Anti-vibration steering MEMS gyroscope

Abstract

The invention relates to the technical field of gyroscopes, and discloses an anti-vibration steering MEMS gyroscope which comprises a substrate, two driving frames, two coupling frames, two detection assemblies, two driving connecting beams, a center anchor point, two center anti-vibration coupling beams and a first steering decoupling beam. The detection assembly comprises detection frames and detection electrodes, the detection electrodes on the two detection frames form a differential electrode, the two central anti-vibration coupling beams can deform in the second direction, and when the angular velocity in the third direction is detected, the detection frames are driven by the first steering decoupling beams to reciprocate in the second direction along with the coupling frames moving in the first direction. According to the anti-vibration steering MEMS gyroscope disclosed by the invention, not only can the impact resistance of the gyroscope be improved, but also interference signals caused by process asymmetry can be reduced, and the sensitivity and the resolution of the gyroscope are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of gyroscopes, and particularly to a vibration-resistant steering MEMS gyroscope. Background Art

[0002] MEMS gyroscopes are widely used in many fields such as automobiles, drones, and consumer electronics due to their small volume and high detection accuracy. However, the existing MEMS gyroscopes on the market have significant deficiencies in performance. First, their shock resistance is poor, and external shocks easily cause displacement errors of the detection frame, resulting in signal distortion, seriously affecting the measurement accuracy and reliability, especially in complex shock environments, which limits their application in high-precision fields. Second, the existing MEMS gyroscopes generally adopt a double-detection-frame and double-coupling-frame design, and each detection frame corresponds to a coupling frame. However, limited by the existing processing technology, it is difficult for the two coupling frames to be completely consistent during the actual chip fabrication process. The interference signals introduced by process asymmetry will reduce the signal-to-noise ratio, affecting the sensitivity and resolution. In addition, there is a lack of connection between the two drive frames, resulting in poor coupling effect, affecting the stability and consistency of the drive mode, thereby reducing the accuracy of the detection mode and weakening the overall performance. At the same time, weak coupling necessarily requires the structures of the two drive frames to be the same, increasing the process difficulty. The above problems all restrict the further development of MEMS gyroscopes, and there is an urgent need for optimized design to improve performance. Summary of the Invention

[0003] Based on the above, the purpose of the present invention is to provide a vibration-resistant steering MEMS gyroscope, which has relatively low requirements for the chip processing technology, can not only improve the shock resistance of the gyroscope, but also reduce the interference signals caused by process asymmetry, and improve the sensitivity and resolution of the gyroscope.

[0004] To achieve the above object, the present invention adopts the following technical solutions:

[0005] A vibration-resistant steering MEMS gyroscope, comprising:

[0006] Two drive frames, distributed along a first direction, each drive frame is provided with an avoidance groove and is elastically connected to the substrate along a second direction;

[0007] Two coupling frames, respectively arranged in the two avoidance grooves and connected to the corresponding drive frames, the coupling frames can reciprocate along the second direction with the drive frames, and the symmetry axes of the coupling frames along the first direction and the second direction are the first symmetry axis and the second symmetry axis respectively;

[0008] Two detection components are located between the two coupling frames and are distributed along the second direction. Each detection component includes a detection frame and detection electrodes. Each detection frame is rigidly connected to the substrate along the first direction and elastically connected along the second direction. Each detection frame is connected to the two coupling frames. The detection electrodes are arranged on each detection frame. The detection electrodes include a detection positive electrode and a detection negative electrode that are symmetrically arranged. The detection electrodes on the two detection frames form a differential electrode. A limiting groove is provided on one of the coupling frame and the detection frame, and a limiting boss that cooperates with the limiting groove is provided on the other. When the coupling frame moves a preset displacement relative to the detection frame along the second direction, the limiting boss abuts against the limiting groove.

[0009] Two driving connection beams are respectively located at both ends of the driving frame along the second direction. Both ends of each driving connection beam are respectively connected to the two driving frames and the driving connection beam can rotate along the third direction.

[0010] A central anchor point and two central anti-vibration coupling beams. The two central anti-vibration coupling beams are located on both sides of the central anchor point along the first direction and can both deform along the second direction. Each central anti-vibration coupling beam is fixed on the central anchor point and is connected to the two detection frames.

[0011] A first steering decoupling beam is obliquely placed. One end of the first steering decoupling beam is connected to the coupling frame and the other end is connected to the detection frame.

[0012] When detecting the angular velocity in the third direction, the coupling frame reciprocates along the first direction due to the Coriolis force in the first direction. The detection frame reciprocates along the second direction following the coupling frame under the drive of the first steering decoupling beam. Among them, the first direction, the second direction and the third direction are perpendicular to each other in pairs.

[0013] As a preferred solution of an anti-vibration steering MEMS gyroscope, each central anti-vibration coupling beam includes a central anti-vibration coupling straight beam extending along the first direction and two central anti-vibration coupling elastic beams that can deform along the second direction. The central anti-vibration coupling straight beams of the two central anti-vibration coupling beams are respectively located on both sides of the central anchor point along the first direction. One end of the central anti-vibration coupling straight beam is connected to the central anchor point and the other end is connected to the two central anti-vibration coupling elastic beams. Each central anti-vibration coupling elastic beam is connected to the detection frame.

[0014] As a preferred solution for an anti-vibration steering MEMS gyroscope, the line connecting the centers of mass of the driving frame and the coupling frame is the center-of-mass line, and the center-of-mass line extends along the first direction, and the two detection frames are symmetrically distributed with respect to the center-of-mass line.

[0015] As a preferred solution for an anti-vibration steering MEMS gyroscope, the driving frame includes a first driving sub-frame, a second driving sub-frame, a first counterweight frame, a second counterweight frame, and a connecting frame. The first driving sub-frame and the second driving sub-frame have equal masses and are respectively located at both ends of the coupling frame along the second direction. The first counterweight frame is located on one side of the first driving sub-frame, the second counterweight frame is located on one side of the second driving sub-frame, and the connecting frame is located on the other side of the first driving sub-frame and the second driving sub-frame and connects the first driving sub-frame and the second driving sub-frame. The mass of the connecting frame is equal to the sum of the masses of the first counterweight frame and the second counterweight frame.

[0016] As a preferred solution for an anti-vibration steering MEMS gyroscope, the anti-vibration steering MEMS gyroscope further includes a first anchor point fixed on the substrate. The number of the first anchor points and the driving connection beams is two. Each driving connection beam includes a connecting cross beam and a driving deformation beam. The connecting cross beam can rotate around the first anchor point along the third direction, and the driving deformation beam can expand and contract along the first direction and its two ends are respectively connected to the connecting cross beam and the driving frame.

[0017] As a preferred solution for an anti-vibration steering MEMS gyroscope, each driving connection beam further includes four driving connection straight beams. Both ends of each driving connection straight beam are respectively connected to the first anchor point and the connecting cross beam. Two of the driving connection straight beams extend along the first direction and are located on both sides of the first anchor point along the first direction, and the other two driving connection straight beams extend along the second direction and are located on both sides of the first anchor point along the second direction.

[0018] As a preferred solution for an anti-vibration steering MEMS gyroscope, the anti-vibration steering MEMS gyroscope further includes a second steering decoupling beam. One end of the second steering decoupling beam is connected to the coupling frame, and the other end is fixed on the substrate. The first steering decoupling beam and the second steering decoupling beam connected to each coupling frame are symmetrically distributed with respect to the second symmetry axis.

[0019] As a preferred solution for an anti-vibration steering MEMS gyroscope, the included angle between the first steering decoupling beam and the first direction is 30°, the included angle between the second steering decoupling beam and the first direction is 30°, and two first steering decoupling beams and two second steering decoupling beams are provided on each coupling frame. Among them, the two first steering decoupling beams are symmetrically distributed with respect to the first symmetry axis, and the two second steering decoupling beams are symmetrically distributed with respect to the first symmetry axis.

[0020] As a preferred solution for an anti-vibration steering MEMS gyroscope, the first steering decoupling beam and the second steering decoupling beam are both steering beams. The steering beam includes a first steering elastic beam, a second steering elastic beam, and a steering connection beam. The first steering elastic beam and the second steering elastic beam are arranged in parallel. The two ends of the steering connection beam are respectively connected to the first steering elastic beam and the second steering elastic beam. The steering center line of the steering connection beam is the symmetry axis of the first steering elastic beam and the second steering elastic beam. The first steering elastic beam is connected to the coupling frame, and the second steering elastic beam is connected to the substrate or the detection frame.

[0021] As a preferred solution for an anti-vibration steering MEMS gyroscope, the anti-vibration steering MEMS gyroscope further includes a second anchor point and a detection elastic beam. One end of the detection elastic beam is connected to the second anchor point, and the other end is connected to the detection frame. The detection elastic beam includes a detection elastic frame or at least two detection elastic frames arranged in the second direction and connected in sequence, so as to realize that each detection frame is rigidly connected to the substrate in the first direction and elastically connected in the second direction.

[0022] The beneficial effects of the present invention are:

[0023] The anti-vibration steering MEMS gyroscope disclosed by the present invention is designed with a first steering decoupling beam that can change the detection direction of the detection frame, so that the working direction of the gyroscope is only the second direction. When the gyroscope is impacted in the first direction, since the detection frame and the substrate are rigidly connected in the first direction, the displacement of the detection frame in the first direction is very small, improving the anti-vibration ability of the anti-vibration steering MEMS gyroscope in the first direction without affecting the detection results of the detection electrodes; the design of the limit groove and the limit boss improves the anti-impact ability of the anti-vibration steering MEMS gyroscope in the second direction, i.e., the driving direction; even if the two coupling frames have problems with inconsistent structures due to the processing technology, since each detection frame is connected to the two coupling frames, that is, each detection frame is affected by the two coupling frames, the two detection frames still have good consistency. Therefore, the gyroscope with this structure has low requirements for the processing technology of the coupling frames; since the central anti-vibration coupling beam can suppress the same-direction movement of the two detection frames, the anti-impact performance of the gyroscope moving in the second direction is improved; in addition, the driving connection beam connected to the two driving frames can improve the consistency of the driving displacement when the two driving frames have asymmetric structures due to process problems, thereby improving the consistency of detection, increasing the detection sensitivity and resolution. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments of the present invention. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained according to the content of the embodiments of the present invention and these drawings.

[0025] Figure 1 It is a schematic diagram of the anti-vibration steering MEMS gyroscope provided by a specific embodiment of the present invention;

[0026] Figure 2 It is a schematic diagram of the driving frame, driving electrodes and driving detection electrodes of the anti-vibration steering MEMS gyroscope provided by a specific embodiment of the present invention;

[0027] Figure 3 It is a schematic diagram of the detection component, central anchor point and central anti-vibration coupling beam of the anti-vibration steering MEMS gyroscope provided by a specific embodiment of the present invention;

[0028] Figure 4 It is a schematic diagram of the central anchor point and central anti-vibration coupling beam of the anti-vibration steering MEMS gyroscope provided by a specific embodiment of the present invention;

[0029] Figure 5 It is a schematic diagram of the driving connection beam of the anti-vibration steering MEMS gyroscope provided by a specific embodiment of the present invention;

[0030] Figure 6 Schematic diagrams of the coupling frame, the first steering elastic beam, and the second steering elastic beam of the anti-vibration steering MEMS gyroscope provided by a specific embodiment of the present invention;

[0031] Figure 7 Schematic diagram of the anti-vibration steering MEMS gyroscope provided by a specific embodiment of the present invention in the driving mode;

[0032] Figure 8 Schematic diagram of the anti-vibration steering MEMS gyroscope provided by a specific embodiment of the present invention in the detection mode.

[0033] In the figure:

[0034] 11. Driving frame; 111. First driving sub-frame; 112. Second driving sub-frame; 113. First counterweight frame; 114. Second counterweight frame; 115. Connection frame; 110. Avoidance groove; 12. Driving connection beam; 121. Connection cross beam; 122. Driving deformation beam; 123. Driving connection straight beam; 13. First anchor point; 14. Driving beam; 15. Driving electrode; 16. Driving detection electrode; 17. Third anchor point;

[0035] 21. Coupling frame; 2101. Limiting groove; 22. Coupling straight beam;

[0036] 31. Detection frame; 311. Limiting boss; 32. Detection electrode; 33. Second anchor point; 34. Detection elastic beam;

[0037] 41. Central anchor point; 42. Central anti-vibration coupling beam; 421. Central anti-vibration coupling straight beam; 422. Central anti-vibration coupling elastic beam;

[0038] 501. First steering elastic beam; 502. Second steering elastic beam; 503. Steering connection beam; 51. First steering decoupling beam; 52. Second steering decoupling beam. Detailed implementation manners

[0039] To make the technical problems solved by the present invention, the technical solutions adopted, and the achieved technical effects clearer, the technical solutions of the embodiments of the present invention will be further described in detail below with reference to the drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts fall within the protection scope of the present invention.

[0040] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as a limitation on the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions.

[0041] In the description of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0042] This embodiment provides a vibration-resistant steering MEMS gyroscope, as Figures 1 to 8 shown, which includes two driving frames 11, two coupling frames 21, two detection components, two driving connection beams 12, a central anchor 41, two central vibration-resistant coupling beams 42, and a first steering decoupling beam 51. Among them, the two driving frames 11 are distributed along the first direction, and each driving frame 11 is provided with an avoidance groove 110. The driving frame 11 is elastically connected to the substrate along the second direction. The two coupling frames 21 are respectively arranged in the two avoidance grooves 110 and are connected to the corresponding driving frames 11. The coupling frame 21 can reciprocate along the second direction with the driving frame 11. The symmetry axes of the coupling frame 21 along the first direction and the second direction are the first symmetry axis and the second symmetry axis respectively. In the driving mode, the driving frame 11 reciprocates along the second direction, and the coupling frame 21 moves synchronously with the driving frame 11 along the second direction.

[0043] As Figure 1 shown, the two detection components are both located between the two coupling frames 21 and are distributed along the second direction. Each detection component includes a detection frame 31 and a detection electrode 32. Each detection frame 31 is rigidly connected to the substrate along the first direction and elastically connected along the second direction. Each detection frame 31 is connected to the two coupling frames 21. The detection electrode 32 is arranged on each detection frame 31. The detection electrode 32 includes a detection positive electrode and a detection negative electrode arranged in an anti-symmetric manner. The detection electrodes 32 on the two detection frames 31 form a differential electrode.

[0044] As Figure 1 、 Figure 3 andFigure 6 As shown in the figure, a limiting groove 2101 is provided on the coupling frame 21 of this embodiment, and a limiting boss 311 that cooperates with the limiting groove 2101 is provided on the detection frame 31. When the coupling frame 21 moves a preset displacement relative to the detection frame 31 along the second direction, the limiting boss 311 can abut against the limiting groove 2101. This limiting design further improves the anti-impact ability of the anti-vibration steering MEMS gyroscope in the driving direction. It should be noted that the preset displacement in the present invention is specifically set according to actual needs to ensure that the detection frame 31 can move a certain displacement along the second direction. In other embodiments, a limiting boss 311 can also be provided on the coupling frame 21, and a limiting groove 2101 corresponding to the limiting boss 311 can be provided on the detection frame 31, which is specifically set according to actual needs.

[0045] In this embodiment, the two driving connection beams 12 are respectively located at both ends of the driving frame 11 along the second direction. Both ends of each driving connection beam 12 are respectively connected to the two driving frames 11 and the driving connection beam 12 can rotate along the third direction. The two central anti-vibration coupling beams 42 are located on both sides of the central anchor point 41 along the first direction and can both deform along the second direction. Each central anti-vibration coupling beam 42 is fixed on the central anchor point 41 and is connected to the two detection frames 31.

[0046] As Figure 1 shown in the figure, the first steering decoupling beam 51 of this embodiment is obliquely placed. One end of the first steering decoupling beam 51 is connected to the coupling frame 21, and the other end of the first steering decoupling beam 51 is connected to the detection frame 31. When detecting the angular velocity in the third direction, the coupling frame 21 reciprocates along the first direction due to the Coriolis force in the first direction, and the detection frame 31 reciprocates along the second direction driven by the first steering decoupling beam 51, where the first direction, the second direction, and the third direction are perpendicular to each other in pairs.

[0047] Specifically, the two driving frames 11 of this embodiment have the same mass and are symmetric in structure, the two coupling frames 21 have the same mass and are symmetric in structure, and the two detection frames 31 have the same mass and are symmetric in structure. The anti-vibration steering MEMS gyroscope with this structure can ensure that the forces received by the two coupling frames 21 are consistent, thereby ensuring that the forces finally received by the two detection frames 31 are the same, guaranteeing the consistency of detection, improving the differential effect of the anti-vibration steering MEMS gyroscope, and further increasing the accuracy and sensitivity of detection.

[0048] As Figure 1 shown in the figure, the first direction of this embodiment is the X-axis direction, the second direction is the Y-axis direction, and the third direction is the Z-axis direction. It should be noted that in other embodiments of the present invention, the first direction can also be the Y-axis direction. In this case, the second direction is the X-axis direction and the third direction is the Z-axis direction, which is specifically set according to actual needs.

[0049] In the anti-vibration steering MEMS gyroscope of this embodiment, the designed first steering decoupling beam 51 can change the detection direction of the detection frame 31, so that the working direction of the gyroscope is only the second direction. When the gyroscope is impacted in the first direction, since the detection frame and the substrate are rigidly connected in the first direction, the displacement of the detection frame 31 in the first direction is very small, improving the anti-vibration ability of the anti-vibration steering MEMS gyroscope in the first direction without affecting the detection result of the detection electrode 32; the design of the limiting groove 2101 and the limiting boss 311 improves the anti-impact ability of the anti-vibration steering MEMS gyroscope in the second direction, i.e., the driving direction; even if the two coupling frames 21 have structural inconsistencies due to the influence of the processing technology, since each detection frame 31 is connected to the two coupling frames 21, that is, each detection frame 31 is affected by the two coupling frames 21, the two detection frames 31 still have good consistency. Therefore, the gyroscope with this structure has low requirements for the processing technology of the coupling frames 21; since the central anti-vibration coupling beam 42 can suppress the same-direction movement of the two detection frames, the anti-impact performance of the gyroscope moving along the second direction is improved; in addition, the driving connection beam 12 connected to the two driving frames 11 can improve the consistency of the driving displacement when the two driving frames 11 have structural asymmetry due to process problems, thereby improving the detection consistency, increasing the detection sensitivity and resolution.

[0050] As Figure 2 shown, the anti-vibration steering MEMS gyroscope of this embodiment further includes a driving electrode 15 and a driving detection electrode 16. The driving electrode 15 and the driving detection electrode 16 are both arranged on the driving frame 11. The driving electrode 15 includes a driving positive electrode and a driving negative electrode. The driving detection electrode 16 is located between the driving positive electrode and the driving negative electrode. The driving detection electrode 16 can reflect the movement condition of the driving frame 11, so as to facilitate adjusting the movement condition of the driving frame 11 driven by the driving electrode 15 and ensure the stability of the movement of the driving frame 11 in the driving mode.

[0051] As Figure 3 and Figure 4As shown in the figure, each central anti-vibration coupling beam 42 of this embodiment includes a central anti-vibration coupling straight beam 421 extending in the first direction and two central anti-vibration coupling elastic beams 422 capable of deforming in the second direction. The central anti-vibration coupling straight beam 421 can rotate in the third direction with its connection point with the central anchor 41 as the rotation point. The central anti-vibration coupling straight beams 421 of the two central anti-vibration coupling beams 42 are respectively located on both sides of the central anchor 41 along the first direction. One end of the central anti-vibration coupling straight beam 421 is connected to the central anchor 41, and the other end is connected to the two central anti-vibration coupling elastic beams 422. The two central anti-vibration coupling elastic beams 422 of each central anti-vibration coupling beam 42 respectively correspond to the two detection frames 31, and each central anti-vibration coupling elastic beam 422 is connected to one detection frame 31. When the anti-vibration steering MEMS gyroscope is impacted, the moving directions of the two detection frames 31 are the same, and the central anti-vibration coupling beam 42 can suppress the same-direction movement of the two detection frames 31, improving the anti-impact performance of the anti-vibration steering MEMS gyroscope.

[0052] In this embodiment, the line connecting the centers of mass of the drive frame 11 and the coupling frame 21 is the center-of-mass line, that is, the centers of mass of the two drive frames 11 and the centers of mass of the two coupling frames 21 are all located on the center-of-mass line. The center-of-mass line extends in the first direction, and the two detection frames 31 are symmetrically distributed with respect to the center-of-mass line. Specifically, as Figure 2 shown, to ensure that the center of mass of the drive frame 11 meets the above conditions, the drive frame 11 of this embodiment includes a first drive sub-frame 111, a second drive sub-frame 112, a first counterweight frame 113, a second counterweight frame 114, and a connection frame 115. The first drive sub-frame 111 and the second drive sub-frame 112 have equal mass and are respectively located at both ends of the coupling frame 21 along the second direction. The first counterweight frame 113 is located on one side of the first drive sub-frame 111, the second counterweight frame 114 is located on one side of the second drive sub-frame 112, and the connection frame 115 is located on the other side of the first drive sub-frame 111 and the second drive sub-frame 112 and connects the first drive sub-frame 111 and the second drive sub-frame 112. The mass of the connection frame 115 is equal to the sum of the masses of the first counterweight frame 113 and the second counterweight frame 114. It should be noted that in other embodiments of the present invention, the structure of the drive frame 11 is not limited to the above definition and can also be other structures as long as the centers of mass of the two drive frames 11 meet the above conditions.

[0053] In the drive mode, the drive frame 11 with the above structure can perform linear reciprocating motion in the second direction without rotation, thereby ensuring that the coupling frame 21 moves linearly accordingly, and further ensuring that the coupling frame 21 is not deflected by the Coriolis force in the first direction under the angular velocity input in the third direction. Finally, the detection frame 31 moves in the second direction under the steering action of the first steering decoupling beam 51, facilitating the detection of the detection electrode 32.

[0054] AsFigure 1 and Figure 5 As shown in Figure 5 , the anti-vibration steering MEMS gyroscope of this embodiment further includes a first anchor point 13 fixed on the substrate. The number of the first anchor points 13 and the driving connection beams 12 is two. Each driving connection beam 12 includes a connecting cross beam 121 and a driving deformation beam 122. The connecting cross beam 121 can rotate around the first anchor point 13 in the third direction, and the driving deformation beam 122 can expand and contract in the first direction, and its two ends are respectively connected to the connecting cross beam 121 and the driving frame 11. Specifically, each driving connection beam 12 includes four driving deformation beams 122. Among them, two driving deformation beams 122 of the driving connection beam 12 correspond to one driving frame 11, and the other two driving deformation beams 122 of the driving connection beam 12 correspond to the other driving frame 11. That is, each driving frame 11 corresponds to four driving deformation beams 122. The four driving deformation beams 122 are respectively arranged at the four corner positions of the driving frame 11 to ensure the stable connection between the two driving connection beams 12 and the two driving frames 11.

[0055] As Figure 1 shown in Figure 1 , each driving connection beam 12 further includes four driving connection straight beams 123. The two ends of each driving connection straight beam 123 are respectively connected to the first anchor point 13 and the connecting cross beam 121. Among them, two driving connection straight beams 123 extend in the first direction and are located on both sides of the first anchor point 13 in the first direction, and the other two driving connection straight beams 123 extend in the second direction and are located on both sides of the first anchor point 13 in the second direction. In the driving mode, the two driving frames 11 move synchronously and in opposite directions along the Y-axis direction. The connecting cross beam 121 rotates with the center of the first anchor point 13 as the rotation point, and the driving deformation beam 122 and the driving connection straight beam 123 deform, further ensuring the consistency of the movement of the two driving frames 11. In addition, this structure of the driving connection beam 12 also enables it to have the ability to resist impact.

[0056] As Figure 1 shown in Figure 1 , the anti-vibration steering MEMS gyroscope of this embodiment further includes a second steering decoupling beam 52. The second steering decoupling beam 52 is obliquely placed. One end of the second steering decoupling beam 52 is connected to the coupling frame 21, and the other end of the second steering decoupling beam 52 is fixed on the substrate. The first steering decoupling beam 51 and the second steering decoupling beam 52 connected to each coupling frame 21 are symmetrically distributed with respect to the second symmetry axis. Each coupling frame 21 is provided with two first steering decoupling beams 51 and two second steering decoupling beams 52. Among them, the two first steering decoupling beams 51 are symmetrically distributed with respect to the first symmetry axis, and the two second steering decoupling beams 52 are symmetrically distributed with respect to the first symmetry axis.

[0057] As Figure 6As shown, each coupling frame 21 corresponds to two first steering decoupling beams 51 and two second steering decoupling beams 52. The first steering decoupling beams 51 and the second steering decoupling beams 52 are both arranged at the corner positions of the coupling frame 21. In this embodiment, the angle between the first steering decoupling beam 51 and the first direction is 30°, and the angle between the second steering decoupling beam 52 and the first direction is also 30°. It should be noted that in other embodiments of the present invention, the angles between the first steering decoupling beam 51 and the second steering decoupling beam 52 and the first direction are not limited to 30° defined in this embodiment, and can also be any angle between 25° and 35°, or other angles, as long as the first steering decoupling beam 51 and the second steering decoupling beam 52 can play a steering role, and are specifically set according to actual needs, and this embodiment does not make specific limitations.

[0058] The first steering decoupling beam 51 and the second steering decoupling beam 52 in this embodiment are both steering beams. As Figure 6 shown, the steering beam includes a first steering elastic beam 501, a second steering elastic beam 502, and a steering connecting beam 503. The first steering elastic beam 501 and the second steering elastic beam 502 are arranged in parallel. The two ends of the steering connecting beam 503 are respectively connected to the same end of the first steering elastic beam 501 and the second steering elastic beam 502. The steering center line of the steering connecting beam 503 is the axis of symmetry of the first steering elastic beam 501 and the second steering elastic beam 502. The first steering elastic beam 501 is connected to the coupling frame 21, and the second steering elastic beam 502 is connected to the substrate or the detection frame 31.

[0059] Furthermore, the first steering elastic beam 501 and the second steering elastic beam 502 in this embodiment are both square frame beams, and the steering connecting beam 503 is a U-shaped connecting beam. The two ends of the U-shaped connecting beam are respectively connected to the same end of the two square frame beams. Whether the steering decoupling beam to which the first steering elastic beam 501 belongs is the first steering decoupling beam 51 or the second steering decoupling beam 52, the other end is connected to the coupling frame 21; when the steering decoupling beam to which the second steering elastic beam 502 belongs is the first steering decoupling beam 51, the other end is connected to the detection frame 31; when the steering decoupling beam to which the second steering elastic beam 502 belongs is the second steering decoupling beam 52, the other end is connected to the substrate. It should be noted that in other embodiments of the present invention, the structures of the first steering decoupling beam 51 and the second steering decoupling beam 52 are not limited to the square frame beams in this embodiment, and can also be U-shaped beams or elastic beams with other structures, and are specifically set according to actual needs, and this embodiment does not make limitations.

[0060] As Figure 1As shown in the figure, the anti-vibration steering MEMS gyroscope of this embodiment further includes four second anchor points 33 fixed on the substrate and four detection elastic beams 34 connected to each second anchor point 33. The detection elastic beams 34 are connected to the detection frame 31 and can deform along the second direction. Both ends of each detection frame 31 along the second direction are connected to the detection elastic beams 34, and each detection frame 31 corresponds to two second anchor points 33 and two detection elastic beams 34.

[0061] Specifically, the detection elastic beam 34 includes two detection elastic frames arranged along the second direction and connected at one end. The detection elastic beam 34 with this structure can deform along the second direction to achieve the elastic connection between the detection frame 31 and the substrate along the second direction, so as to ensure that the detection frame 31 can move along the second direction. The detection elastic beam 34 can also achieve the rigid connection between the detection frame 31 and the substrate in the first direction. When the anti-vibration steering MEMS gyroscope is impacted in the first direction, the detection elastic beam 34 can ensure that its displacement in the first direction is very small, achieving the anti-impact effect without affecting the detection result of the detection electrode 32. It should be noted that in other embodiments of the present invention, the detection elastic beam 34 may also include a detection connection frame or at least three detection connection frames arranged along the second direction and connected in sequence, as long as it can achieve the function of rigid connection between each detection frame 31 and the substrate in the first direction and elastic connection in the second direction, and it is specifically set according to actual needs. This embodiment will not be limited anymore.

[0062] As Figure 1 As shown in the figure, the anti-vibration steering MEMS gyroscope of this embodiment further includes four third anchor points 17 and eight drive beams 14. Each drive beam 14 can deform along the second direction, with one end connected to the drive frame 11 and the other end fixed on the substrate. Each drive frame 11 corresponds to four drive beams 14 and two third anchor points 17. The four drive beams 14 are respectively located at the four corners of the coupling frame 21, where two drive beams 14 respectively correspond to two third anchor points 17, and the other two drive beams 14 correspond to two second anchor points 33. The two second steering decoupling beams 52 corresponding to each coupling frame 21 respectively correspond to two third anchor points 17. One end of the second steering decoupling beam 52 is fixed on the third anchor point 17, and the other end is connected to the coupling frame 21. Specifically, each drive beam 14 is composed of several straight beams. One end of the drive beam 14 is connected to the second anchor point 33 or the third anchor point 17, and the other end is connected to the drive frame 11.

[0063] As Figure 1As shown in the figure, the anti-vibration steering MEMS gyroscope of this embodiment further includes a coupling straight beam 22. The coupling straight beam 22 extends along the second direction, one end of which is connected to the driving frame 11, and the other end is connected to the coupling frame 21. Specifically, each coupling frame 21 of this embodiment corresponds to four coupling straight beams 22. The coupling straight beam 22 can deform along the X-axis direction. When the coupling frame 21 is subjected to the Coriolis force in the X-axis direction, the coupling straight beam 22 deforms along the X-axis direction, and the driving frame 11 will not move along the X-axis direction accordingly, realizing the unidirectional decoupling of the detected drive.

[0064] In the driving mode, as Figure 7 shown, the driving electrode 15 drives the corresponding driving frame 11 to move along the Y-axis direction. The two driving frames 11 move synchronously and in opposite directions. The coupling frame 21 moves synchronously under the drive of the coupling straight beam 22, so that the two coupling frames 21 move in opposite directions along the Y-axis direction at the same moment. The existence of the first steering decoupling beam 51 and the second steering decoupling beam 52 makes the detection frame 31 not move with the movement of the coupling frame 21 moving along the Y-axis direction.

[0065] In the detection mode, as Figure 8 shown, when detecting the angular velocity in the Z-axis direction, the coupling frame 21 makes a reciprocating motion along the X-axis direction due to the Coriolis force in the X-axis direction. The two coupling frames 21 move in opposite directions at the same moment. Under the action of the first steering decoupling beam 51, the detection frame 31 moves along the Y-axis direction, and the two detection frames 31 move in opposite directions. According to the simulation results, as long as the structures, materials, and stiffnesses of the first steering decoupling beam 51, the second steering decoupling beam 52, the coupling straight beam 22, the detection elastic beam 34, and the central anti-vibration coupling beam 42 are reasonably designed, the detection displacement of the detection frame 31 can be greater than the displacement of the coupling frame 21, thereby further improving the detection sensitivity of the anti-vibration steering MEMS gyroscope.

[0066] Note that the above is only the preferred embodiment of the present invention and the applied technical principles. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described here. Various obvious changes, re-adjustments, and substitutions can be made by those skilled in the art without departing from the protection scope of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments. Without departing from the concept of the present invention, more other equivalent embodiments can be included, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. A vibration-resistant steering MEMS gyroscope, characterized in that: include: Two driving frames are distributed along the first direction, each of the driving frames is provided with a avoiding groove and is elastically connected to the substrate along the second direction; Two coupling frames, respectively disposed in the two avoidance grooves and connected to the corresponding driving frames, the coupling frames being capable of reciprocating along the second direction with the driving frame, and the symmetry axes of the coupling frames along the first direction and the second direction being the first symmetry axis and the second symmetry axis respectively; Two detection components are located between the two coupling frames and the two detection components are distributed along the second direction, each of the detection components includes a detection frame and a detection electrode, each of the detection frames is rigidly connected to the substrate along the first direction and elastically connected along the second direction, each of the detection frames is connected to the two coupling frames, the detection electrode is arranged on each of the detection frames, the detection electrode includes a positive detection electrode and a negative detection electrode that are antisymmetrically arranged, and the detection electrodes on the two detection frames constitute a differential electrode; one of the coupling frame and the detection frame is provided with a limiting groove, and the other is provided with a limiting boss that cooperates with the limiting groove, and when the coupling frame moves a preset displacement relative to the detection frame along the second direction, the limiting boss abuts against the limiting groove; Two driving connection beams, respectively located at two ends of the driving frame along the second direction, two ends of each driving connection beam are respectively connected to the two driving frames and the driving connection beam can rotate along the third direction; A central anchor point and two central anti-vibration coupling beams, wherein the two central anti-vibration coupling beams are located on both sides of the central anchor point along the first direction and are both capable of deforming along the second direction, and each of the central anti-vibration coupling beams is fixed on the central anchor point and connected to the two detection frames; A first steering decoupling beam is placed obliquely and one end of the first steering decoupling beam is connected to the coupling frame, and the other end of the first steering decoupling beam is connected to the detection frame; When detecting the angular velocity in the third direction, the coupling frame reciprocates along the first direction due to the Coriolis force in the first direction, and the detection frame reciprocates along the second direction with the coupling frame driven by the first steering decoupling beam, wherein the first direction, the second direction and the third direction are perpendicular to each other.

2. The anti-vibration steering MEMS gyroscope according to claim 1, characterized in that: Each of the central anti-vibration coupling beams includes a central anti-vibration coupling straight beam extending along the first direction and two central anti-vibration coupling elastic beams that can be deformed along the second direction. The central anti-vibration coupling straight beams of the two central anti-vibration coupling beams are respectively located on both sides of the central anchor point along the first direction, one end of the central anti-vibration coupling straight beam is connected to the central anchor point, and the other end is connected to the two central anti-vibration coupling elastic beams, and each of the central anti-vibration coupling elastic beams is connected to the detection frame.

3. The anti-vibration steering MEMS gyroscope according to claim 1, characterized in that: A line connecting the centroid of the driving frame and the centroid of the coupling frame is a centroid line, the centroid line extends along the first direction and the two detection frames are symmetrically distributed relative to the centroid line.

4. The anti-vibration steering MEMS gyroscope according to claim 3, characterized in that: The driving frame includes a first driving sub-frame, a second driving sub-frame, a first counterweight frame, a second counterweight frame and a connecting frame. The first driving sub-frame and the second driving sub-frame have equal masses and are respectively located at two ends of the coupling frame along the second direction. The first counterweight frame is located on one side of the first driving sub-frame, and the second counterweight frame is located on one side of the second driving sub-frame. The connecting frame is located on the other side of the first driving sub-frame and the second driving sub-frame and connects the first driving sub-frame and the second driving sub-frame. The mass of the connecting frame is equal to the sum of the masses of the first counterweight frame and the second counterweight frame.

5. The anti-vibration steering MEMS gyroscope according to claim 1, characterized in that: The anti-vibration steering MEMS gyroscope also includes a first anchor point fixed on the substrate, the first anchor point and the driving connecting beam are both in number of two, each of the driving connecting beams includes a connecting beam and a driving deformation beam, the connecting beam can rotate along the third direction around the first anchor point, the driving deformation beam can be extended and retracted along the first direction and its two ends are respectively connected to the connecting beam and the driving frame.

6. The anti-vibration steering MEMS gyroscope according to claim 5, characterized in that: Each of the driving connection beams also includes four driving connection straight beams, and both ends of each of the driving connection straight beams are respectively connected to the first anchor point and the connecting cross beam, two of which extend along the first direction and are located on both sides of the first anchor point along the first direction, and the other two of which extend along the second direction and are located on both sides of the first anchor point along the second direction.

7. The anti-vibration steering MEMS gyroscope according to claim 1, characterized in that: The vibration-resistant steering MEMS gyroscope also includes a second steering decoupling beam, one end of which is connected to the coupling frame, and the other end is fixed to the substrate, and the first steering decoupling beam and the second steering decoupling beam connected to each coupling frame are symmetrically distributed relative to the second symmetry axis.

8. The anti-vibration steering MEMS gyroscope according to claim 7, characterized in that: The angle between the first steering decoupling beam and the first direction is 30°, the angle between the second steering decoupling beam and the first direction is 30°, and each coupling frame is provided with two first steering decoupling beams and two second steering decoupling beams, wherein the two first steering decoupling beams are symmetrically distributed relative to the first symmetry axis, and the two second steering decoupling beams are symmetrically distributed relative to the first symmetry axis.

9. The anti-vibration steering MEMS gyroscope according to claim 7, characterized in that: The first steering decoupling beam and the second steering decoupling beam are both steering beams, and the steering beams include a first steering elastic beam, a second steering elastic beam and a steering connecting beam. The first steering elastic beam and the second steering elastic beam are arranged in parallel, and the two ends of the steering connecting beam are respectively connected to the first steering elastic beam and the second steering elastic beam. The steering center line of the steering connecting beam is the symmetry axis of the first steering elastic beam and the second steering elastic beam. The first steering elastic beam is connected to the coupling frame, and the second steering elastic beam is connected to the substrate or the detection frame.

10. The anti-vibration steering MEMS gyroscope according to claim 1, characterized in that: The anti-vibration steering MEMS gyroscope also includes a second anchor point and a detection elastic beam, one end of the detection elastic beam is connected to the second anchor point, and the other end is connected to the detection frame, and the detection elastic beam includes one detection elastic frame or at least two detection elastic frames arranged along the second direction and connected in sequence, so that each detection frame is rigidly connected to the substrate along the first direction and elastically connected along the second direction.

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