Matching method suitable for matcher with large standing-wave ratio, electronic equipment and readable medium

Abstract

The invention discloses a matcher matching method suitable for a large standing-wave ratio, electronic equipment and a readable medium, and the matcher matching method suitable for the large standing-wave ratio comprises the steps: S1, setting an adjustment unit D of a minimum detection standing-wave ratio; s2, detecting a standing-wave ratio; s3, calculating the position of a matching point of the CL capacitor and the CT capacitor through a model algorithm; s4, if the calculation result is an effective value, the position capacitance values of the CL capacitor and the CT capacitor are adjusted towards the direction of the effective value, and the adjustment value is D; s5, judging whether the adjusted position capacitance values of the CL capacitor and the CT capacitor reach a matching point or not, and if yes, completing matching; if not, returning to the step S2; and step S6, if the calculation result is no solution or an error value, the position capacitance values of the CL capacitor and the CT capacitor are adjusted to the intermediate value direction, the adjustment value is K * D, and the step S2 is returned. According to the invention, matching at any position is realized.

Description

Background Art

[0002] In the actual application scenario of radio frequency power supply matching, quickly achieving matching is one of the key factors to ensure the efficient and stable operation of the system. Currently, the automatic matching mode has become the main way to achieve quick matching due to its automation and efficiency. Among the many implementation means of automatic matching, the matching method based on model algorithm is favored because it can quickly determine the matching parameters. The core principle of this model algorithm is to directly obtain the matching positions of two capacitors through precise mathematical calculations, so that the system can quickly reach the matching point. This method significantly improves the matching speed to a certain extent and reduces the time cost required for matching. However, this model algorithm also has obvious limitations.

[0003] When the system is in a working state with a very large voltage standing wave ratio (VSWR), the drawbacks of this algorithm will become prominent. In this case, due to the large reflection, even approaching infinity, the positions of the two capacitors calculated by the model algorithm often have no solution or obtain incorrect values. Specifically, this model algorithm finally determines the capacitor positions by solving a binary linear equation. When the VSWR is very large, the strong interference of the reflected signal changes the solution conditions of the equation, resulting in an inability to obtain the correct solution, and thus the matching fails.

[0004] Through a large number of experiments and practical application verifications, it is found that this model algorithm can only function well and achieve stable matching within the range where the VSWR is less than 50. Once beyond this range, the accuracy and reliability of the matching cannot be guaranteed.

[0005] Therefore, in an unknown impedance load, the matcher needs to first accurately determine the matching point and reasonably limit the range of the matching point in order to match accurately and reliably. It cannot match at any position, and there are certain limitations. Summary of the Invention

[0006] In order to overcome the problem that in an unknown load impedance, the matcher needs to first limit the position to perform matching in the existing radio frequency power supply matching method, the present invention provides a matcher matching method, an electronic device, and a readable medium applicable to a large VSWR.

[0007] The technical solution of the present invention is described as follows:

[0008] In the first aspect, the present invention provides a matcher matching method applicable to a large VSWR, including:

[0009] Step S1: Set the adjustment unit D of the minimum detected VSWR, and D is a percentage;

[0010] Step S2: Detect the VSWR;

[0011] Step S3: Calculate the position of the matching point of the CL capacitor and the CT capacitor through a model algorithm;

[0012] Step S4: If the calculation result is a valid value, adjust the position capacitance values of the CL capacitor and the CT capacitor in the direction of the valid value, and the adjustment value is D;

[0013] Step S5: Determine whether the position capacitance values of the adjusted CL capacitor and CT capacitor reach the matching point. If so, the matching is completed; if not, return to Step S2;

[0014] Step S6: If the calculation result is no solution or an error value, adjust the position capacitance values of the CL capacitor and the CT capacitor in the direction of the intermediate value, and the adjustment value is K*D, where K is a positive integer, and return to Step S2.

[0015] As a preferred solution of the present invention, the model algorithm is the Model Basi algorithm.

[0016] As a preferred solution of the present invention, the value range of D is 1-3%.

[0017] As a preferred solution of the present invention, the value of D is 2%.

[0018] As a preferred solution of the present invention, the value range of K is 2-10.

[0019] As a preferred solution of the present invention, the value of K is 2.

[0020] As a preferred solution of the present invention, the value of K is 3.

[0021] As a preferred solution of the present invention, the value of K is 5.

[0022] In a second aspect, the present invention provides an electronic device, including at least one processing unit and at least one storage unit. The storage unit stores program code. When the program code is executed by the processing unit, the processing unit executes the matcher matching method applicable to a large voltage standing wave ratio according to any of the above solutions.

[0023] In a third aspect, the present invention provides a computer-readable medium storing computer-executable instructions for executing the matcher matching method applicable to a large voltage standing wave ratio according to any of the above solutions.

[0024] According to the present invention of the above solution, its beneficial effects are as follows:

[0025] A matching method for a matcher applicable to a large voltage standing wave ratio provided by the present invention can gradually approach the correct matching point through setting an adjustment unit, dynamically adjusting the capacitance position, and combining a model algorithm for multiple calculations and detections, realizing effective matching of the radio frequency matcher in an environment with a large voltage standing wave ratio, improving the success rate and accuracy of matching, and enhancing the stability and performance of the radio frequency system. Compared with the traditional matching method with only a model algorithm, the present invention can perform matching at any position under unknown load impedance, is more simple and convenient to apply, reduces the previous debugging that restricts the capacitance position, and avoids no action when the result cannot be calculated. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 FIG. is a schematic flow chart of a matching method for a matcher applicable to a large voltage standing wave ratio in an embodiment of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0027] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0028] It should be noted that the terms "including" and "having" and any variations thereof in the description and claims of the present invention are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but optionally further includes steps or units not listed, or optionally further includes other steps or units inherent to these processes, methods, products or devices.

[0029] In a radio frequency matcher, matching is mainly achieved by adjusting the Load capacitor and Tune capacitor (abbreviated as CL capacitor and CT capacitor) in the matcher. The position and capacitance value of these two capacitors are represented by percentages (0% - 100%), and the matching point is set within this range. Under normal circumstances, for a load with a matching point, if the starting positions of both capacitors are at 50%, the voltage standing wave ratio vswr will not be very large, within 50, and the position of the matching point can be calculated through two or three Model Basi algorithms. However, when the starting positions of the two capacitors are at CL 0%, CT 0% or CL 100%, CT 0% or CL 0%, CT 100% or CL 100%, CT 100%, the voltage standing wave ratio vswr may be very large, resulting in no solution or inaccurate results calculated by the model algorithm.

[0030] Based on the above situation, as Figure 1 shown, an embodiment of the present invention provides a matching method for a matcher applicable to a large voltage standing wave ratio, including the following steps:

[0031] Step S1: Set the adjustment unit D of the minimum detected voltage standing wave ratio (VSWR), where D is a percentage, providing a quantitative basis for the subsequent real-time adjustment of the target value of the matching point, making the entire matching process controllable and repeatable.

[0032] Among them, the value range of D is generally 1 - 3%, to ensure the accuracy of each adjustment. Preferably, the value of D is 2%, which can adjust the matching point more precisely and avoid missing the optimal matching point due to excessive adjustment amplitude. If D = 2%, it means that the VSWR needs to be detected every time the capacitance position is adjusted by more than 2%. The target matching point through the model algorithm means that the VSWR can be detected every time the capacitance position is adjusted by more than 2% to achieve the real-time adjustment of the target value of the matching point.

[0033] Step S2: Detect the VSWR. By detecting the VSWR, the matching state of the RF system at the current positions of the CL capacitor and the CT capacitor can be understood in real time. The VSWR is an important indicator to measure the matching effect, and this step provides key data for subsequent judgment of whether the matching point is reached and whether the capacitance position needs to be further adjusted.

[0034] Step S3: Calculate the positions of the matching points of the CL capacitor and the CT capacitor through the model algorithm. This step attempts to calculate the positions of the matching points to provide a direction for the subsequent adjustment of the capacitance position.

[0035] Among them, the model algorithm is the Model Basi algorithm. When the VSWR is relatively small (normally, when the initial capacitance position is 50%, the VSWR is within 50), this algorithm can quickly and accurately calculate the position of the matching point. In the RF matching scenario, the Model Basi algorithm calculates the positions of the matching points of the CL capacitor and the CT capacitor based on circuit theory and mathematical models. By using known circuit parameters, measured VSWR, and impedance information at both ends of the power supply, equations are established and solved to determine the capacitance values of the CL capacitor and the CT capacitor that can achieve impedance matching between the power supply and the load.

[0036] Step S4: If the calculation result is valid, adjust the capacitance values of the CL capacitor and the CT capacitor in the direction of the valid value, and the adjustment value is D. This step, when the calculation result is valid, adjusts the capacitance values of the capacitors in the direction of the valid value with a small adjustment value D, which helps to make fine adjustments when approaching the matching point. During the process of adjusting the capacitance values of the CL capacitor and the CT capacitor in the direction of the valid value, the matching point will be gradually approached. After each adjustment, the VSWR is detected again and the model algorithm is calculated to gradually narrow the gap with the matching point and improve the accuracy of the matching.

[0037] Step S5: Judge whether the capacitance values of the adjusted CL capacitor and CT capacitor reach the matching point. If so, the matching is completed; if not, return to Step S2.

[0038] This step forms a closed-loop control process by continuously judging whether the capacitance position reaches the matching point. After each adjustment of the capacitance position, detection and judgment are carried out. If the matching point is not reached, the detection and adjustment steps are repeated until the matching is completed, ensuring that the matching point can be accurately found finally. The standing wave ratio is detected after each adjustment of the capacitance position, and the target value of the matching point is adjusted in real time, so that the matching process can be dynamically optimized according to the actual situation and the matching efficiency can be improved.

[0039] Step S6: If the calculation result is no solution or an error value, adjust the position capacitance values of the CL capacitor and the CT capacitor towards the middle value, and the adjustment value is K*D, where K is a positive integer and is an editable multiple value, and return to step S2.

[0040] When the model algorithm calculation result has no solution or is incorrect, it indicates that the current capacitance position may be in an extreme situation, resulting in an excessive standing wave ratio and the algorithm failure. At this time, the capacitance position is adjusted towards the middle value (50%) with a relatively large adjustment value K*D, which can quickly change the capacitance position, jump out of the current state that is not suitable for calculation, and reduce the detection times. By adjusting the value of K, a balance can be found between reducing the detection times and avoiding missing the best matching point. The larger the K value, the faster the capacitance is adjusted, the fewer the detection times, but there is a risk of passing the best matching point; the smaller the K value, the slower the adjustment, the more the detection times, but it is more likely to accurately find the matching point. Reasonably setting the K value according to the value of D can optimize the matching process. For example, if the value of D is 1%, the value of K can be 10; if the value of D is 2%, the value of K can be 5; if the value of D is 3%, the value of K can be 2 or 3.

[0041] In one embodiment, the value range of K is 2-10. The K value range of 2-10 can ensure that the position capacitance values of the CL capacitor and the CT capacitor are adjusted towards the middle value with a relatively large adjustment value (K*D). Compared with only adjusting D each time (such as D = 2%), this relatively large adjustment can make the capacitance position get out of the extreme situation faster and enter the range where the algorithm can effectively calculate, thereby reducing unnecessary detection times and improving the matching efficiency.

[0042] The radio frequency matcher matching method of the above embodiment can gradually approach the correct matching point by setting the adjustment unit, dynamically adjusting the capacitance position and combining the model algorithm for multiple calculations and detections, realizing the effective matching of the radio frequency matcher in a large standing wave ratio environment, improving the success rate and accuracy of the matching, and enhancing the stability and performance of the radio frequency system; compared with the traditional matching method with only the model algorithm, the present invention can perform matching at any position under unknown load impedance, is more simple and convenient to apply, reduces the previous debugging that limits the capacitance position, and avoids no action when the result cannot be calculated.

[0043] The following uses a specific embodiment to elaborate in detail on the matching method of the RF matcher of the present invention:

[0044] For example, the starting position of the CL capacitor is 0% and the starting position of the CT capacitor is 0% (CL 0% and CT 0%), and the position of the matching point of the load is CL 41% and CT 78%.

[0045] First, set the adjustment unit D of the minimum detected voltage standing wave ratio vswr. For example, D = 2%. The voltage standing wave ratio detected when the CL capacitor and the CT capacitor are at the starting position is 86. Through the Model Basi algorithm, the position of the matching point of the CL capacitor and the CT capacitor is unsolvable (the equation has no solution), or the solution obtained is an error value. Because both the CL capacitor and the CT capacitor have a minimum capacitance value. The minimum capacitance value of the CL capacitor is 150, and the minimum capacitance value of the CT capacitor is 50. If the calculation result is smaller than the minimum capacitance value, it is an error value.

[0046] Since the calculation result is unsolvable or an error value, adjust the position capacitance values of the CL capacitor and the CT capacitor in the direction of the middle value. The adjustment value is K*D. For example, K = 5, and the adjustment value is 10%. In this way, the position capacitance values of the capacitors can be adjusted by a large margin, so that the capacitor positions are separated from the extreme situations and enter the range where the algorithm can effectively calculate, thereby reducing unnecessary detection times and improving the matching efficiency.

[0047] During the process of adjusting the CL capacitor and the CT capacitor in the direction of the middle value, valid values will start to appear. They may not be very accurate, but the trend is correct. For example, when CL is 10% and CT is 10%, the calculated matching point is CL 35% and CT 80%. Although it is not accurate, the adjustment direction is correct. In this way, detect the voltage standing wave ratio vswr every time D is moved, and adjust the target value of the matching point in real time, and finally stop at the correct target value.

[0048] Those skilled in the art can understand that various aspects of the present invention can be implemented as a system, a method, or a program product. Therefore, various aspects of the present invention can be specifically implemented in the following forms, namely: a complete hardware implementation, a complete software implementation (including firmware, microcode, etc.), or an implementation combining hardware and software aspects, which can be collectively referred to as "circuit", "module", or "system" here.

[0049] Any number of modules, sub-modules, units, and sub-units according to this embodiment, or at least some functions of any of them, can be implemented in one module. Any one or more of the modules, sub-modules, units, and sub-units according to this embodiment can be split into multiple modules for implementation. Any one or more of the modules, sub-modules, units, and sub-units according to this embodiment can be at least partially implemented as a hardware circuit, such as a field-programmable gate array (FPGA), programmable logic array (PLA), system-on-chip, system-on-substrate, system-on-package, application-specific integrated circuit (ASIC), or can be implemented by any other reasonable way of integrating or packaging circuits in hardware or firmware, or can be implemented in any one of the three implementation manners of software, hardware, and firmware, or in any appropriate combination of several of them. Alternatively, one or more of the modules, sub-modules, units, and sub-units according to this embodiment can be at least partially implemented as a computer program module, and when the computer program module runs, it can execute the corresponding functions.

[0050] In one embodiment, the present invention provides an electronic device that may include at least one processing unit and at least one storage unit. Among them, the storage unit stores program code, and when the program code is executed by the processing unit, the processing unit is caused to execute the steps in the matching of the matcher applicable to a large voltage standing wave ratio (VSWR) described above in this specification according to various exemplary embodiments of the present invention. For example, the processing unit may execute the process of the method for matching the matcher applicable to a large VSWR as Figure 1 shown.

[0051] In one embodiment, the present invention provides a computer-readable medium that stores computer-executable instructions for executing the steps in the method for matching the matcher applicable to a large VSWR described above in this specification according to various exemplary embodiments of the present invention.

[0052] The readable medium may be a readable signal medium or a readable storage medium. The readable storage medium may be, for example, but not limited to, an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or any combination of the above. The readable signal medium may include a data signal propagated in a baseband or as part of a carrier wave, in which the readable program code is carried. The readable signal medium may also be any readable medium other than the readable storage medium, and this readable medium can send, propagate, or transmit a program used by or in combination with an instruction execution system, apparatus, or device. The program code contained on the readable medium can be transmitted by any appropriate medium, including - but not limited to - wireless, wired, optical fiber, RF, etc., or any suitable combination of the above.

[0053] In addition, although the operations of the method of the present invention are described in a specific order in the drawings, this does not require or imply that these operations must be performed in that specific order, or that all of the operations shown must be performed to achieve the desired result. Additionally or alternatively, some steps may be omitted, multiple steps may be combined into one step for execution, and / or one step may be decomposed into multiple steps for execution.

[0054] It should be understood that those of ordinary skill in the art can make improvements or transformations based on the above description, and all such improvements and transformations should fall within the protection scope of the appended claims of the present invention.

[0055] The above has made an exemplary description of the present invention patent in conjunction with the drawings. Obviously, the implementation of the present invention patent is not limited by the above-mentioned manner. As long as various improvements are made by adopting the method concept and technical solution of the present invention patent, or the concept and technical solution of the present invention patent are directly applied to other occasions without improvement, they are all within the protection scope of the present invention.

Claims

1. A matching method for a matching device with a large standing wave ratio, characterized in that: include: Step S1, setting the adjustment unit D of the minimum detection standing wave ratio, where D is a percentage; Step S2, detecting the standing wave ratio; Step S3, calculating the positions of the matching points of the CL capacitor and the CT capacitor by using a model algorithm; Step S4, if the calculation result is an effective value, adjusting the position capacitance of the CL capacitor and the CT capacitor toward the effective value, and the adjustment value is D; Step S5, judging whether the adjusted position capacitance values ​​of the CL capacitor and the CT capacitor reach the matching point, if so, the matching is completed; if not, returning to step S2; Step S6: If the calculation result is no solution or an erroneous value, adjust the position capacitance of the CL capacitor and the CT capacitor toward the middle value, the adjustment value is K*D, K is a positive integer, and return to step S2.

2. The matching method for a matching device with a large standing wave ratio according to claim 1, characterized in that: The model algorithm is the Model Basi algorithm.

3. The matching method for a matching device with a large standing wave ratio according to claim 1, characterized in that: The value range of D is 1-3%.

4. The matching method for a matching device with a large standing wave ratio according to claim 3, characterized in that: The value of D is 2%.

5. The matching method for a matching device with a large standing wave ratio according to claim 1, characterized in that: The value range of K is 2-10.

6. The matching method for a matching device with a large standing wave ratio according to claim 5, characterized in that: The value of K is 2.

7. The matching method for a matching device with a large standing wave ratio according to claim 5, characterized in that: The value of K is 3.

8. The matching method for a matching device with a large standing wave ratio according to claim 1, characterized in that: The value of K is 5.

9. An electronic device, characterized in that: It includes at least one processing unit and at least one storage unit, wherein the storage unit stores program code. When the program code is executed by the processing unit, the processing unit executes the matching method for a matcher with a large standing wave ratio as described in any one of claims 1 to 8.

10. A computer-readable medium storing computer-executable instructions, characterized in that: The computer executable instructions are used to execute the matching method for a matcher with a large standing wave ratio as described in any one of claims 1 to 8.

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