3D heterogeneous integrated three-axis integrated MEMS gyroscope

Abstract

The invention discloses a 3D heterogeneous integrated triaxial MEMS gyroscope, the MEMS gyroscope comprises a first structure unit layer, a second structure unit layer, a middle pole plate layer, a substrate layer, a cover plate layer, a first chamber and a second chamber, the two structure unit layers and the middle pole plate layer are combined together in a heterogeneous integration manner in the vertical direction, the X, Y and Z sensitive axial directions form four masses, angular velocity signals are detected in a four-mass-block cooperative detection mode, the limitation of a traditional 2D plane layout design is broken through, the measurement precision is high, the vibration suppression performance is good, and the environmental interference resistance is high; the detection mass blocks in the X sensitive axial direction, the Y sensitive axial direction and the Z sensitive axial direction in the structural unit layer are not in coupling connection, the movement of the detection mass block in each axial direction in the respective driving direction is directly driven by the driving mass blocks through the elastic beams, mutual interference between different axial detection modes is eliminated, and the cross coupling error is lower.

Description

Technical Field

[0001] The present invention relates to the field of MEMS technology, and in particular to a 3D heterogeneously integrated three-axis MEMS gyroscope. Background Art

[0002] 3D heterogeneous integration, also known as 3DHI (3D Heterogeneous Integration), is one of the cutting-edge technologies in the semiconductor field. It breaks the limitations of traditional 2D integration by stacking different types of chips and functional units in 3D to form a multi-layered integrated structure, achieving high performance, multi-functions, and low cost. In recent years, 3D heterogeneous integration has continued to develop and gradually become the link between chip manufacturing and system integration.

[0003] The three-axis integrated MEMS gyroscope uses a single structure to detect angular velocity on three axes and plays an indispensable role in the micro-electromechanical system inertial measurement unit (MEMSIMU). With the increasing requirements for the accuracy and volume of MEMSSIMU in applications such as autonomous driving and low-altitude economy, the research on single-chip three-axis integrated MEMS gyroscope has received increasing attention.

[0004] The Chinese patent application number is CN202410812589.9. The three-axis integrated MEMS gyroscope basically adopts a planar layout, and the Z-axis detection electrode and the X-axis (or Y-axis) detection electrode in the structure are set on the same detection mass block. There is a problem of large cross-coupling error between the Z-axis and the X-axis (or Y-axis), which makes it difficult to meet the needs of many applications.

[0005] Chinese patent application number CN202410002777.5 proposes an integrated three-axis gyroscope. Although its Z-axis detection electrode does not share a mass block with the X-axis (or Y-axis) detection electrode, the movement of the X-axis detection mass block in the driving direction is driven by the Y-axis detection mass block in the structure. The two axial detection mass blocks are coupled and connected by elastic beams at adjacent locations. This causes interference between the X-axis and Y-axis detection modes, affecting the measurement accuracy of the angular rate.

[0006] To this end, the present invention proposes a 3D heterogeneously integrated three-axis MEMS gyroscope. Summary of the Invention

[0007] The purpose of the present invention is to solve the problems raised in the above background technology, and provide a 3D heterogeneously integrated three-axis MEMS gyroscope.

[0008] In order to achieve the above-mentioned purpose, the present invention specifically adopts the following technical solutions:

[0009] A 3D heterogeneously integrated three-axis MEMS gyroscope includes a first structural unit layer, a second structural unit layer, an intermediate plate layer, a substrate layer, a cover layer, a first chamber, and a second chamber. The two structural unit layers and the intermediate plate layer are combined together in the vertical direction through heterogeneous integration, so that the three sensitive axes of X, Y, and Z each constitute a "four-mass". The intermediate plate layer is located between the first structural unit layer and the second structural unit layer, and at least four conductive electrodes are provided on both the front and back surfaces of the intermediate plate layer, of which two conductive electrodes and the four X-axis detection masses of the first and second structural unit layers constitute X-axis detection electrodes, and the other two conductive electrodes and the four Y-axis detection masses of the first and second structural unit layers constitute Y-axis detection electrodes. The intermediate plate is provided with a through hole so that the first chamber and the second chamber have the same vacuum degree. The drive motions of the four drive masses of the first and second structural unit layers are in anti-phase, and the detection motions of the four detection masses in the same sensitive axis are in anti-phase, including anti-phase within the structural unit layer and anti-phase between the structural unit layers.

[0010] Furthermore, the first structural unit layer includes a first driving mass block, a second driving mass block, a driving execution electrode, a driving detection electrode, a first anchor point, a first elastic beam, a second anchor point, a first X-axis detection mass block, a second X-axis detection mass block, a second elastic beam, a third elastic beam, a first Y-axis detection mass block, a second Y-axis detection mass block, a fourth elastic beam, a fifth elastic beam, a first Z-axis detection mass block, a second Z-axis detection mass block, a sixth elastic beam, a driving coupling beam, a central coupling assembly, a Z-axis detection coupling frame, a central anchor point, a third anchor point, and an outer frame; the second structural unit layer has the same structure as that in the first structural unit layer, and the movement of its driving and detection mass blocks is in opposite phase to the movement of the driving and detection mass blocks in the first structural unit layer.

[0011] Furthermore, the first driving mass block and the second driving mass block each include a C-shaped frame, two I-shaped extended transverse frames and two L-shaped extended transverse frames, and the two I-shaped extended transverse frames and the two L-shaped extended transverse frames are connected to the back of the C-shaped frame; a driving execution electrode and a driving detection electrode are arranged inside the C-shaped frame of the driving mass block; the open side of the C-shaped frame of the driving mass block is connected to the first anchor point through a first elastic beam, and the port of the L-shaped extended transverse frame is connected to the second anchor point through a first elastic beam.

[0012] Furthermore, the axial direction of the first elastic beam is set along the Y-axis direction, and its stiffness in the X-axis direction is much lower than the stiffness in the Y-axis and Z-axis directions; the first mass block and the second driving mass block are connected by a driving coupling beam; the X-axis detection mass block, the Y-axis detection mass block, and the Z-axis detection mass block are respectively isolated by the C-shaped frame, I-shaped extension cross frame, and L-shaped extension cross frame of the first driving mass block and the second driving mass block, and there is no coupling connection between them.

[0013] Furthermore, the two X-axis detection masses are respectively arranged in an inner area composed of the first driving mass block, the back of the C-shaped frame of the second driving mass block, the I-shaped extended transverse frame and the L-shaped extended transverse frame, and are connected to the back of the C-shaped frame of the driving mass block through a second elastic beam and to the I-shaped extended transverse frame of the driving mass block through a third elastic beam; the second elastic beam is a biaxial folding beam, and the folded part along the X-axis can provide bending deformation in the X-axis direction, and the folded part along the Y-axis can provide bending deformation in the Y-axis direction, as well as torsional deformation in the Z-axis direction; the angle between the third elastic beam and the I-shaped extended transverse frame of the driving mass block is set to be between 30° and 60°; the two X-axis detection masses are respectively connected to the upper and lower ends of the central coupling assembly.

[0014] Furthermore, the two Y-axis detection masses are respectively arranged in the inner area composed of the back of the C-shaped frame of the first driving mass block, the second driving mass block and the two L-shaped extended horizontal frames, and are connected to the back of the C-shaped frame of the driving mass block through the fourth elastic beam, and are connected to the L-shaped extended horizontal frame of the driving mass block through the fifth elastic beam; the two Y-axis detection masses are respectively connected to the left and right ends of the central coupling assembly.

[0015] Furthermore, the two Z-axis detection masses are respectively arranged in the inner peripheral areas of the C-shaped frames of the first driving mass block and the second driving mass block, and are respectively connected to the C-shaped frames of the driving mass blocks through sixth elastic beams; the axial direction of the sixth elastic beam is arranged perpendicular to the axial direction of the first elastic beam connected to the driving mass blocks, and its stiffness in the Y-axis direction is much lower than the stiffness in the X-axis and Z-axis directions; the two Z-axis detection masses are connected through a Z-axis detection coupling frame.

[0016] The beneficial effects of the present invention are as follows:

[0017] 1. This invention utilizes heterogeneous integration in the vertical direction to combine two structural unit layers that drive and detect motion in anti-phase with each other, along with an intermediate plate layer. This allows the three sensitive axes (X, Y, and Z) to each form a "quad-mass," enabling angular velocity signal detection through coordinated detection of the four masses. This overcomes the limitations of traditional 2D planar layout designs, resulting in high measurement accuracy, excellent vibration suppression, and strong resistance to environmental interference.

[0018] 2. In this invention, the detection electrodes for the three sensitive axes (X, Y, and Z) in the structural unit layer are independently arranged in different detection masses. There is no coupling connection between the detection masses in different axes. The movement of each axial detection mass in its own driving direction is directly driven by the driving mass via the elastic beam, eliminating mutual interference between detection modes in different axes and achieving lower cross-coupling error compared to existing technologies.

[0019] 3. The present invention can be manufactured based on processes such as heterogeneous bonding, homogeneous bonding, and hybrid bonding. It has the advantages of easy processing, suitability for mass production, and low cost. It can also be combined with a MEMS accelerometer to form an on-chip MEMS IMU without adding additional process steps. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a cross-sectional schematic diagram of the present invention.

[0021] Figure 2 Schematic diagram of the intermediate plate layer of the present invention.

[0022] Figure 3 Schematic diagram of the structural unit layer of the present invention.

[0023] Figure 4 Schematic diagram of the driving mass block of the present invention.

[0024] Figure 5 Schematic diagram of the X-axis, Y-axis and Z-axis detection masses of the structural unit layer of the present invention and their relative positions with the conductive electrodes on the intermediate plate layer.

[0025] Figure 6 This is the driving mode vibration shape diagram of the present invention.

[0026] Figure 7 7a and 7b are the X-axis detection mode vibration shape diagrams of the present invention.

[0027] Figure 8 8a and 8b are the Y-axis detection mode vibration shape diagrams of the present invention.

[0028] Figure 9 This is the Z-axis detection mode vibration shape diagram of the present invention.

[0029] Reference numerals: 1, first structural unit layer; 2, second structural unit layer; 3, intermediate plate layer; 4, substrate layer; 5, cover layer; 6, first chamber; 7, second chamber; 8, conductive electrode; 9, through hole; 101, first driving mass block; 101a, C-shaped frame; 101b, I-shaped extension transverse frame; 101c, L-shaped extension transverse frame; 102, second driving mass block; 103, driving execution electrode; 104, driving detection electrode; 105, first anchor point; 106, first elastic beam; 107, second anchor point; 108, first X 109. X-axis detection mass block; 109. second X-axis detection mass block; 110. second elastic beam; 111. third elastic beam; 112. first Y-axis detection mass block; 113. second Y-axis detection mass block; 114. fourth elastic beam; 115. fifth elastic beam; 116. first Z-axis detection mass block; 117. second Z-axis detection mass block; 118. sixth elastic beam; 119. drive coupling beam; 120. center coupling assembly; 121. Z-axis detection coupling frame; 122. center anchor point; 123. third anchor point; 124. outer frame. DETAILED DESCRIPTION

[0030] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0031] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention as claimed, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort shall fall within the scope of protection of the present invention.

[0032] It should be noted that similar reference numerals and letters represent similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings. In addition, the terms "first," "second," etc. are used only to distinguish the descriptions and are not to be understood as indicating or implying relative importance.

[0033] In the description of the embodiments of the present invention, it should be noted that the terms "inside", "outside", "upper", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the inventive product is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention.

[0034] like Figures 1 to 9 As shown, a 3D heterogeneously integrated three-axis integrated MEMS gyroscope includes a first structural unit layer 1, a second structural unit layer 2, an intermediate electrode layer 3, a substrate layer 4, a cover layer 5, a first cavity 6 and a second cavity 7; the two structural unit layers 1, 2 and the intermediate electrode layer 3 are combined together in the vertical direction through heterogeneous integration, so that the three sensitive axes of X, Y and Z constitute "four masses".

[0035] The intermediate plate layer 3 is located between the first and second structural unit layers 1 and 2, with at least four conductive electrodes 8 provided on both its front and back surfaces. Two of these conductive electrodes, along with the four X-axis proof-proofing masses of the first and second structural unit layers 1 and 2, form the X-axis detection electrodes. The remaining two conductive electrodes, along with the four Y-axis proof-proofing masses of the first and second structural unit layers 1 and 2, form the Y-axis detection electrodes. Through-holes 9 are provided in the intermediate plate, ensuring that the first and second chambers 6 and 7 have the same vacuum level, thus ensuring that the first and second structural unit layers 1 and 2 of the gyroscope are in the same operating environment.

[0036] The first structural unit layer 1 and the second structural unit layer 2 have the same structure, but the motion of the drive and detection masses between and within the structural unit layers is in antiphase to offset the effects of linear acceleration. Taking the first structural unit layer 1 as an example, it includes a first drive mass 101, a second drive mass 102, a drive execution electrode 103, a drive detection electrode 104, a first anchor point 105, a first elastic beam 106, a second anchor point 107, a first X-axis detection mass 108, a second X-axis detection mass 109, a second elastic beam 110, a third elastic beam 111, a first Y-axis detection mass 112, a second Y-axis detection mass 113, a fourth elastic beam 114, a fifth elastic beam 115, a first Z-axis detection mass 116, a second Z-axis detection mass 117, a sixth elastic beam 118, a drive coupling beam 119, a central coupling assembly 120, a Z-axis detection coupling frame 121, a central anchor point 122, a third anchor point 123, and an outer frame 124.

[0037] Both the first drive mass 101 and the second drive mass 102 include a C-shaped frame 101a, two I-shaped extension transverse frames 101b, and two L-shaped extension transverse frames 101c. The two I-shaped extension transverse frames 101b and the two L-shaped extension transverse frames 101c are connected to the back of the C-shaped frame 101a. Drive execution electrodes 103 and drive detection electrodes 104 are located within the C-shaped frame 101a of the drive mass. The open side of the C-shaped frame is connected to the first anchor point 105 via a first elastic beam 106. The end of the L-shaped extension transverse frame 101c is also connected to the second anchor point 107 via a first elastic beam 106.

[0038] The first elastic beam 106 is oriented axially along the Y-axis, and its stiffness in the X-axis is significantly lower than in the Y- and Z-axis directions. This design allows the two drive masses to drive motion only along the X-axis, preventing the drive motion from being affected by other detection motions. This decouples the drive mode from the three-axis detection modes, improving measurement accuracy. The first drive mass 101 and the second drive mass 102 are connected by a drive coupling beam 119, achieving synchronization of the anti-phase drive motions of the left and right drive masses along the X-axis within the same structural unit layer, combining them into a single vibration system. The X-axis detection masses 108 and 109, the Y-axis detection masses 112 and 113, and the Z-axis detection masses 116 and 117 are isolated by the C-shaped frame 101a, the I-shaped extension transverse frame 101b, and the L-shaped extension transverse frame 101c of the first drive mass 101 and the second drive mass 102, respectively. There is no coupling connection between the detection masses in the three axes, which eliminates the mutual interference between the detection modes in each axis and effectively reduces the cross-coupling error.

[0039] Two X-axis detection masses 108 and 109 are respectively positioned within the inner area formed by the back of the C-shaped frame 101a of the first and second drive masses 101, 102, the I-shaped extension cross frame 101b, and the L-shaped extension cross frame 101c. The X-axis detection mass is connected to the back of the C-shaped frame 101a of the drive mass via a second elastic beam 110 and to the I-shaped extension cross frame 101b of the drive mass via a third elastic beam 111. The second elastic beam 110 is a biaxially folded beam, with the folded portion along the X-axis providing bending deformation in the X-axis direction and the folded portion along the Y-axis providing bending deformation in the Y-axis direction, as well as torsional deformation in the Z-axis direction. The angle between the third elastic beam 111 and the I-shaped extension cross frame 101b of the drive mass is set to between 30° and 60°. The two X-axis proof-masses are connected to the upper and lower ends of the central coupling assembly 120, respectively, to synchronize the anti-phase detection motions of the two X-axis proof-masses within the same structural unit layer, forming a combined vibration system. When the left drive mass in the first structural unit layer 1 is driven in anti-phase along the negative X-axis direction and the right drive mass in the positive X-axis direction, the third elastic beam 111 drives the first X-axis proof-mass 108 in the negative Y-axis direction and the second X-axis proof-mass 109 in the positive Y-axis direction. Conversely, when the left drive mass is driven in anti-phase along the positive X-axis direction and the right drive mass is driven in anti-phase along the negative X-axis direction, the first X-axis proof-mass 108 is driven in the positive Y-axis direction and the second X-axis proof-mass 109 in the negative Y-axis direction. When subjected to angular velocity along the Y or Z axis, the two X-axis proof-masses do not respond. Only when subjected to angular velocity along the X axis do they perform anti-phase detection motion along the Z axis. Because the movement of the driving and detection masses in the second structural unit layer 2 is in antiphase with that of the first structural unit layer 1, the four groups of capacitors formed by the four X-axis detection masses in the two structural unit layers and the conductive electrodes on the intermediate plate layer have two groups with increasing capacitance and two groups with decreasing capacitance, generating a differential signal output.

[0040] Two Y-axis detection masses 112 and 113 are respectively positioned within the inner area formed by the back of the C-shaped frame 101a of the first and second drive masses 101, 102, and the two L-shaped extension transverse frames 101c. The Y-axis detection masses are connected to the back of the C-shaped frame 101a of the drive masses via a fourth elastic beam 114, and to the L-shaped extension transverse frame 101c of the drive masses via a fifth elastic beam 115. Furthermore, the Y-axis detection masses are connected to the left and right ends of the central coupling assembly 120, respectively. This synchronizes the anti-phase detection motions of the two Y-axis detection masses within the same structural unit layer, combining them into a single vibration system. When the left and right drive masses within the first structural unit layer 1 perform anti-phase reciprocating motion along the X-axis, the fourth and fifth elastic beams 114, 115 drive the two Y-axis detection masses to perform anti-phase reciprocating motion along the X-axis. When subjected to X-axis or Z-axis angular velocity, the two Y-axis detection masses do not respond. Only when subjected to Y-axis angular velocity, the two Y-axis detection masses perform anti-phase detection motion along the Z-axis. The four Y-axis detection masses in the two structural unit layers and the conductive electrodes on the middle plate layer form four groups of capacitors. The capacitance values of two groups increase and the capacitance values of two groups decrease, generating a differential signal output.

[0041] Two Z-axis detection masses 116 and 117 are respectively positioned within the inner perimeter of the C-shaped frame 101a of the first drive mass 101 and the second drive mass 102, and are connected to the C-shaped frame 101a of the drive masses via a sixth elastic beam 118. The axis of the sixth elastic beam 118 is perpendicular to the axis of the first elastic beam 106 connecting the drive masses. Its stiffness in the Y-axis direction is much lower than its stiffness in the X- and Z-axis directions, limiting the two Z-axis detection masses to detection motion along the Y-axis. The two Z-axis detection masses are connected via a Z-axis detection coupling frame 121, synchronizing the anti-phase detection motions of the two Z-axis detection masses within the same structural unit layer, combining them into a single vibration system. When the left and right drive masses within the first structural unit layer 1 perform anti-phase reciprocating motion along the X-axis, the sixth elastic beam 118 drives the two Z-axis detection masses to perform anti-phase reciprocating motion along the X-axis. When subjected to X-axis or Y-axis angular velocity, the two Z-axis detection masses do not respond. Only when subjected to Z-axis angular velocity, the two Z-axis detection masses perform anti-phase detection motion along the Y-axis. The four groups of capacitors formed by the detection electrodes on the four Z-axis detection masses in the two structural unit layers have two groups of capacitance values increasing and two groups of capacitance values decreasing, generating a differential signal output.

[0042] In summary, by utilizing heterogeneous integration in the vertical direction to combine two structural unit layers that drive and detect motion in anti-phase with each other, and an intermediate plate layer, the three sensitive axes (X, Y, and Z) each form a "quad-mass." Angular velocity signals are detected through the coordinated detection of the four masses, breaking the limitations of traditional 2D planar layout designs. This approach offers high measurement accuracy, excellent vibration suppression, and strong resistance to environmental interference. The detection electrodes for the three sensitive axes (X, Y, and Z) in the structural unit layer are independently located within different detection masses, and there is no coupling between the detection masses in different axes. The motion of each detection mass in its respective driving direction is directly driven by the driving mass via an elastic beam, eliminating mutual interference between detection modes in different axes. Compared to existing technologies, this approach exhibits lower cross-coupling error. The design can be fabricated using processes such as heterogeneous bonding, homogeneous bonding, and hybrid bonding, offering advantages such as ease of fabrication, suitability for mass production, and low cost. Furthermore, the design can be combined with a MEMS accelerometer to form an on-chip MEMS SIMU without adding additional process steps.

[0043] The above shows and describes the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions merely illustrate the principles of the present invention. Various changes and modifications may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and modifications are intended to fall within the scope of the present invention. The scope of protection claimed by the present invention is defined by the appended claims and their equivalents.

Claims

1. A 3D heterogeneously integrated three-axis MEMS gyroscope, characterized in that: The invention comprises a first structural unit layer (1), a second structural unit layer (2), an intermediate plate layer (3), a substrate layer (4), a cover layer (5), a first chamber (6) and a second chamber (7); the two structural unit layers (1, 2) and the intermediate plate layer (3) are combined together in a vertical direction through heterogeneous integration, so that the three sensitive axes of X, Y and Z each constitute "four masses"; the intermediate plate layer (3) is located between the first structural unit layer (1) and the second structural unit layer (2), and at least four conductive electrodes (8) are provided on both the front and back sides of the intermediate plate layer, wherein two conductive electrodes are connected to the first structural unit layer (1) and the second structural unit layer (2). ), the four X-axis detection masses of the second structural unit layer (2) constitute an X-axis detection electrode, and the other two conductive electrodes and the four Y-axis detection masses of the first structural unit layer (1) and the second structural unit layer (2) constitute a Y-axis detection electrode; a through hole (9) is provided on the intermediate electrode plate, so that the first cavity (6) and the second cavity (7) have the same vacuum degree; the driving motions of the four driving masses of the first structural unit layer (1) and the second structural unit layer (2) are mutually in anti-phase, and the detection motions of the four detection masses in the same sensitive axis direction are mutually in anti-phase, including anti-phase within the structural unit layer and anti-phase between the structural unit layers.

2. The 3D heterogeneously integrated three-axis MEMS gyroscope according to claim 1, characterized in that: The first structural unit layer (1) comprises a first driving mass block (101), a second driving mass block (102), a driving execution electrode (103), a driving detection electrode (104), a first anchor point (105), a first elastic beam (106), a second anchor point (107), a first X-axis detection mass block (108), a second X-axis detection mass block (109), a second elastic beam (110), a third elastic beam (111), a first Y-axis detection mass block (112), a second Y-axis detection mass block (113), a fourth elastic beam (114), A fifth elastic beam (115), a first Z-axis detection mass block (116), a second Z-axis detection mass block (117), a sixth elastic beam (118), a drive coupling beam (119), a central coupling assembly (120), a Z-axis detection coupling frame (121), a central anchor point (122), a third anchor point (123), and an outer frame (124); the second structural unit layer (2) has the same structure as the first structural unit layer (1), and the movement of the drive and detection mass blocks thereof is in opposite phase to the movement of the drive and detection mass blocks in the first structural unit layer (1).

3. The 3D heterogeneously integrated three-axis MEMS gyroscope according to claim 2, characterized in that: The first driving mass block (101) and the second driving mass block (102) each comprise a C-shaped frame (101a), two I-shaped extension transverse frames (101b) and two L-shaped extension transverse frames (101c), wherein the two I-shaped extension transverse frames (101b) and the two L-shaped extension transverse frames (101c) are connected to the back of the C-shaped frame (101a); a driving execution electrode (103) and a driving detection electrode (104) are provided inside the C-shaped frame (101a) of the driving mass block; an opening side of the C-shaped frame of the driving mass block is connected to a first anchor point (105) via a first elastic beam (106), and a port of the L-shaped extension transverse frame (101c) is connected to a second anchor point (107) via the first elastic beam (106).

4. The 3D heterogeneously integrated three-axis MEMS gyroscope according to claim 1, characterized in that: The axial direction of the first elastic beam (106) is arranged along the Y-axis direction, and its rigidity in the X-axis direction is much lower than its rigidity in the Y-axis and Z-axis directions; the first mass block (101) and the second driving mass block (102) are connected via a driving coupling beam (119); the X-axis detection mass block (108, 109), the Y-axis detection mass block (112, 113), and the Z-axis detection mass block are respectively isolated by the C-shaped frame (101a), the I-shaped extension transverse frame (101b), and the L-shaped extension transverse frame (101c) of the first driving mass block (101) and the second driving mass block (102), and are not coupled to each other.

5. The 3D heterogeneously integrated three-axis MEMS gyroscope according to claim 1, characterized in that: Two X-axis detection masses (108, 109) are respectively arranged in an inner area formed by the back of the C-shaped frame (101a) of the first driving mass (101), the second driving mass (102), the I-shaped extension transverse frame (101b) and the L-shaped extension transverse frame (101c), and are connected to the back of the C-shaped frame (101a) of the driving mass through a second elastic beam (110), and are connected to the I-shaped extension transverse frame (101b) of the driving mass through a third elastic beam (111); the second elastic beam (110) is a biaxial folding beam, wherein the folding portion along the X-axis direction can provide bending deformation in the X-axis direction, and the folding portion along the Y-axis direction can provide bending deformation in the Y-axis direction, as well as torsional deformation in the Z-axis direction; the angle between the third elastic beam (111) and the I-shaped extension transverse frame (101b) of the driving mass is set to be between 30° and 60°; the two X-axis detection masses are respectively connected to the upper and lower ends of the central coupling component (120).

6. The 3D heterogeneously integrated three-axis MEMS gyroscope according to claim 1, characterized in that: The two Y-axis detection masses (112, 113) are respectively arranged in an inner area formed by the back of the C-shaped frame (101a) of the first driving mass (101), the second driving mass (102) and two L-shaped extension transverse frames (101c), are connected to the back of the C-shaped frame (101a) of the driving mass via a fourth elastic beam (114), and are connected to the L-shaped extension transverse frame (101c) of the driving mass via a fifth elastic beam (115); the two Y-axis detection masses are respectively connected to the left and right ends of the central coupling component (120).

7. The 3D heterogeneously integrated three-axis MEMS gyroscope according to claim 1, characterized in that: The two Z-axis detection masses (116, 117) are respectively arranged in the inner peripheral areas of the C-shaped frames (101a) of the first driving mass (101) and the second driving mass (102), and are respectively connected to the C-shaped frames (101a) of the driving mass blocks via a sixth elastic beam (118); the axial direction of the sixth elastic beam (118) is perpendicular to the axial direction of the first elastic beam (106) connected to the driving mass blocks, and its rigidity in the Y-axis direction is much lower than its rigidity in the X-axis and Z-axis directions; the two Z-axis detection masses are connected via a Z-axis detection coupling frame (121).

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