Spherical cavity centering verification device and centering verification method

Abstract

The present application discloses a spherical cavity centering verification device and a centering verification method, belonging to the field of scientific experimental instruments. The technical key points are: comprising: a hanging ball assembly, which includes a hanging ball and a three-way moving assembly for moving the hanging ball; a laser centering flange assembly, which includes: a blind flange, a guide rail, a slider, and a laser pen; a 1mm circular hole is opened in the center of the blind flange; a guide rail perpendicular to the surface of the blind flange is fixed on the surface of the blind flange; the slider is slidably arranged on the guide rail, and the slider can be fixedly connected to the guide rail; the laser pen is arranged on the slider, and the light it emits passes through the circular hole opened in the center of the blind flange; each centering flange hole has a laser centering flange assembly that can correspond to it. The present application aims to provide a spherical cavity centering verification device and a centering verification method to meet the needs of scientific experiments.

Description

Technical Field

[0001] The present invention relates to the field of scientific experimental instruments, and more specifically, to a spherical cavity centering verification device and a centering verification method. Background Art

[0002] Spherical vacuum chambers have advantages such as high structural strength, high space utilization efficiency, and resistance to high temperature and high pressure. Therefore, they can be used in many scientific research fields such as semiconductors, aerospace, vacuum coating (CN113655078A), and controlled nuclear fusion (CN116543927A).

[0003] like Figure 1 As shown in the figure, a spherical vacuum chamber has several flange holes evenly distributed throughout. During the R&D team's development of this spherical vacuum chamber, a downstream customer came up with a new technical requirement: the centering accuracy of all flange holes must meet ±4mm. This can be understood as follows: ideally, the axes of all flange holes converge at a single point, resulting in a centering accuracy of 0mm. However, to achieve a centering accuracy of ±4mm for all flange holes, a designed intersection point must be within 4mm of the axes of all flange holes.

[0004] However, the following two points have not been studied in existing research:

[0005] First, how to verify the centering accuracy of the flange hole of the formed spherical vacuum chamber.

[0006] Second, when the centering accuracy of the flange hole does not meet the requirements, how to change the centering accuracy of the flange hole. Summary of the Invention

[0007] The purpose of the present invention is to provide a spherical cavity centering verification device and a centering verification method to address the above-mentioned deficiencies in the prior art.

[0008] The technical solution of the present invention is:

[0009] A spherical cavity centering verification device, wherein a plurality of centering flange holes are evenly distributed in the spherical cavity, and an inspection flange hole is provided on the top of the spherical cavity;

[0010] Wherein, the spherical cavity centering verification device includes:

[0011] A hanging ball assembly, comprising a hanging ball and a three-way moving assembly for moving the hanging ball;

[0012] A laser centering flange assembly includes: a blind flange, a guide rail, a slider, and a laser pen; the blind flange has a 1 mm circular hole in its center; the guide rail is fixed to the surface of the blind flange perpendicular to the surface of the blind flange; the slider is slidably mounted on the guide rail and can be fixedly connected to the guide rail; the laser pen is mounted on the slider, and the light emitted by the laser pen passes through the circular hole in the center of the blind flange;

[0013] The hanging ball assembly is used to place the hanging ball into the interior of the spherical cavity through the inspection flange hole;

[0014] Each centrifugal flange hole has a corresponding laser centrifugal flange assembly, and the blind flange of the corresponding laser centrifugal flange assembly can be adapted to the corresponding centrifugal flange hole.

[0015] Furthermore, at least 4 or more of the centring flange holes are selected (i.e., the number of the laser centering flange assemblies is 4 or more) to install the laser centering flange assemblies to determine the position of the hanging ball, and the remaining centring flange holes are judged whether they are centered by using the laser centering flange assemblies and hanging balls.

[0016] Further, the three-way moving assembly includes: a horizontal load-bearing flange plate, a vertical rod, a suspension rope, a hollow middle assembly, and a vertical rod fixing assembly;

[0017] The lower end of the vertical rod is provided with a hole, and the hanging ball is suspended in the hole of the vertical rod through a hanging rope;

[0018] The horizontal load-bearing flange plate is installed on the maintenance flange hole; a moving hole is opened in the middle of the horizontal load-bearing flange plate;

[0019] The hollow middle component includes: a hollow rod, a first fastening plate, and a second fastening plate; the first fastening plate is fixedly provided at the lower part of the hollow rod, the outer surface of the hollow rod located above the first fastening plate is provided with a thread, the middle part of the second fastening plate is provided with a threaded hole, and the second fastening plate is threadedly connected to the hollow rod; the first fastening plate and the second fastening plate are respectively provided on the lower side and the upper side of the horizontal load-bearing flange plate;

[0020] The hollow rod is inserted into a movable hole in the middle of the horizontal bearing flange plate; the first and second fastening plates can be made to clamp / release the horizontal bearing flange plate by rotating the second fastening plate;

[0021] The vertical rod is arranged inside the hollow rod, and the two are fixed by a vertical rod fixing assembly, which includes: a locking nut, a pressure washer tube, and a rubber ring; the locking nut includes a nut body and a pressure plate connected into one body; the nut body cooperates with the external thread of the hollow rod;

[0022] The upper portion of the vertical rod is inserted into the hollow tube of the pressure pad tube and extends to the upper portion of the pressure pad tube;

[0023] The inner wall of the top end of the hollow rod is provided with a chamfer, and a rubber ring is provided between the lower end of the pressure pad tube and the top end of the hollow rod;

[0024] The bottom of the pressure pad tube is provided with a flange protruding from the outer wall; the pressing plate is in close contact with the flange;

[0025] When the locking nut is tightened, the pressure pad tube will squeeze the rubber ring, and the rubber ring will be compressed to hold the vertical rod, thereby limiting the vertical displacement of the vertical rod.

[0026] Furthermore, the centering accuracy of the flange hole of the spherical cavity is ±δmm, and the diameter of the hanging ball is 2δmm.

[0027] Furthermore, the hanging ball is a metal sphere.

[0028] Furthermore, the slider is provided with threaded holes, and the guide rail is evenly distributed with several threaded holes along its length. After the slider reaches the predetermined position, screws are used to match the threaded holes of the slider and the threaded holes of the guide rail to achieve fixation between the slider and the guide rail.

[0029] Furthermore, it also includes: a centering accuracy improvement device, which is used to adjust the centering flange hole with insufficient centering accuracy, and includes: a first flange plate, a second flange plate, a bellows, a distance adjustment device, and a laser centering flange assembly;

[0030] The first flange is fixedly connected to the centering flange hole with insufficient centering accuracy by a bolt and nut assembly; one end of the bellows is connected to the first flange, and the other end is connected to the second flange; the blind flange of the laser centering flange assembly is fixedly connected to the second flange by a bolt and nut assembly;

[0031] The second flange and the first flange are provided with at least three sets of evenly distributed distance adjustment devices;

[0032] The distance adjustment device includes: a first connecting member arranged on the outer circumference of the first flange, a second connecting member arranged on the outer circumference of the second flange, a threaded rod, and at least two nuts; a threaded hole is provided between the first connecting member and the second connecting member, the threaded rod is adapted to the threaded hole, and a nut is respectively provided on the outer side of the first connecting member and the outer side of the second connecting member, and the distance between the first connecting member and the second connecting member is adjusted by the two nuts.

[0033] Furthermore, by adjusting the distance between each group of first connecting members and second connecting members, the inclination angle of the second flange is adjusted, thereby adjusting the centering accuracy of the second flange.

[0034] Furthermore, the distance adjustment device includes four nuts, with one nut being provided on the outside of the first connecting member, two nuts being provided on the inside of the first connecting member, and one nut being provided on the inside of the second connecting member, and the outside of the second connecting member, respectively.

[0035] A method for verifying the centring of a spherical cavity, wherein the spherical cavity is uniformly provided with S centring flange holes, and an inspection flange hole is provided at the top of the spherical cavity. The centring accuracy of the S centring flange holes is verified to be δ mm, where S is a natural number greater than or equal to 10, and the method comprises the following steps:

[0036] S100, determining the position of the lob, which includes sub-steps S101-S102:

[0037] S101, placing a hanging ball into the spherical cavity; wherein the diameter of the hanging ball is 2δmm, and its spatial position is adjusted by a three-way moving component;

[0038] S102, select N centrifugal flange holes to install the laser centering flange assembly, adjust the position of the hanging ball, so that the laser lines emitted by the laser centering flange assemblies installed in the selected N centrifugal flange holes can all illuminate the hanging ball; the central axes of the N centrifugal flange holes are not coplanar; N is 4 or 5 or 6; the laser centering flange assembly includes: a blind flange, a guide rail, a slider, and a laser pen; a 1mm circular hole is opened in the center of the blind flange; a guide rail perpendicular to the surface of the blind flange is fixed on the surface of the blind flange; the slider is slidably arranged on the guide rail, and the slider can be fixedly connected to the guide rail; the laser pen is arranged on the slider, and the light emitted by it passes through the circular hole opened in the center of the blind flange; when the laser centering flange assembly is installed in the centrifugal flange hole, the centrifugal flange hole and the blind flange of the laser centering flange assembly are connected by bolts and nuts;

[0039] S200, removing the N centrifugal flange holes selected in S102, and using a laser centering flange assembly and a hanging ball to determine whether the remaining SN centrifugal flange holes to be inspected are aligned one by one: installing a laser centering flange assembly on the centrifugal flange hole to be inspected. If the laser emitted by the laser centering flange assembly illuminates the hanging ball, it indicates that the centrifugal flange hole to be inspected meets the centrifugal accuracy requirement; otherwise, it does not meet the requirement.

[0040] If the remaining SN centrifugal flange holes to be tested all meet the centrifugal accuracy requirements, they are judged to be qualified; otherwise, they are unqualified and need to be repaired.

[0041] Furthermore, the method further includes step S300: installing a centering accuracy improvement device for the centering flange hole that does not meet the centering accuracy requirement in S200, adjusting the distance adjustment device so that the laser beam emitted by the laser centering flange assembly is irradiated on the hanging ball, and then removing the laser centering flange assembly;

[0042] The centering accuracy improvement device includes: a first flange, a second flange, a bellows, a distance adjustment device, and a laser centering flange assembly; the first flange is fixedly connected to the centering flange hole with insufficient centering accuracy by a bolt and nut assembly; one end of the bellows is connected to the first flange, and the other end is connected to the second flange; the blind flange of the laser centering flange assembly is fixedly connected to the second flange by a bolt and nut assembly; the second flange and the first flange are provided with at least 3 groups of evenly distributed distance adjustment devices; the distance adjustment device includes: a first connecting member arranged on the outer circumference of the first flange, a second connecting member arranged on the outer circumference of the second flange, a threaded rod, and at least 2 nuts; a threaded hole is provided between the first connecting member and the second connecting member, the threaded rod is adapted to the threaded hole, and a nut is provided on the outside of the first connecting member and the outside of the second connecting member respectively, and the distance between the first connecting member and the second connecting member is adjusted by the two nuts.

[0043] The beneficial effects of this application are:

[0044] First, based on scientific testing requirements, the centering accuracy of the multiple centering flange holes evenly distributed on the spherical vacuum chamber must meet certain requirements before it can be used for future user needs. Therefore, before leaving the factory, the centering accuracy of the multiple centering flange holes of the completed spherical vacuum chamber needs to be verified.

[0045] In response to the above requirements, this application can conduct verification tests on the centering accuracy of the centring flange holes through the combination of a "hanging ball assembly" and a "laser centering flange assembly": "First, select 4 to 6 or more of the centring flange holes and install the laser centering flange assembly to determine the position of the hanging ball. Then, use the laser centering flange assembly and the hanging ball to determine whether the remaining centring flange holes are centered."

[0046] Second, this application also proposes a device for improving centering accuracy. Based on the principle that "a first flange is fixedly connected to a centering flange hole with insufficient centering accuracy via a bolt and nut assembly, a second flange is fixedly connected to a blind flange of a laser centering flange assembly via a bolt and nut assembly, and the second flange and the first flange are provided with at least three sets of evenly spaced distance adjustment devices," the distance adjustment device, in conjunction with the laser centering flange assembly, facilitates adjustment of the centering accuracy of the second flange. Subsequently, scientific equipment can be directly connected to the second flange during use. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] The present invention will be further described in detail below with reference to the embodiments in the accompanying drawings, but this does not constitute any limitation to the present invention.

[0048] Figure 1It is a schematic diagram of the three-dimensional structure of the spherical cavity.

[0049] Figure 2 It is a three-dimensional structural diagram of the spherical cavity centering verification device of Example 1.

[0050] Figure 3 It is a schematic diagram of the three-dimensional structure of the horizontal load-bearing flange plate and the three-way movable component of the first embodiment.

[0051] Figure 4 It is a schematic diagram of the three-dimensional structure of the hanging ball assembly of Example 1.

[0052] Figure 5 Schematic diagram of the connection relationship between the vertical rod and the hollow middle component of the first embodiment.

[0053] Figure 6 Schematic diagram of the vertical rod fixing assembly of Example 1.

[0054] Figure 7 It is a schematic diagram of the three-dimensional structure of the laser centering flange assembly of Example 1.

[0055] Figure 8 3D structural diagram of the centering accuracy improvement device of Example 1.

[0056] Figure 9 3D structural diagram of the centering accuracy improvement device of Example 1 from another perspective.

[0057] Figure 10 It is a front view of the centering accuracy improvement device of Example 1.

[0058] Figure 11 This is the actual result of the centering accuracy improvement device (the laser centering flange assembly is not installed).

[0059] Figure 12 This is an actual diagram of the second flange of the centering accuracy improvement device when it is tilted.

[0060] Figure 13 This is the actual effect of the laser emitted by the laser centering flange assembly irradiating the hanging ball.

[0061] The following are the descriptions of the reference numerals:

[0062] Spherical cavity 1000, centrifugal flange hole 3000, maintenance flange hole 1001;

[0063] Lifting ball assembly 1100, horizontal load-bearing flange plate 1110, three-way movement assembly 1120, vertical rod 1121, lifting rope 1122, hollow middle assembly 1123, hollow rod 1124, first fastening plate 1125, second fastening plate 1126, vertical rod fixing assembly 1127, locking nut 1128, pressure pad tube 1129, lifting ball 1130, rubber ring 1131;

[0064] Laser centering flange assembly 1200, blind flange 1210, guide rail 1220, slider 1230, laser pointer 1240, screw 1250;

[0065] Centering accuracy improving device 2000 , first flange 2100 , second flange 2200 , bellows 2300 , distance adjusting device 2400 , first connecting member 2410 , second connecting member 2420 , threaded rod 2430 , nut 2440 . DETAILED DESCRIPTION

[0066] To make the objectives, technical solutions, and advantages of the present invention more clearly understood, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings. It should be understood that these descriptions are merely exemplary and are not intended to limit the scope of the present invention. In addition, in the following description, descriptions of well-known structures and technologies are omitted to avoid unnecessary confusion of the concepts of the present invention.

[0067] <R&D ideas>

[0068] Ideally, the central axes of all flange holes converge at a single point, which is the centration point. The centration accuracy of the flange holes in a spherical vacuum chamber must meet ±δmm. Therefore, it can be understood as follows: all flange holes are provided with a cylinder (the central axis of the cylinder is the central axis of the flange hole, with a radius of δmm). If these cylinders spatially intersect, centration is achieved (the spatial intersection is the space allowed for centration).

[0069] Key design 1: The marker is a hanging ball (a small metal ball) with a diameter of 2δmm.

[0070] Key design 2: The marking line uses a laser line. The laser line simulates the center axis of the flange hole. The relationship between the laser line and the hanging ball is such that when the laser line shines on the hanging ball, it indicates that the hanging ball and the laser line are collinear.

[0071] Key design three: How to determine the position of the lob.

[0072] 3.1, The optimal position for the lob.

[0073] like Figure 1The spherical vacuum chamber shown has 20 centrifugal flange holes, numbered 1 to 20. Assume that flange hole 2 is not centrifugal and all other flange holes are centrifugal.

[0074] If the intersection of the central axes (laser lines) of the No. 1 and No. 2 centring flange holes is used as the centring (the position of the center of the hanging ball), then the above-mentioned hanging ball position is used to test whether the No. 3 to No. 20 centring flange holes are centring. The result is that they are all not centring. At this time, the No. 3 to No. 20 centring flange holes need to be readjusted, which is not conducive to the subsequent centring work.

[0075] In other words, the optimal position for the lifting ball is the centering position of the most selected flange holes. For example, if the centering flange holes No. 1 and No. 2 have one centering position, No. 6 to No. 20 have one centering position, and No. 3 to No. 5 have one centering position, then the centering position corresponding to No. 8 to No. 20 is the correct one.

[0076] In theory, the optimal position for a lob can be determined by:

[0077] For the position of the hanging ball, you should arbitrarily select every two centrifugal flange holes to determine the position of the hanging ball. Then, use this hanging ball position to judge whether the other flange holes are centrifugal, and record the number of centrifugal flange holes corresponding to the hanging ball position. If the number of centrifugal flange holes in the spherical vacuum chamber is N, then N (N-1) / 2 tests are required. The one with the largest number of centrifugal flange holes is the optimal position of the hanging ball. Figure 1 The spherical vacuum chamber has 20 concentric flange holes, and the corresponding tests are 190 times.

[0078] 3.2, Adjust the position of the hanging ball.

[0079] This application investigates the centrifugal accuracy of the flange holes in a spherical vacuum chamber, which must meet ±δmm. Therefore, strictly speaking, as long as the center axis (laser line) of the centrifugal flange hole illuminates the hanging ball, it is sufficient. However, if only the center axes (laser lines) of the two centrifugal flange holes are used to determine the hanging ball's position, the hanging ball's position cannot be fixed (i.e., the hanging ball can move within a small space while ensuring that the center axes of the two centrifugal flange holes illuminate the hanging ball).

[0080] 3.3. If the center axes of all concentric flange holes are represented by laser lines, the position of the hanging ball can be completely illuminated by the laser lines. This is difficult when the number of concentric flange holes is 20. Therefore, there are too many laser lines in the spherical cavity. At the same time, the large number of laser lines also increases the cost.

[0081] Combined with practical tests, select the center axes of 4 to 6 concentric flange holes (the 4 to 6 center axes are not coplanar) to align. If the center can be found:

[0082] First, the center axis of 4 to 6 concentric flange holes is used for centering, and the space for adjusting the position of the hanging ball is very small.

[0083] The second is to align the central axis of 4 to 6 centrifugal flange holes. If the center can be found, it can basically be considered as the center position of the most flange holes, that is, it meets the optimal position.

[0084] That is, it is more appropriate to adopt the strategy of "first selecting the center axis of the appropriate centrifugal flange hole to determine the position of the lifting ball (centrifugal position), and then judging whether the other flange holes are centrifugal one by one".

[0085] <Example 1: A Spherical Cavity Centering Verification Device>

[0086] Figure 2 The figure shows the three-dimensional structure of a spherical cavity centering verification device. Figure 2 As shown, the spherical cavity 1000 is evenly distributed with a number of centring flange holes 3000, and an inspection flange hole 1001 is provided on the top of the spherical cavity; the spherical cavity centring verification device includes:

[0087] a, hanging ball assembly 1100. Figure 3 The three-dimensional structure of the hanging ball assembly is shown (the hanging ball is not shown). Figure 4 A three-dimensional structural diagram of the hanging ball assembly is shown from another perspective (showing the hanging ball).

[0088] The hanging ball assembly 1100 includes: a horizontal bearing flange plate 1110 , a three-way moving assembly 1120 , and a hanging ball 1130 .

[0089] Figure 5 The three-dimensional structure of the three-directional moving component 1120 is schematically shown. Figure 6 The cross-sectional view of the three-way moving assembly 1120 is shown. The three-way moving assembly 1120 includes: a vertical rod 1121, a suspension rope 1122, a hollow middle assembly 1123, and a vertical rod fixing assembly 1127.

[0090] The key design features of the ball assembly 1100 are:

[0091] i. A hole is provided at the lower end of the vertical rod 1121, and the hanging ball 1130 is suspended in the hole of the vertical rod 1121 by a hanging rope 1122;

[0092] ii. The horizontal load-bearing flange plate 1110 is installed on the inspection flange hole 1001; a movable hole is opened in the middle of the horizontal load-bearing flange plate 1110;

[0093] iii. The hollow middle assembly 1123 includes: a hollow rod 1124, a first fastening plate 1125, and a second fastening plate 1126; the first fastening plate 1125 is fixedly mounted on the lower portion of the hollow rod 1124; the outer surface of the hollow rod 1124 located above the first fastening plate 1125 is threaded; a threaded hole is disposed in the middle portion of the second fastening plate 1126, and the second fastening plate 1126 is threadedly connected to the hollow rod 1124; the first fastening plate 1125 and the second fastening plate 1126 are respectively disposed on the lower and upper sides of the horizontal load-bearing flange plate 1110;

[0094] The hollow rod 1124 is inserted into the movable hole in the middle of the horizontal bearing flange plate 1110. When the second fastening plate 1126 moves upward, the first fastening plate 1125 and the second fastening plate 1126 no longer clamp the horizontal bearing flange plate 1110. At this time, the hollow rod 1124 is moved to move the vertical rod 1121 and the hanging ball 1130 (horizontal XY direction movement).

[0095] iv. The vertical rod 1121 is disposed inside the hollow rod 1124, and the two are fixed together by a vertical rod fixing assembly 1127. The vertical rod fixing assembly 1127 includes: a locking nut 1128, a pressure washer tube 1129, and an apron 1131. The locking nut 1128 includes a nut body and a pressure plate connected as one body; the nut body cooperates with the external thread of the hollow rod 1124.

[0096] The inner wall of the top end of the hollow rod 1124 is chamfered, and a rubber ring 1131 is provided between the lower end of the pressure pad tube 1129 and the top end of the hollow rod 1124;

[0097] The bottom of the pressure pad tube 1129 is provided with a flange protruding from the outer wall; the pressing plate is in close contact with the flange;

[0098] When the locking nut 1128 is tightened, the pressure pad tube 1129 will squeeze the rubber ring chamfer seal, and the rubber ring will be compressed to hold the vertical rod 1121, thereby preventing the vertical tube from moving in the vertical direction. That is, when the Z-direction position of the hanging ball needs to be adjusted, loosen the locking nut, and then move the vertical rod until the hanging ball meets the relevant requirements, and then tighten the locking nut.

[0099] b, Laser centering flange assembly 1200. Figure 7The three-dimensional structure of the laser centering flange assembly 1200 is shown. Laser centering flange assembly 1200 includes a blind flange 1210, a guide rail 1220, a slider 1230, and a laser pointer 1240. The blind flange 1210 has a 1mm circular hole in its center. A guide rail 1220 is fixed perpendicular to the surface of the blind flange 1210. The slider 1230 slides on the guide rail 1220. The slider 1230 has threaded holes, and the guide rail 1220 has several threaded holes evenly distributed along its length. Once the slider 1230 reaches a predetermined position, screws 1250 engage the threaded holes of the slider 1230 and the threaded holes of the guide rail 1220 to secure the slider 1230 to the guide rail 1220.

[0100] The laser pen 1240 can be fixed on the slider 1230 , and the light emitted by the laser pen 1240 is coaxial with the center line of the blind flange 1210 .

[0101] The adjustment method of the laser centering flange assembly 1200 is as follows: first, the laser pen 1240 is installed toward the blind flange 1210, and the beam is irradiated on the flange surface of the blind flange 1210; then, the laser pen knob is adjusted to move the beam to ensure that it irradiates the Φ1mm circular hole; this proves that the laser pen beam is substantially coaxial with the center line of the laser pen flange; then, the laser pen 1240 is installed in the opposite direction of the blind flange 1210.

[0102] c. Centering accuracy improvement device 2000. Figure 8 A three-dimensional structural diagram of the centering accuracy improvement device 2000 is shown. Figure 9 A three-dimensional structural diagram of the centering accuracy improving device 2000 is shown from another perspective. Figure 10 A front view of the centering accuracy improving device 2000 is shown.

[0103] The centering accuracy improvement device 2000 is installed on an existing centering flange hole 3000 that needs to have its centering accuracy adjusted. It includes: a first flange 2100, a second flange 2200, a bellows 2300, a distance adjustment device 2400, and a laser centering flange assembly 1200.

[0104] The first flange 2100 is fixedly connected to the existing centrifugal flange hole 3000 by a bolt and nut assembly;

[0105] One end of the bellows 2300 is connected to the first flange 2100, and the other end is connected to the second flange 2200;

[0106] The blind flange 1210 of the laser centering flange assembly 1200 is fixedly connected to the second flange plate 2200 by a bolt and nut assembly;

[0107] The second flange 2200 and the first flange 2100 are provided with 6 sets of evenly distributed distance adjustment devices 2400 (the phase angle of adjacent distance adjustment devices 2400 is 60°);

[0108] The distance adjustment device 2400 includes: a first connecting member 2410 arranged on the outer circumference of the first flange 2100, a second connecting member 2420 arranged on the outer circumference of the second flange 2200, a threaded rod 2430, and four nuts 2440; a threaded hole is set between the first connecting member 2410 and the second connecting member.

[0109] By adjusting the distance between each set of first connecting members 2410 and second connecting members 2420 , the tilt angle of the second flange 2200 can be achieved.

[0110] like Figure 11 and Figure 12 As shown, the number of distance adjustment devices 2400 is at least 3 (the phase angle of adjacent distance adjustment devices 2400 is 120 degrees). The angle of the second flange 2200 can generally be adjusted to about 1° to 3°. The diameter of the threaded rod 2430 is slightly smaller than the threaded holes of the first connecting member 2410 and the second connecting member 2420. At the same time, the threaded rod 2430 has a certain degree of elasticity. In this way, it can be like Figure 12 As shown, the angle of the second flange 2200 can be adjusted.

[0111] It should also be noted that the spherical vacuum chamber of Example 1 has 20 centrifugal flange holes and one top inspection flange hole. During manufacture, these 21 flange holes were all manufactured according to centrifugal requirements, with the centrifugal center being the center of the spherical vacuum chamber. Therefore, the three-way movable assembly only requires centimeter-level adjustment of the hanging ball. Therefore, the three-way movable assembly of Example 1 is suitable. However, the choice of a three-way movable assembly is not limited to Example 1; it is also feasible to use a robotic arm (the end of the robotic arm suspends the hanging ball via a sling 1122, and the movement of the robotic arm achieves the movement of the hanging ball).

[0112] A method for verifying the centring of a spherical cavity, wherein the spherical cavity is uniformly provided with S centring flange holes, and an inspection flange hole is provided at the top of the spherical cavity. The centring accuracy of the S centring flange holes is verified to be δ mm, where S is a natural number greater than or equal to 10, and the method comprises the following steps:

[0113] S100, determining the position of the lob, which includes sub-steps S101-S102:

[0114] S101, placing a hanging ball into the spherical cavity; wherein the diameter of the hanging ball is 2δmm, and its spatial position is adjusted by a three-way moving component;

[0115] S102, selecting N centrifugal flange holes to install laser centering flange assemblies, and adjusting the position of the hanging ball so that the laser beams emitted by the laser centering flange assemblies installed in the selected N centrifugal flange holes can all illuminate the hanging ball; the central axes of the N centrifugal flange holes are not coplanar; N is 4, 5, or 6;

[0116] S200, removing the N centrifugal flange holes selected in S102, and using a laser centering flange assembly and a hanging ball to determine whether the remaining SN centrifugal flange holes to be inspected are aligned one by one: installing a laser centering flange assembly on the centrifugal flange hole to be inspected. If the laser emitted by the laser centering flange assembly illuminates the hanging ball, it indicates that the centrifugal flange hole to be inspected meets the centrifugal accuracy requirement; otherwise, it does not meet the requirement.

[0117] If the remaining SN centrifugal flange holes to be tested all meet the centrifugal accuracy requirements, they are judged to be qualified; otherwise, they are unqualified and need to be repaired.

[0118] The method further includes step S300 : installing a centering accuracy improving device 2000 for the centering flange hole that does not meet the centering accuracy requirement in S200 .

[0119] from Figure 13 It can be seen that the combination of the laser centering flange assembly and the hanging ball can easily determine whether the flange hole is aligned. In combination with the centering accuracy improvement device, the centering accuracy of the centering flange hole can be easily corrected.

[0120] The above embodiments are preferred implementation modes of the present invention and are only used to facilitate the explanation of the present invention. They are not intended to limit the present invention in any form. Any person with ordinary knowledge in the technical field can, without departing from the scope of the technical features of the present invention, make partial changes or modifications to the technical contents disclosed in the present invention and make equivalent embodiments without departing from the technical features of the present invention. Such modifications still fall within the scope of the technical features of the present invention.

Claims

1. A spherical cavity centering verification device, wherein a plurality of centering flange holes are evenly distributed in the spherical cavity, and an inspection flange hole is provided at the top of the spherical cavity; It is characterized by: The spherical cavity centering verification device comprises: A hanging ball assembly, comprising a hanging ball and a three-way moving assembly for moving the hanging ball; A laser centering flange assembly includes: a blind flange, a guide rail, a slider, and a laser pen; the blind flange has a 1 mm circular hole in its center; the guide rail is fixed to the surface of the blind flange perpendicular to the surface of the blind flange; the slider is slidably mounted on the guide rail and can be fixedly connected to the guide rail; the laser pen is mounted on the slider, and the light emitted by the laser pen passes through the circular hole in the center of the blind flange; The hanging ball assembly is used to place the hanging ball into the interior of the spherical cavity through the inspection flange hole; Each centrifugal flange hole has a corresponding laser centrifugal flange assembly, and the blind flange of the corresponding laser centrifugal flange assembly can be adapted to the corresponding centrifugal flange hole; The spherical cavity centering verification device further includes: a centering accuracy improvement device, which is used to adjust the centering flange hole with insufficient centering accuracy, and includes: a first flange plate, a second flange plate, a bellows, a distance adjustment device, and a laser centering flange assembly; The first flange is fixedly connected to the centering flange hole with insufficient centering accuracy by a bolt and nut assembly; one end of the bellows is connected to the first flange, and the other end is connected to the second flange; the blind flange of the laser centering flange assembly is fixedly connected to the second flange by a bolt and nut assembly; The second flange and the first flange are provided with at least three sets of evenly distributed distance adjustment devices; The distance adjustment device includes: a first connecting member arranged on the outer circumference of the first flange, a second connecting member arranged on the outer circumference of the second flange, a threaded rod, and at least two nuts; a threaded hole is provided between the first connecting member and the second connecting member, the threaded rod is adapted to the threaded hole, and a nut is respectively provided on the outer side of the first connecting member and the outer side of the second connecting member, and the distance between the first connecting member and the second connecting member is adjusted by the two nuts.

2. A spherical cavity centering verification device according to claim 1, characterized in that: At least four of the centring flange holes are selected to install the laser centring flange assembly to determine the position of the hanging ball, and the remaining centring flange holes are judged whether they are centring by using the laser centring flange assembly and the hanging ball.

3. A spherical cavity centering verification device according to claim 1, characterized in that: The three-way moving assembly includes: a horizontal load-bearing flange plate, a vertical rod, a suspension rope, a hollow middle assembly, and a vertical rod fixing assembly; The lower end of the vertical rod is provided with a hole, and the hanging ball is suspended in the hole of the vertical rod through a hanging rope; The horizontal load-bearing flange plate is installed on the maintenance flange hole; a moving hole is opened in the middle of the horizontal load-bearing flange plate; The hollow middle component includes: a hollow rod, a first fastening plate, and a second fastening plate; the first fastening plate is fixedly provided at the lower part of the hollow rod, the outer surface of the hollow rod located above the first fastening plate is provided with a thread, the middle part of the second fastening plate is provided with a threaded hole, and the second fastening plate is threadedly connected to the hollow rod; the first fastening plate and the second fastening plate are respectively provided on the lower side and the upper side of the horizontal load-bearing flange plate; The hollow rod is inserted into a movable hole in the middle of the horizontal bearing flange plate; the first and second fastening plates can be made to clamp / release the horizontal bearing flange plate by rotating the second fastening plate; The vertical rod is arranged inside the hollow rod, and the two are fixed by a vertical rod fixing assembly, which includes: a locking nut, a pressure washer tube, and a rubber ring; the locking nut includes a nut body and a pressure plate connected into one body; the nut body cooperates with the external thread of the hollow rod; The upper portion of the vertical rod is inserted into the hollow tube of the pressure pad tube and extends to the upper portion of the pressure pad tube; The inner wall of the top end of the hollow rod is provided with a chamfer, and a rubber ring is provided between the lower end of the pressure pad tube and the top end of the hollow rod; The bottom of the pressure pad tube is provided with a flange protruding from the outer wall; the pressing plate is in close contact with the flange; When the locking nut is tightened, the pressure pad tube will squeeze the rubber ring, and the rubber ring will be compressed to hold the vertical rod, thereby limiting the vertical displacement of the vertical rod.

4. A spherical cavity centering verification device according to claim 1, characterized in that: The centering accuracy of the flange hole of the spherical cavity is ±δmm, and the diameter of the hanging ball is 2δmm.

5. The spherical cavity centering verification device according to claim 1, characterized in that: The hanging ball is a metal sphere.

6. The spherical cavity centering verification device according to claim 1, characterized in that: The slider is provided with threaded holes, and the guide rail is evenly distributed with several threaded holes along its length. After the slider reaches a predetermined position, screws are used to match the threaded holes of the slider and the threaded holes of the guide rail to achieve fixation between the slider and the guide rail.

7. A centring verification method for a spherical cavity centring verification device according to any one of claims 1 to 6, wherein the spherical cavity is uniformly provided with S centring flange holes, and an inspection flange hole is provided at the top of the spherical cavity. The centring accuracy of the S centring flange holes is verified to be δ mm, where S is a natural number greater than or equal to 10. It is characterized by: The following steps are involved: S100, determining the position of the lob, which includes sub-steps S101-S102: S101, placing a hanging ball into the spherical cavity; wherein the diameter of the hanging ball is 2δmm, and its spatial position is adjusted by a three-way moving component; S102, selecting N centrifugal flange holes to install laser centering flange assemblies, and adjusting the position of the hanging ball so that the laser beams emitted by the laser centering flange assemblies installed in the selected N centrifugal flange holes can all illuminate the hanging ball; the central axes of the N centrifugal flange holes are not coplanar; N is 4, 5, or 6; S200, removing the N centrifugal flange holes selected in S102, and using a laser centering flange assembly and a hanging ball to determine whether the remaining SN centrifugal flange holes to be inspected are aligned one by one: installing a laser centering flange assembly on the centrifugal flange hole to be inspected. If the laser emitted by the laser centering flange assembly illuminates the hanging ball, it indicates that the centrifugal flange hole to be inspected meets the centrifugal accuracy requirement; otherwise, it does not meet the requirement. If the remaining SN centrifugal flange holes to be tested all meet the centrifugal accuracy requirements, they are judged to be qualified; otherwise, they are unqualified and need to be repaired; S300; Install a centering accuracy improvement device for the centering flange holes that do not meet the centering accuracy requirements in S200, so that the light emitted by the laser centering flange assembly of the centering accuracy improvement device is irradiated on the hanging ball, and then remove the laser centering flange assembly.

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