Sealing connection device and vacuum system

Abstract

The invention discloses a sealing connection device and a vacuum system. The sealing connection device comprises a driving assembly, a transmission assembly and a sealing connection assembly. The driving piece is connected with the lead screw and used for driving the lead screw to rotate in the first direction, and the nut is in threaded connection with the lead screw; the limiting piece is arranged at one end, in the first direction, of the guide rail, the first connecting piece is connected with the nut and slidably connected with the guide rail, the first transmission shaft and the second transmission shaft extend in the third direction, the first transmission shaft is connected with the first connecting piece and the second connecting piece, and the second transmission shaft is connected with the second connecting piece and the third connecting piece. The first transmission shaft rotates relative to the first connecting piece, the second transmission shaft rotates relative to the second connecting piece and the third connecting piece, and in the first direction, at least part of projection of the limiting piece is located on the third connecting piece; the sealing connecting assembly is connected with the third connecting piece. According to the sealing connection device, the pressing mode of the sealing ring of the vacuum chamber can be optimized.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum systems, and in particular to a sealing connection device and a vacuum system. Background Art

[0002] In some vacuum systems, sealing connections are often required to isolate and connect vacuum chambers. Traditional sealing connections have significant drawbacks when compressing the sealing ring. When compressed, the sealing ring is subjected not only to positive pressure but also to lateral friction. This non-positive compression accelerates wear of the sealing ring, shortening its service life and generating dust particles during repeated friction, which can contaminate the vacuum chamber. Summary of the Invention

[0003] In view of this, the purpose of the present application is to overcome the deficiencies in the prior art and to provide a sealing connection device that can optimize the compression method of the sealing ring of the vacuum chamber.

[0004] The present application also provides a vacuum system.

[0005] To achieve the above objectives, the technical solutions adopted in this application are as follows: In a first aspect, the present application provides a sealing connection device having a first direction, a second direction and a third direction, wherein the first direction, the second direction and the third direction are perpendicular to each other, and the sealing connection device comprises: a driving assembly, comprising a driving member, a screw rod and a nut, wherein the driving member is connected to the screw rod and is used to drive the screw rod to rotate around the first direction, and the nut is threadedly connected to the screw rod; a transmission assembly, comprising a guide rail, a limiting member, a first connecting member, a first transmission shaft, a second connecting member, a second transmission shaft and a third connecting member, wherein the guide rail extends along the first direction, the limiting member is arranged at one end of the guide rail along the first direction, and the first connecting member is connected to the screw rod. The nut is connected and is slidably connected to the guide rail. The first connecting member slides relative to the guide rail. The first transmission shaft and the second transmission shaft are spaced apart along the second direction and both extend along the third direction. The first transmission shaft is respectively connected to the first connecting member and the second connecting member, and the second transmission shaft is respectively connected to the second connecting member and the third connecting member. The first transmission shaft rotates relative to the first connecting member, and the second transmission shaft rotates relative to the second connecting member and the third connecting member. In the first direction, at least part of the projection of the limit member is located on the third connecting member; a sealing connection assembly is connected to the third connecting member.

[0006] In an optional embodiment, the first connecting member has a sliding portion and a first connecting portion, the sliding portion is slidably connected to the guide rail, the first connecting portion is connected to one side of the sliding portion along the second direction, the first connecting portion is provided with a first connecting hole, and the first transmission shaft is passed through the first connecting hole.

[0007] In an optional embodiment, the second connecting member has a latch portion and a second connecting portion, the first transmission shaft is provided with a latch hole extending along the second direction, the latch portion is passed through the latch hole, the second connecting portion is connected to one end of the latch portion along the second direction, the second connecting portion is provided with a second connecting hole, the second transmission shaft is passed through the second connecting hole, and the central axis of the second connecting hole is arranged parallel to the central axis of the first connecting hole.

[0008] In an optional embodiment, both ends of the first transmission shaft along the third direction are rotatably connected to one of the first connection parts, and two first connection parts are symmetrically arranged at both ends of the third connection member along the third direction; both ends of the first transmission shaft along the third direction are inserted with one of the latch parts, and two of the latch parts are symmetrically arranged at both ends of the third connection member along the third direction; both ends of the second transmission shaft along the third direction are rotatably connected to one of the second connection parts, and two of the second connection parts are symmetrically arranged at both ends of the third connection member along the third direction.

[0009] In an optional embodiment, the second connecting member further includes an elastic adjustment portion, the pin portion at least partially protrudes from one end of the pin hole along the second direction away from the second connecting portion, the elastic adjustment portion is sleeved on the portion of the pin portion protruding from the pin hole, and the two ends of the elastic adjustment portion along the second direction respectively abut against the pin portion and the end of the pin hole.

[0010] In an optional embodiment, the sealing connection device also includes a frame, which extends along the first direction, and the guide rail is arranged on the frame. The transmission assembly also includes a guide member, which is connected to the first connection member and is slidably connected to the guide rail, and the guide member slides relative to the guide rail.

[0011] In an optional embodiment, the third connecting member has a third connecting portion and a limiting portion, the second transmission shaft is rotatably connected to the third connecting portion, the limiting portion is connected to one end of the third connecting portion along the first direction, and protrudes from the third connecting portion along the third direction, the sealing connection assembly is connected to the limiting portion, the limiting member is connected to the frame, and is located at one end of the guide rail close to the limiting portion along the first direction, and the limiting member protrudes from the frame along the third direction toward the direction close to the limiting portion, and in the first direction, at least a partial projection of the limiting member is located on the limiting portion.

[0012] In an optional embodiment, the frame is provided with a positioning hole, and the sealing connection assembly includes a flexible connector and a push plate, the flexible connector extends along the first direction and is passed through the positioning hole, the two ends of the flexible connector along the first direction are respectively connected to the third connector and the push plate, and the flexible connector can be deformed along the second direction.

[0013] In an optional embodiment, the drive assembly further includes a nut seat, the nut seat is connected to the first connecting member, the nut is connected to the nut seat, and the transmission assembly further includes an elastic support member, the elastic support member is extended along the first direction, in the first direction, one end of the elastic support member is connected to an end of the third connecting member away from the limit member, and the other end of the elastic support member is connected to the nut seat.

[0014] In a second aspect, the present application provides a vacuum system, comprising: a sealing connection device as described in any one of the aforementioned embodiments.

[0015] The sealing connection device of the present application has the following advantages: In the sealing connection device of the present application, the sealing connection assembly is used to compress the sealing ring of the vacuum chamber to achieve sealing of the vacuum chamber. During the process of the sealing connection assembly compressing the sealing ring, the driving member can drive the screw to rotate around the first direction so that the nut moves along the first direction on the screw, thereby driving the first connection member to slide relative to the guide rail in the first direction through the nut, and further driving the entire transmission assembly to move in the first direction through the first connection member, so as to drive the sealing connection assembly to move along the first direction to the position of the sealing ring through the transmission assembly. Since the limit member is arranged at one end of the guide rail in the first direction, and at least a portion of the projection of the limit member in the first direction is located on the third connection member, during the process of the transmission assembly moving in the first direction, the third connection member will abut against the limit member. At this time, the third connection member can no longer move in the first direction. However, under the driving action of the nut and the guiding and limiting action of the guide rail, the first connection member still slides in the first direction. At this time, the first connection member will move in the first direction relative to the third connection member. Since the first transmission shaft rotates relative to the first connecting member, and the second transmission shaft rotates relative to the second connecting member and the third connecting member, when the first connecting member moves relative to the third connecting member along the first direction, the first connecting member and the first transmission shaft rotate relative to each other, and the second connecting member further rotates along the third direction with the first transmission shaft. When the second connecting member rotates around the third direction, the distance between the end of the second connecting member connected to the first transmission shaft and the end of the second connecting member connected to the second transmission shaft in the second direction changes, thereby changing the distance between the first transmission shaft and the second transmission shaft in the second direction, and further changing the distance between the first connecting member and the third connecting member in the second direction, that is, the third connecting member can move relative to the first connecting member in the second direction, so that the third connecting member drives the sealing connection assembly to move along the second direction, thereby achieving the sealing connection assembly pressing the sealing ring. During this process, the movement of the sealing connection assembly can be decomposed into movement along the first direction and the second direction, that is, the sealing connection assembly will not perform non-positive movement. In this way, the sealing ring will only be subjected to positive pressure when compressed, so as to reduce the wear on the sealing ring, extend the service life of the sealing ring, reduce the friction on the sealing ring, and reduce the generation of dust particles. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0017] Figure 1A schematic diagram of the three-dimensional structure of the sealing connection device in this application is shown; Figure 2 A schematic diagram of the three-dimensional structure of the transmission assembly in this application is shown; Figure 3 Shows an exploded structural diagram of the transmission assembly in this application; Figure 4 shows a schematic cross-sectional structural diagram of the second connecting member in this application; Figure 5 A schematic diagram of the three-dimensional structure of the drive assembly, frame and sealing connection assembly in this application is shown.

[0018] Description of main component symbols: 100-driving assembly; 110-driving member; 120-screw rod; 130-nut; 140-nut seat; 200 - Transmission assembly; 210 - Guide rail; 220 - Limiting member; 230 - First connecting member; 231 - Sliding portion; 232 - First connecting portion; 2321 - First connecting hole; 240 - First transmission shaft; 241 - Latch hole; 250 - Second connecting member; 251 - Latch portion; 252 - Second connecting portion; 2521 - Second connecting hole; 253 - Elastic adjustment portion; 260 - Second transmission shaft; 270 - Third connecting member; 271 - Third connecting portion; 272 - Limiting member; 280 - Guide member; 290 - Elastic support member; 300-sealed connection assembly; 310-flexible connection piece; 320-push plate; 400-rack; 410-positioning hole; x-first direction; y-second direction; z-third direction. DETAILED DESCRIPTION

[0019] The following describes in detail embodiments of the present application. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application and are not to be construed as limiting the present application.

[0020] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0021] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. Throughout the description of this application, "plurality" means two or more, unless otherwise specifically defined.

[0022] In this application, unless otherwise expressly specified or limited, terms such as "mounted," "connected," "connect," and "fixed" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integration; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal connections between two components or interactions between two components. Those skilled in the art will understand the specific meanings of these terms in this application based on specific circumstances.

[0023] In this application, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0024] Reference Figure 1 as well as Figure 2 As shown, the sealing connection device involved in the embodiment of the present application has a first direction x, a second direction y and a third direction z, and the first direction x, the second direction y and the third direction z are perpendicular to each other. The sealing connection device includes: a drive assembly 100, a transmission assembly 200 and a sealing connection assembly 300.

[0025] Specifically, the driving assembly 100 includes a driving member 110, a screw rod 120 and a nut 130. The driving member 110 is connected to the screw rod 120 and is used to drive the screw rod 120 to rotate around the first direction x. The nut 130 is threadedly connected to the screw rod 120; the transmission assembly 200 includes a guide rail 210, a limit member 220, a first connecting member 230, a first transmission shaft 240, a second connecting member 250, a second transmission shaft 260 and a third connecting member 270. The guide rail 210 extends along the first direction x, the limit member 220 is arranged at one end of the guide rail 210 along the first direction x, the first connecting member 230 is connected to the nut 130, and is slidably connected to the guide rail 210, and the first connecting member 2 30 slides relative to the guide rail 210, the first transmission shaft 240 and the second transmission shaft 260 are arranged at intervals along the second direction y, and both extend along the third direction z, the first transmission shaft 240 is connected to the first connecting member 230 and the second connecting member 250, respectively, the second transmission shaft 260 is connected to the second connecting member 250 and the third connecting member 270, and the first transmission shaft 240 and the first connecting member 230 rotate relative to each other, the second transmission shaft 260 and the second connecting member 250 and the third connecting member 270 rotate relative to each other, in the first direction x, at least part of the projection of the limit member 220 is located on the third connecting member 270; the sealing connection assembly 300 is connected to the third connecting member 270.

[0026] It should be noted that the first direction x is Figure 1 The direction pointed by x is the second direction y. Figure 1 The direction y points to, and the third direction z is Figure 1 The direction indicated by z.

[0027] In the sealing connection device of the present application, the sealing connection assembly 300 is used to compress the sealing ring of the vacuum chamber to achieve sealing of the vacuum chamber. In the process of the sealing connection assembly 300 compressing the sealing ring, the driving member 110 can drive the screw rod 120 to rotate around the first direction x, so that the nut 130 moves along the first direction x on the screw rod 120, thereby driving the first connecting member 230 to slide relative to the guide rail 210 along the first direction x through the nut 130, and further driving the entire transmission assembly 200 to move along the first direction x through the first connecting member 230, so as to drive the sealing connection assembly 300 to move along the first direction x to the position of the sealing ring through the transmission assembly 200. Since the limit member 220 is arranged at one end of the guide rail 210 along the first direction x, and at least a portion of the projection of the limit member 220 in the first direction x is located on the third connecting member 270, therefore, during the movement of the transmission assembly 200 along the first direction x, the third connecting member 270 will abut against the limit member 220. At this time, the third connecting member 270 can no longer move along the first direction x, but under the driving action of the nut 130 and the guiding and limiting action of the guide rail 210, the first connecting member 230 still slides along the first direction x. At this time, the first connecting member 230 will move along the first direction x relative to the third connecting member 270. Since the first transmission shaft 240 and the first connecting member 230 rotate relative to each other, the second transmission shaft 260 and the second connecting member 250 and the third connecting member 270 rotate relative to each other. Thus, when the first connecting member 230 moves relative to the third connecting member 270 along the first direction x, the first connecting member 230 and the first transmission shaft 240 rotate relative to each other, and further the second connecting member 250 rotates along the third direction z with the first transmission shaft 240. When the second connecting member 250 rotates around the third direction z, the distance between one end of the second connecting member 250 connected to the first transmission shaft 240 and the end of the second connecting member 250 connected to the second transmission shaft 260 in the second direction y will change, thereby changing the distance between the first transmission shaft 240 and the second transmission shaft 260 in the second direction y, and further changing the distance between the first connecting member 230 and the third connecting member 270 in the second direction y, that is, the third connecting member 270 can move relative to the first connecting member 230 along the second direction y, so that the third connecting member 270 drives the sealing connection assembly 300 to move along the second direction y, thereby realizing the tightening of the sealing ring by the sealing connection assembly 300. During this process, the movement of the sealing connection assembly 300 can be decomposed into movement along the first direction x and the second direction y, that is, the sealing connection assembly 300 will not perform non-positive movement. In this way, the sealing ring will only be subjected to positive pressure when compressed, so as to reduce the wear on the sealing ring, extend the service life of the sealing ring, reduce the friction on the sealing ring, and reduce the generation of dust particles.

[0028] Reference Figure 2 as well as Figure 3 As shown, the first connecting member 230 has a sliding portion 231 and a first connecting portion 232. The sliding portion 231 is slidably connected to the guide rail 210. The first connecting portion 232 is connected to one side of the sliding portion 231 along the second direction y. The first connecting portion 232 is provided with a first connecting hole 2321, and the first transmission shaft 240 is passed through the first connecting hole 2321.

[0029] In this embodiment, since the first transmission shaft 240 is passed through the first connection hole 2321 of the first connection part 232, the sliding part 231 can be connected to the first transmission shaft 240 through the first connection part 232, so that the first transmission shaft 240 can move along the first direction x with the sliding part 231, and the first transmission shaft 240 can rotate relative to the first connection part 232.

[0030] Continue to refer to Figure 2 as well as Figure 3 As shown, the second connecting member 250 has a latch portion 251 and a second connecting portion 252, the first transmission shaft 240 is provided with a latch hole 241 extending along the second direction y, the latch portion 251 is passed through the latch hole 241, the second connecting portion 252 is connected to one end of the latch portion 251 along the second direction y, the second connecting portion 252 is provided with a second connecting hole 2521, the second transmission shaft 260 is passed through the second connecting hole 2521, and the central axis of the second connecting hole 2521 is arranged parallel to the central axis of the first connecting hole 2321.

[0031] In this embodiment, since the first transmission shaft 240 is provided with a pin hole 241 extending along the second direction y, and the pin portion 251 is passed through the pin hole 241, when the first transmission shaft 240 rotates about the third direction z, the second connecting member 250 and the first transmission shaft 240 will not rotate relative to each other, but will rotate about the third direction z together with the first transmission shaft 240, thereby realizing the rotation of the second connecting member 250 about the third direction z. Since the second connecting portion 252 is provided with a second connecting hole 2521, the second transmission shaft 260 is passed through the second connecting hole 2521. In this way, when the second connecting portion 252 rotates about the third direction z, the second connecting member 250 and the third connecting member 270 can rotate relative to each other, thereby realizing the movement of the third connecting member 270 along the second direction y.

[0032] Reference Figure 2As shown, the first connecting portion 232, the first transmission shaft 240, the second connecting member 250 and the second transmission shaft 260 form a linked link mechanism, so that the third connecting member 270 can be moved along the second direction y through the linkage of the link mechanism. The transmission assembly 200 includes a plurality of first transmission shafts 240, and the plurality of first transmission shafts 240 are arranged in parallel and at intervals along the first direction x; the transmission assembly 200 includes a plurality of second transmission shafts 260, and the plurality of second transmission shafts 260 are arranged in parallel and at intervals along the first direction x; each first transmission shaft 240 is connected to the transmission assembly 200. The first connecting part 232 is connected to the sliding part 231, each first transmission shaft 240 is connected to a second transmission shaft 260 through a second connecting member 250, and each second transmission shaft 260 is connected to the third connecting member 270, so as to simultaneously transmit the third connecting member 270 through multiple groups of connecting rod mechanisms spaced apart along the first direction x, thereby improving the consistency of movement of the third connecting member 270, improving the movement accuracy of the third connecting member 270, and further reducing the possibility of non-positive movement of the sealing connection assembly 300.

[0033] Continue to refer to Figure 2 As shown, both ends of the first transmission shaft 240 along the third direction z are rotatably connected to a first connection portion 232, and the two first connection portions 232 are symmetrically arranged at both ends of the third connection member 270 along the third direction z; both ends of the first transmission shaft 240 along the third direction z are inserted with a latch portion 251, and the two latch portions 251 are symmetrically arranged at both ends of the third connection member 270 along the third direction z; both ends of the second transmission shaft 260 along the third direction z are rotatably connected to a second connection portion 252, and the two second connection portions 252 are symmetrically arranged at both ends of the third connection member 270 along the third direction z.

[0034] In this embodiment, since the first connection parts 232 at both ends of the first transmission shaft 240 along the third direction z are symmetrically arranged at both ends of the third connection member 270 along the third direction z, the pin parts 251 at both ends of the first transmission shaft 240 along the third direction z are symmetrically arranged at both ends of the third connection member 270 along the third direction z, and the second connection parts 252 at both ends of the second transmission shaft 260 along the third direction z are symmetrically arranged at both ends of the third connection member 270 along the third direction z, in this way, the third connection member 270 can be symmetrically provided with a connecting rod mechanism at both ends along the third direction z, so as to improve the movement consistency of the third connection member 270 at various positions along the third direction z, improve the movement accuracy of the third connection member 270, and further reduce the possibility of non-positive movement of the sealing connection assembly 300.

[0035] Reference Figure 4As shown, the second connecting member 250 also includes an elastic adjustment portion 253, and the pin portion 251 at least partially protrudes from one end of the pin hole 241 along the second direction y away from the second connecting portion 252. The elastic adjustment portion 253 is sleeved on the portion of the pin portion 251 protruding from the pin hole 241, and the two ends of the elastic adjustment portion 253 along the second direction y respectively abut against the end of the pin portion 251 and the pin hole 241.

[0036] In this embodiment, since the two ends of the elastic adjustment portion 253 along the second direction y are respectively abutted against the ends of the latch portion 251 and the latch hole 241, the latch portion 251 can be limited by the elastic adjustment portion 253, thereby improving the connection stability between the latch portion 251 and the first transmission shaft 240. At the same time, when the parallelism between the first transmission shaft 240 and the second transmission shaft 260 exceeds a preset range, the elastic action of the elastic adjustment portion 253 can be used for self-adjustment to adjust the relative position of the latch portion 251 and the latch hole 241 in the second direction y, so that the first transmission shaft 240 can always remain parallel to the second transmission shaft 260, so as to improve the movement consistency of various parts of the third connecting member 270, and further reduce the possibility of non-positive movement of the sealing connection assembly 300.

[0037] Reference Figure 2 as well as Figure 5 As shown, the sealing connection device also includes a frame 400, which is extended along the first direction x, and the guide rail 210 is set on the frame 400. The transmission assembly 200 also includes a guide member 280, which is connected to the first connecting member 230 and is slidably connected to the guide rail 210. The guide member 280 slides relative to the guide rail 210.

[0038] In this embodiment, the guide rail 210 can be supported by the frame 400. At the same time, the first connecting member 230 is driven to move along the first direction x by the sliding of the guide member 280 relative to the guide rail 210, so that the transmission assembly 200 can move along the first direction x, so that the sealing connection assembly 300 can move along the first direction x under the drive of the transmission assembly 200.

[0039] Reference Figure 1 、 Figure 3 as well as Figure 5As shown, the third connecting member 270 has a third connecting portion 271 and a limiting portion 272, the second transmission shaft 260 is rotatably connected to the third connecting portion 271, the limiting portion 272 is connected to one end of the third connecting portion 271 along the first direction x, and protrudes from the third connecting portion 271 along the third direction z, the sealing connection assembly 300 is connected to the limiting portion 272, the limiting member 220 is connected to the frame 400, and is located at one end of the guide rail 210 close to the limiting portion 272 along the first direction x, and the limiting member 220 protrudes from the frame 400 along the third direction z toward the direction close to the limiting portion 272. In the first direction x, at least part of the projection of the limiting member 220 is located on the limiting portion 272.

[0040] In this embodiment, since the second transmission shaft 260 is rotatably connected to the third connection portion 271, the third connection portion 271 can move along the first direction x and the third direction z under the linkage action of the connecting rod mechanism, so that the third connection member 270 can drive the sealing connection assembly 300 to move along the first direction x and the third direction z, thereby achieving the compression of the sealing ring. Since the limiting portion 272 protrudes from the third connection portion 271 along the third direction z, the limiting member 220 is located at one end of the guide rail 210 close to the limiting portion 272 along the first direction x, and the limiting portion 220 is located at one end of the guide rail 210 close to the limiting portion 272 along the first direction x, and the limiting portion 220 is located at one end of the guide rail 210 close to the limiting portion 272 along the first direction x, and the limiting portion 220 is located at the The member 220 protrudes from the frame 400 along the third direction z toward the direction close to the limit portion 272. In this way, when the third connecting member 270 moves along the first direction x, the limit portion 272 will counteract the limit member 220 to limit the movement of the third connecting member 270 along the first direction x through the limit member 220, and further enable the third connecting member 270 to move along the second direction y under the limiting action of the limit member 220 and the linkage action of the connecting rod mechanism, thereby realizing the movement of the sealing connection assembly 300 along the first direction x and the third direction z.

[0041] Reference Figure 2 As shown, the drive assembly 100 also includes a nut seat 140, which is connected to the first connecting member 230, and the nut 130 is connected to the nut seat 140. The transmission assembly 200 also includes an elastic support member 290, which is extended along the first direction x. In the first direction x, one end of the elastic support member 290 is connected to an end of the third connecting member 270 away from the limiting member 220, and the other end of the elastic support member 290 is connected to the nut seat 140.

[0042] In this embodiment, since the nut seat 140 is connected to the first connecting member 230, the nut 130 is connected to the nut seat 140. In this way, when the nut 130 moves along the first direction x on the screw rod 120, the first connecting member 230 can be driven to move along the first direction x by the nut 130 to realize the movement of the transmission assembly 200 in the first direction x. When the driving member 110 rotates forward, the nut 130 can move on the screw rod 120 along the first direction x toward the direction close to the limit member 220, so as to realize the compression of the sealing connection assembly 300 on the sealing ring. When the compression state of the sealing ring needs to be released, the driving member 110 can be reversed. At this time, the nut 130 moves along the first direction x away from the limit member 220, and the first connecting member 230 is synchronously moved away from the limit member 220 under the drive of the nut 130. The connecting rod mechanism generates reverse movement under the drive of the first connecting member 230. Under the action of the third connecting member 270, the sealing connection assembly 300 first completes the reverse displacement in the second direction y, and then performs reverse movement in the first direction x. In the first direction x, since one end of the elastic support member 290 is connected to the end of the third connecting member 270 away from the limit member 220, and the other end of the elastic support member 290 is connected to the nut seat 140, when the third connecting member 270 moves in the reverse direction under the drive of the connecting rod mechanism, the elastic support member 290 can provide buffering support to the third connecting member 270, effectively suppressing its movement amplitude and reducing the risk of structural impact. At the same time, when the third connecting member 270 moves forward under the drive of the connecting rod mechanism, the third connecting member 270 can also be supported by the elastic support member 290 to ensure that the third connecting member 270 can move along the second direction y under the drive of the connecting rod mechanism, so as to improve the compression stability of the sealing connection assembly 300 on the sealing ring.

[0043] Reference Figure 5 As shown, the sealing connection assembly 300 includes a flexible connector 310 and a push plate 320. The flexible connector 310 extends along the first direction x, and the two ends of the flexible connector 310 along the first direction x are respectively connected to the third connector 270 and the push plate 320. The flexible connector 310 can be deformed along the second direction y.

[0044] Specifically, in this embodiment, the push plate 320 is used to tighten the sealing ring, and the push plate 320 can be connected to the third connecting member 270 through the flexible connecting member 310, so that the push plate 320 can move with the third connecting member 270, and the driving member 110 is installed at one end of the frame 400 along the first direction x, and the end of the frame 400 away from the driving member 110 along the first direction x is provided with a positioning hole 410, and the flexible connecting member 310 is passed through the positioning hole 410 along the first direction x to guide the movement of the flexible connecting member 310 along the first direction x through the positioning hole 410, thereby improving the directional accuracy of the push plate 320 moving along the first direction x. At the same time, during the movement of the third connecting member 270 along the second direction y, the flexible connecting member 310 can resist the hole wall of the positioning hole 410 and deform, so that the flexible connecting member 310 can drive the push plate 320 to move along the second direction y.

[0045] The vacuum system involved in the embodiment of the present application includes: the above-mentioned sealing connection device.

[0046] In the vacuum system of the present application, since the above-mentioned sealing connection device can optimize the compression method of the sealing ring of the vacuum chamber, the wear of the sealing ring can be reduced, so that the vacuum system of the present application has better sealing performance and a longer service life.

[0047] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and features of different embodiments or examples without contradiction.

[0048] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application.

Claims

1. A sealing connection device, characterized in that: It has a first direction, a second direction and a third direction, wherein the first direction, the second direction and the third direction are perpendicular to each other, and the sealing connection device includes: A drive assembly, comprising a drive member, a screw rod and a nut, wherein the drive member is connected to the screw rod and is used to drive the screw rod to rotate in a first direction, and the nut is threadedly connected to the screw rod; The transmission assembly includes a guide rail, a limit member, a first connecting member, a first transmission shaft, a second connecting member, a second transmission shaft and a third connecting member, wherein the guide rail extends along the first direction, the limit member is arranged at one end of the guide rail along the first direction, the first connecting member is connected to the nut and is slidably connected to the guide rail, the first connecting member slides relative to the guide rail, the first transmission shaft and the second transmission shaft are spaced apart along the second direction and both extend along the third direction, the first transmission shaft is respectively connected to the first connecting member and the second connecting member, the second transmission shaft is respectively connected to the second connecting member and the third connecting member, and the first transmission shaft rotates relative to the first connecting member, the second transmission shaft rotates relative to the second connecting member and the third connecting member, and in the first direction, at least a partial projection of the limit member is located on the third connecting member; The sealing connection assembly is connected to the third connection member.

2. The sealing connection device according to claim 1, characterized in that: The first connecting member has a sliding portion and a first connecting portion. The sliding portion is slidably connected to the guide rail. The first connecting portion is connected to one side of the sliding portion along the second direction. The first connecting portion is provided with a first connecting hole. The first transmission shaft is passed through the first connecting hole.

3. The sealing connection device according to claim 2, characterized in that: The second connecting member has a latch portion and a second connecting portion, the first transmission shaft is provided with a latch hole extending along the second direction, the latch portion is passed through the latch hole, the second connecting portion is connected to one end of the latch portion along the second direction, the second connecting portion is provided with a second connecting hole, the second transmission shaft is passed through the second connecting hole, and the central axis of the second connecting hole is arranged parallel to the central axis of the first connecting hole.

4. The sealing connection device according to claim 3, characterized in that: Both ends of the first transmission shaft along the third direction are rotatably connected to one of the first connecting parts, and the two first connecting parts are symmetrically arranged at both ends of the third connecting member along the third direction; A latch portion is inserted at each end of the first transmission shaft along the third direction, and the two latch portions are symmetrically arranged at both ends of the third connecting member along the third direction; Both ends of the second transmission shaft along the third direction are rotatably connected to one of the second connecting parts, and two second connecting parts are symmetrically arranged at both ends of the third connecting member along the third direction.

5. The sealing connection device according to claim 3, characterized in that: The second connecting member further includes an elastic adjustment portion, wherein the latch portion at least partially protrudes from one end of the latch hole along the second direction away from the second connecting portion, the elastic adjustment portion is sleeved on the portion of the latch portion protruding from the latch hole, and both ends of the elastic adjustment portion along the second direction respectively abut against the latch portion and the end portion of the latch hole.

6. The sealing connection device according to claim 1, characterized in that: The sealing connection device also includes a frame, which extends along the first direction, and the guide rail is arranged on the frame. The transmission assembly also includes a guide member, which is connected to the first connection member and is slidably connected to the guide rail, and the guide member slides relative to the guide rail.

7. The sealing connection device according to claim 6, characterized in that: The third connecting member has a third connecting portion and a limiting portion, the second transmission shaft is rotatably connected to the third connecting portion, the limiting portion is connected to one end of the third connecting portion along the first direction, and protrudes from the third connecting portion along the third direction, the sealing connection assembly is connected to the limiting portion, the limiting member is connected to the frame, and is located at one end of the guide rail close to the limiting portion along the first direction, and the limiting member protrudes from the frame along the third direction toward the direction close to the limiting portion, and in the first direction, at least a partial projection of the limiting member is located on the limiting portion.

8. The sealing connection device according to claim 6, characterized in that: The frame is provided with a positioning hole, and the sealing connection assembly includes a flexible connector and a push plate. The flexible connector extends along the first direction and is passed through the positioning hole. The two ends of the flexible connector along the first direction are respectively connected to the third connector and the push plate, and the flexible connector can be deformed along the second direction.

9. The sealing connection device according to claim 1, characterized in that: The driving assembly also includes a nut seat, the nut seat is connected to the first connecting member, and the nut is connected to the nut seat. The transmission assembly also includes an elastic support member, the elastic support member is extended along the first direction, and in the first direction, one end of the elastic support member is connected to the end of the third connecting member away from the limit member, and the other end of the elastic support member is connected to the nut seat.

10. A vacuum system, characterized in that: include: The sealed connection device according to any one of claims 1 to 9.

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