Substrate storage container

Abstract

A substrate storage container (1) is provided with: a container body (2) provided with a cylindrical wall section (20) in which a container body opening is formed at one end of the front side (D11) and the other end of the rear side (D12) is closed by a rear wall (22), the inner surface of the wall section (20) forming a substrate storage space (27) capable of storing a plurality of substrates and communicating with the container body opening; and a cover body which is detachable with respect to the opening part of the container main body and can close the opening part of the container main body. The inner wall (22) has a gate mark (226) protruding from the rear side (D12), the gate mark (226) protrudes further toward the rear side (D12) than the outer surface of the inner wall (22) around the gate mark (226), and the gate mark (226) is connected to the outer surface of the inner wall (22) at the base of the gate mark (226) in an area equal to or greater than the area of the gate cut portion.

Description

Technical Field

[0001] The present invention relates to a substrate storage container used for storing, storing, transporting, conveying, etc. a substrate composed of a semiconductor wafer or the like. Background Art

[0002] As a substrate storage container for storing a substrate composed of semiconductor wafers and transporting the substrate in a process in a factory, a substrate storage container having a structure including a container main body and a lid is conventionally known (for example, refer to Patent Document 1).

[0003] One end portion of the container main body has an opening peripheral portion forming an opening of the container main body. The other end portion of the container main body has a closed cylindrical wall portion. A substrate storage space is formed inside the container main body. The substrate storage space is surrounded by the wall portion and can store a plurality of substrates. The lid is detachable with respect to the opening peripheral portion and can close the opening of the container main body. When the opening of the container main body is closed by the lid, the plurality of substrates are held in a state where adjacent substrates are arranged at a predetermined interval.

[0004] The substrate storage container is formed by injection molding of a resin such as polycarbonate as a molding material. The resin flows from an injection device through a main runner (a resin flow path up to a sub-runner; sprue) of a mold, a sub-runner (a resin flow path up to a gate; runner) branched from the main runner, and a gate (a resin inflow port into a cavity), and fills the cavity, and is molded into the container main body by replicating the shape of the cavity (for example, refer to Patent Document 1). At a position corresponding to the gate in the molded container main body, a gate mark (also referred to as a gate scar) is inevitably formed.

[0005] Patent Document 1: Japanese Patent Application Laid-Open No. 2017-050494

[0006] Due to manufacturing restrictions, the gate mark is sometimes disposed on the inner wall (rear wall) of the container main body. However, around the gate mark disposed on the inner wall of the container main body, water accumulation or residue during cleaning or drying, accumulation of particles generated during gate treatment, etc. are likely to occur. Summary of the Invention

[0007] An object of the present invention is to provide a substrate storage container that can suppress water accumulation or residue during cleaning or drying, accumulation of particles generated during gate treatment, etc. around a gate mark in a substrate storage container having a gate mark on the inner wall of the container main body.

[0008] The substrate storage container of the present invention includes: a container body having a cylindrical wall portion with a container body opening formed at one end of the front side and the other end of the rear side closed by an inner wall, and a substrate storage space formed by the inner surface of the wall portion for storing a plurality of substrates and communicating with the container body opening; and a lid that is detachable with respect to the container body opening and can close the container body opening. Among them, the inner wall has a gate mark protruding backward, the gate mark protrudes more backward than the outer surface of the inner wall around the gate mark, and is connected to the outer surface of the inner wall at the base of the gate mark with an area equal to or larger than the area of the gate cut portion.

[0009] In addition, it may be that the inner wall has one or more feet, the one or more feet form a landing surface when the container body is supported with the inner wall facing downwards, and a part or all of the gate mark functions as a part or all of the feet.

[0010] In addition, it may be that the gate mark is smoothly connected to the outer surface of the inner wall at the base of the gate mark.

[0011] According to the present invention, it is possible to provide a substrate storage container that can suppress the accumulation or residue of water during cleaning or drying and the accumulation of particles generated during gate treatment around the gate mark in a substrate storage container having a gate mark on the inner wall of the container body. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 FIG. 15 is an exploded perspective view showing a state in which a plurality of substrates W are stored in the substrate storage container 1 according to the first embodiment of the present invention. Figure 2 FIG. 18 is an upper perspective view of the container body 2 of the substrate storage container 1 according to the first embodiment of the present invention as viewed from the front. Figure 3A FIG. 21 is an upper perspective view of the container body 2 of the substrate storage container according to the first embodiment of the present invention as viewed from the rear. Figure 3B FIG. 24 is a plan view of the container body 2 of the substrate storage container according to the first embodiment of the present invention. Figure 3C FIG. 27 is Figure 3A the cross-sectional view taken along the line A-A shown in FIG. Figure 4A FIG. 32 is a schematic diagram showing a first example of the shape of the gate mark 226. Figure 4B FIG. 35 is a schematic diagram showing a second example of the shape of the gate mark 226. Figure 4C FIG. 38 is a schematic diagram showing a third example of the shape of the gate mark 226. Figure 5A The figure is a perspective view from above of a container body 2A of a substrate storage container according to a second embodiment of the present invention, showing it from the rear. Figure 5B It is Figure 5A the sectional view taken along line B-B shown. Detailed Embodiment

[0013] Hereinafter, a substrate storage container 1 according to a first embodiment will be described with reference to the accompanying drawings. Figure 1 The figure is an exploded perspective view showing a state where a plurality of substrates W are stored in a substrate storage container 1 according to a first embodiment of the present invention. Figure 2 The figure is a perspective view from above of a container body 2 of a substrate storage container 1 according to a first embodiment of the present invention, showing it from the front. Figure 3A The figure is a perspective view from above of a container body 2 of a substrate storage container according to a first embodiment of the present invention, showing it from the rear. Figure 3B The figure is a plan view of a container body 2 of a substrate storage container according to a first embodiment of the present invention. Figure 3C It is Figure 3A the sectional view taken along line A-A shown.

[0014] Here, for the sake of convenience of explanation, the direction from a container body 2 described later toward a lid body 3 ( Figure 1 the direction from the upper right to the lower left in the figure) is defined as a front direction D11 or a front side D11, the direction opposite thereto is defined as a rear direction D12 or a rear side D12, and they are combined and defined as a front-rear direction D1. In addition, the direction from a lower wall 24 described later toward an upper wall 23 ( Figure 1 the upward direction in the figure) is defined as an upper direction D21, the direction opposite thereto is defined as a lower direction D22, and they are combined and defined as an up-down direction D2. In addition, the direction from a second side wall 26 described later toward a first side wall 25 ( Figure 1 the direction from the lower right to the upper left in the figure) is defined as a left direction D31, the direction opposite thereto is defined as a right direction D32, and they are combined and defined as a left-right direction D3 or a lateral direction D3. In some of the drawings, arrows indicating these directions are shown.

[0015] In addition, the substrate W stored in the substrate storage container 1 (refer to Figure 1 ) is a disk-shaped silicon wafer, glass wafer, sapphire wafer, etc., and is an industrial thin substrate. The substrate W in the present embodiment is a silicon wafer with a diameter of 300 mm.

[0016] As Figure 1As shown, the substrate storage container 1 serves as a shipping container for storing the substrate W composed of the above-mentioned silicon wafers and transporting the substrate W by means of transportation tools such as land transportation tools, air transportation tools, and sea transportation tools. The substrate storage container 1 is composed of a container body 2 and a lid 3. The container body 2 includes a lateral substrate support portion 5 and an inner substrate support portion 6 (see Figure 2 etc.). The lid 3 includes a front retainer (not shown) as a lid-side substrate support portion.

[0017] The container body 2 has a cylindrical wall portion 20. The wall portion 20 forms a container body opening 21 at one end and is closed at the other end. A substrate storage space 27 is formed inside the container body 2. The substrate storage space 27 is formed by being surrounded by the wall portion 20. The lateral substrate support portion 5 and the inner substrate support portion 6 are arranged in a part of the wall portion 20 that forms the substrate storage space 27. As Figure 1 shown, a plurality of substrates W can be stored in the substrate storage space 27.

[0018] Inside the substrate storage space 27, the lateral substrate support portions 5 are provided in pairs on the wall portion 20. When the container body opening 21 is not closed by the lid 3, the lateral substrate support portions 5 can support the edge portions of a plurality of substrates W in a state where adjacent substrates W are arranged at a predetermined interval by abutting against the edge portions of the plurality of substrates W. Inside the lateral substrate support portions 5, the inner substrate support portions 6 are integrally formed with the lateral substrate support portions 5.

[0019] Inside the substrate storage space 27, the inner substrate support portions 6 (see Figure 2 etc.) are provided on the wall portion 20 in a manner paired with the front retainer. When the container body opening 21 is closed by the lid 3, the inner substrate support portions 6 can support the rear portions of the edge portions of a plurality of substrates W by abutting against the edge portions of the plurality of substrates W.

[0020] The lid 3 is detachable from the opening peripheral portion 28 that forms the container body opening 21 and can close the container body opening 21. The front retainer is provided in a part of the lid 3 that faces the substrate storage space 27 when the container body opening 21 is closed by the lid 3. Inside the substrate storage space 27, the front retainer and the inner substrate support portions 6 are arranged in pairs.

[0021] When the container body opening 21 is closed by the lid 3, the front retainer can support the front portions of the edge portions of a plurality of substrates W by abutting against the edge portions of the plurality of substrates W. When the container body opening 21 is closed by the lid 3, the front retainer supports a plurality of substrates W in cooperation with the inner substrate support portions 6, thereby holding the plurality of substrates W in a state where adjacent substrates W are arranged at a predetermined interval.

[0022] The substrate storage container 1 is made of a resin such as a plastic material. Examples of the resin as this material include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyether ketone, polybutylene terephthalate, polyether ether ketone, and liquid crystal polymer, and alloys thereof. When imparting conductivity to the resin of these materials, conductive substances such as carbon fiber, carbon powder, carbon nanotubes, and conductive polymers are selectively added. In addition, in order to improve rigidity, glass fiber, carbon fiber, etc. may also be added.

[0023] Hereinafter, each part will be described in detail. As Figure 1 shown, the wall portion 20 of the container body 2 has an inner wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26. The inner wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are integrally formed of the above-described materials.

[0024] The first side wall 25 and the second side wall 26 face each other in the lateral direction D3, and the upper wall 23 and the lower wall 24 face each other in the vertical direction D2. The rear ends of the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are all connected to the inner wall 22. The front ends of the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 form an opening peripheral portion 28, and the opening peripheral portion 28 has a positional relationship relative to the inner wall 22 and forms a substantially rectangular container body opening 21.

[0025] The opening peripheral portion 28 is provided at one end of the container body 2, and the inner wall 22 is located at the other end of the container body 2. The outer shape of the container body 2 formed by the outer surface of the wall portion 20 is box-shaped. The inner surface of the wall portion 20, that is, the inner surface of the inner wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26 form a substrate storage space 27 surrounded by them. The container body opening 21 formed in the opening peripheral portion 28 communicates with the substrate storage space 27, and the substrate storage space 27 is surrounded by the wall portion 20 and formed inside the container body 2. Up to 25 substrates W can be stored in the substrate storage space 27.

[0026] As Figure 1 shown, in the part that is part of the upper wall 23 and the lower wall 24 and near the opening peripheral portion 28, locking engagement concave portions 231A, 231B, 241A, and 241B that are recessed outward from the substrate storage space 27 are formed. The locking engagement concave portions 231A, 231B, 241A, and 241B are each formed at the left and right ends of the upper wall 23 and the lower wall 24, and a total of four are formed.

[0027] As Figure 1As shown, on the outer surface of the upper wall 23, the rib 235 is provided integrally with the upper wall 23. The rib 235 improves the rigidity of the container body 2. In addition, a top flange 236 is fixed to the central portion of the upper wall 23. When suspending the substrate storage container 1 in an AMHS (Automated Wafer Handling System), PGV (Wafer Substrate Handling Cart), etc., the top flange 236 is a component that becomes the part to be hooked and suspended in the substrate storage container 1.

[0028] The side substrate support portions 5 are respectively provided on the first side wall 25 and the second side wall 26, and are built-in components that are arranged in pairs in the left - right direction D3 within the substrate storage space 27. Specifically, as Figure 2 shown, the side substrate support portion 5 has a plate portion 51 and a support wall 52 as a support portion for the plate portion. The plate portion 51 and the support wall 52 are integrally formed of a resin material, and the plate portion 51 is supported by the support wall 52.

[0029] When observed in the up - down direction D2, the plate portion 51 is in a substantially arc shape of a plate. Twenty - five plate portions 51 are provided along the up - down direction D2 on each of the first side wall 25 and the second side wall 26, for a total of 50. Adjacent plate portions 51 are separated in the up - down direction D2 and arranged in a parallel positional relationship. In addition, above the uppermost plate portion 51, there is also arranged a plate - shaped component parallel to the plate portion 51, and this component is a component that guides the substrate W when inserting the uppermost substrate W into the substrate storage space 27.

[0030] The 25 plate portions 51 provided on the first side wall 25 and the 25 plate portions 51 provided on the second side wall 26 have a positional relationship of being opposite to each other in the left - right direction D3. In addition, the 50 plate portions 51 and the plate - shaped guiding component parallel to the plate portion 51 have a positional relationship parallel to the inner surface of the lower wall 24. As Figure 2 shown, a convex portion 511 is provided on the upper surface of the plate portion 51. The substrate W supported by the plate portion 51 only contacts the protruding end of the convex portion 511 and does not contact the surface of the plate portion 51.

[0031] The support wall 52 is in a plate shape extending in the up - down direction D2 and the substantially front - rear direction D1. The support wall 52 has a predetermined length in the long - side direction of the plate portion 51 and is connected to the side edge of the plate portion 51. The plate - shaped support wall 52 bends toward the substrate storage space 27 along the outer edge of the plate portion 51.

[0032] That is, the 25 plate portions 51 provided on the first side wall 25 are connected to the support wall 52 provided on the first side wall 25 side. Similarly, the 25 plate portions 51 provided on the second side wall 26 are connected to the support wall 52 provided on the second side wall 26 side. The support walls 52 are respectively fixed to the first side wall 25 and the second side wall 26.

[0033] The laterally disposed substrate support portion 5 configured as such can support the edge portions of a plurality of substrates W in a state where adjacent substrates W among the plurality of substrates W are separated from each other by a predetermined interval and are in a parallel positional relationship with each other.

[0034] As Figure 1 shown, etc., the lid 3 has a substantially rectangular shape that is substantially the same as the shape of the opening peripheral portion 28 of the container body 2. The lid 3 is detachable from the opening peripheral portion 28 of the container body 2, and by attaching the lid 3 to the opening peripheral portion 28, the lid 3 can close the container body opening 21. On the sealing surface that is the inner surface of the lid 3 ( Figure 1 the surface on the back side of the lid 3 shown) and that faces the surface of the step portion formed at a position in the rearward direction D12 close to the opening peripheral portion 28 when the lid 3 closes the container body opening 21, an annular sealing member 4 is installed. The sealing member 4 is composed of various thermoplastic elastomers such as polyester-based and polyolefin-based elastomers that can be elastically deformed, fluororubber, silicone rubber, etc. The sealing member 4 is arranged to surround the outer peripheral edge portion of the lid 3 in a circle.

[0035] When the lid 3 is attached to the opening peripheral portion 28, the sealing member 4 is elastically deformed by being clamped between the sealing surface and the inner surface of the lid 3, and the lid 3 closes the container body opening 21 in a sealed state. By detaching the lid 3 from the opening peripheral portion 28, it is possible to take out or put in the substrate W with respect to the substrate storage space 27 inside the container body 2.

[0036] A locking mechanism is provided on the lid 3. The locking mechanism is provided near the left and right end portions of the lid 3. As Figure 1 shown, it includes: two upper locking portions 32A that can project upward in the upward direction D21 from the upper side of the lid 3; and two lower locking portions 32B that can project downward in the downward direction D22 from the lower side of the lid 3. The two upper locking portions 32A are arranged near the left and right ends of the upper side of the lid 3, and the two lower locking portions 32B are arranged near the left and right ends of the lower side of the lid 3.

[0037] An operation portion 33 is provided on the outer surface of the lid 3. By operating the operation portion 33 from the front side of the lid 3, it is possible to cause the upper locking portions 32A and the lower locking portions 32B to project from the upper side and the lower side of the lid 3, and in addition, it is possible to bring the upper locking portions 32A and the lower locking portions 32B into a state where they do not project from the upper side and the lower side of the lid 3. When the upper locking portions 32A project upward in the upward direction D21 from the upper side of the lid 3 and are engaged with the lock engagement recesses 231A and 231B of the container body 2, and the lower locking portions 32B project downward in the downward direction D22 from the lower side of the lid 3 and are engaged with the lock engagement recesses 241A and 241B of the container body 2, the lid 3 is fixed to the opening peripheral portion 28 of the container body 2.

[0038] Next, the inner wall 22 will be described in detail. As Figures 3A to 3CAs shown, the inner wall 22 has a foot portion 221 on the outer surface side (rear side D12), and the foot portion 221 forms a landing surface CP when the container body 2 is carried with the inner wall 22 facing downward (indicated by a double-dashed line in Figure 3C ). For example, when the substrate W is not accommodated in the container body 2, there is a case where it is carried with the inner wall 22 facing downward. As long as the foot portion 221 can form the landing surface CP, the number and shape of the foot portion 221 are not limited. For example, if the area of the foot portion 221 is large and it is a flat plane, one foot portion 221 can form the landing surface CP.

[0039] In the first embodiment, the inner wall 22 has one foot portion 221 at each of the four corners, and a total of four foot portions 221. The bottom surface 222 (the surface of the rear side D12) of the foot portion 221 is a flat plane parallel to the D2-D3 plane (a plane orthogonal to the front-rear direction D1). The bottom surfaces 222 of the four foot portions 221 are arranged in a positional relationship forming the vertices of a rectangle, and form a landing surface CP parallel to the D2-D3 plane. That is, the landing surface CP is formed by the bottom surfaces 222 of one or more foot portions 221.

[0040] The portion of the rear side D12 of the inner wall 22 other than the foot portion 221 is located more on the front side D11 than the bottom surface 222 of the foot portion 221 forming the landing surface CP. The portion of the rear side D12 of the inner wall 22 other than the foot portion 221 can have various shapes according to the container body 2. For example, between two foot portions 221 arranged in the up-down direction D2, there is provided a concave region 223 that is recessed more toward the front side D11 than the bottom surface 222 of the foot portion 221. On the inner side in the lateral direction D3 of the foot portion 221 and the concave region 223 arranged in the lateral direction D3, there are provided two linear groove portions 224 that are recessed toward the front side D11 and extend in the up-down direction D2. The depth of the linear groove portion 224 with respect to the landing surface CP is, for example, 20 to 40 mm.

[0041] An island region 225 is provided between the two linear groove portions 224 arranged in the lateral direction D3. The rear side D12 surface of the island region 225 is located more on the front side D11 than the bottom surface 222 of the foot portion 221. In addition, corresponding to the linear groove portion 224, a linear bulge portion 271 that bulges toward the front side D11 and extends in the up-down direction D2 is provided in the substrate accommodation space 27.

[0042] The inner wall 22 has a gate mark 226 facing the rear side D12. The gate mark 226 is located more on the front side D11 than the ground surface CP. The gate mark 226 is provided in the island region 225. Specifically, the surface of the rear side D12 of the island region 225 is the outer surface of the inner wall 22 that is located more on the front side D11 than the bottom surface 22 of the leg portion 221 and other than the bottom surface 22, and is located more on the front side D11 than the bottom surface 222 of the leg portion 221. The gate mark 226 is provided on the surface of the rear side D12 of the island region 225. By being disposed on the outer surface of the island region 225, the gate mark 226 is located more on the front side D11 than the ground surface CP.

[0043] The gate is an inlet for flowing molten resin from an injection molding machine into a mold (molded product). At the position corresponding to the gate in the molded product, a gate mark inevitably remains. When manufacturing the container body 2 in the substrate storage container 1 by molding, due to restrictions such as the shape of the container body 2 and molding conditions, the gate mark is also mostly disposed on the inner wall 22 of the container body 2.

[0044] The gate mark 226 protrudes more toward the rear side D12 than the outer surface of the inner wall 22 around the gate mark 226, and is connected to the outer surface of the inner wall 22 at the base 2261 of the gate mark 226 with an area S61 equal to or larger than the area S62 of the gate cut portion 2262. In the present embodiment, the gate mark 226 protrudes more toward the rear side D12 than the outer surface of the island region 225 of the inner wall 22. The gate mark 226 is smoothly connected to the outer surface of the island region 225 of the inner wall 22 at the base 2261 of the gate mark 226 with an area S61 equal to or larger than the area S62 of the gate cut portion 2262.

[0045] The height H226 of the gate mark 226 (refer to Figure 3C ) is, for example, 1.0 to 3.0 mm, preferably 1.5 to 2.0 mm. The ratio S61 / S62 of the area S61 of the base 2261 of the gate mark 226 to the area S62 of the gate cut portion 2262 is, for example, 5 to 10 times.

[0046] The gate cut portion 2262 is the portion cut during gate treatment at the top of the gate mark 226. Generally, the entire top of the gate mark 226 becomes the gate cut portion 2262. However, when the shape of the gate mark 226 is columnar (typically cylindrical), a part of the top of the gate mark 226 becomes the gate cut portion 2262 (for example, refer to the shape shown in Figure 4C ).

[0047] Examples of the shape of the gate mark 226 are described. Figure 4A It is a schematic diagram showing a first example of the shape of the gate mark 226. Figure 4BIt is a schematic diagram showing a second example of the shape of the gate mark 226. Figure 4C It is a schematic diagram showing a third example of the shape of the gate mark 226.

[0048] The shape of the gate mark 226 is not limited. For example, as Figure 4A shown, the gate mark 226 can be substantially hemispherical. As Figure 4B shown, the gate mark 226 can also be substantially frustum-shaped. As Figure 4C shown, the gate mark 226 can also be substantially cylindrical. In the substantially cylindrical gate mark 226, the entire top thereof is the gate cut portion 2262.

[0049] The identification member 245 (refer to Figure 3A ) is a member that can be freely attached and detached to the lower part of the rear of the container body 2 in order to identify information such as the substrate W accommodated in the substrate accommodation container 1. Due to the shape of the identification member 245 and the like, when the identification member 245 is attached to the container body 2, there is a case where the identification member 245 is located more on the rear side D12 than the ground surface CP. However, in the case where it is desired to carry the container body 2 with the inner wall 22 facing downward, before carrying, the identification member 245 is detached from the container body 2.

[0050] According to the substrate accommodation container 1 of the first embodiment, the following effects can be obtained. The substrate accommodation container 1 of the first embodiment includes: a container body 2 having a cylindrical wall portion 20 formed with a container body opening 21 at one end portion on the front side D11 and closed by an inner wall 22 at the other end portion on the rear side D12, and a substrate accommodation space 27 that can accommodate a plurality of substrates W and is communicated with the container body opening 21 formed by the inner surface of the wall portion 20; and a lid body 3 that can be attached and detached with respect to the container body opening 21 and can close the container body opening 21. The inner wall 22 has a gate mark 226 protruding from the rear side D12, and the gate mark 226 protrudes more rearward than the outer surface of the inner wall 22 around the gate mark 226, and is connected to the outer surface of the inner wall 22 at the base 2261 of the gate mark 226 with an area equal to or larger than the area of the gate cut portion 2262.

[0051] Therefore, in the substrate accommodation container 1 in which the inner wall 22 of the container body 2 has a gate mark 226, no depression or flat surface is formed around the gate mark 226. In the case where it is desired to turn the inner wall 22 upward to clean or dry the container body 2, the accumulation and residue of water around the gate mark 226 can be suppressed. In addition, the accumulation of particles generated during gate processing around the gate mark 226 can be suppressed.

[0052] In Figure 4A the shown substantially hemispherical shape, Figure 4BIn the gate mark 226 such as a substantially truncated conical shape shown, the gate mark 226 is smoothly connected to the outer surface of the inner wall 22 at its base 2261. Therefore, it is more difficult for the aforementioned accumulation and residue of water and accumulation of particles to occur near the base 2261 of the gate mark 226.

[0053] Next, a substrate storage container according to a second embodiment of the present invention will be described with reference to the accompanying drawings. Figure 5A It is a perspective view from above of a container body 2A of a substrate storage container according to a second embodiment of the present invention as viewed from the rear. Figure 5B is Figure 5A the sectional view taken along line B - B shown.

[0054] In the second embodiment, regarding the features of the present invention, for example, the functions, positions, numbers, etc. of the gate marks 226 are different from those of the first embodiment. The structures other than this are substantially the same as those of the first embodiment, so the same components are illustrated with the same reference numerals and the description is omitted (the description of the structures and effects of the first embodiment is also appropriately cited in other embodiments).

[0055] In the container body 2A of the substrate storage container according to the second embodiment, as Figure 5A and Figure 5B shown, the inner wall 22 has one or more legs 221, and the one or more legs 221 form a landing surface CP when the container body 2A is supported in a downward direction with the inner wall 22. Part or all of the gate mark 226 functions as part or all of the legs 221. In the present embodiment, the gate mark 226 protrudes more rearward D12 than the outer surface of the inner wall 22 around the gate mark 226. The gate mark 226 is connected to the outer surface of the inner wall 22 at its base 2261 with an area S61 equal to or larger than the area S62 of the gate cut - off portion 2262.

[0056] All (four) of the gate marks 226 function as all (four) of the legs 221. In addition, part of the gate mark 226 may function as all of the legs 221, part of the gate mark 226 may function as part of the legs 221, or all of the gate mark 226 may function as part of the legs 221. The number of the legs 221 is not limited, and for example, it may be one, two, or three.

[0057] The substrate storage container according to the second embodiment can achieve the following effects. In the substrate storage container of the second embodiment, the inner wall 22 has one or more feet 221, and the one or more feet 221 form the grounding surface CP when the container body 2A is carried in a downward direction of the inner wall 22. Part or all of the gate mark 226 functions as part or all of the feet 221. Therefore, the gate mark 226 can be effectively used as the feet 221.

[0058] The present invention is not limited to the above-described embodiments, and can be modified within the technical scope described in the claims.

[0059] For example, the shapes of the container body and the lid, the number of substrates that the container body can accommodate, and the dimensions are not limited to the shapes of the container body 2 and the lid 3, the number of substrates W that the container body 2 can accommodate, and the dimensions in the present embodiment. In addition, the substrate W in the present embodiment is a silicon wafer with a diameter of 300 mm, but it is not limited to this value. Explanation of reference numerals

[0060] 1 Substrate storage container 2 Container body 3 Lid 21 Container body opening 20 Wall portion 22 Inner wall 27 Substrate storage space 221 Feet 226 Gate mark 2261 Base 2262 Gate cutting portion CP Grounding surface D11 Front side D12 Rear side W Substrate.

Claims

1. A substrate storage container, comprising: A container body having a cylindrical wall portion with a container body opening formed at one end of the front side and the other end of the rear side closed by an inner wall, and a substrate storage space formed by the inner surface of the wall portion for storing a plurality of substrates and communicating with the container body opening; And A lid that is detachable from the container body opening and can close the container body opening, The substrate storage container is characterized in that The inner wall has a gate mark protruding rearward, The gate mark protrudes more rearward than the outer surface of the inner wall around the gate mark, and is connected to the outer surface of the inner wall at the base of the gate mark with an area equal to or larger than the area of the gate cut portion.

2. The substrate storage container according to claim 1, characterized in that The inner wall has one or more feet that form a landing surface when the container body is supported with the inner wall facing downwards, Part or all of the gate mark functions as part or all of the feet.

3. The substrate storage container according to claim 1 or 2, characterized in that The gate mark is smoothly connected to the outer surface of the inner wall at the base of the gate mark.

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