Testing method and testing equipment for vacuum packaging electric field sensor

Abstract

The invention provides a test method and test equipment for a vacuum packaging electric field sensor, and the method comprises the steps: placing the electric field sensor in a tool part, processing a sweep frequency signal inputted by the tool part, and outputting an amplitude signal; analyzing the amplitude signal according to a preset condition, summarizing a plurality of obtained amplitude response values into an amplitude response value set, and drawing a waveform image; analyzing a wave crest interval amplitude signal obtained from the waveform image according to a preset condition, summarizing a plurality of obtained detail amplitude response values into a detail amplitude response value set, and drawing a detail waveform image; and determining a resonant frequency value and a pass band width value according to the detail waveform image and the detail amplitude response value set, and obtaining a quality factor value of the electric field sensor. According to the invention, the data volume of the analysis amplitude signal can be effectively reduced, and the resonant frequency value, the pass band width value and the quality factor value of the electric field sensor can be conveniently determined through the wave crest interval image.

Description

Technical Field

[0001] The present invention relates to a testing device, in particular to a testing method and testing device for a vacuum packaged electric field sensor. Background Art

[0002] Electric field sensors are widely used in aerospace, meteorology, electricity, industrial production and many other fields, and play an important role in security and scientific research.

[0003] The main purpose of testing electric field sensors is to evaluate their performance and understand their quality factor to ensure that they can accurately and stably measure electric fields in practical applications.

[0004] Currently, the main methods for testing the quality factor of electric field sensors include: standard electric field source method, amplitude response test method, resonant structure test method, dynamic range test method, three-dimensional electric field measurement method, and self-calibration and feedback adjustment test method. In the resonant structure test method, the scanning range and amplitude step size are usually set to obtain the resonance amplitude and passband bandwidth. Then, based on the resonance amplitude and amplitude passband bandwidth, the corresponding values are analyzed to evaluate the quality factor of the current electric field sensor. However, since the amplitude passband bandwidth (usually within 0.1Hz) and the amplitude step size (usually within 0.05Hz) are both extremely small values, a large number of values will be generated during the test. Evaluating the quality factor of the current electric field sensor with a large number of values will not only increase the test time, but also fail to improve the test efficiency.

[0005] Therefore, how to shorten the test time of electric field sensors and improve the test efficiency of electric field sensors is a technical problem that needs to be solved urgently. Summary of the Invention

[0006] In response to the shortcomings of the above-mentioned problems, the present invention provides a test method and test equipment for a vacuum-packaged electric field sensor, which can significantly reduce the amount of data obtained by analyzing the amplitude signal, and is more convenient for determining the resonant frequency value and the passband bandwidth value through the drawn peak interval image to obtain the quality factor value of the current electric field sensor.

[0007] To achieve the above objectives, in a first aspect, the present invention provides a method for testing a vacuum-encapsulated electric field sensor, for obtaining a quality factor value of the current electric field sensor, comprising the following steps:

[0008] The electric field sensor is placed in the tooling part, and processes the sweep frequency signal input by the tooling part and outputs a corresponding amplitude signal;

[0009] Analyzing the received amplitude signal according to preset conditions, summarizing the obtained multiple amplitude response values into an amplitude response value set, and drawing a corresponding waveform image according to the amplitude response value set;

[0010] Further analyzing the peak interval amplitude signal obtained from the waveform image according to preset conditions, summarizing the obtained multiple detail amplitude response values into a detail amplitude response value set, and drawing a corresponding detail waveform image according to the detail amplitude response value set;

[0011] The resonant frequency value and the passband bandwidth value are determined according to the detailed waveform image and the detailed amplitude response value set, and the quality factor value of the current electric field sensor is obtained using the following formula:

[0012]

[0013] In one embodiment, the step of analyzing the received amplitude signal according to the preset conditions, aggregating the obtained multiple amplitude response values into an amplitude response value set, and drawing a corresponding waveform image according to the amplitude response value set includes:

[0014] Analyzing the amplitude signal according to a preset amplitude range and a preset amplitude step value to obtain a plurality of amplitudes;

[0015] Obtain the corresponding amplitude response value according to each amplitude;

[0016] aggregating the plurality of amplitude response values into an amplitude response value set according to the parsing order of the amplitude values;

[0017] A corresponding waveform image is drawn according to the amplitude response value set, and a peak interval and a corresponding peak interval amplitude signal are determined from the waveform image.

[0018] In one embodiment, further analyzing the peak interval amplitude signal obtained from the waveform image according to a preset condition, aggregating the obtained multiple detail amplitude response values into a detail amplitude response value set, and drawing a corresponding detail waveform image according to the detail amplitude response value set includes:

[0019] Analyzing the peak interval amplitude signal according to a preset amplitude step value to obtain multiple amplitudes;

[0020] Obtain the corresponding detail amplitude response value according to each amplitude;

[0021] aggregating the plurality of detail amplitude response values into a detail amplitude response value set according to the parsing order of the amplitudes;

[0022] The corresponding detail waveform image is drawn according to the detail amplitude response value set.

[0023] In one embodiment, determining the resonant frequency value and the passband bandwidth value according to the detail waveform image and the detail amplitude response value set, and obtaining the quality factor value of the current electric field sensor using the following formula includes the following steps:

[0024] Determining the resonance amplitude peak value U0, the starting frequency corresponding response value U1 and the cutoff frequency corresponding response value U2 from the detailed waveform image and the detailed amplitude response value set;

[0025] The resonance frequency f0 is determined by the resonance amplitude peak value U0;

[0026] The response values U1 at both ends of the half power are determined by the response value U1 corresponding to the starting frequency and the response value U2 corresponding to the cutoff frequency. L with U H ;

[0027] The corresponding response value U L The corresponding response value U H Determine the corresponding frequency f respectively L and the corresponding frequency f H ;

[0028] The quality factor value of the current electric field sensor is obtained using the following formula:

[0029]

[0030] Where Q is the quality factor, f0 is the resonant frequency, and f L is the corresponding frequency, f H is the corresponding frequency, f H -f L is the passband bandwidth value.

[0031] In one embodiment, the half-power corresponding response value U1 is determined by the starting frequency corresponding response value U1 and the cut-off frequency corresponding response value U2. L and the corresponding response value U H Including:

[0032] Use the following formula to obtain the corresponding response value U L :

[0033]

[0034] Among them, U0 is the peak value of the resonance amplitude, and U1 is the response value corresponding to the starting frequency;

[0035] Use the following formula to obtain the corresponding response value U H :

[0036]

[0037] Among them, U0 is the peak value of the resonance amplitude, and U2 is the response value corresponding to the cutoff frequency.

[0038] In a second aspect, the present invention further provides a testing device for implementing the above-mentioned method for testing a vacuum-encapsulated electric field sensor, comprising a connected tooling portion and a processing device, wherein:

[0039] The tooling part is used to accommodate the vacuum-packaged electric field sensor, input the received sweep frequency signal into the electric field sensor, and output the amplitude signal processed by the electric field sensor;

[0040] The processing device analyzes the received amplitude signal according to preset conditions to determine a peak interval image, determines the resonant frequency value and the passband bandwidth value from the peak interval image, and obtains the quality factor value of the current electric field sensor based on the resonant frequency value and the passband bandwidth value.

[0041] In one embodiment, the processing device includes an analysis module, a waveform drawing module, a detail analysis module, a detail waveform drawing module, and a calculation module, wherein:

[0042] The analysis module is used to obtain a plurality of amplitude response values corresponding to a preset amplitude range and a preset amplitude step value from the amplitude signal, and to aggregate the plurality of amplitude response values into an amplitude response value set according to an analysis order;

[0043] The waveform drawing module is used to draw a corresponding waveform image according to the amplitude response value set, and determine the peak interval and the corresponding peak interval amplitude signal from the waveform image;

[0044] The detail analysis module is configured to obtain a plurality of detail amplitude response values corresponding to a preset amplitude step value from the peak interval amplitude signal, and aggregate the plurality of detail amplitude response values into a detail amplitude response value set according to an analysis order;

[0045] The detail waveform drawing module is used to draw a corresponding detail waveform image according to the detail amplitude response value set;

[0046] The calculation module is used to determine the resonant frequency value and the passband bandwidth value according to the detail waveform image and the detail amplitude response value set, and obtain the quality factor value of the current electric field sensor according to the resonant frequency value and the passband bandwidth value.

[0047] In one embodiment, the calculation module includes the following steps:

[0048] Determining the resonance amplitude peak value U0, the starting frequency corresponding response value U1 and the cutoff frequency corresponding response value U2 from the detailed waveform image and the detailed amplitude response value set;

[0049] The resonance frequency f0 is determined by the resonance amplitude peak value U0;

[0050] The response values U1 at both ends of the half power are determined by the response value U1 corresponding to the starting frequency and the response value U2 corresponding to the cutoff frequency. L with U H ;

[0051] The corresponding response value U L The corresponding response value U H Determine the corresponding frequency f respectively L and the corresponding frequency f H ;

[0052] The resonant frequency f0 and the corresponding frequency f L The corresponding frequency f H A quality factor value of the current electric field sensor is obtained.

[0053] In one embodiment, the tooling portion includes a connected test tooling and a circuit board, and the test tooling includes an upper cover and a lower cover, wherein:

[0054] A placement groove for accommodating the electric field sensor is formed on the top end surface of the lower cover, and a plurality of through holes are formed on the bottom end surface of the placement groove. A plurality of probes are provided inside the lower cover, wherein the positions of the upper ends of the probes correspond to the positions of the through holes, and the lower ends of the probes are connected to the circuit board. When the electric field sensor is placed in the placement groove, the solder points in the electric field sensor are connected to the probes via the through holes.

[0055] A pressing block is formed on the bottom end surface of the upper cover body and extends to the area below it and corresponds to the placement groove. When the upper cover body is buckled on the top end surface of the lower cover body, a part of the pressing block is placed in the placement groove.

[0056] Compared with the prior art, the present invention has one of the following advantages:

[0057] The processing device analyzes the received amplitude signal according to a preset amplitude range and / or preset amplitude step value, which can significantly reduce the amount of data obtained from analyzing the amplitude signal. It is more convenient to determine the resonant frequency value and the passband bandwidth value through the drawn peak interval image to obtain the quality factor value of the current electric field sensor. Compared with existing vacuum-packaged electric field sensor testing methods, this method can shorten test time and improve test efficiency while ensuring accurate test results.

[0058] By forming a plurality of through holes in the placement slot and a plurality of probes matched therewith, the test fixture can test different types of electric field sensors to improve applicability;

[0059] Due to the pressing block provided on the upper cover body, the electric field sensor can be fixed in the placement groove, thereby ensuring the connection performance of each welding point and each probe, and improving the stability of signal transmission. BRIEF DESCRIPTION OF THE DRAWINGS

[0060] Figure 1 is a flow chart of the testing method of the present invention;

[0061] Figure 2 A waveform image formed based on a set of amplitude response values;

[0062] Figure 3 A detail waveform image formed based on a set of detail amplitude response values;

[0063] Figure 4 This is a schematic diagram of a first embodiment of the testing device of the present invention;

[0064] Figure 5 for Figure 4 Schematic diagram of the signal source;

[0065] Figure 6 for Figure 4 Top view of the test fixture;

[0066] Figure 7 for Figure 6 Schematic diagram of the state change of the test tooling;

[0067] Figure 8 for Figure 7 Enlarged view of part A;

[0068] Figure 9 for Figure 6 A three-dimensional view of the middle tooling part in the open state;

[0069] Figure 10 This is a schematic diagram of a second embodiment of the testing device of the present invention.

[0070] The main reference numerals are as follows:

[0071] 1-test tooling; 100-upper cover; 101-pressing block; 102-elastic buckle; 110-lower cover; 111-placement slot; 112-through hole; 113-probe; 114-first axis; 115-spring; 116-second axis; 2-circuit board; 200-terminal block; 3-processing equipment; 4-power supply; 5-signal source; 6-tooling part; 7-signal input part. DETAILED DESCRIPTION

[0072] To make the objectives, technical solutions, and advantages of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0073] In the description of the present invention, it should be understood that the terms "upper", "lower", "top surface", "bottom surface", "inside", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. It should be noted that when a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be a centrally arranged component at the same time. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0074] Example 1

[0075] like Figure 1 As shown, this embodiment provides a testing method for obtaining the quality factor value of the current electric field sensor, including the following steps:

[0076] S1. The electric field sensor is placed in the tooling part. The electric field sensor processes the sweep frequency signal input by the tooling part and outputs the corresponding amplitude signal;

[0077] S2. Analyzing the received amplitude signal according to preset conditions, summarizing the obtained multiple amplitude response values into an amplitude response value set, and drawing a corresponding waveform image according to the amplitude response value set;

[0078] S3. Analyzing the peak interval amplitude signal obtained from the waveform image according to preset conditions, summarizing the obtained multiple detail amplitude response values into a detail amplitude response value set, and drawing a corresponding detail waveform image according to the detail amplitude response value set;

[0079] S4. Determine the resonant frequency value and the passband bandwidth value based on the detailed waveform image and the detailed amplitude response value set, and use the following formula to obtain the quality factor value of the current electric field sensor:

[0080]

[0081] Specifically, in step S1, the following steps are included:

[0082] S101, fixing the vacuum-encapsulated electric field sensor in a placement slot of a test portion, so that the electric field sensor is connected to a circuit board via a probe;

[0083] S102, inputting the external frequency sweep signal and power supply signal into the electric field sensor through the circuit board;

[0084] S103, after the electric field sensor is in a working state through the power supply signal, the electric field sensor processes the frequency sweep signal to form an amplitude signal;

[0085] S104: The amplitude signal is input into the processing device via the circuit board.

[0086] Furthermore, in the above step S1 , a frequency sweep signal may be input to the circuit board through an external signal source.

[0087] Specifically, in step S2, the following steps are included:

[0088] S201, analyzing the amplitude signal according to a preset amplitude range and a preset amplitude step value to obtain multiple amplitudes;

[0089] S202, obtaining corresponding amplitude response values according to each amplitude value;

[0090] S203, summarizing the multiple amplitude response values into an amplitude response value set according to the parsing order of each amplitude value;

[0091] S204 , drawing a corresponding waveform image according to the amplitude response value set, and determining the peak interval and the corresponding peak interval amplitude signal from the waveform image.

[0092] Furthermore, in step S2, it includes:

[0093] The analysis module analyzes the amplitude signal according to a preset amplitude range and a preset amplitude step value to obtain multiple amplitudes;

[0094] Obtain the corresponding amplitude response value according to each amplitude;

[0095] Aggregating multiple amplitude response values into an amplitude response value set according to the analytical order of each amplitude value;

[0096] Inputting the amplitude response value set into the waveform graph drawing module, and marking corresponding anchor points in the coordinate graph according to the multiple amplitude response values;

[0097] Connect multiple anchor points to form a wave image (see Figure 2 ), and determine the peak interval and the corresponding peak interval amplitude signal from the waveform image.

[0098] Furthermore, when deriving corresponding amplitude response values based on each amplitude, each amplitude includes a corresponding amplitude response value set, wherein the amplitude response value set includes multiple amplitude response values. The derived corresponding amplitude response value may be an average amplitude response value of the multiple amplitude response values, or may be an amplitude response value randomly extracted from the amplitude response value set.

[0099] Specifically, step S3 includes the following steps:

[0100] S301, analyzing the peak interval amplitude signal according to a preset amplitude step value to obtain multiple amplitudes;

[0101] S302, obtaining corresponding detail amplitude response values according to each amplitude;

[0102] S303, summarizing the multiple detail amplitude response values into a detail amplitude response value set according to the parsing order of each amplitude value;

[0103] S304 , drawing a corresponding detail waveform image according to the detail amplitude response value set, and determining the peak interval and the corresponding peak interval amplitude signal from the waveform image.

[0104] Furthermore, in step S3, it includes:

[0105] The detail analysis module analyzes the peak interval amplitude signal according to the preset amplitude step value to obtain multiple amplitudes;

[0106] Obtain the corresponding detail amplitude response value according to each amplitude;

[0107] Aggregating multiple detail amplitude response values into a detail amplitude response value set according to the parsing order of each amplitude value;

[0108] Inputting the detail amplitude response value set into the detail waveform drawing module, and marking corresponding anchor points in the coordinate graph according to the multiple detail amplitude response values;

[0109] Connect multiple anchor points to form a detailed waveform image (see Figure 3 ).

[0110] Furthermore, when deriving corresponding detail amplitude response values based on each amplitude, each amplitude includes a corresponding detail amplitude response value set, and the detail amplitude response value set includes multiple detail amplitude response values. The derived corresponding detail amplitude response value may be an average detail amplitude response value of the multiple detail amplitude response values, or the derived corresponding detail amplitude response value may be a randomly selected detail amplitude response value from the detail amplitude response value set.

[0111] Specifically, in step S4, the following steps are included:

[0112] S401, determining the resonance amplitude peak value U0, the starting frequency corresponding response value U1 and the cutoff frequency corresponding response value U2 from the detail waveform image and the detail amplitude response value set;

[0113] S402, determining the resonant frequency f0 from the resonance amplitude peak value U0;

[0114] S403, determine the half-power corresponding response value U1 and the cut-off frequency corresponding response value U2 respectively L and the corresponding response value U H ;

[0115] S404, by the corresponding response value U L and the corresponding response value U H Determine the corresponding frequency f respectively L and the corresponding frequency f H ;

[0116] S405. Obtain the quality factor value of the current electric field sensor using the following formula:

[0117]

[0118] Where Q is the quality factor, f0 is the resonant frequency, and f L is the corresponding frequency, f H is the corresponding frequency, f H -f L is the passband bandwidth value.

[0119] Furthermore, in step S403, the corresponding response value U1 is obtained according to the resonance amplitude peak value U0 and the starting frequency, and the corresponding response value U is obtained using the following formula: L :

[0120]

[0121] According to the resonance amplitude peak value U0 and the cutoff frequency corresponding response value U2, the corresponding response value U is obtained using the following formula H :

[0122]

[0123] In this embodiment, see Figure 3The detail waveform image is drawn based on each detail amplitude response value in the detail amplitude response value set. The resonance amplitude peak value U0 is the peak value in the detail waveform image (i.e., the maximum value in the response value set), the start frequency corresponding response value U1 is the value closest to "0" on the first side of the peak value in the detail waveform image, and the cutoff frequency corresponding response value U2 is the value closest to "0" on the other side of the peak value in the detail waveform image. L The middle value of the first curve from the first value U1 of the resonance amplitude to the peak value U0 of the resonance amplitude in the detail waveform image, corresponding to the response value U H The middle value of the detail curve from the first value U1 of the resonance amplitude to the peak value U0 of the resonance amplitude in the detail waveform image. The resonance frequency f0 is the value perpendicular to the peak value U0 of the resonance amplitude in the horizontal coordinate axis, corresponding to the frequency f L is the horizontal coordinate axis perpendicular to the corresponding response value U L The value of the corresponding frequency f H is the horizontal coordinate axis perpendicular to the corresponding response value U H The value of .

[0124] In this embodiment, step S2 illustratively includes:

[0125] The amplitude signal is parsed according to a preset frequency range (the preset frequency range is 0Hz-10Hz) and a preset frequency step value (the preset frequency step value is 0.5Hz) to obtain 21 frequencies (0Hz, 0.5Hz, 1Hz, 1.5Hz, 2Hz, 2.5Hz, 3Hz, 3.5Hz, 4Hz, 4.5Hz, 5Hz, 5.5Hz, 6Hz, 6.5Hz, 7Hz, 7.5Hz, 8Hz, 8.5Hz, 9Hz, 9.5Hz, 10Hz);

[0126] According to the above 21 frequencies, 21 amplitude response values are obtained respectively (0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 2V, 6V, 4V, 1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V);

[0127] Summarize the above 21 amplitude response values into an amplitude response value set ({0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 2V, 6V, 4V, 1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V}) in the analytical order;

[0128] Input the amplitude response value set {0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 2V, 6V, 4V, 1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V, 0.1V} into the waveform graph drawing module, and mark 21 corresponding anchor points on the coordinate graph according to the 21 amplitude response values;

[0129] Connect the above 21 anchor points to form a waveform image (see Figure 2 ).

[0130] It can be seen from the waveform image that the amplitude range of the peak interval amplitude signal is 4.5Hz-7Hz.

[0131] In this embodiment, step S3 illustratively includes:

[0132] The peak interval amplitude signal (whose frequency range is 4.5 Hz-7 Hz) is analyzed according to the preset frequency step value (the preset frequency step value is 0.1 Hz) to obtain 26 frequencies (4.5 Hz, 4.6 Hz, 4.7 Hz, 4.8 Hz, 4.9 Hz, 5 Hz, 5.1 Hz, 5.2 Hz, 5.3 Hz, 5.4 Hz, 5.5 Hz, 5.6 Hz, 5.7 Hz, 5.8 Hz, 5.9 Hz, 6 Hz, 6.1 Hz, 6.2 Hz, 6.3 Hz, 6.4 Hz, 6.5 Hz, 6.6 Hz, 6.7 Hz, 6.8 Hz, 6.9 Hz, 7 Hz);

[0133] According to the above 26 frequencies, 26 detailed amplitude response values are obtained respectively (0.5V, 0.8V, 1V, 1.2V, 1.6V, 1.8V, 2V, 2.1V, 2.6V, 4V, 6V, 6.3V, 7.2V, 7.6V, 8V, 10V, 14V, 11V, 9V, 7.5V, 7.3V, 6V, 5V, 4.5V, 4.2V, 3V);

[0134] Summarize the above 26 detail amplitude response values into a detail amplitude response value set ({0.5V, 0.8V, 1V, 1.2V, 1.6V, 1.8V, 2V, 2.1V, 2.6V, 4V, 6V, 6.3V, 7.2V, 7.6V, 8V, 10V, 14V, 11V, 9V, 7.5V, 7.3V, 6V, 5V, 4.5V, 4.2V, 3V}) in the analytical order;

[0135] Input the above-mentioned detailed amplitude response value set {0.5V, 0.8V, 1V, 1.2V, 1.6V, 1.8V, 2V, 2.1V, 2.6V, 4V, 6V, 6.3V, 7.2V, 7.6V, 8V, 10V, 14V, 11V, 9V, 7.5V, 7.3V, 6V, 5V, 4.5V, 4.2V, 3V} into the detailed waveform drawing module, and mark the corresponding 26 anchor points in the coordinate graph according to the 26 detailed amplitude response values;

[0136] Connect the above 26 anchor points to form a detailed waveform image (see Figure 3 ).

[0137] In this embodiment, in step S4, for example, the resonance amplitude peak value U0 is the peak anchor point in the detail waveform image (i.e., the value 14), the start frequency corresponding response value U1 is the first anchor point closest to "0" on the first side of the peak anchor point in the detail waveform image (i.e., the value 0.5), and the cutoff frequency corresponding response value U2 is the 26th anchor point closest to "0" on the other side of the peak anchor point in the detail waveform image (i.e., the value 3). The corresponding response value U is obtained based on the resonance amplitude peak value U0 (i.e., the value 14) and the start frequency corresponding response value U1 (i.e., the value 0.1). L , according to the resonance amplitude peak value U0 (ie, value 14) and the cutoff frequency corresponding response value U2 (ie, value 3), the corresponding response value U is obtained. H , the resonant frequency f0 is the value perpendicular to the resonant amplitude peak U0 in the horizontal coordinate axis, corresponding to the frequency f L is the horizontal coordinate axis perpendicular to the corresponding response value U L The value of the corresponding frequency f H is the horizontal coordinate axis perpendicular to the corresponding response value U H The value of the quality factor Q is based on the resonant amplitude f0 and the passband bandwidth f H -f L The absolute value of the obtained value.

[0138] Example 2

[0139] like Figures 4 to 9 As shown, this embodiment provides a test device for an electric field sensor, including a tooling portion 6 and a processing device 3 connected thereto, wherein:

[0140] The tooling part 6 is used to accommodate the vacuum-encapsulated electric field sensor, input the received sweep frequency signal into the electric field sensor, and output the amplitude signal processed by the electric field sensor;

[0141] The processing device 3 analyzes the received amplitude signal according to preset conditions to determine the peak interval image, determines the resonant frequency value and the passband bandwidth value from the peak interval image, and obtains the quality factor value of the current electric field sensor based on the resonant frequency value and the passband bandwidth value.

[0142] Furthermore, the fixture portion 6 is electrically connected to an external signal input portion 7 (i.e., the power supply 4 and the signal source 5). The power supply 4 inputs power to the electric field sensor housed therein through the fixture portion 6 to drive the electric field sensor into operation, and the signal source 5 inputs a sweep frequency signal to the electric field sensor housed therein through the fixture portion 6.

[0143] In this embodiment, the fixture part 6 includes a test fixture 1 and a circuit board 2 , wherein the circuit board 2 is fixed to the bottom end surface of the test fixture 1 by screws and is electrically connected to the test fixture 1 .

[0144] Specifically, the test fixture 1 includes an upper cover 100 and a lower cover 110 that are rotatably connected, wherein:

[0145] A placement groove 111 for accommodating the vacuum-sealed electric field sensor is formed on the top end surface of the lower cover 110, and a plurality of through-holes 112 are formed on the bottom end surface of the placement groove 111. A plurality of probes 113 are provided within the lower cover 110. The upper ends of the probes 113 correspond to the positions of the through-holes 112 and extend into the through-holes 112. The lower ends of the probes 113 penetrate the bottom end surface of the upper cover 100 and connect to the circuit board 2. When the electric field sensor is placed in the placement groove 111, the solder joints extending to the outside of the bottom end surface of the electric field sensor are embedded in the through-holes 112. The electric field sensor is connected to the circuit board 2 via the solder joints, through-holes 112, and probes 113.

[0146] A pressing block 101 is formed on the bottom end surface of the upper cover 100 and extends to the area below the upper cover 100 and corresponds to the placement groove 111 .

[0147] When the electric field sensor is placed in the placement groove 111, the upper cover body 100 is buckled onto the top end surface of the lower cover body 110, and a portion of the pressing block 101 is placed in the placement groove 111 and contacts the top end surface of the electric field sensor to fix the electric field sensor in the placement groove 111, thereby ensuring the connection performance of each solder joint and each probe 113 and improving the stability of signal transmission.

[0148] Furthermore, the end of the upper cover 100 and the end of the lower cover 110 are rotatably connected via a first shaft 114. A spring 115 is sleeved on the shaft to facilitate the opening and closing of the upper cover 100 and the lower cover 110. One end of the spring 115 contacts the upper cover 100, and the other end of the spring 115 contacts the lower cover 110.

[0149] An elastic buckle 102 is provided on the front end of the upper cover 100, and a second shaft 116 is provided on the front end of the lower cover 110 to mate with the elastic buckle 102. When the upper cover 100 and the lower cover 110 are closed, when the lower end of the elastic buckle 102 contacts the second shaft 116, the upper cover 100 and the lower cover 110 are secured. When the lower end of the elastic buckle 102 separates from the second shaft 116, the upper cover 100 and the lower cover 110 open under the action of the spring 115.

[0150] Specifically, the wiring terminals 200 are solidified on the circuit board 2 , and the external signal source 5 and power supply 4 are respectively connected to the wiring terminals 200 via lines, thereby inputting the power supply signal and the sweep frequency signal to the test fixture 1 through the circuit board 2 .

[0151] In this embodiment, the electric field sensor is fixed within the placement slot 111 in the lower cover 110 and connected to the circuit board 2 via the probe 113. A power signal is input to the test fixture 1 via the circuit board 2, causing the electric field sensor to enter an operating state. A sweep signal is input to the test fixture 1 via the circuit board 2, causing the electric field sensor to process the sweep signal to form an amplitude signal.

[0152] In this embodiment, specifically, the processing device 3 includes an analysis module, a waveform drawing module, a detail analysis module, a detail waveform drawing module, and a calculation module, wherein:

[0153] An analysis module is used to obtain a plurality of amplitude response values corresponding to a preset amplitude range and a preset amplitude step value from the amplitude signal, and to aggregate the plurality of amplitude response values into an amplitude response value set according to an analysis order;

[0154] The waveform drawing module is used to draw the corresponding waveform image according to the amplitude response value set (see Figure 2 ), and determining the peak interval and the corresponding peak interval amplitude signal from the waveform image;

[0155] A detail analysis module is used to obtain a plurality of detail amplitude response values corresponding to the peak interval amplitude signal and the preset amplitude range and the preset amplitude step value, and to aggregate the plurality of detail amplitude response values into a detail amplitude response value set according to an analysis order;

[0156] The detail waveform drawing module is used to draw the corresponding detail waveform image according to the detail amplitude response value set (see Figure 3 );

[0157] The calculation module is used to determine the resonant frequency value and the passband bandwidth value according to the detail waveform image and the detail amplitude response value set, and obtain the quality factor value of the current electric field sensor according to the resonant frequency value and the passband bandwidth value.

[0158] Furthermore, when analyzing the amplitude signal, the analysis module includes:

[0159] The analysis module analyzes the amplitude signal according to a preset amplitude range and a preset amplitude step value to obtain multiple amplitudes;

[0160] Obtain the corresponding amplitude response value according to each amplitude;

[0161] The multiple amplitude response values are aggregated into an amplitude response value set according to the parsing order of the amplitude values.

[0162] Furthermore, when deriving corresponding amplitude response values based on each amplitude, each amplitude includes a corresponding amplitude response value set, wherein the amplitude response value set includes multiple amplitude response values. The derived corresponding amplitude response value may be an average amplitude response value of the multiple amplitude response values, or may be an amplitude response value randomly extracted from the amplitude response value set.

[0163] Furthermore, the waveform drawing module includes:

[0164] Inputting the amplitude response value set into the waveform graph drawing module, and marking corresponding anchor points in the coordinate graph according to the multiple amplitude response values;

[0165] Connect multiple anchor points to form a wave image (see Figure 2 ), and determine the peak interval and the corresponding peak interval amplitude signal from the waveform image.

[0166] Furthermore, when analyzing the peak interval amplitude signal, the detail analysis module includes:

[0167] The detail analysis module analyzes the peak interval amplitude signal according to the preset amplitude step value to obtain multiple amplitudes;

[0168] Obtain the corresponding detail amplitude response value according to each amplitude;

[0169] The multiple detail amplitude response values are aggregated into a detail amplitude response value set according to the parsing order of the amplitudes.

[0170] Furthermore, when deriving corresponding detail amplitude response values based on each amplitude, each amplitude includes a corresponding detail amplitude response value set, and the detail amplitude response value set includes multiple detail amplitude response values. The derived corresponding detail amplitude response value may be an average detail amplitude response value of the multiple detail amplitude response values, or the derived corresponding detail amplitude response value may be a randomly selected detail amplitude response value from the detail amplitude response value set.

[0171] Furthermore, in the detailed waveform drawing module, it includes:

[0172] Inputting the detail amplitude response value set into the detail waveform drawing module, and marking corresponding anchor points in the coordinate graph according to the multiple detail amplitude response values;

[0173] Connect multiple anchor points to form a detailed waveform image (see Figure 3 ).

[0174] Furthermore, the calculation module includes the following steps:

[0175] Determine the resonance amplitude peak value U0, the response value U1 corresponding to the start frequency, and the response value U2 corresponding to the cutoff frequency from the detailed waveform image;

[0176] The resonant frequency f0 is determined by the resonant amplitude peak value U0;

[0177] According to the resonance amplitude peak value U0 and the starting frequency corresponding response value U1, the corresponding response value U is obtained using the following formula L :

[0178]

[0179] According to the resonance amplitude peak value U0 and the cutoff frequency corresponding response value U2, the corresponding response value U is obtained using the following formula H :

[0180]

[0181] By the corresponding response value U L and the corresponding response value U H Determine the corresponding frequency f respectively L and the corresponding frequency f H ;

[0182] According to the resonant frequency f0, the corresponding frequency f L and the corresponding frequency f H , and use the following formula to obtain the quality factor value of the current electric field sensor:

[0183]

[0184] Where Q is the quality factor, f0 is the resonant frequency, and f L is the corresponding frequency, f H is the corresponding frequency, f H -f L is the passband bandwidth value.

[0185] In this embodiment, see Figure 3The detail waveform image (i.e., the peak interval image) is drawn based on each detail amplitude response value in the detail amplitude response value set. The resonance amplitude peak value U0 is the peak value in the detail waveform image (i.e., the maximum value in the detail amplitude response value set), the response value corresponding to the start frequency U1 is the value closest to "0" on the first side of the peak value in the detail waveform image, the response value corresponding to the cutoff frequency U2 is the value closest to "0" on the other side of the peak value in the detail waveform image, and the corresponding response value U L The middle value of the first curve from the response value U1 to the resonance amplitude peak value U0 corresponding to the starting frequency in the detailed waveform image, and the corresponding response value U H The middle value of the second curve from the response value U2 to the resonance amplitude peak U0 corresponding to the cutoff frequency in the detailed waveform image. The resonance frequency f0 is the value perpendicular to the resonance amplitude peak U0 in the horizontal coordinate axis, corresponding to the frequency f L is the horizontal coordinate axis perpendicular to the corresponding response value U L The value of the corresponding frequency f H is the horizontal coordinate axis perpendicular to the corresponding response value U H The value of .

[0186] In this embodiment, the signal source includes a DC power supply and an AC power supply, wherein the DC power supply outputs a constant voltage signal and the AC power supply outputs an alternating voltage signal. The constant voltage signal and the alternating voltage signal are combined to form a sweep frequency signal input to the circuit board.

[0187] Furthermore, the processing device is connected to an AC power source, so that the AC power source outputs an AC voltage signal within a set range under the control of the control signal.

[0188] Example 3

[0189] like Figure 10 As shown, this embodiment provides a test device for an electric field sensor, including multiple tooling parts 6 and a processing device 3 connected to each tooling part 6, wherein the tooling part 6 is the tooling part 6 in the above-mentioned embodiment 1.

[0190] In addition, in Example 2 and Example 3, optionally, the processing device 3 can be connected to the circuit board through a line, or the processing device 3 is communicatively connected to the circuit board, thereby receiving the amplitude signal input by the circuit board, or inputting a sweep frequency signal to the circuit board.

[0191] When the processing device is connected to the circuit board via a line, the processing device is connected to the wiring terminals on the circuit board via the line. When the processing device is communicatively connected to the circuit board, the data transmission module in the processing device is communicatively connected to the data transmission module on the circuit board.

[0192] In the second embodiment and the third embodiment, preferably, the processing device is a computer.

[0193] Furthermore, in the aforementioned second and third embodiments, the analysis module, waveform plotting module, detail analysis module, detail waveform plotting module, and calculation module are integrated to form a test model placed within the processing device. The test model performs the aforementioned processing on the amplitude signal input from the circuit board to determine the quality factor of the current electric field sensor.

[0194] The above description is merely a preferred embodiment of the present invention and is intended to be illustrative rather than restrictive of the present invention. Those skilled in the art will appreciate that many changes, modifications, and even equivalents may be made to the present invention within the spirit and scope of the claims, all of which fall within the scope of protection of the present invention.

Claims

1. A method for testing a vacuum-encapsulated electric field sensor, for obtaining a quality factor value of the current electric field sensor, characterized in that: The following steps are involved: The electric field sensor is placed in the tooling part, and processes the sweep frequency signal input by the tooling part and outputs a corresponding amplitude signal; Analyzing the received amplitude signal according to preset conditions, summarizing the obtained multiple amplitude response values into an amplitude response value set, and drawing a corresponding waveform image based on the amplitude response value set, and obtaining the starting frequency and cutoff frequency of the resonance based on the waveform image; Further analyzing the amplitude signal between the starting frequency and the cutoff frequency obtained from the waveform image according to preset conditions to perform detail scanning, aggregating the obtained multiple detail scanning amplitude response values into a detail amplitude response value set, and drawing a corresponding detail waveform image according to the detail amplitude response value set; The resonant frequency value and the passband bandwidth value are determined based on the detailed waveform image and the detailed amplitude response value set, and the quality factor value of the current electric field sensor is obtained using the following formula:

2. The method for testing a vacuum-encapsulated electric field sensor according to claim 1, wherein: The step of analyzing the received amplitude signal according to the preset conditions, aggregating the obtained multiple amplitude response values into an amplitude response value set, and drawing a corresponding waveform image according to the amplitude response value set includes: Analyzing the amplitude signal according to a preset amplitude range and a preset amplitude step value to obtain a plurality of amplitudes; Obtain the corresponding amplitude response value according to each amplitude; aggregating the plurality of amplitude response values into an amplitude response value set according to the parsing order of the amplitude values; A corresponding waveform image is drawn according to the amplitude response value set, and the resonance start frequency, cutoff frequency, and the corresponding peak interval amplitude signal are determined from the waveform image.

3. The method for testing a vacuum-encapsulated electric field sensor according to claim 1, wherein: The further analyzing the peak interval amplitude signal obtained from the waveform image according to the preset conditions, aggregating the obtained multiple detail amplitude response values into a detail amplitude response value set, and drawing a corresponding detail waveform image according to the detail amplitude response value set includes: Analyzing the peak interval amplitude signal according to a preset amplitude step value to obtain multiple amplitudes; Obtain the corresponding detail amplitude response value according to each amplitude; aggregating the plurality of detail amplitude response values into a detail amplitude response value set according to the parsing order of the amplitudes; The corresponding detail waveform image is drawn according to the detail amplitude response value set.

4. The method for testing a vacuum-encapsulated electric field sensor according to claim 1, wherein: The process of determining the resonant frequency value and the passband bandwidth value according to the detailed waveform image and the detailed amplitude response value set, and obtaining the quality factor value of the current electric field sensor using the following formula, includes the following steps: Determining the resonance amplitude peak value U0, the starting frequency corresponding response value U1 and the cutoff frequency corresponding response value U2 from the detailed waveform image and the detailed amplitude response value set; The resonance frequency f0 is determined by the resonance amplitude peak value U0; The response values U1 at both ends of the half power are determined by the response value U1 corresponding to the starting frequency and the response value U2 corresponding to the cutoff frequency. L with U H ; The corresponding response value U L with U H Determine the corresponding frequency f respectively L and the corresponding frequency f H ; The quality factor value of the current electric field sensor is obtained using the following formula: Where Q is the quality factor, f0 is the resonant frequency, and f L is the corresponding frequency, f H is the corresponding frequency, f H -f L is the passband bandwidth value.

5. The method for testing a vacuum-encapsulated electric field sensor according to claim 4, wherein: In the step of respectively determining the corresponding response value U1 by the starting frequency corresponding response value U1 and the cutoff frequency corresponding response value U2 L And the corresponding response value U H Including: Use the following formula to obtain the corresponding response value U L : Among them, U0 is the peak value of the resonance amplitude, and U1 is the response value corresponding to the starting frequency; Use the following formula to obtain the corresponding response value U H : Among them, U0 is the peak value of the resonance amplitude, and U2 is the response value corresponding to the cutoff frequency.

6. A testing device for implementing the testing method of the vacuum-encapsulated electric field sensor according to any one of claims 1 to 5, characterized in that: It includes connected tooling parts and processing equipment, including: The tooling part is used to accommodate the vacuum-packaged electric field sensor, input the received sweep frequency signal into the electric field sensor, and output the amplitude signal processed by the electric field sensor; The processing device analyzes the received amplitude signal according to preset conditions to determine a peak interval image, determines the resonant frequency value and the passband bandwidth value from the peak interval image, and obtains the quality factor value of the current electric field sensor based on the resonant frequency value and the passband bandwidth value.

7. The testing device according to claim 8, characterized in that The processing device includes an analysis module, a waveform drawing module, a detail analysis module, a detail waveform drawing module and a calculation module, wherein: The analysis module is used to obtain a plurality of amplitude response values corresponding to a preset amplitude range and a preset amplitude step value from the amplitude signal, and to aggregate the plurality of amplitude response values into an amplitude response value set according to an analysis order; The waveform drawing module is used to draw a corresponding waveform image according to the amplitude response value set, and determine the peak interval and the corresponding peak interval amplitude signal from the waveform image; The detail analysis module is configured to obtain a plurality of detail amplitude response values corresponding to a preset amplitude step value from the peak interval amplitude signal, and aggregate the plurality of detail amplitude response values into a detail amplitude response value set according to an analysis order; The detail waveform drawing module is used to draw a corresponding detail waveform image according to the detail amplitude response value set; The calculation module is used to determine the resonant frequency value and the passband bandwidth value according to the detail waveform image and the detail amplitude response value set, and obtain the quality factor value of the current electric field sensor according to the resonant frequency value and the passband bandwidth value.

8. The electric field sensor testing device according to claim 7, characterized in that: The calculation module includes the following steps: Determining the resonance amplitude peak value U0, the starting frequency corresponding response value U1 and the cutoff frequency corresponding response value U2 from the detailed waveform image and the detailed amplitude response value set; The resonance frequency f0 is determined by the resonance amplitude peak value U0; The corresponding response value U is determined by the response value U1 corresponding to the starting frequency and the response value U2 corresponding to the cutoff frequency. L And the corresponding response value U H ; The corresponding response value U L The corresponding response value U H Determine the corresponding frequency f respectively L and the corresponding frequency f H ; The resonant frequency f0 and the corresponding frequency f L The corresponding frequency f H A quality factor value of the current electric field sensor is obtained.

9. The testing device for the electric field sensor according to claim 6, characterized in that: The tooling part includes a connected test tooling and a circuit board, and the test tooling includes an upper cover and a lower cover, wherein: A placement groove for accommodating the electric field sensor is formed on the top end surface of the lower cover, and a plurality of through holes are formed on the bottom end surface of the placement groove. A plurality of probes are provided inside the lower cover, wherein the positions of the upper ends of the probes correspond to the positions of the through holes, and the lower ends of the probes are connected to the circuit board. When the electric field sensor is placed in the placement groove, the solder points in the electric field sensor are connected to the probes via the through holes. A pressing block is formed on the bottom end surface of the upper cover body and extends to the area below it and corresponds to the placement groove. When the upper cover body is buckled on the top end surface of the lower cover body, a part of the pressing block is placed in the placement groove.

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