Microelectronic nitric acid decolorizing device
By designing stirring blades and a gas pump system in the microelectronic nitric acid decolorization device, the gas-liquid contact area is enhanced, and the temperature is controlled by an integrated cooling and lubrication fluid. This solves the problem of low reaction rate caused by the synchronous rotation of gas and liquid in existing devices, and achieves efficient decolorization and temperature control.
Patent Information
- Application Number
- CN202510430985.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-08
- Publication Date
- 2026-02-10
- Estimated Expiration
- 2045-04-08
AI Technical Summary
In existing microelectronic nitric acid decolorization devices, the synchronous rotation of the gas outlet and the stirring rack results in only localized contact between the gas and liquid, reducing the reaction rate.
A microelectronic nitric acid decolorization device was designed. The rotation of the stirring blade drives the nitric acid to be mixed in a vortex. A gas pump is used to extract the gas above the liquid and distribute the gas evenly into the liquid through the gas outlet on the outside of the inner tube for secondary reaction. At the same time, the transmission component drives the fan blade and propeller for cooling and lubrication to control the reaction temperature.
The increased contact area between the gas and liquid enhances the reaction efficiency, while the integrated cooling and lubrication fluid reduces wear and controls the reaction temperature within a suitable range, thus improving the decolorization effect.
Smart Images

Figure CN120285885B_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of nitric acid decolorization technology, specifically a microelectronic nitric acid decolorization device. Background Technology
[0002] Microelectronics technology encompasses processes such as system circuit design, electronic device technology, and materials preparation. In the manufacturing process of microelectronic products, nitric acid is commonly used as an etching solution. To prevent the etching solution from yellowing and affecting the etching effect, nitrogen dioxide impurities in the nitric acid must be treated first. Typically, nitrogen dioxide is removed from the nitric acid through a nitrogen reaction for decolorization. However, current equipment is inefficient in removing impurities and decolorizing, and the reaction between the reacting gas and nitric acid is incomplete, which affects the decolorization effect of the nitric acid and the performance of the etching solution.
[0003] A search revealed an existing patent (publication number: CN216726789U) disclosing a nitric acid decolorization device for microelectronics, comprising a base plate and a drive motor. The base plate is equipped with a triangular support frame and side support plates. The decolorization device body is mounted on the triangular support frame. A feed pipe with a first sealing cap is located at the top of the decolorization device body, and a discharge pipe with a second sealing cap is located at the bottom of the device body. A drive shaft with a first pulley and a conveyor belt are mounted on the pulley. This nitric acid decolorization device for microelectronics features a sound-absorbing cotton layer on the inner wall of the device body, which absorbs noise generated during stirring, preventing noise from harming workers and improving the device's effectiveness.
[0004] However, in actual use, the vent and the stirring rack rotate synchronously. This may cause the nitric acid solution to rotate at the same speed as the stirring rack, while the gas discharged from the vent rotates synchronously with the stirring rack. As a result, the gas and liquid only make local contact before rising due to buoyancy, thus reducing the reaction rate.
[0005] Therefore, the present invention provides a microelectronic nitric acid decolorization device. Summary of the Invention
[0006] To overcome the shortcomings of existing technologies and solve the problem that the simultaneous synchronous rotation of the vent and the stirring rack may cause the nitric acid solution to rotate at the same speed as the stirring rack, while the gas discharged from the vent rotates synchronously with the stirring rack, resulting in the gas and liquid only making local contact before rising due to buoyancy and reducing the reaction rate, this invention proposes a microelectronic nitric acid decolorization device.
[0007] The technical solution adopted by this invention to solve its technical problem is as follows: A microelectronic nitric acid decolorization device of this invention includes a decolorization tank, a corrugated tank fixedly connected to the inner side of the decolorization tank, a cavity provided between the decolorization tank and the corrugated tank, the cavity being divided into left and right cavities by two partitions, a gas outlet plate fixedly connected to the bottom end of the corrugated tank, the outer side of the top of the gas outlet plate being fixedly connected to the bottom end of the decolorization tank, a feed pipe fixedly connected to the front left side of the top of the decolorization tank, an activated carbon pipe fixedly connected to the left side of the top of the feed pipe, an air inlet pipe fixedly connected to the rear left side of the top of the decolorization tank, the air inlet pipe being fixedly connected to the corrugated tank, a transmission box fixedly connected to the middle side of the top of the decolorization tank, symmetrical transmission components provided on the outer side of the transmission box, a motor fixedly connected to the top of the transmission box, and a bevel gear fixedly connected to the output end of the motor. A bevel gear two is meshed with the left side of the bottom end of bevel gear one. Bevel gear two is rotatably connected to the transmission box. A bevel gear three is meshed with the right side of the bottom end of bevel gear two. Bevel gear three is rotatably connected to the transmission box. A transmission rod one is fixedly connected to the bottom end of bevel gear three. A stirring blade is fixedly connected to the outer side of the bottom end of transmission rod one. An air extraction pipe is fixedly connected to the right side of the top end of the corrugated barrel. A dustproof pipe is fixedly connected to one end of the air extraction pipe through an air valve. A compensation component is provided at the top end of the air extraction pipe. An air pump is fixedly connected to the rear side of the bottom end of the air extraction pipe. An air inlet pipe two is fixedly connected to the left side of the air pump. Air inlet pipe two is fixedly connected to the decolorization barrel. An inner pipe is fixedly connected to the bottom end of air inlet pipe two. Evenly distributed air outlet holes are fixedly connected to the outer wall of the outer side of the inner pipe. A connecting pipe three is fixedly connected to the front side of the bottom end of the inner pipe. The front end of the connecting pipe three is fixedly connected to the air outlet plate.
[0008] Furthermore, the compensation component includes a second fixing frame, a compensation bottle is fixedly connected to the top of the suction pipe, a second fixing frame symmetrically connected to the inside of the compensation bottle, a limit rod is fixedly connected between the two second fixing frames, and a piston is slidably connected to the outside of the limit rod.
[0009] Furthermore, the transmission assembly includes a driven gear one, a connecting rod two fixedly connected to the outer side of the bevel gear two, a transmission box rotatably connected to the outer side of the connecting rod two, the transmission box being fixedly connected to the decolorizing barrel, a connecting component provided on the right side of the bevel gear two, the connecting rod two being rotatably connected to the transmission box, a driving gear one fixedly connected to one outer end of the connecting rod two, a transmission rod three fixedly connected to one outer end of the driving gear one, a driven gear one meshing with the top of the driving gear one, a transmission rod four fixedly connected to one outer end of the driven gear one, uniformly distributed fan blades one fixedly connected to the outer side of the transmission rod three located on the left side of the transmission box, uniformly distributed fan blades two fixedly connected to the outer side of the transmission rod four located on the left side of the transmission box, a propeller fixedly connected to the outer side of the transmission rod three located on the right side of the transmission box, a power transmission component provided at the outer end of the transmission rod four located on the right side of the transmission box, and the transmission box and the transmission boxes on both sides being connected by a connecting pipe one.
[0010] Furthermore, an oil inlet pipe 2 is fixedly connected to the top of the left-side conduction box, and a heat dissipation box is fixedly connected to the bottom left side of the oil inlet pipe 2. A connecting hole is opened inside the heat dissipation box, and the connecting hole is interconnected with the oil inlet pipe 2. Evenly distributed ventilation holes are opened on the outside of the heat dissipation box, and a heat dissipation plate is fixedly connected to the inside of the ventilation holes. An oil outlet pipe 1 is fixedly connected to the bottom of the heat dissipation box, and the oil outlet pipe 1 is connected to the connecting hole. The oil outlet pipe 1 is connected to the left-side cavity between the decolorizing tank and the corrugated tank.
[0011] Furthermore, an oil inlet pipe three is fixedly connected to the right side of the bottom end of the cavity on the left side. An outer pipe is fixedly connected to the right side of the oil inlet pipe three. The outer pipe is sleeved on the outside of the inner pipe, and both the outer pipe and the inner pipe are spirally arranged. One end of the outer pipe is fixedly connected to the outer wall of the inner pipe, and the other end of the outer pipe is fixedly connected to the outer wall of the connecting pipe three. The outer wall of the outer pipe is fixedly connected to the vent hole, and the vent hole connects the internal space of the inner pipe and the external space of the outer pipe. An oil outlet pipe two is fixedly connected to the right side of the top end of the outer pipe. The right side of the oil outlet pipe two is connected to the right cavity. An oil inlet pipe one is fixedly connected to the right side of the bottom end of the right cavity. The top end of the oil inlet pipe one is provided with the same compensation component.
[0012] Furthermore, a sealing chamber is fixedly connected to the left side of the top end of the oil inlet pipe, a filter plate is fixedly connected to the inside of the sealing chamber, and a connecting pipe is fixedly connected to the left side of the sealing chamber, the connecting pipe being fixedly connected to the right-side transmission box.
[0013] Furthermore, the power transmission assembly includes a second drive gear, a second drive gear is fixedly connected to the right side of the fourth transmission rod, the fourth transmission rod is rotatably connected to the sealing chamber, a second driven gear is meshed at the bottom end of the second drive gear, a sealing ring is rotatably connected to the outer side of the second driven gear, the sealing ring is fixedly connected to the inner wall of the sealing chamber, a cleaning rod is fixedly connected to the left side of the second driven gear, the cleaning rod is rotatably connected to the outer wall of the right side of the filter plate, and a collection bottle is fixedly connected to the bottom end of the sealing chamber.
[0014] Furthermore, a fixing frame is fixedly connected to the outer wall of the left side of the filter plate, and the fixing frame is rotatably connected to the propeller.
[0015] Furthermore, the connecting assembly includes an electric push rod, an electric push rod is fixedly connected to the right side of the second bevel gear, a limiting gear is fixedly connected to the output end of the electric push rod, an engaging gear is engaged at the inner right end of the limiting gear, and the engaging gear is fixedly connected to the left end of the second right connecting rod.
[0016] Furthermore, the bottom outer wall of the decolorizing barrel is connected to several evenly distributed support legs, and a water inlet pipe is fixedly connected to the right side of the bottom of the decolorizing barrel. The water inlet pipe passes through the right cavity and is connected to the corrugated barrel. A water pump is fixedly connected to the right outer wall of the water inlet pipe, and a second water inlet pipe is fixedly connected to the top of the water pump.
[0017] The beneficial effects of this invention are as follows:
[0018] 1. The microelectronic nitric acid decolorization device of the present invention firstly mixes the gas and liquid by rotating the stirring blade to drive the nitric acid to undergo vortex mixing. At the same time, the gas above the liquid is extracted by the air pump through the air extraction pipe and transported into the inner tube through the air inlet pipe. Then, it is evenly distributed into the nitric acid liquid through the air outlet on the outside of the inner tube. Meanwhile, the gas that is not completely distributed is transported into the bottom air outlet plate through the dustproof pipe and distributed into the nitric acid liquid to undergo a secondary reaction with the nitric acid. This not only solves the problem of the gas rotating synchronously with the liquid affecting the contact area, but also allows the gas that has not fully reacted during the reaction to undergo a secondary reaction.
[0019] 2. The microelectronic nitric acid decolorization device of the present invention drives the first fan blade, the second fan blade, and the propeller to rotate through the transmission components on both sides, thereby driving the integrated cooling and lubrication fluid to circulate in the transmission box, the conduction box, the first connecting pipe, the second oil inlet pipe, the first oil outlet pipe, the left and right cavities inside the decolorization tank, the third oil inlet pipe, the outer pipe, the second oil outlet pipe, the first oil inlet pipe, the sealed chamber, and the second connecting pipe. This simultaneously cools the nitric acid in the transmission box, the conduction box, and the corrugated tank, controlling the temperature within a suitable range, thereby improving the reaction efficiency. At the same time, it also lubricates the gears in the transmission box and the conduction box, reducing wear. Attached Figure Description
[0020] The invention will now be further described with reference to the accompanying drawings.
[0021] Figure 1 This is a schematic diagram of the overall structure of the present invention;
[0022] Figure 2 This is a schematic cross-sectional view of the decolorization barrel of the present invention;
[0023] Figure 3 This is a schematic cross-sectional view of the corrugated barrel section of the present invention;
[0024] Figure 4 This is a cross-sectional structural diagram of the air outlet plate of the present invention;
[0025] Figure 5 This is a schematic diagram of the structure of the intake pipe of the present invention;
[0026] Figure 6 This is a cross-sectional structural diagram of the transmission box of the present invention;
[0027] Figure 7 This is a cross-sectional structural diagram of the heat sink of the present invention;
[0028] Figure 8 This is a schematic diagram of the structure of the limiting toothed disc of the present invention;
[0029] Figure 9 This is a schematic cross-sectional view of the sealed chamber of the present invention;
[0030] Figure 10 This is a schematic diagram of the propeller structure of the present invention;
[0031] Figure 11 This is a schematic cross-sectional view of the inner tube of the present invention;
[0032] Figure 12 This is a schematic cross-sectional view of the compensation bottle in this invention;
[0033] Figure 13 This is a schematic cross-sectional view of the decolorizing barrel and the corrugated barrel of the present invention;
[0034] In the diagram: 1. Decolorizing tank; 11. Corrugated tank; 12. Air inlet pipe 1; 2. Transmission box; 21. Motor; 22. Bevel gear 1; 23. Bevel gear 2; 24. Bevel gear 3; 25. Transmission rod 1; 26. Stirring blade; 3. Transmission box; 31. Connecting rod 2; 32. Drive gear 1; 33. Transmission rod 3; 34. Fan blade 1; 35. Driven gear 1; 36. Transmission rod 4; 37. Fan blade 2; 38. Electric push rod; 39. Limiting gear plate; 310. Engaging gear plate; 4. Sealing chamber; 41. Propeller; 42. Drive gear 2; 43. Driven gear 2; 44. Sealing ring; 45. Cleaning rod; 46. Filter plate; 47. Collection bottle; 4 8. Oil inlet pipe 1; 49. Fixing bracket 1; 5. Compensation bottle; 51. Fixing bracket 2; 52. Limiting rod; 53. Piston; 6. Connecting pipe 1; 61. Oil inlet pipe 2; 62. Oil outlet pipe 1; 63. Connecting pipe 2; 7. Cooling box; 71. Connecting hole; 72. Ventilation hole; 73. Cooling plate; 8. Oil outlet pipe 2; 81. Outer pipe; 82. Air outlet; 83. Air inlet pipe 2; 84. Air pump; 85. Suction pipe; 86. Dustproof pipe; 87. Connecting pipe 3; 88. Air outlet plate; 89. Oil inlet pipe 3; 810. Inner pipe; 9. Water inlet pipe 1; 91. Water pump; 92. Water inlet pipe 2; 10. Support leg; 111. Feed pipe; 112. Activated carbon pipe. Detailed Implementation
[0035] To make the technical means, creative features, objectives and effects of this invention easier to understand, the invention will be further described below in conjunction with specific embodiments.
[0036] Example 1:
[0037] like Figures 1 to 13As shown, the microelectronic nitric acid decolorization device of the present invention includes a decolorization tank 1, a corrugated tank 11 fixedly connected to the inner side of the decolorization tank 1, and the corrugated tank 11 fixed by the decolorization tank 1. A temperature sensor is also installed at the top of the decolorization tank 1 to monitor the internal temperature in real time. A cavity is provided between the decolorization tank 1 and the corrugated tank 11, and the cavity is divided into two cavities by two partitions, forming two independent spaces. An vent plate 88 is fixedly connected to the bottom of the corrugated tank 11, and the outer side of the top of the vent plate 88 is fixedly connected to the bottom of the decolorization tank 1, sealing the bottom of the cavity. A feed pipe is fixedly connected to the front left side of the top of the decolorization tank 1. 111. An activated carbon tube 112 is fixedly connected to the top left of the feed pipe 111. The feed pipe 111 connects the corrugated tank 11 and the activated carbon tube 112, allowing the activated carbon in the activated carbon tube 112 to adsorb the pigments in the nitric acid before the nitric acid enters the corrugated tank 11. An air inlet pipe 12 is fixedly connected to the rear left of the top of the decolorizing tank 1. The air inlet pipe 12 is fixedly connected to the corrugated tank 11. The air inlet pipe 12 is fixed to the decolorizing tank 1, and hydrogen gas for decolorization is transported into the corrugated tank 11 through the air inlet pipe 12. A transmission box 2 is fixedly connected to the middle of the top of the decolorizing tank 1. The transmission box 2 is fixed to the decolorizing tank 1. Symmetrical transmission components are provided on the outside of the transmission box 2. A motor 2 is fixedly connected to the top of the transmission box 2. 1. The motor 21 is supported and fixed by the transmission box 2. A bevel gear 22 is fixedly connected to the output end of the motor 21. The motor 21 drives the bevel gear 22 to rotate. A bevel gear 23 is meshed with the left side of the bottom end of the bevel gear 22. The bevel gear 23 is rotated by the bevel gear 22. The bevel gear 23 is rotatably connected to the transmission box 2. The transmission box 2 limits the bevel gear 23, thereby setting a seal to seal between the transmission box 2 and the bevel gear 23. A bevel gear 24 is meshed with the right side of the bottom end of the bevel gear 23. The bevel gear 24 is rotated by the bevel gear 23. The bevel gear 24 is rotatably connected to the transmission box 2. The transmission box 2 limits the bevel gear 24, thereby setting a seal. A seal is formed between the transmission box 2 and the bevel gear 24. A transmission rod 25 is fixedly connected to the bottom of the bevel gear 24, and a stirring blade 26 is fixedly connected to the outer side of the bottom of the transmission rod 25. The bevel gear 24 simultaneously drives the transmission rod 25 and the stirring blade 26 to rotate. A suction pipe 85 is fixedly connected to the right side of the top of the corrugated barrel 11, securing the suction pipe 85. One end of the suction pipe 85 is fixedly connected to a dustproof pipe 86 via an air valve (a common corrosion-resistant air valve used for sealing, existing technology). The air valve controls the connection between the suction pipe 85 and the dustproof pipe 86. A compensation component is installed at the top of the suction pipe 85. An air pump 84 is fixedly connected to the rear side of the bottom of the suction pipe 85, and an air inlet pipe 83 is fixedly connected to the left side of the air pump 84.Hydrogen gas is extracted from the top of the corrugated tank 11 via the suction pipe 85 using the air pump 84, and simultaneously output via the second air inlet pipe 83. The second air inlet pipe 83 is fixedly connected to the decolorizing tank 1 and passes through the cavity between the decolorizing tank 1 and the corrugated tank 11, but is not connected to the cavity. An inner pipe 810 is fixedly connected to the bottom end of the second air inlet pipe 83. The second air inlet pipe 83 is connected to the inner pipe 810, so that the hydrogen gas delivered through the second air inlet pipe 83 enters the inner pipe 810 for further delivery. The outer wall of the inner pipe 810 is fixed. A fixed connection is provided with uniformly distributed gas outlet holes 82. Hydrogen gas is diverted through the inner tube 810, entering the outlet holes 82 and being atomized and sprayed out through them, forming fine bubbles. These bubbles mix and react with nitric acid. A connecting pipe 87 is fixedly connected to the front side of the bottom end of the inner tube 810. The front end of the connecting pipe 87 is fixedly connected to the gas outlet plate 88, connecting the inner tube 810 and the gas outlet plate 88. This allows any undiverted gas to enter the gas outlet plate 88 for further atomization and spraying.
[0038] The compensation assembly includes a second fixed frame 51, a compensation bottle 5 fixedly connected to the top of a suction pipe 85, and the compensation bottle 5 is supported and fixed by the suction pipe 85. The inner side of the compensation bottle 5 is fixedly connected to two symmetrical fixed frames 51. A limit rod 52 is fixedly connected between the two fixed frames 51. The compensation bottle 5 fixes the second fixed frame 51, and the second fixed frame 51 fixes the limit rod 52. A piston 53 is slidably connected to the outer side of the limit rod 52. The limit rod 52 limits the piston 53, thereby adjusting the internal pressure of the equipment by moving the piston 53 up and down.
[0039] The transmission assembly includes a driven gear 35, a bevel gear 23 with a connecting rod 31 fixedly connected to its outer side, and the connecting rod 31 being fixed by the bevel gear 23. A transmission box 3 is rotatably connected to the outer side of the connecting rod 31, and the transmission box 3 is fixedly connected to the decolorizing tank 1. A connecting assembly is provided on the right side of the bevel gear 23, and the connecting rod 31 is rotatably connected to the transmission box 3, which limits the movement of the connecting rod 31. A driving gear 32 is fixedly connected to one end of the outer side of the connecting rod 31, and the driving gear 32 is fixed by the connecting rod 31. At the same time, the bevel gear 23 drives the driving gear 32 to rotate via the connecting rod 31. A transmission rod 33 is fixedly connected to one end of the outer side of the driving gear 32, and the transmission rod 33 is fixed by the driving gear 32. A driven gear 35 is meshed with the top of the driving gear 32, and the driven gear 35 is driven by the driving gear 32. Driven gear 1 (35) rotates. A transmission rod 4 (36) is fixedly connected to one end of the driven gear 1 (35), fixing the transmission rod 4 (36) to the driven gear 1 (35). A uniformly distributed fan blade 1 (34) is fixedly connected to the outer side of the transmission rod 3 (33) on the left side of the transmission box 2, fixing the fan blade 1 (34) to the driven gear 3 (33) and simultaneously driving the fan blade 1 (34) to rotate. A uniformly distributed fan blade 2 (37) is fixedly connected to the outer side of the transmission rod 4 (36) on the left side of the transmission box 2, fixing the fan blade 2 (37) to the driven gear 4 (36) and simultaneously driving the fan blade 2 (37) to rotate. A propeller 41 is fixedly connected to the outer side of the transmission rod 3 (33) on the right side of the transmission box 2, driving the propeller 41 to rotate, thereby cooling and lubricating the integrated coolant / lubricant (fully synthetic gear oil) on the right side of the sealed chamber 4. ) Extraction and delivery to the left are performed. A combined cooling and lubricating fluid is used instead of water because it not only provides excellent anti-wear properties but also facilitates heat dissipation. Water is used as the coolant because oil has a lower evaporation rate than water. Therefore, in high-temperature cooling systems, oil consumption and replenishment frequency are much lower than water, reducing operating costs. Furthermore, oil maintains physical and chemical stability over a very low to very high temperature range, making it suitable for applications in extreme climates and temperatures. A power transmission assembly is located at the outer end of the transmission rod 36 on the right side of the transmission box 2. The transmission box 2 is connected to the two transmission boxes 3 on both sides via a connecting pipe 6, which connects the two transmission boxes 3 on both sides to the middle transmission box 2 in series.
[0040] A second oil inlet pipe 61 is fixedly connected to the top of the left-side conduction box 3. A heat sink 7 is fixedly connected to the bottom left side of the second oil inlet pipe 61. The heat sink 7 is connected through the second oil inlet pipe 61. A connecting hole 71 is opened inside the heat sink 7, and the connecting hole 71 is interconnected with the second oil inlet pipe 61. Evenly distributed ventilation holes 72 are opened on the outside of the heat sink 7. A heat sink plate 73 is fixedly connected to the inside of the ventilation holes 72. An first oil outlet pipe 62 is fixedly connected to the bottom of the heat sink 7, and the first oil outlet pipe 62 is connected to the connecting hole 71. The oil outlet pipe 62 is connected to the left cavity between the decolorizing tank 1 and the corrugated tank 11. The integrated cooling and lubricating fluid is delivered into the top of the connecting hole 71 through the oil inlet pipe 61. Then it moves downward through the connecting hole 71. During the process, the heat of the integrated cooling and lubricating fluid is transferred to the heat sink 73 through the inner wall of the ventilation hole 72. At the same time, the fan blades 34 and 37 blow air to the left, thereby exchanging heat between the inner wall of the heat sink 73 and the flowing air, thus achieving the function of heat dissipation.
[0041] An oil inlet pipe 3 (89) is fixedly connected to the right side of the bottom of the left cavity. An outer pipe 81 is fixedly connected to the right side of the oil inlet pipe 3 (89). The left cavity and the outer pipe 81 are connected through the oil inlet pipe 3 (89). The outer pipe 81 is sleeved on the outside of the inner pipe 810, and both the outer pipe 81 and the inner pipe 810 are spirally arranged. One end of the outer pipe 81 is fixedly connected to the outer wall of the inner pipe 810. Both ends of the outer pipe 81 are connected to the inner pipe 810. The other end of the outer pipe 81 is fixedly connected to the outer wall of the connecting pipe 3 (87), forming a sealed space. The outer wall of the outer pipe 81 is fixedly connected to the vent hole 82. The vent hole 82 connects the internal space of the inner pipe 810 with the external space of the outer pipe (81). The vent hole 82 connects the internal space of the inner pipe 810 with the external space. The cooling and lubricating fluid is allowed to flow through the space between the outer tube 81 and the inner tube 810. Hydrogen gas enters the inner tube 810 through the second inlet pipe 83 and is refined into fine bubbles through the outlet hole 82. These bubbles are then transported into the nitric acid to react with the nitric acid for decolorization. An oil outlet pipe 8 is fixedly connected to the right side of the top of the outer tube 81. The right side of the oil outlet pipe 8 is connected to the right cavity, allowing the cooling and lubricating fluid to flow through the space between the outer tube 81 and the inner tube 810. An oil inlet pipe 48 is fixedly connected to the right side of the bottom of the right cavity. The top of the oil inlet pipe 48 is equipped with the same compensation component.
[0042] A sealing chamber 4 is fixedly connected to the left side of the top end of the oil inlet pipe 48. The sealing chamber 4 and the right cavity are connected through the oil inlet pipe 48. A filter plate 46 is fixedly connected to the inside of the sealing chamber 4. The filter plate 46 is fixed through the sealing chamber 4. The filter plate 46 filters the integrated cooling and lubrication fluid, thereby filtering iron filings and other impurities generated during equipment operation. A connecting pipe 63 is fixedly connected to the left side of the sealing chamber 4. The connecting pipe 63 is fixedly connected to the right conduction box 3. The conduction box 3 and the sealing chamber 4 are connected through the connecting pipe 63.
[0043] The power transmission assembly includes a second drive gear 42. The second drive gear 42 is fixedly connected to the right side of a right-side transmission rod 36, which also drives the second drive gear 42 to rotate. The transmission rod 36 is rotatably connected to a sealing chamber 4, which limits its movement. A driven gear 43 is meshed with the bottom end of the second drive gear 42, driving the driven gear 43 to rotate. A sealing ring 44 is rotatably connected to the outside of the driven gear 43, and is fixedly connected to the inner wall of the sealing chamber 4, which also fixes the sealing ring 44 and reduces the gap between the sealing ring 44 and the driven gear 43. The sealing process is performed without affecting the rotation of the driven gear 43. A cleaning rod 45 is fixedly connected to the left side of the driven gear 43. The driven gear 43 fixes the cleaning rod 45 and drives it to rotate. The cleaning rod 45 is rotatably connected to the outer right wall of the filter plate 46. By rotating the cleaning rod 45 on the surface of the filter plate 46, the impurities filtered by the filter plate 46 are filtered out and pushed to the surroundings. A collection bottle 47 is fixedly connected to the bottom of the sealing chamber 4. The sealing chamber 4 fixes the collection bottle 47. While the cleaning rod 45 pushes the impurities to the surroundings, the impurities enter the collection bottle 47. A magnet is installed in the collection bottle 47 to attract iron filings in the integrated cooling and lubrication fluid.
[0044] A fixing frame 49 is fixedly connected to the outer left side of the filter plate 46. The fixing frame 49 is fixed by the filter plate 46. The fixing frame 49 is rotatably connected to the propeller 41. The fixing frame 49 limits the right end of the propeller 41.
[0045] The connecting assembly includes an electric push rod 38. The electric push rod 38 is fixedly connected to the right side of the bevel gear 23. The electric push rod 38 is fixed by the bevel gear 23. At the same time, a heat insulation layer is provided on the outside of the electric push rod 38 to avoid the impact of external high temperature on the normal operation of the electric push rod 38. The output end of the electric push rod 38 is fixedly connected to a limiting gear plate 39. The limiting gear plate 39 is fixed by the electric push rod 38. At the same time, the limiting gear plate 39 is moved left and right by the electric push rod 38. The inner right end of the limiting gear plate 39 is engaged with a locking gear plate 310. The left and right movement of the limiting gear plate 39 controls the engagement between the limiting gear plate 39 and the locking gear plate 310, thereby controlling the rotation of the right connecting rod 2 31. The locking gear plate 310 is fixedly connected to the left end of the right connecting rod 2 31. The locking gear plate 310 is fixed by the right connecting rod 2 31.
[0046] Several evenly distributed support legs 10 are connected to the outer wall of the bottom end of the decolorizing tank 1. The support legs 10 support the decolorizing tank 1. A water inlet pipe 9 is fixedly connected to the right side of the bottom end of the decolorizing tank 1. The water inlet pipe 9 passes through the right cavity and is connected to the corrugated tank 11. A water pump 91 is fixedly connected to the outer wall of the right side of the water inlet pipe 9. The water pump 91 is connected through the water inlet pipe 9. A second water inlet pipe 92 is fixedly connected to the top of the water pump 91. The second water inlet pipe 92 is fixed through the water pump 91.
[0047] The aforementioned components, including multiple bevel gears, connecting rods, transmission rods, driving gears, and driven gears, are used in the output end of motor 21, transmission components, and power transmission components because efficient heat dissipation is required during the decolorization reaction in the decolorization tank 1, depending on the actual situation. However, existing technologies require additional cooling circulation devices, which occupy a large area. To ensure that the problem of excessive heat during the reaction is solved in one device, while ensuring the overall operation of stirring and heat dissipation, the aforementioned components are provided to integrate stirring and overall heat dissipation. This is not about setting up a complex structure, but rather integrating the original cooling circulation device into the decolorization tank 1 of this invention and combining it with the stirring power. This ensures both stirring and effective heat dissipation. The integrated operation effectively reduces the overall footprint of the device and facilitates simultaneous operation. It also refers to the optimization and integration of vehicle braking systems in existing technologies. It is not about solving a simple problem with a complex mechanism, but rather about integrated operation.
[0048] Working Principle: During operation of the microelectronic nitric acid decolorization device, the internal space of the corrugated tank 11 is first evacuated to ensure no other gases affect the reaction. Then, nitric acid is fed into the corrugated tank 11 through the activated carbon tube 112 and the feed pipe 111. Simultaneously, the activated carbon tube 112 adsorbs colored substances in the nitric acid. The unadsorbed colored substances then enter the corrugated tank 11 along with the nitric acid. Next, hydrogen is injected into the corrugated tank 11 through the gas inlet pipe 12. After the hydrogen and nitric acid have reached the required injection volume, the feed pipe 111 and the gas inlet pipe 12 are closed. Then, the motor 21 drives the bevel gear 22 to rotate. The bevel gear 22, through the bevel gear 23, simultaneously drives the bevel gear 24, the transmission rod 25, and the agitator. The stirring blade 26 rotates, thus stirring the nitric acid. Simultaneously, under centrifugal force, the nitric acid moves outward, forming a vortex. Finally, the lowest surface of the vortex contacts the bottom of the stirring blade 26, while the upper part leaks out. This allows the stirring blade 26 to simultaneously deliver hydrogen gas from above the liquid surface into the nitric acid during rotation, initiating the first mixing of nitric acid and hydrogen. Simultaneously, the air pump 84 uses the extraction pipe 85 to extract hydrogen gas from the top of the corrugated tank 11 and delivers it into the inner tube 810 through the second air inlet pipe 83. The hydrogen gas is then refined through the air outlet 82 on the outside of the inner tube 810, generating fine bubbles that are directly introduced into the vortex, increasing the contact area between hydrogen and nitric acid and thus improving the reaction rate. This process also addresses any remaining hydrogen gas. Hydrogen gas enters the outlet plate 88 through connecting pipe 3 87, where it undergoes further refining. Bubbles are generated and transported from the bottom into the vortex. Hydrogen gas is used to decolorize nitric acid. As a reducing agent, hydrogen reacts with colored impurities in nitric acid. These impurities are often organic compounds or oxides of certain metal ions, which can be reduced to colorless or lighter-colored forms by accepting electrons from hydrogen gas. The reaction usually occurs in the presence of a catalyst, generating heat. Catalysts such as platinum or palladium exhibit optimal activity at specific temperatures during the decolorization of nitric acid. Typically, these catalysts effectively promote the reaction between hydrogen and nitric acid in the medium temperature range, such as 50°C to 130°C. At temperatures above 130°C... At 0℃, the temperature sensor inside the corrugated tank 11 controls the extension of the electric push rod 38, causing the limiting gear 39 to move to the right, engaging with the engaging gear 310. This, through the bevel gear 23 and the connecting assembly, drives the right connecting rod 31 to rotate, which in turn drives the propeller 41 to rotate. This draws the integrated cooling and lubricating fluid from the right side of the propeller 41 and transports it to the left. The fluid then enters the transmission box 3 through the connecting pipe 63, then enters the transmission box 2 through the connecting pipe 6 between the transmission box 3 and the transmission box 2. The integrated cooling and lubricating fluid then enters the left transmission box 3 through the left connecting pipe 6, and finally enters the connecting hole 71 through the oil inlet pipe 61.Simultaneously, the left-side transmission rods 33 and 36 drive the fan blades 34 and 37 to rotate, thereby delivering external cold air into the heat sink 73. This displaces the heat transferred from the connecting hole 71 to the heat sink 73 via the ventilation hole 72, thus achieving heat dissipation. The cooled lubricating fluid then enters the left cavity formed between the decolorizing tank 1 and the corrugated tank 11 through the oil outlet pipe 62, squeezing out the original lubricating fluid and forcing it through the oil inlet pipe 89 into the space between the outer pipe 81 and the inner pipe 810. This allows the lubricating fluid to directly contact the nitric acid vortex through the outer pipe 81, achieving efficient cooling while preventing localized high temperatures caused by intense local reactions. The oil enters the right-side cavity between the decolorizing tank 1 and the corrugated tank 11 through the oil outlet pipe 28, and is then transported back to the sealed chamber 4 through the oil inlet pipe 18. The cooling and lubricating fluid is filtered by the filter plate 46 to prevent iron filings and impurities generated during equipment operation from flowing inside the equipment. Simultaneously, the right-side transmission rod 46 drives the drive gear 2 42 to rotate, which in turn drives the cleaning rod 45 through the driven gear 2 43 to clean the right-side surface of the filter plate 46 and push impurities outwards. The impurities are collected by the collection bottle 47. The filtered cooling and lubricating fluid continues to circulate through the propeller 41. After the reaction is complete, the nitric acid is extracted by the water pump 91 through the water inlet pipe 1 9 and transported out through the water inlet pipe 2 92.
[0049] The terms "front," "back," "left," "right," "top," and "bottom" all refer to the figures in the accompanying drawings. Figure 1 Based on the perspective of the observer, the side of the device facing the observer is defined as the front, the left side of the observer is defined as the left, and so on.
[0050] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the scope of protection of this invention.
[0051] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.
Claims
1. A microelectronic nitric acid decolorization device, characterized in that, The device includes a decolorizing tank (1), a corrugated tank (11) fixedly connected to the inner side of the decolorizing tank (1), a cavity between the decolorizing tank (1) and the corrugated tank (11), the cavity being divided into two cavities, left and right, by two partitions, an air outlet plate (88) fixedly connected to the bottom of the corrugated tank (11), the outer side of the top of the air outlet plate (88) being fixedly connected to the bottom of the decolorizing tank (1), a feed pipe (111) fixedly connected to the front left side of the top of the decolorizing tank (1), an activated carbon pipe (112) fixedly connected to the left side of the top of the feed pipe (111), and a rear left side of the top of the decolorizing tank (1). An air inlet pipe (12) is fixedly connected to the corrugated barrel (11). A transmission box (2) is fixedly connected to the top center of the decolorizing barrel (1). A symmetrical transmission assembly is provided on the outside of the transmission box (2). A motor (21) is fixedly connected to the top of the transmission box (2). A bevel gear (22) is fixedly connected to the output end of the motor (21). A bevel gear (23) is meshed with the left side of the bottom end of the bevel gear (22). The bevel gear (23) is rotatably connected to the transmission box (2). A bevel gear (23) is meshed with the right side of the bottom end of the bevel gear (23). Gear 3 (24), the bevel gear 3 (24) is rotatably connected to the transmission box (2), the bottom end of the bevel gear 3 (24) is fixedly connected to the transmission rod 1 (25), the bottom outer side of the transmission rod 1 (25) is fixedly connected to the stirring blade (26), the top right side of the corrugated barrel (11) is fixedly connected to the suction pipe (85), one end of the suction pipe (85) is fixedly connected to the dustproof pipe (86) through the air valve, the top end of the suction pipe (85) is provided with a compensation component, the bottom rear side of the suction pipe (85) is fixedly connected to the air pump (84), the left side of the air pump (84) is fixedly connected to the air inlet pipe 2 ( 83), the second air inlet pipe (83) is fixedly connected to the decolorizing barrel (1), the bottom end of the second air inlet pipe (83) is fixedly connected to the inner pipe (810), the outer wall of the inner pipe (810) is fixedly connected to the evenly distributed air outlet holes (82), the front side of the bottom end of the inner pipe (810) is fixedly connected to the third connecting pipe (87), the front end of the third connecting pipe (87) is fixedly connected to the air outlet plate (88); the transmission assembly includes a transmission box (3), which drives the integrated cooling and lubricating liquid to circulate in the transmission box (2), the transmission box (3) and the left and right cavities inside the decolorizing barrel (1) through the transmission assemblies on both sides.
2. The microelectronic nitric acid decolorization device according to claim 1, characterized in that, The compensation component includes a second fixing frame (51), a compensation bottle (5) is fixedly connected to the top of the suction pipe (85), a second fixing frame (51) with symmetrical upper and lower sides is fixedly connected to the inner side of the compensation bottle (5), a limit rod (52) is fixedly connected between the two second fixing frames (51), and a piston (53) is slidably connected to the outer side of the limit rod (52).
3. The microelectronic nitric acid decolorization device according to claim 2, characterized in that, The transmission assembly also includes a driven gear one (35), a connecting rod two (31) fixedly connected to the outer side of the bevel gear two (23), a transmission box (3) rotatably connected to the outer side of the connecting rod two (31), the transmission box (3) being fixedly connected to the decolorizing barrel (1), a connecting assembly provided on the right side of the bevel gear two (23), the connecting rod two (31) being rotatably connected to the transmission box (3), a driving gear one (32) fixedly connected to one end of the outer side of the connecting rod two (31), a transmission rod three (33) fixedly connected to one end of the outer side of the driving gear one (32), and a driven gear one (35) meshing with the top of the driving gear one (32). One end of the driven gear (35) is fixedly connected to a transmission rod (36). The outer side of the transmission rod (33) located on the left side of the transmission box (2) is fixedly connected to a uniformly distributed fan blade (34). The outer side of the transmission rod (36) located on the left side of the transmission box (2) is fixedly connected to a uniformly distributed fan blade (37). The outer side of the transmission rod (33) located on the right side of the transmission box (2) is fixedly connected to a propeller (41). The outer end of the transmission rod (36) located on the right side of the transmission box (2) is provided with a power transmission component. The transmission box (2) is connected to the transmission boxes (3) on both sides through a connecting pipe (6).
4. The microelectronic nitric acid decolorization device according to claim 3, characterized in that, The top of the conduction box (3) on the left is fixedly connected to an oil inlet pipe 2 (61), and the bottom left end of the oil inlet pipe 2 (61) is fixedly connected to a heat sink box (7). A connecting hole (71) is opened inside the heat sink box (7), and the connecting hole (71) is connected to the oil inlet pipe 2 (61). A ventilation hole (72) is evenly distributed on the outside of the heat sink box (7), and a heat sink plate (73) is fixedly connected inside the ventilation hole (72). An oil outlet pipe 1 (62) is fixedly connected to the bottom end of the heat sink box (7), and the oil outlet pipe 1 (62) is connected to the connecting hole (71). The oil outlet pipe 1 (62) is connected to the left cavity between the decolorizing barrel (1) and the corrugated barrel (11).
5. The microelectronic nitric acid decolorization device according to claim 4, characterized in that, An oil inlet pipe three (89) is fixedly connected to the right side of the bottom end of the cavity on the left. An outer pipe (81) is fixedly connected to the right side of the oil inlet pipe three (89). The outer pipe (81) is sleeved on the outside of the inner pipe (810), and both the outer pipe (81) and the inner pipe (810) are spirally arranged. One end of the outer pipe (81) is fixedly connected to the outer wall of the inner pipe (810), and the other end of the outer pipe (81) is fixedly connected to the outer wall of the connecting pipe three (87). The outer wall of the outer pipe (81) is fixedly connected to the vent hole (82). The vent hole (82) connects the internal space of the inner pipe (810) and the external space of the outer pipe (81). An oil outlet pipe two (8) is fixedly connected to the right side of the top end of the outer pipe (81). The right side of the oil outlet pipe two (8) is connected to the right side cavity. An oil inlet pipe one (48) is fixedly connected to the right side of the bottom end of the right cavity. The top end of the oil inlet pipe one (48) is provided with the same compensation component.
6. The microelectronic nitric acid decolorization device according to claim 5, characterized in that, A sealing chamber (4) is fixedly connected to the left side of the top of the first oil inlet pipe (48). A filter plate (46) is fixedly connected to the inside of the sealing chamber (4). A connecting pipe (63) is fixedly connected to the left side of the sealing chamber (4). The connecting pipe (63) is fixedly connected to the right side conduction box (3).
7. The microelectronic nitric acid decolorization device according to claim 6, characterized in that, The power transmission assembly includes a second drive gear (42), and the right side of the right transmission rod (36) is fixedly connected to the second drive gear (42). The transmission rod (36) is rotatably connected to the sealing chamber (4). The bottom end of the second drive gear (42) is meshed with a second driven gear (43). The outer side of the second driven gear (43) is rotatably connected to a sealing ring (44). The sealing ring (44) is fixedly connected to the inner wall of the sealing chamber (4). The left side of the second driven gear (43) is fixedly connected to a cleaning rod (45). The cleaning rod (45) is rotatably connected to the outer right wall of the filter plate (46). The bottom end of the sealing chamber (4) is fixedly connected to a collection bottle (47).
8. The microelectronic nitric acid decolorization device according to claim 7, characterized in that, A fixing frame (49) is fixedly connected to the outer left side of the filter plate (46), and the fixing frame (49) is rotatably connected to the propeller (41).
9. The microelectronic nitric acid decolorization device according to claim 3, characterized in that, The connecting assembly includes an electric push rod (38), the electric push rod (38) is fixedly connected to the right side of the bevel gear (23), the output end of the electric push rod (38) is fixedly connected to a limiting gear plate (39), the inner right end of the limiting gear plate (39) is engaged with a locking gear plate (310), and the locking gear plate (310) is fixedly connected to the left end of the right connecting rod (31).
10. A microelectronic nitric acid decolorization device according to claim 9, characterized in that, The bottom outer wall of the decolorizing barrel (1) is connected to several evenly distributed support legs (10). The bottom right side of the decolorizing barrel (1) is fixedly connected to a water inlet pipe (9). The water inlet pipe (9) passes through the right cavity and is connected to the corrugated barrel (11). The right outer wall of the water inlet pipe (9) is fixedly connected to a water pump (91). The top of the water pump (91) is fixedly connected to a water inlet pipe (92).
Citation Information
Patent Citations
Nitric acid decolorizing device for micro-electronics
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