Method and device for measuring large-angle curved surface profile of micropore inner surface

Abstract

The present invention provides a method and device for measuring the high-angle curved surface profile of the inner surface of a microhole, belonging to the field of optical measurement technology. The device comprises: at least three tilted optical paths, a spectrometer, and a processing unit. Each optical path includes an optical fiber, a reflective prism (a first and a second optical path), and a dispersive metalens. Divergent light is refracted by the reflective prism or directly incident on the dispersive metalens before being focused on the measured surface. The reflected light returns along the original path, where the spectrometer analyzes the spectral wavelength and light intensity sequence data for each optical path. The processing unit calculates the displacement value by extracting the peak wavelength of each measurement point, converts it into three-dimensional spatial coordinates, and reconstructs the surface profile through data fitting. The present invention utilizes a dispersive metalens and a multi-optical path collaborative design, combined with a reflective prism to reduce the sensor size. Preset optical axis tilt angles cover different tilt regions, eliminating measurement blind spots in high-curvature areas. Combined with spectral confocal tomography technology, high-precision measurement of large-angle curved surfaces is achieved.

Description

Technical Field

[0001] The present invention relates to the field of optical measurement technology, and in particular to a method and device for measuring the large-angle curved surface profile of the inner surface of a microhole. Background Art

[0002] The role of curved surface profiles such as the fillet inside microholes at the steps of shaft parts is crucial. It can effectively reduce stress concentration, avoid fatigue cracks or fractures caused by sharp corners, and significantly improve the fatigue life and reliability of parts. The accuracy of surface profile measurement is an important basis for ensuring the quality of surface profile processing. Existing non-contact measurement methods, including laser confocal, line laser, structured light, etc., have one or more defects such as large size, difficulty in measuring highly reflective surfaces, and inability to measure transition features with high curvature. They are unable to measure the curved surface profile inside microholes. Spectral confocal sensing technology has significant application advantages such as high measurement accuracy and axial tomography capabilities, and is widely used in electronic manufacturing, aerospace, laser fusion, automobiles, biology, IC manufacturing and other fields.

[0003] However, due to the limitations of lens materials and structures, the traditional lens-type spectral confocal displacement sensor has a limited minimum volume and insufficient tolerance angle, and cannot be applied to the measurement of curved surface profiles inside microholes.

[0004] Therefore, it is of great significance to develop a spectral confocal high-precision non-contact displacement sensor with the ability to measure tiny size and curved surface profile. Summary of the Invention

[0005] The present invention provides a method and device for measuring the large-angle curved surface profile of the inner surface of a microhole, which are used to solve the defect that a traditional lens-type spectral confocal displacement sensor is difficult to use for measuring the curved surface profile of the inner surface of a microhole.

[0006] In a first aspect, the present invention provides a device for measuring the contour of a large-angle curved surface of an inner surface of a microhole, comprising: at least three optical paths, including: a first optical path, a second optical path, and a third optical path;

[0007] The first optical path includes a first optical fiber, a first reflecting prism, and a first dispersive superlens. The divergent light emitted by the first optical fiber is reflected by the first reflecting prism to the first dispersive superlens, and is focused on the measured curved surface through the first dispersive superlens.

[0008] The second optical path includes a second optical fiber, a second reflecting prism, and a second dispersive superlens. The divergent light emitted by the second optical fiber is reflected by the second reflecting prism to the second dispersive superlens, and is focused on the measured curved surface through the second dispersive superlens.

[0009] The third optical path includes a third optical fiber and a third dispersive superlens, and the divergent light emitted by the third optical fiber is directly incident on the third dispersive superlens and is focused on the measured curved surface through the third dispersive superlens;

[0010] A spectrometer for analyzing the reflected light of the measured curved surface received by the first optical fiber, the second optical fiber, and the third optical fiber respectively and returned along the original optical path, and outputting the spectrum wavelength sequence data and the corresponding light intensity sequence data of the measurement point corresponding to each optical path;

[0011] Processing unit, configured as:

[0012] Obtain the peak wavelength of each measurement point based on the spectral wavelength sequence data and the corresponding light intensity sequence data of each measurement point, and determine the displacement value corresponding to each measurement point based on the peak wavelength of each measurement point;

[0013] Convert the displacement value corresponding to each measurement point into a spatial position;

[0014] The spatial positions of all measuring points are fitted to determine the surface profile of the measured surface.

[0015] According to the device for measuring the large-angle curved surface profile of the inner surface of a microhole provided by the present invention, the optical axes of the first dispersive superlens, the second dispersive superlens, and the third dispersive superlens are arranged according to preset inclination angles, respectively corresponding to areas of the measured curved surface within different inclination angle ranges.

[0016] The device for measuring the large-angle curved surface profile of the inner surface of a microhole provided by the present invention further includes: a probe housing; and the at least three optical paths are arranged in the probe housing.

[0017] According to the device for measuring the large-angle curved surface profile of the inner surface of a microhole provided by the present invention, the divergent light emitted by the optical fiber is broad-spectrum divergent light.

[0018] According to the device for measuring the large-angle curved surface profile of the inner surface of a micropore provided by the present invention, the displacement value corresponding to each measuring point is determined according to the peak wavelength of each measuring point, including: using a predetermined mapping function to convert the peak wavelength into a displacement value.

[0019] According to the device for measuring the large-angle curved surface profile of the inner surface of a micropore provided by the present invention, the mapping function is a polynomial.

[0020] In a second aspect, the present invention further provides a method for measuring the large-angle curved surface profile of the inner surface of a micropore, comprising:

[0021] Projecting light signals onto the surface to be measured through at least three optical paths, where:

[0022] The first optical path reflects the divergent light emitted by the first optical fiber through the first reflecting prism and focuses it onto the measured curved surface through the first dispersive superlens;

[0023] The second optical path reflects the divergent light emitted by the second optical fiber through the second reflecting prism and focuses it onto the measured curved surface through the second dispersive superlens;

[0024] The third optical path focuses the divergent light emitted by the third optical fiber directly onto the measured surface through the third dispersive superlens;

[0025] The reflected light of the measured curved surface returned along the original optical path is received by the first optical fiber, the second optical fiber, and the third optical fiber respectively, and the reflected light is analyzed by a spectrometer to output spectral wavelength sequence data and light intensity sequence data of the corresponding measurement points of each optical path;

[0026] Obtain the peak wavelength of each measurement point based on the spectral wavelength sequence data and the corresponding light intensity sequence data of each measurement point, and determine the displacement value corresponding to each measurement point based on the peak wavelength of each measurement point;

[0027] Convert the displacement value corresponding to each measurement point into a spatial position;

[0028] The spatial positions of all measuring points are fitted to determine the surface profile of the measured surface.

[0029] According to the method for measuring the large-angle curved surface profile of the inner surface of a microhole provided by the present invention, the optical axes of the first dispersive superlens, the second dispersive superlens, and the third dispersive superlens are arranged at preset inclination angles, respectively corresponding to areas of the measured curved surface within different inclination angle ranges.

[0030] According to the method for measuring the large-angle curved surface profile of the inner surface of a microhole provided by the present invention, the divergent light in each optical path is broad-spectrum divergent light.

[0031] According to the method for measuring the large-angle curved surface profile of the inner surface of a micropore provided by the present invention, the displacement value corresponding to each measuring point is determined according to the peak wavelength of each measuring point, including: using a predetermined mapping function to convert the peak wavelength into a displacement value.

[0032] The method and device for measuring the contour of large-angle curved surfaces on the inner surface of a micropore provided by the present invention adopt a dispersive superlens to replace the traditional lens, and combine the multi-light path tilt layout with a reflective prism structure to significantly reduce the volume of the sensor and break through the measurement space limitation inside the micropore. The preset angles of the optical axes of the three light paths cover different normal areas, effectively expanding the measurement angle range and solving the blind spot problem of measuring high-curvature transition surfaces. Combined with the high-precision tomography capability of spectral confocal technology, accurate measurement of large-angle curved surface contours is achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction is given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0034] Figure 1 Schematic diagram of the optical path of the measuring device provided by the present invention;

[0035] Figure 2 Schematic diagram of the dispersion metalens measurement process of the device provided by the present invention;

[0036] Figure 3 Schematic diagram of the measurement ranges corresponding to different dispersion metalenses provided by the present invention;

[0037] Figure 4 It is a schematic flow chart of the method for measuring the large-angle curved surface profile of the inner surface of a micropore provided by the present invention;

[0038] Wherein, the accompanying drawings are marked as follows:

[0039] 1: first optical fiber; 2: second optical fiber; 3: third optical fiber; 4: first reflecting prism;

[0040] 5: second reflecting prism; 6: first dispersive superlens; 7: second dispersive superlens;

[0041] 8: Third dispersion metalens; 9: Probe housing; 10: Measured object; 11: Light source;

[0042] 12: Spectrometer; 13: Measured surface (surface of the object being measured). DETAILED DESCRIPTION

[0043] To make the objectives, technical solutions, and advantages of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0044] It should be noted that, in the description of the embodiments of the present invention, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "include a ..." do not exclude the presence of other identical elements in the process, method, article or device comprising the elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances.

[0045] The terms "first," "second," and the like in this application are used to distinguish similar objects, and are not used to describe a particular order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate, so that the embodiments of this application can be implemented in an order other than that illustrated or described herein. Furthermore, the objects distinguished by "first," "second," and the like generally refer to a class of objects and do not limit the number of objects. For example, the first object may be one or more.

[0046] Figure 1 is a schematic diagram of the optical path of the measuring device provided by the present invention, Figure 2 This is a schematic diagram of the dispersion metalens measurement process of the device provided by the present invention, and the following reference is made to Figure 1 and Figure 2 The aspects of the present invention will be described.

[0047] The device for measuring the large-angle curved surface profile of the inner surface of a micropore provided by the present invention comprises:

[0048] The at least three optical paths include: a first optical path, a second optical path and a third optical path; optionally, the at least three optical paths are arranged in the probe housing 9.

[0049] The first optical path includes a first optical fiber 1, a first reflecting prism 4 and a first dispersive superlens 6. The divergent light emitted by the first optical fiber 1 is reflected by the first reflecting prism 4 to the first dispersive superlens 6, and is focused on the measured curved surface 13 through the first dispersive superlens 6.

[0050] The second optical path includes a second optical fiber 2, a second reflecting prism 5, and a second dispersive superlens 7. The divergent light emitted by the second optical fiber 2 is reflected by the second reflecting prism 5 to the second dispersive superlens 7, and is focused on the measured curved surface 13 through the second dispersive superlens 7.

[0051] The third optical path includes a third optical fiber 3 and a third dispersive superlens 8. The divergent light emitted by the third optical fiber 3 is directly incident on the third dispersive superlens 8 and is focused on the measured curved surface 13 through the third dispersive superlens 8.

[0052] The spectrometer 12 is used to analyze the reflected light of the measured curved surface 13 received by the first optical fiber 1, the second optical fiber 2, and the third optical fiber 3 respectively and returned along the original optical path, and output the spectral wavelength sequence data and the corresponding light intensity sequence data of the measurement point corresponding to each optical path;

[0053] Processing unit, configured as:

[0054] Obtain the peak wavelength of each measurement point based on the spectral wavelength sequence data and the corresponding light intensity sequence data of each measurement point, and determine the displacement value corresponding to each measurement point based on the peak wavelength of each measurement point;

[0055] Convert the displacement value corresponding to each measurement point into a spatial position;

[0056] The spatial positions of all the measuring points are fitted to determine the surface profile of the measured curved surface 13 .

[0057] Optionally, the divergent light emitted by the optical fiber is broad-spectrum divergent light.

[0058] The core structure of the device of the present invention is described below:

[0059] (1) Description of components in the first and second optical paths

[0060] Reflecting prism: Adjusts the direction of the optical path so that the divergent light is incident on the dispersive metalens at a specific angle.

[0061] Dispersive metalens: Utilizes the linear relationship between wavelength and focal length to focus light of different wavelengths to different depths of the measured surface.

[0062] The present invention changes the direction of the light path through a reflecting prism to achieve coverage of different areas of the curved surface.

[0063] (2) Description of the third optical path

[0064] Direct incidence eliminates the need for reflective prisms, simplifies the optical path, and is suitable for measurements in specific directions. Combined with the first and second optical paths, it improves measurement coverage and robustness.

[0065] (3) Arrangement of dispersive superlens

[0066] Figure 3 Schematic diagram of the measurement range of different dispersion metalenses provided by the present invention, such as Figure 3 As shown, the optical axes of the first, second, and third dispersive metalens are arranged at preset tilt angles, corresponding to regions of the measured surface within different tilt angle ranges. The tilt angle refers to the angle offset from the normal.

[0067] Specifically, when measuring the curved surface profile, due to the tolerance angle of the single first dispersion metalens 6 θ When the measured curved surface is tilted too much, the light emitted by the first dispersive superlens 6 cannot return to the first dispersive superlens 6. Therefore, the second dispersive superlens 7 and the third dispersive superlens 8 are configured to correspond to curved surface profiles with different tilt angles (compared to the normal line). For example, the first dispersive superlens 6 corresponds to a curved surface profile of 0° to 15°, the second dispersive superlens 7 corresponds to a curved surface profile of 15° to 45°, and the third dispersive superlens 8 corresponds to a curved surface profile of 45° to 75°.

[0068] (4) Determining the displacement value corresponding to each measurement point based on the peak wavelength of each measurement point, including: using a predetermined mapping function to convert the peak wavelength into a displacement value. The mapping function may be a polynomial.

[0069] Taking the third dispersive metalens 8 as an example, the measurement process of a single dispersive metalens is described below (the measurement methods for other optical paths are the same except for the differences in the optical paths, and will not be described in detail):

[0070] like Figure 2 As shown, the light source 11 generates polychromatic light, which is emitted as divergent light through the third optical fiber 3. After passing through the third dispersive superlens 8, the different wavelengths of light in the polychromatic light are focused at different positions. The focus position of the long-wavelength light is closer to the third dispersive superlens 8, and the focus position of the short-wavelength light is farther away from the third dispersive superlens 8, forming a measurement range S. At this time, when a measured surface 13 is within the measurement range S, the light reflected by the measured surface 13 passes through the third dispersive superlens 8 and returns to the optical fiber. The reflected light passes through the third optical fiber 3 and reaches the spectrometer 12, which obtains a measurement signal. When the measured surface changes within the measurement range S, the single-peak signal moves accordingly. Define the wavelength sequence:

[0071]

[0072] in, It is the spectrum wavelength sequence data output by the spectrometer.

[0073] When the object is within the measurement range S, the spectral intensity data can be obtained through the spectrometer. The spectral intensity sequence data is defined as:

[0074]

[0075] in, The light intensity sequence data corresponding to the spectral wavelength value output by the spectrometer. Based on the wavelength sequence data and the light intensity sequence data, the peak wavelength is calculated, including:

[0076] According to the wavelength sequence data and the light intensity sequence data, the light intensity value corresponding to the value of each wavelength is obtained;

[0077] Multiply the value of each wavelength by its corresponding light intensity value to obtain a set of products; add all the products to obtain the total;

[0078] Divide the sum of the products by the sum of all light intensity values to obtain the peak wavelength.

[0079] The expression is as follows:

[0080]

[0081] in, is the peak wavelength obtained by calculation; The displacement value is calculated as follows:

[0082]

[0083] in, is the calculated displacement value, and are the polynomial coefficients, express of j Power.

[0084] (5) Convert the displacement value corresponding to each measurement point into spatial position

[0085] That is, the spatial position of the measurement point is determined according to the displacement value corresponding to each measurement point and the relative position relationship of the dispersive superlens.

[0086] The probe is moved so that the curved surface profile reaches the measuring range of the dispersive metalens and the inclination angle of the curved surface profile satisfies the measurement range of the dispersive metalens. The displacement value d obtained by the three optical path measurements is obtained. Combined with the relative positional relationship of the three dispersive metalens (i.e., the first dispersive metalens, the second dispersive metalens, and the third dispersive metalens) obtained from the design parameters, such as the relative inclination angle between the optical axes of each dispersive metalens, the relative spatial distance between the center of each dispersive metalens, the distance from the measuring point to the center of each dispersive metalens, and other parameters, the relative spatial position data between the three measurement points are calculated based on spatial geometry.

[0087] (6) Fit the spatial positions of all measurement points to determine the surface profile of the measured surface.

[0088] The present invention can adopt a numerical fitting method to fit the curved surface profile.

[0089] Optionally, the curved surface profile in the present invention is the curved surface profile of the fillet in the micropore. By calculating the curved surface profile parameters of the curved surface profile, the present invention can achieve the measurement of the size of the fillet in the micropore.

[0090] On the other hand, the present invention also provides a method for measuring the large-angle curved surface profile of the inner surface of a micropore. Figure 4 FIG. 1 is a flow chart of a method for measuring the large-angle curved surface profile of a micropore inner surface provided by the present invention. Figure 4 As shown, the steps include:

[0091] Step 401: Projecting light signals onto the surface to be measured through at least three light paths, wherein:

[0092] The first optical path reflects the divergent light emitted by the first optical fiber through the first reflecting prism and focuses it onto the measured curved surface through the first dispersive superlens;

[0093] The second optical path reflects the divergent light emitted by the second optical fiber through the second reflecting prism and focuses it onto the measured curved surface through the second dispersive superlens;

[0094] The third optical path focuses the divergent light emitted by the third optical fiber directly onto the measured surface through the third dispersive superlens;

[0095] Optionally, the optical axes of the first dispersive superlens, the second dispersive superlens and the third dispersive superlens are arranged at preset tilt angles, respectively corresponding to areas of the measured curved surface within different tilt angle ranges.

[0096] Optionally, the divergent light in each optical path is broad-spectrum divergent light (divergent light with a wavelength within a preset range), such as light with a wavelength range of 360 nm to 1100 nm that is preset as needed.

[0097] Step 402: Reflected light from the measured surface returned along the original optical path is received by the first optical fiber, the second optical fiber, and the third optical fiber, and the reflected light is analyzed by a spectrometer to output spectral wavelength sequence data and light intensity sequence data of the corresponding measurement points of each optical path;

[0098] Step 403: Obtain the peak wavelength of each measurement point according to the spectrum wavelength sequence data and the corresponding light intensity sequence data of each measurement point, and determine the displacement value corresponding to each measurement point according to the peak wavelength of each measurement point.

[0099] Determine the displacement value corresponding to each measurement point based on the peak wavelength of each measurement point, including:

[0100] The peak wavelength is converted into a displacement value using a predetermined mapping function.

[0101] Regarding the calculation of the peak wavelength, please refer to the above embodiment and will not be described in detail here.

[0102] Step 404: converting the displacement value corresponding to each measurement point into a spatial position;

[0103] The present invention can determine the spatial position of the measurement point based on the displacement value corresponding to each measurement point and the relative position relationship of the dispersive super lens.

[0104] Step 405: Fit the spatial positions of all measurement points to determine the surface profile of the measured surface.

[0105] In summary, the method and device for measuring the contour of large-angle curved surfaces on the inner surface of a micropore provided by the present invention adopt a dispersive superlens to replace the traditional lens, and combine the multi-optical path tilt layout with a reflective prism structure to significantly reduce the volume of the sensor and break through the measurement space limitation inside the micropore; by covering different normal areas with preset angles of the optical axes of the three optical paths, the measurement angle range is effectively expanded, and the problem of blind spots in the measurement of high-curvature transition surfaces is solved; combined with the high-precision tomography capability of spectral confocal technology, accurate measurement of large-angle curved surface contours is achieved.

[0106] The above is only an exemplary embodiment of the present disclosure and cannot be used to limit the scope of the present disclosure. That is, any equivalent changes and modifications made according to the teachings of the present disclosure are still within the scope of the present disclosure. After considering the specification and practicing the disclosure herein, those skilled in the art will easily think of the implementation scheme of the present disclosure. This application is intended to cover any variation, use or adaptation of the present disclosure, which follows the general principles of the present disclosure and includes common knowledge or customary technical means in the art that are not recorded in the present disclosure. The description and examples are to be regarded as exemplary only, and the scope and spirit of the present disclosure are defined by the claims.

[0107] The technical features of the above embodiments can be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0108] It will be easily understood by those skilled in the art that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A device for measuring the profile of a large-angle curved surface on the inner surface of a micropore, characterized in that: include: At least three optical paths, spectrometers, and processing units; At least three optical paths, including: a first optical path, a second optical path, and a third optical path; The first optical path includes a first optical fiber, a first reflecting prism, and a first dispersive superlens. The divergent light emitted by the first optical fiber is reflected by the first reflecting prism to the first dispersive superlens, and is focused on the measured curved surface through the first dispersive superlens. The second optical path includes a second optical fiber, a second reflecting prism, and a second dispersive superlens. The divergent light emitted by the second optical fiber is reflected by the second reflecting prism to the second dispersive superlens, and is focused on the measured curved surface through the second dispersive superlens. The third optical path includes a third optical fiber and a third dispersive superlens, and the divergent light emitted by the third optical fiber is directly incident on the third dispersive superlens and is focused on the measured curved surface through the third dispersive superlens; A spectrometer for analyzing the reflected light of the measured curved surface received by the first optical fiber, the second optical fiber, and the third optical fiber respectively and returned along the original optical path, and outputting the spectrum wavelength sequence data and the corresponding light intensity sequence data of the measurement point corresponding to each optical path; Processing unit, configured as: Obtain the peak wavelength of each measurement point based on the spectral wavelength sequence data and the corresponding light intensity sequence data of each measurement point, and determine the displacement value corresponding to each measurement point based on the peak wavelength of each measurement point; Convert the displacement value corresponding to each measurement point into a spatial position; The spatial positions of all measuring points are fitted to determine the surface profile of the measured surface.

2. The device for measuring the profile of a micropore inner surface with a large angle according to claim 1, characterized in that: The optical axes of the first dispersive superlens, the second dispersive superlens, and the third dispersive superlens are arranged according to preset tilt angles, respectively corresponding to areas of the measured curved surface within different tilt angle ranges.

3. The device for measuring the profile of a micropore inner surface with a large angle according to claim 1, characterized in that: Also includes: Probe housing; The at least three optical paths are arranged in the probe housing.

4. The device for measuring the profile of a micropore inner surface with a large angle curve according to claim 1, characterized in that: The divergent light emitted by the optical fiber is a broad spectrum divergent light.

5. The device for measuring the profile of a micropore inner surface with a large angle curve according to claim 1, characterized in that: Determine the displacement value corresponding to each measurement point based on the peak wavelength of each measurement point, including: The peak wavelength is converted into a displacement value using a predetermined mapping function.

6. The device for measuring the profile of a micropore inner surface with a large angle according to claim 5, characterized in that: The mapping function is a polynomial.

7. A method for measuring the large-angle curved surface profile of the inner surface of a micropore, characterized in that: include: Projecting light signals onto the surface to be measured through at least three optical paths, where: The first optical path reflects the divergent light emitted by the first optical fiber through the first reflecting prism and focuses it onto the measured curved surface through the first dispersive superlens; The second optical path reflects the divergent light emitted by the second optical fiber through the second reflecting prism and focuses it onto the measured curved surface through the second dispersive superlens; The third optical path focuses the divergent light emitted by the third optical fiber directly onto the measured surface through the third dispersive superlens; The reflected light of the measured curved surface returned along the original optical path is received by the first optical fiber, the second optical fiber, and the third optical fiber respectively, and the reflected light is analyzed by a spectrometer to output spectral wavelength sequence data and light intensity sequence data of the corresponding measurement points of each optical path; Obtain the peak wavelength of each measurement point based on the spectral wavelength sequence data and the corresponding light intensity sequence data of each measurement point, and determine the displacement value corresponding to each measurement point based on the peak wavelength of each measurement point; Convert the displacement value corresponding to each measurement point into a spatial position; The spatial positions of all measuring points are fitted to determine the surface profile of the measured surface.

8. The method for measuring the large-angle curved surface profile of the inner surface of a micropore according to claim 7, characterized in that: The optical axes of the first dispersive superlens, the second dispersive superlens, and the third dispersive superlens are arranged at preset tilt angles, respectively corresponding to areas of the measured curved surface within different tilt angle ranges.

9. The method for measuring the large-angle curved surface profile of the inner surface of a micropore according to claim 7, characterized in that: The divergent light in each optical path is broad spectrum divergent light.

10. The method for measuring the large-angle curved surface profile of the inner surface of a microhole according to claim 7, characterized in that: Determine the displacement value corresponding to each measurement point based on the peak wavelength of each measurement point, including: The peak wavelength is converted into a displacement value using a predetermined mapping function.

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