Method and device for detecting air pressure in vacuum packaging electric field sensor

Abstract

The invention provides a method and device for detecting air pressure in a vacuum packaging electric field sensor, and the method comprises the steps: obtaining a current quality factor value of the electric field sensor in a current set air pressure value state; and checking the current quality factor value and the current set air pressure value to judge whether the current set air pressure value is the same as the current air pressure value in the electric field sensor or not, and feeding back a judgment result to a packaging process production line. By verifying the current quality factor value and the current set air pressure value of the electric field sensor, the current air pressure value in the electric field sensor can be obtained, so that whether the current electric field sensor meets the vacuum packaging requirement or not is judged, and good products and inferior-quality products are distinguished.

Description

Technical Field

[0001] The present invention relates to an air pressure detection method, in particular to an air pressure detection method and a detection device inside a vacuum-packaged electric field sensor. Background Art

[0002] Electric field sensors are widely used in aerospace, meteorology, electricity, industrial production and many other fields, and play an important role in security and scientific research.

[0003] During packaging, the interior of the electric field sensor is evacuated. However, a certain amount of air pressure still exists within the packaged sensor. If the air pressure exceeds the specified requirement, it will inevitably affect the actual application of the electric field sensor. Therefore, whether the air pressure in the electric field sensor meets the packaging requirements is one of the conditions that determine whether the electric field sensor can accurately and stably measure the electric field in practical applications.

[0004] However, after the electric field sensor completes the vacuum packaging process, it is inconvenient to detect the internal air pressure value, resulting in an inability to determine whether the air pressure value inside the packaged electric field sensor meets the packaging requirements, and it is impossible to distinguish between good and defective products.

[0005] Therefore, how to know the air pressure value inside the packaged electric field sensor to determine whether the electric field sensor meets the vacuum packaging requirements is a technical problem that needs to be solved urgently. Summary of the Invention

[0006] In response to the shortcomings of the above problems, the present invention provides a method and device for detecting the air pressure inside a vacuum-packaged electric field sensor, which can obtain the current air pressure value inside the electric field sensor to determine whether the current electric field sensor meets the vacuum packaging requirements.

[0007] To achieve the above objectives, in a first aspect, the present invention provides a method for detecting air pressure inside a vacuum-packaged electric field sensor, comprising the following steps:

[0008] Get the current quality factor value of the electric field sensor under the current set air pressure value;

[0009] The current quality factor value and the current set air pressure value are verified to determine whether the current set air pressure value is the same as the current air pressure value inside the electric field sensor, and the judgment result is fed back to the packaging process production line.

[0010] In one embodiment, obtaining a current quality factor value of the electric field sensor under a current set air pressure value includes:

[0011] Place the electric field sensor in the tooling part and evacuate the air until the pressure inside the tooling part reaches the currently set value.

[0012] The tooling part inputs the received sweep frequency signal into the electric field sensor and outputs the amplitude signal processed by the electric field sensor;

[0013] parsing the amplitude signal according to a first preset condition, aggregating the obtained plurality of first amplitude response values into a first amplitude response value set, generating a corresponding first waveform image according to the first amplitude response value set, and obtaining a peak interval amplitude signal corresponding to the peak interval from the first waveform image;

[0014] Analyzing the peak interval amplitude signal according to a second preset condition, summarizing the obtained multiple second amplitude response values into a second amplitude response value set, and generating a corresponding second waveform image according to the second amplitude response value set;

[0015] The resonance amplitude and the passband bandwidth are determined according to the second waveform image and the second amplitude response value set to obtain a current quality factor value of the electric field sensor.

[0016] In one embodiment, placing the electric field sensor in the tooling portion and evacuating the tooling portion until the interior of the tooling portion reaches a currently set air pressure value includes:

[0017] The currently set air pressure value is an air pressure value that is required to be reached inside the electric field sensor after packaging, or an air pressure value that is required when the interior of the electric field sensor is vacuumed during the packaging process.

[0018] In one embodiment, determining the resonance amplitude and the passband bandwidth value according to the second waveform image and the second amplitude response value set, and obtaining the current quality factor value of the electric field sensor, includes the following steps:

[0019] Determining a resonance amplitude peak value U0, a resonance amplitude first value U1, and a resonance amplitude final value U2 from the second waveform image and the second amplitude response value set;

[0020] Determine the resonance amplitude f0 according to the resonance amplitude peak value U0;

[0021] The corresponding response value U is determined by the first value U1 of the resonance amplitude and the final value U2 of the resonance amplitude. L and the corresponding response value U H ;

[0022] The corresponding response value U L The corresponding response value U H Determine the corresponding amplitude f respectively L and the corresponding amplitude f H ;

[0023] The current quality factor value of the current electric field sensor is obtained using the following formula:

[0024]

[0025] Among them, Q is the current quality factor value, f0 is the resonance amplitude, f L is the corresponding amplitude, f H is the corresponding amplitude, f H -f L is the passband bandwidth value.

[0026] In one embodiment, the corresponding response value U is determined by the first value U1 of the resonance amplitude and the final value U2 of the resonance amplitude. L and the corresponding response value U H Including:

[0027] Use the following formula to obtain the corresponding response value U L :

[0028]

[0029] Among them, U0 is the peak value of the resonance amplitude, and U1 is the first value of the resonance amplitude;

[0030] Use the following formula to obtain the corresponding response value U H :

[0031]

[0032] Among them, U0 is the peak value of the resonance amplitude, and U2 is the end value of the resonance amplitude.

[0033] In one embodiment, the verification of the current quality factor value and the current set air pressure value to determine whether the current set air pressure value is the same as the current air pressure value inside the electric field sensor, and feeding back the determination result to the packaging process production line, includes the following two cases:

[0034] Case 1:

[0035] The current set air pressure value includes a set of quality factor values corresponding thereto. When it is determined that the quality factor value set includes the current quality factor value, it is determined that the current set air pressure value is the same as the current air pressure value inside the electric field sensor, and the determination result is fed back to the packaging process production line.

[0036] Case 2:

[0037] The current set air pressure value includes a quality factor value set corresponding thereto, and when it is determined that the quality factor value set does not include the current quality factor value, it is determined that the current set air pressure value is different from the air pressure value inside the current electric field sensor;

[0038] After determining a corresponding air pressure value corresponding to the quality factor value set according to the current quality factor value, determining the corresponding air pressure value as the current air pressure value inside the electric field sensor;

[0039] The difference between the current set air pressure value and the corresponding air pressure value is calculated and fed back to the packaging process production line.

[0040] In a second aspect, the present invention further provides a detection device for implementing the above-mentioned method for detecting air pressure inside a vacuum-encapsulated electric field sensor, comprising: at least one tooling portion, a vacuum pumping device, a signal input portion, and a processing device, wherein:

[0041] The tooling portion includes a sealed container and a test tool, wherein the sealed container is used to accommodate the test tool with the electric field sensor placed therein, and the test tool inputs the power supply signal and the sweep signal output by the signal input portion into the electric field sensor, and outputs an amplitude signal processed by the electric field sensor;

[0042] The vacuuming device is connected to the sealed container and the processing equipment, and vacuums the interior of the sealed container until the pressure reaches the current set pressure value input by the processing equipment;

[0043] The processing device analyzes the amplitude signal according to preset conditions, and calculates the current quality factor value of the electric field sensor based on the obtained resonance amplitude and passband bandwidth value, and determines whether the current set air pressure value is the same as the air pressure value inside the current electric field sensor based on the correspondence between the current quality factor value and the current set air pressure value.

[0044] In one embodiment, the processing device includes a control module, a first analysis module, a first waveform generation module, a second analysis module, a second waveform generation module, a calculation module, and a memory, wherein:

[0045] The control module is configured to input a control signal to the signal input portion to control the signal input portion to generate and output the sweep signal, and to input the current set air pressure value to the vacuum device;

[0046] The first analyzing module is configured to analyze the amplitude signal inputted by the tooling part according to a first preset condition, and aggregate the obtained multiple first amplitude response values into a first amplitude response value set;

[0047] The first waveform image generating module is configured to generate a corresponding first waveform image according to the first amplitude response value set, and determine a peak interval amplitude signal corresponding to a peak interval from the first waveform image;

[0048] The second analyzing module is configured to analyze the peak interval amplitude signal according to a second preset condition, and aggregate the obtained multiple second amplitude response values into a second amplitude response value set;

[0049] The second waveform image generating module is configured to generate a corresponding second waveform image according to the second amplitude response value set;

[0050] The calculation module is configured to determine a resonance amplitude and a passband bandwidth value based on the second waveform image and the second amplitude response value set, obtain a current quality factor value of the electric field sensor, and determine whether the current set air pressure value is the same as the current air pressure value inside the electric field sensor based on a correspondence between the current quality factor value and the current set air pressure value;

[0051] The memory stores a plurality of air pressure values and a set of quality factor values corresponding to each air pressure value.

[0052] Compared with the prior art, the present invention has one of the following advantages:

[0053] By verifying the current quality factor value of the electric field sensor with the current set air pressure value, the current air pressure value inside the electric field sensor can be obtained to determine whether the current electric field sensor meets the vacuum packaging requirements, thereby distinguishing good products from defective products. BRIEF DESCRIPTION OF THE DRAWINGS

[0054] Figure 1 Flow chart of the detection method of the present invention;

[0055] Figure 2 A first waveform image formed based on a first amplitude response value set;

[0056] Figure 3 A second waveform image formed based on a second amplitude response value set;

[0057] Figure 4 This is a schematic diagram of a first embodiment of the testing device of the present invention;

[0058] Figure 5 for Figure 4 Schematic diagram of the signal source;

[0059] Figure 6 for Figure 4 Top view of the test fixture;

[0060] Figure 7 for Figure 6 Schematic diagram of the state change of the test tooling;

[0061] Figure 8 for Figure 7 Enlarged view of part A;

[0062] Figure 9 for Figure 6 A three-dimensional image of the test fixture in the open state.

[0063] The main reference numerals are as follows:

[0064] 1-test tooling; 100-upper cover; 101-pressing block; 102-elastic buckle; 110-lower cover; 111-placement slot; 112-through hole; 113-probe; 114-first axis; 115-spring; 116-second axis; 2-sealed cavity; 3-vacuum pump; 4-processing equipment; 5-signal input part; 6-power supply; 7-signal source; 701-DC power supply; 702-AC power supply; 8-circuit board; 800-terminal block; 9-communication interface; 10-processor; 11-memory; 12-bus system; 13-placement structure. DETAILED DESCRIPTION

[0065] To make the objectives, technical solutions, and advantages of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0066] In the description of the present invention, it should be understood that the terms "upper", "lower", "top surface", "bottom surface", "inside", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. It should be noted that when a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be a centrally arranged component at the same time. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0067] Example 1

[0068] like Figure 1 As shown, this embodiment provides a method for detecting air pressure inside a vacuum-packaged electric field sensor, comprising the following steps:

[0069] S1. Obtain the current quality factor value of the electric field sensor under the current set air pressure value;

[0070] S2. Verify the current quality factor value and the current set air pressure value to determine whether the current set air pressure value is the same as the current air pressure value inside the electric field sensor, and feed back the determination result to the packaging process production line.

[0071] Specifically, in step S1, the following steps are included:

[0072] S101, placing the electric field sensor in the tooling part, and evacuating the tooling part until the interior of the tooling part reaches the currently set air pressure value;

[0073] S102, the tooling part inputs the received sweep frequency signal into the electric field sensor and outputs the amplitude signal processed by the electric field sensor;

[0074] S103: analyzing the amplitude signal according to the first preset condition, summarizing the obtained multiple first amplitude response values into a first amplitude response value set, generating a corresponding first waveform image according to the first amplitude response value set, and obtaining a peak interval amplitude signal corresponding to the peak interval from the first waveform image;

[0075] S104, analyzing the peak interval amplitude signal according to the second preset condition, summarizing the obtained multiple second amplitude response values into a second amplitude response value set, and generating a corresponding second waveform image according to the second amplitude response value set;

[0076] S105 : Determine a resonance amplitude and a passband bandwidth value according to the second waveform image and the second amplitude response value set to obtain a current quality factor value of the electric field sensor.

[0077] Furthermore, in step S101 , the currently set air pressure value may be an air pressure value required to be reached inside the electric field sensor after packaging, or an air pressure value required when the interior of the electric field sensor is vacuumed during the packaging process.

[0078] Preferably, the current set air pressure value is the air pressure value required to be reached inside the packaged electric field sensor. This design makes it easier to determine the current air pressure value inside the electric field sensor to determine whether the current electric field sensor meets the vacuum packaging requirements.

[0079] Furthermore, in step S102, the following steps are included:

[0080] S1021, the tooling part inputs the power supply signal and the sweep frequency signal output by the signal source and the power supply into the electric field sensor respectively;

[0081] S1022: After the electric field sensor is in a working state through the power supply signal, it processes the frequency sweep signal to output an amplitude signal.

[0082] Furthermore, in step S103, it includes:

[0083] S1031, a first analyzing module analyzes the input amplitude signal according to a preset amplitude range and a preset amplitude step value to obtain a plurality of first amplitudes;

[0084] S1032. deriving corresponding first amplitude response values according to each first amplitude;

[0085] S1033, aggregating the plurality of first amplitude response values into a first amplitude response value set according to the analytical order;

[0086] S1034: Input the first amplitude response value set into the first waveform image generation module, mark corresponding anchor points in the coordinate graph according to the multiple first amplitude response values in the first amplitude response value set, and connect the multiple anchor points to form a first waveform image (see Figure 2 );

[0087] S1035 . In the first waveform image, obtain a corresponding peak interval amplitude signal according to the peak interval.

[0088] Furthermore, in step S1032, when the corresponding first amplitude response value is obtained based on each first amplitude value, each first amplitude value includes a corresponding first amplitude response value set, and the first amplitude response value set includes multiple first amplitude response values. The obtained first amplitude response value may be an average of the multiple first amplitude response values (i.e., a first amplitude average response value), or the obtained first amplitude response value may be a first amplitude response value randomly selected from the first amplitude response value set.

[0089] Furthermore, in step S104, it includes:

[0090] S1041: A second analyzing module analyzes the peak interval amplitude signal according to the amplitude range of the peak interval amplitude signal and a preset amplitude step value to obtain a plurality of second amplitudes;

[0091] S1042. deriving corresponding second amplitude response values according to each second amplitude;

[0092] S1043, aggregating the plurality of second amplitude response values into a second amplitude response value set according to the analytical order;

[0093] S1044: Input the second amplitude response value set into the second waveform image generation module, mark corresponding anchor points in the coordinate graph according to the plurality of second amplitude response values, and connect the plurality of anchor points to form a second waveform image (see Figure 3 ).

[0094] Furthermore, in step S1042, when the corresponding second amplitude response value is obtained based on each second amplitude value, each second amplitude value includes a corresponding second amplitude response value set, and the second amplitude response value set includes multiple second amplitude response values. The obtained second amplitude response value may be an average of the multiple second amplitude response values (i.e., a second amplitude average response value), or the obtained second amplitude response value may be a second amplitude response value randomly selected from the second amplitude response value set.

[0095] Specifically, in step S105, the following steps are included:

[0096] S1051, determining a resonance amplitude peak value U0, a resonance amplitude first value U1, and a resonance amplitude final value U2 from the second waveform image and the second amplitude response value set;

[0097] S1052, determining the resonance amplitude f0 from the resonance amplitude peak value U0;

[0098] S1053, determine the corresponding response value U according to the first value U1 of the resonance amplitude and the final value U2 of the resonance amplitude L and the corresponding response value U H ;

[0099] S1054, by the corresponding response value U L and the corresponding response value U H Determine the corresponding amplitude f respectively L and the corresponding amplitude f H ;

[0100] S1055. Obtain the current quality factor value of the current electric field sensor using the following formula:

[0101]

[0102] Among them, Q is the current quality factor value, f0 is the resonance amplitude, f L is the corresponding amplitude, f H is the corresponding amplitude, f H -f L is the passband bandwidth value.

[0103] Furthermore, in step S1053, the corresponding response value U is obtained according to the resonance amplitude peak value U0 and the resonance amplitude initial value U1 using the following formula: L :

[0104]

[0105] According to the peak value of the resonance amplitude U0 and the end value of the resonance amplitude U2, the corresponding response value U is obtained using the following formula: H :

[0106]

[0107] In this embodiment, see Figure 3The second waveform image is generated based on each second amplitude response value in the second amplitude response value set. The resonance amplitude peak value U0 is the peak value in the second waveform image (i.e., the maximum value in the second amplitude response value set), the resonance amplitude first value U1 is the value closest to "0" on the first side of the peak value in the second waveform image, and the resonance amplitude end value U2 is the value closest to "0" on the other side of the peak value in the second waveform image. The corresponding response value U L The middle value of the first curve from the first value U1 of the resonance amplitude to the peak value U0 of the resonance amplitude in the second waveform image, corresponding to the response value U H The middle value of the second curve from the first value U1 of the resonance amplitude to the peak value U0 of the resonance amplitude in the second waveform image. The resonance amplitude f0 is the value perpendicular to the peak value U0 of the resonance amplitude in the horizontal coordinate axis, corresponding to the amplitude f L is the horizontal coordinate axis perpendicular to the corresponding response value U L The value of the corresponding amplitude f H is the horizontal coordinate axis perpendicular to the corresponding response value U H The value of .

[0108] Specifically, in step S2, there are the following two situations:

[0109] Case 1:

[0110] The current set air pressure value includes a set of quality factor values corresponding thereto. When it is determined that the quality factor value set includes the current quality factor value, it is determined that the current set air pressure value is the same as the current air pressure value inside the electric field sensor, and the determination result is fed back to the packaging process production line.

[0111] Case 2:

[0112] The current set air pressure value includes a quality factor value set corresponding thereto, and when it is determined that the quality factor value set does not include the current quality factor value, it is determined that the current set air pressure value is different from the air pressure value inside the current electric field sensor;

[0113] After determining a corresponding air pressure value corresponding to the quality factor value set according to the current quality factor value, determining the corresponding air pressure value as the current air pressure value inside the electric field sensor;

[0114] The difference between the current set air pressure value and the corresponding air pressure value is calculated and fed back to the packaging process production line.

[0115] In this embodiment, step S103 illustratively includes:

[0116] The amplitude signal is analyzed according to a preset amplitude range (the preset amplitude range is 0Hz-10Hz) and a preset amplitude step value (the preset amplitude step value is 0.5Hz) to obtain 21 first amplitudes (0Hz, 0.5Hz, 1Hz, 1.5Hz, 2Hz, 2.5Hz, 3Hz, 3.5Hz, 4Hz, 4.5Hz, 5Hz, 5.5Hz, 6Hz, 6.5Hz, 7Hz, 7.5Hz, 8Hz, 8.5Hz, 9Hz, 9.5Hz, 10Hz);

[0117] According to the above 21 first amplitudes, 21 first amplitude response values are respectively obtained (0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 2V, 6V, 4V, 1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V);

[0118] Summarize the 21 first amplitude response values into a first amplitude response value set ({0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 2V, 6V, 4V, 1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V}) in the analytical order;

[0119] Input the first amplitude response value set {0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 2V, 6V, 4V, 1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V} into a first waveform graph generation module, and mark 21 corresponding anchor points in the coordinate graph according to the 21 first amplitude response values;

[0120] Connect the above 21 anchor points to form the first waveform image (see Figure 2 ).

[0121] In this embodiment, in step S104, illustratively, the first waveform image (see Figure 2 ), the peak interval amplitude signal corresponding to the peak area is 4.5Hz-7Hz.

[0122] In this embodiment, step S104 illustratively includes:

[0123] The peak interval amplitude signal (whose amplitude range is 4.5 Hz-7 Hz) is analyzed according to the preset amplitude step value (the preset amplitude step value is 0.1 Hz) to obtain 26 second amplitudes (4.5 Hz, 4.6 Hz, 4.7 Hz, 4.8 Hz, 4.9 Hz, 5 Hz, 5.1 Hz, 5.2 Hz, 5.3 Hz, 5.4 Hz, 5.5 Hz, 5.6 Hz, 5.7 Hz, 5.8 Hz, 5.9 Hz, 6 Hz, 6.1 Hz, 6.2 Hz, 6.3 Hz, 6.4 Hz, 6.5 Hz, 6.6 Hz, 6.7 Hz, 6.8 Hz, 6.9 Hz, 7 Hz);

[0124] According to the above 26 second amplitudes, 26 second amplitude response values (0.5V, 0.8V, 1V, 1.2V, 1.6V, 1.8V, 2V, 2.1V, 2.6V, 4V, 6V, 6.3V, 7.2V, 7.6V, 8V, 10V, 14V, 11V, 9V, 7.5V, 7.3V, 6V, 5V, 4.5V, 4.2V, 3V) are respectively obtained;

[0125] Summarize the 26 second amplitude response values into a second amplitude response value set ({0.5V, 0.8V, 1V, 1.2V, 1.6V, 1.8V, 2V, 2.1V, 2.6V, 4V, 6V, 6.3V, 7.2V, 7.6V, 8V, 10V, 14V, 11V, 9V, 7.5V, 7.3V, 6V, 5V, 4.5V, 4.2V, 3V}) in the analytical order;

[0126] Input the second amplitude response value set {0.5V, 0.8V, 1V, 1.2V, 1.6V, 1.8V, 2V, 2.1V, 2.6V, 4V, 6V, 6.3V, 7.2V, 7.6V, 8V, 10V, 14V, 11V, 9V, 7.5V, 7.3V, 6V, 5V, 4.5V, 4.2V, 3V} into the second waveform graph generation module, and mark 26 corresponding anchor points in the coordinate graph according to the 26 second amplitude response values;

[0127] Connect the above 26 anchor points to form a second waveform image (see Figure 3 ).

[0128] In this embodiment, in step S105, for example, the resonance amplitude peak value U0 is the peak anchor point in the second waveform image (i.e., the value 14), the resonance amplitude first value U1 is the first anchor point closest to "0" on the first side of the peak anchor point in the second waveform image (i.e., the value 0.5), and the resonance amplitude first value U2 is the 26th anchor point closest to "0" on the other side of the peak anchor point in the second waveform image (i.e., the value 3). The corresponding response value U is obtained based on the resonance amplitude peak value U0 (i.e., the value 14) and the resonance amplitude first value U1 (i.e., the value 0.1). L , according to the resonance amplitude peak value U0 (ie, value 14) and the resonance amplitude first value U2 (ie, value 3), the corresponding response value U is obtained. H , the resonance amplitude f0 is the value perpendicular to the resonance amplitude peak U0 in the transverse coordinate axis, corresponding to the amplitude f L is the horizontal coordinate axis perpendicular to the corresponding response value U L The value of the corresponding amplitude f H is the horizontal coordinate axis perpendicular to the corresponding response value U H The current quality factor value Q is based on the resonant amplitude f0 and the passband bandwidth value f H -f L The absolute value of the obtained value.

[0129] In this embodiment, in step S2, illustratively, case 1:

[0130] According to the specific implementation steps in step S1, the current quality factor value of the electric field sensor is obtained (i.e., 451.5). The current set air pressure value is the air pressure value required to be reached internally by the packaged electric field sensor (i.e., 10Pa). The quality factor value set corresponding to the current set air pressure value (i.e., 10Pa) is {445-455}. Based on the current quality factor value (i.e., 451.5), it can be seen that the quality factor value set {445-455} includes the current quality factor value (i.e., 451.5). It is determined that the current set air pressure value (i.e., 10Pa) is the same as the air pressure value (i.e., 10Pa) inside the current electric field sensor, and it is determined that the current electric field sensor meets the packaging requirements. The determination result is fed back to the packaging process production line.

[0131] Case 2:

[0132] According to the specific implementation steps in step S1, the current quality factor value of the electric field sensor is obtained (i.e., 463.5). The current set air pressure value is the air pressure value required to be reached internally by the packaged electric field sensor (i.e., 10 Pa). The quality factor value set corresponding to the current set air pressure value (i.e., 10 Pa) is {445-455}. Based on the current quality factor value (i.e., 451.5), it can be seen that the quality factor value set {445-455} does not include the current quality factor value (i.e., 451.5), and it is determined that the current set air pressure value (i.e., 10 Pa) is different from the current air pressure value inside the electric field sensor.

[0133] In the memory, the current quality factor value (i.e., 451.5) is matched with other quality factor value sets. After finding the corresponding quality factor value set {462-465} that includes the current quality factor value (i.e., 463.5), the corresponding air pressure value (i.e., 12 Pa) corresponding to the corresponding quality factor value set {456-465} is determined to obtain the current air pressure value inside the electric field sensor (i.e., 12 Pa), and it is determined that the current electric field sensor does not meet the packaging requirements.

[0134] The difference between the current set air pressure value (i.e., 10Pa) and the current air pressure value inside the electric field sensor (i.e., 12Pa) is obtained (i.e., 2Pa), and the difference of 2Pa required by the packaging is fed back to the packaging process production line.

[0135] Example 2

[0136] like Figures 4 to 9 As shown, this embodiment provides a device for implementing the air pressure detection method inside the vacuum-encapsulated electric field sensor in the above-mentioned embodiment 1, including: at least one tooling part, a vacuum pumping device 3, a signal input part 5 and a processing device 4, wherein:

[0137] The tooling part includes a sealed container 2 and a test tool 1. The sealed container 2 is used to accommodate the test tool 1 with the electric field sensor placed therein. The test tool 1 inputs the power supply signal and the sweep frequency signal output by the signal input part 5 into the electric field sensor, and outputs the amplitude signal processed by the electric field sensor.

[0138] The vacuuming device 3 is connected to the sealed container 2 and the processing equipment 4, and vacuums the interior of the sealed container 2 until the pressure reaches the current set pressure value input by the processing equipment 4;

[0139] The processing device 4 analyzes the amplitude signal according to preset conditions, and calculates the current quality factor value of the electric field sensor based on the obtained resonance amplitude and bandwidth value, and determines whether the current set air pressure value is the same as the air pressure value inside the current electric field sensor based on the correspondence between the current quality factor value and the current set air pressure value.

[0140] Specifically, the testing fixture 1 includes a placement structure 9 and a circuit board 8 , wherein the circuit board 8 is fixed to the bottom end surface of the placement structure 9 by screws and is electrically connected to the placement structure 9 .

[0141] Specifically, the placement structure 9 includes an upper cover 100 and a lower cover 110 that are rotatably connected, wherein:

[0142] A placement groove 111 for accommodating the vacuum-sealed electric field sensor is formed on the top end surface of the lower cover 110, and a plurality of through-holes 112 are formed on the bottom end surface of the placement groove 111. A plurality of probes 113 are provided inside the lower cover 110. The upper ends of the probes 113 are positioned corresponding to the positions of the through-holes 112 and extend into the through-holes 112. The lower ends of the probes 113 penetrate the bottom end surface of the upper cover 100 and connect to the circuit board 8. When the electric field sensor is placed in the placement groove 111, the solder joints extending to the outside of the bottom end surface of the electric field sensor are embedded in the through-holes 112. The electric field sensor is connected to the circuit board 8 via the solder joints, through-holes 112, and probes 113.

[0143] A pressing block 101 is formed on the bottom end surface of the upper cover 100 and extends to the area below the upper cover 100 and corresponds to the placement groove 111 .

[0144] When the electric field sensor is placed in the placement groove 111, the upper cover body 100 is buckled onto the top end surface of the lower cover body 110, and a portion of the pressing block 101 is placed in the placement groove 111 and contacts the top end surface of the electric field sensor to fix the electric field sensor in the placement groove 111, thereby ensuring the connection performance of each solder joint and each probe 113 and improving the stability of signal transmission.

[0145] Furthermore, the end of the upper cover 100 and the end of the lower cover 110 are rotatably connected via a first shaft 114. A spring 115 is sleeved on the shaft to facilitate the opening and closing of the upper cover 100 and the lower cover 110. One end of the spring 115 contacts the upper cover 100, and the other end of the spring 115 contacts the lower cover 110.

[0146] An elastic buckle 102 is provided on the front end of the upper cover 100, and a second shaft 116 is provided on the front end of the lower cover 110 to mate with the elastic buckle 102. When the upper cover 100 and the lower cover 110 are closed, when the lower end of the elastic buckle 102 contacts the second shaft 116, the upper cover 100 and the lower cover 110 are secured. When the lower end of the elastic buckle 102 separates from the second shaft 116, the upper cover 100 and the lower cover 110 open under the action of the spring 115.

[0147] Specifically, the wiring terminal 200 is solidified on the circuit board 8, and the external signal source 75 and the power supply 64 are connected to the wiring terminal 200 via lines, so that the power supply signal and the sweep frequency signal are input to the placement structure 9 through the circuit board 8.

[0148] In this embodiment, the electric field sensor is fixed within the placement slot 111 in the lower cover 110 and connected to the circuit board 8 via the probe 113. A power supply signal is input to the placement structure 9 via the circuit board 8, causing the electric field sensor to enter an operating state. A sweep signal is input to the placement structure 9 via the circuit board 8, causing the electric field sensor to process the sweep signal to form an amplitude signal.

[0149] Specifically, the signal input part 5 includes a power supply 6 and a signal source 7, and the signal source 7 includes a DC power supply 701 and an AC power supply 702, wherein the DC power supply 701 outputs a constant voltage signal, and the AC power supply 702 outputs an alternating voltage signal within a set range under the control of the control signal input by the processing device 4. The constant voltage signal and the alternating voltage signal are combined to form a sweep frequency signal of the input electric field sensor.

[0150] Specifically, the processing device 4 includes a control module, a first analysis module, a first waveform generation module, a second analysis module, a second waveform generation module, a calculation module and a memory, wherein:

[0151] The control module is used to input a control signal to the signal input part 5 to control the signal source 7 in the signal input part 5 to generate and output a sweep frequency signal. At the same time, the control module also inputs the current set air pressure value to the vacuum device 3, so that the vacuum device 3 evacuates the interior of the tooling part until the current set air pressure value is reached;

[0152] The first analysis module executes the specific implementation steps in the above steps S1031 to S1033, and is used to analyze the amplitude signal input by the tooling part according to the first preset condition, and summarize the obtained multiple first amplitude response values into a first amplitude response value set;

[0153] The first waveform image generating module executes the specific implementation steps in the above-mentioned step S1034 and step S1035 to generate a corresponding first waveform image according to the first amplitude response value set, and determines the peak interval amplitude signal corresponding to the peak interval from the first waveform image;

[0154] The second analyzing module executes the specific implementation steps in the above steps S1041 to S1043, and is used to analyze the peak interval amplitude signal according to the second preset condition, and summarize the obtained multiple second amplitude response values into a second amplitude response value set;

[0155] The second waveform image generating module executes the specific implementation steps in the above step S1044 to generate a corresponding second waveform image according to the second amplitude response value set;

[0156] The calculation module executes the specific implementation steps in the above steps S1051 to S1055 to determine the resonance amplitude and the passband bandwidth value according to the second waveform image and the second amplitude response value set, and obtain the current quality factor value of the electric field sensor;

[0157] In addition, the calculation module also performs the specific implementation steps in the above step S2 to verify the current quality factor value and the current set air pressure value to determine whether the current set air pressure value is the same as the current air pressure value inside the electric field sensor, and feeds back the determination result to the packaging process production line;

[0158] The memory stores a plurality of air pressure values and a set of quality factor values corresponding to each air pressure value.

[0159] Specifically, the vacuuming device 3 receives the current set air pressure value input by the control module, so that the vacuuming device 3 vacuums the interior of the tooling part until the current set air pressure value is reached.

[0160] Preferably, the currently set air pressure value is the air pressure value required to be reached internally by the packaged electric field sensor. Therefore, after the vacuum operation is completed, it is preliminarily determined that the air pressure value in the sealed cavity is the same as the air pressure value required to be reached internally by the packaged electric field sensor.

[0161] In addition, in the first and second embodiments, preferably, the processing device 4 is a computer.

[0162] In addition, in the first and second embodiments, the control module, the first analysis module, the first waveform generation module, the second analysis module, the second waveform generation module, the calculation module, and the memory are integrated to form a processing model disposed in the processing device 4. The processing model performs the aforementioned processing on the amplitude signal input by the electric field sensor to obtain the current quality factor value of the current electric field sensor. Furthermore, the current quality factor value can be used to verify whether the current electric field sensor meets vacuum packaging requirements.

[0163] In the above-mentioned first and second embodiments, the quality factor value is preferably a sensitivity value, and the quality factor value set is preferably a sensitivity value set.

[0164] The above description is merely a preferred embodiment of the present invention and is intended to be illustrative rather than restrictive of the present invention. Those skilled in the art will appreciate that many changes, modifications, and even equivalents may be made to the present invention within the spirit and scope of the claims, all of which fall within the scope of protection of the present invention.

Claims

1. A method for detecting air pressure inside a vacuum-encapsulated electric field sensor, characterized in that: The following steps are involved: Get the current quality factor value of the electric field sensor under the current set air pressure value; The current quality factor value and the current set air pressure value are verified to determine whether the current set air pressure value is the same as the current air pressure value inside the electric field sensor, and the judgment result is fed back to the packaging process production line.

2. The method for detecting air pressure inside a vacuum-encapsulated electric field sensor according to claim 1, wherein: The step of obtaining the current quality factor value of the electric field sensor under the current set air pressure value includes: Place the electric field sensor in the tooling part and evacuate the air until the pressure inside the tooling part reaches the currently set value. The tooling part inputs the received sweep frequency signal into the electric field sensor and outputs the amplitude signal processed by the electric field sensor; parsing the amplitude signal according to a first preset condition, aggregating the obtained plurality of first amplitude response values into a first amplitude response value set, generating a corresponding first waveform image according to the first amplitude response value set, and obtaining a peak interval amplitude signal corresponding to the peak interval from the first waveform image; Analyzing the peak interval amplitude signal according to a second preset condition, summarizing the obtained multiple second amplitude response values into a second amplitude response value set, and generating a corresponding second waveform image according to the second amplitude response value set; The resonance amplitude and the passband bandwidth are determined according to the second waveform image and the second amplitude response value set to obtain a current quality factor value of the electric field sensor.

3. The method for detecting air pressure inside a vacuum-encapsulated electric field sensor according to claim 2, wherein: Placing the electric field sensor in the tooling part and evacuating the tooling part until the interior of the tooling part reaches the currently set air pressure value includes: The currently set air pressure value is an air pressure value that is required to be reached inside the electric field sensor after packaging, or an air pressure value that is required when the interior of the electric field sensor is vacuumed during the packaging process.

4. The method for detecting air pressure inside a vacuum-encapsulated electric field sensor according to claim 3, wherein: The process of determining the resonance amplitude and the passband bandwidth value according to the second waveform image and the second amplitude response value set, and obtaining the current quality factor value of the electric field sensor, includes the following steps: Determining a resonance amplitude peak value U0, a resonance amplitude first value U1, and a resonance amplitude final value U2 from the second waveform image and the second amplitude response value set; Determine the resonance amplitude f0 according to the resonance amplitude peak value U0; The corresponding response value U is determined by the first value U1 of the resonance amplitude and the final value U2 of the resonance amplitude. L and the corresponding response value U H ; The corresponding response value U L The corresponding response value U H Determine the corresponding amplitude f respectively L and the corresponding amplitude f H ; The current quality factor value of the current electric field sensor is obtained using the following formula: Among them, Q is the current quality factor value, f0 is the resonance amplitude, f L is the corresponding amplitude, f H is the corresponding amplitude, f H -f L is the passband bandwidth value.

5. The method for detecting air pressure inside a vacuum-encapsulated electric field sensor according to claim 4, wherein: In the above method, the corresponding response value U is determined by the first value U1 of the resonance amplitude and the final value U2 of the resonance amplitude. L and the corresponding response value U H Including: Use the following formula to obtain the corresponding response value U L : Among them, U0 is the peak value of the resonance amplitude, and U1 is the first value of the resonance amplitude; Use the following formula to obtain the corresponding response value U H : Among them, U0 is the peak value of the resonance amplitude, and U2 is the end value of the resonance amplitude.

6. The method for detecting air pressure inside a vacuum-encapsulated electric field sensor according to claim 1, wherein: The current quality factor value and the current set air pressure value are verified to determine whether the current set air pressure value is the same as the current air pressure value inside the electric field sensor, and the determination result is fed back to the packaging process production line, including the following two situations: Case 1: The current set air pressure value includes a set of quality factor values corresponding thereto. When it is determined that the quality factor value set includes the current quality factor value, it is determined that the current set air pressure value is the same as the current air pressure value inside the electric field sensor, and the determination result is fed back to the packaging process production line. Case 2: The current set air pressure value includes a quality factor value set corresponding thereto, and when it is determined that the quality factor value set does not include the current quality factor value, it is determined that the current set air pressure value is different from the air pressure value inside the current electric field sensor; After determining a corresponding air pressure value corresponding to the quality factor value set according to the current quality factor value, determining the corresponding air pressure value as the current air pressure value inside the electric field sensor; The difference between the current set air pressure value and the corresponding air pressure value is calculated and fed back to the packaging process production line.

7. A detection device for implementing the method for detecting air pressure inside a vacuum-encapsulated electric field sensor according to any one of claims 1 to 6, characterized in that: include: At least one tooling part, vacuum pumping device, signal input part and processing equipment, wherein: The tooling portion includes a sealed container and a test tool, wherein the sealed container is used to accommodate the test tool with the electric field sensor placed therein, and the test tool inputs the power supply signal and the sweep signal output by the signal input portion into the electric field sensor, and outputs an amplitude signal processed by the electric field sensor; The vacuuming device is connected to the sealed container and the processing equipment, and vacuums the interior of the sealed container until the pressure reaches the current set pressure value input by the processing equipment; The processing device analyzes the amplitude signal according to preset conditions, and calculates the current quality factor value of the electric field sensor based on the obtained resonance amplitude and passband bandwidth value, and determines whether the current set air pressure value is the same as the air pressure value inside the current electric field sensor based on the correspondence between the current quality factor value and the current set air pressure value.

8. The device according to claim 7, characterized in that The processing device includes a control module, a first analyzing module, a first waveform generating module, a second analyzing module, a second waveform generating module, a computing module, and a memory, wherein: The control module is configured to input a control signal to the signal input portion to control the signal input portion to generate and output the sweep signal, and to input the current set air pressure value to the vacuum device; The first analyzing module is configured to analyze the amplitude signal inputted by the tooling part according to a first preset condition, and aggregate the obtained multiple first amplitude response values into a first amplitude response value set; The first waveform image generating module is configured to generate a corresponding first waveform image according to the first amplitude response value set, and determine a peak interval amplitude signal corresponding to a peak interval from the first waveform image; The second analyzing module is configured to analyze the peak interval amplitude signal according to a second preset condition, and aggregate the obtained multiple second amplitude response values into a second amplitude response value set; The second waveform image generating module is configured to generate a corresponding second waveform image according to the second amplitude response value set; The calculation module is configured to determine a resonance amplitude and a passband bandwidth value based on the second waveform image and the second amplitude response value set, obtain a current quality factor value of the electric field sensor, and determine whether the current set air pressure value is the same as the current air pressure value inside the electric field sensor based on a correspondence between the current quality factor value and the current set air pressure value; The memory stores a plurality of air pressure values and a set of quality factor values corresponding to each air pressure value.

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