Multi-degree-of-freedom coating device

Abstract

The invention relates to the technical field of vacuum coating, and particularly discloses a multi-degree-of-freedom coating device which comprises a rotating stand main body, a plurality of substrate bases and a plurality of rotating shaft assemblies, the rotating stand main body comprises a base, a rotating seat and a fixed gear; the rotating seat is rotatably arranged on the base; the fixed gear is arranged on the base; the multiple rotating shaft assemblies are arranged on the periphery of the rotating base in a surrounding mode. The rotating shaft assembly comprises a first rotating shaft; the first rotating shaft is rotatably arranged on the rotating seat and is in transmission connection with the fixed gear; the substrate base is arranged on the first rotating shaft; the substrate base comprises a base main body and a substrate mounting seat; the base main body is fixedly connected with the first rotating shaft; the substrate mounting seat comprises a fixed part and a rotating part; the fixing part is arranged on the base main body; the rotating part is rotatably arranged on the fixed part in the vertical direction; the rotating part is used for mounting a substrate; in the scheme, when the rotating seat rotates, the first rotating shaft can be driven to revolve, and the fixed gear can drive the first rotating shaft to rotate, so that the coating efficiency of the substrate is improved.

Description

Technical Field

[0001] This application relates to the technical field of vacuum coating, and particularly relates to a multi-degree-of-freedom coating device. Background Art

[0002] Vacuum coating is a technology that deposits materials on the surface of a substrate to form a thin film in a vacuum environment. To uniformly coat the surface of the substrate, the substrate is generally arranged on a rotatable support structure, such as a frame-type turntable, etc.

[0003] Existing turntables generally can only drive the substrate to rotate in the same direction, so that only the requirement for uniform coating in one direction of the substrate can be met during coating. For example, for a substrate vertically placed on the turntable, only the outer end face of the substrate or two side faces along the circumferential direction of the substrate can be coated when the turntable rotates. Therefore, after the substrate is coated once, the installation angle of the substrate needs to be adjusted to coat other side faces, resulting in low coating efficiency. Summary of the Invention

[0004] In view of this, the purpose of this application is to provide a multi-degree-of-freedom coating device to improve coating efficiency.

[0005] To achieve the above technical purpose, this application provides a multi-degree-of-freedom coating device, including: a turntable main body, a plurality of substrate bases, and a plurality of rotating shaft assemblies;

[0006] The turntable main body includes: a base, a rotating seat, and a fixed gear;

[0007] The rotating seat is rotatably arranged on the base;

[0008] The fixed gear is arranged on the base;

[0009] A plurality of the rotating shaft assemblies are arranged around the outer periphery of the rotating seat;

[0010] The rotating shaft assembly includes: a first rotating shaft;

[0011] The first rotating shaft is rotatably arranged on the rotating seat and is in transmission connection with the fixed gear;

[0012] A plurality of the substrate bases are arranged on a plurality of the first rotating shafts;

[0013] The substrate base includes: a base main body and a substrate mounting seat;

[0014] The base main body is fixedly connected to the first rotating shaft;

[0015] The substrate mounting seat includes: a fixed part and a rotating part;

[0016] The fixed part is arranged on the base main body;

[0017] The rotating part is rotatably arranged on the fixed part in the vertical direction;

[0018] The rotating part is used for mounting a substrate.

[0019] Further, the rotating shaft assembly includes: a second rotating shaft;

[0020] The second rotating shaft is rotatably arranged on the rotating seat;

[0021] A driving gear disk is arranged on the second rotating shaft;

[0022] The base body includes: an inner ring gear disk and a rotating gear disk;

[0023] The inner ring gear disk is fixedly connected to the first rotating shaft;

[0024] The rotating gear disk is rotatably arranged on the inner ring gear disk;

[0025] The fixed seat is arranged on the rotating gear disk;

[0026] The rotating part includes: an angle adjusting seat and a rotating seat;

[0027] The angle adjusting seat is rotatably arranged on the fixed part in the vertical direction;

[0028] The rotating seat is rotatably arranged on the angle adjusting seat;

[0029] The rotating gear disk is in transmission connection with the rotating seat, so that when the rotating gear disk rotates, the rotating seat is driven to rotate.

[0030] Further, the base body further includes: a base gear, a first short shaft and a second short shaft;

[0031] The first short shaft is rotatably arranged on the fixed part;

[0032] The base gear is fixed on the first short shaft and is meshed and connected with the inner ring gear disk;

[0033] The second short shaft is rotatably arranged on the angle adjusting seat and is fixedly connected with the rotating seat;

[0034] The second short shaft is in transmission connection with the first short shaft.

[0035] Further, the base body further includes: a worm;

[0036] The worm is rotatably arranged on the fixed part;

[0037] The first short shaft is meshed and connected with the worm through bevel gears;

[0038] The second short shaft is meshedly connected to the worm gear via a bevel gear.

[0039] Further, the rotating shaft assembly includes two of the first rotating shafts;

[0040] The second rotating shaft is disposed between the two first rotating shafts, and the second rotating shaft is meshed and connected with the two first rotating shafts at the same time.

[0041] Furthermore, on the rotating frame body, the first rotating shaft is located outside the second rotating shaft.

[0042] Furthermore, a first gear is fixedly connected to the first rotating shaft;

[0043] The second rotating shaft is fixedly connected with a second gear;

[0044] The first gear is meshedly connected to the fixed gear;

[0045] A plurality of intermediate gears are arranged on the rotating seat;

[0046] The first gear is transmission-connected to the second gear via the intermediate gear.

[0047] Furthermore, the substrate mounting seat further comprises: a fixing screw;

[0048] The fixing screw is rotatably disposed on the fixing portion and is used to abut against the rotating portion to limit the rotation of the rotating portion when tightened.

[0049] Further, the substrate base includes a plurality of substrate mounting seats;

[0050] A plurality of substrate mounting seats are disposed on the base body in a surrounding manner.

[0051] Furthermore, a plurality of substrate bases are arranged on the first rotating shaft along its axial direction.

[0052] As can be seen from the above technical solutions, the present application provides a multi-degree-of-freedom coating device, including: a turntable main body, a plurality of substrate bases, and a plurality of rotating shaft components; the turntable main body includes: a base, a rotating seat, and a fixed gear; the rotating seat is rotatably arranged on the base; the fixed gear is arranged on the base; a plurality of the rotating shaft components are arranged around the outer periphery of the rotating seat; the rotating shaft component includes: a first rotating shaft; the first rotating shaft is rotatably arranged on the rotating seat and is in transmission connection with the fixed gear; a plurality of the substrate bases are arranged on a plurality of the first rotating shafts; the substrate base includes: a base main body and a substrate mounting seat; the base main body is fixedly connected to the first rotating shaft; the substrate mounting seat includes: a fixing part and a rotating part; the fixing part is arranged on the base main body; the rotating part is rotatably arranged on the fixing part along the vertical direction; the rotating part is used for mounting a substrate.

[0053] In this solution, when the rotating seat rotates, it can drive the first rotating shaft to revolve. At the same time, the fixed gear can drive the first rotating shaft to rotate, so that multiple substrates can be placed on the substrate base on the first rotating shaft at the same time, which can improve the coating efficiency of the substrate; and in the substrate mounting seat, the rotating part can rotate along the vertical direction to adjust the angle of the substrate, so as to adapt to different process requirements and improve the applicability of the device. Description of the Drawings

[0054] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0055] Figure 1 It is a bottom view of the overall structure of a multi-degree-of-freedom coating device provided by an embodiment of the present application;

[0056] Figure 2 It is a perspective view of the overall structure of a multi-degree-of-freedom coating device provided by an embodiment of the present application;

[0057] Figure 3 It is a side view of the overall structure of a multi-degree-of-freedom coating device provided by an embodiment of the present application;

[0058] Figure 4 For Figure 3 the top view of the A-A cross-section in

[0059] Figure 5 It is a side view of the substrate base of a multi-degree-of-freedom coating device provided by an embodiment of the present application;

[0060] Figure 6 A perspective view of a substrate base of a multi-degree-of-freedom coating device provided by an embodiment of the present application;

[0061] Figure 7 is Figure 5 a sectional view of the B-B section in

[0062] Figure 8 A schematic diagram of a second rotating shaft of a multi-degree-of-freedom coating device provided by an embodiment of the present application. Detailed implementation manners

[0063] Next, the technical solutions of the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings. Obviously, the described embodiments are some, rather than all, of the embodiments of the present application. Based on the embodiments in this specification of the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope claimed by the present application.

[0064] In the description of the embodiments of the present application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the embodiments of the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the embodiments of the present application. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and should not be construed as indicating or implying relative importance.

[0065] In the description of the embodiments of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a replaceable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific situations.

[0066] Please refer to Figures 1 to 5 , a multi-degree-of-freedom coating device provided in an embodiment of the present application includes: a turntable main body 100, a plurality of substrate bases 200, and a plurality of rotating shaft assemblies 300.

[0067] The turntable main body 100 includes: a base 110, a rotating seat 120, and a fixed gear 130. Among them, the base 110 can be fixed on a supporting plane such as the ground. The rotating seat 120 is rotatably arranged on the base 110. The rotating seat 120 can be of a frame structure. Specifically, it can include two annular plate members 123 and support columns 122 arranged between the two annular plate members 123. The fixed gear 130 is arranged on the base 110. In this embodiment, the rotation of the rotating seat 120 can be driven by a motor 400. For example, meshing teeth are provided on the outer periphery of the lower annular plate member 123; the output end of the motor 400 meshes with the meshing teeth, so that when the motor 400 starts, it can drive the rotating seat 120 to rotate around the base 110.

[0068] A plurality of rotating shaft assemblies 300 are arranged around the outer periphery of the rotating seat 120; the rotating shaft assembly 300 includes: a first rotating shaft 310; the first rotating shaft 310 is rotatably arranged on the rotating seat 120 and is in transmission connection with the fixed gear 130; specifically, the first rotating shaft 310 can be arranged between the two annular plate members 123, and both ends are respectively rotatably connected to the two annular plate members 123.

[0069] A plurality of substrate bases 200 are arranged on the plurality of first rotating shafts 310. Please refer to Figure 2 and Figure 5 , the substrate base 200 includes: a base body 210 and a substrate mounting seat 230; the base body 210 is fixedly connected to the first rotating shaft 310; the substrate mounting seat 230 includes: a fixed part 231 and a rotating part 232; the fixed part 231 is arranged on the base body 210; the rotating part 232 is rotatably arranged on the fixed part 231 in the vertical direction; the rotating part 232 is used for mounting the substrate.

[0070] In this embodiment, when the rotating seat 120 rotates, the rotating seat 120 will rotate relative to the base 110 and the fixed gear 130; since the first rotating shaft 310 is in transmission connection with the fixed gear 130, the fixed fixed gear 130 can drive the first rotating shaft 310 to rotate on its own. Therefore, the substrate base 200 can rotate on its own around the first rotating shaft 310 and revolve around the base 110 during the coating process, so that a plurality of substrate mounting seats 230 can be arranged in a plurality of horizontal directions on the substrate base 200, and the plurality of substrate mounting seats 230 are circumferentially distributed around the base body 210, so as to uniformly coat the substrates on each substrate mounting seat 230, which can effectively improve the coating efficiency of the substrates.

[0071] In a more specific embodiment, please refer to Figures 1 to 8, the rotating shaft assembly 300 includes: a second rotating shaft 320; the second rotating shaft 320 is rotatably arranged on the rotating base 120; a driving gear disk 321 is arranged on the second rotating shaft 320. Specifically, a direction column 323 can be fixedly sleeved on the outer periphery of the second rotating shaft 320, so that the driving gear disk 321 is fixedly sleeved on the second rotating shaft 320 and rotates synchronously with the second rotating shaft 320.

[0072] The base body 210 includes: an inner ring gear disk 211 and a rotating gear disk 212; the inner ring gear disk 211 is fixedly connected to the first rotating shaft 310; the rotating gear disk 212 is rotatably arranged on the inner ring gear disk 211. The fixing part 231 is fixed on the rotating gear disk 212.

[0073] The rotating part 232 includes: an angle adjustment seat 236 and a rotating seat 237; the angle adjustment seat 236 is rotatably arranged on the fixing part 231 along the vertical direction; the rotating seat 237 is rotatably arranged on the angle adjustment seat 236; the inner ring gear disk 211 is in transmission connection with the rotating seat 237, so that when the inner ring gear disk 211 rotates, it drives the rotating seat 237 to rotate.

[0074] In this embodiment, during the process of the inner ring gear disk 211 being driven by the first rotating shaft 310 to rotate on its own, the driving gear disk 321 can drive the rotating gear disk 212 to rotate, so that the fixing part 231 on the rotating gear disk 212 drives the rotating part 232 to rotate around the first rotating shaft 310. At the same time, the rotating inner ring gear disk 211 can drive the rotating seat 237 to rotate, so that the rotating seat 237 drives the substrate to rotate around itself.

[0075] That is to say, in the coating process of the device provided in this embodiment, the substrate on the rotating seat 237 will revolve around the base 110 following the rotating base 120, and at the same time, will perform the first rotation around the first rotating shaft 310 following the rotating gear disk 212 and the second rotation around itself. It can not only achieve an improved coating uniformity effect, but also change the angle of the substrate facing outward during the coating process, so that the other five sides of the substrate except for the side in contact with the rotating seat 237 can be coated, thereby further improving the coating effect.

[0076] The multi-degree-of-freedom coating device provided in this embodiment is applicable to various shaped workpieces such as mobile phone cases, watch cases, and watch bands, and can improve the coating uniformity by ±2% - 3% compared with the prior art.

[0077] In practical applications, the way that the rotating seat 237 is in transmission connection with the inner ring gear disk 211 can be, for example, that the inner ring gear disk 211 is connected to the rotating seat 237 through a transmission structure such as a synchronous belt or a worm and worm gear.

[0078] In an embodiment provided by the present application, the base body 210 further includes: a base gear 213, a first short shaft 214, and a second short shaft 215; the first short shaft 214 is rotatably arranged on the fixing part 231; the base gear 213 is fixed on the first short shaft 214 and is meshed and connected with the inner ring gear disc 211; the second short shaft 215 is rotatably arranged on the angle adjusting seat 236 and is fixedly connected with the rotating seat 237; the second short shaft 215 and the first short shaft 214 are in transmission connection. Wherein, the first short shaft 214 can penetrate through the fixing part 231 in the vertical direction; the base gear 213 is arranged at the bottom of the first short shaft 214. The tooth ring on the inner ring gear disc 211 is arranged at the bottom.

[0079] When the inner ring gear disc 211 rotates, it can drive the base gear 213 to rotate, and then drive the first short shaft 214 to rotate through the base gear 213; since the first short shaft 214 and the second short shaft 215 are in transmission connection, when the first short shaft 214 rotates, the second short shaft 215 can drive the rotating seat 237 to perform a second self-rotation around the second short shaft 215, realizing the transmission connection between the inner ring gear disc 211 and the rotating seat 237.

[0080] In a more specific embodiment, the base body 210 further includes: a worm 216; the worm 216 is rotatably arranged on the fixing part 231; the first short shaft 214 is meshed and connected with the worm 216 through a bevel gear; the second short shaft 215 is meshed and connected with the worm 216 through a bevel gear.

[0081] That is, when the first short shaft 214 rotates, it can drive the worm 216 to rotate, and then drive the second short shaft 215 to rotate, realizing the transmission connection between the first short shaft 214 and the second short shaft 215.

[0082] In an embodiment, the rotating shaft assembly 300 includes two first rotating shafts 310; the second rotating shaft 320 is arranged between the two first rotating shafts 310, and the second rotating shaft 320 is meshed and connected with the two first rotating shafts 310 at the same time, so that the second rotating shaft 320 can drive the rotating gear discs 212 on the first rotating shafts 310 on both sides at the same time, improving the transmission effect of the second rotating shaft 320.

[0083] Optionally, on the turntable body 100, the first rotating shaft 310 is located outside the second rotating shaft 320, which is more conducive to coating the substrate base 200 on the first rotating shaft 310.

[0084] In an embodiment, a first gear 311 is fixedly connected to the first rotating shaft 310; a second gear 322 is fixedly connected to the second rotating shaft 320; the first gear 311 is meshed and connected with the fixed gear 130; a plurality of intermediate gears 121 are arranged on the rotating seat 120; the first gear 311 is in transmission connection with the second gear 322 through the intermediate gears 121.

[0085] In one embodiment, the substrate mount 230 further includes: a fixing screw 239; the fixing screw 239 is rotatably disposed on the fixing portion 231 and is used to abut against the rotating portion 232 when tightened to limit the rotation of the rotating portion 232.

[0086] After adjusting the rotating portion 232 to the required angle, by tightening the fixing screw 239, it is possible to prevent the normal angle of the rotating portion 232 from changing during the rotation of the rotating base 120.

[0087] In this embodiment, the adjustment angle of the rotating portion 232 can be from 0° to 90°; when the angle of the rotating portion 232 is 90°, the substrate on the rotating portion 232 is vertically placed; when the angle of the rotating portion 232 is 0°, the substrate on the rotating portion 232 is horizontally placed.

[0088] In application, a plurality of substrate bases 200 are arranged along the axial direction of the first rotating shaft 310, which can increase the arrangement quantity of the substrate bases 200 on the rotating base 120 and improve the coating efficiency.

[0089] In one embodiment, the speed ratio of each gear transmission is set to an infinite non-repeating decimal, ensuring that each point on the substrate has the opportunity to face the evaporation source for coating during coating, and ensuring that the posture of the substrate at the same position during coating is never repeated.

[0090] Specifically, the transmission ratios between the first gear 311 and the fixed gear 130, between the first gear 311 and the intermediate gear 121, between the intermediate gear 121 and the second gear 322, between the driving gear disk 321 and the rotating gear disk 212, between the inner ring gear disk 211 and the base gear 213, between the first short shaft 214 and the second short shaft 215, etc. can all be infinite non-repeating decimals.

[0091] The above are the preferred embodiments of the present application and are not used to limit the present invention. Although the present application has been described in detail with reference to the examples, for those skilled in the art, they can still modify the technical solutions recorded in the foregoing examples, or perform equivalent replacements for some of the technical features. However, any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present application shall be included within the protection scope of the present application.

Claims

1. A multi-degree-of-freedom coating device, characterized in that: include: A rotating frame body (100), a plurality of substrate bases (200), and a plurality of rotating shaft assemblies (300); The rotating frame body (100) comprises: a base (110), a rotating base (120) and a fixed gear (130); The rotating seat (120) is rotatably disposed on the base (110); The fixed gear (130) is arranged on the base (110); A plurality of rotating shaft assemblies (300) are disposed around the outer circumference of the rotating seat (120); The rotating shaft assembly (300) comprises: a first rotating shaft (310); The first rotating shaft (310) is rotatably disposed on the rotating seat (120) and is transmission-connected to the fixed gear (130); A plurality of the substrate bases (200) are arranged on a plurality of the first rotating shafts (310); The substrate base (200) comprises: a base body (210) and a substrate mounting seat (230); The base body (210) is fixedly connected to the first rotating shaft (310); The substrate mounting seat (230) comprises: a fixing portion (231) and a rotating portion (232); The fixing portion (231) is arranged on the base body (210); The rotating portion (232) is rotatably arranged on the fixing portion (231) along a vertical direction; The rotating part (232) is used for mounting a substrate.

2. The multi-degree-of-freedom coating device according to claim 1, characterized in that: The rotating shaft assembly (300) comprises: a second rotating shaft (320); The second rotating shaft (320) is rotatably disposed on the rotating seat (120); The second rotating shaft (320) is provided with a driving gear plate (321); The base body (210) comprises: an inner ring gear plate (211) and a rotating gear plate (212); The inner ring gear plate (211) is fixedly connected to the first rotating shaft (310); The rotating gear plate (212) is rotatably disposed on the inner ring gear plate (211); The fixing portion (231) is fixed on the rotating gear plate (212); The rotating part (232) comprises: an angle adjustment seat (236) and a rotating seat (237); The angle adjustment seat (236) is rotatably arranged on the fixing portion (231) along a vertical direction; The rotating seat (237) can be rotatably disposed on the angle adjustment seat (236) and is used to place a substrate; The inner ring gear plate (211) is transmission-connected to the rotating seat (237), so that when the inner ring gear plate (211) rotates, the rotating seat (237) is driven to rotate.

3. The multi-degree-of-freedom coating device according to claim 2, characterized in that: The base body (210) further comprises: a base gear (213), a first short shaft (214) and a second short shaft (215); The first short shaft (214) is rotatably disposed on the fixing portion (231); The base gear (213) is fixed on the first short shaft (214) and meshingly connected with the inner ring gear plate (211); The second short shaft (215) is rotatably disposed on the angle adjustment seat (236) and is fixedly connected to the rotating seat (237); The second short shaft (215) is drivingly connected to the first short shaft (214).

4. The multi-degree-of-freedom coating device according to claim 3, characterized in that: The base body (210) further includes: a worm (216); The worm (216) is rotatably disposed on the fixing portion (231); The first short shaft (214) is meshedly connected to the worm (216) via a bevel gear; The second short shaft (215) is meshedly connected to the worm (216) via a bevel gear.

5. The multi-degree-of-freedom coating device according to claim 2, characterized in that: The rotating shaft assembly (300) comprises two first rotating shafts (310); The second rotating shaft (320) is arranged between the two first rotating shafts (310), and the second rotating shaft (320) is meshedly connected to the two first rotating shafts (310) at the same time.

6. The multi-degree-of-freedom coating device according to claim 2 or 5, characterized in that: On the rotating frame body (100), the first rotating shaft (310) is located outside the second rotating shaft (320).

7. The multi-degree-of-freedom coating device according to claim 2 or 5, characterized in that: A first gear (311) is fixedly connected to the first rotating shaft (310); The second rotating shaft (320) is fixedly connected to a second gear (322); The first gear (311) is meshingly connected to the fixed gear (130); A plurality of intermediate gears (121) are arranged on the rotating seat (120); The first gear (311) is transmission-connected to the second gear (322) via the intermediate gear (121).

8. The multi-degree-of-freedom coating device according to claim 1, characterized in that: The substrate mounting seat (230) further comprises: a fixing screw (239); The fixing screw (239) is rotatably disposed on the fixing portion (231) and is used to abut against the rotating portion (232) when tightened to limit the rotation of the rotating portion (232).

9. The multi-degree-of-freedom coating device according to claim 1, characterized in that: The substrate base (200) comprises a plurality of substrate mounting seats (230); A plurality of substrate mounting seats (230) are arranged on the base body (210) in a surrounding manner.

10. The multi-degree-of-freedom coating device according to claim 1 or 9, characterized in that: A plurality of substrate bases (200) are arranged on the first rotating shaft (310) along its axial direction.

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