A furnace temperature adaptive control system

Abstract

The application provides a furnace temperature self-adaptive control system, belonging to the technical field of self-adaptive control, comprising: task analysis is performed on a target task to be executed of a target furnace to obtain temperature demand of the target furnace at each time; target temperature of the target furnace at each time is determined based on the temperature demand at each time; target opening of a temperature adjusting valve of the target furnace at the current time is determined based on the target temperature of the target furnace at the current time; real-time running state of the target furnace at the current time is acquired, and an adaptive adjustment scheme of the temperature adjusting valve at the current time is determined based on the real-time running state and the target opening at the current time, and opening of the temperature adjusting valve is adaptively adjusted according to the adaptive adjustment scheme. The temperature demand is determined through task analysis, and the target temperature is further determined, the adaptive adjustment scheme is determined by considering the current running state and the target temperature, and the accuracy of the adaptive adjustment scheme is effectively improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of adaptive control, and in particular to a furnace temperature adaptive control system. BACKGROUND

[0002] With the rapid development of the semiconductor industry, the demand for semiconductor market is increasing day by day, and higher requirements are put forward for the production efficiency and yield of semiconductor process equipment. Among them, vertical furnace process equipment involves thermal oxidation, chemical vapor deposition, thermal diffusion, metal alloying, impurity activation, and medium film densification. In its process flow, temperature control effect is an important indicator to evaluate process quality. Vertical furnace temperature control is crucial, as it directly affects wafer quality, energy efficiency, equipment life, production safety and economic benefits. Precise temperature control can ensure the yield of wafers, reduce defects and waste, and at the same time protect the equipment from thermal stress damage and prolong the service life.

[0003] In furnace temperature control, fuzzy control method is commonly used, which mainly fuzzes the input quantities such as temperature deviation and its change rate, and finally outputs control quantity to adjust furnace temperature according to pre-set fuzzy rules. When the furnace temperature is disturbed by external interference or internal parameter changes, the fuzzy controller can flexibly adjust the control strategy according to the fuzzy rules without the need for accurate mathematical model.

[0004] However, the adjustment and optimization process of fuzzy control method is relatively complex, and it is difficult to realize accurate parameter adjustment, especially when facing complex dynamic systems, the coverage range and precision of fuzzy rules may not be enough. SUMMARY

[0005] The present application provides a furnace temperature adaptive control system to solve the defect that the adjustment and optimization process of the fuzzy control method in the prior art is relatively complex and difficult to realize accurate parameter adjustment.

[0006] In one aspect, the present application provides a furnace temperature adaptive control system, comprising:

[0007] A task analysis module is configured to analyze the target task to be executed of the target furnace, and obtain the temperature requirement of the target furnace at each time point;

[0008] A temperature determination module is configured to determine the target temperature of the target furnace at each time point based on the temperature requirement at each time point;

[0009] An opening degree determination module is configured to determine the target opening degree of the temperature adjusting valve of the target furnace at the current time point based on the target temperature of the target furnace at the current time point;

[0010] Adaptive adjustment module: used to obtain the real-time operating status of the target furnace body at the current moment, and based on the real-time operating status and the target opening at the current moment, determine the adaptive adjustment scheme of the temperature control valve at the current moment, and adaptively adjust the opening of the temperature control valve according to the adaptive adjustment scheme.

[0011] Preferably, the task parsing module includes:

[0012] A feature determination unit, configured to perform task analysis on the target task to be executed and determine the task features of the target task to be executed;

[0013] A feature extraction unit, configured to extract the task feature to obtain a temperature feature of the target task to be executed;

[0014] The demand determination unit is used to determine the temperature demand of the target furnace body at each moment based on the temperature characteristics of the target task to be executed.

[0015] Preferably, the demand determination unit includes:

[0016] The standard temperature is determined quickly, and is used to determine the standard temperature of the target task to be executed at each moment according to the temperature characteristics of the target task to be executed;

[0017] An accuracy determination block, configured to determine the task accuracy requirement of the target task to be executed according to the task characteristics of the target task to be executed;

[0018] A fluctuation value calculation block is used to calculate the allowable temperature fluctuation value of the target task to be executed at each moment based on the task accuracy requirement of the target task to be executed;

[0019] The temperature requirement calculation block is used to calculate the temperature requirement of the target furnace body at each moment based on the standard temperature of the target task to be executed at each moment and the temperature fluctuation value allowed at each moment.

[0020] Preferably, the temperature determination module includes:

[0021] a range determination unit, configured to determine a required temperature range of the target furnace body at each moment based on the temperature requirement at each moment;

[0022] a difference calculation unit, configured to calculate a range difference of the target furnace body at a current moment based on the required temperature range of the target furnace body at a previous moment and the required temperature range of the target furnace body at a current moment;

[0023] The value determination unit is used to determine the target temperature of the target furnace body at each moment according to the range difference at the current moment and the required temperature range at the current moment.

[0024] Preferably, the opening determination module includes:

[0025] a data analysis unit, configured to perform data analysis on the furnace body data of the target furnace body to obtain furnace body characteristics of the target furnace body;

[0026] a data extraction unit, configured to extract data from the furnace characteristics of the target furnace body and determine a temperature adjustment data set for the target furnace body;

[0027] The opening degree extraction unit is used to extract the opening degree from the temperature control data set based on the target temperature of the target furnace body at the current moment, so as to obtain the target opening degree of the temperature control valve of the target furnace body at the current moment.

[0028] Preferably, the opening extraction unit includes:

[0029] A data sorting block is used to sort the data in the temperature control data set to obtain a target temperature range corresponding to each opening of the temperature control valve;

[0030] The range determination block is used to determine the target temperature range to which the target temperature of the target furnace body at the current moment belongs, and further determine the target opening of the temperature control valve.

[0031] Preferably, the adaptive adjustment module includes:

[0032] A status acquisition unit is used to obtain the real-time operating status of the target furnace body at the current moment;

[0033] a real-time data determining unit, configured to determine the real-time operating data of the temperature regulating valve based on the real-time operating status of the target furnace at a current moment;

[0034] The scheme determining unit is used to determine the adaptive adjustment scheme of the temperature regulating valve at the current moment according to the real-time operation data of the temperature regulating valve and the target opening at the current moment.

[0035] Preferably, the solution determination unit includes:

[0036] A speed determination block, configured to determine a real-time opening degree and a real-time adjustment speed of the temperature regulating valve according to real-time operation data of the temperature regulating valve;

[0037] a direction determination block, configured to determine an opening adjustment direction of the temperature control valve according to a difference between a target opening of the temperature control valve at a current moment and a real-time opening of the temperature control valve;

[0038] an acceleration calculation block, for calculating an initial opening adjustment acceleration of the temperature control valve according to the current opening adjustment direction and real-time adjustment speed of the temperature control valve;

[0039] an initial scheme determining block, configured to determine an initial adjustment scheme of the temperature control valve at a current moment based on the opening adjustment direction and the initial opening adjustment acceleration of the temperature control valve;

[0040] an acceleration correction block, configured to obtain a real-time temperature value of the target furnace body, and correct the real-time opening adjustment acceleration based on the real-time temperature value and the real-time opening adjustment direction to obtain a corrected acceleration;

[0041] a judgment block, configured to determine whether the corrected acceleration meets an adjustment requirement based on valve characteristics of the temperature control valve;

[0042] an acceleration adjustment block, configured to, when the modified acceleration does not meet the adjustment requirement, redetermine the modified acceleration as the final acceleration according to the adjustment requirement, and adjust the initial adjustment scheme according to the final acceleration to obtain an adaptive adjustment scheme for the temperature control valve at the current moment;

[0043] The scheme adjustment block is used to adjust the initial adjustment scheme based on the modified acceleration when the modified acceleration meets the adjustment requirement, so as to obtain the adaptive adjustment scheme of the temperature control valve at the current moment.

[0044] Preferably, the adaptive adjustment module further includes:

[0045] a regulation value extraction unit, configured to extract an opening regulation direction and an opening regulation speed of the temperature regulating valve from the adaptive adjustment scheme;

[0046] A speed adjustment unit, configured to obtain in real time the temperature change speed of the target furnace body at the current moment, and determine an adjustment value of the opening adjustment speed based on the temperature change speed;

[0047] An opening adjustment unit is used to adaptively adjust the opening of the temperature control valve based on the opening adjustment direction, the opening adjustment speed, and the adjustment value of the opening adjustment speed.

[0048] Preferably, the corrected acceleration is calculated using the following formula:

[0049]

[0050] in, To correct the acceleration, Adjust the acceleration for the initial opening, is the temperature deviation weight coefficient, is the current target temperature, is the real-time temperature value of the target furnace body, is the direction correction factor, It is the real-time opening adjustment direction, and the value is 1 or -1. is the differential gain coefficient, is the temperature deviation change rate.

[0051] The present invention provides a furnace temperature adaptive control system, which generates temperature requirements at each moment by dynamically analyzing the target task to be executed, determines the target temperature at each moment by the temperature requirements, and further determines the target opening of the temperature control valve by the target temperature at the current moment, and then determines the adaptive adjustment scheme by the target opening of the temperature control valve and the real-time operating status of the target furnace at the current moment, and controls the temperature control valve to perform adaptive adjustment of the opening according to the adaptive adjustment scheme, which effectively solves the problems of complex parameter adjustment and low dynamic response accuracy caused by insufficient rule coverage in traditional fuzzy control methods, effectively improves the accuracy of the adaptive adjustment scheme, and realizes precise and stable control of the furnace temperature. BRIEF DESCRIPTION OF THE DRAWINGS

[0052] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction is given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0053] Figure 1 It is a flow chart of a furnace temperature adaptive control system provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0054] To make the objectives, technical solutions, and advantages of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0055] Figure 1 It is a flow chart of a furnace temperature adaptive control system provided by an embodiment of the present invention.

[0056] like Figure 1 As shown, an embodiment of the present invention provides a furnace temperature adaptive control system, which mainly includes:

[0057] Task analysis module: used to analyze the target tasks to be executed by the target furnace body and obtain the temperature requirements of the target furnace body at each moment;

[0058] Temperature determination module: used for determining the target temperature of the target furnace at each moment based on the temperature requirement at each moment;

[0059] An opening determination module is used to determine the target opening of the temperature regulating valve of the target furnace body at the current moment based on the target temperature of the target furnace body at the current moment;

[0060] Adaptive adjustment module: used to obtain the real-time operating status of the target furnace body at the current moment, and based on the real-time operating status and the target opening at the current moment, determine the adaptive adjustment scheme of the temperature control valve at the current moment, and adaptively adjust the opening of the temperature control valve according to the adaptive adjustment scheme.

[0061] In this embodiment, the target furnace body refers to a specific industrial furnace body equipment that needs to control the temperature, such as a metallurgical furnace, a ceramic kiln, etc. The target furnace body in this solution is a furnace body of a vertical furnace.

[0062] In this embodiment, the target task to be executed refers to a specific production task that the furnace body needs to complete, such as metal annealing and ceramic sintering. The target task to be executed includes parameters such as process flow, time planning and temperature requirements.

[0063] In this embodiment, task parsing is the process of decomposing a task and extracting key features, for example, analyzing the temperature curves and process accuracy requirements at different stages of the task.

[0064] In this embodiment, the temperature requirement is a temperature control indicator generated according to task analysis, including a standard temperature value at each moment and an allowable fluctuation range.

[0065] In this embodiment, the target temperature is the precise temperature setting value of the target furnace body at a certain moment calculated according to the temperature demand, and is the direct basis for the action of the temperature regulating valve of the target furnace body.

[0066] In this embodiment, the temperature regulating valve is an actuator that controls the temperature of the furnace body by adjusting the fuel or energy input, such as a gas valve or an electric heating power controller.

[0067] In this embodiment, the target opening refers to the ideal opening degree of the temperature control valve required to achieve the target temperature at a certain moment, that is, the opening and closing ratio of the valve.

[0068] In this embodiment, the real-time operating status represents dynamic parameters such as the current actual temperature of the furnace, the real-time opening of the regulating valve, and environmental interference, wherein the environmental interference may include interference such as heat dissipation and external temperature changes.

[0069] In this embodiment, the adaptive adjustment scheme is a valve adjustment strategy dynamically generated by combining the real-time status of the target furnace body and the target opening, which is used to adjust the furnace body temperature to reach the target temperature.

[0070] In this embodiment, the adaptive adjustment of the opening refers to a process of correcting the valve opening of the temperature control valve in real time according to an adjustment plan to form a closed-loop control to achieve accurate temperature tracking.

[0071] The beneficial effects of the above technical solution are: by dynamically analyzing the target task to be executed, the temperature requirements at each moment are generated, the target temperature at each moment is determined by the temperature requirements, and the target opening of the temperature control valve is further determined by the target temperature at the current moment, and then the adaptive adjustment scheme is determined by the target opening of the temperature control valve and the real-time operating status of the target furnace at the current moment, and the temperature control valve is controlled to perform adaptive adjustment of the opening according to the adaptive adjustment scheme, which effectively solves the problems of complex parameter adjustment and low dynamic response accuracy caused by insufficient rule coverage of traditional fuzzy control methods, effectively improves the accuracy of the adaptive adjustment scheme, and realizes precise and stable control of the furnace temperature.

[0072] The embodiment of the present invention provides a furnace temperature adaptive control system and a task parsing module, including:

[0073] A feature determination unit, configured to perform task analysis on the target task to be executed and determine the task features of the target task to be executed;

[0074] A feature extraction unit, configured to extract the task feature to obtain a temperature feature of the target task to be executed;

[0075] The demand determination unit is used to determine the temperature demand of the target furnace body at each moment based on the temperature characteristics of the target task to be executed.

[0076] In this embodiment, task parsing refers to the process of decomposing and analyzing the target task to be executed. The purpose of task parsing is to identify key parameters and constraints from the target task to be executed. For example, the heating phase, insulation phase, cooling phase, and their corresponding temperature set points and time nodes in the target task to be executed can be analyzed to form structured data.

[0077] In this embodiment, task features refer to the set of key attributes related to the target task to be executed, extracted through task analysis. These attributes include the time distribution of each step, temperature variation trends, and accuracy requirements. These features are the direct output of task analysis and are used to provide basic data for subsequent temperature control.

[0078] In this embodiment, feature extraction refers to the process of further screening and isolating parameters directly related to temperature control from task features. For example, the target temperature value and allowable temperature deviation range for each stage of the process are extracted from the process steps, while excluding features unrelated to temperature, such as pressure and humidity.

[0079] In this embodiment, temperature features are derived through feature extraction and are core temperature-related indicators, including the time-temperature relationship and temperature accuracy requirements. The time-temperature relationship includes the heating rate and the holding time. Temperature features are the core input for generating temperature requirements.

[0080] In this embodiment, the temperature demand is a dynamic temperature control indicator calculated based on the temperature characteristics. It is used to define the target furnace temperature and its allowable fluctuation range at each moment. Essentially, it converts the task characteristics into specific temperature control parameters, providing a basis for subsequent target temperature setting and regulating valve control.

[0081] The beneficial effect of the above technical solution is: by analyzing the target task to be executed to obtain task characteristics, and extracting temperature-related parameters from them to form temperature characteristics, on this basis, the temperature requirements at each moment are generated through the temperature characteristics, and the target task to be executed can be converted into an executable temperature control parameter chain, laying the foundation for subsequent adaptive adjustment.

[0082] An embodiment of the present invention provides a furnace temperature adaptive control system, including a demand determination unit, comprising:

[0083] The standard temperature is determined quickly, and is used to determine the standard temperature of the target task to be executed at each moment according to the temperature characteristics of the target task to be executed;

[0084] An accuracy determination block, configured to determine the task accuracy requirement of the target task to be executed according to the task characteristics of the target task to be executed;

[0085] A fluctuation value calculation block is used to calculate the allowable temperature fluctuation value of the target task to be executed at each moment based on the task accuracy requirement of the target task to be executed;

[0086] The temperature requirement calculation block is used to calculate the temperature requirement of the target furnace body at each moment based on the standard temperature of the target task to be executed at each moment and the temperature fluctuation value allowed at each moment.

[0087] In this embodiment, the standard temperature is the theoretical temperature corresponding to each time node derived based on the temperature characteristics, reflecting the ideal temperature control target of the target task to be executed at each moment.

[0088] In this embodiment, the task accuracy requirement is a quality indicator of the target task to be executed obtained through task feature analysis, and is used to define the allowable temperature deviation range.

[0089] In this embodiment, the allowable temperature fluctuation value is the maximum allowable temperature deviation at each moment calculated by dynamic calculation based on the task accuracy requirement, and is used to quantify the acceptable positive and negative deviation limits of the real-time temperature and the standard value.

[0090] In this embodiment, the temperature requirement includes a standard temperature and a temperature fluctuation value.

[0091] The temperature control requirement is obtained by analyzing the task characteristics of the target task to be executed, and a dynamic fluctuation range is generated in combination with the accuracy requirement of the target task to be executed, so that the temperature requirement considering the ideal setting and the allowable deviation is finally formed, the self-adaptive adjustment is provided with an accurate control target, and the adjustment range reference for subsequent temperature self-adaptive adjustment is provided.

[0092] The furnace body temperature self-adaptive control system provided in the embodiment of the application comprises a temperature determination module, which comprises:

[0093] A range determination unit is configured to determine a required temperature range of the target furnace body at each moment based on a temperature requirement at each moment.

[0094] A difference calculation unit is configured to calculate a range difference value of the target furnace body at a current moment based on a required temperature range of the target furnace body at a previous moment and a required temperature range of the target furnace body at the current moment.

[0095] A value determination unit is configured to determine a target temperature of the target furnace body at each moment according to the range difference value at the current moment and the required temperature range at the current moment.

[0096] In this embodiment, the required temperature range is a dynamic temperature interval derived from the temperature requirement, which represents the upper and lower limit boundaries of the temperature fluctuation of the target furnace body at the current moment, and is used to define the legal operation domain of temperature control.

[0097] In this embodiment, the range difference value is a quantitative temperature interval change amplitude obtained by comparing the required temperature ranges at adjacent moments, and reflects the dynamic adjustment trend of the control boundary caused by the task progress.

[0098] In this embodiment, the target temperature is an accurate temperature setting value dynamically calculated by comprehensively considering the required temperature range at the current moment and the difference with the previous period, and is directly used as the basis for the action of the temperature regulating valve. For example, the temperature of the target furnace body needs to be kept at 95-105 DEG C at the previous moment, the target temperature at the previous moment is 100 DEG C, the requirement at the current moment changes to 105-115 DEG C, and the change range of the target furnace body is kept within 8 DEG C, so that the transition can be relatively smooth. By comparing the change of the median value of the temperature ranges before and after, it is determined that the temperature needs to be raised, and in order to avoid sudden change, the target temperature at the current moment is finally set to 108 DEG C.

[0099] The beneficial effects of the above technical solution are: defining the required temperature range at each moment through temperature requirements, analyzing the continuity requirements of temperature changes in combination with the difference in the required temperature ranges of adjacent time periods, and finally generating an accurate target temperature value. By converting task requirements into specific control parameters, it is ensured that temperature regulation can meet the constraints of the current moment.

[0100] An embodiment of the present invention provides a furnace temperature adaptive control system, an opening determination module, comprising:

[0101] a data analysis unit, configured to perform data analysis on the furnace body data of the target furnace body to obtain furnace body characteristics of the target furnace body;

[0102] a data extraction unit, configured to extract data from the furnace characteristics of the target furnace body and determine a temperature adjustment data set for the target furnace body;

[0103] The opening degree extraction unit is used to extract the opening degree from the temperature control data set based on the target temperature of the target furnace body at the current moment, so as to obtain the target opening degree of the temperature control valve of the target furnace body at the current moment.

[0104] In this embodiment, furnace body data refers to various parameters collected during the operation of the target furnace body, such as historical temperature, valve status, energy consumption records, etc. By analyzing the data and mining its internal laws, furnace body characteristics reflecting the thermodynamic properties of the furnace body can be extracted, such as thermal inertia coefficient, heating rate, heat dissipation characteristics, etc.

[0105] In this embodiment, the temperature control data set is a structured data set that is strongly related to temperature control and is screened from the furnace body characteristics, such as temperature response curves under different openings, valve action delay parameters, etc., which is mainly used to establish a mapping relationship between temperature and valve opening.

[0106] In this embodiment, the target temperature refers to the set temperature value to be reached at the current moment. By matching the corresponding opening and temperature association interval in the temperature control data set, the target opening required to achieve the temperature can be determined.

[0107] The beneficial effects of the above technical solution are: by performing data analysis on the furnace body data to determine the furnace body characteristics, and performing data extraction to obtain a temperature control data set, and further extracting the target opening corresponding to the target temperature from the temperature control data set to obtain the final target opening, the operating characteristics of the target furnace body can be converted into executable valve control parameters, which is convenient for quantification and improves the accuracy of temperature regulation.

[0108] An embodiment of the present invention provides a furnace temperature adaptive control system, an opening extraction unit, comprising:

[0109] a data arrangement block configured to arrange data in the temperature adjustment dataset to obtain a target temperature range corresponding to each opening degree of the temperature adjustment valve;

[0110] a range determination block configured to determine a target temperature range to which the target temperature of the target furnace body at the current time point belongs, and further determine a target opening degree of the temperature adjustment valve.

[0111] In this embodiment, data arrangement refers to the process of cleaning, classifying and standardizing the original data in the temperature adjustment dataset. Through data arrangement, the mapping relationship between opening degree and temperature can be extracted.

[0112] In this embodiment, the target temperature range is the effective temperature control interval corresponding to each valve opening degree determined after data arrangement, which represents the temperature fluctuation range that the furnace body can stably maintain at this opening degree.

[0113] In this embodiment, the target temperature range to which the target temperature belongs refers to the temperature range covered by the specific opening degree to which the target temperature belongs, which is determined by matching the current target temperature with the temperature interval corresponding to the opening degree.

[0114] By arranging the data in the temperature adjustment dataset, the target temperature range corresponding to each opening degree is obtained, and the target opening degree of the temperature adjustment valve is determined through the target temperature range of the target temperature, so that the matching of the target temperature and the target opening degree can be realized.

[0115] The furnace body temperature adaptive control system provided by the embodiment of the present application comprises an adaptive adjustment module.

[0116] a state acquisition unit configured to acquire a real-time running state of the target furnace body at the current time point;

[0117] a real-time data determination unit configured to determine real-time running data of the temperature adjustment valve based on the real-time running state of the target furnace body at the current time point;

[0118] a scheme determination unit configured to determine an adaptive adjustment scheme of the temperature adjustment valve at the current time point according to the real-time running data of the temperature adjustment valve and the target opening degree at the current time point.

[0119] In this embodiment, the real-time running state at the current time point refers to the dynamic parameters of the target furnace body in real-time running, including temperature, pressure, valve opening degree, etc.

[0120] In this embodiment, the adaptive adjustment scheme refers to a dynamic control strategy generated in combination with the difference between the real-time running data and the target opening degree, which contains parameters such as opening degree adjustment direction, speed, acceleration, etc. The scheme guides the valve action through a closed-loop feedback mechanism to ensure accurate temperature tracking of the target value.

[0121] The beneficial effect of the above technical solution is: determining the real-time operating data of the temperature control valve through the real-time operating status, and further determining the adaptive adjustment plan based on the real-time operating data of the temperature control valve and the target opening, which can take into account the current operating status and ensure the feasibility of the adaptive adjustment plan.

[0122] An embodiment of the present invention provides a furnace temperature adaptive control system, including a solution determination unit, comprising:

[0123] A speed determination block, configured to determine a real-time opening degree and a real-time adjustment speed of the temperature regulating valve according to real-time operation data of the temperature regulating valve;

[0124] a direction determination block, configured to determine an opening adjustment direction of the temperature control valve according to a difference between a target opening of the temperature control valve at a current moment and a real-time opening of the temperature control valve;

[0125] an acceleration calculation block, for calculating an initial opening adjustment acceleration of the temperature control valve according to the current opening adjustment direction and real-time adjustment speed of the temperature control valve;

[0126] an initial scheme determining block, configured to determine an initial adjustment scheme of the temperature control valve at a current moment based on the opening adjustment direction and the initial opening adjustment acceleration of the temperature control valve;

[0127] an acceleration correction block, configured to obtain a real-time temperature value of the target furnace body, and correct the real-time opening adjustment acceleration based on the real-time temperature value and the real-time opening adjustment direction to obtain a corrected acceleration;

[0128]

[0129] in, To correct the acceleration, Adjust the acceleration for the initial opening, is the temperature deviation weight coefficient, is the target temperature at the current moment, is the real-time temperature value of the target furnace body, is the direction correction factor, It is the real-time opening adjustment direction, and the value is 1 or -1. is the differential gain coefficient, is the temperature deviation change rate;

[0130] a judgment block, configured to determine whether the corrected acceleration meets an adjustment requirement based on valve characteristics of the temperature control valve;

[0131] an acceleration adjustment block, configured to, when the modified acceleration does not meet the adjustment requirement, redetermine the modified acceleration as the final acceleration according to the adjustment requirement, and adjust the initial adjustment scheme according to the final acceleration to obtain an adaptive adjustment scheme for the temperature control valve at the current moment;

[0132] The scheme adjustment block is used to adjust the initial adjustment scheme based on the modified acceleration when the modified acceleration meets the adjustment requirement, so as to obtain the adaptive adjustment scheme of the temperature control valve at the current moment.

[0133] In this embodiment, the real-time adjustment speed refers to the speed at which the valve opening of the temperature control valve changes, such as the percentage adjusted per second.

[0134] In this embodiment, the difference between the target opening and the real-time opening refers to the difference between the target opening and the actual opening, which is used to determine the direction of adjustment. The opening adjustment direction is used to indicate whether the valve needs to be opened or closed, that is, to increase or decrease the opening.

[0135] In this embodiment, the initial opening adjustment acceleration refers to a preliminary acceleration parameter calculated according to the real-time opening adjustment direction and the real-time adjustment speed, and is used to reflect the expected rate change of the opening change.

[0136] In this embodiment, the corrected acceleration is a final acceleration parameter obtained by dynamically adjusting the initial acceleration based on the deviation between the real-time temperature value and the target temperature, the deviation change rate, and the adjustment direction.

[0137] In this embodiment, valve characteristics refer to the inherent physical properties or performance parameters of the temperature control valve, such as maximum opening range, response delay, and mechanical inertia, which are used to constrain the acceptable range of acceleration. Adjustment requirements are the permissible acceleration range or performance indicators derived from the valve characteristics, used to determine whether the modified acceleration meets safety and effectiveness requirements.

[0138] In this embodiment, the final acceleration refers to the acceleration value generated by recalculation or constraint adjustment when the corrected acceleration does not meet the adjustment requirements, ensuring stable and reliable valve operation. The adaptive adjustment scheme is a dynamic control strategy generated by combining the final acceleration, the opening adjustment direction, and the real-time operating data of the temperature control valve to guide the precise operation of the temperature control valve at the current moment.

[0139] In this embodiment, In this part, the temperature deviation Taking into account, when the actual temperature With target temperature The larger the deviation, the larger the value of this part will be, which will cause the correction acceleration Increase, prompting the regulating valve to move faster to reduce the temperature difference, and can quickly respond to large temperature differences. The value of is 0.6;

[0140] It reflects the adjustment direction, and the positive and negative values ​​are determined according to the relationship between the target temperature and the actual temperature, combined with d (real-time opening adjustment direction, the value is 1 or 1) Ensure that the regulating valve is adjusted in the direction that brings the temperature closer to the target value to avoid adjusting in the wrong direction.

[0141] Taking into account the temperature deviation change rate If the temperature deviation changes quickly, its effect is amplified by the differential gain coefficient η, so that the control valve can respond in advance, enhancing the system's adaptability to temperature change trends, helping to suppress temperature fluctuations and improve system stability. The value of is 0.1.

[0142] The beneficial effects of the above technical solution are: determining the real-time opening and adjustment speed of the valve through real-time operating data, dynamically judging the adjustment direction in combination with the target opening difference, generating the initial adjustment acceleration and adjustment plan, further performing deviation correction on the acceleration according to the real-time temperature value, and verifying whether the correction result meets the requirements based on the valve characteristics. Finally, through multiple rounds of dynamic adjustment, an adaptive control solution is generated, which can effectively integrate the target temperature, real-time status and valve characteristics to form a closed-loop control mechanism. While ensuring the accuracy of the adjustment direction and speed, overshoot or lag is suppressed through dynamic correction of acceleration, effectively improving the high-precision tracking and stable control of the target furnace temperature.

[0143] An embodiment of the present invention provides a furnace temperature adaptive control system, an adaptive adjustment module, and further includes:

[0144] a regulation value extraction unit, configured to extract an opening regulation direction and an opening regulation speed of the temperature regulating valve from the adaptive adjustment scheme;

[0145] A speed adjustment unit, configured to obtain in real time the temperature change speed of the target furnace body at the current moment, and determine an adjustment value of the opening adjustment speed based on the temperature change speed;

[0146] An opening adjustment unit is used to adaptively adjust the opening of the temperature control valve based on the opening adjustment direction, the opening adjustment speed, and the adjustment value of the opening adjustment speed.

[0147] In this embodiment, the temperature change rate represents the change in the real-time temperature of the target furnace body within a unit time, and is used to reflect the rising or falling trend of the current furnace temperature.

[0148] In this embodiment, the adjustment value is a dynamic correction amount of the opening adjustment speed based on the temperature change rate, which is used to suppress temperature fluctuations or accelerate convergence. It is necessary to determine the reasonable temperature change rate based on the characteristics of the target furnace body, and determine the adjustment value of the opening adjustment speed based on the correspondence between the temperature change rate and the opening adjustment speed.

[0149] In this embodiment, the adaptive opening adjustment refers to a process of performing closed-loop dynamic adjustment on the opening of the temperature control valve through comprehensive parameters of the opening adjustment direction, adjustment speed, and adjustment value.

[0150] The beneficial effects of the above technical solution are: the opening adjustment direction and opening adjustment speed are extracted through the adaptive adjustment scheme, and the adjustment value of the opening adjustment speed is obtained according to the temperature change rate of the target furnace body. The opening of the temperature control valve is further adaptively adjusted through this adjustment value. The direction and speed parameters can be extracted from the adaptive adjustment scheme, and the amplitude of the adjustment speed can be dynamically corrected in combination with real-time temperature changes. Finally, the direction, speed and correction amount are integrated to generate accurate adjustment instructions, forming a closed-loop feedback, thereby improving the stability and anti-interference ability of temperature regulation.

[0151] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate, and the components shown as units may or may not be physical units, i.e., they may be located in one location or distributed across multiple network units. Some or all of the modules may be selected based on actual needs to achieve the objectives of the present embodiment. Persons of ordinary skill in the art will be able to understand and implement the present invention without inventive effort.

[0152] Through the above description of the embodiments, those skilled in the art will clearly understand that each embodiment can be implemented using software plus a necessary general-purpose hardware platform, or of course, hardware. Based on this understanding, the essence of the above technical solution, or the portion that contributes to the prior art, can be embodied in the form of a software product. This computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, a magnetic disk, or an optical disk, and includes a number of instructions for causing a computer device (such as a personal computer, server, or network device) to execute the methods described in each embodiment or certain portions of the embodiments.

[0153] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A furnace temperature adaptive control system, characterized in that: include: Task analysis module: used to analyze the target tasks to be executed by the target furnace body and obtain the temperature requirements of the target furnace body at each moment; Temperature determination module: used for determining the target temperature of the target furnace at each moment based on the temperature requirement at each moment; An opening determination module is used to determine the target opening of the temperature regulating valve of the target furnace body at the current moment based on the target temperature of the target furnace body at the current moment; Adaptive adjustment module: used to obtain the real-time operating status of the target furnace body at the current moment, and determine the adaptive adjustment scheme of the temperature control valve at the current moment based on the real-time operating status and the target opening at the current moment, and adaptively adjust the opening of the temperature control valve according to the adaptive adjustment scheme; The task parsing module includes: A feature determination unit, configured to perform task analysis on the target task to be executed and determine the task features of the target task to be executed; A feature extraction unit, configured to extract the task feature to obtain a temperature feature of the target task to be executed; a demand determination unit, configured to determine the temperature demand of the target furnace at each moment based on the temperature characteristics of the target task to be executed; Wherein, the demand determination unit includes: A standard temperature determination block, configured to determine a standard temperature of the target task to be executed at each moment according to a temperature characteristic of the target task to be executed; An accuracy determination block, configured to determine the task accuracy requirement of the target task to be executed according to the task characteristics of the target task to be executed; A fluctuation value calculation block is used to calculate the allowable temperature fluctuation value of the target task to be executed at each moment based on the task accuracy requirement of the target task to be executed; The temperature requirement calculation block is used to calculate the temperature requirement of the target furnace body at each moment based on the standard temperature of the target task to be executed at each moment and the temperature fluctuation value allowed at each moment.

2. A furnace temperature adaptive control system according to claim 1, characterized in that: The temperature determination module includes: a range determination unit, configured to determine a required temperature range of the target furnace body at each moment based on the temperature requirement at each moment; a difference calculation unit, configured to calculate a range difference of the target furnace body at a current moment based on the required temperature range of the target furnace body at a previous moment and the required temperature range of the target furnace body at a current moment; The value determination unit is used to determine the target temperature of the target furnace body at each moment according to the range difference at the current moment and the required temperature range at the current moment.

3. The furnace temperature adaptive control system according to claim 1, characterized in that: The opening determination module includes: a data analysis unit, configured to perform data analysis on the furnace body data of the target furnace body to obtain furnace body characteristics of the target furnace body; a data extraction unit, configured to extract data from the furnace characteristics of the target furnace body and determine a temperature adjustment data set for the target furnace body; The opening degree extraction unit is used to extract the opening degree from the temperature control data set based on the target temperature of the target furnace body at the current moment, so as to obtain the target opening degree of the temperature control valve of the target furnace body at the current moment.

4. A furnace temperature adaptive control system according to claim 3, characterized in that: The opening extraction unit includes: A data sorting block is used to sort the data in the temperature control data set to obtain a target temperature range corresponding to each opening of the temperature control valve; The range determination block is used to determine the target temperature range to which the target temperature of the target furnace body at the current moment belongs, and further determine the target opening of the temperature control valve.

5. The furnace temperature adaptive control system according to claim 1, characterized in that: The adaptive adjustment module includes: A status acquisition unit is used to obtain the real-time operating status of the target furnace body at the current moment; a real-time data determining unit, configured to determine the real-time operating data of the temperature regulating valve based on the real-time operating status of the target furnace at a current moment; The scheme determining unit is used to determine the adaptive adjustment scheme of the temperature regulating valve at the current moment according to the real-time operation data of the temperature regulating valve and the target opening at the current moment.

6. The furnace temperature adaptive control system according to claim 5, characterized in that: The scheme determination unit includes: A speed determination block, configured to determine a real-time opening degree and a real-time adjustment speed of the temperature regulating valve according to real-time operation data of the temperature regulating valve; a direction determination block, configured to determine an opening adjustment direction of the temperature control valve according to a difference between a target opening of the temperature control valve at a current moment and a real-time opening of the temperature control valve; an acceleration calculation block, for calculating an initial opening adjustment acceleration of the temperature control valve according to the current opening adjustment direction and real-time adjustment speed of the temperature control valve; an initial scheme determining block, configured to determine an initial adjustment scheme of the temperature control valve at a current moment based on the opening adjustment direction and the initial opening adjustment acceleration of the temperature control valve; an acceleration correction block, configured to obtain a real-time temperature value of the target furnace body, and correct the initial opening adjustment acceleration based on the real-time temperature value and the real-time opening adjustment direction to obtain a corrected acceleration; a judgment block, configured to determine whether the corrected acceleration meets an adjustment requirement based on valve characteristics of the temperature control valve; an acceleration adjustment block, configured to, when the modified acceleration does not meet the adjustment requirement, redetermine the modified acceleration as the final acceleration according to the adjustment requirement, and adjust the initial adjustment scheme according to the final acceleration to obtain an adaptive adjustment scheme for the temperature control valve at the current moment; The scheme adjustment block is used to adjust the initial adjustment scheme based on the modified acceleration when the modified acceleration meets the adjustment requirement, so as to obtain the adaptive adjustment scheme of the temperature control valve at the current moment.

7. The furnace temperature adaptive control system according to claim 1, characterized in that: The adaptive adjustment module also includes: a regulation value extraction unit, configured to extract an opening regulation direction and an opening regulation speed of the temperature regulating valve from the adaptive adjustment scheme; A speed adjustment unit, configured to obtain in real time the temperature change speed of the target furnace body at the current moment, and determine an adjustment value of the opening adjustment speed based on the temperature change speed; An opening adjustment unit is used to adaptively adjust the opening of the temperature control valve based on the opening adjustment direction, the opening adjustment speed, and the adjustment value of the opening adjustment speed.

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