Air duct structure furnace body for rapid cooling

Abstract

The invention relates to the technical field of semiconductors, in particular to an air duct structure furnace body for rapid cooling, which consists of a vertical furnace, an air inlet system, a heat preservation structure, a bearing container, an air outlet, an axial air inlet duct, an air duct structure group, a furnace wire, an air outlet control valve, an air inlet control valve, a thermocouple sensor and a water cooling system. According to the vertical furnace, the air duct structure is reasonably spatially arranged and structurally optimized, so that the purposes of quickly cooling, reducing the corrosion of cooling gas to the inner wall of the furnace body, reducing the generation of fine pollution particles and prolonging the service life of the furnace body can be achieved, and the vertical furnace can run more safely and reliably.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and particularly to a furnace body with an air duct structure for rapid cooling. Background Art

[0002] In the process of chip manufacturing, the heat treatment equipment process is a crucial link. By performing various processes such as oxidation, deposition, annealing, and diffusion on the wafer, the physical and electrical properties of the chip can be precisely controlled. After completing the heat treatment process steps, it is necessary to cool down the wafer in the furnace body. In order to ensure the overall performance consistency and quality stability of the produced chips, it is necessary to reasonably control the cooling rate.

[0003] In the prior art, some heat treatment equipment adopts natural cooling methods, which have problems such as slow cooling speed and long process time, seriously affecting production efficiency. At the same time, for some processes that require a cooling rate, this heat treatment equipment cannot meet the corresponding production requirements. There are also some heat treatment equipment using air cooling, and the design of their air duct structure fails to fully consider the particularity of the semiconductor heat treatment process. For example, the air duct layout is not reasonable enough, resulting in the cold air not being able to evenly cover the furnace body, making the cooling speed of each part of the furnace body inconsistent, and thus affecting the uniformity of the performance of semiconductor devices.

[0004] In the process of cooling the wafer in the furnace body using the existing air duct structure, a fan is often used to accelerate the flow rate of the cooling gas in the air duct structure to take away the heat inside the furnace body. When the fan accelerates the flow of the cooling gas, the high-speed flowing cooling gas will generate a large impact force and frictional force on the thermal insulation material on the inner wall of the furnace body, thereby accelerating the erosion of the thermal insulation material. As time goes by, the structure and performance of the thermal insulation material will be gradually damaged, the thermal insulation fibers on its surface will gradually fall off, and fine particles will fall inside the furnace body. In the production process of semiconductor wafers, the cleanliness requirements for the production environment are extremely high. If these fine pollution particles float around in the furnace body under the action of the air flow, it will have an adverse impact on the internal environment of the furnace body. At the same time, if the furnace body is equipped with an exhaust system, it may reduce the impact of these fine pollution particles on the internal environment, but it will have an adverse impact on the service life and normal operation of the furnace body, thereby affecting the performance and yield of the entire semiconductor chip, increasing the equipment maintenance cost and production risk.

[0005] Therefore, on the premise of realizing air-cooling and temperature reduction of the wafer in the furnace body, how to reasonably arrange the space and optimize the structure of the air duct structure to achieve the purposes of rapid cooling, reducing the erosion of the cooling gas on the inner wall of the furnace body, reducing the generation of fine pollution particles, and improving the service life of the furnace body has become a technical problem that needs to be solved urgently by those skilled in the art. Summary of the Invention

[0006] The object of the present invention is to overcome the above-mentioned defects existing in the prior art, and provide a furnace body with an air duct structure for rapid cooling, so as to reduce the erosion of the cooling gas on the inner wall of the furnace body, reduce the generation of fine pollution particles, improve the service life of the vertical furnace, and realize the safer and more reliable operation of the vertical furnace.

[0007] To achieve the above object, the present invention provides a furnace body with an air duct structure for rapid cooling, including: a vertical furnace, an air inlet system arranged outside the vertical furnace, a heat preservation structure arranged on the inner wall of the vertical furnace, and a bearing container arranged inside the vertical furnace. The space between the heat preservation structure and the bearing container forms a furnace chamber. An axial air inlet duct and an air duct structure group extending along the axial direction and circumferential direction of the vertical furnace are arranged in the heat preservation structure; the input end of the axial air inlet duct is communicated with the output end of the air inlet system, the input end of the air duct structure group is communicated with the output end of the axial air inlet duct, and the output end of the air duct structure group is communicated with the furnace chamber; the vertical furnace is divided into multiple temperature zones according to its height, at least one air duct structure group is arranged in each temperature zone, and the number of air duct structure groups in each temperature zone is arranged according to a preset quantity ratio; along the circumferential direction of the vertical furnace, each air duct structure group includes a plurality of transverse air duct structures, and the adjacent two transverse air duct structures are distributed at a first preset angle; along the axial direction of the vertical furnace, the adjacent two transverse air duct structures in the adjacent two air duct structure groups are distributed at a second preset angle; each transverse air duct structure includes a connected long air duct and a ventilation chamber, and the long air duct and the ventilation chamber are arranged according to a preset length ratio and a preset diameter ratio, so as to reduce the wind pressure intensity of the cooling gas at the output end of the transverse air duct structure.

[0008] Preferably, the number of air duct structure groups in each temperature zone is arranged according to a preset quantity ratio, including: the vertical furnace is divided into X temperature zones according to its height, the number of air duct structure groups in the bottom temperature zone is set to Y, and Y is an integer greater than 1. Then, from the top to the bottom of the vertical furnace, the quantity ratio of the air duct structure groups in each temperature zone is: (Y X +1 to 2): (Y X-1 +1 to 2):...: (Y 1 to 1), where: Y X represents the number of air duct structure groups in the Xth temperature zone, and the values of Y X , Y X-1 ,..., Y 1 are the same.

[0009] Preferably, along the circumferential direction of the vertical furnace, each air duct structure group includes a plurality of transverse air duct structures, and the adjacent two transverse air duct structures are distributed at a first preset angle, including: along the circumferential direction of the vertical furnace, the number of transverse air duct structures in each air duct structure group is 2 to 30, and the angle between the adjacent two transverse air duct structures is 12 to 180°.

[0010] Preferably, along the axial direction of the vertical furnace, adjacent two transverse air duct structures in adjacent two air duct structure groups are distributed at a second preset angle, including: along the axial direction of the vertical furnace, the angle between adjacent two transverse air duct structures in adjacent two air duct structure groups is 0 to 90°.

[0011] Preferably, the number of the long air ducts is two, namely a first long air duct and a second long air duct. The first long air duct, the air change chamber and the second long air duct are arranged in sequence along the transverse extension direction of the vertical furnace, and the first long air duct is arranged close to the furnace chamber. The length ratio among the first long air duct, the air change chamber and the second long air duct is (1 to 10):(1 to 10):(1 to 10), and the diameter ratio among the first long air duct, the air change chamber and the second long air duct is (1 to 10):(1 to 10):(1 to 10).

[0012] Preferably, a heating wire is laid on the inner surface of the heat insulation structure, and the heating wire is made of a material with high temperature resistance and fast heating.

[0013] Preferably, an air exhaust port is arranged at the top of the vertical furnace, an air exhaust system is arranged outside the vertical furnace, an air outlet control valve is arranged at the air exhaust port, the air outlet of the air control valve is communicated with the input end of the air exhaust system, and the output end of the air exhaust system is communicated with an external plant service end for discharging the waste gas inside the vertical furnace to the external plant service end.

[0014] Preferably, the axial air inlet duct is provided with an air inlet communicating with the outside of the heat insulation structure, an air inlet control valve is arranged at the air inlet, and the air inlet of the air inlet control valve is communicated with the output end of the air inlet system for introducing the cooling air flow conveyed by the air inlet system through the air inlet. The cooling air flow sequentially passes through the axial air inlet duct and the air duct structure group and enters the furnace chamber, and is discharged from the air exhaust port after heat exchange.

[0015] Preferably, a plurality of thermocouple sensors are arranged on the outer wall of the vertical furnace, and one thermocouple sensor is correspondingly arranged for each temperature zone.

[0016] Preferably, a water cooling system for cooling the outer wall of the vertical furnace is further arranged on the outer wall of the vertical furnace.

[0017] The advantages and beneficial effects of the present invention are as follows: A furnace body with an air duct structure for rapid cooling provided by the present invention, by setting an air inlet system, an air inlet, an axial air duct, an air duct structure group, and an air outlet, introduces the cooling air flow conveyed by the air inlet system through the air inlet, and the cooling gas sequentially passes through the axial air duct and the air duct structure group and enters the furnace chamber, and is discharged from the air outlet after heat exchange, so as to achieve rapid cooling of the furnace chamber; by dividing multiple temperature zones according to the height of the vertical furnace and optimizing the number of air duct structure groups in each temperature zone, when the cooling gas flows from the bottom temperature zone to the upper temperature zone of the furnace chamber, the cooling effect in the upper and middle parts of the furnace chamber can be effectively increased; by optimizing the number of transverse air duct structures, the included angle between two adjacent transverse air duct structures, and the included angle between two adjacent transverse air duct structures in two adjacent air duct structure groups along the circumferential direction and the axial direction of the vertical furnace respectively, not only can the cooling rate of the vertical furnace in the circumferential direction and the cooling effect in the axial direction be improved, but also the problem of reduced heat preservation effect of the vertical furnace caused by arranging too many transverse air duct structures can be avoided, thus ensuring the heat preservation effect of the vertical furnace; by setting a transverse air duct structure composed of a long air duct and a ventilation chamber, not only can the wind pressure intensity and gas turbulence effect at the output end of the transverse air duct structure of the cooling gas be effectively reduced, thereby reducing the erosion degree of the flowing cooling gas on the inner wall of the vertical furnace, but also the problem of reduced yield rate of wafers caused by the generation of fine pollution particles can be avoided, and the service life of the vertical furnace can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic structural diagram of the furnace body with an air duct structure for rapid cooling of the present invention.

[0019] Figure 2 It is a top view of the air duct structure group of the present invention.

[0020] Figure 3 It is a schematic structural diagram of the transverse air duct structure of the present invention.

[0021] Figure 4 It is a flow chart of air cooling for the present invention.

[0022] Figure 5 It is a schematic diagram of the distribution of two adjacent transverse air duct structures in two adjacent air duct structure groups of the present invention at a second preset included angle.

[0023] Figure 6 It is a schematic diagram of the distribution of two adjacent transverse air duct structures in a scenario of uneven layout of multiple transverse air duct structures of the present invention at a first preset included angle.

[0024] Reference numerals: vertical furnace 1, axial air inlet duct 2, air duct structure group 3, bearing container 4, air inlet system 5, air exhaust system 6, heating wire 7, heat preservation structure 8, thermocouple sensor 9, air exhaust port 10, air outlet control valve 11, air inlet 12, air inlet control valve 13, water cooling system 14, upper temperature zone 15, middle temperature zone 16, lower temperature zone 17, transverse air duct structure 3.1, first long air duct 3.1.1, air exchange chamber 3.1.2, second long air duct 3.1.3, transverse air duct structure A of the current layer, transverse air duct structure B of the adjacent layer, second preset angle α. Detailed implementation manners

[0025] The embodiments of the present application will be described in detail below. The examples of the embodiments are shown in the accompanying drawings, in which the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application and should not be construed as a limitation to the present application. Without conflict, the features in the following embodiments and the embodiments can be combined with each other. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative efforts belong to the scope protected by the present application.

[0026] In the description of the present application, it should be noted that, unless otherwise clearly defined and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations.

[0027] Refer to the attached Figure 1-3 , a furnace body with an air duct structure for rapid cooling, which is composed of a vertical furnace 1, an air inlet system 5, a heat preservation structure 8, a bearing container 4, an air exhaust port 10, an axial air inlet duct 2, an air duct structure group 3, a heating wire 7, an air outlet control valve 11, an air inlet control valve 13, a thermocouple sensor 9 and a water cooling system 14 and other structures.

[0028] In this embodiment, refer to the attached Figure 1, a heat insulation structure 8 is provided on the inner wall of the vertical furnace 1, and a carrier container 4 is arranged inside the vertical furnace 1. The space between the heat insulation structure 8 and the carrier container 4 forms a furnace chamber. The inner surface of the heat insulation structure 8 is laid with heating wires 7. Among them, the heat insulation structure 8 is made of high-temperature heat insulation materials and composite materials. For example, the heat insulation structure 8 can be made of polycrystalline alumina fiber heat insulation materials to improve the heat insulation effect of the vertical furnace 1; the carrier container 4 is made of quartz tube materials and is used to load a boat, and the boat can accommodate multiple wafers; the heating wires 7 are made of materials with high temperature resistance and fast heating. The heating wires 7 are evenly installed on the inner surface of the heat insulation structure 8. The heating wires 7 can be made of iron-chromium-aluminum alloy resistance wire materials. When the vertical furnace 1 is working, a large amount of heat can be generated, and various process treatments can be performed on the wafers on the boat through the carrier container 4.

[0029] In this embodiment, in order to achieve the air-cooling and temperature-lowering function inside the furnace chamber, shorten the wafer processing time, and thus improve the production efficiency, an air inlet system 5 is arranged outside the vertical furnace 1 in this application. An axial air inlet duct 2 and a duct structure group 3 extending along the axial and circumferential directions of the vertical furnace 1 are provided inside the heat insulation structure 8. The axial air inlet duct 2 is used to convey cooling gas along the axial extension direction of the vertical furnace 1, and the duct structure group 3 is used to convey cooling gas along the radial extension direction of the vertical furnace 1. Among them, the input end of the axial air inlet duct 2 is communicated with the output end of the air inlet system 5, the input end of the duct structure group 3 is communicated with the output end of the axial air inlet duct 2, and the output end of the duct structure group 3 is communicated with the furnace chamber, and is used to convey the cooling gas conveyed by the air inlet system 5 to the furnace chamber after passing through the axial air inlet duct 2 and the duct structure group 3, and use the heat exchange principle to quickly cool down the furnace chamber, and finally discharge the waste gas inside the vertical furnace 1 to the external plant through the air outlet 10 and the exhaust system 6.

[0030] In this embodiment, since the temperature of the cooling gas will gradually rise when it flows from the bottom of the furnace chamber to the upper part of the furnace chamber, which will lead to a gradual reduction in the cooling effect. In order to increase the cooling effect in the upper and middle parts of the furnace chamber to meet the requirement of uniform temperature reduction, it is necessary to add multiple duct structure groups 3 at the upper and middle positions of the furnace chamber to accelerate the introduction of cooling gas. In this application, the vertical furnace 1 is divided into multiple temperature zones according to its height, and the quantity and spatial layout of the duct structure groups 3 in each section of the temperature zone are optimized, which can not only achieve the rapid cooling of the furnace chamber, but also effectively increase the cooling effect in the upper and middle parts of the furnace chamber, so as to meet the requirement of uniform temperature reduction and ensure the yield rate of wafers; specifically: multiple temperature zones are divided according to the height of the vertical furnace 1, at least one duct structure group 3 is arranged in each temperature zone, and the quantities of the duct structure groups 3 in each temperature zone are arranged according to a preset quantity ratio. During the process of conveying cooling gas to the furnace chamber through the axial air inlet duct 2 and the duct structure group 3, when the cooling gas flows from the temperature zone at the bottom to the temperature zone at the upper part of the furnace chamber, it is used to increase the cooling effect in the upper and middle parts of the furnace chamber.

[0031] In this embodiment, along the axial direction of the vertical furnace 1, a plurality of air duct structure groups 3 are evenly arranged in each temperature zone of the vertical furnace 1. The specific arrangement of the number of air duct structure groups 3 in each temperature zone according to a preset quantity ratio is as follows: The vertical furnace 1 is divided into X temperature zones according to its height, and the number of air duct structure groups 3 in the bottom temperature zone is set to Y, where Y is an integer greater than 1. Then, from the top to the bottom of the vertical furnace 1, the quantity ratio of the air duct structure groups 3 in each temperature zone is: (Y X +1 to 2): (Y X-1 +1 to 2):...: (Y 1 to 1), where: Y X represents the number of air duct structure groups 3 in the Xth temperature zone, and the values of Y X , Y X-1 ,..., Y 1 are the same; in addition, it should be noted that if the number of set temperature zones X is larger, the number of air duct structure groups 3 in a single temperature zone is smaller. At the same time, if the height of the vertical furnace 1 is defined as H, then the height h of the temperature zone is H / X, and the air duct structure groups 3 in each temperature zone can be arranged at equal intervals or unevenly, which can be flexibly adjusted according to actual production needs and will not be limited here.

[0032] For example, in this embodiment, referring to the appendix Figure 1 , the vertical furnace 1 is divided into three temperature zones from top to bottom, namely the lower temperature zone 17, the middle temperature zone 16, and the upper temperature zone 15. Since the cooling effect will decrease after the cooling gas is introduced from the lower air inlet 12 and reaches the middle temperature zone 16 and the upper temperature zone 15, the number of air duct structure groups 3 arranged in the upper temperature zone 15 and the middle temperature zone 16 will exceed the number of air duct structure groups 3 arranged in the lower temperature zone 17. For example, the quantity ratio range of the air duct structure groups 3 in the upper temperature zone 15, the middle temperature zone 16, and the lower temperature zone 17 is (10 to 2): (10 to 2): (10 to 1). Preferably, the quantity ratio of the air duct structure groups 3 in the upper temperature zone 15, the middle temperature zone 16, and the lower temperature zone 17 is 3:3:2.

[0033] In this embodiment, since the number of the transverse air duct structures 3.1 in the same transverse direction affects the cooling rate in this transverse direction, and a larger number of the transverse air duct structures 3.1 will also reduce the heat preservation effect of the vertical furnace 1. Therefore, in order to improve both the cooling rate of the vertical furnace 1 in the circumferential direction and the cooling effect in the axial direction, and to ensure the heat preservation effect of the vertical furnace 1, the present application optimizes the number and spatial layout of the transverse air duct structures 3.1 in the same circumferential direction and the spatial layout between two adjacent transverse air duct structures 3.1 in the axial direction of the vertical furnace 1, which can not only improve the cooling rate of the vertical furnace 1 in the circumferential direction and the cooling effect in the axial direction, but also avoid the problem of the reduced heat preservation effect of the vertical furnace 1 caused by arranging too many transverse air duct structures 3.1, thereby ensuring the heat preservation effect of the vertical furnace 1. Specifically, along the circumferential direction of the vertical furnace 1, each air duct structure group 3 includes a plurality of transverse air duct structures 3.1, and the adjacent two transverse air duct structures 3.1 are distributed at a first preset angle. Along the axial direction of the vertical furnace 1, the adjacent two transverse air duct structures 3.1 in the adjacent two air duct structure groups 3 are distributed at a second preset angle. Refer to the attached Figure 5 , the solid line part represents a transverse air duct structure 3.1 included in the air duct structure group of the current layer. For example, if A represents the transverse air duct structure of the current layer, the dotted line part represents the transverse air duct structure 3.1 adjacent to A in the air duct structure group of the adjacent layer (i.e., the upper layer or the lower layer relative to the current layer). If B represents the transverse air duct structure of the adjacent layer, the angle between A and B is the second preset angle. If α represents the second preset angle, it is used to improve the cooling rate of the vertical furnace 1 in the circumferential direction and the cooling effect in the axial direction, and to ensure the heat preservation effect of the vertical furnace 1.

[0034] In this embodiment, in the same transverse direction, the air duct structure group 3 is composed of a plurality of transverse air duct structures 3.1. The number of the transverse air duct structures 3.1 in each air duct structure group 3 is 2 to 30, and the angle between the adjacent two transverse air duct structures 3.1 is 12 to 180°. Along the axial direction of the vertical furnace 1, the angle between the adjacent two transverse air duct structures 3.1 in the adjacent two air duct structure groups 3 is 0 to 90°. For example, refer to the attached Figure 5 , the angle α between A and B is 15°.

[0035] For example, in this embodiment, refer to the attached Figure 2, in the same horizontal direction, the air duct structure group 3 includes three horizontal air duct structures 3.1, and the included angle between two adjacent horizontal air duct structures 3.1 is 120°; in addition, it should be noted that in the same horizontal direction, multiple horizontal air duct structures 3.1 can be arranged evenly at equal intervals or unevenly, and can be flexibly adjusted according to actual production needs, and will not be limited here. If multiple horizontal air duct structures 3.1 are arranged evenly at equal intervals, the efficiency of air intake and the air flow uniformity can be further improved.

[0036] For example, in this embodiment, for the scenario where multiple horizontal air duct structures 3.1 are unevenly arranged, in the circumferential direction of the vertical furnace 1, the air duct structure group 3 includes six horizontal air duct structures 3.1. The circumferential extension direction of the vertical furnace can be divided into three equal parts, and two horizontal air duct structures 3.1 are arranged at each 120° angular position. The included angle between these two horizontal air duct structures 3.1 is 20° (refer to the appendix Figure 6 ), which can achieve a better cooling effect on the premise of ensuring that the cooling gases blown out by two adjacent horizontal air duct structures 3.1 do not interfere with each other.

[0037] In this embodiment, since the traditional air duct structure with a single diameter cannot reduce the wind pressure intensity and gas turbulence effect at the output end of the horizontal air duct structure 3.1, the high-pressure flowing cooling gas will cause serious erosion to the inner wall of the vertical furnace 1. Therefore, in this application, by adopting a horizontal air duct structure 3.1 composed of a long air duct and a ventilation chamber 3.1.2, the structure of the horizontal air duct structure 3.1 is optimized, so that when the cooling gas reaches the output end of the horizontal air duct structure 3.1 through the ventilation chamber 3.1.2, it can not only effectively reduce the wind pressure intensity and gas turbulence effect at the output end of the horizontal air duct structure 3.1, thereby reducing the erosion degree of the flowing cooling gas on the inner wall of the vertical furnace 1, but also avoid the problem of reduced yield of wafers caused by the generation of fine pollution particles, and can improve the service life of the vertical furnace 1; specifically: each horizontal air duct structure 3.1 includes a connected long air duct and a ventilation chamber 3.1.2, and the long air duct and the ventilation chamber 3.1.2 are arranged according to a preset length ratio and a preset diameter ratio, so as to reduce the wind pressure intensity at the output end of the horizontal air duct structure 3.1, thereby reducing the erosion degree of the flowing cooling gas on the inner wall of the vertical furnace 1.

[0038] In this embodiment, the number of long air ducts is two, namely the first long air duct 3.1.1 and the second long air duct 3.1.3. The first long air duct 3.1.1, the air change chamber 3.1.2, and the second long air duct 3.1.3 are arranged in sequence along the transverse extension direction of the vertical furnace 1. The first long air duct 3.1.1 is arranged close to the furnace chamber. The length ratio among the first long air duct 3.1.1, the air change chamber 3.1.2, and the second long air duct 3.1.3 is (1 - 10):(1 - 10):(1 - 10), and the diameter ratio among the first long air duct 3.1.1, the air change chamber 3.1.2, and the second long air duct 3.1.3 is (1 - 10):(1 - 10):(1 - 10). By optimizing the length ratio and diameter ratio of the first long air duct 3.1.1, the air change chamber 3.1.2, and the second long air duct 3.1.3, when the air intake volume is the same, the wind pressure intensity at the output end of the transverse air duct structure 3.1 can be reduced by 6 - 12%, and the pressure contour line can be reduced by 8 - 16%, so as to effectively reduce the erosion of the inner wall of the vertical furnace 1, and further reduce the generation of fine pollution particulate matters.

[0039] For example, in this embodiment, referring to Appendix Figure 2 and Appendix Figure 3 , the length ratio among the first long air duct 3.1.1, the air change chamber 3.1.2, and the second long air duct 3.1.3 is 1:1:2, and the diameter ratio among the first long air duct 3.1.1, the air change chamber 3.1.2, and the second long air duct 3.1.3 is 1:2:1. The test results show that when using the transverse air duct structure 3.1 in this embodiment compared with the traditional air duct structure with a single diameter, when the air intake volume is the same, the wind pressure intensity at the output end of the transverse air duct structure 3.1 is reduced by 8%, and the pressure contour line is reduced by 11%. The wind pressure of the cooling gas drops, which can effectively reduce the erosion of the inner wall of the vertical furnace 1 and reduce the generation of fine pollution particulate matters.

[0040] In this embodiment, referring to Appendix Figure 4 , the top of the vertical furnace 1 is provided with an air outlet 10. An exhaust air system 6 is provided outside the vertical furnace 1. An air outlet control valve 11 is arranged at the air outlet 10. The air outlet of the air control valve is connected to the input end of the exhaust air system 6, and the output end of the exhaust air system 6 is connected to the external plant service end, for discharging the waste gas inside the vertical furnace 1 to the external plant service end; the axial air inlet duct 2 is provided with an air inlet 12 communicating with the outside of the heat preservation structure 8. An air inlet control valve 13 is arranged at the air inlet 12. The air inlet of the air inlet control valve 13 is connected to the output end of the air inlet system 5, for introducing the cooling air flow conveyed by the air inlet system 5 through the air inlet 12. The cooling air flow passes through the axial air inlet duct 2 and the air duct structure group 3 in sequence and then enters the furnace chamber, and is discharged from the air outlet 10 after heat exchange, so as to realize rapid cooling of the furnace chamber.

[0041] In this embodiment, a plurality of thermocouple sensors 9 are provided on the outer wall of the vertical furnace 1, and one thermocouple sensor 9 is arranged corresponding to each temperature zone. The thermocouple sensors 9 are arranged and installed according to the divided temperature zones so as to monitor the real-time temperature of each temperature zone in real time.

[0042] In this embodiment, a water cooling system 14 for cooling the outer wall of the vertical furnace 1 is further provided on the outer wall of the vertical furnace 1. By setting the water cooling system 14, the outer wall of the vertical furnace 1 can be cooled.

[0043] The above content is a further detailed description of the present invention in combination with specific implementation manners. It cannot be determined that the specific implementation of the present invention is only limited to these descriptions. For those of ordinary skill in the technical field to which the present invention belongs, without departing from the concept of the present invention, several simple deductions or substitutions can be made, and all should be regarded as belonging to the protection scope of the present invention.

Claims

1. An air duct structure furnace body for rapid cooling, characterized in that Including: A vertical furnace, an air inlet system arranged outside the vertical furnace, a heat preservation structure arranged on the inner wall of the vertical furnace, and a bearing container arranged inside the vertical furnace. The space between the heat preservation structure and the bearing container forms a furnace chamber. An axial air inlet duct and a group of duct structures extending along the axial and circumferential directions of the vertical furnace are arranged inside the heat preservation structure. The input end of the axial air inlet duct is communicated with the output end of the air inlet system, the input end of the group of duct structures is communicated with the output end of the axial air inlet duct, and the output end of the group of duct structures is communicated with the furnace chamber. The vertical furnace is divided into multiple temperature zones according to its height. At least one group of duct structures is arranged in each temperature zone, and the number of duct structure groups in each temperature zone is arranged according to a preset quantity ratio. Along the circumferential direction of the vertical furnace, each group of duct structures includes multiple transverse duct structures, and the adjacent two transverse duct structures are distributed at a first preset angle. Along the axial direction of the vertical furnace, the adjacent two transverse duct structures in the adjacent two groups of duct structures are distributed at a second preset angle. Each transverse duct structure includes a long duct and a ventilation chamber which are communicated. The long duct and the ventilation chamber are arranged according to a preset length ratio and a preset diameter ratio, so as to reduce the wind pressure intensity of the cooling gas at the output end of the transverse duct structure.

2. The air duct structure furnace body for rapid cooling according to claim 1, characterized in that, The numbers of the air duct structure groups in each of the temperature zones are arranged according to a preset quantity ratio, including: the vertical furnace is divided into X temperature zones according to its height, and the number of the air duct structure groups in the temperature zone at the bottom is set to Y, where Y is an integer greater than 1. Then, from the top to the bottom of the vertical furnace, the quantity ratio of the air duct structure groups in each temperature zone is: (Y X +1 to 2): (Y X-1 +1 to 2):...: (Y1 to 1), where: Y X represents the number of the air duct structure groups in the Xth temperature zone, and the values of Y X , Y X-1 ,... Y1 are the same.

3. A duct structure furnace body for rapid cooling according to claim 1, characterized in that, Along the circumferential direction of the vertical furnace, each group of duct structures includes multiple transverse duct structures, and the adjacent two transverse duct structures are distributed at a first preset angle, including: along the circumferential direction of the vertical furnace, the number of transverse duct structures in each group of duct structures is 2 to 30, and the angle between the adjacent two transverse duct structures is 12 to 180°.

4. A furnace body with an air duct structure for rapid cooling according to claim 1, characterized in that, Along the axial direction of the vertical furnace, the adjacent two transverse duct structures in the adjacent two groups of duct structures are distributed at a second preset angle, including: along the axial direction of the vertical furnace, the angle between the adjacent two transverse duct structures in the adjacent two groups of duct structures is 0 to 90°.

5. A furnace body with an air duct structure for rapid cooling according to claim 1, characterized in that, The number of the long ducts is two, namely a first long duct and a second long duct. The first long duct, the ventilation chamber and the second long duct are arranged in sequence along the transverse extension direction of the vertical furnace, and the first long duct is close to the furnace chamber. The length ratio among the first long duct, the ventilation chamber and the second long duct is (1 to 10):(1 to 10):(1 to 10), and the diameter ratio among the first long duct, the ventilation chamber and the second long duct is (1 to 10):(1 to 10):(1 to 10).

6. A furnace body with an air duct structure for rapid cooling according to claim 1, characterized in that, The inner side surface of the heat preservation structure is coated with heating wires, and the heating wires are made of materials with high temperature resistance and fast heating.

7. A furnace body with an air duct structure for rapid cooling according to claim 1, characterized in that, An air outlet is arranged at the top of the vertical furnace, an exhaust system is arranged outside the vertical furnace, an air outlet control valve is arranged at the air outlet, the air outlet of the air control valve is communicated with the input end of the exhaust system, and the output end of the exhaust system is communicated with an external plant service end, so as to discharge the waste gas inside the vertical furnace to the external plant service end.

8. The air duct structure furnace body for rapid cooling according to claim 7, characterized in that, The axial air inlet duct is provided with an air inlet communicating with the outside of the heat preservation structure. An air inlet control valve is provided at the air inlet. The air inlet of the air inlet control valve is communicated with the output end of the air inlet system, and is used to introduce the cooling air flow conveyed by the air inlet system through the air inlet. The cooling air flow sequentially passes through the axial air inlet duct and the air duct structure group and enters the furnace chamber, and is discharged from the air outlet after heat exchange.

9. A furnace body with an air duct structure for rapid cooling according to claim 1, characterized in that, A plurality of thermocouple sensors are provided on the outer wall of the vertical furnace, and one thermocouple sensor is arranged corresponding to each temperature zone.

10. A furnace body with an air duct structure for rapid cooling according to claim 1, characterized in that, The outer wall of the vertical furnace is further provided with a water cooling system for cooling the outer wall of the vertical furnace.

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