Sealing mechanism for feeding of CVD (Chemical Vapor Deposition) furnace

Abstract

The invention provides a sealing mechanism for feeding of a CVD (chemical vapor deposition) furnace. The sealing mechanism comprises a sealing seat and a feeding hole, wherein the sealing seat is arranged on a feeding pipe, the feeding hole sequentially penetrates through the sealing seat, the feeding pipe and the side wall of the CVD furnace, and materials are guided into the CVD furnace through the feeding hole; the sealing mechanism further comprises a sealing assembly used for blocking the feeding holes of the multiple feeding pipes at the same time. An operator only needs to start a rotating air cylinder to enable an output shaft of the rotating air cylinder to rotate, so that a first swing rod is driven to rotate, the first swing rod drives a swing connecting rod to rotate and move towards the lower side, and therefore a cover plate body rotates to shield feeding holes, and all the feeding holes can be blocked by a plurality of cover plate pieces at the same time; and then the clamp assembly is started to press the cover plate piece, so that the cover plate piece is tightly attached to the sealing seat, and the full sealing effect is achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of loading of CVD furnaces, and particularly relates to a sealing mechanism for loading a CVD furnace. Background Art

[0002] Currently, when delivering materials to be reacted into a CVD furnace, usually the sealing cover at the feeding hole is manually removed by a person, then the materials are injected into the furnace, and after the injection of the materials is completed, the sealing cover is reinstalled at the feeding hole.

[0003] However, in order to make the materials in the furnace be laid more evenly at various places in the furnace, a plurality of feeding holes are transversely arranged on the CVD furnace. Therefore, after a person injects materials into one feeding hole and installs the sealing cover at that place, they will go to the next feeding hole to inject materials and install the sealing cover. Installing a plurality of sealing covers step by step in this way results in a waste of a lot of manpower, reduces the production efficiency, and when a person manually installs the sealing cover, errors are inevitably generated, which easily leads to poor sealing effect between the sealing cover and the feeding hole, increasing the risk factors. Summary of the Invention

[0004] Based on this, the purpose of the present invention is to provide a sealing mechanism for loading a CVD furnace.

[0005] The invention provides the following technical solutions: A sealing mechanism for loading a CVD furnace, wherein a plurality of feeding pipes are arranged on the CVD furnace, and the sealing mechanism includes a sealing seat arranged on the feeding pipe, a feeding hole formed by sequentially penetrating through the sealing seat, the feeding pipe and the side wall of the CVD furnace, and materials are introduced into the CVD furnace through the feeding hole; the sealing mechanism further includes a sealing component for simultaneously blocking the feeding holes of a plurality of the feeding pipes;

[0006] The sealing component includes a plurality of cover plate members rotatably arranged at the feeding holes of a plurality of the feeding pipes respectively, and a driving component for driving the plurality of cover plate members to rotate simultaneously; when the cover plate members rotate to block the feeding holes, the feeding holes are blocked; the sealing mechanism further includes a clamp component corresponding to the cover plate members in number, and the clamp component is used to press the corresponding cover plate members against the feeding holes.

[0007] Further, an annular groove is formed on a side of the sealing seat away from the feeding pipe, and a sealing member adapted to the groove is embedded in the groove. When the cover plate member is pressed against the feeding hole, the sealing member is in extrusion fit with the cover plate member to achieve sealing.

[0008] Further, the cover plate member includes a mounting post arranged on the sealing seat, and a cover plate main body arranged on the mounting post. The cover plate main body can rotate on the mounting post and can also slide on the mounting post.

[0009] Further, the cover plate member further includes a connecting post provided on the cover plate body; the driving assembly includes a driving member, a first swing rod provided on the output shaft of the driving member, the driving assembly further includes a swing link rod, and a first connection hole corresponding to the number of the cover plate members is formed in the swing link rod. The connecting posts of the plurality of cover plate members respectively penetrate into the plurality of first connection holes; one end of the swing link rod is connected to the end of the first swing rod.

[0010] Further, the sealing assembly further includes a positioning pin provided on the sealing seat, and the cover plate member further includes a handle provided on the cover plate body. When the cover plate member seals the feeding hole, the handle is buckled on the positioning pin.

[0011] Further, the driving assembly further includes a rotatable second swing rod, and the end of the second swing rod is connected to the end of the swing link rod away from the first swing rod.

[0012] Further, a shaft hole adapted to the output shaft of the driving member is formed in the first swing rod, the output shaft of the driving member penetrates into the shaft hole, a threaded hole is formed in the first swing rod, one end of the threaded hole communicates with the shaft hole and the other end communicates with the outside, and a bolt is screwed into the threaded hole.

[0013] Further, a second connection hole is formed at the end of the swing link rod, and a first through hole is formed at the end of the first swing rod. The swing link rod is connected to the first swing rod by a bolt penetrating into the second connection hole and the first through hole and being blocked by a nut.

[0014] Further, the second swing rod is rotatably connected to a connecting shaft, the connecting shaft is fixedly connected to a fixed body, a second through hole is formed at the end of the second swing rod, and a third connection hole is formed at the end of the swing link rod away from the first swing rod. The swing link rod is connected to the second swing rod by a bolt penetrating into the second through hole and the third connection hole and being blocked by a nut.

[0015] Further, the clamp assembly includes a mounting bracket, a cylinder rotatably connected to the mounting bracket, a pressing rod rotatably connected to the mounting bracket, a pressing head provided on the pressing rod, the pressing head presses the cover plate member, a rotating rod provided between the output shaft of the cylinder and the mounting bracket, and a connecting rod provided between the output shaft of the cylinder and the pressing rod.

[0016] The beneficial effects of the present invention are as follows: The operator only needs to start the rotary cylinder, so that the output shaft of the rotary cylinder rotates, thereby driving the first swing rod to rotate. The first swing rod drives the swing link to rotate and move downward, so that the cover body rotates to block the feed hole. Thus, multiple cover parts can simultaneously block all the feed holes. Then, by starting the clamp assembly, the clamp assembly presses the cover parts, so that the cover parts are closely attached to the sealing seat, achieving a sufficient sealing effect. Compared with the prior art of manually installing the sealing cover, the solution of the present invention saves manpower and can achieve sufficient sealing of the feed hole, avoiding the occurrence of sealing errors caused by manual operation. Brief Description of the Drawings

[0017] Figure 1 It is a three-dimensional structural schematic diagram of the present invention.

[0018] Figure 2 It is a side view of the sealing seat of the present invention.

[0019] Figure 3 It is a three-dimensional structural schematic diagram of the sealing mechanism of the present invention when it is closed.

[0020] Figure 4 It is a three-dimensional structural schematic diagram of the sealing mechanism of the present invention when it is opened.

[0021] Figure 5 It is a three-dimensional structural schematic diagram of the cover assembly of the present invention.

[0022] Figure 6 It is a front view of the sealing seat of the present invention.

[0023] Figure 7 It is a three-dimensional structural schematic diagram of the first swing rod, the second swing rod and the swing link of the present invention.

[0024] Figure 8 It is a three-dimensional structural schematic diagram of the clamp mechanism of the present invention.

[0025] The reference numerals in the drawings are: 1-CVD furnace, 2-feed pipe, 21-feed hole, 3-sealing seat, 31-groove, 32-sealing member, 4-sealing assembly, 41-rotary cylinder, 42-first swing rod, 421-axis hole, 422-bolt, 423-first through hole, 43-swing link, 431-first connection hole, 432-second connection hole, 433-third connection hole, 44-cover part, 441-cover body, 442-mounting post, 443-connecting post, 444-gripper, 45-second swing rod, 451-connecting shaft, 453-second through hole, 46-positioning pin, 5-clamp assembly, 51-mounting bracket, 52-cylinder, 53-rotating rod, 54-pressing rod, 55-connecting rod, 56-pressure head. Detailed Embodiments

[0026] To facilitate the understanding of the present invention, the present invention will be described more comprehensively below with reference to the relevant accompanying drawings. Several embodiments of the present invention are shown in the accompanying drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, these embodiments are provided to make the disclosure of the present invention more thorough and comprehensive.

[0027] It should be noted that when an element is referred to as being "fixedly provided on" another element, it can be directly on the other element or there can also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are only for the purpose of illustration.

[0028] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the technical field to which the present invention belongs. The terms used herein in the description of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0029] As Figure 1 shown, a plurality of feed pipes 2 are provided on the CVD furnace 1. The number of the feed pipes 2 can be adjusted according to the actual situation, and the specific number is not described. The horizontal feed pipes 2 are on the same straight line; the present invention provides a sealing mechanism for feeding the CVD furnace 1. As Figure 1 shown, it includes a sealing seat 3, a sealing component 4 and a clamp component 5;

[0030] Among them, the sealing seat 3 is fixedly connected to the feed pipe 2, and the sealing seat 3 can be integrally formed with the feed pipe 2; a feed hole 21 formed by sequentially penetrating the sealing seat 3, the feed pipe 2 and the side wall of the CVD furnace 1 is used to introduce materials into the CVD furnace 1; the sealing component 4 is used to block a plurality of feed holes 21 at the same time; the clamp component 5 is used to press the cover plate 44 in the sealing component 4 so that the sealing component 4 seals the feed hole 21;

[0031] As Figure 2 and Figure 6 shown, an annular groove 31 is formed on the side of the sealing seat 3 away from the feed pipe 2. A sealing member 32 adapted to the groove 31 is embedded in the groove 31. The groove 31 and the feed hole 21 are on the same axis. When the cover plate 44 of the sealing component 4 is pressed against the feed hole 21, the sealing member 32 is in extrusion fit with the cover plate 44 to realize the sealing of the cover plate 44 to the feed hole 21;

[0032] As Figures 3 - 5As shown, the sealing assembly 4 includes a cover plate member 44 and a driving assembly, and the driving assembly is used to drive the cover plate member 44 to rotate simultaneously;

[0033] Specifically, the number of the cover plate members 44 corresponds to the number of the feed pipes 2. The cover plate member 44 rotates to block the feed hole 21, thereby sealing the feed hole 21. The cover plate member 44 includes a mounting post 442, a cover plate main body 441, and a connecting post 443. Among them, the mounting post 442 is fixedly connected to the sealing seat 3. The cover plate main body 441 can rotate on the mounting post 442 and can also slide on the mounting post 442. That is to say, connecting holes are formed at the corresponding positions of the cover plate main body 441 and the mounting post 442, and the mounting post 442 is inserted into the connecting holes, so as to realize that the cover plate main body 441 can rotate on the mounting post 442 and can also slide on the mounting post 442. In other embodiments, the mounting post 442 is rotatably connected to the sealing seat 3, and the mounting post 442 is a spline. The connecting hole of the cover plate main body 441 is adapted to the spline, and the spline is inserted into the connecting hole, so that the cover plate main body 441 can also drive the spline to rotate, and the cover plate main body 441 can also slide on the spline. The connecting post 443 is fixedly connected to the cover plate main body 441, and the connecting post 443 is used to connect with the swing link 43 of the driving assembly;

[0034] As Figure 3 and Figure 4 as well as Figure 7 shown, the driving assembly includes a driving member, a first swing rod 42, and a swing link 43;

[0035] Among them, the driving member is a rotary cylinder 41 or a motor, preferably a rotary cylinder 41, so that the electrical components of the entire sealing mechanism are pneumatic, which can increase safety. Of course, in other embodiments, a motor can also be used as the driving member, and it can be selected according to the actual scenario; the rotary cylinder 41 is fixedly connected to the mounting bracket, and the mounting bracket can be fixedly connected to the outer wall of the CVD furnace 1, or the mounting bracket can also be installed on a fixed table surface such as the ground. The axis of the output shaft of the rotary cylinder 41 and the rotation axis of the cover body 441 are in the same line; both ends of the first swing rod 42 are respectively provided with a first through hole 423 and a shaft hole 421 adapted to the output shaft of the rotary cylinder 41. A threaded hole is formed on the first swing rod 42. One end of the threaded hole communicates with the shaft hole 421 and the other end communicates with the outside. A bolt 422 is screwed into the threaded hole. It can be understood that the output shaft of the rotary cylinder 41 is inserted into the shaft hole 421, and the operator can rotate the bolt 422 to make the bolt 422 abut against the outer wall of the output shaft of the rotary cylinder 41, so as to realize the fixed connection between the first swing rod 42 and the output shaft of the rotary cylinder 41; a number of first connection holes 431 corresponding to the cover plate members 44 are provided in the middle of the swing link 43, and the connecting columns 443 of the plurality of cover plate members 44 are respectively inserted into the plurality of first connection holes 431, so as to realize the connection between the cover plate members 44 and the swing link 43. Since the connecting column 443 is inserted into the first connection hole 431, the connecting column 443 can slide in the first connection hole 431; a second connection hole 432 is provided at the end of the swing link 43; the swing link 43 is connected to the first swing rod 42 by passing the bolt 422 through the second connection hole 432 and the first through hole 423 and blocking it with a nut.

[0036] In summary, it can be understood that when it is necessary to inject materials into the CVD furnace 1, the operator can first operate the clamp assembly 5 to make the clamp assembly 5 no longer press on the cover body 441. Then the operator can start the rotary cylinder 41. The output shaft of the rotary cylinder 41 rotates, and the rotation of the output shaft of the rotary cylinder 41 drives the first swing rod 42 to swing upward. The upward rotation of the first swing rod 42 drives the swing link 43 to rotate upward. The upward rotation of the swing link 43 drives all the connecting columns 443 to rotate upward, and the upward rotation of the connecting columns 443 causes the cover body 441 to rotate upward and rotate into the state as shown in Figure 4 At this time, the cover body 441 no longer blocks the feed hole 21, and the operator can place materials into the CVD furnace 1 through the feed hole 21. After the materials are placed, the operator only needs to restart the rotary cylinder 41 to reverse the output shaft of the rotary cylinder 41. The reverse rotation of the output shaft of the rotary cylinder 41 drives the first swing rod 42 to rotate, and the first swing rod 42 drives the swing link 43 to rotate downward, so that the cover body 441 rotates to block the feed hole 21, as shown in Figure 3As shown, the operator can then activate the clamp assembly 5, causing the clamp assembly 5 to press on the cover body 441. The cover body 441 will squeeze the seal 32 on the seal seat 3, thereby achieving the sealing of the feed hole 21.

[0037] Further, as Figure 5 shown, the sealing assembly 4 further includes a positioning pin 46 provided on the seal seat 3, and the cover member 44 further includes a gripper 444 provided on the cover body 441. When the cover member 44 seals the feed hole 21,

[0038] Among them, the positioning pin 46 is fixedly connected to the seal seat 3, and the positioning pin 46 and the rotation axis of the cover body 441 are on the same straight line. A gripper 444 is provided on the cover body 441, and the gripper 444 is integrally formed with the cover body 441. Since the gripper 444 is buckled on the positioning pin 46 when the cover member 44 seals the feed hole 21, it can play a role in limiting, preventing the cover body 441 from easily rotating downward by its own gravity after the rotary cylinder 41 is closed.

[0039] Further, as Figure 3 and Figure 4 shown, the drive assembly further includes a rotatable second swing rod 45, and the end of the second swing rod 45 is connected to the end of the swing link 43 away from the first swing rod 42.

[0040] Specifically, the second swing rod 45 is rotatably connected to the connecting shaft 451, and the connecting shaft 451 is fixedly connected to the fixed body. The fixed body can be the outer wall of the CVD furnace 1 or installed on the ground through a bracket, and the connecting shaft 451 is fixedly connected to the bracket; a second through hole 453 is provided at the end of the second swing rod 45, and a third connection hole 433 is provided at the end of the swing link 43 away from the first swing rod 42. The swing link 43 is connected to the second swing rod 45 by passing a bolt 422 through the second through hole 453 and the third connection hole 433 and blocking it with a nut. By providing the second swing rod 45, the swing link 43 can move more stably.

[0041] As Figure 8 shown, the clamp assembly 5 includes a mounting frame 51, a cylinder 52 rotatably connected to the mounting frame 51, a pressing rod 54 rotatably connected to the mounting frame 51, a pressing head 56 provided on the pressing rod 54, the pressing head 56 presses on the cover member 44, a rotating rod 53 provided between the output shaft of the cylinder 52 and the mounting frame 51, and a connecting rod 55 provided between the output shaft of the cylinder 52 and the pressing rod 54;

[0042] Specifically, the mounting bracket 51 is fixedly connected to the outer wall of the CVD furnace 1. The cylinder 52 is rotatably connected to the lower part of the mounting bracket 51. The pressing rod 54 is rotatably connected to the middle of the mounting bracket 51. The pressing head 56 is fixedly connected to the end of the pressing rod 54. The pressing head 56 presses the cover plate member 44. One end of the connecting rod 55 is rotatably connected to the mounting bracket 51, and the other end is rotatably connected to the output shaft of the cylinder 52. One end of the connecting rod 55 is rotatably connected to the pressing rod 54, and the other end is rotatably connected to the output shaft of the cylinder 52. It can be understood that as Figure 8 shown, at this time, the pressing head 56 is in a state of pressing the cover plate member 44, and the output shaft of the cylinder 52 is in an extended state. At this time, the operator can start the cylinder 52 to retract the output shaft of the cylinder 52. The retraction of the output shaft of the cylinder 52 drives the rotating rod 53 to rotate downward, and the connecting rod 55 also rotates downward. The downward rotation of the connecting rod 55 drives the pressing rod 54 to rotate downward, so that the pressing head 56 no longer presses the cover plate member 44. On the contrary, the operator can start the cylinder 52 to extend the output shaft of the cylinder 52, and drive the pressing rod 54 to rotate upward through the connecting rod 55, so that the pressing head 56 presses the cover plate member 44 again. Further, in other embodiments, the clamp assembly 5 can use a common pneumatic clamp on the market;

[0043] In summary, the operator only needs to start the rotating cylinder 41 to rotate the output shaft of the rotating cylinder 41, thereby driving the first swing rod 42 to rotate. The first swing rod 42 drives the swing link 43 to rotate and move downward, so that the cover plate main body 441 rotates to block the feeding hole 21. Thus, multiple cover plate members 44 can simultaneously block all the feeding holes 21. Then, by starting the clamp assembly 5, the clamp assembly 5 presses the cover plate member 44 to make the cover plate member 44 closely fit with the sealing seat 3, achieving a sufficient sealing effect. Compared with the prior art of manually installing the sealing cover, the solution of the present invention saves manpower, can achieve sufficient sealing of the feeding hole 21, and avoids the sealing error caused by manual operation.

[0044] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0045] The above-described embodiments merely represent several implementation manners of the present invention. The description thereof is relatively specific and detailed, but it should not be construed as a limitation to the scope of the patent for the present invention. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can still be made, and these all fall within the protection scope of the present invention. Therefore, the protection scope of the patent for the present invention shall be subject to the appended claims.

Claims

1. A sealing mechanism for feeding a CVD furnace, wherein a plurality of feed pipes are provided on the CVD furnace, characterized in that, The sealing mechanism includes a sealing seat provided on the feed pipe, a feed hole formed by sequentially penetrating the sealing seat, the feed pipe and the side wall of the CVD furnace, and materials are introduced into the CVD furnace through the feed hole; the sealing mechanism further includes a sealing component for plugging the feed holes of a plurality of the feed pipes simultaneously. The sealing component includes a plurality of cover plate members rotatably provided at the feed holes of a plurality of the feed pipes respectively, and a driving component for driving the plurality of cover plate members to rotate simultaneously; the cover plate members rotate to block the feed holes, thereby plugging the feed holes; the sealing mechanism further includes a clamp component corresponding to the cover plate members in number, and the clamp component is used to press the corresponding cover plate members against the feed holes.

2. The sealing mechanism according to claim 1, characterized in that, A ring-shaped groove is formed on one side of the sealing seat away from the feed pipe, and a sealing member adapted to the groove is embedded in the groove. When the cover plate member is pressed against the feed hole, the sealing member is in extrusion fit with the cover plate member to achieve sealing.

3. The sealing mechanism according to claim 1, characterized in that, The cover plate member includes a mounting post provided on the sealing seat, and a cover plate main body provided on the mounting post. The cover plate main body can rotate on the mounting post and can also slide on the mounting post.

4. The sealing mechanism according to claim 3, characterized in that, The cover plate member further includes a connecting post provided on the cover plate main body; the driving component includes a driving member, a first swing rod provided on the output shaft of the driving member, the driving component further includes a swing connecting rod, a plurality of first connecting holes corresponding to the cover plate members in number are formed on the swing connecting rod, and the connecting posts of the plurality of cover plate members respectively penetrate into the plurality of first connecting holes; one end of the swing connecting rod is connected to the end of the first swing rod.

5. The sealing mechanism according to claim 4, characterized in that, The sealing component further includes a positioning pin provided on the sealing seat, and the cover plate member further includes a handle provided on the cover plate main body. When the cover plate member plugs the feed hole, the handle is buckled on the positioning pin.

6. The sealing mechanism according to claim 4, characterized in that, The driving component further includes a rotatable second swing rod, and the end of the second swing rod is connected to the end of the swing connecting rod away from the first swing rod.

7. The sealing mechanism according to claim 4, characterized in that, A shaft hole adapted to the output shaft of the driving member is formed on the first swing rod, the output shaft of the driving member penetrates into the shaft hole, a threaded hole is formed on the first swing rod, one end of the threaded hole communicates with the shaft hole and the other end communicates with the outside, and a bolt is screwed into the threaded hole.

8. The sealing mechanism according to claim 4, characterized in that, A second connecting hole is formed at the end of the swing connecting rod, and a first through hole is formed at the end of the first swing rod. The swing connecting rod is connected to the first swing rod by screwing a bolt into the second connecting hole and the first through hole and plugging with a nut.

9. The sealing mechanism according to claim 6, wherein, The second swing rod is rotatably connected to a connecting shaft, the connecting shaft is fixedly connected to a fixed body, a second through hole is formed at the end of the second swing rod, a third connecting hole is formed at the end of the swing connecting rod away from the first swing rod, and the swing connecting rod is connected to the second swing rod by screwing a bolt into the second through hole and the third connecting hole and plugging with a nut.

10. The sealing mechanism according to claim 1, characterized in that, The clamp assembly includes a mounting bracket, a cylinder rotatably connected to the mounting bracket, a pressing rod rotatably connected to the mounting bracket, a pressing head provided on the pressing rod, the pressing head presses the cover plate member, a rotating rod provided between the output shaft of the cylinder and the mounting bracket, and a connecting rod provided between the output shaft of the cylinder and the pressing rod.

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