Charged particle beam device

Abstract

Provided is a charged particle beam device capable of easily introducing a sample. This charged particle beam device is provided with: a sample holder (300) that holds a sample; a main body section provided with an optical system for irradiating the sample with the charged particle beam, and a holder support section (230) provided with an insertion opening (232) through which the sample holder (300) can be inserted and removed; and a housing that houses the main body, in which a recess (110) is formed in the housing, an opening (120) through which the sample holder (300) enters and exits the insertion opening (232) is formed in the bottom (112) of the recess (110), and the housing has an illumination device (150) that illuminates the bottom (112) of the recess (110).

Description

Technical Field

[0001] The present invention relates to a charged particle beam device. Background Art

[0002] In charged particle beam devices such as transmission electron microscopes, scanning transmission electron microscopes, scanning electron microscopes, and focused ion beam devices, all or part of the main body may be covered with a cover in order to reduce noise caused by the external environment.

[0003] For example, Patent Document 1 discloses a scanning electron microscope including a main body cover in which a vacuum exhaust system and various circuits are mounted, a stage cover in which a sample stage is mounted, and a column cover in which a column is mounted.

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent No. 6535811 Summary of the Invention

[0007] Problems to be solved by the invention

[0008] In the charged particle beam device described above, a sample is placed in a sample chamber maintained in a vacuum state. In such a charged particle beam device, it is required to be able to easily introduce the sample into the sample chamber.

[0009] Solutions for solving problems

[0010] One embodiment of the charged particle beam device of the present invention comprises:

[0011] a specimen holder that holds the specimen;

[0012] a main body including an optical system for irradiating the sample with a charged particle beam and a holder support portion including an insertion port for inserting and removing the sample holder; and

[0013] a housing for housing the main body;

[0014] A recess is formed in the housing, and an opening for the sample holder to enter and exit the insertion port is formed at the bottom of the recess.

[0015] The housing includes a lighting device for illuminating the bottom of the recess.

[0016] Effects of the Invention

[0017] In such a charged particle beam device, since the bottom of the recess can be illuminated, visibility can be improved when the sample holder is inserted into the insertion port through the opening. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a diagram showing an example of the configuration of a transmission electron microscope.

[0019] Figure 2 It is a perspective view schematically showing a transmission electron microscope.

[0020] Figure 3 FIG1 is a front view schematically showing a transmission electron microscope.

[0021] Figure 4 is a cross-sectional view schematically showing a main part of a transmission electron microscope.

[0022] Figure 5 FIG1 is a top view schematically showing a lighting device.

[0023] Figure 6 It is a diagram for explaining the operation of the lighting device.

[0024] Figure 7 It is a diagram for explaining the operation of the lighting device.

[0025] Figure 8 It is a top view schematically showing the operation portion.

[0026] Figure 9 It is a cross-sectional view schematically showing the operation portion.

[0027] Figure 10 It is a plan view schematically showing the operation portion in the normal mode.

[0028] Figure 11 It is a top view schematically showing the operation portion in the maintenance mode.

[0029] Figure 12 is a diagram schematically showing a sample holder.

[0030] Figure 13 1 is a plan view schematically showing a holder support portion.

[0031] Figure 14 It is a diagram for explaining the insertion opening of the holder support portion.

[0032] Figure 15 This is a flowchart showing an example of a process for introducing a sample into a sample chamber.

[0033] Figure 16It is a perspective view schematically showing a modified example of a transmission electron microscope.

[0034] Description of Reference Numerals

[0035] 2…Transmission electron microscope, 30…Transparent plate, 31…Touch sensor, 32…Electrostatic panel, 34…Optical waveguide, 36…Light-emitting element, 38…Control substrate, 100…Casing, 102…Side, 110…Recessed portion, 112…Bottom, 113…Side, 114…Opening, 120…Opening, 130…Operation unit, 132…Display, 132a…Display, 132b…Display, 132c…Display, 134…Touch Panel, 136a…IN button, 136b…OUT button, 138a…button, 138b…button, 138c…button, 138d…button, 138e…button, 138f…button, 140…first metal plate, 141…gap, 142…second metal plate, 144…third metal plate, 150…illumination device, 152…light emitting element, 152a…first light emitting element, 152b…second light emitting element, 152c…first 3 Light-emitting element, 152d...4th light-emitting element, 152e...5th light-emitting element, 152f...6th light-emitting element, 160...Liquid receiving member, 200...Main body, 202...Sample chamber, 204...Lens barrel, 210...Electron gun, 220...Irradiation optical system, 230...Holder support, 232...Insert port, 234...Guide groove, 234a...1st portion, 234b...2nd portion, 234c...3rd portion, 235...Accommodation 236…gate valve, 238…switch, 239…sensor, 239a…light-emitting element, 239b…photodetector, 240…imaging optical system, 250…camera, 260…detector, 270…vibration isolation table, 300…sample holder, 310…sample holding portion, 320…shaft, 322…O-ring, 330…handle, 340…guide pin, 350…shielding plate, 400…control unit, 500…vacuum exhaust system. DETAILED DESCRIPTION

[0036] Hereinafter, preferred embodiments of the present invention will be described in detail using the accompanying drawings. Furthermore, the embodiments described below are not intended to unduly limit the contents of the present invention as described in the claims. In addition, all the structures described below are not necessarily essential components of the present invention.

[0037] In the following description, the charged particle beam device of the present invention is described as a transmission electron microscope that irradiates a sample with an electron beam. However, the charged particle beam device of the present invention may also irradiate a sample with a charged particle beam other than an electron beam (such as an ion beam).

[0038] 1. Transmission Electron Microscopy

[0039] 1.1. Structure of a Transmission Electron Microscope

[0040] First, a transmission electron microscope according to one embodiment of the present invention will be described with reference to the drawings. Figure 1 This is a diagram showing an example of the configuration of a transmission electron microscope 2 according to one embodiment of the present invention.

[0041] like Figure 1 As shown, the transmission electron microscope 2 includes a housing 100 , a main body 200 , a sample holder 300 , a control unit 400 , and a vacuum exhaust system 500 .

[0042] The housing 100 houses the main body 200 , the control unit 400 , and the vacuum exhaust system 500 of the transmission electron microscope 2 .

[0043] The main body 200 includes an electron gun 210; an irradiation optical system 220 for irradiating the sample S with electrons emitted from the electron gun 210; a holder support 230 with an insertion port for inserting and removing the sample holder 300; an imaging optical system 240 for imaging the electrons transmitted through the sample S; an imaging device 250 for capturing a transmission electron microscope image (TEM image) obtained by the electrons transmitted through the sample S; and a detector 260 for detecting the electrons transmitted through the sample S to obtain a scanning transmission electron microscope image (STEM image). The electron gun 210, irradiation optical system 220, and imaging optical system 240 constitute the lens barrel 204. The main body 200 is supported by a vibration isolation table 270. The interior of the lens barrel 204, which includes the sample chamber 202, is maintained in a vacuum state.

[0044] In the main body 200, the irradiation optical system 220 focuses the electron beam to form an electron probe and deflects the electron beam. This allows the electron probe to scan the sample S. In the transmission electron microscope 2, a STEM image can be obtained by scanning the sample S with the electron probe while detecting electrons transmitted through the sample S with the detector 260. Furthermore, in the transmission electron microscope 2, a TEM image can be obtained by irradiating the sample S with an electron beam parallel to the irradiation optical system 220, forming a TEM image of the electrons transmitted through the sample S with the imaging optical system 240, and capturing the TEM image with the imaging device 250.

[0045] The configuration of the main body 200 is not particularly limited, and the main body 200 may include, for example, various detectors, various spectrometers, various manipulators, etc. For example, the main body 200 may include an X-ray detector that detects characteristic X-rays generated from the sample S when the sample S is irradiated with an electron beam.

[0046] The main body 200 includes a sample chamber 202 in which a sample S is placed. The sample S placed in the sample chamber 202 is supported by a sample holder 300. The sample holder 300 is inserted into an insertion port of the holder support 230. The sample holder 300 can be inserted and removed from the insertion port of the holder support 230. Therefore, the sample holder 300 can be attached to and detached from the holder support 230.

[0047] The control unit 400 controls each part of the transmission electron microscope 2. The control unit 400 includes, for example, a processor such as a CPU (Central Processing Unit), and a storage device (memory) such as a RAM (Random Access Memory) and a ROM (Read Only Memory). The storage device stores programs and data for performing various controls. The functions of the control unit 400 can be realized by executing the program by the processor. In addition, the control unit 400 can also be realized by a general-purpose circuit such as a microcontroller or microprocessor that operates according to the program, or by a dedicated circuit such as an ASIC (application specific integrated circuit).

[0048] The vacuum exhaust system 500 performs vacuum exhaust on the space within the lens barrel 204 that includes the sample chamber 202, the space where the imaging device 250 and the detector 260 are located, and the like. Furthermore, the vacuum exhaust system 500 is also used for preliminary exhaust before the sample holder 300 is introduced into the sample chamber 202. The vacuum exhaust system 500 is controlled by the control unit 400. Alternatively, the computer functioning as the control unit 400 and the vacuum exhaust system 500 may be located outside the housing 100.

[0049] 1.2. Housing

[0050] Figure 2 1 is a perspective view schematically showing the housing 100. Figure 2 As shown, the housing 100 has a rectangular parallelepiped shape. The housing 100 includes a plurality of metal plates. A metal plate is a metal plate. The housing 100 covers the main body 200 with the plurality of metal plates. Therefore, the main body 200 cannot be visually identified from outside the housing 100. Alternatively, the housing 100 may include a plurality of resin plates, with the main body 200 being covered with the plurality of resin plates.

[0051] Figure 3 FIG2 is a front view schematically showing the transmission electron microscope 2 .

[0052] like Figure 2 and Figure 3As shown, a recess 110 is formed in the housing 100. The recess 110 is provided on a side surface 102 of the housing 100. The side surface 102 constitutes the front surface of the housing 100. An opening 120 is formed in the bottom 112 of the recess 110. The opening 120 is a hole for allowing the sample holder 300 to enter and exit the insertion port of the holder support 230.

[0053] The housing 100 includes an operation unit 130 for receiving user operations. The operation unit 130 is provided on the side surface 102 of the housing 100. That is, the operation unit 130 and the recess 110 are provided on the same side surface 102. When the operation unit 130 receives a user operation, the control unit 400 executes a process corresponding to the user operation.

[0054] Figure 4 2 is a cross-sectional view schematically showing a main part of the transmission electron microscope 2. Figure 4 yes Figure 3 Cross-sectional view along line IV-IV.

[0055] The recess 110 is, for example, truncated cone-shaped. The cross-sectional area of the recess 110 increases from the bottom 112 of the recess 110 toward the opening 114 of the recess 110. Therefore, the diameter of the opening 114 of the recess 110 is larger than the diameter of the bottom 112 of the recess 110. The bottom 112 of the recess 110 has an opening 120 formed therein.

[0056] The housing 100 includes a first metal plate 140 (an example of a first component), a second metal plate 142 (an example of a second component), and a third metal plate 144 (an example of a third component). The first metal plate 140 is a cylindrical component whose inner surface is a conical cone. The inner surface of the first metal plate 140 defines the side surface 113 of the recess 110. When viewed from the direction along the perpendicular line P perpendicular to the bottom 112 of the recess 110, that is, when viewed from above (hereinafter also referred to as "from above") from the side of the opening 114 of the recess 110, the first metal plate 140 overlaps with the second metal plate 142.

[0057] The second metal plate 142 defines the bottom 112 of the recess 110. The second metal plate 142 is a flat plate, and the surface of the second metal plate 142 defines the bottom 112 of the recess 110. An opening 120 is formed in the second metal plate 142. The opening 120 is a through-hole that passes through the second metal plate 142. The sample holder 300 can be inserted into and out of the insertion port 232 of the holder support 230 through the opening 120.

[0058] A gap 141 is provided between the first metal plate 140 and the second metal plate 142. That is, the first metal plate 140 and the second metal plate 142 are not in contact. The gap 141 surrounds the bottom 112 of the recess 110. In a plan view, the gap 141 is shaped like a circle surrounding the bottom 112 of the recess 110.

[0059] The third metal plate 144 forms the side surface 102 of the housing 100. The first metal plate 140 is connected to the third metal plate 144. The opening 114 of the recess 110 is formed in the third metal plate 144. The third metal plate 144 is a flat plate and has a through hole forming the opening 114.

[0060] The housing 100 includes a lighting device 150 that illuminates the bottom 112 of the recess 110. This allows the opening 120 formed in the bottom 112 of the recess 110 and the insertion port 232 of the holder support 230 to be illuminated.

[0061] Illuminating device 150 includes a plurality of light-emitting elements 152. These light-emitting elements 152 are disposed on second metal plate 142. These light-emitting elements 152 are disposed between first metal plate 140 and second metal plate 142. These light-emitting elements 152 are disposed deep within gap 141. When viewed from above, these light-emitting elements 152 are located behind first metal plate 140 and cannot be visually recognized from the outside. In other words, first metal plate 140 functions as a shielding member, shielding light-emitting elements 152 from external viewing.

[0062] Although not shown, the plurality of light emitting elements 152 may be disposed between the second metal plate 142 and the third metal plate 144 , and the third metal plate 144 may function as a shielding member that shields the plurality of light emitting elements 152 .

[0063] Light emitted by each of the plurality of light-emitting elements 152 passes through the gaps 141 and illuminates the bottom 112 of the recess 110. Consequently, the bottom 112 of the recess 110 is illuminated by the light leaking from the gaps 141. Thus, the lighting device 150 uses the plurality of light-emitting elements 152, which are positioned in a manner not visible to the user, to illuminate the bottom 112 of the recess 110 using the light leaking from the gaps 141. In other words, the lighting device 150 indirectly illuminates the bottom 112 of the recess 110.

[0064] The light-emitting element 152 is, for example, a light-emitting diode (LED). Furthermore, the light-emitting element 152 is not particularly limited as long as it is an element capable of emitting light, and may also be a laser diode (LD). The lighting device 150 is capable of varying the color and intensity of the light. The lighting device 150 is controlled by the control unit 400.

[0065] Figure 51 is a schematic top view of the lighting device 150. Figure 5 , the bottom 112 of the recess 110 is shown by a dotted line.

[0066] The plurality of light emitting elements 152 are arranged around the bottom 112 of the recess 110. The plurality of light emitting elements 152 are arranged at equal intervals, for example. Figure 5 In the illustrated example, the plurality of light emitting elements 152 are arranged in a hexagonal shape surrounding the bottom 112 of the recess 110. In the lighting device 150, the bottom 112 of the recess 110 is isotropically illuminated by the plurality of light emitting elements 152 arranged around the bottom 112 of the recess 110.

[0067] Although not shown, the plurality of light emitting elements 152 may be arranged in a polygonal or circular shape surrounding the bottom 112 of the recess 110. Furthermore, the plurality of light emitting elements 152 may be arranged in a circular shape, for example, centered at the center of the bottom 112 of the recess 110 and having a radius larger than the radius of the bottom 112 of the recess 110.

[0068] exist Figure 5 In the illustrated example, the lighting device 150 includes a first light emitting element 152 a , a second light emitting element 152 b , a third light emitting element 152 c , a fourth light emitting element 152 d , a fifth light emitting element 152 e , and a sixth light emitting element 152 f as the plurality of light emitting elements 152 .

[0069] The first light-emitting element 152a and the second light-emitting element 152b are positioned opposite each other, with the bottom 112 of the recess 110 positioned between them. When viewed from above, the first light-emitting element 152a and the second light-emitting element 152b are positioned on an imaginary straight line passing through the center of the bottom 112 of the recess 110. In other words, the first light-emitting element 152a and the second light-emitting element 152b are positioned symmetrically with the bottom 112 of the recess 110 interposed therebetween.

[0070] The third and fourth light-emitting elements 152c and 152d are arranged similarly to the first and second light-emitting elements 152a and 152b. Specifically, the third and fourth light-emitting elements 152c and 152d face each other, with the bottom 112 of the recess 110 positioned between them. The fifth and sixth light-emitting elements 152e and 152f are also arranged similarly to the first and second light-emitting elements 152a and 152b.

[0071] The pair of the first light emitting element 152a and the second light emitting element 152b, the pair of the third light emitting element 152c and the fourth light emitting element 152d, and the pair of the fifth light emitting element 152e and the sixth light emitting element 152f are arranged at intervals of 60°.

[0072] exist Figure 5 In the example shown, the first light-emitting element 152a has an elongated shape, but its shape is not particularly limited. The second light-emitting element 152b, the third light-emitting element 152c, the fourth light-emitting element 152d, the fifth light-emitting element 152e, and the sixth light-emitting element 152f are also similar to the first light-emitting element 152a, and their shapes are not particularly limited.

[0073] The first light-emitting element 152a has multiple light-emitting portions that can emit light of different colors (wavelengths). Therefore, the first light-emitting element 152a can emit light of various colors. The second light-emitting element 152b, the third light-emitting element 152c, the fourth light-emitting element 152d, the fifth light-emitting element 152e, and the sixth light-emitting element 152f can also emit light of various colors, similar to the first light-emitting element 152a.

[0074] Figure 6 and Figure 7 is a diagram for explaining the operation of the lighting device 150. Figure 6 In FIG. 1 , the bottom 112 of the recess 110 is illuminated by the lighting device 150. Figure 7 , a state in which the bottom 112 of the recess 110 is not illuminated by the lighting device 150 is shown.

[0075] like Figure 6 As shown, the lighting device 150 illuminates the bottom 112 of the recess 110 with light leaking from the gap 141 , so the light appears ring-shaped. The bottom 112 of the recess 110 is illuminated by the ring-shaped light.

[0076] like Figure 4 As shown, light emitted by light-emitting element 152 passes through gap 141 and illuminates bottom 112 and side 113 of recess 110. Side 113 of recess 110 is a truncated cone whose cross-sectional area increases from bottom 112 toward opening 114 of recess 110. Therefore, the intensity of light illuminating side 113 of recess 110 gradually decreases as it moves from bottom 112 toward opening 114 of recess 110. This creates a gradual brightness gradient within the outline of the ring-shaped light.

[0077] Furthermore, since the recess 110 is in the shape of a truncated cone, the light leaking from the gap 141 is in a ring shape, making it possible to isotropically illuminate the bottom 112 of the recess 110. For example, if the recess 110 is in the shape of a truncated pyramid, the recess 110 would have corners, resulting in areas that are not illuminated and are shaded, making it difficult to isotropically illuminate the bottom of the recess 110.

[0078] Figure 81 is a plan view schematically showing the operation unit 130 .

[0079] The operation unit 130 includes a display unit 132 for displaying the state of the main body 200 and a touch panel 134 for receiving user operations. The display unit 132 and the touch panel 134 are provided on the side surface 102 of the housing 100 .

[0080] The display unit 132 includes a display 132a, a display 132b, and a display 132c. Display 132a displays an icon indicating that an electron beam is being generated. Display 132b displays an icon indicating that the lens barrel 204 is in a baking state. Display 132c displays an icon indicating that the liquid nitrogen tank is in a baking state. The liquid nitrogen tank is a tank that stores liquid nitrogen used for cooling the cold trap that maintains a high vacuum inside the lens barrel 204. During normal use, an icon indicating the status of the main body 200 is displayed on the display unit 132 according to the status of the main body 200.

[0081] The display unit 132 is controlled by the control unit 400 . The control unit 400 controls the display 132 a , the display 132 b , and the display 132 c based on the state of the main body 200 .

[0082] The touch panel 134 includes an IN button 136a and an OUT button 136b. The IN button 136a is a button for starting preliminary exhaust, and the OUT button 136b is a button for opening the preliminary exhaust chamber to the atmosphere (venting).

[0083] The touch panel 134 further includes six buttons (button 138a, button 138b, button 138c, button 138d, button 138e, and button 138f) for maintenance of the device.

[0084] Button 138a is a button that opens the interior of the lens barrel 204 to the atmosphere. When button 138a is pressed, the control unit 400 opens the valve between the interior and exterior of the lens barrel 204. This opens the interior of the lens barrel 204 to the atmosphere. Button 138b is a button that evacuates the interior of the lens barrel 204. By pressing button 138b, the control unit 400 controls the vacuum exhaust system 500 to evacuate the interior of the lens barrel 204. Button 138d is a button that turns on the main power supply of the main body 200. Button 138e is a button that turns off the main power supply of the main body 200. Button 138f is a button that resets the computer functioning as the control unit 400. Button 138c is a button that activates buttons 138a, 138b, 138d, 138e, and 138f.

[0085] Figure 9 2 is a cross-sectional view schematically showing the operation portion 130 . Figure 9 yes Figure 8 IX-IX line cross-sectional view.

[0086] like Figure 9 As shown, the display 132a includes a transparent plate 30, an electrostatic panel 32, an optical waveguide portion 34, a light-emitting element 36, and a control substrate 38. The transparent plate 30 is, for example, an acrylic plate and is printed with an icon indicating that an electron beam is being generated. The electrostatic panel 32 is arranged on the back side of the transparent plate 30. The electrostatic panel 32 is, for example, transparent. The light-emitting element 36 is arranged on the back side of the electrostatic panel 32. The light emitted by the light-emitting element 36 is conducted within the optical waveguide portion 34 to illuminate the transparent plate 30. By lighting the light-emitting element 36, the icon printed on the transparent plate 30 is illuminated, and the icon can be visually recognized. On the other hand, when the light-emitting element 36 is off, the icon cannot be visually recognized. The light-emitting element 36 is mounted on the control substrate 38. The light-emitting element 36 is controlled by the control portion 400.

[0087] The display 132b and the display 132c are also configured similarly to the display 132a.

[0088] IN button 136a includes a transparent plate 30, an electrostatic touch sensor 31 integrated with an electrostatic panel 32, an optical waveguide 34, a light-emitting element 36, and a control substrate 38. Transparent plate 30, electrostatic panel 32, light-emitting element 36, and control substrate 38 are common to display 132a. The button names are printed on transparent plate 30. Lighting up light-emitting element 36 allows the button names printed on transparent plate 30 to be visually recognized. Touch sensor 31 receives a touch operation, switching IN button 136a on and off.

[0089] The other buttons of the touch panel 134 , namely, the OUT button 136 b , the button 138 a , the button 138 b , the button 138 c , the button 138 d , the button 138 e , and the button 138 f , also have the same configuration as that of the IN button 136 a .

[0090] Furthermore, in the above description, the case where each button of touch panel 134 is an electrostatic button has been described, but each button of touch panel 134 may also be a pressure-sensitive button.

[0091] Figure 10 is a top view schematically showing the operation unit 130 in the normal mode, Figure 11 1 is a plan view schematically showing the operation unit 130 in the maintenance mode.

[0092] exist Figure 10In the normal mode shown, IN button 136a and OUT button 136b are visually recognizable, and button operations are valid. In contrast, buttons on touch panel 134 other than IN button 136a and OUT button 136b are not visually recognizable, and button operations are invalid. This prevents accidental operation of buttons used for maintenance during normal operation.

[0093] exist Figure 10 In the illustrated example, the display 132 a , the display 132 b , and the display 132 c are off, but the display 132 a , the display 132 b , and the display 132 c are lit depending on the state of the main body 200 .

[0094] In from Figure 10 The normal mode shown is switched to Figure 11 In the maintenance mode shown in FIG. 1 , first, touch any one of the off buttons on the touch panel 134, or touch multiple off buttons simultaneously. This causes the light emitting element 36 of the button 138c to light up, and the operation of the button 138c becomes effective. Next, perform a touch operation by touching the button 138c for a predetermined time. Figure 11 As shown, the button 138a, the button 138b, the button 138d, the button 138e, and the button 138f become visually recognizable, and the operation of these buttons becomes valid.

[0095] In addition, the method of activating button 138c is not limited to this. For example, the touch panel 134 may have a sensor that detects the user's approach. When the sensor detects the user, the light-emitting element 36 of button 138c lights up, and the operation of button 138c becomes effective.

[0096] 1.3. Specimen Holder and Holder Support

[0097] Figure 12 is a diagram schematically showing the sample holder 300. In addition, Figure 12 The sample holder 300 shown is shown Figure 4 The specimen holder 300 is shown in a state rotated 90°.

[0098] like Figure 4 and Figure 12 As shown, the sample holder 300 includes a sample holding portion 310 , a shaft 320 , a handle 330 , a guide pin 340 , and a shielding plate 350 .

[0099] The sample holder 310 holds the sample S. The sample holder 310 is provided at the front end of the shaft 320. The sample holder 310 includes, for example, a leaf spring and a sample table, and can secure the sample grid, to which the sample S is fixed, to the sample table via the leaf spring. The method for holding the sample S in the sample holder 310 is not particularly limited.

[0100] An O-ring 322 for airtightly sealing the sample holder 300 and the inner surface of the insertion port 232 is attached to the shaft 320. A handle 330 is provided at the rear end of the shaft 320. The handle 330 is a portion for gripping the sample holder 300.

[0101] The guide pin 340 guides the sample holder 300 when the sample S held in the sample holder 300 is introduced into the sample chamber 202. The shielding plate 350 is attached to the handle 330. The shielding plate 350 is used to detect the inserted state of the sample holder 300.

[0102] Figure 13 2 is a plan view schematically showing the holder support portion 230 . Figure 14 It is a diagram for explaining the insertion port 232 of the holder support portion 230 .

[0103] The insertion port 232 connects the outside of the main body 200 to the sample chamber 202. A guide groove 234 is formed on the inner wall of the insertion port 232. By moving the guide pin 340 of the sample holder 300 along the guide groove 234, the sample S held by the sample holder 310 can be introduced into the sample chamber 202.

[0104] like Figure 14 As shown, guide groove 234 includes a first portion 234a, a second portion 234b, and a third portion 234c. First portion 234a is disposed along the central axis of insertion port 232. Second portion 234b connects first portion 234a and third portion 234c. Second portion 234b is disposed at a 90° angle around the central axis of insertion port 232. Third portion 234c is disposed along the central axis of insertion port 232.

[0105] The holder support 230 includes a gate valve 236 and a switch 238 for opening and closing the gate valve 236. The gate valve 236 is provided in the insertion port 232. The gate valve 236 isolates the specimen chamber 202 from the exterior (atmosphere) of the main body 200. The switch 238 is provided in the second portion 234b of the guide groove 234. Passing the guide pin 340 of the specimen holder 300 through the second portion 234b of the guide groove 234 switches the switch 238 between on and off.

[0106] like Figure 13As shown, the holder support portion 230 includes a sensor 239 for detecting that the sample S has been introduced into the sample chamber 202 .

[0107] A housing 235 for receiving a shielding plate 350 is provided near the entrance of the insertion port 232. The housing 235 is a hole for receiving the shielding plate 350. When the sample S held in the sample holder 300 is placed in the sample chamber 202, the shielding plate 350 is inserted into the housing 235. The sensor 239 detects that the sample S has been introduced into the sample chamber 202 by inserting the shielding plate 350 into the housing 235.

[0108] The sensor 239 includes a light-emitting element 239a, such as a light-emitting diode or laser, and a photodetector 239b for detecting the light emitted by the light-emitting element 239a. When the sample S is placed in the sample chamber 202, the shielding plate 350 is inserted into the receiving portion 235. This positions the shielding plate 350 between the light-emitting element 239a and the photodetector 239b. As a result, the light emitted by the light-emitting element 239a is blocked by the shielding plate 350, reducing the intensity of the light detected by the photodetector 239b. This change in the intensity of the light detected by the photodetector 239b can be used to detect whether the sample S has been introduced into the sample chamber 202.

[0109] 2. Processing of the control unit

[0110] 2.1. Processing of displaying device status

[0111] The control unit 400 controls the lighting device 150 based on the status of the main unit 200. The control unit 400 controls at least one of the color and intensity of the light based on the status of the main unit 200. This allows the user to easily understand the status of the main unit 200. This reduces the possibility of the user damaging the main unit 200 by operating the main unit 200 despite an abnormality.

[0112] For example, the control unit 400 turns off the illumination device 150 when the main unit 200 is off, that is, when the vacuum exhaust system 500 is not operating and the electron beam is not being released. When the vacuum exhaust system 500 starts operating, the control unit 400 flashes the light emitted by the illumination device 150, and when a predetermined vacuum level is reached within the lens barrel 204, the illumination device 150 is illuminated in white. Therefore, in the transmission electron microscope 2, it is easy to determine whether the main unit 200 is ready for use.

[0113] The control unit 400 illuminates the lighting device 150 in yellow when the lens barrel 204 is being opened to the atmosphere (ventilated). Therefore, in the transmission electron microscope 2, it is easy to determine whether the lens barrel 204 is being opened to the atmosphere. The control unit 400 illuminates the lighting device 150 in orange when the lens barrel 204 of the main body 200 is in a baked state. Therefore, in the transmission electron microscope 2, it is easy to determine whether the lens barrel 204 is in a baked state.

[0114] The control unit 400 lights the lighting device 150 in red when an error occurs in the computer functioning as the control unit 400. Therefore, in the transmission electron microscope 2, the user can be informed that the main body 200 cannot be correctly controlled.

[0115] The above-described process in which the control unit 400 controls the lighting device 150 based on the state of the main body 200 is an example and is not limited thereto. The control unit 400 controls at least one of the color and intensity of light based on the state of the main body 200 .

[0116] 2.2. Processing of Displaying the Insertion Status of the Specimen Holder

[0117] The control unit 400 controls the lighting device 150 based on the inserted state of the sample holder 300. Here, in order to introduce the sample S into the sample chamber 202, preliminary exhaust must be performed and the sample holder 300 must be inserted into the insertion port 232 of the holder support 230 in stages.

[0118] In the transmission electron microscope 2, the insertion state of the sample holder 300 is detected using a switch 238, a sensor 239, a vacuum gauge for detecting the vacuum level of the preliminary exhaust chamber, and the like. The control unit 400 controls the lighting device 150 based on the detection results. The control unit 400 controls at least one of the color and intensity of the light based on the insertion state of the sample holder 300. Thus, the user can recognize the insertion state of the sample holder 300 from changes in the color and intensity of the light emitted by the lighting device 150. The following describes the process of introducing the sample S into the sample chamber 202 while also explaining the processing performed by the control unit 400.

[0119] Figure 15 1 is a flowchart showing an example of a process of introducing the sample S into the sample chamber 202 .

[0120] When introducing the sample S into the sample chamber 202, the user first confirms whether the main body 200 is in a state ready for introduction of the sample S (S10). If the main body 200 is in a state ready for introduction of the sample S, the lighting device 150 illuminates in white. Therefore, the user can easily know that the main body 200 is in a state ready for introduction of the sample S.

[0121] Next, the user moves the front end of the sample holder 300 through the opening 120 formed in the bottom 112 of the recess 110 to the insertion port 232 of the holder support 230, and aligns the guide pin 340 with the guide groove 234 (S20). At this time, since the bottom 112 of the recess 110 is illuminated by the lighting device 150, the user can easily align the guide pin 340 with the guide groove 234.

[0122] Next, with the guide pin 340 aligned with the guide groove 234, the sample holder 300 is pressed into the insertion port 232, causing the sample holder 310 to move into the preliminary exhaust chamber (S30). As the sample holder 300 is pressed into the insertion port 232, the guide pin 340 is guided by the first portion 234a of the guide groove 234, allowing the sample holder 300 to move within the insertion port 232. When the guide pin 340 reaches the second portion 234b, the sample holder 300 stops. This positions the sample holder 310 in the preliminary exhaust chamber, which is the space between the gate valve 236 and the O-ring 322 of the sample holder 300.

[0123] Next, preliminary exhaust is performed on the preliminary exhaust chamber (S40). The preliminary exhaust is initiated by the user pressing the IN button 136a. During the preliminary exhaust, the preliminary exhaust chamber is vacuum-exhausted by the vacuum exhaust system 500. Based on the operation information from the IN button 136a, the control unit 400 activates the vacuum exhaust system 500. Thus, preliminary exhaust begins.

[0124] When preliminary evacuation begins, the control unit 400 flashes the lighting device 150 in blue. If the IN button 136a is pressed, the control unit 400 determines that preliminary evacuation has begun and flashes the lighting device 150 in blue. If the preliminary evacuation chamber falls below a predetermined pressure, the control unit 400 illuminates the lighting device 150 in blue. For example, the control unit 400 determines that the preliminary evacuation chamber has fallen below a predetermined pressure based on the measurement results of a pressure gauge (vacuum gauge) that measures the pressure (vacuum level) in the preliminary evacuation chamber.

[0125] In this way, when the preliminary exhaust is completed, the lighting device 150 switches from a blue flashing state to a blue lighting state, so that the user can easily know that the preliminary exhaust is completed.

[0126] Next, gate valve 236 is opened (S50). The user rotates sample holder 300 90° about shaft 320. As a result, guide pin 340 is guided by second portion 234b of guide groove 234 and reaches third portion 234c. At this point, guide pin 340 strikes switch 238, turning it on. With switch 238 turned on, control unit 400 opens gate valve 236.

[0127] Next, the sample holder 300 is pushed in, moving the sample holding portion 310 into the sample chamber 202 (S60). The user pushes the sample holder 300 in while the guide pin 340 reaches the third portion 234c. The guide pin 340 is then guided by the third portion 234c, allowing the sample holder 300 to move within the insertion port 232. As a result, the sample holding portion 310 is moved into the sample chamber 202. Through the above steps, the sample S held in the sample holding portion 310 can be introduced into the sample chamber 202.

[0128] When the sample S is placed in the sample chamber 202, the shielding plate 350 of the sample holder 300 is positioned between the light-emitting element 239a and the light detector 239b. Thus, the sensor 239 detects that the sample S has been introduced into the sample chamber 202. When the sensor 239 detects that the sample S has been introduced into the sample chamber 202, the control unit 400 causes the lighting device 150 to flash blue several times and then illuminate in blue. By illuminating the lighting device 150 in blue, the user can ascertain that the sample S has been placed in the sample chamber 202.

[0129] In the above description, the control unit 400 causes the illumination device 150 to flash or light up based on the insertion state of the specimen holder 300. However, the control unit 400 may also change at least one of the color and intensity of the light emitted by the illumination device 150 based on the insertion state of the specimen holder 300. Here, changing the intensity of the light emitted by the illumination device 150 includes changing the brightness of the light, switching between flashing, lighting, and extinguishing, changing the flashing cycle, changing the number of flashes, and changing the flashing pattern.

[0130] In the above description, the insertion state of the sample holder 300 is detected by the switch 238, the sensor 239, and the pressure gauge (vacuum gauge) for measuring the pressure of the preliminary exhaust chamber. However, the means for detecting the insertion state of the sample holder 300 is not limited to these.

[0131] 2.3. Energy saving mode

[0132] If no operation is performed on touch panel 134 within a predetermined period of time, control unit 400 reduces the intensity of the light emitted by lighting device 150. For example, control unit 400 reduces the intensity of the light emitted by lighting device 150 to 50%. If a touch operation is performed on touch panel 134 while the light intensity is reduced, control unit 400 returns the intensity of the light emitted by lighting device 150 to its original intensity.

[0133] 3. Effect

[0134] The transmission electron microscope 2 includes a specimen holder 300; a main body 200 having a specimen holder support 230 with an insertion port 232 for inserting and removing the specimen holder 300; and a housing 100 that houses the main body 200. The housing 100 includes a recess 110, and an opening 120 is formed at the bottom 112 of the recess 110, allowing the specimen holder 300 to enter and exit the insertion port 232. Furthermore, the housing 100 includes an illumination device 150 for illuminating the bottom 112 of the recess 110. Therefore, in the transmission electron microscope 2, since the bottom 112 of the recess 110 can be illuminated, visibility is improved when the specimen holder 300 is inserted into the insertion port 232 via the opening 120. Consequently, the transmission electron microscope 2 can easily introduce the specimen S into the specimen chamber 202.

[0135] Here, if Figure 1 As shown, in the main body 200, the lens barrel 204 including the sample chamber 202 is narrower than the vibration isolation table 270 and the like. Therefore, in the transmission electron microscope 2, by providing the recess 110 in the rectangular parallelepiped housing 100, the sample holder 300 can be inserted into the insertion port 232. However, the lighting in the room where the transmission electron microscope 2 is installed sometimes fails to illuminate the bottom 112 of the recess 110. In the transmission electron microscope 2, since the housing 100 includes the lighting device 150, the bottom 112 of the recess 110 can be illuminated, thereby improving visibility.

[0136] In the transmission electron microscope 2, the recess 110 is shaped like a truncated cone, with the cross-sectional area increasing from the bottom 112 of the recess 110 toward the opening 114 of the recess 110. Therefore, in the transmission electron microscope 2, the bottom 112 of the recess 110 is easily visible from any direction. Therefore, for example, in the transmission electron microscope 2, the insertion port 232 is easily visible regardless of the user's height, handedness, or posture. For example, even when the user inserts the specimen holder 300 while seated or standing, the insertion port 232 is easily visible without being shadowed by the housing 100.

[0137] In the transmission electron microscope 2, the housing 100 includes a first metal plate 140 defining the side surfaces 113 of the recess 110, and a second metal plate 142 defining the bottom 112 of the recess 110 and having an opening 120. Furthermore, a gap 141 is provided between the first and second metal plates 140, 142, and the bottom 112 of the recess 110 is illuminated by light leaking from the gap 141. Therefore, the transmission electron microscope 2 can indirectly illuminate the bottom 112 of the recess 110. For example, if light emitted by the multiple light-emitting elements 152 is directly irradiated onto the bottom 112 of the recess 110, depending on the user's posture or standing position, the light may directly enter the user's eyes and cause glare. In the transmission electron microscope 2, since the bottom 112 of the recess 110 is illuminated by light leaking from the gap 141, direct light entry into the user's eyes is prevented.

[0138] In the transmission electron microscope 2, the illumination device 150 includes a plurality of light emitting elements 152. Light emitted by the plurality of light emitting elements 152 passes through the gap 141 and illuminates the bottom 112 of the recess 110. Therefore, in the transmission electron microscope 2, the bottom 112 of the recess 110 can be indirectly illuminated.

[0139] In the transmission electron microscope 2 , the plurality of light emitting elements 152 are arranged around the bottom 112 of the recess 110 . Therefore, in the transmission electron microscope 2 , the bottom 112 of the recess 110 can be isotropically illuminated.

[0140] The transmission electron microscope 2 includes the first light-emitting element 152a and the second light-emitting element 152b, and the bottom 112 of the recess 110 is located between the first light-emitting element 152a and the second light-emitting element 152b. Therefore, the transmission electron microscope 2 can illuminate the bottom 112 of the recess 110 isotropically, compared to a case where the bottom 112 of the recess 110 is illuminated by a single light-emitting element.

[0141] In the transmission electron microscope 2, the housing 100 includes the first metal plate 140 as a shielding member for shielding the plurality of light emitting elements 152. Therefore, in the transmission electron microscope 2, light can be prevented from directly entering the user's eyes, and the bottom 112 of the recess 110 can be easily visible.

[0142] The transmission electron microscope 2 includes a control unit 400 that controls the illumination device 150 based on the insertion state of the sample holder 300. Therefore, when the sample S is introduced into the sample chamber 202, the user can determine the insertion state of the sample holder 300 without having to look away from the sample holder 300. Therefore, the transmission electron microscope 2 can prevent the sample holder 300 from coming into contact with the housing 100 or the like due to the user looking away from the sample holder 300, thereby preventing damage to the sample or the sample holder 300.

[0143] In the transmission electron microscope 2, at least one of the color and intensity of the light emitted by the illumination device 150 is controlled based on the insertion state of the sample holder 300. Therefore, in the transmission electron microscope 2, when the sample S is introduced into the sample chamber 202, the insertion state of the sample holder 300 can be ascertained without taking one's eyes off the sample holder 300.

[0144] In the transmission electron microscope 2, upon completion of preliminary evacuation for introducing the sample S into the sample chamber 202, at least one of the color and intensity of the light emitted by the illumination device 150 is changed. Therefore, in the transmission electron microscope 2, when the sample S is introduced into the sample chamber 202, the user can recognize the completion of preliminary evacuation without taking their eyes off the sample holder 300.

[0145] The transmission electron microscope 2 includes a control unit 400 that controls the illumination device 150 based on the state of the main body 200. Therefore, the transmission electron microscope 2 can easily grasp the state of the main body 200. Furthermore, when the sample S is introduced into the sample chamber 202, the transmission electron microscope 2 can grasp the state of the main body 200 without shifting the line of sight from the sample holder 300.

[0146] In the transmission electron microscope 2, the housing 100 includes a touch panel 134 for receiving user operations. Furthermore, the touch panel 134 is located on the side surface 102 of the housing 100 where the recess 110 is formed. Therefore, in the transmission electron microscope 2, since the recess 110 and the touch panel 134 are located on the same side surface of the housing 100, operation of the touch panel 134 is easy when introducing the sample S into the sample chamber 202.

[0147] 4. Modifications

[0148] 4.1. First Modification

[0149] In the above-described embodiment, the control unit 400 controls the illumination device 150, the main body 200, and the vacuum exhaust system 500. However, the control unit that controls the main body 200 and the vacuum exhaust system 500 may be different from the control unit that controls the illumination device 150. In other words, the transmission electron microscope 2 may include a computer that functions as a control unit for controlling the main body 200 and the vacuum exhaust system 500, and a computer that functions as a control unit for controlling the illumination device 150. In this case, information on the insertion state of the specimen holder 300 and the state of the main body 200 may be transmitted from the control unit that controls the main body 200 to the control unit that controls the illumination device 150.

[0150] 4.2. Second Modification

[0151] Figure 16 2 is a perspective view schematically showing a modified example of the transmission electron microscope 2. Figure 16 As shown, the transmission electron microscope 2 may also include a liquid receiving member 160 .

[0152] The liquid receiving member 160 is detachably mounted to the housing 100, for example, by magnetic force. If the sample holder 300 is a cryo-electron microscope sample holder equipped with a tank containing a coolant such as liquid nitrogen or liquid helium, there is a risk that the coolant may spill from the sample holder 300 and splash onto the user when the sample S is introduced into the sample chamber 202. The transmission electron microscope 2 can receive the coolant spilled from the sample holder 300 using the liquid receiving member 160, thereby preventing the user from being splashed. Furthermore, the coolant spilled from the tank of the sample holder 300 can be recovered.

[0153] 4.3. Third Modification

[0154] In the above embodiment, if Figure 5 As shown, the lighting device 150 uses a plurality of light-emitting elements 152 surrounding the bottom 112 of the recess 110 to illuminate the bottom 112 of the recess 110, but the configuration of the lighting device 150 is not limited thereto. For example, the lighting device 150 may also illuminate the bottom 112 of the recess 110 by combining a single light-emitting element with a plurality of mirrors that reflect the light emitted by the single light-emitting element. Alternatively, the lighting device 150 may also illuminate the bottom 112 of the recess 110 by combining a plurality of light-emitting elements with a plurality of mirrors. Alternatively, the lighting device 150 may include a light-emitting element and an optical waveguide such as an optical fiber, and may use the optical waveguide to transmit light emitted by a light-emitting element located away from the bottom 112 of the recess 110 to illuminate the bottom 112 of the recess 110.

[0155] 4.4. Fourth Modification

[0156] While the above-described embodiment describes the charged particle beam apparatus of the present invention as a transmission electron microscope, the charged particle beam apparatus of the present invention can also be applied to other charged particle beam apparatuses having an optical system for irradiating a sample with a charged particle beam, such as an electron beam or an ion beam. For example, the charged particle beam apparatus of the present invention can also be a scanning electron microscope, an Auger electron spectrometer, or an electron probe microanalyzer. Furthermore, the charged particle beam apparatus of the present invention can also be a focused ion beam apparatus that irradiates a sample with an ion beam.

[0157] The above-mentioned embodiments and modifications are merely examples and are not limiting. For example, the embodiments and modifications can be combined as appropriate.

[0158] The present invention is not limited to the above-mentioned embodiments, and various modifications can be made. For example, the present invention includes a configuration that is substantially the same as the configuration described in the embodiment. The so-called substantially the same configuration refers to, for example, a configuration with the same function, method and result, or a configuration with the same purpose and effect. In addition, the present invention includes a configuration in which non-essential parts of the configuration described in the embodiment are replaced. In addition, the present invention includes a configuration that has the same effect as the configuration described in the embodiment, or a configuration that can achieve the same purpose. In addition, the present invention includes a configuration in which a known technology is added to the configuration described in the embodiment.

Claims

1. A charged particle beam device, characterized in that Include: a specimen holder that holds the specimen; a main body including an optical system for irradiating the sample with a charged particle beam and a holder support portion including an insertion port for inserting and removing the sample holder; as well as a housing for housing the main body; A recess is formed in the housing, and an opening for the sample holder to enter and exit the insertion port is formed at the bottom of the recess. The housing includes a lighting device for illuminating the bottom of the recess.

2. The charged particle beam device according to claim 1, wherein The shape of the recessed portion is a truncated cone whose cross-sectional area increases from the bottom of the recessed portion toward the opening of the recessed portion.

3. The charged particle beam device according to claim 1 or 2, wherein: The housing comprises: a first member defining a side surface of the recess; and a second member defining the bottom of the recess and having the opening; A gap is provided between the first member and the second member, The bottom of the recess is illuminated by light leaking from the gap.

4. The charged particle beam device according to claim 3, wherein The lighting device comprises a plurality of light-emitting elements. Light emitted by the plurality of light emitting elements passes through the gap and is irradiated onto the bottom of the recess.

5. The charged particle beam device according to claim 1 or 2, wherein: The lighting device comprises a plurality of light-emitting elements. The plurality of light emitting elements are arranged around the bottom of the recess.

6. The charged particle beam device according to claim 1 or 2, wherein: The lighting device includes a first light-emitting element and a second light-emitting element, The bottom of the recess is located between the first light emitting element and the second light emitting element.

7. The charged particle beam device according to claim 1 or 2, wherein: The lighting device comprises a plurality of light-emitting elements. The housing includes a shielding member that shields the plurality of light emitting elements.

8. The charged particle beam device according to claim 1 or 2, wherein: A control unit is included that controls the lighting device based on the insertion state of the specimen holder.

9. The charged particle beam device according to claim 8, wherein The control unit controls at least one of the color and intensity of light emitted by the lighting device based on the inserted state of the specimen holder.

10. The charged particle beam device according to claim 9, wherein When preliminary exhaust for introducing the sample into the sample chamber is completed, the control unit changes at least one of the color and intensity of light emitted by the lighting device.

11. The charged particle beam device according to claim 1 or 2, wherein: A control unit is included that controls the lighting device based on the state of the main body.

12. The charged particle beam device according to claim 1 or 2, wherein: The housing includes a touch panel for receiving user operations. The touch panel is provided on a side surface of the housing where the recess is formed.

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