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184 results about "Gas cabinet" patented technology

A gas cabinet is a metallic enclosure which is used to provide local exhaust ventilation system for virtually all of the gases used or generated in the Semiconductor, Solar, MEMS, NANO, Solar PV, Manufacturing and other advanced technologies.

Heat dissipation system automatic control method based on digital twinborn model of high-voltage electrical cabinet

The invention relates to the technical field of electrical cabinet intelligent control, in particular to an automatic control method of a heat dissipation system based on a high-voltage electrical cabinet digital twinborn model, the system comprises a high-voltage cabinet, an electrical apparatus element and a fan assembly, and the fan assembly can realize air draft and air supply operation and is provided with an air guide assembly to change an airflow gathering area. The control method comprises the following steps: constructing a digital twinborn model and a temperature prediction model to realize temperature prediction in the cabinet; further constructing an oxidation-temperature rise prediction model, generating an in-cabinet temperature-oxidation hot spot distribution diagram in combination with the temperature prediction model, and performing potential overheating area analysis; according to the analysis result, the rotating speed of the fan assembly and the deflection angle of the air guide assembly are dynamically adjusted, and airflow distribution in the overheating area is optimized; in addition, the system can automatically adjust the operation state of the fan according to the blockage condition of the filter screen to achieve cleaning, and efficient operation of the heat dissipation system is ensured.
Owner:HENAN TIANLI ELECTRIC EQUIP

Pole type environmentally friendly gas insulated switchgear

This invention discloses a pole-type environmentally friendly gas-insulated switchgear, belonging to the field of switchgear. It includes a gas cabinet with a sealed environmentally friendly gas chamber inside. An isolating bracket and a pole-type bracket are both fixedly installed within the environmentally friendly gas chamber. A disconnecting switch is fixedly mounted on the isolating bracket, with its upper end electrically connected to an upper conductive terminal. A pole-type circuit breaker is fixedly mounted on the pole-type bracket, with its upper end electrically connected to the lower end of the disconnecting switch. The lower end of the pole-type circuit breaker is electrically connected to a lower conductive terminal. The upper conductive terminal is sealed on the upper part of the environmentally friendly gas chamber, and the lower conductive terminal is sealed on the lower part of the environmentally friendly gas chamber. Through the rational installation and structural improvements of the upper and lower conductive terminals, the disconnecting switch, the pole-type circuit breaker, the isolating bracket, and the pole-type bracket within the gas cabinet, the connections between these components are more compact, the environmentally friendly gas chamber is smaller, and leakage is less likely, effectively ensuring the safety of the entire device.
Owner:SICHUAN ELECTRIC APPLIANCE GRP MIDDLE & LOW VOLTAGE INTELLIGENT DISTRIBUTION CO LTD

High precision control air receiver (modular)

1. Name of the designed product: high-precision control air cabinet (modular). 2. Use of the designed product: for high-precision temperature control. 3. Design points of the designed product: in shape. 4. Picture or photo best indicating the design points: perspective view 1.
Owner:SHENZHEN ENVICOOL TECH

Gas-insulated switchgear gas leakage detection equipment with switch structure

The invention belongs to the technical field of electrical equipment detection, and particularly relates to switch structure gas-filled cabinet gas leakage detection equipment, which comprises a test box, a bracket, a gas storage cylinder, a resealing type density measurement mechanism and a diversion type residue removal mechanism, the bracket is arranged on the side wall of the test box, the upper end of the test box is open, the gas storage cylinder is arranged at one end, far away from the test box, of the bracket, and the resealing type density measurement mechanism is arranged on the bracket. The re-sealing type density measuring mechanism is arranged on the test box, the flow guide type residue removing mechanism is arranged on the air storage cylinder, and the re-sealing type density measuring mechanism comprises a splicing assembly, a clamping assembly, a closing assembly, a negative pressure assembly, a draining and filtering assembly and an air supply assembly. The invention provides the gas leakage detection equipment for the gas-filled cabinet with the switch structure, which is used for testing the sealing performance of the gas-filled cabinet from the outside and is beneficial to removing harmful insulating gas physically adsorbed by the tested gas-filled cabinet.
Owner:SHANDONG AOLAIEN INTELLIGENT TECH CO LTD

Low-pressure ball type gas storage cabinet

The utility model relates to the technical field of gas storage cabinets, and discloses a low-pressure ball type gas storage cabinet which comprises a base, a lower outer film and an inner film are arranged on the outer surface of the top of the base, an upper outer film is arranged on the top of the lower outer film, the inner film is arranged in the lower outer film, the outer portions of the upper outer film and the lower outer film are both fixedly connected with connecting discs, and the connecting discs are fixedly connected with the base. And through grooves are formed in the positions, located on the front sides and the rear sides of the connecting holes, of the two connecting discs correspondingly, the outer surface of the bottom of one of the multiple through grooves fixedly communicates with an expansion air bag, a pressure sensor is fixedly installed on the outer surface of the connecting plate, and an audible and visual alarm is installed on the side, away from the pressure sensor, of the connecting plate. When the sealing performance between the upper outer film and the lower outer film leaks, the air pressure extrudes the expansion air bag to enable the air bag to expand, the air bag enables the pressure sensor to sense a numerical value and send a signal to the controller, the controller controls the audible and visual alarm to work, and a maintainer is reminded to detect the sealing performance in time.
Owner:NANJING YUNLING ENVIRONMENTAL TECH CO LTD

Locking shaft of high-voltage electrical cabinet body

The utility model discloses a locking shaft of a cabinet body of a high-voltage electrical cabinet in the technical field of high-voltage electrical cabinets, which comprises a shell and a button, one end of the shell is provided with the button, the button is connected with the shell in a sliding manner, one end of the button is provided with a top block, the inner side of the top block is provided with a first spring, the first spring is fixedly connected with the top block, and the top block is provided with a second spring. A first inclined face is arranged at one end of the ejector block, a control block is arranged in the shell, a second inclined face is arranged at one end of the control block, a spring bolt is arranged at the other end of the control block, through the arrangement of the key, the ejector block, the first spring, the first inclined face, the control block, the second inclined face and the spring bolt, the control function of the door lock is achieved, and the door lock is simple in structure and convenient to use. And faults are not prone to occurring, and only the key needs to be pressed to drive the control block to move downwards, so that the lock tongue is driven to extrude the lock catch.
Owner:KUNSHAN UNELECTRA ELECTRIC

A piston drift warning method and device for a sleeve gas tank

The present invention provides a piston drift warning method and device for a sleeve gas cabinet, relating to the field of gas cabinet detection technology. The sleeve gas cabinet piston drift warning method includes: obtaining the operating height of the piston and the spacing between the edge of the piston and the inner cabinet wall or the inner wall of the sleeve at the same time, wherein the operating height is the height of the piston from the bottom wall of the cabinet; determining the relative positional relationship between the piston and the sleeve based on the relationship between the operating height and the sleeve wall height; and providing a piston drift warning based on the relative positional relationship, the spacing, and the drift allowance. This invention effectively solves the problem of online measurement and warning of piston drift in gas cabinets with inner sleeves.
Owner:NINGBO IRON & STEEL

A rubber diaphragm-sealed dry gas holder leveling guide roller online maintenance device and method

This invention relates to an online maintenance device and method for leveling guide wheels in a rubber diaphragm-sealed dry gas holder. The online maintenance device for leveling guide wheels includes a vertical lifting device, a horizontal guide rail, a horizontal moving device, a power traction device, and a control system. The vertical lifting device consists of a first lifting device, a second lifting device, and a synchronous drive device. The horizontal moving device is mounted on the horizontal guide rail and consists of a moving trolley and suspended guide wheels. One end of the moving trolley is connected to the power traction device via a traction steel wire rope. This invention enables rapid online maintenance and replacement of leveling guide wheels without shutting down the gas holder; it significantly improves the maintenance efficiency of leveling guide wheels while eliminating energy waste, environmental pollution, and safety risks caused by gas holder shutdowns.
Owner:ANSTEEL ENG TECH CORP

An intelligent heat dissipation and gas leakage compensation system for an environmentally friendly gas cabinet

This utility model relates to the field of environmentally friendly gas cabinet technology, specifically an intelligent heat dissipation and gas leakage compensation system for an environmentally friendly gas cabinet. It is detachably installed on the back panel of the gas tank of the environmentally friendly gas cabinet and includes an integrated backpack. The integrated backpack includes a cabinet body with multiple chambers. A gas replenishment structure is connected to the gas tank replenishment valve on the gas tank of the environmentally friendly gas cabinet. The heat dissipation structure includes a semiconductor cooling chip and a water-cooled aluminum plate. The two sides of the semiconductor cooling chip are in contact with the back panel of the gas tank and the water-cooled aluminum plate, respectively. A fan-driven cooling unit is installed on the side of the water-cooled aluminum plate away from the semiconductor cooling chip. When the semiconductor cooling chip is energized, it transfers heat from the back panel of the gas tank to the water-cooled aluminum plate, rapidly cooling the inside of the gas tank. Simultaneously, the fan-driven cooling unit provides air cooling. The air cooling and water cooling work together to ensure stable temperature control inside the gas tank.
Owner:GUANGDONG ZHENGCHENG ELECTRIC TECH CO LTD

Gas holder device and monitoring system of gas holder device

The invention provides a gas holder device and a monitoring system of the gas holder device, and the gas holder device comprises a gas holder which is internally provided with a plurality of gas cylinders; the weighing module is positioned in the gas cylinder and is used for monitoring the residual gas in the gas cylinder; the consumption monitoring end is installed on the gas holder, the weighing module is connected with the consumption monitoring end, and the weight change condition of the gas cylinder is sent to the consumption monitoring end in real time; according to the gas cylinder consumption monitoring device, the consumption in the gas cylinder can be monitored in real time, traditional manual counting is replaced, the accuracy of consumption counting is improved, a leakage point can be instantly monitored, a cylinder valve on the gas cylinder is closed in a non-contact mode in combination with an additional interlocking piece, further leakage is prevented from the source, the use safety is improved, and the gas cylinder consumption monitoring device has a wide use range.
Owner:SEMICON MFG INT (BEIJING) CORP +1

Artificial intelligence monitoring and diagnosing device for gas holder and use method of artificial intelligence monitoring and diagnosing device

The invention relates to the field of control and adjustment, in particular to an artificial intelligence monitoring and diagnosing device for a gas cabinet and a using method of the artificial intelligence monitoring and diagnosing device. The artificial intelligence monitoring and diagnosis device for the gas cabinet comprises a data acquisition module (1), and is characterized by further comprising a data processing and analysis module (2), a fault early warning and diagnosis module (3) and an application display and management module (4), the data acquisition module (1), the data processing and analysis module (2), the fault early warning and diagnosis module (3) and the application display and management module (4) are sequentially connected through signal lines. The use method of the artificial intelligence monitoring and diagnosis device for the gas holder is characterized by comprising the following steps of S1, data acquisition; s2, data processing and analysis; s3, fault early warning and diagnosis; and S4, application display and management. The method is timely in prediction and high in diagnosis precision.
Owner:BAOSTEEL ENG & TECH GRP

Gas holder inlet and outlet pipeline maintenance system

A gas holder inlet and outlet pipeline maintenance system comprises a gas holder, a gas holder inlet line, a gas holder outlet line, an inlet water-sealed tank and an outlet water-sealed tank, the inlet water-sealed tank is connected with an inlet of the gas holder through an inlet water-sealed tank outlet line, and the outlet water-sealed tank is connected with an outlet of the gas holder through an outlet water-sealed tank inlet line. The tail ends of the gas holder inlet line and the outlet water seal tank inlet line correspondingly extend into the inlet water seal tank and the outlet water seal tank from the top of the tank, the starting end of the gas holder outlet line is connected with the outlet water seal tank, the side face of the inlet water seal tank is connected with the inlet water seal tank water inlet line, and the side face of the outlet water seal tank is connected with the outlet water seal tank water inlet line. A first stop valve is arranged on the gas holder inlet line, the front side and the rear side of the first stop valve on the gas holder inlet line are connected into a first emptying line and a condensate draining line respectively, a second stop valve is arranged on the gas holder outlet line, and the rear side of the second stop valve on the gas holder outlet line is connected into a second emptying line. The system can effectively prevent gas leakage when the inlet and outlet pipelines of the gas holder are overhauled.
Owner:HAINAN VOCATIONAL COLLEGE OF SCI & TECH

Anti-leakage monitoring device for double-film gas storage cabinet

The utility model discloses an anti-leakage monitoring device for a double-membrane gas storage cabinet, relates to the technical field of double-membrane gas storage cabinets, and aims to solve the problems that gas pressure detection devices are arranged on the outer sides of gas conveying pipelines of existing double-membrane gas storage cabinets to prevent gas leakage of the pipelines, but gas pressure cannot be detected in a space between an inner membrane and an outer membrane. According to the technical scheme, the double-film gas storage cabinet solves the problems that in the prior art, a leakage-proof monitoring device convenient to use is lacked, once gas in an inner film leaks, monitoring cannot be conducted in time, and safety is low in the prior art, and the double-film gas storage cabinet is mainly characterized by comprising a double-film gas storage cabinet body, and a detection gas pipe is fixedly connected to the outer side of the double-film gas storage cabinet body; a gas wireless pressure detector is mounted at one end of the outer side of the detection gas pipe, a connecting piece and a joining piece are arranged at the two ends of the outer side of the mounting plate respectively, a screw is inserted into the connecting piece, an electromagnetic valve is fixedly connected to the outer side of the detection gas pipe, and a wireless receiving device is arranged on the outer side of the double-film gas storage cabinet body. And the effect of convenient use is achieved.
Owner:HEBEI ZHAOYANG ENVIRONMENTAL TECH CO LTD

Gas supply device for supplying special gas for coating cabin

The invention relates to the technical field of coating processing, and discloses a gas supply device for supplying special gas to a coating cabin, the device mainly comprises a main special gas holder, a standby special gas holder, a pre-filled buffer tank and a gas flow dispersion component, the main special gas holder and the standby special gas holder are connected with the pre-filled buffer tank through a pneumatic three-way valve to form a double-gas-source gas supply system; when the pressure of the main special gas holder is insufficient, the pneumatic three-way valve is automatically switched to the standby special gas holder, the pre-filled buffer tank preferentially releases stored high-pressure gas in the process, gas is continuously supplied to the coating cabin through the gas supply main pipe, and the problem of gas pressure fluctuation caused by valve switching in the traditional design is completely avoided. The pre-filled buffer tank adopts a coaxial double-chamber design and comprises a high-pressure chamber on the outer layer and a pressure stabilizing chamber on the inner layer, the high-pressure chamber is connected with a pneumatic three-way valve, the pressure stabilizing chamber is communicated with the coating cabin through a gas supply main pipe, an annular metal isolation plate is arranged in the pressure stabilizing chamber, and automatic balance of gas pressure is realized through an automatic adjusting mechanism.
Owner:HUNAN YUFENG VACUUM SCI & TECH CO LTD

Water curtain cabinet recovery structure with gas-water separation function

The water curtain cabinet recovery structure with the gas-water separation function is arranged on a water curtain cabinet, the water curtain cabinet comprises a gas inlet cabinet, a water storage pond and a gas collection box, the gas inlet cabinet and the gas collection box are arranged on the two sides of the top of the water storage pond respectively and are communicated with each other, the gas inlet cabinet is provided with a water curtain plate, a plurality of water baffles are arranged in the gas collection box, and the water baffles are communicated with the water storage pond. A check block is arranged on the side, away from the air inlet cabinet, of the bottom of the air inlet cabinet, a baffle is arranged on the side, close to the air inlet cabinet, of the bottom of the air collecting box, the baffle is used for reducing the flow speed of airflow flowing from the air inlet cabinet, the check block comprises an arc part and a drainage part, and the arc part is in an arc shape and used for guiding the airflow to flow towards the baffle. The drainage part is positioned above the arc part and below the baffle plate; according to the water curtain cabinet recovery structure with the gas-water separation function, the arc check block and the baffle are additionally arranged, high-speed airflow is guided to impact the baffle, rapid water-gas separation is achieved, and the water-gas separation effect is improved.
Owner:WUXI WEIGU COATING EQUIP CO LTD

High-pressure environment-friendly gas cabinet with pressure relief backpack structure

ActiveCN224233206UReduce security threatsMeet the pressure relief functionBus-bar/wiring layoutsSwitchgear arrangementsBusbarStructural engineering
The utility model relates to a high-pressure environment-friendly gas cabinet with a pressure relief knapsack structure, which comprises the pressure relief knapsack structure and a gas cabinet, and the pressure relief knapsack structure is fixed on one side of the gas cabinet far away from an instrument box on the gas cabinet; an upper pile head, a lower pile head, a sensor, a mutual inductor and the like are arranged in the gas cabinet; a partition plate is arranged between the upper pile head and the pressure relief backpack structure; a flow guide buffer area is arranged between the pressure relief opening and the upper pile head, and a pressure relief path is arranged between the pressure relief opening and the lower pile head. The pressure relief knapsack is additionally arranged at the rear part of the cabinet body, the rear part of the upper pile head is separated by the aluminized zinc plate partition plate, and the pressure relief mode directly avoids the upper pile head. The rear pressure relief design is adopted, and the upper pile head is separated. A flow guide channel is additionally arranged between the pressure relief opening and the upper pile head, and airflow is guided to be released to an equipment-free area. Metal protective baffles are additionally arranged on the bus and the cable terminal on the pressure relief path; through the targeted design, the pressure relief function can be achieved, and meanwhile the safety threat to the upper pile head and peripheral equipment is reduced.
Owner:SHANGHAI NAJIE COMPLETE SETAB OF ELECTRIC

Wet-type gas holder failure possibility quantitative evaluation method and related device

The invention discloses a wet-type gas holder failure possibility quantitative evaluation method and a related device, and relates to the technical field of industrial safety, and the method comprises the steps: obtaining the prior failure probability, Gamma distribution parameters and historical fault data of each assembly of a wet-type gas holder; according to the historical fault data, correcting the prior failure probability of each component to obtain the corrected posterior failure probability of each component; establishing an event tree model according to the safety interlocking logic structure of the wet gas holder; the event tree model comprises a plurality of events; calculating the posterior failure probability of each event according to the event tree model and the corrected posterior failure probability of each component; according to the posterior failure probability of each event, calculating to obtain the failure probability after each failure mode of the wet gas holder is corrected; the fault modes comprise emptying, leakage and deflation. According to the method, the failure probability of the wet gas holder can be accurately calculated.
Owner:CHINA SPECIAL EQUIP INSPECTION & RES INST

Natural gas cabinet outer cover connecting piece

1. The name of the design product: natural gas cabinet cover connecting piece. 2. The use of the design product: connecting piece for automobile natural gas cabinet cover. 3. The design points of the design product: in shape. 4. The picture or photo that best shows the design points: perspective view 1.
Owner:SHIYAN CHENLING AUTO PARTS CO LTD

Automatic gas distribution equipment

The utility model relates to the technical field of gas distribution equipment, in particular to automatic gas distribution equipment. Comprising a gas distribution cabinet main body, a gas distribution device is arranged in the gas distribution cabinet main body, and the gas distribution device comprises a first gas input mechanism, a second gas input mechanism and a mixing tank; the first gas input mechanism comprises a first gas conveying pipeline, the second gas input mechanism comprises a second gas conveying pipeline, and the first gas conveying pipeline and the second gas conveying pipeline are respectively connected with the mixing tank; compared with the prior art, the device has the advantages that the input compressed air and the input liquefied petroleum gas are mixed, simulated and converted into the natural gas or the artificial gas, so that the device can be effectively applied to a production line of gas combustion appliance products and laboratory detection products; the gas distribution equipment can effectively solve the problem that in the prior art, the account opening cost is too high due to access of natural gas, and then the use cost of commercial natural gas cost is effectively reduced.
Owner:梁成华

High-voltage electrical cabinet convenient to maintain

The utility model discloses a high-voltage electrical cabinet convenient to maintain, which belongs to the technical field of electrical cabinets and comprises a base, a support frame is fixedly connected to the top end of the base, a cabinet top is arranged at the top end of the support frame, and cabinet side plates are hinged to two sides of the support frame. The other end of the cabinet side plate is provided with a connecting mechanism which can be conveniently connected with a supporting frame, the surface of the cabinet side plate is provided with a heat dissipation opening, an inner cavity of the heat dissipation opening is provided with a dustproof plate, the rear end face of the supporting frame is in bolted connection with a cabinet rear plate, and the surface of the cabinet rear plate is provided with a mounting hole used for mounting an electrical part mounting frame. And a cabinet door is hinged to the front end surface of the supporting frame, so that the operation space in the electrical cabinet is expanded, the time spent by maintenance personnel on the maintenance work of the electrical cabinet is shortened, the maintenance efficiency of the maintenance personnel on the electrical cabinet is improved, and convenience is provided for the maintenance work of the electrical cabinet.
Owner:JIANGSU XUSHI ELECTRIC TECHNOLOGY CO LTD

Voltage protection device for wireless Wi-Fi of fan electrical cabinet

The utility model relates to the technical field of electrical cabinets, in particular to a voltage protection device for wireless Wi-Fi of a fan electrical cabinet, a clamping assembly comprises a fixed plate, a fixed cylinder and a threaded cylinder, the fixed cylinder and the threaded cylinder are in threaded rotation connection, a conical lock cylinder for fixing a cable is arranged between the fixed cylinder and the threaded cylinder, and the fixed cylinder and the threaded cylinder are in threaded rotation connection. The end, close to the fixed cylinder, of the conical lock cylinder is provided with a plurality of triangular lock plates which are mutually close and distributed at intervals, the outer wall of the fixed cylinder is sleeved with a lock ring in sliding connection, and one face of the lock ring is provided with a lock block clamped to the threaded cylinder. According to the utility model, the triangular lock plate is radially shrunk to occlude and fix the cable, so that the slippage of the cable caused by the vibration generated during the operation of the fan is avoided, and the problem in the prior art that the mechanical vibration generated during the operation of the fan is transmitted to the voltage protection device through a wire harness or a plug connector to cause the falling of the wiring terminal is solved.
Owner:GUONENG TENG COUNTY ENERGY DEVELOPMENT CO LTD

Environment-friendly gas cabinet assembling and transferring tool trolley

The utility model discloses an environment-friendly gas cabinet assembling and transferring tool trolley, which belongs to the technical field of gas cabinet transferring devices and is characterized by comprising a frame and a limiting mechanism. The frame comprises a lower frame body, a side frame body and a push rod, the side frame body is vertically mounted on one side of the lower frame body, and a plurality of universal wheels are fixedly mounted at the lower end of the lower frame body; a limiting mechanism is mounted on the frame and comprises first clamping plates, second clamping plates, a telescopic cylinder, a rotating shaft and a connecting plate, and the multiple first clamping plates are fixedly mounted at the upper end of the side frame body; a plurality of through holes are formed in one side of the lower frame body, the outer end of the rotating shaft is connected with the lower end of the second clamping plate, the inner end of the rotating shaft is fixedly connected with one end of the connecting plate, a plurality of lug plates are installed on the lower frame body and correspond to the through holes in the lower frame body, one end of the telescopic cylinder is hinged to the lug plates, and the other end of the telescopic cylinder is hinged to the other end of the connecting plate. Compared with the prior art, the cabinet body of the environment-friendly gas cabinet is convenient to place and transfer.
Owner:SHANDONG SHENGANTAI EQUIP MFG

Mechanical interlocking device of environment-friendly gas cabinet

The utility model discloses a mechanical interlocking device of an environment-friendly gas cabinet, which belongs to the technical field of environment-friendly gas cabinets and comprises an upper mounting plate and a lower mounting plate, the upper mounting plate and the lower mounting plate are both mounted in an inner cavity of a cabinet body, and an isolation interlocking rod is arranged at the top end of the upper mounting plate. The surface of the upper mounting plate is provided with an isolation mechanism interlocking separation blade, an upper isolation interlocking grounding push plate, an isolation interlocking cam, an upper isolation interlocking isolation push plate and an electrifying structure used for electrifying, and the top end of the lower mounting plate is provided with an upper isolation interlocking circuit breaker push plate. The bottom end of the lower mounting plate is provided with a supporting structure used for abutting against the cabin door to assist in opening, so that the situation that the equipment still allows to separate the circuit breaker when the circuit breaker is mistakenly switched on, the circuit breaker is switched on and the cable cabin door is moved away is avoided, the operation risk is reduced, the five-prevention interlocking use effect is improved, the operation safety of the isolation environment-friendly gas cabinet is improved, and the service life of the isolation environment-friendly gas cabinet is prolonged. And misoperation and potential risks are avoided.
Owner:SHUANGJIE ELECTRIC HUBEI CO LTD

Pipeline structure for preventing gas from flowing backwards and semiconductor manufacturing equipment

The utility model provides a pipeline structure capable of preventing gas from flowing backwards and semiconductor manufacturing equipment, and the pipeline structure capable of preventing gas from flowing backwards comprises at least one gas cabinet which is provided with a gas outlet pipeline; the gas outlet pipeline is connected to one end of the main pipeline, and the other end of the main pipeline is communicated with a gas consumption end; the one-way valve is located on the air outlet pipeline, and an air outlet of the one-way valve faces the main pipeline; by arranging the one-way valve on the gas outlet pipeline, gas can be well prevented from flowing backwards into the gas holder when the gas consumption end stops supplying gas, damage to the gas holder and the pipeline is avoided, meanwhile, by arranging the one-way valve on the gas outlet pipeline, it is ensured that the gas can only flow to the gas consumption end from the gas holder, and therefore the safety of the system is improved; by arranging the one-way valve on the gas outlet pipeline, gas can be well prevented from flowing backwards into the gas holder when the gas consumption end stops supplying gas, damage to the gas holder and the pipeline is avoided, meanwhile, by arranging the one-way valve on the gas outlet pipeline, it is ensured that the gas can only flow to the gas consumption end from the gas holder, and therefore the safety of the system is improved.
Owner:ZHEJIANG ICSPROUT SEMICONDUCTOR CO LTD

Gas phase etching system and process based on mixed gas of HF and ethanol

The invention discloses a gas-phase etching system and process based on HF and ethanol mixed gas, the gas-phase etching system comprises a gas-phase etching device, an ethanol gas holder, an HF gas holder and a vacuum transmission module, the ethanol gas holder and the HF gas holder are respectively communicated with a gas inlet of the gas-phase etching device through pipelines, and the vacuum transmission module is communicated with a gas outlet of the gas-phase etching device through pipelines. The gas outlet of the gas phase etching equipment is also communicated with a first dry vacuum pump, the sample inlet of the gas phase etching equipment is communicated with the vacuum transmission module, and the gas outlet of the vacuum transmission module is communicated with a second dry vacuum pump. The method has the advantages that multiple metals and typical MEMS materials can be compatible, the etching rate is high, meanwhile, the good etching rate can be achieved in a compact oxide or a narrow space, and the etching uniformity is good.
Owner:JIANGSU PENGJU SEMICON EQUIP TECH CO LTD

Gas holder operation control method and system

The invention discloses a gas holder operation control method and system, and relates to the technical field of gas holder control, and the method comprises the steps: obtaining real-time pressure data in a gas holder, processing the real-time pressure data, and extracting pressure feature data; performing anomaly analysis on the pressure characteristic data by using an anomaly recognition algorithm, and recognizing key factors influencing the pressure stability of the gas holder; and based on the key factors, establishing a pressure regulation and control model, dynamically adjusting real-time operation parameters of the gas holder by using the pressure regulation and control model, and optimizing a control strategy. According to the invention, the automation and intelligence level of the operation of the gas holder is improved, the control strategy can be effectively optimized, the safe and stable operation of the gas holder under high-load and complex working conditions is ensured, and the fault risk is reduced, so that the overall reliability and efficiency of a production system are improved.
Owner:NANTONG FUCHUANG PRECISION MFG CO LTD

A monitoring system and a monitoring method for the inclination of a gas holder piston

The application provides a kind of gas cabinet piston inclination monitoring system and monitoring method, piston has circular upper surface, the gas cabinet piston inclination monitoring system includes: height measuring device and control terminal;N monitoring points are preset on the upper surface, wherein N is even number greater than 2, the number of height measuring device is N, and is one-to-one corresponding setting in N monitoring points;Height measuring device includes the cylinder body containing liquid, support and liquid level sensor, cylinder body is fixedly connected on its corresponding monitoring point by support, liquid level sensor is arranged on cylinder body, and is electrically connected with control terminal;Liquid level sensor acquires liquid level information in cylinder body in real time, and the information is sent to control terminal, and control terminal judges the inclination of piston according to the liquid level information in the N cylinder bodies of the N height acquisition devices received.The application not only can reduce labor cost, but also has the advantages of high measurement accuracy, thereby ensuring the safe operation of gas cabinet.
Owner:TANGSHAN JIANHUA AUTOMATIC CONTROL EQUIP FACTORY

Tcs gas holder and its gas supply panel assembly, pipeline system

The utility model provides a kind of TCS gas cabinet and its gas supply disc surface subassembly, pipeline system, pipeline system includes: online hydrogen supply pipeline, offline hydrogen supply pipeline and multiple groups of cylinder connecting pipeline;Each group of cylinder connecting pipeline includes inlet pipeline and outlet pipeline, one end of inlet pipeline is connected to cylinder gas inlet end, one end of outlet pipeline is connected to cylinder liquid outlet end;Online hydrogen supply pipeline is connected with first hydrogen pipeline, when cylinder is in online or standby state, and the inlet pipeline corresponding with the cylinder keeps the state of communication;Offline hydrogen supply pipeline is connected with second hydrogen pipeline, when cylinder is in offline and pressurizes liquid, and the outlet pipeline corresponding with the cylinder keeps the state of communication, and the inlet pipeline corresponding with the cylinder keeps the state of communication when filling pressure. So configure, TCS gas cabinet in use process, can avoid pressurizing liquid, filling pressure and online hydrogen supply mutual interference, ensure the stability of system operation, shorten online operation time simultaneously, improve online efficiency.
Owner:UNITED NOVA TECH - XIANFENG (SHAOXING) CORP

A dynamic proportioning adjusting method and system for a mixed gas cabinet for electronic special gas

This invention discloses a dynamic proportioning adjustment method and system for a mixing cabinet of electronic specialty gases, belonging to the field of electronic specialty gas technology. The method involves inputting electronic specialty gases into the mixing device at an initial proportion via a mass flow controller; using a tunable semiconductor laser absorption spectroscopy sensor to monitor the concentration of components in the mixed gas in real time; employing a model predictive control algorithm to predict future trends based on real-time concentration deviations and dynamically generate optimized flow setpoints, and reducing calculation frequency through a sampling verification mechanism; based on the optimized setpoints and combined with real-time collected gas flow rate, temperature, and pressure data, adjusting the opening of the mass flow controller through a compensation algorithm to compensate for proportioning deviations caused by various factors. This invention significantly improves mixing accuracy and shortens mixing time, meeting the stringent requirements of high-end processes such as semiconductor manufacturing for electronic specialty gas proportioning.
Owner:SHANGHAI YUEZHI SEMICONDUCTOR TECHNOLOGY CO LTD

Rapid bus connector for gas insulated switchgear

One end of a connecting seat is provided with a plugging inner edge, the other end of the connecting seat is provided with a sealing outer edge, the center of the plugging inner edge is provided with a guide row in a penetrating and sealing manner, the outer end surface of the sealing outer edge is provided with an air chamber sealing plate in an attached manner, and the outer side surface of the sealing outer edge is connected with the outer side surface of the inflatable cabinet in a sealing manner. The gas guide cabinet comprises two symmetrical connecting seats, an insulating sleeve is arranged between the two symmetrical connecting seats in a plug-in mode, a connecting conductor is arranged on the inner side of the insulating sleeve in a plug-in mode, and a guide bar is arranged on the inner side of the end of the connecting conductor in a plug-in mode. Therefore, the inflation and leak detection work of the inflatable cabinet can be completed in a factory, inflation operation is not needed on site, the on-site installation work of the inflatable cabinet is greatly simplified, the work efficiency of on-site installation is greatly improved, and the inflatable cabinet is not influenced by external environmental factors.
Owner:济南轨道交通集团建设投资有限公司