Magnetorheological polishing equipment and method based on sensor-based adjustment of processing speed

Abstract

The present invention relates to the field of optical processing technology, and in particular to a magnetorheological polishing device and method for adjusting a processing speed based on a sensor. The device comprises a laser tracker, a control unit, a robot, a magnetorheological processing module, and a sensor module. The magnetorheological processing module is arranged at the free end of the robot, and the robot drives the magnetorheological processing module to process an optical element. The sensor module is arranged on the magnetorheological processing module. The laser tracker cooperates with a target ball to measure the spatial coordinates of the sensor module and the working points of the polishing wheel in the magnetorheological processing module. In the method, the laser tracker and the sensor module cooperate to measure the real-time changes in the position of the robot and the magnetorheological processing module during the processing, and the speeds of the polishing wheel and the liquid pump in the magnetorheological processing module are adjusted in real time, thereby achieving real-time constant control of the removal function of the optical element.

Description

Technical Field

[0001] The present invention belongs to the field of optical processing technology, and in particular relates to a magnetorheological polishing device and method for adjusting processing rotation speed based on a sensor. Background Art

[0002] Magnetorheological finishing (MRF) is an advanced optical manufacturing technology that has developed in recent years. It offers numerous advantages, including stable removal function, controllable edge effects, minimal subsurface damage, no photocopying, strong reshaping capabilities, and high machining accuracy. Consequently, MRF has garnered widespread attention in high-precision optical processing. Existing MRF machining centers primarily integrate MRF modules onto CNC machine tools. However, CNC machine tools have limitations (such as low degrees of freedom, large footprint, and high cost) that limit the deviation of aspheric surfaces and hinder precise position control along the surface normal.

[0003] In response to these shortcomings of CNC machine tools, researchers have introduced six-degree-of-freedom industrial robots into the field of optical processing in recent years. Six-degree-of-freedom industrial robots have the advantages of high degrees of freedom, small footprint, large processing range, and low cost, which make up for the shortcomings of CNC machine tools. Therefore, when the magnetorheological polishing module is integrated into the industrial robot, high-precision processing of large-aperture complex curved optical components can be achieved in theory. However, due to the influence of factors such as processing, assembly, load, trajectory planning, and reduction ratio, the execution accuracy of the robot's free end is low, and the polishing gap varies greatly during the processing. At the same time, magnetorheological polishing technology is an optical processing technology with high certainty of the removal function. During the polishing process, the requirements for the change of the polishing gap are high. Generally, the polishing gap of the magnetorheological CNC machining center varies in tens of microns (PV<0.1mm), while the trajectory accuracy of common commercial robots is generally in the sub-millimeter to millimeter range. This leads to large changes in the polishing gap during the processing, reduces the certainty of the removal function, and affects the final processing accuracy. Therefore, the motion accuracy of the current commercial large-scale six-degree-of-freedom industrial robots often cannot meet the requirements of magnetorheological polishing technology for the change of the removal function during high-precision polishing.

[0004] To address the issue of low robot motion precision, real-time control solutions for constant-force grinding and polishing have become a research hotspot. Force-position control has become a common method for controlling constant-force grinding and polishing in robots. A common application involves placing a force sensor between the machining tool and the robot. The force sensor is first calibrated with gravity to ensure accurate measurement. The position error is calculated by measuring force changes. This position error is then compensated for using the robot itself or other motion compensation mechanisms to achieve constant-force control. High-efficiency machining of large-aperture optical components requires a magnetorheological machining module with large polishing wheels, which typically weigh hundreds of kilograms. However, for a magnetorheological machining module weighing hundreds of kilograms, the force variation caused by the robot's position error is only tens of Newtons. High-precision machining requires maintaining a constant force of a few Newtons or even a fraction of a Newton. This requires measurement equipment such as force sensors to achieve an absolute accuracy of one part per ten thousand. Furthermore, the force sensor must be able to operate at varying speeds and positions. Force sensors that meet these requirements are often extremely expensive, significantly increasing the cost of the equipment. Summary of the Invention

[0005] In view of this, the present invention aims to provide a magnetorheological polishing device and method based on sensor-based adjustment of processing speed, using a laser tracker and a sensor module to measure the real-time changes in the robot's posture and the position of the magnetorheological processing module during processing, and to adjust the speed of the polishing wheel and liquid pump in the magnetorheological processing module in real time, thereby realizing real-time constant control of the removal function of the optical element.

[0006] To achieve the above object, the technical solution created by the present invention is implemented as follows:

[0007] A magnetorheological polishing device that uses sensors to adjust the processing speed includes a laser tracker, a control unit, a robot, a magnetorheological processing module, and a sensor module. The magnetorheological processing module is arranged at the free end of the robot, and the robot drives the magnetorheological processing module to process optical components. The sensor module is arranged on the magnetorheological processing module. The laser tracker cooperates with a target ball arranged on the magnetorheological processing module to measure the spatial coordinates of the sensor module and the working point of the polishing wheel in the magnetorheological processing module.

[0008] The interior of the control unit includes:

[0009] The coordinate relationship module is used to integrate and calculate the spatial coordinates collected by the laser tracker and the position information collected by the sensor module, and output the integrated position information;

[0010] a conversion relationship module, configured to obtain a first conversion relationship by fitting the rotational speed of the polishing wheel in the magnetorheological processing module with the polishing gap of the polishing wheel, and to obtain a second conversion relationship by fitting the rotational speed of the liquid pump in the magnetorheological processing module with the polishing gap;

[0011] The real-time control module is used to adjust the rotation speed of the polishing wheel according to the integrated position information and the first conversion relationship, and / or adjust the rotation speed of the liquid pump according to the integrated position information and the second conversion relationship, so as to maintain the stability of the removal function when processing the optical element.

[0012] Furthermore, the magnetorheological processing module also includes a transmission belt, a polishing motor, a nozzle, a magnet and a magnetorheological mounting frame; wherein,

[0013] The magnetorheological mounting frame is arranged on the free end of the robot; the polishing wheel is arranged on the magnetorheological mounting frame;

[0014] The polishing motor is arranged on a magnetorheological mounting frame and is connected to the bearing of the polishing wheel through a transmission belt, so that the polishing motor controls the rotation of the polishing wheel and changes the speed of the polishing wheel;

[0015] The nozzle is arranged on the magnetorheological mounting frame along the rotation direction of the polishing wheel, and the liquid pump delivers magnetorheological fluid to the nozzle;

[0016] The magnet is arranged on the magnetorheological mounting frame and close to the working point of the polishing wheel, so that the magnetorheological fluid is affected by the magnetic field strength of the magnetorheological fluid to change the stiffness of the magnetorheological fluid;

[0017] The sensor module is arranged on a magnetorheological mounting frame, and the laser tracker measures the spatial coordinates of the sensor module through a target sphere.

[0018] Furthermore, the sensor module includes an acceleration sensor; the laser tracker, sensor module, robot, polishing motor and liquid pump are respectively connected to the control unit to form respective communication lines, so that the control unit receives and sends signals through the corresponding communication lines.

[0019] A magnetorheological polishing method based on polishing wheel speed, based on the magnetorheological polishing device for adjusting processing speed based on a sensor provided by the present invention, comprises the following steps:

[0020] A1: Use a laser tracker to obtain the first coordinate of the sensor module and the second coordinate of the polishing wheel working point; use the coordinate relationship module to calculate the coordinate transformation relationship based on the two coordinates;

[0021] A2: Using the coordinate relationship module, the first theoretical coordinates of the working point of the polishing wheel at different polishing trajectory points are converted into the second theoretical coordinates of the sensor module through the coordinate transformation relationship, and the theoretical straight-line distance is obtained based on the current second theoretical coordinate and the previous second theoretical coordinate;

[0022] A3: Use the coordinate relationship module to record the measurement results of the sensor module to obtain the actual straight-line distance. The coordinate relationship module is used to calculate the distance error between the actual straight-line distance and the theoretical straight-line distance.

[0023] A4: Controlling the magnetorheological processing module to process the test optical element, and obtaining a first conversion relationship through the conversion relationship module;

[0024] A5: Set the distance error threshold, the maximum control value, and the maximum polishing wheel speed; based on the distance error, the distance error threshold, and the maximum control value, combined with the first conversion relationship and the maximum polishing wheel speed, process the optical element to be processed, and during the processing, control the polishing wheel speed in real time through the real-time control module.

[0025] Furthermore, in step A1, the laser tracker obtains the coordinates of no less than 4 positions on the sensor module through the target ball, and obtains the first coordinate by calculation. ;

[0026] The laser tracker obtains the coordinates of no less than 10 different positions on the outer surface of the polishing wheel through the target ball, and then calculates the coordinates of the center point of the polishing wheel. , the straight line passing through the center point coordinates is:

[0027] ;

[0028] in, The normal vector of the line representing the coordinates of the center point;

[0029] By solving the following equations, the spatial coordinate corresponding to the minimum value of the Z-axis coordinate is used as the second coordinate :

[0030] ;

[0031] in, Indicates the radius of the polishing wheel;

[0032] The coordinate transformation relationship is obtained by combining the second coordinate with the first coordinate:

[0033] ;

[0034] in, Represents the coordinate transformation relationship.

[0035] Furthermore, in step A2, the theoretical straight-line distance is obtained by the following formula:

[0036] ;

[0037] in, Indicates the theoretical straight-line distance between the current polishing track point and the previous polishing track point, Indicates the Z coordinate in the current second theoretical coordinate, Indicates the Z coordinate in the previous second theoretical coordinate.

[0038] Furthermore, in step A3, the actual straight-line distance is obtained by the following formula:

[0039] ;

[0040] in, Indicates the actual straight-line distance between the current polishing track point and the previous polishing track point; Represents the acceleration measured by the sensor module at the previous polishing track point, Represents the speed measured by the sensor module at the previous polishing track point, Represents the measurement time of the sensor module; the distance error is obtained by the following formula :

[0041] .

[0042] Furthermore, step A4 includes the following steps:

[0043] A41: Under different polishing gaps, the polishing wheel is controlled to process the test optical element at different polishing wheel speeds. The removal function volume removal rate of each polishing track point under different polishing gaps is calculated, and the third conversion relationship between the removal function volume removal rate and the polishing wheel speed is obtained:

[0044] ;

[0045] in, Indicates the polishing wheel speed, represents the removal function volume removal rate, Indicates the third conversion relationship;

[0046] A42: Keeping the polishing wheel speed constant, control the polishing wheel to process at different positions of the test optical element with different polishing gaps, calculate the volume removal rate of the removal function at each polishing track point, and obtain the fourth conversion relationship between the volume removal rate of the removal function and the polishing gap:

[0047] ;

[0048] in, Indicates the polishing gap, Indicates the fourth conversion relationship;

[0049] A43: Obtain the first conversion relationship based on the third conversion relationship and the fourth conversion relationship, namely:

[0050] ;

[0051] in, Indicates the first conversion relationship.

[0052] Further, in step A5, when the polishing wheel is at the When polishing trajectory points, the current distance error Distance error threshold Compare:

[0053] like , then the current polishing wheel speed is not to regulate;

[0054] like , then the current polishing wheel speed To regulate:

[0055] If the current polishing wheel speed Less than the maximum polishing wheel speed When the real-time control module is based on the first conversion relationship Current polishing wheel speed Adjust according to the following formula;

[0056] ;

[0057] If the current polishing wheel speed Greater than or equal to the maximum polishing wheel speed When the current polishing wheel speed Adjust to .

[0058] A magnetorheological polishing method based on liquid pump speed, based on the magnetorheological polishing equipment for adjusting processing speed based on sensors provided by the present invention, comprises the following steps:

[0059] B1: Use a laser tracker to obtain the first coordinate of the sensor module and the second coordinate of the polishing wheel working point; use the coordinate relationship module to calculate the coordinate transformation relationship based on the two coordinates;

[0060] B2: Using the coordinate relationship module, the first theoretical coordinates of the working point of the polishing wheel at different polishing trajectory points are converted into the second theoretical coordinates of the sensor module through the coordinate conversion relationship, and the theoretical straight-line distance is obtained based on the current second theoretical coordinate and the previous second theoretical coordinate;

[0061] B3: Use the coordinate relationship module to record the measurement results of the sensor module to obtain the actual straight-line distance; the actual straight-line distance and the theoretical straight-line distance are calculated using the coordinate relationship module to obtain the distance error;

[0062] B4: Controlling the magnetorheological processing module to process the test optical element, and obtaining a second conversion relationship through the conversion relationship module;

[0063] B5: Set the distance error threshold, the maximum control value, and the maximum liquid pump speed; based on the distance error, the distance error threshold, and the maximum control value, combined with the second conversion relationship and the maximum liquid pump speed, process the optical element to be processed, and during the processing, control the speed of the liquid pump in real time through the real-time control module.

[0064] Furthermore, in step B1, the laser tracker obtains the coordinates of no less than four positions on the sensor module through the target ball, and obtains the first coordinate by calculation. ;

[0065] The laser tracker obtains the coordinates of no less than 10 different positions on the outer surface of the polishing wheel through the target ball, and then calculates the coordinates of the center point of the polishing wheel. , the straight line passing through the center point coordinates is:

[0066] ;

[0067] in, The normal vector of the line representing the coordinates of the center point;

[0068] By solving the following equations, the spatial coordinate corresponding to the minimum value of the Z-axis coordinate is used as the second coordinate :

[0069] ;

[0070] in, Indicates the radius of the polishing wheel;

[0071] The coordinate transformation relationship is obtained by combining the second coordinate with the first coordinate:

[0072] ;

[0073] in, Represents the coordinate transformation relationship.

[0074] Furthermore, in step B2, the theoretical straight-line distance is obtained by the following formula:

[0075] ;

[0076] in, Indicates the theoretical straight-line distance between the current polishing track point and the previous polishing track point, Indicates the Z coordinate in the current second theoretical coordinate, Indicates the Z coordinate in the previous second theoretical coordinate.

[0077] Furthermore, in step B3, the actual straight-line distance is obtained by the following formula:

[0078] ;

[0079] in, Indicates the actual straight-line distance between the current polishing track point and the previous polishing track point; Represents the acceleration measured by the sensor module at the previous polishing track point, Represents the speed measured by the sensor module at the previous polishing track point, Represents the measurement time of the sensor module; the distance error is obtained by the following formula :

[0080] .

[0081] Furthermore, step B4 includes the following steps:

[0082] B41: Under different polishing gaps, the liquid pump speed is changed, and the polishing wheel is controlled to process different positions of the test optical component with different polishing gaps. The removal function volume removal rate of each polishing track point under different polishing gaps is calculated, and the fifth conversion relationship between the removal function volume removal rate and the liquid pump speed is obtained:

[0083] ;

[0084] in, Indicates the liquid pump speed, The removal function volume removal rate is shown. Indicates the fifth conversion relationship;

[0085] B42: Keeping the liquid pump speed constant, control the polishing wheel to process different positions of the test optical element with different polishing gaps, calculate the volume removal rate of the removal function at each polishing trajectory point, and obtain the sixth conversion relationship between the volume removal rate of the removal function and the polishing gap:

[0086] ;

[0087] in, Indicates the polishing gap, Indicates the fourth conversion relationship;

[0088] B43: Obtain the second conversion relationship based on the fifth conversion relationship and the sixth conversion relationship, namely:

[0089] ;

[0090] in, Indicates the second conversion relationship.

[0091] Further, in step B5, when the polishing wheel is at the When at the polishing trajectory point, the current distance error Distance error threshold Compare:

[0092] like , then the current liquid pump speed is not to regulate;

[0093] like , then the current liquid pump speed To regulate:

[0094] If the current liquid pump speed Less than the maximum liquid pump speed When the current liquid pump speed Adjust according to the following formula:

[0095] ;

[0096] If the current liquid pump speed Greater than or equal to the maximum liquid pump speed When the current liquid pump speed Adjust to .

[0097] Compared with the prior art, the present invention can achieve the following beneficial effects:

[0098] In the magnetorheological polishing equipment and method for adjusting the processing speed based on sensors created by the present invention, the six-dimensional posture information of the robot during the processing is measured in real time by cooperating with a laser tracker and a sensor module to measure the real-time rotation speed of the polishing wheel and the liquid pump in the magnetorheological processing module, thereby realizing real-time constant control of the removal function change under multi-factor coupling during the processing of the optical element; at the same time, the acquisition of posture information does not need to rely on the actual processing process, and the posture error information of the processing equipment can be obtained during the processing trial run (in which magnetorheological fluid is not introduced and no processing effect is produced), and there is no need to place the measuring equipment at the lowest point of the polishing wheel, which will not affect the actual processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0099] The accompanying drawings, which constitute part of the present invention, are intended to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are intended to explain the present invention and do not constitute an undue limitation of the present invention. In the accompanying drawings:

[0100] Figure 1A schematic structural diagram of a magnetorheological polishing device for adjusting the processing speed based on a sensor according to an embodiment of the present invention, viewed from one perspective;

[0101] Figure 2 A schematic structural diagram of a magnetorheological polishing device for adjusting the machining speed based on a sensor according to an embodiment of the present invention from another perspective;

[0102] Figure 3 This is a schematic structural diagram of a liquid pump according to an embodiment of the present invention.

[0103] Description of reference numerals:

[0104] 1. Robot; 2. Sensor module; 3. Laser tracker; 4. Control unit; 5. Laboratory bench; 6. Optical element to be processed; 7. Test optical element; 8. Target ball; 9. Polishing wheel; 10. Liquid pump; 11. Transmission belt; 12. Polishing motor; 13. Nozzle; 14. Magnet; 15. Magnetorheological mounting bracket; 16. Liquid pump body; 17. Cooling chamber; 18. Magnetorheological fluid storage chamber; 19. Cooling water inlet; 20. Magnetorheological fluid inlet; 21. Cooling water outlet; 22. Magnetorheological fluid outlet; 23. Mounting bracket; 24. Connecting plate. DETAILED DESCRIPTION

[0105] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and do not constitute a limitation of the present invention.

[0106] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0107] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second" and the like are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, features defined as "first", "second" and the like may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0108] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to internal connections between two components. Those skilled in the art can understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0109] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0110] like Figure 1 and Figure 2 As shown, the magnetorheological polishing equipment based on sensor-controlled processing speed adjustment according to the embodiment of the present invention includes a robot 1, a magnetorheological processing module, a sensor module 2, a laser tracker 3, and a control unit 4. The magnetorheological processing module is arranged at the free end of the robot 1, and the robot 1 drives the magnetorheological processing module to process the optical element 6 to be processed and the test optical element 7 placed on the experimental table 5. The sensor module 2 is arranged on the magnetorheological processing module, and the laser tracker 3 cooperates with the target ball 8 arranged on the magnetorheological processing module to measure the spatial coordinates of the working points of the sensor module 2 and the polishing wheel 9 in the magnetorheological processing module. In the embodiment of the present invention, the laser tracker 3 is set on one side of the experimental table 5, and the position of the target ball 8 is adjusted according to the needs of the measurement object. For example, when the spatial coordinates of the sensor module 2 need to be measured, the target ball 8 is installed at the corresponding position of the sensor module 2, and when the polishing wheel 9 needs to be measured, the target ball 8 is installed at the corresponding position of the polishing wheel 9.

[0111] The control unit 4 includes a coordinate relationship module, a conversion relationship module, a processing program module, and a real-time control module. The coordinate relationship module integrates and calculates the spatial coordinates collected by the laser tracker 3 and the position information collected by the sensor module 2, and outputs the integrated position information. The conversion relationship module fits the rotational speed of the polishing wheel 9 in the magnetorheological processing module with the polishing gap of the polishing wheel 9 to obtain a first conversion relationship, and fits the rotational speed of the liquid pump 10 in the magnetorheological processing module with the polishing gap to obtain a second conversion relationship. A change in the rotational speed of the liquid pump 10 will result in an increase or decrease in the flow rate of the supplied magnetorheological fluid, which is understood to be an increase or decrease in the amount of liquid that can be supplied within 1 second. The real-time control module adjusts the rotational speed of the polishing wheel 9 based on the integrated position information and the first conversion relationship, and / or adjusts the rotational speed of the liquid pump 10 based on the integrated position information and the second conversion relationship, thereby maintaining the stability of the removal function when processing the optical element 6 to be processed.

[0112] The magnetorheological processing module also includes a transmission belt 11, a polishing motor 12, a nozzle 13, a magnet 14, and a magnetorheological mounting frame 15. The magnetorheological mounting frame 15 is mounted on the free end of the robot 1, and the polishing wheel 9 is mounted on the magnetorheological mounting frame 15 via a connecting plate 24. The polishing motor 12 is fixed to the magnetorheological mounting frame 15 and controlled by a control unit 4 via a circuit. The output end of the polishing motor 12 is connected to the bearing of the polishing wheel 9 via the transmission belt 11, allowing the polishing motor 12 to control the rotation of the polishing wheel 9 and change its speed. The method by which the polishing motor 12 drives the polishing wheel 9 to rotate in this embodiment of the present invention can be referred to in the invention patent application entitled "Self-rotating Polishing Module Processing System" with Chinese Patent Publication No. CN118322074A, published on July 12, 2024. The nozzle 13 is fixed to the magnetorheological mounting frame 15 in the direction of rotation of the polishing wheel 9. The liquid pump 10 is mounted on one side of the experimental table 5 via a mounting frame 23 to deliver magnetorheological fluid to the nozzle 13. Magnet 14 is fixed to the magnetorheological mounting frame 15 via a connecting plate 24, near the working point of the polishing wheel 9. The magnetic field strength of magnet 14 influences the magnetorheological fluid, changing its stiffness. This allows the polishing wheel 9 to process the optical element 6 or test optical element 7 using the rigid magnetorheological fluid as a medium. Sensor module 2 is mounted on the magnetorheological mounting frame 15, and a laser tracker 3 measures the spatial coordinates of sensor module 2 using a target sphere 8.

[0113] In the embodiment of the present invention, the structure of the liquid pump 10 is as follows: Figure 3 As shown, the pump body 16 comprises a liquid pump, a cooling chamber 17, and a magnetorheological fluid storage chamber 18. The pump body 16 utilizes a DFLD vertical multi-stage pump from Shanghai Dongfang Pump Industry Co., Ltd., which supplies magnetorheological fluid. The cooling chamber 17 primarily stores cooling water and cools the magnetorheological fluid. The magnetorheological fluid storage chamber 18 primarily stores the magnetorheological fluid. When the pump 10 is operating, cooling water enters the cooling chamber 17 through the cooling water inlet 19, and magnetorheological fluid flows from the magnetorheological fluid inlet 20 through the magnetorheological fluid storage chamber 18 into the pump body 16. After cooling the magnetorheological fluid in the cooling chamber 17, the cooling water is discharged from the cooling water outlet 21. The cooled magnetorheological fluid is then discharged from the magnetorheological fluid outlet 22 and delivered to the nozzle 13 via a pipeline. The pump body 16's speed is regulated by a motor.

[0114] Sensor module 2 includes an acceleration sensor. Robot 1, sensor module 2, laser tracker 3, the motor in liquid pump 10, and polishing motor 12 are each connected to control unit 4 to form separate communication circuits, enabling control unit 4 to receive and transmit signals via the corresponding communication circuits. Control unit 4 communicates with the motor in liquid pump 10 via the communication circuits. During operation, control unit 4 sends speed control commands in real time, and the motor in liquid pump 10 adjusts the speed of liquid pump 10 in real time, thereby regulating the liquid flow rate. Because a strong magnetic field is generated around polishing wheel 9 during polishing, the communication circuits are designed to avoid such strong magnetic fields.

[0115] Based on the magnetorheological polishing equipment based on sensor-based adjustment of processing speed described in the embodiment of the present invention, the embodiment of the present invention also provides a magnetorheological polishing method based on sensor-based adjustment of processing speed, including a magnetorheological polishing method based on polishing wheel speed and a magnetorheological polishing method based on liquid pump speed.

[0116] Specific embodiment 1: The magnetorheological polishing method based on the polishing wheel speed described in this specific embodiment is based on the magnetorheological polishing device based on the sensor to adjust the processing speed described in the embodiment of the invention, combined with Figure 1~Figure 2 , including the following steps:

[0117] A1: Use a laser tracker to measure the first coordinate of the sensor module 2 and the second coordinate of the polishing wheel working point; use the coordinate relationship module to calculate the coordinate transformation relationship through the two coordinates.

[0118] In step A1, in this specific embodiment, a cylindrical or rectangular acceleration sensor is used as the sensor module 2, and the coordinates of no less than four positions on the sensor module 2 are obtained by using the laser tracker 3 in conjunction with the target ball 8. The first coordinate is obtained by calculation. .

[0119] For the cylindrical acceleration sensor, the target ball 8 is placed at least three different positions on the cylindrical bottom of the cylindrical acceleration sensor and its spatial coordinates are measured using the laser tracker 3. The circle fitting function of the laser tracker 3 (this function is the basic function of the laser tracker) is used to obtain the XY coordinates of the cylindrical acceleration sensor. , based on the Z-axis coordinates of the target ball 8 at different positions Calculate the Z-axis coordinate of the bottom surface of the cylindrical accelerometer. , k represents the number of measurement points. The target ball 8 is placed at least three different positions on the top of the cylindrical acceleration sensor and its spatial coordinates are measured using the laser tracker 3. The Z-axis coordinates of the target ball 8 at different positions are Calculate the Z-axis coordinate of the top surface of the cylindrical accelerometer. , where j represents the number of measurement points, and the first coordinate of the cylindrical accelerometer is , r is the radius of the target sphere 8. In this specific embodiment, for the cylindrical acceleration sensor, 10 different positions are selected at the bottom and top thereof.

[0120] For the rectangular acceleration sensor, the target balls 8 are placed at the bottom of the four sides of the rectangular acceleration sensor and the spatial coordinates are measured using the laser tracker 3. The coordinates of the eight points of the target ball are measured at the bottom of each side. The coordinates of the bottom of the four sides of the rectangular acceleration sensor are obtained as follows: 、 、 、 , solve the XY axis coordinates of the rectangular acceleration sensor as , based on the Z-axis coordinates of the target ball 8 at different positions Calculate the Z-axis coordinate of the bottom surface of the rectangular accelerometer and get The target ball 8 is placed at least three different positions on the top of the rectangular acceleration sensor and its spatial coordinates are measured using a laser tracker 3, based on the Z-axis coordinates of the target ball 8 at different positions Calculate the Z-axis coordinate of the top surface of the rectangular accelerometer. , the first coordinate of the rectangular acceleration sensor is In this specific embodiment, for the rectangular parallelepiped acceleration sensor, 10 different positions are selected on the top thereof.

[0121] The laser tracker 3 obtains the coordinates of no less than 10 different positions on the outer surface of the polishing wheel 9 through the target ball 8 (in this specific embodiment, the coordinates of 10 different positions are obtained), and the coordinates of the center point of the polishing wheel are calculated by the coordinate calculation function of the laser tracker 3 itself. , the straight line passing through the center point coordinates obtained by the teaching pendant of robot 1 is:

[0122] ;

[0123] in, The normal vector of the line representing the coordinates of the center point;

[0124] By solving the following equations, the spatial coordinate corresponding to the minimum value of the Z-axis coordinate is used as the second coordinate :

[0125] ;

[0126] in, Indicates the radius of the polishing wheel;

[0127] The coordinate transformation relationship is obtained by combining the second coordinate with the first coordinate:

[0128] ;

[0129] in, Represents the coordinate transformation relationship.

[0130] A2: Using the coordinate relationship module, the first theoretical coordinates of the working point of the polishing wheel 9 at different polishing trajectory points are converted into the second theoretical coordinates of the sensor module 2 through the coordinate transformation relationship. The theoretical straight-line distance is calculated based on the current second theoretical coordinate and the previous second theoretical coordinate. In this specific embodiment, the theoretical straight-line distance is the distance in the Z-axis direction.

[0131] In step A2, the theoretical straight-line distance is obtained by the following formula:

[0132] ;

[0133] in, Indicates the theoretical straight-line distance between the current polishing track point and the previous polishing track point, Indicates the Z coordinate in the current second theoretical coordinate, Indicates the Z coordinate in the previous second theoretical coordinate.

[0134] A3: Use the coordinate relationship module to record the measurement results of sensor module 2 to obtain the actual straight-line distance. The coordinate relationship module calculates the distance error between the actual straight-line distance and the theoretical straight-line distance. In this specific embodiment, the actual straight-line distance is the distance in the Z-axis direction.

[0135] In step A3, the actual straight-line distance is obtained by the following formula:

[0136] ;

[0137] in, Indicates the actual straight-line distance between the current polishing track point and the previous polishing track point; represents the acceleration measured by sensor module 2 at the previous polishing track point, represents the speed measured by sensor module 2 at the previous polishing track point, Represents the measurement time of sensor module 2; and then the distance error is obtained by the following formula :

[0138] .

[0139] A4: Control the magnetorheological processing module to process the test optical element 7, and obtain a first conversion relationship through the conversion relationship module.

[0140] Step A4 includes the following steps:

[0141] A41: Under different polishing gaps, control the polishing wheel 9 to process the test optical element 7 at different polishing wheel speeds, calculate the removal function volume removal rate of each polishing track point under different polishing gaps, and obtain a third conversion relationship between the removal function volume removal rate and the polishing wheel speed:

[0142] ;

[0143] in, Indicates the polishing wheel speed, represents the removal function volume removal rate, Indicates the third conversion relationship; in this specific embodiment, specifically controlling the polishing wheel 9 to perform fixed-point processing on the test optical element 7 for a period of time at different polishing wheel speeds;

[0144] A42: Keeping the polishing wheel speed constant, control the polishing wheel 9 to process different positions of the test optical element 7 with different polishing gaps, calculate the volume removal rate of the removal function at each polishing trajectory point, and obtain the fourth conversion relationship between the volume removal rate of the removal function and the polishing gap:

[0145] ;

[0146] in, Indicates the polishing gap, Indicates the fourth conversion relationship; in this specific embodiment, specifically controlling the polishing wheel 9 to perform fixed-point processing on the test optical element 7 for a period of time with different polishing gaps;

[0147] A43: Obtain the first conversion relationship based on the third conversion relationship and the fourth conversion relationship, namely:

[0148] ;

[0149] in, Indicates the first conversion relationship.

[0150] A5: Setting a distance error threshold, a maximum control value, and a maximum polishing wheel speed. Based on the distance error, the distance error threshold, and the maximum control value, combined with the first conversion relationship and the maximum polishing wheel speed, the optical element 6 to be processed is processed. During processing, the speed of the polishing wheel 9 is controlled in real time by the real-time control module. The distance error threshold, the maximum control value, and the maximum working point position are adaptively set based on actual conditions and are not limited in this embodiment.

[0151] In step A5, when the polishing wheel 9 is at the When polishing trajectory points, the current distance error Distance error threshold Compare:

[0152] like , then the current polishing wheel speed is not to regulate;

[0153] like , then the current polishing wheel speed To regulate:

[0154] If the current polishing wheel speed Less than the maximum polishing wheel speed When The real-time control module is based on the first conversion relationship Current polishing wheel speed Adjust according to the following formula;

[0155] ;

[0156] If the current polishing wheel speed Greater than or equal to the maximum polishing wheel speed When , current polishing wheel speed Adjust to .

[0157] In this specific embodiment, the amount of discrete data corresponding to different polishing gaps obtained experimentally is limited. The polishing gap actually measured during processing may not be equal to the polishing gap data value obtained experimentally. The solution is to use the closest data, that is, the rounding principle. For example: the removal function volume removal rate MRR and polishing wheel speed corresponding to polishing gaps of 1mm and 2mm were obtained experimentally. The fourth conversion relationship between them is used to obtain the corresponding first conversion relationship, but the polishing gap during the processing is 1.6 mm. At this time, the fourth conversion relationship is used to calculate the 2 mm removal function volume removal rate MRR.

[0158] Specific embodiment 2: The magnetorheological polishing method based on the liquid pump speed described in this specific embodiment is based on the magnetorheological polishing equipment based on the sensor to adjust the processing speed described in the embodiment of the invention, combined with Figure 1~Figure 2 , including the following steps:

[0159] B1: Use the laser tracker 3 to obtain the first coordinate of the sensor module 2 and the second coordinate of the working point of the polishing wheel 9; and use the coordinate relationship module to calculate the coordinate conversion relationship through the two coordinates.

[0160] In step B1, in this specific embodiment, a cylindrical or rectangular acceleration sensor is used as the sensor module 2, and the coordinates of no less than four positions on the sensor module 2 are obtained by using the laser tracker 3 in conjunction with the target ball 8. The first coordinate is obtained by calculation. .

[0161] For the cylindrical acceleration sensor, the target ball 8 is placed at least three different positions on the cylindrical bottom of the cylindrical acceleration sensor and its spatial coordinates are measured using the laser tracker 3. The circle fitting function of the laser tracker 3 (this function is the basic function of the laser tracker) is used to obtain the XY coordinates of the cylindrical acceleration sensor. , based on the Z-axis coordinates of the target ball 8 at different positions Calculate the Z-axis coordinate of the bottom surface of the cylindrical accelerometer. , k represents the number of measurement points. The target ball 8 is placed at least three different positions on the top of the cylindrical acceleration sensor and its spatial coordinates are measured using the laser tracker 3. The Z-axis coordinates of the target ball 8 at different positions are Calculate the Z-axis coordinate of the top surface of the cylindrical accelerometer. , where j represents the number of measurement points, and the first coordinate of the cylindrical accelerometer is , r is the radius of the target sphere 8. In this specific embodiment, for the cylindrical acceleration sensor, 10 different positions are selected at the bottom and top thereof.

[0162] For the rectangular acceleration sensor, the target balls 8 are placed at the bottom of the four sides of the rectangular acceleration sensor and the spatial coordinates are measured using the laser tracker 3. The coordinates of the eight points of the target ball are measured at the bottom of each side. The coordinates of the bottom of the four sides of the rectangular acceleration sensor are obtained as follows: 、 、 、 , solve the XY axis coordinates of the rectangular acceleration sensor as , based on the Z-axis coordinates of the target ball 8 at different positions Calculate the Z-axis coordinate of the bottom surface of the rectangular accelerometer and get The target ball 8 is placed at least three different positions on the top of the rectangular acceleration sensor and its spatial coordinates are measured using a laser tracker 3, based on the Z-axis coordinates of the target ball 8 at different positions Calculate the Z-axis coordinate of the top surface of the rectangular accelerometer. , the first coordinate of the rectangular acceleration sensor is In this specific embodiment, for the rectangular parallelepiped acceleration sensor, 10 different positions are selected on the top thereof.

[0163] The laser tracker 3 obtains the coordinates of no less than 10 different positions on the outer surface of the polishing wheel 9 through the target ball 8 (in this specific embodiment, the coordinates of 10 different positions are obtained), and the coordinates of the center point of the polishing wheel are calculated by the coordinate calculation function of the laser tracker 3 itself. , the straight line passing through the center point coordinates obtained by the teaching pendant of robot 1 is:

[0164] ;

[0165] in, The normal vector of the line representing the coordinates of the center point;

[0166] By solving the following equations, the spatial coordinate corresponding to the minimum value of the Z-axis coordinate is used as the second coordinate :

[0167] ;

[0168] in, Indicates the radius of the polishing wheel;

[0169] The coordinate transformation relationship is obtained by combining the second coordinate with the first coordinate:

[0170] ;

[0171] in, Represents the coordinate transformation relationship.

[0172] B2: Using the coordinate relationship module, the first theoretical coordinates of the working point of the polishing wheel 9 at different polishing trajectory points are converted into the second theoretical coordinates of the sensor module 2 through the coordinate conversion relationship, and the theoretical straight-line distance is obtained based on the current second theoretical coordinate and the previous second theoretical coordinate. In this specific embodiment, the theoretical straight-line distance is the distance in the Z-axis direction. Specifically, the theoretical straight-line distance is obtained by the following formula:

[0173] ;

[0174] in, Indicates the theoretical straight-line distance between the current polishing track point and the previous polishing track point, Indicates the Z coordinate in the current second theoretical coordinate, Indicates the Z coordinate in the previous second theoretical coordinate.

[0175] B3: Use the coordinate relationship module to record the measurement results of the sensor module 2 to obtain the actual straight-line distance; the coordinate relationship module calculates the distance error between the actual straight-line distance and the theoretical straight-line distance. In this specific embodiment, the actual straight-line distance is the distance in the Z-axis direction.

[0176] Specifically, the actual straight-line distance is obtained by the following formula:

[0177] ;

[0178] in, Indicates the actual straight-line distance between the current polishing track point and the previous polishing track point; represents the acceleration measured by sensor module 2 at the previous polishing track point, represents the speed measured by sensor module 2 at the previous polishing track point, represents the measurement time of sensor module 2. The distance error is obtained by the following formula: :

[0179] .

[0180] B4: Control the magnetorheological processing module to process the test optical element 7, and obtain the second conversion relationship through the conversion relationship module.

[0181] Step B4 includes the following steps:

[0182] B41. Under different polishing gaps, the liquid pump speed of the liquid pump 10 is changed, and the polishing wheel 9 is controlled to process different positions of the test optical element 7 at different polishing gaps. The removal function volume removal rate of each polishing trajectory point under different polishing gaps is calculated to obtain a fifth conversion relationship between the removal function volume removal rate and the liquid pump speed:

[0183] ;

[0184] in, Indicates the liquid pump speed, The removal function volume removal rate is shown. Indicates the fifth conversion relationship; in this specific embodiment, specifically controlling the polishing wheel 9 to perform fixed-point processing on the test optical element 7 for a period of time with different polishing gaps;

[0185] B42: Keeping the liquid pump speed constant, control the polishing wheel 9 to perform fixed-point processing at different positions of the test optical element 7 with different polishing gaps, calculate the volume removal rate of the removal function at each polishing trajectory point, and obtain the sixth conversion relationship between the volume removal rate of the removal function and the polishing gap:

[0186] ;

[0187] in, Indicates the polishing gap, Indicates the fourth conversion relationship; in this specific embodiment, specifically controlling the polishing wheel 9 to perform fixed-point processing on the test optical element 7 for a period of time with different polishing gaps;

[0188] B43: Obtain the second conversion relationship based on the fifth conversion relationship and the sixth conversion relationship, namely:

[0189] ;

[0190] in, Indicates the second conversion relationship.

[0191] B5: Setting a distance error threshold, a maximum control value, and a maximum liquid pump speed. Based on the distance error, the distance error threshold, and the maximum control value, combined with the second conversion relationship and the maximum liquid pump speed, the optical element 6 to be processed is processed. During the processing, the speed of the liquid pump 10 is controlled in real time by the real-time control module. The distance error threshold, the maximum control value, and the maximum liquid pump speed are adaptively set based on actual conditions and are not limited in this embodiment.

[0192] In step B5, when the polishing wheel 9 is at the When at the polishing trajectory point, the current distance error Distance error threshold Compare:

[0193] like , then the current liquid pump speed is not to regulate;

[0194] like , then the current liquid pump speed To regulate:

[0195] If the current liquid pump speed Less than the maximum liquid pump speed When , current liquid pump speed Adjust according to the following formula:

[0196] ;

[0197] If the current liquid pump speed Greater than or equal to the maximum liquid pump speed When , current liquid pump speed Adjust to .

[0198] In this specific embodiment, the amount of discrete data corresponding to different polishing gaps obtained experimentally is limited. The polishing gap actually measured during processing may not be equal to the polishing gap data value obtained experimentally. The solution is to use the closest data, that is, the rounding principle. For example: the removal function volume removal rate MRR and liquid pump speed corresponding to polishing gaps of 1mm and 2mm were obtained experimentally. The fifth conversion relationship between them is used to obtain the corresponding second conversion relationship, but the polishing gap during the processing is 1.6mm. At this time, the sixth conversion relationship is used to calculate the 2mm removal function volume removal rate MRR.

[0199] The fitting process in the above specific embodiment includes, but is not limited to, importing discrete data into Matlab software, performing data fitting using Matlab's polyfit fitting command, and solving the respective transformation relationships. Polyfit fitting command is a basic general command in Matlab software. This method can more intuitively see the corresponding relationship between correlations and the corresponding function curve.

[0200] It should be understood that the various forms of the processes shown above can be used to reorder, add, or delete steps. For example, the steps described in the present disclosure can be performed in parallel, sequentially, or in a different order, as long as the desired results of the technical solutions disclosed in the present disclosure can be achieved. This is not limited herein.

[0201] The above specific embodiments do not limit the scope of protection of the present invention. Those skilled in the art will appreciate that various modifications, combinations, sub-combinations, and substitutions may be made based on design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention are intended to be included within the scope of protection of the present invention.

Claims

1. A magnetorheological polishing device that adjusts the processing speed based on a sensor, characterized by: The system comprises a laser tracker, a control unit, a robot, a magnetorheological processing module, and a sensor module; the magnetorheological processing module is arranged at the free end of the robot, and the robot drives the magnetorheological processing module to process the optical element; the sensor module is arranged on the magnetorheological processing module; the laser tracker cooperates with a target ball arranged on the magnetorheological processing module to measure the spatial coordinates of the sensor module and the working point of the polishing wheel in the magnetorheological processing module; The interior of the control unit includes: A coordinate relationship module is used to integrate and calculate the spatial coordinates collected by the laser tracker and the position information collected by the sensor module to obtain a distance error and output integrated position information; a conversion relationship module, configured to fit the rotational speed of the polishing wheel in the magnetorheological processing module with the polishing gap of the polishing wheel to obtain a first conversion relationship, and to fit the rotational speed of the liquid pump in the magnetorheological processing module with the polishing gap to obtain a second conversion relationship; A real-time control module is used to adjust the rotation speed of the polishing wheel according to the integrated position information and the first conversion relationship, and / or adjust the rotation speed of the liquid pump according to the integrated position information and the second conversion relationship, so as to maintain the stability of the removal function when processing the optical element.

2. The magnetorheological polishing equipment according to claim 1, characterized in that: The magnetorheological processing module also includes a transmission belt, a polishing motor, a nozzle, a magnet and a magnetorheological mounting frame; wherein, The magnetorheological mounting frame is arranged on the free end of the robot, and the polishing wheel is arranged on the magnetorheological mounting frame; The polishing motor is arranged on the magnetorheological mounting frame and is connected to the bearing of the polishing wheel through the transmission belt, so that the polishing motor controls the rotation of the polishing wheel and changes the speed of the polishing wheel; The nozzle is arranged on the magnetorheological mounting frame along the rotation direction of the polishing wheel, and the liquid pump delivers magnetorheological fluid to the nozzle; The magnet is arranged on the magnetorheological mounting frame and close to the working point of the polishing wheel, so that the magnetorheological fluid is affected by the magnetic field strength of the magnet and changes the stiffness of the magnetorheological fluid; The sensor module is arranged on the magnetorheological mounting frame, and the laser tracker measures the spatial coordinates of the sensor module through the target sphere.

3. The magnetorheological polishing equipment according to claim 2, characterized in that: The sensor module includes an acceleration sensor; the laser tracker, the sensor module, the robot, the polishing motor and the liquid pump are respectively connected to the control unit to form respective communication lines, so that the control unit receives and sends signals through the corresponding communication lines.

4. A magnetorheological polishing method based on polishing wheel speed, based on the magnetorheological polishing device with sensor-based processing speed adjustment according to any one of claims 1 to 3, characterized in that: The following steps are involved: A1: Using the laser tracker to obtain the first coordinate of the sensor module and the second coordinate of the polishing wheel working point; using the coordinate relationship module to calculate the coordinate transformation relationship based on the two coordinates; A2: using the coordinate relationship module, through the coordinate conversion relationship, converting the first theoretical coordinates of the working point of the polishing wheel at different polishing trajectory points into the second theoretical coordinates of the sensor module, and obtaining the theoretical straight-line distance based on the current second theoretical coordinate and the previous second theoretical coordinate; A3: Using the coordinate relationship module to record the measurement results of the sensor module to obtain an actual straight-line distance; the actual straight-line distance and the theoretical straight-line distance are calculated by the coordinate relationship module to obtain a distance error; A4: controlling the magnetorheological processing module to process the test optical element, and obtaining the first conversion relationship through the conversion relationship module; A5: Set a distance error threshold, a maximum control value, and a maximum polishing wheel speed; based on the distance error, the distance error threshold, and the maximum control value, combined with the first conversion relationship and the maximum polishing wheel speed, process the optical element to be processed, and during the processing, control the polishing wheel speed in real time through the real-time control module.

5. The magnetorheological polishing method based on polishing wheel speed according to claim 4, characterized in that: In step A1, the laser tracker obtains the coordinates of no less than four positions on the sensor module through the target sphere, and obtains the first coordinates by calculation. ; The laser tracker obtains the coordinates of no less than 10 different positions on the outer surface of the polishing wheel through the target ball, and then calculates the coordinates of the center point of the polishing wheel. , the straight line passing through the coordinates of the center point is: ； in, A normal vector of the line representing the coordinates of the center point; By solving the following equations, the spatial coordinate corresponding to the minimum value of the Z-axis coordinate is used as the second coordinate : ； in, Indicates the radius of the polishing wheel; The coordinate transformation relationship is obtained by combining the second coordinate and the first coordinate: ； in, Represents the coordinate transformation relationship.

6. The magnetorheological polishing method based on polishing wheel speed according to claim 5, characterized in that: In step A2, the theoretical straight-line distance is obtained by the following formula: ； in, Indicates the theoretical straight-line distance between the current polishing track point and the previous polishing track point, Indicates the Z coordinate in the current second theoretical coordinate, Indicates the Z coordinate in the previous second theoretical coordinate.

7. The magnetorheological polishing method based on polishing wheel speed according to claim 6, characterized in that: In step A3, the actual straight-line distance is obtained by the following formula: ； in, Indicates the actual straight-line distance between the current polishing track point and the previous polishing track point; represents the acceleration measured by the sensor module at the previous polishing track point, represents the speed measured by the sensor module at the previous polishing track point, Represents the measurement time of the sensor module; and then the distance error is obtained by the following formula : 。 8. The magnetorheological polishing method based on polishing wheel speed according to claim 7, characterized in that: Step A4 includes the following steps: A41: Under different polishing gaps, the polishing wheel is controlled to process the test optical element at different polishing wheel speeds, and the volume removal rate of the removal function at each polishing track point under different polishing gaps is calculated to obtain a third conversion relationship between the volume removal rate of the removal function and the polishing wheel speed: ； in, Indicates the polishing wheel speed, represents the volume removal rate of the removal function, represents the third conversion relationship; A42: Maintaining the polishing wheel rotation speed, controlling the polishing wheel to process different positions of the test optical element with different polishing gaps, calculating the volume removal rate of the removal function at each polishing trajectory point, and obtaining a fourth conversion relationship between the volume removal rate of the removal function and the polishing gap: ； in, represents the polishing gap, represents the fourth conversion relationship; A43: Obtain the first conversion relationship according to the third conversion relationship and the fourth conversion relationship, that is: ； in, Indicates the first conversion relationship.

9. The magnetorheological polishing method based on polishing wheel speed according to claim 8, characterized in that: In step A5, when the polishing wheel is at the When polishing trajectory points, the current distance error Distance error threshold Compare: like , then the current polishing wheel speed is not to regulate; like , then the current polishing wheel speed To regulate: If the current polishing wheel speed Less than the maximum polishing wheel speed When the real-time control module is based on the first conversion relationship Current polishing wheel speed Adjust according to the following formula; ； If the current polishing wheel speed Greater than or equal to the maximum polishing wheel speed When the current polishing wheel speed Adjust to .

10. A magnetorheological polishing method based on liquid pump speed, based on the magnetorheological polishing device with sensor-based processing speed adjustment according to any one of claims 1 to 3, characterized in that: The following steps are involved: B1: using the laser tracker to obtain the first coordinate of the sensor module and the second coordinate of the polishing wheel working point; using the coordinate relationship module to calculate the coordinate transformation relationship based on the two coordinates; B2: using the coordinate relationship module to convert the first theoretical coordinates of the working point of the polishing wheel at different polishing track points into the second theoretical coordinates of the sensor module through the coordinate conversion relationship, and obtaining the theoretical straight-line distance based on the current second theoretical coordinate and the previous second theoretical coordinate; B3: Using the coordinate relationship module to record the measurement results of the sensor module to obtain an actual straight-line distance; the actual straight-line distance and the theoretical straight-line distance are calculated by the coordinate relationship module to obtain a distance error; B4: controlling the magnetorheological processing module to process the test optical element, and obtaining the second conversion relationship through the conversion relationship module; B5: Setting a distance error threshold, a maximum control value, and a maximum liquid pump speed; processing the optical element to be processed based on the distance error, the distance error threshold, and the maximum control value, combined with the second conversion relationship and the maximum liquid pump speed, and performing real-time control of the liquid pump speed through the real-time control module during the processing.

11. The magnetorheological polishing method based on liquid pump speed according to claim 10, characterized in that: In step B1, the laser tracker obtains the coordinates of no less than four positions on the sensor module through the target sphere, and obtains the first coordinates by calculation. ; The laser tracker obtains the coordinates of no less than 10 different positions on the outer surface of the polishing wheel through the target ball, and then calculates the coordinates of the center point of the polishing wheel. , the straight line passing through the coordinates of the center point is: ； in, A normal vector of the line representing the coordinates of the center point; By solving the following equations, the spatial coordinate corresponding to the minimum value of the Z-axis coordinate is used as the second coordinate : ； in, Indicates the radius of the polishing wheel; The coordinate transformation relationship is obtained by combining the second coordinate and the first coordinate: ； in, Represents the coordinate transformation relationship.

12. The magnetorheological polishing method based on liquid pump speed according to claim 11, characterized in that: In step B2, the theoretical straight-line distance is obtained by the following formula: ； in, Indicates the theoretical straight-line distance between the current polishing track point and the previous polishing track point, Indicates the Z coordinate in the current second theoretical coordinate, Indicates the Z coordinate in the previous second theoretical coordinate.

13. The magnetorheological polishing method based on liquid pump speed according to claim 12, characterized in that: In step B3, the actual straight-line distance is obtained by the following formula: ； in, Indicates the actual straight-line distance between the current polishing track point and the previous polishing track point; represents the acceleration measured by the sensor module at the previous polishing track point, represents the speed measured by the sensor module at the previous polishing track point, Represents the measurement time of the sensor module; the distance error is obtained by the following formula : 。 14. The magnetorheological polishing method based on liquid pump speed according to claim 13, characterized in that: Step B4 includes the following steps: B41: Under different polishing gaps, changing the liquid pump speed of the liquid pump, controlling the polishing wheel to process different positions of the test optical element at different polishing gaps, and calculating the removal function volume removal rate of each polishing trajectory point under different polishing gaps, and obtaining a fifth conversion relationship between the removal function volume removal rate and the liquid pump speed: ； in, represents the liquid pump speed, represents the volume removal rate of the removal function, represents the fifth conversion relationship; B42: Maintaining the liquid pump speed constant, controlling the polishing wheel to process different positions of the test optical element with different polishing gaps, calculating the volume removal rate of the removal function at each polishing trajectory point, and obtaining a sixth conversion relationship between the volume removal rate of the removal function and the polishing gap: ； in, represents the polishing gap, represents the fourth conversion relationship; B43: Obtain the second conversion relationship according to the fifth conversion relationship and the sixth conversion relationship, namely: ； in, Indicates the second conversion relationship.

15. The magnetorheological polishing method based on liquid pump speed according to claim 14, characterized in that: In step B5, when the polishing wheel is at the When at the polishing trajectory point, the current distance error Distance error threshold Compare: like , then the current liquid pump speed is not to regulate; like , then the current liquid pump speed To regulate: If the current liquid pump speed Less than the maximum liquid pump speed When the current liquid pump speed Adjust according to the following formula: ； If the current liquid pump speed Greater than or equal to the maximum liquid pump speed When the current liquid pump speed Adjust to .

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