Clamping mechanism, mechanical arm and carrying robot

The modular gripper mechanism with adjustable grippers addresses the challenge of maneuvering in confined spaces by allowing independent movement and orientation adjustment, enhancing handling precision and efficiency in semiconductor wafer transport.

CN120307332APending Publication Date: 2025-07-15HUZHOU YOUAI ZHIHE ROBOT TECH CO LTD
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Patent Information

Application Number
CN202510538343.1
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-04-27
Publication Date
2025-07-15

AI Technical Summary

Technical Problem

The robotic arm cannot swing flexibly in a small space, making it difficult to clamp, resulting in low handling efficiency of the transport robot.

Method used

A clamping mechanism is provided at the end of the robot arm, including a support arm and a clamping device. The first motor drives the clamping device to rotate relative to the support arm, adjust the clamping direction, and the second motor controls the clamping and release actions of the clamping jaws to reduce the overall swing amplitude of the mechanical arm.

Benefits of technology

Plug-in in a narrow space, reducing clamping difficulty, improving handling efficiency and accuracy, and enhancing the flexibility and safety of the handling robot.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention relates to the technical field of clamping mechanisms, and discloses a clamping mechanism, a mechanical arm and a transfer robot, the clamping mechanism comprises a supporting arm and a clamping jaw device, a first motor is arranged on the supporting arm, and the supporting arm is used for being connected with the mechanical arm; the clamping jaw device comprises a mounting bracket, a second motor and a clamping jaw assembly, one end of the mounting bracket is connected with the first motor, and the first motor is used for driving the clamping jaw device to rotate relative to the supporting arm; the clamping jaw assembly is arranged at the other end of the mounting support and comprises a first clamping jaw and a second clamping jaw, the second motor is arranged in the mounting support, and the second motor is used for driving the first clamping jaw and the second clamping jaw to be close to each other or away from each other. The technical problems that a mechanical arm cannot flexibly swing in a small space, the clamping difficulty is large, and the carrying efficiency of a carrying robot is low are solved.
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Description

Technical Field

[0001] The present application relates to the technical field of clamping mechanisms, and particularly to a clamping mechanism, a robotic arm, and a handling robot. Background Art

[0002] In the semiconductor manufacturing industry, a wafer cassette is a carrier for holding and protecting wafers. During handling operations, the stability of the wafer cassette is crucial for the quality of the wafers. Traditional wafer cassette handling methods mainly rely on manual operation, which is labor-intensive, inefficient, and increases the risk of wafer damage due to human factors.

[0003] In related technologies, a handling robot is used to handle wafer cassettes. The handling robot includes a robotic arm, and a clamping mechanism for clamping the wafer cassette is provided at the end of the robotic arm. Since the clamping mechanism is fixedly connected to the robotic arm, the clamping direction of the clamping mechanism can only be adjusted by rotating the robotic arm, and large swings will occur when the robotic arm performs complex multi-axis linkages. However, the robotic arm cannot swing flexibly in a small space, making it difficult to clamp and reducing the handling efficiency of the robot. Summary of the Invention

[0004] The purpose of the present application is to provide a clamping mechanism, a robotic arm, and a handling robot to solve the technical problems that the robotic arm cannot swing flexibly in a small space, the clamping is difficult, and the handling efficiency of the handling robot is low.

[0005] In a first aspect, the present application provides a clamping mechanism applied to a handling robot. The handling robot includes a robotic arm, and the clamping mechanism includes:

[0006] A support arm provided with a first motor, and the support arm is used to connect to the robotic arm;

[0007] A jaw device including a mounting bracket, a second motor, and a jaw assembly. One end of the mounting bracket is connected to the first motor, and the first motor is used to drive the jaw device to rotate relative to the support arm;

[0008] The jaw assembly is provided at the other end of the mounting bracket. The jaw assembly includes a first jaw and a second jaw. The second motor is disposed inside the mounting bracket, and the second motor is used to drive the first jaw and the second jaw to approach or separate from each other.

[0009] In the clamping mechanism of the present application, the support arm includes a first arm body and a second arm body. The first arm body and the second arm body are spaced apart, and at least a part of the mounting bracket extends between the first arm body and the second arm body;

[0010] A housing is provided on the first arm body or the second arm body. The first motor is installed inside the housing. The main shaft of the first motor extends from inside the housing to between the first arm body and the second arm body and is fixedly assembled with the mounting bracket.

[0011] In the clamping mechanism of the present application, the housing is provided on the second arm body, and a mounting groove is provided on the side of the first arm body facing the second arm body; or the housing is provided on the first arm body, and a mounting groove is provided on the side of the second arm body facing the first arm body.

[0012] A rotating shaft is provided on the mounting bracket. The rotating shaft is fixedly assembled with the main shaft of the first motor, and a part of the rotating shaft is rotatably connected inside the mounting groove.

[0013] In the clamping mechanism of the present application, a limiting member is provided between the first arm body and the second arm body. The limiting member is provided on the first arm body or the second arm body, and the limiting member is used to limit the rotation range of the jaw device relative to the support arm.

[0014] In the clamping mechanism of the present application, a position sensor is provided between the first arm body and the second arm body. The position sensor is provided on the first arm body or the second arm body, and the position sensor is used to detect whether the jaw device is in the initial position.

[0015] In the clamping mechanism of the present application, the jaw device includes a first driving block, a second driving block, a first transmission member, and a second transmission member. The first driving block and the second driving block are in transmission connection with the second motor.

[0016] One end of the first transmission member close to the second transmission member is fixedly connected to the first driving block, and the end of the first transmission member far from the second transmission member is fixedly connected to the first jaw.

[0017] One end of the second transmission member close to the first transmission member is fixedly connected to the second driving block, and the end of the second transmission member far from the first transmission member is fixedly connected to the second jaw.

[0018] In the clamping mechanism of the present application, a material detection device is further provided on the mounting bracket. The material detection device is used to detect whether there is material in front of the first jaw and the second jaw.

[0019] In the clamping mechanism of the present application, a counterweight is further provided on the support arm. The counterweight is provided at one end of the support arm far from the jaw device.

[0020] In the clamping mechanism of the present application, an identification device is further provided on the support arm. The identification device is used to identify the coding information of the material.

[0021] In a second aspect, the present application provides a robotic arm, which includes a robotic arm main body and the clamping mechanism, and the robotic arm main body is connected to the support arm.

[0022] In a third aspect, the present application provides a handling robot, which includes a robot main body and the robotic arm, and the robotic arm is connected to the robot main body.

[0023] The present application provides a clamping mechanism, and its beneficial effects are as follows:

[0024] The clamping mechanism includes a support arm and a jaw device. One end of the support arm is connected to the jaw device, and the other end of the support arm is connected to the end of the robotic arm. A first motor is installed on the support arm, and the main shaft of the first motor is fixedly assembled with the jaw device. The jaw device is driven by the first motor to rotate relative to the support arm. A second motor is installed in the mounting bracket, and the first jaw and the second jaw are driven by the second motor to approach each other to achieve the clamping action of the jaws; or the first jaw and the second jaw are driven by the second motor to move away from each other to achieve the releasing action of the jaws.

[0025] When clamping materials such as a wafer cassette, there is no need for the robotic arm to perform complex multi-axis linkage and large-amplitude swinging. It only needs to move the end of the robotic arm into the material storage space, control the jaw device to rotate relative to the support arm through the first motor to adjust the clamping direction of the jaw device; control the first jaw and the second jaw to approach each other through the second motor to achieve the clamping function of the jaw device. The present application provides a clamping mechanism at the end of the robotic arm. The jaw device can rotate relative to the support arm and perform clamping, reducing the overall swinging amplitude of the robotic arm, enabling the robotic arm to be applicable in a narrow space, reducing the clamping difficulty of the robotic arm, and improving the handling efficiency of the robot. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following drawings are some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0027] Figure 1 It is a schematic structural diagram of the robotic arm provided by the embodiment of the present application;

[0028] Figure 2 It is a schematic structural diagram of the handling robot provided by the embodiment of the present application;

[0029] Figure 3 It is a schematic structural diagram of the clamping mechanism provided by the embodiment of the present application;

[0030] Figure 4Another structural schematic diagram of the clamping mechanism provided by the embodiment of the present application;

[0031] Figure 5 Explosion schematic diagram of the clamping mechanism provided by the embodiment of the present application;

[0032] Figure 6 Another explosion schematic diagram of the clamping mechanism provided by the embodiment of the present application;

[0033] Figure 7 Explosion schematic diagram of the jaw device provided by the embodiment of the present application;

[0034] Figure 8 Structural schematic diagram of the support arm provided by the embodiment of the present application;

[0035] Figure 9 Another explosion schematic diagram of the clamping mechanism provided by the embodiment of the present application.

[0036] The markings in the figure are as follows:

[0037] 10. Support arm; 11. First motor; 12. First arm body; 13. Second arm body; 14. Housing; 15. Installation groove; 16. Limiting member; 17. Position sensor; 20. Jaw device; 21. Installation bracket; 22. Second motor; 23. First jaw; 24. Second jaw; 25. Rotating shaft; 26. First driving block; 27. Second driving block; 28. First transmission member; 29. Second transmission member; 30. Material detection device; 40. Counterweight; 50. Identification device; 60. Zero position pin; 100. Clamping mechanism; 101. Manipulator main body; 200. Manipulator; 201. Robot main body. Detailed implementation manners

[0038] The following combines the drawings and embodiments to further describe in detail the specific implementation manners of the present application. The following embodiments are used to illustrate the present application, but are not used to limit the scope of the present application.

[0039] In the description of the present application, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "inner", "outer", etc. in the present application is based on the positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the devices and elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present application.

[0040] In the description of this application, it should be understood that in this application, terms such as "first" and "second" are used to describe various information, but this information should not be limited to these terms. These terms are only used to distinguish information of the same type from each other. For example, without departing from the scope of this application, "first" information can also be referred to as "second" information, and similarly, "second" information can also be referred to as "first" information.

[0041] As Figure 1 shown, Figure 1 is a schematic structural diagram of a handling robot. A handling robot (AGV, Automated Guided Vehicle) is an automated handling device with autonomous navigation capabilities. Through built-in sensors, navigation algorithms, or preset paths, it can automatically complete the transportation of goods or materials without direct manual operation. The handling robot has functions such as precise positioning, path planning, and obstacle avoidance and detouring, and is suitable for scenarios such as factories, warehouses, and logistics centers, which can improve handling efficiency, reduce labor costs, and reduce human operation errors.

[0042] The handling robot includes a robotic arm 200. By simulating complex actions such as grasping, handling, assembling, and stacking of a human arm through the robotic arm 200, the robot can identify the position, shape, and weight of the target object, adjust the clamping force and grasping posture, and achieve stable grasping and handling of materials.

[0043] In the related art, as Figure 2 shown, a clamping mechanism 100 is installed at the end of the robotic arm 200, and the wafer cassette is clamped through the clamping mechanism 100. Since the clamping mechanism 100 is fixedly connected to the robotic arm 200, only by rotating the entire robotic arm 200 can the clamping direction of the clamping mechanism 100 be adjusted, which requires complex multi-axis linkage of the robotic arm 200, resulting in a large swing of the robotic arm 200. However, in a small space, the robotic arm 200 is restricted by the space and cannot swing flexibly, resulting in difficult clamping and reduced handling efficiency of the handling robot.

[0044] As Figures 3 to 7As shown in the figure, an embodiment of the present application provides a clamping mechanism 100, which is applied to a handling robot. The handling robot includes a robotic arm 200. The clamping mechanism 100 includes a support arm 10 and a jaw device 20. A first motor 11 is provided on the support arm 10, and the support arm 10 is used to connect to the robotic arm 200; the jaw device 20 includes a mounting bracket 21, a second motor 22 and a jaw assembly. One end of the mounting bracket 21 is connected to the first motor 11, and the first motor 11 is used to drive the jaw device 20 to rotate relative to the support arm 10; the jaw assembly is provided at the other end of the mounting bracket 21. The jaw assembly includes a first jaw 23 and a second jaw 24. The second motor 22 is provided inside the mounting bracket 21, and the second motor 22 is used to drive the first jaw 23 and the second jaw 24 to approach or move away from each other.

[0045] In this embodiment, the clamping mechanism 100 includes a support arm 10 and a jaw device 20. One end of the support arm 10 is connected to the jaw device 20, and the other end of the support arm 10 is connected to the end of the robotic arm 200. The jaw device 20 is used to clamp a wafer cassette. A first motor 11 is installed on the support arm 10. The main shaft of the first motor 11 is fixedly assembled with the jaw device 20, and the first motor 11 is used to drive the jaw device 20 to rotate relative to the support arm 10. A second motor 22 is installed inside the mounting bracket 21. By driving the second motor 22, the first jaw 23 and the second jaw 24 approach each other to achieve the clamping action of the jaws; or by driving the second motor 22, the first jaw 23 and the second jaw 24 move away from each other to achieve the releasing action of the jaws.

[0046] Based on the above technical solution, when clamping materials such as wafer cassettes, it is not necessary for the robotic arm 200 to perform complex multi-axis linkage and large swings. It only needs the end of the robotic arm 200 to move into the material storage space. The first motor 11 is used to control the rotation of the jaw device 20 relative to the support arm 10 to adjust the clamping direction of the jaw device 20. The second motor 22 is used to control the first jaw 23 and the second jaw 24 to approach each other to achieve the clamping of the material by the jaw device 20. In this embodiment, the clamping mechanism 100 is provided at the end of the robotic arm 200. The jaw device 20 can rotate relative to the support arm 10 and perform clamping, reducing the overall swing amplitude of the robotic arm 200, enabling the robotic arm 200 to be applicable in a narrow space, reducing the clamping difficulty of the robotic arm 200, and improving the handling efficiency of the handling robot.

[0047] Exemplarily, the first motor 11 is used to control the rotation of the jaw device 20 relative to the support arm 10 in a first plane (such as a horizontal plane). When the wafer cassette is placed on the horizontal plane, the jaw device 20 can rotate to a suitable position in the horizontal plane for clamping.

[0048] Exemplarily, the first motor 11 is used to control the gripper device 20 to rotate relative to the support arm 10 in a second plane (such as a vertical plane). When the wafer cassette is placed in the vertical plane, the gripper device 20 can rotate to a suitable position in the vertical plane for gripping.

[0049] Exemplarily, the gripper device 20 can also rotate relative to the support arm 10 in a three-dimensional space, that is, the gripper device 20 can rotate relative to the support arm 10 in different planes, enabling the gripper device 20 to adjust the gripping angle up, down, left, and right.

[0050] In some embodiments, as Figures 4 to 6 shown, the support arm 10 includes a first arm body 12 and a second arm body 13. The first arm body 12 and the second arm body 13 are spaced apart, and at least a part of the mounting bracket 21 extends between the first arm body 12 and the second arm body 13; a housing 14 is provided on the first arm body 12 or the second arm body 13. The first motor 11 is installed in the housing 14, and the main shaft of the first motor 11 extends from the housing 14 to between the first arm body 12 and the second arm body 13 and is assembled and fixed to the mounting bracket 21.

[0051] Specifically, the first arm body 12 is an upper arm body and the second arm body 13 is a lower arm body; or the first arm body 12 is a lower arm body and the second arm body 13 is an upper arm body. The housing 14 is provided on the first arm body 12 or the second arm body 13. The main body of the first motor 11 is installed in the housing 14, and the main shaft of the first motor 11 extends to be assembled and fixed to the mounting bracket 21. The first arm body 12 and the second arm body 13 clamp and support the gripper device 20, and the housing 14 serves to install and protect the first motor 11, reducing the vibration during the operation of the first motor 11.

[0052] In this embodiment, by installing the first motor 11 in the housing 14 and extending the main shaft to be assembled with the mounting bracket 21 between the first arm body 12 and the second arm body 13, and utilizing the spaced space of the support arm 10, the structure of the gripping mechanism 100 is made more compact, reducing the occupied space. Among them, the mounting bracket 21 is assembled and fixed to the main shaft of the first motor 11, enhancing the connection stability between the gripper device 20 and the support arm 10. During the gripping and handling process, the shaking of the gripper device 20 can be reduced, improving the accuracy and stability of gripping.

[0053] Exemplarily, the first arm body 12 is an upper arm body and the second arm body 13 is a lower arm body. The first arm body 12 and the second arm body 13 extend in the horizontal direction. The mounting bracket 21 extends between the first arm body 12 and the second arm body 13, and the first motor 11 drives the mounting bracket 21 to rotate in the horizontal plane.

[0054] Exemplarily, the first arm body 12 is the left arm body, the second arm body 13 is the right arm body, the mounting bracket 21 extends between the first arm body 12 and the second arm body 13, and the first motor 11 drives the mounting bracket 21 to rotate in a vertical plane.

[0055] In some embodiments, as Figures 5 to 8 shown, the housing 14 is provided on the second arm body 13, and a mounting groove 15 is provided on the side of the first arm body 12 facing the second arm body 13; or the housing 14 is provided on the first arm body 12, and a mounting groove 15 is provided on the side of the second arm body 13 facing the first arm body 12; a rotating shaft 25 is provided on the mounting bracket 21, the rotating shaft 25 is fixedly assembled with the main shaft of the first motor 11, and the rotating shaft 25 is partially rotatably connected in the mounting groove 15.

[0056] Specifically, the mounting bracket 21 is provided with a mounting portion extending between the first arm body 12 and the second arm body 13, a rotating shaft 25 is provided on the mounting portion, one of the first arm body 12 and the second arm body 13 is provided with the first motor 11, the other of the first arm body 12 and the second arm body 13 is provided with the mounting groove 15, the rotating shaft 25 on the mounting portion is fixedly assembled with the main shaft of the first motor 11 and is also rotatably connected to the mounting groove 15, that is, the mounting bracket 21 is rotatably connected to both the first arm body 12 and the second arm body 13 at the same time, enhancing the rotational stability of the gripper device 20 relative to the support arm 10, making the gripper device 20 more stable during rotation, reducing the vibration of the gripper device 20 during rotation, and improving the gripping accuracy of the gripper device 20.

[0057] It can be understood that during the handling process of the wafer cassette, the robotic arm 200 is affected by various external forces, and the gripper device 20 can ensure that the wafer cassette will not fall or be damaged during the gripping and handling process, improving the reliability and safety of the handling, and thus improving the handling efficiency.

[0058] In some embodiments, as Figure 4 and Figure 9 shown, a limiting member 16 is provided between the first arm body 12 and the second arm body 13, the limiting member 16 is provided on the first arm body 12 or the second arm body 13, and the limiting member 16 is used to limit the rotation range of the gripper device 20 relative to the support arm 10.

[0059] Specifically, the limiting member 16 is provided between the first arm body 12 and the second arm body 13 and is used to abut against the mounting bracket 21 when the gripper device 20 rotates, thereby restricting the excessive rotation of the mounting bracket 21 and preventing the rotation angle of the gripper device 20 from being too large.

[0060] Exemplarily, the limiting member 16 includes a first limiting portion and a second limiting portion, and the limiting member 16 is disposed on the end surface of the second arm body 13 facing the first arm body 12. When the jaw device 20 and the support arm 10 are in the same straight line, the jaw device 20 is in the initial position. When the jaw device 20 rotates clockwise relative to the support arm 10 until it abuts against the first limiting portion, the first limiting portion prevents the jaw device 20 from continuing to rotate. At this time, the jaw device 20 is in the first extreme position. When the jaw device 20 rotates counterclockwise relative to the support arm 10 until it abuts against the second limiting portion, the second limiting portion prevents the jaw device 20 from continuing to rotate. At this time, the jaw device 20 is in the second extreme position.

[0061] In some embodiments, the limiting member 16 includes a first limiting post and a second limiting post. The first limiting post and the second limiting post are spaced apart. The first limiting post is used to abut the jaw device 20 at the first extreme position, and the second limiting post is used to abut the jaw device 20 at the second extreme position.

[0062] In some embodiments, as Figure 9 shown, a position sensor 17 is provided between the first arm body 12 and the second arm body 13. The position sensor 17 is disposed on the first arm body 12 or the second arm body 13. The position sensor 17 is used to detect whether the jaw device 20 is located at the initial position.

[0063] Specifically, the position sensor 17 is used to detect whether the jaw device 20 is located at the initial position, and provide position feedback information for the control system of the handling robot. The control system determines the current state of the jaw device 20 based on the position feedback information, and then decides the next operation, such as starting the robotic arm 200, controlling the jaw device 20 to perform grasping, or adjusting the jaw direction, etc.

[0064] Furthermore, during the handling process, when the jaw device 20 deviates from the set position, the position sensor 17 detects the change in the position state and generates a corresponding signal, and the control system takes corresponding measures, such as adjusting the position of the jaw device 20 or stopping the handling operation, etc.

[0065] Exemplarily, the position sensor 17 includes a home sensor. The home sensor is disposed on the second arm body 13. When the jaw device 20 rotates to the initial position, the home sensor is triggered and sends a signal to the control system, indicating that the jaw device 20 rotates to the initial position.

[0066] In some embodiments, as Figure 7As shown, the jaw device 20 includes a first drive block 26, a second drive block 27, a first transmission member 28, and a second transmission member 29. The first drive block 26 and the second drive block 27 are in transmission connection with the second motor 22. One end of the first transmission member 28 close to the second transmission member 29 is fixedly connected to the first drive block 26, and the other end of the first transmission member 28 far from the second transmission member 29 is fixedly connected to the first jaw 23. One end of the second transmission member 29 close to the first transmission member 28 is fixedly connected to the second drive block 27, and the other end of the second transmission member 29 far from the first transmission member 28 is fixedly connected to the second jaw 24.

[0067] Specifically, by connecting the two ends of the first transmission member 28 to the first drive block 26 and the first jaw 23 respectively, and connecting the two ends of the second transmission member 29 to the second drive block 27 and the second jaw 24 respectively. When the second motor 22 drives the first drive block 26 and the second drive block 27 to approach or move away from each other, the first drive block 26 drives the first transmission member 28 to move synchronously, and the second drive block 27 drives the second transmission member 29 to move synchronously. Then, the first transmission member 28 drives the first jaw 23 to move, and the second transmission member 29 drives the second jaw 24 to move, so that the first jaw 23 and the second jaw 24 approach or move away from each other to realize the clamping and releasing functions of the jaw device 20.

[0068] In this embodiment, the first transmission member 28 and the first drive block 26 are fixedly connected by screw tight fit, and the second transmission member 29 and the second drive block 27 are fixedly connected by screw tight fit.

[0069] There are no specific restrictions on the shape and structure of the first jaw 23 and the second jaw 24. They can have the same structure or different structures. According to the specific shape, size and clamping requirements of the wafer cassette, the structure of the jaws can be flexibly selected or designed, so that the jaw device 20 can be applicable to more different specifications and types of wafer cassettes, increasing the application range of the jaw device 20.

[0070] In some embodiments, as Figure 7 shown, a material detection device 30 is provided on the mounting bracket 21. The material detection device 30 is used to detect whether there is material in front of the first jaw 23 and the second jaw 24.

[0071] Specifically, before the first jaw 23 and the second jaw 24 perform the clamping operation, it is judged by the material detection device 30 whether there is a wafer cassette in front of the jaw device 20 to avoid empty clamping or incorrect clamping of the jaws. In the absence of a wafer cassette, the clamping action of the jaws is stopped to avoid potential damage to surrounding equipment or personnel and improve the safety of the operation process. If there is a wafer cassette in front of the first jaw 23 and the second jaw 24, the material detection device 30 will respond quickly, and the jaw device 20 will perform the clamping operation after detecting the wafer cassette, thus shortening the waiting and judgment time and improving the clamping efficiency.

[0072] In some embodiments, as Figure 4 and Figure 6 shown, a counterweight 40 is further provided on the support arm 10, and the counterweight 40 is provided at one end of the support arm 10 away from the jaw device 20.

[0073] Specifically, one end of the support arm 10 is connected to the jaw device 20, and the other end of the support arm 10 is provided with the counterweight 40. When the jaw device 20 grabs a wafer cassette, the weight of the jaw device 20 increases, resulting in an imbalance in the weights at both ends of the support arm 10. In this embodiment, the counterweight 40 is provided at one end of the support arm 10 away from the jaw device 20, and the counterweight 40 can balance the weight distribution at the opposite ends of the support arm 10, making the support arm 10 and the robotic arm 200 more stable during rotation.

[0074] In some embodiments, as Figure 2 shown, an identification device 50 is further provided on the support arm 10, and the identification device 50 is used to identify the coding information of the material.

[0075] Specifically, the identification device 50 is a camera, and the camera is used to read the information of the two-dimensional code label. In this embodiment, a two-dimensional code label is provided on the wafer cassette. When the robotic arm 200 drives the jaw device 20 to move towards the position of the wafer cassette, the camera can read the information of the two-dimensional code label on the wafer cassette, so as to accurately grab a specific wafer cassette.

[0076] In another embodiment, the two-dimensional code label can be replaced with other codes, such as RFID (Radio Frequency Identification) tags or barcode tags, and the identification device 50 can be replaced with an RFID reader. Compared with two-dimensional codes, RFID tags have a faster reading speed.

[0077] In some embodiments, as Figure 4 and Figure 6 shown, a zero-position pin 60 is further provided on the second arm body 13. During the assembly process of the clamping mechanism 100, the zero-position pin 60 can be used as a reference point for assembly, helping workers quickly and accurately install each component in the correct position. At the same time, during the system calibration process, the zero-position pin 60 can also be used as a calibration reference. By cooperating with other detection devices, the position of the jaw device 20 is adjusted to make it reach the best working state.

[0078] Second, as Figure 2 and Figure 3 shown, an embodiment of the present application provides a robotic arm 200, including a robotic arm main body 101 and a clamping mechanism 100, and the robotic arm main body 101 is connected to the support arm 10.

[0079] Specifically, one end of the robotic arm main body 101 is connected to the robot main body 201, and the other end (the end) of the robotic arm main body 101 is connected to the support arm 10. The robotic arm main body 101 drives the clamping mechanism 100 to move flexibly in three-dimensional space. The gripper device 20 can rotate relative to the support arm 10 to achieve gripping at multiple angles and positions.

[0080] In a third aspect, as Figure 1 shown, an embodiment of the present application provides a handling robot, including a robot main body 201 and a robotic arm 200. The robotic arm 200 is connected to the robot main body 201.

[0081] Specifically, the handling robot performs diverse tasks through the robotic arm 200. The clamping mechanism 100 at the end of the robotic arm 200 can perform operations such as grasping, placing, and rotating, greatly enhancing the functionality and flexibility of the handling robot. A chassis (not shown in the drawings) is further provided at the bottom of the robot main body 201, and is driven by drive wheels on the chassis to achieve spatial movement of the handling robot.

[0082] It should be understood that the term "and / or" used in the specification and appended claims of the present application refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations. It should be noted that in this text, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or system including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or further includes elements inherent to such process, method, article or system.

[0083] The serial numbers of the above embodiments of the present application are only for description and do not represent the advantages or disadvantages of the embodiments. The above are only specific embodiments of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present application can easily think of various equivalent modifications or substitutions, and these modifications or substitutions should all be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A clamping mechanism is applied to a handling robot, and the handling robot includes a robotic arm, characterized in that, The clamping mechanism includes: A support arm provided with a first motor, and the support arm is used for connecting with the robotic arm; A jaw device, including a mounting bracket, a second motor and a jaw assembly. One end of the mounting bracket is connected to the first motor, and the first motor is used for driving the jaw device to rotate relative to the support arm; The jaw assembly is arranged at the other end of the mounting bracket. The jaw assembly includes a first jaw and a second jaw. The second motor is arranged inside the mounting bracket, and the second motor is used for driving the first jaw and the second jaw to approach or separate from each other.

2. The clamping mechanism according to claim 1, wherein The support arm includes a first arm body and a second arm body. The first arm body and the second arm body are arranged at intervals, and at least part of the mounting bracket extends between the first arm body and the second arm body; A housing is arranged on the first arm body or the second arm body. The first motor is installed in the housing. The main shaft of the first motor extends from the housing to between the first arm body and the second arm body and is fixedly assembled with the mounting bracket.

3. The clamping mechanism according to claim 2, characterized in that, The housing is arranged on the second arm body, and an installation groove is arranged on the side of the first arm body facing the second arm body; or the housing is arranged on the first arm body, and an installation groove is arranged on the side of the second arm body facing the first arm body; A rotating shaft is arranged on the mounting bracket. The rotating shaft is fixedly assembled with the main shaft of the first motor, and part of the rotating shaft is rotatably connected in the installation groove.

4. The clamping mechanism according to claim 2, wherein A limiting member is arranged between the first arm body and the second arm body. The limiting member is arranged on the first arm body or the second arm body, and the limiting member is used for limiting the rotation range of the jaw device relative to the support arm.

5. The clamping mechanism according to claim 2, wherein, A position sensor is arranged between the first arm body and the second arm body. The position sensor is arranged on the first arm body or the second arm body, and the position sensor is used for detecting whether the jaw device is located at the initial position.

6. The clamping mechanism according to claim 1, characterized in that, The jaw device includes a first driving block, a second driving block, a first transmission member and a second transmission member. The first driving block and the second driving block are in transmission connection with the second motor; One end of the first transmission member close to the second transmission member is fixedly connected to the first driving block, and one end of the first transmission member far from the second transmission member is fixedly connected to the first jaw; One end of the second transmission member close to the first transmission member is fixedly connected to the second driving block, and one end of the second transmission member far from the first transmission member is fixedly connected to the second jaw.

7. The clamping mechanism according to claim 1, characterized in that, A material detection device is further arranged on the mounting bracket, and the material detection device is used for detecting whether there is material in front of the first jaw and the second jaw.

8. The clamping mechanism according to claim 1, characterized in that, A counterweight is further arranged on the support arm, and the counterweight is arranged at one end of the support arm far from the jaw device.

9. The clamping mechanism according to claim 1, wherein An identification device is further arranged on the support arm, and the identification device is used for identifying the coding information of the material.

10. A robotic arm, characterized in that, It includes a robotic arm main body and the clamping mechanism according to any one of claims 1 to 9, and the robotic arm main body is connected to the support arm.

11. A handling robot, characterized in that, It includes a robot main body and the robotic arm according to claim 10, and the robotic arm is connected to the robot main body.