Magnetorheological polishing equipment and method based on sensor adjustment

Abstract

The present invention relates to the field of optical processing technology, and in particular to a magnetorheological polishing device and method based on sensor adjustment. The device comprises a laser tracker, a control unit, a robot, a magnetorheological processing module, and a sensor module. The magnetorheological processing module is arranged at the free end of the robot, and the robot drives the magnetorheological processing module to process an optical element to be processed. The sensor module is arranged on the magnetorheological processing module. The laser tracker cooperates with a target ball to measure the spatial coordinates of the sensor module and the working points of the polishing wheel in the magnetorheological processing module. In the method, the laser tracker and the sensor module cooperate to measure the posture of the robot, the position of the magnetorheological processing module, and the real-time changes of the removal function during processing, and the supply system, nozzle, and actuator in the magnetorheological processing module are controlled in real time, thereby achieving real-time constant control of the removal function of the optical element to be processed.

Description

Technical Field

[0001] The present invention belongs to the technical field of optical processing, and in particular relates to a magnetorheological polishing device and method based on sensor adjustment. Background Art

[0002] Magnetorheological finishing (MRF) is an advanced optical manufacturing technology that has developed in recent years. It offers numerous advantages, including stable removal function, controllable edge effects, minimal subsurface damage, no photocopying, strong reshaping capabilities, and high machining accuracy. Consequently, MRF has garnered widespread attention in high-precision optical processing. Existing MRF machining centers primarily integrate MRF modules onto CNC machine tools. However, CNC machine tools have limitations (such as low degrees of freedom, large footprint, and high cost) that limit the deviation of aspheric surfaces and hinder precise position control along the surface normal.

[0003] In response to these shortcomings of CNC machine tools, researchers have introduced six-degree-of-freedom industrial robots into the field of optical processing in recent years. Six-degree-of-freedom industrial robots have the advantages of high degrees of freedom, small footprint, large processing range, and low cost, which make up for the shortcomings of CNC machine tools. Therefore, when the magnetorheological polishing module is integrated into the industrial robot, high-precision processing of large-aperture complex curved optical components can be achieved in theory. However, due to the influence of factors such as processing, assembly, load, trajectory planning, and reduction ratio, the execution accuracy of the robot's free end is low, and the polishing gap varies greatly during the processing. At the same time, magnetorheological polishing technology is an optical processing technology with high certainty of the removal function. During the polishing process, the requirements for the change of the polishing gap are high. Generally, the polishing gap of the magnetorheological CNC machining center varies in tens of microns (PV<0.1mm), while the trajectory accuracy of common commercial robots is generally in the sub-millimeter to millimeter range. This leads to large changes in the polishing gap during the processing, reduces the certainty of the removal function, and affects the final processing accuracy. Therefore, the motion accuracy of the current commercial large-scale six-degree-of-freedom industrial robots often cannot meet the requirements of magnetorheological polishing technology for the change of the removal function during high-precision polishing.

[0004] To address the issue of low robot motion precision, real-time control solutions for constant-force grinding and polishing have become a research hotspot. Force-position control has become a common method for controlling constant-force grinding and polishing in robots. A common application involves placing a force sensor between the machining tool and the robot. The force sensor is first calibrated with gravity to ensure accurate measurement. The position error is calculated by measuring force changes. This position error is then compensated for using the robot itself or other motion compensation mechanisms to achieve constant-force control. High-efficiency machining of large-aperture optical components requires a magnetorheological machining module with large polishing wheels, which typically weigh hundreds of kilograms. However, for a magnetorheological machining module weighing hundreds of kilograms, the force variation caused by the robot's position error is only tens of Newtons. High-precision machining requires maintaining a constant force of a few Newtons or even a fraction of a Newton. This requires measurement equipment such as force sensors to achieve an absolute accuracy of one part per ten thousand. Furthermore, the force sensor must be able to operate at varying speeds and positions. Force sensors that meet these requirements are often extremely expensive, significantly increasing the cost of the equipment. Summary of the Invention

[0005] In view of this, the present invention aims to provide a magnetorheological polishing device and method based on sensor adjustment, which uses a laser tracker and a sensor module to measure the robot's posture during processing, the position of the magnetorheological processing module, and the real-time changes of the removal function during processing, and to perform real-time regulation of the supply system, nozzle and actuator in the magnetorheological processing module, thereby realizing real-time constant control of the removal function of the optical element.

[0006] To achieve the above object, the technical solution created by the present invention is implemented as follows:

[0007] A magnetorheological polishing device based on sensor adjustment includes a laser tracker, a control unit, an actuator group, a robot, a magnetorheological processing module and a sensor module; wherein the actuator group is arranged at the free end of the robot, and the magnetorheological processing module is arranged at the output end of the actuator group, so that the robot and the actuator group drive the magnetorheological processing module to process the optical element; the sensor module is arranged on the magnetorheological processing module; the laser tracker cooperates with the target ball arranged on the magnetorheological processing module to measure the spatial coordinates of the working points of the sensor module and the polishing wheel in the magnetorheological processing module; the control unit includes a coordinate relationship module for integrating and calculating the spatial coordinates collected by the laser tracker and the position information collected by the sensor module , outputs the integrated position information; a conversion relationship module is used to fit the first position of the supply system in the magnetorheological processing module with the polishing gap of the polishing wheel to obtain a first conversion relationship, and to fit the second position of the nozzle in the magnetorheological processing module with the polishing gap to obtain a second conversion relationship; a processing program module is used to obtain a processing program according to the removal function generated when the magnetorheological processing equipment processes the optical element, and import the processing program into the magnetorheological processing equipment; a real-time control module is used to adjust the actuator group according to the integrated position information, or adjust the supply system according to the integrated position information and the first conversion relationship, or adjust the nozzle according to the integrated position information and the second conversion relationship, so as to keep the removal function stable when processing the optical element.

[0008] Furthermore, the magnetorheological processing module also includes a transmission belt, a polishing motor, a magnet and a magnetorheological mounting frame; wherein, the magnetorheological mounting frame is arranged on the output end of the actuator group, and the polishing wheel is arranged on the magnetorheological mounting frame; the polishing motor is arranged on the magnetorheological mounting frame and is connected to the bearing of the polishing wheel through a transmission belt, so that the polishing motor controls the rotation of the polishing wheel; the nozzle is installed on the magnetorheological mounting frame along the rotation direction of the polishing wheel through the nozzle mounting seat, and the nozzle mounting seat adjusts the installation angle of the nozzle, thereby changing the position of the nozzle mouth of the nozzle; the supply system delivers magnetorheological fluid to the nozzle; the magnet is arranged on the magnetorheological mounting frame and close to the working point of the polishing wheel, so that the magnetorheological fluid is affected by the magnetic field strength of the magnet to change the stiffness of the magnetorheological fluid; the sensor module is arranged on the magnetorheological mounting frame.

[0009] Furthermore, the supply system includes a liquid pump, a supply mounting bracket, a supply motor and a screw; wherein, the supply motor and the screw are arranged on the supply mounting bracket, so that the supply motor drives the screw to rotate; the liquid pump is arranged on the nut of the screw, so that the screw drives the liquid pump to move, thereby changing the first position; the liquid pump transports magnetorheological fluid to the nozzle through a pipeline.

[0010] Furthermore, the nozzle mounting seat includes a fixing frame, a nozzle adjustment motor, a push rod and a nozzle support frame; wherein, the fixing frame is arranged on the magnetorheological mounting frame, and an arc slide rail is arranged on the inner side wall of the fixing frame; the nozzle adjustment motor is arranged on the magnetorheological mounting frame, and one end of the push rod passes through the fixing frame and is connected to the nozzle adjustment motor, so that the nozzle adjustment motor drives the push rod to push the slider on the arc slide rail; one end of the nozzle support frame is arranged on the slider, and the nozzle is connected to the other end of the nozzle support frame, so that the nozzle adjustment motor drives the push rod to push the slider, and then the nozzle support frame drives the nozzle to move, thereby completing the adjustment of the second position.

[0011] Furthermore, the laser tracker, sensor module, robot, actuator assembly, nozzle mounting seat and supply system are respectively connected to the control unit to form respective communication lines, so that the control unit receives and sends signals through the corresponding communication lines.

[0012] A magnetorheological polishing method with supply system position adjustment, based on the magnetorheological polishing device based on sensor adjustment provided by the present invention, comprises the following steps:

[0013] A1: Use a laser tracker to obtain the first coordinate of the sensor module and the second coordinate of the polishing wheel working point; use the coordinate relationship module to calculate the coordinate transformation relationship based on the two coordinates;

[0014] A2: Using the coordinate relationship module, the first theoretical coordinates of the working point of the polishing wheel at different polishing trajectory points are converted into the second theoretical coordinates of the sensor module through the coordinate transformation relationship, and the theoretical straight-line distance is obtained based on the current second theoretical coordinate and the previous second theoretical coordinate;

[0015] A3: Use the coordinate relationship module to record the measurement results of the sensor module to obtain the actual straight-line distance. The coordinate relationship module is used to calculate the distance error between the actual straight-line distance and the theoretical straight-line distance.

[0016] A4: Controlling the magnetorheological processing module to process the test optical element, and obtaining a first conversion relationship through the conversion relationship module;

[0017] A5: Set a distance error threshold, a maximum control value, and a maximum first position; process the optical element to be processed based on the distance error, the distance error threshold, and the maximum control value, combined with the first conversion relationship and the maximum first position, and perform real-time control of the first position through the real-time control module during the processing.

[0018] Furthermore, in step A1, the laser tracker obtains the coordinates of no less than 4 positions on the sensor module through the target ball, and obtains the first coordinate by calculation. ;

[0019] The laser tracker obtains the coordinates of no less than 10 different positions on the outer surface of the polishing wheel through the target ball, and then calculates the coordinates of the center point of the polishing wheel. , the straight line passing through the center point coordinates is:

[0020] ;

[0021] in, The normal vector of the line representing the coordinates of the center point;

[0022] By solving the following equations, the spatial coordinate corresponding to the minimum value of the Z-axis coordinate is used as the second coordinate :

[0023] ;

[0024] in, Indicates the radius of the polishing wheel;

[0025] The coordinate transformation relationship is obtained by combining the second coordinate with the first coordinate:

[0026] ;

[0027] in, Represents the coordinate transformation relationship.

[0028] Furthermore, in step A2, the theoretical straight-line distance is obtained by the following formula:

[0029] ;

[0030] in, Indicates the theoretical straight-line distance between the current polishing track point and the previous polishing track point, Indicates the Z coordinate in the current second theoretical coordinate, Indicates the Z coordinate in the previous second theoretical coordinate.

[0031] Furthermore, in step A3, the actual straight-line distance is obtained by the following formula:

[0032] ;

[0033] in, Indicates the actual straight-line distance between the current polishing track point and the previous polishing track point; Represents the acceleration measured by the sensor module at the previous polishing track point, Represents the speed measured by the sensor module at the previous polishing track point, Represents the measurement time of the sensor module; the distance error is obtained by the following formula :

[0034] .

[0035] Furthermore, step A4 specifically includes the following steps:

[0036] A41: Under different polishing gaps, the position of the nozzle opening relative to the polishing wheel remains unchanged, the first position is changed alone, and processing is performed at different positions of the test optical element. The removal function volume removal rate of each polishing trajectory point is calculated, and the fourth conversion relationship between the removal function volume removal rate and the first position is obtained:

[0037] ;

[0038] in, Indicates the first position, represents the removal function volume removal rate, Indicates the fourth conversion relationship;

[0039] A42: Keeping the first position unchanged, control the polishing wheel to process different positions of the test optical element with different polishing gaps, and calculate the volume removal rate of the removal function at each polishing trajectory point to obtain the fifth conversion relationship between the volume removal rate of the removal function and the polishing gap:

[0040] ;

[0041] in, Indicates the polishing gap, Indicates the fifth conversion relationship;

[0042] A43: According to the fourth conversion relationship and the fifth conversion relationship, the first conversion relationship is obtained:

[0043] ;

[0044] in, Indicates the first conversion relationship.

[0045] Further, in step A5, when the polishing wheel is at the When polishing trajectory points, the current distance error Distance error threshold Compare:

[0046] like , then the current first position is not Make adjustments;

[0047] like , then for the current first position To regulate:

[0048] If the current first position Less than the maximum first position When the current first position Adjust according to the following formula:

[0049]

[0050] If the current first position Greater than or equal to the maximum first position When the current first position Adjust to .

[0051] A nozzle-adjustable magnetorheological polishing method, based on the sensor-adjustable magnetorheological polishing device provided by the present invention, comprises the following steps:

[0052] B1: Use a laser tracker to obtain the first coordinate of the sensor module and the second coordinate of the polishing wheel working point; use the coordinate relationship module to calculate the coordinate transformation relationship based on the two coordinates;

[0053] B2: Using the coordinate relationship module, the first theoretical coordinates of the working point of the polishing wheel at different polishing trajectory points are converted into the second theoretical coordinates of the sensor module through the coordinate conversion relationship, and the theoretical straight-line distance is obtained based on the current second theoretical coordinate and the previous second theoretical coordinate;

[0054] B3: Use the coordinate relationship module to record the measurement results of the sensor module to obtain the actual straight-line distance; the actual straight-line distance and the theoretical straight-line distance are calculated using the coordinate relationship module to obtain the distance error;

[0055] B4: Controlling the magnetorheological processing module to process the test optical element, and obtaining a second conversion relationship through the conversion relationship module;

[0056] B5: Setting a distance error threshold, a control maximum value, and a maximum second position; processing the optical element to be processed based on the distance error, the distance error threshold, and the control maximum value, combined with the second conversion relationship and the maximum second position, and performing real-time control of the nozzle through the real-time control module during the processing.

[0057] Furthermore, in step B1, the laser tracker obtains the coordinates of no less than four positions on the sensor module through the target ball, and obtains the first coordinate by calculation. ;

[0058] The laser tracker obtains the coordinates of no less than 10 different positions on the outer surface of the polishing wheel through the target ball, and then calculates the coordinates of the center point of the polishing wheel. , the straight line passing through the center point coordinates is:

[0059] ;

[0060] in, The normal vector of the line representing the coordinates of the center point;

[0061] By solving the following equations, the spatial coordinate corresponding to the minimum value of the Z-axis coordinate is used as the second coordinate :

[0062] ;

[0063] in, Indicates the radius of the polishing wheel;

[0064] The coordinate transformation relationship is obtained by combining the second coordinate with the first coordinate:

[0065] ;

[0066] in, Represents the coordinate transformation relationship.

[0067] Furthermore, in step B2, the theoretical straight-line distance is obtained by the following formula:

[0068]

[0069] in, Indicates the theoretical straight-line distance between the current polishing track point and the previous polishing track point, Indicates the Z coordinate in the current second theoretical coordinate, Indicates the Z coordinate in the previous second theoretical coordinate.

[0070] Furthermore, in step B3, the actual straight-line distance is obtained by the following formula:

[0071] ;

[0072] in, Indicates the actual straight-line distance between the current polishing track point and the previous polishing track point; Represents the acceleration measured by the sensor module at the previous polishing track point, Represents the speed measured by the sensor module at the previous polishing track point, Represents the measurement time of the sensor module; the distance error is obtained by the following formula :

[0073] .

[0074] Furthermore, step B4 includes the following steps:

[0075] B41: Under different polishing gaps, the second position is changed, and processing is performed at different positions of the test optical element with different polishing gaps. The removal function volume removal rate of each polishing track point under different polishing gaps is calculated, and the sixth conversion relationship between the removal function volume removal rate and the second position is obtained:

[0076] ;

[0077] in, Indicates the second position, represents the removal function volume removal rate, Indicates the sixth conversion relationship;

[0078] B42: Control the robot to drive the polishing wheel to process different positions of the test optical element with different polishing gaps, and calculate the removal function volume removal rate of each polishing trajectory point to obtain the seventh conversion relationship between the removal function volume removal rate and the polishing gap:

[0079] ;

[0080] in, Indicates the polishing gap, Indicates the seventh conversion relationship;

[0081] B44: Obtain a second conversion relationship based on the sixth conversion relationship and the seventh conversion relationship, namely:

[0082] ;

[0083] in, Indicates the second conversion relationship.

[0084] Further, in step B5, when the polishing wheel is at the When there are 3 polishing track points, the distance error Distance error threshold Compare:

[0085] like , then the current second position is not to regulate;

[0086] like , then for the current second position Control: If the current second position Less than the maximum second position When the current second position Control is performed according to the following formula:

[0087] ;

[0088] If the current second position Greater than or equal to the maximum second position When the current second position Adjust to .

[0089] An actuator-regulated magnetorheological polishing method, based on the sensor-regulated magnetorheological polishing device provided by the present invention, comprises the following steps:

[0090] C1: Use a laser tracker to obtain the first coordinate of the sensor module and the second coordinate of the polishing wheel working point; use the coordinate relationship module to calculate the coordinate transformation relationship based on the two coordinates;

[0091] C2: Using the coordinate relationship module, through the coordinate transformation relationship, the first theoretical coordinates of the working point of the polishing wheel at different polishing trajectory points are converted into the second theoretical coordinates of the sensor module, and the theoretical straight-line distance is obtained based on the current second theoretical coordinate and the previous second theoretical coordinate;

[0092] C3: Use the coordinate relationship module to record the measurement results of the sensor module to obtain the actual straight-line distance; the actual straight-line distance and the theoretical straight-line distance are calculated through the coordinate relationship module to obtain the distance error;

[0093] C4: Setting the distance error threshold and the maximum control value; determining to control the output displacement of the actuator group during the processing according to the distance error, the distance error threshold and the maximum control value, and processing the optical element to be processed.

[0094] Furthermore, in step C1, the laser tracker obtains the coordinates of no less than four positions on the sensor module through the target ball, and obtains the first coordinate by calculation. ;

[0095] The laser tracker obtains the coordinates of no less than 10 different positions on the outer surface of the polishing wheel through the target ball, and then calculates the coordinates of the center point of the polishing wheel. , the straight line passing through the center point coordinates is:

[0096] ;

[0097] in, The normal vector of the line representing the coordinates of the center point;

[0098] By solving the following equations, the spatial coordinate corresponding to the minimum value of the Z-axis coordinate is used as the second coordinate :

[0099] ;

[0100] in, Indicates the radius of the polishing wheel;

[0101] The coordinate transformation relationship is obtained by combining the second coordinate with the first coordinate:

[0102] ;

[0103] in, Represents the coordinate transformation relationship.

[0104] Furthermore, in step C2, the theoretical straight-line distance is obtained by the following formula:

[0105] ;

[0106] in, Indicates the theoretical straight-line distance between the current polishing track point and the previous polishing track point, Indicates the Z coordinate in the current second theoretical coordinate, Indicates the Z coordinate in the previous second theoretical coordinate.

[0107] Furthermore, in step C3, the actual straight-line distance is obtained by the following formula:

[0108] ;

[0109] in, Indicates the actual straight-line distance between the current polishing track point and the previous polishing track point; Represents the acceleration measured by the sensor module at the previous polishing track point, Represents the speed measured by the sensor module at the previous polishing track point, represents the measurement time of the sensor module; the distance error is then obtained by the following formula:

[0110] ;

[0111] in, Indicates distance error.

[0112] Further, in step C4, when the polishing wheel is located at When polishing trajectory points, the current distance error , distance error threshold and control the maximum value Compare:

[0113] when , then the actuator group is not regulated;

[0114] when , then the actuator group is regulated:

[0115] like , the output displacement of the actuator group is the current distance error , the current polishing gap ,in, Indicates that the polishing wheel is located at Polishing gap at each polishing track point;

[0116] like , the output displacement of the actuator group is the maximum value of the control , the current polishing gap In step A2, the following formula is used to obtain:

[0117] ;

[0118] in, Indicates the theoretical straight-line distance between the current polishing track point and the previous polishing track point, Indicates the Z coordinate in the current second theoretical coordinate, Indicates the Z coordinate in the previous second theoretical coordinate.

[0119] Compared with the prior art, the present invention can achieve the following beneficial effects:

[0120] In the sensor-adjusted magnetorheological polishing equipment and method created by the present invention, the six-dimensional posture information of the robot during the measurement process is measured in real time by a laser tracker and a sensor module, and the supply system, nozzle and actuator in the magnetorheological processing module are controlled in real time, thereby realizing real-time constant control of the removal function change under multi-factor coupling during the processing of the optical element to be processed; at the same time, the acquisition of posture information does not need to rely on the actual processing process, and the posture error information of the processing equipment can be obtained during the processing trial run (in which magnetorheological fluid is not introduced and no processing effect is produced), and there is no need to place the measuring equipment at the lowest point of the polishing wheel, which will not affect the actual processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0121] The accompanying drawings, which constitute part of the present invention, are intended to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are intended to explain the present invention and do not constitute an undue limitation of the present invention. In the accompanying drawings:

[0122] Figure 1 A schematic structural diagram of a magnetorheological polishing device based on sensor adjustment according to an embodiment of the present invention at one viewing angle;

[0123] Figure 2 A schematic structural diagram of the magnetorheological polishing device based on sensor adjustment according to an embodiment of the present invention from another perspective;

[0124] Figure 3 A schematic structural diagram of the actuator according to an embodiment of the present invention;

[0125] Figure 4 A schematic diagram of the structure of the supply system according to an embodiment of the present invention;

[0126] Figure 5 A schematic structural diagram of a liquid pump according to an embodiment of the present invention;

[0127] Figure 6 This is a schematic structural diagram of the nozzle mounting seat described in an embodiment of the present invention.

[0128] Description of reference numerals:

[0129] 1. Robot; 2. Sensor module; 3. Laser tracker; 4. Control unit; 5. High-frequency actuator; 6. Laboratory bench; 7. Optical element to be processed; 8. Optical element to be tested; 9. Target ball; 10. Polishing wheel; 11. Supply system; 12. Nozzle; 13. Drive belt; 14. Polishing motor; 15. Magnet; 16. Magnetorheological mounting bracket; 17. Nozzle mounting base; 18. Liquid pump; 19. Supply mounting bracket; 20. Supply motor; 21. Lead screw; 22. Mounting plate. 23. Slide rail; 24. Liquid pump body; 25. Cooling chamber; 26. Magnetorheological fluid storage chamber; 27. Cooling water inlet; 28. Magnetorheological fluid inlet; 29. ​​Cooling water outlet; 30. Magnetorheological fluid outlet; 31. Nozzle support frame; 32. Nozzle adjustment motor; 33. Fixed frame; 34. Push rod; 35. Slider; 36. Arc slide rail; 37. Transition plate; 38. Cylinder body; 39. Cavity A; 40. Cavity B; 41. Oil scraper ring; 42. Connecting plate; 43. Moving piston. DETAILED DESCRIPTION

[0130] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and do not constitute a limitation of the present invention.

[0131] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0132] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second" and the like are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, features defined as "first", "second" and the like may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0133] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to internal connections between two components. Those skilled in the art can understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0134] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0135] like Figure 1 and Figure 2 As shown, the sensor-adjusted magnetorheological polishing apparatus described in an embodiment of the present invention includes a robot 1, a magnetorheological processing module, a sensor module 2, a laser tracker 3, a control unit 4, and an actuator assembly. The actuator assembly is mounted at the free end of the robot 1; the magnetorheological processing module is mounted at the output end of the actuator assembly, enabling the robot 1 and the actuator assembly to drive the magnetorheological processing module to process an optical element 7 to be processed or an optical element 8 to be tested, which is placed on a test bench 6. The sensor module 2 is mounted on the magnetorheological processing module, and the laser tracker 3 cooperates with a target sphere 9 mounted on the magnetorheological processing module to measure the spatial coordinates of the working points of the sensor module 2 and the polishing wheel 10 in the magnetorheological processing module. In this embodiment of the present invention, the laser tracker 3 is mounted on one side of the test bench 6, and the target sphere 9 is adjusted in position according to the needs of the measurement object. For example, when the spatial coordinates of the sensor module 2 need to be measured, the target sphere 9 is mounted at the corresponding position on the sensor module 2; when the polishing wheel 10 needs to be measured, the target sphere 9 is mounted at the corresponding position on the polishing wheel 10.

[0136] In the embodiment of the present invention, the actuator group is composed of two cascaded high-frequency actuators 5, that is, one high-frequency actuator 5 is installed on the output end of the other high-frequency actuator 5, so that the total output displacement of the actuator group is the sum of the output displacements of the two high-frequency actuators 5. In the embodiment of the present invention, the high-frequency actuator 5 is preferably an SG model static pressure linear cylinder produced by Jilin Huakong Testing Instrument Co., Ltd. The structure of each high-frequency actuator 5 is as follows: Figure 3 As shown, it includes a transition plate 37, a cylinder body 38, a cavity A 39, a cavity B 40, an oil scraper ring 41, a connecting plate 42, and a moving piston 43. The transition plate 37 is used to connect the free end flange of the robot 1 to the cylinder body 38 of the high-frequency actuator 5. The cavity A 39 and the cavity B 40 are used for the inflow and outflow of hydraulic oil. The oil scraper ring 41 is used to prevent the hydraulic oil from flowing out of the cylinder body 38. The moving piston 43 is used for position output. The connecting plate 42 is used to connect to the magnetorheological processing module or another high-frequency actuator 5, thereby outputting displacement to the magnetorheological processing module or another high-frequency actuator 5.

[0137] The control unit 4 internally includes a coordinate relationship module, a transformation relationship module, a processing program module, and a real-time control module. The coordinate relationship module is used to integrate and calculate the spatial coordinates collected by the laser tracker 3 and the position information collected by the sensor module 2, and output the integrated position information. The transformation relationship module fits the first position of the supply system 11 in the magnetorheological processing module with the polishing gap of the polishing wheel 10 to obtain a first transformation relationship, and fits the second position of the nozzle 12 in the magnetorheological processing module with the polishing gap to obtain a second transformation relationship. In this embodiment of the present invention, the first position of the supply system 11 is the vertical distance between the nozzle opening of the nozzle 12 and the working point of the supply system 11 (i.e., the liquid outlet of the supply system 11). A change in the vertical distance between the nozzle opening of the nozzle 12 and the working point of the supply system 11 causes a change in the flow rate, thereby causing a change in the removal function. The second position of the nozzle 12 is defined as the vertical distance between the nozzle opening of the nozzle 12 and the working point of the polishing wheel 10 (i.e., the lowest point when the polishing wheel 10 contacts the optical element 7 to be processed or the test optical element 8). The processing program module generates a processing program based on the removal function generated when the magnetorheological processing device processes the optical element and imports the processing program into the magnetorheological processing device. The real-time control module adjusts the supply system 11 based on the integrated position information and the first conversion relationship, adjusts the nozzle 12 based on the integrated position information and the second conversion relationship, or adjusts the actuator assembly based on the integrated position information to maintain the stability of the removal function during processing of the optical element 7 to be processed or the test optical element 8.

[0138] In the embodiment of the present invention, the structure of the supply system 11 is as follows Figures 1 to 4As shown, it includes a liquid pump 18, a supply mounting bracket 19, a supply motor 20 and a screw 21. The screw 21 and the nut with a ball thereon together constitute a ball screw. Among them, the supply motor 20 and the screw 21 are installed on the supply mounting bracket 19, and the output end of the supply motor 20 is connected to one end of the screw 21, so that the supply motor 20 drives the screw 21 to rotate. The liquid pump 18 is arranged on the nut of the screw 21, so that the screw 21 drives the liquid pump 18 to move, thereby changing the first position. The liquid pump 18 delivers magnetorheological fluid to the nozzle 12 through a pipeline. In an embodiment of the present invention, the liquid pump 18 is installed on the nut of the screw 21 through a mounting plate 22, so that the screw 21 drives the liquid pump 18 to move through the mounting plate 22. In addition, in order to avoid the installation fixing plate 22 causing the liquid pump 18 to deviate laterally, in an embodiment of the present invention, two slide rails 23 are preferably arranged on the supply mounting bracket 19 parallel to the lead screw 21, and the two slide rails 23 are respectively located on both sides of the lead screw 21. The installation fixing plate 22 is installed on the nut of the lead screw 21 and the sliders on the two slide rails 23. During the processing, when the supply motor 20 drives the lead screw 21 to rotate, the lead screw 21 cooperates with the two slide rails 23 to pull the installation fixing plate 22, thereby driving the liquid pump 18 to move along the lead screw 21.

[0139] The structure of the liquid pump 18 in the embodiment of the present invention is as follows Figure 5 As shown, the system comprises a liquid pump body 24, a cooling chamber 25, and a magnetorheological fluid storage chamber 26. The liquid pump body 24 uses a CFLC vertical multi-stage pump from Shanghai Dongfang Pump Industry Co., Ltd. to supply magnetorheological fluid; the cooling chamber 25 is primarily used to store cooling water and cool the magnetorheological fluid; and the magnetorheological fluid storage chamber 26 is primarily used to store magnetorheological fluid. When liquid pump 18 is operating, cooling water enters cooling chamber 25 from cooling water inlet 27, and magnetorheological fluid flows from magnetorheological fluid inlet 28 through magnetorheological fluid storage chamber 26 into liquid pump body 24. After cooling the magnetorheological fluid in cooling chamber 25, the cooling water is discharged from cooling water outlet 29. The cooled magnetorheological fluid is output from magnetorheological fluid outlet 30 and delivered to nozzle 12 through a pipeline. At this time, the outlet of supply system 11 is magnetorheological fluid outlet 30. Furthermore, the first position of supply system 11 is the vertical distance between the nozzle opening of nozzle 12 and magnetorheological fluid outlet 30. The speed of liquid pump 18 is adjusted by a motor. Changes in motor speed cause liquid pump 18 to change its speed.

[0140] The magnetorheological processing module also includes a transmission belt 13, a polishing motor 14, a magnet 15 and a magnetorheological mounting frame 16. The magnetorheological mounting frame 16 is fixed to the output end of the actuator group, and the polishing wheel 10 is mounted on the magnetorheological mounting frame 16. The polishing motor 14 is fixed to the magnetorheological mounting frame 16, and the output end of the polishing motor 14 is connected to the bearing of the polishing wheel 10 through the transmission belt 13, so that the polishing motor 14 controls the polishing wheel 10 to rotate. The manner in which the polishing motor 14 drives the polishing wheel 10 to rotate in the embodiment of the present invention can refer to the invention patent application with Chinese patent publication number CN118322074A, publication date July 12, 2024, and patent name "Self-rotating Polishing Module Processing System". The nozzle 12 is mounted on the magnetorheological mounting frame 16 along the rotation direction of the polishing wheel 10 through the nozzle mounting seat 17. The nozzle mounting seat 17 can adjust the installation angle of the nozzle 12, thereby changing the second position of the nozzle mouth of the nozzle 12. A supply system 11 delivers magnetorheological fluid to a nozzle 12 via a pipeline. A magnet 15 is mounted on a magnetorheological mounting frame 16 near the working point of the polishing wheel 10. The magnetic field strength of the magnetorheological fluid changes its stiffness, allowing the polishing wheel 10 to process the optical element 7 or test optical element 8 using the magnetorheological fluid with a certain stiffness. A sensor module 2 is mounted on the magnetorheological mounting frame 16, and a laser tracker 3 measures the spatial coordinates of the sensor module 2 using a target sphere 9.

[0141] The structure of the nozzle mounting seat 17 is as follows Figure 6 As shown. Figure 6 (a) shows a schematic structural diagram of the nozzle 12 when it is installed on the nozzle mounting seat 17. Figure 6 (b) in the figure shows a schematic diagram of the structure when the nozzle 12 is not installed on the nozzle mounting bracket 17. In the nozzle mounting bracket 17, the fixing bracket 33 is an L-shaped structure fixed to the magnetorheological mounting bracket 16. A circular arc slide 36 is arranged on the inner side wall of the fixing bracket 33. The nozzle adjustment motor 32 is mounted on the magnetorheological mounting bracket 16. One end of the push rod 34 passes through the bottom edge of the fixing bracket 33 and is connected to the output end of the nozzle adjustment motor 32. The nozzle adjustment motor 32 drives the push rod 34, which in turn pushes the slider 35 on the circular arc slide 36 along the circular arc slide 36. One end of the nozzle support bracket 31 is fixed to the slider 35, and the nozzle 12 is mounted on the other end of the nozzle support bracket 31. When the nozzle mounting bracket 17 is controlled to adjust the position of the nozzle 12, the nozzle adjustment motor 32 outputs a displacement, causing the push rod 34 to push the slider 35, which in turn causes the nozzle support bracket 31 to move the nozzle 12, thereby adjusting the nozzle 12 to the second position.

[0142] The robot 1, sensor module 2, laser tracker 3, supply system 11, actuator assembly, and nozzle mounting bracket 17 are each connected to the control unit 4 to form a respective communication circuit, enabling the control unit 4 to receive and send signals via the corresponding communication circuit. Specifically, the control unit 4 is in communication with the supply motor 20 via a circuit. During operation, the control unit 4 sends control instructions to the supply motor 20, which drives the screw 21 to rotate. The rotating screw 21 moves the mounting plate 22, thereby changing the vertical position of the liquid pump 18 and thus the first position of the supply system 11. The control unit 4 controls the hydraulic oil pressure within the high-frequency actuator 5, thereby controlling the extension and retraction of the moving piston 43, achieving position control of the magnetorheological processing module and thus changing the output of the actuator assembly. The control unit 4 controls the nozzle adjustment motor 32 to change the position of the nozzle support frame 31, which moves along the circular arc slide 36, thereby changing the second position of the nozzle 12.

[0143] Since a strong magnetic area is generated around the polishing wheel 10 during the polishing operation, the communication line avoids the strong magnetic area.

[0144] Based on the magnetorheological polishing equipment based on sensor adjustment described in the embodiment of the present invention, the embodiment of the present invention also provides a magnetorheological polishing method based on sensor adjustment, including a magnetorheological polishing method with supply system position adjustment, a magnetorheological polishing method with nozzle adjustment, and a magnetorheological polishing method with actuator adjustment.

[0145] Specific embodiment 1: The magnetorheological polishing method with supply system position adjustment described in this specific embodiment is based on the magnetorheological polishing device based on sensor adjustment described in the embodiment of the invention, combined with Figure 1 and Figure 2 ,as well as Figure 4 and Figure 5 , including the following steps:

[0146] A1: Use a laser tracker to obtain the first coordinate of the sensor module and the second coordinate of the polishing wheel working point; use the coordinate relationship module to calculate the coordinate transformation relationship through the two coordinates.

[0147] In step A1, in this specific embodiment, a cylindrical or rectangular acceleration sensor is used as the sensor module 2, and the coordinates of no less than four positions on the sensor module 2 are obtained by using the laser tracker 3 in conjunction with the target ball 9. The first coordinate is obtained by calculation. .

[0148] For the cylindrical acceleration sensor, the target ball 9 is placed at least three different positions on the cylindrical bottom of the cylindrical acceleration sensor and its spatial coordinates are measured using the laser tracker 3. The circle fitting function of the laser tracker 3 (this function is the basic function of the laser tracker) is used to obtain the XY coordinates of the cylindrical acceleration sensor. , based on the Z-axis coordinates of the target ball 9 at different positions Calculate the Z-axis coordinate of the bottom surface of the cylindrical accelerometer. , k represents the number of measurement points. The target ball 9 is placed at least three different positions on the top of the cylindrical acceleration sensor and its spatial coordinates are measured using the laser tracker 3. The Z-axis coordinates of the target ball 9 at different positions are Calculate the Z-axis coordinate of the top surface of the cylindrical accelerometer. , where j represents the number of measurement points, and the first coordinate of the cylindrical accelerometer is , r is the radius of the target sphere 9. In this specific embodiment, for the cylindrical acceleration sensor, 10 different positions are selected at the bottom and top thereof.

[0149] For the rectangular acceleration sensor, target balls 9 are placed at the bottom of the four sides of the rectangular acceleration sensor and their spatial coordinates are measured using a laser tracker 3. The coordinates of the nine points of the target ball are measured at the bottom of each side, and the bottom coordinates of the four sides of the rectangular acceleration sensor are obtained as follows: 、 、 、 , solve the XY axis coordinates of the rectangular acceleration sensor as , based on the Z-axis coordinates of the target ball 9 at different positions Calculate the Z-axis coordinate of the bottom surface of the rectangular accelerometer and get The target ball 9 is placed at least 3 different positions on the top of the rectangular acceleration sensor and its spatial coordinates are measured using a laser tracker 3. The Z-axis coordinates of the target ball 9 at different positions are Calculate the Z-axis coordinate of the top surface of the rectangular accelerometer. , the first coordinate of the rectangular acceleration sensor is In this specific embodiment, for the rectangular parallelepiped acceleration sensor, 10 different positions are selected on the top thereof.

[0150] The laser tracker 3 obtains the coordinates of no less than 10 different positions on the outer surface of the polishing wheel 10 through the target ball 9 (in this specific embodiment, the coordinates of 10 different positions are obtained). The coordinate calculation function of the laser tracker 3 itself can obtain the coordinates of the center point of the polishing wheel 10. , and the straight line passing through the center point coordinates is obtained through the teaching pendant of robot 1:

[0151] ;

[0152] in, The normal vector of the line representing the coordinates of the center point;

[0153] By solving the following equations, the spatial coordinate corresponding to the minimum value of the Z-axis coordinate is used as the second coordinate :

[0154] ;

[0155] in, Indicates the radius of the polishing wheel;

[0156] The coordinate transformation relationship is obtained by combining the second coordinate with the first coordinate:

[0157] ;

[0158] in, Represents the coordinate transformation relationship.

[0159] A2: Using the coordinate relationship module, the first theoretical coordinates of the working point of the polishing wheel 10 at different polishing trajectory points are converted into the second theoretical coordinates of the sensor module 2 through the coordinate transformation relationship. The theoretical straight-line distance is calculated based on the current second theoretical coordinate and the previous second theoretical coordinate. In this specific embodiment, the theoretical straight-line distance is the distance in the Z-axis direction.

[0160] In step A2, the theoretical straight-line distance is obtained by the following formula:

[0161] ;

[0162] in, Indicates the theoretical straight-line distance between the current polishing track point and the previous polishing track point, Indicates the Z coordinate in the current second theoretical coordinate, Indicates the Z coordinate in the previous second theoretical coordinate.

[0163] A3: Use the coordinate relationship module to record the measurement results of sensor module 2 to obtain the actual straight-line distance. The coordinate relationship module calculates the distance error between the actual straight-line distance and the theoretical straight-line distance. In this specific embodiment, the actual straight-line distance is the distance in the Z-axis direction.

[0164] In step A3, the actual straight-line distance is obtained by the following formula: :

[0165] ;

[0166] in, Indicates the actual straight-line distance between the current polishing track point and the previous polishing track point; represents the acceleration measured by sensor module 2 at the previous polishing track point, represents the speed measured by sensor module 2 at the previous polishing track point, Represents the measurement time of sensor module 2; and then the distance error is obtained by the following formula :

[0167] .

[0168] A4: Control the magnetorheological processing module to process the test optical element 8, and obtain a first conversion relationship through the conversion relationship module.

[0169] Step A4 specifically includes the following steps:

[0170] A41: Under different polishing gaps, the position of the nozzle opening of the nozzle 12 relative to the polishing wheel 10 is kept unchanged, the first position is changed alone, and processing is performed at different positions of the test optical element 8. The removal function volume removal rate of each polishing trajectory point is calculated to obtain a fourth conversion relationship between the removal function volume removal rate and the first position:

[0171] ;

[0172] in, Indicates the first position, represents the removal function volume removal rate, Indicates the fourth conversion relationship; in this specific embodiment, specifically, fixed-point processing is performed for a period of time at different positions of the test optical element 8;

[0173] A42: Control the polishing wheel 10 to process different positions of the test optical element 8 with different polishing gaps, and calculate the volume removal rate of the removal function at each polishing track point to obtain a fifth conversion relationship between the volume removal rate of the removal function and the polishing gap:

[0174] ;

[0175] in, Indicates the polishing gap, Indicates the fifth conversion relationship; in this specific embodiment, specifically, the polishing wheel 10 is controlled to perform fixed-point processing at different positions of the test optical element 8 for a period of time with different polishing gaps;

[0176] A43: According to the fourth conversion relationship and the fifth conversion relationship, the first conversion relationship is obtained:

[0177] ;

[0178] in, Indicates the first conversion relationship.

[0179] A5: Set a distance error threshold, a maximum control value, and a maximum first position. Based on the distance error, the distance error threshold, and the maximum control value, combined with the first conversion relationship and the maximum first position, the optical element 7 to be processed is processed. During processing, the first position is controlled in real time by the real-time control module. In this embodiment, the maximum first position is defined as the maximum vertical distance between the nozzle opening of the nozzle 12 and the working point of the supply system 11. The distance error threshold, the maximum control value, and the maximum liquid pump speed can be adaptively set based on actual conditions and are not limited in this embodiment.

[0180] In step A5, when the polishing wheel 10 is at the When polishing trajectory points, the current distance error Distance error threshold Compare:

[0181] like , then the current first position is not Make adjustments;

[0182] like , then for the current first position To regulate:

[0183] If the current first position Less than the maximum first position When , currently in first position Adjust according to the following formula:

[0184] ;

[0185] If the current first position Greater than or equal to the maximum first position When , currently in first position Adjust to .

[0186] In this specific embodiment, the amount of discrete data corresponding to different polishing gaps obtained experimentally is limited. The polishing gap actually measured during processing may not be equal to the polishing gap data value obtained experimentally. The solution is to use the closest data, that is, the rounding principle. For example: the removal function volume removal rate MRR corresponding to the polishing gap of 1mm and 2mm is obtained experimentally and the first position The fourth conversion relationship between them is used to obtain the corresponding first conversion relationship, but the polishing gap during the processing is 1.6mm. At this time, the fifth conversion relationship is used to calculate the 2mm removal function volume removal rate MRR.

[0187] Specific embodiment 2: The nozzle-adjusted magnetorheological polishing method described in this specific embodiment is based on the magnetorheological polishing device based on sensor adjustment described in the embodiment of the present invention, combined with Figure 1 、 Figure 2 and Figure 6 , including the following steps:

[0188] B1: Use the laser tracker 3 to obtain the first coordinate of the sensor module 2 and the second coordinate of the working point of the polishing wheel 10; and use the coordinate relationship module to calculate the coordinate conversion relationship through the two coordinates.

[0189] B2: Using the coordinate relationship module, the first theoretical coordinates of the working point of the polishing wheel 10 at different polishing trajectory points are converted into the second theoretical coordinates of the sensor module 2 through the coordinate conversion relationship. The theoretical straight-line distance is obtained based on the current second theoretical coordinate and the previous second theoretical coordinate. In this specific embodiment, the theoretical straight-line distance is the distance in the Z-axis direction.

[0190] B3: Use the coordinate relationship module to record the measurement results of sensor module 2 to obtain the actual straight-line distance; the actual straight-line distance and the theoretical straight-line distance are calculated through the coordinate relationship module to obtain the distance error.

[0191] The contents of steps B1 to B3 in this specific embodiment are consistent with those of steps A1 to A3 in specific embodiment 1, and are not repeated here.

[0192] B4: Control the magnetorheological processing module to process the test optical element 8, and obtain the second conversion relationship through the conversion relationship module.

[0193] Step B4 includes the following steps:

[0194] B41: Under different polishing gaps, the second position of the nozzle 12 is changed, and processing is performed at different positions of the test optical element 8 with different polishing gaps. The removal function volume removal rate of each polishing track point under different polishing gaps is calculated, and a sixth conversion relationship between the removal function volume removal rate and the second position of the nozzle 12 is obtained:

[0195] ;

[0196] in, represents the second position of the nozzle 12, represents the removal function volume removal rate, Indicates the sixth conversion relationship; in this specific embodiment, specifically, fixed-point processing is performed at different positions of the test optical element 8 for a period of time with different polishing gaps;

[0197] B42: Control the robot 1 to drive the polishing wheel 10 to process different positions of the test optical element 8 with different polishing gaps, and calculate the removal function volume removal rate of each polishing trajectory point to obtain the seventh conversion relationship between the removal function volume removal rate and the polishing gap:

[0198] ;

[0199] in, Indicates the polishing gap, Indicates the eighth conversion relationship; in this specific embodiment, specifically controlling the polishing wheel 10 to perform fixed-point processing on the test optical element 8 for a period of time with different polishing gaps;

[0200] B44: Obtain a second conversion relationship based on the sixth conversion relationship and the seventh conversion relationship, namely:

[0201] ;

[0202] in, Indicates the second conversion relationship.

[0203] B5: Setting a distance error threshold, a maximum control value, and a maximum second position. Based on the distance error, the distance error threshold, and the maximum control value, combined with the second conversion relationship and the maximum second position, the optical element 7 to be processed is processed. During the processing, the real-time control module controls the nozzle 12 in real time. The distance error threshold, the maximum control value, and the maximum second position are adaptively set based on actual conditions and are not limited in this embodiment.

[0204] When the polishing wheel 10 is at When polishing trajectory points, the current distance error Distance error threshold Compare:

[0205] like , then the current second position is not to regulate;

[0206] like , then for the current second position To regulate:

[0207] If the current second position Less than the maximum second position When , current second position Control is performed according to the following formula:

[0208] ;

[0209] If the current second position Greater than or equal to the maximum second position When , current second position Adjust to .

[0210] In this specific embodiment, the amount of discrete data corresponding to different polishing gaps obtained in the experiment is limited. The polishing gap actually measured during the processing may not be equal to the polishing gap data value obtained in the experiment. The solution is to use the closest data, that is, the rounding principle. For example: the removal function volume removal rate MRR corresponding to the polishing gap of 1mm and 2mm is obtained in the experiment and the second position The sixth conversion relationship between them is used to obtain the corresponding second conversion relationship, but the polishing gap during the processing is 1.6mm. At this time, the seventh conversion relationship is used to calculate the 2mm removal function volume removal rate MRR.

[0211] Specific embodiment 3: The magnetorheological polishing method of the actuator adjustment described in this specific embodiment is based on the magnetorheological polishing device based on sensor adjustment described in the embodiment of the invention, combined with Figures 1 to 3 , including the following steps:

[0212] C1: Use the laser tracker 3 to obtain the first coordinate of the sensor module 2 and the second coordinate of the working point of the polishing wheel 10; use the coordinate relationship module to calculate the coordinate conversion relationship through the two coordinates.

[0213] C2: Using the coordinate relationship module, through the coordinate conversion relationship, the first theoretical coordinate of the working point of the polishing wheel 10 at different polishing trajectory points is converted into the second theoretical coordinate of the sensor module 2, and the theoretical straight-line distance is obtained based on the current second theoretical coordinate and the previous second theoretical coordinate.

[0214] C3: Use the coordinate relationship module to record the measurement results of sensor module 2 to obtain the actual straight-line distance; the actual straight-line distance and the theoretical straight-line distance are calculated through the coordinate relationship module to obtain the distance error.

[0215] The contents of steps C1 to C3 in this specific embodiment are consistent with those of steps A1 to A3 in specific embodiment 1, and are not repeated here.

[0216] C4: Setting a distance error threshold and a maximum control value. Based on the distance error, the distance error threshold, and the maximum control value, the output displacement of the actuator assembly is controlled during the machining process, and the optical element 7 to be machined is machined. The distance error threshold and the maximum control value are adaptively set based on actual conditions and are not limited in this embodiment.

[0217] In step C4, when the polishing wheel 10 is at the When polishing trajectory points, the current distance error , distance error threshold and control the maximum value Compare:

[0218] when , then the actuator group is not regulated;

[0219] when , then the actuator group is regulated:

[0220] like , the output displacement of the actuator group is the current distance error , that is, the sum of the output displacements of the two cascaded high-frequency actuators is the current distance error ,Right now:

[0221] ;

[0222] in, represents the sum of the output displacements of two cascaded high-frequency actuators, represents the output displacement of one of the cascaded high-frequency actuators, Represents the output displacement of another cascaded high-frequency actuator. At this time, the current polishing gap for:

[0223] ;

[0224] in, Indicates the initially set polishing gap; initial polishing gap The same is also adaptively set according to actual conditions, and this specific embodiment does not limit this;

[0225] like , the output displacement of the actuator group is the maximum value of the control , that is, the sum of the output displacements of the two cascaded high-frequency actuators is the current distance error ,Right now:

[0226] ;

[0227] The current polishing gap at this time for:

[0228] .

[0229] The fitting process in the above specific embodiment includes, but is not limited to, importing discrete data into Matlab software, performing data fitting using Matlab's polyfit fitting command, and solving the respective transformation relationships. Polyfit fitting command is a basic general command in Matlab software. This method can more intuitively see the corresponding relationship between correlations and the corresponding function curve.

[0230] It should be understood that the various forms of the processes shown above can be used to reorder, add, or delete steps. For example, the steps described in the present disclosure can be performed in parallel, sequentially, or in a different order, as long as the desired results of the technical solutions disclosed in the present disclosure can be achieved. This is not limited herein.

[0231] The above specific embodiments do not limit the scope of protection of the present invention. Those skilled in the art will appreciate that various modifications, combinations, sub-combinations, and substitutions may be made based on design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention are intended to be included within the scope of protection of the present invention.

Claims

1. A magnetorheological polishing device based on sensor adjustment, characterized in that: The system comprises a laser tracker, a control unit, an actuator group, a robot, a magnetorheological processing module, and a sensor module; wherein the actuator group is arranged at the free end of the robot, and the magnetorheological processing module is arranged at the output end of the actuator group, so that the robot and the actuator group drive the magnetorheological processing module to process the optical element; the sensor module is arranged on the magnetorheological processing module; the laser tracker cooperates with a target ball arranged on the magnetorheological processing module to measure the spatial coordinates of the working points of the sensor module and the polishing wheel in the magnetorheological processing module; The interior of the control unit includes: A coordinate relationship module is used to integrate and calculate the spatial coordinates collected by the laser tracker and the position information collected by the sensor module, output the integrated position information, and obtain the distance error; a conversion relationship module, configured to obtain a first conversion relationship by fitting a first position of a supply system in the magnetorheological processing module with a polishing gap of the polishing wheel, and to obtain a second conversion relationship by fitting a second position of a nozzle in the magnetorheological processing module with the polishing gap; a processing program module, configured to obtain a processing program according to a removal function generated when the magnetorheological polishing device processes the optical element, and import the processing program into the magnetorheological polishing device; A real-time control module is used to adjust the actuator group according to the integrated position information, or adjust the supply system according to the integrated position information and the first conversion relationship, or adjust the nozzle according to the integrated position information and the second conversion relationship, so as to maintain the stability of the removal function when processing the optical element.

2. The magnetorheological polishing device based on sensor adjustment according to claim 1, characterized in that: The magnetorheological processing module also includes a transmission belt, a polishing motor, a magnet and a magnetorheological mounting frame; wherein, The magnetorheological mounting frame is arranged on the output end of the actuator assembly, and the polishing wheel is arranged on the magnetorheological mounting frame; The polishing motor is arranged on the magnetorheological mounting frame and is connected to the bearing of the polishing wheel through the transmission belt, so that the polishing motor controls the polishing wheel to rotate; The nozzle is mounted on the magnetorheological mounting bracket along the rotation direction of the polishing wheel via a nozzle mounting seat, and the nozzle mounting seat adjusts the mounting angle of the nozzle, thereby changing the position of the nozzle opening of the nozzle; the supply system delivers magnetorheological fluid to the nozzle; The magnet is arranged on the magnetorheological mounting frame and close to the working point of the polishing wheel, so that the magnetorheological fluid is affected by the magnetic field strength of the magnet and changes the stiffness of the magnetorheological fluid; The sensor module is arranged on the magnetorheological mounting frame, and the laser tracker measures the spatial coordinates of the sensor module through the target sphere.

3. The magnetorheological polishing device based on sensor adjustment according to claim 2, characterized in that: The supply system includes a liquid pump, a supply mounting bracket, a supply motor and a screw; wherein, the supply motor and the screw are arranged on the supply mounting bracket, so that the supply motor drives the screw to rotate; the liquid pump is arranged on the nut of the screw, so that the screw drives the liquid pump to move, thereby changing the first position; the liquid pump transports magnetorheological fluid to the nozzle through a pipeline.

4. The magnetorheological polishing device based on sensor adjustment according to claim 3, characterized in that: The nozzle mounting seat includes a fixing frame, a nozzle adjustment motor, a push rod and a nozzle support frame; wherein, the fixing frame is arranged on the magnetorheological mounting frame, and an arc slide rail is arranged on the inner side wall of the fixing frame; the nozzle adjustment motor is arranged on the magnetorheological mounting frame, and one end of the push rod passes through the fixing frame and is connected to the nozzle adjustment motor, so that the nozzle adjustment motor pushes the slider on the arc slide rail through the push rod; one end of the nozzle support frame is arranged on the slider, and the nozzle is connected to the other end of the nozzle support frame, so that the nozzle adjustment motor pushes the slider through the push rod, and then the nozzle support frame drives the nozzle to move, thereby completing the adjustment of the second position.

5. The magnetorheological polishing equipment based on sensor adjustment according to claim 2, characterized in that: The laser tracker, the sensor module, the robot, the actuator group, the nozzle mounting seat and the supply system are respectively connected to the control unit to form respective communication lines, so that the control unit receives and sends signals through the corresponding communication lines.

6. A magnetorheological polishing method with supply system position adjustment, based on the magnetorheological polishing device based on sensor adjustment according to any one of claims 1 to 5, characterized in that: The following steps are involved: A1: Using the laser tracker to obtain the first coordinate of the sensor module and the second coordinate of the polishing wheel working point; using the coordinate relationship module to calculate the coordinate transformation relationship based on the two coordinates; A2: using the coordinate relationship module, through the coordinate conversion relationship, converting the first theoretical coordinates of the working point of the polishing wheel at different polishing trajectory points into the second theoretical coordinates of the sensor module, and obtaining the theoretical straight-line distance based on the current second theoretical coordinate and the previous second theoretical coordinate; A3: Using the coordinate relationship module to record the measurement results of the sensor module to obtain an actual straight-line distance; the actual straight-line distance and the theoretical straight-line distance are calculated by the coordinate relationship module to obtain a distance error; A4: controlling the magnetorheological processing module to process the test optical element, and obtaining the first conversion relationship through the conversion relationship module; A5: Setting a distance error threshold, a control maximum value, and a maximum first position; processing the optical element to be processed based on the distance error, the distance error threshold, and the control maximum value, combined with the first conversion relationship and the maximum first position, and controlling the first position in real time through the real-time control module during the processing.

7. The magnetorheological polishing method with supply system position adjustment according to claim 6, characterized in that: In step A1, the laser tracker obtains the coordinates of no less than four positions on the sensor module through the target sphere, and obtains the first coordinates by calculation. ; The laser tracker obtains the coordinates of no less than 10 different positions on the outer surface of the polishing wheel through the target ball, and then calculates the coordinates of the center point of the polishing wheel. , the straight line passing through the coordinates of the center point is: ； in, A normal vector of the line representing the coordinates of the center point; By solving the following equations, the spatial coordinate corresponding to the minimum value of the Z-axis coordinate is used as the second coordinate : ； in, Indicates the radius of the polishing wheel; The coordinate transformation relationship is obtained by combining the second coordinate and the first coordinate: ； in, Represents the coordinate transformation relationship.

8. The magnetorheological polishing method with supply system position adjustment according to claim 7, characterized in that: In step A2, the theoretical straight-line distance is obtained by the following formula: ； in, Indicates the theoretical straight-line distance between the current polishing track point and the previous polishing track point, Indicates the Z coordinate in the current second theoretical coordinate, Indicates the Z coordinate in the previous second theoretical coordinate.

9. The magnetorheological polishing method with supply system position adjustment according to claim 8, characterized in that: In step A3, the actual straight-line distance is obtained by the following formula: ； in, Indicates the actual straight-line distance between the current polishing track point and the previous polishing track point; represents the acceleration measured by the sensor module at the previous polishing track point, represents the speed measured by the sensor module at the previous polishing track point, Represents the measurement time of the sensor module; and then the distance error is obtained by the following formula : 。 10. The magnetorheological polishing method with supply system position adjustment according to claim 9, characterized in that: Step A4 specifically includes the following steps: A41: Under different polishing gaps, the position of the nozzle opening of the nozzle relative to the polishing wheel is kept unchanged, the first position is changed separately, and processing is performed at different positions of the test optical element. The removal function volume removal rate of each polishing trajectory point is calculated to obtain a fourth conversion relationship between the removal function volume removal rate and the first position: ； in, represents the first position, represents the volume removal rate of the removal function, represents the fourth conversion relationship; A42: Controlling the polishing wheel to perform fixed-point processing at different positions of the test optical element with different polishing gaps, and calculating the volume removal rate of the removal function at each polishing trajectory point to obtain a fifth conversion relationship between the volume removal rate of the removal function and the polishing gap: ； in, represents the polishing gap, represents the fifth conversion relationship; A43: Obtain the first conversion relationship according to the fourth conversion relationship and the fifth conversion relationship: ； in, Indicates the first conversion relationship.

11. The magnetorheological polishing method with supply system position adjustment according to claim 9, characterized in that: In step A5, when the polishing wheel is at the When polishing trajectory points, the current distance error Distance error threshold Compare: like , then the current first position is not Make adjustments; like , then for the current first position To regulate: If the current first position Less than the maximum first position When the current first position Adjust according to the following formula: ； If the current first position Greater than or equal to the maximum first position When the current first position Adjust to .

12. A nozzle-adjustable magnetorheological polishing method, based on the sensor-adjustable magnetorheological polishing device according to any one of claims 1 to 5, characterized in that: The following steps are involved: B1: using the laser tracker to obtain the first coordinate of the sensor module and the second coordinate of the polishing wheel working point; using the coordinate relationship module to calculate the coordinate transformation relationship based on the two coordinates; B2: using the coordinate relationship module to convert the first theoretical coordinates of the working point of the polishing wheel at different polishing track points into the second theoretical coordinates of the sensor module through the coordinate conversion relationship, and obtaining the theoretical straight-line distance based on the current second theoretical coordinate and the previous second theoretical coordinate; B3: Using the coordinate relationship module to record the measurement results of the sensor module to obtain an actual straight-line distance; the actual straight-line distance and the theoretical straight-line distance are calculated by the coordinate relationship module to obtain a distance error; B4: controlling the magnetorheological processing module to process the test optical element, and obtaining the second conversion relationship through the conversion relationship module; B5: Setting a distance error threshold, a control maximum value, and a maximum second position; processing the optical element to be processed based on the distance error, the distance error threshold, and the control maximum value, combined with the second conversion relationship and the maximum second position, and performing real-time control of the nozzle through the real-time control module during the processing.

13. The nozzle-adjustable magnetorheological polishing method according to claim 12, characterized in that: In step B1, the laser tracker obtains the coordinates of no less than four positions on the sensor module through the target sphere, and obtains the first coordinates by calculation. ; The laser tracker obtains the coordinates of no less than 10 different positions on the outer surface of the polishing wheel through the target ball, and then calculates the coordinates of the center point of the polishing wheel. , the straight line passing through the coordinates of the center point is: ； in, A normal vector of the line representing the coordinates of the center point; By solving the following equations, the spatial coordinate corresponding to the minimum value of the Z-axis coordinate is used as the second coordinate : ； in, Indicates the radius of the polishing wheel; The coordinate transformation relationship is obtained by combining the second coordinate and the first coordinate: ； in, Represents the coordinate transformation relationship.

14. The nozzle-adjustable magnetorheological polishing method according to claim 13, characterized in that: In step B2, the theoretical straight-line distance is obtained by the following formula: ； in, Indicates the theoretical straight-line distance between the current polishing track point and the previous polishing track point, Indicates the Z coordinate in the current second theoretical coordinate, Indicates the Z coordinate in the previous second theoretical coordinate.

15. The nozzle-adjustable magnetorheological polishing method according to claim 14, characterized in that: In step B3, the actual straight-line distance is obtained by the following formula: ； in, Indicates the actual straight-line distance between the current polishing track point and the previous polishing track point; represents the acceleration measured by the sensor module at the previous polishing track point, represents the speed measured by the sensor module at the previous polishing track point, Represents the measurement time of the sensor module; the distance error is obtained by the following formula : 。 16. The nozzle-adjustable magnetorheological polishing method according to claim 15, characterized in that: Step B4 includes the following steps: B41: Under different polishing gaps, the second position is changed, and processing is performed at different positions of the test optical element with different polishing gaps. The removal function volume removal rate of each polishing trajectory point under different polishing gaps is calculated to obtain a sixth conversion relationship between the removal function volume removal rate and the second position: ； in, represents the second position, represents the volume removal rate of the removal function, represents the sixth conversion relationship; B42: Control the robot to drive the polishing wheel to process different positions of the test optical element with different polishing gaps, and calculate the volume removal rate of the removal function at each polishing trajectory point to obtain a seventh conversion relationship between the volume removal rate of the removal function and the polishing gap: ； in, represents the polishing gap, represents the seventh conversion relationship; B44: Obtain the second conversion relationship according to the sixth conversion relationship and the seventh conversion relationship, that is: ； in, Indicates the second conversion relationship.

17. The nozzle-adjustable magnetorheological polishing method according to claim 16, characterized in that: In step B5, when the polishing wheel is at the When polishing trajectory points, the current distance error Distance error threshold Compare: like , then the current second position is not to regulate; like , then for the current second position To regulate: If the current second position Less than the maximum second position When the current second position Control is performed according to the following formula: ； If the current second position Greater than or equal to the maximum second position When , current second position Adjust to .

18. An actuator-regulated magnetorheological polishing method, according to the sensor-regulated magnetorheological polishing apparatus according to any one of claims 1 to 5, characterized in that: The following steps are involved: C1: using the laser tracker to obtain the first coordinate of the sensor module and the second coordinate of the polishing wheel working point; using the coordinate relationship module to calculate the coordinate transformation relationship based on the two coordinates; C2: using the coordinate relationship module to convert the first theoretical coordinates of the working point of the polishing wheel at different polishing track points into the second theoretical coordinates of the sensor module through the coordinate conversion relationship, and obtaining the theoretical straight-line distance based on the current second theoretical coordinate and the previous second theoretical coordinate; C3: Using the coordinate relationship module to record the measurement results of the sensor module to obtain an actual straight-line distance; the actual straight-line distance and the theoretical straight-line distance are calculated by the coordinate relationship module to obtain a distance error; C4: Setting a distance error threshold and a maximum control value; determining to control the output displacement of the actuator group during the processing according to the distance error, the distance error threshold and the maximum control value, and processing the optical element to be processed.

19. The actuator-regulated magnetorheological polishing method according to claim 18, characterized in that: In step C1, the laser tracker obtains the coordinates of no less than four positions on the sensor module through the target sphere, and obtains the first coordinates by calculation. ; The laser tracker obtains the coordinates of no less than 10 different positions on the outer surface of the polishing wheel through the target ball, and then calculates the coordinates of the center point of the polishing wheel. , the straight line passing through the coordinates of the center point is: ； in, A normal vector of the line representing the coordinates of the center point; By solving the following equations, the spatial coordinate corresponding to the minimum value of the Z-axis coordinate is used as the second coordinate : ； in, Indicates the radius of the polishing wheel; The coordinate transformation relationship is obtained by combining the second coordinate and the first coordinate: ； in, Represents the coordinate transformation relationship.

20. The magnetorheological polishing method with actuator adjustment according to claim 19, characterized in that: In step C2, the theoretical straight-line distance is obtained by the following formula: in, Indicates the theoretical straight-line distance between the current polishing track point and the previous polishing track point, Indicates the Z coordinate in the current second theoretical coordinate, Indicates the Z coordinate in the previous second theoretical coordinate.

21. The actuator-adjusted magnetorheological finishing method according to claim 20, characterized in that: In step C3, the actual straight-line distance is obtained by the following formula: ； in, Indicates the actual straight-line distance between the current polishing track point and the previous polishing track point; represents the acceleration measured by the sensor module at the previous polishing track point, represents the speed measured by the sensor module at the previous polishing track point, represents the measurement time of the sensor module; and the distance error is obtained by the following formula: ； in, Indicates distance error.

22. The actuator-regulated magnetorheological polishing method according to claim 21, characterized in that: In step C4, when the polishing wheel is at the When polishing trajectory points, the current distance error , distance error threshold and the maximum value of the regulation Compare: when , then the actuator group is not regulated; when , then the actuator group is regulated: like , the output displacement of the actuator group is the current distance error , the current polishing gap ,in, Indicates that the polishing wheel is located at Polishing gap at each polishing track point; like , the output displacement of the actuator group is the maximum value of the control , the current polishing gap .

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