Test tool

Abstract

The invention belongs to the technical field of chip testing, and discloses a testing tool. The testing tool comprises a bottom plate, a positioning plate and a pressure head assembly, a probe assembly is arranged on the bottom plate, the positioning plate is installed on the bottom plate, a positioning space is arranged in the middle of the positioning plate, a to-be-tested product can be placed in the positioning space and makes contact with the probe assembly, and the pressure head assembly is detachably arranged on the positioning plate. The pressing head assembly is used for fixing a to-be-tested product in the positioning space and providing downward pressure for the to-be-tested product, good contact between the to-be-tested product and the probe assembly is guaranteed, damage to the product due to excessive extrusion is avoided, meanwhile, each probe is composed of an elastic arm and a probe head, and the probe head is not prone to damage. The elastic characteristic of the elastic arm can ensure the reliable contact between the probe head and the product to be tested, the distance between the probes can be reduced to 55 [mu] m which is far lower than the limitation of a traditional POGO probe, the test requirements of the product to be tested are perfectly met, and the applicability and the precision of the test tool are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of chip testing, and particularly to a testing fixture. Background Art

[0002] With the continuous development of electronic product manufacturing technology, the performance testing of various electronic components has become an indispensable part of the production process. To ensure product quality, it is usually necessary to accurately position and fix the product to be tested during the production process, and detect its performance through testing devices such as probes.

[0003] Traditional testing fixtures mostly adopt bolt fixation or manual clamping methods. Although the fixation of the product to be tested can be achieved to a certain extent, they have complex operations and are not convenient for quick disassembly and assembly, resulting in low testing efficiency. In addition, POGO probes are mostly used for the probes in existing testing fixtures. To ensure the testing function, POGO probes require an additional elastic structure to provide contact force, resulting in the probe pitch usually needing to be maintained above 400μm, and being unable to meet the requirements of stacked structure chips for extremely small testing pitches.

[0004] Therefore, there is an urgent need for a testing fixture to solve the above technical problems. Summary of the Invention

[0005] The purpose of the present invention is to provide a testing fixture to ensure that the position of the product to be tested is more stable, improve the testing efficiency, and be able to meet the testing requirements of the product to be tested, thereby improving the applicability of the fixture.

[0006] To achieve this purpose, the present invention adopts the following technical solutions:

[0007] A bottom plate, on which a probe assembly is provided. The probe assembly includes a ceramic disk and a plurality of probes. The plurality of probes are arranged at intervals on the ceramic disk. Each probe includes a spring arm and a probe head. The probe head is arranged at the first end of the spring arm and is perpendicular to the spring arm;

[0008] A positioning plate, arranged on the bottom plate. A positioning space is provided on the positioning plate. The vertical projections of the plurality of probe heads are located within the positioning space. The product to be tested can be placed in the positioning space and contact the plurality of probe heads;

[0009] A pressing head assembly, detachably arranged on the positioning plate. The pressing head assembly is used to fix the product to be tested in the positioning space and provide a downward pressure for the product to be tested.

[0010] Optionally, the probe further includes a probe tail, which is disposed at the second end of the elastic arm and perpendicular to the elastic arm. The probe head faces upward of the elastic arm, and the probe tail faces downward of the elastic arm. The probe tail can be electrically connected to the PCB board.

[0011] Optionally, the elastic arm includes a first arm segment and a second arm segment. One end of the first arm segment is connected to the probe tail, and the other end is connected to the second arm segment. The end of the second arm segment far from the first arm segment is connected to the probe head. Along the length direction of the second arm segment, a strip-shaped hole is formed in the second arm segment.

[0012] Optionally, the width of the middle part of the first arm segment is W1, the width of the first arm segment connected to the probe tail is W2, and the width of the end of the first arm segment connected to the second arm segment is W3, where W2≥W3>W1.

[0013] Optionally, the first arm segment and the second arm segment form an included angle α in the horizontal plane, where 0°≤α≤15°.

[0014] Optionally, a plurality of limiting grooves are arrayed on the ceramic disc, and the limiting grooves correspond to the probes one by one. At least part of the probe heads protrude from their corresponding limiting grooves.

[0015] Optionally, clamping grooves are respectively provided on both sides of the positioning plate. The pressing head assembly includes a pressing plate and two buckle assemblies. The two buckle assemblies are respectively arranged on both sides of the pressing plate, and each buckle assembly can be clamped with its corresponding clamping groove.

[0016] Optionally, the buckle assembly includes:

[0017] A buckle, which is rotatably connected to the pressing plate;

[0018] A first elastic member, one end of which abuts against the pressing plate and the other end abuts against the buckle. The first elastic member is used to provide a torsional force for the buckle so that the buckle is clamped in the clamping groove.

[0019] Optionally, the buckle includes a body part, a hook part and an abutting part. The body part is rotatably connected to the pressing plate. The abutting part and the hook part are respectively located on both sides of the body part. The abutting part is connected to the first elastic member, and the hook part can be hooked in the clamping groove.

[0020] Optionally, a first assembly groove is provided on the pressing plate, and a rotating shaft is provided in the first assembly groove. The buckle is rotatably connected to the rotating shaft.

[0021] Beneficial effects:

[0022] The test fixture provided by the present invention includes a bottom plate, a positioning plate, and a pressing head assembly. A probe assembly is provided on the bottom plate. The positioning plate is installed on the bottom plate. A positioning space is provided in the middle of the positioning plate. The product to be tested can be placed in the positioning space and contacted with the probe assembly. The pressing head assembly is detachably arranged on the positioning plate. The pressing head assembly is used to fix the product to be tested in the positioning space and provide a downward pressure for the product to be tested, which not only ensures good contact between the product to be tested and the probe assembly but also avoids damage to the product caused by excessive extrusion. The design of the pressing head assembly being detachably arranged on the positioning plate simplifies the installation and disassembly process of the product to be tested, thus significantly improving the test efficiency. At the same time, each probe consists of a spring arm and a probe head. The elastic characteristics of the spring arm can ensure reliable contact between the probe head and the product to be tested. Through this design, the probe pitch can be reduced to 55μm, far lower than the limit of traditional POGO probes, perfectly adapting to the test requirements of the product to be tested and improving the applicability and accuracy of the test fixture. Brief Description of the Drawings

[0023] Figure 1 is an exploded view of the test fixture provided by the present invention;

[0024] Figure 2 is a cross-sectional view of the base and the positioning plate assembled according to the present invention;

[0025] Figure 3 is a schematic diagram of the cooperation structure between the ceramic disc and the probe provided by the present invention

[0026] Figure 4 is an axonometric view of the probe provided by the present invention;

[0027] Figure 5 is a top view of the probe provided by the present invention;

[0028] Figure 6 is a side view of the test fixture provided by the present invention;

[0029] Figure 7 is a top view of the test fixture provided by the present invention;

[0030] Figure 8 is Figure 7 the cross-sectional view at A - A in

[0031] In the figures:

[0032] 10. Product to be tested;

[0033] 100. Bottom plate; 110. Probe assembly; 111. Ceramic disc; 1111. Limit groove; 112. Probe; 1121. Probe head; 1122. Spring arm; 11221. First arm segment; 11222. Second arm segment; 11223. Slotted hole; 1123. Probe tail; 120. Second relief groove;

[0034] 200. Positioning plate; 210. Positioning space; 220. First relief groove; 230. Card slot;

[0035] 300. Press head assembly; 310. Press plate; 311. First assembly groove; 312. Second assembly groove; 313. Limiting part; 320. Snap component; 321. Snap; 3211. Body part; 3212. Hook part; 3213. Abutting part; 322. First elastic member; 323. Rotating shaft; 330. Press head; 340. Second elastic member. Detailed implementation manner

[0036] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present invention, rather than limiting the present invention. In addition, it should be noted that, for the sake of convenience of description, only parts related to the present invention rather than all structures are shown in the drawings.

[0037] In the description of the present invention, unless otherwise clearly defined and limited, the terms "connected", "connected", and "fixed" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected, or indirectly connected through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0038] In the present invention, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features between them. Moreover, the first feature being "above", "above", and "on" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "below", "below", and "under" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0039] In the description of this embodiment, the orientation or positional relationship terms such as "above", "below", "left", and "right" are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present invention. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0040] This embodiment provides a test tooling, as Figures 1-8 shown, the test tooling includes a bottom plate 100, a positioning plate 200 and a pressing head assembly 300. A probe assembly 110 is provided on the bottom plate 100. The probe assembly 110 includes a ceramic disc 111 and a plurality of probes 112. The plurality of probes 112 are arranged at intervals on the ceramic disc 111. Each probe 112 includes a spring arm 1122 and a probe head 1121. The probe head 1121 is arranged at the first end of the spring arm 1122 and is perpendicular to the spring arm 1122; a dry limit groove 1111, the limit groove 1111 corresponds to the probe 112 one by one, and at least part of the probe head 1121 protrudes from the corresponding limit groove 1111. The positioning plate 200 is arranged on the bottom plate 100. A positioning space 210 is provided on the positioning plate 200. The vertical projections of the plurality of probe heads 1121 are located within the positioning space 210. The product 10 to be tested can be placed in the positioning space 210 and contact the plurality of probe heads 1121. The pressing head assembly 300 is detachably arranged on the positioning plate 200. The pressing head assembly 300 is used to fix the product 10 to be tested in the positioning space 210 and provide a downward pressure for the product 10 to be tested, which not only ensures good contact between the product 10 to be tested and the probe assembly 110, but also avoids damage to the product caused by excessive extrusion. Moreover, the pressing head assembly 300 is designed to be detachably arranged on the positioning plate 200, which simplifies the installation and disassembly process of the product 10 to be tested, thereby significantly improving the test efficiency.

[0041] As Figures 1-3 shown, each probe 112 is composed of a spring arm 1122 and a probe head 1121. The elastic characteristics of the spring arm 1122 can ensure reliable contact between the probe head 1121 and the product to be tested. Through this design, the distance between the probes 112 can be reduced to 55 μm, and the accuracy can be controlled within ±5 μm, which is much lower than the limit of traditional POGO probes 112, perfectly adapting to the test requirements of the product 10 to be tested and improving the applicability and accuracy of the test tooling.

[0042] Optionally, as Figures 3-4 shown, the probe 112 further includes a probe tail 1123. The probe tail 1123 is arranged at the second end of the spring arm 1122 and is perpendicular to the spring arm 1122. The probe head 1121 faces upward of the spring arm 1122, and the probe tail 1123 faces downward of the spring arm 1122. The probe tail 1123 can be electrically connected to the PCB board. The upward-facing probe head 1121 ensures the contact accuracy with the product to be tested, while the downward-facing probe tail 1123 is electrically connected to the PCB board, which not only facilitates signal transmission but also simplifies the connection structure between the test tooling and the external circuit. Specifically, the probe tail 1123 is welded to the PCB board, which can ensure a more stable connection between the probe tail 1123 and the PCB board and ensure the stability of signal transmission.

[0043] Optionally, as Figure 4 shown, the elastic arm 1122 includes a first arm segment 11221 and a second arm segment 11222. One end of the first arm segment 11221 is connected to the probe tail 1123, and the other end is connected to the second arm segment 11222. The end of the second arm segment 11222 away from the first arm segment 11221 is connected to the probe head 1121. Along the length direction of the second arm segment 11222, a strip-shaped hole 11223 is formed on the second arm segment 11222, which can effectively improve the elastic deformation ability of the elastic arm 1122, so that the probe head 1121 has better cushioning and adaptability when contacting the product to be tested, thereby ensuring the stability and accuracy of the contact.

[0044] Optionally, as Figure 5 shown, the width of the middle part of the first arm segment 11221 is W1, the width of the connection between the first arm segment 11221 and the probe tail 1123 is W2, and the width of the end of the first arm segment 11221 connected to the second arm segment 11222 is W3, where W2≥W3>W1. The width W2 of the connection end of the first arm segment 11221 and the probe tail 1123 is the largest, ensuring sufficient contact area and mechanical strength at the electrically connected part with the PCB board, thereby improving the stability of the connection and the reliability of signal transmission; the width W3 of the connection end of the first arm segment 11221 and the second arm segment 11222 is the second, which not only ensures the smooth transition and mechanical transmission between the two elastic arms 1122, but also avoids the influence of too large a width on the overall elasticity; while the width W1 of the middle part of the first arm segment 11221 is the smallest, enabling the elastic arm 1122 to have higher flexibility and elastic deformation ability while maintaining strength.

[0045] Optionally, as Figure 5 shown, the first arm segment 11221 and the second arm segment 11222 form an angle α in the horizontal plane, where 0°≤α≤15°. When α is 0°, the first arm segment 11221 and the second arm segment 11222 are collinear, forming a straight-line structure to ensure the directness and stability of mechanical transmission; when the angle α gradually increases, the existence of the angle α causes the elastic arm 1122 to form a certain deflection in the horizontal plane, which can effectively disperse the vertical pressure received by the probe head 1121 during testing and enhance the cushioning ability and anti-fatigue performance of the elastic arm 1122. Specifically, the angle α can be 0°, 2°, 4°, 6°, 8°, 10°, 12°, 14°, 15°, etc. Those skilled in the art can flexibly set the size of the angle α according to actual needs.

[0046] Optionally, as Figure 3As shown, a number of limiting grooves 1111 are arrayed on the ceramic disc 111. The limiting grooves 1111 correspond one by one to the probes 112, and at least part of the probe heads 1121 protrude out of their corresponding limiting grooves 1111. The limiting grooves 1111 can accurately limit the positions of each probe 112, ensuring the consistency of the array arrangement of the probes 112 on the ceramic disc 111, thus effectively avoiding the deviation of the probe 112 spacing and improving the test accuracy.

[0047] Exemplarily, in this embodiment, the probe assembly 110 is a MEMS probe (Micro-Electro-Mechanical Systems Probe), and the product to be tested is an HBM chip (High Bandwidth Memory). The HBM chip usually adopts 3D stacking packaging. The MEMS probe can test the HBM chip to ensure that the test signal can be effectively transmitted and improve the compatibility of the test tooling with the stacked packaging chip.

[0048] Optionally, the positioning plate 200 is fastened to the bottom plate 100 by screws, which can ensure the stability and reliability of the connection between the positioning plate 200 and the bottom plate 100 and improve the accuracy of the test results.

[0049] Optionally, clamping grooves 230 are respectively provided on both sides of the positioning plate 200. The pressing head assembly 300 includes a pressing plate 310 and two clamping components 320. The two clamping components 320 are respectively arranged on both sides of the pressing plate 310, and each clamping component 320 can be clamped with its corresponding clamping groove 230. The clamping structure of the clamping component 320 and the clamping groove 230 can provide a firm fixing effect, ensuring that the pressing plate 310 will not loosen or displace during the test and guaranteeing the reliability of the test.

[0050] Optionally, as Figure 6 、 Figure 7 and Figure 8 shown, the clamping component 320 includes a clamp 321 and a first elastic member 322. The clamp 321 is rotatably connected to the pressing plate 310. One end of the first elastic member 322 abuts against the pressing plate 310, and the other end abuts against the clamp 321. The first elastic member 322 is used to provide a torsional force for the clamp 321 so that the clamp 321 is clamped in the clamping groove 230. The clamping component 320 uses the first elastic member 322 to provide a torsional force, enabling the clamp 321 to automatically return to its position and be clamped in the clamping groove 230, and the fixing can be completed without applying additional force, making the operation more simple and fast. In this embodiment, the first elastic member 322 is a spring.

[0051] Optionally, as shown in Figure 8, the buckle 321 includes a body portion 3211, a hook portion 3212, and an abutting portion 3213. The body portion 3211 is rotatably connected to the pressing plate 310. The abutting portion 3213 and the hook portion 3212 are respectively located on both sides of the body portion 3211. The abutting portion 3213 is connected to the first elastic member 322, and the hook portion 3212 can be hooked into the card slot 230. The buckle assembly 320 has a simple structure, making the design and manufacturing process more efficient while reducing production costs.

[0052] Optionally, the included angle between the abutting portion 3213 and the buckle 321 portion is 90°, which can effectively reduce the overall height of the buckle assembly 320. This compact design enables the test fixture to occupy less vertical space, especially suitable for test equipment and production environments with limited space, improving space utilization.

[0053] Optionally, as Figure 8 shown, the pressing plate 310 is provided with a first assembly groove 311. A rotating shaft 323 is arranged in the first assembly groove 311, and the buckle 321 is rotatably connected to the rotating shaft 323, enabling the buckle 321 to rotate stably on the pressing plate 310, avoiding the risk of the buckle 321 falling off or loosening due to external forces and improving the stability of the overall structure. Moreover, the design of the rotating shaft 323 enables the buckle 321 to rotate smoothly during operation, thereby reducing the friction between the buckle 321 and the pressing plate 310, improving the rotational flexibility and making the operation smoother.

[0054] Optionally, the bottom wall of the first assembly groove 311 is provided with a limiting portion 313, which is used to limit the rotation position of the buckle 321, preventing the buckle 321 from rotating excessively and ensuring that the buckle 321 always stays in the correct position. This can improve the positioning accuracy of the buckle 321 and ensure the stability of the buckle 321 during the clamping process.

[0055] Optionally, the positioning plate 200 is provided with a first avoidance groove 220, which is used to avoid the buckle 321, preventing the buckle 321 from interfering with the positioning plate 200 or other components during rotation, ensuring that the buckle 321 can easily enter or disengage from the card slot 230, and improving the operation flexibility and efficiency. The card slot 230 is arranged at the bottom of the first avoidance groove 220, which can make the structure of the buckle assembly 320 more compact and improve the space utilization rate of the test fixture.

[0056] Optionally, the bottom plate 100 is provided with a second avoidance groove 120, which is used to avoid the buckle 321. The design of the second avoidance groove 120 provides additional space, preventing the buckle 321 from interfering with the bottom plate 100 or other components during operation, ensuring that the buckle 321 can rotate smoothly and complete the clamping or releasing action, and improving the operation fluency.

[0057] Optionally, the indenter assembly 300 further includes an indenter 330 and a second elastic member 340. The indenter 330 is located below the pressing plate 310 and can be in contact with the product 10 to be tested. One end of the second elastic member 340 is connected to the indenter 330, and the other end is connected to the pressing plate 310. The contact between the indenter 330 and the product 10 to be tested provides a more secure fixation, ensuring that the product 10 to be tested does not displace or loosen during the test, thereby improving the stability and accuracy of the test process.

[0058] Optionally, in this embodiment, there are four second elastic members 340, and all four second elastic members 340 are springs. Springs have good elasticity and can ensure the uniformity of the applied pressure.

[0059] Optionally, as Figure 8 shown, the bottom wall of the pressing plate 310 is provided with a second assembly groove 312, and at least a part of the indenter 330 is slidably disposed in the second assembly groove 312, which not only improves the positioning accuracy of the indenter 330 but also can effectively control the range of its up and down movement, ensuring the uniformity and accuracy of the applied pressure during the test.

[0060] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention and are not intended to limit the implementation manners of the present invention. For those of ordinary skill in the art, various obvious changes, re-adjustments, and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent substitutions, and improvements made within the spirit and principle of the present invention shall be included within the protection scope of the claims of the present invention.

Claims

1. Test tooling, characterized in that, Including: A bottom plate (100) is provided with a probe assembly (110) thereon. The probe assembly (110) includes a ceramic disc (111) and a plurality of probes (112). The plurality of probes (112) are spaced apart on the ceramic disc (111). Each probe (112) includes a spring arm (1122) and a probe head (1121). The probe head (1121) is disposed at the first end of the spring arm (1122) and is perpendicular to the spring arm (1122). A positioning plate (200) is disposed on the bottom plate (100). The positioning plate (200) is provided with a positioning space (210). The vertical projections of the plurality of probe heads (1121) are located within the positioning space (210). The product to be tested (10) can be placed within the positioning space (210) and contact the plurality of probe heads (1121). A pressing head assembly (300) is detachably disposed on the positioning plate (200). The pressing head assembly (300) is used to fix the product to be tested (10) within the positioning space (210) and provide a downward pressure to the product to be tested (10).

2. The test tooling according to claim 1, characterized in that, The probe (112) further includes a probe tail (1123). The probe tail (1123) is disposed at the second end of the spring arm (1122) and is perpendicular to the spring arm (1122). The probe head (1121) faces upward of the spring arm (1122), and the probe tail (1123) faces downward of the spring arm (1122). The probe tail (1123) can be electrically connected to a PCB board.

3. The test tooling according to claim 2, characterized in that, The spring arm (1122) includes a first arm segment (11221) and a second arm segment (11222). One end of the first arm segment (11221) is connected to the probe tail (1123), and the other end is connected to the second arm segment (11222). The end of the second arm segment (11222) away from the first arm segment (11221) is connected to the probe head (1121). Along the length direction of the second arm segment (11222), a strip-shaped hole (11223) is formed in the second arm segment (11222).

4. The test tooling according to claim 3, wherein The width of the middle part of the first arm segment (11221) is W1, the width of the connection between the first arm segment (11221) and the probe tail (1123) is W2, and the width of the end of the first arm segment (11221) connected to the second arm segment (11222) is W3, where W2 ≥ W3 > W1.

5. The test tooling according to claim 3, characterized in that The first arm segment (11221) and the second arm segment (11222) form an angle α in the horizontal plane, where 0° ≤ α ≤ 15°.

6. The test tooling according to claim 1, characterized in that, A plurality of limiting grooves (1111) are arrayed on the ceramic disc (111). The limiting grooves (1111) correspond to the probes (112) one by one. At least part of the probe heads (1121) protrude out of their corresponding limiting grooves (1111).

7. The test tooling according to claim 1, characterized in that On both sides of the positioning plate (200), there are clamping grooves (230) respectively. The pressing head assembly (300) includes a pressing plate (310) and two clamping components (320). The two clamping components (320) are respectively arranged on both sides of the pressing plate (310), and each clamping component (320) can be clamped with its corresponding clamping groove (230).

8. The test tooling according to claim 7, characterized in that, The clamping component (320) includes: A clamping buckle (321) rotatably connected to the pressing plate (310); A first elastic member (322), one end of which abuts against the pressing plate (310), and the other end abuts against the clamping buckle (321). The first elastic member (322) is used to provide a torsional force for the clamping buckle (321) so that the clamping buckle (321) is clamped in the clamping groove (230).

9. The test tooling according to claim 8, wherein, The clamping buckle (321) includes a body portion (3211), a hook portion (3212) and an abutting portion (3213). The body portion (3211) is rotatably connected to the pressing plate (310). The abutting portion (3213) and the hook portion (3212) are respectively located on both sides of the body portion (3211). The abutting portion (3213) is connected to the first elastic member (322), and the hook portion (3212) can be hooked in the clamping groove (230).

10. The test tooling according to claim 8, characterized in that, A first assembly groove (311) is provided on the pressing plate (310), and a rotating shaft (323) is provided in the first assembly groove (311). The clamping buckle (321) is rotatably connected to the rotating shaft (323).

Images