High-precision horizontal adjusting mechanism of large device
Through the high-precision level adjustment mechanism, the use of the high-rigid spring and ball screw at the constant force end, combined with the high-precision micrometer, the problem of insufficient leveling accuracy of traditional large-scale optical system devices is solved, and high-precision equipment posture adjustment and stability improvement are achieved.
Patent Information
- Application Number
- CN202510859882.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-06-25
- Publication Date
- 2025-08-01
AI Technical Summary
The adjustment structure of traditional large-scale optical system devices has problems such as severe crawling, inability to quantify the adjustment angle, and uneven stress adjustment at 4 points, making it difficult to achieve micron or even nano-level leveling accuracy.
A high-precision level adjustment mechanism is adopted, including an adjustment support seat, origin end, constant force end and adjustment end. A high-rigid spring and ball screw are used for constant force end, combined with a high-precision micrometer, to achieve stable support and precise leveling of the equipment.
The fine-tuning step distance of the actuator is reduced, the stability and measurement accuracy of the equipment are improved, data accuracy is ensured, virtual contact is avoided, and the attitude adjustment ability of the equipment is improved.
Smart Images
Figure CN120395750A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of mechanical equipment, and particularly relates to a high-precision horizontal adjustment mechanism for a large device. Background Art
[0002] With the development of precision manufacturing (such as semiconductor lithography, nanoimprinting), optical detection (gravitational wave observation, space telescope), and biomedical equipment, the requirement for the leveling accuracy of equipment bases has reached the micron level (μm) or even the nanometer level (nm).
[0003] For traditional large optical system devices, 4-point spherical hinges are used, and the attitude of the device is adjusted by using the ordinary fine-thread screw rod scheme. There are problems such as serious creep in the adjustment structure, inability to quantify the adjustment angle, and uneven force on the 4-point adjustment. Therefore, we need a high-resolution and high-precision leveling mechanism. Summary of the Invention
[0004] The purpose of the present invention is to solve the following disadvantages in the prior art, namely, the serious creep problem of the adjustment structure, and to propose a high-precision horizontal adjustment mechanism for a large device.
[0005] In order to achieve the above purpose, the present invention adopts the following technical scheme: A high-precision horizontal adjustment mechanism for a large device includes an adjustment support base and a device base to be adjusted. An origin end, a constant force end, and two adjustment ends are arranged on the adjustment support base, and their positions enclose a rectangle. The origin end and the constant force end are arranged diagonally, and the two adjustment ends are arranged diagonally. Support members are installed at the ends of the origin end, the constant force end, and the adjustment end that deviate from the adjustment support base. The constant force end includes a constant force end I-beam support body fixedly installed on the adjustment support base. A constant force end spring outer shell body with a hollow interior is fixedly connected to the constant force end I-beam support body. A spring T-shaped ejection shaft is slidably connected inside the constant force end spring outer shell body. The upper end of the spring T-shaped ejection shaft is connected to the support member, and a constant force end high-rigidity spring is installed between the lower end of the spring T-shaped ejection shaft and the bottom side of the constant force end spring outer shell body. A rotating fixing plate is provided on the bottom side of the support member on the adjustment end. The adjustment end includes a ball hoist arranged on the adjustment support base. A ball screw is provided at the output end of the ball hoist. An adjustment end outer shell body is fixedly installed on the ball hoist. A spring limit protection block is fixedly installed on the adjustment end outer shell body. An adjustment end high-rigidity spring sleeved on the ball screw is arranged inside the spring limit protection block. The rotating fixing plate is sleeved on the outer side wall of the spring limit protection block. A micrometer is installed on the outer side wall of the ball hoist through a connecting block.
[0006] Preferably, the support member includes an upper support plate and a lower support plate. The upper end surface of the upper support plate is used to connect the base of the device to be adjusted, and the lower end surface of the upper support plate and the lower support plate are connected by steel balls.
[0007] Preferably, the origin end includes an origin I-beam support body fixedly installed on the adjustment support base, and the lower support plate in the support member is located on the origin I-beam support body.
[0008] Preferably, a backing plate is installed on the upper end surface of the origin I-beam support body, and the lower end surface of the lower support plate of the support member abuts against the backing plate.
[0009] Preferably, a speed reducer is further installed at the output end of the ball hoist, and a driving member is provided on the speed reducer.
[0010] Preferably, the micrometer member includes a micrometer seat elevation column installed on the connecting block. A micrometer seat screw head is installed at the upper end of the micrometer seat elevation column. A micrometer extension plate is fixedly connected to one side of the upper support plate located at the adjustment end. A clamp is installed at the bottom end of the micrometer extension plate. A high-precision micrometer is provided on one side of the micrometer extension plate. The measuring head in the high-precision micrometer passes through the clamp and is clamped by it, and is located on the center connection line between the origin end and the adjustment end.
[0011] Compared with the prior art, the beneficial effects of the present invention are: Reduce the fine adjustment step of the actuator, the force conditions of the four support points are controllable, improve the stability of the lifting device, and there will be no virtual contact phenomenon, making the data more accurate. In addition, a high-precision micrometer is used to improve the measurement accuracy and real-time feedback of the attitude data, which is helpful for the attitude adjustment of the device. Description of the Drawings
[0012] Figure 1 is a three-dimensional structure diagram of a high-precision horizontal adjustment mechanism for a large device proposed by the present invention; Figure 2 is a four-port three-dimensional structure diagram of a high-precision horizontal adjustment mechanism for a large device proposed by the present invention; Figure 3 is a partial cross-sectional structure diagram of a high-precision horizontal adjustment mechanism for a large device proposed by the present invention; Figure 4 is a partial cross-sectional structure diagram of the adjustment end.
[0013] In the figure: 1 is the base of the adjusting device, 2 is the adjusting support base, 31 is the upper support plate, 32 is the steel ball, 33 is the lower support plate, 41 is the spring T-shaped ejecting shaft, 42 is the constant force end spring housing, 43 is the constant force end I-beam support, 44 is the constant force end high-rigidity spring, 51 is the fixing plate, 52 is the ball hoist, 53 is the reducer, 54 is the micrometer extension plate, 55 is the high-precision micrometer, 56 is the ball screw, 57 is the adjusting end high-rigidity spring, 58 is the adjusting end housing, 59 is the spring limit protection block, and 6 is the origin end I-beam support. Detailed implementation manner
[0014] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments.
[0015] Terms such as "upper", "lower", "left", "right", "middle", and "one" cited in the present invention are only for the convenience of clear description and are not used to limit the scope of implementation of the present invention. The change or adjustment of their relative relationship, without substantial change in the technical content, should also be regarded as the scope of implementation of the present invention.
[0016] Refer to Figures 1 - 4, A high-precision horizontal adjustment mechanism for a large device, comprising an adjustment support base 2 and a device base 1 to be adjusted. The device base 1 to be adjusted is the base of a large device. The adjustment support base 2 is provided with an origin end, a constant force end, and two adjustment ends, and their positions enclose a rectangle. The length of the short side of this rectangle is 468 mm, and the length of the long side is 1360 mm. The origin end and the constant force end are diagonally arranged, and the two adjustment ends are diagonally arranged. At the ends of the origin end, the constant force end, and the adjustment ends that deviate from the adjustment support base 2, support members are installed. These support members are located between the device base 1 to be adjusted and each port, and are used to support the device base 1 to be adjusted and the equipment on it. Initially, the height of the constant force end is higher than that of the origin end, and the height difference is 30 mm. When the leveling mechanism is displaced to the bottom of the device base 1 to be adjusted, with the origin end as the origin, the constant force end moves downward under the action of the equipment gravity. When the balance is finally reached, the forces on the four ports are roughly the same, and the force on each port is about 300 kg. The constant force end includes a constant force end I-beam support body 43 fixedly installed on the adjustment support base 2. A constant force end spring outer casing 42 with a hollow interior is fixedly connected to the constant force end I-beam support body 43. A spring T-shaped ejecting shaft 41 is slidably connected inside the constant force end spring outer casing 42. The upper end of the spring T-shaped ejecting shaft 41 is connected to the support member and abuts against the bottom end of the support member. A constant force end high-rigidity spring 44 is installed between the lower end of the spring T-shaped ejecting shaft 41 and the bottom side of the constant force end spring outer casing 42. The stiffness coefficient of the constant force end high-rigidity spring 44 is such that the stroke when receiving a gravity of 100 kg is 10 mm. When the device base 1 to be adjusted is placed on the leveling mechanism, under the action of gravity, the constant force end high-rigidity spring 44 is compressed downward, and the upper end surface of the constant force end will move downward until the balance is reached. A force sensor (not shown) can be installed on the constant force end to feedback the magnitude of the supporting force of the constant force end. This belongs to the prior art and will not be described in detail. A displacement mechanism is added to the lower end of the constant force end. This mechanism includes, but is not limited to, one of a telescopic cylinder, a worm screw elevator, a screw screw elevator, etc. These can be purchased on the market, and the principle will not be described in detail. It is mainly used to adjust the magnitude of the constant force end.
[0017] A fixing plate 51 is provided on the bottom side of the support member at the adjustment end. The adjustment end includes a ball hoist 52 provided on the adjustment support base 2. The output end of the ball hoist 52 is provided with a ball screw 56. The top end of the ball screw 56 abuts against the lower end face of the support member. An adjustment end housing 58 is fixedly installed on the ball hoist 52. A spring limit protection block 59 is fixedly installed on the adjustment end housing 58. A first groove with an upward opening is provided in the spring limit protection block 59. An adjustment end high-rigidity spring 57 sleeved on the ball screw 56 is installed in the first groove. A second groove is provided on the fixing plate 51. The second groove in the fixing plate 51 is sleeved on the outer side wall of the spring limit protection block 59. A micrometer is installed on the outer side wall of the ball hoist 52 through a connecting block. During leveling, the ball hoist 52 is started to drive the ball screw 56 to rotate. The rotation of the ball screw 56 will drive the support member to move. Among them, the lead of the ball screw 56 is 5 mm. This movement parameter will be transmitted to the micrometer for display, so as to record relevant data. According to the data of the micrometer, the inclination angle and direction of the entire device can be judged. When the adjustment end is squeezed, part of the load is borne by the ball screw 56, and most of the load is borne by the adjustment end high-rigidity spring 57. By sharing the load, the friction force is reduced, which can greatly reduce the creep distance of the ball screw 56. In the common leveling structures on the market, when the weight of the supported device is about 1 ton, the creep distance of its ball screw 56 is about 10 silk. Through the above design, when bearing the same weight, the creep distance of the ball screw 56 is less than 1 silk, improving the service life of the device.
[0018] The support member includes an upper support plate 31 and a lower support plate 33. The upper end face of the upper support plate 31 is used to connect the base 1 of the device to be adjusted. The lower end face of the upper support plate 31 and the lower support plate 33 are connected by steel balls 32. Through the spherical hinge of the steel balls 32, when the upper support plate 31 is subjected to gravity, it makes a slight rotation under the action of pressure and can move slightly within the lower support plate 33 to offset the distance change at each point generated when the angle changes, facilitating the subsequent leveling work.
[0019] The origin end includes an origin I-beam support body 6 fixedly installed on the adjustment support base 2. The lower support plate 33 in the support member is located on the origin I-beam support body 6. No high-rigidity spring is provided in the entire origin end. A backing plate is installed on the upper end face of the origin I-beam support body 6. The lower end face of the lower support plate 33 of the support member abuts against the backing plate. By controlling the thickness and quantity of the backing plate, the overall height of the origin end is adjusted to improve the adaptability of the device and facilitate the adjustment of the initial height of the origin end.
[0020] The output end of the ball hoist 52 is also equipped with a speed reducer 53. A driving part is arranged on the speed reducer 53. The driving part is one of a manual cap or a servo motor. The rotation speed of the ball screw 56 is controlled through the speed reducer 53, so as to facilitate high-precision fine-tuning operations. In addition, the combined reduction ratio of the ball hoist 52 and the speed reducer 53 is 600:1, and the lead of the ball screw 56 is 5 mm. That is, when the speed reducer 53 rotates one circle, the stroke is 0.008 mm. The connection relationship and control among the hand-tightened speed reducer output plate, the speed reducer 53, and the ball hoist 52 belong to the prior art and will not be described in detail here.
[0021] The micrometer component includes a micrometer base heightening column installed on the connecting block. A micrometer base screw head is installed at the upper end of the micrometer base heightening column. The screw head is used to adjust the initial position of the micrometer to the median value. One side of the upper support plate 31 located at the adjustment end is fixedly connected with a micrometer extension plate 54. A clamp is installed at the bottom end of the micrometer extension plate 54. Any clamp that can play a clamping role and is generally available on the market can be used. A high-precision micrometer 55 is arranged on one side of the micrometer extension plate 54. The measuring head in the high-precision micrometer 55 passes through the clamp and is clamped by it, and is located on the center line connecting the origin end and the adjustment end. The parameters of the high-precision micrometer 55 are as follows: the type is an absolute grating, its stroke is 12.7 mm, the resolution is 1 μm, and the accuracy is ±2 μm.
[0022] Through the above structural design, the crawling distance can be reduced from 10 silk to less than 1 silk, improving the service life of the equipment. In addition, the measurement accuracy is improved by using a high-resolution micrometer and the stroke parameters of the lead screw. Moreover, the radian at two places of the adjustment end is calculated and adjusted by this measurement, and the heights of the two places are adjusted until the leveling is completed.
[0023] In the present invention, unless otherwise clearly specified and limited, terms such as "installation", "connection", "connection", "fixation" and other terms should be understood in a broad sense.
[0024] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution of the present invention and its inventive concept, makes equivalent substitutions or changes, and should be covered by the protection scope of the present invention.
Claims
1. A high-precision horizontal adjustment mechanism for a large device, comprising an adjusting support base (2) and a device base to be adjusted (1), characterized in that , on the adjusting support base (2), there are an origin end, a constant force end, and two adjusting ends, and their positions enclose a rectangle. The origin end and the constant force end are diagonally arranged, and the two adjusting ends are diagonally arranged. At one end of the origin end, the constant force end, and the adjusting end away from the adjusting support base (2), support members are installed; The constant force end includes a constant force end I-beam support body (43) fixedly installed on the adjusting support base (2). A constant force end spring outer shell body (42) with a hollow interior is fixedly connected to the constant force end I-beam support body (43). A spring T-shaped ejecting shaft (41) is slidably connected inside the constant force end spring outer shell body (42). The upper end of the spring T-shaped ejecting shaft (41) is connected to the support member, and a constant force end high-rigidity spring (44) is installed between the lower end of the spring T-shaped ejecting shaft (41) and the bottom side of the constant force end spring outer shell body (42); On the bottom side of the support member on the adjusting end, there is a rotating fixing plate (51). The adjusting end includes a ball hoist (52) arranged on the adjusting support base (2). The output end of the ball hoist (52) is provided with a ball screw (56). An adjusting end outer shell body (58) is fixedly installed on the ball hoist (52). A spring limit protection block (59) is fixedly installed on the adjusting end outer shell body (58). An adjusting end high-rigidity spring (57) sleeved on the ball screw (56) is arranged inside the spring limit protection block (59). The rotating fixing plate (51) is sleeved on the outer side wall of the spring limit protection block (59). A micrometer is installed on the outer side wall of the ball hoist (52) through a connecting block.
2. The high-precision horizontal adjustment mechanism for a large-scale device according to claim 1, characterized in that The support member includes an upper support plate (31) and a lower support plate (33). The upper end surface of the upper support plate (31) is used to connect the base of the device to be adjusted (1). The lower end surface of the upper support plate (31) and the lower support plate (33) are hinged by steel balls (32).
3. The high-precision horizontal adjustment mechanism for a large-scale device according to claim 2, characterized in that, The origin end includes an origin I-beam support body (6) fixedly installed on the adjusting support base (2). The lower support plate (33) in the support member is located on the origin I-beam support body (6).
4. The high-precision horizontal adjustment mechanism of a large-scale device according to claim 3, characterized in that, A cushion plate is installed on the upper end surface of the origin I-beam support body (6). The lower end surface of the lower support plate (33) of the support member abuts against the cushion plate.
5. The high-precision horizontal adjustment mechanism for a large-scale device according to claim 4, characterized in that, The output end of the ball hoist (52) is also installed with a speed reducer (53), and a driving member is arranged on the speed reducer (53).
6. The high-precision horizontal adjustment mechanism for a large-scale device according to claim 5, characterized in that, The micrometer includes a micrometer seat elevation column installed on the connecting block. A micrometer seat screw head is installed at the upper end of the micrometer seat elevation column. A micrometer extension plate (54) is fixedly connected to one side of the upper support plate (31) on the adjusting end. A clamp is installed at the bottom end of the micrometer extension plate (54). A high-precision micrometer (55) is arranged on one side of the micrometer extension plate (54). The measuring head inside the high-precision micrometer (55) passes through the clamp and is clamped by it, and is located on the center connection line between the origin end and the adjusting end.