Ultralow-frequency and large-bandwidth three-degree-of-freedom vibration isolator

Abstract

The ultralow-frequency and large-bandwidth three-degree-of-freedom vibration isolator comprises a base, a top plate and a main air chamber, a honeycomb plate is installed at the top of the base, lead core rubber balls are installed in the honeycomb plate, four side air chambers are installed at the top of the honeycomb plate and around the main air chamber, horizontal air chambers are installed at the tops of the side air chambers correspondingly, and the horizontal air chambers are communicated with the honeycomb plate. The top of the horizontal air chamber is provided with a magnetorheological elastomer, the periphery of the magnetorheological elastomer is sleeved with an electromagnetic coil, the top of the magnetorheological elastomer is provided with a square annular supporting plate A, the periphery of the top of the square annular supporting plate A is provided with buckling beams A, and the top of the middle of each buckling beam A is connected with a square annular supporting plate B through a supporting rod B; buckling beams B are installed on the periphery of the top of the square annular supporting plate B. The three-degree-of-freedom vibration control can be achieved, the quasi-zero stiffness interval is wider by 0.1-20 Hz, the vibration isolation belt is wider, and vibration isolation of a 0.1-500 Hz vibration source can be achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor special devices, and specifically to an ultra-low frequency and large bandwidth three-degree-of-freedom vibration isolator. Background Art

[0002] At present, the semiconductor industry is developing rapidly. The accuracy requirements of semiconductor production equipment are getting higher and higher, and the equipment is also more and more sensitive to the environment such as micro-vibrations. A little micro-vibration will reduce the yield rate of the equipment, and even make the equipment unable to work properly. Therefore, the isolation of micro-vibrations has become more and more important.

[0003] A quasi-zero stiffness vibration isolator is a combined vibration isolator that obtains zero stiffness by connecting positive and negative stiffness elastic components in parallel at the static equilibrium position. This type of vibration isolator has a relatively large static stiffness and can bear the weight of the equipment to be isolated. When the equipment vibrates at the static equilibrium position, the stiffness is very low, even approaching zero, which is beneficial to low-frequency vibration isolation.

[0004] To solve the above problems, in recent years, researchers have discovered some novel vibration isolation methods - quasi-zero stiffness vibration isolators based on nonlinear dynamics theory. This type of vibration isolator has the characteristics of high static and low dynamic stiffness in terms of system stiffness, that is, when the system bears a static load, the vibration isolator has a relatively high system stiffness and can provide sufficient supporting force; when the system bears a dynamic load, the vibration isolator has a lower system stiffness, increasing the vibration isolation bandwidth and achieving low-frequency and ultra-low frequency vibration isolation. However, at present, most of the nonlinear vibration isolators based on the quasi-zero stiffness theory can only achieve vibration reduction for specific controlled objects and cannot meet the vibration isolation requirements for different objects. Moreover, the low-stiffness displacement range of the existing quasi-zero stiffness vibration isolators is relatively narrow. As the displacement increases, the stiffness increases significantly, the nonlinearity increases significantly, the starting vibration isolation frequency of the vibration isolator increases, the vibration isolation frequency band becomes narrower, and the low-frequency vibration isolation performance deteriorates, thus affecting the applicable range of the quasi-zero stiffness vibration isolator. In addition, for a few loads, resonance may occur at special vibration frequencies, and the existing quasi-zero stiffness vibration isolators cannot solve this problem. At the same time, the existing quasi-zero stiffness vibration isolators cannot solve high-frequency and even ultra-high frequency vibrations. Summary of the Invention

[0005] The purpose of the present invention is to provide an ultra-low frequency and large bandwidth three-degree-of-freedom vibration isolator to solve the problems existing in the above background art.

[0006] The technical solution of the present invention is realized as follows: An ultra-low frequency and large bandwidth three-degree-of-freedom vibration isolator includes a base, a top plate and a main air chamber. A honeycomb plate is installed on the top of the base, and lead core rubber balls are installed inside the honeycomb plate. Four side air chambers are installed around the main air chamber at the top of the honeycomb plate. The side air chambers are communicated with the main air chamber through multiple groups of air holes. Horizontal air chambers are respectively installed at the tops of the side air chambers. A piston A is installed inside the main air chamber. The top of the piston A is connected to the top of the main air chamber through an air film A. A support rod is installed inside the piston A, and four guide rods are installed around the support rod. A piston B is installed inside the horizontal air chamber. The piston B is connected to the horizontal air chamber through an air film B. The inside of the piston B is vertically connected to the other end of the guide rod. A magnetorheological elastomer is installed on the top of the horizontal air chamber. An electromagnetic coil is sleeved outside the magnetorheological elastomer. A square annular support plate A is installed on the top of the magnetorheological elastomer. Buckling beams A are respectively installed around the top of the square annular support plate A. A square annular support plate B is connected to the middle top of the buckling beam A through a support rod B. Buckling beams B are respectively installed around the top of the square annular support plate B. The middle top of the buckling beam B is connected to the bottom of the top plate through a support rod A. A flexible spherical hinge is installed at the connection of the support rod A and the top plate. A guide rail A is provided on the square annular support plate A. The two ends of the buckling beam A are respectively slidably connected to the guide rail A through sliders A. A linear motor A is vertically installed outside the slider A. A pressure sensor A is installed at the connection of one end of the buckling beam A and the slider A. A position sensor A is installed on one of the sliders A. A guide rail B is provided on the square annular support plate B. The two ends of the buckling beam B are respectively slidably connected to the guide rail B through sliders B. A linear motor B is vertically installed outside the slider B. A pressure sensor B is installed at the connection of one end of the buckling beam B and the slider B. A position sensor B is installed on one of the sliders B. Metal spring plates are respectively installed at the four corners of the top of the square annular support plate A. The top of the metal spring is connected to the bottom of the top plate through a lever. The metal spring and the lever, and the lever and the top plate are all connected through crossed roller bearings. The lever is connected to the support through a double-row angular contact ball bearing as a fulcrum. The bottom of the support is installed on the top of the square annular support plate A. A linear motor E is installed between the bottom of the metal spring and the square annular support plate A. A permanent magnet A is installed in the middle at the bottom of the piston A. An electromagnet A is installed at the position vertically corresponding to the permanent magnet A in the middle at the inner bottom of the main air chamber. A permanent magnet B is installed at the bottom of the guide rod. An electromagnet B is installed at the position vertically corresponding to the permanent magnet B at the top of the main air chamber. The electromagnet B is connected to the main air chamber through a linear motor C. A permanent magnet C is installed on the support rod above the guide rod. An electromagnet C is installed at the position vertically corresponding to the permanent magnet C in the horizontal air chamber. The electromagnet C is connected to the horizontal air chamber through a linear motor D. A vertical position sensor and a vertical acceleration sensor are installed at the bottom of the top plate.A horizontal left-right position sensor, a horizontal left-right acceleration sensor, a horizontal front-back position sensor, and a horizontal front-back acceleration sensor are installed at the top of the guide rod, and a controller is installed on one side of the base.

[0007] Further, the linear motor A is fixedly installed with the square annular support plate A through the baffle A.

[0008] Further, the linear motor B is fixedly installed with the square annular support plate B through the baffle B.

[0009] Further, a cushion block is also installed at the connection between the metal spring and the linear motor E.

[0010] Further, an air inlet pipe A is provided on the outside of the side air chamber, and a pneumatic valve is installed on the air inlet pipe A.

[0011] Further, an air inlet pipe B is provided on the outside of the horizontal air chamber, and a servo proportional valve is installed on the air inlet pipe B.

[0012] Further, the controller is connected to the pneumatic valve, the servo proportional valve, the electromagnetic coil, the electromagnet A, the electromagnet B, the electromagnet C, the linear motor A, the linear motor B, the linear motor C, the linear motor D, the pressure sensor A, the position sensor A, the pressure sensor B, the position sensor B, the vertical position sensor, the vertical acceleration sensor, the horizontal left-right position sensor, the horizontal left-right acceleration sensor, the horizontal front-back position sensor, and the horizontal front-back acceleration sensor through cables.

[0013] The beneficial effects of the present invention are as follows: In the present invention, the main air chamber is connected in parallel with four groups of side air chambers to meet the load-bearing requirement of 10,000 Kg for large loads and adjust the negative stiffness of the system; the double-layer buckling beam is used to adjust the negative stiffness of the system, the pre-compressed metal spring is used to expand the negative stiffness bandwidth of the system, enhance the negative stiffness effect, and the magnetic force is used to supplement and thus realize the fine adjustment of the negative stiffness characteristics and compensate for the stiffness drift of the passive structure under high loads; by adjusting the positive and negative stiffness, the quasi-zero stiffness can be achieved when the system is in static equilibrium.

[0014] When the vertical high-frequency vibration source is used in the present invention, high-frequency vibration reduction is achieved by the parallel connection of the main air chamber and the side air chamber, and the damping effect is enhanced by multiple groups of air holes between the two. At the same time, the vibration reduction of the ultra-high-frequency vibration source is achieved by the parallel structure of the honeycomb plate and the lead core rubber ball set; when the vertical low-frequency vibration source is used, low-frequency vibration reduction is achieved through magnetic force; when the horizontal high-frequency vibration source is used, the air pressure of the horizontal air chamber is adjusted by the servo proportional valve, so as to achieve high-frequency vibration reduction; when the horizontal low-frequency vibration source is used, the air pressure of the horizontal air chamber is also adjusted by the servo proportional valve, so as to achieve low-frequency vibration reduction, and at the same time, the compensation vibration reduction of the low-frequency vibration source is achieved through magnetic force; when resonance occurs in the system, the stiffness of the magnetorheological elastomer is changed to avoid resonance.

[0015] The present invention can achieve vibration control in three degrees of freedom, with a wider quasi-zero stiffness range of 0.1~20Hz and a wider vibration isolation band. It can achieve vibration isolation for vibration sources in the range of 0.1~500Hz, with precise positioning and large load-bearing capacity. It can be adapted to different models of precision instruments, with a wide application range and strong versatility. Description of the Drawings

[0016] Figure 1 It is a schematic structural diagram of the present invention.

[0017] In the figure, 1-base, 2-top plate, 3-main air chamber, 301-piston A, 302-air film A, 4-side air chamber, 401-air inlet pipe A, 402-pneumatic valve, 5-horizontal air chamber, 501-piston B, 502-air film B, 503-air inlet pipe B, 504-servo proportional valve, 6-honeycomb plate, 7-lead core rubber ball, 8-support rod, 9-guide rod, 10-magnetorheological elastomer, 11-electromagnetic coil, 12-square annular support plate A, 13-buckling beam A, 14-square annular support plate B, 15-buckling beam B, 16-guide rail A, 17-slider A, 18-linear motor A, 19-pressure sensor A, 20-position sensor A, 21-guide rail B, 22-slider B, 23-linear motor B, 24-pressure sensor B, 25-position sensor B, 26-metal spring, 27-lever, 28-cross roller bearing, 29-support, 30-double row angular contact ball bearing, 31-pad, 32-permanent magnet A, 33-electromagnet A, 34-permanent magnet B, 35-electromagnet B, 36-linear motor C, 37-permanent magnet C, 38-electromagnet C, 39-linear motor D, 40-linear motor E, 41-support rod A, 42-flexible ball hinge, 43-support rod B, 44-baffle A, 45-baffle B, 46-vertical position sensor, 47-vertical acceleration sensor, 48-horizontal left-right position sensor, 49-horizontal left-right acceleration sensor, 50-horizontal front-back position sensor, 51-horizontal front-back acceleration sensor, 52-controller, 53-air hole. Detailed Embodiments

[0018] The technical solution of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without making creative efforts fall within the protection scope of the present invention.

[0019] Such as Figure 1As shown in the figure, a super-low-frequency and large-bandwidth three-degree-of-freedom vibration isolator includes a base 1, a top plate 2 and a main air chamber 3. A honeycomb panel 6 is installed on the top of the base 1, and a lead-core rubber ball 7 is installed inside the honeycomb panel 6. Four side air chambers 4 are installed around the main air chamber 3 at the top of the honeycomb panel 6. The side air chambers 4 are communicated with the main air chamber 3 through multiple groups of air holes 53. Horizontal air chambers 5 are respectively installed at the tops of the side air chambers 4. A piston A301 is installed inside the main air chamber 3. The top of the piston A301 is connected to the top of the main air chamber 3 through an air film A302. A support rod 8 is installed inside the piston A301, and four guide rods 9 are installed around the support rod 8. A piston B501 is installed inside the horizontal air chamber 5. The piston B501 is connected to the horizontal air chamber 5 through an air film B502. The other end of the guide rod 9 is vertically connected to the inside of the piston B502. A magnetorheological elastomer 10 is installed on the top of the horizontal air chamber 4. An electromagnetic coil 11 is sleeved outside the magnetorheological elastomer 10. A square-ring-shaped support plate A12 is installed on the top of the magnetorheological elastomer 10. Buckling beams A13 are respectively installed around the top of the square-ring-shaped support plate A12. A square-ring-shaped support plate B14 is connected to the middle top of the buckling beam A13 through a support rod B43. Buckling beams B15 are respectively installed around the top of the square-ring-shaped support plate B14. The middle top of the buckling beam B15 is connected to the bottom of the top plate 2 through a support rod A41. A flexible ball joint 42 is installed at the connection between the support rod A43 and the top plate 2. Guide rails A16 are provided on the square-ring-shaped support plate A12. The two ends of the buckling beam A13 are respectively slidably connected to the guide rails A16 through sliders A17. A linear motor A18 is vertically installed outside the slider A17. A pressure sensor A19 is installed at the connection between one end of the buckling beam A13 and the slider A17. A position sensor A20 is installed on one of the sliders A17. Guide rails B21 are provided on the square-ring-shaped support plate B14. The two ends of the buckling beam B15 are respectively slidably connected to the guide rails B21 through sliders B22. A linear motor B23 is vertically installed outside the slider B22. A pressure sensor B24 is installed at the connection between one end of the buckling beam B15 and the slider B22. A position sensor B25 is installed on one of the sliders B22. Metal spring plates 26 are respectively installed at the four corners of the top of the square-ring-shaped support plate A12. The tops of the metal springs 26 are connected to the bottom of the top plate 2 through levers 27. The metal springs 26 and the levers 27, and the levers 27 and the top plate 2 are all connected through crossed roller bearings 28. The lever 27 is connected to the support 29 through a double-row angular contact ball bearing 30 as a fulcrum. The bottom of the support 29 is installed on the top of the square-ring-shaped support plate A12. A linear motor E39 is installed between the bottom of the metal spring 26 and the square-ring-shaped support plate A12. A permanent magnet A32 is installed in the middle at the bottom of the piston A301. An electromagnet A33 is installed at the position vertically corresponding to the permanent magnet A32 in the middle at the inner bottom of the main air chamber 3. A permanent magnet B34 is installed at the bottom of the guide rod 9.An electromagnet B35 is installed at a position on the top of the main air chamber 3 that is vertically corresponding to the permanent magnet B34. The electromagnet B35 is connected to the main air chamber 3 through a linear motor C36. A permanent magnet C37 is installed on the support rod 8 above the guide rod 9. An electromagnet C38 is installed at a position on the horizontal air chamber 5 that is vertically corresponding to the permanent magnet C37. The electromagnet C38 is connected to the horizontal air chamber 5 through a linear motor D39. A vertical position sensor 46 and a vertical acceleration sensor 47 are installed at the bottom of the top plate 2. A horizontal left-right position sensor 48, a horizontal left-right acceleration sensor 49, a horizontal front-back position sensor 50, and a horizontal front-back acceleration sensor 51 are installed at the top of the guide rod 9. A controller 52 is installed on one side of the base 1.,

[0020] The linear motor A18 is fixedly installed on the square annular support plate A12 through the baffle A44.

[0021] The linear motor B23 is fixedly installed on the square annular support plate B14 through the baffle B45.

[0022] A cushion block 31 is also installed at the connection position between the metal spring 26 and the linear motor E40.

[0023] An air inlet pipe A401 is opened on the outside of the side air chamber 4, and a pneumatic valve 402 is installed on the air inlet pipe A401.

[0024] An air inlet pipe B503 is opened on the outside of the horizontal air chamber 5, and a servo proportional valve 504 is installed on the air inlet pipe B503.

[0025] The controller is connected to the pneumatic valve, the servo proportional valve, the electromagnetic coil, the electromagnet A, the electromagnet B, the electromagnet C, the linear motor A, the linear motor B, the linear motor C, the linear motor D, the pressure sensor A, the position sensor A, the pressure sensor B, the position sensor B, the vertical position sensor, the vertical acceleration sensor, the horizontal left-right position sensor, the horizontal left-right acceleration sensor, the horizontal front-back position sensor, and the horizontal front-back acceleration sensor through cables.

[0026] During installation, the precision instrument is installed on the top plate 1. According to the requirements of the precision instrument, the pneumatic valve 402 is controlled by the controller 52 to control the air pressure in the main air chamber 3, so as to meet the load-bearing requirements of the top precision instrument and adjust the positive stiffness of the system at the same time; signals are collected by the pressure sensor A19, position sensor A20, pressure sensor B24, and position sensor B25, and then transmitted to the controller 52. The controller 52 controls the linear motor A18 and linear motor B23 to drive the pre-compression of the buckling beam A13 and buckling beam B15, and the negative stiffness of the system is adjusted through the double-layer buckling beam. At the same time, the controller 52 controls the linear motor E40 to drive the pre-compression of the metal spring 26, and the negative stiffness bandwidth of the system is expanded through the connected lever 27 to enhance the negative stiffness effect, and the negative stiffness is compensated through the interaction between the permanent magnet B34 and the electromagnet B35. The current magnitude of the electromagnet B35 is controlled by the controller 52, and the magnetic moment between the permanent magnet B34 and the electromagnet B35 is adjusted by controlling the linear motor C36 to realize the dual adjustment of the interaction between the permanent magnet B34 and the electromagnet B35, so as to control and finely adjust the negative stiffness characteristics and compensate for the stiffness drift of the passive structure under high loads; the positive stiffness is adjusted through the main air chamber 3, and multiple negative stiffness adjustments are realized through the pre-compression of the buckling beam A, buckling beam B, pre-compression of the metal spring 26, and the magnetic force between the permanent magnet B34 and the electromagnet B35. The quasi-zero stiffness can be achieved when the system is in static equilibrium.

[0027] During operation, the precision instrument generates vibrations. The vibration signals are collected by the vertical position sensor 46, vertical acceleration sensor 47, horizontal left-right position sensor 48, horizontal left-right acceleration sensor 49, horizontal front-back position sensor 50, and horizontal front-back acceleration sensor 51, and then the vibration signals are transmitted to the controller 52. When there is a vertical high-frequency vibration source, high-frequency vibration damping is achieved through the parallel connection of the main air chamber 3 and the side air chamber 4, and the damping effect is enhanced through multiple groups of air holes 53 between them. At the same time, the vibration damping of the ultra-high-frequency vibration source is achieved through the parallel structure of the honeycomb plate 6 and the lead-core rubber ball 7 set; when there is a vertical low-frequency vibration source, the low-frequency vibration damping is achieved through the magnetic force between the electromagnet A33 and the permanent magnet A32 by controlling the current magnitude of the electromagnet A33 by the controller 52; when there is a horizontal high-frequency vibration source, the controller 52 controls the servo proportional valve 504 to adjust the air pressure in the horizontal air chamber 5, so as to achieve high-frequency vibration damping; when there is a horizontal low-frequency vibration source, the controller 52 also controls the servo proportional valve 504 to adjust the air pressure in the horizontal air chamber 5, so as to achieve low-frequency vibration damping. At the same time, the controller 52 controls the current magnitude of the electromagnet C33 to realize the magnetic force between the permanent magnet C39 to achieve the compensation vibration damping of the low-frequency vibration source; when resonance occurs in the system, the controller 52 controls the current magnitude of the electromagnetic coil 11 to adjust the magnetic field magnitude and then change the stiffness of the magnetorheological elastomer 10 to avoid resonance.

[0028] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

Claims

1. A super-low-frequency, large-bandwidth three-degree-of-freedom vibration isolator, comprising a base, a top plate and a main air chamber, characterized in that, A honeycomb panel is installed on the top of the base. A lead core rubber ball is installed inside the honeycomb panel. Four side air chambers are installed around the main air chamber at the top of the honeycomb panel. The side air chambers are communicated with the main air chamber through multiple groups of air holes. Horizontal air chambers are respectively installed at the tops of the side air chambers. A piston A is installed inside the main air chamber. The top of the piston A is connected to the top of the main air chamber through an air film A. A support rod is installed inside the piston A. Four guide rods are installed around the support rod. A piston B is installed inside the horizontal air chamber. The piston B is connected to the horizontal air chamber through an air film B. The inside of the piston B is vertically connected to the other end of the guide rod. A magnetorheological elastomer is installed at the top of the horizontal air chamber. An electromagnetic coil is sleeved around the magnetorheological elastomer. A square-ring-shaped support plate A is installed at the top of the magnetorheological elastomer. Buckling beams A are respectively installed around the top of the square-ring-shaped support plate A. The middle top of the buckling beam A is connected to a square-ring-shaped support plate B through a support rod B. Buckling beams B are respectively installed around the top of the square-ring-shaped support plate B. The middle top of the buckling beam B is connected to the bottom of the top plate through a support rod A. A flexible spherical hinge is installed at the connection between the support rod A and the top plate. A guide rail A is provided on the square-ring-shaped support plate A. The two ends of the buckling beam A are respectively slidably connected to the guide rail A through sliders A. A linear motor A is vertically installed on the outside of the slider A. A pressure sensor A is installed at the connection between one end of the buckling beam A and the slider A. A position sensor A is installed on one of the sliders A. A guide rail B is provided on the square-ring-shaped support plate B. The two ends of the buckling beam B are respectively slidably connected to the guide rail B through sliders B. A linear motor B is vertically installed on the outside of the slider B. A pressure sensor B is installed at the connection between one end of the buckling beam B and the slider B. A position sensor B is installed on one of the sliders B. Metal spring plates are respectively installed at the four corners of the top of the square-ring-shaped support plate A. The tops of the metal springs are connected to the bottom of the top plate through levers. The metal springs and the levers, and the levers and the top plate are all connected through crossed roller bearings. The lever is connected to the support through a double-row angular contact ball bearing as a fulcrum. The bottom of the support is installed on the top of the square-ring-shaped support plate A. A linear motor E is installed between the bottom of the metal spring and the square-ring-shaped support plate A. A permanent magnet A is installed in the middle of the bottom of the piston A. An electromagnet A is installed at the position vertically corresponding to the permanent magnet A in the middle of the inner bottom of the main air chamber. A permanent magnet B is installed at the bottom of the guide rod. An electromagnet B is installed at the position vertically corresponding to the permanent magnet B at the top of the main air chamber. The electromagnet B is connected to the main air chamber through a linear motor C. A permanent magnet C is installed on the support rod above the guide rod. An electromagnet C is installed at the position vertically corresponding to the permanent magnet C in the horizontal air chamber. The electromagnet C is connected to the horizontal air chamber through a linear motor D. A vertical position sensor and a vertical acceleration sensor are installed at the bottom of the top plate. A horizontal left-right position sensor, a horizontal left-right acceleration sensor, a horizontal front-back position sensor, and a horizontal front-back acceleration sensor are installed at the top of the guide rod. A controller is installed on one side of the base.

2. The ultra-low frequency and large bandwidth three-degree-of-freedom vibration isolator according to claim 1, characterized in that The linear motor A is fixedly installed through the baffle A and the square annular support plate A.

3. The ultra-low frequency and large bandwidth three-degree-of-freedom vibration isolator according to claim 1, characterized in that The linear motor B is fixedly installed through the baffle B and the square annular support plate B.

4. The ultra-low frequency and large bandwidth three-degree-of-freedom vibration isolator according to claim 1, wherein A cushion block is also installed at the connection between the metal spring and the linear motor E.

5. The ultra-low frequency and large bandwidth three-degree-of-freedom vibration isolator according to claim 1, characterized in that, An air inlet pipe A is provided on the outside of the side air chamber, and a pneumatic valve is installed on the air inlet pipe A.

6. The ultra-low frequency and large bandwidth three-degree-of-freedom vibration isolator according to claim 1, wherein, An air inlet pipe B is provided on the outside of the horizontal air chamber, and a servo proportional valve is installed on the air inlet pipe B.

7. A kind of ultra-low frequency and large bandwidth three-degree-of-freedom vibration isolator according to claim 1, characterized in that, The controller is connected to the pneumatic valve, the servo proportional valve, the electromagnetic coil, the electromagnet A, the electromagnet B, the electromagnet C, the linear motor A, the linear motor B, the linear motor C, the linear motor D, the pressure sensor A, the position sensor A, the pressure sensor B, the position sensor B, the vertical position sensor, the vertical acceleration sensor, the horizontal left - right position sensor, the horizontal left - right acceleration sensor, the horizontal front - back position sensor, and the horizontal front - back acceleration sensor through cables.

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