Non-contact handheld carrying device

Abstract

A non-contact handheld carrying device comprises a main body structure. The main body structure comprises a first surface, a second surface and an outer edge surface connected with the first surface and the second surface, and at least one air hole groove and at least one air flow channel communicated with the air hole groove are formed. The air hole groove is formed by the first surface and the outer edge face in a sunken mode and provided with an opening connected with the first surface and the outer edge face, the air hole groove is provided with an air outlet groove face connected with the first surface, and one end of the airflow channel extends to the air outlet groove face to be communicated with the air hole groove. When an object to be carried is adjacent to the first surface, air flowing from the airflow channel to the air hole groove flows out of the opening and flows between the main body structure and the object to be carried, so that Bernoulli action is generated at the position corresponding to the air hole groove, and an adsorption area is formed to support the object to be carried.

Description

Technical Field

[0001] The present invention relates to a non-contact handheld handling device, and more particularly to a non-contact handheld handling device using the Bernoulli principle. Background Art

[0002] Many handling devices have been published in the past, from tweezers, vacuum pens, to hydraulic pallet trucks or stackers, etc., and many devices have been developed according to different uses. In recent years, a non-contact handheld handling device using the Bernoulli principle has been developed. After the device approaches and blows gas towards an object, the object gradually approaches the device through the change of air pressure. Its advantage is that it can handle the object without contacting most of the object's surface. However, in order to make the gas blow evenly on the object, the number of air holes is large and the air flow channels are complex, and the adsorption surface must be as large as the object. For example, when it is desired to handle an 8-inch wafer, a non-contact handheld handling device with an 8-inch adsorption surface needs to be designed, and one or more pins or baffles must still be provided around the device to make the object offset by the blowing lean against and be fixed. However, during the contact process, it is still possible to cause damage or contamination to the object due to contact. Summary of the Invention

[0003] The purpose of the present invention is to provide a non-contact handheld handling device that can move an object without contacting the object at all.

[0004] The non-contact handheld handling device of the present invention is applicable to handling an object to be handled such as a wafer and includes a main body structure.

[0005] The main body structure includes a first surface, a second surface opposite to the first surface, and an outer edge surface connecting the outer edges of the first surface and the second surface, and forms at least one air hole groove and at least one air flow channel communicating with the air hole groove. The air hole groove is recessed from the first surface and the outer edge surface, and has an opening connected to the first surface and the outer edge surface, and the air hole groove has an air outlet groove surface connecting the first surface and spaced from the outer edge surface. One end of the air flow channel extends to the air outlet groove surface to communicate with the air hole groove.

[0006] When the object to be handled is adjacent to the first surface, the air flowing from the air flow channel to the air hole groove will flow out from the opening and flow between the main body structure and the object to be handled, so as to generate a Bernoulli effect at the position corresponding to the air hole groove and form an adsorption area to support the object to be handled.

[0007]

[0008] In the non-contact handheld handling device of the present invention, the width of the air hole groove gradually increases from the air outlet groove surface towards the outer edge surface.​

[0009] For the non-contact handheld handling device of the present invention, the cross-sectional shape of the air hole groove parallel to the first surface is V-shaped, so as to form the adsorption area with a stable and uniform air flow to lift the object to be handled.

[0010] For the non-contact handheld handling device of the present invention, the main body structure is in a flat long strip shape, and forms a plurality of air hole grooves and a plurality of air flow channels. The air hole grooves are symmetrically distributed on two opposite sides in the length direction of the outer edge surface, so that air flows out evenly.

[0011] For the non-contact handheld handling device of the present invention, the air flow channel has an extension section opened on the second surface, a blind hole section extending from the extension section to the first surface, and an air outlet section extending from the blind hole section to the air outlet groove surface.

[0012] For the non-contact handheld handling device of the present invention, it further includes a channel shield disposed on the second surface and covering the extension section and the blind hole section.

[0013] For the non-contact handheld handling device of the present invention, the air flow channel further has a through hole section penetrating from the extension section to the first surface, and the non-contact handheld handling device further includes a hole shield disposed on the first surface and covering the through hole section.

[0014] The beneficial effect of the present invention is that the Bernoulli principle is used and the air flow is evenly distributed through the air hole groove, so as to achieve the effect of handling without contacting the object to be handled at all. Description of the Drawings

[0015] Other features and effects of the present invention will be clearly presented in the embodiments with reference to the drawings, where:

[0016] Figure 1 is a perspective view of the non-contact handheld handling device of the present invention;

[0017] Figure 2 is an exploded perspective view of the non-contact handheld handling device of the present invention;

[0018] Figure 3 is a side view of the relationship between the main body structure of the non-contact handheld handling device of the present invention and the object to be handled;

[0019] Figure 4 is a partial cross-sectional view of the main body structure of the non-contact handheld handling device of the present invention. BCPI-230536 Page 3 / 4 Detailed Embodiments

[0020] Refer to Figures 1 to 3, An embodiment of the non-contact handheld handling device of the present invention is applicable to hand-held handling of an object to be handled 4 such as a wafer, and includes a main body structure 1, a channel shield 2, and a pore shield 3.

[0021] The main body structure 1 is in a flat strip shape and is suitable for being held by hand, and includes a first surface 11, a second surface 12 opposite to the first surface 11, an outer edge surface 13 connecting the outer edges of the first surface 11 and the second surface 12, several pore grooves 14 formed on the outer edge surface 13, and several air flow channels 15 communicating with the pore grooves 14. However, it should be noted that the main body structure 1 may also include only one pore groove 14 or one air flow channel 15, and the specific implementation manner depends on actual needs. In addition, although the main body structure 1 in this embodiment is exemplified as being in a flat strip shape, the main body structure 1 may also be configured as a disc shape or any other shape according to actual needs, and is not limited to the disclosed content of this embodiment.

[0022] In this embodiment, the pore grooves 14 are symmetrically distributed on two opposite sides in the length direction of the outer edge surface 13, and each pore groove 14 is formed by recessing from the first surface 11 and the outer edge surface 13, and has openings connected to the first surface 11 and the outer edge surface 13. Each pore groove 14 has an air outlet groove surface 141 (see Figure 4 ) connecting the first surface 11 and spaced from the outer edge surface 13, and one end of each air flow channel 15 extends to the air outlet groove surface 141 to communicate with the pore groove 14. In addition, in this embodiment, the width of the pore groove 14 gradually increases from the air outlet groove surface 141 towards the outer edge surface 13 and is V-shaped in a cross-section parallel to the first surface 11 to form an adsorption area 16 with a stable and uniform air flow, and sufficient pressure difference is generated by adjusting the air flow intensity to lift the object to be handled 4, so it is more helpful for transporting a heavier object to be handled 4 compared with the structural configuration of a non-V-shaped cross-section.

[0023] See Figure 4, each of the air flow channels 15 has an extension section 151 opened on the second surface 12, a blind hole section 152 extending from the extension section 151 towards the first surface 11, an air outlet section 153 extending from the blind hole section 152 to the air outlet groove surface 141, and a through hole section 154 penetrating from the extension section 151 to the first surface 11. The through hole section 154 can be connected to an external device (not shown in the figure) to inject gas into the air flow channel 15 from the first surface 11, and the gas can flow through the extension section 151 to the blind hole section 152, then flow towards the air outlet section 153 through the blind hole section 152, and finally the gas flows out from the air outlet section 153 towards the air outlet groove surface 141 of the air hole groove 14.

[0024] The channel shield 2 is disposed on the second surface 12 and covers the extension section 151 and the blind hole section 152 to prevent gas from leaking accidentally before flowing into the air hole groove 14.

[0025] The air hole shield 3 is disposed on the first surface 11 and covers the through hole section 154 to prevent gas from leaking accidentally before flowing into the air hole groove 14.

[0026] It should be noted that although the foregoing content describes the specific implementation manner of the air flow channel 15 in this embodiment, according to actual needs, the air flow channel 15 can also be implemented by different extension methods or penetration methods, and is not limited to the content disclosed in this embodiment.

[0027] When the non-contact handheld handling device of the present invention is in use, an external device (not shown in the figure) provided with a switch controller is installed in the blind hole section 152 to introduce air flow. When the object to be handled 4 (such as a wafer) is adjacent to the first surface 11, it is only necessary to ensure that the opening completely covers the surface of the object to be handled 4, and it does not have to be located at the center point. Therefore, the object to be handled 4 (such as a larger-sized wafer) with a volume larger than that of the non-contact handheld handling device of the present invention can be handled. The air flowing from the air flow channel 15 to the air hole groove 14 will flow out from the openings located on two opposite sides and symmetrically on the outer edge surface 13 and flow between the main body structure 1 and the object to be handled 4, so as to lift the object to be handled 4 by using the pressure difference according to Bernoulli's principle at the position corresponding to the air hole groove 14 and form the adsorption area 16. By changing the air pressure, the object to be handled 4 gradually approaches the non-contact handheld handling device without contacting the non-contact handheld handling device. And because the air hole grooves 14 are symmetrically distributed, the object to be handled 4 can be more stable and will not move along with the direction of the air flow, so as to move without touching the non-contact handheld handling device for fixation.

[0028] In summary, the non-contact handheld handling device of the present invention uses the Bernoulli principle to evenly distribute the airflow and is also designed to be lighter for handheld use, so as to handle the object 4 to be handled without any contact at all, thus truly achieving the purpose of the present invention.

[0029] As described above, the above are only embodiments of the present invention, and the scope of implementation of the present invention cannot be limited thereby. All simple equivalent changes and modifications made according to the claims of the present invention and the content of the specification still fall within the scope covered by the present invention.

Claims

1. A non-contact handheld handling device, characterized in that: Comprising: A main body structure, including a first surface, a second surface opposite to the first surface, and an outer edge surface connecting the outer edges of the first surface and the second surface, and forming at least one air hole groove and at least one air flow channel communicating with the air hole groove. The air hole groove is formed by recessing from the first surface and the outer edge surface, and has openings connected to the first surface and the outer edge surface. And the air hole groove has an air outlet groove surface connecting the first surface and spaced from the outer edge surface. One end of the air flow channel extends to the air outlet groove surface to communicate with the air hole groove; When the object to be carried is adjacent to the first surface, the air flowing from the air flow channel to the air hole groove will flow out from the opening and flow between the main body structure and the object to be carried, so as to generate a Bernoulli effect at the position corresponding to the air hole groove and form an adsorption area to support the object to be carried.

2. The non-contact handheld handling device according to claim 1, wherein: The width of the air hole groove gradually increases from the air outlet groove surface towards the outer edge surface.

3. The non-contact handheld handling device according to claim 2, characterized in that: The cross-sectional shape of the air hole groove parallel to the first surface is V-shaped, so as to form the adsorption area with a stable and uniform air flow to lift the object to be carried.

4. The non-contact hand-held handling device according to claim 1, characterized in that: The main body structure is in a flat and long strip shape, and forms a plurality of air hole grooves and a plurality of air flow channels. The air hole grooves are symmetrically distributed on two opposite sides in the length direction of the outer edge surface, so that air flows out evenly.

5. The non-contact handheld handling device according to claim 1, characterized in that: The air flow channel has an extension section opened on the second surface, a blind hole section extending from the extension section towards the first surface, and an air outlet section extending from the blind hole section to the air outlet groove surface.

6. The non-contact hand-held handling device according to claim 5, wherein: The non-contact hand-held carrying device further includes a channel shield disposed on the second surface and covering the extension section and the blind hole section.

7. The non-contact handheld handling device according to claim 5, wherein: The air flow channel further has a through hole section penetrating from the extension section to the first surface, and the non-contact hand-held carrying device further includes a pore shield disposed on the first surface and covering the through hole section.

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