Film coating equipment for front film layer structure of TOPCon battery

Abstract

The invention discloses coating equipment of a TOPCon battery front surface film layer structure, relates to the technical field of photovoltaic cells, and aims to solve the technical problem that existing coating equipment of a TOPCon battery front surface film layer structure is poor in gas input effect. The rhythm that a gaseous precursor enters the reaction chamber is precisely regulated and controlled, so that the problem that the reaction degree is difficult to precisely control through traditional continuous gas inlet is fundamentally solved, the uniformity and compactness of the structure of a front film layer are ensured, and various key performance indexes of the battery are powerfully improved; on the other hand, the water is removed by utilizing the vibration force generated when the steel balls collide with the inner wall of the inner rotary drum, and an electric heating mode with high energy consumption and complicated temperature control is abandoned, so that the production cost is reduced, the adverse effect on the reaction caused by improper temperature control is avoided, the stable operation of the equipment is ensured, and the coating defects caused by the water are reduced; and a reliable guarantee is provided for high-quality coating.

Description

Technical Field

[0001] The present invention relates to the technical field of photovoltaic cells, and more particularly to a coating device for a front film structure of a TOPCon cell. Background Art

[0002] TOPCon (Tunnel Oxide Passivated Contact) cells are a representative example of high-efficiency N-type photovoltaic cells. The uniformity and density of their front-side film structures (such as the aluminum oxide layer and silicon oxynitride layer) directly impact the cell's UV resistance, passivation performance, and photovoltaic conversion efficiency. Currently, the mainstream coating process uses atomic layer deposition (ALD), which periodically introduces gaseous precursors to grow thin films layer by layer on the cell surface.

[0003] However, existing coating equipment often uses a continuous gas pumping process, making precise control of the reaction process difficult. For example, when preparing an aluminum oxide film, trimethylaluminum (TMA) is first introduced to form a monolayer on the cell surface. Water (H2O) is then introduced to react with the TMA to form aluminum oxide. However, continuous gas pumping makes it difficult to precisely control the degree of reaction between the H2O and TMA, making it prone to overreaction or underreaction. Overreaction can loosen the aluminum oxide film structure, reducing its protective and passivating properties for the cell. Underreaction prevents the formation of a complete, dense aluminum oxide film, affecting its performance. Furthermore, water easily condenses into a liquid at room temperature, adhering to the inner walls of gas pipelines, forming droplets or a water film. Currently, electric heating is commonly used to remove water molecules from the pipelines. However, this method has significant drawbacks. First, electric heating significantly increases energy consumption, which undoubtedly increases production costs for companies with rising energy costs. Second, temperature control for electric heating is difficult. If the temperature is too high, water vapor will evaporate excessively, wasting energy and potentially affecting the proper reaction. If the temperature is too low, water molecules adhering to the inner wall of the pipe cannot be effectively removed, failing to achieve the desired effect. Therefore, we propose a TOPCon coating device for the front-side film structure of solar cells. Summary of the Invention

[0004] The purpose of the present invention is to provide a coating device for a TOPCon battery front film structure to solve the technical problem of poor gas input effect of the existing coating device for a TOPCon battery front film structure.

[0005] In order to solve the above technical problems, the present invention provides the following technical solutions: a coating device for a TOPCon battery front film structure, comprising a shell, a conveying mechanism is provided in the shell, a lifting mechanism is provided in the shell near the output end of the conveying mechanism, a reaction chamber is provided in the shell at the top end of the lifting mechanism, the movable end of the lifting mechanism is adapted to the bottom end of the reaction chamber, a top shell is provided at the top end of the shell directly above the reaction chamber, a gas transmission mechanism is provided in the top shell, an air inlet end of the gas transmission mechanism is provided through the top shell, and an air outlet end of the gas transmission mechanism is connected to the reaction chamber, a grinding mechanism is further rotatably sleeved on the outer wall of the gas transmission mechanism, a driving mechanism is provided in the top shell near the gas transmission mechanism, and the output end of the driving mechanism is meshedly connected to the grinding mechanism;

[0006] The gas delivery mechanism includes an inner drum, a spacer, a baffle, steel balls and a protrusion. One end of the inner drum is connected to the motor. The spacer is annular and evenly spaced and hingedly connected to the outer wall of the inner drum. The baffle is annular and evenly spaced and arranged on the inner wall of the inner drum. Several steel balls are movably arranged inside the inner drum. The protrusion is arranged on the inner wall of the premixing drum.

[0007] The motor drives the inner drum to rotate and drives the spacer to rotate. When the spacer breaks away from the limit of the protrusion, the hinged spacer rotates and flips, so that the input gaseous precursor is intermittently blocked, forming a segmented air intake state. The rotation of the inner drum drives the baffle to rotate, and the baffle drives some steel balls to the highest point. The steel balls fall and hit the inner wall of the inner drum. The vibration force shakes off the water attached to the outer wall of the inner drum, achieving the effect of removing water attachment.

[0008] Preferably, the gas delivery mechanism further includes a premixing cylinder and an inner cavity, the premixing cylinder is connected to the inner wall of the top shell, the inner rotating cylinder is rotatably inserted in the premixing cylinder, and the inner cavity is opened inside the inner rotating cylinder.

[0009] Preferably, the premixing cylinder is further provided with an air inlet and an air outlet, the air inlet is provided at a position of the premixing cylinder close to the back of the top shell, the air outlet is provided on the protrusion, the air inlet is connected to the top shell through an air inlet pipe, the air outlet is connected to the reaction chamber through an air outlet pipe, and the air inlet is communicated with the air outlet.

[0010] Preferably, dividing plates are fixedly provided on the outer wall of the inner drum in an annular shape at equal intervals, one end of the spacer is hingedly connected to the dividing plate, and the size and shape of the protrusion are adapted to the folded state of the spacer and the dividing plate.

[0011] Preferably, an arc groove is provided on the baffle, and the arc groove is adapted to fit the steel ball.

[0012] Preferably, the grinding heat mechanism includes an outer rotating cylinder, an annular cavity and friction balls. The outer rotating cylinder is rotatably sleeved on the outer wall of the gas transmission mechanism. The annular cavity is opened inside the outer rotating cylinder. Several friction balls are movably arranged inside the annular cavity. The outer rotating cylinder is connected to the driving mechanism.

[0013] Preferably, an outer ring gear is fixedly provided on one end of the outer wall of the outer drum, and the output end of the driving mechanism is meshedly connected to the outer ring gear.

[0014] Preferably, the driving mechanism includes a servo motor, a driving shaft and driving teeth. The servo motor is fixed on the inner wall of the top shell. One end of the driving shaft is rotatably connected to the inner wall of the top shell. The other end of the driving shaft is fixedly connected to the output end of the servo motor. The driving teeth are fixedly sleeved on the outer wall of the driving shaft, and the driving teeth are meshed with the outer ring teeth.

[0015] Preferably, the servo motor is driven to rotate the drive shaft and the drive gear, and the drive gear engages with the outer ring gear to drive the outer drum to rotate. The rotation of the outer drum causes several friction balls inside the ring cavity to rub against each other to generate heat. The heat is generated by the friction balls and conducted to the outer drum, and then conducted from the outer drum to the premixing drum to remove water attached to the inner wall of the premixing drum.

[0016] Preferably, a diffusion disk group is provided at the top of the interior of the reaction chamber, and the diffusion disk group is composed of a plurality of inverted cone disks arranged in a vertical direction and gradually becoming larger, and air holes are opened on the plurality of inverted cone disks;

[0017] The bottom end of the diffusion disk group is provided with a surrounding tube, the size of which is adapted to the size of the battery cell base;

[0018] The preheated and premixed gas is input into the reaction chamber through the gas outlet pipe, and is evenly diffused into the surrounding tube by a number of inverted cones and air holes to contact the battery cell substrate to form a front film layer.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] 1. This invention achieves segmented gas flow of gaseous precursors through the coordination of spacers and bumps. Compared to existing methods that continuously pump gas, this allows for more precise control of the reaction process. For example, when preparing an aluminum oxide film, the degree of reaction between trimethylaluminum and water can be precisely controlled to avoid over- or under-reaction, thereby improving the uniformity and density of the front film structure, enhancing the battery's UV attenuation resistance, passivation effect, and photoelectric conversion efficiency.

[0021] 2. This invention utilizes the inner drum's rotation to drive the baffle, causing the steel balls to strike the inner drum wall, generating vibrations that shake off water adhering to the outer drum wall. This water removal method is more energy-efficient than traditional electric heating, avoiding the significant increase in energy consumption associated with electric heating. It also eliminates the difficulty of temperature control, ensuring stable equipment operation and reducing coating quality issues caused by moisture.

[0022] 3. This invention also incorporates a design that integrates the baffle, arc groove, and steel ball. When the steel ball reaches a certain height, it disengages from the arc groove and falls due to the continued rotation of the inner drum and gravity. The arc groove design ensures a relatively stable trajectory and force of the steel ball's fall. This ensures that the vibration generated by the falling steel ball striking the inner drum's inner wall can shake off water adhering to the outer wall, further enhancing the water removal effect.

[0023] 4. The present invention designs the structure of the outer drum and the annular cavity. The annular cavity inside the outer drum provides a space for the friction balls to move. As the outer drum rotates, the friction balls in the annular cavity continuously move and rub against each other under the action of centrifugal force and mutual extrusion force. Heat is generated during the friction process, thereby heating the moisture attached to the inner wall of the premixing drum, causing it to vaporize and evaporate, thereby achieving the purpose of further removing moisture.

[0024] 5. The present invention designs the structure of the diffusion disk group, inverted cone disk and surrounding tube. The preheated and premixed gas enters the reaction chamber through the outlet pipe, and is evenly dispersed by the diffusion disk group composed of vertical, gradually sized and porous inverted cone disks. It is then guided by the surrounding tube adapted to the battery cell base and evenly contacts the battery cell base, thereby forming a uniform and dense front film layer and improving battery performance. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0026] Figure 2 Schematic diagram of the overall internal structure of the present invention;

[0027] Figure 3 It is a schematic structural diagram of the reaction chamber, top shell, gas transmission mechanism and grinding mechanism of the present invention;

[0028] Figure 4 It is a schematic structural diagram of the reaction chamber, gas transmission mechanism and grinding mechanism of the present invention;

[0029] Figure 5 It is a schematic structural diagram of the gas transmission mechanism and the heat grinding mechanism of the present invention;

[0030] Figure 6 This is a schematic diagram of the cross-sectional structure of the gas transmission mechanism of the present invention;

[0031] Figure 7 This is a schematic diagram of the gas transmission mechanism of the present invention in a retracted state;

[0032] Figure 8 This is a schematic diagram of the internal structure of the inner drum of the present invention;

[0033] Figure 9 This is a schematic diagram of the water molecule removal principle of the present invention;

[0034] Figure 10 It is a schematic cross-sectional view of the grinding mechanism of the present invention;

[0035] Figure 11 This is a physical picture of the product of the present invention.

[0036] Description of the numbers in the figure:

[0037] 1. Outer shell; 2. Conveying mechanism; 3. Lifting mechanism; 4. Reaction chamber; 5. Top shell; 6. Gas transmission mechanism; 7. Grinding mechanism; 8. Driving mechanism;

[0038] 601, premixing cylinder; 602, inner drum; 603, spacer; 604, inner cavity; 605, baffle; 606, steel ball; 607, protrusion;

[0039] 6011, air inlet; 6012, air outlet;

[0040] 6021, split board;

[0041] 6051, arc groove;

[0042] 701, outer drum; 702, ring cavity; 703, friction ball; 704, outer ring gear;

[0043] 801, servo motor; 802, drive shaft; 803, drive gear;

[0044] 401. Diffuser disc assembly; 402. Inverted cone disc; 403. Air hole; 404. Surrounding tube. DETAILED DESCRIPTION

[0045] Example 1: Figures 1 to 10As shown, the present invention relates to a coating device for a TOPCon battery front film structure, comprising a shell 1, a conveying mechanism 2 is provided in the shell 1, a lifting mechanism 3 is provided in the shell 1 near the output end of the conveying mechanism 2, a reaction chamber 4 is provided in the shell 1 at the top of the lifting mechanism 3, the moving end of the lifting mechanism 3 is adapted to the bottom end of the reaction chamber 4, a top shell 5 is provided at the top of the shell 1 directly above the reaction chamber 4, a gas transmission mechanism 6 is provided in the top shell 5, the gas inlet end of the gas transmission mechanism 6 is passed through the top shell 5, the gas outlet end of the gas transmission mechanism 6 is connected to the reaction chamber 4, a grinding mechanism 7 is also rotatably sleeved on the outer wall of the gas transmission mechanism 6, a driving mechanism 8 is provided in the top shell 5 near the gas transmission mechanism 6, and the output end of the driving mechanism 8 is meshedly connected to the grinding mechanism 7;

[0046] The gas delivery mechanism 6 includes an inner drum 602, a spacer 603, a baffle 605, steel balls 606, and a bump 607. One end of the inner drum 602 is connected to the motor. The spacer 603 is hingedly connected to the outer wall of the inner drum 602 in an annular shape and at equal intervals. The baffle 605 is annularly and evenly spaced on the inner wall of the inner drum 602. Several steel balls 606 are movably mounted inside the inner drum 602. The bump 607 is located on the inner wall of the premixing drum 601.

[0047] The motor drives the inner drum 602 to rotate, thereby driving the spacer 603 to rotate. When the spacer 603 breaks away from the limit of the protrusion 607, the hinged spacer 603 rotates and flips, so that the input gaseous precursor is intermittently blocked, forming a segmented air intake state. The rotation of the inner drum 602 drives the baffle 605 to rotate, and the baffle 605 drives some steel balls 606 to the highest point. The steel balls 606 fall and hit the inner wall of the inner drum 602. The vibration force shakes off the water attached to the outer wall of the inner drum 602, thereby achieving the effect of removing water attachment.

[0048] In the present invention, the motor first drives the inner drum 602 to rotate, which in turn drives the spacer 603 to rotate synchronously. During rotation, the spacer 603 is restrained by the protrusion 607. When the spacer 603 is free from the protrusion 607, it rotates and flips due to its hinged connection to the outer wall of the inner drum 602. This intermittently blocks the incoming gaseous precursor, achieving a staged intake state and facilitating precise control of the reaction process.

[0049] At the same time, the rotation of the inner drum 602 drives the baffle 605 on the inner wall to rotate. The baffle 605 carries some of the steel balls 606 located inside the inner drum 602 to a high point. As the inner drum 602 continues to rotate, the steel balls 606 fall from the high point under the action of gravity and impact the inner wall of the inner drum 602. The vibration generated by this impact shakes off any water adhering to the outer wall of the inner drum 602, thereby removing the water and preventing it from adversely affecting the coating process.

[0050] In an embodiment of the present invention, the gas delivery mechanism 6 further includes a premixing cylinder 601 and an inner cavity 604. The premixing cylinder 601 is connected to the inner wall of the top shell 5, and the inner drum 602 is rotatably inserted into the premixing cylinder 601. The inner cavity 604 is provided inside the inner drum 602. The premixing cylinder 601 is connected to the inner wall of the top shell 5 and serves to fix and guide the gas. When the gas enters the inner cavity 604 of the premixing cylinder 601, the motor drives the inner drum 602 to rotate, driving the spacer 603 to rotate synchronously. When the spacer 603 rotates to a position that is free from the limit of the protrusion 607, the spacer 603 rotates and flips, blocking the gas channel, thereby achieving intermittent blocking of the gaseous precursor and forming a segmented air intake state.

[0051] In an embodiment of the present invention, the premixing cylinder 601 is further provided with an air inlet 6011 and an air outlet 6012. The air inlet 6011 is provided on the premixing cylinder 601 near the back of the top shell 5, and the air outlet 6012 is provided on the protrusion 607. The air inlet 6011 is connected to the top shell 5 via an air inlet pipe, and the air outlet 6012 is connected to the reaction chamber 4 via an air outlet pipe, and the air inlet 6011 and the air outlet 6012 are in communication. Gas enters the inner cavity 604 of the premixing cylinder 601 through the air inlet 6011, and the air inlet 6011 is connected to an external gas source to provide the gaseous precursor required for the coating process.

[0052] In this embodiment of the present invention, split plates 6021 are fixedly disposed in a circular pattern at equal intervals on the outer wall of the inner drum 602. One end of the spacer 603 is hingedly connected to the split plates 6021. The size and shape of the protrusion 607 are adapted to the stowed state of the spacer 603 and split plates 6021. The split plates 6021, fixedly disposed in a circular pattern at equal intervals on the outer wall of the inner drum 602, provide a mounting base for the spacer 603. One end of the spacer 603 is hingedly connected to the split plates 6021, enabling the spacer 603 to rotate about the hinge point.

[0053] When the inner drum 602 rotates under the drive of the motor, it drives the spacer 603 to rotate synchronously. During this rotation, the spacer 603 comes into contact with the protrusion 607. At this point, due to the adaptive shape and size relationship between the two, the spacer 603 remains retracted, allowing gas to flow normally through the gas delivery mechanism. However, when the spacer 603 rotates to a position that is free from the restraining position of the protrusion 607, the spacer 603 rotates and flips under the influence of its own weight and the centrifugal force of rotation, changing the gas path. This achieves intermittent blocking of the incoming gaseous precursor, forming a staged gas intake state, and achieving the purpose of precisely controlling the reaction process.

[0054] In the embodiment of the present invention, an arc groove 6051 is formed on the baffle 605 , and the arc groove 6051 is adapted to fit the steel ball 606 .

[0055] When the motor drives the inner drum 602 to rotate, the baffles 605, which are mounted on the inner wall of the inner drum 602 and are arranged in a circular pattern with equal spacing, rotate accordingly. The arc grooves 6051 fit the steel balls 606, ensuring that the steel balls 606 are stably positioned within the arc grooves 6051. As the baffles 605 rotate, the steel balls 606 are constrained by the arc grooves 6051 and brought to the highest point.

[0056] When the steel ball 606 reaches a certain height, due to the continuous rotation of the inner drum 602 and the action of gravity, the steel ball 606 will break away from the arc groove 6051 and fall. Because the design of the arc groove 6051 ensures that the trajectory and force of the steel ball 606 are relatively stable, the falling steel ball 606 will hit the inner wall of the inner drum 602. The vibration force generated by the impact can shake off the water adhering to the outer wall of the inner drum 602, thereby effectively removing the water adhesion.

[0057] As another embodiment of the present invention, the grinding heat mechanism 7 includes an outer rotating cylinder 701, an annular cavity 702 and friction balls 703. The outer rotating cylinder 701 is rotatably sleeved on the outer wall of the gas transmission mechanism 6, the annular cavity 702 is opened inside the outer rotating cylinder 701, and a plurality of friction balls 703 are movably arranged inside the annular cavity 702. The outer rotating cylinder 701 is connected to the driving mechanism 8.

[0058] As another embodiment of the present invention, an outer ring gear 704 is fixedly provided on one end of the outer wall of the outer drum 701 , and the output end of the driving mechanism 8 is meshedly connected to the outer ring gear 704 .

[0059] As another embodiment of the present invention, the driving mechanism 8 includes a servo motor 801, a driving shaft 802 and a driving tooth 803. The servo motor 801 is fixed on the inner wall of the top shell 5. One end of the driving shaft 802 is rotatably connected to the inner wall of the top shell 5. The other end of the driving shaft 802 is fixedly connected to the output end of the servo motor 801. The driving tooth 803 is fixedly sleeved on the outer wall of the driving shaft 802. The driving tooth 803 is meshed with the outer ring tooth 704.

[0060] When the driving mechanism 8 is in operation, it drives the outer rotating cylinder 701 connected thereto to rotate. Since the outer rotating cylinder 701 is rotatably sleeved on the outer wall of the gas delivery mechanism 6 , it can freely rotate relative to the gas delivery mechanism 6 .

[0061] The annular cavity 702 within the outer drum 701 provides space for the friction balls 703 to move. As the outer drum 701 rotates, the friction balls 703 within the annular cavity 702 continuously move and rub against each other under the influence of centrifugal force and mutual squeezing. This friction generates heat, initially generated by the friction balls 703. Because the friction balls 703 are in direct contact with the outer drum 701, the heat is transferred to the outer drum 701. Furthermore, because the outer drum 701 is mounted outside the premixing drum 601 and other components of the gas transmission mechanism 6, heat can be transferred from the outer drum 701 to the premixing drum 601, thereby heating the moisture adhering to the inner wall of the premixing drum 601, causing it to vaporize and evaporate, further removing the moisture.

[0062] As another embodiment of the present invention, the driving servo motor 801 drives the driving shaft 802 and the driving gear 803 to rotate, and the driving gear 803 engages the outer ring gear 704 to drive the outer rotating cylinder 701 to rotate. The rotation of the outer rotating cylinder 701 causes several friction balls 703 inside the annular cavity 702 to rub against each other to generate heat. The heat is generated by the friction balls 703 and conducted to the outer rotating cylinder 701, and then conducted from the outer rotating cylinder 701 to the premixing cylinder 601 to remove water attached to the inner wall of the premixing cylinder 601.

[0063] As another embodiment of the present invention, a diffusion disk assembly 401 is provided at the top of the reaction chamber 4. The diffusion disk assembly 401 is composed of a plurality of vertically arranged and gradually enlarged inverted cone disks 402. The plurality of inverted cone disks 402 are provided with air holes 403.

[0064] The bottom end of the diffusion disk assembly 401 is provided with a surrounding tube 404, the size of which is adapted to the size of the battery cell base;

[0065] The preheated and premixed gas is input into the reaction chamber 4 through the gas outlet pipe, and is evenly diffused into the surrounding tube 404 by a number of inverted cones 402 and air holes 403 to contact the battery cell substrate to form a front film layer.

[0066] When the gas strikes the inverted conical disk 402, its inclined surface prevents it from passing directly in a straight line. Instead, it diffuses along the surface of the disk 402. Simultaneously, the air holes 403 formed in the disk 402 further disperse the gas. The gas flows from the larger space into the smaller space through the air holes 403. During this process, the gas is further evenly dispersed into the space below the diffusion disk assembly 401. As the gas passes through multiple layers of the inverted conical disks 402, its dispersion becomes increasingly more uniform.

[0067] Surrounding tube 404 is located at the bottom of diffuser assembly 401 and is sized to match the cell substrate. After being evenly diffused by diffuser assembly 401, the gas flows downward into surrounding tube 404. Surrounding tube 404 serves to confine and guide the gas, allowing it to contact the cell substrate in a concentrated and uniform manner. Because the gas has already achieved good uniformity after diffusion through diffuser assembly 401, under the constraints of surrounding tube 404, it can contact the cell substrate in a stable and uniform state, forming a uniform and dense front-side film layer on the cell substrate, ensuring the quality and performance of the TOPCon cell's front-side film structure.

[0068] Example 2: This example provides a method for using a coating device for a TOPCon battery front film structure, comprising the following steps:

[0069] Step 1: Place the TOPCon cell to be coated on the conveyor mechanism 2. The conveyor mechanism 2 starts and smoothly conveys the cell to the output end of the lifting mechanism 3.

[0070] Step 2: The lifting mechanism 3 starts working, and its moving end rises and is precisely positioned with the reaction chamber 4, so that the bottom of the reaction chamber 4 fits tightly with the moving end of the lifting mechanism 3, creating a stable environment for the subsequent coating reaction;

[0071] Step 3: Start the motor to drive the inner drum 602 to rotate, and the inner drum 602 drives the spacer 603 to rotate synchronously. When the spacer 603 breaks away from the limit of the protrusion 607, the spacer 603 rotates and flips, realizing the segmented intake of trimethylaluminum gas and water vapor. Trimethylaluminum enters the inner cavity 604 of the premixing cylinder 601 through the air inlet 6011, and is then transported to the reaction chamber 4 through the air outlet 6012; water reacts chemically with the trimethylaluminum on the surface of the battery cell, combining to form an aluminum oxide layer. According to the above steps, trimethylaluminum gas is passed first, and then water vapor is passed, and this is repeated twice to successfully generate two layers of aluminum oxide on the surface of the battery cell.

[0072] Step 4: The rotation of the inner drum 602 drives the baffle 605 on the inner wall to rotate. The baffle 605 brings some of the steel balls 606 located inside the inner drum 602 to a high point. As the inner drum 602 continues to rotate, the steel balls 606 fall from the high point under the action of gravity and hit the inner wall of the inner drum 602. The vibration force generated by this impact shakes off the water attached to the outer wall of the inner drum 602, thereby achieving the effect of removing water attachment.

[0073] Step 5: After the trimethylaluminum monolayer on the cell surface is completely attached, the remaining trimethylaluminum in the reaction chamber 4 is extracted using an external exhaust device to prevent the residual gas from affecting subsequent reactions;

[0074] Step 6: The substrate coated with the aluminum oxide film remains in the reaction chamber 4, and silane, ammonia and nitrous oxide are introduced into the reaction chamber 4 through the gas delivery mechanism 6; at the same time, the servo motor 801 in the drive mechanism 8 is started to drive the drive shaft 802 and the drive gear 803 to rotate, and the drive gear 803 engages the outer ring gear 704 on the outer wall of the outer rotating cylinder 701 to rotate the outer rotating cylinder 701; the friction balls 703 in the inner ring cavity 702 of the outer rotating cylinder 701 rub against each other to generate heat, and the heat is conducted to the premixing cylinder 601, preheating the introduced gas and promoting the full fusion reaction of the gas in the reaction chamber 4;

[0075] Step 7: The silicon oxynitride particles generated by the reaction move within the reaction chamber 4 and, under the action of the diffusion disk assembly 401, evenly fall onto the alumina layer, gradually forming a silicon oxynitride film. The diffusion disk assembly 401 is composed of a number of vertically arranged and gradually increasing in size inverted cone disks 402. The air holes 403 on the inverted cone disks 402 evenly diffuse the gas, and the surrounding cylinder 404 guides the gas and particles to concentratedly and evenly contact the cell substrate, ensuring that the silicon oxynitride is evenly covered on the alumina layer and forms a thin film.

[0076] Step 8: After the silicon oxynitride film coating is completed, the moving end of the lifting mechanism 3 is lowered to take out the coated battery cell.

[0077] The embodiments disclosed in the present invention are preferred embodiments, but are not limited to them. Ordinary technicians in this field can easily understand the spirit of the present invention based on the above embodiments and make different extensions and changes. As long as they do not deviate from the spirit of the present invention, they are all within the scope of protection of the present invention.

Claims

1. A coating device for the front film structure of a TOPCon battery, characterized in that: The invention comprises a shell, wherein a conveying mechanism is provided in the shell, a lifting mechanism is provided in the shell near the output end of the conveying mechanism, a reaction chamber is provided in the shell at the top end of the lifting mechanism, a movable end of the lifting mechanism is adapted to the bottom end of the reaction chamber, a top shell is provided at the top end of the shell directly above the reaction chamber, a gas transmission mechanism is provided in the top shell, an air inlet end of the gas transmission mechanism is provided through the top shell, and an air outlet end of the gas transmission mechanism is connected to the reaction chamber, a grinding mechanism is further rotatably sleeved on the outer wall of the gas transmission mechanism, a driving mechanism is provided in the top shell near the gas transmission mechanism, and an output end of the driving mechanism is meshedly connected to the grinding mechanism; The gas delivery mechanism includes an inner drum, a spacer, a baffle, steel balls and a protrusion. One end of the inner drum is connected to the motor. The spacer is annular and evenly spaced and hingedly connected to the outer wall of the inner drum. The baffle is annular and evenly spaced and arranged on the inner wall of the inner drum. Several steel balls are movably arranged inside the inner drum. The protrusion is arranged on the inner wall of the premixing drum. The motor drives the inner drum to rotate and drives the spacer to rotate. When the spacer breaks away from the limit of the protrusion, the hinged spacer rotates and flips, so that the input gaseous precursor is intermittently blocked, forming a segmented air intake state. The rotation of the inner drum drives the baffle to rotate, and the baffle drives some steel balls to the highest point. The steel balls fall and hit the inner wall of the inner drum. The vibration force shakes off the water attached to the outer wall of the inner drum, achieving the effect of removing water attachment.

2. The coating equipment for the front film structure of a TOPCon battery according to claim 1, characterized in that: The gas delivery mechanism further includes a premixing cylinder and an inner cavity. The premixing cylinder is connected to the inner wall of the top shell. The inner rotating cylinder is rotatably inserted into the premixing cylinder. The inner cavity is opened inside the inner rotating cylinder.

3. The coating equipment for the front film structure of a TOPCon battery according to claim 2, characterized in that: The premixing cylinder is also provided with an air inlet and an air outlet. The air inlet is provided at a position of the premixing cylinder close to the back of the top shell, and the air outlet is provided on the protrusion. The air inlet is connected to the top shell through an air inlet pipe, and the air outlet is connected to the reaction chamber through an air outlet pipe. The air inlet is communicated with the air outlet.

4. The coating equipment for the front film structure of a TOPCon battery according to claim 3, characterized in that: Splitting plates are fixedly provided on the outer wall of the inner drum in an annular shape at equal intervals. One end of the spacer is hingedly connected to the splitting plate. The size and shape of the protrusion are adapted to the folded state of the spacer and the splitting plate.

5. The coating equipment for the front film structure of a TOPCon battery according to claim 4, characterized in that: The baffle is provided with an arc groove, and the arc groove is adapted to the steel ball.

6. The coating equipment for the front film structure of a TOPCon battery according to claim 5, characterized in that: The grinding mechanism includes an outer rotating cylinder, an annular cavity and friction balls. The outer rotating cylinder is rotatably sleeved on the outer wall of the gas transmission mechanism. The annular cavity is opened inside the outer rotating cylinder. Several friction balls are movably arranged inside the annular cavity. The outer rotating cylinder is connected to the driving mechanism.

7. The coating equipment for the front film structure of a TOPCon battery according to claim 6, characterized in that: An outer ring gear is fixedly provided at one end of the outer wall of the outer drum, and the output end of the driving mechanism is meshedly connected to the outer ring gear.

8. The coating equipment for the front film structure of a TOPCon battery according to claim 7, characterized in that: The driving mechanism includes a servo motor, a driving shaft and driving teeth. The servo motor is fixed on the inner wall of the top shell. One end of the driving shaft is rotatably connected to the inner wall of the top shell. The other end of the driving shaft is fixedly connected to the output end of the servo motor. The driving teeth are fixedly sleeved on the outer wall of the driving shaft, and the driving teeth are meshed with the outer ring teeth.

9. The coating equipment for the front film structure of a TOPCon battery according to claim 8, characterized in that: The servo motor is driven to rotate the drive shaft and the drive gear. The drive gear engages with the outer ring gear to drive the outer drum to rotate. The rotation of the outer drum causes several friction balls inside the ring cavity to rub against each other to generate heat. The heat is generated by the friction balls and is transferred to the outer drum, and then transferred from the outer drum to the premixing drum to remove water attached to the inner wall of the premixing drum.

10. The coating equipment for the front film structure of a TOPCon battery according to claim 9, characterized in that: A diffusion disk group is provided at the top of the reaction chamber. The diffusion disk group is composed of a plurality of inverted cone disks arranged vertically and gradually becoming larger. Air holes are opened on the plurality of inverted cone disks. The bottom end of the diffusion disk group is provided with a surrounding tube, the size of which is adapted to the size of the battery cell base; The preheated and premixed gas is input into the reaction chamber through the gas outlet pipe, and is evenly diffused into the surrounding tube by a number of inverted cones and air holes to contact the battery cell substrate to form a front film layer.

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