A tactile sensor

Abstract

The application provides a kind of tactile sensor, fixed part and moving part sliding connection, follow-up part is arranged between fixed part and moving part, follow-up part is slidingly connected with fixed part and is positioned to follow-up part;Two electrode plates of the tactile sensor are respectively arranged on the opposite surfaces of the fixed part and the follow-up part, when the tactile sensor contacts with the object, only the distance between the two electrode plates in the tactile sensor will change, the opposite position of the first electrode plate and the second electrode plate is kept unchanged as far as possible, and the error of data detection will not be generated due to the inclination of the electrode plate, which improves the precision of the capacitive tactile sensor in detecting force data.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of sensors, in particular to a kind of tactile sensors. BACKGROUND

[0002] At present, capacitive tactile sensor (abbreviation: tactile sensor) when detecting force data, will be calculated according to the change of the distance between the two electrode plates of tactile sensor or the change of the area of the two electrode plates, and the force direction is judged according to the capacitance change of multiple groups of capacitors;But under the action of force, the electrode plate arranged in tactile sensor is easy to tilt, and the tilted electrode plate will affect the precision of tactile sensor detecting force data. SUMMARY

[0003] To solve the above problems, the purpose of the embodiment of the present application is to provide a kind of tactile sensors.

[0004] First, the embodiment of the present application provides a kind of tactile sensors, including: fixed part, moving part, follow-up part, sensing element and flexible substrate;

[0005] Fixed part and moving part are slidingly connected, follow-up part is arranged between fixed part and moving part, follow-up part and fixed part are slidingly connected and limit follow-up part;Flexible substrate and the bottom surface of fixed part are fixedly connected;

[0006] Sensing element, including: first electrode plate and second electrode plate, first electrode plate and second electrode plate are respectively arranged on the surface opposite to fixed part and follow-up part;

[0007] Wherein, in initial state, follow-up part and moving part are in contact;

[0008] When moving part slides on fixed part, follow-up part is driven to be close to fixed part;In this process, due to the limiting effect of sliding connection between follow-up part and fixed part, the facing position between first electrode plate and second electrode plate remains unchanged when first electrode plate is close to second electrode plate;

[0009] In the scheme provided by the first aspect of the embodiments of the present application, in the tactile sensor, the fixed part and the moving part are in sliding connection, the follower part is arranged between the fixed part and the moving part, the follower part is in sliding connection with the fixed part and is limited by the follower part; the first electrode plate and the second electrode plate in the sensing element are respectively arranged on the opposite surfaces of the fixed part and the follower part, when the tactile sensor contacts with the object, the moving part slides on the fixed part, and drives the follower part to approach the fixed part; in this process, due to the limiting effect of the sliding connection between the follower part and the fixed part, the first electrode plate approaches the second electrode plate to keep the normal position between the first electrode plate and the second electrode plate unchanged, compared with the way that the electrode plate in the tactile sensor is easy to tilt under the action of force when the tactile sensor contacts with the object in the related art, when the tactile sensor contacts with the object, only the distance between the two electrode plates in the tactile sensor will change, and the normal position of the first electrode plate and the second electrode plate is kept unchanged as much as possible, so that the error in data detection caused by the tilt of the electrode plate is avoided, and the precision of the capacitive tactile sensor in detecting force data is improved.

[0010] In order to make the above-mentioned purposes, characteristics and advantages of the present application more obvious and easy to understand, the following preferred embodiments are described in detail below, and the accompanying drawings are described as follows. BRIEF DESCRIPTION OF DRAWINGS

[0011] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor.

[0012] Figure 1 A partial cross-sectional view of a tactile sensor of a first implementation of the fixed part, the moving part and the follower part provided by the embodiments of the present application is shown;

[0013] Figure 2 A structure schematic diagram of the fixed part provided by the embodiments of the present application is shown; Figure 1 A-A cross-sectional view;

[0014] Figure 3 A structure schematic diagram of the fixed part provided by the embodiments of the present application is shown;

[0015] Figure 4 A structure schematic diagram of the moving part provided by the embodiments of the present application is shown;

[0016] Figure 5 A structure schematic diagram of the follower part provided by the embodiments of the present application is shown;

[0017] Figure 6 Fig. 4 shows a schematic diagram of a state of the haptic sensor provided by the first implementation of the fixed part, the moving part and the follower part when the haptic sensor is subjected to a force in a first direction according to an embodiment of the present application;

[0018] Figure 7 Fig. 5 shows a cross-sectional view of another position of the haptic sensor provided by the first implementation of the fixed part, the moving part and the follower part when the haptic sensor is subjected to a force in a second direction according to an embodiment of the present application;

[0019] Figure 8 Fig. 6 shows a schematic diagram of a state of the haptic sensor provided by the first implementation of the fixed part, the moving part and the follower part when the haptic sensor is subjected to a force in a first direction according to an embodiment of the present application;

[0020] Figure 9 Fig. 7 shows a cross-sectional view of another position of the haptic sensor provided by the second implementation of the fixed part, the moving part and the follower part when the haptic sensor is subjected to a force in a second direction according to an embodiment of the present application;

[0021] Figure 10 Fig. 8 shows a schematic diagram of a state of the haptic sensor provided by the second implementation of the fixed part, the moving part and the follower part when the haptic sensor is subjected to a force in a first direction according to an embodiment of the present application;

[0022] Figure 11 Fig. 9 shows a cross-sectional view of another position of the haptic sensor provided by the second implementation of the fixed part, the moving part and the follower part when the haptic sensor is subjected to a force in a second direction according to an embodiment of the present application;

[0023] Figure 12 Fig. 10 shows a schematic diagram of a state of the haptic sensor provided by the third implementation of the fixed part, the moving part and the follower part when the haptic sensor is subjected to a force in a first direction according to an embodiment of the present application;

[0024] Figure 13 Fig. 11 shows a schematic diagram of a state of the haptic sensor provided by the third implementation of the fixed part, the moving part and the follower part when the haptic sensor is subjected to a force in a first direction according to an embodiment of the present application;

[0025] Figure 14 Fig. 12 shows a schematic diagram of a state of the haptic sensor provided by the third implementation of the fixed part, the moving part and the follower part when the haptic sensor is subjected to a force in a first direction according to an embodiment of the present application;

[0026] Figure 15 Fig. 13 shows a schematic diagram of a state of the haptic sensor provided by the third implementation of the fixed part, the moving part and the follower part when the haptic sensor is subjected to a force in a first direction according to an embodiment of the present application;

[0027] Figure 16 Fig. 14 shows a schematic diagram of a state of the haptic sensor provided by the third implementation of the fixed part, the moving part and the follower part when the haptic sensor is subjected to a force in a first direction according to an embodiment of the present application;

[0028] Figure 17A cross-sectional view of a tactile sensor at another position when subjected to a second directional force is shown, illustrating a third implementation of the fixed part, moving part, and follower part provided in an embodiment of this application.

[0029] Figure 18 This illustration shows a three-dimensional structural diagram of a tactile sensor in which a ring mounting plate is assembled with a follower part, representing a third implementation of the fixed part, moving part, and follower part provided in an embodiment of this application.

[0030] Figure 19 A three-dimensional structural schematic diagram of a third implementation of the follower provided in the embodiments of this application is shown.

[0031] Icons: 1. Fixed part; 2. Moving part; 3. Follow-up part; 4. Sensing element; 5. Annular elastic dielectric material; 6. Flexible protective layer; 7. Flexible substrate; 8. Pressure sensor; 101. Annular groove; 102. First guide groove; 103. First cylinder; 104. Second cylinder; 105. Fixed post; 201. First cylindrical mounting groove; 202. Annular limiting plate; 203. First housing; 204. Second housing; 301. Moving plate; 302. Guide rod; 401. First electrode plate; 402. Second electrode plate; a01. First Cylindrical mounting part; a02, first annular mounting plate; a021, second guide groove; a03, third housing; a04, fourth housing; b01, first end; b02, second end; b03, connecting part; c01, first moving block; c02, first limiting part; A01, second cylindrical mounting part; A02, fixed ball head; A03, second annular mounting plate; A031, third guide groove; 20, rotating part; B01, rotating ball groove; B02, first hemisphere; B03, second hemisphere; C01, second moving block; C02, second limiting part. Detailed Implementation

[0032] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0033] In addition, the terms "first", "second", "third", etc. are used only for descriptive purposes and do not connote or imply any relative importance or any meaning other than that of description. Thus, a feature described as "first" can imply or include one or more of the features described as "second" or "third". In the description of the application, the meaning of "a plurality" is two or more, unless explicitly specified and limited otherwise.

[0034] In the present application, unless specifically and particularly defined otherwise, the terms "mounting", "connecting", "connecting", "fixing" and the like should be understood in a broad sense, for example, they can be fixedly connected, or detachably connected, or integrally connected; they can be mechanically connected, or electrically connected; they can be directly connected, or indirectly connected through an intermediate medium, or the internal communication of two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0035] At present, when detecting force data, the tactile sensor calculates the force data according to the change of the distance between the two electrode plates of the tactile sensor or the change of the facing area of the two electrode plates, and judges the force direction according to the change of the capacitance of multiple groups of capacitors; but under the action of force, the electrode plate arranged in the tactile sensor is easy to tilt, and the tilted electrode plate will affect the accuracy of the tactile sensor in detecting force data.

[0036] Based on this, the following embodiments of the present application propose a tactile sensor, in which the fixed part and the moving part are slidingly connected, the follower part is arranged between the fixed part and the moving part, the follower part is slidingly connected with the fixed part and is limited in position; the first electrode plate and the second electrode plate in the sensing element are respectively arranged on the opposite surfaces of the fixed part and the follower part, when the tactile sensor contacts with the object, the moving part slides on the fixed part, driving the follower part to approach the fixed part; in this process, due to the limiting effect of the sliding connection between the follower part and the fixed part, the first electrode plate approaches the second electrode plate to keep the facing position between the first electrode plate and the second electrode plate unchanged, so that when the tactile sensor contacts with the object, only the distance between the two electrode plates in the tactile sensor will change, and the facing position of the first electrode plate and the second electrode plate is kept unchanged as much as possible, so that the error in data detection caused by the tilt of the electrode plate is avoided, and the accuracy of the capacitive tactile sensor in detecting force data is improved.

[0037] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the present application will be further described in detail below with reference to the drawings and embodiments.

[0038] Embodiments

[0039] This embodiment proposes a tactile sensor, including: a fixed part 1, a movable part 2, a follower part 3, a sensing element 4, and a flexible substrate 7.

[0040] The fixed part 1 is slidably connected to the movable part 2, and the follower part 3 is disposed between the fixed part 1 and the movable part 2. The follower part 3 is slidably connected to the fixed part 1 and the follower part 3 is limited; the flexible base 7 is fixedly connected to the bottom surface of the fixed part 1.

[0041] The sensing element 4 includes a first electrode plate 401 and a second electrode plate 402, which are respectively disposed on the opposing surfaces of the fixed part 1 and the follower part 3.

[0042] In the initial state, the follower 3 is in contact with the moving part 2.

[0043] Due to the limiting effect of the sliding connection between the follower part 3 and the fixed part 1, the first electrode plate 401 is kept close to the second electrode plate 402, and the facing position between the first electrode plate 401 and the second electrode plate 402 remains unchanged.

[0044] In this embodiment, the fixed part 1, the moving part 2, and the follower part 3 are implemented in three different ways. The three different implementations of the fixed part 1, the moving part 2, and the follower part 3 will be introduced one by one below.

[0045] See Figure 1 A partial cross-sectional view of a tactile sensor according to a first implementation of the fixed part, moving part, and follower part shown; see also Figure 2 shown Figure 1 Sectional view at AA, see Figure 3 The structural diagram of the first implementation of the fixing part shown is provided below. Figure 4 The schematic diagram of the first implementation of the moving part shown is provided below. Figure 5 The schematic diagram of the first implementation of the follower shown is available in the image. Figure 6 A schematic diagram of the state of a tactile sensor in the first implementation of the fixed part, moving part, and follower part when subjected to a first directional force; see also... Figure 7 A cross-sectional view of the tactile sensor at another position when subjected to a second directional force, showing the first implementation of the fixed part, moving part, and follower part, as shown, and see also... Figure 8 The diagram shows a tactile sensor with two sensing elements in a first implementation of the fixed part, moving part, and following part. In the first implementation of the fixed part, moving part, and following part of the tactile sensor proposed in this embodiment, the fixed part 1 includes: a first cylinder 103, a second cylinder 104, and a fixed post 105; wherein the diameter of the first cylinder 103 is larger than the diameter of the second cylinder 104.

[0046] One end of the fixed column 105 is fixedly connected with the first cylinder 103, and the other end is connected with the second cylinder 104, wherein the two surfaces of the second cylinder 104 opposite to the first cylinder 103 form an annular groove 101 with the circumferential surface of the fixed column 105.

[0047] Here, the annular groove 101 is coaxial with the fixed part 1.

[0048] A plurality of first guide grooves 102 are arranged on the circumferential surface of the second cylinder 104.

[0049] Among them, the circumferential surface of the fixed part 1 is centrally symmetric about the axis and is provided with a plurality of first guide grooves 102.

[0050] The moving part 2 comprises a first cylindrical mounting groove 201 and an annular limiting plate 202.

[0051] The annular limiting plate 202 is fixedly arranged on the inner side wall of the first cylindrical mounting groove 201.

[0052] Among them, the annular limiting plate 202 is located at the opening of the first cylindrical mounting groove 201.

[0053] The follower part 3 comprises a moving plate 301 and a guide rod 302, and the inner side of the moving plate 301 is provided with the guide rod 302; wherein the cross section of the moving plate 301 is arc-shaped.

[0054] The bottom surface of the first cylinder 103 is fixedly connected with the flexible substrate 7, the second cylinder 104 is installed in the first cylindrical mounting groove 201, the annular limiting plate 202 is arranged between the first cylinder 103 and the second cylinder 104, and the fixed column 105 is located in the annular limiting plate 202, so that the annular limiting plate 202 can slide in the annular groove 101, and under the limiting of the annular limiting plate 202 and the fixed column 105, the moving part 2 can slide in any direction of the end surface of the first cylinder 103.

[0055] The moving plate 301 is located between the second cylinder 104 and the first cylindrical mounting groove 201, the guide rod 302 extends into the first guide groove 102 and is in sliding connection with the first guide groove 102, the guide rod 302 can slide in the first guide groove 102 along the extension direction of the first guide groove 102, and then the moving plate 301 reciprocally slides along the first guide groove 102 under the action of the guide rod 302 and the first guide groove 102; so that the follower part 3 is in sliding connection with the fixed part 1 and limits the follower part 3.

[0056] In the initial state, the moving plate 301 away from the end surface of the first cylinder 103 is in contact with the first cylindrical mounting groove 201.

[0057] Specifically, the first electrode plate 401 is arranged on the end surface of the second cylinder 104, and the second electrode plate 402 is arranged on the circumferential surface of the second cylinder 104 opposite to the first electrode plate 401.

[0058] When the moving part 2 slides on the end surface of the first cylinder 103, the first cylindrical mounting groove 201 drives the moving plate 301 to approach the second cylinder 104; in this process, the first electrode plate 401 moves with the moving plate 301, and because the guide rod 302 can only slide in the first guide groove 102, the first electrode plate 401 can only approach the second electrode plate 402 with the moving plate 301, so that the opposite position of the first electrode plate 401 and the second electrode plate 402 remains unchanged. Thus, the accuracy of the measurement data of the capacitive sensing element in the tactile sensor is ensured.

[0059] The sensing element 4 can use capacitive sensing elements, but is not limited to: piezoresistive sensing elements and piezoelectric sensing elements.

[0060] The tactile sensor provided in the embodiment further comprises an annular elastic dielectric material 5, a flexible protective layer 6 and a pressure sensor 8.

[0061] The annular elastic dielectric material 5 is arranged between the first electrode plate 401 and the second electrode plate 402. Specifically, the annular elastic dielectric material 5 is located between the inner side wall of the moving plate 301 and the outer side wall of the second cylinder 104, and is fixedly connected with the inner side wall of the moving plate 301 and the outer side wall of the second cylinder 104, respectively.

[0062] The flexible protective layer 6 is wrapped on the outer surface of the first cylindrical mounting groove 201.

[0063] The pressure sensor 8 is fixedly arranged between the bottom surface of the first cylinder 103 and the flexible substrate 7.

[0064] The flexible substrate 7 can be uniformly provided with a plurality of tactile sensors, constituting an electronic skin, which can be used on the palm or fingers of a robot for force feedback when grabbing objects.

[0065] Further, in order to facilitate assembly, the first cylindrical mounting groove 201 can be divided into a first housing 203 and a second housing 204, and the first housing 203 and the second housing 204 can be detachably connected.

[0066] Further, the cross sections of the first guide groove 102 and the guide rod 302 are polygonal, so as to avoid relative rotation of the first guide groove 102 and the guide rod 302. In the embodiment, the cross sections of the first guide groove 102 and the guide rod 302 are "T" shaped.

[0067] Furthermore, the number of the first guide groove 102 and the guide rod 302 is the same, and the number is greater than or equal to three, that is, the number of sensing elements 4 is greater than or equal to three. In this embodiment, the number of sensing elements 4 is 4.

[0068] The reason why the number of designs is not 2 is, for example Figure 8 As shown: There are 2 sensing elements 4. When the tactile sensor is subjected to a force parallel to the N-axis, the displacement of the two opposite follower parts 3 located parallel to the M-axis is the same. This means that the capacitance change of the two opposite sensing elements 4 is the same. Therefore, it is impossible to determine whether the direction of the force on the tactile sensor is along the positive or negative direction of the N-axis. For a design with a set of sensing elements 4, it is even more impossible to determine the direction of the force on the sensor.

[0069] When the tactile sensor comes into contact with an object, the movable part 201 will slide on the top surface of the movable part 104. During the sliding process of the movable part 2, the inner wall of the movable part 2 will drive the follower part 3 to move. Due to the action of the first guide groove 102 and the guide rod 302, during the contact process between the tactile sensor and the object, the area of ​​the first electrode plate 401 and the second electrode plate 402 facing each other for the sensing element 4 remains unchanged. Therefore, by the change of capacitance between the first electrode plate 401 and the second electrode plate 402 corresponding to different parts, the change of distance between different parts can be known, and thus the magnitude and direction of the force on the tactile sensor in the horizontal direction can be obtained. For the pressure sensor 8, the magnitude of the force on the tactile sensor in the vertical direction can be obtained. Based on the above data, the magnitude and direction of the force F on the tactile sensor can be calculated. When the tactile sensor is separated from the object, the sensor will reset under the action of the annular elastic dielectric material 5.

[0070] See Figure 9 A partial cross-sectional view of a tactile sensor showing a second implementation of the fixed part, moving part, and follower part; see also... Figure 10 A schematic diagram of the state of the tactile sensor when subjected to a first directional force, showing the second implementation of the fixed part, moving part, and follower part. (See also...) Figure 11 A cross-sectional view of the tactile sensor at another position when subjected to a second directional force, illustrating the second implementation of the fixed part, moving part, and follower part shown. See also... Figure 12 A three-dimensional structural diagram of the second implementation of the fixing part is shown below. Figure 13 A three-dimensional structural diagram of the second implementation of the moving part is shown below. Figure 14 The schematic diagram of the second implementation of the follower part is shown. In the second implementation of the fixed part, moving part and follower part of the tactile sensor proposed in this embodiment, the fixed part 1 includes: a first cylindrical mounting part a01 and a first annular mounting plate a02.

[0071] The first annular mounting plate a02 is fixedly disposed on one side of the bottom surface of the first cylindrical mounting part a01. After installation, the first annular mounting plate a02 is parallel to the bottom surface of the first cylindrical mounting part a01 and there is a gap between them. The first annular mounting plate a02 is provided with a plurality of second guide grooves a021 on the end face inside the first cylindrical mounting part a01.

[0072] The moving part 2 is a stepped shaft that is large at both ends and small in the middle, with an inverted "I" shaped cross-section.

[0073] Specifically, the movable part 2 includes: a first end b01, a second end b02, and a connecting part b03 disposed between the first end b01 and the second end b02, wherein the diameter of the first end b01 is smaller than the diameter of the second end b02.

[0074] The follower part 3 includes: a first moving block c01 and a first limiting part c02.

[0075] The first moving block c01 has a fan-shaped cross-section, and a first limiting part c02 is fixedly provided on the bottom end face of the first moving block c01.

[0076] The movable part 2 is installed inside the fixed part 1. The bottom surface of the first cylindrical mounting part a01 is fixedly connected to the flexible base 7. The second end b02 is disposed on the top of the side wall of the first cylindrical mounting part a01. The first end b01 is located in the gap between the first annular mounting plate a02 and the inner bottom end of the first cylindrical mounting part a01 and can slide in the gap. Under the limitation of the gap between the first annular mounting plate a02 and the first cylindrical mounting part a01, the movable part 2 can slide in any direction on the inner bottom end of the first cylindrical mounting part a01.

[0077] The first moving block c01 is located between the side wall of the first cylindrical mounting part a01 and the connecting part b03. The first limiting part c02 is slidably connected to the second guide groove a021 on the upper end surface of the first annular mounting plate a02. When the first limiting part c02 slides in the second guide groove a021, the first moving block c01 can slide back and forth along the extension direction of the second guide groove a021. Thus, when the moving part 2 slides, it drives the first moving block c01 to approach the side wall of the first cylindrical mounting part a01. This allows the follower part 3 to slide and be limited by the fixed part 1.

[0078] In the initial state, the end face of the first moving block c01 away from the first cylindrical mounting part a01 is in contact with the connecting part b03.

[0079] Specifically, a second electrode plate 402 is provided on the end face of the first moving block c01 facing the first cylindrical mounting part a01, and a first electrode plate 401 is provided at the position opposite to the second electrode plate 402 on the first cylindrical mounting part a01.

[0080] When the moving part 2 can slide on the bottom surface of the first cylindrical mounting part a01, the first moving block c01 is driven to approach the first cylindrical mounting part a01; the second electrode plate 402 moves with the first moving block c01, and due to the limiting effect of the first limiting part c02 which can only slide within the first annular mounting plate a02, the second electrode plate 402 can only approach the first cylindrical mounting part a01 with the first moving block c01, and in this process, the facing position between the second electrode plate 402 and the first electrode plate 401 remains unchanged. In this way, the accuracy of the measurement data of the capacitive sensing element in the tactile sensor is ensured.

[0081] The tactile sensor provided in the embodiment comprises an annular elastic dielectric material 5, a flexible protective layer 6 and a pressure sensor 8.

[0082] The annular elastic dielectric material 5 is arranged between the first electrode plate 401 and the second electrode plate 402.

[0083] The flexible protective layer 6 is wrapped on the side surface outside of the first cylindrical mounting part a01 and the top of the second end part b02.

[0084] The pressure sensor 8 is fixedly arranged between the bottom surface of the first cylindrical mounting part a01 and the flexible substrate 7.

[0085] Here, a plurality of the tactile sensors can be uniformly arranged on the flexible substrate 7 to form an electronic skin which can be used on the palm or fingers of a robot for feedback of force when grabbing objects.

[0086] The first cylindrical mounting part a01 is divided into a third housing a03 and a fourth housing a04, and the third housing a03 and the fourth housing a04 are detachably connected.

[0087] When the tactile sensor contacts an object, the moving part 2 will slide in the gap formed between the first annular mounting plate a02 and the first cylindrical mounting part a01, and in the process of sliding, the outer side wall of the middle shaft of the moving part 2 will drive the follower part 3 to move. Due to the effect of the first limiting part c02 and the second guide groove a021, the facing area of the first electrode plate 401 and the second electrode plate 402 for the sensing element 4 remains unchanged during the process of the tactile sensor contacting the object. Therefore, the change of the distance of different parts can be known by the change of the capacitance between the first electrode plate 401 and the second electrode plate 402 corresponding to different parts, so that the size and direction of the horizontal force of the tactile sensor can be obtained. For the pressure sensor 8, the size of the vertical force of the tactile sensor can be obtained. According to the above data, the size and direction of the force F of the tactile sensor can be calculated. When the tactile sensor is separated from the object, the sensor will reset under the action of the annular elastic dielectric material 5.

[0088] Referring toFigure 15 Partial sectional view of the third implementation of the tactile sensor of the fixed part, the moving part and the following part, see Figure 16 State schematic diagram of the third implementation of the tactile sensor of the fixed part, the moving part and the following part when subjected to a first direction force, see Figure 17 Another position sectional view of the third implementation of the tactile sensor of the fixed part, the moving part and the following part when subjected to a second direction force, see Figure 18 Three-dimensional structure schematic diagram of the third implementation of the tactile sensor of the fixed part, the moving part and the following part, see Figure 19 Three-dimensional structure schematic diagram of the third implementation of the following part, in the third implementation of the tactile sensor of the fixed part, the moving part and the following part, the fixed part 1 comprises: a second cylindrical mounting part A01, a fixed ball head A02 and a second annular mounting plate A03.

[0089] The fixed ball head A02 is fixedly arranged at the inner bottom end middle part of the second cylindrical mounting part A01.

[0090] The second annular mounting plate A03 is fixedly arranged in the second cylindrical mounting part A01, the second annular mounting plate A03 is parallel to the bottom end surface of the second cylindrical mounting part A01, a plurality of third guide grooves A031 are uniformly arranged on the second annular mounting plate A03; the bottom surface of the second cylindrical mounting part A01 is fixedly connected with the flexible substrate 7.

[0091] The rotating part 20 is a sphere, the rotating part 20 is placed in the second cylindrical mounting part A01, a rotating ball groove B01 is arranged on the rotating part 20, the shape and size of the rotating ball groove B01 match the surface profile of the fixed ball head A02, the rotating ball groove B01 is in contact with the fixed ball head A02, so that the rotating part 20 can slide along the surface of the fixed ball head A02, and the rotating part 20 can rotate in any direction around the fixed ball head A02.

[0092] The following part 3 comprises: a second moving block C01 and a second limiting part C02 arranged at the bottom of the second moving block C01.

[0093] The second limiting part C02 is in sliding connection with the third guide groove A031, the second moving block C01 moves along the extension direction of the third guide groove A031 with the second limiting part C02 sliding in the third guide groove A031, the second limiting part C02 is arranged around the rotating part 20, so that when the rotating part 20 rotates to contact the second moving block C01, the second moving block C01 is pushed to move along the extension direction of the third guide groove A031 to the inner side wall of the second cylindrical mounting part A01; so that the following part 3 is in sliding connection with the fixed part 1 and the following part 3 is limited.

[0094] In the initial state, the end face of the second moving block C01 away from the inner wall of the second cylindrical mounting portion A01 is in contact with the outer wall of the rotating portion 20.

[0095] In the haptic sensor provided in the embodiment, the first electrode plate 401 is arranged on the end face of the second moving block C01 close to the inner wall of the second cylindrical mounting portion A01, and the second electrode plate 402 is arranged at the position of the inner wall of the second cylindrical mounting portion A01 opposite to the first electrode plate 401.

[0096] When the rotating portion 20 slides on the surface of the fixed ball head A02, the rotating portion 20 rotates around the fixed ball head A02, and when the rotating portion 20 in rotation contacts the second moving block C01, the second moving block C01 is driven to move along the extension direction of the third guide groove A031 to approach the inner wall of the second cylindrical mounting portion A01; in this process, the first electrode plate 401 moves with the second moving block C01, and due to the limiting effect of the second limiting portion C02 that can only slide in the third guide groove A031, the first electrode plate 401 can only approach the side wall of the second cylindrical mounting portion A01 with the second moving block C01, and in this process, the opposite position between the second electrode plate 402 and the first electrode plate 401 remains unchanged. The accuracy of the measurement data of the capacitive sensing element in the haptic sensor is ensured.

[0097] Further, the haptic sensor provided in the embodiment further comprises an annular elastic dielectric material 5, a flexible protective layer 6, and a pressure sensor 8.

[0098] The annular elastic dielectric material 5 is arranged between the first electrode plate 401 and the second electrode plate 402.

[0099] Specifically, the annular elastic dielectric material 5 is arranged between the inner circumferential side wall of the second cylindrical mounting portion A01 and the outer circumferential side wall of the second moving block C01, and is fixedly connected with the inner circumferential side wall of the second cylindrical mounting portion A01 and the outer circumferential side wall of the second moving block C01, respectively.

[0100] The pressure sensor 8 is fixedly arranged between the bottom surface of the second cylindrical mounting portion A01 and the flexible substrate 7. A plurality of haptic sensors provided in the embodiment can be uniformly arranged on the flexible substrate 7 to form an electronic skin, which can be used on the palm or fingers of a robot for feedback of force when grabbing objects.

[0101] The flexible protective layer 6 is further arranged at the opening of the second cylindrical mounting portion A01, and the inner wall of the flexible protective layer 6 is in contact with the outer wall of the rotating portion 20.

[0102] Further, in order to facilitate installation, the rotating portion 20 is divided into a first half ball B02 and a second half ball B03, and the first half ball B02 and the second half ball B03 are detachably connected.

[0103] When the touch sensor contacts the object, the flexible protective layer 6 will drive the rotating part 20 to rotate around the fixed ball head A02, and in the process of rotating, the rotating part 20 will drive the following part 3 to move. Due to the action of the second limiting part C02 and the third guide groove A031, the area of the first electrode plate 401 and the second electrode plate 402 facing each other of the sensing element 4 remains unchanged in the process of the touch sensor contacting the object. Therefore, the change of the distance of different parts can be known by the change of the capacitance between the first electrode plate 401 and the second electrode plate 402 corresponding to different parts, so that the size and direction of the force of the touch sensor in the horizontal direction can be obtained.

[0104] For the pressure sensor 8, the size of the force of the touch sensor in the vertical direction can be obtained. According to the above data, the size and direction of the force F of the touch sensor can be obtained by calculation. When the touch sensor is separated from the object, the sensor will reset under the action of the annular elastic dielectric material 5.

[0105] In summary, the touch sensor provided in the embodiment, in which the fixed part and the moving part are slidingly connected, the following part is arranged between the fixed part and the moving part, the following part is slidingly connected with the fixed part and is limited by the fixed part; the first electrode plate and the second electrode plate of the sensing element are arranged on the opposite surfaces of the fixed part and the following part, respectively. When the touch sensor contacts the object, the moving part slides on the fixed part and drives the following part to approach the fixed part. In this process, due to the limiting effect of the sliding connection between the following part and the fixed part, the first electrode plate approaches the second electrode plate to keep the facing position between the first electrode plate and the second electrode plate unchanged. Compared with the way that the electrode plate of the touch sensor in the related art is easily inclined under the action of the force when the touch sensor contacts the object, when the touch sensor contacts the object, only the distance between the two electrode plates of the touch sensor will change, and the facing position of the first electrode plate and the second electrode plate is kept unchanged as much as possible. Therefore, the error in data detection caused by the inclination of the electrode plate is avoided, and the precision of the capacitive touch sensor in detecting force data is improved.

[0106] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art can easily think of changes or replacements within the technical range disclosed in the present application, which should be covered in the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A tactile sensor characterized by, The utility model relates to a touch sensor, including: Fixed part (1), mobile part (2), follow-up part (3), sensing element (4) and flexible substrate (7); Fixed part (1) is connected with mobile part (2) sliding, follow-up part (3) is arranged between fixed part (1) and mobile part (2), follow-up part (3) is connected with fixed part (1) sliding and is positioned to follow-up part (3);Flexible substrate (7) is fixedly connected with the bottom surface of fixed part (1); Sensing element (4) includes: first electrode plate (401) and second electrode plate (402), first electrode plate (401) and second electrode plate (402) are arranged on the opposite surface of fixed part (1) and follow-up part (3) respectively; Wherein, in initial state, follow-up part (3) is contacted with mobile part (2); When mobile part (2) is sliding on fixed part (1), follow-up part (3) is driven to be close to fixed part (1);During this process, due to the limiting effect of sliding connection between follow-up part (3) and fixed part (1), the opposite position between first electrode plate (401) and second electrode plate (402) remains unchanged when first electrode plate (401) is close to second electrode plate (402); Fixed part (1) includes: first cylinder (103), second cylinder (104) and fixed column (105);Wherein, the diameter of first cylinder (103) is greater than the diameter of second cylinder (104); One end of fixed column (105) is fixedly connected with first cylinder (103), and the other end is connected with second cylinder (104), wherein the opposite two surfaces of second cylinder (104) and first cylinder (103) form annular groove (101) with the circumferential surface of fixed column (105); A plurality of guide grooves (102) are arranged on the circumferential surface of second cylinder (104).

2. The touch sensor of claim 1, wherein: Mobile part (2) includes: cylindrical mounting groove (201) and annular limiting plate (202); The annular limiting plate (202) is fixedly arranged on the inner side wall of the cylindrical mounting groove (201); Follow-up part (3) includes: follow-up plate (301) and guide rod (302), and the inner side of the follow-up plate (301) is provided with the guide rod (302);Wherein, the cross section of follow-up plate (301) is arc-shaped; The bottom surface of first cylinder (103) is fixedly connected with flexible substrate (7), second cylinder (104) is installed in cylindrical mounting groove (201), annular limiting plate (202) is arranged between first cylinder (103) and second cylinder (104), and fixed column (105) is located in annular limiting plate (202), so that annular limiting plate (202) can slide in annular groove (101), and under the limiting of annular limiting plate (202) and fixed column (105), mobile part (2) can slide in any direction of the end surface of first cylinder (103); The follow-up plate (301) is located between the second cylinder (104) and the cylindrical mounting groove (201), the guide rod (302) extends into the guide groove (102) and is in sliding connection with the guide groove (102), the guide rod (302) can slide in the guide groove (102) along the extension direction of the guide groove (102), and then the moving plate (301) reciprocally slides along the guide groove (102) under the action of the guide rod (302) and the guide groove (102); so that the follow-up part (3) is in sliding connection with the fixed part (1) and limits the follow-up part (3); In the initial state, the end face of the follow-up plate (301) away from the first cylinder (104) is in contact with the cylindrical mounting groove (201).

3. The tactile sensor according to claim 2, wherein The first electrode plate (401) is arranged on the end face of the moving plate (301) facing the second cylinder (104), and the second electrode plate (402) is arranged on the circumferential surface of the second cylinder (104) opposite to the first electrode plate (401); When the moving part (2) slides on the end face of the first cylinder (103), the cylindrical mounting groove (201) drives the moving plate (301) to approach the second cylinder (104); in this process, the first electrode plate (401) moves with the moving plate (301), and due to the limiting effect of the guide rod (302) which can only slide in the guide groove (102), the first electrode plate (401) can only approach the second electrode plate (402) with the moving plate (301), so that the opposite position of the first electrode plate (401) and the second electrode plate (402) remains unchanged.

4. The tactile sensor according to claim 2, characterized by Further comprising: annular elastic dielectric material (5), flexible protective layer (6) and pressure sensor (8); The annular elastic dielectric material (5) is arranged between the first electrode plate (401) and the second electrode plate (402); The flexible protective layer (6) is coated on the outer surface of the cylindrical mounting groove (201); The pressure sensor (8) is fixedly arranged between the bottom surface of the first cylinder (103) and the flexible substrate (7).

5. The tactile sensor according to claim 1, characterized by, The fixed part (1) comprises a first cylindrical mounting part (a01) and an annular mounting plate (a02); The annular mounting plate (a02) is fixedly arranged on the bottom surface side of the first cylindrical mounting part (a01), the annular mounting plate (a02) is parallel to the bottom surface of the first cylindrical mounting part (a01) after installation, and there is a gap between the two, and a plurality of guide grooves (a021) are formed in the end surface of the first cylindrical mounting part (a01); The moving part (2) comprises a first end part (b01), a second end part (b02) and a connecting part (b03) arranged between the first end part (b01) and the second end part (b02), wherein the diameter of the first end part (b01) is smaller than the diameter of the second end part (b02); The follow-up part (3) comprises a first moving block (c01) and a first limiting part (c02); The cross section of the first moving block (c01) is a sector, and the limiting part (c02) is fixedly arranged on the bottom end surface of the first moving block (c01). The moving part (2) is installed inside the fixed part (1), the bottom surface of the first cylindrical mounting part (a01) is fixedly connected with the flexible substrate (7), the second end part (b02) is arranged at the top of the side wall of the first cylindrical mounting part (a01), the first end part (b01) is located in the gap between the annular mounting plate (a02) and the inner bottom end of the first cylindrical mounting part (a01) and can slide in the gap, and the moving part (2) can slide in any direction on the inner bottom end of the cylindrical mounting groove (a01) under the limitation of the gap between the annular mounting plate (a02) and the first cylindrical mounting part (a01); The first moving block (c01) is located between the side wall of the first cylindrical mounting part (a01) and the connecting part (b03), the first limiting part (c02) is slidably connected with the guide groove (a021) on the upper end surface of the annular mounting plate (a02), and the first moving block (c01) can reciprocate along the extension direction of the guide groove (a021) in the case that the first limiting part (c02) slides in the guide groove (a021), so that the first moving block (c01) is driven to approach the side wall of the first cylindrical mounting part (a01) when the moving part (2) slides, and the follow-up part (3) is slidably connected with the fixed part (1) and is limited. In the initial state, the end surface of the first moving block (c01) away from the first cylindrical mounting part (a01) is in contact with the connecting part (b03).

6. The tactile sensor according to claim 5, wherein The end surface of the first moving block (c01) towards the first cylindrical mounting part (a01) is provided with a second electrode plate (402), and the position opposite to the second electrode plate (402) of the first cylindrical mounting part (a01) is provided with a first electrode plate (401); When the moving part (2) can slide on the bottom surface of the first cylindrical mounting part (a01), the first moving block (c01) is driven to approach the first cylindrical mounting part (a01); the second electrode plate (402) moves with the first moving block (c01), and due to the limiting effect of the fact that the first limiting part (c02) can only slide in the annular mounting plate (a02), the second electrode plate (402) can only approach the first cylindrical mounting part (a01) with the first moving block (c01), and the opposite position between the second electrode plate (402) and the first electrode plate (401) is kept unchanged in the process.

7. The tactile sensor according to claim 5, wherein The annular elastic dielectric material (5), the flexible protective layer (6) and the pressure sensor (8); The annular elastic dielectric material (5) is arranged between the first electrode plate (401) and the second electrode plate (402); The flexible protective layer (6) is wrapped outside the side surface of the first cylindrical mounting part (a01) and the top of the second end part (b02); The pressure sensor (8) is fixedly arranged between the bottom surface of the first cylindrical mounting part (a01) and the flexible substrate (7).

8. The tactile sensor of claim 1, wherein, The fixed part (1) comprises a second cylindrical mounting part (A01), a fixed ball head (A02) and an annular mounting plate (A03); The fixed ball head (A02) is fixedly arranged at the middle part of the inner bottom end of the second cylindrical mounting part (A01); The fixed ball head (A02) is fixedly arranged at the middle part of the inner bottom end of the second cylindrical mounting part (A01); The annular mounting plate (A03) is fixedly arranged in the second cylindrical mounting portion (A01), the annular mounting plate (A03) is parallel to the bottom end surface of the second cylindrical mounting portion (A01), and a plurality of guide grooves (A031) are uniformly arranged on the annular mounting plate (A03); the bottom surface of the second cylindrical mounting portion (A01) is fixedly connected with the flexible substrate (7); The rotating part (2) is a sphere, the rotating part (2) is arranged in the cylindrical mounting groove (A01), the rotating part (2) is provided with a rotating ball groove (B01), the shape and size of the rotating ball groove (B01) are matched with the surface profile of the fixed ball head (A02), the rotating ball groove (B01) is in contact with the fixed ball head (A02), so that the rotating part (2) can slide along the surface of the fixed ball head (A02), and the rotating part (2) can rotate in any direction around the fixed ball head (A02); The following part (3) comprises a second moving block (C01) and a second limiting portion (C02) arranged at the bottom of the second moving block (C01); The second limiting portion (C02) is in sliding connection with the guide groove (A031), the second moving block (C01) moves along the extension direction of the guide groove (A031) along with the second limiting portion (C02) sliding in the guide groove (A031), the second limiting portion (C02) is arranged around the rotating part (2), so that when the rotating part (2) rotates to be in contact with the second moving block (C01), the second moving block (C01) is pushed to move along the extension direction of the guide groove (A031) and approach the inner side wall of the second cylindrical mounting portion (A01), so that the following part (3) is in sliding connection with the fixed part (1) and limits the following part (3); In the initial state, the end surface of the second moving block (C01) away from the inner wall of the second cylindrical mounting portion (A01) is in contact with the outer wall of the rotating part (2).

9. The tactile sensor according to claim 8, characterized by The end surface of the second moving block (C01) close to the inner wall of the second cylindrical mounting portion (A01) is provided with a first electrode plate (401), and the position opposite to the first electrode plate (401) on the inner wall of the second cylindrical mounting portion (A01) is provided with a second electrode plate (402); When the rotating part (2) slides on the surface of the fixed ball head (A02), the rotating part (2) rotates around the fixed ball head (A02), when the rotating rotating part (2) is in contact with the second moving block (C01), the second moving block (C01) is driven to move along the extension direction of the guide groove (A031) and approach the inner side wall of the second cylindrical mounting portion (A01), in this process, the first electrode plate (401) moves along with the second moving block (C01), because the second limiting portion (C02) can only slide in the guide groove (A031) to limit the movement, the first electrode plate (401) can only approach the side wall of the second cylindrical mounting portion (A01) along with the second moving block (C01), and in this process, the opposite position between the second electrode plate (402) and the first electrode plate (401) remains unchanged.

10. The tactile sensor of claim 8, wherein, Further comprising: An annular elastic dielectric material (5), a flexible protective layer (6) and a pressure sensor (8); An annular elastic dielectric material (5) is arranged between the first electrode plate (401) and the second electrode plate (402); A pressure sensor (8) is fixedly arranged between the bottom surface of the second cylindrical mounting portion (A01) and the flexible substrate (7); The opening of the second cylindrical mounting portion (A01) is further provided with a flexible protective layer (6), and the inner wall of the flexible protective layer (6) is in contact with the outer wall of the rotating portion (2).

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