Four-mass gyroscope structure

Abstract

The invention provides a four-mass gyroscope structure, which comprises a substrate and four substructures with the same structure, the four substructures are symmetrically arranged in pairs, the four substructures are connected through a detection reverse double-lever mechanism, the detection reverse double-lever mechanism comprises two levers extending along the driving direction, and the two levers are connected with the substrate. The two ends of each lever are connected with the two adjacent sub-structures in the driving direction respectively, and the middles of the two levers are connected through an elastic connecting piece. According to the invention, the four symmetrically arranged substructures are connected by adopting a detection reverse double-lever mechanism, so that the detection direction firstly works in a reverse mode, a common-mode error signal is eliminated, meanwhile, a low-order interference mode does not exist in the detection direction, and the environmental adaptability of the gyroscope is improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of inertial sensors, and particularly relates to a four-mass gyro structure. Background Art

[0002] Inertial sensors include accelerometers, gyroscopes, and their single, dual, and triaxial combinations. Among them, accelerometers are used to detect the acceleration signals of an object in the independent three axes of the carrier coordinate system, and gyroscopes are used to detect the angular velocity signals of the carrier relative to the navigation coordinate system. Measuring the angular velocity and acceleration of an object in three-dimensional space can accurately characterize the attitude of the object, which has very important application value in navigation.

[0003] In the existing four-mass gyro structures, the coupling method between different mass blocks is generally elastic beam connection, which enables the movement between the mass blocks to be linked. However, this coupling method between different mass blocks causes the co-directional interference mode to appear before the reverse working mode, and the existence of the co-directional interference mode is not conducive to improving the environmental adaptability of the gyro. Summary of the Invention

[0004] The purpose of the present invention is to provide a four-mass gyro structure, which can at least solve some defects existing in the prior art.

[0005] To achieve the above purpose, the present invention adopts the following technical solutions: A four-mass gyro structure includes a base and four sub-structures with the same structure. The four sub-structures are arranged symmetrically in pairs, and the four sub-structures are connected by a detection reverse double-lever mechanism. The detection reverse double-lever mechanism includes two levers extending along the driving direction. Each end of each lever is connected to two adjacent sub-structures in the driving direction, and the middle parts of the two levers are connected by an elastic connecting piece.

[0006] Further, each lever includes two rod body parts and a connecting part connecting the two rod body parts. The connecting part is anchored on the base, and the end parts of the two rod body parts are respectively connected to two sub-structures. The connecting parts of the two levers are connected by an elastic connecting piece.

[0007] Further, a driving coupling mechanism is connected between two adjacent sub-structures in the driving direction, and a reverse link mechanism is connected between two adjacent sub-structures in the detection direction.

[0008] Further, the driving coupling mechanism is a folded beam structure extending and folding along the driving direction, and the two ends of the folded beam structure are respectively connected to two adjacent sub-structures in the driving direction.

[0009] Further, the reverse link mechanism includes a link body. Both ends of the link body are connected to the corresponding side sub-structures through link connection springs, and the middle of the link body is anchored to the base through a link swing spring.

[0010] Further, the sub-structure includes a sensitive mass block, a driving component, and a detecting component. The driving components are distributed in the driving direction of the sensitive mass block, and the detecting components are distributed in the detecting direction of the sensitive mass block and are connected to the sensitive mass block through a vibration decoupling elastic component; each of the detecting components is arranged between two adjacent sensitive mass blocks along the detecting direction, and each of the detecting components is connected to the detecting reverse double lever mechanism.

[0011] Further, the driving component includes a driving capacitor and a driving detection capacitor respectively distributed at both ends in the driving direction of the sensitive mass block. The driving capacitor and the driving detection capacitor are both connected to the sensitive mass block through a driving vibration transfer beam. The driving detection capacitors of two adjacent sub-structures along the driving direction are connected through a driving coupling mechanism.

[0012] Further, the driving capacitor includes a first driving frame and at least one set of driving moving comb teeth and at least one set of driving fixed comb teeth arranged in the first driving frame; the driving detection capacitor includes a second driving frame and at least one set of driving detection moving comb teeth and at least one set of driving detection fixed comb teeth arranged in the second driving frame; the middle parts of the first driving frame and the second driving frame are both anchored to the base through a first vibration elastic member, and the ends of the first driving frame and the second driving frame are both connected to the sensitive mass block through a driving vibration transfer beam.

[0013] Further, the detecting component includes a detecting capacitor frame and at least one set of detecting moving comb teeth and at least one set of detecting fixed comb teeth arranged in the detecting capacitor frame; one side of the detecting capacitor frame close to the sensitive mass block is connected to the sensitive mass block through a vibration decoupling elastic component, the side of the detecting capacitor frame far from the sensitive mass block is connected to the detecting reverse double lever mechanism, and both ends of the detecting capacitor frame are anchored to the base through a second vibration elastic member.

[0014] Further, the sub-structure further includes an orthogonal correction structure for compensating the orthogonal stiffness coupling error. There are two sets of orthogonal correction structures symmetrically arranged along the driving direction. The orthogonal correction structure includes orthogonal moving comb teeth and orthogonal fixed comb teeth. The orthogonal fixed comb teeth are anchored to the base, and the orthogonal moving comb teeth are connected to the sensitive mass block.

[0015] Compared with the prior art, the beneficial effects of the present invention are: The four-mass gyro structure provided by the present invention uses a design in which four symmetrically arranged sub-structures are connected by a detection reverse double-lever mechanism, enabling the detection direction to first operate in the reverse mode, eliminating the common-mode error signal, and at the same time, there is no low-order interference mode in the detection direction, improving the environmental adaptability of the gyro.

[0016] The following will further elaborate on the present invention in conjunction with the accompanying drawings. Description of the Drawings

[0017] Figure 1 is a schematic diagram of the four-mass gyro structure of the present invention; Figure 2 is a schematic diagram of a single sub-structure in the four-mass gyro structure of the present invention; Figure 3 is a schematic diagram of the detection reverse double-lever mechanism in the four-mass gyro structure of the present invention; Figure 4 is Figure 3 the enlarged view of part I in Figure 5 is a schematic diagram of the vibration of the sensitive mass block along the driving direction in the four-mass gyro structure of the present invention; Figure 6 is a schematic diagram of the vibration of the sensitive mass block along the detection direction in the four-mass gyro structure of the present invention.

[0018] Description of the reference numerals: 1, sub-structure; 2, detection reverse double-lever mechanism; 3, reverse link mechanism; 4, drive coupling mechanism; 5, sensitive mass block; 6, drive vibration transmission beam; 7, first vibration elastic member; 8, first drive frame; 9, drive moving comb teeth; 10, drive fixed comb teeth; 11, second drive frame; 12, drive detection moving comb teeth; 13, drive detection fixed comb teeth; 14, U-shaped beam; 15, connection beam; 16, vibration decoupling straight beam; 17, second vibration elastic member; 18, detection capacitor frame; 19, detection fixed comb teeth; 20, detection moving comb teeth; 21, lever connection spring; 22, link swing spring; 23, link connection spring; 24, orthogonal correction structure; 25, rod body part; 26, connection part; 27, elastic connection member. Detailed Embodiment

[0019] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0020] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by terms such as "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0021] In the description of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "mounted", "connected", and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or a contact connection or an integral connection; for those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0022] The terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features; in the description of the present invention, unless otherwise stated, the meaning of "a plurality" is two or more.

[0023] As Figures 1 to 6 shown, this embodiment provides a four-mass gyro structure, including a base (not shown in the figure) and four identical sub-structures 1. The four sub-structures 1 are symmetrically arranged in pairs, and the four sub-structures 1 are connected by a detection reverse double-lever mechanism 2. Through the detection reverse double-lever mechanism, adjacent two sub-structures move in opposite directions in the detection working mode; specifically, as Figure 3 and Figure 4 shown, the detection reverse double-lever mechanism 2 is a centrosymmetric structure, including two levers. Both levers extend along the driving direction, and the two levers are arranged parallel and symmetrically in the detection direction (i.e., arranged up and down as in Figure 3 ). The two ends of each lever are respectively connected to two sub-structures 1 connected by the same driving coupling mechanism 4, and the middle parts of the two levers are connected by an elastic connecting member 27. Among them, in this embodiment, the driving direction is the movement direction of the sub-structure 1 in the driving state, that is, the left-right direction in Figure 1 , and the detection direction is the movement direction of the sub-structure 1 in the detection state, that is, Figure 1The vertical direction. In this embodiment, when there is an angular velocity input from the outside world, when the four sub-structures 1 are subjected to the Coriolis force and thus cause vibrations in the detection direction, due to the design of coupling the four sub-structures 1 with a detection-direction double-lever mechanism 2, every two adjacent sub-structures 1 move in opposite directions in the detection direction, enabling the detection work to be in the reverse mode and improving the environmental adaptability of the gyroscope.

[0024] For the sake of convenience in description, the upper and lower levers are respectively defined as the first lever and the second lever. The two ends of the first lever are respectively connected to the left and right sub-structures 1 above through lever connection springs 21, and the two ends of the second lever are respectively connected to the left and right sub-structures 1 below through lever connection springs 21, and the middle of the first lever and the second lever are connected through an elastic connection member 27. When the four-mass gyro structure vibrates in the detection direction, since two adjacent left and right sub-structures 1 are connected by the same lever, the two adjacent left and right sub-structures 1 move in opposite directions; and when two adjacent upper and lower sub-structures 1 move in the same direction in the detection direction, since the two levers connecting these two sub-structures 1 are connected through the elastic connection member 27 in the middle, the connection common point will be subjected to a tensile force on one side and a compressive force on the other side, and the resultant external force at the common point is zero, that is, the state of moving in the same direction is suppressed; when two adjacent upper and lower sub-structures 1 move in opposite directions in the detection direction, the common point connected by the two levers will be subjected to tensile forces on both sides, and the resultant external force at the common point is not zero, so they can move in opposite directions.

[0025] Optionally, as Figure 4 shown, the lever includes two rod body parts 25 and a connection part 26 connecting the two rod body parts 25. The connection part 26 is anchored to the base, the ends of the two rod body parts 25 are respectively connected to two sub-structures 1, and the connection parts 26 of the two levers are connected into an integral structure through an elastic connection member 27. Specifically, the connection part 26 adopts a frame structure, and the two rod body parts 25 on the left side of the two levers are connected through an elastic connection member 27, and the two rod body parts 25 on the right side of the two levers are connected through an elastic connection member 27.

[0026] In some embodiments, a drive coupling mechanism 4 is designed to be connected between two adjacent sub-structures 1 along the drive direction, and two adjacent sub-structures 1 along the detection direction are connected through a reverse link mechanism 3.

[0027] Optionally, the driving coupling mechanism 4 is a folding beam structure extending and folding along the driving direction, and two ends of the folding beam structure are respectively connected to two adjacent sub-structures 1 along the driving direction. In this embodiment, the driving coupling mechanism 4 adopts a W-shaped folding beam structure formed by connecting two U-shaped beams side by side in two groups. The two groups of W-shaped folding beams are symmetrically arranged up and down. Two ends of the upper W-shaped folding beam are respectively connected to the upper ends of two adjacent sub-structures 1, and two ends of the lower W-shaped folding beam are respectively connected to the lower ends of two adjacent sub-structures 1. With the design of the driving coupling mechanism 4, the two sub-structures 1 connected by the same driving coupling mechanism 4 move in opposite directions in the driving direction.

[0028] Optionally, the reverse link mechanism 3 includes a link body. Two ends of the link body are respectively connected to the corresponding side of the sub-structure 1 through link connection springs 23, and the middle of the link body is anchored to the base through a link swing spring 22. When the sub-structure 1 vibrates in the driving direction, the reverse link mechanism 3 swings to cause the two adjacent sub-structures 1 in the detection direction connected by it to move in opposite directions. Since the moving directions of the two sub-structures 1 connected to the two ends of the reverse link mechanism 3 are along the driving direction, the link connection springs 23 expand and contract along the driving direction, and the link swing spring 22 expands and contracts along the swinging direction of the link body. Through the connection design of the driving coupling mechanism 4 and the reverse link mechanism 3 for the four sub-structures, when the four sub-structures 1 vibrate in the driving direction, the two adjacent sub-structures 1 move in opposite directions.

[0029] For a single sub-structure 1, optional implementation manners are as follows Figure 2As shown, the sub-structure 1 includes a sensitive mass block 5, a driving component, and a detecting component. The driving component includes a driving capacitor and a driving detection capacitor respectively distributed at both ends of the sensitive mass block 5 in the driving direction. Both the driving capacitor and the driving detection capacitor are connected to the sensitive mass block 5 through driving vibration transmission beams 6. The detecting component is distributed in the detection direction of the sensitive mass block 5 and is connected to the sensitive mass block 5 through a vibration decoupling elastic component. Among them, the driving detection capacitors of two adjacent sub-structures 1 along the driving direction are symmetrically arranged between two sensitive mass blocks 5 and are connected through a driving coupling mechanism 4. The driving capacitors of the two sub-structures 1 are symmetrically arranged at both ends of the two sensitive mass blocks 5. Under this structural design, when the gyro structure is in the driving working mode, the sensitive mass block 5 vibrates under the electrostatic force generated by the driving capacitor. Since the driving capacitors of two adjacent sub-structures 1 along the driving direction are symmetrically arranged, the acting directions of the electrostatic forces generated by them are opposite. Therefore, the sensitive mass blocks 5 between two adjacent sub-structures 1 along the driving direction move in opposite directions. At this time, the driving detection capacitors of the two sub-structures 1 are connected through the driving coupling mechanism 4, and the capacitance values at both ends increase and decrease, and the difference between the capacitances at both ends forms a differential capacitance, which increases the driving capacitor detection ability. At the same time, the common-mode error signal is subtracted by the differential, improving the capacitance detection sensitivity.

[0030] Specifically, the driving capacitor includes a first driving frame 8 and at least one set of driving moving comb teeth 9 and at least one set of driving fixed comb teeth 10 arranged in the first driving frame 8. The driving moving comb teeth 9 and the driving fixed comb teeth 10 correspond one by one and extend along the driving direction. The driving fixed comb teeth 10 are anchored to the substrate, and the driving moving comb teeth 9 are connected to the first driving frame 8. The driving detection capacitor includes a second driving frame 11 and at least one set of driving detection moving comb teeth 12 and at least one set of driving detection fixed comb teeth 13 arranged in the second driving frame 11. The driving detection moving comb teeth 12 and the driving detection fixed comb teeth 13 correspond one by one and extend along the driving direction. The driving detection fixed comb teeth 13 are anchored to the substrate, and the driving detection moving comb teeth 12 are connected to the second driving frame 11. Among them, the middle parts of the first driving frame 8 and the second driving frame 11 are both anchored to the substrate through a first vibration elastic member 7. The first vibration elastic member 7 can expand and contract along the driving direction, and can be, but not limited to, a vibration spring, a U-shaped beam or an O-shaped beam that can be telescopically bent. Through the setting of the first vibration elastic member 7, the movability of the first driving frame 8 and the second driving frame 1 along the driving direction is ensured. At the same time, the design of anchoring the first vibration elastic member 7 ensures the stability of the movement of the first driving frame 8 and the second driving frame 11 along the driving direction. The ends of the first driving frame 8 and the second driving frame 11 are both connected to the sensitive mass block 5 through driving vibration transmission beams 6.

[0031] In some embodiments, each of the detection components is arranged between two adjacent sensitive mass blocks 5 along the detection direction, that is, the detection components of the four sub-structures 1 are arranged on the side of the sensitive mass block 5 close to the symmetry center of the four sub-structures 1. At the same time, the detection reverse double-lever mechanism 2 is arranged between two adjacent detection components along the detection direction. Under this structural design, the sensitive mass block 5 vibrates due to the electrostatic force generated by the driving capacitance. When there is an angular velocity input from the outside, the sensitive mass block 5 is subjected to the Coriolis force and thus causes vibration in the detection direction. Since the four sub-structures 1 are connected by the detection reverse double-lever mechanism 2, when the sensitive mass block 5 is subjected to the Coriolis force, due to the existence of the double-lever structure, the four sensitive mass blocks 5 move in opposite directions. The capacitance values of the detection components at the upper and lower ends of the detection reverse double-lever mechanism 2 increase and decrease respectively, and the difference between the two ends of the capacitance forms a differential capacitance, which increases the capacitance detection signal. At the same time, the common-mode error signal is subtracted by the differential, improving the capacitance detection sensitivity.

[0032] Optionally, the detection component includes a detection capacitance frame 18 and at least one group of detection moving comb teeth 20 and at least one group of detection fixed comb teeth 19 arranged in the detection capacitance frame 18; the detection moving comb teeth 20 and the detection fixed comb teeth 19 correspond one by one and extend along the detection direction. The detection fixed comb teeth 19 are anchored to the substrate, and the detection moving comb teeth 20 are connected to the detection capacitance frame 18. Specifically, in a single sub-structure 1, the comb teeth of each group of detection moving comb teeth 20 face the same direction, the comb teeth of each group of detection fixed comb teeth 19 face the same direction, and the detection moving comb teeth 20 and the detection fixed comb teeth 19 both extend along the detection direction. At the same time, the detection components of two adjacent sub-structures 1 in the detection direction are symmetrically arranged, that is, the comb teeth of the detection moving comb teeth 20 and the detection fixed comb teeth 19 of the two sub-structures 1 face in opposite directions. When the sensitive mass block 5 is subjected to the Coriolis force and causes vibration in the detection direction, as Figure 6 shown, due to the design of the detection reverse double-lever mechanism 2, the capacitance values of the detection components of the two sub-structures symmetrically arranged above and below the detection reverse double-lever mechanism 2 increase and decrease respectively, and the difference between them forms a differential capacitance, which increases the capacitance detection signal. At the same time, the common-mode error signal is subtracted by the differential. The comb tooth arrays on the four detection capacitance frames are arranged, further increasing the capacitance detection signal and improving the capacitance detection sensitivity.

[0033] Specifically, both ends of the detection capacitance frame 18 are anchored to the substrate through the second vibration elastic member 17 to ensure the stability of the movement of the detection component along the detection direction. Since the movement direction of the detection capacitance frame 18 is along the detection direction, the second vibration elastic member 17 also expands and contracts along the detection direction. The second vibration elastic member 17 can be but is not limited to a vibration spring, a retractable and bendable U-shaped beam or an O-shaped beam, etc.

[0034] One side of the detection capacitor frame 18 close to the sensitive mass block 5 is connected to the sensitive mass block 5 through a vibration decoupling elastic component. Specifically, as Figure 2 and Figure 6 shown, the vibration decoupling elastic component includes a vibration decoupling straight beam 16 and a U-shaped beam 14. The vibration decoupling straight beam 16 is located between the sensitive mass block 5 and the detection capacitor frame 18. Both ends of the vibration decoupling straight beam 16 are anchored to the substrate. The opening of the U-shaped beam 14 faces the side of the vibration decoupling straight beam 16. Both ends of the U-shaped beam 14 are connected to the sensitive mass block 5. The center of the bottom of the U-shaped beam 14 is connected to the center of the vibration decoupling straight beam 16 through a connecting beam 15. At the same time, the middle part of the detection capacitor frame 18 is also connected to the center of the vibration decoupling straight beam 16. Among them, both the vibration decoupling straight beam 16 and the U-shaped beam 14 can undergo telescopic bending deformation when subjected to a force.

[0035] One side of the detection capacitor frame 18 far from the sensitive mass block 5 is connected to the detection reverse double lever mechanism 2. Specifically, the detection capacitor frames 18 of the two upper sub-structures 1 are respectively connected to both ends of the first lever of the detection reverse double lever mechanism 2, and the detection capacitor frames 18 of the two lower sub-structures 1 are respectively connected to both ends of the second lever of the detection reverse double lever mechanism 2, thereby realizing reverse movement between two adjacent sensitive mass blocks 5.

[0036] Preferably, the sub-structure 1 further includes an orthogonal correction structure 24 for compensating the orthogonal stiffness coupling error. There are two groups of the orthogonal correction structures 24 symmetrically arranged along the driving direction. Each group of the orthogonal correction structures 24 includes orthogonal moving comb teeth and orthogonal fixed comb teeth. The orthogonal fixed comb teeth are anchored to the substrate, and the orthogonal moving comb teeth are connected to the sensitive mass block 5. Specifically, a square frame for arranging the orthogonal correction structure 24 is provided on the sensitive mass block 5. The comb teeth of the orthogonal moving comb teeth are symmetrically arranged on the left and right sides of the square frame. The number of the comb teeth of the orthogonal moving comb teeth can be designed according to actual needs. In this embodiment, it is illustrated by taking the orthogonal moving comb teeth having four comb teeth as an example. The four comb teeth of the orthogonal moving comb teeth are arranged in pairs symmetrically on the left and right sides of the square frame. The anchoring point of the orthogonal fixed comb teeth is located at the center of the square frame. The orthogonal fixed comb teeth have two comb teeth, which respectively extend from the anchoring point to the left and right sides and are located between the two corresponding orthogonal moving comb teeth and the distances between them are not equal.

[0037] It should be noted that in the present invention, Figure 5 and Figure 6 are the schematic diagrams of the final motion states of the movable components of the four-mass gyro structure vibrating along the driving direction and the detection direction respectively. And in order to reflect the motion effect, the moving displacements of the movable components in the figures are exaggerated.

[0038] The above examples are only illustrative of the present invention and do not constitute a limitation on the scope of protection of the present invention. Any design identical or similar to the present invention falls within the scope of protection of the present invention.

Claims

1. A four-mass gyro structure, characterized in that: It includes a base and four sub-structures with the same structure. The four sub-structures are arranged symmetrically in pairs, and are connected by a detection reverse double-lever mechanism. The detection reverse double-lever mechanism includes two levers arranged along the driving direction. Each end of each lever is connected to two adjacent sub-structures in the driving direction, and the middle parts of the two levers are connected by an elastic connecting piece.

2. The four-mass gyro structure according to claim 1, wherein: Each lever includes two rod body parts and a connecting part connecting the two rod body parts. The connecting part is anchored on the base, and the end parts of the two rod body parts are respectively connected to two sub-structures. The connecting parts of the two levers are connected by an elastic connecting piece.

3. The four-mass gyro structure according to claim 1, wherein: A driving coupling mechanism is connected between two adjacent sub-structures in the driving direction, and a reverse link mechanism is connected between two adjacent sub-structures in the detection direction.

4. The four-mass gyro structure according to claim 3, characterized in that: The driving coupling mechanism is a folded beam structure extending and folding along the driving direction, and the two ends of the folded beam structure are respectively connected to two adjacent sub-structures in the driving direction.

5. The four-mass gyro structure according to claim 3, wherein: The reverse link mechanism includes a link body. The two ends of the link body are connected to the corresponding side sub-structures through link connecting springs, and the middle part of the link body is anchored on the base through a link swinging spring.

6. The four-mass gyro structure according to any one of claims 1-5, characterized in that: Each sub-structure includes a sensitive mass block, a driving component and a detection component. The driving components are distributed in the driving direction of the sensitive mass block, and the detection components are distributed in the detection direction of the sensitive mass block, and are connected to the sensitive mass block through a vibration decoupling elastic component; each detection component is arranged between two adjacent sensitive mass blocks in the detection direction, and each detection component is connected to the detection reverse double-lever mechanism.

7. The four-mass gyro structure according to claim 6, wherein: The driving component includes a driving capacitor and a driving detection capacitor respectively distributed at both ends of the sensitive mass block in the driving direction. The driving capacitor and the driving detection capacitor are both connected to the sensitive mass block through a driving vibration transmission beam. The driving detection capacitors of two adjacent sub-structures in the driving direction are connected through a driving coupling mechanism.

8. The four-mass gyro structure according to claim 7, wherein: The driving capacitor includes a first driving frame and at least one group of driving moving comb teeth and at least one group of driving fixed comb teeth arranged in the first driving frame; the driving detection capacitor includes a second driving frame and at least one group of driving detection moving comb teeth and at least one group of driving detection fixed comb teeth arranged in the second driving frame; The middle parts of the first driving frame and the second driving frame are both anchored on the base through a first vibration elastic piece, and the end parts of the first driving frame and the second driving frame are both connected to the sensitive mass block through a driving vibration transmission beam.

9. The four-mass gyro structure according to claim 6, characterized in that: The detection component includes a detection capacitor frame and at least one group of detection moving comb teeth and at least one group of detection fixed comb teeth arranged in the detection capacitor frame; one side of the detection capacitor frame close to the sensitive mass block is connected to the sensitive mass block through a vibration decoupling elastic component, the side of the detection capacitor frame far from the sensitive mass block is connected to the detection reverse double-lever mechanism, and the two ends of the detection capacitor frame are anchored on the base through a second vibration elastic piece.

10. The four-mass gyro structure according to claim 6, wherein: The sub-structure further includes an orthogonal correction structure for compensating the orthogonal stiffness coupling error. There are two sets of the orthogonal correction structures symmetrically arranged along the driving direction. The orthogonal correction structure includes orthogonal moving comb teeth and orthogonal fixed comb teeth. The orthogonal fixed comb teeth are anchored on the substrate, and the orthogonal moving comb teeth are connected to the sensitive mass block.

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