Novel microelectronic component detection equipment

Abstract

The invention provides novel microelectronic component detection equipment, and relates to the field of microelectronic detection. The microelectronic component detection equipment comprises a detection equipment base, a detection inner groove is formed in the middle of the upper side wall of the detection equipment base, a driving gear and a driven gear are rotationally connected to the interior of the detection inner groove, and the outer side walls of the driving gear and the driven gear are in transmission connection with two transmission belts; a plurality of groups of detection supports are mounted between the two groups of transmission belts, two groups of sliding inner grooves are formed in the detection supports, and the detection supports are slidably connected with two groups of clamping frames through the two groups of sliding inner grooves; the front side wall of the detection equipment base is fixedly connected with a supporting front frame, the upper side wall of the supporting front frame is provided with an electric push rod, and the output end of the electric push rod is provided with a detection probe. According to the device, through the intermittent transmission mechanism and the automatic detection device, a plurality of microelectronic components can be rapidly and sequentially detected, and the detection efficiency is greatly improved.

Description

Technical Field

[0001] The present invention relates to the technical field of microelectronic component detection, and specifically to a new type of microelectronic component detection equipment. Background Art

[0002] In the production and manufacturing process of microelectronic components, detecting their performance parameters is a key link to ensure product quality. Traditional detection methods often have problems such as low efficiency, insufficient accuracy, and inability to adapt to various types of components. For example, some detection devices can only detect components of specific sizes or specific types. When encountering components of different specifications, a large number of fixtures and probes need to be replaced, resulting in long equipment adjustment time and low detection efficiency. In addition, the automation level of traditional detection equipment also needs to be improved. Many operations still require manual intervention, which is prone to human errors and affects the accuracy of detection results. Summary of the Invention

[0003] (1) Technical Problems to be Solved

[0004] In view of the deficiencies of the prior art, the present invention provides a new type of microelectronic component detection equipment, which solves the problems of low detection efficiency and insufficient automation of existing microelectronic component detection.

[0005] (2) Technical Solutions

[0006] To achieve the above objectives, the present invention is realized through the following technical solutions: A new type of microelectronic component detection equipment, including a detection equipment base. In the middle of the upper side wall of the detection equipment base, there is a detection inner groove. Inside the detection inner groove, there is a driving gear and a driven gear rotatably connected. On the outer side walls of the driving gear and the driven gear, there are two groups of transmission belts. Between the two groups of transmission belts, there are several groups of detection supports. Inside the detection supports, there are two groups of sliding inner grooves. The detection supports are slidably connected with two groups of clamping frames through the two groups of sliding inner grooves;

[0007] On the front side wall of the detection equipment base, there is a support front frame fixedly connected. On the upper side wall of the support front frame, there is an electric push rod installed. At the output end of the electric push rod, there is a detection probe installed. On the lower side wall of the support front frame, there is an infrared detection sensor fixedly connected. In the middle of the upper side wall of each detection support, there is a reflector fixedly connected. The cooperation between the infrared detection sensor and the reflector can detect microelectronic components.

[0008] Preferably, on the front side wall of the detection equipment base, there is a support front plate fixedly connected. On the upper side wall of the support front plate, there is a driving motor, an intermittent transmission box, and a reduction gear box installed. Between the support front plate and the detection equipment base, there are several reinforcing rib plates fixedly connected. The driving motor can drive the driving gear to rotate through the intermittent transmission box and the reduction gear box.

[0009] Preferably, there is a fixed connection between the output end of the driving motor and the input end of the intermittent transmission box, a fixed connection between the output end of the intermittent transmission box and the input end of the reduction gearbox, and a fixed connection between the output end of the reduction gearbox and the driving gear. When the driving gear rotates, it can drive the transmission belt to rotate, thereby driving a plurality of detection supports to intermittently convey microelectronic components. Thus, during the process when the transmission belt stops rotating, the detection probe detects the microelectronic components.

[0010] Preferably, a wireless charging inner plate is fixedly connected inside the detection inner groove. A number of wireless charging output ends are arranged inside the wireless charging inner plate. A wireless charging receiving end is arranged inside the detection support. The wireless charging output end and the wireless charging receiving end cooperate with each other. The wireless charging inner plate can charge the inside of the detection support through the wireless charging output end and the wireless charging receiving end.

[0011] Preferably, a small motor is arranged inside the detection support. A transmission component is arranged on the front side wall of the detection support. There is a fixed connection between the output end of the small motor and the input end of the transmission component. A threaded rod is fixedly connected to the output end of the transmission component. The small motor can drive the threaded rod to rotate through the transmission component.

[0012] Preferably, two transmission threads are arranged on the outer side wall of the threaded rod. The thread directions of the two transmission threads are opposite. A threaded sleeve is fixedly connected inside each clamping frame. The threaded sleeve and the threaded rod cooperate through the transmission thread. When the threaded rod rotates, it can drive the two threaded sleeves to move inward or outward simultaneously, thereby adjusting the clamping frame to clamp or loosen the microelectronic components.

[0013] Preferably, a control seat and a storage battery are arranged inside the detection support. The control seat can control the components inside the detection support to work. The storage battery can supply power to the components inside the detection support.

[0014] Preferably, a clamping plate is fixedly connected to the upper end of each clamping frame. A support top plate is fixedly connected to the upper side wall of the detection support. The support top plate and the two clamping plates are perpendicular to each other. The support top plate can support the left end of the microelectronic component. The clamping plate can clamp the front side wall and the rear side wall of the electronic component.

[0015] Working principle: The microelectronic components are placed on the clamping frame of the detection support. The transmission component and the threaded rod are driven by a small motor, so that the clamping frame is adjusted and clamped according to the size of the components. The driving motor drives the driving gear to rotate through the intermittent transmission box and the reduction gearbox, and then makes the transmission belt move intermittently, and transports the detection supports to the detection position one by one. When the detection support reaches the detection position, the infrared detection sensor detects the signal of the reflector, and the control system issues an instruction to make the electric push rod drive the detection probe to detect various performance parameters of the microelectronic components. During the detection process, the wireless charging inner plate wirelessly charges the storage battery inside the detection support to ensure sufficient power supply during the working process of the detection support.

[0016] (III) Beneficial effects

[0017] The present invention provides a new type of microelectronic component detection equipment. It has the following beneficial effects:

[0018] 1. Through the intermittent transmission mechanism and the automatic detection device, the device can quickly detect multiple microelectronic components in sequence, greatly improving the detection efficiency.

[0019] 2. The device adopts high-precision detection probes and advanced detection technologies, and can accurately measure various performance parameters of microelectronic components to ensure the accuracy of the detection results.

[0020] 3. The clamping frame on the detection support of the device can be automatically adjusted according to microelectronic components of different sizes, adapting to the detection of various types and specifications of components, and there is no need to frequently replace the fixtures and probes. Brief description of the drawings

[0021] Figure 1 It is a schematic structural diagram of the present invention;

[0022] Figure 2 It is a schematic connection diagram of the transmission belt in the present invention;

[0023] Figure 3 It is a top view schematic diagram of the present invention;

[0024] Figure 4 It is a schematic diagram of the bottom of the detection support of the present invention;

[0025] Figure 5 It is a schematic structural diagram of the clamping frame in the present invention;

[0026] Figure 6 It is a left side schematic diagram of the present invention.

[0027] Among them, 1. detection equipment base; 101. detection inner groove; 102. wireless charging inner plate; 2. transmission belt; 201. driving gear; 202. driven gear; 3. support front frame; 301. electric push rod; 302. detection probe; 303. infrared detection sensor; 4. support front plate; 401. reinforcement rib; 402. drive motor; 403. intermittent transmission box; 404. reduction gear box; 5. detection support; 501. reflector; 502. small motor; 503. clamping frame; 5031. threaded sleeve; 5032. clamping plate; 5033. support top plate; 504. threaded rod; 505. control seat; 506. battery; 507. transmission assembly; 508. sliding inner groove. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0029] Embodiment 1:

[0030] like Figures 1-6 As shown, the embodiment of the present invention provides a novel microelectronic component detection equipment, including a detection equipment base 1, a detection inner groove 101 is arranged in the middle of the upper side wall of the detection equipment base 1, the inner rotation of the detection inner groove 101 is connected to a driving gear 201 and a driven gear 202, the outer side walls of the driving gear 201 and the driven gear 202 are connected to two sets of transmission belts 2, the front side wall of the detection equipment base 1 is fixedly connected to a support front plate 4, the upper side wall of the support front plate 4 is installed with a driving motor 402, an intermittent transmission box 403 and a reduction gear box 404, the support front plate 4 and the detection equipment A number of reinforcing ribs 401 are fixedly connected between the base 1, and the driving motor 402 can drive the active gear 201 to rotate through the intermittent transmission box 403 and the reduction gear box 404. The front side wall of the detection equipment base 1 is fixedly connected to the supporting front plate 4, and the upper side wall of the supporting front plate 4 is installed with the driving motor 402, the intermittent transmission box 403 and the reduction gear box 404. A number of reinforcing ribs 401 are fixedly connected between the supporting front plate 4 and the detection equipment base 1, and the driving motor 402 can drive the active gear 201 to rotate through the intermittent transmission box 403 and the reduction gear box 404.

[0031] A number of detection supports 5 are installed between two sets of drive belts 2. Two sliding inner grooves 508 are provided inside the detection support 5. The detection support 5 is slidably connected with two sets of clamping frames 503 through the two sliding inner grooves 508. An inductive charging inner plate 102 is fixedly connected inside the detection inner groove 101. A number of inductive charging output terminals are provided inside the inductive charging inner plate 102. An inductive charging receiving terminal is provided inside the detection support 5. The inductive charging output terminal and the inductive charging receiving terminal cooperate with each other, and the inductive charging inner plate 102 can charge the inside of the detection support 5 through the inductive charging output terminal and the inductive charging receiving terminal.

[0032] A support front frame 3 is fixedly connected to the front side wall of the detection equipment base 1. An electric push rod 301 is installed on the upper side wall of the support front frame 3. A detection probe 302 is installed at the output end of the electric push rod 301. An infrared detection sensor 303 is fixedly connected to the lower side wall of the support front frame 3. A reflector 501 is fixedly connected to the middle of the upper side wall of each detection support 5. The cooperation between the infrared detection sensor 303 and the reflector 501 can detect microelectronic components.

[0033] A small motor 502 is provided inside the detection support 5. A transmission assembly 507 is provided on the front side wall of the detection support 5. The output end of the small motor 502 is fixedly connected to the input end of the transmission assembly 507. The output end of the transmission assembly 507 is fixedly connected to a threaded rod 504. The small motor 502 can drive the threaded rod 504 to rotate through the transmission assembly 507.

[0034] Two transmission threads are provided on the outer side wall of the threaded rod 504, and the thread directions of the two transmission threads are opposite. A threaded sleeve 5031 is fixedly connected inside each clamping frame 503. The threaded sleeve 5031 and the threaded rod 504 are matched through the transmission thread. When the threaded rod 504 rotates, it can drive the two threaded sleeves 5031 to move inward or outward at the same time, so as to adjust the clamping frame 503 to clamp or loosen the microelectronic component.

[0035] A control seat 505 and a storage battery 506 are provided inside the detection support 5. The control seat 505 can control the components inside the detection support 5 to work, and the storage battery 506 can supply power to the components inside the detection support 5. A clamping plate 5032 is fixedly connected to the upper end of each clamping frame 503. A support top plate 5033 is fixedly connected to the upper side wall of the detection support 5. The support top plate 5033 and the two clamping plates 5032 are perpendicular to each other. The support top plate 5033 can support the left end of the microelectronic component, and the clamping plate 5032 can clamp the front side wall and the rear side wall of the electronic component.

[0036] All the electrical components mentioned in this article are electrically connected to an external main controller, and the main controller can be a conventional known device such as a computer for control. All the electrical components mentioned in this article are also electrically connected to an external power source.

[0037] Embodiment 2:

[0038] Based on Embodiment 1, this embodiment further optimizes the structure and function of the detection support. A temperature sensor and a humidity sensor are added inside the detection support to continuously monitor the temperature and humidity conditions of the detection environment and feed the data back to the control system. When the environmental conditions exceed the preset range, the control system will automatically adjust the detection parameters or issue an alarm to remind the operator to handle it, further improving the reliability and accuracy of the detection results.

[0039] In addition, this embodiment also adds a replaceable probe head at the front end of the detection probe. According to different types of microelectronic components, a suitable probe head can be selected for detection. This design not only improves the versatility of the detection probe but also extends its service life.

[0040] Embodiment 3

[0041] Based on the previous embodiments, this embodiment further introduces an intelligent analysis system and a remote monitoring function. A data processing center is installed inside the base of the detection equipment, which can continuously collect and analyze a large amount of data generated during the detection process. Through machine learning algorithms, the system can automatically identify common defect patterns of microelectronic components and predict and classify the detection results.

[0042] At the same time, the device is equipped with a wireless communication module that supports 5G network connection. The detection data and device status information can be transmitted to the cloud server in real time. In the remote monitoring center, technicians can view the operation status of the device through a dedicated software platform, receive alarm notifications, and perform remote control and parameter adjustment on the device. This remote monitoring function is especially suitable for large-scale production environments, which can promptly detect and solve problems that occur during the detection process, improving production efficiency and product quality.

[0043] Embodiment 4

[0044] This embodiment has a special design for large-sized or irregularly shaped microelectronic components. The clamping surface of the clamping frame is designed as a replaceable flexible material pad to better fit the surface of the irregularly shaped components and prevent damage to the components during the detection process.

[0045] To improve the detection accuracy, the number of detection probes has been increased to multiple, and the arrangement of the probes can be flexibly adjusted according to the pin distribution of the components. The device is also equipped with a set of high-precision vision alignment system. Before detection, the components are photographed by a CCD camera, the pin positions are automatically identified, and the positions of the detection probes are adjusted to ensure that each pin can be accurately detected. This design enables the device to meet the detection requirements of various complex-shaped and high-pin-density microelectronic components, further expanding the application scope of the device.

[0046] Although the embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A new type of microelectronic component detection equipment, including a detection equipment base (1), characterized in that: An inner detection groove (101) is provided in the middle of the upper side wall of the detection equipment base (1), a driving gear (201) and a driven gear (202) are rotatably connected inside the inner detection groove (101), two groups of transmission belts (2) are transmission-connected to the outer side walls of the driving gear (201) and the driven gear (202), a plurality of detection supports (5) are installed between the two groups of transmission belts (2), two groups of sliding inner grooves (508) are provided inside the detection supports (5), and the detection supports (5) are slidably connected to two groups of clamping frames (503) through the two groups of sliding inner grooves (508); The front side wall of the detection equipment base (1) is fixedly connected to a supporting front frame (3), an electric push rod (301) is installed on the upper side wall of the supporting front frame (3), a detection probe (302) is installed on the output end of the electric push rod (301), an infrared detection sensor (303) is fixedly connected to the lower side wall of the supporting front frame (3), and a reflector (501) is fixedly connected to the middle part of the upper side wall of each detection support (5).

2. A novel microelectronic component detection device according to claim 1, characterized in that: The front side wall of the detection equipment base (1) is fixedly connected to a support front plate (4), the upper side wall of the support front plate (4) is installed with a drive motor (402), an intermittent transmission box (403) and a reduction gear box (404), and a plurality of reinforcing ribs (401) are fixedly connected between the support front plate (4) and the detection equipment base (1).

3. A novel microelectronic component detection device according to claim 2, characterized in that: The output end of the driving motor (402) is fixedly connected to the input end of the intermittent transmission box (403), the output end of the intermittent transmission box (403) is fixedly connected to the input end of the reduction gear box (404), and the output end of the reduction gear box (404) is fixedly connected to the driving gear (201).

4. A novel microelectronic component detection device according to claim 1, characterized in that: The interior of the detection inner groove (101) is fixedly connected to a wireless charging inner plate (102), a plurality of wireless charging output terminals are arranged inside the wireless charging inner plate (102), and a wireless charging receiving terminal is arranged inside the detection support (5), and the wireless charging output terminal cooperates with the wireless charging receiving terminal.

5. A novel microelectronic component detection equipment according to claim 1, characterized in that: A small motor (502) is arranged inside the detection support (5), and a transmission assembly (507) is arranged on the front side wall of the detection support (5). The output end of the small motor (502) and the input end of the transmission assembly (507) are fixedly connected, and the output end of the transmission assembly (507) is fixedly connected to a threaded rod (504).

6. The novel microelectronic component detection equipment according to claim 5, characterized in that: The outer wall of the threaded rod (504) is provided with two transmission threads, the thread directions of the two transmission threads are opposite, and the interior of each clamping frame (503) is fixedly connected with a threaded sleeve (5031), and the threaded sleeve (5031) and the threaded rod (504) are matched through the transmission thread.

7. A novel microelectronic component detection device according to claim 1, characterized in that: A control seat (505) and a storage battery (506) are arranged inside the detection support (5).

8. A novel microelectronic component detection device according to claim 1, characterized in that: A clamping plate (5032) is fixedly connected to the upper end of each of the clamping brackets (503), and a support top plate (5033) is fixedly connected to the upper side wall of the detection support (5). The support top plate (5033) and the two clamping plates (5032) are perpendicular to each other.

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