Sampling detection device for photoresist finished product

Abstract

The invention relates to the technical field of sampling detection devices, in particular to a sampling detection device for photoresist finished products, which comprises a rotary flow instrument body and a rotor assembly, a limiting seat is fixedly mounted on the rotary flow instrument body, and a sealing cover is movably connected to the upper surface of the limiting seat. And a bearing disc is fixedly mounted at the upper end of the center of the limiting seat. Through optimization design of a bearing disc, integrated assembly of a limiting baffle ring and arrangement of a scraper mechanism, overflowing glue of a material placing table is automatically and efficiently scraped, sampling accuracy is guaranteed, integrated design of a wedge-shaped dirt collecting groove base is matched, waste is contained, and through the design of an auxiliary rotating mechanism, the waste can be automatically and efficiently scraped. According to the photoresist sampling detection device, the scraper mechanism is driven by airflow to achieve efficient scraping of excessive photoresist, the requirement for automatic scraping of redundant photoresist is met through the limiting baffle ring, self-cleaning of the scraper mechanism can be achieved, waste collection is achieved, the integrated detection process is achieved, and meanwhile the accuracy and the detection efficiency of photoresist sampling detection are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of sampling detection devices, and particularly to a sampling detection device for photoresist finished products. Background Art

[0002] Photoresist is a key material in the fields of semiconductor manufacturing, display panels, PCBs, etc. In the field of semiconductor manufacturing, as a core material, the quality stability of photoresist directly determines the chip yield. Traditional detection methods mostly rely on manual visual inspection or single-parameter testing, which have problems such as low detection efficiency and single data dimension. For example, the rheological properties of photoresist are strongly related to coating uniformity and development effect, but traditional methods are difficult to quantitatively characterize. The rotational rheometer can simulate actual process conditions and obtain the dynamic rheological parameters of photoresist in real time, providing a scientific basis for quality assessment; when sampling and detecting photoresist, first take an appropriate amount of sample from the photoresist stock solution to ensure no bubbles or impurities to avoid affecting the test accuracy. Start the rheometer, select a suitable rotor and install it, set the test parameters, and perform zero calibration. Then evenly apply the photoresist sample on the surface of the rotor or in the measurement gap to ensure no leakage or voids. Subsequently, manually scrape off the overflowing colloid generated after pressing with a scraper. The enclosed cover can provide inert gas protection to prevent the photoresist from oxidizing or volatilizing at high temperatures. Then start the test program, record the rheological properties of the photoresist under different conditions, and finally export the test data to analyze the rheological performance parameters of the photoresist and evaluate its applicability.

[0003] In the prior art, a rotary rheometer with automatic scraping, such as the one with the publication number CN215492978U, relates to the field of rheology testing; during the scraping process of the sample, it is fixed by extrusion through the fixture unit, and then the scraping unit rotates around the fixture unit to scrape off the excess sample, with simple operation, high scraping efficiency, and high precision.

[0004] Although the above document solves the problem that the existing rotary rheometer cannot automatically scrape materials, in actual use, after the traditional rheometer scrapes off the overflowing glue, it lacks a self-cleaning structure for the scraper and still requires manual scraping. And for the fixed material placement lower plate, there are significant defects in cleaning the overflowing glue, resulting in affecting the detection efficiency of photoresist.

[0005] Therefore, the present invention proposes a sampling detection device for photoresist finished products to solve the problems that after the traditional rheometer scrapes off the overflowing glue, it lacks a self-cleaning structure for the scraper and still requires manual scraping, and for the fixed material placement lower plate, there are significant defects in cleaning the overflowing glue, resulting in affecting the detection efficiency of photoresist. Summary of the Invention

[0006] Aiming at the deficiencies of the existing technology, the purpose of the present invention is to provide a sampling and detection device for photoresist finished products to solve the problems raised in the above background technology.

[0007] To achieve the above purpose, the present invention provides the following technical solutions: A sampling and detection device for photoresist finished products, including a rotary flow meter body and a rotor assembly. A limit seat is fixedly installed on the rotary flow meter body. A closed cover is movably connected to the upper surface of the limit seat. A bearing plate is fixedly installed at the upper end center of the limit seat. An installation groove is opened on the inner wall of the center of the bearing plate. A material placement table is fixedly installed inside the installation groove. A limit retaining ring is movably connected to the upper end of the bearing plate. A wedge-shaped sewage collection tank seat is arranged between the outer side of the material placement table and the inner side of the bearing plate. An installation groove plate is fixedly installed on the inner side of the upper end of the limit retaining ring. A double scraper mechanism is arranged inside the installation groove plate. An auxiliary rotation mechanism is arranged on the outer ring surface of the limit retaining ring.

[0008] Preferably, the auxiliary rotation mechanism includes a socket ring plate fixedly installed on the outer ring surface of the limit retaining ring. A wind receiving plate is fixedly installed on the outer ring surface of the socket ring plate, and the wind receiving plates are distributed at an angle of 45°.

[0009] Preferably, an opening is arranged on one side of the wind receiving plate. A wind blocking plate is fixedly installed on the opening side. An air inlet cavity is opened inside the wind receiving plate. An air inlet slope is arranged on the side of the air inlet cavity close to the wind blocking plate.

[0010] Preferably, an air duct is opened on the inner wall of the lower side of the closed cover, and the output port of the air duct faces the opening side of the wind receiving plate.

[0011] Preferably, the double scraper mechanism includes an embedded seat, and the side view cross-section of the embedded seat is in an "S" shape. One side of the embedded seat is movably clamped with the inner ring surface of the installation groove plate. A cylindrical pipe is fixedly installed at the lower end of the embedded seat. An air duct cavity is opened on the inner wall of the cylindrical pipe.

[0012] Preferably, an operation cylinder is fixedly installed at the center of the air duct cavity. The operation cylinder is in a hollow cylindrical structure. A telescopic rod is fixedly installed on the inner surface of the operation cylinder. The output end of the telescopic rod is fixedly connected to a toothed rod. A whistle-shaped toothed seat is meshed and rotated on the outer surfaces of both sides of the toothed rod. A scraper seat is integrally formed on the outer side of the whistle-shaped toothed seat. A rubber wiping sponge is arranged on the outer side of the scraper seat.

[0013] Preferably, the whistle-shaped toothed seat is rotatably installed on the inner side of the lower end of the embedded seat. A limit post is fixedly installed at the upper end of the whistle-shaped toothed seat. An arc-shaped limit groove is penetrated and opened on the inner wall of the embedded seat, and the inner surface of the arc-shaped limit groove is movably connected to the outer surface of the limit post.

[0014] Preferably, a receiving groove is formed on the inner surface of the scraper seat, an inner scraper is movably connected inside the receiving groove, and the ends of the scraper seat and the inner scraper away from the embedding seat are both beveled.

[0015] Preferably, an exhaust groove is formed on the outer surface of the scraper seat, one end of the exhaust groove is connected to a supply air hose in a through manner, and the other end of the supply air hose penetrates through the inner wall of the cylindrical pipe and communicates with the air duct cavity.

[0016] Preferably, water replenishing components are arranged on both sides of the scraper seat, the water replenishing components include water droplet sac plates, the water droplet sac plates are in a water droplet shape structure, and one side of the water droplet sac plates is hermetically communicated with the inner wall of the water storage ring cavity.

[0017] Preferably, a piston pipe is connected to the inner wall of the water droplet sac plate in a through manner, one end of the piston pipe is fixedly connected with a diversion cone cover, the diversion cone cover and the piston pipe are integrally formed to form a water spraying channel, and the water inlet end of the diversion cone cover is designed as a conical opening.

[0018] Preferably, a support frame is fixedly installed on the inner wall of the water spraying channel near the diversion cone cover, an arc-shaped bent rod and a central elastic strip are fixedly connected to the inner side of the support frame, the other ends of the arc-shaped bent rod and the central elastic strip are fixedly connected with a push plug, a contact round head is arranged at the end of the push plug away from the diversion cone cover, and the maximum diameter of the push plug is larger than the inner diameter of the piston pipe and is in movable abutment with the inner wall of the water spraying channel.

[0019] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0020] A sampling detection device for a photoresist finished product proposed by the present invention, through the optimized design of the carrier plate, by means of the integrated assembly of the limit retaining ring, equipped with a scraper mechanism, realizes the automatic and efficient scraping of the overflowing glue on the placement table, ensures the sampling accuracy, in cooperation with the integrated design of the wedge-shaped dirt collection tank seat, the waste materials are received, and through the design of the auxiliary rotation mechanism, the air flow is used to drive the scraper mechanism to realize the efficient scraping of the overflowing glue. The limit retaining ring not only satisfies the automatic scraping of the excess glue, but also can realize the self-cleaning of the scraper mechanism, and also realizes the collection of the waste materials. While realizing the integrated detection process, the accuracy and detection efficiency of the photoresist sampling detection are improved. Through the self-cleaning means, the time for material replacement and cleaning between each experiment is reduced, and the refinement degree and intelligent degree of the measurement are greatly improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 is a schematic structural diagram of the closed cover of the present invention in a combined state;

[0022] Figure 2 is a schematic structural diagram of the closed cover of the present invention in an opened state;

[0023] Figure 3Schematic structural diagram of the removal of the closed cover of the present invention;

[0024] Figure 4 For the present invention Figure 3 Front sectional structural diagram;

[0025] Figure 5 For the present invention Figure 4 Enlarged structural diagram at position A;

[0026] Figure 6 For the present invention Figure 5 Enlarged structural diagram at position A1;

[0027] Figure 7 Schematic structural diagram of the connection between the limit seat and the bearing plate of the present invention;

[0028] Figure 8 For the present invention Figure 7 Top view sectional structural diagram;

[0029] Figure 9 Schematic distribution structure of the material placing table and the limit retaining ring of the present invention Figure 1 ;

[0030] Figure 10 Schematic distribution structure of the material placing table and the limit retaining ring of the present invention Figure 2 ;

[0031] Figure 11 Schematic structural diagram of the parallel state of two groups of scraper seats of the present invention;

[0032] Figure 12 Schematic structural diagram of the state where two groups of scraper seats are opened at an angle of 50° of the present invention;

[0033] Figure 13 Schematic structural diagram of the extended state of the inner scraper of the present invention;

[0034] Figure 14 For the present invention Figure 13 Bottom view structural diagram;

[0035] Figure 15 For the present invention Figure 11 Top view sectional structural diagram;

[0036] Figure 16 For the present invention Figure 13 Schematic structural diagram of the removal of the embedded seat and the cylindrical tube;

[0037] Figure 17 Partial sectional structural diagram of the water replenishing component of the present invention.

[0038] In the figure: 1. Rotating flow meter body; 10. Rotor assembly; 11. Limiting seat; 110. Annular rotating groove; 12. Enclosure; 120. Air duct; 2. Carrying plate; 20. Installation groove; 21. Material placing table; 22. Wedge-shaped sewage collecting trough seat; 220. Sewage discharge pipe; 3. Limiting retaining ring; 30. Water storage ring cavity; 31. Ball; 32. Socket ring plate; 321. Wind receiving plate; 322. Wind blocking plate; 323. Air inlet cavity; 3231. Air inlet slope; 33. Installation groove plate; 4. Embedded seat; 41. Cylindrical pipe; 410. Air duct cavity; 4101. Air supply hose; 4102. Exhaust groove; 42. Operating cylinder; 421. Telescopic rod; 422. Rack; 423. Whistle-shaped tooth seat; 4231. Limiting column; 43. Scraper seat; 431. Inner scraper; 432. Glue wiping sponge; 5. Water droplet bladder plate; 51. Piston pipe; 52. Flow guiding conical cover; 53. Pushing plug; 531. Contact round head; 532. Arc-shaped bent rod; 533. Support frame; 534. Central spring strip. Detailed implementation mode

[0039] In order to clearly and completely describe the purpose, technical solution of the present invention, and make the advantages more clearly understood, the following further details the embodiments of the present invention with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are part of the embodiments of the present invention, rather than all of the embodiments, and are only used to explain the embodiments of the present invention, not to limit the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of protection of the present invention.

[0040] Embodiment 1. Please refer to Figure 1-17 , the present invention provides a technical solution: a sampling and detection device for photoresist finished products, including a rotating flow meter body 1 and a rotor assembly 10. A limiting seat 11 is fixedly installed on the rotating flow meter body 1. An enclosure 12 is movably connected to the upper surface of the limiting seat 11. A carrying plate 2 is fixedly installed at the upper center of the limiting seat 11. An installation groove 20 is formed in the inner wall of the center of the carrying plate 2. A material placing table 21 is fixedly installed inside the installation groove 20. A limiting retaining ring 3 is movably connected to the upper end of the carrying plate 2. A wedge-shaped sewage collecting trough seat 22 is arranged between the outer side of the material placing table 21 and the inner side of the carrying plate 2. A sewage discharge pipe 220 is connected through the lower end of the wedge-shaped sewage collecting trough seat 22. An electromagnetic valve is arranged on the inner side wall of the sewage discharge pipe 220. An installation groove plate 33 is fixedly installed on the inner side of the upper end of the limiting retaining ring 3. A double scraper mechanism is arranged inside the installation groove plate 33. An auxiliary rotation mechanism is arranged on the outer ring surface of the limiting retaining ring 3; A water injection pipe is connected through the inner wall of one side of the limiting retaining ring 3, and the water injection pipe is used for supplementing water flow into the water storage ring cavity 30;

[0041] In this embodiment, when sampling and detecting the photoresist, first take an appropriate amount of sample from the original photoresist solution to ensure that there are no bubbles or impurities, so as to avoid affecting the test accuracy. Start the rotary flow meter body 1, select a suitable rotor assembly 10 and install it, set the test parameters, and perform zero calibration. Then evenly apply the photoresist sample on the surface of the material placing table 21, and manually scrape off the overflowing colloid generated after pressing with a scraper. Close the enclosure 12 to ensure no leakage or voids. The enclosure 12 can provide an inert gas protection to prevent the photoresist from oxidizing or volatilizing at high temperatures. Then start the test program, record the rheological properties of the photoresist under different conditions, and finally export the test data, analyze the rheological performance parameters of the photoresist, and evaluate its applicability; through the optimized design of the carrier plate 2, by using the integrated assembly of the limit retaining ring 3 and equipping with a scraper mechanism, the automatic and efficient scraping of the overflowing glue on the material placing table 21 is realized, ensuring the sampling accuracy. In cooperation with the integrated design of the wedge-shaped dirt collection tank seat 22, the waste is collected. And through the design of the auxiliary rotation mechanism, the airflow is used to drive the scraper mechanism to achieve efficient scraping of the overflowing glue. The limit retaining ring 3 not only satisfies the automatic scraping of the excess glue, but also enables self-cleaning of the scraper mechanism, and also realizes the collection of waste. While realizing the integrated detection process, the accuracy and detection efficiency of the photoresist sampling and detection are improved.

[0042] Embodiment 2. Refer to the attached Figure 1-17 , on the basis of Embodiment 1, in order to realize the installation of the scraper seat 43 and the embedded seat 4: The double-scraper mechanism includes an embedded seat 4. The side view cross-section of the embedded seat 4 is in an "S" shape structure. One side of the embedded seat 4 is movably clamped with the inner circumferential surface of the installation groove plate 33. A cylindrical tube 41 is fixedly installed at the lower end of the embedded seat 4. An air duct cavity 410 is opened on the inner wall of the cylindrical tube 41; An operation cylinder 42 is fixedly installed at the center of the air duct cavity 410. The operation cylinder 42 is in a hollow cylindrical structure. A telescopic rod 421 is fixedly installed on the inner surface of the operation cylinder 42. The output end of the telescopic rod 421 is fixedly connected to a toothed rod 422. A whistle-shaped toothed seat 423 is meshed and rotated on the outer surfaces of both sides of the toothed rod 422. A scraper seat 43 is integrally formed and connected to the outside of the whistle-shaped toothed seat 423. A wiping sponge 432 is arranged on the outside of the scraper seat 43; The whistle-shaped toothed seat 423 is rotatably installed on the inner side of the lower end of the embedded seat 4. A limit post 4231 is fixedly installed at the upper end of the whistle-shaped toothed seat 423. An arc-shaped limit groove is penetrated and opened on the inner wall of the embedded seat 4. The inner surface of the arc-shaped limit groove is movably connected to the outer surface of the limit post 4231; A receiving groove is opened on the inner surface of the scraper seat 43. An inner scraper 431 is movably connected inside the receiving groove. The ends of the scraper seat 43 and the inner scraper 431 away from the embedded seat 4 are both set as bevels;

[0043] In this embodiment, before or after squeezing and scraping the overflow glue on the material placing table 21, the swinging amplitudes of the two groups of scraper seats 43 towards both sides are adjusted. Specifically, by controlling the telescopic rod 421 to expand and contract, the output end of which is connected to one end of the toothed rod 422. When the telescopic rod 421 extends, the toothed rod 422 advances forward. At this time, the tooth surfaces of the two groups of whistle-shaped tooth seats 423 are fitted and engaged with both sides of the toothed rod 422. Through the double limit of the arc-shaped limit groove and the limit post 4231, the synchronous expansion of the two groups of scraper seats 43 is realized. When the two groups of scraper seats 43 are in a parallel state, their bottommost surfaces are in contact with the upper surface of the material placing table 21, and the bevel positions of the scraper seat 43 and the inner scraper 431 are adapted to the slopes of the rotor assembly 10, so that the scraping of the overflow glue can be realized more efficiently.

[0044] Embodiment 3. Refer to the appendix Figure 1-17 , on the basis of Embodiment 2, in order to expand the scraping range, the extension distance of the inner scraper 431 is adjusted: an electric telescopic rod is fixedly installed at one end of the receiving groove, and the output end of the electric telescopic rod is fixedly connected to the end of the inner scraper 431 away from the bevel. Convex blocks are fixedly installed on both sides of the inner scraper 431, and sliding grooves are opened on the side walls of the receiving groove. The inner surface of the sliding groove is slidably connected to the surfaces of the convex blocks fixedly installed on both sides of the inner scraper 431. Through the limit of the convex blocks and the sliding grooves and the telescopic limit of the electric telescopic rod, the extension of the inner scraper 431 is realized; an exhaust groove 4102 is opened on the outer surface of the scraper seat 43, and one end of the exhaust groove 4102 is connected through a ventilation hose 4101. The other end of the ventilation hose 4101 penetrates the inner wall of the cylindrical pipe 41 and communicates with the air duct cavity 410.

[0045] In this embodiment, when it is necessary to scrape the photoresist on the entire upper surface of the material placing table 21 in a large area, the inner scraper 431 received in the receiving groove of the scraper seat 43 is pushed outwards. By controlling the electric telescopic rod to push the inner scraper 431 to extend, it should be noted that the bottom surface of the inner scraper 431 is flush with the bottom surface of the scraper seat 43, and when the inner scraper 431 extends to the maximum range, the connection length between the inner scraper 431 and the scraper seat 43 is slightly greater than the radius of the material placing table 21. In this way, when the scraper mechanism rotates around the center of the material placing table 21 to scrape the glue, the photoresist on the surface of the material placing table 21 can be erased. It should be noted that a memory elastic strip is provided at the top of the receiving groove for covering the top surface of the receiving groove to prevent external dust from entering the inside of the receiving groove and causing jamming. And through the elastic characteristics of the memory elastic strip, the stability of the extension and recovery of the inner scraper 431 is ensured, and the working efficiency of scraping the glue after detection is improved.

[0046] It should also be noted that the cylindrical tube 41 is integrally formed and connected with the embedded seat 4. It can not only serve as a limit mounting part for the operating cylinder 42 and the telescopic rod 421, but also limit the swinging scraper seat 43. Moreover, combined with the opening of the air duct cavity 410, it can receive inert gas during rotation and output it through the air supply hose 4101. Then, it enters the exhaust groove 4102 through the air supply hose 4101 and is output. Refer to Figure 14-15 As shown, the exhaust groove 4102 is integrated with the scraper seat 43 and can be used for drying the surface after glue overflow wiping.

[0047] Embodiment 4. Refer to the appendix Figure 1-17 , on the basis of Embodiment 3, in order to realize the rotation of the scraper mechanism around the center of the placing table 21 and achieve efficient automated glue scraping operation: The auxiliary rotation mechanism includes a socket ring plate 32. The socket ring plate 32 is fixedly installed on the outer ring surface of the limit retaining ring 3. The outer ring surface of the socket ring plate 32 is fixedly installed with a wind receiving plate 321. The wind receiving plates 321 are inclined at an angle of 45°; There is an opening on one side of the wind receiving plate 321. A wind blocking plate 322 is fixedly installed on the opening side. An air inlet cavity 323 is opened inside the wind receiving plate 321. An air inlet slope 3231 is arranged on the side of the air inlet cavity 323 close to the wind blocking plate 322; A duct 120 is opened on the lower inner wall of the closed cover 12. The output port of the duct 120 faces the opening side of the wind receiving plate 321; An annular rotating groove 110 is opened at the upper end of the bearing plate 2. A ball 31 is installed inside the annular rotating groove 110 in a rolling manner. The outer surface of the ball 31 is movably connected to the bottom end of the limit retaining ring 3;

[0048] In this embodiment, a nitrogen gas tank is arranged at the input end of the duct 120. The nitrogen gas tank is arranged inside the upright column at the upper end of the rotary flowmeter body 1. And the input end of the duct 120 is fixedly connected with an air pump. The inert gas in the nitrogen gas tank is input into the inner cavity of the closed closed cover 12 through the duct 120 by the drive of the air pump, as Figure 8As shown, the output port of the air duct 120 is aligned with the opening position of the air receiving plate 321, and air flow continuously enters the air inlet cavity 323 of the air receiving plate 321. The air flow enters the interior of the air inlet cavity 323 better through the air inlet slope 3231. With the connection of the air blocking plate 322, the input nitrogen can be blocked. At this time, the air flow at the output end of the air duct 120 provides a driving force for the air receiving plate 321, causing the socket ring plate 32 and the limit retaining ring 3 to rotate. It should be noted that an annular rotating groove 110 is opened on the top surface of the carrier plate 2, and a plurality of balls 31 are evenly and rotatably installed therein, which contact the bottom surface of the limit retaining ring 3, enabling the overall rotation of the limit retaining ring 3 to be smoother, and then driving the rotation of the scraping knife mechanism installed inside the installation groove plate 33, ensuring the automatic scraping of the overflowing glue and replacing the manual scraping step; and it should be noted that the rotation of the scraping knife mechanism and the input of nitrogen into the closed cover 12 by the air duct 120 are both carried out before or after the detection operation. Through the input of nitrogen, not only can the automatic rotation and glue scraping of the scraping knife mechanism be ensured, but nitrogen, as an inert gas, can also isolate oxygen and moisture in the air, preventing the photoresist or the substrate material from being oxidized or contaminated when exposed.

[0049] Embodiment 5. Refer to the appendix Figure 1-17 On the basis of Embodiment 4, in order to achieve self-cleaning of the scraping knife mechanism for scraping the photoresist: water replenishing components are arranged on both sides of the scraping knife seat 43. The water replenishing components include a water droplet bag plate 5. The water droplet bag plate 5 has a water droplet-shaped structure, and one side of the water droplet bag plate 5 is hermetically communicated with the inner wall of the water storage ring cavity 30; a piston tube 51 is connected through the inner wall of the water droplet bag plate 5. One end of the piston tube 51 is fixedly connected with a diversion cone cover 52. The diversion cone cover 52 and the piston tube 51 are integrally formed to form a water spraying channel. The water inlet end of the diversion cone cover 52 is designed as a conical opening; a support frame 533 is fixedly installed on the inner wall of the water spraying channel near the diversion cone cover 52. An arc-shaped bent rod 532 and a central elastic strip 534 are fixedly connected to the inner side of the support frame 533. The other ends of the arc-shaped bent rod 532 and the central elastic strip 534 are fixedly connected with a push plug 53. A contact round head 531 is arranged at the end of the push plug 53 away from the diversion cone cover 52, and the maximum diameter of the push plug 53 is larger than the inner diameter of the piston tube 51 and is in movable contact with the inner wall of the water spraying channel;

[0050] In this embodiment, after scraping the overflowing glue on the surface of the material placing table 21, adjust the expansion amplitude of the two scraper seats 43 until the bottom surface of the scraper seat 43 does not contact the surface of the material placing table 21. When the scraper seats 43 are respectively expanded outward by 50°, at this time, the glue-wiping sponge 432 outside the scraper seat 43 does not contact the water droplet bladder plate 5, and there is a certain distance between the two. At this time, the water flow in the water storage ring cavity 30 enters the water droplet-shaped inner cavity of the water droplet bladder plate 5, and enters the water spraying channel formed by the diversion cone cover 52 and the piston tube 51 through the gap of the support frame 533. At this time, the push plug 53 is pushed out of the piston tube 51 under the action of the water flow and the elastic pushing action of the glue-wiping sponge 432 and the central elastic strip 534. At this time, the water flow flows out through the gap between the push plug 53 and the piston tube 51, and the water flow sprays onto the glue-wiping sponge 432, making the glue-wiping sponge 432 adhered with glue gradually saturated. It should be noted that in the initial state, the maximum diameter part of the push plug 53 is always in the state of protruding from the piston tube 51; when the scraper seat 43 is adjusted to expand outward by 65°, the side of the scraper seat 43 squeezes the contact round head 531. At this time, the push plug 53 blocks the port of the piston tube 51, and while no water comes out, the automatic extrusion of the saturated glue-wiping sponge 432 is realized, so that the mixed glue is extruded out and enters the wedge-shaped sewage collection tank seat 22 for concentration.

[0051] Embodiment Six. Refer to the attached Figure 1-17 , on the basis of Embodiment Five, the present invention also proposes a usage method of a sampling and detecting device for a photoresist finished product, including the following steps:

[0052] Step 1: Take an appropriate amount of sample from the photoresist stock solution, ensure that there are no bubbles or impurities to avoid affecting the test accuracy. Start the rotary rheometer body 1, select a suitable test head rotor assembly 10 and install it, set the test parameters, and perform zero calibration. Uniformly apply the photoresist sample on the surface of the material placing table 21, manually scrape the overflowing colloid generated after pressing with a scraper, close the closed cover 12 to ensure no leakage or gap. The closed cover 12 provides inert gas protection to prevent the photoresist from oxidizing or volatilizing at high temperature. Start the test program, record the rheological properties of the photoresist under different conditions, export the test data, analyze the rheological performance parameters of the photoresist, and evaluate its applicability;

[0053] Step 2: Install the double-scraper mechanism embedding seat 4 inside the mounting groove plate 33, ensure that its "S"-shaped structure is movably clamped with the mounting groove plate 33. By controlling the telescopic movement of the electric telescopic rod 421, drive the rack 422 to move, drive the whistle-shaped tooth seat 423 and the scraper seat 43 to expand synchronously, and adjust the swinging amplitude of the two scraper seats 43 to both sides. When the two scraper seats 43 are in a parallel state, its bottommost surface contacts the upper surface of the material placing table 21 to realize the scraping of the overflowing glue;

[0054] Step 3: When it is necessary to scrape off the photoresist on the entire surface of the material loading platform 21 in a large area, the inner scraper 431 stored in the receiving groove of the scraper seat 43 is pushed outward, and the inner scraper 431 is pushed outward by controlling the electric telescopic rod to achieve large-area scraping. After the scraping is completed, the expansion amplitude of the two groups of scraper seats 43 is adjusted until the bottom surface of the scraper seat 43 is not in contact with the surface of the material loading platform 21, and the water flows into the water droplet-shaped inner cavity of the water droplet capsule plate 5, flows out through the water spray channel, and sprays onto the glue wiping sponge 432 to gradually saturate it. When the scraper seat 43 is adjusted to expand outward to a specific angle, the side of the scraper seat 43 squeezes the push plug 53 to achieve automatic extrusion of the saturated glue wiping sponge 432, and the mixed glue is squeezed out and enters the wedge-shaped sewage collecting tank seat 22 for concentration;

[0055] Step 4: Drive the inert gas in the nitrogen box through the air pump and input it into the closed inner cavity of the closed cover 12 through the air duct 120. The airflow is aligned with the opening position of the wind plate 321 and input. The airflow provides a driving force for the wind plate 321, so that the sleeve ring plate 32 and the limit stop ring 3 rotate, driving the double scraper mechanism installed on the inner side of the mounting groove plate 33 to rotate, realizing automatic scraping of glue, and opening a ring groove 110 on the top surface of the carrier plate 2, in which a plurality of balls 31 are evenly rolled and installed to contact the bottom surface of the limit stop ring 3, so that the limit stop ring 3 can rotate more smoothly as a whole.

[0056] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A sampling and detection device for a finished photoresist product, comprising a rotary flow meter body (1) and a rotor assembly (10). A limit seat (11) is fixedly installed on the rotary flow meter body (1), and a closed cover (12) is movably connected to the upper surface of the limit seat (11). It is characterized in that: A bearing plate (2) is fixedly installed at the upper center of the limit seat (11). An installation groove (20) is formed in the inner wall of the center of the bearing plate (2). A material placing table (21) is fixedly installed inside the installation groove (20). A limit retaining ring (3) is movably connected to the upper end of the bearing plate (2). A wedge-shaped sewage collecting tank seat (22) is arranged between the outer side of the material placing table (21) and the inner side of the bearing plate (2). An installation groove plate (33) is fixedly installed on the inner side of the upper end of the limit retaining ring (3). A double scraper mechanism is arranged inside the installation groove plate (33). An auxiliary rotation mechanism is arranged on the outer ring surface of the limit retaining ring (3).

2. The sampling and detection device for a finished photoresist product according to claim 1, wherein: The auxiliary rotation mechanism includes a socket ring plate (32). The socket ring plate (32) is fixedly installed on the outer ring surface of the limit retaining ring (3). A wind receiving plate (321) is fixedly installed on the outer ring surface of the socket ring plate (32). The wind receiving plates (321) are distributed at an angle of 45°.

3. The sampling and detection device for a finished photoresist product according to claim 2, wherein: An opening is arranged on one side of the wind receiving plate (321). A wind blocking plate (322) is fixedly installed on the opening side. An air inlet cavity (323) is formed inside the wind receiving plate (321). An air inlet slope surface (3231) is arranged on one side of the air inlet cavity (323) close to the wind blocking plate (322).

4. The sampling and detection device for a finished photoresist product according to claim 3, characterized in that: An air guide pipe (120) is formed in the inner wall of the lower side of the closed cover (12). The output port of the air guide pipe (120) faces the opening side of the wind receiving plate (321).

5. The sampling and detection device for a finished photoresist product according to claim 1, characterized in that: The double scraper mechanism includes an embedded seat (4). The side view cross section of the embedded seat (4) is in an "S" shape. One side of the embedded seat (4) is movably clamped with the inner ring surface of the installation groove plate (33). A cylindrical pipe (41) is fixedly installed at the lower end of the embedded seat (4). An air pipe cavity (410) is formed in the inner wall of the cylindrical pipe (41).

6. The sampling and detection device for a finished photoresist product according to claim 5, characterized in that: An operation cylinder (42) is fixedly installed at the center of the air pipe cavity (410). The operation cylinder (42) is in a hollow columnar structure. A telescopic rod (421) is fixedly installed on the inner surface of the operation cylinder (42). A toothed rod (422) is fixedly connected to the output end of the telescopic rod (421). A whistle-shaped toothed seat (423) is meshed and rotated on the outer surfaces of both sides of the toothed rod (422). A scraper seat (43) is integrally formed and connected to the outside of the whistle-shaped toothed seat (423). A glue wiping sponge (432) is arranged on the outside of the scraper seat (43).

7. The sampling and detection device for a finished photoresist product according to claim 6, wherein: The whistle-shaped toothed seat (423) is rotatably installed inside the lower end of the embedded seat (4). A limit column (4231) is fixedly installed at the upper end of the whistle-shaped toothed seat (423). An arc-shaped limit groove is formed through the inner wall of the embedded seat (4). The inner surface of the arc-shaped limit groove is movably connected to the outer surface of the limit column (4231).

8. The sampling and detection device for a finished photoresist product according to claim 7, wherein: A receiving groove is formed in the inner surface of the scraper seat (43). An inner scraper (431) is movably connected inside the receiving groove. The ends of the scraper seat (43) and the inner scraper (431) far from the embedded seat (4) are both beveled.

9. The sampling and detection device for a finished photoresist product according to claim 8, wherein: An exhaust air groove (4102) is formed on the outer surface of the scraper seat (43). One end of the exhaust air groove (4102) is connected to a blower hose (4101) in a through manner, and the other end of the blower hose (4101) penetrates through the inner wall of the cylindrical pipe (41) and communicates with the air duct cavity (410).

10. The sampling and detection device for a finished photoresist product according to claim 9, characterized in that: Water replenishing components are arranged on both sides of the scraper seat (43). The water replenishing components include a water droplet bladder plate (5). The water droplet bladder plate (5) is in a water droplet shape, and one side of the water droplet bladder plate (5) is hermetically communicated with the inner wall of the water storage ring cavity (30).

11. A sampling and detection device for a finished photoresist product, characterized in that: A piston pipe (51) is connected to the inner wall of the water droplet bladder plate (5) in a through manner. One end of the piston pipe (51) is fixedly connected to a diversion cone cover (52). The diversion cone cover (52) and the piston pipe (51) are integrally formed to form a water spraying channel. The water inlet end of the diversion cone cover (52) is designed as a conical opening.

12. The sampling and detection device for a finished photoresist product according to claim 11, wherein: A support frame (533) is fixedly installed on the inner wall of the water spraying channel near one end of the diversion cone cover (52). An arc-shaped bent rod (532) and a central spring strip (534) are fixedly connected to the inner side of the support frame (533). The other ends of the arc-shaped bent rod (532) and the central spring strip (534) are fixedly connected to a push plug (53). A contact round head (531) is arranged at the end of the push plug (53) away from the diversion cone cover (52). The maximum diameter of the push plug (53) is larger than the inner diameter of the piston pipe (51) and is in movable abutment with the inner wall of the water spraying channel.

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