Method for controlling size of overflow rubber ring in imprinting process

Abstract

The invention provides a method for controlling the size of an overflow rubber ring in an imprinting process, which comprises the following steps of: adjusting at least one of roller pressure, roller speed and glue thickness variation so as to adjust a coefficient for controlling the size of the overflow rubber ring in the imprinting process to belong to a reference interval, the glue volume variation before and after roller covering is larger than or equal to the glue extrusion flow, and the coefficient for controlling the size of the glue overflow ring in the imprinting process is determined based on the roller pressure, the roller speed and the glue thickness variation. In other words, the coefficient for controlling the size of the rubber overflow ring in the imprinting process is adjusted to be within the preset interval, the size of the rubber overflow ring is controlled within the reasonable range, the optical performance of the waveguide can not be affected, the range of glue overflowing from the edge of the imprinting structure area before and after roller covering is not too large, and even the glue cannot overflow from the edge of the imprinting structure area. And the condition that particles formed after curing pollute the sub-plate film and the working environment is avoided.

Description

Technical Field

[0001] The present invention relates to the field of micro-nano processing technology, and in particular to a method for controlling the size of an overflow rubber ring in an imprinting process. Background Art

[0002] In nanoimprint production, it is necessary to transfer the nanostructure of the master. First, a layer of optical template glue is spin-coated on the master with the nanostructure. Then, the PET film is evenly rolled and spread on the entire surface of the master using a roller. The surface glue is cured by UV curing and adhered to the PET film to form a daughter film for subsequent imprinting.

[0003] However, during the remolding process, in order to ensure that the glue is completely filled within the nanostructures, the rollers apply a certain amount of pressure, which inevitably squeezes out excess glue from the master surface. This creates a glue ring around the edges of the master's toothed structure. If the size of this ring is not within a reasonable range, it can affect the optical performance of the waveguide. For example, a large ring can affect efficiency and cause quality issues such as tailing. Therefore, controlling the size of this ring within a reasonable range during nanoimprint production is a pressing issue that needs to be addressed. Summary of the Invention

[0004] The present invention provides a method for controlling the size of an overflowing rubber ring in an imprint process, which can solve the problem of glue overflow in a nanoimprint production process.

[0005] According to one aspect of the present invention, a method for controlling the size of an overflow rubber ring in an imprinting process is provided, the method comprising: Adjust at least one of the roller pressure, roller speed and glue thickness change to adjust the coefficient of controlling the size of the overflow rubber ring in the imprinting process to be within a reference range, so that the volume change of the glue before and after the roller covers is greater than or equal to the glue extrusion flow rate. The coefficient of controlling the size of the overflow rubber ring in the imprinting process is determined based on the roller pressure, the roller speed and the glue thickness change.

[0006] Optionally, adjusting at least one of roller pressure, roller speed, and glue thickness variation to adjust a coefficient for controlling the size of the overflow glue ring in the imprinting process to fall within a reference range includes: Determining the reference interval based on multiple reference data sets using a data model, wherein the reference interval includes multiple one-to-one corresponding reference roller pressures, reference roller speeds, and reference glue thickness changes; Determining a coefficient for controlling the size of the overflow glue ring in the current imprinting process according to the roller pressure, roller speed, and glue thickness change; According to the reference range and the coefficient for controlling the size of the overflow rubber ring in the current imprinting process, at least one of the roller pressure, roller speed and glue thickness change is adjusted to adjust the coefficient for controlling the size of the overflow rubber ring in the imprinting process to be within the reference range.

[0007] Optionally, the reference interval includes a first threshold and a second threshold, the first threshold is smaller than the second threshold, and adjusting at least one of the roller pressure, the roller speed, and the glue thickness variation according to the reference interval and the coefficient for controlling the size of the overflowing rubber ring in the current imprinting process, so as to adjust the coefficient for controlling the size of the overflowing rubber ring in the imprinting process to fall within the reference interval, includes: When the coefficient for controlling the size of the overflow glue ring in the current imprint process does not fall within the reference range, obtaining multiple reference data groups corresponding to the first threshold, the second threshold, and an intermediate threshold between the first threshold and the second threshold, each reference data group including a reference roller pressure, a reference roller speed, and a reference glue thickness change; Adjust at least one of the roller pressure, roller speed and glue thickness change to obtain the same target roller pressure, target roller speed and target glue thickness change as at least one of the multiple reference data groups, so as to adjust the coefficient for controlling the size of the overflow rubber ring in the imprinting process to be within the reference range.

[0008] Optionally, the method for determining a coefficient for controlling the size of an overflowing glue ring in the imprinting process based on the roller pressure, the roller speed, and the change in glue thickness includes: Substituting the roller pressure, the roller speed, and the change in glue thickness into a coefficient calculation model for controlling the size of the overflowing rubber ring in the embossing process, to obtain the coefficient for controlling the size of the overflowing rubber ring in the embossing process; The coefficient calculation model for controlling the size of the overflow rubber ring in the embossing process is: ; in, Indicates the coefficient for controlling the size of the overflow rubber ring in the embossing process. Indicates roller pressure, v indicates roller speed, Indicates the change in glue thickness.

[0009] Optionally, the coefficient calculation model for controlling the size of the overflow rubber ring in the embossing process is determined based on the critical balance condition, wherein the critical balance condition is that the volume change of the glue before and after the roller covers is equal to the glue extrusion flow rate, and there is a standard coefficient under the critical balance condition. .

[0010] Optionally, the multiple reference data sets are reference data based on the imprinting process in which no glue overflow occurs during imprinting, each reference data set includes a reference roller pressure, a reference roller speed, and a reference glue thickness variation. The method for determining the reference interval based on the data model using the multiple reference data sets includes: Determining reference coefficients for controlling the size of the overflowed rubber rings in multiple imprinting processes based on the multiple sets of reference data and a coefficient calculation model for controlling the size of the overflowed rubber rings in the imprinting process; The reference interval is determined according to reference coefficients for controlling the size of the overflow rubber ring in the multiple imprinting processes.

[0011] Optionally, determining the reference interval according to reference coefficients for controlling the size of the overflow rubber ring in the multiple imprinting processes includes: The reference coefficients for controlling the size of the overflowed rubber rings in the multiple imprint processes are determined to be the minimum value within the target confidence interval as the first threshold value of the reference interval; the reference coefficients for controlling the size of the overflowed rubber rings in the multiple imprint processes are determined to be the maximum value within the target confidence interval as the second threshold value of the reference interval; or Obtain the difference between the mode of the reference coefficients for controlling the size of the overflow rubber ring in the multiple imprinting processes and the standard coefficient, use the difference between the standard coefficient and the difference value as the first threshold of the reference interval, and use the sum of the standard coefficient and the difference value as the second threshold of the reference interval.

[0012] Optionally, the data model training method includes: Obtaining an initial training data set, the initial training data set comprising a plurality of training data sets, the plurality of training data sets being training data based on the imprinting process in which no glue overflow occurs during imprinting, each training data set comprising a training roller pressure, a training roller speed, and a training glue thickness variation; Determining, using the initial training model according to the initial training data set and a coefficient calculation model for controlling the size of the overflowed rubber ring in the imprinting process, training coefficients for controlling the size of the overflowed rubber ring in multiple imprinting processes, and determining, using the initial training model according to the training coefficients for controlling the size of the overflowed rubber ring in the multiple imprinting processes, a training reference interval until a training stop condition is reached, thereby obtaining the data model; The training stopping condition is that the number of iterations of the initial training model reaches a preset number of iterations, and the preset number of iterations is equal to the number of the multiple training data groups.

[0013] Optionally, the reference interval includes a first threshold and a second threshold, the first threshold is smaller than the second threshold, the first threshold represents the lower limit value at which the glue fills the tooth-shaped structure of the motherboard without overflowing, and the second threshold represents the upper limit value at which the glue fills the tooth-shaped structure of the motherboard without overflowing.

[0014] Optionally, the method for determining the change in glue thickness includes: Obtaining the roller pressure, the roller speed, the initial glue thickness, structural information of the motherboard nanostructure, and glue property information; The glue thickness variation is determined based on the roller pressure, the roller speed, the initial glue thickness, the structural information, and the glue characteristic information.

[0015] The technical solution of the present invention has the following beneficial effects compared with the prior art: The present invention adjusts at least one of roller pressure, roller speed, and glue thickness variation to adjust a coefficient for controlling the size of the overflowing rubber ring during the imprinting process to fall within a reference range, such that the volume variation of the glue before and after roller coverage is greater than or equal to the glue extrusion rate. The coefficient for controlling the size of the overflowing rubber ring during the imprinting process is determined based on the roller pressure, roller speed, and glue thickness variation. Specifically, based on the relationship between the roller pressure, roller speed, and glue thickness variation and the coefficient for controlling the size of the overflowing rubber ring during the imprinting process, at least one of roller pressure, roller speed, and glue thickness variation is adjusted to adjust the coefficient for controlling the size of the overflowing rubber ring during the imprinting process to fall within a preset range, thereby controlling the size of the overflowing rubber ring within a reasonable range and ensuring that the volume variation of the glue before and after roller coverage is greater than or equal to the glue extrusion rate. Furthermore, when the volume variation of the glue before and after roller coverage is greater than or equal to the glue extrusion rate, the optical performance of the waveguide is not affected. For example, a large overflowing rubber ring can affect efficiency and cause quality issues such as tailing.

[0016] In addition, since the coefficient for controlling the size of the overflow rubber ring in the imprinting process is adjusted to be within a preset range, the size of the overflow rubber ring is controlled within a reasonable range, so that the volume change of the glue before and after the roller covers is greater than or equal to the glue extrusion flow rate. The range of the glue overflowing from the edge of the imprinting structure area before and after the roller covers will not be too large, and may even not overflow from the edge of the imprinting structure area, thereby avoiding the situation where particles formed after curing contaminate the sub-plate film and the working environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0018] Figure 1 is a schematic diagram of the imprint provided by an embodiment of the present invention; Figure 2 This is a flow chart of a method for controlling the size of an overflow rubber ring in an imprinting process provided by an embodiment of the present invention; Figure 3 This is another flow chart of a method for controlling the size of an overflow rubber ring in an imprinting process provided by an embodiment of the present invention; Figure 4 It is a schematic diagram of the structure of an electronic device provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0019] Figure 1 FIG. 1 is a schematic diagram of the imprint provided by an embodiment of the present invention. Figure 1 As shown, a layer of optical template glue is spin-coated on the motherboard with nanostructures, and then the film material is evenly rolled and spread on the entire surface of the motherboard using a roller, and the surface glue is solidified and adhered to the PET film material using UV curing to form a sub-plate film for subsequent imprinting. As shown in the background technology, in this mold-turning process, in order to make the glue completely fill the nanostructure, when a certain pressure is applied to the roller, the roller will inevitably squeeze out the excess glue on the surface of the motherboard during the rolling process, and an overflow glue ring will be formed on the edge of the toothed structure of the motherboard. If the size of the overflow glue ring is not within a reasonable range, it will affect the optical performance of the waveguide. For example, if the overflow glue ring is too large, it will affect the efficiency and cause quality problems such as tailing. Therefore, how to control the size of the overflow glue ring within a reasonable range is a problem that urgently needs to be solved.

[0020] In view of this, the present invention proposes a method for controlling the size of the overflow rubber ring in the embossing process: At least one of roller pressure, roller speed, and glue thickness variation is adjusted to adjust a coefficient for controlling the size of the overflowing rubber ring during the imprinting process to fall within a reference range, such that the volume variation of the glue before and after roller coverage is greater than or equal to the glue extrusion rate. The coefficient for controlling the size of the overflowing rubber ring during the imprinting process is determined based on the roller pressure, roller speed, and glue thickness variation. Specifically, based on the relationship between the roller pressure, roller speed, and glue thickness variation and the coefficient for controlling the size of the overflowing rubber ring during the imprinting process, at least one of roller pressure, roller speed, and glue thickness variation is adjusted to adjust the coefficient for controlling the size of the overflowing rubber ring during the imprinting process to fall within a preset range, thereby controlling the size of the overflowing rubber ring within a reasonable range and ensuring that the volume variation of the glue before and after roller coverage is greater than or equal to the glue extrusion rate. Furthermore, when the volume variation of the glue before and after roller coverage is greater than or equal to the glue extrusion rate, the optical performance of the waveguide is not affected.

[0021] In addition, since the coefficient for controlling the size of the overflow rubber ring in the imprinting process is adjusted to be within a preset range, the size of the overflow rubber ring is controlled within a reasonable range, so that the volume change of the glue before and after the roller covers is greater than or equal to the glue extrusion flow rate. The range of the glue overflowing from the edge of the imprinting structure area before and after the roller covers will not be too large, and may even not overflow from the edge of the imprinting structure area, thereby avoiding the situation where particles formed after curing contaminate the sub-plate film and the working environment.

[0022] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0023] The terms "including" and "having" and any variations thereof in the description and claims of the present invention and the above-mentioned drawings are intended to cover non-exclusive inclusions. For example, a process, method, system, product or apparatus that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to these processes, methods, products or apparatus.

[0024] The following specific embodiments are used to describe the technical solution of the present invention in detail. The following specific embodiments can be combined with each other, and the same or similar concepts or processes may not be described in detail in some embodiments.

[0025] Figure 2 This is a flow chart of a method for controlling the size of an overflowing rubber ring in an imprinting process provided by an embodiment of the present invention. The method can be executed by a device for controlling the size of an overflowing rubber ring in an imprinting process, and the device can be implemented in software and / or hardware. In a specific embodiment, the device can be integrated into an electronic device, such as a computer, a server, etc. The following embodiments will be described by taking the device integrated into an electronic device as an example, with reference to FIG. Figure 2 The method may specifically include the following step 101: Step 101, adjust at least one of the roller pressure, roller speed and glue thickness change to adjust the coefficient of controlling the overflow rubber ring size in the imprinting process to be within a reference range, so that the glue volume change before and after the roller covers is greater than or equal to the glue extrusion flow rate.

[0026] Among them, the coefficient for controlling the size of the overflow rubber ring in the imprinting process is determined based on the roller pressure, roller speed and glue thickness change. The roller pressure can be understood as the preset pressure applied by the roller to the master before the start of imprinting. The roller speed can be understood as the preset speed of the roller rolling obtained before the start of imprinting. The glue thickness change can be understood as the preset instantaneous change in the glue thickness during the rolling process of the roller obtained before the start of imprinting. The overflow rubber ring can be understood as the glue ring formed at the edge of the imprinting structure during the imprinting process. The reference interval can be understood as the numerical interval to which the coefficient corresponding to the preset overflow rubber ring size belongs. The first threshold represents the lower limit value at which the glue fills the tooth-shaped structure of the motherboard and does not overflow, and the second threshold represents the upper limit value at which the glue fills the tooth-shaped structure of the motherboard and does not overflow.

[0027] In this embodiment, during the rolling process, the glue extrusion flow rate is: in, Indicates the glue extrusion flow rate, Indicates roller pressure, Indicates the change in glue thickness, Indicates glue viscosity, Indicates the roller contact length, Indicates the width of the roller.

[0028] During the rolling process, the volume change of the glue before and after the roller covers is: in, Indicates the change in glue volume before and after the roller covers.

[0029] If the size of the overflow glue ring is to be controlled within the reference range, the volume change of the glue before and after the roller covers must be greater than or equal to the glue extrusion flow rate, that is, Therefore, in one embodiment, the coefficient calculation model for controlling the size of the overflow glue ring in the stamping process is determined based on the critical balance condition, which is that the volume change of the glue before and after the roller covers is greater than or equal to the glue extrusion flow rate, that is, ,Depend on get , and under critical equilibrium conditions there is a standard coefficient .

[0030] in, Indicates the standard coefficient for controlling the size of the overflow rubber ring in the embossing process. Indicates roller pressure, v indicates roller speed, Indicates the change in glue thickness.

[0031] In one embodiment, adjusting at least one of the roller pressure, roller speed, and glue thickness variation to adjust the coefficient of controlling the size of the overflow glue ring in the imprinting process to be within the reference range may include: Figure 3 Steps 201 to 203 shown: Step 201 : Determine a reference interval based on multiple reference data sets using a data model, where the reference interval includes multiple one-to-one corresponding reference roller pressures, reference roller speeds, and reference glue thickness variations.

[0032] Here, the data model can be understood as a model for determining a reference interval based on multiple sets of reference data.

[0033] In one embodiment, a data model training method may include: obtaining an initial training dataset, the initial training dataset including multiple training data sets, each of which is training data based on an imprinting process that precisely avoids glue overflow during imprinting, each training data set including a training roller pressure, a training roller speed, and a training glue thickness variation. Then, using the initial training model, based on the initial training dataset and a coefficient calculation model for controlling the size of the glue overflow ring in the imprinting process, determining training coefficients for controlling the size of the glue overflow ring in multiple imprinting processes, and using the initial training model, based on the training coefficients for controlling the size of the glue overflow ring in the multiple imprinting processes, determining a training reference interval, until a training stop condition is met, thereby obtaining a data model.

[0034] The training stop condition is that the number of iterations of the initial training model reaches a preset number of iterations, and the preset number of iterations is equal to the number of groups of training data. The training reference interval can include training coefficients for controlling the size of the overflow ring in multiple imprint processes.

[0035] Specifically, using the initial training model to determine the training reference interval based on the training coefficients for controlling the size of the overflowed rubber ring in multiple imprinting processes can include: determining the minimum value of the training coefficients for controlling the size of the overflowed rubber ring in multiple imprinting processes within a target confidence interval as the first threshold of the training reference interval; and determining the maximum value of the training coefficients for controlling the size of the overflowed rubber ring in multiple imprinting processes within the target confidence interval as the second threshold of the training reference interval. In other words, the target confidence interval can be used to filter out some training coefficients to obtain training coefficients that meet the confidence level, and then determine the first and second thresholds of the training reference interval from the training coefficients that meet the confidence level, thereby improving the accuracy of the first and second thresholds.

[0036] Alternatively, the difference between the mode of the training coefficients for controlling the size of the overflow rubber ring in multiple imprinting processes and the standard coefficient is obtained, and the difference between the standard coefficient and the difference value is used as the first threshold of the training reference interval, and the sum of the standard coefficient and the difference value is used as the second threshold of the training reference interval.

[0037] The method for determining the target confidence interval may include: determining the total number, critical value, and standard error of the training coefficients, and determining the target confidence interval based on the total number, critical value, and standard error of the training coefficients.

[0038] For example, the initial training dataset includes N training data sets: 1 (p'1, v'1, h'1), 2 (p'2, v'2, h'2), ... n (p'n, v'n, h'n). Here, p' represents the training roller pressure, v' represents the training roller speed, h' represents the training glue thickness variation, and n' represents the data set number. Using the initial training model, each of the n training data sets is substituted into the coefficient calculation model for controlling the size of the overflow rubber ring in the embossing process. This yields training coefficients for controlling the size of the overflow rubber ring in multiple embossing processes: k1, k2, ..., kn. Here, k1 is the training coefficient corresponding to 1 (p'1, v'1, h'1), k2 is the training coefficient corresponding to 2 (p'2, v'2, h'2), and kn is the training coefficient corresponding to n (p'n, v'n, h'n).

[0039] The first threshold and the second threshold of the training reference interval are determined in the following two ways: 1. Assume k2 is the minimum value within the target confidence interval, and k5 is the maximum value within the target confidence interval. The minimum value k2 of the training coefficients for controlling the size of the overflow rings in multiple imprint processes that falls within the target confidence interval can be determined as the first threshold of the training reference interval. The maximum value k5 of the training coefficients for controlling the size of the overflow rings in multiple imprint processes that falls within the target confidence interval can be determined as the second threshold of the training reference interval. The target confidence interval corresponds to the target confidence level, which can be, for example, 90%, 95%, 99%, etc.

[0040] 2. Assume that the most common training coefficient among multiple training coefficients is k5. The difference between the mode k5 and the standard coefficient k0 for controlling the size of the overflow ring in multiple imprint processes can be determined as △1 = | k5 - k0 |. The difference between the standard coefficient k0 and the difference △1 is used as the first threshold of the training reference interval (k0 - △1), and the sum of the standard coefficient k0 and the difference △1 is used as the second threshold of the training reference interval (k0 + △1). When there is more than one mode for a training coefficient, the difference between the mode of the training coefficient and the standard coefficient k0 is the difference between the average of the modes and k0.

[0041] In one embodiment, the plurality of reference data sets are reference data based on an imprinting process in which no glue overflow occurs during imprinting, and each reference data set includes a reference roller pressure, a reference roller speed, and a reference glue thickness variation.

[0042] The method of determining a reference interval based on several reference data groups using a data model may include: determining the reference coefficients for controlling the size of the overflow rubber rings in multiple imprinting processes based on multiple groups of reference data and a coefficient calculation model for controlling the size of the overflow rubber rings in the imprinting process; and determining the reference interval based on the reference coefficients for controlling the size of the overflow rubber rings in multiple imprinting processes.

[0043] Specifically, the reference coefficient for controlling the size of the overflow rubber ring in multiple imprinting processes can be the minimum value within the target confidence interval, which is determined as the first threshold of the reference interval; the reference coefficient for controlling the size of the overflow rubber ring in multiple imprinting processes can be the maximum value within the target confidence interval, which is determined as the second threshold of the reference interval.

[0044] Alternatively, the difference between the mode of the reference coefficients for controlling the size of the overflow rubber ring in multiple imprint processes and the standard coefficient is obtained, the difference between the standard coefficient and the difference value is used as the first threshold of the reference interval, and the sum of the standard coefficient and the difference value is used as the second threshold of the reference interval.

[0045] For example, there are y reference data sets: 1 (p'1, v'1, h'1), 2 (p'2, v'2, h'2), ... y (p'y, v'y, h'y). Here, p' represents the reference roller pressure, v' represents the reference roller speed, h' represents the reference glue thickness variation, and y represents the reference data set number. Using the initial reference model, each of the y reference data sets is substituted into the coefficient calculation model for controlling the size of the overflow adhesive ring in the imprint process. Reference coefficients for controlling the size of the overflow adhesive ring in multiple imprint processes are obtained: f1, f2, ..., fy. Here, f1 is the reference coefficient corresponding to 1 (p'1, v'1, h'1), f2 is the reference coefficient corresponding to 2 (p'2, v'2, h'2), and fy is the reference coefficient corresponding to y (p'y, v'y, h'y).

[0046] The reference intervals are determined in two ways: 1. Assuming f2 is the minimum value within the target confidence interval and f5 is the maximum value within the target confidence interval, the minimum value f2 of the reference coefficient for controlling the size of the overflow ring in multiple imprint processes within the target confidence interval can be determined as the first threshold of the reference interval; the maximum value f5 of the reference coefficient for controlling the size of the overflow ring in multiple imprint processes within the target confidence interval can be determined as the second threshold of the reference interval.

[0047] 2. Assume that the most common reference coefficient among multiple reference coefficients is f5. The difference between the mode of the reference coefficients for controlling the size of the overflow ring in multiple imprint processes and the standard coefficient f0 can be determined as △2 = |f5-k0|. The difference between the standard coefficient and the difference is used as the first threshold of the reference interval (f0-△2), and the sum of the standard coefficient and the difference is used as the second threshold of the reference interval (f0+△2).

[0048] Step 202 : determining a coefficient for controlling the size of the overflow glue ring in the current imprinting process according to the roller pressure, roller speed, and the change in glue thickness.

[0049] In one embodiment, the roller pressure, roller speed, and glue thickness variation can be substituted into a coefficient calculation model for controlling the size of the overflowing rubber ring in the imprinting process to obtain the coefficient for controlling the size of the overflowing rubber ring in the current imprinting process: .

[0050] in, Indicates the coefficient for controlling the size of the overflow rubber ring in the current imprinting process. Indicates roller pressure, v indicates roller speed, Indicates the change in glue thickness.

[0051] Step 203, according to the reference range and the coefficient for controlling the size of the overflow rubber ring in the current imprinting process, adjust at least one of the roller pressure, roller speed and glue thickness change to adjust the coefficient for controlling the size of the overflow rubber ring in the imprinting process to be within the reference range.

[0052] In one embodiment, at least one of the roller pressure, roller speed, and glue thickness variation is adjusted according to a reference interval and a coefficient for controlling the size of the overflow rubber ring in the current imprinting process to adjust the coefficient for controlling the size of the overflow rubber ring in the imprinting process to be within the reference interval. This may include: when the coefficient for controlling the size of the overflow rubber ring in the current imprinting process does not fall within the reference interval, obtaining multiple reference data groups corresponding to a first threshold, a second threshold, and an intermediate threshold between the first threshold and the second threshold, each reference data group including a reference reference roller pressure, a reference reference roller speed, and a reference reference glue thickness variation; adjusting at least one of the roller pressure, roller speed, and glue thickness variation to obtain a target roller pressure, target roller speed, and target glue thickness variation that are the same as at least one reference data group in the multiple reference data groups to adjust the coefficient for controlling the size of the overflow rubber ring in the imprinting process to be within the reference interval.

[0053] For example, the reference data set corresponding to the first threshold is 1 (p''1, v''1, h''1), the reference data set corresponding to the second threshold is y (p''y, v''y, h''y), and the reference data sets corresponding to intermediate thresholds between the first and second thresholds are 2 (p''2, v''2, h''2) ... y-1 (p''y-1, v''y-1, h''y-1). Here, p'' represents the reference roller pressure, v'' represents the reference roller speed, h'' represents the reference glue thickness change, and y represents the reference data set number. Since the coefficient for controlling the size of the overflow rubber ring in the imprinting process corresponding to each set of reference data groups falls within the reference range, one example is: the roller pressure can be adjusted to p''1 in the reference data group corresponding to the first threshold, the roller speed can be adjusted to v''1 in the reference data group corresponding to the first threshold, and the change in glue thickness can be adjusted to h''1 in the reference data group corresponding to the first threshold, so that the coefficient for controlling the size of the overflow rubber ring in the imprinting process is adjusted to fall within the reference range.

[0054] In another embodiment of the present invention, at least one of the roller pressure, roller speed and glue thickness variation can be adjusted according to the stamping experience to obtain the same target roller pressure, target roller speed and target glue thickness variation as at least one of the multiple reference data groups, so as to adjust the coefficient for controlling the size of the overflow rubber ring in the stamping process to be within the reference range.

[0055] In an embodiment of the present invention, at least one of the roller pressure, roller speed, and glue thickness change is adjusted to adjust the coefficient for controlling the size of the overflow rubber ring in the imprinting process to be within a preset range, so that the size of the overflow rubber ring is controlled within a reasonable range, so that the volume change of the glue before and after the roller covers is greater than or equal to the glue extrusion flow rate, and then when the volume change of the glue before and after the roller covers is greater than or equal to the glue extrusion flow rate, the optical performance of the waveguide will not be affected. For example, if the overflow rubber ring is too large, it will affect the efficiency and cause quality problems such as tailing.

[0056] In addition, since the coefficient for controlling the size of the overflow rubber ring in the imprinting process is adjusted to be within a preset range, the size of the overflow rubber ring is controlled within a reasonable range, so that the volume change of the glue before and after the roller covers is greater than or equal to the glue extrusion flow rate. The range of the glue overflowing from the edge of the imprinting structure area before and after the roller covers will not be too large, and may even not overflow from the edge of the imprinting structure area, thereby avoiding the situation where particles formed after curing contaminate the sub-plate film and the working environment.

[0057] In one embodiment, a method for determining a coefficient for controlling the size of an overflowing rubber ring in an imprinting process based on roller pressure, roller speed, and a change in glue thickness may include: substituting the roller pressure, roller speed, and a change in glue thickness into a coefficient calculation model for controlling the size of an overflowing rubber ring in an imprinting process to obtain a coefficient for controlling the size of an overflowing rubber ring in an imprinting process.

[0058] The coefficient calculation model for controlling the size of the overflow rubber ring in the embossing process is: ; in, Indicates the coefficient for controlling the size of the overflow rubber ring in the embossing process. Indicates roller pressure, v indicates roller speed, Indicates the change in glue thickness.

[0059] In one embodiment, a method for determining the change in glue thickness may include: obtaining roller pressure, roller speed, initial glue thickness, structural information of the motherboard nanostructure, and glue characteristic information; and determining the change in glue thickness based on the roller pressure, roller speed, initial glue thickness, structural information, and glue characteristic information.

[0060] Among them, the initial glue thickness can be understood as the glue thickness before imprinting. The structural information can be understood as the structural information of the imprinting structure. The structural information may include information such as the master tooth shape of the imprinting structure, the roller width, the contact length between the roller and the master, etc. In other embodiments, the structural information may also include other imprinting structure information in addition to the structural information of the imprinting structure mentioned above, which is only a specific example. The glue property information may include information such as glue viscosity, glue drying time, and glue solid content. In other embodiments, the initial glue property information may also include other glue property information in addition to the glue property information mentioned above, which is only a specific example.

[0061] Specifically, determining the glue thickness change based on roller pressure, roller speed, initial glue thickness, structural information, and glue property information may include querying thickness change information based on the roller pressure, roller speed, initial glue thickness, structural information, and glue property information to obtain the glue thickness change. This improves the speed and accuracy of determining the glue thickness change by querying parameters.

[0062] The thickness variation information may include the glue thickness variation corresponding to each roller pressure, roller speed, initial glue thickness, structural information, and glue characteristic information.

[0063] Figure 4 It is a schematic diagram of the structure of an electronic device provided by an embodiment of the present invention.

[0064] Please refer to Figure 4, provides an electronic device 50, comprising: processor 51; and a memory 52 for storing executable instructions of the processor; The processor 51 is configured to execute the above-mentioned method by executing the executable instructions.

[0065] The processor 51 can communicate with the memory 52 via a bus 53 .

[0066] An embodiment of the present invention further provides a computer-readable storage medium having a computer program stored thereon, which implements the above-mentioned method when executed by a processor.

[0067] Those skilled in the art will appreciate that all or part of the steps in the above-described method embodiments can be implemented using hardware associated with program instructions. The aforementioned program can be stored in a computer-readable storage medium. When executed, the program performs the steps of the above-described method embodiments. The aforementioned storage medium includes various media capable of storing program code, such as ROM, RAM, magnetic disks, or optical disks.

[0068] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A method for controlling the size of an overflow rubber ring in an embossing process, characterized in that: include: Adjust at least one of the roller pressure, roller speed and glue thickness change to adjust the coefficient of controlling the size of the overflow rubber ring in the imprinting process to be within a reference range, so that the volume change of the glue before and after the roller covers is greater than or equal to the glue extrusion flow rate. The coefficient of controlling the size of the overflow rubber ring in the imprinting process is determined based on the roller pressure, the roller speed and the glue thickness change.

2. The method for controlling the size of the overflow rubber ring in the embossing process according to claim 1, characterized in that: The adjustment of at least one of the roller pressure, roller speed, and glue thickness variation to adjust the coefficient for controlling the size of the overflow glue ring in the imprinting process falls within a reference range, including: Determining the reference interval based on multiple reference data sets using a data model, wherein the reference interval includes multiple one-to-one corresponding reference roller pressures, reference roller speeds, and reference glue thickness changes; Determining a coefficient for controlling the size of the overflow glue ring in the current imprinting process according to the roller pressure, roller speed, and glue thickness change; According to the reference range and the coefficient for controlling the size of the overflow rubber ring in the current imprinting process, at least one of the roller pressure, roller speed and glue thickness change is adjusted to adjust the coefficient for controlling the size of the overflow rubber ring in the imprinting process to be within the reference range.

3. The method for controlling the size of the overflow rubber ring in the embossing process according to claim 2, characterized in that: The reference interval includes a first threshold value and a second threshold value, the first threshold value is less than the second threshold value, and adjusting at least one of the roller pressure, the roller speed, and the glue thickness change according to the reference interval and the coefficient for controlling the size of the overflowing rubber ring in the current imprinting process to adjust the coefficient for controlling the size of the overflowing rubber ring in the imprinting process to fall within the reference interval includes: When the coefficient for controlling the size of the overflow glue ring in the current imprint process does not fall within the reference range, obtaining multiple reference data groups corresponding to the first threshold, the second threshold, and an intermediate threshold between the first threshold and the second threshold, each reference data group including a reference roller pressure, a reference roller speed, and a reference glue thickness change; Adjust at least one of the roller pressure, roller speed and glue thickness change to obtain the same target roller pressure, target roller speed and target glue thickness change as at least one of the multiple reference data groups, so as to adjust the coefficient for controlling the size of the overflow rubber ring in the imprinting process to be within the reference range.

4. The method for controlling the size of the overflow rubber ring in the embossing process according to claim 1, characterized in that: The method for determining a coefficient for controlling the size of an overflowing glue ring in the imprinting process based on the roller pressure, the roller speed, and the change in glue thickness includes: Substituting the roller pressure, the roller speed, and the change in glue thickness into a coefficient calculation model for controlling the size of the overflowing rubber ring in the embossing process, to obtain the coefficient for controlling the size of the overflowing rubber ring in the embossing process; The coefficient calculation model for controlling the size of the overflow rubber ring in the embossing process is: ； in, Indicates the coefficient for controlling the size of the overflow rubber ring in the embossing process. Indicates roller pressure, v indicates roller speed, Indicates the change in glue thickness.

5. The method for controlling the size of the overflow rubber ring in the embossing process according to claim 4, characterized in that: The coefficient calculation model for controlling the size of the overflow rubber ring in the stamping process is determined based on the critical equilibrium condition. The critical equilibrium condition is that the volume change of the glue before and after the roller covers is equal to the glue extrusion flow rate, and there is a standard coefficient under the critical equilibrium condition. .

6. The method for controlling the size of the overflow rubber ring in the embossing process according to claim 3, characterized in that: The multiple reference data sets are reference data based on the imprinting process in which no glue overflow occurs during imprinting, each reference data set includes a reference roller pressure, a reference roller speed, and a reference glue thickness variation. The method for determining the reference interval based on the data model based on the multiple reference data sets includes: Determining reference coefficients for controlling the size of the overflowed rubber rings in multiple imprinting processes based on the multiple sets of reference data and a coefficient calculation model for controlling the size of the overflowed rubber rings in the imprinting process; The reference interval is determined according to reference coefficients for controlling the size of the overflow rubber ring in the multiple imprinting processes.

7. The method for controlling the size of the overflow rubber ring in the embossing process according to claim 6, characterized in that: The determining of the reference interval according to the reference coefficients for controlling the size of the overflow rubber ring in the multiple imprinting processes includes: The reference coefficients for controlling the size of the overflowed rubber rings in the multiple imprint processes are determined to be the minimum value within the target confidence interval as the first threshold value of the reference interval; the reference coefficients for controlling the size of the overflowed rubber rings in the multiple imprint processes are determined to be the maximum value within the target confidence interval as the second threshold value of the reference interval; or Obtain the difference between the mode of the reference coefficients for controlling the size of the overflow rubber ring in the multiple imprinting processes and the standard coefficient, use the difference between the standard coefficient and the difference value as the first threshold of the reference interval, and use the sum of the standard coefficient and the difference value as the second threshold of the reference interval.

8. The method for controlling the size of the overflow rubber ring in the embossing process according to claim 2, characterized in that: The data model training method includes: Obtaining an initial training data set, the initial training data set comprising a plurality of training data sets, the plurality of training data sets being training data based on the imprinting process in which no glue overflow occurs during imprinting, each training data set comprising a training roller pressure, a training roller speed, and a training glue thickness variation; Determining, using the initial training model according to the initial training data set and a coefficient calculation model for controlling the size of the overflowed rubber ring in the imprinting process, training coefficients for controlling the size of the overflowed rubber ring in multiple imprinting processes, and determining, using the initial training model according to the training coefficients for controlling the size of the overflowed rubber ring in the multiple imprinting processes, a training reference interval until a training stop condition is reached, thereby obtaining the data model; The training stopping condition is that the number of iterations of the initial training model reaches a preset number of iterations, and the preset number of iterations is equal to the number of the multiple training data groups.

9. The method for controlling the size of the overflow rubber ring in the embossing process according to claim 1, characterized in that: The reference interval includes a first threshold and a second threshold, the first threshold is smaller than the second threshold, the first threshold represents the lower limit value at which the glue fills the tooth-shaped structure of the motherboard without overflowing, and the second threshold represents the upper limit value at which the glue fills the tooth-shaped structure of the motherboard without overflowing.

10. The method for controlling the size of the overflow rubber ring in the embossing process according to claim 1, characterized in that: The method for determining the change in glue thickness includes: Obtaining the roller pressure, the roller speed, the initial glue thickness, structural information of the motherboard nanostructure, and glue property information; The glue thickness variation is determined based on the roller pressure, the roller speed, the initial glue thickness, the structural information, and the glue characteristic information.

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