Electron gun protection device

Abstract

The invention discloses an electron gun protection device, which comprises a high-voltage power supply module, an electron gun, a control module and at least one protection module, and is characterized in that the control module is electrically connected with the high-voltage power supply module and the protection module, and one protection module is electrically connected between one output end of the high-voltage power supply module and one input end of the electron gun; the protection module is used for sampling an electric signal of the high-voltage power supply module, judging whether ignition occurs or not, and outputting an ignition signal when the ignition is judged to occur; and the control module is used for controlling the protection module to disconnect the high-voltage power supply module and the electron gun and discharge the residual high voltage of the electron gun when receiving the ignition signal. According to the invention, the sparking phenomenon can be monitored in real time in the working point recovery process, the high-voltage power supply and the electronic gun can be rapidly cut off after sparking is detected, and the residual high voltage of the electronic gun is discharged, so that the electronic gun and the filament in the electronic gun are protected in the initial stage of sparking, the success rate of filament installation is improved, and the downtime of equipment is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of electron guns, and in particular to an electron gun protection device. Background Art

[0002] An electron gun is a device that works in a vacuum state, accelerates electrons through high voltage and then draws them out through a filament. It can be used in a variety of fields, such as the semiconductor field or the medical field.

[0003] The electron gun's filament is primarily composed of tungsten single crystal and zirconium oxide. During operation, the zirconium oxide is continuously depleted, requiring filament replacement. This process disrupts the vacuum chamber of the electron gun. Therefore, after installing a new filament, the vacuum chamber must be re-established before the operating point can be restored.

[0004] At present, during the recovery process of the working point, the filament is easily damaged by spark discharge, causing the production line to stagnate for a long time and consuming huge manpower and material resources. Summary of the Invention

[0005] The invention provides an electron gun protection device to improve the success rate of filament installation.

[0006] According to one aspect of the present invention, an electron gun protection device is provided, comprising: a high-voltage power supply module, an electron gun, a control module, and at least one protection module, wherein the control module is electrically connected to the high-voltage power supply module and the protection module, respectively, and one of the protection modules is electrically connected between an output terminal of the high-voltage power supply module and an input terminal of the electron gun;

[0007] The protection module is used to sample the electrical signal of the high-voltage power supply module and determine whether ignition occurs, and output an ignition signal when it is determined that ignition occurs;

[0008] The control module is configured to control the protection module to disconnect the high-voltage power supply module and the electron gun and discharge the residual high voltage of the electron gun when receiving the ignition signal.

[0009] Furthermore, the protection module includes: a current sampling circuit;

[0010] The current sampling circuit is electrically connected to the high-voltage power supply module and the control module, respectively, and is used to sample the electrical signal at the output end of the high-voltage power supply module and output a judgment result to the control module, wherein the ignition signal is output when it is determined that the electrical signal exceeds the ignition threshold, or the non-ignition signal is output when it is determined that the electrical signal is lower than the ignition threshold.

[0011] Furthermore, the current sampling circuit includes: a mutual inductor;

[0012] The transformer is used to sample the pulse current signal at the output end of the high-voltage power supply module.

[0013] Furthermore, the protection module includes: a high-voltage discharge circuit;

[0014] The high-voltage discharge circuit includes a first relay, a second relay, and a first switch, wherein a control end of the first switch is electrically connected to the control module, a first end of the first relay and a first end of the second relay are both grounded through the first switch, the first relay is also electrically connected between the output end of the high-voltage power supply module and the input end of the electron gun, and the second relay is also electrically connected between the input end of the electron gun and the discharge end of the protection module;

[0015] The control module is configured to control the first relay to disconnect the high-voltage power supply module and the electron gun, and control the second relay to connect the electron gun and the discharge end when receiving the ignition signal.

[0016] Furthermore, the high-voltage discharge circuit further includes: a first resistor and a first capacitor, the second relay is electrically connected to the input end of the electron gun via the first resistor, and the first resistor and the first capacitor are electrically connected in parallel;

[0017] And / or, the high-voltage discharge circuit further includes: a second resistor and a second capacitor, the second relay is electrically connected to the discharge end via the second resistor, and the second resistor and the second capacitor are electrically connected in parallel.

[0018] Furthermore, the protection module includes: a high-voltage discharge circuit;

[0019] The high-voltage discharge circuit includes a third relay and a second switch, wherein a control end of the second switch is electrically connected to the control module, a first end of the third relay is grounded through the second switch, and the third relay is also electrically connected between the output end of the high-voltage power supply module and the discharge end of the protection module;

[0020] The control module is used to control the third relay to connect the high-voltage power supply module and the discharge end when receiving the ignition signal.

[0021] Furthermore, the multiple output terminals of the high-voltage power supply module include a positive electrode of the heating current and a negative electrode of the heating current, and the multiple input terminals of the electron gun include a positive electrode of the heating current, a negative electrode of the heating current and a first ground terminal;

[0022] A first protection module is electrically connected between the high-voltage power supply module and the positive electrode of the heating current of the electron gun, and a second protection module is electrically connected between the high-voltage power supply module and the negative electrode of the heating current of the electron gun, and the discharge end of the first protection module and the discharge end of the second protection module are both electrically connected to the first ground end.

[0023] Furthermore, the multiple output terminals of the high-voltage power supply module include a first functional electrode, the multiple input terminals of the electron gun include a first functional electrode and a first negative electrode, and the first functional electrode includes any one of an extraction electrode and a suppression electrode;

[0024] A third protection module is electrically connected between the high-voltage power supply module and the first functional pole of the electron gun, and a discharge end of the third protection module is electrically connected to the first negative pole of the electron gun.

[0025] Furthermore, the control module includes: a main controller, a fourth relay and a third switch;

[0026] The main controller is electrically connected to the protection module and the control end of the third switch respectively;

[0027] A first end of the fourth relay is grounded through the third switch, and the fourth relay is also electrically connected between the high-voltage shutdown positive electrode and the high-voltage shutdown negative electrode of the high-voltage power supply module;

[0028] The main controller is used to control the fourth relay to turn off the high-voltage output of the high-voltage power supply module when receiving the ignition signal, and also control the on-off state of the protection module.

[0029] Furthermore, the main controller is further configured to control the protection module to reset after detecting that the voltage at the input end of the electron gun returns to zero.

[0030] In the present invention, the electron gun protection device includes a control module and at least one protection module. The control module is electrically connected to a high-voltage power supply module and a protection module, respectively. One protection module is electrically connected between an output terminal of the high-voltage power supply module and an input terminal of the electron gun. The protection module is used to sample the electrical signal of the high-voltage power supply module and determine whether a spark has occurred. When it is determined that a spark has occurred, the protection module outputs a spark signal. When the control module receives the spark signal, the protection module is used to control the protection module to disconnect the high-voltage power supply module from the electron gun and discharge the residual high voltage of the electron gun. In the present invention, the spark phenomenon can be monitored in real time during the working point recovery process. When a spark is detected, the high-voltage power supply and the electron gun can be quickly disconnected, and the residual high voltage of the electron gun can be discharged. This protects the electron gun and the filament therein at the initial stage of the spark, protects the filament to the greatest extent, responds promptly, safely and reliably, improves the success rate of filament installation, saves equipment maintenance time, reduces equipment downtime, and reduces production costs.

[0031] It should be understood that the content described in this section is not intended to identify the key or important features of the embodiments of the present invention, nor is it intended to limit the scope of the present invention. Other features of the present invention will become readily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0033] Figure 1 is a schematic diagram of a conventional electron gun;

[0034] Figure 2 This is a schematic diagram of the equivalent circuit of a conventional electron gun;

[0035] Figure 3 is a schematic diagram of an electron gun protection device provided by an embodiment of the present invention;

[0036] Figure 4 is a schematic diagram of a current sampling circuit provided by an embodiment of the present invention;

[0037] Figure 5 is a schematic diagram of another electron gun protection device provided by an embodiment of the present invention;

[0038] Figure 6 This is a schematic diagram of another electron gun protection device provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0039] In order to enable those skilled in the art to better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present invention.

[0040] It should be noted that the terms "first", "second", etc. in the description and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0041] Figure 1 This is a schematic diagram of a conventional electron gun. Figure 2 This is a schematic diagram of the equivalent circuit of a conventional electron gun. Figure 1 and Figure 2 As shown, the main structure of the electron gun 10 includes a base 11, a filament 12, a suppressor 13, an extractor 14 and an anode 15. The high-voltage power supply of the electron gun 10 mainly includes a filament heating power supply 16, an acceleration voltage 17, an excitation voltage 18 and a suppression voltage 19. Among them, the filament heating power supply 16 is used to heat the filament 12 to a rated temperature, such as a rated temperature of 1800K. The potential of the filament heating power supply 16 is a suspended cathode high voltage, which forms an accelerating electric field with the anode 15. The suppression voltage 19 is used to provide a reverse suppression electric field to reduce scattering and energy loss, and improve the stability and consistency of the electron beam 20. The excitation voltage 18, also known as the extraction voltage or extraction voltage, is used to provide a forward extraction electric field to control the energy and intensity of the electron beam 20.

[0042] Taking the thermal field emission electron gun used in semiconductor equipment as an example, the cathode filament of this electron gun is mainly composed of tungsten single crystal and zirconium oxide. During the operation of the electron gun, the zirconium oxide in the filament will continue to be consumed. When the zirconium oxide is exhausted, the filament will no longer be able to emit electrons stably, so the electron gun filament needs to be replaced regularly. Currently, the filament of the electron gun is mostly replaced directly on-site, requiring staff to remove the old filament from the electron gun on-site. This replacement process inevitably destroys the vacuum of the electron gun's vacuum chamber. Therefore, after installing the new filament, it is necessary to re-establish a high vacuum in the electron gun cavity and then restore the electron gun's operating state to the rated value. For example, the parameters such as the electron gun's heating current and the high voltage of each electrode are restored to the rated value to ensure that the electron gun operates at the appropriate operating point.

[0043] To ensure proper and stable operation of the electron gun's chamber, the gun requires an ultra-high vacuum level. After installing a new filament, re-establishing the gun's ultra-high vacuum requires a combination of multi-stage vacuum pumping and a lengthy bake-out process. Restoring the filament's operating point also requires significant time and calibration, a process that can take anywhere from several days to several dozen days, depending on the gun's configuration and voltage. During the filament replacement process, the gun's chamber is exposed to air, introducing contaminants such as particles, gases, and liquids. However, contaminants cannot be fully expelled from the newly established ultra-high vacuum chamber. Therefore, during the gun's operating point restoration process, gas desorption and sparking discharges are highly likely to occur due to filament heating and electron beam bombardment. Furthermore, the filament tip is very fragile and easily damaged by sparking. Currently, during the gun's operating point restoration process, continuous monitoring of the vacuum gauge is commonly used to determine if sparking has occurred. However, a vacuum gauge's response is inherently slow. A drop or fluctuation in vacuum indicates that sparking has occurred for some time and is significant, potentially indicating damage to the gun's filament, and it is too late to take action.

[0044] Since the filament installation is successful only after the operating point has been restored, any filament damage requires replacement, which returns the vacuum chamber to its starting point. This wastes significant time and leaves the next attempt at success uncertain. Equipment requiring regular filament replacement often operates on mature and stable production lines. Failed filament installation can cause significant downtime and waste significant manpower and resources.

[0045] Based on this, the present invention provides an electron gun protection device, which can quickly detect the sparking phenomenon of the electron gun during the working point recovery process of the electron gun. When the spark is detected, it can be quickly processed to protect the filament, improve the success rate of filament installation, save equipment maintenance time, and reduce production costs.

[0046] Figure 3 Schematic diagram of an electron gun protection device provided by an embodiment of the present invention. Figure 3 As shown, the electron gun protection device includes: a high-voltage power supply module 101, an electron gun 102, a control module 103 and at least one protection module 104, the control module 103 is electrically connected to the high-voltage power supply module 101 and the protection module 104 respectively, and one protection module 104 is electrically connected between an output end of the high-voltage power supply module 101 and an input end of the electron gun 102; the protection module 104 is used to sample the electrical signal of the high-voltage power supply module 101 and determine whether ignition occurs, and output an ignition signal when it is determined that ignition occurs; the control module 103 is used to control the protection module 104 to disconnect the high-voltage power supply module 101 and the electron gun 102 and discharge the residual high voltage of the electron gun 102 when receiving the ignition signal.

[0047] In this embodiment, the electron gun protection device includes a high-voltage power supply module 101 and an electron gun 102. The high-voltage power supply module 101 includes multiple output terminals, including at least a heating current positive electrode F+, a heating current negative electrode F−, an extraction electrode Ve, a suppressor electrode Vs, and a ground terminal HVG. The electron gun 102 includes multiple input terminals, including at least a heating current positive electrode F+, a heating current negative electrode F−, an extraction electrode Ve, a suppressor electrode Vs, and a ground terminal FG. For ease of distinction, the heating current positive electrode F+, heating current negative electrode F−, extraction electrode Ve, and suppressor electrode Vs of the high-voltage power supply module 101 are labeled as heating current positive electrode F1+, heating current negative electrode F1−, extraction electrode Ve1, and suppressor electrode Vs1, respectively. The heating current positive electrode F+, heating current negative electrode F−, extraction electrode Ve, and suppressor electrode Vs of the electron gun 102 are labeled as heating current positive electrode F2+, heating current negative electrode F2−, extraction electrode Ve2, and suppressor electrode Vs2, respectively.

[0048] The positive heating current electrode F1+ of the high-voltage power supply module 101 is electrically connected to the positive heating current electrode F2+ of the electron gun 102, and the negative heating current electrode F1- of the high-voltage power supply module 101 is electrically connected to the negative heating current electrode F2- of the electron gun 102. The high-voltage power supply module 101 provides heating current to the electron gun 102 via the positive heating current electrode F+ and the negative heating current electrode F-. The extraction electrode Ve1 of the high-voltage power supply module 101 is electrically connected to the extraction electrode Ve2 of the electron gun 102. The high-voltage power supply module 101 provides an extraction electrode electrical signal to the electron gun 102 via the extraction electrode Ve. The suppression electrode Vs1 of the high-voltage power supply module 101 is electrically connected to the suppression electrode Vs2 of the electron gun 102. The high-voltage power supply module 101 provides a suppression electrode electrical signal to the electron gun 102 via the suppression electrode Vs. The ground terminal HVG of the high-voltage power supply module 101 is connected to the ground terminal FG of the electron gun 102.

[0049] The electron gun protection device includes at least one protection module 104, and one protection module 104 is electrically connected between an output terminal of the high voltage power supply module 101 and an input terminal of the electron gun 102. Figure 3As shown, the electron gun protection device includes multiple protection modules 104, at least: a protection module 104a electrically connected between the heating current positive pole F1+ of the high-voltage power supply module 101 and the heating current positive pole F2+ of the electron gun 102; a protection module 104b electrically connected between the heating current negative pole F1- of the high-voltage power supply module 101 and the heating current negative pole F2- of the electron gun 102; a protection module 104c electrically connected between the extraction pole Ve1 of the high-voltage power supply module 101 and the extraction pole Ve2 of the electron gun 102; a protection module 104d electrically connected between the suppression pole Vs1 of the high-voltage power supply module 101 and the suppression pole Vs2 of the electron gun 102; and a protection module 104e electrically connected between the ground terminal HVG of the high-voltage power supply module 101 and the ground terminal FG of the electron gun 102.

[0050] Each protection module 104 has the same circuit structure and operating principle. Therefore, the following detailed description will focus on the connection, circuit structure, and operating principle of only one protection module 104. It will be appreciated that the output function and number of ports of the high-voltage power supply module in the electron gun protection device, as well as the input function and number of ports of the electron gun, may vary. Accordingly, the number and connection of the protection modules in the electron gun protection device may be adjusted accordingly, without limitation.

[0051] The electron gun protection device includes a control module 103 , which is electrically connected to the protection module 104 . The control module 103 is also electrically connected to the high-voltage power supply module 101 .

[0052] In this embodiment, the protection module 104 is configured to sample the electrical signal from the high-voltage power supply module 101 and determine whether sparking has occurred. If sparking is determined to have occurred, the protection module 104 outputs a spark signal. Specifically, the protection module 104 samples the electrical signal from the output of the high-voltage power supply module 101 and processes the signal. The processed signal is then compared, optionally determining the magnitude of the signal against a preset spark threshold. If the resulting signal is greater than or equal to the spark threshold, the protection module 104 outputs a spark signal to the control module 103. If the resulting signal is less than the spark threshold, the protection module 104 outputs a non-spark signal to the control module 103. The spark thresholds corresponding to different protection modules 104 may be the same or different. Both the spark signal and the non-spark signal can be digital signals. For example, a digital "1" represents a spark signal, and a digital "0" represents a non-spark signal. In other embodiments, both the spark signal and the non-spark signal can be analog signals. The protection module 104 can monitor the pulsed current of the corresponding high-voltage transmission channel and identify the spark signal, thereby quickly protecting the filament of the electron gun 102. The protection module 104 can also monitor the current signal in the channel between the ground terminal HVG of the high-voltage power supply module 101 and the ground terminal FG of the electron gun 102. This allows the ignition and voltage status of the entire device to be determined, ensuring filament safety. Here, the ground terminal FG of the electron gun 102 can be the housing of the electron gun 102.

[0053] Taking the extraction pole Ve as an example, the protection module 104c samples the extraction pole electrical signal output by the output terminal Ve1 of the high-voltage power supply module 101 and processes the extraction pole electrical signal accordingly, and then compares the extraction pole electrical signal with the corresponding ignition threshold; if the comparison shows that the extraction pole electrical signal is greater than or equal to the corresponding ignition threshold, the protection module 104c outputs an ignition signal to the control module 103; if the comparison shows that the extraction pole electrical signal is less than the corresponding ignition threshold, the protection module 104 outputs a non-spark signal to the control module 103.

[0054] The control module 103 receives an electrical signal provided by the protection module 104. If at the current moment, at least one protection module 104 transmits an ignition signal to the control module 103, the control module 103 can control the working state of the protection module 104 to disconnect the high-voltage power supply module 101 and the electron gun 102. At the same time, the control module 103 can also control the working state of the protection module 104 to discharge the residual high voltage at the input end of the electron gun 102. When the optional control module 103 receives at least one ignition signal at the current moment, it can simultaneously control the working states of multiple protection modules 104 to disconnect all the multiple output ends of the high-voltage power supply module 101 and the multiple input ends of the electron gun 102, and at the same time discharge the residual high voltage at at least one input end of the electron gun 102, thereby achieving circuit protection for the electron gun 102 and preventing the electron gun 102 from burning or malfunctioning.

[0055] In the present invention, the electron gun protection device includes a control module and at least one protection module. The control module is electrically connected to a high-voltage power supply module and a protection module, respectively. One protection module is electrically connected between an output terminal of the high-voltage power supply module and an input terminal of the electron gun. The protection module is used to sample the electrical signal of the high-voltage power supply module and determine whether a spark has occurred. When it is determined that a spark has occurred, the protection module outputs a spark signal. When the control module receives the spark signal, the protection module is used to control the protection module to disconnect the high-voltage power supply module from the electron gun and discharge the residual high voltage of the electron gun. In the present invention, the spark phenomenon can be monitored in real time during the working point recovery process. When a spark is detected, the high-voltage power supply and the electron gun can be quickly disconnected, and the residual high voltage of the electron gun can be discharged. This protects the electron gun and the filament therein at the initial stage of the spark, protects the filament to the greatest extent, responds promptly, safely and reliably, improves the success rate of filament installation, saves equipment maintenance time, reduces equipment downtime, and reduces production costs.

[0056] Figure 4 is a schematic diagram of a current sampling circuit provided by an embodiment of the present invention, with reference to Figure 3 and Figure 4 As shown, the optional protection module 104 includes a current sampling circuit 111. The current sampling circuit 111 is electrically connected to the high-voltage power supply module 101 and the control module 103, respectively, and is used to sample the electrical signal at the output end of the high-voltage power supply module 101 and output a judgment result to the control module 103. The current sampling circuit 111 outputs an ignition signal when the electrical signal exceeds the ignition threshold, or outputs a non-ignition signal when the electrical signal is below the ignition threshold. The optional current sampling circuit 111 includes a transformer T1, which is used to sample the pulse current signal at the output end of the high-voltage power supply module 101.

[0057] In this embodiment, the protection module 104 includes a current sampling circuit 111. The current sampling circuit 111 uses a pulse current detection method to sample the current signal corresponding to the high-voltage transmission channel. In this embodiment, the high-voltage transmission channel is a high-voltage line 112 electrically connected between the output terminal of the high-voltage power supply module 101 and the input terminal of the electron gun 102. Each protection module 104 corresponds to one high-voltage transmission channel, and different protection modules 104 correspond to different high-voltage transmission channels.

[0058] Specifically, the current sampling circuit 111 includes a pulse current acquisition unit 113, which includes a transformer T1 that collects the pulse current signal flowing through the corresponding high-voltage line 112 and converts it into a pulse voltage signal. The pulse current acquisition unit 113 also includes a resistor R1 and a capacitor C1.

[0059] Current sampling circuit 111 includes a voltage follower unit 114 and a signal amplification unit 115. Voltage follower unit 114 includes an operational amplifier U1A, and signal amplification unit 115 includes an operational amplifier U1B. Voltage follower unit 114 and signal amplification unit 115 perform voltage following and signal amplification processing on the pulse voltage signal. Signal amplification unit 115 also includes resistors R2 and VR1.

[0060] Current sampling circuit 111 includes a peak hold unit 116, which includes operational amplifiers U1C, U1D, and U2A. Peak hold unit 116 converts the amplified voltage signal to obtain a peak voltage signal. Peak hold unit 116 also includes resistor R3, diode D1, capacitor C2, and resistor R4.

[0061] The current sampling circuit 111 includes a comparison unit 117, which includes an operational amplifier U2A. The comparison unit 117 is used to compare the peak voltage signal with the ignition threshold. If the peak voltage signal obtained after the pulse voltage signal is converted exceeds the preset ignition threshold, it is determined to be ignition, and the ignition signal is transmitted to the control module 103 through the S1 signal channel. If the peak voltage signal obtained after the pulse voltage signal is converted is less than the preset ignition threshold, it is determined that no ignition has occurred, and the non-ignition signal is transmitted to the control module 103 through the S1 signal channel. The optional ignition signal is a digital "1" or a high level, and the non-ignition signal is a digital "0" or a low level. The comparison unit 117 also includes a resistor VR2, a resistor R5, a resistor D6, and a power supply VCC.

[0062] The current sampling circuit 111 also receives a reset signal provided by the control module 103 through the S2 signal channel.

[0063] It is understood that the circuit structure of the current sampling circuit 111 in the protection module 104 is not limited to Figure 4 shown.

[0064] Figure 5 is a schematic diagram of another electron gun protection device provided by an embodiment of the present invention, referring to Figure 3 and Figure 5 As shown, the optional protection module 104 includes: a high-voltage discharge circuit 121; the high-voltage discharge circuit 121 includes a first relay RY1, a second relay RY2 and a first switch Q1, the control end of the first switch Q1 is electrically connected to the control module 103, the first end RY1A of the first relay RY1 and the first end RY2A of the second relay RY2 are both grounded through the first switch Q1, the first relay RY1 is also electrically connected between the output end of the high-voltage power supply module 101 and the input end of the electron gun 102, and the second relay RY2 is also electrically connected between the input end of the electron gun 102 and the discharge end CP1 of the protection module 104; the control module 103 is used to control the first relay RY1 to disconnect the high-voltage power supply module 101 and the electron gun 102 when receiving the ignition signal, and control the second relay RY2 to connect the electron gun 102 and the discharge end CP1.

[0065] In this embodiment, the protection module 104 includes a high-voltage discharge circuit 121. The high-voltage discharge circuit 121 includes a first relay RY1, a second relay RY2, and a first switch Q1.

[0066] The first switch Q1 can be an N-type switching transistor or a P-type switching transistor. The gate of the switching transistor is electrically connected to the first signal terminal of the control module 103. The first terminal of the switching transistor is grounded GND. The second terminal of the switching transistor is electrically connected to the first terminal RY1A of the first relay RY1. The second terminal of the switching transistor is also electrically connected to the first terminal RY2A of the second relay RY2. The first signal terminal of the control module 103 is also electrically connected to the current sampling circuit 111 via the S1 signal channel. In other words, the ignition signal or non-ignition signal provided by the current sampling circuit 111 is transmitted to the first signal terminal of the control module 103 via the S1 signal channel, and is also transmitted to the control terminal of the first switch Q1 via the S1 signal channel to control the on / off state of the first switch Q1. The optional ignition signal controls the first switch Q1 to be turned on, and the non-ignition signal controls the first switch Q1 to be turned off. The first switch Q1 can be an NMOS, with the ignition signal being a high level and the non-ignition signal being a low level.

[0067] The second end RY1B of the first relay RY1 is electrically connected to the output of the high-voltage power supply module 101, and the third end RY1C of the first relay RY1 is electrically connected to the input of the electron gun 102. The first relay RY1 is responsible for disconnecting and connecting the high-voltage output. The third end RY1C of the first relay RY1 can optionally be a normally closed contact. Specifically, when the first relay RY1 is not powered, the second end RY1B of the first relay RY1 and the third end RY1C of the first relay RY1 are closed, thereby connecting the output of the high-voltage power supply module 101 to the input of the electron gun 102. When powered, the second end RY1B of the first relay RY1 and the third end RY1C of the first relay RY1 are disconnected, thereby disconnecting the output of the high-voltage power supply module 101 from the input of the electron gun 102. The first end RY1A of the first relay RY1 can optionally be a normally open contact, and the second end RY1B of the first relay RY1 can be a common terminal.

[0068] The second end RY2B of the second relay RY2 is electrically connected to the discharge terminal CP1 of the protection module 104, and the third end RY2C of the second relay RY2 is electrically connected to the input of the electron gun 102. The second relay RY2 is responsible for quickly discharging or disconnecting the residual high voltage of the electron gun 102. The second end RY2B of the second relay RY2 can optionally be a normally open contact. Specifically, when the second relay RY2 is not powered, the second end RY2B of the second relay RY2 and the third end RY2C of the second relay RY2 are disconnected, disconnecting the input of the electron gun 102 from the discharge terminal CP1 of the protection module 104. When powered, the second end RY2B of the second relay RY2 and the third end RY2C of the second relay RY2 are closed, connecting the input of the electron gun 102 to the discharge terminal CP1 of the protection module 104. The first end RY2A of the second relay RY2 can optionally be a normally closed contact, and the third end RY2C of the second relay RY2 can be a common terminal.

[0069] When the first signal end of the control module 103 receives the ignition signal, the first switch Q1 is turned on, and the first end RY1A of the first relay RY1 is grounded, and the first end RY2A of the second relay RY2 is grounded. Accordingly, the first relay RY1 enters the power-on state, and the second end RY1B of the first relay RY1 and the third end RY1C of the first relay RY1 are disconnected, then the output end of the high-voltage power supply module 101 and the input end of the electron gun 102 are disconnected, thereby cutting off the high-voltage output. At the same time, the second relay RY2 enters the power-on state, and the second end RY2B of the second relay RY2 and the third end RY2C of the second relay RY2 are closed, then the input end of the electron gun 102 and the discharge end CP1 of the protection module 104 are connected, thereby discharging the residual high voltage at the input end of the electron gun 102. Based on this, after detecting the ignition signal, the high-voltage output can be cut off, and the residual high voltage of the electron gun 102 can also be discharged.

[0070] On the contrary, when the first signal end of the control module 103 receives a non-sparking signal, the first switch Q1 is turned off, and the first end RY1A of the first relay RY1 is suspended, and the first end RY2A of the second relay RY2 is suspended. Correspondingly, the first relay RY1 is in a power-off state, and the second end RY1B of the first relay RY1 and the third end RY1C of the first relay RY1 are closed, then the output end of the high-voltage power supply module 101 and the input end of the electron gun 102 are connected. At the same time, the second relay RY2 is in a power-off state, and the second end RY2B of the second relay RY2 and the third end RY2C of the second relay RY2 are disconnected, then the input end of the electron gun 102 and the discharge end CP1 of the protection module 104 are disconnected. Based on this, after detecting the non-sparking signal, it can be ensured that the high-voltage power supply signal can be normally output to the input end of the electron gun 102, and the circuit works normally.

[0071] The optional high-voltage discharge circuit 121 also includes: a first resistor R9 and a first capacitor C3, the second relay RY2 is electrically connected to the input end of the electron gun 102 through the first resistor R9, and the first resistor R9 and the first capacitor C3 are electrically connected in parallel; and / or, the high-voltage discharge circuit 121 also includes: a second resistor R10 and a second capacitor C4, the second relay RY2 is electrically connected to the discharge end CP1 through the second resistor R10, and the second resistor R10 and the second capacitor C4 are electrically connected in parallel.

[0072] refer to Figure 5As shown, the optional high-voltage discharge circuit 121 includes: a first resistor R9 and a first capacitor C3, as well as a second resistor R10 and a second capacitor C4. The third terminal RY2C of the second relay RY2 is electrically connected to the input terminal of the electron gun 102 via the first resistor R9, and the second terminal RY2B of the second relay RY2 is electrically connected to the discharge terminal CP1 via the second resistor R10. The first capacitor C3 and the second capacitor C4 are discharge acceleration capacitors that can be used to quickly reduce the potential of the input terminal of the electron gun 102 and eliminate sparks. Therefore, when sparks occur, the potential of the input terminal of the electron gun 102 can be quickly pulled to the same low potential, improving the filament installation yield.

[0073] In other embodiments, the optional high-voltage discharge circuit does not include the first capacitor and the second capacitor; Figure 6 This is a schematic diagram of another electron gun protection device provided by an embodiment of the present invention, referring to Figure 3 and Figure 6 As shown, the optional high-voltage discharge circuit 121 includes a first resistor R9 and a second resistor R10. In other embodiments, the optional high-voltage discharge circuit includes a first resistor, a first capacitor, and a second resistor; or the optional high-voltage discharge circuit includes a first resistor, a second resistor, and a second capacitor.

[0074] refer to Figure 5 As shown, the optional protection module 104 includes: a high-voltage discharge circuit 121; the high-voltage discharge circuit 121 includes a third relay RY3 and a second switch Q2, the control end of the second switch Q2 is electrically connected to the control module 103, the first end RY3A of the third relay RY3 is grounded through the second switch Q2, and the third relay RY3 is also electrically connected between the output end of the high-voltage power supply module 101 and the discharge end CP1 of the protection module 103; the control module 103 is used to control the third relay RY3 to conduct between the high-voltage power supply module 102 and the discharge end CP1 when receiving the ignition signal.

[0075] In this embodiment, the protection module 104 includes a high-voltage discharge circuit 121. The high-voltage discharge circuit 121 includes a third relay RY3 and a second switch Q2.

[0076] The second switch Q2 can optionally be an N-type switching transistor or a P-type switching transistor. The gate of the switching transistor is electrically connected to the third signal terminal S3 of the control module 103. The first terminal of the switching transistor is grounded GND, and the second terminal of the switching transistor is electrically connected to the first terminal RY3A of the third relay RY3. An enable signal or a disable signal is provided at the third signal terminal S3 of the control module 103. The enable signal turns the second switch Q2 on, and the disable signal turns the second switch Q2 off. If the second switch Q2 is an NMOS transistor, the enable signal is high and the disable signal is low.

[0077] The second end RY3B of the third relay RY3 is electrically connected to the discharge terminal CP1 of the protection module 104, and the third end RY3C of the third relay RY3 is electrically connected to the output terminal of the high-voltage power module 101. The third relay RY3 is responsible for quickly discharging or disconnecting the residual high voltage at the output terminal of the high-voltage power module 101. The second end RY3B of the third relay RY3 can optionally be a normally open contact. Specifically, when the third relay RY3 is de-energized, the second end RY3B of the third relay RY3 and the third end RY3C of the third relay RY3 are disconnected, disconnecting the output terminal of the high-voltage power module 101 from the discharge terminal CP1 of the protection module 104. When energized, the second end RY3B of the third relay RY3 and the third end RY3C of the third relay RY3 are closed, connecting the output terminal of the high-voltage power module 101 to the discharge terminal CP1 of the protection module 104. The first end RY3A of the third relay RY3 can optionally be a normally closed contact, and the third end RY3C of the third relay RY3 can be a common terminal.

[0078] When the first signal terminal of the control module 103 receives the ignition signal, it controls the third signal terminal S3 to output an enable signal, thereby turning on the second switch Q2 and grounding the first terminal RY3A of the third relay RY3. Accordingly, the third relay RY3 enters the energized state, and the second terminal RY3B and the third terminal RY3C of the third relay RY3 are closed. This connects the output terminal of the high-voltage power supply module 101 and the discharge terminal CP1 of the protection module 104, thereby discharging the residual high voltage at the output terminal of the high-voltage power supply module 101. Based on this, after detecting the ignition signal, the residual high voltage at the output terminal of the high-voltage power supply module 101 can be discharged.

[0079] Conversely, when the first signal terminal of the control module 103 receives a non-sparking signal, it controls the third signal terminal S3 to output a non-enable signal, and the second switch Q2 is turned off, so that the first terminal RY3A of the third relay RY3 is suspended. Accordingly, the third relay RY3 is in a power-off state, and the second terminal RY3B of the third relay RY3 and the third terminal RY3C of the third relay RY3 are disconnected, thereby disconnecting the output terminal of the high-voltage power supply module 101 and the discharge terminal CP1 of the protection module 104. Based on this, after detecting a non-sparking signal, the discharge path of the output terminal of the high-voltage power supply module 101 can be disconnected, ensuring that the high-voltage power supply signal can be normally output to the input terminal of the electron gun 102, and the circuit operates normally.

[0080] It is understood that the circuit structure of the high voltage discharge circuit 121 in the protection module 104 is not limited to Figure 5 shown.

[0081] The multiple output terminals of the optional high-voltage power supply module include a positive electrode for heating current and a negative electrode for heating current, and the multiple input terminals of the electron gun include a positive electrode for heating current, a negative electrode for heating current, and a first ground terminal; a first protection module electrically connected between the high-voltage power supply module and the positive electrode for heating current of the electron gun, a second protection module electrically connected between the high-voltage power supply module and the negative electrode for heating current of the electron gun, a discharge terminal of the first protection module and a discharge terminal of the second protection module are both electrically connected to the first ground terminal. The multiple output terminals of the optional high-voltage power supply module include a first functional electrode, and the multiple input terminals of the electron gun include a first functional electrode and a first negative electrode, the first functional electrode including either an extraction electrode or a suppression electrode; a third protection module electrically connected between the high-voltage power supply module and the first functional electrode of the electron gun, a discharge terminal of the third protection module electrically connected to the first negative electrode of the electron gun.

[0082] refer to Figure 3 As shown, the discharge terminal CP1 of the protection module 104 can be a ground terminal or a low level terminal. When the electron gun protection device includes multiple protection modules 104, the discharge terminals CP1 of different protection modules 104 can be the same or different.

[0083] The multiple input terminals of the optional electron gun 102 include the heating current negative electrode F2 − and the first ground terminal FG, and the discharge terminal CP1 of the protection module 104 can be electrically connected to the heating current negative electrode F2 − or the first ground terminal FG.

[0084] Exemplarily, the protection module 104a is electrically connected between the positive electrode F1+ of the heating current of the high-voltage power supply module 101 and the positive electrode F2+ of the heating current of the electron gun 102, and the discharge terminal CP1 of the protection module 104a can be electrically connected to the first ground terminal FG, thereby improving the signal transmission stability of the positive electrode of the heating current and reducing interference. The protection module 104b is electrically connected between the negative electrode F1- of the heating current of the high-voltage power supply module 101 and the negative electrode F2- of the heating current of the electron gun 102, and the discharge terminal CP1 of the protection module 104b can be electrically connected to the first ground terminal FG, thereby improving the signal transmission stability of the negative electrode of the heating current and reducing interference.

[0085] Exemplarily, the protection module 104c is electrically connected between the extraction electrode Ve1 of the high-voltage power module 101 and the extraction electrode Ve2 of the electron gun 102. The discharge terminal CP1 of the protection module 104c can be electrically connected to the heating current negative electrode F2- of the electron gun 102. This can improve the signal transmission stability of the extraction electrode electrical signal and reduce interference. The protection module 104d is electrically connected between the suppression electrode Vs1 of the high-voltage power module 101 and the suppression electrode Vs2 of the electron gun 102. The discharge terminal CP1 of the protection module 104d can be electrically connected to the heating current negative electrode F2- of the electron gun 102. This can improve the signal transmission stability of the suppression electrode electrical signal and reduce interference.

[0086] Exemplarily, the protection module 104e is electrically connected between the ground terminal HVG of the high-voltage power module 101 and the ground terminal FG of the electron gun 102. The discharge terminal CP1 of the protection module 104e can be electrically connected to the first ground terminal FG, i.e., the ground terminal FG of the electron gun 102. This can improve the signal transmission stability between the ground terminal HVG of the high-voltage power module 101 and the ground terminal FG of the electron gun 102 and reduce interference. In other embodiments, the discharge terminal CP1 of the protection module 104e can also be electrically connected to the negative electrode F2- of the heating current.

[0087] In other embodiments, the discharge terminal CP1 of the optional protection module 104 can be electrically connected to the negative electrode F2- of the heating current, or electrically connected to the first ground terminal FG, or electrically connected to the ground terminal HVG, or electrically connected to other ground terminals in the electron gun protection device, or electrically connected to other low-level terminals in the electron gun protection device, so as to achieve residual high-voltage discharge of the corresponding signal terminal.

[0088] As described above, when spark discharge occurs between electrodes of the electron gun 102, the protection module 104 can quickly pull the voltages of the two electrodes where spark discharge occurs to the same potential, while maintaining the consistency of different protection modules 104, making replacement and maintenance easier.

[0089] refer to Figure 5 As shown, the optional control module 103 includes: a main controller CPU, a fourth relay RY4, and a third switch Q3. The main controller CPU is electrically connected to the protection module 104 and the control end of the third switch Q3, respectively. The first end RY4A of the fourth relay RY4 is connected to the ground GND through the third switch Q3. The fourth relay RY4 is also electrically connected between the high-voltage shutdown positive terminal HVOFF+ and the high-voltage shutdown negative terminal HVOFF- of the high-voltage power supply module 101. The main controller CPU is configured to control the fourth relay RY4 to shut down the high-voltage output of the high-voltage power supply module 101 upon receiving an ignition signal, and also to control the on / off state of the protection module 104. The optional main controller CPU is also configured to control the protection module 104 to reset after detecting that the voltage at the input end of the electron gun 102 has returned to zero.

[0090] In this embodiment, the main controller CPU includes a first signal terminal S1, which is used to electrically connect to the current sampling circuit 111 through the S1 signal channel to transmit the ignition signal and the non-ignition signal, and is also used to electrically connect to the first switch Q1 to control the on / off state of the first switch Q1. The main controller CPU includes a second signal terminal S2, which is used to electrically connect to the current sampling circuit 111 through the S2 signal channel to transmit the reset signal. The main controller CPU includes a third signal terminal S3, which is used to electrically connect to the second switch Q2 to control the on / off state of the second switch Q2, thereby controlling whether the residual high voltage discharge channel of the high-voltage discharge circuit 121 is conductive.

[0091] The third switch Q3 can optionally be an N-type switching transistor or a P-type switching transistor. The gate of the switching transistor is electrically connected to the fourth signal terminal S4 of the main controller CPU. The first terminal of the switching transistor is grounded GND, and the second terminal of the switching transistor is electrically connected to the first terminal RY4A of the fourth relay RY4. An enable signal or a disable signal is provided at the fourth signal terminal S4 of the main controller CPU. The enable signal turns the third switch Q3 on, and the disable signal turns the third switch Q3 off. If the third switch Q3 is an NMOS transistor, the enable signal is high and the disable signal is low.

[0092] A second end RY4B of the fourth relay RY4 is electrically connected to the high voltage shutdown positive electrode HVOFF+ of the high voltage power module 101 , and a third end RY4C of the fourth relay RY4 is electrically connected to the high voltage shutdown negative electrode HVOFF− of the high voltage power module 101 . The fourth relay RY4 is responsible for disconnecting or connecting the high-voltage output of the high-voltage power module 101. The second terminal RY4B of the fourth relay RY4 can optionally be a normally open contact. Specifically, when the fourth relay RY4 is de-energized, the second terminal RY4B of the fourth relay RY4 and the third terminal RY4C of the fourth relay RY4 are disconnected, disconnecting the high-voltage shutdown positive electrode HVOFF+ and the high-voltage shutdown negative electrode HVOFF- of the high-voltage power module 101, and allowing the output terminal of the high-voltage power module 101 to normally output a high-voltage signal. When energized, the second terminal RY4B of the fourth relay RY4 and the third terminal RY4C of the fourth relay RY4 are closed, connecting the high-voltage shutdown positive electrode HVOFF+ and the high-voltage shutdown negative electrode HVOFF- of the high-voltage power module 101, providing a high-voltage shutdown signal to the high-voltage power module 101 to disconnect the high-voltage output of the high-voltage power module 101. The first terminal RY4A of the fourth relay RY4 can optionally be a normally closed contact, and the third terminal RY4C of the fourth relay RY4 can be a common terminal.

[0093] When the first signal terminal S1 of the main controller CPU receives the ignition signal, it controls the fourth signal terminal S4 to output an enable signal, then the third switch Q3 is turned on, and the first terminal RY4A of the fourth relay RY4 is grounded. Accordingly, the fourth relay RY4 enters the power-on state, and the second terminal RY4B of the fourth relay RY4 and the third terminal RY4C of the fourth relay RY4 are closed, and the high-voltage shutdown positive electrode HVOFF+ and the high-voltage shutdown negative electrode HVOFF- of the high-voltage power supply module 101 are connected, so as to provide the high-voltage shutdown signal HVOFF to the high-voltage power supply module 101 to cut off the high-voltage output of the high-voltage power supply module 101. Based on this, after detecting the ignition signal, the high-voltage output of the high-voltage power supply module 101 can be cut off, and the high-voltage output of each high-voltage power supply channel can be stopped.

[0094] On the contrary, when the first signal terminal S1 of the control module 103 receives a non-ignition signal, it controls the fourth signal terminal S4 to output a non-enable signal, and the third switch Q3 is turned off, and the first terminal RY4A of the fourth relay RY4 is suspended. Accordingly, the fourth relay RY4 is in a power-off state, and the second terminal RY4B of the fourth relay RY4 and the third terminal RY4C of the fourth relay RY4 are disconnected, and the high-voltage shutdown positive electrode HVOFF+ and the high-voltage shutdown negative electrode HVOFF- of the high-voltage power supply module 101 are disconnected, and the high-voltage shutdown signal HVOFF cannot be transmitted to the high-voltage power supply module 101. Based on this, after detecting a non-ignition signal, it can be ensured that the high-voltage power supply signal can be output normally.

[0095] It is understood that the circuit structure of the control module 103 is not limited to Figure 5 shown.

[0096] When the first signal terminal S1 of the main controller CPU receives the ignition signal, it can control the cutting off of the high-voltage output of the high-voltage power supply module 101, discharge the residual high voltage at the output end of the high-voltage power supply module 101, control the disconnection of the transmission path between the output end of the high-voltage power supply module 101 and the input end of the electron gun 102, and discharge the residual high voltage at the input end of the electron gun 102.

[0097] After detecting that the voltage at the input end of the electron gun 102 returns to zero or the voltage at the output end of the high-voltage power supply module 101 returns to zero, a reset signal is output through the second signal terminal S2.

[0098] Specifically, after receiving the reset signal, the current sampling circuit 111 outputs a non-sparking signal to the main controller CPU. Based on the non-sparking signal, the main controller CPU can control the high-voltage power supply module 101 to output normal high voltage, disconnect the discharge path at the output of the high-voltage power supply module 101, control the transmission path between the output of the high-voltage power supply module 101 and the input of the electron gun 102, and disconnect the discharge path at the input of the electron gun 102. This restores the protection module 104 to its initial state, preparing to restore the filament operating point.

[0099] As described above, multiple protection modules 104 can be assembled on the substrate of the control module 103 in the form of a board assembly, which can prevent the protection modules 104 from being damaged and facilitate the replacement of a faulty protection module 104 .

[0100] In the present invention, the sparking phenomenon can be monitored in real time during the working point recovery process. After the sparking is detected, the high-voltage power supply and the electron gun can be quickly cut off, and the residual high voltage of the electron gun can be discharged, so as to protect the electron gun and the filament therein at the initial stage of the sparking, protect the filament to the greatest extent, respond in a timely, safe and reliable manner, improve the success rate of the filament installation, save equipment maintenance time, reduce equipment downtime, and reduce production costs.

[0101] It should be understood that the various forms of the processes shown above can be used to reorder, add, or delete steps. For example, the steps described in the present invention can be performed in parallel, sequentially, or in a different order, as long as the desired results of the technical solution of the present invention can be achieved. This is not limited herein.

[0102] The above specific embodiments do not limit the scope of protection of the present invention. Those skilled in the art will appreciate that various modifications, combinations, sub-combinations, and substitutions may be made based on design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention are intended to be included within the scope of protection of the present invention.

Claims

1. An electron gun protection device, characterized in that: include: A high-voltage power supply module, an electron gun, a control module, and at least one protection module, wherein the control module is electrically connected to the high-voltage power supply module and the protection module, respectively, and one of the protection modules is electrically connected between an output terminal of the high-voltage power supply module and an input terminal of the electron gun; The protection module is used to sample the electrical signal of the high-voltage power supply module and determine whether ignition occurs, and output an ignition signal when it is determined that ignition occurs; The control module is configured to control the protection module to disconnect the high-voltage power supply module and the electron gun and discharge the residual high voltage of the electron gun when receiving the ignition signal.

2. The electron gun protection device according to claim 1, characterized in that: The protection module includes: a current sampling circuit; The current sampling circuit is electrically connected to the high-voltage power supply module and the control module, respectively, and is used to sample the electrical signal at the output end of the high-voltage power supply module and output a judgment result to the control module, wherein the ignition signal is output when it is determined that the electrical signal exceeds the ignition threshold, or the non-ignition signal is output when it is determined that the electrical signal is lower than the ignition threshold.

3. The electron gun protection device according to claim 2, characterized in that: The current sampling circuit includes: a mutual inductor; The transformer is used to sample the pulse current signal at the output end of the high-voltage power supply module.

4. The electron gun protection device according to claim 1, characterized in that: The protection module includes: a high-voltage discharge circuit; The high-voltage discharge circuit includes a first relay, a second relay, and a first switch, wherein a control end of the first switch is electrically connected to the control module, a first end of the first relay and a first end of the second relay are both grounded through the first switch, the first relay is also electrically connected between the output end of the high-voltage power supply module and the input end of the electron gun, and the second relay is also electrically connected between the input end of the electron gun and the discharge end of the protection module; The control module is configured to control the first relay to disconnect the high-voltage power supply module and the electron gun, and control the second relay to connect the electron gun and the discharge end when receiving the ignition signal.

5. The electron gun protection device according to claim 4, characterized in that: The high-voltage discharge circuit further includes: a first resistor and a first capacitor, the second relay is electrically connected to the input end of the electron gun via the first resistor, and the first resistor and the first capacitor are electrically connected in parallel; And / or, the high-voltage discharge circuit further includes: a second resistor and a second capacitor, the second relay is electrically connected to the discharge end via the second resistor, and the second resistor and the second capacitor are electrically connected in parallel.

6. The electron gun protection device according to claim 1, characterized in that: The protection module includes: a high-voltage discharge circuit; The high-voltage discharge circuit includes a third relay and a second switch, wherein a control end of the second switch is electrically connected to the control module, a first end of the third relay is grounded through the second switch, and the third relay is also electrically connected between the output end of the high-voltage power supply module and the discharge end of the protection module; The control module is used to control the third relay to connect the high-voltage power supply module and the discharge end when receiving the ignition signal.

7. The electron gun protection device according to claim 4 or 6, characterized in that: The multiple output terminals of the high-voltage power supply module include a heating current positive electrode and a heating current negative electrode, and the multiple input terminals of the electron gun include a heating current positive electrode, a heating current negative electrode and a first ground terminal; A first protection module is electrically connected between the high-voltage power supply module and the positive electrode of the heating current of the electron gun, and a second protection module is electrically connected between the high-voltage power supply module and the negative electrode of the heating current of the electron gun, and the discharge end of the first protection module and the discharge end of the second protection module are both electrically connected to the first ground end.

8. The electron gun protection device according to claim 4 or 6, characterized in that: The multiple output terminals of the high-voltage power supply module include a first functional electrode, the multiple input terminals of the electron gun include a first functional electrode and a first negative electrode, and the first functional electrode includes any one of an extraction electrode and a suppression electrode; A third protection module is electrically connected between the high-voltage power supply module and the first functional pole of the electron gun, and a discharge end of the third protection module is electrically connected to the first negative pole of the electron gun.

9. The electron gun protection device according to claim 1, characterized in that: The control module includes: a main controller, a fourth relay and a third switch; The main controller is electrically connected to the protection module and the control end of the third switch respectively; A first end of the fourth relay is grounded through the third switch, and the fourth relay is also electrically connected between the high-voltage shutdown positive electrode and the high-voltage shutdown negative electrode of the high-voltage power supply module; The main controller is used to control the fourth relay to turn off the high-voltage output of the high-voltage power supply module when receiving the ignition signal, and also control the on-off state of the protection module.

10. The electron gun protection device according to claim 9, characterized in that: The main controller is further configured to control the protection module to reset after detecting that the voltage at the input end of the electron gun returns to zero.

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