Negative pressure detection device for gas cabinet

Abstract

The invention provides a negative pressure detection device for a gas cabinet, and the device comprises a cabinet body which is provided with a negative pressure pipeline, and the negative pressure pipeline is communicated with the cabinet body and a negative pressure device; the differential pressure sensor is arranged on the inner wall of the cabinet body, a low-pressure connector of the differential pressure sensor is communicated with the negative-pressure pipeline through a first pipeline, and a high-pressure connector of the differential pressure sensor is connected with a second pipeline which is arranged in the cabinet body and communicated with the atmosphere. The problem of timeliness of manual detection of the negative pressure pipeline is solved.

Description

Technical Field

[0001] The present invention belongs to the field of wafer equipment, and particularly relates to a negative pressure detection device for a gas cabinet. Background Art

[0002] In the process of wafer manufacturing, the importance of plasma equipment is increasing. Automated plasma equipment inevitably uses negative pressure. In the process gas cabinet, external negative pressure is required for general exhaust. If gas escapes into the cabinet, the negative pressure pipeline can suck away the escaped gas.

[0003] Conventional equipment can only judge whether the negative pressure is working properly by manually detecting the pressure gauge on the negative pressure pipeline, which has the problem of slow detection of equipment abnormalities. Summary of the Invention

[0004] The purpose of the present invention is to provide a negative pressure detection device for a gas cabinet, which can automatically judge the existence of negative pressure through the pressure difference between the negative pressure pipeline and the atmospheric pressure. If the negative pressure in the negative pressure pipeline disappears, an instant alarm will be given to prompt, and the safety of equipment use is ensured through safety interlock.

[0005] A negative pressure detection device for a gas cabinet includes: A cabinet 1, on which a negative pressure pipeline is provided, and the negative pressure pipeline connects the cabinet 1 and a negative pressure device; A differential pressure sensor 2 is arranged on the inner wall of the cabinet 1. Its low-pressure interface is connected to the negative pressure pipeline through a first pipeline, and its high-pressure interface is connected to a second pipeline. The second pipeline is placed in the cabinet 1 and communicates with the atmosphere.

[0006] Preferably, a first pipe joint 11 is installed on the inner wall of the cabinet 1, and the first pipeline is adapted to the first pipe joint 11; the first pipe joint 11 extends into the negative pressure pipeline to communicate with the negative pressure pipeline.

[0007] Preferably, a second pipe joint 12 is installed on the inner wall of the cabinet 1. One end of the second pipe joint 12 is provided with an installation hole adapted to the second pipeline. The installation hole is a through hole to communicate the second pipeline and the atmosphere, and the other end is connected to the cabinet 1.

[0008] Preferably, the differential pressure sensor 2 is a PSF100A-0.5.

[0009] Preferably, the negative pressure device is an exhaust pump.

[0010] Compared with the prior art, the advantages of the present invention are: 1. It can monitor in real time whether the negative pressure (relative to the atmospheric pressure) required by the equipment exists.

[0011] 2. When the air pressure in the equipment increases, that is, when the negative pressure in the equipment disappears, an alarm can be given immediately for processing.

[0012] 3. Reduce the labor inspection cost and improve the equipment safety. Description of the Drawings

[0013] Figure 1 It is the internal structure diagram of the negative pressure detection device for the gas cabinet; Figure 2 It is the installation intention of the first pipe joint; Figure 3 It is the installation intention of the second pipe joint; Figure 4 It is the schematic diagram of the principle of the negative pressure detection device for the gas cabinet; Figure 5 It is the connection schematic diagram of the differential pressure sensor and the cabinet body; Figure 6 It is the connection schematic diagram of the differential pressure sensor and the PLC module.

[0014] Wherein, 1 - cabinet body, 11 - first pipe joint, 12 - second pipe joint; 2 - differential pressure sensor. Detailed Embodiment

[0015] The negative pressure detection device for the gas cabinet of the present invention will be described in more detail below with reference to the schematic diagrams, in which the preferred embodiments of the present invention are shown. It should be understood that those skilled in the art can modify the present invention described herein while still achieving the advantageous effects of the present invention. Therefore, the following description should be understood as a broad guidance for those skilled in the art and not as a limitation to the present invention.

[0016] In the process gas distribution module (Gas Box) of the plasma equipment, it is necessary to connect general exhaust (negative pressure). Aiming at the timeliness problem of manual inspection of the negative pressure pipeline of the existing plasma ashing equipment, in this embodiment, through the negative pressure detection device, the existence of general exhaust negative pressure can be monitored in real time, ensuring the stable operation of the equipment and improving the equipment safety.

[0017] As Figures 1 - 6 , a negative pressure detection device for a gas cabinet, comprising: The cabinet body 1 is enclosed, and a negative pressure pipeline is arranged thereon through fasteners. The negative pressure pipeline communicates the cabinet body 1 and the negative pressure device, as Figure 2 shown; the negative pressure device is an exhaust pump.

[0018] As Figure 1 shown, since the cabinet body 1 needs to be enclosed, all the reserved openings on its side wall are closed. Figure 1 The upper cover plate of the cabinet body 1 in

[0019] is not shown. Further, a first pipe joint 11 is installed on the inner wall of the cabinet body, and the first pipeline is adapted to the first pipe joint 11; the first pipeline passes through the window opened on the cabinet body 1 and extends into the negative pressure pipeline, asFigure 2 as shown

[0020] Figure 2 As shown in the figure, a circular window for installing a negative pressure pipeline is shown on the cabinet body 1. The window is opened on the cabinet body 1 and penetrates through the outer wall of the cabinet body 1.

[0021] The cross-sectional area of the window is much larger than that of the No. 1 pipeline. Specifically, the negative pressure pipeline is arranged on the outer wall of the cabinet body 1 through fasteners and is connected to the window.

[0022] The No. 1 pipe joint 11 is installed on the inner wall of the cabinet body 1 through a bracket and fasteners.

[0023] Thus, the air pressures in the No. 1 pipeline, the negative pressure pipeline, and the cabinet body 1 are all equal.

[0024] The No. 2 pipe joint 12 is installed on the inner wall of the cabinet body 1. As shown in the figure, one end of the No. 2 pipe joint 12 is provided with an installation hole adapted to the No. 2 pipeline. The installation hole is a through hole to connect the No. 2 pipeline and the atmosphere, and the other end is connected to the cabinet body 1.

[0025] As Figure 3 shown, the No. 2 pipe joint is threadedly connected to the installation sleeve, and the installation sleeve is threadedly connected to the outer wall of the cabinet body 1 or embedded in the outer wall of the cabinet body 1. The installation sleeve is a hollow structure with both ends open.

[0026] The differential pressure sensor 2 is arranged on the inner wall of the cabinet body 1. As Figure 5 shown, its low-pressure interface is connected to the No. 1 pipeline, and its high-pressure interface is connected to the No. 2 pipeline. The No. 1 pipeline and the No. 2 pipeline are placed in the cabinet body 1.

[0027] Among them, the high-pressure interface and the low-pressure interface are not connected.

[0028] The differential pressure sensor 2 is signal-connected to the PLC module. As Figure 5 shown, the PLC is on one side of the cabinet body 1 and is electrically connected to the upper computer.

[0029] Regarding the installation method of the differential pressure sensor 2, as Figure 5 shown: it is threadedly connected to the sleeve on the support plate, the sleeve is clamped on the support plate, and the support plate extends from the inner wall of the cabinet body 1 into the cabinet body 1.

[0030] During the semiconductor production process, if the negative pressure disappears, a signal is output through the differential pressure sensor, and the device gives an instant alarm prompt, improving the device's ability to detect abnormalities and reducing the manual inspection cost. The installation method of this negative pressure detection device: (1) External supply of negative pressure to the device: The negative pressure device is connected to the external negative pressure pipeline on the device gas cabinet.

[0031] (2) Connect the low-pressure end of the differential pressure sensor to the external negative pressure pipeline through a pipeline.

[0032] (3) Connect the high-pressure end of the differential pressure sensor to the atmosphere.

[0033] (4) When the pressure in the negative pressure pipeline is normal, the equipment operates normally.

[0034] Under normal operating conditions, the air pressure in cabinet 1 is less than the atmospheric pressure.

[0035] Also, since the air pressures in the first pipeline, the negative pressure pipeline, and cabinet 1 are all equal.

[0036] Therefore, a normal pressure in the negative pressure pipeline means that the air pressure inside it is less than the atmospheric pressure, which is called the negative pressure state.

[0037] (5) When the pressure in the negative pressure pipeline increases (the negative pressure disappears), the pressures at both ends of the differential pressure sensor are the same, the trigger signal changes, and a signal is sent to the PLC module to trigger the equipment safety interlock alarm.

[0038] When the pressure in the negative pressure pipeline increases, that is, when the pressure in cabinet 1 increases, it indicates that there is a gas leak in the gas pipeline inside cabinet 1 at this time. At this time, the negative pressure device is started, and the gas in cabinet 1 is pumped away by the negative pressure device through the negative pressure pipeline.

[0039] The gas source in cabinet 1: There is a gas leak in the gas pipeline inside cabinet 1. For example, a gas mass flowmeter MFC and a gas regulating valve are provided in cabinet 1, and the gas mass flowmeter and the gas regulating valve are connected by a pipeline.

[0040] The above are only the preferred embodiments of the present invention and do not impose any limitation on the present invention. Any person skilled in the art within the technical field, without departing from the technical solution of the present invention, makes any form of equivalent substitution or modification and other changes to the technical solution and technical content disclosed by the present invention, all of which belong to the content within the technical solution of the present invention and still fall within the protection scope of the present invention.

Claims

1. A negative pressure detection device for a gas cabinet, characterized in that: include: A cabinet (1) on which a negative pressure pipeline is arranged, wherein the negative pressure pipeline connects the cabinet (1) and the negative pressure device; The differential pressure sensor (2) is arranged on the inner wall of the cabinet (1), the low-pressure interface of the sensor is connected to the negative pressure pipeline via pipeline No. 1, and the high-pressure interface of the sensor is connected to pipeline No. 2, which is placed in the cabinet (1) and connected to the atmosphere.

2. The negative pressure detection device for a gas cabinet according to claim 1, characterized in that: A No. 1 pipe joint (11) is installed on the inner wall of the cabinet (1), and the No. 1 pipeline is adapted to the No. 1 pipe joint (11); the No. 1 pipe joint (11) extends into the negative pressure pipeline to connect with the negative pressure pipeline.

3. The negative pressure detection device for a gas cabinet according to claim 1, characterized in that: A No. 2 pipe joint (12) is installed on the inner wall of the cabinet (1), one end of the No. 2 pipe joint (12) is provided with a mounting hole adapted to the No. 2 pipeline, the mounting hole being a through hole for connecting the No. 2 pipeline with the atmosphere, and the other end is connected to the cabinet (1).

4. The negative pressure detection device for a gas cabinet according to claim 1, characterized in that: The differential pressure sensor (2) is PSF100A-0.

5.

5. The negative pressure detection device for a gas cabinet according to claim 1, characterized in that: The negative pressure device is an exhaust pump.

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