Measuring device

Abstract

The invention relates to the technical field of magnetic measurement, and discloses a measuring device which comprises a magnet exciting coil, at least one detection device and a displacement assembly. A detection chamber is formed on the inner side of the excitation coil, and a sample is rotatably arranged in the detection chamber. The detection device comprises a reflecting mirror, detection light reflected by the reflecting mirror can enter the sample from the inlet of the detection cavity, and the detection device is used for detecting the magnetism of the sample through the detection light. The displacement assembly is connected with the reflector and used for driving the reflector to move and changing the incident position of the detection light on the sample. The whole structure of the light path system does not need to be moved, the light path can be controlled to move only by moving the reflector, and the irradiation position of the detection light on the sample is changed. And only by controlling the rotation of the sample to be matched with the movement of the reflector, the required movement range of the reflector can be further reduced, the limitation of the mounting structure on the movement of the light path system and the sample is reduced, and the detectable range of the sample is enlarged, so that the magnetic measurement of the whole area of the sample is easier to realize.

Description

Technical Field

[0001] The present application relates to the field of magnetic measurement technology, for example, to a measuring device. Background Art

[0002] Magnetic measurement technology currently holds a crucial position in physics, materials science, and engineering. Magneto-optical Kerr effect (MOKE) measurement, as an effective magnetic characterization tool, is widely used to study the magnetic properties of materials. However, existing MOKE instruments suffer from relatively low temporal resolution, making it difficult to capture the dynamic magnetization of a sample on ultrafast timescales. This limits the study of transient phenomena in magnetic materials.

[0003] Related technologies: A pulsed MOKE device employs a pulsed excitation method, using short pulsed magnetic fields or currents to stimulate the magnetization state of a sample. This short pulse excitation method enables the device to capture the dynamic magnetization process of the sample on an ultrafast timescale in a very short time, achieving higher temporal resolution and providing strong support for studying transient phenomena in magnetic materials.

[0004] During the implementation of the embodiments of the present disclosure, it was found that at least the following problems exist in the related art: Related technologies use pulsed excitation to achieve higher temporal resolution in magnetic measurement equipment. However, in practical applications, magnetic measurements at different locations on a sample often require changing the position of the detection light on the sample by moving the entire optical system or the sample itself. However, this approach has certain limitations. Because the movement of the optical system and sample is easily restricted by the mounting structure, the detectable range is relatively limited, making it difficult to achieve magnetic measurements across the entire sample area.

[0005] The above information disclosed in this Background section is only for enhancement of understanding of the background of the invention and therefore it may contain information that does not form the prior art that is already known to a person of ordinary skill in the art. Summary of the Invention

[0006] In order to provide a basic understanding of some aspects of the disclosed embodiments, a brief summary is given below. The summary is not an extensive review, nor is it intended to identify key / critical elements or delineate the scope of protection of these embodiments, but rather serves as a prelude to the detailed description that follows.

[0007] The embodiments of the present disclosure provide a measuring device to reduce the restrictions of the mounting structure on the movement of the optical path system and the sample, increase the detectable range of the sample, and thus more easily achieve magnetic measurement of the entire area of the sample.

[0008] In some embodiments, the measuring device includes: an excitation coil, an inner side of which forms a detection chamber, and the sample is rotatably arranged in the detection chamber; at least one detection device, the detection device includes a reflector, and the detection light reflected by the reflector can be incident on the sample from the entrance of the detection chamber, and the detection device is used to detect the magnetism of the sample through the detection light; a displacement component, connected to the reflector, used to drive the reflector to move and change the incident position of the detection light on the sample.

[0009] Optionally, the detection device includes: a light source, a polarizer, a spectrometer, an analyzer, a detector and a reflector; wherein the detection light emitted by the light source passes through the polarizer, the spectrometer and the reflector and then enters the sample, is reflected by the sample, returns to the reflector and passes through the spectrometer and the analyzer to reach the detector.

[0010] Optionally, the detection device includes: a light source, a polarizer, a spectrometer, a Wollaston prism, a first detector, a second detector and a reflector; wherein the detection light emitted by the light source passes through the polarizer, the spectrometer and the reflector and then enters the sample, is reflected by the sample and then returns to the reflector and passes through the spectrometer and the Wollaston prism to reach the first detector and the second detector.

[0011] Optionally, at least one detection device includes: a first detection device, arranged on the first side of the detection chamber, for generating a first detection light; a second detection device, arranged on the second side of the detection chamber, for generating a second detection light; wherein the first detection light and the second detection light can be incident on the first side and the second side of the sample respectively from different entrances of the detection chamber.

[0012] Optionally, the measuring device also includes: a pick-up and delivery shaft, connected to the first displacement device, and the sample can be fixed on the sample fixing section of the pick-up and delivery shaft; wherein the first displacement device can drive the pick-up and delivery shaft to extend into the detection chamber; a driving part, connected to the pick-up and delivery shaft, used to drive the sample fixing section of the pick-up and delivery shaft to rotate.

[0013] Optionally, the driving part includes: a transmission shaft; a first driving motor connected to the transmission shaft, for driving the transmission shaft to rotate; wherein the first displacement device can drive the pickup shaft to extend into the detection chamber and connect to the transmission shaft to drive the sample fixing section of the pickup shaft to rotate.

[0014] Optionally, the driving unit includes: a fifth driving motor, which is provided on the first displacement device and is used to drive the sample fixing section of the picking-up and delivering shaft to rotate.

[0015] Optionally, the reflector moves at least within a preset range; wherein, when the reflector moves within the preset range, the optical path from the detection light to the sample surface is unobstructed.

[0016] Optionally, the detection light moves at least in a radial direction of the sample.

[0017] Optionally, the excitation coil generates a magnetic field along the axial direction of the excitation coil in the detection chamber.

[0018] The measuring device provided by the embodiments of the present disclosure can achieve the following technical effects: The measuring device includes an excitation coil, at least one detection device and a displacement assembly. A detection chamber is formed inside the excitation coil, and the sample is rotatably arranged in the detection chamber. The detection device includes a reflector, and the detection light reflected by the reflector can be incident on the sample from the entrance of the detection chamber. The detection device is used to detect the magnetism of the sample through the detection light. The displacement assembly is connected to the reflector, and is used to drive the reflector to move and change the incident position of the detection light on the sample. There is no need to move the overall structure of the optical path system. The optical path movement can be controlled and the irradiation position of the detection light on the sample can be changed by moving the reflector. At the same time, there is no need to control the displacement of the sample. It is only necessary to control the rotation of the sample to cooperate with the movement of the reflector, which can further reduce the range of movement of the reflector, reduce the restrictions of the installation structure on the movement of the optical path system and the sample, and increase the detectable range of the sample, thereby making it easier to achieve magnetic measurement of the entire area of the sample.

[0019] The above general description and the following description are exemplary and explanatory only and are not intended to limit the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] One or more embodiments are exemplarily described by corresponding drawings. These exemplary descriptions and drawings do not limit the embodiments. Elements with the same reference numerals in the drawings are shown as similar elements. The drawings do not constitute a scale limitation. In addition, Figure 1 is a schematic diagram of the overall structure of a magnetic measurement device provided by an embodiment of the present disclosure; Figure 2 is a schematic diagram of a sample structure provided by an embodiment of the present disclosure; Figure 3 is a schematic diagram of an optical path structure provided by an embodiment of the present disclosure; Figure 4 is a schematic diagram of another optical path structure provided by an embodiment of the present disclosure; Figure 5 is a schematic diagram of another optical path structure provided by an embodiment of the present disclosure; Figure 6 is a schematic diagram of another optical path structure provided by an embodiment of the present disclosure; Figure 7 is a schematic diagram of a driving unit structure provided by an embodiment of the present disclosure; Figure 8 is a schematic diagram of a magnetic field generating structure provided by an embodiment of the present disclosure; Figure 9is a schematic diagram of a pickup and delivery unit structure provided by an embodiment of the present disclosure; Figure 10 It is a schematic diagram of a partial structure of a pickup and delivery portion provided by an embodiment of the present disclosure; Figure 11 This is a schematic structural diagram of a sample installation of a pickup and delivery unit provided by an embodiment of the present disclosure; Figure 12 is a schematic diagram of a transfer unit structure provided by an embodiment of the present disclosure; Figure 13 is a schematic diagram of a second displacement device structure provided by an embodiment of the present disclosure; Figure 14 It is a schematic diagram of a telescopic component structure provided by an embodiment of the present disclosure.

[0021] Reference numerals: 10: Excitation coil; 11: Detection chamber; 12: Sample; 13: Bracket; 14: First base; 15: Transmission surface; 16: Connecting part; 20: First detection device; 21: Second detection device; 22: Light source; 23: Polarizer; 24: Spectrometer; 25: Analyzer; 26: Detector; 261: First detector; 262: Second detector; 27: Reflector; 28: Wollaston prism; 29: Detection light; 30: First drive motor; 31: Transmission shaft; 32: Pick-up and delivery shaft; 321: Support section; 322: Rotation section; 323: Sample fixing section; 33: Transmission support; 34: Intermediate support; 35: Bottom plate; 36: First movable element; 37: First fixing bracket; 38: Second fixing bracket; 39: Second drive motor; 40: Robotic arm; 41: Sample box; 411: Receiving slot; 42: Second base; 43: Third drive motor; 44: Second movable element; 45: Fourth drive motor; 46: Telescopic mechanism; 47: Sample holder; 48: Adsorption head; 50: expansion wall; 51: transmission surface; 52: connecting flange; 54: detection light spot; 55: light spot movement range; 56: fixing hole; 57: coupling. DETAILED DESCRIPTION

[0022] In order to be able to understand the features and technical content of the embodiments of the present disclosure in more detail, the implementation of the embodiments of the present disclosure is described in detail below in conjunction with the accompanying drawings. The accompanying drawings are for reference only and are not used to limit the embodiments of the present disclosure. In the following technical description, for the sake of convenience of explanation, a full understanding of the disclosed embodiments is provided through multiple details. However, one or more embodiments can still be implemented without these details. In other cases, to simplify the drawings, well-known structures and devices can be simplified for display.

[0023] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present disclosure can be combined with each other.

[0024] Combine Figures 1 to 14 As shown, an embodiment of the present disclosure provides a magnetic measuring device, including a main measuring device, a driving device, a transmission device, a sample picking and delivering device and an optical measuring device, wherein any of the aforementioned devices is composed of at least one or more of a transfer part, a picking and delivering part, a magnetic field generating part, a driving part and a measuring part. Among them, the transfer part is used to transfer the sample 12 to the picking and delivering part. The picking and delivering part is used to fix the sample 12 transferred by the transfer part and to send the sample 12 into the magnetic field generating part. The magnetic field generating part is used to generate a magnetic field acting on the sample 12. The measuring part is used to measure the magnetic characteristics of the sample 12.

[0025] In the embodiment of the present disclosure, the sample 12 is of any type and includes at least a first surface and a second surface, such as a disk, a wafer, a silicon chip, etc. The following embodiments of the present disclosure will be described below using a disk-shaped sample 12, such as a disk, as an example.

[0026] Optionally, the optical measurement device includes an excitation coil 10, at least one detection device, and a displacement assembly. A detection chamber 11 is formed within the excitation coil 10, and a sample 12 is rotatably disposed within the detection chamber 11. The detection device includes a reflector 27. Detection light 29 reflected by the reflector 27 can be incident on the sample 12 from the entrance of the detection chamber 11. The detection device is used to detect the magnetism of the sample 12 using the detection light 29. The displacement assembly is connected to the reflector 27 and is used to drive the reflector 27 to move, thereby changing the incident position of the detection light 29 on the sample 12.

[0027] Using the measurement device provided by the embodiments of the present disclosure, there is no need to move the entire structure of the optical path system. The optical path can be controlled by simply moving the reflector 27, thereby changing the irradiation position of the detection light 29 on the sample 12. Furthermore, there is no need to control the displacement of the sample 12. Only the rotation of the sample 12 is controlled to coordinate with the movement of the reflector 27. This further reduces the range of movement required for the reflector 27, reduces the restrictions imposed by the mounting structure on the movement of the optical path system and sample 12, and increases the detectable range of the sample 12, making it easier to perform magnetic measurements over the entire area of the sample 12.

[0028] Optionally, the detection device includes a light source 22, a polarizer 23, a beam splitter 24, an analyzer 25, a detector 26, and a reflector 27. The detection light 29 emitted by the light source 22 passes through the polarizer 23, the beam splitter 24, and the reflector 27, then enters the sample 12, is reflected by the sample 12, returns to the reflector 27, and passes through the beam splitter 24 and the analyzer 25 to reach the detector 26.

[0029] In the disclosed embodiment, the relative positions of the light source 22, the polarizer 23, the beam splitter 24, the analyzer 25, and the detector 26 are fixed, and the reflector 27 can be displaced along the optical axis of the detection light 29 emitted by the beam splitter 24. During the displacement process, the incident angle of the detection light 29 emitted by the beam splitter 24 on the reflector 27 remains unchanged, and the detection light 29 reflected by the reflector 27 is incident perpendicularly on the sample 12. Since the incident angle of the detection light 29 emitted by the beam splitter 24 on the reflector 27 remains unchanged, and the detection light 29 is incident perpendicularly on the sample 12, the detection light 29 reflected by the sample 12 can return to the reflector 27 and the beam splitter 24 along the original path. Therefore, by simply controlling the displacement of the reflector 27 in the direction of the optical axis of the detection light 29 emitted by the beam splitter 24, the irradiation of the detection light 29 at different positions on the sample 12 can be achieved.

[0030] In the disclosed embodiment, the relative positions of the light source 22, the polarizer 23, the beam splitter 24, the analyzer 25, and the detector 26 are fixed, and the reflector 27 can be displaced along the optical axis of the detection light 29 emitted by the beam splitter 24. During the displacement process, the incident angle of the detection light 29 emitted by the beam splitter 24 on the reflector 27 remains unchanged, and the detection light 29 reflected by the reflector 27 is incident perpendicularly on the sample 12. Since the incident angle of the detection light 29 emitted by the beam splitter 24 on the reflector 27 remains unchanged, and the detection light 29 is incident perpendicularly on the sample 12, the detection light 29 reflected by the sample 12 can return to the reflector 27 and the beam splitter 24 along the original path. Therefore, by simply controlling the displacement of the reflector 27 in the direction of the optical axis of the detection light 29 emitted by the beam splitter 24, the irradiation of the detection light 29 at different positions on the sample 12 can be achieved.

[0031] In this way, the detection light 29 emitted by the light source 22 is converted into polarized light by the polarizer 23, and is guided by the beam splitter 24 and the reflector 27 to be incident on the surface of the sample 12. The detection light 29 reflected by the sample 12 returns along the original path, passes through the reflector 27 and the beam splitter 24 again, and finally passes through the analyzer 25 to reach the detector 26. Only by adjusting the reflector 27, the irradiation position of the detection light 29 on the sample 12 can be adjusted to achieve detection of different positions on different surfaces of the sample 12. In addition, the detection of different positions of the sample 12 can be achieved by moving the reflector 27 without moving the overall structure of the optical path system or the sample 12 itself, thereby reducing the restrictions of the mounting structure on the movement of the optical path system and the sample 12, increasing the detectable range of the sample 12, and making it easier to achieve magnetic measurement of the entire area of the sample 12.

[0032] Optionally, the detection device includes a light source 22, a polarizer 23, a beam splitter 24, a Wollaston prism 28, a first detector 261, a second detector 262, and a reflector 27. The detection light 29 emitted by the light source 22 passes through the polarizer 23, the beam splitter 24, and the reflector 27 and then enters the sample 12. After being reflected by the sample 12, it returns to the reflector 27 and passes through the beam splitter 24 and the Wollaston prism 28 to reach the first detector 261 and the second detector 262.

[0033] In this way, the detection light 29 emitted by the light source 22 is converted into polarized light by the polarizer 23, and then guided by the beam splitter 24 and the reflector 27 to be incident on the surface of the sample 12. The detection light 29 reflected by the sample 12 returns along the original path, passing through the beam splitter 24 and the Wollaston prism 28 and reaching the first detector 261 and the second detector 262 respectively. The Wollaston prism 28 has a birefringent property, which can split the detection light 29 reflected by the sample 12 into two beams of light with mutually perpendicular polarization directions. These two beams of light are received by the first detector 261 and the second detector 262 respectively. By analyzing the polarization state of the two beams of light, the polarization state of the detection light 29 reflected by the sample 12 can be obtained, thereby achieving magnetic measurement of the sample 12. In addition, by moving the reflector 27, different positions of the sample 12 can be detected without moving the overall structure of the optical path system or the sample 12 itself. This reduces the restrictions imposed by the mounting structure on the movement of the optical path system and the sample 12, increases the detectable range of the sample 12, and makes it easier to achieve magnetic measurement of the entire area of the sample 12.

[0034] Optionally, the at least one detection device includes a first detection device 20 and a second detection device 21. The first detection device 20 is disposed on a first side of the detection chamber 11 and is configured to generate a first detection light. The second detection device 21 is disposed on a second side of the detection chamber 11 and is configured to generate a second detection light. The first detection light and the second detection light can be incident on the first and second surfaces of the sample 12, respectively, from different entrances of the detection chamber 11.

[0035] Thus, by disposing the first detection device 20 and the second detection device 21 on either side of the detection chamber 11, the first detection light and the second detection light can be incident on the first and second sides of the sample 12 from different entrances, respectively. The dual-sided detection setting enables simultaneous detection of different sides of the sample 12, effectively expanding the detection range, avoiding blind spots that may result from single-sided detection, and improving the comprehensiveness and accuracy of the detection. At the same time, there is no need to move the overall structure of the optical path system or the sample 12 itself, reducing the restrictions of the installation structure on the movement of the optical path system and sample 12, further improving the efficiency and convenience of detection.

[0036] Optionally, the optical measurement device further includes a pick-up shaft 32. The pick-up shaft 32 is connected to a first displacement device, and the sample 12 can be secured to a sample securing section 323 of the pick-up shaft 32. The first displacement device can drive the pick-up shaft 32 into the detection chamber 11. A drive unit is connected to the pick-up shaft 32 to rotate the sample securing section 323 of the pick-up shaft 32.

[0037] Thus, by providing the pick-up shaft 32 and the drive unit, the sample 12 can be fixed to the sample securing section 323 of the pick-up shaft 32. The first displacement device drives the pick-up shaft 32 into the detection chamber 11, simplifying the loading process of the sample 12 and improving the convenience of operation. The drive unit is connected to the pick-up shaft 32 and can drive the sample securing section 323 of the pick-up shaft 32 to rotate. In conjunction with the movement of the reflector 27, this further reduces the restrictions imposed by the mounting structure on the movement of the optical path system and the sample 12, thereby increasing the detectable range of the sample 12.

[0038] Optionally, the drive unit includes a transmission shaft 31. A first drive motor 30 is connected to the transmission shaft 31 for rotating the transmission shaft 31. The first displacement device can drive the pickup shaft 32 to extend into the detection chamber 11 and connect to the transmission shaft 31, thereby driving the sample fixing section 323 of the pickup shaft 32 to rotate.

[0039] Thus, by providing a drive unit comprising a transmission shaft 31 and a first drive motor 30, precise control of the pick-up and delivery shaft 32 is achieved. After the first displacement device drives the pick-up and delivery shaft 32 into the detection chamber 11, it connects to the transmission shaft 31. The first drive motor 30 drives the transmission shaft 31 to rotate, which in turn drives the sample securing section 323 of the pick-up and delivery shaft 32 to rotate, achieving automatic rotation of the sample 12.

[0040] Optionally, the driving unit includes a fifth driving motor. The fifth driving motor is provided on the first displacement device and is used to drive the sample fixing section 323 of the taking-and-transferring shaft 32 to rotate.

[0041] Thus, by installing the fifth drive motor on the first displacement device, the sample holding section 323 of the pick-up and delivery shaft 32 is directly driven. Mounting the fifth drive motor on the first displacement device does not take up excessive extra space and provides stable power output, ensuring smooth and precise rotation of the sample holding section 323.

[0042] Optionally, the reflector 27 moves at least within a preset range; wherein, when the reflector 27 moves within the preset range, the optical path of the detection light 29 to the surface of the sample 12 is unobstructed.

[0043] In the embodiment of the present disclosure, the maximum distance of the surface of the transmission shaft 31 and / or the pick-up shaft 32 relative to the axis is less than the distance of the position closest to the axis within the displacement range of the detection light 29 relative to the axis. In this way, since the height of the obstacles on the surface of the transmission shaft 31 and / or the pick-up shaft 32 are all less than the displacement range of the detection light 29, the light path from the detection light 29 to the surface of the sample 12 is unobstructed. Alternatively, even if there is a structure on the transmission shaft 31 and / or the pick-up shaft 32 that is too high and is located within the displacement range of the detection light 29, a light hole for the detection light 29 to pass through can be provided on the structure, so that the light path from the detection light 29 to the surface of the sample 12 is unobstructed.

[0044] In the embodiment of the present disclosure, the sample 12 is rotatably disposed in the detection chamber 11 , and the preset range includes at least any radius of the sample 12 , that is, the reflector 27 moves at least along any radius of the sample 12 .

[0045] Thus, by limiting the movement of the reflector 27 to a preset range and ensuring that the optical path of the detection light 29 to the surface of the sample 12 is unobstructed during movement, the detection light 29 is ensured to accurately and stably illuminate different positions of the sample 12, avoiding the problem of optical path obstruction caused by the movement of the reflector 27, and ensuring the continuity and reliability of the detection process. At the same time, the movement range of the reflector 27 is limited to the preset range, which not only enables detection of different positions of the sample 12, but also prevents excessive movement from affecting the stability and service life of the device.

[0046] Optionally, the detection light 29 moves at least in the radial direction of the sample 12 .

[0047] In this way, by moving the detection light 29 at least in the radial direction of the sample 12, the movement of the detection light 29 in the radial direction of the sample 12, in conjunction with the rotation of the sample 12, can cover different areas on the surface of the sample 12. This eliminates the need to move the entire structure of the optical path system or the sample 12 itself, reducing the restrictions imposed by the mounting structure on the movement of the optical path system and the sample 12. This increases the detectable range of the sample 12, facilitating magnetic measurement of the entire area of the sample 12 and improving the comprehensiveness and efficiency of the detection.

[0048] Optionally, the excitation coil 10 generates a magnetic field along the axial direction of the excitation coil 10 in the detection chamber 11 .

[0049] In this way, the excitation coil 10 generates an axial magnetic field in the detection chamber 11 , so that the sample 12 inside the excitation coil 10 can be in the magnetic field generated by the excitation coil 10 , providing a stable magnetization environment for the sample 12 .

[0050] Optionally, the main measuring device includes an excitation coil 10 and a detection assembly. A detection chamber 11 is formed inside the excitation coil 10, and a sample 12 is disposed within the detection chamber 11. The detection assembly includes a detection device for detecting the magnetism of the sample 12 using detection light 29. The detection device includes a first detection device 20 and a second detection device 21. The first detection light from the first detection device 20 and the second detection light from the second detection device 21 can be incident on the first and second surfaces of the sample 12 from different entrances of the detection chamber 11, respectively, and the irradiation positions of the first and second detection lights on the first and second surfaces of the sample 12 are variable.

[0051] In the embodiment of the present disclosure, the magnetic field generating part includes a bracket 13 and an excitation coil 10 fixed on the bracket 13. The excitation coil 10 is coaxially arranged with the transmission shaft 31 and / or the pick-up shaft 32, the diameter of the excitation coil 10 is larger than the diameter of the transmission shaft 31 and / or the pick-up shaft 32, and the inner side of the excitation coil 10 is the detection chamber 11. The excitation coil 10 can be wound on the bracket 13, and the part of the excitation coil 10 wound on the bracket 13 is a cylinder. The excitation coil 10 can be wound on the surface of the cylinder, and the inner side of the cylinder is the detection chamber 11. The excitation coil 10 may also not be wound on the bracket 13, and only be fixed from both sides of the excitation coil 10 by the bracket 13. At this time, the inner side of the excitation coil 10 is the detection space.

[0052] In the disclosed embodiment, the detection chamber 11 includes at least a plurality of windows, such as a first window for transmitting the first detection light and a second window for transmitting the second detection light. The number of windows in the detection chamber 11 corresponds to the number of the sides to be detected of the sample 12. For example, if the sample 12 has three or four sides to be detected, the detection chamber 11 can be provided with three or four windows, respectively, corresponding to the sides to be detected, through which the detection light 29 can pass.

[0053] The magnetic measuring device provided by the embodiment of the present disclosure includes an excitation coil 10 and a detection assembly. A detection chamber 11 is formed inside the excitation coil 10, and a sample 12 is arranged in the detection chamber 11. The detection assembly includes a first detection device 20 and a second detection device 21 for detecting the magnetism of the sample 12 by means of a detection light 29. The corresponding first detection light and the second detection light can be incident on the first side and the second side of the sample 12 from different entrances of the detection chamber 11, respectively, and the irradiation positions of the first detection light and the second detection light are variable. In the process of changing the magnetism of the sample 12 by a pulsed magnetic field each time to measure the sample 12, the first side and the second side of the sample 12 are measured simultaneously through a variable detection light path, and the magnetism of more areas of the sample 12 can be measured simultaneously within substantially the same measurement time, thereby improving the measurement efficiency of the magnetic measuring device in the dimensions of multiple measurements and single measurements.

[0054] Optionally, the magnetic measurement device further includes a third displacement device and a fourth displacement device. The third displacement device is provided in correspondence with the first detection device 20 and is configured to drive the first detection device 20 to move, thereby changing the irradiation position of the first detection light. The fourth displacement device is provided in correspondence with the second detection device 21 and is configured to drive the second detection device 21 to move, thereby changing the irradiation position of the second detection light.

[0055] In the disclosed embodiment, the sample 12 is rotatably disposed in the detection chamber 11 . Specifically, the sample 12 can rotate around a central axis perpendicular to the fixing hole 56 , and the detection light spot 54 can move along the light spot moving range 55 .

[0056] In the embodiment of the present disclosure, the third displacement device and the fourth displacement device can respectively drive the first detection device 20 and the second detection device 21 to displace in any direction, such as radial displacement along the sample 12, circumferential displacement along the sample 12, or axial displacement along the sample 12. In other embodiments, the third displacement device and the fourth displacement device can also respectively drive the first detection device 20 and the second detection device 21 to rotate. For example, they can respectively rotate around the geometric center of the first detection device 20 and the second detection device 21, or they can respectively rotate around the geometric center of the sample 12. Correspondingly, the third displacement device and the fourth displacement device can be any device that can drive the first detection device 20 and the second detection device 21 to displace. For example, the third displacement device and the fourth displacement device can be a linear displacement device driven by the cooperation of a slide groove and a slider, or a rotational displacement device.

[0057] In this way, the third displacement device and the fourth displacement device respectively drive the first detection device 20 and the second detection device 21 to move, thereby changing the irradiation position of the first detection light and the second detection light on the sample 12, thereby realizing the change of the detection position of different surfaces of the sample 12.

[0058] Optionally, the detection device includes a light source 22, a polarizer 23, an analyzer 25 and a detector 26. The detection light 29 emitted by the light source 22 passes through the polarizer 23 and then is emitted to the sample 12. After being reflected by the sample 12, it passes through the analyzer 25 and reaches the detector 26.

[0059] In the disclosed embodiment, detection light 29 passing through analyzer 25 is incident on sample 12 at an angle, and the relative positions of light source 22, polarizer 23, analyzer 25, and detector 26 are fixed. By adjusting the overall position of light source 22, polarizer 23, analyzer 25, and detector 26, and ensuring that the incident angle of detection light 29 remains unchanged during the position adjustment process, detection light 29 reflected from sample 12 can be accurately directed to detector 26 after passing through analyzer 25, thereby changing the irradiation position of detection light 29 on sample 12.

[0060] In this way, the detection light 29 emitted by the light source 22 reaches the surface of the sample 12 directly after passing through the polarizer 23, and the reflected detection light 29 is then emitted to the analyzer 25, and finally reaches the detector 26 after being polarized by the analyzer 25, thereby realizing the detection of the magnetism of the sample 12.

[0061] Optionally, the detection device includes a light source 22, a polarizer 23, a beam splitter 24, an analyzer 25, and a detector 26. The detection light 29 emitted by the light source 22 passes through the polarizer 23 and the beam splitter 24 and then is emitted toward the sample 12. After being reflected by the sample 12, it returns to the beam splitter 24 and passes through the analyzer 25 to reach the detector 26.

[0062] In the embodiment of the present disclosure, the relative positions of the light source 22, the polarizer 23, the spectrometer 24, the analyzer 25 and the detector 26 are fixed. By adjusting the overall positions of the light source 22, the polarizer 23, the spectrometer 24, the analyzer 25 and the detector 26, and making the detection light 29 always vertically incident on the sample 12, the detection light 29 reflected by the sample 12 can be returned to the spectrometer 24 along the original path, and finally reach the detector 26 through the analyzer 25, thereby changing the irradiation position of the detection light 29 on the sample 12.

[0063] In this way, the detection light 29 emitted by the light source 22 is converted into polarized light by the polarizer 23, and then the detection light 29 is perpendicularly incident on the surface of the sample 12 by the beam splitter 24. After being reflected by the sample 12, the detection light 29 returns to the beam splitter 24 along the original path. The beam splitter 24 splits the detection light and sends it to the analyzer 25. Finally, it reaches the detector through the analyzer 25, thereby effectively analyzing the reflection characteristics of the sample 12 for polarized light to study the optical properties of the sample 12, such as reflectivity, changes in polarization state, etc., and then obtaining information about the surface or internal structure of the sample 12. At the same time, the use of the beam splitter 24 makes the optical path flexible, which facilitates the adjustment of the optical path during the detection process or the introduction of other optical elements to achieve more complex detection functions.

[0064] Optionally, the detection device includes a light source 22, a polarizer 23, a beam splitter 24, an analyzer 25, a detector 26, and a reflector 27. The detection light 29 emitted by the light source 22 passes through the polarizer 23, the beam splitter 24, and the reflector 27, then enters the sample 12, is reflected by the sample 12, returns to the reflector 27, and passes through the beam splitter 24 and the analyzer 25 to reach the detector 26.

[0065] In the disclosed embodiment, the relative positions of the light source 22, polarizer 23, beam splitter 24, analyzer 25, and detector 26 are fixed, and the reflector 27 can be displaced along the optical axis of the detection light 29 emitted by the beam splitter 24. During this displacement, the angle of incidence of the detection light 29 emitted by the beam splitter 24 on the reflector 27 remains unchanged, and the detection light 29 reflected by the reflector 27 always perpendicularly impacts the sample 12. Because the angle of incidence of the detection light 29 emitted by the beam splitter 24 on the reflector 27 remains unchanged, and the detection light 29 always perpendicularly impacts the sample 12, the detection light 29 reflected by the sample 12 can always return to the reflector 27 and the beam splitter 24 along the original path during the displacement of the reflector 27. Therefore, by simply controlling the displacement of the reflector 27 along the optical axis of the detection light 29 emitted by the beam splitter 24, the illumination of the detection light 29 at different positions on the sample 12 can be achieved.

[0066] In this way, detection light 29 emitted by light source 22 is converted into polarized light by polarizer 23, which is then guided by beam splitter 24 and reflector 27 to be incident on the surface of sample 12. Detection light 29 reflected by sample 12 then returns along its original path, passing through reflector 27 and beam splitter 24 again, and ultimately through analyzer 25 to detector 26. Simply by adjusting reflector 27, the irradiation position of detection light 29 on sample 12 can be adjusted, enabling detection at different locations on different surfaces of sample 12.

[0067] Optionally, the magnetic measurement device further includes a fifth displacement device and a sixth displacement device. The fifth displacement device is provided in correspondence with the reflector 27 of the first detection device 20 and is configured to drive the reflector 27 of the first detection device 20 to move, thereby changing the irradiation position of the first detection light. The sixth displacement device is provided in correspondence with the reflector 27 of the second detection device 21 and is configured to drive the reflector 27 of the second detection device 21 to move, thereby changing the irradiation position of the second detection light.

[0068] In the embodiment of the present disclosure, the fifth displacement device and the sixth displacement device can respectively drive the reflector 27 of the first detection device 20 and the reflector 27 of the second detection device 21 to displace in any direction, such as radial displacement along the sample 12, circumferential displacement along the sample 12, or axial displacement along the sample 12. In other embodiments, the fifth displacement device and the sixth displacement device can also respectively drive the reflector 27 of the first detection device 20 and the reflector 27 of the second detection device 21 to rotate. For example, they can respectively rotate around the geometric center of the reflector 27 of the first detection device 20 and the reflector 27 of the second detection device 21, or they can respectively rotate around the geometric center of the sample 12. Correspondingly, the fifth displacement device and the sixth displacement device can be any device that can drive the reflector 27 of the first detection device 20 and the reflector 27 of the second detection device 21 to displace. For example, the fifth displacement device and the sixth displacement device can be a linear displacement device driven by the cooperation of a slide groove and a slider, or a rotational displacement device.

[0069] In this way, the reflective mirror 27 of the first detection device 20 is driven by the fifth displacement device, and the reflective mirror 27 of the second detection device 21 is driven by the sixth displacement device, thereby achieving the change of the irradiation position of the detection light 29 on the first and second surfaces of the sample 12.

[0070] Optionally, the detection light 29 is incident perpendicularly to the surface of the sample 12 .

[0071] In this way, by making the detection light 29 vertically incident on the surface of the sample 12 , the detection light 29 can be returned along the original path, thereby achieving a change in the irradiation position of the detection light 29 on the sample 12 .

[0072] Optionally, the sample 12 is rotatably disposed in the detection chamber 11 .

[0073] In the embodiment of the present disclosure, the sample 12 can rotate around any axis, such as an axis perpendicular to the surface of the sample 12 and passing through the geometric center of the sample 12, or an axis parallel to the surface of the sample 12 and passing through the geometric center of the sample 12.

[0074] In this way, by rotating the sample 12, the irradiation position of the detection light 29 on the sample 12 can be changed. This can be achieved when the light path cannot be moved, or it can be moved together with the light path to achieve faster and more accurate changes in the irradiation position of the detection light 29.

[0075] Optionally, the first detection light and the second detection light move at least in a radial direction of the sample 12 .

[0076] In the disclosed embodiment, the sample 12 may be a disc-shaped sample 12 having a first surface and a second surface. The first detection light and the second detection light move along any radial direction of the disc-shaped sample 12, such as along a radial direction where the disc-shaped sample 12 coincides with the Y-axis, or along a radial direction where the disc-shaped sample 12 forms a set angle with the Y-axis. In other embodiments, the first detection light and the second detection light may also move in a non-radial direction, such as along any straight line that does not pass through the center point, such as a straight line parallel to a radius that coincides with the Y-axis, or a straight line parallel to a radius that forms a set angle with the Y-axis.

[0077] In this way, by controlling the optical path, the first detection light and the second detection light are moved radially along the sample 12. At this time, as long as the rotation of the sample 12 is controlled, the detection light 29 can be irradiated on all positions of the sample 12, that is, magnetic measurement can be performed on all positions of the sample 12.

[0078] Optionally, the drive device includes a detection area, a drive unit, and a pickup unit. The drive unit includes a first drive motor 30 and a transmission shaft 31 extending into the detection area, and the transmission shaft 31 is connected to the first drive motor 30. The pickup unit includes a first displacement device and a pickup shaft 32 connected to the first displacement device. The first displacement device can drive the pickup shaft 32 to extend into the detection area and transmit transmission to the transmission shaft 31. The sample 12 can be fixed to the pickup shaft 32.

[0079] In the disclosed embodiment, the first drive motor 30 is connected to the transmission shaft 31 via a coupling 57. The detection area is disposed within the detection chamber 11. The first displacement device can drive the pickup shaft 32 to displace the pickup shaft 32, causing the pickup shaft 32 to extend from the second window of the detection chamber 11 into the interior of the detection chamber 11, enter the detection area, and come into transmission contact with the transmission shaft 31. The first drive motor 30 can drive the transmission shaft 31 to rotate, causing the pickup shaft 32, which is in transmission contact with the transmission shaft 31, to rotate.

[0080] In the embodiment of the present disclosure, the first displacement device can drive the pick-up and delivery shaft 32 to extend into the detection chamber 11 along any direction, such as the axial direction or any direction intersecting the axial direction or other directions.

[0081] By using the driving device provided in the embodiment of the present disclosure, when measuring the sample 12, the pick-up shaft 32 is driven to extend into the detection area and transmit the transmission to the transmission shaft 31. At this time, the transmission shaft 31 is driven to rotate, and the pick-up shaft 32 fixed with the sample 12 can be driven to rotate by the transmission shaft 31, thereby driving the sample 12 to rotate, thereby changing the irradiation position of the detection light 29 on the sample 12, so that the magnetic measurement device can measure different positions of the sample 12, thereby improving the measurement efficiency of the magnetic measurement device. In addition, since the power supply charging time of the pulse magnetic field is long, and the rising and falling edge speeds of the pulse magnetic field are fast and the duration is short, by changing the posture of the sample 12, it is also possible to measure as many areas of the sample 12 to be measured as possible in a single pulse cycle, thereby improving the measurement efficiency of the magnetic measurement device in the dimension of single pulse cycle measurement.

[0082] Optionally, the drive unit further includes a base plate 35 and a support assembly. The support assembly includes at least one support unit disposed on the base plate 35, and the drive shaft 31 is mounted on the support unit. The support units are located between the first and second ends of the drive shaft 31. The first end is the connection end between the drive shaft 31 and the first drive motor 30, and the second end is the transmission end between the drive shaft 31 and the pick-up and delivery shaft 32.

[0083] In the disclosed embodiment, the support unit can be any structure capable of supporting the transmission shaft 31, such as an H-shaped support structure or a concave support structure. The support unit can be provided as one or more, specifically one, two, or three. For example, one support unit can be provided at the first end, one support unit can be provided at the second end, or one or more support units can be provided between the first and second ends.

[0084] Thus, the arrangement of the base plate 35 and the support assembly provides a stable support base for the drive shaft 31, ensuring the stability and precision of the drive shaft 31 during operation. The support assembly includes at least one support unit located between the first and second ends of the drive shaft 31. This effectively distributes the forces acting on the drive shaft 31, preventing deformation or damage to the drive shaft 31 caused by uneven force, thereby extending the service life of the drive shaft 31. Furthermore, mounting the drive shaft 31 on the support unit facilitates installation and removal of the drive shaft 31, facilitating maintenance and repair of the equipment.

[0085] Optionally, the support assembly includes a transmission support 33 and at least one intermediate support 34. The transmission support 33 is provided at the second end of the transmission shaft 31. The at least one intermediate support 34 is provided between the transmission support 33 and the first end.

[0086] In the disclosed embodiment, any number of intermediate supports 34 may be provided between the transmission support 33 and the first end, such as one intermediate support 34 between the transmission support 33 and the first end, two intermediate supports 34 between the transmission support 33 and the first end, etc. The specific number of intermediate supports 34 may be determined based on the length of the transmission shaft 31, and the length of the transmission shaft 31 is positively correlated with the number of intermediate supports 34.

[0087] In this way, the transmission support 33 is arranged at the second end of the transmission shaft 31, directly supporting the transmission end of the transmission shaft 31, ensuring the stability and accuracy of the transmission shaft 31 when transmitting with the pick-up and delivery shaft 32, reducing vibration and swing during the transmission process, and thus improving the transmission efficiency and reliability. The intermediate support 34 is arranged between the transmission support 33 and the first end, which can further disperse the force on the transmission shaft 31, avoid deformation or damage to the transmission shaft 31 due to uneven force, enhance the rigidity and stability of the entire transmission system, and extend the service life of the transmission shaft 31. The layout of arranging the transmission support 33 at the end and the intermediate support 34 in the middle can effectively support the transmission shaft 31 at different positions, which is conducive to improving the operating stability and measurement accuracy of the entire drive device, ensuring the accuracy and stability of the position of the sample 12 during rotation, and thus improving the overall performance and measurement efficiency of the magnetic measurement equipment.

[0088] Optionally, the transport shaft 32 includes a support section 321, a rotating section 322, and a sample securing section 323. The support section 321 is connected to the first displacement device. The rotating section 322 is rotatably connected to the support section 321. The sample securing section 323 has one end connected to the rotating section 322 and the other end formed into a transmission surface 5115 for securing the sample 12.

[0089] In the embodiment of the present disclosure, the support section 321 includes a support portion for connecting to the first displacement device and a connecting portion 16 for connecting to the rotating section 322 and / or the sample fixing section 323, and the support portion and the connecting portion 16 are connected by a connecting flange 52. The connecting portion 16 is rotatably connected to the rotating section 322. The support section 321 is fixedly connected to the first displacement device, so that the first displacement device can drive the pick-up shaft 32 to move through the support section 321. The rotating section 322 is rotatably connected to the support section 321, and the rotating section 322 can rotate relative to the support section 321. One end of the sample fixing section 323 is fixedly connected to the rotating section 322, so that the sample fixing section 323 can drive the rotating section 322 to rotate, thereby allowing the sample 12 to rotate relative to the support section 321.

[0090] Thus, the pick-up shaft 32 includes a support section 321, a rotating section 322, and a sample fixing section 323. The segmented structural design enables the pick-up shaft 32 to perform multiple functions. The support section 321 is connected to the first displacement device, providing a stable support and driving foundation for the entire pick-up shaft 32, ensuring the stability and accuracy of the pick-up shaft 32 when axially extending into the detection area. The rotating section 322 is rotatably connected to the support section 321, allowing the pick-up shaft 32 to rotate after extending into the detection area, thereby driving the sample 12 on the sample fixing section 323 to rotate and changing the irradiation position of the detection light 29 on the sample 12. One end of the sample fixing section 323 is connected to the rotating section 322, and the other end is a transmission surface 5115. This can not only firmly fix the sample 12 to ensure the stability of the sample 12 during rotation, but also can be connected to the transmission shaft 31 through the transmission surface 5115 to achieve power transmission.

[0091] Optionally, the first displacement device may drive the pick-up shaft 32 to extend axially into the detection area.

[0092] In this way, the first displacement device can drive the pick-up and delivery shaft 32 to extend axially into the detection area. The axial driving method makes the movement of the pick-up and delivery shaft 32 more stable and controllable, reducing the shaking and deviation of the sample 12 during the transmission process, which is beneficial to protecting the sample 12 and the equipment and extending the service life of the equipment.

[0093] Optionally, the first displacement device includes a first movable element 36 and at least one fixed frame. The at least one fixed frame is disposed on the first movable element 36, and the pick-up shaft 32 is mounted on the fixed frame.

[0094] In the embodiment disclosed herein, the first displacement device can be any device that can drive the pickup shaft 32 to move, such as a contact displacement device or a non-contact displacement device. The contact displacement device includes a mechanism in which a slider cooperates with a slide groove, a gear transmission mechanism and / or a cam mechanism. The non-contact displacement device includes: a magnetic drive mechanism, a pneumatic and hydraulic mechanism, an electromagnetic drive mechanism and / or a thermal expansion drive mechanism. The first movable element 36 is the active part of the first displacement device, and the fixed frame is provided on the first movable element 36. The first movable element 36 includes a slider in the mechanism in which a slider cooperates with a slide groove, and / or a follower in a cam mechanism, and / or a magnetic follower in a magnetic drive mechanism.

[0095] In the disclosed embodiment, the fixing bracket can be any structure capable of fixing the pick-up and delivery shaft 32 to the first movable element 36. For example, an H-shaped support structure or a concave support structure can be provided. The fixing bracket can be provided as one or more brackets, specifically one, two, or three. For example, a fixing bracket can be provided at one end of the first movable element 36, a fixing bracket can be provided at the opposite end, or fixing brackets can be provided at both ends.

[0096] In this way, the first displacement device is composed of a first movable element 36 and at least one fixed frame. The at least one fixed frame is arranged on the first movable element 36 and can be flexibly configured according to the length and weight of the pick-up shaft 32. Multiple fixed frames can better disperse the weight and force of the pick-up shaft 32, making the installation and fixation of the pick-up shaft 32 more stable, ensuring that when the pick-up shaft 32 is driven axially into the detection area, the pick-up shaft 32 can maintain a stable state, reducing shaking and deviation, and improving the accuracy and reliability of measurement.

[0097] Optionally, the fixing bracket includes a first fixing bracket 37 and a second fixing bracket 38. The first fixing bracket 37 is disposed at a first end of the first movable element 36. The second fixing bracket 38 is disposed at a second end of the first movable element 36 opposite to the first end.

[0098] In this way, the fixing frame is composed of a first fixing frame 37 and a second fixing frame 38, which are respectively arranged at the first end and the second end of the first movable element 36. The symmetrical distribution design can more evenly disperse the weight and force of the pick-up and delivery shaft 32, effectively improving the stability and balance of the pick-up and delivery shaft 32 during axial movement and rotation.

[0099] Optionally, the drive device further includes a detection chamber 11. The detection chamber 11 includes a first window and a second window. The first window is located on the side where the transmission shaft 31 extends, and the second window is located on the side where the delivery shaft 32 extends. The detection area is located within the detection chamber 11, and both the first window and the second window are in communication with the interior and exterior of the detection chamber 11.

[0100] In the embodiment of the present disclosure, the transmission shaft 31 extends into the detection chamber 11 from the first window, and the pick-up and delivery shaft 32 can extend into the detection chamber 11 from the second window. The size, shape and / or area of the first window and the second window can be the same or different. The first window or the second window can be set to any size, shape and / or area. For example, the shape of the first window or the second window can be set to be circular, rectangular, trapezoidal, etc. The areas of the first window and the second window can be equal or unequal, as long as the detection light 29 can enter the sample 12 from the first window and / or the second window without obstruction. For example, when the sample 12 is rotatable, the detection light 29 can enter the sample 12 from the first window and / or the second window without obstruction along at least one radial direction of the sample 12; or, when the sample 12 cannot rotate and moves, the detection light 29 can at least enter all areas to be detected from the first window and / or the second window without obstruction.

[0101] In this way, the drive device is provided with a detection chamber 11, which provides a relatively independent and stable space for the detection area, effectively isolates external interference, and ensures the stability and accuracy of the measurement process. The detection chamber 11 is provided with a first window and a second window, which correspond to the extension sides of the transmission shaft 31 and the pick-up shaft 32 respectively, so that the transmission shaft 31 and the pick-up shaft 32 are smoother and more accurate when entering and exiting the detection area, avoiding mutual interference and improving the operating efficiency and reliability of the equipment. In addition, the first window and the second window are both connected to the inside and outside of the detection chamber 11, which is conducive to gas exchange and pressure balance inside and outside the detection chamber 11, preventing the normal operation of the equipment from being affected by air pressure differences, and at the same time facilitating the creation of a specific measurement environment in the detection chamber 11, such as controlling temperature, humidity or filling with protective gas, etc., to meet the measurement requirements of different samples 12, further improving the applicability and measurement accuracy of the magnetic measurement equipment.

[0102] Optionally, the transmission shaft 31 and the pick-up shaft 32 are coaxial, and the first window and the second window are arranged on opposite sides of the detection chamber 11 along the axial directions of the transmission shaft 31 and the pick-up shaft 32 .

[0103] In this way, the transmission shaft 31 and the pick-up and delivery shaft 32 are coaxial, ensuring that they move in the same straight line. This effectively improves the precision and stability of sample 12 transmission, reduces errors and vibrations caused by axis misalignment, and enhances measurement accuracy and reliability. Furthermore, the first and second windows are positioned on opposite sides of the detection chamber 11 along the axial direction of the transmission shaft 31 and the pick-up and delivery shaft 32, allowing the transmission shaft 31 and the pick-up and delivery shaft 32 to move more smoothly and accurately in and out of the detection chamber 11, avoiding mutual interference, simplifying the mechanical structure, and improving the compactness and space utilization of the device.

[0104] Optionally, the transport device includes a detection area, a pickup unit, and a transfer unit. The pickup unit includes a first displacement device and a pickup shaft 32 connected to the first displacement device, wherein the first displacement device can drive the pickup shaft 32 to extend into the detection area. The transfer unit includes a robotic arm 40 for grabbing the sample 12, wherein the robotic arm 40 can transfer the grabbed sample 12 to the pickup shaft 32, and the pickup shaft 32 can fix the sample 12 transferred by the robotic arm 40.

[0105] In the disclosed embodiment, the sample 12 can be transferred by any type of robotic arm 40, such as an adsorption-type robotic arm 40 or a clamping-type robotic arm 40. Specifically, the corresponding robotic arm 40 can be used according to the type of sample 12 or the test requirements. For example, the robotic arm 40 includes a base and a main body, which is connected to the base and includes joints and connecting rods connected in sequence; wherein each joint provides at least one degree of freedom for an adjacent connecting rod.

[0106] The transmission device provided by the embodiment of the present disclosure is adopted, and the transmission device includes a detection area, a pick-up and delivery part, and a transfer part. The pick-up and delivery part includes a first displacement device and a pick-up and delivery shaft 32 connected to the first displacement device, and the first displacement device can drive the pick-up and delivery shaft 32 to extend into the detection area. The transfer part includes a robotic arm 40 for grabbing the sample 12, and the robotic arm 40 can transfer the grabbed sample 12 to the pick-up and delivery shaft 32, and the pick-up and delivery shaft 32 can fix the sample 12 transferred by the robotic arm 40. After the robotic arm 40 grabs the sample 12, it transfers it to the pick-up and delivery shaft 32, and fixes the sample 12 through the pick-up and delivery shaft 32 to achieve rotation. Finally, the pick-up and delivery shaft 32 is controlled to extend into the detection area, and the sample 12 fixed on the pick-up and delivery shaft 32 is promptly delivered to the detection area. By providing a transmission device combining a robotic arm 40 and a pick-up and delivery shaft 32, it can be ensured that the sample 12 is loaded into the detection area and rotated in a timely manner.

[0107] Optionally, the transfer unit further includes a sample box 41. The sample box 41 includes a third window and a second displacement device, wherein the third window is provided at the bottom of the sample box 41 and the second displacement device is provided below the sample box 41. The second displacement device is used to lift the sample 12 at a selected position through the third window.

[0108] In the embodiment of the present disclosure, the sample box 41 can be of any shape, such as a cuboid or a cube, wherein the top surface of the sample box 41 has no cover and a third window is provided on the bottom surface.

[0109] The transfer unit is equipped with a sample box 41, which provides storage space for samples 12 and can accommodate multiple samples 12, thereby improving the equipment's batch processing capabilities. Sample box 41 is designed with a third window and a second displacement mechanism. The third window is located at the bottom, allowing the second displacement mechanism to lift samples 12 from below. The second displacement mechanism lifts the sample 12 at a selected position through the third window, making the selection and transfer of samples 12 more accurate and efficient.

[0110] Optionally, the second displacement device includes a second base 42, a second movable element 44 mounted on the second base 42, and a telescopic assembly connected to the second movable element 44. The second movable element 44 can drive the telescopic assembly to any position corresponding to the third window, and the telescopic assembly can extend into the sample box 41 through the third window to lift the sample 12.

[0111] In the embodiment disclosed herein, the second displacement device is similar to the first displacement device, and can be any device that can drive the pickup shaft 32 to move, such as a contact displacement device or a non-contact displacement device. The contact displacement device includes a mechanism in which a slider cooperates with a slide groove, a gear transmission mechanism and / or a cam mechanism. The non-contact displacement device includes: a magnetic drive mechanism, a pneumatic and hydraulic mechanism, an electromagnetic drive mechanism and / or a thermal expansion drive mechanism. The second displacement device includes a third drive motor 43, and the second movable element 44 is the active part of the second displacement device. The third drive motor 43 is used to drive the second movable element 44 to move. The telescopic assembly is arranged on the second movable element 44. The second movable element 44 includes a slider in the mechanism in which a slider cooperates with a slide groove, and / or a follower in the cam mechanism, and / or a magnetic follower in the magnetic drive mechanism.

[0112] In this way, the second movable element 44 can drive the telescopic assembly to any position corresponding to the third window, enabling flexible selection and lifting of samples 12 at different locations within the sample box 41, meeting diverse measurement needs. The telescopic assembly extends into the sample box 41 through the third window to lift the sample 12, making the transfer of the sample 12 smoother and more efficient, reducing shaking and displacement of the sample 12 during transfer, and protecting the sample 12 and the equipment.

[0113] Optionally, the telescopic assembly includes a telescopic mechanism 46, a sample holder 47, and a fourth drive motor 45. The telescopic mechanism 46 is connected to the second sliding assembly. The sample holder 47 is disposed at the top of the telescopic mechanism 46. The fourth drive motor 45 is connected to the telescopic mechanism 46 and is configured to drive the telescopic mechanism 46 to extend and retract, causing the sample holder 47 to extend through the third window into the sample box 41 and lift the sample 12.

[0114] In this way, the fourth drive motor 45 drives the telescopic mechanism 46 to extend and retract, so that the sample holder 47 extends from the third window into the sample box 41 to lift the sample 12, effectively utilizing the space so that the sample box 41 can compactly store multiple samples 12, while ensuring that the sample 12 can be accurately lifted to the specified position, which is convenient for the robotic arm 40 to grasp and subsequent measurement operations.

[0115] Optionally, the sample box 41 further includes at least two receiving grooves 411 . The shape of each receiving groove 411 is adapted to the shape of the sample 12 .

[0116] In the disclosed embodiment, a positioning plate may be provided between each receiving slot 411 to separate the space between each receiving slot 411 and the sample 12 therein. The bottom openings of the plurality of receiving slots 411 collectively form a third window at the bottom of the sample box 41. The sample holder 47 may extend through the third window into each receiving slot 411 to eject the sample 12 from each receiving slot 411 along the receiving slot 411.

[0117] Thus, the sample box 41 is provided with at least two receiving slots 411, which can store multiple samples 12 at a time, meeting the needs of batch measurement. The shape of each receiving slot 411 is adapted to the shape of the sample 12, ensuring that the sample 12 is stably placed during storage and transportation, avoiding displacement or damage of the sample 12 due to shape mismatch, and improving the accuracy and reliability of the measurement.

[0118] Optionally, the transport device further includes a detection chamber 11. The detection chamber 11 includes a second window located on the side where the pick-up and delivery shaft 32 extends, communicating with the detection chamber 11. The detection area is located within the detection chamber 11, and the area of the second window is larger than the cross-sectional area of the sample 12.

[0119] In the embodiment of the present disclosure, the area of the second window being larger than the cross-sectional area of the sample 12 means that the projection of the cross section of the sample 12 is located within the projection of the second window in the cross-sectional direction of the sample 12 .

[0120] In this way, the transmission device is provided with a detection chamber 11, which provides a relatively independent and stable space for the detection area, effectively isolates external interference, and ensures the stability and accuracy of the measurement process. The detection chamber 11 is provided with a second window, which is located on the side where the pick-up and delivery shaft 32 extends and is connected to the detection chamber 11, so that the pick-up and delivery shaft 32 is smoother and more accurate when entering and exiting the detection area, avoiding mutual interference and improving the operating efficiency and reliability of the equipment. In addition, the area of the second window is larger than the cross-sectional area of the sample 12, ensuring that the sample 12 will not collide with the edge of the window during the transmission and measurement process, protecting the sample 12 and the equipment, and also providing sufficient space for the irradiation of the detection light 29, which is conducive to improving the measurement accuracy and applicability of the magnetic measurement equipment.

[0121] Optionally, the robotic arm 40 includes an adsorption head 48 . The adsorption head 48 is disposed at the end of the terminal link and is used to adsorb the sample 12 .

[0122] In the embodiment of the present disclosure, the adsorption head 48 may be a vacuum suction cup or a magnetic adsorption head 48 for adsorbing the sample 12 .

[0123] In this way, by grabbing the sample 12 through the adsorption head 48, contamination or damage to the surface of the sample 12 can be avoided, thereby protecting the integrity of the sample 12 and the measurement accuracy.

[0124] Optionally, the transmission device further comprises a driving unit connected to the pick-up shaft 32 for driving the pick-up shaft 32 to rotate.

[0125] In this way, a driving part is provided and connected to the pick-up shaft 32, so that the rotation of the pick-up shaft 32 is realized, and the sample 12 fixed on the pick-up shaft 32 can be rotated within the detection area, thereby expanding the irradiation range of the detection light 29 on the sample 12, and improving the detection capability and measurement efficiency of the magnetic measurement equipment for different areas of the sample 12.

[0126] Optionally, the sample transfer device includes a transfer shaft 32 and a first displacement device. The transfer shaft 32 includes a support section 321 and a sample securing section 323 connected to the support section 321. The sample securing section 323 secures the sample 12 against the inner wall of the securing hole 56 of the sample 12. The first displacement device is connected to the support section 321 and drives the transfer shaft 32 to move, allowing the sample 12 secured to the transfer shaft 32 to enter the detection area.

[0127] In the embodiment of the present disclosure, an expansion wall 50 can be provided on the sample fixing section 323, and the sample fixing section 323 fixes the sample 12 through the inner wall of the fixing hole 56 of the sample 12. Specifically, the inner wall of the fixing hole 56 can be tightened by expansion to fix the sample 12, or the inner wall of the fixing hole 56 can be clamped by a clamping structure to fix the sample 12, etc.

[0128] By using the sample taking and delivering device provided in the embodiment of the present disclosure, the sample 12 is fixed on the taking and delivering shaft 32 through the inner wall of the fixing hole 56 of the sample 12, and the sample 12 can be delivered into the detection area through the taking and delivering shaft 32, and the sample 12 can rotate as the taking and delivering shaft 32 is transferred.

[0129] Optionally, the supporting section 321 is fixedly connected to the sample fixing section 323 .

[0130] In the embodiment of the present disclosure, the support section 321 is fixedly connected to the sample fixing section 323 , and no rotating section 322 is provided between the support section 321 and the sample fixing section 323 , so that the taking and delivering shaft 32 will rotate as a whole along with the transmission shaft 31 .

[0131] In this way, the support section 321 is fixedly connected to the sample fixing section 323 , and the stability and integrity between the two are ensured by the rigid connection, so that the taking and delivering shaft 32 can rotate as a whole.

[0132] Optionally, the driving unit includes a fifth driving motor. The fifth driving motor is connected to the support section 321 and is used to drive the support section 321 to rotate.

[0133] In this way, the drive unit utilizes a fifth drive motor connected to the support section 321, directly driving the support section 321, thereby driving the sample holding section 323 and the sample 12 held therein to rotate stably and precisely, meeting the requirements for multi-angle measurement of the sample 12 within the inspection area. Furthermore, the fifth drive motor directly driving the entire pick-up and delivery shaft 32 eliminates intermediate transmission links, reduces the risk of mechanical failure, and improves the reliability of the device.

[0134] Optionally, the sample fixing section 323 further includes a positioning section. The positioning section is provided on the side of the sample fixing section 323 away from the transmission surface 5115 of the pick-up and delivery shaft 32 , and a positioning boss is provided on the outer surface thereof for positioning the sample 12 .

[0135] In this way, the sample fixing section 323 is provided with a positioning section, and the positioning section is provided on the side of the sample fixing section 323 away from the transmission surface 5115 of the pick-up and delivery shaft 32, and a positioning boss is provided circumferentially on the outer surface for positioning the sample 12, thereby ensuring the accuracy and stability of the sample 12 during installation, avoiding displacement or shaking of the sample 12 during the pick-up and delivery and rotation process, and improving the reliability and accuracy of the measurement.

[0136] Optionally, the first displacement device includes a first base 14. The first movable assembly includes a first movable element 36 disposed on the first base 14, a second drive motor 39 for driving the first movable element 36 to move, and at least one fixing bracket disposed on the first movable element 36 for mounting the pick-up and delivery shaft 32.

[0137] In the embodiment of the present disclosure, the first movable element 36 may be a first slider. A first chute is provided on the first base 14, and the first slider is slidably connected to the first chute. The second drive motor 39 is used to drive the first slider to slide on the first chute.

[0138] Thus, the first displacement device includes a first base 14, which provides a stable support foundation for the entire device and ensures the stability of the pick-up and delivery shaft 32 during movement. The first movable assembly includes a first movable element 36 disposed on the first base 14 and a second drive motor 39 for driving its displacement. The second drive motor 39 drives the first movable assembly to move the pick-up and delivery shaft 32, enabling the sample 12 to be accurately delivered to the detection area. At least one fixed bracket is provided on the first movable element 36 to mount the pick-up and delivery shaft 32, ensuring that the pick-up and delivery shaft 32 remains stable during movement, preventing shaking and deviation, and improving measurement reliability.

[0139] The above description and the accompanying drawings sufficiently illustrate the embodiments of the present disclosure to enable those skilled in the art to practice them. Other embodiments may include structural and other changes. The embodiments represent only possible variations. Unless expressly required, individual components and functions are optional, and the order of operations may vary. Portions and features of some embodiments may be included in or replace portions and features of other embodiments. The embodiments of the present disclosure are not limited to the structures described above and shown in the accompanying drawings, and various modifications and changes may be made without departing from the scope thereof. The scope of the present disclosure is limited only by the appended claims.

Claims

1. A measuring device, characterized in that: include: The excitation coil has a detection chamber formed inside, and the sample is rotatably arranged in the detection chamber; at least one detection device, the detection device comprising a reflector, wherein the detection light reflected by the reflector can be incident on the sample from the entrance of the detection chamber, and the detection device is used to detect the magnetism of the sample by the detection light; The displacement component is connected to the reflector and is used to drive the reflector to move, thereby changing the incident position of the detection light on the sample.

2. The device according to claim 1, characterized in that The detection device includes: A light source, a polarizer, a beam splitter, an analyzer, a detector and a reflector; wherein the detection light emitted by the light source passes through the polarizer, the beam splitter and the reflector and then enters the sample, is reflected by the sample and then returns to the reflector and passes through the beam splitter and the analyzer to reach the detector.

3. The device according to claim 1, characterized in that The detection device includes: A light source, a polarizer, a spectroscope, a Wollaston prism, a first detector, a second detector and a reflector; wherein the detection light emitted by the light source passes through the polarizer, the spectroscope and the reflector and then enters the sample, is reflected by the sample and then returns to the reflector and passes through the spectroscope and the Wollaston prism to reach the first detector and the second detector.

4. The device according to claim 1, characterized in that At least one detection device comprises: a first detection device, disposed on a first side of the detection chamber, for generating a first detection light; a second detection device, disposed on a second side of the detection chamber, for generating a second detection light; The first detection light and the second detection light can be incident on the first surface and the second surface of the sample respectively from different entrances of the detection chamber.

5. The device according to claim 1, characterized in that Also includes: The pick-up and delivery shaft is connected to the first displacement device, and the sample can be fixed on the sample fixing section of the pick-up and delivery shaft; wherein the first displacement device can drive the pick-up and delivery shaft to extend into the detection chamber; The driving part is connected to the pick-up and delivery shaft and is used to drive the sample fixing section of the pick-up and delivery shaft to rotate.

6. The device according to claim 5, characterized in that the driving part include: transmission shaft; The first driving motor is connected to the transmission shaft and is used to drive the transmission shaft to rotate; wherein the first displacement device can drive the pick-up and delivery shaft to extend into the detection chamber and connect with the transmission shaft to drive the sample fixing section of the pick-up and delivery shaft to rotate.

7. The device according to claim 5, characterized in that The drive unit includes: The fifth driving motor is provided on the first displacement device and is used to drive the sample fixing section of the picking-up and delivering shaft to rotate.

8. The device according to any one of claims 1 to 7, characterized in that The reflector moves at least within a preset range; wherein, when the reflector moves within the preset range, the optical path from the detection light to the sample surface is unobstructed.

9. The device according to any one of claims 1 to 7, characterized in that The detection light moves at least in the radial direction of the sample.

10. The device according to claim 1, characterized in that The excitation coil generates a magnetic field along the axial direction of the excitation coil in the detection chamber.

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