Pulse valve and coating device

Abstract

A pulse valve (10) includes: a housing (110) having: a flow path through which a fluid flows in a discharge direction; and a hole recessed toward the flow path (112) in a direction opposite to the discharge direction; and a nozzle (120) attached to the hole in the opposite direction, the nozzle comprising: a nozzle tube having: a nozzle hole provided at one end of the nozzle tube in the discharge direction, from which the fluid flowing through the flow path is discharged in the discharge direction; and the other end is communicated with the flow path in the discharge direction. And a connecting ferrule located on the periphery of the nozzle tube and fixed to the housing (110).

Description

Technical Field

[0001] Embodiments of the present disclosure relate to a pulse valve and a coating apparatus. Background Art

[0002] There is known a coating technique in which volatile organic compounds (VOCs) are changed into a supercritical fluid (e.g., supercritical carbon dioxide) during the drying process of a coating.

[0003] In addition, a pulse valve that discharges a supercritical fluid as a gaseous state has been proposed (see, for example, Patent Document 1).

[0004] Citation List

[0005] Patent Document

[0006] [Patent Document 1] Japanese Unexamined Patent Application Publication No. 2009-30669 Summary of the Invention

[0007] Technical Problem

[0008] A pulse valve for discharging a supercritical fluid needs to have pressure resistance to maintain the high pressure of the supercritical fluid.

[0009] An object of the present disclosure is to provide a pulse valve having high pressure resistance.

[0010] Solution to the Problem

[0011] According to an embodiment of the present disclosure, a pulse valve includes: a housing having: a flow path through which a fluid flows in a discharge direction; and a hole that recesses toward the flow path in a direction opposite to the discharge direction; and a nozzle mounted to the hole in the opposite direction, the nozzle including: a nozzle tube having: a nozzle hole provided at one end of the nozzle tube in the discharge direction for discharging the fluid flowing in the flow path from the nozzle hole in the discharge direction; and the other end communicating with the flow path in the discharge direction; and a connection collar located around the nozzle tube and fixed to the housing.

[0012] According to an embodiment of the present disclosure, a coating apparatus includes: the pulse valve according to the first or second aspect for discharging the fluid from the nozzle hole; a pressure vessel for: mixing a compressed fluid and a resin to generate the fluid; and supplying the fluid to the pulse valve.

[0013] Advantageous Effects of the Invention

[0014] According to an aspect of the present disclosure, the pressure resistance of the pulse valve can be improved. Brief Description of the Drawings

[0015] The accompanying drawings are intended to depict embodiments of the present invention and should not be construed as limiting its scope. The drawings should not be regarded as being drawn to scale unless otherwise clearly marked. Similarly, the same or similar reference numerals denote the same or similar components in multiple views.

[0016] Figure 1

[0017] Figure 1 is a schematic diagram showing the overall structure of a coating apparatus according to a first embodiment of the present invention.

[0018] Figure 2

[0019] Figure 2 is a schematic cross-sectional view of a pulse valve in the coating apparatus of the first embodiment.

[0020] Figure 3

[0021] Figure 3 is Figure 2 a partial cross-sectional view of a part of the pulse valve shown.

[0022] Figure 4

[0023] Figure 4 is a schematic cross-sectional view of a pulse valve according to a second embodiment of the present invention.

[0024] Figure 5

[0025] Figure 5 is Figure 5 the A-A cross-sectional view of the pulse valve of.

[0026] Figure 6

[0027] Figure 6 is a schematic cross-sectional view of a pulse valve according to a third embodiment of the present invention.

[0028] Figure 7

[0029] Figure 7 is a schematic cross-sectional view of a pulse valve according to a first modification of the third embodiment of the present invention.

[0030] Figure 8

[0031] Figure 8 is a schematic cross-sectional view of a pulse valve according to a second modification of the third embodiment of the present invention. Detailed Description

[0032] ​​​​​​​​​​​​​​​​The terms used herein are for the purpose of describing particular embodiments only and are not intended to limit the present invention. The singular forms "a", "an" and "the" used herein are also intended to include the plural forms unless the context clearly indicates otherwise.

[0033] When describing the embodiments shown in the drawings, specific terms are adopted for clarity. However, the disclosure of this specification is not intended to be limited to the specific terms so selected, and it should be understood that each specific element includes all technical equivalents having similar functions, operating in a similar manner and achieving similar results.

[0034] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the drawings, the same names and reference numerals denote the same or corresponding components, and detailed descriptions are appropriately omitted.

[0035] First Embodiment

[0036] Hereinafter, with reference to Figure 1 the coating apparatus 1 of the first embodiment of the present invention will be described.

[0037] Overall Structure of the Coating Apparatus

[0038] Figure 1 is a schematic diagram showing the overall structure of the coating apparatus 1 of the first embodiment of the present invention. The coating apparatus 1 includes: a generator 30 that generates supercritical carbon dioxide; a high-pressure vessel 6 (pressure vessel) that mixes the supercritical carbon dioxide generated by the generator 30 with a resin to obtain a mixture of supercritical carbon dioxide and the resin; a pulse valve 10 that discharges the mixture supplied from the high-pressure vessel 6 to the substrate 12; and a pipe 41 that connects the high-pressure vessel 6 and the pulse valve 10. Supercritical carbon dioxide is used as the "compressed fluid". The term "compressed fluid" includes supercritical fluids and subcritical fluids. As the compressed fluid, for example, supercritical carbon dioxide as a supercritical fluid will be described below, but the applicable compressed fluid is not limited to supercritical carbon dioxide. Examples of supercritical fluids include supercritical water, supercritical nitrogen, etc. These supercritical fluids are preferred because they have a smaller environmental load and are less expensive. Sometimes the mixture of supercritical carbon dioxide and the resin is referred to as the "mixture".

[0039] In at least some embodiments, a coating apparatus includes: the pulse valve that discharges the fluid from the nozzle hole; a pressure vessel that mixes a compressed fluid and a resin to generate the fluid and supplies the fluid to the pulse valve.

[0040] In at least some embodiments, in the coating apparatus, the pressure vessel includes: a stirrer that stirs the mixture of the compressed fluid and the resin to generate the fluid; and a torque meter that measures the torque of the stirrer generated by stirring the mixture.

[0041] The resin mixed with supercritical carbon dioxide can be a thermosetting resin or a thermoplastic resin. Examples of the thermosetting resin include phenolic resin, epoxy resin, melamine resin, urea resin, unsaturated polyester resin, silicone resin, polyurethane resin, thermosetting polyimide resin, thermosetting furan resin, etc. Examples of the thermoplastic resin include polyester resin, polyethylene resin, polypropylene resin, acrylonitrile-butadiene-styrene resin, acrylic (PMMA) resin, polyamide resin, etc.

[0042] The colored coating film can be formed by mixing a dye or a pigment with the resin. However, in order to avoid the generation of volatile organic compounds (VOCs), the mixture in this embodiment preferably does not contain an organic solvent.

[0043] Examples of the substrate 12 for coating the mixture include resin materials, metal materials, porous materials containing carbon fiber, glass fiber, and cellulose fiber, etc.

[0044] As Figure 1 As shown, in an embodiment of the present invention, the generator 30 includes: a gas cylinder 2 for storing liquid carbon dioxide; a cooler 3 for cooling the liquid carbon dioxide supplied from the gas cylinder 2 via a high-pressure valve 101 to a temperature lower than the saturation temperature; a high-pressure pump 4 for pressurizing the liquid carbon dioxide to a specified pressure; a heater 5 for heating the liquid carbon dioxide supplied from the high-pressure pump 4 to a specified temperature; and a back-pressure valve 102 for returning the excess liquid carbon dioxide in the liquid carbon dioxide supplied from the high-pressure pump 4 to the area on the downstream side of the high-pressure pump 4.

[0045] As the cooler 3, for example, a refrigeration device that circulates cooling water to cool the object to be cooled can be cited. In addition, as the high-pressure pump 4, for example, a double-plunger pump that can control the discharge amount of the liquid and can prevent pulsation can be cited. However, the cooler 3 and the high-pressure pump 4 are not limited thereto.

[0046] The liquid carbon dioxide pressurized by the high-pressure pump 4 is heated by the heater 5, thereby generating supercritical carbon dioxide.

[0047] The high-pressure vessel 6 mixes the supercritical carbon dioxide supplied from the generator 30 via a high-pressure valve 103 with the resin in a high-pressure environment. The resin is supplied through a path different from the path for supplying the supercritical carbon dioxide. As the high-pressure vessel 6, for example, an autoclave can be cited. However, the high-pressure vessel is not limited thereto.

[0048] The high-pressure vessel 6 includes: a container body 21 for accommodating the supercritical carbon dioxide and the resin; a stirrer 22 for stirring the supercritical carbon dioxide and the resin introduced into the container body 21; a motor 7 for driving the stirrer 22; and a torque meter 23 for measuring the rotational force of the stirrer 22.

[0049] As the stirrer 22, for example, a magnetic impeller that rotates using the driving force of an electric motor, a single-screw, an intermeshing twin-screw, a twin-shaft mixer having a plurality of meshing or overlapping stirring elements, a kneader having an intermeshing screw stirring element, a static mixer, etc. may be cited. Preferably, the high-pressure vessel 6 further includes a heater 8 for heating the vessel and a high-pressure valve 104 for opening the vessel to the atmosphere.

[0050] In the initial stage of mixing supercritical carbon dioxide and resin in the high-pressure vessel 6, the supercritical carbon dioxide and the resin are not sufficiently mixed. Therefore, the viscosity of the mixture is high and the torque of the stirrer 22 is high. However, as the mixing of the supercritical carbon dioxide and the resin proceeds, the viscosity of the mixture decreases. Therefore, the torque of the stirrer 22 also decreases. In addition, since the supercritical carbon dioxide and the resin are sufficiently mixed, the viscosity of the mixture further decreases, and then the decrease in viscosity stops. Therefore, the torque of the stirrer 22 also becomes constant. That is, by detecting that the torque of the stirrer 22 detected by the torque meter 23 becomes constant, it is possible to judge that the supercritical carbon dioxide and the resin are sufficiently mixed.

[0051] In the high-pressure vessel 6, supercritical carbon dioxide and resin are mixed under a high pressure of, for example, about 50 megapascals (MPa) to 60 MPa. Therefore, under normal operating conditions, for example, by opening the lid of the high-pressure vessel 6, the mixing process of the supercritical carbon dioxide and the resin cannot be visually inspected. In contrast, as in this embodiment, according to the structure of measuring the change in the torque of the stirrer 22 using the torque meter 23, even without visually observing the inside of the high-pressure vessel 6, it is possible to judge the uniform mixing of the supercritical carbon dioxide and the resin. As a result, it is possible to prevent the unmixed resin from being supplied to the pulse valve 10 and to prevent poor discharge of the pulse valve 10.

[0052] The torque meter 23 can output a torque measurement signal of the stirrer 22 to the controller 24. In addition, the controller 24 can determine whether the supercritical carbon dioxide and the resin are uniformly mixed based on the torque measurement signal of the torque meter 23. Further, the controller 24 can also control the opening and closing of the high-pressure valve 105 disposed downstream of the high-pressure vessel 6 based on the determination result.

[0053] The high-pressure valve 105 is disposed downstream of the high-pressure vessel 6 in the direction of supplying the mixture of supercritical carbon dioxide and resin to the pulse valve 10. When the high-pressure valve 105 is opened, the mixture in the high-pressure vessel 6 is supplied to the pulse valve 10 through the pipe 41. Preferably, a heater or heat insulating material is disposed around the pipe 41. Thereby, the pipe 41 can be maintained at a specified temperature, the supercritical state of the carbon dioxide flowing in the pipe 41 can be maintained, and the fluidity can be improved.

[0054] The pulse valve 10 is connected to the end of the pipe 41. As a result, the pulse valve 10 communicates with the pipe 41, and the mixture flowing in the pipe 41 is introduced into the pulse valve 10. The pulse valve 10 discharges the introduced mixture toward the substrate 12.

[0055] A mixture having a temperature of, for example, more than 200 °C (e.g., a temperature of 250 °C) and a pressure of about 50 MPa to 60 MPa is introduced into the pulse valve 10. The pulse valve 10 discharges the mixture toward the substrate 12 while maintaining the temperature and pressure of the introduced mixture. In addition, the pulse valve 10 performs a high-speed opening and closing operation such that the opening time becomes, for example, 100 microseconds (μs) or less. Therefore, the pulse valve 10 can stably discharge a preferred amount of the mixture. The details of the pulse valve 10 will be described in the description of the structure of the pulse valve described later.

[0056] Operation of the coating device

[0057] Refer to Figure 1 , and the discharging operation of the mixture in the coating device 1 will be described. The liquid carbon dioxide stored in the gas cylinder 2 is cooled to the saturation temperature or lower by the cooler 3 via the high-pressure valve 101.

[0058] The supercritical carbon dioxide that has passed through the cooler 3 is introduced into the suction part of the high-pressure pump 4. The liquid carbon dioxide introduced from the suction part into the high-pressure pump 4 is pressurized to a pressure higher than a specified pressure (e.g., the critical pressure of carbon dioxide, 7.3 MPa) within the high-pressure pump 4. During constant-pressure operation, the liquid carbon dioxide introduced into the high-pressure pump 4 returns to the suction part of the high-pressure pump 4 through the back-pressure valve 102.

[0059] The pressurized liquid carbon dioxide is heated by the heater 5 to a temperature higher than a specified temperature (e.g., the critical temperature of carbon dioxide, 31 °C). As a result, supercritical carbon dioxide is generated from the liquid carbon dioxide.

[0060] The generated supercritical carbon dioxide is introduced into the high-pressure vessel 6 heated to a specified temperature by the heater 8 via the high-pressure valve 103. The supercritical carbon dioxide and the resin introduced into the high-pressure vessel 6 through another path are melted and mixed by the stirrer 22 connected to the motor 7.

[0061] At this time, the mixture is heated to, for example, about 250 °C by the heater 8. Further, the mixture is pressurized to a pressure of, for example, about 50 MPa to 60 MPa by a specified pressurizing mechanism.

[0062] In this embodiment, through the process of mixing the supercritical carbon dioxide and the resin, a mixture of supercritical carbon dioxide and resin is obtained. Whether a uniform mixture is obtained is determined by the measured value of the torque meter 23 that measures the torque of the stirrer 22.

[0063] Then, the high-pressure valve 105 opens. As a result, the mixed gas in the high-pressure vessel 6 flows through the pipe 41 toward the pulse valve 10. In addition, the pulse valve 10 repeatedly opens and closes the valve provided in the pulse valve 10 while maintaining the temperature and pressure of the introduced mixture, and discharges a desired amount of the mixture to the substrate 12.

[0064] Structure of the Pulse Valve

[0065] Hereinafter, with reference to Figure 2 and Figure 3 the structure of the pulse valve 10 of the coating apparatus 1 according to the first embodiment of the present invention will be described. Figure 2 and Figure 3 are schematic cross-sectional views showing the structure of the pulse valve 10 according to the first embodiment of the present disclosure.

[0066] As Figure 2 shown, the pulse valve 10 of the present embodiment includes: a housing 110 having a flow path 112 for discharging the fluid of the object to be discharged; a nozzle 120 mounted on the front end side of the housing 110 for discharging the fluid of the object to be discharged; a needle 130 inserted into the housing 110 for opening and closing the flow path 112 of the housing 110; a driver 140 for moving the needle 130 forward and backward; and a heat insulating flange 150 disposed between the housing 110 and the driver 140. The fluid of the object to be discharged in the present embodiment is a mixture of supercritical carbon dioxide and resin. This mixture is a "fluid containing a supercritical fluid".

[0067] In at least some embodiments, the pulse valve further includes a heat insulating flange between the housing and the driver.

[0068] In Figure 2 and Figure 3 the directions can be represented by the X-axis, Y-axis, and Z-axis perpendicular to each other. Figure 2 and Figure 3 As shown in

[0069] the X direction corresponds to the front-rear direction of the pulse valve 10. In the X-axis direction, the side toward which the arrow points is referred to as the +X direction side, and the side opposite to the +X direction side is referred to as the -X direction side. The Y direction corresponds to the width direction of the pulse valve 10. In the Y-axis direction, the side toward which the arrow points is referred to as the +Y direction side, and the side opposite to the +Y direction side is referred to as the -Y direction side. The Z direction corresponds to the height direction of the pulse valve 10. In the Z-axis direction, the side toward which the arrow points is referred to as the +Z direction side, and the side opposite to the +Z direction side is referred to as the -Z direction side.

[0069] Housing

[0070] The housing 110 is disposed at the front end of the pulse valve 10 and is a housing that accommodates the mixture introduced from the 1 / 8-inch pipe 441. The upper surface of the housing 110 (the frontmost surface on the +X direction side) faces the substrate 12.

[0071] The housing 110 has a base 111. In addition, a flow path 112 for discharging the mixture is formed inside the base 111. The flow path 112 of the present embodiment is formed to extend in the X direction. Further, a first hole 113 that is recessed toward the flow path 112 is formed in a concave shape on the upper surface of the base 111 (the uppermost surface on the +Z direction side). The 1 / 8-inch pipe 441 attached to the end of the pipe 41 is inserted into the first hole 113. The 1 / 8-inch pipe 441 inserted into the first hole 113 communicates with the flow path 112. Sometimes the pipe 41 and the 1 / 8-inch pipe 441 are collectively referred to as the "pipe 41". Thereby, the mixture flowing in the pipe 41 is introduced into the flow path 112. The pipe communicating with the flow path 112 may be a pipe having a size and shape other than 1 / 8 inch.

[0072] The first hole 113 has a tapered portion 113T that tapers as it goes toward the -Z direction side, that is, as it goes toward the flow path 112 side. In addition, the 1 / 8-inch pipe 441 is preferably fitted into the first hole 113 via a connection ferrule that undergoes pressure deformation when it comes into contact with the tapered portion 113T of the first hole 113. The high-temperature and high-pressure mixture flows in the 1 / 8-inch pipe 441. Since the 1 / 8-inch pipe 441 is fitted into the first hole 113 via the connection ferrule, the 1 / 8-inch pipe 441 does not come off from the first hole 113 even when the high-temperature and high-pressure mixture flows.

[0073] The area of the base 111 where the first hole 113 is provided can be heated by a heating mechanism (for example, a heating block). By providing the heating mechanism, it is possible to prevent the temperature of the mixture flowing in the 1 / 8-inch pipe 441 from decreasing.

[0074] The housing 110 has a block 114 at a position in front of the base 111 on the +X direction side. The block 114 is attached to the base 111 via screws 115a and 115b.

[0075] On the top surface of the block 114 (that is, the top surface of the housing 110), a second hole 116 that is recessed toward the -X direction side (that is, toward the flow path 112) is formed in a concave shape. The second hole 116 of the present embodiment is formed to extend in the X direction. The nozzle 120 is inserted into the second hole 116. The second hole 116 serves as the "hole".

[0076] The pressure of the mixture accommodated in the housing 110 is preferably 60 Mpa or lower. The temperature of the mixture accommodated in the housing 110 is preferably 250°C or lower. However, the high-pressure container is not limited to this.

[0077] Nozzle

[0078] The nozzle 120 includes a nozzle base 121 that extends in the X direction when the nozzle 120 is inserted into the second hole 116. In addition, a press-type connection thread is formed on the outer peripheral portion of the nozzle base 121. The nozzle 120 is screwed into the second hole 116 while pressing by screwing the thread groove of the connection thread of the nozzle base 121 with the thread groove formed in the second hole 116.

[0079] A tubular nozzle tube 122 extending in the X direction is formed inside the nozzle base 121. As Figure 3 shown, the nozzle tube 122 has a first tube 122a communicating with the front end of the flow path 112, and a second tube 122b that is concentric with the first tube 122a and is disposed outside the first tube 122a. The front end of the second tube 122b corresponds to a nozzle hole 123 for discharging the mixture onto the substrate 12.

[0080] The nozzle tube 122 has a double-tube structure including the first tube 122a and the second tube 122b. With such a double-tube structure, the strength of the nozzle tube 122 can be improved. In addition, the discharge stability of the mixture supplied from the flow path 112 can be improved.

[0081] In at least some embodiments, in the above-described pulse valve, the nozzle tube has a double-tube structure having: a first tube that communicates with the flow path; and a second tube that surrounds a part of the first tube, and the nozzle hole is formed in the second tube.

[0082] Preferably, the nozzle hole 123 has a diameter of 5 μm or more and 500 μm or less. Additionally, the diameter of the nozzle hole 123 is more preferably 100 μm or more and 300 μm or less, and even more preferably 150 μm or more and 250 μm or less.

[0083] In at least some embodiments, in the pulse valve, the nozzle hole has a diameter of 5 μm or more and 500 μm or less.

[0084] When the diameter of the nozzle hole 123 is less than 5 μm, it may be not preferred because the diameter is too small and may hinder the stable discharge of the mixture. Additionally, when the diameter of the nozzle hole 123 exceeds 500 μm, the thickness of the region of the nozzle 120 other than the nozzle hole 123 becomes thinner, and the nozzle may not be able to resist the pressure when discharging the mixture.

[0085] The nozzle 120 includes a connection collar 124 disposed around the periphery of the nozzle tube 122. As Figure 2 and Figure 3 shown, the connection collar 124 is, for example, a stainless-steel connection collar having a substantially frustoconical shape, and its diameter decreases as it advances in the -X direction.

[0086] When the nozzle 120 is assembled into the second hole 116 while being pressed, the connecting ferrule 124 collides with the tapered portion 116T of the second hole 116. After the connecting ferrule 124 collides with the tapered portion 116T, the connecting ferrule 124 further moves to the inner side of the second hole 116 and is inserted inside the tapered portion 116T. As a result, the connecting ferrule 124 is pressure-deformed and pressed into the tapered portion 116T of the second hole 116. Therefore, further movement of the connecting ferrule 124 is prevented. Thereby, the nozzle 120 is inserted into the second hole 116 and firmly fixed to the block 114.

[0087] Since the nozzle 120 is fixed to the block 114 of the housing 110 via the connecting ferrule 124, the pressure resistance and durability can be improved. In particular, since the high-pressure mixture flows inside the nozzle 120, it is preferable to connect the nozzle 120 to the housing 110 via the connecting ferrule 124. The connecting ferrule 124 is fixed and crimped along the moving direction of the needle 130 and the extension rod 141 with the orifice plate 131 interposed therebetween. As a result, even in a high-pressure and high-temperature environment, the detachment of the nozzle 120 including the connecting joint 124 can be prevented.

[0088] Preferably, a film having a Vickers hardness of 2000 Hv or higher is formed on the inner surface of the nozzle tube 122 that contacts the mixture. Examples of the film having a Vickers hardness of 2000 Hv or higher include ceramic films such as titanium carbide (SiC) film, titanium nitride (TiN) film, titanium carbonitride (TiCN) film, and titanium aluminum nitride (TiAlN) film, cermet films containing SiC, TiN, TiCN, or TiAlN, and films containing amorphous carbon such as diamond-like carbon (DLC). On the inner surface of the nozzle tube 122, it is preferable to form a film having a Vickers hardness of 2000 Hv or higher on the inner surface of the first pipe 122a and the inner surface of the second pipe 122b.

[0089] In at least some embodiments, the pulse valve includes: a housing having: a flow path through which fluid flows in a discharge direction; and a hole that recesses toward the flow path in a direction opposite to the discharge direction; and a nozzle that is mounted to the hole in the opposite direction, the nozzle including: a nozzle tube having: a nozzle hole provided at one end of the nozzle tube in the discharge direction for discharging the fluid flowing in the flow path from the nozzle hole in the discharge direction; and the other end communicating with the flow path in the discharge direction; and a connecting ferrule located around the nozzle tube and fixed to the housing.

[0090] In at least some embodiments, in the above-described pulse valve, a coating having a Vickers hardness of 2000 Hv or higher is applied to the inner surface of the nozzle tube.

[0091] In at least some embodiments, in the above-described pulse valve, a coating with a Vickers hardness of 2000 Hv or higher is applied to the periphery of the nozzle holes of the nozzle tube.

[0092] Preferably, a film with a Vickers hardness of 2000 Hv or higher is also formed on the periphery of the nozzle holes 123 of the nozzle 120. The illustrated nozzle holes 123 are exposed on the surface of the end wall 121F (see Figure 3 ) of the nozzle base 121. Therefore, as the periphery of the nozzle holes 123 in the nozzle 120, for example, the periphery of the nozzle holes 123 on the surface of the end wall 121F of the nozzle base 121 can be cited.

[0093] Similarly, the film formed on the periphery of the nozzle holes 123 can also be a ceramic film such as a SiC film, a TiN film, a TiCN film, a TiAlN film, a cermet film containing SiC, TiN, TiCN, TiAlN, or a film containing amorphous carbon such as DLC. Films other than these can also be used.

[0094] By forming a film with a Vickers hardness of 2000 Hv or higher on the inner surface of the nozzle tube 122 and the periphery of the nozzle holes 123, it is possible to prevent the residue of the mixture from adhering to the inner surface of the nozzle tube 122 and the periphery of the nozzle holes 123. As a result, it is possible to prevent the flow of the mixture passing through the nozzle tube 122 and the nozzle holes 123 from being hindered, and a desired amount of the mixture can be stably discharged from the nozzle holes 123.

[0095] The film thickness of the film with a Vickers hardness of 2000 Hv or higher is preferably, for example, 0.1 μm or more and 10 μm or less, and more preferably 0.5 μm or more and 5.0 μm or less. By limiting the film thickness of the film with a Vickers hardness of 2000 Hv or higher within the above range, it is possible to form a film without substantially changing the surface shape of the micro surfaces such as the inner surface of the nozzle tube 122. As a result, the influence on the discharge stability caused by forming the film with a Vickers hardness of 2000 Hv or higher can be reduced.

[0096] The method of forming a film with a Vickers hardness of 2000 Hv or higher is not limited to a specific method. Examples of this method include physical vapor deposition (PVD) methods, such as vacuum deposition methods. By using the PVD method, a thin film with a uniform film thickness can be formed even on the micro surfaces such as the inner surface of the nozzle tube 122. As a result, it is possible to more effectively prevent a part of the mixture from remaining on the inner surface of the nozzle tube 122 and the periphery of the nozzle holes 123 by the thin film with a uniform film thickness.

[0097] Before forming a film with a Vickers hardness of 2000 Hv or higher, surface modification treatments such as sandblasting or polishing can be performed on the inner surface of the nozzle tube 122 and the periphery of the nozzle holes 123. As a result, the adhesion of the film with a Vickers hardness of 2000 Hv or higher can be improved.

[0098] needle

[0099] The needle 130 is inserted into the housing 110 and serves as a valve for opening and closing the flow path 112 of the housing 110.

[0100] Specifically, when the needle 130 moves forward, the tip of the needle 130 closes the hole, such as the micropores 132 of the orifice plate 131 provided between the flow path 112 and the rear end of the nozzle tube 122 of the nozzle 120. As a result, the flow path 112 is closed. Then, as the needle 130 moves backward, the tip of the needle 130 separates from the orifice plate 131. Therefore, the micropores 132 of the orifice plate 131 are opened and the flow path 112 is opened.

[0101] By using the opening and closing operation of the flow path 112 performed by the needle 130, a predetermined amount of the mixture in the mixture reaching the flow path 112 can be supplied to the nozzle 120. The response speed of the needle 130 (i.e., the valve opening time) is preferably 100 μs or less.

[0102] From the viewpoints of durability, pressure resistance, etc., it is preferable that the needle 130 is made of a high-strength ceramic such as zirconia. Preferably, the orifice plate 131 that collides with the tip of the needle 130 is made of a high-strength ceramic. Preferably, the ceramic of the orifice plate 131 has a Vickers hardness of 700 Hv or more, a thermal shock temperature difference of 100 °C or more, and an average linear expansion coefficient of 11×10 -6 / K or less. Examples of the ceramic include zirconia, alumina, mullite, cordierite, etc. The thermal shock temperature difference is measured, for example, by a thermal shock test method based on the relative method specified in JIS R1648:2002 ("Test method for thermal shock resistance of fine ceramics").

[0103] In at least some embodiments, the pulse valve further includes a hole between the flow path and the nozzle tube, made of ceramic, having a hole communicating with the nozzle tube. The Vickers hardness of the hole is 700 Hv or higher, the thermal shock resistance is 100 °C or higher, and the average thermal expansion coefficient is 11×10 -6 / K or less.

[0104] By forming the orifice plate 131 of a ceramic having the above characteristics, mechanical properties and thermal properties such as the durability, thermal shock resistance, and heat deformation resistance of the orifice plate 131 can be improved. Therefore, it is possible to prevent failures in which the orifice plate 131 may be deformed or damaged and the mixture may leak from the orifice plate 131 when the orifice plate 131 collides with the needle 130 during the discharge operation.

[0105] The upper limit of the Vickers hardness of the ceramic of the orifice plate 131 is, for example, 2200 Hv or less. The upper limit of the thermal shock temperature difference of the ceramic of the orifice plate 131 is, for example, 450 °C or less. The lower limit of the average linear expansion coefficient of the ceramic of the orifice plate 131 is, for example, 4.0×10-6 / K or higher.

[0106] Driver

[0107] Driver 140 is a driving mechanism connected to the needle 130, which advances and retracts the needle 130. Specifically, as Figure 2 shown, the driver 140 includes: an extension rod 141, which has a long cylindrical shape and is connected to the rear end of the needle 130; and a piezoelectric actuator 142, which moves the extension rod 141 forward and backward at a predetermined speed.

[0108] In at least some embodiments, the pulse valve includes: a needle inserted into the housing to openably close the flow path in the housing; and a driver including: an extension rod made of invar and connected to the needle; and an actuator that moves the extension rod and the needle back and forth in the opposite direction and the discharge direction.

[0109] In at least some embodiments, in the pulse valve, the actuator includes a piezoelectric actuator.

[0110] The extension rod 141 is preferably made of a material having a low coefficient of thermal expansion to avoid thermal elongation caused by heat transfer of the needle in contact with the mixture. As a material having a low coefficient of thermal expansion, for example, an invar alloy material, which is an alloy of iron and nickel, a super-invar alloy material, which is an alloy of iron, nickel, and cobalt, etc. can be cited. Among them, a super-invar alloy material having a very low coefficient of thermal expansion is preferred.

[0111] In the flow path 112, for example, a mixture with a circulation temperature of about 250 °C flows. The tip of the needle 130 is inserted into the flow path 112 and contacts the mixture. On the other hand, the extension rod 141 is continuously provided with the needle 130. Therefore, the heat from the mixture is transferred to the extension rod 141 via the needle 130. At this time, if the extension rod 141 thermally elongates significantly, the advance and retract range of the needle 130 also changes as the advance and retract range of the extension rod 141 changes. As a result, sometimes a specified amount of the mixture in the mixture accommodated in the flow path 112 cannot be accurately supplied to the nozzle 120. On the other hand, if the extension rod 141 is made of a material having a low coefficient of thermal expansion, such as a super-invar alloy material, it is difficult to thermally elongate even if the heat of the mixture is transferred from the needle 130. As a result, a specified amount of the mixture can be accurately supplied to the nozzle 120.

[0112] In addition, since the extension rod 141 is made of a material (for example, a super-invar alloy material) that can reduce thermal elongation, the operation stability of the piezoelectric actuator 142 can be maintained.

[0113] The piezoelectric actuator 142 is constituted by, for example, a piezoelectric element that expands and contracts by the application of a pulsed voltage signal. The piezoelectric actuator 142 of the present embodiment deforms (expands and contracts) in the X direction. Preferably, the piezoelectric actuator 142 is an annular actuator provided around the outer periphery of the extension rod 141. By using an annular actuator as the piezoelectric actuator 142, the piezoelectric actuator 142 does not have acute-angled corners, and the load during operation is evenly distributed over the entire surface, thereby improving durability. In addition, since the piezoelectric actuator 142 can be constituted by a relatively thin piezoelectric element layer, a large displacement amount can be obtained at a lower voltage.

[0114] In at least some embodiments, in a pulse valve, the piezoelectric actuator includes an annular actuator provided around the periphery of the extension rod.

[0115] In the present embodiment, the piezoelectric actuator 142 is used as the actuator of the driver 140, but other types of actuators can also be used. However, from the perspective of achieving a fast response of opening and closing the valve in less than about 100 μs, it is preferable to use the piezoelectric actuator 142.

[0116] Heat insulation flange

[0117] The heat insulation flange 150 prevents heat from being transferred from the housing 110 to the piezoelectric actuator 142. The material of the heat insulation flange 150 is not limited to any specific material, but is preferably made of a ceramic having high heat insulation properties. Although the heat resistance of the piezoelectric actuator 142 is low, by disposing the heat insulation flange 150 between the housing 110 and the piezoelectric actuator 142, heat transfer from the mixture to the piezoelectric actuator 142 can be prevented. As a result, the operation stability of the piezoelectric actuator 142 can be ensured.

[0118] Second embodiment

[0119] Hereinafter, with reference to Figure 4 and Figure 5 the pulse valve 10a of the second embodiment of the present invention will be described. Figure 4 is a schematic cross-sectional view of the pulse valve 10a of the second embodiment of the present invention. Figure 5 is Figure 4 a cross-sectional view of the pulse valve 10a taken along the line A-A shown in

[0120] As Figure 5 shown, the flow path 112 has a plurality of divided flow paths 112a to 112d extending in the X direction respectively. The positions of the plurality of divided flow paths 112a to 112d are not particularly limited, and are, for example, end regions near the orifice plate 131 of the flow path 112.

[0121] A plurality of divided flow paths 112a to 112d are arranged circumferentially along the needle 130 and are formed by gaps extending radially outward from the circumferential wall 135 of the needle 130. For example, a boundary wall 112W1 is arranged between the divided flow path 112a and the divided flow path 112b, a boundary wall 112W2 is arranged between the divided flow path 112b and the divided flow path 112c, a boundary wall 112W3 is arranged between the divided flow path 112c and the divided flow path 112d, and a boundary wall 112W4 is arranged between the divided flow path 112d and the divided flow path 112a. As described above, the boundary walls 112W1, 112W2, 112W3, and 112W4 are respectively arranged between two adjacent divided flow paths 112a to 112d and are in contact with the circumferential wall 135. Therefore, even after moving back and forth, the needle 130 can be guided to the center of the flow path 112. As a result, a required amount of the mixture can be accurately supplied to the nozzle 120.

[0122] In at least some embodiments, in a pulse valve, the flow path includes a plurality of divided flow paths arranged circumferentially around the circumferential wall of the needle, the plurality of divided flow paths having boundary walls that divide adjacent divided flow paths, and the boundary walls contact the circumferential wall of the needle to guide the needle.

[0123] Third Embodiment

[0124] Structure of Pulse Valve

[0125] Hereinafter, with reference to Figure 6 the pulse valve 10b of the third embodiment of the present invention will be described. Figure 6 FIG. is a schematic cross-sectional view of the pulse valve 10b of the third embodiment of the present disclosure. Like reference numerals that are the same as or similar to those of the first and second embodiments of the present disclosure denote similar elements having substantially the same or corresponding functions and configurations, and the description of the third embodiment of the present disclosure may be omitted.

[0126] As Figure 6 shown, the pulse valve 10b of the third embodiment includes: a housing 110 having a flow path 112, a nozzle 120, a needle 130, a driver 140, a spring 210 (as a biasing element), a helix 220 (as an adjusting element), a first measuring device 230, and an output device 231. The pulse valve 10b may further include a spring housing 250 and a spacer 260.

[0127] In at least some embodiments, the pulse valve further includes: a biasing element connected to the extension rod; a regulator that moves the extension rod to adjust the amount of elongation and contraction of the biasing element in the discharge direction and the opposite direction; a measuring device that measures at least one of the following: a reaction force corresponding to the amount of elongation and contraction of the biasing element; or a deformation amount of a member deformed due to the reaction force; and an output device that outputs a measurement result output from the measuring device.

[0128] Spring housing

[0129] The spring housing 250 houses components such as a spring 210, a first measuring device 230, and a spacer 260. The spring housing 250 is disposed between a driver 140 and a heat insulating flange 150. The driver 140 and the heat insulating flange 150 are connected to each other via the spring housing 250.

[0130] The spring housing 250 includes a base 251 and a lid 252. The base 251 has a cylindrical shape with an opening on the front end side (+X direction side) and a recess that is recessed in the -X direction. The lid 252 covers the opening of the base 251. By covering the opening of the base 251 with the lid 252, a space 250S for housing the spring 210, the first measuring device 230, the spacer 260, etc. is formed.

[0131] In the space 250S, the spring 210, the spacer 260, and the first measuring device 230 are arranged in this order from the lid 252 toward the base 251. The spring 210 contacts the spacer 260. The spacer 260 contacts the first measuring device 230. The spring reaction force generated by the expansion and contraction of the spring 210 is applied to each of the spacer 260 and the first measuring device 230. However, the arrangement of the spring 210, the spacer 260, and the first measuring device 230 is not limited to the above arrangement. This spring reaction force is regarded as the "reaction force".

[0132] Extension rod

[0133] The extension rod 140b of the driver 141 includes a main body 1411, a needle receiver 1412, and an intermediate portion 1413. The main body 1411 is disposed on the rear end side (-X direction side) and is inserted into the interior of a piezoelectric actuator 142. The needle receiver 1412 is disposed on the front end side (+X direction side) and supports the needle 130. The intermediate portion 1413 connects the main body 1411 and the needle receiver 1412.

[0134] The main body 1411 is connected to a helix 220 that contacts the rear end face (-X direction side face) of the piezoelectric actuator 142. The needle receiver 1412 is housed in the space 250S of the spring housing 250 and is connected to the needle 130 inserted into a through hole 2524 provided in the lid 252. The intermediate portion 1413 is inserted into a through hole 2514 provided in the base 251 and passes through the first measuring device 230 and the spacer 260.

[0135] Spring

[0136] The spring 210 is connected to the extension rod 141b. Figure 6The shown spring 210 is connected to the needle receiver 1412 of the extension rod 141b. The type of the spring 210 is not limited to any specific type of spring. Examples of the spring 210 include a coil spring. The spring 210 is disposed in the space 250S of the spring housing 250 so as to elongate and contract in the X direction.

[0137] Screw

[0138] The helix 220 moves the extension rod 141b to adjust the amount of expansion and contraction Δx of the spring 210. The thread groove formed on the inner side surface of the helix 220 meshes with the thread groove formed on the surface of the main body 1411 of the extension rod 141b. For example, when the helix 220 rotates in a predetermined direction, the main body 1411 moves backward. On the contrary, when the helix 220 rotates in a direction opposite to the predetermined direction, the main body 1411 moves forward. That is, the main body 1411, the intermediate portion 1413, and the needle receiver 1412 move as the helix 220 rotates. The spring 210 elongates and contracts as the needle receiver 1412 moves. At the same time, the needle 130 moves. As a result, the needle 130 moves away from the orifice plate 131, and the mixture flows into the space between the needle 130 and the orifice plate 131. The amount of the mixture flowing into the space between the needle 130 and the orifice plate 131 varies according to the position of the front end of the moved needle 130. The mixture flowing into the space between the needle 130 and the orifice plate 131 passes through the nozzle 120 and is discharged to the outside from the nozzle hole 123. Therefore, the discharge amount of the mixture varies according to the position of the front end of the needle 130. The position of the front end of the needle 130 is determined according to the amount of expansion and contraction Δx of the spring 210. That is, the amount of expansion and contraction Δx of the spring 210 and the position of the front end of the needle 130 can be adjusted according to the rotation amount of the helix 220.

[0139] First measuring device

[0140] The first measuring device 230 measures the spring reaction force corresponding to the amount of expansion and contraction Δx of the spring 210. The first measuring device 230 is, for example, a force measuring device that measures the spring reaction force received from the spring 210. However, the first measuring device 230 is not limited to a force measuring device. The first measuring device 230 serves as a "measuring device".

[0141] The first measuring device 230 includes: a strain body that is deformed by the spring reaction force; a strain gauge that is mounted on the surface of the strain body and measures the strain of the strain body; and a calculator that calculates the spring reaction force received from the spring 210 based on the measurement result of the strain gauge. Since the spring constant of the used spring 210 is known, the calculator can also calculate the amount of expansion and contraction Δx of the spring 210 based on the spring reaction force and the spring constant of the spring 210.

[0142] Output device

[0143] The output device 231 outputs the measurement results of the first measurement device 230. The output device 231 is, for example, a monitor that displays the spring reaction force as the measurement result of the first measurement device 230, the amount of expansion and contraction Δx of the spring 210, and the amount of rotation of the helix 220 corresponding to the amount of expansion and contraction Δx of the spring 210. However, the output device 231 is not limited to a monitor. The output device 231 can be combined with the first measurement device 230 into a single device.

[0144] Effects and other matters

[0145] When the helix 220 rotates to cause the spring 210 to expand and contract by an amount Δx, the mixture is discharged from the pulse valve 10b, and the discharge amount of the mixture at this time is measured. Thus, the correspondence between the amount of expansion and contraction Δx of the spring 210 and the discharge amount of the mixture can be quantitatively grasped. In other words, the amount of rotation of the helix 220 can be quantitatively correlated with the discharge amount of the mixture. Thus, the discharge amount of the mixture corresponding to the amount of rotation of the helix 220 can be grasped, and the adjustment accuracy of the discharge amount of the mixture by the rotation of the helix 220 can be improved.

[0146] The rotation of the helix 220 can be performed manually or by a driver such as a motor. When the helix 220 is rotated by the driver, the first measurement device 230 can send the measurement result of the spring reaction force to an information processing device (e.g., a circuit) that controls the operation of the driver. The information processing device calculates the amount of rotation of the helix 220 for controlling the amount of the mixture discharged from the pulse valve 10b based on the measurement result sent from the first measurement device 230. The information processing device sends a control signal including the calculated amount of rotation of the helix 220 to the driver. Therefore, the driver rotates the helix 220 by the amount of rotation of the helix 220 based on the control signal output from the information processing device.

[0147] Modifications of the third embodiment

[0148] Reference Figure 7 and Figure 8 FIGS., the pulse valve 10c of the first modification of the third embodiment and the pulse valve 10d of the second modification of the third embodiment will be described. Figure 7 is a schematic cross-sectional view of the pulse valve 10c of the first modification of the third embodiment of the present disclosure. Figure 8 is a schematic cross-sectional view of the pulse valve 10d of the second modification of the third embodiment of the present disclosure.

[0149] As Figure 7As shown, the pulse valve 10c of the first modification of the third embodiment includes: a second measuring device 410 that measures the amount of deformation of the spacer 260 caused by the spring reaction force corresponding to the amount of expansion and contraction Δx of the spring 210; and an output device 411 that outputs the measurement result of the second measuring device 410. As the second measuring device 410, for example, a strain gauge disposed on the surface of the spacer 260 and measuring the amount of deformation of the spacer 260 can be cited. However, the second measuring device 410 is not limited to a strain gauge. The spacer 260 serves as "a member that deforms when receiving a reaction force". Examples of the output device 411 include a monitor separated from or integrated with the second measuring device 410.

[0150] In addition, in the first modification of the third embodiment, the discharge amount of the mixture discharged from the pulse valve 10c is additionally measured. Thereby, the correspondence between the amount of deformation of the spacer 260 measured by the second measuring device 410 and the discharge amount of the mixture can be quantitatively grasped. In other words, the rotation amount of the screw 220 and the discharge amount of the mixture can be quantitatively correlated. Thereby, the discharge amount of the mixture corresponding to the rotation amount of the screw 220 can be obtained, and the adjustment accuracy of the discharge amount of the mixture can be improved.

[0151] As Figure 8 shown, the pulse valve 10d of the second modification of the third embodiment includes: a third measuring device 510 that measures the amount of deformation of the extension rod 141b caused by the spring reaction force corresponding to the amount of expansion and contraction Δx of the spring 210; and an output device 511 that outputs the measurement result of the third measuring device 510. As the third measuring device 510, for example, a strain gauge disposed on the surface of the extension rod 141b and measuring the amount of deformation of the extension rod 141b can be cited. However, the third measuring device 510 is not limited to a strain gauge. The extension rod 141b serves as "a member that deforms when receiving a reaction force". Examples of the output device 511 include a monitor separated from or integrated with the third measuring device 510.

[0152] In addition, in the second modification of the third embodiment, the discharge amount of the mixture discharged from the pulse valve 10d is additionally measured. Therefore, the correspondence between the amount of deformation of the extension rod 141b measured by the third measuring device 510 and the discharge amount of the mixture can be quantitatively obtained. In other words, the rotation amount of the screw 220 and the discharge amount of the mixture can be quantitatively correlated. Thereby, the discharge amount of the mixture corresponding to the rotation amount of the screw 220 can be obtained, and the adjustment accuracy of the discharge amount of the mixture can be improved.

[0153] Embodiment

[0154] Hereinafter, the present invention will be described in more detail by way of examples, but the present invention is not limited to these examples.

[0155] The crystalline polyester prepared by the dehydration condensation reaction of ethylene glycol and dodecanedioic acid is placed in a high-pressure vessel 6 (used as an autoclave). The crystalline polyester is melted at 250 °C, and then the pressure in the system including the high-pressure vessel 6 is reduced to remove air. The melting state of the crystalline polyester is confirmed by the value of the torque meter 23 reaching saturation.

[0156] Supercritical carbon dioxide is introduced into the high-pressure vessel 6, the pressure in the system including the high-pressure vessel 6 is increased to 50 MPa, and the supercritical carbon dioxide and the crystalline polyester are mixed. The mixing uniformity is confirmed by the value of the torque meter 23 reaching saturation.

[0157] After uniform mixing, the mixture is introduced into the pulse valve 10. The flow path 112 of the pulse valve 10 is closed by the needle 130, and the pressure is stabilized at 50 MPa. The piezoelectric actuator 142 is driven to retract the needle 130 and open the flow path 112. Thereby, the mixture is supplied to the nozzle 120 and discharged from the nozzle hole 123.

[0158] The application of the voltage pulse to the piezoelectric actuator 142 is stopped, the spraying is stopped, and the mixture does not leak from the nozzle 120. Even when a rectangular pulse voltage of 100 μs is applied to the piezoelectric actuator 142, the piezoelectric actuator 142 operates stably, and the ejection of the mixture is confirmed.

[0159] The embodiments have been described above, but the embodiments of the present disclosure are not limited to the above structures. The embodiments of the present disclosure can be modified without departing from the scope or spirit of the present disclosure and can be appropriately determined according to the application.

[0160] Aspects of the present disclosure are as follows, for example:

[0161] In a first aspect, a pulse valve includes: a housing having a flow path through which a fluid flows; a hole recessed toward the flow path; and a nozzle mounted in the hole for discharging the fluid flowing in the flow path. The nozzle includes: a nozzle tube having a nozzle hole at one end and communicating with the flow path at the other end; and a connection ferrule located around the nozzle tube for fixing the nozzle to the housing.

[0162] In a second aspect, in the pulse valve according to the first aspect, the nozzle tube has a double-tube structure including: a first tube communicating with the flow path; and a second tube provided outside the first tube, the second tube having the nozzle hole.

[0163] In a third aspect, in the pulse valve according to the first aspect or the second aspect, the nozzle hole has a diameter of 5 μm or more and 500 μm or less.

[0164] In a fourth aspect, in the pulse valve according to any one of the first to third aspects, it includes: a needle inserted into the housing, the needle opening and closing the flow path; and a driver including: an extension rod made of invar alloy and connected to the needle; and an actuator moving the extension rod forward and backward. The driver moves the needle forward and backward.

[0165] In a fifth aspect, in the pulse valve according to the fourth aspect, the actuator includes a piezoelectric actuator.

[0166] In a sixth aspect, in the pulse valve according to the fifth aspect, the piezoelectric actuator includes an annular actuator.

[0167] In a seventh aspect, in the pulse valve according to any one of the fourth to sixth aspects, it further includes a heat insulation flange located between the housing and the driver.

[0168] In an eighth aspect, in the pulse valve according to any one of the fourth to seventh aspects, the flow path includes a plurality of divided flow paths radially arranged along the peripheral wall of the needle, the plurality of divided flow paths having boundary walls to divide adjacent divided flow paths, the boundary walls contacting the peripheral wall of the needle to guide the needle.

[0169] In a ninth aspect, in the pulse valve according to any one of the first to eighth aspects, a coating with a Vickers hardness of 2000 Hv or higher is formed on the inner surface of the nozzle tube and around the nozzle holes of the nozzle.

[0170] In a tenth aspect, in the pulse valve according to any one of the first to ninth aspects, it includes an orifice plate located between the flow path and the nozzle tube. The orifice plate made of ceramics has holes communicating with the nozzle tube. The orifice plate has: a Vickers hardness of 700 Hv or higher, a thermal shock resistance of 100 °C or higher; and an average thermal expansion coefficient of 11×10 -6 / K or less.

[0171] In an eleventh aspect, in the pulse valve according to any one of the fourth to eighth aspects, it further includes: a biasing element connected to the extension rod; a regulator moving the extension rod to adjust the expansion and contraction amount of the biasing element; a measuring device measuring at least one of the following: a reaction force corresponding to the expansion and contraction amount of the biasing element; or a deformation amount of a component deformed due to the reaction force; and an output device outputting the measurement result output from the measuring device.

[0172] In a twelfth aspect, a coating device includes: a high-pressure container for generating a mixture of a fluid and a resin; and a pulse valve according to any one of the first to eleventh aspects for discharging the mixture supplied from the high-pressure container.

[0173] In a thirteenth aspect, in the coating device according to the twelfth aspect, it includes: a stirrer for stirring the mixture; and a torque meter for measuring the torque of the stirrer while stirring the mixture.

[0174] In a fourteenth aspect, a pulse valve includes: a housing having: a flow path through which a fluid flows in a discharge direction; and a hole recessed toward the flow path in a direction opposite to the discharge direction; and a nozzle mounted in the opposite direction to the hole, the nozzle including: a nozzle tube having: a nozzle hole provided at one end of the nozzle tube in the discharge direction for discharging the fluid flowing in the flow path from the nozzle hole in the discharge direction; and the other end communicating with the flow path in the discharge direction; and a connection ferrule located around the nozzle tube and fixed to the housing.

[0175] In a fifteenth aspect, in the pulse valve according to the fourteenth aspect, the nozzle tube has a double-tube structure including: a first tube communicating with the flow path; and a second tube surrounding a part of the first tube, the second tube having the nozzle hole.

[0176] In a sixteenth aspect, in the pulse valve according to the fourteenth or fifteenth aspect, the nozzle hole has a diameter of 5 μm or more and 500 μm or less.

[0177] In a seventeenth aspect, in the pulse valve according to any one of the fourteenth to sixteenth aspects, it includes: a needle inserted into the housing to openably close the flow path in the housing; and a driver including: an extension rod made of invar alloy and connected to the needle; and an actuator for moving the extension rod and the needle back and forth in the opposite direction and the discharge direction.

[0178] In an eighteenth aspect, in the pulse valve according to the seventeenth aspect, the actuator includes a piezoelectric actuator.

[0179] In a nineteenth aspect, in the pulse valve according to the eighteenth aspect, the piezoelectric actuator includes an annular actuator provided around the periphery of the extension rod.

[0180] In a twentieth aspect, in the pulse valve according to the eighteenth aspect, it further includes a heat-insulating flange located between the housing and the driver.

[0181] In a twenty - first aspect, in the pulse valve according to any one of the seventeenth to twentieth aspects, the flow path includes a plurality of divided flow paths disposed circumferentially around the peripheral wall of the needle. The plurality of divided flow paths have boundary walls to divide adjacent divided flow paths, and the boundary walls are in contact with the peripheral wall of the needle to guide the needle.

[0182] In a twenty - second aspect, in the pulse valve according to any one of the fourteenth to twenty - first aspects, the inner surface of the nozzle tube is coated with a coating having a Vickers hardness of 2000 Hv or higher.

[0183] In a twenty - third aspect, in the pulse valve according to any one of the fourteenth to twenty - second aspects, the periphery of the nozzle hole of the nozzle tube is coated with a coating having a Vickers hardness of 2000 Hv or higher.

[0184] In a twenty - fourth aspect, in the pulse valve according to any one of the fourteenth to twenty - third aspects, it further includes an orifice plate located between the flow path and the nozzle tube. The orifice plate made of ceramic has holes communicating with the nozzle tube, and the orifice plate has: a Vickers hardness of 700 Hv or higher, a thermal shock resistance of 100 °C or higher; and an average thermal expansion coefficient of 11×10 -6 / K or less.

[0185] In a twenty - fifth aspect, in the pulse valve according to any one of the seventeenth to twenty - first aspects, it further includes: a biasing element connected to the extension rod; a regulator that moves the extension rod to adjust the elongation and contraction amounts of the biasing element in the discharge direction and the opposite direction; a measuring device that measures at least one of the following: a reaction force corresponding to the elongation and contraction amounts of the biasing element; or the deformation amount of a component deformed due to the reaction force; and an output device that outputs the measurement result output from the measuring device.

[0186] In a twenty - sixth aspect, a coating device includes: the pulse valve according to any one of the fourteenth to twenty - fifth aspects, which discharges the fluid from the nozzle hole; a pressure vessel for: mixing a compressed fluid and a resin to produce the fluid; and supplying the fluid to the pulse valve.

[0187] In a twenty - seventh aspect, in the coating device according to the twenty - sixth aspect, the pressure vessel includes: a stirrer that stirs the mixture of the compressed fluid and the resin to produce the fluid; and a torque meter that measures the torque of the stirrer generated by stirring the mixture.

[0188] The above embodiments are illustrative and do not limit the present invention. Accordingly, many additional modifications and variations are possible in light of the above teachings. For example, within the scope of the present invention, elements and / or features of different illustrative embodiments may be combined with and / or substituted for one another.

[0189] This patent application is based on and claims priority to Japanese Patent Application No. 2023-190254, filed with the Japan Patent Office on November 29, 2022, and Japanese Patent Application No. 2023-170614, filed with the Japan Patent Office on September 29, 2022, the entire disclosures of which are incorporated herein by reference.

[0190] List of Reference Numerals

[0191] 1 Coating device

[0192] 6 High-pressure vessel

[0193] 10, 10a, 10b, 10c, 10d Pulse valve

[0194] 110 Housing

[0195] 111 Base

[0196] 112 Flow path

[0197] 112a, 112b, 112c, 112d Divided flow path

[0198] 112W1, 112W2, 112W3, 112W4 Boundary wall

[0199] 113 First hole

[0200] 116 Second hole

[0201] 120 Nozzle

[0202] 121 Nozzle base

[0203] 122 Nozzle tube

[0204] 123 Nozzle hole

[0205] 124 Connecting ferrule

[0206] 130 Needle

[0207] 140 Driver

[0208] 141, 141b Extension rod

[0209] 142 Piezoelectric actuator

[0210] 150 Heat-insulating flange

[0211] 210 Spring

[0212] 220 Helix

[0213] 230 First Measuring Device

[0214] 231, 411, 511 Output Device

[0215] 250 Spring Housing

[0216] 260 Spacer

[0217] 410 Second Measuring Device

[0218] 510 Third Measuring Device

Claims

1. A pulse valve, comprising: A housing, the housing having: A flow path through which fluid flows in the discharge direction; and A hole recessed toward the flow path in a direction opposite to the discharge direction; and A nozzle mounted to the hole in the opposite direction, the nozzle comprising: A nozzle tube, the nozzle tube having: A nozzle hole provided at one end of the nozzle tube in the discharge direction, discharging the fluid flowing in the flow path from the nozzle hole in the discharge direction; and The other end communicating with the flow path in the discharge direction; and A connection ferrule located around the nozzle tube and fixed to the housing.

2. The pulse valve according to claim 1, Among them, The nozzle tube has a double-tube structure, which includes: A first tube communicating with the flow path; and A second tube surrounding a part of the first tube, the second tube having the nozzle hole.

3. The pulse valve according to claim 1 or 2, Among them, The nozzle hole has a diameter of 5 μm or more and 500 μm or less.

4. The pulse valve according to claim 1 or 2, comprising: A needle inserted into the housing to openably close the flow path in the housing; and A driver, comprising: An extension rod made of invar alloy and connected to the needle; and An actuator that moves the extension rod and the needle back and forth in the opposite direction and the discharge direction.

5. The pulse valve according to claim 4, Among them, The actuator includes a piezoelectric actuator.

6. The pulse valve according to claim 5, Among them, The piezoelectric actuator includes an annular actuator provided around the periphery of the extension rod.

7. The pulse valve according to claim 4, further comprising a heat-insulating flange located between the housing and the driver.

8. The pulse valve according to claim 4, Among them, The flow path includes a plurality of divided flow paths provided circumferentially around the circumferential wall of the needle, The plurality of divided flow paths have boundary walls to divide adjacent divided flow paths, and The boundary walls contact the circumferential wall of the needle to guide the needle.

9. The pulse valve according to claim 1 or 2, Among them, The inner surface of the nozzle tube is coated with a coating having a Vickers hardness of 2000 Hv or higher.

10. The pulse valve according to claim 1 or 2, Among them, The periphery of the nozzle hole of the nozzle tube is coated with a coating having a Vickers hardness of 2000 Hv or higher.

11. The pulse valve according to claim 1 or 2, further comprising an orifice plate located between the flow path and the nozzle tube, Among them, The orifice plate made of ceramic has a hole communicating with the nozzle tube, The orifice plate has: A Vickers hardness of 700 Hv or higher, A thermal shock resistance of 100 °C or higher; and 11×10 -6 / K or less average coefficient of thermal expansion.

12. The pulse valve according to claim 4, further comprising: A biasing element connected to the extension rod; A regulator that moves the extension rod to adjust the elongation and contraction amounts of the biasing element in the discharge direction and the opposite direction; A measuring device that measures at least one of the following: The reaction force corresponding to the elongation and contraction amounts of the biasing element; or The deformation amount of a component deformed due to the reaction force; and An output device that outputs the measurement results output from the measurement device.

13. A coating device, comprising: The pulse valve according to claim 1 or 2, discharging the fluid from the nozzle holes; A pressure vessel for: Mixing compressed fluid and resin to produce the fluid; and Supplying the fluid to the pulse valve.

14. The coating device according to claim 13, Among them, The pressure vessel includes: A stirrer that stirs the mixture of the compressed fluid and the resin to produce the fluid; and A torque meter that measures the torque of the stirrer generated by stirring the mixture.

Images