High-speed centrifugal vacuum pump with cleaning function

Abstract

The invention discloses a high-speed centrifugal vacuum pump with a cleaning function, and relates to the technical field of vacuum pumps. The device comprises a supporting seat, a vacuum pump mechanism is arranged at the top of the supporting seat, a driving mechanism is arranged on the right side of the vacuum pump mechanism, and a medium discharge pipe is arranged at the top of the vacuum pump mechanism; an anti-damage device is arranged on the left side of the vacuum pump mechanism, an anti-erosion device is arranged in the anti-damage device, and an efficiency improving device is arranged on the inner side of the anti-erosion device; the anti-damage device comprises a medium conveying mechanism. Media for maintenance of the vacuum pump mechanism are filtered and purified through the filter plate, it is avoided that a large number of particles are carried when external air is input into the vacuum pump mechanism, the cleanliness of the cleaning media is guaranteed, meanwhile, the particles are prevented from being attached to mechanical parts in the vacuum pump mechanism, and the blockage and damage phenomena caused by particle deposition are prevented; operation efficiency reduction of the vacuum pump mechanism is avoided.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum pumps, and particularly to a high-speed centrifugal vacuum pump with a cleaning function. Background Art

[0002] With the continuous update of the semiconductor technology field and the gradual reduction of the manufacturing size of integrated circuits, the technology for cleaning the inside of a vacuum pump has also been continuously updated and improved. When cleaning the inside of a common existing vacuum pump, it is necessary to disassemble the vacuum pump for maintenance, which brings inconvenience to the maintenance of the equipment.

[0003] The patent with the patent announcement number CN220611590U discloses a cleaning device for a vacuum pump, which is detachably arranged on the vacuum pump and includes a separator and a receiving cavity; the separator is used for sealing connection with the air inlet of the vacuum pump, and the separator is provided with a medium inlet structure; the receiving cavity is used for sealing connection with one side of the vacuum pump, the inner cavity of the receiving cavity is communicated with the inner cavity of the vacuum pump, a medium discharge port is opened on the receiving cavity, and a cleaning medium channel is formed between the medium inlet structure and the medium discharge port. This patent uses the separator and the receiving cavity to be respectively and hermetically connected to the vacuum pump, and a cleaning medium is introduced into the vacuum pump through the medium inlet structure, which can effectively clean the inner cavity of the vacuum pump, is convenient and easy to operate, saves the cleaning cost, and prolongs the working life of the vacuum pump.

[0004] However, this device still has deficiencies: This device cleans and maintains the inside of the vacuum pump through a medium. However, before the medium is introduced into the inside of the vacuum pump, if it is not treated, it is easy to carry impurities such as particulate matter. After the particulate matter enters the inside of the vacuum pump synchronously with the air medium, it is easy to deposit in the pump and cause blockage, which will easily reduce the operating efficiency of the vacuum pump to a certain extent. Summary of the Invention

[0005] Aiming at the deficiencies of the prior art, the present invention provides a high-speed centrifugal vacuum pump with a cleaning function, which solves the problems raised in the above background art.

[0006] To achieve the above objectives, the present invention is realized through the following technical solutions: A high-speed centrifugal vacuum pump with a cleaning function includes a support base, a vacuum pump mechanism is arranged on the top of the support base, a driving mechanism is arranged on the right side of the vacuum pump mechanism, and a medium discharge pipe is arranged on the top of the vacuum pump mechanism; An anti-damage device is arranged on the left side of the vacuum pump mechanism, an anti-corrosion device is arranged inside the anti-damage device, and an efficiency improvement device is arranged inside the anti-corrosion device; The anti-damage device includes a medium conveying mechanism, which is arranged on the left side of the vacuum pump mechanism. A conveying pipe is fixedly installed between the right side of the medium conveying mechanism and the left side of the vacuum pump mechanism. A filter plate is fixedly installed on the left side inside the conveying pipe. An electric rotating rod is rotatably installed on the right side of the medium conveying mechanism. A number of round rods are equidistantly and fixedly installed on the outer wall of the left end of the electric rotating rod. Friction rollers are rotatably installed on the outer walls of the number of round rods. A heating component is fixedly installed at one end of the round rod close to the inner wall of the conveying pipe. A number of linkage plates are fixedly installed on the left side of the heating component. A number of guiding arc plates are fixedly installed on the side of the number of linkage plates close to the center of the conveying pipe. A number of flow disturbing plates are equidistantly and fixedly installed on the outer wall of the right end of the electric rotating rod.

[0007] According to the above technical solution, the right end of the electric rotating rod movably penetrates through the filter plate. The outer wall of the friction roller contacts the left outer wall of the filter plate. The outer wall of the heating component contacts the inner wall of the conveying pipe. The outer wall of the guiding arc plate is slidably connected to the inner wall of the conveying pipe. When performing cleaning and maintenance on the vacuum pump mechanism, start the medium conveying mechanism. The medium conveying mechanism conveys external air as the medium into the vacuum pump mechanism through the conveying pipe to clean and maintain the internal mechanical components of the vacuum pump mechanism with the air medium conveyed by the conveying pipe. At the same time, the medium entering the vacuum pump mechanism is discharged through the medium discharge pipe. A dust-proof bag is sleeved outside the medium discharge pipe to centrally collect the discharged dirt. At the same time, the medium entering the inside of the conveying pipe will be blocked by the filter plate for preliminary filtering work; before the maintenance work starts, start the electric rotating rod. When the electric rotating rod rotates on its own axis on the right side of the medium conveying mechanism, it drives the round rod and the flow disturbing plate to revolve. When the flow disturbing plate revolves, it evenly disturbs the medium flowing inside the conveying pipe. When the round rod revolves, it drives the friction roller to revolve along the left outer wall of the filter plate, thereby generating friction. The friction roller starts to rotate on its own axis along the outer wall of the round rod due to the friction force, that is, the friction roller rotates on its own axis and revolves along the outer wall of the round rod to friction the left side of the filter plate. At the same time, the round rod drives the heating component to revolve and dissipate heat. The heat dissipated by the heating component preheats the medium entering the inside of the conveying pipe. When the heating component revolves, it drives the linkage plate to revolve. The guiding arc plate of the linkage plate revolves along the inner wall of the conveying pipe. The guiding arc plate is designed with an arc surface that is larger on the left and smaller on the right, which is convenient for the medium to flow into the vacuum pump mechanism.

[0008] According to the above technical solution, the anti-erosion device includes a number of hollow plates, a drying plate and an arc-shaped long plate. On the right side of one end of the number of hollow plates close to the electric rotating rod, they are all fixedly installed on the left side of the flow disturbing plate. The right side of the drying plate is fixedly installed on the left side of the hollow plate. On the side of the arc-shaped long plate close to the electric rotating rod, it is fixedly installed at one end of the hollow plate close to the inner wall of the conveying pipe.

[0009] According to the above technical solution, the left side of the drying plate contacts the right side of the filter plate, and desiccant particles are disposed inside the drying plate. The outer wall of the arc-shaped long plate contacts the inner wall of the conveying pipe, and a square groove is formed inside the arc-shaped long plate. When the flow deflector rotates around the center, it drives the hollow plate to rotate around the center. When the hollow plate rotates around the center, it drives the drying plate to rotate around the center. The drying plate rotates around the right side of the filter plate and drives the arc-shaped long plate to rotate around the center when rubbing. During the rotation of the arc-shaped long plate, it scrapes the inner wall of the conveying pipe, ensuring the dryness and cleanliness of the inner wall of the conveying pipe.

[0010] According to the above technical solution, the anti-erosion device further includes a plurality of rotating wheels, a reciprocating lead screw, a hollow slider, and a corrugated plate. A plurality of the rotating wheels are symmetrically and rotatably installed inside the square groove of the arc-shaped long plate. Both ends of the reciprocating lead screw are fixedly installed on the side of the rotating wheel close to the center of the arc-shaped long plate. The hollow slider is movably installed through the outer wall of the reciprocating lead screw. The outer wall of the hollow slider is slidably connected to the inside of the square groove of the arc-shaped long plate. One end of the corrugated plate close to the inner wall of the conveying pipe is fixedly installed inside the hollow slider. When the arc-shaped long plate rotates around the center, it drives the rotating wheels to rotate around the inner wall of the conveying pipe and rub. The rotating wheels start to rotate around the inside of the square groove of the arc-shaped long plate by friction. When the rotating wheels rotate, they drive the reciprocating lead screw to rotate. When the reciprocating lead screw rotates, through the restriction of the reciprocating spiral groove on its outer wall on the built-in block of the hollow slider, a force for the hollow slider to move horizontally is generated and it reciprocates and resets along the inner wall of the square groove of the hollow slider. The hollow slider drives the corrugated plate to move towards the filter plate and reset, and so on repeatedly.

[0011] According to the above technical solution, the efficiency improvement device includes a sealing circular plate, a plurality of U-shaped frames, and a plurality of moisture-proof cotton blocks. The right side of the sealing circular plate is located on the left movement track of the hollow slider. The inside of the sealing circular plate is slidably installed through a spring on the outer wall of the flow deflector. A plurality of guide grooves are equidistantly formed inside the sealing circular plate. A plurality of the U-shaped frames are symmetrically and fixedly installed on the right side of the sealing circular plate. A plurality of the moisture-proof cotton blocks are equidistantly and fixedly installed inside the U-shaped frames. The outer wall of the moisture-proof cotton block contacts the outer wall of the flow deflector. During the horizontal movement of the hollow slider, it will contact the sealing circular plate, and the hollow slider will push against the sealing circular plate to slide along the outer wall of the flow deflector towards the filter plate. When the hollow slider resets, the sealing circular plate resets through the elastic force of the spring. The sealing circular plate drives the U-shaped frames to move synchronously, and the U-shaped frames drive the moisture-proof cotton blocks to slide horizontally along the outer wall of the flow deflector.

[0012] According to the above technical solution, the efficiency improvement device further includes a fixed rod, a swing plate, a transmission plate, a plurality of sliding plates, and a semi-circular block. Both ends of the fixed rod are fixedly installed inside the guide grooves of the sealing circular plate. The inside of the swing plate is hinged on the outer wall of the fixed rod. The left side of the transmission plate is fixedly installed on the right side of the swing plate. The outer walls of a plurality of the sliding plates are slidably installed inside the right end of the transmission plate. The bottom of the semi-circular block is fixedly installed on the side of the flow deflector close to the inner wall of the conveying pipe.

[0013] According to the above technical solution, a torsion spring is arranged between the inside of the swing plate and the fixed rod, and the plurality of sliding plates are equidistantly distributed inside the transmission plate, and a spring is arranged between the outer wall of the sliding plate and the inside of the transmission plate, and the arc surface of the semicircular block is located on the movement trajectory of the sliding plate. When the sealing circular plate moves horizontally, the fixed rod and the swing plate are driven to move synchronously, and the swing plate drives the transmission plate to move synchronously. During the process of the transmission plate driving the sliding plate to move horizontally, the bottom of the sliding plate contacts the arc surface of the top of the semicircular block to generate a resistance force. Since the spring force between the sliding plate and the transmission plate is greater than the spring force of the torsion spring between the fixed rod and the swing plate, when the sliding plate is resisted by the semicircular block, the transmission plate will pull the swing plate to start rotating along the surface of the fixed rod. At this time, the swing plate opens the blockage of the sealing circular plate, that is, the medium blocked by the sealing circular plate will suddenly pour into the inner wall of the vacuum pump mechanism, and with the continuous movement of the transmission plate, the sliding plate is prompted to slide upward relying on the arc surface of the semicircular block. When the sliding plate passes over the semicircular block, it is reset by the spring force, and the swing plate is reset by the torsion spring. This reciprocating process causes the sealing swing plate to be indirectly opened during the movement of the sealing circular plate.

[0014] The present invention provides a high-speed centrifugal vacuum pump with a cleaning function. It has the following beneficial effects: (1) The present invention adopts the setting of the anti-damage device, and cooperates with the medium conveying mechanism, conveying pipe, filter plate, electric rotating rod, round rod, friction roller, heating assembly, linkage plate, guide arc plate and spoiler plate. The filter plate is used to filter and purify the medium maintained by the vacuum pump mechanism, so as to prevent the external air from carrying a large amount of particulate matter when entering the vacuum pump mechanism, and to ensure the cleanliness of the clean medium while preventing the particulate matter from adhering to the mechanical parts inside the vacuum pump mechanism, so as to prevent the particulate matter from accumulating and causing blockage and damage, and to prevent the operation efficiency of the vacuum pump mechanism from being reduced. At the same time, the spoiler is used to uniformly disturb the medium and accelerate its circulation rate. At the same time, the outer wall of the filter plate is effectively scraped during the revolution and rotation of the friction roller, so as to prevent the continuous accumulation of particulate matter during the long-term use of the equipment, causing the filter plate filter holes to be blocked, thereby reducing the obstruction of the medium circulation. In addition, the guide arc plate is used to effectively prevent the medium from circulating in reverse during the preheating process of the medium by the heating assembly. The preheated medium effectively reduces its internal moisture content, so as to prevent the medium with high moisture content from entering the vacuum pump mechanism and causing condensation and dew formation.

[0015] (2) Through the setting of the anti-erosion device, the present invention cooperates with the spoiler, hollow plate, drying plate, arc-shaped long plate, runner, reciprocating lead screw, hollow slider and corrugated plate. Relying on the rotation friction of the drying plate and the desiccant inside it, the filter plate is always kept dry, preventing the filter plate from being eroded by moisture during the long-term purification of the medium, and preventing the moisture attached to the surface of the filter plate from eroding the medium in circulation for a long time, thus exacerbating the oxidation phenomenon inside the vacuum pump mechanism. In addition, the corrugated plate guides the medium flowing inside the conveying pipe through its own corrugated surface, and then cooperates with the rotation disturbance of the spoiler to increase the movement frequency of the medium under the same conveying distance, further improving the uniformity of the medium guidance. At the same time, it promotes the medium to further mix with the heat transported by the heating component to remove moisture, enhancing the fluidity of the medium to improve the cleaning effect inside the vacuum pump mechanism.

[0016] (3) Through the setting of the efficiency improvement device, the present invention cooperates with the hollow slider, sealing circular plate, U-shaped frame, moisture-proof cotton block, fixed rod, swing plate, transmission plate, sliding plate and semi-circular block. Relying on the moisture-proof cotton block to frictionally distribute the moisture remaining on the outer wall of the spoiler during its rotation, the moisture on the surface of the spoiler can be quickly dried by the heat carried by the medium flow during the rotation process, preventing the moisture on the surface of the spoiler from splashing around during the rotation process, thereby increasing the humidity inside the conveying pipe and avoiding the reduction of the medium temperature, which increases the mechanical stress inside the vacuum pump mechanism. In addition, relying on the sudden increase in the flow velocity of the medium by the sealing circular plate and the swing plate, a certain impact force is generated, and at the same time, it promotes the medium to gather more densely inside the vacuum pump mechanism, avoiding the medium always being stable during the cleaning process of the vacuum pump mechanism, thus reducing the removal effect on stubborn dirt, and at the same time optimizing the entry mode of the medium to ensure the stable progress of the cleaning work. Brief Description of the Drawings

[0017] Figure 1 is a schematic diagram of the whole of the present invention; Figure 2 is a sectional schematic diagram of the whole of the present invention; Figure 3 is a schematic diagram of the anti-damage device of the present invention; Figure 4 is a sectional schematic diagram of the anti-damage device of the present invention; Figure 5 is a schematic diagram of the anti-erosion device of the present invention; Figure 6 is a schematic diagram of the right side view of the anti-erosion device of the present invention; Figure 7 is a schematic diagram of the efficiency improvement device of the present invention; Figure 8 is a schematic diagram of the right side view of the efficiency improvement device of the present invention.

[0018] In the figure: 1, support base; 2, vacuum pump mechanism; 21, drive mechanism; 3, medium discharge pipe; 4, anti-damage device; 41, medium conveying mechanism; 42, conveying pipe; 43, filter plate; 44, electric rotating rod; 45, round rod; 46, friction roller; 47, heating component; 48, linkage plate; 49, guiding arc plate; 410, flow disturbing plate; 5, anti-corrosion device; 51, hollow plate; 52, drying plate; 53, arc-shaped long plate; 54, rotating wheel; 55, reciprocating lead screw; 56, hollow slider; 57, corrugated plate; 6, efficiency improvement device; 61, sealing round plate; 62, U-shaped frame; 63, moisture-proof cotton block; 64, fixed rod; 65, swing plate; 66, transmission plate; 67, sliding plate; 68, semi-circular block. Detailed implementation mode

[0019] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments.

[0020] Please refer to Figures 1 - 8 , an embodiment of the present invention is: a high-speed centrifugal vacuum pump with a cleaning function, including a support base 1, a vacuum pump mechanism 2 is arranged on the top of the support base 1, a drive mechanism 21 is arranged on the right side of the vacuum pump mechanism 2, and a medium discharge pipe 3 is arranged on the top of the vacuum pump mechanism 2; An anti-damage device 4 is arranged on the left side of the vacuum pump mechanism 2, an anti-corrosion device 5 is arranged inside the anti-damage device 4, and an efficiency improvement device 6 is arranged on the inner side of the anti-corrosion device 5; The anti-damage device 4 includes a medium conveying mechanism 41. The medium conveying mechanism 41 is arranged on the left side of the vacuum pump mechanism 2. A conveying pipe 42 is fixedly installed between the right side of the medium conveying mechanism 41 and the left side of the vacuum pump mechanism 2. A filter plate 43 is fixedly installed on the left side inside the conveying pipe 42. An electric rotating rod 44 is rotatably installed on the right side of the medium conveying mechanism 41. A plurality of round rods 45 are equidistantly and fixedly installed on the outer wall of the left end of the electric rotating rod 44. A friction roller 46 is rotatably installed on the outer wall of each of the plurality of round rods 45. A heating component 47 is fixedly installed at one end of the round rod 45 close to the inner wall of the conveying pipe 42. A plurality of linkage plates 48 are fixedly installed on the left side of the heating component 47. A guiding arc plate 49 is fixedly installed on the side of each of the plurality of linkage plates 48 close to the center of the conveying pipe 42. A plurality of flow disturbing plates 410 are equidistantly and fixedly installed on the outer wall of the right end of the electric rotating rod 44.

[0021] The right end of the electric rotating rod 44 movably penetrates through the filter plate 43. The outer wall of the friction roller 46 contacts the left outer wall of the filter plate 43. The outer wall of the heating assembly 47 contacts the inner wall of the conveying pipe 42. The outer wall of the guiding arc plate 49 is slidably connected to the inner wall of the conveying pipe 42. Through the above cooperation, the medium maintained by the vacuum pump mechanism 2 is filtered and purified by relying on the filter plate 43, avoiding a large amount of particulate matter being carried when external air enters the vacuum pump mechanism 2. While ensuring the cleanliness of the clean medium, it also prevents particulate matter from adhering to the internal mechanical components of the vacuum pump mechanism 2, preventing blockage and damage caused by particulate matter deposition, and avoiding a reduction in the operating efficiency of the vacuum pump mechanism 2; through the above cooperation, the spoiler 410 evenly disturbs the medium and accelerates its flow rate. At the same time, during the process of the friction roller 46 revolving and rotating, the outer wall of the filter plate 43 is effectively scraped, preventing the filter holes of the filter plate 43 from being blocked by continuous accumulation of particulate matter during long-term use of the equipment, thus reducing the obstruction of medium flow. And the guiding arc plate 49 effectively prevents the reverse flow of the medium during the preheating of the medium by the heating assembly 47. The preheated medium effectively reduces the water content inside itself, avoiding condensation and dew formation when the medium with a high water content enters the vacuum pump mechanism 2.

[0022] During use, when cleaning and maintaining the vacuum pump mechanism 2, start the medium conveying mechanism 41. The medium conveying mechanism 41 conveys external air as the medium into the vacuum pump mechanism 2 through the conveying pipe 42 to clean and maintain the internal mechanical components of the vacuum pump mechanism 2 with the air medium conveyed by the conveying pipe 42. At the same time, the medium entering the vacuum pump mechanism 2 is discharged through the medium discharge pipe 3. A dust-proof bag is sleeved outside the medium discharge pipe 3 to centrally collect the discharged dirt. At the same time, the medium entering the conveying pipe 42 is blocked by the filter plate 43 for preliminary filtering work. Through the above cooperation, the medium for maintaining the vacuum pump mechanism 2 is filtered and purified by relying on the filter plate 43, avoiding a large amount of particulate matter being carried when external air enters the vacuum pump mechanism 2. While ensuring the cleanliness of the cleaning medium, it also prevents particulate matter from adhering to the internal mechanical components of the vacuum pump mechanism 2, preventing blockage and damage caused by particulate matter deposition, and avoiding a reduction in the operating efficiency of the vacuum pump mechanism 2; before the maintenance work starts, start the electric rotating rod 44. When the electric rotating rod 44 rotates self along the right side of the medium conveying mechanism 41, it drives the round rod 45 and the spoiler 410 to revolve. When the spoiler 410 revolves, it evenly disturbs the medium flowing in the conveying pipe 42. When the round rod 45 revolves, it drives the friction roller 46 to revolve along the left outer wall of the filter plate 43, thereby generating frictional force. The friction roller 46 starts to rotate self along the outer wall of the round rod 45 due to the frictional force, that is, the friction roller 46 rotates self and revolves along the outer wall of the round rod 45 to friction the left side of the filter plate 43. At the same time, the round rod 45 drives the heating component 47 to revolve and dissipate heat. The heat dissipated by the heating component 47 preheats the medium entering the conveying pipe 42. When the heating component 47 revolves, it drives the linkage plate 48 to revolve. The guiding arc plate 49 of the linkage plate 48 revolves along the inner wall of the conveying pipe 42. Through the arc surface design with a large left and a small right, it is convenient for the medium to flow into the vacuum pump mechanism 2. Through the above cooperation, the spoiler 410 evenly disturbs the medium and accelerates its flow rate. At the same time, during the revolution and self-rotation of the friction roller 46, it effectively scrapes the outer wall of the filter plate 43, preventing the filter holes of the filter plate 43 from being blocked by continuous accumulation of particulate matter during long-term use of the equipment, which reduces the obstruction of medium flow. And the guiding arc plate 49 effectively prevents the reverse flow of the medium during the preheating of the medium by the heating component 47. The preheated medium effectively reduces the water content inside itself, avoiding condensation and dew formation when the medium with a high water content enters the vacuum pump mechanism 2.

[0023] Please refer to Figures 1 - 8 , on the basis of the above embodiments, another embodiment of the present invention further includes an anti-erosion device 5; The anti-erosion device 5 includes a number of hollow plates 51, a drying plate 52, and an arc-shaped long plate 53. One side of the right end of each of the number of hollow plates 51 close to the electric rotating rod 44 is fixedly installed on the left side of the spoiler 410. The right side of the drying plate 52 is fixedly installed on the left side of the hollow plate 51. One side of the arc-shaped long plate 53 close to the electric rotating rod 44 is fixedly installed at one end of the hollow plate 51 close to the inner wall of the conveying pipe 42.

[0024] The left side of the drying plate 52 is in contact with the right side of the filter plate 43, and the drying plate 52 is internally provided with desiccant particles. The outer wall of the arc-shaped long plate 53 is in contact with the inner wall of the conveying pipe 42, and a square groove is formed inside the arc-shaped long plate 53. Through the above cooperation, relying on the rotation friction of the drying plate 52 and the desiccant inside it, the filter plate 43 is always kept dry, preventing the filter plate 43 from being eroded by moisture during the long-term purification of the medium, and preventing the moisture attached to the surface of the filter plate 43 from eroding the medium in circulation for a long time, thus exacerbating the oxidation phenomenon inside the vacuum pump mechanism 2.

[0025] The anti-erosion device 5 further includes a number of rotating wheels 54, a reciprocating lead screw 55, a hollow slider 56, and a corrugated plate 57. The number of rotating wheels 54 are symmetrically and rotatably installed inside the square groove of the arc-shaped long plate 53. Both ends of the reciprocating lead screw 55 are fixedly installed on one side of the rotating wheel 54 close to the center of the arc-shaped long plate 53. The inside of the hollow slider 56 penetrates and is movably installed on the outer wall of the reciprocating lead screw 55. The outer wall of the hollow slider 56 is slidably connected to the inside of the square groove of the arc-shaped long plate 53. One end of the corrugated plate 57 close to the inner wall of the conveying pipe 42 is fixedly installed inside the hollow slider 56. Through the above cooperation, the corrugated plate 57 channels the medium flowing inside the conveying pipe 42 through its own corrugated surface, and further promotes the medium to increase the movement frequency under the same conveying distance in cooperation with the rotation disturbance of the spoiler 410, further improving the uniformity of the medium channeling, and at the same time promoting the medium to further mix with the heat conveyed by the heating component 47 for moisture removal, enhancing the fluidity of the medium to improve the cleaning effect on the inside of the vacuum pump mechanism 2.

[0026] During use, when the spoiler 410 revolves, it drives the hollow plate 51 to revolve. When the hollow plate 51 revolves, it drives the drying plate 52 to revolve. The drying plate 52 revolves along the right side of the filter plate 43 and drives the arc-shaped long plate 53 to revolve when rubbing. During the revolution of the arc-shaped long plate 53, it scrapes the inner wall of the conveying pipe 42 to ensure the dryness and cleanliness of the inner wall of the conveying pipe 42. Through the above cooperation, relying on the revolution and friction of the drying plate 52 and its built-in desiccant, the filter plate 43 is always kept dry, preventing the filter plate 43 from being eroded by moisture during the long-term purification of the medium, and preventing the moisture attached to the surface of the filter plate 43 from eroding the medium in circulation for a long time, thus exacerbating the oxidation phenomenon inside the vacuum pump mechanism 2; when the arc-shaped long plate 53 revolves, it drives the runner 54 to revolve and rub along the inner wall of the conveying pipe 42. The runner 54 starts to rotate along the inner square groove of the arc-shaped long plate 53 due to the frictional force. When the runner 54 rotates, it drives the reciprocating lead screw 55 to rotate. When the reciprocating lead screw 55 rotates, through the restriction of the reciprocating spiral groove on its outer wall on the built-in block of the hollow slider 56, it causes the hollow slider 56 to generate a force for horizontal movement and reciprocally slide and reset along the inner wall of the square groove of the hollow slider 56. The hollow slider 56 drives the corrugated plate 57 to move towards and reset towards the filter plate 43. Repeating this process, through the above cooperation, the corrugated plate 57 channels the medium flowing inside the conveying pipe 42 through its corrugated surface. Coupled with the revolution and disturbance of the spoiler 410, the movement frequency of the medium is increased under the same conveying distance, further improving the uniformity of the medium channeling. At the same time, it promotes the further mixing of the medium with the heat conveyed by the heating component 47 for moisture removal, enhancing the fluidity of the medium to improve the cleaning effect on the inside of the vacuum pump mechanism 2.

[0027] Please refer to Figures 1 - 8 , on the basis of the above embodiment, in another embodiment of the present invention, there is also an efficiency improvement device 6; The efficiency improvement device 6 includes a sealing circular plate 61, a number of U-shaped frames 62 and a number of moisture-proof cotton blocks 63. The right side of the sealing circular plate 61 is located on the left movement track of the hollow slider 56. The inside of the sealing circular plate 61 is penetrated by a spring and slidably installed on the outer wall of the spoiler 410. A number of guide grooves are equally spaced inside the sealing circular plate 61. A number of U-shaped frames 62 are symmetrically and fixedly installed on the right side of the sealing circular plate 61. A number of moisture-proof cotton blocks 63 are equally spaced and fixedly installed inside the U-shaped frames 62. The outer wall of the moisture-proof cotton block 63 contacts the outer wall of the spoiler 410. Through the above cooperation, relying on the moisture-proof cotton blocks 63 to frictionally distribute the residual moisture on the outer wall of the spoiler 410 during its revolution, it promotes the moisture on the surface of the spoiler 410 to be quickly dried by the heat carried by the medium flow during the revolution, preventing the moisture on the surface of the spoiler 410 from swinging around during the revolution, thereby increasing the humidity inside the conveying pipe 42 and avoiding the reduction of the medium temperature, thus increasing the mechanical stress inside the vacuum pump mechanism 2.

[0028] The efficiency improvement device 6 further includes a fixed rod 64, a swing plate 65, a transmission plate 66, a plurality of sliding plates 67 and a semi-circular block 68. Both ends of the fixed rod 64 are fixedly installed inside the guide groove of the sealing circular plate 61. The swing plate 65 penetrates and is hinged to the outer wall of the fixed rod 64. The left side of the transmission plate 66 is fixedly installed on the right side of the swing plate 65. The outer walls of the plurality of sliding plates 67 are slidably installed inside the right end of the transmission plate 66. The bottom of the semi-circular block 68 is fixedly installed on one side of the spoiler 410 close to the inner wall of the conveying pipe 42.

[0029] A torsion spring is arranged between the inside of the swing plate 65 and the fixed rod 64. The plurality of sliding plates 67 are equidistantly distributed inside the transmission plate 66. A spring is arranged between the outer wall of the sliding plate 67 and the inside of the transmission plate 66. The arc surface of the semi-circular block 68 is located on the movement track of the sliding plate 67. Through the above cooperation, relying on the sudden increase in the flow velocity of the medium between the sealing circular plate 61 and the swing plate 65, a certain impact force is generated, and at the same time, it promotes the denser aggregation of the medium inside the vacuum pump mechanism 2, avoiding the medium always tending to be stable during the cleaning process of the vacuum pump mechanism 2, thereby reducing the removal effect on dirt with stronger solidity. At the same time, it optimizes the entry mode of the medium to ensure the stable progress of the cleaning work.

[0030] During use, when the hollow slider 56 moves horizontally, it will contact the sealing circular plate 61, and the hollow slider 56 will resist the sealing circular plate 61 and slide along the outer wall of the spoiler 410 towards the filter plate 43. When the hollow slider 56 resets, the sealing circular plate 61 resets by the spring force. The sealing circular plate 61 drives the U-shaped frame 62 to move synchronously, and the U-shaped frame 62 drives the moisture-proof cotton block 63 to slide horizontally along the outer wall of the spoiler 410. Through the above cooperation, the moisture-proof cotton block 63 is relied on to frictionally distribute the moisture remaining on the outer wall of the spoiler 410 during its revolution, so that the moisture on the surface of the spoiler 410 can be quickly dried by the heat carried by the medium flow during the revolution, preventing the moisture on the surface of the spoiler 410 from splashing around during the revolution, thus increasing the humidity inside the conveying pipe 42 and avoiding the decrease of the medium temperature, which increases the mechanical stress inside the vacuum pump mechanism 2. When the sealing circular plate 61 moves horizontally, it drives the fixed rod 64 and the swing plate 65 to move synchronously. The swing plate 65 drives the transmission plate 66 to move synchronously. During the horizontal movement of the transmission plate 66 driving the sliding plate 67, the bottom of the sliding plate 67 contacts the arc surface of the top of the semi-circular block 68 to generate a resistance force. Since the spring force between the sliding plate 67 and the transmission plate 66 is greater than the torsion spring force between the fixed rod 64 and the swing plate 65, when the sliding plate 67 is resisted by the semi-circular block 68, the transmission plate 66 will pull the swing plate 65 to start rotating along the surface of the fixed rod 64. At this time, the swing plate 65 opens the blockage of the sealing circular plate 61, that is, the medium blocked by the sealing circular plate 61 will suddenly pour into the inner wall of the vacuum pump mechanism 2. And with the continuous movement of the transmission plate 66, the sliding plate 67 is urged to slide upward along the arc surface of the semi-circular block 68. When the sliding plate 67 passes over the semi-circular block 68, it resets by the spring force, and the swing plate 65 resets by the torsion spring. Repeating this process, the swing plate 65 is indirectly opened during the movement of the sealing circular plate 61. Through the above cooperation, relying on the sudden increase in the flow rate of the medium by the sealing circular plate 61 and the swing plate 65, a certain impact force is generated, and at the same time, the medium is more densely gathered inside the vacuum pump mechanism 2, avoiding the medium remaining stable during the cleaning process of the vacuum pump mechanism 2, thus reducing the removal effect on the dirt with strong solidity, and at the same time optimizing the entry mode of the medium to ensure the stable progress of the cleaning work.

[0031] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution and inventive concept of the present invention, makes equivalent substitutions or changes, and all should be covered within the protection scope of the present invention.

Claims

1. A high-speed centrifugal vacuum pump with a cleaning function, comprising a support base (1), characterized in that: A vacuum pump mechanism (2) is arranged on the top of the support seat (1), a driving mechanism (21) is arranged on the right side of the vacuum pump mechanism (2), and a medium discharge pipe (3) is arranged on the top of the vacuum pump mechanism (2); An anti-damage device (4) is provided on the left side of the vacuum pump mechanism (2), an anti-corrosion device (5) is provided inside the anti-corrosion device (4), and an efficiency-enhancing device (6) is provided inside the anti-corrosion device (5); The anti-damage device (4) comprises a medium conveying mechanism (41), the medium conveying mechanism (41) being arranged on the left side of the vacuum pump mechanism (2), a conveying pipe (42) being fixedly installed between the right side of the medium conveying mechanism (41) and the left side of the vacuum pump mechanism (2), a filter plate (43) being fixedly installed inside the conveying pipe (42) on the left side, an electric rotating rod (44) being rotatably installed on the right side of the medium conveying mechanism (41), a plurality of round rods (45) being equidistantly and fixedly installed on the outer wall of the left end of the electric rotating rod (44), a plurality of friction rollers (46) being rotatably installed on the outer walls of the plurality of round rods (45), a heating assembly (47) being fixedly installed on one end of the round rod (45) close to the inner wall of the conveying pipe (42), a plurality of linkage plates (48) being fixedly installed on the left side of the heating assembly (47), a plurality of guide arc plates (49) being fixedly installed on one side of the linkage plates (48) close to the center of the conveying pipe (42), and a plurality of interfering flow plates (410) being equidistantly and fixedly installed on the outer wall of the right end of the electric rotating rod (44).

2. The high-speed centrifugal vacuum pump with a cleaning function according to claim 1, characterized in that: The right end of the electric rotating rod (44) movably penetrates the filter plate (43), the outer wall of the friction roller (46) contacts the left outer wall of the filter plate (43), the outer wall of the heating component (47) contacts the inner wall of the conveying pipe (42), and the outer wall of the guide arc plate (49) is slidably connected to the inner wall of the conveying pipe (42).

3. The high-speed centrifugal vacuum pump with a cleaning function according to claim 2, characterized in that: The anti-corrosion device (5) comprises a plurality of hollow plates (51), a drying plate (52) and an arc-shaped long plate (53), wherein the right sides of the plurality of hollow plates (51) close to one end of the electric rotating rod (44) are fixedly mounted on the left side of the spoiler (410), the right side of the drying plate (52) is fixedly mounted on the left side of the hollow plate (51), and the side of the arc-shaped long plate (53) close to the electric rotating rod (44) is fixedly mounted on one end of the hollow plate (51) close to the inner wall of the conveying pipe (42).

4. A high-speed centrifugal vacuum pump with a cleaning function according to claim 3, characterized in that: The left side of the drying plate (52) contacts the right side of the filter plate (43), and desiccant particles are built into the drying plate (52). The outer wall of the arc-shaped long plate (53) contacts the inner wall of the conveying pipe (42), and a square groove is formed inside the arc-shaped long plate (53).

5. The high-speed centrifugal vacuum pump with a cleaning function according to claim 4, characterized in that: The anti-erosion device (5) further includes a plurality of rotating wheels (54), a reciprocating lead screw (55), a hollow slider (56) and a corrugated plate (57). A plurality of the rotating wheels (54) are symmetrically and rotatably installed inside the square groove of the arc-shaped long plate (53). Both ends of the reciprocating lead screw (55) are fixedly installed on the side of the rotating wheel (54) close to the center of the arc-shaped long plate (53). The hollow slider (56) penetrates and is movably installed on the outer wall of the reciprocating lead screw (55). The outer wall of the hollow slider (56) is slidably connected to the inside of the square groove of the arc-shaped long plate (53). One end of the corrugated plate (57) close to the inner wall of the conveying pipe (42) is fixedly installed inside the hollow slider (56).

6. The high-speed centrifugal vacuum pump with a cleaning function according to claim 5, characterized in that: The efficiency improvement device (6) includes a sealing circular plate (61), a plurality of U-shaped frames (62) and a plurality of moisture-proof cotton blocks (63). The right side of the sealing circular plate (61) is located on the left movement track of the hollow slider (56). The inside of the sealing circular plate (61) is penetrated and slidably installed on the outer wall of the spoiler (410) through a spring. A plurality of guide grooves are equidistantly formed inside the sealing circular plate (61). A plurality of the U-shaped frames (62) are symmetrically and fixedly installed on the right side of the sealing circular plate (61). A plurality of the moisture-proof cotton blocks (63) are equidistantly and fixedly installed inside the U-shaped frames (62). The outer wall of the moisture-proof cotton block (63) contacts the outer wall of the spoiler (410).

7. The high-speed centrifugal vacuum pump with a cleaning function according to claim 6, characterized in that: The efficiency improvement device (6) further includes a fixed rod (64), a swing plate (65), a transmission plate (66), a plurality of sliding plates (67) and a semi-circular block (68). Both ends of the fixed rod (64) are fixedly installed inside the guide groove of the sealing circular plate (61). The inside of the swing plate (65) penetrates and is hinged to the outer wall of the fixed rod (64). The left side of the transmission plate (66) is fixedly installed on the right side of the swing plate (65). The outer walls of a plurality of the sliding plates (67) are slidably installed inside the right end of the transmission plate (66). The bottom of the semi-circular block (68) is fixedly installed on the side of the spoiler (410) close to the inner wall of the conveying pipe (42).

8. The high-speed centrifugal vacuum pump with a cleaning function according to claim 7, characterized in that: A torsion spring is arranged between the inside of the swing plate (65) and the fixed rod (64). A plurality of the sliding plates (67) are equidistantly distributed inside the transmission plate (66). A spring is arranged between the outer wall of the sliding plate (67) and the inside of the transmission plate (66). The arc surface of the semi-circular block (68) is located on the movement track of the sliding plate (67).

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