Sample transfer device and vacuum interconnection system

Abstract

The invention discloses a sample transfer device and a vacuum interconnection system, and the sample transfer device comprises a transfer chamber which comprises a feed port and a discharge port; the transfer table is arranged in the transfer chamber; the first operating rod is movably arranged in the transfer chamber in the first direction; the second operating rod is movably arranged in the transfer chamber in the second direction; the feeding cavity is communicated with the feeding hole and is opposite to the first operating rod; the discharging cavity is communicated with the discharging opening and is opposite to the second operating rod; the sample support is movably arranged in the transfer chamber and is used for placing a sample; and the pressing sheet is movably arranged in the transfer chamber and is used for pressing the sample. According to the invention, through the cooperative arrangement of the pressing sheet and the sample holder, a sample in the sample holder can be tightly pressed, and through the arrangement of the first operating rod and the second operating rod, the sample and the pressing sheet can be reliably and smoothly transferred into the deposition equipment, so that the position deviation of the sample in the deposition equipment in the later period is prevented, and the generation of defective deposition products is effectively avoided.

Description

Technical Field

[0001] The present invention belongs to the technical field of vacuum interconnection systems, and particularly relates to a sample transfer device and a vacuum interconnection system. Background Art

[0002] The vacuum interconnection system creates a fully vacuum environment, maximally excluding the adverse effects caused by the atmosphere, and organically interconnecting material growth, device processes, and test analysis. It is a powerful tool from basic research to industrial transformation. The dual-chamber MBE device has the advantages of being able to epitaxially grow a variety of III-V group semiconductors, being able to simultaneously perform epitaxial growth, having high epitaxial control accuracy, having many real-time monitoring devices, and having few impurities. It is suitable for growing devices with distinct growth interfaces and high component control accuracy, and is crucial for epitaxial film-making technology. When the MBE device is in use, it rotates along its axis. When a sample is introduced into the MBE device using a conventional sample transfer device, it is easy to cause the sample to shift in position in the MBE device, resulting in poor final epitaxial growth effects or even inability to perform epitaxial growth.

[0003] Therefore, in view of the above technical problems, it is necessary to provide a sample transfer device and a vacuum interconnection system. Summary of the Invention

[0004] In view of this, the purpose of the present invention is to provide a sample transfer device.

[0005] In order to achieve the above purpose, the technical solution provided by an embodiment of the present invention is as follows:

[0006] A sample transfer device, the sample transfer device comprising:

[0007] A transfer chamber, the transfer chamber comprising a feed inlet and a discharge outlet;

[0008] A transfer table, disposed in the transfer chamber;

[0009] A first operating rod, movably disposed in the transfer chamber along a first direction;

[0010] A second operating rod, movably disposed in the transfer chamber along a second direction;

[0011] A feed chamber, communicating with the feed inlet and disposed opposite to the first operating rod;

[0012] A discharge chamber, communicating with the discharge outlet and disposed opposite to the second operating rod;

[0013] A sample holder, movably disposed in the transfer chamber for placing a sample;

[0014] A pressing piece, movably disposed in the transfer chamber for pressing the sample.

[0015] In one embodiment, driven by the first operating rod and the second operating rod, the sample transfer device switches between a first state and a second state; in the first state, a sample is placed on the sample holder and separated from the transfer table, and the pressing piece is arranged on the second operating rod; in the second state, the sample holder is arranged on the transfer table, the pressing piece is arranged on the sample, and both the pressing piece and the sample are located on the second operating rod.

[0016] In one embodiment, the sample holder includes a mounting portion and a receiving portion connected to the transfer table, and a receiving cavity for placing a sample is formed in the receiving portion; the receiving portion is provided with a first side wall and a second side wall along the short axis direction, the receiving cavity is provided with a third side wall and a fourth side wall along the long axis direction, the distance from the first side wall to the axis of the sample holder is L1, the distance from the second side wall to the axis of the sample holder is L2, the distance from the third side wall to the axis of the sample holder is L3, and the distance from the fourth side wall to the axis of the sample holder is L4, satisfying: L1 < L3, L1 < L4, L2 < L3, L2 < L4.

[0017] In one embodiment, the receiving portion includes a bottom connected to the mounting portion and two limiting portions arranged on the bottom, and the bottom and the two limiting portions enclose to form a receiving cavity, a limiting groove is arranged on the limiting portion, and a limiting convex block matched with the limiting groove is arranged on the pressing piece.

[0018] In one embodiment, the second operating rod includes a first rod portion, and a first arm portion and a second arm portion which are rotatably installed on the first rod portion and are oppositely arranged, the first arm portion extends downward to be provided with a first claw portion, and the second arm portion extends downward to be provided with a second claw portion; the second operating rod includes a closed state and an open state, in the closed state, the minimum distance between the first claw portion and the second claw portion is greater than the distance between the first side wall and the second side wall and less than the distance between the inner walls of the two limiting portions, and in the open state, the minimum distance between the first claw portion and the second claw portion is greater than the distance between the inner walls of the two limiting portions.

[0019] In one embodiment, a chamfer is arranged on the limiting portion; and / or,

[0020] A protrusion is arranged on the bottom, the distance between the end face of the protrusion away from the mounting portion and the end face of the limiting portion away from the mounting portion is less than the thickness of the sample, and the distance between the end face of the protrusion away from the mounting portion and the end face of the limiting groove facing the mounting portion is greater than or equal to the thickness of the sample.

[0021] In one embodiment, one of the mounting portion and the transfer table is provided with a mounting groove, and the other is provided with a mounting convex block matched with the mounting groove.

[0022] In one embodiment, a contact block is provided on the outer sidewall of the installation part. The first operating rod includes a second rod part, and a third arm part and a fourth arm part which are oppositely arranged and installed on the second rod part. A first contact groove which is matched with the contact block is provided on the third arm part, and a second contact groove which is matched with the contact block is provided on the fourth arm part.

[0023] In one embodiment, the distance between the third arm part and the fourth arm part is greater than the width of the transfer table.

[0024] The technical solution provided by another embodiment of the present invention is as follows:

[0025] A vacuum interconnection system, the vacuum interconnection system includes:

[0026] A deposition device;

[0027] The sample transfer device as described above, and the discharge chamber of the sample transfer device is communicated with the deposition device.

[0028] The present invention has the following beneficial effects:

[0029] The present invention provides a sample transfer device and a vacuum interconnection system. Through the cooperative setting of the pressing sheet and the sample holder, the sample located in the sample holder can be pressed tightly, and through the settings of the first operating rod and the second operating rod, the sample and the pressing sheet can be reliably and smoothly transferred into the deposition device, preventing the sample from shifting in position in the deposition device in the later stage, and effectively avoiding the generation of defective deposition products. Description of the Drawings

[0030] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments recorded in the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0031] Figure 1 It is a partial structural schematic diagram of the sample transfer device in a specific embodiment of the present invention;

[0032] Figure 2 It is a partial structural schematic diagram of a part of the sample transfer device in a specific embodiment of the present invention;

[0033] Figure 3 For Figure 2 The enlarged view of the partial structure at A in

[0034] Figure 4 It is a three-dimensional structural schematic diagram of the sample holder in a specific embodiment of the present invention;

[0035] Figure 5 The top view structural diagram of the tablet in a specific embodiment of the present invention;

[0036] Figure 6 The three-dimensional structural diagram of a partial structure of the second operating rod in a specific embodiment of the present invention;

[0037] Figure 7 The three-dimensional structural diagram of a partial structure of the first operating rod in a specific embodiment of the present invention. Detailed implementation manners

[0038] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some but not all of the embodiments of the present invention. Usually, the components of the embodiments of the present invention described and illustrated in the accompanying drawings here can be arranged and designed in various different configurations.

[0039] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed present invention, but merely represents selected embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the scope of protection of the present invention.

[0040] It should be noted that: similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0041] In the description of the embodiments of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship when the product of this application is normally placed, or the orientation or positional relationship commonly understood by those skilled in the art. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as a limitation to the present invention.

[0042] In the description of the embodiments of the present invention, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "installed", "connected", and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0043] In the description of the embodiments of the present invention, it should also be noted that the terms "first", "second", etc. used herein do not particularly refer to the order or sequence, nor are they used to limit the present case. They are only used to distinguish components or operations described with the same technical terms.

[0044] It should be noted that, without conflict, the embodiments in the present invention and the features in the embodiments can be combined with each other.

[0045] Next, the technical solutions in the present invention will be described with reference to the accompanying drawings.

[0046] Refer to Figures 1 to 3 As shown, the sample transfer device in a specific embodiment of the present invention includes: a transfer chamber 1, a transfer table 2, a first operating rod 3, a second operating rod 4, a feed chamber 5, a discharge chamber 6, a sample holder 7, and a pressing piece 8. Among them, the transfer chamber 1 includes a feed port and a discharge port; the transfer table 2 is disposed in the transfer chamber 1; the feed chamber 5 is communicated with the feed port and is disposed opposite to the first operating rod 3; the discharge chamber 6 is communicated with the discharge port and is disposed opposite to the second operating rod 4; the sample holder 7 is movably disposed in the transfer chamber 1 for placing the sample 700; the pressing piece 8 is movably disposed in the transfer chamber 1 for pressing the sample 700; the first operating rod 3 is movably disposed in the transfer chamber 1 along a first direction for moving the sample holder 7 from the feed chamber 5 to the transfer table 2; the second operating rod 4 is movably disposed in the transfer chamber 1 along a second direction for moving the sample 700 and the pressing piece 8 from the transfer table 2 to the discharge chamber 6.

[0047] It can be understood that the sample holder 7 with the sample 700 placed thereon can be moved from the feed chamber 5 to the transfer table 2 through the first operating rod 3, and the pressing piece 8 initially located on the second operating rod 4 can be placed on the sample 700 on the sample holder 7 through the second operating rod 4, and then the sample 700 together with the pressing piece 8 can be moved to the discharge chamber 6 through the second operating rod 4. According to this design, it is possible to prevent the sample 700 from shifting in position during the transfer of the sample 700.

[0048] Specifically, the sample transfer device in this embodiment switches between the first state and the second state by driving the first operating rod 3 and the second operating rod 4; in the first state, the sample holder 7 is placed with the sample 700 and is separated from the transfer table 2, and the pressing sheet 8 is arranged on the second operating rod 4; in the second state, the sample holder 7 is arranged on the transfer table 2, the pressing sheet 8 is arranged on the sample 700, and the pressing sheet 8 and the sample 700 are both located on the second operating rod 4. Preferably, a first receiving cavity is formed on the first operating rod 3 in this embodiment, and the cross section of the first receiving cavity matches the cross section of the bottom 721 of the sample holder 7, and a second receiving cavity is formed on the second operating rod 4, and the cross section of the second receiving cavity matches the cross section of the sample 700 and the cross section of the pressing sheet 8. According to this design, when using the first operating rod 3 to transfer the sample holder 7 on which the sample 700 is placed, the sample holder 7 can be prevented from detaching or even falling from it; when using the second operating rod 4 to transfer the pressing sheet 8 or the pressing sheet 8 and the sample 700, the pressing sheet 8 or the pressing sheet 8 and the sample 700 can be prevented from detaching or even falling from it, thereby ensuring the operational reliability of the transfer process.

[0049] In order to facilitate placing the tablet 8 through the second operating rod 4 and to facilitate picking up the sample 700 and the tablet 8 through the second operating rod 4, refer to Figure 4 As shown, the sample holder 7 in this embodiment includes a mounting portion 71 and a receiving portion 72 connected to the transfer table 2, and a receiving cavity for placing the sample 700 is formed in the receiving portion 72; the receiving portion 72 is provided with a first side wall 7201 and a second side wall 7202 along the short axis direction, and the receiving cavity is provided with a third side wall 7203 and a fourth side wall 7204 along the long axis direction, the distance from the first side wall 7201 to the axis of the sample holder 7 is L1, the distance from the second side wall 7202 to the axis of the sample holder 7 is L2, the distance from the third side wall 7203 to the axis of the sample holder 7 is L3, and the distance from the fourth side wall 7204 to the axis of the sample holder 7 is L4, satisfying: L1<L3, L1<L4, L2<L3, L2<L4. Specifically, on a plane perpendicular to the axis of the sample holder 7, the projection of the receiving portion 72 presents an axisymmetric figure, and the axis of symmetry coincides with the long axis of the receiving portion 72 (i.e., L1=L2<L3=L4 is satisfied), and the first side wall 7201 and the second side wall 7202 are parallel to the axis of symmetry, and the third side wall 7203 and the fourth side wall 7204 are located on the same cylindrical surface. This structure is convenient for processing and molding. Of course, the present invention is not limited to this, and it can also be an asymmetric structure, as long as L1<L3, L1<L4, L2<L3, L2<L4 are satisfied.

[0050] In order to ensure that the pressing sheet 8 can be aligned with the sample 700 when it is transferred from the second operating rod 4 to the sample 700 on the sample holder 7, so as to facilitate the compression of the sample 700, refer to Figures 3 to 5As shown in the figure, the receiving portion 72 in this embodiment includes a bottom 721 connected to the mounting portion 71 and two limiting portions 722 provided on the bottom 721. The bottom 721 and the two limiting portions 722 enclose a receiving cavity. A limiting groove 7221 is provided on the limiting portion 722, and a limiting protrusion 81 cooperating with the limiting groove 7221 is provided on the pressing piece 8. When the limiting groove 7221 and the limiting protrusion 81 cooperate, the pressing piece 8 can be accurately located directly above the sample 700, and the sample 700 can be completely covered and pressed by the pressing piece 8.

[0051] Furthermore, with reference to Figure 6 As shown in the figure, the second operating rod 4 in this embodiment includes a first rod portion 41, and a first arm portion 42 and a second arm portion 43 that are rotatably mounted on the first rod portion 41 and are oppositely arranged. The first arm portion 42 extends downward to be provided with a first claw portion 421, and the second arm portion 43 extends downward to be provided with a second claw portion 431; the second operating rod 4 includes a closed state and an open state. In the closed state, the minimum distance between the first claw portion 421 and the second claw portion 431 is greater than the distance between the first side wall 7201 and the second side wall 7202 and less than the distance between the inner walls of the two limiting portions 722. In the open state, the minimum distance between the first claw portion 421 and the second claw portion 431 is greater than the distance between the inner walls of the two limiting portions 722. According to this design, when the second operating rod 4 is in the closed state, the pressing piece 8 can be firmly grasped, and the pressing piece 8 can be firmly placed on the first claw portion 421 and the second claw portion 431. When the second operating rod 4 is in the open state, the pressing piece 8 can smoothly fall from the second operating rod 4 and be placed on the sample 700 to press the sample 700.

[0052] Optionally, with reference to Figure 4 As shown in the figure, a chamfer 7222 is provided on the limiting portion 722 in this embodiment. When the pressing piece 8 falls from the second operating rod 4 and lands on the sample 700, through the design of the chamfer 7222, it is convenient for the pressing piece 8 to be accurately positioned and can play a guiding role to move the pressing piece 8 to an accurate position.

[0053] Optionally, in order to ensure that at least a part of the limiting protrusion 81 of the pressing piece 8 can be located in the limiting groove 7221, with reference to Figure 4 As shown in the figure, a protrusion 7211 is provided on the bottom 721 in this embodiment. The distance between the end face of the protrusion 7211 away from the mounting portion 71 and the end face of the limiting portion 722 away from the mounting portion 71 is less than the thickness of the sample 700, and the distance between the end face of the protrusion 7211 away from the mounting portion 71 and the end face of the limiting groove 7221 facing the mounting portion 71 is greater than or equal to the thickness of the sample 700. According to this design, when the sample 700 is placed in the sample holder 7 and the pressing piece 8 presses on the sample 700, while the lower surface of the pressing piece 8 abuts against the upper surface of the sample 700, the limiting protrusion 81 of the pressing piece 8 and the limiting groove 7221 of the limiting portion 722 can be engaged to ensure that the position where the pressing piece 8 falls is in place.

[0054] Among them, in order to move the sample carrier 7 with the sample 700 placed thereon from the feeding chamber 5 to the transfer table 2 through the first operating rod 3, refer to Figure 3 、 Figure 4 As shown, in this embodiment, one of the mounting portion 71 and the transfer table 2 is provided with a mounting groove (not shown in the drawings), and the other is provided with a mounting protrusion 711 that cooperates with the mounting groove.

[0055] In order to facilitate the transfer of the sample carrier 7 through the first operating rod 3, refer to Figure 4 、 Figure 7 As shown, the outer side wall of the mounting portion 71 in this embodiment is provided with an abutting block 712. The first operating rod 3 includes a second rod portion 31 and a third arm portion 32 and a fourth arm portion 33 that are oppositely arranged and mounted on the second rod portion 31. The third arm portion 32 is provided with a first abutting groove 321 that cooperates with the abutting block 712, and the fourth arm portion 33 is provided with a second abutting groove 331 that cooperates with the abutting block 712. When the first operating rod 3 grabs the sample carrier 7, both the first abutting groove 321 and the second abutting groove 331 abut against the abutting block 712, thereby preventing the sample carrier 7 from detaching from the first operating rod 3 when transferring the sample carrier 7.

[0056] Furthermore, refer to Figure 7 and in combination with Figure 4 As shown, the distance between the third arm portion 32 and the fourth arm portion 33 in this embodiment is greater than the width of the transfer table 2. According to this design, when the mounting groove and the mounting protrusion 711 cooperate, the first operating rod 3 can avoid colliding with the transfer table 2, and after the sample carrier 7 is placed on the transfer table 2 in good condition, the first operating rod 3 can move away from the sample carrier 7.

[0057] Another embodiment of the present invention also discloses a vacuum interconnection system (not shown in the drawings). The vacuum interconnection system in another embodiment includes: a deposition device and the sample transfer device as described above, and the discharge chamber 6 of the sample transfer device is connected to the deposition device. The deposition device such as an MBE device can transfer the sample 700 and the pressing sheet 8 pressed on the sample 700 into the MBE device through the second operating rod 4, so as to prevent the sample 700 from shifting in position under the action of centrifugal force when the MBE device rotates.

[0058] It can be seen from the above technical solutions that the present invention has the following beneficial effects:

[0059] The present invention provides a sample transfer device and a vacuum interconnection system. Through the cooperative setting of the pressing sheet and the sample carrier, the sample located in the sample carrier can be pressed tightly, and through the setting of the first operating rod and the second operating rod, the sample and the pressing sheet can be reliably and smoothly transferred into the deposition device, preventing the sample from shifting in position in the deposition device later and effectively avoiding the generation of defective deposition products.

[0060] It is obvious to those skilled in the art that the present invention is not limited to the details of the above-described exemplary embodiments, and that the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention. Therefore, in any aspect, the embodiments should be regarded as exemplary and non-restrictive. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present invention. Any reference signs in the claims should not be construed as limiting the claims involved.

[0061] In addition, it should be understood that although this specification is described in terms of embodiments, not every embodiment contains only one independent technical solution. This narrative style of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A sample transfer device, characterized in that, The sample transfer device includes: A transfer chamber, which includes a feed inlet and a discharge outlet; A transfer table disposed in the transfer chamber; A first operating rod movably disposed in the transfer chamber along a first direction; A second operating rod movably disposed in the transfer chamber along a second direction; A feed chamber communicating with the feed inlet and oppositely disposed with respect to the first operating rod; A discharge chamber communicating with the discharge outlet and oppositely disposed with respect to the second operating rod; A sample holder movably disposed in the transfer chamber for placing a sample; A pressing piece movably disposed in the transfer chamber for pressing the sample.

2. The sample transfer device according to claim 1, characterized in that, Driven by the first operating rod and the second operating rod, the sample transfer device switches between a first state and a second state; in the first state, a sample is placed on the sample holder and separated from the transfer table, and the pressing piece is disposed on the second operating rod; in the second state, the sample holder is disposed on the transfer table, the pressing piece is disposed on the sample, and both the pressing piece and the sample are located on the second operating rod.

3. The sample transfer device according to claim 1, characterized in that, The sample holder includes a mounting portion connected to the transfer table and a receiving portion, and a receiving cavity for placing a sample is formed in the receiving portion; the receiving portion is provided with a first side wall and a second side wall along the short axis direction, the receiving cavity is provided with a third side wall and a fourth side wall along the long axis direction, the distance from the first side wall to the axis of the sample holder is L1, the distance from the second side wall to the axis of the sample holder is L2, the distance from the third side wall to the axis of the sample holder is L3, and the distance from the fourth side wall to the axis of the sample holder is L4, satisfying: L1 < L3, L1 < L4, L2 < L3, L2 < L4.

4. The sample transfer device according to claim 3, wherein The receiving portion includes a bottom connected to the mounting portion and two limiting portions disposed on the bottom, and the bottom and the two limiting portions enclose to form a receiving cavity. The limiting portions are provided with limiting grooves, and the pressing piece is provided with limiting protrusions cooperating with the limiting grooves.

5. The sample transfer device according to claim 4, characterized in that, The second operating rod includes a first rod portion, and a first arm portion and a second arm portion rotatably mounted on the first rod portion and oppositely disposed. The first arm portion extends downward to be provided with a first claw portion, and the second arm portion extends downward to be provided with a second claw portion; the second operating rod includes a closed state and an open state. In the closed state, the minimum distance between the first claw portion and the second claw portion is greater than the distance between the first side wall and the second side wall and less than the distance between the inner walls of the two limiting portions. In the open state, the minimum distance between the first claw portion and the second claw portion is greater than the distance between the inner walls of the two limiting portions.

6. The sample transfer device according to claim 4, wherein The limiting portion is provided with a chamfer; and / or The bottom is provided with a protrusion. The distance between the end face of the protrusion away from the mounting portion and the end face of the limiting portion away from the mounting portion is less than the thickness of the sample, and the distance between the end face of the protrusion away from the mounting portion and the end face of the limiting groove facing the mounting portion is greater than or equal to the thickness of the sample.

7. The sample transfer device according to claim 3, characterized in that, One of the mounting portion and the transfer table is provided with a mounting groove, and the other is provided with a mounting protrusion cooperating with the mounting groove.

8. The sample transfer device according to claim 3, wherein An abutting block is provided on the outer side wall of the installation part. The first operating rod includes a second rod part, and a third arm part and a fourth arm part which are oppositely arranged and mounted on the second rod part. A first abutting groove cooperating with the abutting block is provided on the third arm part, and a second abutting groove cooperating with the abutting block is provided on the fourth arm part.

9. The sample transfer device according to claim 8, characterized in that, The distance between the third arm part and the fourth arm part is greater than the width of the transfer table.

10. A vacuum interconnection system, characterized in that, The vacuum interconnection system includes: A deposition device; The sample transfer device according to any one of claims 1 to 9, wherein the discharge chamber of the sample transfer device is communicated with the deposition device.

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