Parallel fine adjustment mechanism

Abstract

The invention provides a parallel fine adjustment mechanism which comprises a parallel fine adjustment movable frame, a rotary sliding mechanism and a driving mechanism, the rotary sliding mechanism is located below the parallel fine adjustment movable frame and connected with the parallel fine adjustment movable frame, and the rotary sliding mechanism comprises a rotary sliding base and a rotary sliding assembly. The rotary sliding assembly is located on the rotary sliding base and connected with the parallel fine adjustment movable frame to drive the parallel fine adjustment movable frame to move on the XOY plane, the X direction is perpendicular to the Y direction, and the driving mechanism is located below the rotary sliding mechanism and connected with the rotary sliding mechanism. The driving mechanism is used for driving the rotary sliding assembly to rotate so as to drive the parallel fine-tuning movable frame to move. According to the parallel micro mechanism, a mechanism for adjusting the X coordinates and a mechanism for adjusting the Y coordinates are combined into a whole, the size of the micro mechanism is miniaturized, the micro mechanism can work in a narrow space, and meanwhile the performance that the stability is high and the speed is easy to control is met.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor sorter accessories and relates to a parallel fine-tuning mechanism. Background Art

[0002] When semiconductor sorter equipment such as chip grasping, automatic optical inspection (AOI for short) adjusts the chip position, and chip testing is carried out, it is necessary to finely adjust multiple degrees of freedom of the chip. Generally, a scheme of combining multiple single-degree-of-freedom bases in series is used to achieve fine adjustment of multiple degrees of freedom. This structure has low rigidity, occupies a large space, and the rotational degrees of freedom do not have concentricity. The rigidity at the end of the series structure is large, which is prone to structural crosstalk and causes large errors.

[0003] The parallel mechanism uses a closed-loop mechanism composed of multiple parallel chains. Compared with the series mechanism, it has obvious advantages. The number of components is greatly reduced, and it is easy to achieve assembly and modularization. It can generate up to 6 translational and rotational degrees of freedom, and the rotational degrees of freedom have concentricity. It also has the advantages of small occupied space and high rigidity of the structure, and has been widely used in fields such as multi-degree-of-freedom machine tools and large robots. Among them, the 3-(2SPS) parallel mechanism belongs to a parallel mechanism with few degrees of freedom. Compared with the commonly used 6-SPS parallel mechanism, it only has two rotational degrees of freedom and one translational degree of freedom, which meets the need for fine adjustment during the installation of semiconductor sorter equipment. It has relatively few structural parts, so it can be used as a multi-degree-of-freedom parallel XY coordinate fine-tuning base. However, the existing such mechanisms on the market have a single type, and the mechanisms for adjusting the X coordinate and the mechanisms for adjusting the Y coordinate work independently. It is necessary to ensure a sufficiently large space inside the semiconductor sorter to install multiple fine-tuning mechanisms for adjusting the X coordinate and the Y coordinate, resulting in low space utilization rate, being not conducive to miniaturization, and each fine-tuning mechanism works independently, making it difficult to ensure the stability of position adjustment.

[0004] Therefore, how to provide a parallel fine-tuning mechanism to realize a parallel fine-tuning mechanism device that combines the mechanism for adjusting the X coordinate and the mechanism for adjusting the Y coordinate, realizes the miniaturization of the volume of the fine-tuning mechanism, can work in a narrow space, and at the same time meets the performance of high stability has become an important technical problem that needs to be solved urgently by those skilled in the art.

[0005] It should be noted that the above introduction of the technical background is only for the convenience of clearly and completely explaining the technical solutions of the present application and facilitating the understanding of those skilled in the art. It cannot be considered that the above technical solutions are well-known to those skilled in the art just because these solutions are described in the background art part of the present application. Summary of the Invention

[0006] In view of the above-mentioned disadvantages of the prior art, the purpose of the present invention is to provide a parallel fine-tuning mechanism, which is used to solve the problems in the prior art that the mechanisms for adjusting the X coordinate and the Y coordinate in a semiconductor sorter work independently, which is not conducive to miniaturization and it is difficult to ensure the stability of position adjustment.

[0007] To achieve the above object and other related objects, the present invention provides a parallel fine-tuning mechanism, including:

[0008] A parallel fine-tuning movable frame;

[0009] A rotary sliding mechanism, located below the parallel fine-tuning movable frame and connected to the parallel fine-tuning movable frame. The rotary sliding mechanism includes a rotary sliding base and a rotary sliding component. The rotary sliding component is located on the rotary sliding base and is connected to the parallel fine-tuning movable frame to drive the parallel fine-tuning movable frame to move in the XOY plane, where the X direction is perpendicular to the Y direction;

[0010] A driving mechanism, located below the rotary sliding mechanism and connected to the rotary sliding mechanism. The driving mechanism is used to drive the rotary sliding component to rotate so as to drive the movement of the parallel fine-tuning movable frame.

[0011] Optionally, the rotary sliding component includes a plurality of rotative pair members arranged at intervals, and a plurality of sliding pair members arranged at intervals are provided on the parallel fine-tuning movable frame. The plurality of rotative pair members are connected to the plurality of sliding pair members in one-to-one correspondence and cooperate to drive the parallel fine-tuning movable frame to move.

[0012] Optionally, the rotative pair member includes at least one of an eccentric wheel and a sliding bearing type rotary pair, and the sliding pair member includes at least one of a chute and a slide rail.

[0013] Optionally, a first chute, a second chute and a third chute are provided on one side of the parallel fine-tuning movable frame facing the rotary sliding base. The rotary sliding component includes a first eccentric wheel, a second eccentric wheel and a third eccentric wheel. The rotary sliding base includes a first groove, a second groove and a third groove. The bottom of the first eccentric wheel is embedded in the first groove, the bottom of the second eccentric wheel is embedded in the second groove, and the bottom of the third eccentric wheel is embedded in the third groove. The top of the first eccentric wheel is embedded in the first chute to slide in the extending direction of the first chute, the top of the second eccentric wheel is embedded in the second chute to slide in the extending direction of the second chute, and the top of the third eccentric wheel is embedded in the third chute to slide in the extending direction of the third chute.

[0014] Optionally, the extending direction of the first sliding groove is parallel to that of the second sliding groove, and the extending direction of the third sliding groove is perpendicular to that of the second sliding groove.

[0015] Optionally, the extending direction of the first sliding groove coincides with that of the second sliding groove, and the extending direction of the third sliding groove coincides with the axis of the second sliding groove along the X direction.

[0016] Optionally, the driving mechanism includes a first driving motor, a second driving motor and a third driving motor which are arranged at intervals. The first driving motor penetrates through the first eccentric wheel in the Z direction and is connected to the parallel fine-tuning movable frame. The second driving motor penetrates through the second eccentric wheel in the Z direction and is connected to the parallel fine-tuning movable frame. The third driving motor penetrates through the third eccentric wheel in the Z direction and is connected to the parallel fine-tuning movable frame. The Z direction is perpendicular to the XOY plane.

[0017] Optionally, the parallel fine-tuning movable frame is provided with a protruding portion facing the rotary sliding base, and the rotary sliding base is further provided with a fourth groove. The bottom end of the protruding portion extends into the fourth groove.

[0018] Optionally, the movement of the parallel fine-tuning movable frame in the XOY plane includes at least one of translation and rotation.

[0019] Optionally, it further includes a control component, and the control component is connected to the driving mechanism.

[0020] As described above, the parallel fine-tuning mechanism of the present invention includes a parallel fine-tuning movable frame, a rotary sliding mechanism and a driving mechanism. The rotary sliding mechanism is located below the parallel fine-tuning movable frame and is connected to the parallel fine-tuning movable frame. The rotary sliding mechanism includes a rotary sliding base and a rotary sliding component. The rotary sliding component is located on the rotary sliding base and is connected to the parallel fine-tuning movable frame to drive the parallel fine-tuning movable frame to move in the XOY plane. The X direction is perpendicular to the Y direction. The driving mechanism is located below the rotary sliding mechanism and is connected to the rotary sliding mechanism. The driving mechanism is used to drive the rotary sliding component to rotate so as to drive the movement of the parallel fine-tuning movable frame. The parallel fine-tuning mechanism of the present invention combines the mechanism for adjusting the X coordinate and the mechanism for adjusting the Y coordinate into one, realizes the miniaturization of the volume of the fine-tuning mechanism, can work in a narrow space, and simultaneously meets the performance of high stability and easy speed control. Description of the Drawings

[0021] Figure 1 It shows a front view schematic diagram of the overall structure of the parallel fine-tuning mechanism of the present invention.

[0022] Figure 2 Shown as Figure 1Explosion schematic diagram of the shown structure.

[0023] Figure 3 Shown as the bottom view schematic diagram of the parallel fine-tuning movable frame in the parallel fine-tuning mechanism of the present invention.

[0024] Figure 4 Shown as the bottom view structural schematic diagram presented when the rotary sliding component is connected to the parallel fine-tuning movable frame in the parallel fine-tuning mechanism of the present invention.

[0025] Figure 5 Shown as Figure 3 The side view schematic diagram of the shown structure.

[0026] Figure 6 Shown as the structural schematic diagram presented when the first eccentric wheel and the second eccentric wheel in the parallel fine-tuning mechanism of the present invention perform horizontal calibration.

[0027] Figure 7 Shown as the structural schematic diagram presented when the first eccentric wheel and the third eccentric wheel in the parallel fine-tuning mechanism of the present invention perform vertical calibration.

[0028] Element number description

[0029] 1 Parallel fine-tuning movable frame

[0030] 11 First sliding groove

[0031] 12 Second sliding groove

[0032] 13 Third sliding groove

[0033] 14 Protrusion

[0034] 2 Rotary sliding mechanism

[0035] 21 Rotary sliding base

[0036] 211 First groove

[0037] 212 Second groove

[0038] 213 Third groove

[0039] 214 Fourth groove

[0040] 22 Rotary sliding component

[0041] 221 First eccentric wheel

[0042] 222 Second eccentric wheel

[0043] 223 Third eccentric wheel

[0044] 3 Driving mechanism

[0045] 31 First driving motor

[0046] 311 First motor main body

[0047] 312 First drive shaft

[0048] 32 Second drive motor

[0049] 321 Second motor main body

[0050] 322 Second drive shaft

[0051] 33 Third drive motor

[0052] 331 Third motor main body

[0053] 332 Third drive shaft Detailed implementation manners

[0054] The following uses specific specific examples to illustrate the implementation manners of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation manners. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.

[0055] Please refer to FIGS. 1 to Figure 7 . It should be noted that the diagrams provided in this embodiment only illustrate the basic concept of the present invention in a schematic manner. Therefore, only the components related to the present invention are shown in the diagrams, rather than being drawn according to the number, shape, and size of the components during actual implementation. The type, quantity, and ratio of each component during actual implementation can be arbitrarily changed, and the component layout type may also be more complex.

[0056] Embodiment 1

[0057] This embodiment provides a parallel fine-tuning mechanism. Please refer to Figure 1 , which shows a front view schematic diagram of the overall structure of the parallel fine-tuning mechanism. The parallel fine-tuning mechanism includes a parallel fine-tuning movable frame 1, a rotary sliding mechanism 2, and a driving mechanism 3.

[0058] Specifically, please refer to Figure 2 , which shows an exploded schematic diagram of the structure shown in Figure 1 . The rotary sliding mechanism 2 is located below the parallel fine-tuning movable frame 1 and is connected to the parallel fine-tuning movable frame 1. The rotary sliding mechanism 2 includes a rotary sliding base 21 and a rotary sliding assembly 22. The rotary sliding assembly 22 is located on the rotary sliding base 21 and is connected to the parallel fine-tuning movable frame 1 to drive the parallel fine-tuning movable frame 1 to move in the XOY plane, where the X direction is perpendicular to the Y direction.

[0059] Specifically, the driving mechanism 3 is located below the rotating sliding mechanism 2 and connected to the rotating sliding mechanism 2. The driving mechanism 3 is used to drive the rotating sliding assembly 22 to rotate, thereby driving the movement of the parallel fine-tuning movable frame 1. The rotating sliding base 21 is fixedly connected to the driving mechanism 3.

[0060] As an example, the movement of the parallel fine-tuning movable frame 1 on the XOY plane includes at least one of translation and rotation, that is, the parallel fine-tuning movable frame 1 can move along the X direction, along the Y direction, or rotate in the XOY plane with the Z direction as the rotation axis under the rotation and sliding of the rotating sliding component 22.

[0061] As an example, the rotary sliding assembly 22 includes a plurality of rotary sub-components arranged at intervals, and the parallel fine-tuning movable frame 1 is provided with a plurality of sliding sub-components arranged at intervals, and the plurality of rotary sub-components are connected with the plurality of sliding sub-components in a one-to-one correspondence and cooperate to drive the parallel fine-tuning movable frame 1 to move. That is, when the rotary sliding assembly 22 is provided with a preset number of rotary sub-components, a corresponding number of sliding sub-components are provided on the parallel fine-tuning movable frame 1, so that each rotary sub-component is cooperatively connected with each sliding sub-component to work together to drive the parallel fine-tuning movable frame 1 to move.

[0062] As an example, the rotating auxiliary component includes at least one of an eccentric wheel and a sliding bearing type rotating pair, and the sliding auxiliary component includes at least one of a slide groove and a slide rail. Of course, the rotating auxiliary component and the sliding auxiliary component are not limited to the above-mentioned component types. Other mechanical parts or structures that can play the same role can be used as the rotating auxiliary component or the sliding auxiliary component. For the convenience of illustration, the eccentric wheel is used as the rotating auxiliary component, and the slide groove is used as the sliding auxiliary component in this embodiment.

[0063] As an example, the number of the rotating sub-components is at least 3, and the number of the sliding sub-components is at least 3, and the number of the rotating sub-components and the number of the sliding sub-components are preferably consistent. In fact, the number of the rotating sub-components and the sliding sub-frame is not limited to the above-mentioned number range. Under the premise of meeting the most basic functions, if there is a surplus in the corresponding positions of the rotating sliding base 21 and the parallel fine-tuning movable frame 1, a larger number of components can be selectively set. In the event that some of the components are damaged, a simple position adjustment can be performed to maintain the function of the parallel fine-tuning mechanism, thereby reducing maintenance costs. In this embodiment, the above-mentioned number range is set to meet the basic functions while ensuring that the parallel fine-tuning mechanism meets the requirements of miniaturization as much as possible. In this embodiment, the number of the rotating sub-components and the sliding sub-components is preferably 3, which avoids redundant structures while meeting the functions of the parallel fine-tuning mechanism, improves manufacturing efficiency and reduces costs.

[0064] For example, please refer to Figure 3 , which shows a bottom view schematic diagram of the parallel fine-tuning movable frame 1. One side of the parallel fine-tuning movable frame 1 facing the rotary sliding base 21 is provided with a first chute 11, a second chute 12 and a third chute 13. Please refer to Figure 2 , the rotary sliding assembly 22 includes a first eccentric wheel 221, a second eccentric wheel 222 and a third eccentric wheel 223. The rotary sliding base 21 includes a first groove 211, a second groove 212 and a third groove 213. The bottom of the first eccentric wheel 221 is embedded in the first groove 211, the bottom of the second eccentric wheel 222 is embedded in the second groove 212, and the bottom of the third eccentric wheel 223 is embedded in the third groove 213. The top of the first eccentric wheel 221 is embedded in the first chute 11 to slide in the extending direction of the first chute 11, the top of the second eccentric wheel 222 is embedded in the second chute 12 to slide in the extending direction of the second chute 12, and the top of the third eccentric wheel 223 is embedded in the third chute 13 to slide in the extending direction of the third chute 13. It should be noted that the above structure is only an example of the present invention. In practical applications, the types and quantities of the corresponding components can be reasonably set according to actual needs and are not limited to this example. The above "extending direction of the chute" refers to the direction in which the eccentric wheel can slide on the chute. In this embodiment, the inner diameters of the eccentric wheels are all 4 mm. Correspondingly, the width of the chute (the width direction is perpendicular to the extending direction) is kept at about 4 mm.

[0065] As an example, the extending direction of the first chute 11 is parallel to the extending direction of the second chute 12, and the extending direction of the third chute 13 is perpendicular to the extending direction of the second chute 12. It should be noted that the positional relationship of the chutes is not limited to the above manner. In fact, the chutes can be designed at any position as long as they can satisfy the movement of the parallel fine-tuning movable frame 1 in the X direction, Y direction and XOY direction.

[0066] For example, please refer to Figure 4 , which shows another bottom view structural schematic diagram presented when the rotary sliding assembly 22 is connected to the parallel fine-tuning structure. The extending direction of the first chute 11 coincides with the extending direction of the second chute 12, and the extending direction of the third chute 13 coincides with the axis of the second chute 12 along the X direction.

[0067] For example, please refer to Figure 5 , which shows Figure 3 a side view schematic diagram of the structure shown. The parallel fine-tuning movable frame 1 further includes a convex portion 14. Please refer to Figure 2, the rotary sliding base 21 further includes a fourth groove 214. The position of the convex portion 14 corresponds to the position of the rotary sliding base 21 vertically to support the parallel fine-tuning movable frame 1 and keep the parallel fine-tuning movable frame 1 parallel to the rotary sliding base 21 (i.e., ensure the planarity of the parallel fine-tuning movable frame 1). Preferably, the cross-sectional area of the fourth groove 214 is larger than the cross-sectional area of the convex portion 14 (the cross-section refers to the section along the XOY plane), so as to ensure the movement space of the parallel fine-tuning movable frame 1. The depth of the fourth groove 214 is consistent with the height of the convex portion 14 to improve the structural stability. Further, the contour shape of the fourth groove 214 tends to match the contour shape of the convex portion 14 to improve the area utilization rate. In this embodiment, the shape of the convex portion 14 is cam-shaped, which can effectively reduce the friction between the parallel fine-tuning movable frame 1 and the rotary sliding base 21 during movement, and improve the movement speed and movement accuracy.

[0068] As an example, the drive mechanism 3 includes a first drive motor 31, a second drive motor 32 and a third drive motor 33 arranged at intervals. The first drive motor 31 penetrates through the first eccentric wheel 221 in the Z direction and is connected to the parallel fine-tuning movable frame 1. The second drive motor 32 penetrates through the second eccentric wheel 222 in the Z direction and is connected to the parallel fine-tuning movable frame 1. The third drive motor 33 penetrates through the third eccentric wheel 223 in the Z direction and is connected to the parallel fine-tuning movable frame 1. The Z direction is perpendicular to the XOY plane. It should be noted that the number and position of the drive motors in the drive mechanism 3 should be set based on the number and position of the rotary pairs in the rotary sliding assembly 22 and are not limited to the above number and position.

[0069] As an example, the first drive motor 31 includes a first motor body 311 and a first drive shaft 312. The first drive shaft 312 penetrates through the first eccentric wheel 221 and is connected to the first eccentric wheel 221. The second drive motor 32 includes a second motor body 321 and a second drive shaft 322. The second drive shaft 322 penetrates through the second eccentric wheel 222 and is connected to the second eccentric wheel 222. The third drive motor 33 includes a third motor body 331 and a third drive shaft 332. The third drive shaft 332 penetrates through the third eccentric wheel 223 and is connected to the third eccentric wheel 223. In this embodiment, a set screw or a suitable fastener is used to fixedly connect the drive shaft of the drive motor to the eccentric wheel, so that the eccentric wheel rotates along with the drive shaft of the drive motor when the drive motor drives the drive shaft to rotate.

[0070] As an example, it further includes a control component (not shown in the drawings), which is connected to the driving mechanism 3. On the one hand, the control component controls the driving mechanism 3 to drive the rotation of the rotary sliding member so as to drive the movement of the parallel fine-tuning movable frame 1. Before that, the control component also controls the driving mechanism 3 to perform horizontal or vertical correction of the rotary sliding member to return to the origin.

[0071] Specifically, in this embodiment, a 3-(2SPS) parallel structure is formed between the parallel fine-tuning movable frame 1 and the rotary sliding mechanism 2. A plurality of the rotary pair members in the rotary sliding mechanism 2 rotate under the driving action of the driving mechanism 3, and slide along the extension direction of the sliding pair under the action of the rotational force in cooperation with the sliding pair provided on the parallel fine-tuning movable frame 1. Due to the supporting action of the convex portion 14 provided on the parallel fine-tuning movable frame 1, the parallel fine-tuning movable frame 1 moves in the XOY plane under the drive of the rotary pair member.

[0072] The parallel micro-mechanism of this embodiment combines the mechanism for adjusting the X coordinate and the mechanism for adjusting the Y coordinate into one, realizing the miniaturization of the volume of the fine-tuning mechanism, being able to work in a narrow space, and simultaneously meeting the performance requirements of high stability and easy speed control.

[0073] Embodiment Two

[0074] This embodiment provides a specific usage method of the parallel fine-tuning mechanism as described in Embodiment One.

[0075] First, provide the parallel fine-tuning mechanism as described in Embodiment 1; then, according to the movement target of the parallel fine-tuning movable frame (i.e., the movement direction, displacement amount, or rotation angle of the parallel fine-tuning movable frame on the XOY plane), based on the overall structure of the parallel fine-tuning mechanism, through Solidworks software simulation analysis combined with function theory calculation, calculate the rotary pair members that need to be driven in the rotary motion assembly and the driving directions and angles of the corresponding driving motors for driving these rotary pair members; finally, based on the calculation results, through the control component, control each driving motor in the driving mechanism to start driving some or all of the rotary pair members in the rotary motion assembly to rotate at different angles, and the parallel fine-tuning movable frame will move on the XOY plane under the cooperation of each rotary pair member and each sliding pair member to reach the movement target point. In addition, before the driving mechanism starts driving the rotary motion assembly to make the parallel fine-tuning movable frame move, it may further include a step of driving the rotary pair member to rotate through the driving mechanism for horizontal correction or vertical correction for origin calibration. This step is to make the parallel fine-tuning movable frame return to the origin to avoid slight deviation of the parallel fine-tuning movable frame, resulting in position error when the control component instructs the driving mechanism, affecting the in-place accuracy and accuracy of the parallel fine-tuning movable frame. Of course, the operation of correcting back to the origin may not be performed, and the precise control of the position of the parallel fine-tuning movable frame can still be achieved.

[0076] Embodiment 3

[0077] This embodiment provides an operation example for making the parallel fine-tuning mechanism described in Embodiment 1 move in the X direction.

[0078] First, please refer to Figure 6 , the structural schematic diagram of the horizontal calibration of the first eccentric wheel 221 and the second eccentric wheel 222 in the parallel fine-tuning mechanism. The first driving motor 31 and the second driving motor 32 are respectively used to control the first eccentric wheel 221 and the second eccentric wheel 222 for horizontal calibration, so that the contact surface between the first eccentric wheel 221 and the first chute 11 and the contact surface between the second eccentric wheel 222 and the second chute 12 are in the same plane (such as the A-A' plane shown in Figure 6 ).

[0079] After the calibration is completed, by controlling the rotation period of the third driving motor 33, the third eccentric wheel 223 is further controlled to perform normal eccentric motion, and during this process, the first eccentric wheel 221 and the second eccentric wheel 222 are kept stationary.

[0080] When the third driving motor 33 rotates clockwise by 180 degrees, the parallel fine-tuning movable frame 1 is fine-tuned 2 mm in the positive X direction; when the third driving motor 33 rotates counterclockwise by 180 degrees, the parallel fine-tuning movable frame 1 is fine-tuned 2 mm in the negative X direction.

[0081] Embodiment 4

[0082] This embodiment provides an operation example for rotating the parallel fine-tuning mechanism described in Embodiment 1 about the Z axis (rotating in the XOY plane).

[0083] First, please refer to Figure 7 , which shows a structural schematic diagram of the first eccentric wheel 221 and the third eccentric wheel 223 in the parallel fine-tuning mechanism for vertical correction. The first driving motor 31 and the third driving motor 33 are respectively used to control the first eccentric wheel 221 and the third eccentric wheel 223 for vertical correction, so that the contact surface between the first eccentric wheel 221 and the first chute 11 is perpendicular to the contact surface between the third eccentric wheel 223 and the third chute 13 ( Figure 7 the B-B' plane and the C-C' plane shown in

[0084] are perpendicular to each other).

[0085] When the second driving motor 32 rotates clockwise by 180 degrees, the parallel fine-tuning movable frame 1 rotates clockwise 2.1 degrees about the Z axis; when the second driving motor 32 rotates counterclockwise by 180 degrees, the parallel fine-tuning movable frame 1 rotates counterclockwise 2.1 degrees about the Z axis.

[0086] Embodiment 5

[0087] This embodiment provides an operation example for rotating the parallel fine-tuning mechanism described in Embodiment 1 about the Z axis (rotating in the XOY plane).

[0088] First, the second driving motor 32 and the third driving motor 33 are respectively used to control the second eccentric wheel 222 and the third eccentric wheel 223 for horizontal correction, so that the contact surface between the second eccentric wheel 222 and the second chute 12 and the contact surface between the third eccentric wheel 223 and the third chute 13 are in the same plane.

[0089] After the calibration is completed, by controlling the rotation period of the first drive motor 31, the first eccentric wheel 221 is further controlled to perform a normal eccentric motion, and during this process, the second eccentric wheel 222 and the third eccentric wheel 223 are kept stationary.

[0090] When the first drive motor 31 rotates clockwise by 90 degrees, the parallel fine-tuning movable frame 1 rotates clockwise by 3 degrees in the Z direction; when the first drive motor 31 rotates counterclockwise by 90 degrees, the parallel fine-tuning movable frame 1 rotates counterclockwise by 3 degrees in the Z direction.

[0091] Embodiment Six

[0092] This embodiment provides an operation example for enabling the parallel fine-tuning mechanism described in Embodiment One to move in the Y direction.

[0093] First, the first eccentric wheel 221 and the second eccentric wheel 222 are respectively controlled by the first drive motor 31 and the second drive motor 32 for horizontal calibration, so that the contact surface between the first eccentric wheel 221 and the first chute 11 and the contact surface between the second eccentric wheel 222 and the second chute 12 are in the same plane.

[0094] After the calibration is completed, by controlling the rotation periods of the first drive motor 31 and the second drive motor 32, the first eccentric wheel 221 and the second eccentric wheel 222 are respectively controlled to perform eccentric motions simultaneously, and during this process, the third eccentric wheel 223 is kept stationary.

[0095] When the first drive motor 31 and the second drive motor 32 rotate clockwise by 90 degrees, the parallel fine-tuning movable frame 1 is finely adjusted by 2 mm in the negative Y direction; when the first drive motor 31 and the second drive motor 32 rotate counterclockwise by 90 degrees, the parallel fine-tuning movable frame 1 is finely adjusted by 2 mm in the positive Y direction.

[0096] Embodiment Seven

[0097] This embodiment provides an operation example for enabling the parallel fine-tuning mechanism described in Embodiment One to move simultaneously in the X direction and the Y direction.

[0098] First, the first eccentric wheel 221 and the second eccentric wheel 222 are respectively controlled by the first drive motor 31 and the second drive motor 32 for horizontal calibration, so that the contact surface between the first eccentric wheel 221 and the first chute 11 and the contact surface between the second eccentric wheel 222 and the second chute 12 are in the same plane.

[0099] After the contact origin to be corrected is completed, by separately controlling the rotation periods of the first drive motor 31, the second drive motor 32, and the third drive motor, the first eccentric wheel 221, the second eccentric wheel 222, and the third eccentric wheel 223 are further controlled to perform eccentric motions simultaneously, so as to adjust the X direction and the Y direction simultaneously. The adjustment range in the X direction is between -2 mm and 2 mm, and the adjustment range in the Y direction is between -2 mm and 2 mm.

[0100] It should be noted that although the operation method examples introduced in Embodiments 3 to 7 all perform the operation of correcting back to the origin, this step is not a necessary step and can be omitted in actual applications. In addition, the movement range or angle of the parallel fine-tuning movable frame shown in Embodiments 3 to 7 is only the experimental data obtained by performing different corrections and driving different eccentric wheels to rotate under one structural condition. In actual applications, different position adjustments will be brought about for different sizes of each component structure and different operation processes. Therefore, the operation method of the parallel fine-tuning movable frame is not limited to the above several ways, and the fine-tuning range of the parallel fine-tuning movable frame in the X direction, the Y direction, or the XOY direction is not limited to the above data range either. The sizes and usage methods of the above components can be selected and designed according to actual needs.

[0101] In summary, the parallel fine-tuning mechanism of the present invention includes a parallel fine-tuning movable frame, a rotary sliding mechanism, and a drive mechanism. The rotary sliding mechanism is located below the parallel fine-tuning movable frame and is connected to the parallel fine-tuning movable frame. The rotary sliding mechanism includes a rotary sliding base and a rotary sliding component. The rotary sliding component is located on the rotary sliding base and is connected to the parallel fine-tuning movable frame to drive the parallel fine-tuning movable frame to move in the XOY plane, where the X direction is perpendicular to the Y direction. The drive mechanism is located below the rotary sliding mechanism and is connected to the rotary sliding mechanism. The drive mechanism is used to drive the rotary sliding component to rotate so as to drive the movement of the parallel fine-tuning movable frame. The parallel fine-tuning mechanism of the present invention combines the mechanism for adjusting the X coordinate and the mechanism for adjusting the Y coordinate into one, realizes the miniaturization of the volume of the fine-tuning mechanism, can work in a narrow space, and simultaneously meets the performance requirements of high stability and easy speed control. Therefore, the present invention effectively overcomes various disadvantages in the prior art and has high industrial utilization value.

[0102] The above embodiments merely illustrate the principles and effects of the present invention and are not used to limit the present invention. Any person familiar with this technology can modify or change the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or changes completed by those with ordinary knowledge in the technical field without departing from the spirit and technical idea disclosed by the present invention should still be covered by the claims of the present invention.

Claims

1. A parallel fine-tuning mechanism, characterized in that: include: Parallel fine-tuning movable frame; A rotary sliding mechanism is located below the parallel fine-tuning movable frame and connected to the parallel fine-tuning movable frame, wherein the rotary sliding mechanism comprises a rotary sliding base and a rotary sliding assembly, wherein the rotary sliding assembly is located on the rotary sliding base and connected to the parallel fine-tuning movable frame to drive the parallel fine-tuning movable frame to move on an XOY plane, wherein the X direction is perpendicular to the Y direction; The driving mechanism is located below the rotating sliding mechanism and connected to the rotating sliding mechanism. The driving mechanism is used to drive the rotating sliding assembly to rotate so as to drive the parallel fine-tuning movable frame to move.

2. The parallel fine-tuning mechanism according to claim 1, characterized in that: The rotary sliding assembly includes a plurality of spaced rotary sub-components, and the parallel fine-tuning movable frame is provided with a plurality of spaced sliding sub-components. The plurality of rotary sub-components and the plurality of sliding sub-components are connected one by one and cooperate with each other to drive the parallel fine-tuning movable frame to move.

3. The parallel fine-tuning mechanism according to claim 2, characterized in that: The rotating auxiliary component includes at least one of an eccentric wheel and a sliding bearing type rotating auxiliary component, and the sliding auxiliary component includes at least one of a sliding groove and a sliding rail.

4. The parallel fine-tuning mechanism according to claim 2, characterized in that: The parallel fine-tuning movable frame is provided with a first slide groove, a second slide groove and a third slide groove on a side facing the rotating sliding base, the rotating sliding assembly includes a first eccentric wheel, a second eccentric wheel and a third eccentric wheel, the rotating sliding base includes a first groove, a second groove and a third groove, the bottom of the first eccentric wheel is embedded in the first groove, the bottom of the second eccentric wheel is embedded in the second groove, the bottom of the third eccentric wheel is embedded in the third groove, the top of the first eccentric wheel is embedded in the first slide groove to slide in the extension direction of the first slide groove, the top of the second eccentric wheel is embedded in the second slide groove to slide in the extension direction of the second slide groove, and the top of the third eccentric wheel is embedded in the third slide groove to slide in the extension direction of the third slide groove.

5. The parallel fine-tuning mechanism according to claim 4, characterized in that: An extension direction of the first slide groove is parallel to an extension direction of the second slide groove, and an extension direction of the third slide groove is perpendicular to an extension direction of the second slide groove.

6. The parallel fine-tuning mechanism according to claim 4, characterized in that: The extension direction of the first slide groove coincides with the extension direction of the second slide groove, and the extension direction of the third slide groove coincides with the axis of the second slide groove along the X direction.

7. The parallel fine-tuning mechanism according to claim 4, characterized in that: The driving mechanism includes a first driving motor, a second driving motor and a third driving motor which are arranged at intervals. The first driving motor penetrates the first eccentric wheel in the Z direction and is connected to the parallel fine-tuning movable frame. The second driving motor penetrates the second eccentric wheel in the Z direction and is connected to the parallel fine-tuning movable frame. The third driving motor penetrates the third eccentric wheel in the Z direction and is connected to the parallel fine-tuning movable frame. The Z direction is perpendicular to the XOY plane.

8. The parallel fine-tuning mechanism according to claim 1, characterized in that: The parallel fine-tuning movable frame is provided with a protrusion facing the rotating sliding base, and the rotating sliding base is also provided with a fourth groove, and the bottom end of the protrusion extends into the fourth groove.

9. The parallel fine-tuning mechanism according to claim 1, characterized in that: The movement of the parallel fine-tuning movable frame on the XOY plane includes at least one of translation and rotation.

10. The parallel fine-tuning mechanism according to claim 1, characterized in that: It also includes a control component, which is connected to the driving mechanism.

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