Magnetorheological polishing equipment and method based on ribbon size adjustment

Abstract

The invention relates to the technical field of optical processing, in particular to magnetorheological polishing equipment and method based on ribbon size adjusting.The equipment comprises a robot, a control unit, an actuator set, a magnetorheological processing module and a ribbon measuring assembly; the magneto-rheological machining module is arranged at the free end of the robot through the actuator set. The robot drives a polishing wheel in the magneto-rheological machining module to machine the optical element with magneto-rheological fluid as a medium, and a ribbon measuring assembly measures the ribbon thickness of the magneto-rheological fluid in the machining process; according to the method, the ribbon measuring assembly is used for measuring the real-time change of the ribbon thickness of magnetorheological fluid in the magnetorheological machining process, then a supply system, a nozzle and an actuator set are regulated and controlled in real time, and then real-time constant control over the removal function is achieved.

Description

Technical Field

[0001] The present invention belongs to the technical field of optical processing, and particularly relates to a magnetorheological polishing device and method based on ribbon size adjustment. Background Art

[0002] Magnetorheological Finishing (MRF) is an advanced optical manufacturing technology developed in recent years. It has many advantages such as a stable removal function, controllable edge effect, small subsurface damage layer, no copying effect, strong shaping ability, and high processing accuracy. Therefore, the magnetorheological polishing technology has received extensive attention in high-precision optical processing. The existing magnetorheological polishing machining centers mainly integrate the polishing components on a numerically controlled machine tool. However, some deficiencies of the numerically controlled machine tool (such as low degrees of freedom, large floor area, high cost, etc.) limit the deviation of the aspherical surface and it is difficult to perform precise pose control along the normal of the curved surface. In view of these deficiencies of the numerically controlled machine tool, researchers have introduced six-degree-of-freedom industrial robots into the field of optical processing in recent years. Six-degree-of-freedom industrial robots have the advantages of high degrees of freedom, small floor area, large processing range, low cost, etc., which make up for the deficiencies of the numerically controlled machine tool. Therefore, when integrating the polishing components on an industrial robot, it is theoretically possible to achieve high-precision processing of large-aperture complex curved surface optical elements. However, due to the influence of factors such as processing, assembly, load, trajectory planning, and reduction ratio, the end-effector accuracy of the robot is relatively low, and the polishing gap changes greatly during the processing. At the same time, the magnetorheological polishing technology is an optical processing technology with a high degree of certainty of the removal function, and has high requirements for the change of the polishing gap during the polishing process. Generally, the change of the polishing gap in a magnetorheological numerical control machining center is in the order of dozens of micrometers (PV < 0.1 mm), while the trajectory accuracy of common commercial robots is generally in the sub-millimeter to millimeter range, and it cannot meet the requirements of the magnetorheological polishing technology for the change of the polishing gap during high-precision polishing.

[0003] At present, the force-position control method has gradually become a new type of constant force regulation and polishing control method for robots. A common application method is to place a force sensor between the processing tool and the robot. First, the gravity calibration of the force sensor is carried out to ensure the accuracy of measurement. The pose error is calculated by measuring the change of force, and then the robot pose error is compensated by means of the robot body or other motion compensation mechanisms to achieve constant force control. The high-efficiency processing of large-diameter optical elements relies on the magnetorheological processing equipment with large-size polishing wheels, and the weight of the magnetorheological processing module of large-size polishing wheels is generally over a hundred kilograms. However, for a magnetorheological processing module weighing over a hundred kilograms, the force change caused by the robot pose error is only dozens of Newtons. When high-precision processing is required, the force needs to be constant at several Newtons or even a fraction of a Newton, which requires the absolute measurement accuracy of measuring equipment such as force sensors to reach one ten-thousandth, and the force sensor also needs to be in variable-speed and variable-attitude motion. Force sensors that meet these requirements are often extremely expensive, greatly increasing the cost of the equipment. Summary of the Invention

[0004] In view of this, the present invention aims to provide a magnetorheological polishing equipment and method based on ribbon size adjustment. By measuring the real-time change of the ribbon thickness of the magnetorheological fluid during the magnetorheological processing through a ribbon measurement component, the supply system, nozzle, and actuator in the magnetorheological processing module are regulated in real time, thereby realizing the real-time constant control of the removal function.

[0005] To achieve the above object, the technical solution of the present invention is realized as follows: A magnetorheological finishing device based on ribbon size adjustment, comprising a robot, a control unit, an actuator group, a magnetorheological processing module, and a ribbon measurement component; wherein: the actuator group is arranged at the free end of the robot, and the magnetorheological processing module is arranged at the output end of the actuator group; the robot drives the polishing wheel in the magnetorheological processing module to process the optical element with magnetorheological fluid as the medium, and during the processing, the ribbon measurement component measures the ribbon thickness of the magnetorheological fluid; the interior of the control unit includes: a time calculation module, which calculates the measurement time of the ribbon measurement component and the adjustment time of the magnetorheological processing module, and adjusts the ribbon measurement component and the magnetorheological processing module according to the measurement time and the adjustment time; a conversion relationship module, which fits the ribbon thickness with the first position of the supply system in the magnetorheological processing module to obtain the first conversion relationship, fits the ribbon thickness with the second position of the nozzle in the magnetorheological processing module to obtain the second conversion relationship, and fits the ribbon thickness with the output of the actuator group of the actuator group to obtain the third conversion relationship; a processing program module, which obtains the processing program according to the removal function generated when the magnetorheological processing module processes the optical element, and imports the processing program into the magnetorheological processing module; a real-time regulation module, which adjusts the first position according to the first conversion relationship, or adjusts the second position according to the second conversion relationship, or adjusts the output of the actuator group, so as to keep the removal function stable when processing the optical element.

[0006] Further, the ribbon measurement component includes a ribbon measurement device and an adjustment bracket; the ribbon measurement device is arranged on the adjustment bracket; the ribbon measurement device measures the ribbon thickness and transmits the measured ribbon thickness to the control unit; the adjustment bracket is arranged on the magnetorheological processing module and is used to adjust the pose of the ribbon measurement device.

[0007] Further, the magnetorheological processing module further includes a polishing motor, a magnet, and a magnetorheological mounting bracket; wherein, the magnetorheological mounting bracket is arranged at the output end of the actuator group, the polishing wheel is arranged on the magnetorheological mounting bracket, and the adjustment bracket is arranged on the magnetorheological mounting bracket; the polishing motor is arranged on the magnetorheological mounting bracket and is connected to the polishing wheel to control the polishing wheel to rotate; the nozzle is mounted on the magnetorheological mounting bracket along the rotation direction of the polishing wheel through a nozzle mounting seat, and the nozzle mounting seat adjusts the mounting angle of the nozzle, thereby changing the second position; the supply system conveys the magnetorheological fluid to the nozzle; the magnet is arranged on the magnetorheological mounting bracket and is close to the working point of the polishing wheel, so that the magnetorheological fluid changes its stiffness under the influence of the magnetic field intensity of the magnet, thereby processing the optical element.

[0008] Further, the supply system includes a liquid pump, a supply mounting bracket, a supply motor, and a ball screw; wherein, the supply motor and the ball screw are arranged on the supply mounting bracket, such that the supply motor drives the ball screw to rotate; the liquid pump is arranged on the ball screw, such that the ball screw drives the liquid pump to move, thereby changing the first position; the liquid pump conveys magnetorheological fluid to the nozzle through a pipeline.

[0009] Further, the nozzle mounting seat includes a fixing frame, a nozzle adjusting motor, a push rod, and a nozzle support frame; wherein, the fixing frame is arranged on the magnetorheological mounting frame, and an arc-shaped slide rail is arranged on the inner side wall of the fixing frame; the nozzle adjusting motor is arranged on the magnetorheological mounting frame, one end of the push rod passes through the fixing frame and is connected to the nozzle adjusting motor, such that the nozzle adjusting motor drives the slider on the arc-shaped slide rail to move through the push rod; one end of the nozzle support frame is arranged on the slider, and the nozzle is connected to the other end of the nozzle support frame, such that the nozzle adjusting motor drives the slider through the push rod, and further drives the nozzle support frame to drive the nozzle to move, thereby completing the adjustment of the second position.

[0010] Further, the adjustment bracket includes a support frame, a longitudinal sliding assembly, a transverse sliding assembly, and an axial rotation connecting plate; wherein, one end of the support frame is connected to the magnetorheological mounting frame; the longitudinal sliding assembly is arranged at the other end of the support frame, the transverse sliding assembly is arranged on the longitudinal sliding assembly, the axial rotation connecting plate is arranged on the transverse sliding assembly, and the ribbon measuring device is arranged on the axial rotation connecting plate, such that while the axial rotation connecting plate drives the ribbon measuring device to rotate, the longitudinal sliding assembly and the transverse sliding assembly drive the ribbon measuring device to perform longitudinal and transverse movements.

[0011] Further, the ribbon measuring assembly, the robot, the actuator group, the nozzle mounting seat, and the supply system are respectively connected to the control unit to form their respective communication lines, such that the control unit receives and sends signals through the corresponding communication lines.

[0012] A magnetorheological polishing method for adjusting the position of a supply system, based on the magnetorheological polishing equipment provided by the present invention for adjusting based on the ribbon size, includes the following steps: A1: Control the magnetorheological processing module to process the test optical element, and obtain a first conversion relationship through the conversion relationship module during the processing; A2: Set a first variable range of the first position, and obtain a second variable range corresponding to the ribbon thickness according to the first conversion relationship; set a maximum first position, and obtain the corresponding maximum ribbon thickness according to the first conversion relationship; A3: Control the time calculation module to adjust the ribbon measuring assembly and the magnetorheological processing module in combination with the maximum first position; A4: Process the optical element to be processed by combining the second variable range, the maximum first position, and the maximum ribbon thickness. During the processing, the real-time adjustment module makes real-time adjustments to the first position.

[0013] Further, step A1 includes the following steps: A11: Control the polishing wheel to process the test optical element with different polishing gaps, calculate the volume removal rate of the removal function corresponding to each processing point, and measure the ribbon thickness at each processing position in real time through the ribbon measurement component. Fit the fourth conversion relationship between the ribbon thickness and the volume removal rate of the removal function in the conversion relationship module; A12: Change the first position, control the polishing wheel to process the test optical element with different polishing gaps, calculate the volume removal rate of the removal function corresponding to each processing point, keep the ribbon thickness constant during the processing, and record the changes in the polishing gap and the first position at the same time. Fit the fifth conversion relationship between the volume removal rate of the removal function and the first position in the conversion relationship module; A13: Obtain the first conversion relationship based on the fourth conversion relationship and the fifth conversion relationship.

[0014] Further, in step A4, when controlling the polishing wheel to move to the current processing position, compare the current ribbon thickness measured by the ribbon measurement component with the second variable range: If the current ribbon thickness is within the second variable range, there is no need to adjust the current first position; If the current ribbon thickness is not within the second variable range, the current first position needs to be adjusted: If the current ribbon thickness is greater than or equal to the maximum ribbon thickness, adjust the current first position to the maximum first position; If the current ribbon thickness is less than the maximum ribbon thickness, adjust the current first position according to the following formula: ; where, represents the first conversion relationship, represents the current ribbon thickness, represents the current first position.

[0015] A nozzle-adjusted magnetorheological polishing method, based on the magnetorheological polishing equipment provided by the present invention for adjusting based on ribbon size, includes the following steps: B1: Control the magnetorheological processing module to process the test optical element, and obtain the second conversion relationship through the conversion relationship module during the processing; B2: Set the third variable range of the second position, and obtain the fourth variable range corresponding to the ribbon thickness according to the second conversion relationship; set the maximum second position, and obtain the corresponding maximum ribbon thickness according to the second conversion relationship. B3: The control time calculation module adjusts the ribbon measurement component and the magnetorheological processing module in combination with the maximum second position. B4: Process the optical element to be processed in combination with the fourth variable range, the maximum second position, and the maximum ribbon thickness. During the processing, the real-time regulation module makes real-time adjustments to the second position.

[0016] Further, step B1 includes the following steps: B11: Control the polishing wheel to process the test optical element with different polishing gaps, calculate the volume removal rate of the removal function corresponding to each processing point, and measure the ribbon thickness at each processing position in real time through the ribbon measurement component. Fit the sixth conversion relationship between the ribbon thickness and the volume removal rate of the removal function in the conversion relationship module. B12: Keep the ribbon thickness unchanged, separately change the second position at different polishing gaps, calculate the volume removal rate of the removal function corresponding to each processing point, and process at different positions of the test optical element. At the same time, record the changes in the polishing gap and the second position, and fit the seventh conversion relationship between the volume removal rate of the removal function and the second position in the conversion relationship module. B13: Obtain the second conversion relationship according to the sixth conversion relationship and the seventh conversion relationship.

[0017] Further, in step B4, when controlling the polishing wheel to move to the current processing position, compare the current ribbon thickness measured by the ribbon measurement component with the fourth variable range: If the current ribbon thickness is within the fourth variable range, there is no need to adjust the current second position; If the current ribbon thickness is not within the fourth variable range, the current second position needs to be adjusted: If the current ribbon thickness is greater than or equal to the maximum ribbon thickness, adjust the current second position to the maximum second position; If the current ribbon thickness is less than the maximum ribbon thickness, adjust the current second position according to the following formula:

[0018] Where, represents the second conversion relationship, represents the current ribbon thickness, represents the current second position.

[0019] A magnetorheological finishing method with a variable removal function, based on the magnetorheological finishing equipment provided by the present invention for adjusting ribbon size, includes the following steps: C1: Control the polishing wheel to process the test optical element at different polishing gaps to obtain the removal function; meanwhile, during the processing, record the changes in the ribbon thickness at each processing point through the ribbon measurement component, and obtain the eighth conversion relationship between the volume removal rate of the removal function and the ribbon thickness at each processing point in the conversion relationship module; C2: Use the machining program module to obtain the machining program according to the removal function, and import the machining program into the magnetorheological machining module; C3: Set the fifth variable range of the volume removal rate of the removal function, and obtain the corresponding sixth variable range of the ribbon thickness according to the eighth conversion relationship; set the maximum volume removal rate of the removal function, and obtain the corresponding maximum ribbon thickness according to the eighth conversion relationship; C4: Control the time calculation module to adjust the ribbon measurement component and the magnetorheological machining module in combination with the maximum volume removal rate of the removal function; C5: According to the sixth variable range, control the magnetorheological machining module to process the optical element to be processed, and during the processing, calculate the removal function at each processing point to obtain a set of variable removal functions, and then generate a new machining program; C6: Import the new machining program into the magnetorheological machining module, and then perform secondary processing on the optical element to be processed.

[0020] Further, obtaining the eighth conversion relationship in step C1 includes the following steps: C11: Control the polishing wheel to process the test optical element at different polishing gaps, and record the changes in the ribbon thickness at each processing point through the ribbon measurement component, and fit the ribbon thickness and the ninth conversion relationship between the polishing gaps in the conversion relationship module; C12: Control the polishing wheel to process at different positions of the test optical element at different polishing gaps, and calculate the volume removal rate of the removal function at each processing point, and fit the tenth conversion relationship between the volume removal rate of the removal function and the polishing gap in the conversion relationship module; C13: In the conversion relationship module, calculate the eighth conversion relationship according to the ninth conversion relationship and the tenth conversion relationship.

[0021] Further, in step C5, when controlling the polishing wheel to move to the current processing position, compare the current ribbon thickness measured by the ribbon measurement component with the sixth variable range: If the current ribbon thickness is within the sixth variable range, there is no need to adjust the current removal function; If the current ribbon thickness is not within the sixth variable range, the current removal function needs to be calculated: If the current ribbon thickness is less than the maximum ribbon thickness, the removal function corresponding to the current processing point is calculated by the following formula : ; where represents the volume removal rate of the removal function corresponding to the current processing point, represents the current ribbon thickness, represents the eighth conversion relationship, represents the removal function corresponding to the current processing point; thus, the variable removal function set is obtained

[0022] Input the variable removal function set into the next processing parameters to generate a new processing control program; If the current ribbon thickness is greater than or equal to the maximum ribbon thickness, the removal function corresponding to the current processing point is calculated by the following formula, and thus the variable removal function set is obtained : ; where represents the maximum ribbon thickness corresponding to the maximum removal function volume removal rate; Input the variable removal function set into the next processing parameters to generate a new processing control program.

[0023] A magnetorheological polishing method for actuator adjustment, based on the magnetorheological polishing equipment for ribbon size adjustment provided by the present invention, includes the following steps: D1: Control the polishing wheel to process the test optical element at different polishing gaps, and obtain the third conversion relationship in the conversion relationship module; D2: Set the seventh variable range of the output of the actuator group, and obtain the eighth variable range corresponding to the ribbon thickness according to the third conversion relationship; set the maximum output of the actuator group, and obtain the corresponding maximum ribbon thickness according to the third conversion relationship; D3: Control the time calculation module to adjust the ribbon measurement component and the magnetorheological processing module in combination with the maximum output of the actuator group; D4: Process the optical element to be processed in combination with the eighth variable range, the maximum output of the actuator group, and the maximum ribbon thickness, and during the processing, the real-time regulation module adjusts the output of the actuator group in real time until the magnetorheological processing module traverses all the processing points on the optical element to be processed.

[0024] Further, step D1 includes the following steps: D11: Control the processing of the test optical element by the polishing wheel with different polishing gaps, calculate the volume removal rate of the removal function corresponding to each processing point, and measure the ribbon thickness at each processing position in real time through the ribbon measurement component. Fit the eleventh conversion relationship between the ribbon thickness and the volume removal rate of the removal function in the conversion relationship module; D12: Control the output of the actuator group to process the test optical element at different polishing gaps, calculate the volume removal rate of the removal function corresponding to each processing point, control the ribbon thickness to remain unchanged during the processing, and record the changes in the polishing gap and the output of the actuator group at the same time. Fit the twelfth conversion relationship between the volume removal rate of the removal function and the output of the actuator group in the conversion relationship module; D13: Obtain the third conversion relationship according to the eleventh conversion relationship and the twelfth conversion relationship.

[0025] Further, in step D4, when controlling the polishing wheel to move to the current processing position, compare the current ribbon thickness measured by the ribbon measurement component with the eighth variable range: If the current ribbon thickness is within the eighth variable range, there is no need to adjust the current output of the actuator group; If the current ribbon thickness is not within the eighth variable range, the current output of the actuator group needs to be adjusted: If the current ribbon thickness is greater than or equal to the maximum ribbon thickness, adjust the current output of the actuator group to the maximum output of the actuator group; If the current ribbon thickness is less than the maximum ribbon thickness, adjust the current output of the actuator group according to the following formula:

[0026] where, represents the third conversion relationship, represents the current ribbon thickness, represents the current output of the actuator group.

[0027] Compared with the prior art, the present invention can achieve the following beneficial effects: In the magnetorheological polishing equipment and method based on ribbon size adjustment according to the present invention, the ribbon thickness of the magnetorheological fluid is measured non-contact by a ribbon measurement component. When the magnetorheological processing equipment polishes a test optical element, the control parameters of different nozzles, the height of the supply system, and the corresponding ribbon thickness are collected. The corresponding relationships between the control parameters of the nozzles, the height of the supply system, and the ribbon thickness are calculated respectively. Then, the optical element to be processed is processed according to the corresponding relationships to obtain the current ribbon thickness, and whether to adjust the control parameters of the nozzles or the height of the supply system is determined by comparing the ribbon thickness. Or the removal functions at each processing point in the first processing are aggregated into a variable removal function set, and the second processing is carried out in combination with the variable removal function set. This process does not require calibration steps for parameters such as gravity compensation, and is not affected by factors such as the weight of the robotic arm and the magnetorheological processing module of the magnetorheological processing equipment, the running accuracy, running speed, attitude, inertia, and other factors of the equipment itself. Only real-time control parameter changes of the nozzles or height changes of the supply system are carried out, and the measurement of the size parameters of the magnetorheological medium ribbon under the coupling of multiple factors during the processing is realized more comprehensively and accurately. Thus, the control parameters of the nozzles or the height of the supply system are regulated without the need to rely on other auxiliary operating mechanisms, and no additional cost is added. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] The drawings constituting a part of the present invention are used to provide a further understanding of the present invention. The schematic embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation to the present invention. In the drawings: Figure 1 FIG. is a schematic structural diagram of the magnetorheological polishing equipment based on ribbon size adjustment according to an embodiment of the present invention from one perspective; Figure 2 FIG. is a schematic structural diagram of the magnetorheological polishing equipment based on ribbon size adjustment according to an embodiment of the present invention from another perspective; Figure 3 FIG. is a schematic structural diagram of the ribbon measurement component according to an embodiment of the present invention; Figure 4 FIG. is a schematic structural diagram of the adjustment bracket according to an embodiment of the present invention; Figure 5 FIG. is a schematic structural diagram of the supply system according to an embodiment of the present invention; Figure 6 FIG. is a schematic structural diagram of the liquid pump according to an embodiment of the present invention; Figure 7 FIG. is a schematic structural diagram of the nozzle mounting seat according to an embodiment of the present invention; Figure 8 FIG. is a schematic diagram of the actuator according to an embodiment of the present invention.

[0029] Description of the reference numerals in the drawings: 1. Robot; 2. Control unit; 3. Actuator group; 4. Magnetorheological processing module; 5. Ribbon measuring assembly; 6. Polishing wheel; 7. Test bench; 8. Optical element to be processed; 9. Test optical element; 10. Supply system; 11. Nozzle; 12. Polishing motor; 13. Magnet; 14. Magnetorheological mounting bracket; 15. Nozzle mounting seat; 16. Connecting plate; 17. Transmission belt; 18. Ribbon measuring device; 19. Adjusting bracket; 20. Support bracket; 21. Longitudinal sliding assembly; 22. Transverse sliding assembly; 23. Axial rotation connecting plate; 24. Liquid pump; 25. Supply mounting bracket; 26. Supply motor; 27. Ball screw; 28. Slide rail; 29. Mounting fixing plate; 30. Liquid pump main body; 31. Cooling chamber; 32. Magnetorheological fluid storage chamber; 33. Cooling water inlet; 34. Magnetorheological fluid inlet; 35. Cooling water outlet; 36. Magnetorheological fluid outlet; 37. Fixing bracket; 38. Nozzle adjusting motor; 39. Push rod; 40. Nozzle support bracket; 41. Arc slide rail; 42. Transition plate; 43. Cylinder block; 44. Chamber A; 45. Chamber B; 46. Oil scraping ring; 47. Moving piston. Detailed implementation manners

[0030] In order to make the objectives, technical solutions and advantages of the present invention clearer and more understandable, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, rather than limiting the present invention.

[0031] It should be noted that, without conflict, the embodiments in the present invention and the features in the embodiments may be combined with each other.

[0032] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "up", "down", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first", "second", etc. may explicitly or implicitly include one or more of such features. In the description of the present invention, unless otherwise specified, the meaning of "a plurality" is two or more.

[0033] In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0034] The present invention will be described in detail below with reference to the accompanying drawings and in conjunction with embodiments.

[0035] As Figures 1 to 2 shown, the magnetorheological finishing equipment based on ribbon size adjustment according to the embodiment of the present invention includes a robot 1, a control unit 2, an actuator group 3, a magnetorheological processing module 4, and a ribbon measurement component 5. The actuator group is fixed at the free end of the robot 1, and the magnetorheological processing module 4 is fixed at the output end of the actuator group 3. The robot 1 drives the polishing wheel 6 in the magnetorheological processing module 4 to process the optical element 8 to be processed or the test optical element 9 placed on the experimental table 7 with magnetorheological fluid as the medium. The ribbon measurement component 5 measures the ribbon thickness of the magnetorheological fluid during the processing.

[0036] The interior of the control unit 2 includes a time calculation module, a conversion relationship module, a machining program module, and a real-time regulation module. Among them, the time calculation module calculates the measurement time of the ribbon measurement component 5 and the adjustment time of the magnetorheological machining module 4, and adjusts the ribbon measurement component 5 and the magnetorheological machining module 4 according to the measurement time and the adjustment time. The conversion relationship module fits the ribbon thickness with the first position of the supply system 10 in the magnetorheological machining module 4 to obtain a first conversion relationship, fits the ribbon thickness with the second position of the nozzle 11 in the magnetorheological machining module 4 to obtain a second conversion relationship, and fits the ribbon thickness with the actuator group output of the actuator group 3 to obtain a third conversion relationship. In the embodiment of the present invention, it is stipulated that the first position of the supply system 10 is the vertical distance between the nozzle orifice of the nozzle 11 and the working point of the supply system 10 (i.e., the liquid outlet of the supply system 10). When the vertical distance between the nozzle orifice of the nozzle 11 and the working point of the supply system 10 changes, the flow rate will change, and thus the removal function will change. It is stipulated that the second position of the nozzle 11 is the vertical distance between the nozzle orifice of the nozzle 11 and the working point of the polishing wheel 6 (i.e., the closest point between the polishing wheel 6 and the surface of the optical element to be processed 8 or the test optical element 9 along the normal direction of the surface of the optical element to be processed 8 or the test optical element 9). The machining program module obtains a machining program according to the removal function generated when the magnetorheological machining module 4 processes the optical element to be processed 8 or the test optical element 9, and imports the machining program into the magnetorheological machining module 4. The real-time regulation module adjusts the first position according to the first conversion relationship, or adjusts the second position according to the second conversion relationship, or adjusts the actuator group output, so as to keep the removal function stable during the machining of the optical element.

[0037] The magnetorheological machining module 4 further includes a polishing motor 12, a magnet 13, and a magnetorheological mounting bracket 14. The magnetorheological mounting bracket 14 is fixedly installed on the output end of the actuator group 3. The ribbon measurement assembly 5 is arranged on the magnetorheological mounting bracket 14. Specifically, the ribbon measurement assembly 5 is installed on the magnetorheological mounting bracket 14 through a connecting plate 16. The polishing wheel 6 is arranged on the magnetorheological mounting bracket 14 through the connecting plate's 16. The polishing motor 12 is installed on the magnetorheological mounting bracket 14 and connected to the polishing wheel 6, enabling the polishing motor 12 to control the rotation of the polishing wheel 6. Specifically, the output end of the polishing motor 12 is connected to the bearing of the polishing wheel 6 through a transmission belt 17, enabling the polishing motor 12 to control the rotation of the polishing wheel 6. The nozzle 11 is installed on the magnetorheological mounting bracket 14 along the rotation direction of the polishing wheel 6 through a nozzle mounting base 15. The nozzle mounting base 15 adjusts the mounting angle of the nozzle 11, thereby changing the second position of the nozzle orifice of the nozzle 11. The supply system 10 transports magnetorheological fluid to the nozzle 11 through a pipeline. The nozzle 11 sprays the magnetorheological fluid towards the working point of the polishing wheel 6, thereby enabling the polishing wheel of 6 to machine the optical element 8 to be processed or the test optical element 9 with the magnetorheological fluid as the medium. The magnet 13 is installed on the magnetorheological mounting bracket 14 through the connecting plate 16 and is close to the working point of the polishing wheel 6, enabling the magnetorheological fluid to change its stiffness under the influence of the magnetic field strength of the magnet 13.

[0038] The structure of the ribbon measurement assembly 5 is as Figure 3 shown, and it includes a ribbon measurement device 18 and an adjustment bracket 19. The ribbon measurement device 18 completes the measurement of the ribbon thickness and transmits the measured ribbon thickness to the control unit 2. The adjustment bracket 19 is installed on the magnetorheological mounting bracket 14 in the magnetorheological machining module through the connecting plate 16 and is used to control and adjust the pose of the ribbon measurement device 18. When the magnetorheological machining equipment is performing polishing, the ribbon measurement assembly 5 does not contact the optical element. Since the properties of the magnetorheological medium in the magnetic field determine that the magnetorheological medium will undergo elastic deformation after passing through the polishing gap, and the change in the polishing gap will be "copied" to the magnetorheological fluid ribbon after passing through the polishing gap, which is mainly manifested in the change in the ribbon thickness. Therefore, the change in the ribbon thickness of the magnetorheological fluid can reflect the change in the volumetric removal rate of the removal function.

[0039] In the embodiment of the present invention, the ribbon measuring device 18 preferably uses a line laser measuring instrument to measure the thickness of the ribbon. Specifically, the line laser measuring instrument emits a line beam for measurement on the magnetorheological fluid ribbon. The adjustment bracket 19 includes a support frame 20, a longitudinal sliding assembly 21, a transverse sliding assembly 22, and an axial rotation connecting plate 23. Among them, one end of the support frame 20 is connected to the magnetorheological mounting frame 14 through a connecting plate 16. The longitudinal sliding assembly 21 is arranged at the other end of the support frame 20. The transverse sliding assembly 22 is arranged on the longitudinal sliding assembly 21. The axial rotation connecting plate 23 is arranged on the transverse sliding assembly 22. The ribbon measuring device 18 is arranged on the axial rotation connecting plate 23, so that while the axial rotation connecting plate 23 drives the ribbon measuring device 18 to rotate, the longitudinal sliding assembly 21 and the transverse sliding assembly 22 drive the ribbon measuring device 18 to move longitudinally and transversely.

[0040] Specifically, the installation process of the adjustment bracket 19 is as Figure 4 shown in (a) to (c) of Figure 4 That is, as shown in (a) of Figure 4 , the slide rail of the longitudinal sliding assembly 21 is fixedly installed at the other end of the support frame 20; as Figure 4 shown in (b) of

[0041] In the embodiment of the present invention, the structure of the supply system 10 is as Figure 1 and Figure 5As shown in the figure, it includes a liquid pump 24, a supply mounting bracket 25, a supply motor 26, and a ball screw 27. Among them, the supply motor 26 and the ball screw 27 are installed on the supply mounting bracket 25. The supply motor 26 drives the ball screw 27 to rotate. The liquid pump 24 is arranged on the ball screw 27, and the ball screw 27 drives the liquid pump 24 to move, thereby changing the first position. Specifically, the screw in the ball screw 27 is installed on the supply mounting bracket 25 and is connected to the output end of the supply motor 26. The liquid pump 24 is connected to the nut of the ball screw 27. The supply motor 26 drives the screw to rotate, and the nut cooperates with the screw to move the liquid pump 24 along the direction of the screw, thereby changing the first position. The liquid pump 24 transports the magnetorheological fluid to the nozzle 11 through a pipeline. In the embodiment of the present invention, in order to enable the liquid pump 24 to move smoothly along the direction of the ball screw 27 without deviation, a slide rail 28 parallel to the ball screw 27 is installed on each side of the ball screw 27. And the liquid pump 24 is fixedly connected to the nut of the ball screw 27 and the sliders on the two slide rails 28 through the mounting fixing plate 29, so that the supply motor 26 drives the ball screw 27, and then drives the mounting fixing plate 29 and the liquid pump 24 on the mounting fixing plate 29 to move smoothly.

[0042] The structure of the liquid pump 24 is as Figure 6 shown, including a liquid pump main body 30, a cooling chamber 31, and a magnetorheological fluid storage chamber 32. The liquid pump main body 30 is used to supply the magnetorheological fluid. In the embodiment of the present invention, the DFLD vertical multi-stage pump of Shanghai Orient Pump Industry Co., Ltd. is selected as the liquid pump main body 30; the cooling chamber 31 is mainly used to store cooling water and cool down the magnetorheological fluid; the magnetorheological fluid storage chamber 32 is mainly used to store the magnetorheological fluid. When the liquid pump 24 works, the cooling water enters the cooling chamber 31 from the cooling water inlet 33 to cool down the magnetorheological fluid. The magnetorheological fluid enters the liquid pump main body 30 from the magnetorheological fluid inlet 34 through the magnetorheological fluid storage chamber 32; the cooling water is discharged from the cooling water outlet 35 after completing the cooling of the magnetorheological fluid in the cooling chamber 31; the cooled magnetorheological fluid is output from the magnetorheological fluid outlet 36 and transports the magnetorheological fluid to the nozzle 11 through a pipeline. At this time, the outlet of the supply system 10 is the magnetorheological fluid outlet 36. Further, the first position of the supply system 10 is the vertical distance between the nozzle orifice of the nozzle 11 and the magnetorheological fluid outlet 36.

[0043] The structure of the nozzle mounting seat 15 is as Figure 7 shown. Among them Figure 7 (a) in shows the structural schematic diagram when the nozzle 11 is installed on the nozzle mounting seat 15, Figure 7 (b) in shows the structural schematic diagram when the nozzle 11 is not installed on the nozzle mounting seat 15. As Figure 7As shown, the nozzle mounting seat 15 includes a fixing bracket 37, a nozzle adjustment motor 38, a push rod 39, and a nozzle support bracket 40. The fixing bracket 37 is of an L-shaped structure and is fixed to the magnetorheological mounting bracket 14. An arc-shaped slide rail 41 is arranged on the inner side wall of the fixing bracket 37. The nozzle adjustment motor 38 is mounted on the magnetorheological mounting bracket 14. One end of the push rod 39 passes through the bottom edge of the fixing bracket 37 and is connected to the output end of the nozzle adjustment motor 38, so that the nozzle adjustment motor 38 pushes the push rod 39, and further the push rod 39 pushes the slider on the arc-shaped slide rail 41 to move along the arc-shaped slide rail 41. One end of the nozzle support bracket 40 is fixed to the slider, and the nozzle 11 is mounted on the other end of the nozzle support bracket 40. When controlling the nozzle mounting seat 15 to adjust the position of the nozzle 11, the nozzle adjustment motor 38 outputs a displacement to push the push rod 39, and further the nozzle support bracket 40 drives the nozzle 11 to move, thereby completing the adjustment of the second position of the nozzle 11.

[0044] In the embodiment of the present invention, the actuator group 3 is composed of two cascaded high-frequency actuators, that is, one high-frequency actuator is mounted on the output end of the other high-frequency actuator, so that the output of the actuator group 3 is the sum of the output displacements of the two high-frequency actuators. In the embodiment of the present invention, the high-frequency actuator preferably adopts the SG model hydrostatic linear cylinder of Jilin Huakong Test Instrument Co., Ltd. The structure of each high-frequency actuator is as Figure 8 shown, and includes a transition plate 42, a cylinder block 43, an A chamber 44, a B chamber 45, an oil scraping ring 46, and a moving piston 47. The transition plate 42 is used to connect the end flange of the robot 1 to the cylinder block 43 of the high-frequency actuator. The A chamber 44 and the B chamber 45 are used to control the inflow and outflow of hydraulic oil. The oil scraping ring 46 is used to prevent the hydraulic oil from flowing out of the cylinder block 43. The moving piston 47 is used for position output. The moving piston 47 is connected to the magnetorheological processing module 4 or another high-frequency actuator through a connecting plate 16, and further outputs a displacement to the magnetorheological processing module 4 or another high-frequency actuator.

[0045] The robot 1, the ribbon measuring component 5, the supply system 10, the actuator group 3, and the nozzle mounting base 15 are respectively connected to the control unit 2 to form their respective communication lines, enabling the control unit 2 to receive and send signals through the corresponding communication lines. Specifically, the control unit 2 is communicatively connected to the supply motor 26 through a line. During operation, the control unit 2 gives a control instruction to the supply motor 26, and the supply motor 26 drives the ball screw 27 to rotate. The rotating ball screw 27 drives the mounting fixing plate 29 to move up and down, thereby changing the vertical position of the liquid pump 24, and thus changing the first position of the supply system 10; the control unit 2 controls the oil pressure of the hydraulic oil in the high-frequency actuator, and then controls the expansion and contraction of the moving piston 47 to achieve the position regulation of the magnetorheological machining module 4 and change the output of the actuator group; the control unit 2 controls the nozzle adjustment motor 38, and then changes the position of the nozzle support frame 40. The nozzle support frame 40 moves along the arc slide rail 41, thereby changing the second position of the nozzle 11. Since a strong magnetic region is generated around the polishing wheel 6 during the polishing operation, the communication lines avoid the strong magnetic region.

[0046] Based on the magnetorheological polishing equipment based on ribbon size adjustment described in the embodiments of the present invention, the embodiments of the present invention also provide a magnetorheological polishing method based on ribbon size adjustment. The method includes a magnetorheological polishing method for adjusting the position of the supply system, a magnetorheological polishing method for nozzle adjustment, a magnetorheological polishing method for variable removal function, and a magnetorheological polishing method for actuator adjustment.

[0047] Specific embodiment 1: The magnetorheological polishing method for adjusting the position of the supply system provided in this specific embodiment, according to the magnetorheological polishing equipment based on ribbon size adjustment described in the embodiments of the present invention, in combination with Figures 1 to 5 , includes the following steps: A1: Control the magnetorheological machining module 4 to process the test optical element 9, and obtain the first conversion relationship through the conversion relationship module during the processing. Step A1 includes the following steps: A11: Control the polishing wheel 6 to process the test optical element 9 with different polishing gaps, calculate the volume removal rate of the removal function corresponding to each processing point, and measure the ribbon thickness at each processing position in real time through the ribbon measuring component 5. Fit in the conversion relationship module to obtain:

[0048] Among them, represents the fourth conversion relationship between the ribbon thickness T and the volume removal rate of the removal function . In this specific embodiment, specifically, control the polishing wheel 6 to perform fixed-point processing on the test optical element 9 for a period of time with different polishing gaps.

[0049] A12: Change the first position, control the polishing wheel 6 to process the test optical element 9 at different polishing gaps, calculate the volume removal rate of the removal function corresponding to each processing point. During the processing, control the ribbon thickness to remain unchanged, and at the same time record the change of the volume removal rate of the removal function and the first position. In the conversion relationship module, the following is obtained by fitting:

[0050] Among them, represents the volume removal rate of the removal function and the fifth conversion relationship between the first position ; In this specific implementation, specifically, change the first position, and control the polishing wheel 6 to perform fixed-point processing on the test optical element 9 at different polishing gaps for a period of time.

[0051] A13: Obtain the first conversion relationship according to the fourth conversion relationship and the fifth conversion relationship, that is: ; Among them, represents the first conversion relationship.

[0052] A2: Set the first variable range of the first position , and obtain the second variable range corresponding to the ribbon thickness according to the first conversion relationship , that is: [[ID=3३]]; ; Set the maximum first position , and obtain the corresponding maximum ribbon thickness according to the first conversion relationship , that is: ; Among them, the maximum first position and the first variable range are adaptively set and adjusted according to the actual situation.

[0053] A3: Control the time calculation module to adjust the ribbon measurement component 5 and the magnetorheological processing module 4 in combination with the maximum first position. Step B3 includes the following steps: A31. Statistically analyze b data measured by the ribbon measurement component 5 within a seconds to obtain the time for the ribbon measurement component 5 to measure one point ; A32. Calculate the time required to adjust the magnetorheological processing module 4 at the maximum supply system position adjustment amount : ; Among them, represents the change regulation rate of the first position; the maximum supply system position adjustment amount , represents the minimum first position, and this value is adaptively set and adjusted according to the actual situation.

[0054] A33. Measure the vertical distance from the measurement position of the ribbon measurement component 5 to the working point of the polishing wheel 6 , according to the vertical distance and the set rotational speed of the polishing wheel calculate the time required for the polishing wheel 6 to rotate to the working point : ; Among them, represents the radius of the polishing wheel 6, and the rotational speed of the polishing wheel is adaptively set and adjusted according to the actual situation; A34. Calculate the minimum movement time between two adjacent processing positions of the robot 1 at the highest moving speed : : ; Among them, represents the distance between two adjacent processing positions; A35. Calculate whether the condition holds: If the condition holds, there is no need to adjust the ribbon measurement component 5 and the polishing wheel 6; if the condition does not hold, it is necessary to adjust the data sampling frequency of the ribbon measurement component 5 and the rotational speed of the polishing wheel to make the condition hold; A36. Perform mean filtering processing on the measurement data between every two adjacent processing positions and then output it. At the same time, the number of data for mean filtering needs to satisfy .

[0055] Since the magnetorheological fluid ejected from the supply system needs to be transported through the pipeline and driven by the polishing wheel 6 to reach the working area, in order to ensure the adjustment of the removal function change at the target trajectory point, it is necessary to set the dwell time of the processing point. The specific setting method is as follows: Measure the Z-axis coordinate of the nozzle orifice position of the nozzle 11 through the ribbon measurement component 5 and the Z-axis coordinate of the lowest point of the polishing wheel 6 , then the vertical distance between the nozzle 11 and the lowest point of the polishing wheel 6 is |Z4 - Z5|, and the time required for the magnetorheological fluid ejected from the nozzle 11 to reach the lowest point of the polishing wheel 6 is: ; wherein, n represents the number of revolutions per second of the polishing wheel 6, L represents the pipe length, represents the flow rate of the magnetorheological fluid. When generating the machining control program, if the dwell time at each point is, then the generated machining control program is appropriate; if there are dwell times at some machining points , it is necessary to increase the material removal thickness, extend the machining time, and regenerate the machining control program so that the machining dwell time at each point .

[0056] A4: Combine the second variable range , the maximum first position and the maximum ribbon thickness , machine the optical element 8 to be machined, and during the machining process, the real-time regulation module makes real-time adjustments to the first position SP. In step A4, when controlling the polishing wheel 6 to move to the current machining position i, compare the current ribbon thickness measured by the ribbon measurement assembly 5 with the second variable range : If the current ribbon thickness is within the second variable range , that is, , then there is no need to adjust the current first position ; If the current ribbon thickness is not within the second variable range , that is, , then it is necessary to adjust the current first position : If the current ribbon thickness is greater than or equal to the maximum ribbon thickness [[ID=5o]] , that is, , adjust the current first position to the maximum first position ; If the current ribbon thickness is less than the maximum ribbon thickness , that is, , adjust the current first position according to the following formula: .

[0057] Specific Example 2: The nozzle-adjusting magnetorheological polishing method provided in this specific example, according to the magnetorheological polishing equipment based on ribbon size adjustment described in the embodiments of the present invention, combines Figures 1 to 4 , Figure 6 and Figure 7, including the following steps: B1: Control the magnetorheological processing module 4 to process the test optical element 9, and obtain the second conversion relationship through the conversion relationship module during the processing. Step B1 includes the following steps: B11: Control the polishing wheel 6 to process the test optical element 9 with different polishing gaps, calculate the volume removal rate of the removal function corresponding to each processing point, and measure the ribbon thickness at each processing position in real time through the ribbon measurement component 5, and fit in the conversion relationship module to obtain:

[0058] where, represents the sixth conversion relationship between the ribbon thickness T and the volume removal rate of the removal function ; in this specific implementation, specifically control the polishing wheel 6 to perform fixed-point processing on the test optical element 9 for a period of time with different polishing gaps; B12: Keep the ribbon thickness unchanged, at different polishing gaps, separately change the second position, and process at different positions of the test optical element 9, calculate the volume removal rate of the removal function corresponding to each processing point, and record the changes of the polishing gap and the second position at the same time, and fit in the conversion relationship module to obtain:

[0059] where, represents the seventh conversion relationship between the volume removal rate of the removal function and the second position ; in this specific implementation, specifically change the second position separately, and control the polishing wheel 6 to perform fixed-point processing on different positions of the test optical element 9 for a period of time; B13: Obtain the second conversion relationship according to the sixth conversion relationship and the seventh conversion relationship, that is:

[0060] where, represents the second conversion relationship.

[0061] B2: Set the third variable range of the second position , and obtain the corresponding fourth variable range of the ribbon thickness according to the second conversion relationship , that is: ; ; Set the maximum second position , and obtain the corresponding maximum ribbon thickness according to the second conversion relationship , that is:​​ ; Among them, the maximum second position and the third variable range are adaptively set and adjusted according to the actual situation.

[0062] B3: The control time calculation module combines the maximum second position to adjust the ribbon measuring component 5 and the magnetorheological processing module 4. Step B3 includes the following steps: B31. Statistically analyze b data measured by the ribbon measuring component 5 within a seconds to obtain the time for the ribbon measuring component 5 to measure one point ; ; B32. Calculate the time required to regulate the magnetorheological processing module 4 at the maximum second position adjustment amount : ; Among them, represents the highest moving speed for nozzle position regulation; the maximum second position adjustment amount , represents the minimum second position, and this value is adaptively set and adjusted according to the actual situation.

[0063] B33. Measure the vertical distance from the measurement position of the ribbon measuring component 5 to the working point of the polishing wheel 6 , and calculate the time required for the polishing wheel 6 to rotate to the working point according to the vertical distance and the set polishing wheel rotation speed : ; Among them, represents the radius of the polishing wheel 6, and the polishing wheel rotation speed is adaptively set and adjusted according to the actual situation; B34. Calculate the minimum movement time between two adjacent processing positions of the robot 1 at the highest moving speed : ; Among them, represents the distance between two adjacent processing positions; B35. Calculate whether the condition holds: If the condition holds, there is no need to adjust the ribbon measuring component 5 and the polishing wheel 6; if the condition does not hold, it is necessary to adjust the data sampling frequency of the ribbon measuring component 5 and the polishing wheel rotation speed to make the condition hold; Perform mean filtering on the measurement data between every two adjacent processing positions and then output it. At the same time, the number of data for mean filtering needs to satisfy .

[0064] Since the magnetorheological fluid ejected from the nozzle 11 needs to be driven by the polishing wheel 6 to reach the working area, in order to ensure the adjustment of the removal function change at the target trajectory point, the dwell time of the processing point needs to be set. The specific setting method is as follows: Measure the Z-axis coordinate of the nozzle orifice position of the nozzle 11 through the ribbon measurement component 5 and the Z-axis coordinate of the lowest point of the polishing wheel 6 , then the vertical distance between the nozzle 11 and the lowest point of the polishing wheel 6 is |Z4 - Z5|. The time required for the magnetorheological fluid ejected from the nozzle 11 to reach the lowest point of the polishing wheel 6 is: ; where n represents the number of revolutions per second of the polishing wheel 6. When generating the processing control program, if the dwell time of each point is, then the generated processing control program is appropriate; if there are dwell times for some processing points , it is necessary to increase the material removal thickness, extend the processing time, and regenerate the processing control program so that the processing dwell time of each point . B4: Combine the fourth variable range , the maximum second position and the maximum ribbon thickness , process the optical element 8 to be processed, and during the processing, the real-time regulation module makes real-time adjustments to the second position NL. In step B4, when controlling the polishing wheel 6 to move to the current processing position i, compare the current ribbon thickness measured by the ribbon measurement component 5 with the fourth variable range : If the current ribbon thickness is within the fourth variable range , that is , then there is no need to adjust the current second position ; If the current ribbon thickness is not within the fourth variable range , that is , then it is necessary to adjust the current second position : If the current ribbon thickness is greater than or equal to the maximum ribbon thickness , that is , set the current second position Adjust to the maximum second position ; If the current ribbon thickness is less than the maximum ribbon thickness , that is , adjust the current second position according to the following formula: .

[0065] Specific Embodiment 3: The magnetorheological polishing method with a variable removal function provided in this specific embodiment, according to the magnetorheological polishing apparatus based on ribbon size adjustment described in the embodiments of the present invention, in combination with Figures 1 to 4 , includes the following steps: C1: Control the polishing wheel 6 to process the test optical element 9 with different polishing gaps to obtain the removal function; meanwhile, record the change in the ribbon thickness at each processing point during the processing by the ribbon measurement assembly 5, and obtain the eighth conversion relationship between the volume removal rate of the removal function and the ribbon thickness at each processing point in the conversion relationship module. Specifically, it includes the following steps: C11: Control the polishing wheel 6 to process the test optical element 9 with different polishing gaps, and record the change in the ribbon thickness at each processing point by the ribbon measurement assembly 5, and fit in the conversion relationship module to obtain:

[0066] wherein, represents the ninth conversion relationship between the ribbon thickness and the polishing gap; in this specific embodiment, specifically, control the polishing wheel 6 to perform fixed-point processing on the test optical element 9 with different polishing gaps for a period of time; C12: Control the polishing wheel 6 to process at different positions of the test optical element 9 with different polishing gaps, and calculate the volume removal rate of the removal function at each processing point, and fit in the conversion relationship module to obtain: C12: Control the polishing wheel 6 to process at different positions of the test optical element 9 with different polishing gaps, and calculate the volume removal rate of the removal function at each processing point, and fit in the conversion relationship module to obtain:

[0067] wherein, represents the tenth conversion relationship between the volume removal rate of the removal function and the polishing gap ; in this specific embodiment, specifically, control the polishing wheel 6 to perform fixed-point processing on the test optical element 9 with different polishing gaps at different positions for a period of time; C13: In the conversion relationship module, calculate the eighth conversion relationship according to the ninth conversion relationship and the tenth conversion relationship, that is:

[0068] wherein, Represents the eighth conversion relationship.

[0069] C2: Use the machining program module to obtain the machining program according to the removal function, and import the machining program into the magnetorheological machining module 4.

[0070] C3: Set the fifth variable range of the volume removal rate of the removal function , and according to the eighth conversion relationship obtain the corresponding sixth variable range of the ribbon thickness , that is: ; ; Set the maximum volume removal rate of the removal function , and according to the eighth conversion relationship obtain the corresponding maximum ribbon thickness , that is: .

[0071] The fifth variable range and the maximum volume removal rate of the removal function are adaptively set and adjusted according to the actual situation.

[0072] C4: The control time calculation module combines the maximum volume removal rate of the removal function to adjust the ribbon measurement component and the magnetorheological machining module 4. Specifically, it includes the following steps: C41. Count the b data measured by the ribbon measurement component 5 within a seconds to obtain the time for the ribbon measurement component 5 to measure one point ; ; C42. Measure the vertical distance from the measurement position of the ribbon measurement component 5 to the working point of the polishing wheel 6 , and according to the vertical distance and the set rotational speed of the polishing wheel calculate the time required for the polishing wheel 6 to rotate to the working point : ; Among them, represents the radius of the polishing wheel 6, and the rotational speed of the polishing wheel is adaptively set and adjusted according to the actual situation; C43. Calculate the minimum movement time between adjacent two machining positions of the robot 1 at the highest moving speed : : ; Among them, Indicates the distance between two adjacent processing positions; C44. Calculation conditions Whether it holds: If the condition holds, there is no need to adjust the ribbon measurement component 5 and the polishing wheel 6; if the condition does not hold, the data sampling frequency of the ribbon measurement component 5 and the rotational speed of the polishing wheel Need to be adjusted to make the condition hold; C45. The measurement data between every two adjacent processing positions are subjected to mean filtering processing and then output, and the number of data for mean filtering Needs to meet .

[0073] C5: According to the sixth variable range , control the magnetorheological processing module 4 to process the optical element 8 to be processed, and during the processing, calculate the removal function of each processing point to obtain a variable removal function set, and then generate a new processing program. In step C5, when controlling the polishing wheel 6 to move to the current processing position i, the current ribbon thickness measured by the ribbon measurement component 5 Is compared with the sixth variable range : If the current ribbon thickness Is within the sixth variable range , that is , then there is no need to adjust the current removal function ; If the current ribbon thickness Is not within the sixth variable range , that is , then the current removal function Needs to be calculated as follows: If the current ribbon thickness Is less than the maximum ribbon thickness , that is , then calculate the removal function corresponding to the current processing point through the following formula , and then obtain the variable removal function set : ; Among them, Represents the volume removal rate of the removal function corresponding to the current processing point; Input the variable removal function set As the input of the next processing parameter to generate a new processing control program; If the current ribbon thickness Is greater than or equal to the maximum ribbon thickness , that is , then calculate the removal function corresponding to the current processing point through the following formula , and then obtain the variable removal function set : ; wherein, represents the maximum ribbon thickness and the corresponding maximum removal function volume removal rate; input the variable removal function set as the input of the next processing parameter to generate a new processing control program.

[0074] C6: Import the new processing program into the magnetorheological processing module 4, and then perform secondary processing on the optical element to be processed.

[0075] Specific Embodiment 4: The magnetorheological polishing method for actuator adjustment provided in this specific embodiment, according to the magnetorheological polishing equipment based on ribbon size adjustment described in the embodiments of the present invention, in combination with Figures 1 to 4 and Figure 8 , includes the following steps: D1: Control the polishing wheel 6 to process the test optical element 9 with different polishing gaps, and obtain the third conversion relationship in the conversion relationship module. Step D1 includes the following steps: D11: Control the polishing wheel 6 to process the test optical element 9 with different polishing gaps, calculate the removal function volume removal rate corresponding to each processing point, and measure the ribbon thickness at each processing position in real time through the ribbon measurement component 5, and fit in the conversion relationship module to obtain: ; wherein, represents the ribbon thickness and the removal function volume removal rate of the eleventh conversion relationship; in this specific embodiment, specifically control the polishing wheel 6 to perform fixed-point processing on the test optical element 9 for a period of time with different polishing gaps; D12: Control the output of the actuator group to process the test optical element 9 with different polishing gaps, calculate the removal function volume removal rate corresponding to each processing point, control the ribbon thickness to remain unchanged during the processing, and record the changes in the removal function volume removal rate and the output of the actuator group at the same time, and fit in the conversion relationship module to obtain

[0076] wherein, represents the removal function volume removal rate and the twelfth conversion relationship between the output L of the actuator group; in this specific embodiment, specifically control the output of the actuator group to perform fixed-point processing on the test optical element 9 for a period of time with different polishing gaps; D13: Obtain the third conversion relationship according to the eleventh conversion relationship and the twelfth conversion relationship, that is: ; Among them, represents the third conversion relationship.

[0077] D2: Set the seventh variable range of the output of the actuator group , and according to the third conversion relationship obtain the eighth variable range corresponding to the ribbon thickness , that is: ; ; Set the maximum output of the actuator group , and according to the third conversion relationship obtain the corresponding maximum ribbon thickness , that is: .

[0078] The seventh variable range and the maximum output of the actuator group are adaptively set and adjusted according to the actual situation.

[0079] D3: The control time calculation module combines the maximum output of the actuator group to adjust the ribbon measurement component 5 and the magnetorheological processing module 4; specifically, it includes the following steps: D31. Statistically analyze b data measured by the ribbon measurement component 5 within a seconds to obtain the time for the ribbon measurement component 5 to measure one point [[ID= / / ]] ; ; D32. Calculate the time required to regulate the magnetorheological processing module 4 at the maximum output change of the actuator : ; Among them, represents the output change regulation rate of the actuator group; D33. Measure the vertical distance from the measurement position of the ribbon measurement component 5 to the working point of the polishing wheel 6, and calculate the time required for the polishing wheel 6 to rotate to the working point according to the vertical distance and the set rotational speed of the polishing wheel [[ID= / / ]] ; The rotational speed of the polishing wheel Among them, represents the radius of the polishing wheel 6, and the rotational speed of the polishing wheel is adaptively set and adjusted according to the actual situation; D34. Calculate the minimum movement time between two adjacent processing positions when the computer robot is at its maximum moving speed : ; ; wherein, represents the distance between two adjacent processing positions; D35. Calculate whether the condition holds: If the condition holds, there is no need to adjust the ribbon measuring component 5 and the polishing wheel 6; if the condition does not hold, it is necessary to adjust the data sampling frequency of the ribbon measuring component 5 and the rotational speed of the polishing wheel to make the condition hold; D36. Perform mean filtering on the measurement data between every two adjacent processing positions and then output it. At the same time, the number of data for mean filtering needs to satisfy .

[0080] D4: Combine the eighth variable range , the maximum actuator group output and the maximum ribbon thickness to process the optical element 8 to be processed. During the processing, the real-time control module adjusts the output L of the actuator group in real time until the magnetorheological processing module 4 traverses all the processing points on the optical element 8 to be processed.

[0081] In step D4, when controlling the polishing wheel 6 to move to the current processing position i, compare the current ribbon thickness measured by the ribbon measuring component 5 with the eighth variable range : If the current ribbon thickness is within the eighth variable range , that is , there is no need to adjust the current output of the actuator group ; If the current ribbon thickness is not within the eighth variable range , that is , it is necessary to adjust the current output of the actuator group : If the current ribbon thickness is greater than or equal to the maximum ribbon thickness , that is , adjust the current output of the actuator group to the maximum output of the actuator group ; If the current ribbon thickness is less than the maximum ribbon thickness , that is , the output of the current actuator group is adjusted according to the following formula : .

[0082] The fitting process in the above two specific embodiments includes but is not limited to importing the discrete data of the working speed and the ribbon thickness into Matlab software, and completing data fitting with the polyfit fitting instruction of Matlab software to solve the corresponding relationships between the first position of the supply system, the second position of the nozzle, the volume removal rate of the removal function, and the output of the actuator group and the ribbon thickness respectively; The Polyfit fitting instruction is a basic general instruction of matlab software. In this way, the corresponding relationships and the corresponding function curves between the first position of the supply system, the second position of the nozzle, the volume removal rate of the removal function, and the output of the actuator group and the ribbon thickness can be seen more intuitively.

[0083] In the above two specific embodiments, the calculation conditions give the corresponding relationships among four time elements, that is: within a single sampling period, the robot 1 can adjust the magnetorheological processing equipment, so that after moving the magnetorheological processing equipment, the ribbon measuring component 5 performs the next sampling, avoiding the sampling frequency being too slow due to too long a sampling period, and making the sampling frequency not match the adjustment speed of the moving component.

[0084] Among them, regarding the selection of this parameter has the following meaning: The magnetorheological fluid enters the magnetic field working area driven by the polishing wheel 6 and is affected by the magnetic field. The magnetorheological fluid is transformed into a Bingham fluid with high viscosity and low fluidity. The Bingham fluid is extruded through the polishing gap (the distance between the lowest point of the polishing wheel 6 and the workpiece) to form a ribbon. The ribbon thickness and width carry information about the volume removal rate, that is, the change in the volume removal rate is associated with the change in the ribbon thickness. Therefore, as long as the change in the ribbon thickness is collected, the change in the volume removal rate can be reflected.

[0085] The ribbon measuring component 5 is used to measure the ribbon thickness. In order to avoid the ribbon measuring component 5 colliding with the optical element 8 to be processed and the test optical element 9 during the processing, the ribbon measuring component 5 needs to be inclined. There is an angle between the measuring direction of the ribbon measuring component 5 and the horizontal line. This results in the data collected not being the ribbon thickness information at the volume removal rate, but the data collected when the magnetorheological fluid driven by the polishing wheel rotates from the lowest point of the polishing wheel to the measuring range of the ribbon measuring component 5 after a certain time. This time is .

[0086] Assume that if The time is long and the moving speed of the whole device is very fast, resulting in the completion of the whole processing. However, the change in the ribbon thickness is not collected in time, and the purpose of real-time control cannot be achieved during the whole processing. Therefore, the time must be considered.

[0087] It should be understood that the various forms of processes shown above can be used, with steps reordered, added or deleted. For example, the steps described in the disclosure of the present invention can be executed in parallel, sequentially or in a different order, as long as the desired results of the technical solution disclosed in the present invention can be achieved. No limitation is made herein.

[0088] The above specific embodiments do not constitute a limitation to the protection scope of the present invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A magnetorheological polishing device based on ribbon size adjustment, characterized in that: It includes a robot, a control unit, an actuator group, a magnetorheological machining module, and a ribbon measurement component; wherein: the actuator group is arranged at the free end of the robot, and the magnetorheological machining module is arranged at the output end of the actuator group; the robot drives the polishing wheel in the magnetorheological machining module to process the optical element with magnetorheological fluid as the medium, and during the processing, the ribbon measurement component measures the ribbon thickness of the magnetorheological fluid; The interior of the control unit includes: A time calculation module that calculates the measurement time of the ribbon measurement component and the adjustment time of the magnetorheological machining module, and adjusts the ribbon measurement component and the magnetorheological machining module according to the measurement time and the adjustment time; A conversion relationship module that fits the ribbon thickness with the first position of the supply system in the magnetorheological machining module to obtain a first conversion relationship, fits the ribbon thickness with the second position of the nozzle in the magnetorheological machining module to obtain a second conversion relationship, and fits the ribbon thickness with the output of the actuator group of the actuator group to obtain a third conversion relationship; A machining program module that obtains a machining program according to the removal function generated when the magnetorheological machining module processes the optical element, and imports the machining program into the magnetorheological machining module; A real-time regulation module that adjusts the first position according to the first conversion relationship, or adjusts the second position according to the second conversion relationship, or adjusts the output of the actuator group to keep the removal function stable when processing the optical element.

2. The magnetorheological polishing device based on ribbon size adjustment according to claim 1, wherein: The ribbon measurement component includes a ribbon measurement device and an adjustment bracket; the ribbon measurement device is arranged on the adjustment bracket; the ribbon measurement device measures the ribbon thickness and transmits the measured ribbon thickness to the control unit; the adjustment bracket is arranged on the magnetorheological machining module and is used to adjust the pose of the ribbon measurement device.

3. The magnetorheological polishing device based on ribbon size adjustment according to claim 2, wherein: The magnetorheological machining module further includes a polishing motor, a magnet, and a magnetorheological mounting bracket; wherein, The magnetorheological mounting bracket is arranged at the output end of the actuator group, the polishing wheel is arranged on the magnetorheological mounting bracket, and the adjustment bracket is arranged on the magnetorheological mounting bracket; The polishing motor is arranged on the magnetorheological mounting bracket and is connected to the polishing wheel to control the polishing wheel to rotate; The nozzle is installed on the magnetorheological mounting bracket along the rotation direction of the polishing wheel through a nozzle mounting seat, and the nozzle mounting seat adjusts the installation angle of the nozzle, thereby changing the second position; the supply system conveys the magnetorheological fluid to the nozzle; The magnet is arranged on the magnetorheological mounting bracket and is close to the working point of the polishing wheel, so that the magnetorheological fluid is affected by the magnetic field intensity of the magnet to change the stiffness of the magnetorheological fluid, thereby processing the optical element.

4. The magnetorheological polishing equipment based on ribbon size adjustment according to claim 3, characterized in that: The supply system includes a liquid pump, a supply mounting bracket, a supply motor, and a ball screw. Among them, the supply motor and the ball screw are arranged on the supply mounting bracket, so that the supply motor drives the ball screw to rotate. The liquid pump is arranged on the ball screw, and the ball screw drives the liquid pump to move, thereby changing the first position. The liquid pump conveys magnetorheological fluid to the nozzle through a pipeline.

5. The magnetorheological polishing equipment based on ribbon size adjustment according to claim 4, characterized in that: The nozzle mounting seat includes a fixing frame, a nozzle adjustment motor, a push rod, and a nozzle support frame. Among them, the fixing frame is arranged on the magnetorheological mounting frame, and arc-shaped slide rails are arranged on the inner side wall of the fixing frame. The nozzle adjustment motor is arranged on the magnetorheological mounting frame. One end of the push rod passes through the fixing frame and is connected to the nozzle adjustment motor, so that the nozzle adjustment motor drives the slider on the arc-shaped slide rail to move through the push rod. One end of the nozzle support frame is arranged on the slider, and the nozzle is connected to the other end of the nozzle support frame, so that the nozzle adjustment motor drives the slider through the push rod, and further the nozzle support frame drives the nozzle to move, thereby completing the adjustment of the second position.

6. The magnetorheological polishing device based on ribbon size adjustment according to claim 3, characterized in that: The adjustment bracket includes a support frame, a longitudinal sliding assembly, a transverse sliding assembly, and an axial rotation connecting plate. Among them, one end of the support frame is connected to the magnetorheological mounting frame. The longitudinal sliding assembly is arranged at the other end of the support frame, the transverse sliding assembly is arranged on the longitudinal sliding assembly, the axial rotation connecting plate is arranged on the transverse sliding assembly, and the ribbon measuring device is arranged on the axial rotation connecting plate, so that while the axial rotation connecting plate drives the ribbon measuring device to rotate, the longitudinal sliding assembly and the transverse sliding assembly drive the ribbon measuring device to move longitudinally and transversely.

7. The magnetorheological polishing equipment based on ribbon size adjustment according to claim 3, characterized in that: The ribbon measuring assembly, the robot, the actuator group, the nozzle mounting seat, and the supply system are respectively connected to the control unit to form their respective communication lines, so that the control unit receives and sends signals through the corresponding communication lines.

8. A magnetorheological polishing method for adjusting the position of a supply system, based on the magnetorheological polishing equipment for adjusting based on ribbon size according to any one of claims 1 to 6, characterized in that: It includes the following steps: A1: Control the magnetorheological processing module to process the test optical element, and obtain the first conversion relationship through the conversion relationship module during the processing. A2: Set the first variable range of the first position, and obtain the corresponding second variable range of the ribbon thickness according to the first conversion relationship; set the maximum first position, and obtain the corresponding maximum ribbon thickness according to the first conversion relationship. A3: Control the time calculation module to adjust the ribbon measuring assembly and the magnetorheological processing module in combination with the maximum first position. A4: Process the optical element to be processed in combination with the second variable range, the maximum first position, and the maximum ribbon thickness, and during the processing, the real-time regulation module adjusts the first position in real time.

9. The magnetorheological polishing method for adjusting the position of the supply system according to claim 8, characterized in that: Step A1 includes the following steps: A11: Control the processing of the test optical element by the polishing wheel with different polishing gaps, calculate the volume removal rate of the removal function corresponding to each processing point, and measure the ribbon thickness at each processing position in real time through the ribbon measurement component. Fit the fourth conversion relationship between the ribbon thickness and the volume removal rate of the removal function in the conversion relationship module; A12: Change the first position, control the processing of the test optical element by the polishing wheel with different polishing gaps, calculate the volume removal rate of the removal function corresponding to each processing point. During the processing, control the ribbon thickness to remain unchanged, and record the changes in the polishing gap and the first position at the same time. Fit the fifth conversion relationship between the volume removal rate of the removal function and the first position in the conversion relationship module; A13: Obtain the first conversion relationship according to the fourth conversion relationship and the fifth conversion relationship.

10. The magnetorheological polishing method for adjusting the position of the supply system according to claim 9, characterized in that: In step A4, when controlling the polishing wheel to move to the current processing position, compare the current ribbon thickness measured by the ribbon measurement component with the second variable range: If the current ribbon thickness is within the second variable range, there is no need to adjust the current first position; If the current ribbon thickness is not within the second variable range, the current first position needs to be adjusted: If the current ribbon thickness is greater than or equal to the maximum ribbon thickness, adjust the current first position to the maximum first position; If the current ribbon thickness is less than the maximum ribbon thickness, adjust the current first position according to the following formula: ； Among them, represents the first conversion relationship, represents the current ribbon thickness, represents the current first position.

11. A nozzle-adjusted magnetorheological polishing method, based on the magnetorheological polishing equipment for adjusting based on ribbon size described in any one of claims 1 to 6, characterized in that: It includes the following steps: B1: Control the magnetorheological processing module to process the test optical element, and obtain the second conversion relationship through the conversion relationship module during the processing; B2: Set the third variable range of the second position, and obtain the fourth variable range corresponding to the ribbon thickness according to the second conversion relationship; Set the maximum second position, and obtain the corresponding maximum ribbon thickness according to the second conversion relationship; B3: Control the time calculation module to adjust the ribbon measurement component and the magnetorheological processing module in combination with the maximum second position; B4: Combine the fourth variable range, the maximum second position and the maximum ribbon thickness to process the optical element to be processed. During the processing, the real-time regulation module adjusts the second position in real time.

12. The nozzle-adjusted magnetorheological polishing method according to claim 11, wherein: Step B1 includes the following steps: B11: Control the processing of the test optical element by the polishing wheel with different polishing gaps, calculate the volume removal rate of the removal function corresponding to each processing point, and measure the ribbon thickness at each processing position in real time through the ribbon measurement component. Fit the sixth conversion relationship between the ribbon thickness and the volume removal rate of the removal function in the conversion relationship module; B12: Keep the ribbon thickness unchanged. At different polishing clearances, separately change the second position, calculate the volume removal rate of the removal function corresponding to each machining point, machine at different positions of the test optical element, and record the changes in the polishing clearance and the second position simultaneously. Fit the seventh conversion relationship between the volume removal rate of the removal function and the second position in the conversion relationship module; B13: Obtain the second conversion relationship according to the sixth conversion relationship and the seventh conversion relationship.

13. The nozzle-adjusted magnetorheological polishing method according to claim 12, wherein: In step B4, when controlling the polishing wheel to move to the current machining position, compare the current ribbon thickness measured by the ribbon measuring component with the fourth variable range: If the current ribbon thickness is within the fourth variable range, there is no need to adjust the current second position; If the current ribbon thickness is not within the fourth variable range, the current second position needs to be adjusted: If the current ribbon thickness is greater than or equal to the maximum ribbon thickness, adjust the current second position to the maximum second position; If the current ribbon thickness is less than the maximum ribbon thickness, adjust the current second position according to the following formula: Among them, represents the second conversion relationship, represents the current ribbon thickness, represents the current second position.

14. A magnetorheological polishing method with a variable removal function, based on the magnetorheological polishing equipment for ribbon size adjustment according to any one of claims 1 to 6, characterized in that: It includes the following steps: C1: Control the polishing wheel to machine the test optical element at different polishing clearances to obtain the removal function; simultaneously record the changes in the ribbon thickness at each machining point during the machining process through the ribbon measuring component, and obtain the eighth conversion relationship between the volume removal rate of the removal function and the ribbon thickness at each machining point in the conversion relationship module; C2: Use the machining program module to obtain the machining program according to the removal function, and import the machining program into the magnetorheological machining module; C3: Set the fifth variable range of the volume removal rate of the removal function, and obtain the corresponding sixth variable range of the ribbon thickness according to the eighth conversion relationship; Set the maximum volume removal rate of the removal function, and obtain the corresponding maximum ribbon thickness according to the eighth conversion relationship; C4: Control the time calculation module to adjust the ribbon measuring component and the magnetorheological machining module in combination with the maximum volume removal rate of the removal function; C5: According to the sixth variable range, control the magnetorheological machining module to machine the optical element to be machined, and calculate the removal function of each machining point during the machining process to obtain a variable removal function set, and then generate a new machining program; C6: Import the new machining program into the magnetorheological machining module, and then machine the optical element to be machined for the second time.

15. The magnetorheological polishing method with a variable removal function according to claim 14, wherein: The steps for obtaining the eighth conversion relationship in step C1 include the following steps: C11: Control the polishing wheel to machine the test optical element at different polishing clearances, record the changes in the ribbon thickness at each machining point through the ribbon measuring component, and fit the ninth conversion relationship between the ribbon thickness and the polishing clearance in the conversion relationship module; C12: Control the polishing wheel to process at different polishing gaps at different positions of the test optical element, calculate the volume removal rate of the removal function at each processing point, and fit the tenth conversion relationship between the volume removal rate of the removal function and the polishing gap in the conversion relationship module; C13: In the conversion relationship module, calculate the eighth conversion relationship according to the ninth conversion relationship and the tenth conversion relationship.

16. The magnetorheological polishing method with a variable removal function according to claim 15, characterized in that: In step C5, when controlling the polishing wheel to move to the current processing position, compare the current ribbon thickness measured by the ribbon measuring assembly with the sixth variable range: If the current ribbon thickness is within the sixth variable range, there is no need to adjust the current removal function; If the current ribbon thickness is not within the sixth variable range, it is necessary to calculate the current removal function: If the current ribbon thickness is less than the maximum ribbon thickness, the removal function corresponding to the current processing point is calculated by the following formula : ； Among them, represents the volume removal rate of the removal function corresponding to the current machining point, represents the current ribbon thickness, represents the eighth conversion relationship, represents the removal function corresponding to the current machining point; thus obtaining the variable removal function set Remove the set of the variable removal functions Input the next processing parameters to generate a new processing control program; If the current ribbon thickness is greater than or equal to the maximum ribbon thickness, the removal function corresponding to the current processing point is calculated by the following formula, and then the variable removal function set is obtained : ； Among them, represents the maximum ribbon thickness corresponding maximum removal function volume removal rate; Remove the set of the said variable removal functions Input the next processing parameters to generate a new processing control program.

17. A magnetorheological polishing method for actuator adjustment, based on the magnetorheological polishing equipment for ribbon size adjustment according to any one of claims 1 to 6, characterized in that: It includes the following steps: D1: Control the polishing wheel to process the test optical element at different polishing gaps, and obtain the third conversion relationship in the conversion relationship module; D2: Set the seventh variable range of the output of the actuator group, and obtain the eighth variable range corresponding to the ribbon thickness according to the third conversion relationship; Set the maximum output of the actuator group, and obtain the corresponding maximum ribbon thickness according to the third conversion relationship; D3: Control the time calculation module to adjust the ribbon measuring assembly and the magnetorheological processing module in combination with the maximum output of the actuator group; D4: Process the optical element to be processed in combination with the eighth variable range, the maximum output of the actuator group, and the maximum ribbon thickness. During the processing, the real-time regulation module adjusts the output of the actuator group output in real time until the magnetorheological processing module traverses all the processing points on the optical element to be processed.

18. The magnetorheological polishing method for actuator adjustment according to claim 17, characterized in that: Step D1 includes the following steps: D11: Control the polishing wheel to process the test optical element at different polishing gaps, calculate the volume removal rate of the removal function corresponding to each processing point, and measure the ribbon thickness at each processing position in real time through the ribbon measuring assembly. Fit the eleventh conversion relationship between the ribbon thickness and the volume removal rate of the removal function in the conversion relationship module; D12: Control the output of the actuator group to process the test optical element at different polishing gaps, calculate the volume removal rate of the removal function corresponding to each processing point, control the ribbon thickness to remain unchanged during the processing, and record the changes in the polishing gap and the output of the actuator group at the same time. Fit the twelfth conversion relationship between the volume removal rate of the removal function and the output of the actuator group in the conversion relationship module; D13: Obtain the third conversion relationship according to the eleventh conversion relationship and the twelfth conversion relationship.

19. The magnetorheological polishing method with actuator adjustment according to claim 18, characterized in that: In step D4, when controlling the polishing wheel to move to the current processing position, compare the current ribbon thickness measured by the ribbon measuring assembly with the eighth variable range: If the current ribbon thickness is within the eighth variable range, there is no need to adjust the current output of the actuator group; If the current ribbon thickness is not within the eighth variable range, it is necessary to adjust the output of the current actuator group: If the current ribbon thickness is greater than or equal to the maximum ribbon thickness, adjust the output of the current actuator group to the maximum actuator group output; If the current ribbon thickness is less than the maximum ribbon thickness, adjust the output of the current actuator group according to the following formula: Among them, represents the third conversion relationship, represents the current ribbon thickness, represents the current output of the actuator group.

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