing groove 237, Installation hole 238, Second threaded hole 239, Support member 24, First threaded hole 240;

[0052] Drive mechanism 30;

[0053] Backlight assembly 40: Lifting drive member 41, Backlight source 42;

[0054] Side light source 50: Bracket 51;

[0055] Adsorption assembly 60: Air guide channel 61, First channel 610, Second channel 611, First sealing groove 612, Air guide assembly 62, Air guide block 620, Air extraction pipeline 621, Pressure detection member 622;

[0056] Pressing member 70: mounting portion 71, pressing portion 72, first pressing block 720, second pressing block 721, through hole 73, pressing plate 74. Detailed implementation mode

[0057] To make the technical problems solved by this application, the technical solutions adopted, and the achieved technical effects clearer, the technical solutions of the embodiments of this application will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, rather than all embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative efforts belong to the scope of protection of this application.

[0058] This application proposes a light-emitting stage optical module for carrier board yield detection. Please refer to Figures 1 to 4 As shown, the light-emitting stage optical module for carrier board yield detection proposed in the embodiments of this application includes a base 10, a light-emitting stage 20, a driving mechanism 30, a backlight assembly 40, two side light sources 50, and an adsorption assembly 60. The light-emitting stage 20 is configured to carry and adsorb and fix the carrier board to be detected. An air extraction cavity 21 is provided on the light-emitting stage 20, and a plurality of adsorption holes 22 are provided on the bearing surface of the light-emitting stage 20. The adsorption assembly 60 is configured to extract the air in the air extraction cavity 21 to adsorb and fix the carrier board on the bearing surface of the light-emitting stage 20 through the plurality of adsorption holes 22; a detection station 11 is provided on the base 10, and the light-emitting stage 20 is slidably mounted on the base 10 along a first horizontal direction ( Figure 1 the X direction in

[0059] Specifically, a bracket 51 is vertically provided on both sides of the detection station 11 in the first horizontal direction. Each bracket 51 corresponds to a side light source 50. The side light source 50 is mounted on the top of the bracket 51, and the mounting height and / or mounting angle of the side light source 50 relative to the bracket 51 can be adjusted.

[0060] Specifically, the driving mechanism 30 can adopt a ball screw type linear module or a synchronous belt type linear module.

[0061] The optical module of the light-emitting stage for carrier board yield detection proposed in the embodiments of the present application adds two side light sources 50 on both sides of the detection station 11. When the light-emitting stage 20 is moved to the detection station 11 to detect the carrier board thereon, the two side light sources 50 illuminate the light-emitting stage 20 from both sides of the detection station 11, thereby increasing the brightness of multiple adsorption holes 22, reducing the shadow of the holes, improving the detection accuracy of the carrier board, and meeting the high-precision detection requirements of the carrier board.

[0062] As an implementation manner, the adsorption assembly 60 is arranged on at least one side of the light-emitting stage 20 along the first horizontal direction. The adsorption assembly 60 includes at least one air guide channel 61 and an air guide component 62. The air guide channel 61 is arranged on the light-emitting stage 20, and the first end of the air guide channel 61 is communicated with the air extraction cavity 21; the air guide component 62 includes an air guide block 620 and an air extraction pipeline 621. The air guide block 620 is installed on one side surface of the light-emitting stage 20 along the first horizontal direction and is located below the side light source 50 on this side in the height direction. The air inlet end of the air guide block 620 is communicated with the second end of the air guide channel 61, the first end of the air extraction pipeline 621 is connected to the air outlet end of the air guide block 620, and the second end of the air extraction pipeline 621 is connected to an air extraction device.

[0063] It can be seen that the air extraction device extracts the air in the air extraction cavity 21 through the air extraction pipeline 621, the air guide block 620, and the air guide channel 61, realizing the adsorption and fixation of the carrier board on the bearing surface of the light-emitting stage 20; by installing the air guide block 620 on the side surface of the light-emitting stage 20 and setting the air guide block 620 to be located below the side light source 50 in the height direction, it realizes the avoidance when the light-emitting stage 20 moves in the first horizontal direction, and can meet the application scenario where side light sources are arranged on the side of the light-emitting stage 20.

[0064] As an implementation manner, the light-emitting stage 20 includes a glass stage 23 and two support members 24. The glass stage 23 is configured to carry and adsorb the carrier board to be detected. The air extraction cavity 21 is arranged on the glass stage 23, and multiple adsorption holes 22 are opened on the bearing surface of the glass stage 23; the two support members 24 are arranged at intervals along the second horizontal direction ( Figure 1 the Y direction in [])), the bottom ends of the two support members 24 are slidably installed on the base 10 along the first horizontal direction, the driving end of the driving mechanism 30 is connected to at least one support member 24, and the top ends of the two support members 24 are respectively fixed at both ends of the glass stage 23 along the second horizontal direction. The first horizontal direction is perpendicular to the second horizontal direction.

[0065] Specifically, between the bottom ends of the two support members 24 and the base 10, a support and guiding pair composed of linear guide rails or sliders is provided. The linear guide rails are laid on the base 10 along the first horizontal direction, and the sliders are installed at the bottom ends of the support members 24 and sleeved on the linear guide rails, thereby improving the smoothness of the sliding of the light-emitting stage 20 along the first horizontal direction of the base 10.

[0066] By providing the two support members 24, stable and reliable support for both ends of the glass stage 23 along the second horizontal direction is achieved, ensuring the smoothness of the movement of the glass stage 23 along the first horizontal direction.

[0067] As an implementation manner, the air guide channel 61 includes a first channel 610 and a second channel 611. The first channel 610 is opened on the glass stage 23, and the first end of the first channel 610 is communicated with the air extraction cavity 21; the second channel 611 is opened on the support member 24, the air guide block 620 is horizontally installed on the outer side surface of the support member 24, the first end of the second channel 611 is communicated with the second end of the first channel 610, and the second end of the second channel 611 is communicated with the air guide block 620.

[0068] Specifically, the air guide block 21 is a hollow square structure.

[0069] By setting the air guide channel 61 to include the first channel 610 and the second channel 611, and opening the first channel 610 on the glass stage 23 and the second channel 611 on the support member 24, the air guide channel 61 is integrated on the glass stage 23 and the support member 24, without occupying the external space of the light-emitting stage 20. It is not only structurally compact, occupies a small space, and has a reasonable layout; but also is convenient for processing, has good sealing performance, and is beneficial to improving the adsorption effect of the light-emitting stage 20.

[0070] Please refer to Figure 2 、 Figures 4 to 7 and Figure 10As shown, as an implementation manner, the glass stage 23 is a square structure as a whole. The glass stage 23 includes a frame 230, an upper glass plate 231 and a lower glass plate 232. The upper glass plate 231 is detachably fixed to the top surface of the frame 230 through a first fixing component, and the lower glass plate 232 is detachably and hermetically fixed to the bottom surface of the frame 230 through a second fixing component. The upper glass plate 231, the frame 230 and the lower glass plate 232 enclose an air extraction cavity 21, and a plurality of adsorption holes 22 are formed in the upper glass plate 231; a first channel 610 is formed in the frame 230. The air inlet of the first channel 610 is located on the inner side surface of the frame 230, and the air outlet of the first channel 610 is located on the bottom surface of the frame 230. The air inlet of the second channel 611 is located on the top surface of the support member 24. The air outlet of the first channel 610 is hermetically docked with the air inlet of the second channel 611. The air outlet of the second channel 611 is located on the outer side surface of the support member 24. The air inlet end of the air guide block 21 covers all the air outlets of the second channel 611.

[0071] Specifically, both the first channel 610 and the second channel 611 extend along the first horizontal direction. The cross-sections of the first channel 610 and the second channel 611 in the vertical direction are both "L"-shaped to form an air extraction path with a "Z"-shaped cross-section, reducing the processing difficulty of the first channel 610 and the second channel 611.

[0072] Specifically, a first sealing groove 612 is formed at the air inlet of the second channel 611, and a first sealing ring is arranged in the first sealing groove 612. The air outlet of the first channel 610 is hermetically docked with the air inlet of the second channel 611 through the first sealing ring to ensure the sealing performance of the connection between the first channel 610 and the second channel 611.

[0073] By arranging the air inlet of the first channel 610 on the inner side surface of the frame 230 and the air outlet of the first channel 610 on the bottom surface of the frame 230, the processing difficulty of the first channel 610 is reduced, facilitating the processing of the first channel 610; by arranging the air inlet of the second channel 611 on the top surface of the support member 24 and the air outlet of the second channel 611 on the outer side surface of the support member 24, the processing difficulty of the second channel 611 is reduced, facilitating the processing of the second channel 611.

[0074] Please refer to Figure 2 、 Figures 5 to 9 As shown, as an implementation manner, the first fixing component includes four pressing members 70. The four pressing members 70 are respectively detachably fixed to the four corners of the frame 230 through fixing screws. The bottom surface of each pressing member 70 presses against a corresponding corner of the upper glass plate 231 to fix the upper glass plate 231 to the frame 230.

[0075] Specifically, the pressing member 70 includes an installation portion 71 and a pressing portion 72. Notches 233 for avoiding and limiting the installation portion 71 are provided at the four corners of the upper glass plate 231. A through hole 73 is formed in the installation portion 71, and a third threaded hole 234 is formed in the frame 230. The through hole 73 and the third threaded hole 234 are correspondingly arranged. A fixing screw passes through the through hole 73 and is locked in the corresponding third threaded hole 234 to fixedly install the installation portion 71 on the frame 230. The pressing portion 72 is arranged at the top end of the installation portion 71 and close to the upper glass plate 231. The pressing portion 72 includes a first pressing block 720 and a second pressing block 721 arranged vertically. The first pressing block 720 and the second pressing block 721 respectively press two sides of the corresponding corner of the upper glass plate 231, thereby providing the stability and reliability of the pressing of the pressing member 70.

[0076] The four corners of the upper glass plate 231 are pressed and fixed on the frame 230 by four pressing members 70, realizing the fixed installation of the upper glass plate 231 on the frame 230. The structure is simple and easy to operate. Compared with the conventional method of opening multiple through holes on the edge of the upper glass plate 231 and fixing them with screws, there is no need to open holes on the upper glass plate 231, reducing other unnecessary processing of the upper glass plate 231 before opening the adsorption holes 22, effectively avoiding the damage to the upper glass plate 231 caused by the force exerted when the screws on the upper glass plate 231 move downward or rotate. Moreover, the upper glass plate 231 and the frame 230 are in hard contact, avoiding the influence on the flatness of the upper glass plate 231 due to soft contact between the two, ensuring the flatness of the upper glass plate 231, and being beneficial to improving the detection accuracy of the carrier plate.

[0077] Please refer to Figure 6 and Figure 10 As shown, as an implementation manner, a square installation groove 235 is formed on the bottom surface of the frame 230. The second fixing component includes a plurality of pressing plates 74. The side of the lower glass plate 232 is fixedly installed in the installation groove 235 through a plurality of pressing plates 74, and a sealing ring is arranged between the lower glass plate 232 and the installation groove 235.

[0078] Specifically, the four sides of the lower glass plate 232 are fixedly installed in the installation groove 235 through four pressing plates 74. Each pressing plate 74 presses one side of the lower glass plate 232. A plurality of installation holes are formed through the pressing plate 74, and a fourth threaded hole 236 is formed in the installation groove 235. A fixing screw passes through the installation hole and is locked in the corresponding fourth threaded hole 236 to press the pressing plate 74 against the corresponding side of the lower glass plate 232, thereby fixedly installing the lower glass plate 232 in the installation groove 235.

[0079] Specifically, a square second sealing groove 237 is formed in the installation groove 235, and a second sealing ring is installed in the second sealing groove 237. The lower glass plate 232 and the frame 230 are hermetically connected through the second sealing ring.

[0080] By providing a plurality of pressing plates 235, a second fixing component with stable and reliable installation and uniform distribution of pressing force is provided. The structure is simple and the disassembly and assembly are convenient. At the same time, a sealing ring is provided between the lower glass plate 232 and the installation groove 235, which ensures the sealing performance of the connection between the lower glass plate 232 and the frame 230 and is conducive to the pumping cavity 21 reaching the required negative pressure more quickly.

[0081] As an implementation manner, a plurality of installation holes 238 are formed in the frame 230, and a plurality of first threaded holes 240 are formed in the top surface of the support member 24. Each installation hole 238 corresponds to a first threaded hole 240. The locking screw passes through the installation hole 238 and is locked in the corresponding first threaded hole 240 to fixedly install the frame 230 on the top surface of the support member 24. A plurality of second threaded holes 239 are further formed in the frame 230, and a leveling screw is installed in each second threaded hole 239. The bottom end of the leveling screw abuts against the end surface of the support member 24.

[0082] The frame 230 is detachably fixed to the support member 24 through the locking screw. By providing the leveling screw, during adjustment, the locking screw is loosened and the leveling screw is rotated to level the frame 230, thereby adjusting the levelness of the upper glass plate 231, ensuring the flatness of the upper glass plate 231, and being conducive to improving the detection accuracy of the carrier plate.

[0083] Please refer to Figure 1 and Figure 2 As shown, as an implementation manner, the backlight assembly 40 includes a lifting drive member 41 and a backlight source 42, wherein: the fixed end of the lifting drive member 41 is installed on the base 10, the drive end of the lifting drive member 41 is connected to the backlight source 42, and the lifting drive member 41 is configured to drive the backlight source 42 to lift.

[0084] Specifically, the lifting drive member 41 adopts a manual or automatic linear lifting module.

[0085] The lifting drive member 41 drives the backlight source 42 to lift, thereby adjusting the distance between the backlight source 42 and the glass stage 23 so that the backlight source 42 is at a suitable lighting height.

[0086] As an implementation manner, the backlight source 42 is a parallel light source, and the incident angle of the backlight source 42 is -4° to +4°, preferably: -4°, -3°, -2°, -1°, +1°, +2°, +3° or +4°.

[0087] By setting the backlight light source 42 as a parallel light source, the light projection of the backlight becomes more uniform, further reducing the shadow of the holes, which is beneficial to illuminating the adsorption holes and further improving the detection accuracy of the carrier board. At the same time, by setting the incident angle of the backlight light source 42, the field of view of the backlight light source 42 is increased.

[0088] As an implementation manner, a pressure detection component 622 is installed on the air guide block 620. The detection end of the pressure detection component 622 is located inside the air guide block 620. The pressure detection component 622 is configured to detect the air pressure inside the air guide block 620. Through the pressure detection component 622, the air pressure inside the air guide block 620 is actually detected, and then the air extraction device is controlled to work, ensuring that the adsorption force of the light-emitting stage 20 is always within a suitable range.

[0089] As an implementation manner, the air outlet end of the air guide block 620 is located at the bottom surface of the air guide block 620, and the air extraction pipeline 621 is led out from below the air guide block 620. This makes the air inlet end of the air extraction pipeline 621 hidden below the air guide block 620, with a neat appearance and reasonable layout.

[0090] The general working principle of the light-emitting stage optical module for carrier board yield detection proposed in the embodiments of the present application is as follows:

[0091] S1. First, the driving mechanism 30 drives the light-emitting stage 20 to move to the material taking station to receive the carrier board to be detected, and the adsorption assembly 60 adsorbs and fixes the carrier board on the light-emitting stage 20.

[0092] S2. The driving mechanism 30 moves the light-emitting stage 20 and the carrier board to the detection station 11, and the backlight assembly 40 and the two side light sources 50 at the detection station 11 project light towards the light-emitting stage 20.

[0093] S3. The camera above the detection station 11 takes pictures of the carrier board on the light-emitting stage 20, and then performs visual detection on the carrier board.

[0094] The above embodiments only illustrate the basic principles and characteristics of the present application. The present application is not limited by the above examples. Without departing from the spirit and scope of the present application, there are various changes and alterations to the present application, and these changes and alterations all fall within the scope of the present application claimed. The scope of protection claimed by the present application is defined by the appended claims and their equivalents.

Claims

1. A light-emitting stage optical module for substrate yield detection, characterized in that: The light-emitting stage optical module for substrate yield detection comprises a base, a light-emitting stage, a driving mechanism, a backlight source assembly, two side light sources and an adsorption assembly, wherein: The light-emitting stage is configured to carry and adsorb and fix the carrier to be tested, an air extraction cavity is provided on the light-emitting stage, a plurality of adsorption holes are opened on the carrying surface of the light-emitting stage, and the adsorption component is configured to extract air in the air extraction cavity to adsorb and fix the carrier on the carrying surface of the light-emitting stage through the plurality of adsorption holes; The base is provided with a detection station, the light-emitting stage can be slidably mounted on the base along a first horizontal direction, the driving mechanism is mounted on the base, the driving end of the driving mechanism is connected to the light-emitting stage, and the driving mechanism is configured to drive the light-emitting stage to slide along the first horizontal direction so that the light-emitting stage moves to or leaves the detection station; The backlight source assembly is disposed at the inspection station, and the backlight source assembly is configured to illuminate upward toward the light-emitting carrier at the inspection station; The two side light sources are respectively arranged on both sides of the detection station along the first horizontal direction, and the two side light sources are configured to illuminate the light-emitting carrier at the detection station on both sides of the detection station to brighten the multiple adsorption holes.

2. The light-emitting stage optical module for substrate yield detection according to claim 1, characterized in that: The adsorption component is arranged on at least one side of the light-emitting stage along the first horizontal direction, and the adsorption component includes at least one air guide channel and an air guide component, wherein: The air guide channel is arranged on the light-emitting stage, and the first end of the air guide channel is connected to the air extraction cavity; The air guide assembly includes an air guide block and an air exhaust pipeline. The air guide block is installed on a side surface of the light-emitting carrier along the first horizontal direction and is located below the side light source on this side in the height direction. The air inlet end of the air guide block is connected to the second end of the air guide channel, the first end of the air exhaust pipeline is connected to the air outlet end of the air guide block, and the second end of the air exhaust pipeline is connected to the air exhaust device.

3. The light-emitting stage optical module for substrate yield detection according to claim 2, characterized in that: The light-emitting stage comprises a glass stage and two supporting members, wherein: The glass stage is configured to carry and adsorb the carrier plate to be tested, the vacuum cavity is arranged on the glass stage, and the plurality of adsorption holes are arranged on the carrying surface of the glass stage; The two support members are spaced apart along the second horizontal direction, the bottom ends of the two support members can be slidably mounted on the base along the first horizontal direction, the driving end of the driving mechanism is connected to at least one of the support members, the top ends of the two support members are respectively fixed to the two ends of the glass carrier along the second horizontal direction, and the first horizontal direction is perpendicular to the second horizontal direction.

4. The light-emitting stage optical module for substrate yield detection according to claim 3, characterized in that: The air guide channel comprises a first channel and a second channel, wherein: The first channel is opened on the glass stage, and the first end of the first channel is connected to the air extraction cavity; The second channel is opened on the support member, the air guide block is horizontally installed on the outer side of the support member, the first end of the second channel is connected to the second end of the first channel, and the second end of the second channel is connected to the air guide block.

5. The light-emitting stage optical module for substrate yield detection according to claim 4, characterized in that: The glass stage is a square structure as a whole, and comprises a frame, an upper glass plate and a lower glass plate, wherein: The upper glass plate is detachably fixed to the top surface of the frame by a first fixing assembly, and the lower glass plate is detachably sealed and fixed to the bottom surface of the frame by a second fixing assembly. The upper glass plate, the frame and the lower glass plate form the exhaust cavity, and the plurality of adsorption holes are provided on the upper glass plate; The first channel is opened on the frame, the air inlet of the first channel is located on the inner side of the frame, the air outlet of the first channel is located on the bottom surface of the frame, the air inlet of the second channel is located on the top surface of the support, the air outlet of the first channel is sealed and connected with the air inlet of the second channel, the air outlet of the second channel is located on the outer side of the support, and the air inlet end of the air guide block covers all the air outlets of the second channel.

6. The light-emitting stage optical module for substrate yield detection according to claim 5, characterized in that: The first fixing assembly includes four clamping members, which are detachably fixed to the four corners of the frame by fixing screws, and the bottom surface of each clamping member presses against a corresponding corner of the upper glass plate to fix the upper glass plate on the frame.

7. The light-emitting stage optical module for substrate yield detection according to claim 5, characterized in that: A square mounting groove is provided on the bottom surface of the frame, and the second fixing assembly includes a plurality of pressing plates, and the side edges of the lower glass plate are fixedly installed in the mounting groove through the plurality of pressing plates, and a sealing ring is provided between the lower glass plate and the mounting groove.

8. The light-emitting stage optical module for substrate yield detection according to claim 3, characterized in that: The frame is provided with a plurality of mounting holes, the top surface of the support is provided with a plurality of first threaded holes, each of the mounting holes corresponds to one of the first mounting holes, and a locking screw passes through the mounting hole and is locked in the corresponding first threaded hole to fix the frame on the top surface of the support; The frame is also provided with a plurality of second threaded holes, each of which is provided with a leveling screw, and the bottom end of the leveling screw abuts against the end surface of the support member.

9. The light-emitting stage optical module for substrate yield detection according to claim 1, characterized in that: The backlight source assembly includes a lifting driving member and a backlight source, wherein: The fixed end of the lifting driving member is installed on the base, the driving end of the lifting driving member is connected to the backlight source, and the lifting driving member is configured to drive the backlight source to rise and fall.

10. The light-emitting stage optical module for substrate yield detection according to claim 9, characterized in that: The backlight source is a parallel light source, and the incident angle of the backlight source is -4° to +4°.

Images