Magnetorheological polishing equipment and method based on sensor-controlled processing posture
Through the cooperation of the laser tracker and sensor module, the position of the robot and the polishing wheel are adjusted in real time, which solves the problems of low processing accuracy and high cost in magnetorheological polishing technology, and achieves stable processing of high-precision optical components.
Patent Information
- Application Number
- CN202510900300.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2025-07-01
- Publication Date
- 2025-09-02
- Estimated Expiration
- 2045-07-01
AI Technical Summary
When using six-degree-of-freedom industrial robots, the existing magnetorheological polishing technology has the problem of low machining accuracy, especially the polishing gap changes greatly, which is difficult to meet the requirements of high-precision optical processing, and the existing force sensors are expensive.
The laser tracker and sensor module are used to measure the position of the robot and the position of the magnetorheological processing module. The control unit regulates the position of the robot and the position of the polishing wheel in real time to achieve stable control of the removal function.
Real-time constant control of multi-factor coupling removal function changes in optical component processing is realized, which improves machining accuracy and reduces dependence on high-precision force sensors and equipment costs.
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Figure CN120395562B_ABST
Abstract
Description
Technical Field
[0001] The present invention belongs to the field of optical processing technology, and in particular relates to a magnetorheological polishing device and method for regulating processing posture based on a sensor. Background Art
[0002] Magnetorheological finishing (MRF), an advanced optical manufacturing technology developed in recent years, has attracted widespread attention in high-precision optical processing due to its numerous advantages, including stable removal function, controllable edge effects, minimal subsurface damage, no photocopying, strong reshaping capabilities, and high machining accuracy. Existing MRF machining centers primarily integrate MRF modules onto CNC machine tools. However, CNC machine tools have limitations (such as low degrees of freedom, large footprint, and high cost), which limit the deviation of aspheric surfaces and make precise position control along the surface normal difficult.
[0003] In response to these shortcomings of CNC machine tools, researchers have introduced six-degree-of-freedom industrial robots into the field of optical processing in recent years. Six-degree-of-freedom industrial robots have the advantages of high degrees of freedom, small footprint, large processing range, and low cost, which make up for the shortcomings of CNC machine tools. Therefore, when the magnetorheological polishing module is integrated into the industrial robot, high-precision processing of large-aperture complex curved optical components can be achieved in theory. However, due to the influence of factors such as processing, assembly, load, trajectory planning, and reduction ratio, the robot end execution accuracy is low, and the polishing gap varies greatly during the processing. At the same time, magnetorheological polishing technology is an optical processing technology with high removal function determinism. The requirements for polishing gap changes during the polishing process are high. Generally, the polishing gap of magnetorheological CNC machining centers varies in tens of microns (PV<0.1mm), while the trajectory accuracy of common commercial robots is generally in the sub-millimeter to millimeter range. This leads to large changes in the polishing gap during the processing, reduces the determinism of the removal function, and affects the final processing accuracy. Therefore, the motion accuracy of currently commercial large-scale six-degree-of-freedom industrial robots often cannot meet the requirements of magnetorheological polishing technology for removal function changes during high-precision polishing.
[0004] To address the issue of low robot motion precision, real-time control solutions for constant-force grinding and polishing have become a research hotspot. Force-position control has become a common method for controlling constant-force grinding and polishing in robots. A common application involves placing a force sensor between the machining tool and the robot. The force sensor is first calibrated with gravity to ensure accurate measurement. The position error is calculated by measuring force changes. This position error is then compensated for using the robot itself or other motion compensation mechanisms to achieve constant-force control. High-efficiency machining of large-aperture optical components requires a magnetorheological machining module with large polishing wheels, which typically weigh hundreds of kilograms. However, for a magnetorheological machining module weighing hundreds of kilograms, the force variation caused by the robot's position error is only tens of Newtons. High-precision machining requires maintaining a constant force of a few Newtons or even a fraction of a Newton. This requires measurement equipment such as force sensors to achieve an absolute accuracy of one part per ten thousand. Furthermore, the force sensor must be able to operate at varying speeds and positions. Force sensors that meet these requirements are often extremely expensive, significantly increasing the cost of the equipment. Summary of the Invention
[0005] In view of this, the present invention aims to provide a magnetorheological polishing device and method based on sensor-controlled processing posture, using a laser tracker and a sensor module to measure the real-time changes in the robot's posture and the position of the magnetorheological processing module during the processing, and to control the robot's posture and the position of the magnetorheological processing module in real time, thereby realizing real-time constant control of the removal function of the optical element.
[0006] To achieve the above object, the technical solution created by the present invention is implemented as follows:
[0007] A magnetorheological polishing device that uses sensors to control processing posture includes a laser tracker, a control unit, a robot, a magnetorheological processing module, and a sensor module. The magnetorheological processing module is located at the end of the robot, and the robot drives the magnetorheological processing module to process optical components. The sensor module is located on the magnetorheological processing module. The laser tracker cooperates with a target ball located on the magnetorheological processing module to measure the spatial coordinates of the sensor module and the working point of the polishing wheel in the magnetorheological processing module.
[0008] The interior of the control unit includes:
[0009] The coordinate relationship module is used to integrate and calculate the spatial coordinates collected by the laser tracker and the position information collected by the sensor module, and output the integrated position information;
[0010] A conversion relationship module, configured to obtain a first conversion relationship by fitting the working point position of the polishing wheel with the polishing gap of the polishing wheel in the magnetorheological processing module;
[0011] A processing program module is used to obtain a processing program according to a removal function generated when processing the optical element, and import the processing program into the magnetorheological processing module;
[0012] The real-time control module is used to control the robot to complete the corresponding posture adjustment according to the processing program and the integrated position information; or to adjust the position of the polishing wheel according to the integrated position information and the first conversion relationship to maintain the stability of the removal function when processing the optical element.
[0013] Furthermore, the magnetorheological processing module also includes a transmission belt, a polishing motor, a nozzle, a supply system, a real-time adjustment device, a magnet and a magnetorheological mounting frame; wherein, the magnetorheological mounting frame is arranged on the end of the robot; the polishing wheel and the real-time adjustment device are arranged on the magnetorheological mounting frame, and the real-time adjustment device adjusts the position of the polishing wheel; the polishing motor is arranged on the magnetorheological mounting frame and is connected to the bearing of the polishing wheel through the transmission belt, so that the polishing motor controls the rotation of the polishing wheel, and then the polishing wheel processes the optical element; the nozzle is arranged on the magnetorheological mounting frame along the rotation direction of the polishing wheel, and the supply system transports magnetorheological fluid to the nozzle; the magnet is arranged on the magnetorheological mounting frame, and the magnet is close to the working point of the polishing wheel, so that the magnetorheological fluid is affected by the magnetic field strength of the magnet and changes the stiffness of the magnetorheological fluid; the sensor module is arranged on the magnetorheological mounting frame, and the laser tracker measures the spatial coordinates of the sensor module through the target ball.
[0014] Furthermore, the sensor module includes an acceleration sensor; the laser tracker, the sensor module, the robot and the real-time adjustment device are respectively connected to the control unit to form respective communication lines, so that the control unit receives and sends signals through the corresponding communication lines.
[0015] Furthermore, the real-time adjustment device includes a displacement output motor, a screw and a support and fixing frame; wherein, the support and fixing frame is arranged on the magnetorheological mounting frame, the displacement output motor is arranged on the support and fixing frame, and the displacement output motor is connected to the screw arranged on the support and fixing frame; the polishing wheel is connected to the nut on the screw, so that the screw drives the polishing wheel to move.
[0016] A magnetorheological polishing method based on robot posture control, based on the magnetorheological polishing equipment provided by the present invention that uses sensors to control processing posture, includes the following steps:
[0017] A1: Use a laser tracker to obtain the first coordinate of the sensor module and the second coordinate of the polishing wheel working point; use the coordinate relationship module to calculate the coordinate transformation relationship based on the two coordinates;
[0018] A2: Using the coordinate relationship module, the first theoretical coordinates of the working point of the polishing wheel at different polishing trajectory points are converted into the second theoretical coordinates of the sensor module through the coordinate transformation relationship, and the theoretical straight-line distance is obtained based on the current second theoretical coordinate and the previous second theoretical coordinate;
[0019] A3: Use the coordinate relationship module to record the measurement results of the sensor module to obtain the actual straight-line distance. The coordinate relationship module is used to calculate the distance error between the actual straight-line distance and the theoretical straight-line distance.
[0020] A4: Control the magnetorheological processing module to process the test optical element to obtain a removal function, use the processing program module to obtain a processing program based on the removal function, and import the processing program into the magnetorheological processing module;
[0021] A5: Set the distance difference threshold and the maximum control value; determine the control direction of the polishing wheel during the processing based on the distance error, the distance difference threshold and the maximum control value, and process the optical component to be processed; during the processing, the robot's position and posture are controlled in real time through the real-time control module.
[0022] Furthermore, in step A1, the laser tracker obtains the coordinates of no less than 4 positions on the sensor module through the target ball, and obtains the first coordinate by calculation. ;
[0023] The laser tracker obtains the coordinates of no less than 10 different positions on the outer surface of the polishing wheel through the target ball, and then calculates the coordinates of the center point of the polishing wheel. , the straight line passing through the center point coordinates is:
[0024] ;
[0025] in, The normal vector of the line representing the coordinates of the center point;
[0026] By solving the following equations, the spatial coordinate corresponding to the minimum value of the Z-axis coordinate is used as the second coordinate :
[0027] ;
[0028] in, Indicates the radius of the polishing wheel;
[0029] The coordinate transformation relationship is obtained by combining the second coordinate with the first coordinate:
[0030] ;
[0031] in, Represents the coordinate transformation relationship.
[0032] Furthermore, in step A2, the theoretical straight-line distance is obtained by the following formula:
[0033] ;
[0034] in, Indicates the theoretical straight-line distance between the current polishing track point and the previous polishing track point, Indicates the Z coordinate in the current second theoretical coordinate, Indicates the Z coordinate in the previous second theoretical coordinate.
[0035] Furthermore, in step A3, the actual straight-line distance is obtained by the following formula:
[0036] ;
[0037] in, Indicates the actual straight-line distance between the current polishing track point and the previous polishing track point; Represents the acceleration measured by the sensor module at the previous polishing track point, Represents the speed measured by the sensor module at the previous polishing track point, Represents the measurement time of the sensor module; the distance error is obtained by the following formula :
[0038] .
[0039] Further, in step A5, when the polishing wheel is at the When polishing trajectory points, the current distance error , distance gap threshold and control the maximum value Compare:
[0040] when , the robot is not controlled to perform posture control;
[0041] when , then the robot's posture is controlled:
[0042] The control direction is determined by the sensor module: when the slope of the actual running track is greater than or equal to the set theoretical slope, the control direction is down and the control amount is , otherwise the control direction is upward and the control amount is ;
[0043] If the current distance error Greater than the distance difference threshold , less than the maximum value of the control When the robot adjusts the Z-axis coordinate of the polishing wheel to ;
[0044] If the current distance error Greater than the distance difference threshold , greater than or equal to the maximum value of the control When the robot adjusts the Z-axis coordinate of the polishing wheel to .
[0045] A magnetorheological polishing method based on polishing wheel position control, based on the magnetorheological polishing device for regulating processing posture based on sensors provided by the present invention, comprises the following steps:
[0046] B1: Use a laser tracker to obtain the first coordinate of the sensor module and the second coordinate of the polishing wheel working point; use the coordinate relationship module to calculate the coordinate transformation relationship based on the two coordinates;
[0047] B2: Using the coordinate relationship module, the first theoretical coordinates of the working point of the polishing wheel at different polishing trajectory points are converted into the second theoretical coordinates of the sensor module through the coordinate conversion relationship, and the theoretical straight-line distance is obtained based on the current second theoretical coordinate and the previous second theoretical coordinate;
[0048] B3: Use the coordinate relationship module to record the measurement results of the sensor module to obtain the actual straight-line distance; the actual straight-line distance and the theoretical straight-line distance are calculated using the coordinate relationship module to obtain the distance error;
[0049] B4: Controlling the magnetorheological processing module to perform fixed-point processing on the test optical element, and obtaining a first conversion relationship through the conversion relationship module;
[0050] B5: Set the distance difference threshold, the maximum control value, and the maximum working point position; based on the distance error, the distance difference threshold, and the maximum control value, combined with the first conversion relationship and the maximum working point position, process the optical element to be processed, and during the processing, perform real-time control of the magnetorheological processing module through the real-time control module.
[0051] Furthermore, in step B1, the laser tracker obtains the coordinates of no less than four positions on the sensor module through the target ball, and obtains the first coordinate by calculation. ;
[0052] The laser tracker obtains the coordinates of no less than 10 different positions on the outer surface of the polishing wheel through the target ball, and then calculates the coordinates of the center point of the polishing wheel. , the straight line passing through the center point coordinates is:
[0053] ;
[0054] in, The normal vector of the line representing the coordinates of the center point;
[0055] By solving the following equations, the spatial coordinate corresponding to the minimum value of the Z-axis coordinate is used as the second coordinate :
[0056] ;
[0057] in, Indicates the radius of the polishing wheel;
[0058] The coordinate transformation relationship is obtained by combining the second coordinate with the first coordinate:
[0059] ;
[0060] in, Represents the coordinate transformation relationship.
[0061] Furthermore, in step B2, the theoretical straight-line distance is obtained by the following formula:
[0062] ;
[0063] in, Indicates the theoretical straight-line distance between the current polishing track point and the previous polishing track point, Indicates the Z coordinate in the current second theoretical coordinate, Indicates the Z coordinate in the previous second theoretical coordinate.
[0064] Furthermore, in step B3, the actual straight-line distance is obtained by the following formula:
[0065] ;
[0066] in, Indicates the actual straight-line distance between the current polishing track point and the previous polishing track point; Represents the acceleration measured by the sensor module at the previous polishing track point, Represents the speed measured by the sensor module at the previous polishing track point, Represents the measurement time of the sensor module; the distance error is obtained by the following formula :
[0067] .
[0068] Furthermore, step B4 includes the following steps:
[0069] B41: The position of the polishing wheel relative to the test optical element is changed individually, and processing is performed on the test optical element at different working point positions. The removal function volume removal rate of each processing point is calculated, and the second conversion relationship between the removal function volume removal rate and the working point position is obtained:
[0070] ;
[0071] in, Indicates the working point position, Represents the second conversion relationship;
[0072] B42: Keep the distance between the polishing wheel and the magnet unchanged, and control the robot to drive the polishing wheel with different polishing gaps Processing is performed at different positions of the test optical element, and the removal function volume removal rate of each processing point is calculated to obtain the third conversion relationship between the removal function volume removal rate and the polishing gap:
[0073] ;
[0074] in, Indicates the polishing gap, Indicates the third conversion relationship;
[0075] B43: Obtain the first conversion relationship based on the second conversion relationship and the third conversion relationship, namely:
[0076]
[0077] in, Indicates the first conversion relationship.
[0078] Furthermore, in step B5,
[0079] When the polishing wheel is in the When polishing trajectory points, the current distance error Distance difference threshold Compare:
[0080] like , then the current working point position is not Make adjustments;
[0081] like , then the current working point position Make adjustments:
[0082] If the current working point position Less than the maximum operating point When the current working point position Control is performed according to the following formula:
[0083] ;
[0084] If the current working point position Greater than or equal to the maximum operating point position When the current working point position Adjust to .
[0085] Compared with the prior art, the present invention can achieve the following beneficial effects:
[0086] In the magnetorheological polishing equipment and method based on sensor-controlled processing posture created by the present invention, the six-dimensional posture information of the robot during the processing is measured in real time by cooperating with a laser tracker and a sensor module to measure the robot's posture and the position of the magnetorheological processing module in real time, thereby realizing real-time constant control of the removal function change under multi-factor coupling during the processing of optical elements; at the same time, the acquisition of posture information does not need to rely on the actual processing process, and the posture error information of the processing equipment can be obtained during the processing trial run (in which magnetorheological fluid is not introduced and no processing effect is produced), and there is no need to place the measuring equipment at the lowest point of the polishing wheel, which will not affect the actual processing. BRIEF DESCRIPTION OF THE DRAWINGS
[0087] The accompanying drawings, which constitute part of the present invention, are intended to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are intended to explain the present invention and do not constitute an undue limitation of the present invention. In the accompanying drawings:
[0088] Figure 1 A schematic structural diagram of a magnetorheological polishing device for controlling machining posture based on sensors according to an embodiment of the present invention from one perspective;
[0089] Figure 2 A schematic structural diagram of the magnetorheological polishing device for controlling the machining posture based on sensors according to an embodiment of the present invention from another perspective;
[0090] Figure 3 A schematic structural diagram of a magnetorheological processing module according to an embodiment of the present invention;
[0091] Figure 4 This is a structural diagram of the real-time adjustment device described in an embodiment of the present invention.
[0092] Description of reference numerals:
[0093] 1. Robot; 2. Sensor module; 3. Laser tracker; 4. Control unit; 5. Laboratory bench; 6. Optical element to be processed; 7. Test optical element; 8. Target ball; 9. Polishing wheel; 10. Magnet; 11. Transmission belt; 12. Polishing motor; 13. Nozzle; 14. Real-time adjustment device; 15. Magnetorheological mounting bracket; 16. Displacement output motor; 17. Guide rail; 18. Slider; 19. Lead screw; 20. Nut; 21. Support bracket; 22. Connecting plate. DETAILED DESCRIPTION
[0094] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and do not constitute a limitation of the present invention.
[0095] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.
[0096] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second" and the like are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, features defined as "first", "second" and the like may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.
[0097] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to internal connections between two components. Those skilled in the art can understand the specific meanings of the above terms in the present invention based on specific circumstances.
[0098] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.
[0099] like Figures 1 to 4 As shown, the magnetorheological polishing equipment based on sensor-controlled processing posture described in the embodiment of the present invention includes a robot 1, a magnetorheological processing module, a sensor module 2, a laser tracker 3 and a control unit 4. The magnetorheological processing module is set at the end of the robot 1, and the robot 1 drives the magnetorheological processing module to process the optical element 6 to be processed and the test optical element 7 placed on the experimental table 5. The sensor module 2 is set on the magnetorheological processing module, and the laser tracker 3 cooperates with the target ball 8 set on the magnetorheological processing module to measure the spatial coordinates of the working points of the sensor module 2 and the polishing wheel 9 in the magnetorheological processing module. In this embodiment of the present invention, the laser tracker 3 is set on one side of the experimental table 5, and the target ball 8 is adjusted in position according to the needs of the measurement object. For example, when the spatial coordinates of the sensor module 2 need to be measured, the target ball 8 is installed at the corresponding position of the sensor module 2, and when the polishing wheel 9 needs to be measured, the target ball 8 is installed at the corresponding position of the polishing wheel 9.
[0100] The control unit 4 includes a coordinate relationship module, a conversion relationship module, a processing program module and a real-time control module. Among them, the coordinate relationship module is used to integrate and calculate the spatial coordinates collected by the laser tracker 3 and the position information collected by the sensor module 2, and output the integrated position information. The conversion relationship module is used to fit the working point position of the polishing wheel 9 with the polishing gap of the polishing wheel 9 in the magnetorheological processing module to obtain a first conversion relationship. In the embodiment of the present invention, the working point position of the polishing wheel 9 is specified as the distance between the lowest point of the polishing wheel 9 and the optical element 6 to be processed or the test optical element 7. The processing program module is used to obtain a processing program based on the removal function generated when processing the optical element, and import the processing program into the magnetorheological processing module. The real-time control module is used to control the robot 1 to complete the corresponding posture adjustment according to the processing program and the integrated position information; or adjust the position of the polishing wheel 9 according to the integrated position information and the first conversion relationship, so as to maintain the stability of the removal function when processing the optical element 6 to be processed.
[0101] Figure 3 (a) and (b) in the figure show the structure of the magnetorheological processing module from different perspectives. Figure 3As shown, the magnetorheological processing module also includes a transmission belt 11, a polishing motor 12, a nozzle 13, a supply system, a real-time adjustment device 14, and a magnetorheological mounting frame 15. The magnetorheological mounting frame 15 is mounted on the end of the robot 1, and the polishing wheel 9 and the real-time adjustment device 14 are mounted on the magnetorheological mounting frame 15. The real-time adjustment device 14 is connected to the polishing wheel 9 via a connecting plate 22. Specifically, the head end of the connecting plate 22 is mounted on the real-time adjustment device 14, and the polishing wheel 9 is mounted on the end of the connecting plate 22. The real-time adjustment device 14 adjusts the position of the polishing wheel 9, thereby changing the polishing gap of the polishing wheel 9. The polishing motor 12 is mounted on the magnetorheological mounting frame 15. The output end of the polishing motor 12 passes through the end of the connecting plate 22, so that the output end of the polishing motor 12 is connected to the bearing of the polishing wheel 9 through the transmission belt 11, so that the polishing motor 12 controls the rotation of the polishing wheel 9, thereby causing the polishing wheel 9 to process the optical element 6 to be processed or the test optical element 7. The method by which the polishing motor 12 drives the polishing wheel 9 to rotate in this embodiment of the present invention can be found in the Chinese patent application entitled "Self-Rotating Polishing Module Processing System," published on July 12, 2024, and with the publication number CN118322074A. A nozzle 13 is mounted on a magnetorheological mounting frame 15 along the direction of rotation of the polishing wheel 9. A supply system delivers magnetorheological fluid to the nozzle 13, which then sprays the magnetorheological fluid toward the working point of the polishing wheel 9, thereby allowing the polishing wheel 9 to process the optical element 6 or test optical element 7 using the magnetorheological fluid as a medium. In this embodiment of the present invention, the working point of the polishing wheel 9 is defined as the lowest point at which the polishing wheel 9 contacts the optical element 6 or test optical element 7. A magnet 10 is mounted on the magnetorheological mounting frame 15, positioned near the working point of the polishing wheel 9. The magnetic field strength of the magnetorheological fluid changes the rigidity of the magnetorheological fluid, allowing the polishing wheel 9 to process the optical element 6 or test optical element 7 using the magnetorheological fluid with a certain rigidity. The sensor module 2 is placed on the magnetorheological mounting frame 15 , and the laser tracker 3 measures the spatial coordinates of the sensor module 2 through the target sphere 8 .
[0102] In the embodiment of the present invention, the structure of the real-time adjustment device 14 for controlling the polishing wheel 9 is consistent, such as Figure 4As shown, it includes a displacement output motor 16, a guide rail 17, a slider 18, a lead screw 19 and a support and fixing frame 21. The lead screw 19 and the nut 20 with a ball thereon together form a ball screw. The support and fixing frame 21 is mounted on the magnetorheological mounting frame 15, and the displacement output motor 16 is mounted on the top of the support and fixing frame 21. The displacement output motor 16 is connected to the lead screw 19 mounted on the support and fixing frame 21. The polishing wheel 9 is connected to the nut 20 on the lead screw 19. In the embodiment of the present invention, the polishing wheel 9 is connected to the nut 20 via a connecting plate 22, so that the lead screw 19 drives the polishing wheel 9 to move. In the embodiment of the present invention, in order to ensure the stable movement of the magnet 10 and the polishing wheel 9, two guide rails 17 parallel to the lead screw 19 are also provided on the support and fixing frame 21, and the two guide rails 17 are respectively located on both sides of the lead screw 19. At this time, the connecting plate 22 is fixedly connected to the sliders 18 and the nut 20 on the two guide rails 17. During the processing, the control unit 4 sends a control signal to the displacement output motor 16. When the displacement output motor 16 drives the screw 19 to rotate, the screw 19 cooperates with the two guide rails 17 to pull the connecting plate 22, thereby driving the polishing wheel 9 to move along the screw 19.
[0103] In this embodiment of the present invention, the sensor module 2 includes an acceleration sensor. The robot 1, sensor module 2, laser tracker 3, and real-time adjustment device 14 are each connected to a control unit 4 to form respective communication lines, enabling the control unit 4 to receive and transmit signals via the corresponding communication lines. Specifically, the control unit 4 receives signals from the sensor module 2 and laser tracker 3 via the communication lines. The control unit 4 then transmits control signals to the displacement output motor 16 in the real-time adjustment device 14 to change the position of the polishing wheel 9 via the communication lines. The control unit 4 also transmits position control signals to the robot 1 via the communication lines. Because a strong magnetic field is generated around the polishing wheel 9 during polishing, the communication lines avoid such strong magnetic fields.
[0104] Based on the magnetorheological polishing equipment based on sensor-controlled processing posture described in the embodiment of the present invention, the embodiment of the present invention also provides a magnetorheological polishing method based on sensor-controlled processing posture, including a magnetorheological polishing method based on robot posture control and a magnetorheological polishing method based on polishing wheel position control.
[0105] Specific embodiment 1: The magnetorheological polishing method based on robot posture control provided in this specific embodiment is based on the magnetorheological polishing device based on sensor-controlled processing posture described in the embodiment of the invention, combined with Figures 1 to 4 , including the following steps:
[0106] A1: Use the laser tracker 3 to obtain the first coordinate of the sensor module 2 and the second coordinate of the working point of the polishing wheel 9. Use the coordinate relationship module to calculate the coordinate transformation relationship based on the two coordinates.
[0107] In step A1, this specific embodiment uses a cylindrical or rectangular acceleration sensor as the sensor module 2, and obtains the coordinates of no less than four positions on the sensor module 2 through the laser tracker 3 and the target ball 8, and obtains the first coordinate .
[0108] For the cylindrical acceleration sensor, the target ball 8 is placed at least three different positions on the cylindrical bottom of the cylindrical acceleration sensor and its spatial coordinates are measured using the laser tracker 3. The circle fitting function of the laser tracker 3 (this function is the basic function of the laser tracker) is used to obtain the XY coordinates of the cylindrical acceleration sensor. , based on the Z-axis coordinates of the target ball 8 at different positions Calculate the Z-axis coordinate of the bottom surface of the cylindrical accelerometer. , k represents the number of measurement points. The target ball 8 is placed at least three different positions on the top of the cylindrical acceleration sensor and its spatial coordinates are measured using the laser tracker 3. The Z-axis coordinates of the target ball 8 at different positions are Calculate the Z-axis coordinate of the top surface of the cylindrical accelerometer. , where j represents the number of measurement points, and the first coordinate of the cylindrical accelerometer is , r is the radius of the target sphere 8. In this specific embodiment, for the cylindrical acceleration sensor, 10 different positions are selected at the bottom and top thereof.
[0109] For the rectangular acceleration sensor, the target balls 8 are placed at the bottom of the four sides of the rectangular acceleration sensor and the spatial coordinates are measured using the laser tracker 3. The coordinates of the eight points of the target ball are measured at the bottom of each side. The coordinates of the bottom of the four sides of the rectangular acceleration sensor are obtained as follows: 、 、 、 , solve the XY axis coordinates of the rectangular acceleration sensor as , based on the Z-axis coordinates of the target ball 8 at different positions Calculate the Z-axis coordinate of the bottom surface of the rectangular accelerometer and get The target ball 8 is placed at least three different positions on the top of the rectangular acceleration sensor and its spatial coordinates are measured using a laser tracker 3, based on the Z-axis coordinates of the target ball 8 at different positions Calculate the Z-axis coordinate of the top surface of the rectangular accelerometer. , the first coordinate of the rectangular acceleration sensor is In this specific embodiment, for the rectangular parallelepiped acceleration sensor, 10 different positions are selected on the top thereof.
[0110] The laser tracker 3 obtains the coordinates of no less than 10 different positions on the outer surface of the polishing wheel 9 through the target ball 8 (in this specific embodiment, the coordinates of 10 different positions are obtained), and the coordinates of the center point of the polishing wheel are calculated by the coordinate calculation function of the laser tracker 3 itself. , the straight line passing through the center point coordinates obtained by the teaching pendant of robot 1 is:
[0111] ;
[0112] in, The normal vector of the line representing the coordinates of the center point;
[0113] By solving the following equations, the spatial coordinate corresponding to the minimum value of the Z-axis coordinate is used as the second coordinate :
[0114] ;
[0115] in, Indicates the radius of the polishing wheel;
[0116] The coordinate transformation relationship is obtained by combining the second coordinate with the first coordinate:
[0117] ;
[0118] in, Represents the coordinate transformation relationship.
[0119] A2: Using the coordinate relationship module, the first theoretical coordinates of the working point of the polishing wheel 9 at different polishing trajectory points are converted into the second theoretical coordinates of the sensor module 2 through the coordinate transformation relationship. The theoretical straight-line distance is calculated based on the current second theoretical coordinate and the previous second theoretical coordinate. In this specific embodiment, the theoretical straight-line distance is the distance in the Z-axis direction.
[0120] In step A2, the theoretical straight-line distance is obtained by the following formula:
[0121] ;
[0122] in, Indicates the theoretical straight-line distance between the current polishing track point and the previous polishing track point, Indicates the Z coordinate in the current second theoretical coordinate, Indicates the Z coordinate in the previous second theoretical coordinate.
[0123] A3: Use the coordinate relationship module to record the measurement results of sensor module 2 to obtain the actual straight-line distance. The coordinate relationship module calculates the distance error between the actual straight-line distance and the theoretical straight-line distance. In this specific embodiment, the actual straight-line distance is the distance in the Z-axis direction.
[0124] In step A3, the actual straight-line distance is obtained by the following formula:
[0125] ;
[0126] in, Indicates the actual straight-line distance between the current polishing track point and the previous polishing track point; represents the acceleration measured by sensor module 2 at the previous polishing track point, represents the speed measured by sensor module 2 at the previous polishing track point, represents the measurement time of sensor module 2. The distance error is obtained by the following formula: :
[0127] .
[0128] A4: Control the magnetorheological processing module to process the test optical element 7 to obtain a removal function. The processing program module generates a processing program based on the removal function, and the processing program is imported into the magnetorheological processing module. In this specific embodiment, the magnetorheological processing module is controlled to perform fixed-point processing on the test optical element 7.
[0129] A5: Set a distance difference threshold, a maximum control value, and a maximum electromagnet position. Based on the distance difference, the distance difference threshold, and the maximum control value, determine the control direction of the polishing wheel 9 during processing, and process the optical element 6 to be processed. During processing, the real-time control module controls the position of the robot 1 in real time. The distance difference threshold, the maximum control value, and the maximum electromagnet position can be adaptively set based on actual conditions and are not limited in this embodiment.
[0130] In step A5, when the polishing wheel 9 is at the When polishing trajectory points, the current distance error , distance gap threshold and control the maximum value Compare:
[0131] when , the robot 1 is not controlled to perform posture control;
[0132] when , then the posture of robot 1 is controlled:
[0133] The control direction is determined by the sensor module 2: when the slope of the actual running track is greater than or equal to the set theoretical slope, the control direction is down and the control amount is , otherwise the control direction is upward and the control amount is ;
[0134] Current distance error Greater than the distance difference threshold , less than the maximum value of the control When and :Robot 1 adjusts the Z-axis coordinate of polishing wheel 9 to ;
[0135] Current distance error Greater than the distance difference threshold , greater than or equal to the maximum value of the control When and :Robot 1 adjusts the Z-axis coordinate of the polishing wheel to .
[0136] Specific embodiment 2: The magnetorheological polishing method based on polishing wheel position control provided in this specific embodiment is based on the magnetorheological polishing device based on sensor-controlled processing posture described in the embodiment of the invention, combined with Figures 1 to 4 , including the following steps:
[0137] B1: Use the laser tracker 3 to obtain the first coordinate of the sensor module 2 and the second coordinate of the working point of the polishing wheel 9; and use the coordinate relationship module to calculate the coordinate conversion relationship through the two coordinates.
[0138] In step B1, in this specific embodiment, a cylindrical or rectangular acceleration sensor is used as the sensor module 2, and the coordinates of no less than four positions on the sensor module 2 are obtained by using the laser tracker 3 in conjunction with the target ball 8. The first coordinate is obtained by calculation. .
[0139] For the cylindrical acceleration sensor, the target ball 8 is placed at least three different positions on the cylindrical bottom of the cylindrical acceleration sensor and its spatial coordinates are measured using the laser tracker 3. The circle fitting function of the laser tracker 3 (this function is the basic function of the laser tracker) is used to obtain the XY coordinates of the cylindrical acceleration sensor. , based on the Z-axis coordinates of the target ball 8 at different positions Calculate the Z-axis coordinate of the bottom surface of the cylindrical accelerometer. , k represents the number of measurement points. The target ball 8 is placed at least three different positions on the top of the cylindrical acceleration sensor and its spatial coordinates are measured using the laser tracker 3. The Z-axis coordinates of the target ball 8 at different positions are Calculate the Z-axis coordinate of the top surface of the cylindrical accelerometer. , where j represents the number of measurement points, and the first coordinate of the cylindrical accelerometer is , r is the radius of the target sphere 8. In this specific embodiment, for the cylindrical acceleration sensor, 10 different positions are selected at the bottom and top thereof.
[0140] For the rectangular acceleration sensor, the target balls 8 are placed at the bottom of the four sides of the rectangular acceleration sensor and the spatial coordinates are measured using the laser tracker 3. The coordinates of the eight points of the target ball are measured at the bottom of each side. The coordinates of the bottom of the four sides of the rectangular acceleration sensor are obtained as follows: 、 、 、 , solve the XY axis coordinates of the rectangular acceleration sensor as , based on the Z-axis coordinates of the target ball 8 at different positions Calculate the Z-axis coordinate of the bottom surface of the rectangular accelerometer and get The target ball 8 is placed at least three different positions on the top of the rectangular acceleration sensor and its spatial coordinates are measured using a laser tracker 3, based on the Z-axis coordinates of the target ball 8 at different positions Calculate the Z-axis coordinate of the top surface of the rectangular accelerometer. , the first coordinate of the rectangular acceleration sensor is In this specific embodiment, for the rectangular parallelepiped acceleration sensor, 10 different positions are selected on the top thereof.
[0141] The laser tracker 3 obtains the coordinates of no less than 10 different positions on the outer surface of the polishing wheel 9 through the target ball 8 (in this specific embodiment, the coordinates of 10 different positions are obtained). The coordinate calculation function of the laser tracker 3 itself can obtain the coordinates of the center point of the polishing wheel 9. , and the straight line passing through the center point coordinates is obtained through the teaching pendant of robot 1:
[0142] ;
[0143] in, The normal vector of the line representing the coordinates of the center point;
[0144] By solving the following equations, the spatial coordinate corresponding to the minimum value of the Z-axis coordinate is used as the second coordinate :
[0145] ;
[0146] in, Indicates the radius of the polishing wheel 9
[0147] The coordinate transformation relationship is obtained by combining the second coordinate with the first coordinate:
[0148] ;
[0149] in, Represents the coordinate transformation relationship.
[0150] B2: Using the coordinate relationship module, the first theoretical coordinates of the working point of the polishing wheel 9 at different polishing trajectory points are converted into the second theoretical coordinates of the sensor module 2 through the coordinate conversion relationship, and the theoretical straight-line distance is obtained based on the current second theoretical coordinate and the previous second theoretical coordinate. In this specific embodiment, the theoretical straight-line distance is the distance in the Z-axis direction. Specifically, the theoretical straight-line distance is obtained by the following formula:
[0151] ;
[0152] in, Indicates the theoretical straight-line distance between the current polishing track point and the previous polishing track point, Indicates the Z coordinate in the current second theoretical coordinate, Indicates the Z coordinate in the previous second theoretical coordinate.
[0153] B3: Use the coordinate relationship module to record the measurement results of sensor module 2 to obtain the actual straight-line distance; the coordinate relationship module calculates the distance error between the actual straight-line distance and the theoretical straight-line distance. In this specific embodiment, the actual straight-line distance is the distance in the Z-axis direction. Specifically, the actual straight-line distance is obtained by the following formula:
[0154] ;
[0155] in, Indicates the actual straight-line distance between the current polishing track point and the previous polishing track point; represents the acceleration measured by sensor module 2 at the previous polishing track point, represents the speed measured by sensor module 2 at the previous polishing track point, represents the measurement time of sensor module 2. The distance error is obtained by the following formula: :
[0156] .
[0157] B4: Control the magnetorheological processing module to process the test optical element 7, and obtain the first conversion relationship and the second conversion relationship through the conversion relationship module. The following steps are included:
[0158] B41: The position of the polishing wheel 9 relative to the test optical element 7 is individually changed, and processing is performed on the test optical element 7 at different working point positions. The removal function volume removal rate of each processing point is calculated to obtain a fourth conversion relationship between the removal function volume removal rate and the working point position:
[0159] ;
[0160] in, Indicates the working point position, Indicates the second conversion relationship; in this specific embodiment, specifically, fixed-point processing is performed on the test optical element 7 for a period of time at different working point positions;
[0161] B42: Keep the distance between the polishing wheel 9 and the magnet 10 unchanged, and control the robot 1 to drive the polishing wheel 9 to polish at different intervals Processing is performed at different positions of the test optical element 7, and the removal function volume removal rate of each processing point is calculated to obtain a third conversion relationship between the removal function volume removal rate and the polishing gap:
[0162] ;
[0163] in, Indicates the polishing gap, Indicates the third conversion relationship; in this specific embodiment, specifically with different polishing gaps Performing fixed-point processing for a period of time at different positions of the test optical element 7;
[0164] B43: Obtain the first conversion relationship based on the second conversion relationship and the third conversion relationship, namely:
[0165] ;
[0166] in, Indicates the first conversion relationship.
[0167] B5: Setting a distance difference threshold, a maximum control value, and a maximum operating point position; based on the distance difference, the distance difference threshold, and the maximum control value, combined with the first conversion relationship and the maximum operating point position, the optical element 6 to be processed is processed. During the processing, the real-time control module controls the magnetorheological processing module in real time. The distance difference threshold, the maximum control value, and the maximum operating point position are adaptively set based on actual conditions and are not limited in this embodiment.
[0168] When the polishing wheel 9 is at When polishing trajectory points, the current distance error Distance difference threshold Compare:
[0169] like , then the current working point position is not Make adjustments;
[0170] like , then it is not the current working point position Make adjustments;
[0171] For the current second position The adjustment method is:
[0172] If the current working point position Less than the maximum operating point When , current working point position Control is performed according to the following formula:
[0173] ;
[0174] If the current working point position Greater than or equal to the maximum operating point position When , current working point position Adjust to .
[0175] The fitting process in the above specific embodiment includes, but is not limited to, importing discrete data into Matlab software, performing data fitting using Matlab's polyfit fitting command, and solving the respective transformation relationships. Polyfit fitting command is a basic general command in Matlab software. This method can more intuitively see the corresponding relationship between correlations and the corresponding function curve.
[0176] It should be understood that the various forms of the processes shown above can be used to reorder, add, or delete steps. For example, the steps described in the present disclosure can be performed in parallel, sequentially, or in a different order, as long as the desired results of the technical solutions disclosed in the present disclosure can be achieved. This is not limited herein.
[0177] The above specific embodiments do not limit the scope of protection of the present invention. Those skilled in the art will appreciate that various modifications, combinations, sub-combinations, and substitutions may be made based on design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention are intended to be included within the scope of protection of the present invention.
Claims
1. A magnetorheological polishing device based on sensor-controlled processing posture, characterized by: The system comprises a laser tracker, a control unit, a robot, a magnetorheological processing module, and a sensor module; the magnetorheological processing module is arranged at the end of the robot, and the robot drives the magnetorheological processing module to process the optical element; the sensor module is arranged on the magnetorheological processing module; the laser tracker cooperates with a target ball arranged on the magnetorheological processing module to measure the spatial coordinates of the sensor module and the working point of the polishing wheel in the magnetorheological processing module; The interior of the control unit includes: A coordinate relationship module is used to integrate and calculate the spatial coordinates collected by the laser tracker and the position information collected by the sensor module to obtain a distance error and output integrated position information; a conversion relationship module, configured to obtain a first conversion relationship by fitting the working point position of the polishing wheel with the polishing gap of the polishing wheel in the magnetorheological processing module; a processing program module, configured to obtain a processing program according to a removal function generated when processing the optical element, and import the processing program into the magnetorheological processing module; A real-time control module is used to control the robot to complete corresponding posture adjustment according to the processing program and the integrated position information; or to adjust the position of the polishing wheel according to the integrated position information and the first conversion relationship to maintain the stability of the removal function when processing the optical element.
2. The magnetorheological polishing equipment according to claim 1, characterized in that: The magnetorheological processing module also includes a transmission belt, a polishing motor, a nozzle, a supply system, a real-time adjustment device, a magnet and a magnetorheological mounting frame; wherein, The magnetorheological mounting frame is provided on the end of the robot; The polishing wheel and the real-time adjustment device are arranged on the magnetorheological mounting frame, and the real-time adjustment device adjusts the position of the polishing wheel; The polishing motor is arranged on the magnetorheological mounting frame and is connected to the polishing wheel via the transmission belt, so that the motor controls the polishing wheel to rotate, thereby causing the polishing wheel to process the optical element; The nozzle is arranged on the magnetorheological mounting frame along the rotation direction of the polishing wheel, and the supply system delivers magnetorheological fluid to the nozzle; The magnet is arranged on the magnetorheological mounting frame and is close to the working point of the polishing wheel, so that the magnetorheological fluid is affected by the magnetic field strength of the magnet and the stiffness of the magnetorheological fluid is changed; The sensor module is arranged on the magnetorheological mounting frame, and the laser tracker measures the spatial coordinates of the sensor module through the target sphere.
3. The magnetorheological polishing equipment according to claim 2, characterized in that: The sensor module includes an acceleration sensor; the laser tracker, the sensor module, the robot and the real-time adjustment device are respectively connected to the control unit to form respective communication lines, so that the control unit receives and sends signals through the corresponding communication lines.
4. The magnetorheological polishing equipment according to claim 3, characterized in that: The real-time adjustment device includes a displacement output motor, a lead screw and a support and fixing frame; wherein, the support and fixing frame is arranged on the magnetorheological mounting frame, the displacement output motor is arranged on the support and fixing frame, and the displacement output motor is connected to the lead screw arranged on the support and fixing frame; the polishing wheel is connected to the nut on the lead screw, so that the lead screw drives the polishing wheel to move.
5. A magnetorheological polishing method based on robot posture control, based on the magnetorheological polishing device with sensor-based processing posture control according to any one of claims 1 to 4, characterized in that: The following steps are involved: A1: Using the laser tracker to obtain the first coordinate of the sensor module and the second coordinate of the polishing wheel working point; using the coordinate relationship module to calculate the coordinate transformation relationship based on the two coordinates; A2: using the coordinate relationship module, through the coordinate conversion relationship, converting the first theoretical coordinates of the working point of the polishing wheel at different polishing trajectory points into the second theoretical coordinates of the sensor module, and obtaining the theoretical straight-line distance based on the current second theoretical coordinate and the previous second theoretical coordinate; A3: Using the coordinate relationship module to record the measurement results of the sensor module to obtain an actual straight-line distance; the actual straight-line distance and the theoretical straight-line distance are calculated by the coordinate relationship module to obtain a distance error; A4: controlling the magnetorheological processing module to process the test optical element to obtain the removal function, using the processing program module to obtain the processing program according to the removal function, and importing the processing program into the magnetorheological processing module; A5: Set a distance difference threshold and a control maximum value; determine the control direction of the polishing wheel during the processing according to the distance error, the distance difference threshold and the control maximum value, and process the optical element to be processed; during the processing, the position and posture of the robot are controlled in real time through the real-time control module.
6. The magnetorheological polishing method based on robot posture control according to claim 5 is characterized in that: In step A1, the laser tracker obtains the coordinates of no less than four positions on the sensor module through the target sphere, and obtains the first coordinates by calculation. ; The laser tracker obtains the coordinates of no less than 10 different positions on the outer surface of the polishing wheel through the target ball, and then calculates the coordinates of the center point of the polishing wheel. , the straight line passing through the center point coordinates is: ; in, represents the normal vector of the straight line; By solving the following equations, the spatial coordinate corresponding to the minimum value of the Z-axis coordinate is used as the second coordinate : ; in, Indicates the radius of the polishing wheel; The coordinate transformation relationship is obtained by combining the second coordinate and the first coordinate: ; in, Represents the coordinate transformation relationship.
7. The magnetorheological polishing method based on robot posture control according to claim 6 is characterized in that: In step A2, the theoretical straight-line distance is obtained by the following formula: ; in, Indicates the theoretical straight-line distance between the current polishing track point and the previous polishing track point, Indicates the Z coordinate in the current second theoretical coordinate, Indicates the Z coordinate in the previous second theoretical coordinate.
8. The magnetorheological polishing method based on robot posture control according to claim 7 is characterized in that: In step A3, the actual straight-line distance is obtained by the following formula: ; in, Indicates the actual straight-line distance between the current polishing track point and the previous polishing track point; represents the acceleration measured by the sensor module at the previous polishing track point, represents the speed measured by the sensor module at the previous polishing track point, Represents the measurement time of the sensor module; and then the distance error is obtained by the following formula : 。 9. The magnetorheological polishing method based on robot posture control according to claim 8, characterized in that: In step A5, when the polishing wheel is at the When polishing trajectory points, the current distance error , distance gap threshold and control the maximum value Compare: when , the robot is not controlled to perform posture control; when , then the robot is posture controlled: The control direction is determined by the sensor module: when the slope of the actual running track is greater than or equal to the set theoretical slope, the control direction is downward and the control amount is , otherwise the control direction is upward and the control amount is ; If the current distance error Greater than the distance difference threshold , which is less than the maximum value of the regulation When the robot adjusts the Z-axis coordinate of the polishing wheel to ; If the current distance error Greater than the distance difference threshold , greater than or equal to the maximum value of the control When the robot adjusts the Z-axis coordinate of the polishing wheel to .
10. A magnetorheological polishing method based on polishing wheel position control, based on the magnetorheological polishing device with sensor-based processing posture control according to any one of claims 1 to 4, characterized in that: The following steps are involved: B1: using the laser tracker to obtain the first coordinate of the sensor module and the second coordinate of the polishing wheel working point; using the coordinate relationship module to calculate the coordinate transformation relationship based on the two coordinates; B2: using the coordinate relationship module to convert the first theoretical coordinates of the working point of the polishing wheel at different polishing track points into the second theoretical coordinates of the sensor module through the coordinate conversion relationship, and obtaining the theoretical straight-line distance based on the current second theoretical coordinate and the previous second theoretical coordinate; B3: Using the coordinate relationship module to record the measurement results of the sensor module to obtain an actual straight-line distance; the actual straight-line distance and the theoretical straight-line distance are calculated by the coordinate relationship module to obtain a distance error; B4: controlling the magnetorheological processing module to perform fixed-point processing on the test optical element, and obtaining the first conversion relationship through the conversion relationship module; B5: Setting a distance difference threshold, a control maximum value, and a maximum working point position; processing the optical element to be processed based on the distance error, the distance difference threshold, and the control maximum value, combined with the first conversion relationship and the maximum working point position, and performing real-time control of the magnetorheological processing module through the real-time control module during the processing.
11. The magnetorheological polishing method based on polishing wheel position control according to claim 10, characterized in that: In step B1, the laser tracker obtains the coordinates of no less than four positions on the sensor module through the target sphere, and obtains the first coordinates by calculation. ; The laser tracker obtains the coordinates of no less than 10 different positions on the outer surface of the polishing wheel through the target ball, and then calculates the coordinates of the center point of the polishing wheel. , the straight line passing through the coordinates of the center point is: ; in, A normal vector of the line representing the coordinates of the center point; By solving the following equations, the spatial coordinate corresponding to the minimum value of the Z-axis coordinate is used as the second coordinate : ; in, Indicates the radius of the polishing wheel; The coordinate transformation relationship is obtained by combining the second coordinate and the first coordinate: ; in, Represents the coordinate transformation relationship.
12. The magnetorheological polishing method based on polishing wheel position control according to claim 11, characterized in that: In step B2, the theoretical straight-line distance is obtained by the following formula: ; in, Indicates the theoretical straight-line distance between the current polishing track point and the previous polishing track point, Indicates the Z coordinate in the current second theoretical coordinate, Indicates the Z coordinate in the previous second theoretical coordinate.
13. The magnetorheological polishing method based on polishing wheel position control according to claim 12, characterized in that: In step B3, the actual straight-line distance is obtained by the following formula: ; in, Indicates the actual straight-line distance between the current polishing track point and the previous polishing track point; represents the acceleration measured by the sensor module at the previous polishing track point, represents the speed measured by the sensor module at the previous polishing track point, Represents the measurement time of the sensor module; the distance error is obtained by the following formula : 。 14. The magnetorheological polishing method based on polishing wheel position control according to claim 13, characterized in that: Step B4 includes the following steps: B41: Changing the position of the polishing wheel relative to the test optical element individually, processing the test optical element at different working point positions, and calculating the removal function volume removal rate of each processing point to obtain a second conversion relationship between the removal function volume removal rate and the working point position: ; in, represents the working point position, represents the second conversion relationship; B42: Maintaining a constant distance between the polishing wheel and the magnet, controlling the robot to drive the polishing wheel to process different positions of the test optical element with different polishing gaps, and calculating the volume removal rate of the removal function at each processing point to obtain a third conversion relationship between the volume removal rate of the removal function and the polishing gap: ; in, represents the polishing gap, represents the third conversion relationship; B43: Obtain the first conversion relationship according to the second conversion relationship and the third conversion relationship, that is: ; in, Indicates the first conversion relationship.
15. The magnetorheological polishing method based on polishing wheel position control according to claim 14, characterized in that: In step B5, When the polishing wheel is located at When polishing trajectory points, the current distance error Distance difference threshold Compare: like , then the current working point position is not Make adjustments; like , then the current working point position Make adjustments: If the current working point position Less than the maximum operating point When the current working point position Control is performed according to the following formula: If the current working point position Greater than or equal to the maximum operating point position When the current working point position Adjust to .
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